JPH1034091A - Roller for washing - Google Patents
Roller for washingInfo
- Publication number
- JPH1034091A JPH1034091A JP8208793A JP20879396A JPH1034091A JP H1034091 A JPH1034091 A JP H1034091A JP 8208793 A JP8208793 A JP 8208793A JP 20879396 A JP20879396 A JP 20879396A JP H1034091 A JPH1034091 A JP H1034091A
- Authority
- JP
- Japan
- Prior art keywords
- projections
- cleaning
- width
- cleaning roller
- roller
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Granted
Links
- 238000005406 washing Methods 0.000 title abstract description 7
- 238000004140 cleaning Methods 0.000 claims description 70
- 238000000034 method Methods 0.000 claims description 5
- 239000011148 porous material Substances 0.000 claims description 4
- DHKHKXVYLBGOIT-UHFFFAOYSA-N acetaldehyde Diethyl Acetal Natural products CCOC(C)OCC DHKHKXVYLBGOIT-UHFFFAOYSA-N 0.000 claims description 3
- 125000002777 acetyl group Chemical class [H]C([H])([H])C(*)=O 0.000 claims description 3
- 229920002554 vinyl polymer Polymers 0.000 claims description 3
- 230000000694 effects Effects 0.000 abstract description 19
- 239000002245 particle Substances 0.000 abstract description 16
- 239000011538 cleaning material Substances 0.000 description 5
- 230000000052 comparative effect Effects 0.000 description 5
- 238000011156 evaluation Methods 0.000 description 4
- 239000007788 liquid Substances 0.000 description 4
- XLYOFNOQVPJJNP-UHFFFAOYSA-N water Substances O XLYOFNOQVPJJNP-UHFFFAOYSA-N 0.000 description 4
- 238000012360 testing method Methods 0.000 description 3
- 239000006061 abrasive grain Substances 0.000 description 2
- 229910052782 aluminium Inorganic materials 0.000 description 2
- XAGFODPZIPBFFR-UHFFFAOYSA-N aluminium Chemical compound [Al] XAGFODPZIPBFFR-UHFFFAOYSA-N 0.000 description 2
- 238000007796 conventional method Methods 0.000 description 2
- 238000002474 experimental method Methods 0.000 description 2
- -1 for example Polymers 0.000 description 2
- 239000011521 glass Substances 0.000 description 2
- 238000005498 polishing Methods 0.000 description 2
- 230000002035 prolonged effect Effects 0.000 description 2
- 239000004677 Nylon Substances 0.000 description 1
- XUIMIQQOPSSXEZ-UHFFFAOYSA-N Silicon Chemical compound [Si] XUIMIQQOPSSXEZ-UHFFFAOYSA-N 0.000 description 1
- 230000003749 cleanliness Effects 0.000 description 1
- 239000000356 contaminant Substances 0.000 description 1
- 238000011109 contamination Methods 0.000 description 1
- 238000005520 cutting process Methods 0.000 description 1
- 230000002950 deficient Effects 0.000 description 1
- 239000003599 detergent Substances 0.000 description 1
- 238000010586 diagram Methods 0.000 description 1
- 239000000428 dust Substances 0.000 description 1
- 239000002649 leather substitute Substances 0.000 description 1
- 239000004973 liquid crystal related substance Substances 0.000 description 1
- 238000004519 manufacturing process Methods 0.000 description 1
- 239000000463 material Substances 0.000 description 1
- 229910052751 metal Inorganic materials 0.000 description 1
- 239000002184 metal Substances 0.000 description 1
- 150000002739 metals Chemical class 0.000 description 1
- 229920001778 nylon Polymers 0.000 description 1
- 239000003960 organic solvent Substances 0.000 description 1
- 239000004033 plastic Substances 0.000 description 1
- 229920003023 plastic Polymers 0.000 description 1
- 229910052710 silicon Inorganic materials 0.000 description 1
- 239000010703 silicon Substances 0.000 description 1
- 229920002994 synthetic fiber Polymers 0.000 description 1
- 239000012209 synthetic fiber Substances 0.000 description 1
- 238000010998 test method Methods 0.000 description 1
- 235000012431 wafers Nutrition 0.000 description 1
Landscapes
- Cleaning In General (AREA)
- Cleaning Or Drying Semiconductors (AREA)
Abstract
Description
【０００１】[0001]
【産業上の利用分野】本発明は、被洗浄体の表面を損傷
すること無く、効果の高い洗浄が可能であり、しかも長
時間の使用に安定した洗浄効果が発揮できる、ライフの
長い洗浄用ローラに関する。BACKGROUND OF THE INVENTION 1. Field of the Invention The present invention is intended for long-life cleaning, which enables highly effective cleaning without damaging the surface of the object to be cleaned, and can exhibit a stable cleaning effect for a long time use. About rollers.
