JPH1027579A - Electrodeless discharge lamp, electrodeless discharge lamp lighting device, ultraviolet irradiation device, and fluid processing device - Google Patents
Electrodeless discharge lamp, electrodeless discharge lamp lighting device, ultraviolet irradiation device, and fluid processing deviceInfo
- Publication number
- JPH1027579A JPH1027579A JP17830796A JP17830796A JPH1027579A JP H1027579 A JPH1027579 A JP H1027579A JP 17830796 A JP17830796 A JP 17830796A JP 17830796 A JP17830796 A JP 17830796A JP H1027579 A JPH1027579 A JP H1027579A
- Authority
- JP
- Japan
- Prior art keywords
- envelope
- mercury
- discharge lamp
- electrodeless discharge
- fluid
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Withdrawn
Links
Abstract
Description
【０００１】[0001]
【発明の属する技術分野】本発明は、誘導結合放電によ
り発光する無電極放電ランプ、このランプを点灯する無
電極放電ランプ点灯装置およびこれらを用いた紫外線照
射装置、流体処理装置に関し、特に発光効率を向上させ
た無電極放電ランプなどに関する。BACKGROUND OF THE INVENTION 1. Field of the Invention The present invention relates to an electrodeless discharge lamp that emits light by inductively coupled discharge, an electrodeless discharge lamp lighting device for lighting the lamp, an ultraviolet irradiation device and a fluid treatment device using the same, and in particular, luminous efficiency. And an electrodeless discharge lamp with improved resistance.
【０００２】[0002]
【従来の技術】従来の無電極放電ランプとしては、例え
ば特開平２−３７６６０号公報、あるいは実開平４−１
２２５２号公報に開示されているものが知られている。
特開平２−３７６６０号公報に記載された無電極放電ラ
ンプは図６に示すように、密閉円筒状の外囲器１の中心
に軸方向に流体処理部としての流水導管２が貫通して構
成されている。外囲器１の両端面の流水導管２が貫通す
る孔の内周と流水導管２の外周とは気密に閉塞されてお
り、外囲器１の内周と流水導管２の外周との間には円筒
状の放電空間３が形成されており、放電空間３内には希
ガスおよび水銀が封入されている。2. Description of the Related Art A conventional electrodeless discharge lamp is disclosed in, for example, JP-A-2-37660 or Japanese Utility Model Laid-Open No. 4-1.
The one disclosed in Japanese Patent No. 2252 is known.
As shown in FIG. 6, the electrodeless discharge lamp described in Japanese Unexamined Patent Publication No. 2-37660 has a configuration in which a flowing water conduit 2 as a fluid processing unit passes through the center of a closed cylindrical envelope 1 in the axial direction. Have been. The inner periphery of the hole through which the flowing water conduit 2 penetrates the both ends of the envelope 1 and the outer periphery of the flowing water conduit 2 are airtightly closed, and a gap between the inner periphery of the outer packaging 1 and the outer periphery of the flowing water conduit 2 is provided. Has a cylindrical discharge space 3, in which a rare gas and mercury are sealed.
【０００３】外囲器１の外周にはリボン状のコイル４が
巻回されており、コイル４に高周波電圧を印加すること
により放電空間３で放電が生起し、電気エネルギを紫外
線に変換することができる。この紫外線により流水導管
２内を流れる流水の殺菌などを行う。[0003] A ribbon-shaped coil 4 is wound around the outer periphery of the envelope 1. When a high frequency voltage is applied to the coil 4, a discharge occurs in the discharge space 3, and electric energy is converted into ultraviolet light. Can be. The ultraviolet light sterilizes the flowing water flowing through the flowing water conduit 2.
【０００４】実開平４−１２２５２号公報に記載された
無電極放電ランプは図７に示すように、図６に示すもの
とほぼ同様の構成であるが、単にランプの放射光を光源
として利用するものである。従って流水殺菌を目的とし
たものでなく、流水導管２内を流れる水はランプを冷却
するために用いられる。また、放電モードはマイクロ波
点灯であることから図６に示すようなコイルは巻回され
ておらず、誘導結合型コイル駆動の場合の印加電圧の周
波数の２桁も大きい周波数で点灯される。The electrodeless discharge lamp described in Japanese Utility Model Application Laid-Open No. 4-122252 has substantially the same configuration as that shown in FIG. 6 as shown in FIG. 7, but simply uses the radiated light of the lamp as a light source. Things. Therefore, the water flowing in the flowing water conduit 2 is not used for sterilizing the running water but is used for cooling the lamp. Further, since the discharge mode is microwave lighting, the coil as shown in FIG. 6 is not wound, and is lit at a frequency which is two orders of magnitude higher than the frequency of the applied voltage in the case of inductive coupling type coil driving.
【０００５】[0005]
【発明が解決しようとする課題】しかしながら図６に示
す従来の無電極放電ランプにおいては、リボン状のコイ
ル４を外囲器１の外周に巻回しているため、放電空間か
ら放射される紫外線はコイル４の内面で反射される。し
かし反射された紫外線放射の水銀原子は放電空間３に存
在する水銀原子に大部分が自己吸収され、流水導管２側
にほとんど出射されない。すなわち放電空間３から流水
導管２に向って直接放射される紫外線のみが有効となる
ので、ランプの効率が低くなる欠点があった。また水銀
蒸気圧を制御して放電効率を最適化する手段については
何等開示されていない。However, in the conventional electrodeless discharge lamp shown in FIG. 6, since the ribbon-shaped coil 4 is wound around the outer circumference of the envelope 1, the ultraviolet rays radiated from the discharge space are not emitted. The light is reflected by the inner surface of the coil 4. However, most of the mercury atoms of the reflected ultraviolet radiation are self-absorbed by the mercury atoms present in the discharge space 3 and are hardly emitted to the flowing water conduit 2 side. That is, only the ultraviolet rays directly emitted from the discharge space 3 toward the flowing water conduit 2 are effective, so that there is a disadvantage that the efficiency of the lamp is reduced. No means is disclosed for optimizing the discharge efficiency by controlling the mercury vapor pressure.
【０００６】一方、図７に示す従来の無電極放電ランプ
においては、放電モードが周波数の高いマイクロ波点灯
であることから、空洞共振器が必要となり、装置が大型
化する欠点があった。また、空洞共振器を用いない場合
には、マイクロ波電力は空中へ放射される割合が高くな
り、ランプへの電力投入効率が低くなる。さらにランプ
電力が大きくなり積極的な冷却が必要となる。On the other hand, in the conventional electrodeless discharge lamp shown in FIG. 7, since the discharge mode is microwave lighting with a high frequency, a cavity resonator is required and there is a drawback that the device becomes large. Further, when the cavity resonator is not used, the ratio of microwave power radiated into the air increases, and the efficiency of power supply to the lamp decreases. Further, the lamp power is increased, and active cooling is required.
