JPH10265266A - Sliding member for mechanical sealing - Google Patents
Sliding member for mechanical sealingInfo
- Publication number
- JPH10265266A JPH10265266A JP9073569A JP7356997A JPH10265266A JP H10265266 A JPH10265266 A JP H10265266A JP 9073569 A JP9073569 A JP 9073569A JP 7356997 A JP7356997 A JP 7356997A JP H10265266 A JPH10265266 A JP H10265266A
- Authority
- JP
- Japan
- Prior art keywords
- pore diameter
- sliding member
- titanium diboride
- tib
- porosity
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Pending
Links
Classifications
-
- C—CHEMISTRY; METALLURGY
- C04—CEMENTS; CONCRETE; ARTIFICIAL STONE; CERAMICS; REFRACTORIES
- C04B—LIME, MAGNESIA; SLAG; CEMENTS; COMPOSITIONS THEREOF, e.g. MORTARS, CONCRETE OR LIKE BUILDING MATERIALS; ARTIFICIAL STONE; CERAMICS; REFRACTORIES; TREATMENT OF NATURAL STONE
- C04B38/00—Porous mortars, concrete, artificial stone or ceramic ware; Preparation thereof
Landscapes
- Chemical & Material Sciences (AREA)
- Engineering & Computer Science (AREA)
- Ceramic Engineering (AREA)
- Materials Engineering (AREA)
- Structural Engineering (AREA)
- Organic Chemistry (AREA)
- Ceramic Products (AREA)
- Mechanical Sealing (AREA)
Abstract
Description
【０００１】[0001]
【発明の属する技術分野】本発明は、メカニカルシール
用摺動部材に関する。The present invention relates to a sliding member for a mechanical seal.
【０００２】[0002]
【従来の技術】互いに接触して回転摺動される固定側お
よび回転側のメカニカルシール用摺動部材において、前
記固定側摺動部材はカーボン材などの固体潤滑材により
形成され、かつ前記回転側摺動部材は炭化ケイ素、窒化
ケイ素、アルミナ等のセラミックス、ＷＣ−Ｃｏ系等の
超硬合金、ＴｉＣ系、Ｔｉ（Ｃ，Ｎ）系等のサーメット
により形成されている。特に、高腐食性流体、アブレッ
シブ流体等を密封する場合、または酸化雰囲気などの摺
動部材が劣化する過酷な環境下で用いられる場合には、
一般に前記回転側および固定側の摺動部材はセラミック
スから形成されている。2. Description of the Related Art A fixed-side sliding member and a rotating-side mechanical seal sliding member which are rotated and slid in contact with each other, wherein the fixed-side sliding member is formed of a solid lubricant such as carbon material, The sliding member is formed of ceramics such as silicon carbide, silicon nitride, and alumina, cemented carbide such as WC-Co, and cermets such as TiC and Ti (C, N). In particular, when sealing highly corrosive fluids, abrasive fluids, etc., or when used in harsh environments where sliding members deteriorate such as oxidizing atmosphere,
Generally, the sliding members on the rotating side and the fixed side are formed of ceramics.
【０００３】前記回転側および固定側の摺動部材をセラ
ミックスにより形成する場合には、密封流体の漏洩量を
減少させるために、それらの接触面（シール面）を鏡面
状態にしている。しかしながら、前記回転側および固定
側の摺動部材のシール面を鏡面状態にして長時間使用し
続けると、シール面同士が吸着し、高トルクになって回
転摺動が困難になる。When the rotating and stationary sliding members are made of ceramics, their contact surfaces (seal surfaces) are mirror-finished in order to reduce the amount of leakage of the sealed fluid. However, if the rotating side and the fixed side sliding members are used for a long time with the sealing surfaces of the sliding members being mirror-finished, the sealing surfaces are attracted to each other, resulting in high torque and making rotational sliding difficult.
【０００４】そこで、前記回転側および固定側の摺動部
材のシール面を鏡面仕上げした後、一方の摺動部材のシ
ール面を機械的研磨等により荒して対処している。しか
しながら、前記摺動部材のシール面を機械的に荒すと、
密封流体の漏洩量が増大すると共に、シール面を荒した
ことにより機械的な摩耗量が大幅に増大するという新た
な問題が生じる。In order to cope with this problem, the sealing surfaces of the sliding members on the rotating side and the fixed side are mirror-finished, and then the sealing surface of one of the sliding members is roughened by mechanical polishing or the like. However, when the sealing surface of the sliding member is mechanically roughened,
A new problem arises in that the amount of leakage of the sealing fluid increases and the amount of mechanical wear increases greatly due to the roughened sealing surface.