【０００２】[0002]
【従来の技術】金属、ガラス、プラスチック等において
その表面を極めて精度の高い面、所謂鏡面仕上げに仕上
げる為に、旋盤、砥石、あるいは遊離砥粒を用いて段階
的に高精度に仕上げていく場合、各段階における切削
屑、研磨屑、砥石あるいは空気中又は研磨液中の塵埃、
夾雑物が次工程に至るまでの残留粒子類を各段階毎に完
全に除去する必要がある。2. Description of the Related Art When finishing surfaces of metals, glass, plastics, etc. with extremely high precision, that is, so-called mirror finishes, using a lathe, a grindstone, or free abrasive grains in a stepwise manner. , Cutting chips in each stage, polishing debris, whetstone or dust in air or polishing liquid,
It is necessary to completely remove the residual particles until the contaminants reach the next step in each step.
【０００３】従来これ等の付着物の洗浄除去には細い棒
状の中芯の周囲に合成繊維、例えばナイロンのモノフィ
ラメントを多数植毛した洗浄用ブラシローラや外周にス
ェード調合成皮革を貼付した円筒状ローラを用い、洗浄
用の液体、例えば水、洗剤を含んだ水、あるいは有機溶
剤等を連続的に供給しつつ、該ローラを回転させて被洗
浄体の表面を擦過し付着物を除去する方法がとられてい
た。しかしこれ等従来のローラは親水性に乏しい上に剛
性が強く、これ等を回転させて被洗浄体の表面を擦過し
た場合、その毛先や脱落物が被洗浄体を損傷したり汚染
したりする欠点を有し、洗浄効果も不十分で残留粒子を
完全に除去する能力に欠けていた。[0003] Conventionally, to remove such deposits, a brush roller for cleaning in which a large number of synthetic fibers, for example, nylon monofilaments are planted around a thin rod-shaped core, and a cylindrical roller in which a suede-like synthetic leather is adhered to the outer periphery. While continuously supplying a cleaning liquid, for example, water, water containing a detergent, or an organic solvent, a method of rotating the roller and rubbing the surface of the object to be cleaned to remove deposits is used. Had been taken. However, these conventional rollers have poor hydrophilicity and high rigidity, and when the rollers are rotated to rub the surface of the object to be cleaned, the hair tips or falling objects may damage or contaminate the object to be cleaned. However, the cleaning effect was insufficient and the ability to completely remove the residual particles was lacking.
【０００４】そこで発明者等は、親水性及び柔軟性に富
み、擦過する際に被洗浄体に与える損傷が極めて少なく
且つ優れた洗浄効果を有するものとして、ポリビニルア
セタール系（以下ＰＶＡｔと略記する）多孔質体を素材
とし、その表面に突起を多数設けた洗浄用ローラを考案
し、これを用いる洗浄方法を既に提案している。またそ
の後、洗浄面である突起をスパイラル状に配列すること
により、より洗浄効果の高い改善案についても提案され
ている。Accordingly, the inventors of the present invention have considered polyvinyl acetal (hereinafter abbreviated as PVAt) as having high hydrophilicity and flexibility, having very little damage to the object to be cleaned when rubbing and having an excellent cleaning effect. A cleaning roller using a porous body as a material and having a large number of projections on its surface has been devised, and a cleaning method using the roller has already been proposed. Further, after that, an improvement plan with a higher cleaning effect has been proposed by arranging the projections as cleaning surfaces in a spiral shape.