【０００７】本発明はこのような状況に鑑みてなされた
もので、無電極放電のエネルギを効率よく紫外線放射に
転換することのできる無電極放電ランプ、この無電極放
電ランプを点灯する無電極放電ランプ点灯装置、この無
電極放電ランプおよび点灯装置を備えた紫外線照射装
置、この紫外線照射装置を有する流体処理装置を提供す
ることを目的とする。The present invention has been made in view of such circumstances, and has an electrodeless discharge lamp capable of efficiently converting the energy of electrodeless discharge to ultraviolet radiation, and an electrodeless discharge lamp for lighting the electrodeless discharge lamp. An object of the present invention is to provide a lamp lighting device, an ultraviolet irradiation device including the electrodeless discharge lamp and the lighting device, and a fluid processing device including the ultraviolet irradiation device.
【０００８】[0008]
【課題を解決するための手段】請求項１の発明の無電極
放電ランプは、放電空間を囲む密閉された外囲器と、外
囲器に封入された少くとも希ガスおよび水銀を有する放
電媒体と、外囲器に対して放電空間にエネルギを伝達可
能に配設された誘導結合コイルとを具備し、外囲器に封
入された水銀量が外囲器の内表面積あたり０．３mg／cm
2 以上に構成されている。According to a first aspect of the present invention, there is provided an electrodeless discharge lamp comprising: a sealed envelope surrounding a discharge space; and a discharge medium having at least a rare gas and mercury sealed in the envelope. And an inductive coupling coil arranged to transmit energy to the discharge space with respect to the envelope. The amount of mercury sealed in the envelope is 0.3 mg / cm per inner surface area of the envelope.
It is composed of two or more.
【０００９】請求項２の発明の無電極放電ランプは、誘
導結合コイルから発生する電磁界により発熱蒸発した水
銀が滴下し集まる部位を外囲器内に設定し、この部位に
集まった水銀を誘導結合コイルから発生する電磁界によ
り、再び発熱蒸発させるようにした。In the electrodeless discharge lamp according to the second aspect of the present invention, a portion where the mercury generated and evaporated by the electromagnetic field generated from the inductive coupling coil is dropped and collected is set in the envelope, and the mercury collected at this portion is guided. The heat is evaporated again by the electromagnetic field generated from the coupling coil.
【００１０】請求項３の発明の無電極放電ランプは、水
銀が滴下し集まる部位は、誘導結合コイル近傍に設定さ
れた。In the electrodeless discharge lamp according to the third aspect of the present invention, the portion where mercury is dropped and collected is set near the inductive coupling coil.
【００１１】請求項４の発明の無電極放電ランプは、外
囲器の少くとも一部に、誘導結合コイルから発生する電
磁界で発熱蒸発し、水銀蒸気圧を制御する誘電体又は金
属体を配置した。According to a fourth aspect of the present invention, there is provided an electrodeless discharge lamp in which at least a part of the envelope is made of a dielectric or metal body which is heated and evaporated by an electromagnetic field generated from an inductive coupling coil to control a mercury vapor pressure. Placed.
【００１２】請求項５の発明の無電極放電ランプは、放
電空間に面した外囲器の内面を、紫外線透過性セラミッ
クで被覆した。According to a fifth aspect of the present invention, the inner surface of the envelope facing the discharge space is coated with an ultraviolet-transparent ceramic.
【００１３】請求項６の発明の無電極放電ランプは、外
囲器の外面を、紫外線透過フッ素樹脂で被覆した。In the electrodeless discharge lamp according to the sixth aspect of the present invention, the outer surface of the envelope is coated with an ultraviolet-permeable fluororesin.
【００１４】請求項７の発明の無電極放電ランプ点灯装
置は、請求項１乃至６いずれか一記載の無電極放電ラン
プと、誘導結合コイルに高周波電圧を印加する点灯手段
とを具備している。According to a seventh aspect of the present invention, there is provided an electrodeless discharge lamp lighting device including the electrodeless discharge lamp according to any one of the first to sixth aspects, and lighting means for applying a high frequency voltage to the inductive coupling coil. .
【００１５】請求項８の発明の紫外線照射装置は、請求
項１乃至６いずれか一記載の無電極放電ランプと、請求
項７記載の無電極放電ランプ点灯装置とを具備してい
る。According to an eighth aspect of the present invention, there is provided an ultraviolet irradiation apparatus including the electrodeless discharge lamp according to any one of the first to sixth aspects and the electrodeless discharge lamp lighting device according to the seventh aspect.
【００１６】請求項９の発明の流体処理装置は、処理さ
れる流体と、この流体が流入排出され請求項８記載の紫
外線照射装置が内挿された流体処理部とを具備してい
る。According to a ninth aspect of the present invention, there is provided a fluid processing apparatus including a fluid to be processed, and a fluid processing unit into which the fluid flows, and into which the ultraviolet irradiation device according to the eighth aspect is inserted.
【００１７】請求項１０の発明の流体処理装置は、放電
空間を囲む外囲器は密閉円筒状に形成され、誘導結合コ
イルは外囲器外周に巻回され、処理される流体は外囲器
の外面を流通する。According to a tenth aspect of the present invention, the envelope surrounding the discharge space is formed in a closed cylindrical shape, the inductive coupling coil is wound around the outer periphery of the envelope, and the fluid to be processed is the envelope. Circulate on the outer surface of
【００１８】請求項１１の発明の流体処理装置は、放電
空間を囲む外囲器は二重円筒状に形成され、誘導結合コ
イルは中心側の円筒部内に装着され、処理される流体は
外囲器の外周を流通する。In the fluid treatment apparatus according to the eleventh aspect of the present invention, the envelope surrounding the discharge space is formed in a double cylindrical shape, the inductive coupling coil is mounted in a central cylindrical portion, and the fluid to be treated is surrounded by the outer cylinder. Circulates around the periphery of the vessel
【００１９】請求項１２の発明の流体処理装置は、放電
空間を囲む外囲器は二重円筒状に形成され、誘導結合コ
イルは外囲器外周に巻回され、処理される流体は外囲器
の外面および中心側の円筒部内の少くとも一方を流通す
る。According to a twelfth aspect of the present invention, the envelope surrounding the discharge space is formed in a double cylindrical shape, the inductive coupling coil is wound around the outer periphery of the envelope, and the fluid to be treated is surrounded by the envelope. It circulates through at least one of the outer surface of the container and the central cylindrical portion.
【００２０】請求項１３の発明の流体処理装置は、光半
導体を流体処理部内の無電極放電ランプの放射光が到達
する範囲に設置した。According to a thirteenth aspect of the present invention, in the fluid processing apparatus, the optical semiconductor is provided in a range where the radiation of the electrodeless discharge lamp reaches in the fluid processing unit.
