JPH1029893A - Formation of thin film and recording medium - Google Patents
Formation of thin film and recording mediumInfo
- Publication number
- JPH1029893A JPH1029893A JP18600796A JP18600796A JPH1029893A JP H1029893 A JPH1029893 A JP H1029893A JP 18600796 A JP18600796 A JP 18600796A JP 18600796 A JP18600796 A JP 18600796A JP H1029893 A JPH1029893 A JP H1029893A
- Authority
- JP
- Japan
- Prior art keywords
- thin film
- recording layer
- film
- dlc
- diamond
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Abandoned
Links
Landscapes
- Chemical Vapour Deposition (AREA)
- Manufacturing Of Magnetic Record Carriers (AREA)
- Crystals, And After-Treatments Of Crystals (AREA)
Abstract
Description
【０００１】[0001]
【発明の属する技術分野】本発明は、ＲＦプラズマＣＶ
Ｄ法により被着対象上にダイヤモンド状カーボン薄膜を
成膜する薄膜形成方法、及びこの薄膜形成方法によりダ
イヤモンド状カーボン薄膜を記録層上に成膜してなる記
録媒体に関する。TECHNICAL FIELD The present invention relates to an RF plasma CV.
The present invention relates to a thin film forming method for forming a diamond-like carbon thin film on a deposition target by a method D, and a recording medium formed by forming a diamond-like carbon thin film on a recording layer by the thin film forming method.
【０００２】[0002]
【従来の技術】従来、例えば、Ａｌのような被着対象面
の保護を目的として、ＲＦプラズマＣＶＤ法を用いた薄
膜形成方法により上記被着対象上にダイヤモンド構造を
持つ炭素系薄膜、いわゆるダイヤモンド状カーボン薄膜
を成膜させていた。2. Description of the Related Art Conventionally, a carbon-based thin film having a diamond structure on an object to be deposited, that is, a so-called diamond, by means of a thin film forming method using RF plasma CVD for the purpose of protecting a surface to be deposited such as Al. A carbon thin film was formed.
【０００３】例えば、原料にメタンガスを用いてダイヤ
モンド状カーボン薄膜を形成する従来の薄膜形成方法
は、被着対象面を備えたテストサンプルを減圧された処
理層内に設置し、ついでメタンガスを所定の流量で導入
し、ＲＦ電極に高周波を一定電力、一定時間印加し、ダ
イヤモンド状カーボン薄膜を成膜させていた。[0003] For example, in a conventional thin film forming method for forming a diamond-like carbon thin film using methane gas as a raw material, a test sample having a surface to be deposited is placed in a decompressed treatment layer, and then methane gas is supplied to a predetermined layer. It was introduced at a flow rate, and a high frequency was applied to the RF electrode at a constant power for a fixed time to form a diamond-like carbon thin film.
【０００４】[0004]
【発明が解決しようとする課題】ところで、テストサン
プルの被着対象面上に成膜されたダイヤモンド状カーボ
ン薄膜は、成膜後の残留応力が大きいため、膜剥がれを
生じてしまう場合がある。Incidentally, the diamond-like carbon thin film formed on the surface of the test sample to be adhered has a large residual stress after film formation, so that the film may be peeled off.
【０００５】そこで本発明は、上記被着対象面上に成膜
されるダイヤモンド状カーボン薄膜の膜剥がれを防ぎ、
上記被着対象面を長期にわたって保護できる薄膜形成方
法の提供を目的とする。また、記録層からのダイヤモン
ド状カーボン薄膜の膜剥がれを防ぎ、記録層を長期にわ
たって保護できる記録媒体の提供を目的とする。Therefore, the present invention prevents the diamond-like carbon thin film formed on the surface to be deposited from peeling off,
It is an object of the present invention to provide a method for forming a thin film capable of protecting the surface to be coated for a long time. Another object of the present invention is to provide a recording medium capable of preventing the diamond-like carbon thin film from peeling off from the recording layer and protecting the recording layer for a long period of time.
【０００６】[0006]
【課題を解決するための手段】本発明に係る薄膜形成方
法は、上記課題を解決するために、被着対象面にダイヤ
モンド状カーボン薄膜を成膜する薄膜形成方法により、
上記被着対象面に向かい硬さが小さくなるダイヤモンド
状カーボン薄膜を成膜させる。これにより、上記被着対
象面に成膜されたダイヤモンド状カーボン薄膜の剥がれ
は少なくなる。According to the present invention, there is provided a thin film forming method for forming a thin film of diamond-like carbon on a surface to be deposited.