【０００５】[0005]
【発明が解決しようとする課題】前記従来の方法でも、
一般的な洗浄分野における洗浄材料については十分に機
能するものであったが、近年、シリコンウェハー等の製
造工程において高洗浄度を要求される洗浄分野における
洗浄材料としては、洗浄の均一性を解決する手段として
は、十分といえるものではなかった。In the above conventional method,
Although cleaning materials in the general cleaning field worked satisfactorily, in recent years cleaning materials in the cleaning field requiring high cleanliness in the manufacturing process of silicon wafers, etc., have solved uniform cleaning. The means of doing so was not sufficient.
【０００６】前記従来の方法では、突起の形状が円柱状
であるがために、ローラを回転させて被洗浄体の表面を
擦過した時に、突起が回転方向とは異なる方向にはねて
洗浄残しが生じてしまうということが起こり、そのた
め、被洗浄体の表面に極めて微量な斑模様が発生するこ
とがあった。また、この問題を解決するためにローラー
の長さ方向に溝を切ったものも考案したが、今度は被洗
浄体の表面を擦過した時に、粒子を払う力にムラが出来
てしまいかえって洗浄能力を低下させることになった。In the conventional method, since the shape of the projection is cylindrical, when the roller is rotated and the surface of the object to be cleaned is rubbed, the projection rebounds in a direction different from the rotation direction to leave the cleaning. Occurs, and therefore, a very small spot pattern may be generated on the surface of the object to be cleaned. In order to solve this problem, a roller with a groove in the length direction was also devised, but this time, when the surface of the object to be cleaned was rubbed, the power to disperse the particles was uneven, and the cleaning ability was rather changed. Was to be reduced.
【０００７】また洗浄ムラ以外でも、比較的多くの洗浄
時間を要するものである為、より短時間で且つ高精度な
洗浄効果を得る洗浄材料が求められていた。[0007] In addition to cleaning unevenness, since a relatively long cleaning time is required, there has been a demand for a cleaning material which can achieve a cleaning effect in a shorter time and with higher accuracy.
【０００８】また、洗浄用ローラの回転数が大きい洗浄
条件下での使用、被洗浄物との接触圧力が高い洗浄条件
下での使用、あるいは要求洗浄度としてはそれ程高くは
ないが、その分長期間使用する用途、例えば液晶用硝子
の洗浄工程等においては、従来の洗浄用ローラの洗浄面
である突起の形状では、強度が不十分であり、突起が洗
浄中に欠損、脱落する等の問題が発生し、長時間その洗
浄効果を維持する事が出来ない、あるいは、場合により
この脱落した洗浄材料が逆汚染の原因となる様な問題も
発生している。[0008] Further, use under cleaning conditions in which the number of rotations of the cleaning roller is large, use under cleaning conditions in which the contact pressure with the object to be cleaned is high, or the required degree of cleaning is not so high, In applications that are used for a long period of time, for example, in the process of cleaning glass for liquid crystal, etc., the shape of the projection, which is the cleaning surface of the conventional cleaning roller, has insufficient strength, and the projection loses or falls off during cleaning. A problem has occurred, and the cleaning effect cannot be maintained for a long time, or in some cases, the dropped cleaning material causes a problem of reverse contamination.
【０００９】本発明の目的は、上記従来の問題点に留意
し、短時間で均一且つ高精度な洗浄効果を得、しかも長
時間その洗浄効果を維持する事が可能な洗浄材料を提供
することにある。SUMMARY OF THE INVENTION An object of the present invention is to provide a cleaning material capable of obtaining a uniform and highly accurate cleaning effect in a short time and maintaining the cleaning effect for a long time, while paying attention to the above conventional problems. It is in.