【００２１】請求項１及び２の発明においては、誘導結
合コイルが発生する高周波磁界で渦電流が発生し、この
渦電流あるいは自己電流で発熱する。この結果無電極放
電ランプはコイルからの熱で加熱され、外囲器内の水銀
蒸気圧が上昇して、効果的に紫外線を放射する。According to the first and second aspects of the present invention, an eddy current is generated by the high-frequency magnetic field generated by the inductive coupling coil, and heat is generated by the eddy current or the self-current. As a result, the electrodeless discharge lamp is heated by the heat from the coil, the mercury vapor pressure in the envelope increases, and the ultraviolet ray is radiated effectively.
【００２２】水銀が高周波加熱されて蒸発し、冷却領域
へ移動して過冷却状態となると、凝縮する核としての水
銀微小粒子の上に次々に凝縮し成長していく。そして直
径１mm程度になると自重で落下し、多くのこのような粒
子が集合しながら外囲器内の最も低い位置へ集まってい
く。この自重で落下する粒子が数十個あれば、コイルの
誘導加熱により再び蒸発し、管壁への凝縮→滴下→水銀
溜りへ集合→再びコイルによる加熱蒸発といった循環を
繰り返すことができる。このためには外囲器に封入され
た水銀量を外囲器の内表面積あたり０．３mg／cm2 以上
とすればよい。When the mercury is heated by high-frequency heating and evaporates, moves to a cooling region and enters a supercooled state, the mercury is successively condensed and grows on mercury fine particles as condensing nuclei. When the diameter becomes about 1 mm, the particles fall under their own weight, and many such particles gather and collect at the lowest position in the envelope. If there are several tens of particles falling under their own weight, they can be evaporated again by induction heating of the coil, and the circulation such as condensation on the tube wall → dropping → collection into the mercury reservoir → heat evaporation by the coil again can be repeated. For this purpose, the amount of mercury sealed in the envelope may be set to 0.3 mg / cm 2 or more per inner surface area of the envelope.
【００２３】請求項３の発明においては、水銀が滴下し
集まる部位を誘導結合コイル近傍に設定したので、コイ
ルからの電磁界を強く受け、効率よく加熱される。According to the third aspect of the present invention, since the portion where mercury is dropped and collected is set near the inductive coupling coil, the electromagnetic field from the coil is strongly received, and the coil is efficiently heated.
【００２４】請求項４の発明においては、外囲器の少く
とも一部に抵抗値の高い金属体あるいは強誘電体を配置
したので、水銀が導電性がよく発熱量が少ない場合で
も、金属体あるいは強誘電体がコイルからの電磁界で発
熱するので、水銀蒸気圧を効率よく制御することができ
る。According to the fourth aspect of the present invention, since a metal or ferroelectric having a high resistance value is disposed at least in a part of the envelope, even if the mercury has high conductivity and a small amount of heat is generated, the metal can be used. Alternatively, since the ferroelectric generates heat by the electromagnetic field from the coil, the mercury vapor pressure can be controlled efficiently.
【００２５】請求項５の発明においては、外囲器の内面
を紫外線透過性セラミックで被覆したので、水銀イオン
が外囲器の構成材料、例えば石英などに打ち込まれて黒
くなり、紫外線放射効率が低下することを防止できる。According to the fifth aspect of the present invention, since the inner surface of the envelope is coated with the ultraviolet-transmitting ceramic, mercury ions are implanted into the material of the envelope, for example, quartz, and become black, and the ultraviolet radiation efficiency is improved. It can be prevented from lowering.
【００２６】請求項６の発明においては、外囲器の外面
を紫外線透過フッ素樹脂で被覆したので、外囲器の外面
が滑らかになり、処理流体中の有機物などが外面に付着
しにくくなる。According to the sixth aspect of the present invention, since the outer surface of the envelope is coated with the ultraviolet-permeable fluororesin, the outer surface of the envelope becomes smooth, and organic substances and the like in the processing fluid hardly adhere to the outer surface.
【００２７】請求項７乃至１２の各発明においては、請
求項１乃至６いずれか一記載の無電極放電ランプを用い
て点灯装置、紫外線照射装置、流体処理装置を構成した
ので、それぞれ放電効率、紫外線照射効率、流体処理効
率が向上する。In each of the seventh to twelfth aspects of the present invention, a lighting device, an ultraviolet irradiation device, and a fluid treatment device are configured using the electrodeless discharge lamp according to any one of the first to sixth aspects. UV irradiation efficiency and fluid treatment efficiency are improved.
【００２８】請求項１３の発明においては、光半導体を
流体処理部の無電極放電ランプの放射光が到達する範囲
に設置したので、光半導体に放射光が到達することによ
り光電子が発生し、処理流体中の酸素を活性化して光触
媒作用効果が得られる。According to the thirteenth aspect of the present invention, since the optical semiconductor is disposed in a range where the radiation of the electrodeless discharge lamp in the fluid processing section reaches, the radiation reaches the optical semiconductor to generate photoelectrons. By activating oxygen in the fluid, a photocatalytic effect can be obtained.
【００２９】[0029]
【発明の実施の形態】以下、本発明の実施の形態を図面
を参照して説明する。図１は本発明の無電極放電ランプ
の第１の実施の形態の構成を示す一部切欠正面図、図２
は図１のランプに点灯手段としての高周波発生装置及び
整合器を接続した紫外線照射装置の構成を示すブロック
図である。Embodiments of the present invention will be described below with reference to the drawings. FIG. 1 is a partially cutaway front view showing the configuration of a first embodiment of the electrodeless discharge lamp of the present invention.
FIG. 3 is a block diagram showing a configuration of an ultraviolet irradiation device in which a high frequency generator and a matching device as lighting means are connected to the lamp of FIG.
【００３０】図１において、紫外線を透過する石英又は
セラミックで密閉円筒状に形成された内径Ｄcmの外囲器
１１内には放電空間１２が形成されており、放電空間１
２内には希ガスとしてのアルゴンと水銀が封入されてい
る。外囲器１１の外周には、直径２mmの銅線の表面をフ
ッ素樹脂の一つであるテフロンで被覆して構成された誘
導結合コイル１３が巻回されている。銅線の表面をテフ
ロンで被覆する目的は、下水・汚水・廃水などの処理流
体から銅線を保護することにある。In FIG. 1, a discharge space 12 is formed in an envelope 11 having an inner diameter Dcm formed of a quartz or ceramic which transmits ultraviolet light in a closed cylindrical shape.
Argon and mercury as noble gases are sealed in 2. An inductive coupling coil 13 formed by covering the surface of a copper wire having a diameter of 2 mm with Teflon, which is one of fluororesins, is wound around the outer periphery of the envelope 11. The purpose of coating the surface of the copper wire with Teflon is to protect the copper wire from treatment fluids such as sewage, sewage, and wastewater.