A diamond-like carbon thin film having a lower hardness is formed on the surface to be deposited. Thereby, peeling of the diamond-like carbon thin film formed on the surface to be deposited is reduced.
【０００７】また、本発明に係る記録媒体は、記録層上
に上記記録層に向かい硬さが小さくなるダイヤモンド状
カーボン薄膜を成膜させる。In the recording medium according to the present invention, a diamond-like carbon thin film whose hardness decreases toward the recording layer is formed on the recording layer.
【０００８】[0008]
【発明の実施の形態】以下、本発明に係る薄膜形成方
法、及び記録媒体の実施の形態について図面を参照しな
がら説明する。DESCRIPTION OF THE PREFERRED EMBODIMENTS Embodiments of a thin film forming method and a recording medium according to the present invention will be described below with reference to the drawings.
【０００９】この実施の形態は、上記薄膜形成方法を適
用し、光磁気ディスクの記録層にダイヤモンド状カーボ
ン（Diamond like carbon、ＤＬＣ）薄膜からなるＤＬ
Ｃ保護膜を成膜する図１に示すような薄膜形成装置であ
る。In this embodiment, the above-described thin film forming method is applied, and the recording layer of the magneto-optical disk is formed of a DL-like diamond-like carbon (DLC) thin film.
This is a thin film forming apparatus for forming a C protective film as shown in FIG.
【００１０】この薄膜形成装置による上記光磁気ディス
クの記録層へのＤＬＣ薄膜の成膜は、上記光磁気ディス
クの記録層に浮上配置された記録用の磁気ヘッドが何ら
かの外的衝撃により、上記光磁気ディスクと接触する
か、あるいは、上記光磁気ディスクと上記磁気ヘッドと
の間に異物が混入した場合に記録層を保護するために有
効である。The DLC thin film is formed on the recording layer of the magneto-optical disk by the thin-film forming apparatus when the recording magnetic head floating above the recording layer of the magneto-optical disk is exposed to the light by a certain external impact. This is effective for protecting the recording layer when it comes into contact with the magnetic disk or when foreign matter enters between the magneto-optical disk and the magnetic head.
【００１１】この薄膜形成装置は、ＲＦ電源を有するプ
ラズマ気相成長（Chemical Vapor Deposition）法、い
わゆるＲＦプラズマＣＶＤ法を利用しており、減圧系で
原料気体に対して放電電圧を印加することでグロー放電
を起こし、すなわち原料気体をプラズマ化し、電子状態
を活性化させ磁気記録媒体の記録層の表面で分解・結合
等の化学反応を起こさせて薄膜を形成させることがで
き、上記原料気体には、例えばベンゼン、メタン、プロ
パン、エチレン、スチレン、トルエン等の炭素水素が用
いられる。This thin film forming apparatus utilizes a plasma vapor deposition (RFC) method having an RF power supply, that is, an RF plasma CVD method, and applies a discharge voltage to a source gas in a reduced pressure system. A glow discharge is generated, that is, the raw material gas is turned into plasma, the electronic state is activated, and a chemical reaction such as decomposition and bonding is caused on the surface of the recording layer of the magnetic recording medium to form a thin film. For example, hydrocarbons such as benzene, methane, propane, ethylene, styrene, and toluene are used.
【００１２】上記原料気体として例えばメタンガスを用
いて記録層までが形成された未完成の光磁気ディスク
（以下、テストサンプルという）にＤＬＣ薄膜を形成す
る場合について図１を参照しながら説明する。A case where a DLC thin film is formed on an unfinished magneto-optical disk (hereinafter referred to as a test sample) on which a recording layer has been formed by using, for example, methane gas as the raw material gas will be described with reference to FIG.
