JPH10239122A - Area flowmeter and its moving element - Google Patents
Area flowmeter and its moving elementInfo
- Publication number
- JPH10239122A JPH10239122A JP5984197A JP5984197A JPH10239122A JP H10239122 A JPH10239122 A JP H10239122A JP 5984197 A JP5984197 A JP 5984197A JP 5984197 A JP5984197 A JP 5984197A JP H10239122 A JPH10239122 A JP H10239122A
- Authority
- JP
- Japan
- Prior art keywords
- moving element
- chemical
- magnet
- flowmeter
- outer layer
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Pending
Links
Landscapes
- Measuring Volume Flow (AREA)
Abstract
Description
【0001】[0001]
【発明の属する技術分野】本発明は面積流量計及びその
移動子に関する。BACKGROUND OF THE INVENTION 1. Field of the Invention The present invention relates to an area flowmeter and its moving element.
【0002】[0002]
【従来の技術とその問題点】半導体集積回路、液晶表示
器などの電子応用機器用部品の製造においては、フッ化
水素の水溶液(フッ酸)、塩酸など化学的活性の強い薬
液を用いた化学的処理工程がある。このような処理工程
で使用される薬液は高純度であることが必須であり、特
に金属イオンの混入は微量であっても製品の不良率に致
命的な影響を及ぼすため、たとえ薬液に対する耐性が高
い金属であっても金属が薬液と直接接触することは避け
なければならない。2. Description of the Related Art In the manufacture of parts for electronic application equipment such as semiconductor integrated circuits and liquid crystal displays, chemicals using a chemically active chemical such as an aqueous solution of hydrogen fluoride (hydrofluoric acid) or hydrochloric acid are used. There is a typical processing step. It is essential that the chemicals used in such processing steps be of high purity, and in particular, even a small amount of metal ions may have a fatal effect on the product rejection rate even if the amount is very small. Even for high metals, direct contact of the metal with the chemical must be avoided.
【0003】したがって、この処理工程に使用する設備
の薬液と接する接液部には、薬液中への異物、とりわけ
金属イオンの溶出や混入による薬液の汚染ができるだけ
少ない材料、構造のものが用いられ、現在では殆どの接
液部にPTFE(ポリテトラフルオロエチレン)、PF
A(テトラフルオロエチレンーペルフルオロアルキルビ
ニルエーテル共重合体)などの汚染が少なく、かつ高い
耐薬品性を有するフッ素樹脂が用いられる。[0003] Therefore, the liquid contacting part of the equipment used in this treatment step, which is in contact with the chemical solution, is made of a material or a structure which minimizes contamination of the chemical solution by elution or mixing of foreign substances, particularly metal ions, into the chemical solution. Currently, most of the wetted parts are PTFE (polytetrafluoroethylene), PF
A (tetrafluoroethylene-perfluoroalkyl vinyl ether copolymer) or other fluororesin that has low contamination and high chemical resistance is used.
【0004】一方、この処理工程に用いられる薬液、特
にフッ酸は分子が小さく、浸透性が大であるため、一部
の分子が上記のフッ素樹脂の構造物の分子間を透過して
気体となって外部に漏洩し、外部に耐薬品性の低い部品
があるとそれを腐食し、機能を失わせることがある。On the other hand, since the chemical solution used in this treatment process, especially hydrofluoric acid, has small molecules and high permeability, some molecules permeate between the molecules of the above-mentioned fluororesin structure to form a gas. And leaks to the outside, and if there is a component with low chemical resistance outside, it may corrode and lose its function.
【0005】以上のように、半導体集積回路、液晶表示
器などの電子応用機器用部品の製造における化学処理工
程に使用される機器、部品には、接液部をPTFEやP
FAなどのフッ素樹脂で構成し、かつ薬液分子の透過に
よって機能が損なわれたり、薬液の汚染が生じない構造
が要求される。As described above, devices and parts used in the chemical treatment process in the manufacture of electronic application parts such as semiconductor integrated circuits and liquid crystal displays have liquid contact parts made of PTFE or P
A structure that is made of a fluororesin such as FA and that does not impair the function due to the permeation of the drug solution molecules and does not cause contamination of the drug solution is required.
