JPH10274244A - Rolling bearing for supporting high speed rotary shaft - Google Patents

Rolling bearing for supporting high speed rotary shaft

Info

Publication number
JPH10274244A
JPH10274244A JP8144797A JP8144797A JPH10274244A JP H10274244 A JPH10274244 A JP H10274244A JP 8144797 A JP8144797 A JP 8144797A JP 8144797 A JP8144797 A JP 8144797A JP H10274244 A JPH10274244 A JP H10274244A
Authority
JP
Japan
Prior art keywords
bearing
inner ring
ring
outer ring
rolling bearing
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Pending
Application number
JP8144797A
Other languages
Japanese (ja)
Inventor
Takashi Hattori
多加志 服部
Yosuke Oya
洋右 大矢
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
NTN Corp
Original Assignee
NTN Corp
NTN Toyo Bearing Co Ltd
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by NTN Corp, NTN Toyo Bearing Co Ltd filed Critical NTN Corp
Priority to JP8144797A priority Critical patent/JPH10274244A/en
Publication of JPH10274244A publication Critical patent/JPH10274244A/en
Pending legal-status Critical Current

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  • Rolling Contact Bearings (AREA)

Abstract

PROBLEM TO BE SOLVED: To reduce a difference in temperature between inner and outer rings and also reduce the heating in a bearing. SOLUTION: A bearing 3 comprises an inner ring 3a close-fitted to the outer periphery of a main shaft 1, an outer ring 3b close-fitted to the inner periphery of a housing, multiple balls 3c arranged between the route surfaces of the inner ring 3a and outer ring 3b, and a cage 3d holding the balls 3c at specified peripheral intervals. Also the width dimension of the inner ring 3a is set larger than that of the outer ring 3b, and the pitch diameter PCD of the ball 3c is set so that the relation of PCD<(d+D)/2 is established with respect to the inner diameter (d) of the inner ring 3a and the outer diameter D of the outer ring 3b.

Description

【発明の詳細な説明】DETAILED DESCRIPTION OF THE INVENTION

【0001】[0001]

【発明の属する技術分野】本発明は、工作機械の主軸等
の高速で回転する軸を回転自在に支持する転がり軸受に
関する。
BACKGROUND OF THE INVENTION 1. Field of the Invention The present invention relates to a rolling bearing for rotatably supporting a high-speed rotating shaft such as a main shaft of a machine tool.

【0002】[0002]

【従来の技術】例えば、工作機械の分野においては、生
産性と精度の向上、新素材の加工(セラミックやグラフ
ァイト等の加工)、加工工程の複合化等のため、主軸の
回転がますます高速化される傾向にある。主軸軸受部の
発熱抑制は、そのような主軸の高速化にとって非常に重
要な課題である。
2. Description of the Related Art For example, in the field of machine tools, the rotation of a spindle is increasing at a high speed due to improvements in productivity and accuracy, processing of new materials (processing of ceramics, graphite, etc.), and complex processing. Tend to be Suppression of heat generation of the spindle bearing is a very important issue for such a high-speed spindle.

【0003】図6は、アンギュラ玉軸受13を用いた工
作機械の主軸軸受部を例示している。アンギュラ玉軸受
13は複数個を組み合わせて用いられ、主軸11の回転
精度、剛性を高めるため、所定の予圧が付与される。ま
た、軸受内部の潤滑及び冷却を行うため、各軸受13の
側方にノズル部材14が配置され、ハウジング12の通
路(図示省略)を介して導き入れられた潤滑油が、ノズ
ル部材14から軸受内部空間に向けて噴射される。潤滑
方式にはオイルミスト潤滑、エアオイル潤滑、ジェット
潤滑等があり、使用条件等に応じて適宜選択される。
FIG. 6 illustrates a main shaft bearing portion of a machine tool using an angular ball bearing 13. A plurality of angular ball bearings 13 are used in combination, and a predetermined preload is applied to improve the rotational accuracy and rigidity of the main shaft 11. In order to lubricate and cool the inside of the bearing, a nozzle member 14 is disposed on the side of each bearing 13, and lubricating oil introduced through a passage (not shown) in the housing 12 is supplied from the nozzle member 14 to the bearing 13. It is injected toward the interior space. The lubrication system includes oil mist lubrication, air-oil lubrication, jet lubrication and the like, and is appropriately selected according to use conditions and the like.