【００１３】複数枚のテストサンプル２０を処理層２１
内の陽極２５側に設置し、上記処理層２１にガス導入管
２２からメタンガスを流入させ、分子ターボポンプ２３
で上記処理層２１を減圧する。その後、１３．５ＭＨｚ
の高周波の印加により、カーボンがイオン化し、上記イ
オンは陰極２４と陽極２５の間を振動するが、この場
合、電子とイオンの質量が異なり、イオンは陽極２５側
に溜まり、自己バイアス電圧を発生する。この自己バイ
アス電圧、または回路的に加えたＤＣバイアス電圧を可
変電源２６で可変することでＤＬＣ薄膜の形成に最適な
イオンのエネルギー、すなわち２００ｅＶ以下を保持す
る。A plurality of test samples 20 are transferred to the processing layer 21.
Methane gas is introduced from the gas introduction pipe 22 into the treatment layer 21 and the molecular turbo pump 23
The pressure of the processing layer 21 is reduced. After that, 13.5MHz
When the high frequency is applied, carbon is ionized, and the ions vibrate between the cathode 24 and the anode 25. In this case, the masses of the electrons and the ions are different, and the ions accumulate on the anode 25 side to generate a self-bias voltage. I do. By varying the self-bias voltage or the DC bias voltage applied in a circuit with the variable power supply 26, the ion energy optimal for forming the DLC thin film, that is, 200 eV or less is held.
【００１４】一般的に、イオンのエネルギーを１０ｅＶ
とすることにより薄膜は生成可能となる。また、自己ス
パッターされて成膜とスパッターが同時に進行すること
により膜生成ができなくなる限界は２００ｅＶである。
このため、成膜エネルギー範囲は、１０ｅＶ〜２００ｅ
Ｖとされる。Generally, the energy of the ion is 10 eV
By doing so, a thin film can be formed. The limit at which a film cannot be formed due to self-sputtering and simultaneous film formation and spattering is 200 eV.
For this reason, the film formation energy range is 10 eV to 200 e
V.
【００１５】また、上記成膜エネルギーは、処理層の真
空度とＲＦの電力に密接な関わりを持ち、薄膜エネルギ
ーを１０ｅＶ〜２００ｅＶ内に設定するには、上記真空
度を１Ｐａ〜９０Ｐａ、上記ＲＦ電力を１０Ｗ〜２００
Ｗとし、自己バイアス電圧を−１０Ｖ〜−５００Ｖの範
囲内で変化させる。Further, the film forming energy is closely related to the degree of vacuum of the processing layer and the power of RF. To set the thin film energy within 10 eV to 200 eV, the degree of vacuum is set to 1 Pa to 90 Pa, and the RF Power from 10W to 200
W, and the self-bias voltage is changed within a range of -10V to -500V.
【００１６】図１で、例えば、ＲＦパワーを５００Ｗで
投入することで、５０ｅＶのエネルギーでビッカース硬
さが例えば８００Ｋｇ／ｃｍ2 のＤＬＣ保護膜を陽極２
５側に配置された光磁気ディスクの記録層上に成膜す
る。In FIG. 1, for example, by applying an RF power of 500 W, a DLC protective film having a Vickers hardness of, for example, 800 kg / cm 2 at an energy of 50 eV is applied to the anode 2.
A film is formed on the recording layer of the magneto-optical disk disposed on the fifth side.
【００１７】さらに、上記ＤＬＣ保護膜の上にＲＦパワ
ーを例えば１５００Ｗとすることで２００ｅＶのエネル
ギーでビッカース硬さが例えば１５００Ｋｇ／ｃｍ2 の
ＤＬＣ保護膜を重ねて成膜する。Further, a DLC protective film having a Vickers hardness of, for example, 1500 Kg / cm 2 is formed on the DLC protective film with an RF power of, for example, 1500 W and an energy of 200 eV.
【００１８】図２は、上記方法によりＤＬＣ保護膜が成
膜された光磁気ディスクを示す。すなわち、ポリカーボ
ネート基板１上に順に積層された誘電体膜２、磁気膜
３、誘電体膜４、反射膜５からなる記録層６上に、ビッ
カース硬さが例えば８００Ｋｇ／ｃｍ2のＤＬＣ保護膜
７とビッカース硬さが例えば１５００Ｋｇ／ｃｍ2のＤ
ＬＣ保護膜８が積層された光磁気ディスクが実施の形態
となる薄膜形成装置により得られる。FIG. 2 shows a magneto-optical disk on which a DLC protective film is formed by the above method. That is, a DLC protective film 7 having a Vickers hardness of, for example, 800 kg / cm 2 is formed on a recording layer 6 including a dielectric film 2, a magnetic film 3, a dielectric film 4, and a reflective film 5 which are sequentially laminated on a polycarbonate substrate 1. And a Vickers hardness of, for example, 1500 kg / cm 2
The magneto-optical disk on which the LC protective film 8 is laminated can be obtained by the thin film forming apparatus according to the embodiment.