【００１０】[0010]
【課題を解決するための手段】これらの問題を解決する
べく、洗浄面である突起の形状について鋭意研究を行な
った結果、本発明は洗浄用ローラの表面に形成された洗
浄面である多数の突起の形状を、長円状にし、かつ一つ
の列において複数個配設させるとともに、一列上の突起
間に生じた隙間の位置には、次の列において、必ず突起
を配設させることにより二つの問題を解決させた。In order to solve these problems, the present inventors have made intensive studies on the shape of the projections, which are the cleaning surfaces, and as a result, the present invention has found that a large number of cleaning surfaces formed on the surface of the cleaning roller are provided. By making the shape of the projections elliptical and arranging a plurality of projections in one row, the projections must be arranged in the next row at the positions of the gaps formed between the projections in one row. Solved one problem.
【００１１】一つは、突起が円柱状である時には理論的
には洗い残しがないように、同一列上の突起間に生じた
隙間の位置には次の突起が配設されていたが、ローラを
回転させて被洗浄体の表面を擦過した時に、突起が回転
方向とは異なる方向にはねてしまうために実使用におい
ては洗い残しが生じることもあったが、長円状のもので
は回転方向にのみはねるので、理論的にも実使用におい
ても洗い残しがなくなったことである。One is that the next projection is disposed at the position of the gap formed between the projections on the same row, so that there is theoretically no residue when the projection is cylindrical. When the roller is rotated and the surface of the object to be cleaned is rubbed, the projections bounce in a direction different from the rotation direction, so that in actual use, unwashed portions may occur. Since the springs only bounce in the direction of rotation, there is no wash residue in theory or in actual use.
【００１２】二つめは、溝切り形状では場所よって粒子
を払う力にムラがあったが、長円の長さをある範囲内で
設定することにより、どの突起でも粒子を払う力が同じ
ものになったことである。Secondly, in the grooved shape, the force for dispensing particles was uneven depending on the location, but by setting the length of the ellipse within a certain range, the force for dispensing particles was the same for any projection. It has become.
【００１３】長円状の突起の形状については、突起の幅
１に対して長さ２以上の比率で、高さが幅１に対して１
以下の比率でさらに、その幅は洗浄用ローラの外周に対
して１／１０から１／３０の比率で形成されており、そ
の上、該突起の位置が洗浄用ローラの回転軸に対して０
〜４５度ねじれの位置の範囲内の角度を持った位置に設
けたものが、前記問題点を解決する結論に達した。Regarding the shape of the elliptical projection, the height is 1 or more with respect to the width 1 at a ratio of 2 or more to the width 1 of the projection.
Further, the width is formed at a ratio of 1/10 to 1/30 with respect to the outer periphery of the cleaning roller at the following ratio, and furthermore, the position of the projection is 0 with respect to the rotation axis of the cleaning roller.
What is provided at a position having an angle within the range of the position twisted by 45 degrees has reached a conclusion that solves the above problem.
【発明の実施の形態】以下、本発明の実施の形態につ
き、実施例、比較例を挙げて説明する。DESCRIPTION OF THE PREFERRED EMBODIMENTS Embodiments of the present invention will be described below with reference to examples and comparative examples.