【０００５】特公平２−５９４９号公報、特公平２−５
９５１号公報には、前記回転側および固定側の摺動部材
の一方のシール面に外周端から内周端に達する曲線環状
溝を設けて、流体の漏洩、吸着および焼き付けを防止す
ることが開示されている。しかしながら、所定数の曲線
環状溝が均一な深さおよび幅で形成された摺動部材を作
製することは極めて困難である。特に、セラミックスか
ら摺動部材のシール面に前記曲線環状溝を機械的加工に
より形成すると、不可避的にチッピングおよびマイクロ
クラックが発生し、結果的には使用中に溝端部より破壊
が進行して異常摩耗の原因になる。[0005] Japanese Patent Publication No. 2-5949, Japanese Patent Publication No. 2-5
No. 951 discloses that a curved annular groove extending from an outer peripheral end to an inner peripheral end is provided on one sealing surface of the rotating side and fixed side sliding members to prevent fluid leakage, adsorption and burning. Have been. However, it is extremely difficult to produce a sliding member in which a predetermined number of curved annular grooves are formed with a uniform depth and width. In particular, if the curved annular groove is formed from the ceramic on the sealing surface of the sliding member by mechanical processing, chipping and microcracks will inevitably occur, and as a result, breakage will progress from the groove end during use and abnormal May cause wear.
【０００６】[0006]
【発明が解決しようとする課題】本発明は、高ＰＶ値
（Ｐ：密封圧力、Ｖ：回転速度）での使用時において吸
着等を生じることなく、長時間安定して使用することが
可能なメカニカルシール用摺動部材を提供しようとする
ものである。The present invention can be used stably for a long time without causing adsorption or the like when used at a high PV value (P: sealing pressure, V: rotation speed). An object of the present invention is to provide a sliding member for a mechanical seal.
【０００７】[0007]
【課題を解決するための手段】本発明に係わるメカニカ
ルシール用摺動部材は、固定側および回転側の摺動部材
のうち、少なくとも一方が８０重量％以上の二硼化チタ
ン（ＴｉＢ2 ）を含む二硼化チタン焼結体からなり、シ
ール面の気孔率が５〜１５％、平均気孔径が５〜１５μ
ｍでかつ最大気孔径が５０μｍ以下であることを特徴と
するものである。SUMMARY OF THE INVENTION A sliding member for a mechanical seal according to the present invention comprises at least one of stationary and rotating sliding members made of titanium diboride (TiB 2 ) of 80% by weight or more. Porosity of the sealing surface is 5 to 15%, and the average pore diameter is 5 to 15 μm.
m and a maximum pore diameter of 50 μm or less.
【０００８】[0008]
【発明に実施の形態】以下、本発明のメカニカルシール
用摺動部材を詳細に説明する。このメカニカルシール用
摺動部材は、固定側および回転側の摺動部材のうち、少
なくとも一方が８０重量％以上の二硼化チタン（ＴｉＢ
2 ）を含む二硼化チタン焼結体からなり、シール面の気
孔率が５〜１５％、平均気孔径が５〜１５μｍでかつ最
大気孔径が５０μｍ以下である。DETAILED DESCRIPTION OF THE PREFERRED EMBODIMENTS Hereinafter, a sliding member for a mechanical seal according to the present invention will be described in detail. In this mechanical seal sliding member, at least one of the stationary side and the rotating side sliding members has a titanium diboride (TiB) content of 80% by weight or more.
The sealing surface has a porosity of 5 to 15%, an average pore diameter of 5 to 15 μm, and a maximum pore diameter of 50 μm or less.
【０００９】前記ＴｉＢ2 焼結体は、ＴｉＢ2 以外の成
分としてＮｉ、Ｃｒの炭化物、硼化物等を含む。前記焼
結体中のＴｉＢ2 量を８０重量％未満にすると、ＴｉＢ
2 の良好な特性、つまり高硬度（高耐摩耗性）、高潤滑
性、高耐食性、高熱伝導性が損なわれる。より好ましい
前記焼結体中のＴｉＢ2 量は、８５重量％以上である。The TiB 2 sintered body contains Ni, Cr carbides and borides as components other than TiB 2 . When the amount of TiB 2 in the sintered body is less than 80% by weight, TiB 2
The good properties of 2 , namely high hardness (high wear resistance), high lubricity, high corrosion resistance and high thermal conductivity are impaired. More preferably, the amount of TiB 2 in the sintered body is 85% by weight or more.