【0004】通常、軸受13における内輪13aの幅寸
法Lと外輪13bの幅寸法Sとは同一寸法(L=S)
に、転動体13cのピッチ円径PCDは内輪13aの内
径dと外輪13bの外径Dに対して、PCD≒(d+
D)/2の関係になるように設定されている。軸方向に
隣接する内輪13a間には、間座15が配置される。
Usually, the width L of the inner ring 13a and the width S of the outer ring 13b of the bearing 13 are the same (L = S).
In addition, the pitch circle diameter PCD of the rolling element 13c is equal to the inner diameter d of the inner ring 13a and the outer diameter D of the outer ring 13b by PCD ≒ (d +
D) / 2. The spacer 15 is arranged between the inner rings 13a adjacent in the axial direction.

【0005】軸受13の予圧量は、主軸11の軸端に螺
合させた軸受ナット16で、ラビリンス部材17および
間座15を介して内輪13aを軸方向に締付け調整する
ことによって所定量に設定される。
The preload amount of the bearing 13 is set to a predetermined amount by tightening and adjusting the inner ring 13a in the axial direction via a labyrinth member 17 and a spacer 15 with a bearing nut 16 screwed to the shaft end of the main shaft 11. Is done.

【0006】[0006]

【発明が解決しようとする課題】上述した従来の軸受で
は、主軸(内輪)が高速領域、特にdn値{軸受内径d
(mm)×回転数(rpm)}が50万以上になるよう
な高速領域で回転する場合、以下の問題が発生する。
In the above-mentioned conventional bearing, the main shaft (inner ring) is in a high-speed region, particularly, dn value {bearing inner diameter d.
When rotating in a high-speed region where (mm) × number of rotations (rpm)} is 500,000 or more, the following problem occurs.

【0007】 軸受内部の発熱が大となり、焼付きの
危険性が増大する。また、工作機械主軸などでは、その
温度変化により、加工精度の低下が起こる。
[0007] Heat generation inside the bearing increases, and the risk of seizure increases. Further, in a machine tool main shaft or the like, a change in temperature causes a decrease in processing accuracy.

【0008】 内輪と外輪の温度差が大きくなり(内
輪温度>外輪温度)、高速になればなるほど予圧量が増
え、焼付き、短寿命などの危険性が増大する(回転数と
予圧量との関係が図4のAに示す状態になる。)。一
方、高速領域において、過大予圧が発生しないような予
圧設定にすると、低速運転時の予圧が小さくなりすぎ
て、主軸の剛性不足をきたす(図4のBに示す状態にな
る。)。
[0008] The temperature difference between the inner ring and the outer ring increases (inner ring temperature> outer ring temperature), and the higher the speed, the more the preload increases, and the more dangers such as seizure and short life occur. The relationship is as shown in FIG. 4A.) On the other hand, if the preload is set so as not to generate an excessive preload in the high-speed region, the preload during low-speed operation becomes too small, resulting in insufficient rigidity of the main shaft (the state shown in FIG. 4B).

【0009】本発明は、軸(内輪)が高速領域、特にd
n値が50万以上となるような高速領域で回転する際に
おける上記の問題を解決しようとするものである。
According to the present invention, the shaft (inner ring) is driven in a high speed region, in particular, d.
An object of the present invention is to solve the above-described problem when rotating in a high-speed region where the n value is 500,000 or more.

【0010】[0010]

【課題を解決するための手段】本発明では、内輪の幅寸
法を外輪の幅寸法よりも大きくし、かつ、転動体のピッ
チ円径(PCD)を内輪の内径(d)と外輪の外径
(D)に対して、PCD<(d+D)/2の関係となる
ように設定した。
According to the present invention, the width of the inner ring is made larger than the width of the outer ring, and the pitch diameter (PCD) of the rolling elements is set to the inner diameter (d) of the inner ring and the outer diameter of the outer ring. (D) was set so that PCD <(d + D) / 2.