【００１４】[0014]
【実施例１】気孔率約９０％、平均気孔径約１３０μｍ
のＰＶＡｔ系多孔質体で、その半径が突起部分を含めて
６０ｍｍ、長さ１５０ｍｍのものを用いて、突起の長さ
を幅に対して変化させていった時の洗浄実験を行なった
ものである。試験方法はディスクに用いるアルミ円板を
遊離砥粒で最終研磨し、流水をもって粗洗浄したものを
検体として用い、本発明に係わる各種突起形状をもつ洗
浄用ローラを用いて洗浄実験を行なう。この時、洗浄液
は、粒子コントローラを行なった純水を用い、洗浄用ロ
ーラの前後でシャワー状に被洗浄体にかかる構造とし
た。実験条件は次の通りで、５回の試験の平均値をとっ
た。 アルミ円板の送り速度 ＝５ｍ／ｍｉｎ 洗浄用ローラの回転速度＝２００ＲＰＭ 接 圧 ＝１０ｇ／ｃｍ2 あらかじめ所定の粒子数を想定しておき、それに要した
時間と、一定時間ごとに突起をマイクロスコープにて観
察し、突起に欠損が発生するまでの時間によって評価を
行なった。結果を表１に示す。表１からわかるように、
突起の幅を１とした時の長さの比率が１を超えるものは
いずれも洗浄効果がでるまでの時間（以後、「効果時
間」と呼ぶことにする）が短縮されるという結果になっ
た。また、突起が欠落するまでの時間（以後、「ライ
フ」と呼ぶことにする）はいずれも長くなったことか
ら、突起の長さは幅に対して長いほうが、１つの突起が
１回に粒子を払い取る力が大きくなり、より多くの粒子
が短時間で除去されることが判明した。さらに、長さが
長い分だけ突起の回転方向に対する強度が増すので、ラ
イフアップにもつながることになる。Example 1 Porosity: about 90%, average pore diameter: about 130 μm
A cleaning experiment was performed using a PVAt-based porous material having a radius of 60 mm including a projection portion and a length of 150 mm, and changing the length of the projection with respect to the width. is there. The test method is as follows. The aluminum disk used for the disk is finally polished with loose abrasive grains and roughly washed with running water as a sample, and a cleaning experiment is performed using a cleaning roller having various projections according to the present invention. At this time, the cleaning liquid used was pure water subjected to a particle controller, and had a structure in which the cleaning liquid was applied to the object to be cleaned in a shower shape before and after the cleaning roller. The experimental conditions were as follows, and the average of five tests was taken. Feeding speed of aluminum disk = 5 m / min Rotation speed of cleaning roller = 200 RPM Contact pressure = 10 g / cm 2 A predetermined number of particles is assumed in advance, and the time required for the particle count and the projections are made at regular intervals. And the evaluation was performed by the time until the protrusions were defective. Table 1 shows the results. As can be seen from Table 1,
When the width ratio of the projections was 1 and the ratio of the lengths exceeded 1, the time required for the cleaning effect to be obtained (hereinafter, referred to as “effective time”) was shortened. . In addition, since the time required for a protrusion to be lost (hereinafter referred to as “life”) has been lengthened, the longer the length of the protrusion is, the longer the protrusion is in relation to the width. It has been found that the power to remove the particles increases and more particles are removed in a short time. Furthermore, the longer the length, the greater the strength in the rotation direction of the protrusion, which leads to a longer life.
【００１５】[0015]
【表１】 （注）＊は比較例であり、すべての数値はこれを基準にしたものである。 判定 ○＝効果が認められたもの △＝効果が比較例とほぼ同等であるもの ×＝効果が比較例より劣るもの （表２、表３についても同様の判定を行なった）[Table 1] (Note) * is a comparative example, and all numerical values are based on this. Judgment ○ = Effective effect was observed △ = Effect was almost equivalent to Comparative Example × = Effect was inferior to Comparative Example (Similar determination was made for Tables 2 and 3)
【００１６】[0016]
【実施例２】実施例１において効果のあった形状の洗浄
用ローラに対して下記条件にて試験および評価を行なっ
た。結果を表２に示す。下記条件以外は実施例１と同
様。 突起の高さ＝幅１に対して、高さの割合を０．６，０．
８，１．０，１．２，１．４と変化させたもの 表２からわかるように、突起の幅を１とした時の高さの
比率が１を超えないものついては、いずれの条件におい
ても効果時間が短縮されたが、比率が１を超えるものに
ついては、いずれも効果時間が長くなった。また、ライ
フにおいては突起の長さが長い分どの条件でも長くなる
という結果を示した。このことから、突起の高さは幅に
対する比率が１よりも小さいほうが、突起の、粒子を払
う力が大きくなるので洗浄効果が高まり、かつライフも
長くなることが判明した。Example 2 A test and an evaluation were performed on the cleaning roller having the shape effective in Example 1 under the following conditions. Table 2 shows the results. Except for the following conditions, it was the same as Example 1. The height ratio is 0.6, 0.