【００１０】前記ＴｉＢ2 焼結体のシール面の気孔率を
限定したのは、次のような理由によるものである。前記
ＴｉＢ2 焼結体のシール面の気孔率を５％未満にする
と、高ＰＶ値条件下で吸着現象が起こり易くなる。一
方、前記ＴｉＢ2 焼結体のシール面の気孔率が１５％を
越えるとＴｉＢ2 焼結体の強度が低下して摺動によりＴ
ｉＢ2 粒子が脱落して異常摩耗を起こす恐れがある。よ
り好ましい前記ＴｉＢ2 焼結体のシール面の気孔率は、
７．５〜１２．５％である。[0010] The porosity of the sealing surface of the TiB 2 sintered body is limited for the following reasons. When the porosity of the sealing surface of the TiB 2 sintered body is less than 5%, the adsorption phenomenon easily occurs under high PV value conditions. On the other hand, T by the sliding strength of the TiB 2 porosity of the sealing surface of the sintered body exceeds 15%, the TiB 2 sintered body is lowered
The iB 2 particles may fall off and cause abnormal wear. More preferred porosity of the sealing surface of the TiB 2 sintered body,
7.5 to 12.5%.
【００１１】前記ＴｉＢ2 焼結体のシール面の最大気孔
径が５０μｍを越えると、前記焼結体の強度等の特性が
低下する恐れがある。より好ましい前記ＴｉＢ2 焼結体
のシール面の最大気孔径は、４０μｍ以下である。If the maximum pore diameter of the sealing surface of the TiB 2 sintered body exceeds 50 μm, the properties such as strength of the sintered body may be reduced. More preferably, the maximum pore diameter of the sealing surface of the TiB 2 sintered body is 40 μm or less.
【００１２】なお、前述したＴｉＢ2 焼結体のシール面
は、ＴｉＢ2 焼結体を通常のダイヤモンド砥石で研磨
後、最終的に１μｍのダイヤモンドペーストを用いてラ
ッピング処理することにより形成され、そのシール面の
気孔率、平均気孔径を画像回折装置によるコンピュータ
処理を行うことにより算出される。一例として、シール
面の気孔率が５〜１５％、平均気孔径が５〜１５μｍの
ＴｉＢ2 焼結体のＳＥＭ写真の模式図を図１に示す。[0012] Incidentally, the sealing surface of the TiB 2 sintered body described above is formed by lapping with after polishing the TiB 2 sintered in a conventional diamond grindstone, finally 1μm diamond paste, the The porosity and average pore diameter of the sealing surface are calculated by performing computer processing using an image diffraction device. As an example, FIG. 1 shows a schematic view of an SEM photograph of a TiB 2 sintered body having a porosity of 5 to 15% on the sealing surface and an average pore diameter of 5 to 15 μm.
【００１３】以上説明した本発明に係わるメカニカルシ
ール用摺動部材は、シール面の気孔率が５〜１５％、平
均気孔径が５〜１５μｍでかつ最大気孔径が５０μｍ以
下である８０重量％以上の二硼化チタンを含む二硼化チ
タン焼結体から構成することよって、高ＰＶ値（Ｐ：密
封圧力、Ｖ：回転速度）での使用時において吸着等を生
じることなく、長時間安定して使用することができる。The sliding member for a mechanical seal according to the present invention described above has a sealing surface having a porosity of 5 to 15%, an average pore size of 5 to 15 μm, and a maximum pore size of 80% by weight or more. By using a titanium diboride sintered body containing titanium diboride of the formula (1), when used at a high PV value (P: sealing pressure, V: rotation speed), it is stable for a long time without causing adsorption or the like. Can be used.