【0011】軸受の内外輪の温度差は、主に軸受内部に
発生した熱の逃げ方の差によって発生する。通常、外輪
側の方が内輪側に比べて熱が放散しやすいので、温度は
外輪側よりも内輪側が高くなる。内輪の幅寸法を外輪の
幅寸法よりも大きくすることにより、内輪から軸への熱
拡散性が改善されると共に、内輪の空気に触れる表面積
が増大して放熱性が良くなる。そのため、内輪の温度上
昇が抑制され、外輪との温度差が緩和される。
[0011] The temperature difference between the inner and outer rings of the bearing is mainly caused by a difference in how heat generated inside the bearing escapes. Normally, heat is more easily dissipated on the outer ring side than on the inner ring side, so the temperature is higher on the inner ring side than on the outer ring side. By making the width of the inner ring larger than the width of the outer ring, heat diffusion from the inner ring to the shaft is improved, and the surface area of the inner ring that comes into contact with air is increased to improve heat dissipation. Therefore, the temperature rise of the inner ring is suppressed, and the temperature difference with the outer ring is reduced.

【0012】また、PCD<(d+D)/2に設定する
ことにより、軸(内輪)の回転数が同じであっても、転
動体の自転及び公転速度が小さくなるため、軸受内部の
発熱が低減される。
Further, by setting PCD <(d + D) / 2, even if the rotation speed of the shaft (inner ring) is the same, the rotation and revolving speed of the rolling elements are reduced, so that heat generation inside the bearing is reduced. Is done.

【0013】内輪の端部に放熱のための溝または穴を設
けることににより、内輪の空気と触れる表面積が増大し
て放熱性が一層向上する。そのため、内外輪の温度差が
より効果的に緩和される。
By providing a groove or a hole for heat dissipation at the end of the inner ring, the surface area of the inner ring that comes into contact with air is increased and the heat dissipation is further improved. Therefore, the temperature difference between the inner and outer rings is reduced more effectively.

【0014】[0014]

【発明の実施の形態】以下、本発明の実施形態について
説明する。
Embodiments of the present invention will be described below.

【0015】図1は、工作機械の主軸1を回転自在に支
持する軸受部の周辺を示している。主軸1はハウジング
2の内周に挿通され、複数の転がり軸受例えばアンギュ
ラ玉軸受3によってハウジング2に対して回転自在に支
持される。
FIG. 1 shows the periphery of a bearing part which rotatably supports a main shaft 1 of a machine tool. The main shaft 1 is inserted through the inner periphery of the housing 2 and is rotatably supported by the housing 2 by a plurality of rolling bearings, for example, angular ball bearings 3.

【0016】軸受3は、主軸1の外周に嵌着された内輪
3aと、ハウジング2の内周に嵌合された外輪3bと、
内輪3aの軌道面と外輪3bの軌道面との間に配された
複数のボール3cと、ボール3cを円周所定間隔に保持
する保持器3dとで構成される。図2に示すように、内
輪3aの幅寸法Lは外輪3bの幅寸法Sよりも大きく設
定され(L>S)、また、ボール3cのピッチ円径PC
Dは内輪3aの内径dと外輪3bの外径Dに対して、P
CD<(d+D)/2の関係になるように設定されてい
る。
The bearing 3 includes an inner race 3a fitted on the outer periphery of the main shaft 1, an outer race 3b fitted on the inner periphery of the housing 2,
It comprises a plurality of balls 3c arranged between the raceway surface of the inner ring 3a and the raceway surface of the outer ring 3b, and a retainer 3d for holding the balls 3c at a predetermined circumferential interval. As shown in FIG. 2, the width L of the inner ring 3a is set to be larger than the width S of the outer ring 3b (L> S), and the pitch circle diameter PC of the ball 3c.
D is P with respect to the inner diameter d of the inner ring 3a and the outer diameter D of the outer ring 3b.
CD <(d + D) / 2 is set.