8, 1.0, 1.2, 1.4. As can be seen from Table 2, the ratio of the height when the width of the projection is 1 does not exceed 1, under any condition. The effect time was also shortened, but the effect time was prolonged in all cases where the ratio exceeded 1. In addition, the results show that the life is longer under any conditions because of the longer length of the protrusion. From this, it was found that when the ratio of the height of the projection to the width was smaller than 1, the force of the projection to remove particles was increased, so that the cleaning effect was enhanced and the life was prolonged.
【００１７】[0017]
【表２】 [Table 2]
【００１８】[0018]
【実施例３】実施例１及び実施例２の結果から効果のあ
った形状の洗浄用ローラに対して下記条件のものを用い
る以外は実施例１と同様にして試験及び評価を行なっ
た。結果を表１に示す。 突起の幅＝洗浄用ローラの直径に対して、１／３，１／
５，１／１０，１／１５，１／２０，１／３０と変化さ
せたもの これによると、突起の幅が直径の５分の１よりも大きい
ものは、突起の幅が広すぎるために本来の「粒子を払
う」という行為が行われずに、粒子を引きずる形になっ
てしまうために粒子が洗浄用ローラの組織に入り込みや
すくなり、突起は欠損しないものの、目詰まりを起こし
てしまうことがわかった。また、突起の幅が直径２０分
の１よりも小さいものは、逆に粒子を払う力が弱いため
に洗浄効果が低下するということになってしまう。Example 3 A test and an evaluation were performed in the same manner as in Example 1 except that the cleaning roller having the effective shape based on the results of Examples 1 and 2 was used under the following conditions. Table 1 shows the results. Protrusion width = 1/3, 1/1, with respect to the diameter of the cleaning roller
5, 1/10, 1/15, 1/20, 1/30. According to this, when the width of the projection is larger than 1/5 of the diameter, the width of the projection is too large. The original `` pay-out '' action is not performed, and the particles become dragged, making it easier for the particles to enter the tissue of the cleaning roller.The protrusions do not lose, but they can cause clogging. all right. On the other hand, when the width of the projection is smaller than 1/20 in diameter, the cleaning effect is reduced because the force for removing particles is weak.
【００１９】[0019]
【表３】 [Table 3]
【００２０】[0020]
【比較例】従来の、突起が円形状のものを用いて評価を
行なった。条件は実施例１と同じである。結果を表１に
示す。また、突起の配置のねじれ角度についてはローラ
の回転軸に対し、４５度以上あればその作用に差がな
い。[Comparative Example] Evaluation was performed using a conventional protrusion having a circular shape. The conditions are the same as in the first embodiment. Table 1 shows the results. Further, regarding the torsion angle of the arrangement of the protrusions, there is no difference in the operation if the angle is 45 degrees or more with respect to the rotation axis of the roller.
【００２１】[0021]
【発明の効果】本発明によれば、、短時間で均一且つ高
精度な洗浄効果が得られ、、また突起の強度が向上する
ため、長時間その洗浄効果を維持することが可能とな
る。According to the present invention, a uniform and highly accurate cleaning effect can be obtained in a short time, and the strength of the projections is improved, so that the cleaning effect can be maintained for a long time.
【図１】本発明の洗浄用ローラの説明図である。 （ａ）洗浄用ローラの正面図である。 （ｂ）（ａ）のＡ−Ａ´断面図である。FIG. 1 is an explanatory view of a cleaning roller of the present invention. (A) It is a front view of the roller for washing | cleaning. (B) It is AA 'sectional drawing of (a).