【００１９】ここで、記録層６上に柔らかいＤＬＣ薄膜
７と硬いＤＬＣ薄膜８を積層することで、膜剥がれを防
止でき、上記のように積層された薄膜は保護膜として長
期にわたり有効に作用する。これにより、記録層が長期
にわたり保護される光磁気ディスクを提供できる。Here, by laminating the soft DLC thin film 7 and the hard DLC thin film 8 on the recording layer 6, film peeling can be prevented, and the thin film laminated as described above effectively functions as a protective film for a long time. . Thereby, a magneto-optical disk in which the recording layer is protected for a long time can be provided.
【００２０】なお、上記薄膜形成装置によって硬さの異
なるＤＬＣ薄膜を二層に積層させた光磁気ディスクに限
定されることなく種々の被着対象面について変更が可能
であり、例えば、磁気ディスク、磁気テープ、さらに磁
気記録再生用ドラムのリード面上にも適用できる。The above-mentioned thin film forming apparatus is not limited to a magneto-optical disk in which DLC thin films having different hardnesses are laminated in two layers, and various types of surfaces to be coated can be changed. The present invention can be applied to a magnetic tape, and also to a lead surface of a magnetic recording / reproducing drum.
【００２１】次に、上記実施の形態のＲＦのパワーを連
続的に、例えば５００Ｗから１５００Ｗに成膜処理中に
変化させると、膜の硬さが上記記録層に向かい連続的に
小さくなるＤＬＣ保護膜が成膜され、図３に示すよう
に、記録層６上に積層される。Next, when the RF power of the above embodiment is changed continuously, for example, from 500 W to 1500 W during the film forming process, the DLC protection in which the hardness of the film continuously decreases toward the recording layer is obtained. A film is formed and laminated on the recording layer 6 as shown in FIG.
【００２２】ここで、記録層６上に硬さが連続的に異な
るＤＬＣ薄膜を成膜することで、膜剥がれを防止でき、
上記のように成膜された薄膜は保護膜として長期にわた
り有効に作用する。これにより、記録層が長期にわたり
保護される光磁気ディスクを提供できる。Here, by forming a DLC thin film having a different hardness continuously on the recording layer 6, film peeling can be prevented.
The thin film formed as described above effectively functions as a protective film for a long time. Thereby, a magneto-optical disk in which the recording layer is protected for a long time can be provided.
【００２３】なお、上記薄膜形成装置によって硬さが連
続的に変化するＤＬＣ薄膜を成膜させた光磁気ディスク
に限定されることなく種々の被着対象面について変更が
可能であり、例えば、磁気ディスク、磁気テープ、さら
に磁気記録再生用ドラムのリード面等にも適応できる。The above-mentioned thin film forming apparatus is not limited to a magneto-optical disk on which a DLC thin film whose hardness continuously changes is formed. The present invention can be applied to a disk, a magnetic tape, and a lead surface of a magnetic recording / reproducing drum.
【００２４】[0024]
【発明の効果】本発明に係る薄膜形成方法により、被着
対象面の上記被着対象面に向かい硬さが小さくなるダイ
ヤモンド状カーボン薄膜を成膜することができる。これ
により、上記被着対象面に接するダイヤモンド状カーボ
ン薄膜の膜剥がれを防ぐことができ、長期にわたって上
記対被着象面を保護することが可能となる。According to the thin film forming method of the present invention, it is possible to form a diamond-like carbon thin film whose hardness decreases from the surface to be adhered to the surface to be adhered. Thereby, it is possible to prevent the diamond-like carbon thin film coming into contact with the surface to be adhered from peeling off, and to protect the surface to be adhered for a long period of time.