【0017】軸方向に隣接した軸受3において、内輪3
aと内輪3aとは相互に直接当接している。図6に示す
ような間座15は配置されていない。そのため、部品点
数が少なく、組立て作業も容易になる。尚、軸受3間の
軸方向間隔が大きい場合等には、内輪3a間に関座を介
在させても良い。また、外輪3b間にはノズル部材4が
配置され、ハウジング2の通路(図示省略)を介して導
き入れられた潤滑油が、ノズル部材4から軸受内部空間
に向けて噴射されて、軸受内部の潤滑及び冷却がなされ
る。
In the bearing 3 adjacent in the axial direction, the inner ring 3
a and the inner ring 3a are in direct contact with each other. The spacer 15 as shown in FIG. 6 is not arranged. Therefore, the number of parts is small, and the assembling work is also facilitated. If the axial distance between the bearings 3 is large, a seat may be interposed between the inner rings 3a. Further, a nozzle member 4 is disposed between the outer rings 3b, and lubricating oil introduced through a passage (not shown) of the housing 2 is injected from the nozzle member 4 toward the bearing internal space, and the inside of the bearing is Lubrication and cooling are provided.

【0018】軸受3の予圧量は、主軸1の軸端に螺合さ
せた軸受ナット5で、ラビリンス部材6を介して内輪3
aを軸方向に締付け調整することによって所定量に設定
される。尚、ラビリンス部材6は、ハウジング2の端面
に固定されたラビリンス部材7と協働して、ラビリンス
シールを形成する。
The amount of preload of the bearing 3 is determined by a bearing nut 5 screwed to the shaft end of the main shaft 1 and through a labyrinth member 6.
a is set to a predetermined amount by tightening and adjusting a in the axial direction. The labyrinth member 6 forms a labyrinth seal in cooperation with a labyrinth member 7 fixed to the end face of the housing 2.

【0019】図3に示す実施形態では、内輪3aの空気
と触れる表面積を増大させ、その放熱性をより高めるた
め、内輪3aの両端部外周に複数の円周溝3a1が設け
られている。円周溝3a1に代えて、螺旋溝を形成す
る、半径方向の貫通穴または有底穴を形成する、軸方向
の貫通穴または有底穴を形成する等の改変が可能であ
る。
In the embodiment shown in FIG. 3, a plurality of circumferential grooves 3a1 are provided on the outer periphery of both ends of the inner ring 3a in order to increase the surface area of the inner ring 3a which comes into contact with air and further enhance the heat radiation. Instead of the circumferential groove 3a1, modifications such as forming a spiral groove, forming a radial through hole or a bottomed hole, and forming an axial through hole or a bottomed hole are possible.

【0020】尚、以上の実施形態では、内輪3aの幅寸
法を軸方向の両側に増大させているが、軸方向の片側に
のみ増大させても良い。
In the above embodiment, the width of the inner ring 3a is increased on both sides in the axial direction, but may be increased on only one side in the axial direction.

【0021】図5は、図1及び図2に示す構成の軸受
{実施例品:L>S、PCD<(d+D)/2}と、比
較例品X{L<S、PCD=(d+D)/2}、比較例
品Y{L=S、PCD=(d+D)/2}を用いて、所
定回転数における内輪温度、内外輪温度差を測定した結
果を示している。測定条件は、潤滑方式:エアオイル潤
滑、回転数:21000rpm、内輪内径d:100m
m、冷却:ハウジング冷却実施、である。同図に示すよ
うに、実施例品における内輪温度、内外輪温度差は、比
較例品Xおよび比較例品Yよりも小さくなることが確認
された。この傾向は、図3に示す構成の軸受3を用いる
と、より顕著になると考えられる。
FIG. 5 shows a bearing having the structure shown in FIGS. 1 and 2 {Example product: L> S, PCD <(d + D) / 2}, and a comparative example product X {L <S, PCD = (d + D). The results of measuring the inner ring temperature and the inner and outer ring temperature difference at a predetermined number of revolutions are shown, using a comparative example product Y {L = S, PCD = (d + D) / 2}. Measurement conditions were as follows: lubrication method: air oil lubrication, rotation speed: 21000 rpm, inner ring inner diameter d: 100 m
m, Cooling: Housing cooling performed. As shown in the figure, it was confirmed that the inner ring temperature and the inner and outer ring temperature difference of the example product were smaller than those of the comparative example product X and the comparative example product Y. It is considered that this tendency becomes more remarkable when the bearing 3 having the configuration shown in FIG. 3 is used.