【図２】本発明の洗浄用ローラの他の例の説明図であ
る。FIG. 2 is an explanatory view of another example of the cleaning roller of the present invention.
【図３】洗浄時における、突起の形状変化の説明図であ
る。FIG. 3 is an explanatory diagram of a change in the shape of a projection during cleaning.
１ 洗浄用ローラ ２ 突起 1 Cleaning roller 2 Projection
Claims (7)
触せしめ、且つ、回転して洗浄を施す洗浄用ローラにお
いて、 前記洗浄用ローラを、弾性を有する多孔質体により構成
するとともに、前記洗浄用ローラの表面に多数の突起を
配設し、該突起の頂部が仮想平面を形成して前記洗浄に
用いる面を形成するとともに、 前記突起の形状が長円形をなし、円周方向の幅と長さの
比が幅１に対して長さが２以上あることを特徴とする洗
浄用ローラ。1. A cleaning roller for bringing a surface to be used for cleaning into contact with a surface to be cleaned of a body to be cleaned and rotating and performing cleaning, wherein the cleaning roller is made of an elastic porous body. A plurality of projections are arranged on the surface of the cleaning roller, and the tops of the projections form a virtual plane to form a surface used for the cleaning; A cleaning roller having a width to length ratio of 1 to 2 or more.
をローラの軸線に対して０〜４５°の角度で設けたこと
を特徴とする、請求項１記載の洗浄用ローラ。2. The cleaning roller according to claim 1, wherein the projections are formed in a plurality of rows, and the rows of the projections are provided at an angle of 0 to 45 ° with respect to the axis of the roller. .
し１／１０〜１／３６の寸法の範囲で、高さが幅１に対
し１以下の比率で形成されていることを特徴とする、請
求項１および２記載の洗浄用ローラ。3. The method according to claim 1, wherein the width of the protrusion is in the range of 1/10 to 1/36 of the diameter of the cleaning roller, and the height is formed at a ratio of 1 or less to the width of 1. The cleaning roller according to claim 1, wherein:
の隙間を、回転方向で次の列の突起が補完していること
を特徴とする、請求項２および３記載の洗浄用ローラ。4. The cleaning roller according to claim 2, wherein in the row of the projections, the gap between the projections in one row is complemented by the projections in the next row in the rotation direction. .
ラの回転軸に対して外方に凸の曲面形状、あるいは半円
状であることを特徴とする、請求項１，２，３および４
記載の洗浄用ローラ。5. A method according to claim 1, wherein a surface of said projection contacting the object to be cleaned has a curved surface shape or a semicircle shape which is outwardly convex with respect to the rotation axis of the roller. 3 and 4
A cleaning roller as described.
アセタール系多孔質体である、請求項１，２，３，４及
び５記載の洗浄用ローラ。6. The cleaning roller according to claim 1, wherein said porous body having elasticity is a polyvinyl acetal-based porous body.
気孔率８０〜９５％、平均気孔径６０〜４００μ、およ
び湿潤状態での３０％圧縮応力が１５〜１５０ｇ／ｃｍ
2 である請求項１，２，３，４，５および６記載の洗浄
用ローラ。7. The polyvinyl acetal-based porous material according to claim 1,
Porosity 80-95%, average pore size 60-400μ, and 30% compressive stress in wet state 15-150g / cm