【００３１】図２において、コイル１３の両端はインピ
ーダンス整合回路である整合器２１を介して同軸ケーブ
ル２３により高周波発生装置２２及び商用電源（例えば
１００Ｖ５０サイクル）２４に接続されている。そして
電源２４から供給される電流は高周波発生装置２２によ
り例えば１３．５６ＭＨz の短波周波数の交番電流に変
換され、同軸ケーブル２３を介して整合器２１へ伝達さ
れ、整合器２１でコイル１３とのインピーダンス整合が
取られ、誘導結合回路としてのコイル１３へと伝達され
て、無電極放電ランプ２５に放電のための電磁気的エネ
ルギが伝達される。In FIG. 2, both ends of the coil 13 are connected to a high-frequency generator 22 and a commercial power supply (for example, 100 V, 50 cycles) 24 via a coaxial cable 23 via a matching unit 21 which is an impedance matching circuit. The current supplied from the power supply 24 is converted into an alternating current having a short-wave frequency of, for example, 13.56 MHz by the high-frequency generator 22, transmitted to the matching unit 21 via the coaxial cable 23, and subjected to impedance matching with the coil 13 by the matching unit 21. Matching is performed, the electromagnetic energy is transmitted to the coil 13 as an inductive coupling circuit, and electromagnetic energy for discharge is transmitted to the electrodeless discharge lamp 25.
【００３２】上記のように構成された無電極放電ランプ
において、誘導結合コイル１３は自己の発生する高周波
電磁界で渦電流が生じ、この渦電流又は自己電流で発熱
する。無電極放電ランプ２５はこの熱で加熱され、水銀
蒸気圧が上昇して効果的に紫外線が放射される。In the electrodeless discharge lamp configured as described above, the inductive coupling coil 13 generates an eddy current due to a high-frequency electromagnetic field generated by itself, and generates heat by the eddy current or the self-current. The electrodeless discharge lamp 25 is heated by this heat, the mercury vapor pressure increases, and ultraviolet rays are radiated effectively.
【００３３】高周波加熱により蒸発した水銀は冷却領域
へ移動して過冷却状態になると、凝縮する核としての水
銀微小粒子の上に順次凝縮し成長していく。そして粒子
の直径が１mm程度になると自重で落下し、このような多
くの粒子が集合しながら外囲器１１内の最も低い位置へ
と集まっていくことになる。この位置は外囲器１１を重
力に対して若干傾けておくことにより設定される。また
滴下滞留した水銀塊１４はコイル１３からの電磁界を強
く受けられるように、コイル近傍の位置にくるようにす
る。The mercury vaporized by the high-frequency heating moves to the cooling region and becomes supercooled, and is sequentially condensed and grown on mercury fine particles as condensing nuclei. When the diameter of the particles becomes about 1 mm, the particles fall under their own weight, and many such particles gather at the lowest position in the envelope 11 while gathering. This position is set by slightly enclosing the envelope 11 with respect to gravity. In addition, the mercury mass 14 that has been retained by dropping is located at a position near the coil so that the electromagnetic field from the coil 13 can be strongly received.
【００３４】外囲器１１の管壁に滴下滞留した水銀塊１
４は再びコイル１３からの電磁界により加熱蒸発され、
上記のサイクルが繰り返される。この結果水銀蒸気圧は
管壁で規制される温度以上の蒸気圧となる。このような
作用によつて、無電極放電ランプ２５から効率よく紫外
線を放射することができる。Mercury lump 1 dripping and staying on the tube wall of envelope 11
4 is again heated and evaporated by the electromagnetic field from the coil 13,
The above cycle is repeated. As a result, the mercury vapor pressure becomes higher than the temperature regulated by the tube wall. By such an action, the ultraviolet light can be efficiently emitted from the electrodeless discharge lamp 25.
【００３５】上述した直径１mmの粒径の水銀重量は約７
mgである。外囲器１１の内径が３cm、長さが５０cm程度
の放電ランプではこの水銀粒が２０個程度あれば上述の
サイクルが十分に回転する。この直径１mmの水銀粒２０
個の総重量は約１４０mgであり、すなわち水銀総重量は
１４０mg以上あればよいことになる。この１４０mgの水
銀粒は直径が約２．８mmであるが、実際には自重で偏平
になり３mm程度の大きさになる。この程度の大きさの水
銀塊であれば誘導加熱で蒸発し、上述したサイクルが成
立する。The weight of mercury having a particle diameter of 1 mm described above is about 7
mg. In a discharge lamp having an inner diameter of the envelope 11 of about 3 cm and a length of about 50 cm, the cycle described above is sufficiently rotated if about 20 mercury particles are present. This 1 mm diameter mercury particle 20
The total weight of the individual is about 140 mg, that is, the total weight of mercury needs to be 140 mg or more. Although the 140 mg mercury particle has a diameter of about 2.8 mm, it actually becomes flat due to its own weight and becomes about 3 mm in size. A mercury lump having such a size is evaporated by induction heating, and the above-described cycle is established.
【００３６】水銀塊１４の量は多い程サイクルにはよい
が、万一破損などが発生した場合を考えると少ない方が
よく、極端に多いことは好ましくない。従って外囲器の
内表面積あたり、０．３mg／cm2 以上あればよい。例え
ば外囲器の内径が１０cm、長さが２００cmの長大な放電
ランプの場合には、内表面積は６２８３cm2 であり、水
銀量は約２ｇ以上であればよく、このときの水銀塊の直
径は真球とみなすと約６．６mmとなる。The larger the amount of the mercury mass 14, the better the cycle. However, considering the possibility of breakage, the smaller the better, the more it is not preferable. Therefore, it is sufficient that the amount is 0.3 mg / cm 2 or more per inner surface area of the envelope. For example, in the case of a long discharge lamp having an inner diameter of 10 cm and a length of 200 cm, the inner surface area is 6283 cm 2 and the amount of mercury needs to be about 2 g or more. If it is considered a true sphere, it will be about 6.6 mm.
【００３７】水銀は導電性がよいので発熱量が小さい場
合がある。この場合にはステンレスメッシュ、鉄・ニッ
ケル合金粉末など、抵抗値の高い金属体、あるいはチタ
ン酸バリウムなどの強誘電体を外囲器内に配置すれば、
発熱量を多くすることができる。Since mercury has good conductivity, the calorific value may be small in some cases. In this case, if a metal body having a high resistance value, such as stainless steel mesh, iron / nickel alloy powder, or a ferroelectric material such as barium titanate is arranged in the envelope,
The calorific value can be increased.
【００３８】上記実施の形態において、コイル１３の発
生する電磁界により管内プラズマ中を誘導電流が流れる
ため、コイル１３によりＨｇイオンが管構成材料、例え
ば石英などに打ち込まれる。この結果管内表面が黒くな
り、紫外線放射効率が低下するなどの問題が生じる。こ
の問題は外囲器の管内表面をアルミナなどの紫外線透過
性セラミックで被覆することで解決される。In the above embodiment, since an induced current flows in the plasma in the tube due to the electromagnetic field generated by the coil 13, Hg ions are injected into the tube forming material, for example, quartz, by the coil 13. As a result, there arises a problem that the inner surface of the tube becomes black and the ultraviolet radiation efficiency decreases. This problem is solved by coating the inner surface of the envelope with an ultraviolet-transparent ceramic such as alumina.