【００１４】すなわち、二硼化チタン（ＴｉＢ2 ）は、
他のエンジニアリングセラミックスに比べて高硬度（マ
イクロビッカース硬さ；３３７０）であり、優れた耐摩
耗性を有する。また、ＴｉＢ2 焼結体をメカニカルシー
ル用摺動部材として使用すると、ＴｉＢ2 が有する高潤
滑性により摩擦係数が小さくなり、摺動による摩擦熱の
発生を抑制できる。また、アブレッシブ粒体または腐食
性溶液（例えば酸またはアルカリ）の密封に使用しても
ＴｉＢ2 の高耐摩耗性、高潤滑性、高耐食性により長期
間に亘って使用することが可能になる。しかしながら、
高ＰＶ値条件では使用時に吸着現象が起こって高トルク
になり回転摺動に支障をきたす場合もある。That is, titanium diboride (TiB 2 )
It has higher hardness (micro Vickers hardness; 3370) than other engineering ceramics, and has excellent wear resistance. Further, when the TiB 2 sintered body is used as a sliding member for a mechanical seal, the friction coefficient is reduced due to the high lubricity of TiB 2 , and the generation of frictional heat due to sliding can be suppressed. Even when used for sealing abrasive grains or corrosive solutions (for example, acids or alkalis), TiB 2 can be used for a long time because of its high wear resistance, high lubricity, and high corrosion resistance. However,
Under high PV value conditions, an adsorption phenomenon occurs during use, resulting in a high torque, which may hinder rotational sliding.
【００１５】本発明は、前記ＴｉＢ2 焼結体からなる摺
動部材において、シール面の気孔率、平均気孔径および
最大気孔径を特定化することによって、使用時に流体が
前記シール面の気孔に保持され易くなり、ＴｉＢ2 本来
の高潤滑性に加えて保持された流体が潤滑剤の役目を果
たすため、高ＰＶ値条件下においても吸着現象を生じる
のを防止できる。また、前記シール面での密封流体の漏
洩を防止することができる。According to the present invention, in the sliding member made of the TiB 2 sintered body, the porosity, the average pore diameter, and the maximum pore diameter of the sealing surface are specified, so that a fluid is used in the pores of the sealing surface during use. It is easy to be retained, and the retained fluid plays the role of a lubricant in addition to the inherent high lubricity of TiB 2 , so that it is possible to prevent the adsorption phenomenon from occurring even under high PV value conditions. Further, leakage of the sealed fluid at the sealing surface can be prevented.
【００１６】[0016]
【実施例】以下、本発明の実施例を詳細に説明する。 （実施例１〜１１、比較例１〜９）市販の純度約９８．
８％、平均粒径７．５μｍのＴｉＢ2 粉末に焼結助剤と
して純度約９９％、平均粒径８．５μｍのＮｉ粉末８．
５ｗｔ％を添加し、直径１０ｍｍの超硬製ボールを用い
て湿式粉砕混合した。つづいて、所定量のバインダおよ
び分散剤を添加し、スプレードライヤを用いて造粒し
た。この造粒粉をリング成形用金型（外径２６ｍｍ、内
径１０ｍｍ）に充填した後、約１００ＭＰａの圧力で成
形した。ひきつづき、アルゴンガス雰囲気中、１８００
〜２０００℃で２時間常圧焼結した。得られた焼結体の
一部は、気孔率を調節するためにアルゴンガス雰囲気
中、１５０ＭＰａの圧力で１９００℃、１時間ＨＩＰ処
理を行った。また、一部のＨＩＰ処理品については硝酸
を用いてＴｉＢ2 粒子をエッチング処理し、シール面の
気孔率を調整した。Embodiments of the present invention will be described below in detail. (Examples 1 to 11, Comparative Examples 1 to 9) Commercially available purity of about 98.
Ni powder having a purity of about 99% and a mean particle size of 8.5 μm as a sintering aid for TiB 2 powder having a mean particle size of 8% and 7.5 μm.
5 wt% was added and wet-pulverized and mixed using a carbide ball having a diameter of 10 mm. Subsequently, predetermined amounts of a binder and a dispersant were added, and the mixture was granulated using a spray dryer. This granulated powder was filled into a ring molding die (outer diameter 26 mm, inner diameter 10 mm), and then molded at a pressure of about 100 MPa. Then, in an argon gas atmosphere, 1800
Sintered at ２０００2000 ° C. for 2 hours under normal pressure. A part of the obtained sintered body was subjected to a HIP treatment at 1900 ° C. for 1 hour at a pressure of 150 MPa in an argon gas atmosphere to adjust the porosity. For some HIP-treated products, the TiB 2 particles were etched using nitric acid to adjust the porosity of the sealing surface.