2. The term claim 2, 3, 4, 5 and 6 cleaning roller according.
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP20879396A JP3680185B2 (en) | 1996-07-19 | 1996-07-19 | Cleaning roller |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP20879396A JP3680185B2 (en) | 1996-07-19 | 1996-07-19 | Cleaning roller |
Publications (2)
| Publication Number | Publication Date |
|---|---|
| JPH1034091A true JPH1034091A (en) | 1998-02-10 |
| JP3680185B2 JP3680185B2 (en) | 2005-08-10 |
Family
ID=16562217
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP20879396A Expired - Fee Related JP3680185B2 (en) | 1996-07-19 | 1996-07-19 | Cleaning roller |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JP3680185B2 (en) |
Cited By (8)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| WO1999060888A1 (en) * | 1998-05-22 | 1999-12-02 | Aion Co., Ltd. | Cleaning rotary brush |
| WO2000051752A1 (en) * | 1999-02-26 | 2000-09-08 | Aion Co., Ltd. | Cleaning sponge roller |
| US6502273B1 (en) | 1996-11-08 | 2003-01-07 | Kanebo, Ltd. | Cleaning sponge roller |
| JP2009066527A (en) * | 2007-09-13 | 2009-04-02 | Nec Electronics Corp | Washing roller and washing apparatus |
| WO2011103538A3 (en) * | 2010-02-22 | 2011-11-17 | Entegris,Inc. | Post-cmp cleaning brush |
| US8533895B2 (en) | 2003-08-08 | 2013-09-17 | Entegris, Inc. | Methods and materials for making a monolithic porous pad cast onto a rotatable base |
| US9820561B2 (en) | 2005-12-06 | 2017-11-21 | Entegris, Inc. | Molded rotatable base for a porous pad |
| US10790167B2 (en) | 2014-02-20 | 2020-09-29 | Entegris, Inc. | Nodule ratios for targeted enhanced cleaning performance |
Families Citing this family (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| KR102443763B1 (en) | 2019-01-30 | 2022-09-20 | 주식회사 엘지에너지솔루션 | Apparatus And Method For Cleaning Rolling Roll |
-
1996
- 1996-07-19 JP JP20879396A patent/JP3680185B2/en not_active Expired - Fee Related
Cited By (14)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| US6502273B1 (en) | 1996-11-08 | 2003-01-07 | Kanebo, Ltd. | Cleaning sponge roller |
| US6684447B2 (en) | 1996-11-08 | 2004-02-03 | Aion Co., Ltd. | Cleaning sponge roller |
| WO1999060888A1 (en) * | 1998-05-22 | 1999-12-02 | Aion Co., Ltd. | Cleaning rotary brush |
| WO2000051752A1 (en) * | 1999-02-26 | 2000-09-08 | Aion Co., Ltd. | Cleaning sponge roller |
| US8533895B2 (en) | 2003-08-08 | 2013-09-17 | Entegris, Inc. | Methods and materials for making a monolithic porous pad cast onto a rotatable base |
| US10040226B2 (en) | 2003-08-08 | 2018-08-07 | Entegris, Inc. | Methods and materials for making a monolithic porous pad cast onto a rotatable base |
| US9820561B2 (en) | 2005-12-06 | 2017-11-21 | Entegris, Inc. | Molded rotatable base for a porous pad |
| JP2009066527A (en) * | 2007-09-13 | 2009-04-02 | Nec Electronics Corp | Washing roller and washing apparatus |
| WO2011103538A3 (en) * | 2010-02-22 | 2011-11-17 | Entegris,Inc. | Post-cmp cleaning brush |
| CN102792424A (en) * | 2010-02-22 | 2012-11-21 | 恩特格里公司 | Post-CMP cleaning brush |
| US20130048018A1 (en) * | 2010-02-22 | 2013-02-28 | Entegris, Inc. | Post-cmp cleaning brush |
| JP2013520803A (en) * | 2010-02-22 | 2013-06-06 | インテグリス・インコーポレーテッド | Cleaning brush after CMP |
| TWI645914B (en) * | 2010-02-22 | 2019-01-01 | 美商恩特葛瑞斯股份有限公司 | A brush for cleaning of substrates following chemical mechanical polishing (post-cmp) of the substrates, a method of post cmp cleaning of a surface of a semiconductor wafer and a cylindrical foam roller for post cmp cleaning of wafers |
| US10790167B2 (en) | 2014-02-20 | 2020-09-29 | Entegris, Inc. | Nodule ratios for targeted enhanced cleaning performance |
Also Published As
| Publication number | Publication date |
|---|---|
| JP3680185B2 (en) | 2005-08-10 |
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