【００２５】また、本発明に係る薄膜形成方法により記
録層にダイヤモンド状カーボン薄膜を成膜した記録媒体
は、上記記録層上のダイヤモンド状カーボン薄膜の膜剥
がれを防げるので、長期にわたり記録層が保護され続け
る記録媒体の提供が可能となる。Further, in the recording medium in which the diamond-like carbon thin film is formed on the recording layer by the method for forming a thin film according to the present invention, peeling of the diamond-like carbon thin film on the recording layer can be prevented. It is possible to provide a recording medium that continues to be used.
【図１】本発明の実施の形態となる薄膜形成装置の正面
図である。FIG. 1 is a front view of a thin film forming apparatus according to an embodiment of the present invention.
【図２】上記薄膜形成装置により薄膜が形成された光磁
気ディスクの断面図である。FIG. 2 is a sectional view of a magneto-optical disk on which a thin film is formed by the thin film forming apparatus.
【図３】上記薄膜形成装置により薄膜が形成された他の
光磁気ディスクの断面図である。FIG. 3 is a sectional view of another magneto-optical disk on which a thin film is formed by the thin film forming apparatus.
１ ポリカーボネート基板、２ 誘電体膜、３ 磁気
膜、４ 誘電体膜、５ 反射膜、６ 記録層、７，８，
９ ＤＬＣ保護膜1 polycarbonate substrate, 2 dielectric film, 3 magnetic film, 4 dielectric film, 5 reflection film, 6 recording layer, 7, 8,
9 DLC protective film
───────────────────────────────────────────────────── フロントページの続き (51)Int.Cl.6 識別記号 庁内整理番号 ＦＩ 技術表示箇所 Ｇ１１Ｂ 11/10 ５４１ Ｇ１１Ｂ 11/10 ５４１Ｆ ──────────────────────────────────────────────────続 き Continued on the front page (51) Int.Cl. 6 Identification code Agency reference number FI Technical display location G11B 11/10 541 G11B 11/10 541F
Claims (3)
にダイヤモンド状カーボン薄膜を成膜する薄膜形成方法
において、 上記被着対象面に向かって硬度を小さくしてダイヤモン
ド状カーボン薄膜を成膜することを特徴とする薄膜形成
方法。1. A thin film forming method for forming a diamond-like carbon thin film on a surface to be deposited by RF plasma CVD, wherein the hardness of the diamond-like carbon thin film is reduced toward the surface to be deposited. A method for forming a thin film, comprising:
し、膜表面側では、大とすることを特徴とする請求項１
記載の薄膜形成方法。2. The method according to claim 1, wherein the RF power is low on the surface to be deposited and high on the film surface.
The method for forming a thin film according to the above.
イヤモンド状カーボン薄膜を成膜してなる記録媒体にお
いて、 上記ダイヤモンド状カーボン薄膜は、上記記録層に向か
って硬度を小さくしてなることを特徴とする記録媒体。3. A recording medium comprising a diamond-like carbon thin film formed on a recording layer by RF plasma CVD, wherein the diamond-like carbon thin film decreases in hardness toward the recording layer. Recording medium.
Priority Applications (4)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP18600796A JPH1029893A (en) | 1996-07-16 | 1996-07-16 | Formation of thin film and recording medium |
| US08/871,378 US6110610A (en) | 1996-06-10 | 1997-06-09 | Photomagnetic recording medium and film forming method |
| CN97105446.0A CN1170196A (en) | 1996-06-10 | 1997-06-09 | Photomagnetic recording medium and film |
| US09/138,046 US6177150B1 (en) | 1996-06-10 | 1998-08-21 | Photomagnetic recording medium and film forming method |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP18600796A JPH1029893A (en) | 1996-07-16 | 1996-07-16 | Formation of thin film and recording medium |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| JPH1029893A true JPH1029893A (en) | 1998-02-03 |
Family
ID=16180745
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP18600796A Abandoned JPH1029893A (en) | 1996-06-10 | 1996-07-16 | Formation of thin film and recording medium |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPH1029893A (en) |
Cited By (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| KR20030004747A (en) * | 2001-07-06 | 2003-01-15 | 엘지전자 주식회사 | Optical disc structure of near field recording media |
-
1996
- 1996-07-16 JP JP18600796A patent/JPH1029893A/en not_active Abandoned
Cited By (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| KR20030004747A (en) * | 2001-07-06 | 2003-01-15 | 엘지전자 주식회사 | Optical disc structure of near field recording media |
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