【００１７】得られたＴｉＢ2 焼結体を下記表１、表２
に示すように回転側摺動部材および／または固定側摺動
部材とし、かつＴｉＢ2 焼結体を回転側摺動部材または
固定側摺動部材として用いた場合には相手部材である回
転側摺動部材または固定側摺動部材として市販のアルミ
ナ（Ａｌ2 Ｏ3 ）焼結体、炭化ケイ素（ＳｉＣ）焼結
体、部分安定化ジルコニア（Ｙ−ＰＳＺ）焼結体、超硬
合金（ＷＣ−Ｃｏ）を用いて、前記ＴｉＢ2 焼結体から
なる回転側摺動部材および／または固定側摺動部材の摺
動特性を評価した。また、ＴｉＢ2 焼結体以外の前記セ
ラミックスからなる回転側摺動部材および／または固定
側摺動部材の摺動特性も評価した。さらに、前記摺動部
材のシール面の気孔率および平均気孔径を画像解析装置
によるコンピュータ処理により算出した。これらの結果
を下記表１、表２に併記する。なお、摺動試験は、下記
条件により行った。The obtained TiB 2 sintered body was prepared as shown in Tables 1 and 2 below.
When the TiB 2 sintered body is used as the rotating side sliding member or the fixed side sliding member, the rotating side sliding member and / or the fixed side sliding member as shown in FIG. Commercially available alumina (Al 2 O 3 ) sintered body, silicon carbide (SiC) sintered body, partially stabilized zirconia (Y-PSZ) sintered body, cemented carbide (WC- Co), the sliding characteristics of the rotating sliding member and / or the fixed sliding member made of the TiB 2 sintered body were evaluated. In addition, the sliding characteristics of the rotating sliding member and / or the fixed sliding member made of the ceramics other than the TiB 2 sintered body were also evaluated. Further, the porosity and the average pore diameter of the sealing surface of the sliding member were calculated by computer processing using an image analyzer. These results are also shown in Tables 1 and 2 below. The sliding test was performed under the following conditions.
【００１８】［摺動試験条件］ ・回転側摺動部材；外径２０ｍｍ、内径８ｍｍ、厚さ５
ｍｍ（シール面鏡面仕上げ） ・固定側摺動部材；外径２０ｍｍ、内径８ｍｍ、厚さ５
ｍｍ（シール面鏡面仕上げ） ・密封圧力（Ｐ）；５０ｋｇｆ／ｃｍ2 ・回転速度（Ｖ）；８ｍ／ｓ ・ＰＶ値 ；４００（ｋｇｆ／ｃｍ2 ）・（ｍ／
ｓ） ・潤滑条件 ；２Ｎ−ＨＣｌ溶液 ・試験時間 ；２００時間[Sliding test conditions] Rotation side sliding member: outer diameter 20 mm, inner diameter 8 mm, thickness 5
mm (mirror finish on seal surface) ・ Sliding member on fixed side; outer diameter 20 mm, inner diameter 8 mm, thickness 5
mm (mirror finish on sealing surface) Sealing pressure (P): 50 kgf / cm 2 Rotation speed (V): 8 m / s PV value: 400 (kgf / cm 2 )
s)-Lubrication condition; 2N-HCl solution-Test time: 200 hours
【００１９】[0019]
【表１】 [Table 1]
【００２０】[0020]
【表２】 前記表１、表２から明らかなように実施例１〜１１の摺
動部材は比較例１〜９の摺動部材に比べて摩擦係数が低
く、かつ摩耗特性も優れていることがわかる。[Table 2] As is clear from Tables 1 and 2, the sliding members of Examples 1 to 11 have a lower coefficient of friction and better wear characteristics than the sliding members of Comparative Examples 1 to 9.
【００２１】[0021]
【発明の効果】以上詳述したように、本発明によれば高
ＰＶ値（Ｐ：密封圧力、Ｖ：回転速度）での使用時にお
いて吸着等を生じることなく、長時間安定して使用する
ことが可能な長寿命、高信頼性のメカニカルシール用摺
動部材を提供することができる。As described in detail above, according to the present invention, when used at a high PV value (P: sealing pressure, V: rotation speed), the device is stably used for a long time without causing adsorption or the like. It is possible to provide a long-life, high-reliability sliding member for a mechanical seal that can be used.
【図１】シール面の気孔率が５〜１５％、平均気孔径が
５〜１５μｍのＴｉＢ2 焼結体のＳＥＭ写真を模式的に
示す図。FIG. 1 is a view schematically showing an SEM photograph of a TiB 2 sintered body having a porosity of a sealing surface of 5 to 15% and an average pore diameter of 5 to 15 μm.