【００３９】また上記実施の形態で示した無電極放電ラ
ンプを上下水、処理水、廃水などの流体中に配置し、殺
菌などの流体処理を行う場合、水中の残存無機物や有機
物が管壁に付着して取りにくくなることがある。この問
題は外囲器の外側表面をテフロンなどの紫外線透過フッ
素樹脂で被覆することで表面が滑らかになり解決され、
清掃間隔を長くすることができる。また保温効果によっ
て水銀蒸気圧を適正に制御することもできる。When the electrodeless discharge lamp described in the above embodiment is disposed in a fluid such as sewage, sewage, treated water, or wastewater, and a fluid treatment such as sterilization is performed, residual inorganic and organic substances in the water are deposited on the tube wall. It may be difficult to remove by attaching. This problem is solved by coating the outer surface of the envelope with an ultraviolet-permeable fluororesin such as Teflon, so that the surface becomes smoother,
The cleaning interval can be lengthened. Also, the mercury vapor pressure can be appropriately controlled by the heat retaining effect.
【００４０】図３は本発明の無電極放電ランプの第２の
実施の形態の構成を示す一部切欠正面図である。第２の
実施の形態は第１の実施の形態における外囲器１１内に
軸方向に内管３１を貫通して挿入して二重円筒状とし、
中心側の円筒部である内管３１内に誘導結合コイル１３
を装着したものである。外囲器１１の両端面に形成され
内管３１が挿通される孔部の内周と内管３１の外周との
間は密閉され、外囲器１１の内周と内管３１の外周との
間に放電空間１２が形成されている。FIG. 3 is a partially cutaway front view showing the configuration of a second embodiment of the electrodeless discharge lamp of the present invention. In the second embodiment, the inner tube 31 is inserted through the inner tube 31 in the axial direction in the envelope 11 in the first embodiment to form a double cylinder,
The inductive coupling coil 13
Is attached. A gap between the inner circumference of the hole formed on both end surfaces of the outer casing 11 and through which the inner pipe 31 is inserted and the outer circumference of the inner pipe 31 are sealed, and the inner circumference of the outer casing 11 and the outer circumference of the inner pipe 31 are closed. A discharge space 12 is formed therebetween.
【００４１】本実施の形態においても、外囲器１１内に
封入された水銀量を外囲器の内表面積あたり０．３mg／
cm2 以上とすることにより、無電極放電ランプから効率
よく紫外線を放射することができる。Also in this embodiment, the amount of mercury sealed in the envelope 11 is set to 0.3 mg / mer per inner surface area of the envelope.
By setting it to cm 2 or more, ultraviolet rays can be efficiently emitted from the electrodeless discharge lamp.
【００４２】図４は本発明の無電極放電ランプの第３の
実施の形態の構成を示す一部切欠正面図である。第３の
実施の形態は第２の実施の形態と同様に外囲器１１を二
重管構造とし、外囲器１１の外周に第１の実施の形態と
同様に誘導結合コイル１３を巻回し、誘導結合コイル１
３を巻回した側の外囲器１１に沿って矢印Ａで示される
流体を流通させると共に内管３１内にも矢印Ｂで示され
る処理流体を流通させるようにしたものである。放電空
間１２は外囲器１１の内周と内管３１の外周との間に形
成される。FIG. 4 is a partially cutaway front view showing the configuration of a third embodiment of the electrodeless discharge lamp of the present invention. In the third embodiment, the envelope 11 has a double-pipe structure as in the second embodiment, and the inductive coupling coil 13 is wound around the outer periphery of the envelope 11 as in the first embodiment. , Inductive coupling coil 1
A fluid indicated by an arrow A is circulated along the envelope 11 on the side where the coil 3 is wound, and a processing fluid indicated by an arrow B is also circulated inside the inner tube 31. The discharge space 12 is formed between the inner circumference of the envelope 11 and the outer circumference of the inner tube 31.
【００４３】本実施の形態においても、第１、第２の実
施の形態の場合と同様の効果が得られる。In this embodiment, the same effects as in the first and second embodiments can be obtained.
【００４４】また、誘導結合型放電では、コイル近傍に
放電が誘導されるので、コイル側にプラズマが濃く集り
やすい。このため無電極放電ランプにより流体処理を行
う場合、流体はコイルを巻回している側に流通させた方
が、紫外線による殺菌などの処理効果を高めることがで
きる。図１及び図４に矢印Ａで示す流体の流れは、それ
ぞれコイル１３に沿っている。また図３に示すようにコ
イル１３を放電空間１２の中心に配置しても放電効果を
高めることができる。さらに図４に示すように外囲器１
１を二重管構造とし、ランプの内外面にそれぞれ矢印
Ａ，Ｂで示すように流体を流した方がさらに効果的であ
ることは云うまでもない。In the inductively-coupled discharge, a discharge is induced near the coil, so that the plasma tends to be concentrated on the coil side. For this reason, when performing fluid treatment using an electrodeless discharge lamp, it is possible to enhance the treatment effect such as sterilization by ultraviolet rays by circulating the fluid on the side where the coil is wound. The fluid flows indicated by arrows A in FIGS. 1 and 4 are respectively along the coils 13. In addition, even if the coil 13 is arranged at the center of the discharge space 12 as shown in FIG. 3, the discharge effect can be enhanced. Further, as shown in FIG.
It is needless to say that it is more effective to adopt a double tube structure and to flow a fluid on the inner and outer surfaces of the lamp as indicated by arrows A and B, respectively.
【００４５】図５は、図４に示す無電極放電ランプと図
２に示す点灯装置とを備えた紫外線照射装置を用いて流
体処理を行う流体処理装置の一例の構成を示す一部切欠
正面図である。図５において、流体処理部である導水パ
イプ４１内に２個の図４に示す無電極放電ランプ４２
が、軸方向を導水パイプ４１の軸方向に一致させて配置
されている。ランプ４２の外囲器１１の外周に巻回され
た誘導結合コイル１３の両端は、それぞれ外周が絶縁さ
れたコイル導入線４３を介して整合器２１に接続されて
いる。またコイル導入線４３は導水パイプ４１の管壁に
固定されており、ランプ４２はコイル導入線４３を介し
て導水パイプ４１に保持されている。整合器２１は同軸
ケーブル２３を介して高周波発生装置２２に接続されて
いる。FIG. 5 is a partially cutaway front view showing an example of the configuration of a fluid processing apparatus for performing fluid processing using an ultraviolet irradiation apparatus having the electrodeless discharge lamp shown in FIG. 4 and the lighting device shown in FIG. It is. In FIG. 5, two electrodeless discharge lamps 42 shown in FIG.