【0022】尚、本発明は工作機械の主軸に限らず、高
速回転する軸、特にdn値が50万以上となるような高
速領域で回転する軸を支持する転がり軸受に広く適用可
能である。また、軸受形式は例示したようなアンギュラ
玉軸受に限らず、円すいころ軸受等にも同様に適用する
ことができる。
The present invention can be widely applied not only to the main shaft of a machine tool but also to a rolling bearing that supports a high-speed rotating shaft, particularly a shaft that rotates in a high-speed region where the dn value is 500,000 or more. Further, the bearing type is not limited to the angular ball bearing as illustrated, but can be similarly applied to a tapered roller bearing or the like.

【0023】[0023]

【発明の効果】以上説明したように、内輪の幅寸法を外
輪の幅寸法よりも大きくすることにより、内輪から軸へ
の熱拡散性が改善されると共に、内輪の空気に触れる表
面積が増大して放熱性が良くなるため、内輪の温度上昇
が抑制される(内外輪間の温度差が緩和される)。ま
た、PCD<(d+D)/2に設定することにより、転
動体の自転及び公転速度が小さくなるため、軸受内部の
発熱が低減される。このようにして、内輪の温度上昇が
抑制され(内外輪の温度差が緩和され)、かつ、軸受内
部の発熱が低減されることにより、図4のCに示すよう
な予圧変化の少ない構成が得られ、軸(内輪)が高速領
域で回転しても、危険領域に入る心配が少なくなる。
As described above, by making the width of the inner ring larger than the width of the outer ring, the heat diffusion from the inner ring to the shaft is improved, and the surface area of the inner ring that comes into contact with air is increased. As a result, the heat dissipation is improved, so that the temperature rise of the inner ring is suppressed (the temperature difference between the inner and outer rings is reduced). Further, by setting PCD <(d + D) / 2, the rotation and revolving speed of the rolling elements are reduced, so that heat generation inside the bearing is reduced. In this way, the temperature rise of the inner ring is suppressed (the temperature difference between the inner and outer rings is reduced), and the heat generation inside the bearing is reduced, so that the configuration shown in FIG. As a result, even if the shaft (inner ring) rotates in the high-speed region, there is less fear of entering the dangerous region.

【0024】また、内輪の端部に放熱のための溝または
穴を設けることにより、内輪の空気と触れる表面積が増
大して放熱性が一層向上するので、上記効果がより一層
顕著に発揮される。
Further, by providing a groove or a hole for heat dissipation at the end of the inner ring, the surface area of the inner ring in contact with air is increased and the heat dissipation is further improved, so that the above-mentioned effect is more remarkably exhibited. .

【0025】本発明の転がり軸受は、上記効果を有する
ことにより、dn値が50万以上となるような高速領域
で使用するのに好適である。
The rolling bearing of the present invention having the above-mentioned effects is suitable for use in a high-speed region where the dn value is 500,000 or more.

【図面の簡単な説明】[Brief description of the drawings]

【図1】本発明の実施例に係わる主軸軸受部の周辺を示
す断面図である。
FIG. 1 is a cross-sectional view showing a periphery of a main shaft bearing according to an embodiment of the present invention.

【図2】図1における軸受を示す断面図である。FIG. 2 is a sectional view showing the bearing in FIG. 1;

【図3】他の実施形態に係わる軸受を示す断面図であ
る。
FIG. 3 is a cross-sectional view illustrating a bearing according to another embodiment.

【図4】回転数と予圧量との関係を示す図である。FIG. 4 is a diagram showing a relationship between a rotation speed and a preload amount.

【図5】内輪温度と内外輪温度差の測定結果を示す図で
ある。
FIG. 5 is a diagram showing a measurement result of a difference between an inner ring temperature and an inner and outer ring temperature.

【図6】従来の主軸軸受部の周辺を示す断面図である。FIG. 6 is a cross-sectional view showing the periphery of a conventional spindle bearing.