───────────────────────────────────────────────────── フロントページの続き (72)発明者 岡田 裕 愛知県刈谷市小垣江町南藤１番地 東芝セ ラミックス株式会社刈谷製造所内 ──────────────────────────────────────────────────続 き Continuing on the front page (72) Inventor Hiroshi Okada 1 Minami Fuji, Ogakie-cho, Kariya-shi, Aichi Prefecture Toshiba Ceramics Co., Ltd. Kariya Works
Claims (1)
少なくとも一方が８０重量％以上の二硼化チタンを含む
二硼化チタン焼結体からなり、シール面の気孔率が５〜
１５％、平均気孔径が５〜１５μｍでかつ最大気孔径が
５０μｍ以下であることを特徴とするメカニカルシール
用摺動部材。Claims: 1. A fixed side and a rotating side sliding member,
At least one is made of a titanium diboride sintered body containing 80% by weight or more of titanium diboride, and the porosity of the sealing surface is 5 to 5.
A sliding member for a mechanical seal, wherein the sliding member has a mean pore diameter of 5% to 15 μm and a maximum pore diameter of 50 μm or less.
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP9073569A JPH10265266A (en) | 1997-03-26 | 1997-03-26 | Sliding member for mechanical sealing |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP9073569A JPH10265266A (en) | 1997-03-26 | 1997-03-26 | Sliding member for mechanical sealing |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| JPH10265266A true JPH10265266A (en) | 1998-10-06 |
Family
ID=13522048
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP9073569A Pending JPH10265266A (en) | 1997-03-26 | 1997-03-26 | Sliding member for mechanical sealing |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPH10265266A (en) |
Cited By (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JP2007508156A (en) * | 2003-10-14 | 2007-04-05 | ギューリング，イェルク | Shaft tool and associated coolant / lubricant supply points |
-
1997
- 1997-03-26 JP JP9073569A patent/JPH10265266A/en active Pending
Cited By (3)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JP2007508156A (en) * | 2003-10-14 | 2007-04-05 | ギューリング，イェルク | Shaft tool and associated coolant / lubricant supply points |
| JP2011083893A (en) * | 2003-10-14 | 2011-04-28 | Guehring Joerg | Shaft tool and device equipped with the same |
| JP2012196762A (en) * | 2003-10-14 | 2012-10-18 | Guehring Joerg | Boundary area between shaft tool and connection piece |
Similar Documents
| Publication | Publication Date | Title |
|---|---|---|
| JP4744704B2 (en) | Method for manufacturing wear-resistant member | |
| US5762895A (en) | Bearing material of porous SIC having a trimodal pore composition | |
| JP3350394B2 (en) | Graphite composite silicon carbide sintered body, graphite composite silicon carbide sintered composite, and mechanical seal | |
| US6398991B1 (en) | Processes for making a silicon carbide composition | |
| US20020160902A1 (en) | Composite material based on silicon carbide and carbon, process for its production and its use | |
| CA2145161A1 (en) | Method for making a ceramic metal composite | |
| JPH10203872A (en) | Sliding material composed of silicon carbide | |
| JPH01115870A (en) | Slip or seal member pair and its production | |
| WO2007097402A1 (en) | Sintered ceramic, slide part therefrom, and process for producing sintered ceramic | |
| JPH10265266A (en) | Sliding member for mechanical sealing | |
| JP2507480B2 (en) | SiC-Al Lower 2 O Lower 3 Composite Sintered Body and Manufacturing Method Thereof | |
| JP2011132126A (en) | Wear-resistant member | |
| JP3419154B2 (en) | Cutting tool member and method of manufacturing the same | |
| JP2004002067A (en) | Wear-resistant member and its production process | |
| JPS61127664A (en) | Silicon carbide sliding material | |
| JP2625505B2 (en) | Manufacturing method of ceramics-carbon composite material | |
| JP2744856B2 (en) | Titanium boride composite silicon carbide sintered body for mechanical seal and mechanical seal | |
| JPS62138377A (en) | Silicon carbide base composite material | |
| JP2604155B2 (en) | Ceramic tool with coating layer | |
| JP2002005180A (en) | Rolling bearing | |
| JP3339645B2 (en) | Method for producing silicon carbide-carbon composite material | |
| JP2004339587A (en) | Self-lubricating hard material | |
| JPH07267730A (en) | Zirconia vane for rotary compressor | |
| JP2836866B2 (en) | Ceramic-SiC-molybdenum disulfide-based composite material and its sliding parts | |
| JP2566580B2 (en) | Silicon carbide / silicon nitride composite sintered body |