However, they are arranged such that the axial direction matches the axial direction of the water guide pipe 41. Both ends of the inductive coupling coil 13 wound around the outer periphery of the envelope 11 of the lamp 42 are connected to the matching unit 21 via coil introduction wires 43 whose outer periphery is insulated. The coil feed line 43 is fixed to the pipe wall of the water guide pipe 41, and the lamp 42 is held by the water guide pipe 41 via the coil feed line 43. The matching device 21 is connected to a high-frequency generator 22 via a coaxial cable 23.
【００４６】高周波発生装置２２に電源２４から例えば
１００Ｖ５０サイクルの電圧が供給されると、高周波発
生装置２２から１３，５６ＭＨz の高周波が整合器２１
を介して無電極放電ランプ４２に印加され、二重管構造
の外囲器１１の外周及び内管３１の内周から紫外線が放
射される。そして導水パイプ４１内を矢印Ａの方向に流
れる処理流体４４が外囲器１１の外周及び内管３１の内
周に沿って流通するとき、処理流体４４の殺菌などの処
理が行われる。When a voltage of, for example, 100 V and 50 cycles is supplied from the power supply 24 to the high frequency generator 22, a high frequency of 13,56 MHz is supplied from the high frequency generator 22 to the matching unit 21.
Is applied to the electrodeless discharge lamp 42, and ultraviolet rays are radiated from the outer periphery of the envelope 11 having a double tube structure and the inner periphery of the inner tube 31. When the processing fluid 44 flowing in the direction of arrow A in the water guide pipe 41 flows along the outer circumference of the envelope 11 and the inner circumference of the inner pipe 31, processing such as sterilization of the processing fluid 44 is performed.
【００４７】導水パイプ４１の内壁面で放電ランプ４２
の放射光が到達する範囲には、光半導体であるＴｉＯ2
の膜４５が貼付されている。ＴｉＯ2 の膜４５に紫外線
や青可視光の放射光が当ると光電子が生じ、処理流体４
４中の酸素を活性化してオゾンなどにしてしまう。この
オゾンが有機物を分解する光触媒作用を有し、有機物が
効果的に分解される。A discharge lamp 42 is provided on the inner wall surface of the water pipe 41.
Of the optical semiconductor TiO 2
Film 45 is attached. When the TiO 2 film 45 is irradiated with ultraviolet or blue-visible light, photoelectrons are generated and the processing fluid 4
The oxygen in 4 is activated to become ozone or the like. This ozone has a photocatalytic action for decomposing organic substances, and organic substances are decomposed effectively.
【００４８】また、放電ランプの外囲器の外側表面に光
半導体であるＴｉＯ2 の膜４５を塗布することにより前
述と同様の原理によって、ランプ表面に付着した有機物
を効果的に分解できる。従って、ランプの表面が汚れる
ことがなく、長期使用をしても紫外線効率が低下するこ
とがない。Further, by applying the TiO 2 film 45 as an optical semiconductor to the outer surface of the envelope of the discharge lamp, the organic substances adhered to the lamp surface can be effectively decomposed according to the same principle as described above. Therefore, the surface of the lamp is not stained, and the UV efficiency does not decrease even after long-term use.
【００４９】無電極放電ランプ４２に図５には図示して
いないが、複数のタングステンワイヤのメッシュ片を水
銀とともに封入してもよい。水銀は重力によって外囲器
１１の底面に滴下して溜まる。この水銀が溜った位置に
タングステンワイヤのメッシュ片も重力によって溜まる
と、高周波発生装置２２に電源２４が投入されたときに
発生する１３．５６ＭＨz の高周波が無電極放電ランプ
４２に印加され、タングステンワイヤのメッシュ片が誘
導結合コイル１３の電磁界で発熱し、水銀を蒸発させ
る。この結果、無電極放電ランプは始動しやすくなり容
易に起動する。そして水銀の蒸発・凝縮が繰り返され、
水流でランプが冷却されるにもかかわらず、テフロンの
保温効果と相俟って、水銀蒸気圧が適正に高まり、効果
的に紫外線が放射される。Although not shown in FIG. 5, a plurality of tungsten wire mesh pieces may be sealed in the electrodeless discharge lamp 42 together with mercury. Mercury drops and accumulates on the bottom surface of the envelope 11 due to gravity. When the tungsten wire mesh piece also accumulates at the position where the mercury accumulates due to gravity, a high frequency of 13.56 MHz generated when the power supply 24 is turned on to the high frequency generator 22 is applied to the electrodeless discharge lamp 42, Is generated by the electromagnetic field of the inductive coupling coil 13 to evaporate mercury. As a result, the electrodeless discharge lamp is easy to start and starts easily. Then the evaporation and condensation of mercury are repeated,
In spite of the fact that the lamp is cooled by the water flow, the vapor pressure of mercury is appropriately increased in combination with the heat retaining effect of Teflon, and ultraviolet rays are radiated effectively.
【００５０】上記各実施の形態において、誘導結合コイ
ル１３を外囲器１１の外周又は内周に密着して巻回した
例を示したが、外囲器１１との間に空間を持たせて巻回
してもよい。又は複数の無電極放電ランプを１本の誘導
結合コイルで巻回してもよい。また図５に示す無電極放
電ランプ４２は図１又は図３に示す構造のものであって
もよく、本数も２本に限定されない。さらに高周波発生
装置２２が発生する高周波の周波数を１３．５６ＭＨz
としたが、これに限定されるものではなく、例えば２．
６５ＭＨz など誘導結合により電磁気エネルギが効果的
に結合伝達される周波数ならば、何れでもよいことは明
らかである。In each of the above-described embodiments, an example has been shown in which the inductive coupling coil 13 is wound in close contact with the outer periphery or the inner periphery of the envelope 11, but a space is provided between the coil 11 and the envelope 11. It may be wound. Alternatively, a plurality of electrodeless discharge lamps may be wound by one inductive coupling coil. Further, the electrodeless discharge lamp 42 shown in FIG. 5 may have the structure shown in FIG. 1 or FIG. 3, and the number is not limited to two. Further, the frequency of the high frequency generated by the high frequency generator 22 is 13.56 MHz.
However, the present invention is not limited to this.
Obviously, any frequency such as 65 MHz can be used as long as electromagnetic energy is effectively coupled and transmitted by inductive coupling.
【００５１】さらに水銀塊１４が外囲器１１内に滞留す
る部位を、外囲器１１から空気を除去するときに用いる
排気管が接続されるチップ部としてもよい。また、誘導
結合コイル１３を介して無電極放電ランプに投入する電
力を制御して、水銀蒸気圧を制御することも可能であ
る。Further, the portion where the mercury lump 14 stays in the envelope 11 may be a tip portion to which an exhaust pipe used for removing air from the envelope 11 is connected. It is also possible to control the power supplied to the electrodeless discharge lamp via the inductive coupling coil 13 to control the mercury vapor pressure.