【符号の説明】[Explanation of symbols]

1 主軸 2 ハウジング 3 軸受 3a 内輪 3b 外輪 3c ボール DESCRIPTION OF SYMBOLS 1 Main shaft 2 Housing 3 Bearing 3a Inner ring 3b Outer ring 3c Ball

Claims (3)

【特許請求の範囲】[Claims] 【請求項1】 予圧が付与され、高速で回転する軸をハ
ウジングに対して回転自在に支持する転がり軸受であっ
て、内輪の幅寸法が外輪の幅寸法よりも大きく、かつ、
転動体のピッチ円径(PCD)が内輪の内径(d)と外
輪の外径(D)に対して、PCD<(d+D)/2の関
係を有することを特徴とする高速回転軸支持用転がり軸
受。
1. A rolling bearing which is preloaded and rotatably supports a shaft rotating at high speed with respect to a housing, wherein a width of an inner ring is larger than a width of an outer ring, and
A rolling circle for supporting a high-speed rotating shaft, wherein a pitch circle diameter (PCD) of the rolling element has a relationship of PCD <(d + D) / 2 with respect to an inner diameter (d) of the inner ring and an outer diameter (D) of the outer ring. bearing.
【請求項2】 内輪の端部に放熱のための溝または穴を
有することを特徴とする請求項1記載の高速回転軸支持
用転がり軸受。
2. The rolling bearing for supporting a high-speed rotating shaft according to claim 1, wherein a groove or a hole for heat radiation is provided at an end of the inner ring.
【請求項3】 dn値が50万以上で使用される請求項
1又は2記載の高速回転軸支持用転がり軸受。
3. The rolling bearing for supporting a high-speed rotating shaft according to claim 1, wherein the rolling bearing has a dn value of 500,000 or more.
JP8144797A 1997-03-31 1997-03-31 Rolling bearing for supporting high speed rotary shaft Pending JPH10274244A (en)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP8144797A JPH10274244A (en) 1997-03-31 1997-03-31 Rolling bearing for supporting high speed rotary shaft

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP8144797A JPH10274244A (en) 1997-03-31 1997-03-31 Rolling bearing for supporting high speed rotary shaft

Publications (1)

Publication Number Publication Date
JPH10274244A true JPH10274244A (en) 1998-10-13

Family

ID=13746664

Family Applications (1)

Application Number Title Priority Date Filing Date
JP8144797A Pending JPH10274244A (en) 1997-03-31 1997-03-31 Rolling bearing for supporting high speed rotary shaft

Country Status (1)

Country Link
JP (1) JPH10274244A (en)

Cited By (5)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP2002542436A (en) * 1999-04-16 2002-12-10 エスケイエフ フランス Hard ball bearings
DE10045163B4 (en) * 1999-09-13 2005-03-17 Nsk Ltd. Wellenlagerungsanordung
WO2008023787A1 (en) * 2006-08-25 2008-02-28 Nsk Ltd. Angular ball bearing
DE102011083606A1 (en) * 2011-09-28 2013-03-28 Schaeffler Technologies AG & Co. KG Bearing assembly for pinion shafts in gear box, has angular contact ball bearings with adjusting shims between outer rings and inner rings so that distances of raceway groove on inner rings and outer rings are equal
WO2022137862A1 (en) * 2020-12-22 2022-06-30 株式会社日立製作所 This semiconductor device comprises: a semiconductor layer having a main surface; a first conductive-type well region formed on a surface layer portion of the main surface of the semiconductor layer; a first conductive-type first impurity region formed on a surface layer portion of the well region and having an inner wall portion; and a second conductive-type annular second impurity region formed on the surface layer portion of the well region inside the inner wall part so as to form a pn junction with the well region.

Cited By (5)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP2002542436A (en) * 1999-04-16 2002-12-10 エスケイエフ フランス Hard ball bearings
DE10045163B4 (en) * 1999-09-13 2005-03-17 Nsk Ltd. Wellenlagerungsanordung
WO2008023787A1 (en) * 2006-08-25 2008-02-28 Nsk Ltd. Angular ball bearing
DE102011083606A1 (en) * 2011-09-28 2013-03-28 Schaeffler Technologies AG & Co. KG Bearing assembly for pinion shafts in gear box, has angular contact ball bearings with adjusting shims between outer rings and inner rings so that distances of raceway groove on inner rings and outer rings are equal
WO2022137862A1 (en) * 2020-12-22 2022-06-30 株式会社日立製作所 This semiconductor device comprises: a semiconductor layer having a main surface; a first conductive-type well region formed on a surface layer portion of the main surface of the semiconductor layer; a first conductive-type first impurity region formed on a surface layer portion of the well region and having an inner wall portion; and a second conductive-type annular second impurity region formed on the surface layer portion of the well region inside the inner wall part so as to form a pn junction with the well region.

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