【００５２】[0052]
【発明の効果】請求項１乃至３の発明によれば、外囲器
に封入された水銀量が外囲器の内表面積あたり０．３mg
／cm2 以上になるように構成したので、水銀粒の加熱、
蒸発、凝縮、滴下、集合、再び加熱蒸発のサイクルが可
能となり、水銀蒸気圧が適正に高まり、効率よく無電極
放電のエネルギを紫外線放射に転換することができる。According to the first to third aspects of the present invention, the amount of mercury sealed in the envelope is 0.3 mg per inner surface area of the envelope.
/ Cm 2 or more, so that heating of mercury particles,
The cycle of evaporation, condensation, dropping, assembly, and heating evaporation can be performed again, the mercury vapor pressure can be appropriately increased, and the energy of electrodeless discharge can be efficiently converted to ultraviolet radiation.
【００５３】請求項４の発明によれば、外囲器内の少く
とも一部に誘導結合コイルから発生する電磁界で発熱蒸
発する誘電体又は金属体を配置したので、水銀が導電性
がよく発熱量が少ない場合でも水銀蒸気圧を効率よく制
御することができる。According to the fourth aspect of the present invention, since the dielectric or the metal which heats and evaporates by the electromagnetic field generated from the inductive coupling coil is arranged at least in a part of the envelope, the mercury has good conductivity. Even when the calorific value is small, the mercury vapor pressure can be controlled efficiently.
【００５４】請求項５の発明によれば、放電空間を囲む
外囲器の内面を、紫外線透過性セラミックで被覆したの
で、外囲器内面の黒化を防ぎ、紫外線放射効率の低下を
防止することができる。According to the fifth aspect of the present invention, since the inner surface of the envelope surrounding the discharge space is coated with the ultraviolet-transmitting ceramic, the inner surface of the envelope is prevented from being blackened and the ultraviolet radiation efficiency is prevented from lowering. be able to.
【００５５】請求項６の発明によれば、放電空間を囲む
外囲器の外面を、紫外線透過フッ素樹脂で被覆したの
で、外囲器外面が滑らかになり、処理流体中の有機物な
どが外面に付着しにくくなる。According to the sixth aspect of the present invention, since the outer surface of the envelope surrounding the discharge space is covered with the ultraviolet-permeable fluororesin, the outer surface of the envelope becomes smooth, and organic substances and the like in the processing fluid are exposed to the outer surface. It becomes difficult to adhere.
【００５６】請求項７乃至１２の本発明によれば、請求
項１乃至６いずれか一記載の無電極放電ランプを用いて
点灯装置、紫外線照射装置、流体処理装置を構成したの
で、それぞれ放電効率、紫外線照射効率、流体処理効率
が向上する。According to the seventh to twelfth aspects of the present invention, a lighting device, an ultraviolet irradiation device, and a fluid treatment device are configured using the electrodeless discharge lamp according to any one of the first to sixth aspects. , UV irradiation efficiency and fluid treatment efficiency are improved.
【００５７】請求項１３の発明によれば、流体処理部内
の無電極放電ランプの放射光が到達する範囲に光半導体
を設置したので、光半導体に放射光が到達することによ
り光電子が発生し、処理流体中の酸素を活性化し、光触
媒作用効果を得ることができる。According to the thirteenth aspect of the present invention, since the optical semiconductor is installed in the range in which the radiated light of the electrodeless discharge lamp reaches in the fluid processing unit, photoelectrons are generated by the radiated light reaching the optical semiconductor, The oxygen in the processing fluid can be activated, and a photocatalytic effect can be obtained.
【図１】本発明の無電極放電ランプの第１の実施の形態
の構成を示す一部切欠正面図。FIG. 1 is a partially cutaway front view showing a configuration of a first embodiment of an electrodeless discharge lamp of the present invention.
【図２】図１のランプに点灯装置を接続した紫外線照射
装置の構成を示すブロック図。FIG. 2 is a block diagram showing a configuration of an ultraviolet irradiation device in which a lighting device is connected to the lamp of FIG. 1;
【図３】本発明の無電極放電ランプの第２の実施の形態
の構成を示す一部切欠正面図。FIG. 3 is a partially cutaway front view showing the configuration of a second embodiment of the electrodeless discharge lamp of the present invention.
【図４】本発明の無電極放電ランプの第３の実施の形態
の構成を示す一部切欠正面図。FIG. 4 is a partially cutaway front view showing the configuration of a third embodiment of the electrodeless discharge lamp of the present invention.
【図５】図４の無電極放電ランプと図２の点灯装置とを
備えた紫外線照射装置を用いた流体処理装置の構成を示
す一部切欠正面図。5 is a partially cutaway front view showing a configuration of a fluid processing apparatus using an ultraviolet irradiation device including the electrodeless discharge lamp of FIG. 4 and the lighting device of FIG. 2;
【図６】従来の無電極放電ランプの一例の構成を示す一
部切欠正面図。FIG. 6 is a partially cutaway front view showing a configuration of an example of a conventional electrodeless discharge lamp.
【図７】従来の無電極放電ランプの他の一例の構成を示
す一部切欠正面図。FIG. 7 is a partially cutaway front view showing the configuration of another example of the conventional electrodeless discharge lamp.
１１ 外囲器 １２ 放電空間 １３ 誘導結合コイル ２１ 整合器（点
灯手段） ２２ 高周波発生装置（点灯手段） ２４ 電源（点灯
手段） ３１ 内管 ４１ 導水パイプ
（流体処理部） ４４ 流体 ４５ ＴｉＯ2 の
膜（光半導体）DESCRIPTION OF SYMBOLS 11 Envelope 12 Discharge space 13 Inductive coupling coil 21 Matching device (lighting means) 22 High frequency generator (lighting means) 24 Power supply (lighting means) 31 Inner pipe 41 Water guide pipe (fluid processing part) 44 Fluid 45 TiO 2 film (Optical semiconductor)
───────────────────────────────────────────────────── フロントページの続き (72)発明者 空閑 圭介 東京都品川区東品川四丁目３番１号 東芝 ライテック株式会社内 (72)発明者 垣谷 勉 東京都品川区東品川四丁目３番１号 東芝 ライテック株式会社内 (72)発明者 横関 一郎 東京都品川区東品川四丁目３番１号 東芝 ライテック株式会社内 (72)発明者 上村 幸三 東京都品川区東品川四丁目３番１号 東芝 ライテック株式会社内 (72)発明者 川鶴 滋久 東京都品川区東品川四丁目３番１号 東芝 ライテック株式会社内 ──────────────────────────────────────────────────続 き Continuing on the front page (72) Inventor Keisuke Kuuga 4-3-1 Higashishinagawa, Shinagawa-ku, Tokyo Inside Toshiba Lighting & Technology Corporation (72) Inventor Tsutomu Kakitani 4-3-1 Higashishinagawa, Shinagawa-ku, Tokyo Toshiba Lighting & Technology Corporation (72) Inventor Ichiro Yokoseki 4-3-1 Higashishinagawa, Shinagawa-ku, Tokyo Toshiba Lighting-Tech Corporation (72) Inventor Kozo Uemura 4-3-1 Higashishinagawa, Shinagawa-ku, Tokyo Toshiba Lighting & Technology (72) Inventor Shihisa Kawatsuru 4-3-1 Higashi Shinagawa, Shinagawa-ku, Tokyo Toshiba Lighting & Technology Corporation
Claims (13)
囲器に封入された少くとも希ガスおよび水銀を有する放
電媒体と；外囲器に対して放電空間にエネルギを伝達可
能に配設された誘導結合コイルと；を具備し、 外囲器に封入された水銀量が外囲器の内表面積あたり
０．３mg／cm2 以上に構成されていることを特徴とする
無電極放電ランプ。1. A sealed envelope surrounding a discharge space; a discharge medium having at least a rare gas and mercury enclosed in the envelope; and an energy transferable to the discharge space relative to the envelope. And an inductive coupling coil disposed therein, wherein the amount of mercury sealed in the envelope is configured to be 0.3 mg / cm 2 or more per inner surface area of the envelope. lamp.
り発熱蒸発した水銀が滴下し集まる部位を外囲器内に設
定し、 この部位に集まった水銀を誘導結合コイルから発生する
電磁界により、再び発熱蒸発させるようにしたことを特
徴とする請求項１記載の無電極放電ランプ。2. A region where the mercury generated and evaporated by the electromagnetic field generated from the inductive coupling coil is dropped and collected is set in the envelope, and the mercury collected at this portion is again returned by the electromagnetic field generated from the inductive coupling coil. 2. The electrodeless discharge lamp according to claim 1, wherein the heat is evaporated.
イル近傍に設定されたことを特徴とする請求項１又は２
記載の無電極放電ランプ。3. The device according to claim 1, wherein the portion where the mercury is dropped and collected is set near the inductive coupling coil.
An electrodeless discharge lamp as described.
イルから発生する電磁界で発熱蒸発し、水銀蒸気圧を制
御する誘導体又は金属体を配置したことを特徴とする請
求項１乃至３いずれか一記載の無電極放電ランプ。4. A derivative or metal body which heats and evaporates by an electromagnetic field generated from an inductive coupling coil and controls a mercury vapor pressure is disposed in at least a part of the inside of the envelope. 4. The electrodeless discharge lamp according to any one of claims 1 to 3.
線透過性セラミックで被覆したことを特徴とする請求項
１乃至４いずれか一記載の無電極放電ランプ。5. The electrodeless discharge lamp according to claim 1, wherein an inner surface of the envelope facing the discharge space is coated with an ultraviolet-transparent ceramic.
被覆したことを特徴とする請求項１乃至５いずれか一記
載の無電極放電ランプ。6. The electrodeless discharge lamp according to claim 1, wherein an outer surface of the envelope is coated with an ultraviolet-permeable fluororesin.
放電ランプと；誘導結合コイルに高周波電圧を印加する
点灯手段と；を具備していることを特徴とする無電極放
電ランプ点灯装置。7. An electrodeless discharge lamp lighting device comprising: the electrodeless discharge lamp according to claim 1; and lighting means for applying a high-frequency voltage to an inductive coupling coil. .
放電ランプと；請求項７記載の無電極放電ランプ点灯装
置と；を具備していることを特徴とする紫外線照射装
置。8. An ultraviolet irradiation apparatus comprising: the electrodeless discharge lamp according to any one of claims 1 to 6; and the lighting device for an electrodeless discharge lamp according to claim 7.
され請求項８記載の紫外線照射装置が内挿された流体処
理部と；を具備していることを流体処理装置。9. A fluid processing apparatus comprising: a fluid to be processed; and a fluid processing unit into which the fluid flows in and out and into which the ultraviolet irradiation device according to claim 8 is inserted.
形成され、 誘導結合コイルは外囲器外周に巻回され、処理される流
体は外囲器の外面を流通することを特徴とする請求項９
記載の流体処理装置。10. An envelope surrounding a discharge space is formed in a closed cylindrical shape, an inductive coupling coil is wound around an outer periphery of the envelope, and a fluid to be processed flows through an outer surface of the envelope. Claim 9
A fluid treatment device according to claim 1.
形成され、 誘導結合コイルは中心側の円筒部内に装着され、処理さ
れる流体は外囲器の外面を流通することを特徴とする請
求項９記載の流体処理装置。11. An envelope surrounding a discharge space is formed in a double cylindrical shape, an inductive coupling coil is mounted in a central cylindrical portion, and a fluid to be processed flows through an outer surface of the envelope. The fluid treatment apparatus according to claim 9, wherein
形成され、 誘導結合コイルは外囲器外周に巻回され、処理される流
体は外囲器の外面および中心側の円筒部内の少くとも一
方を流通することを特徴とする請求項９記載の流体処理
装置。12. The envelope surrounding the discharge space is formed in a double cylindrical shape, the inductive coupling coil is wound around the outer periphery of the envelope, and the fluid to be treated is in the outer surface of the envelope and in the central cylindrical portion. The fluid treatment apparatus according to claim 9, wherein at least one of the fluids flows.
ランプの放射光が到達する範囲に設置したことを特徴と
する請求項９乃至１２いずれか一記載の流体処理装置。13. The fluid processing apparatus according to claim 9, wherein the optical semiconductor is provided in a range where the radiation light of the electrodeless discharge lamp reaches in the fluid processing unit.
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP17830796A JPH1027579A (en) | 1996-07-08 | 1996-07-08 | Electrodeless discharge lamp, electrodeless discharge lamp lighting device, ultraviolet irradiation device, and fluid processing device |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP17830796A JPH1027579A (en) | 1996-07-08 | 1996-07-08 | Electrodeless discharge lamp, electrodeless discharge lamp lighting device, ultraviolet irradiation device, and fluid processing device |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| JPH1027579A true JPH1027579A (en) | 1998-01-27 |
Family
ID=16046196
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP17830796A Withdrawn JPH1027579A (en) | 1996-07-08 | 1996-07-08 | Electrodeless discharge lamp, electrodeless discharge lamp lighting device, ultraviolet irradiation device, and fluid processing device |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPH1027579A (en) |
Cited By (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JP2012223732A (en) * | 2011-04-21 | 2012-11-15 | Photoscience Japan Corp | Liquid treating equipment |
-
1996
- 1996-07-08 JP JP17830796A patent/JPH1027579A/en not_active Withdrawn
Cited By (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JP2012223732A (en) * | 2011-04-21 | 2012-11-15 | Photoscience Japan Corp | Liquid treating equipment |
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