【0006】上記の化学処理工程において、薬液の流量
管理または制御にはいろいろな流量計が使用されてお
り、これらの流量計の一つのタイプに、図3または図4
のような、測定管1の中を流れる流体によって上下させ
られる移動子Fを備え、移動子の位置によって流量を求
めるいわゆる面積流量計があり、図3は測定管が内面を
テーパー面とし、図4は測定管の測定部全長が同径なス
トレート管であるが、測定管の内側部に絞り部1aがあ
り、この絞り部内を上部ほど大径となるテーパー状の移
動子Fが流量に応じて上下動させられるタイプのもので
ある。In the above-mentioned chemical treatment process, various flow meters are used for controlling or controlling the flow rate of the chemical solution. One type of these flow meters is shown in FIG. 3 or FIG.
There is a so-called area flowmeter which has a moving element F which is moved up and down by a fluid flowing through the measuring tube 1 and obtains a flow rate according to the position of the moving element. FIG. 3 shows a measuring pipe having an inner surface tapered. Reference numeral 4 denotes a straight pipe having the same diameter as the measuring portion of the measuring pipe, but has a constricted portion 1a inside the measuring tube. It can be moved up and down.
【0007】面積流量計の場合、流路本体たる測定管は
PFAで、移動子はPTFEで製作することにより接液
部の材料は要求を満たすが、一般用として広く使用され
ている流量計には移動子がマグネットMを内蔵するもの
がある。このマグネット内蔵型の移動子の面積流量計に
は、図5のようにマグネットの位置を磁気センサ3にて
検出して電子回路4より電気信号として出力するタイプ
のものがある。In the case of an area flow meter, the material of the liquid contact part can be satisfied by manufacturing the flow tube body with PFA and the moving element with PTFE. May have a movable element with a built-in magnet M. As shown in FIG. 5, there is a type of the area flow meter of a movable element with a built-in magnet, in which the position of a magnet is detected by a magnetic sensor 3 and output as an electric signal from an electronic circuit 4.
【0008】しかし、このタイプの流量計では薬液が移
動子の外層を透過することによって中のマグネットが腐
食され、ために移動子は長期の使用に耐え得ないという
問題がある。However, in this type of flowmeter, there is a problem in that the magnet inside is corroded by the permeation of the chemical solution through the outer layer of the moving element, so that the moving element cannot withstand long-term use.
【0009】このため、図6のような透明な測定管1を
挟んで相対する投光器5aと受光器5bとよりなる光セ
ンサデバイスを用いて移動子の位置を検出し、電子回路
6より電気信号として出力するタイプのものがあるが、
測定管の管壁を透過する薬液の分子による光センサデバ
イスの腐食防止対策が必要となり、その構造が複雑でコ
ストが高くなるという問題がある。For this reason, the position of the moving element is detected by using an optical sensor device including a light projecting device 5a and a light receiving device 5b opposed to each other with the transparent measuring tube 1 as shown in FIG. There is a type that outputs as
It is necessary to take measures to prevent corrosion of the optical sensor device due to chemical molecules passing through the tube wall of the measurement tube, and there is a problem that the structure is complicated and the cost increases.
【0010】また、薬液が透明度の高いものでないと正
確な測定を期し難く、しかも測定管が結露すると乱反射
による作動不良を惹起するなどの欠点がある。In addition, accurate measurement is difficult to obtain unless the chemical solution has high transparency, and furthermore, if the measuring tube is condensed, operation failure due to irregular reflection is caused.
【0011】[0011]
【発明の目的】本発明の目的とするところは、内部にマ
グネットを備えるが、このマグネットは流量計を通過す
る薬液によって腐食されることがなく、かつ薬液を汚染
させることもない移動子を備えていて、半導体集積回
路、液晶表示器などの電子応用機器用部品の製造設備に
使用するための条件を満足できる面積流量計、とりわけ
電気信号出力タイプの面積流量計及びその移動子を提供
できるようにしたことにある。It is an object of the present invention to provide a magnet inside which is provided with a moving element which is not corroded by a chemical passing through a flow meter and does not contaminate the chemical. To provide an area flow meter, particularly an electric signal output type area flow meter and a movable element thereof, which can satisfy the conditions for use in manufacturing equipment for parts for electronic application equipment such as semiconductor integrated circuits and liquid crystal displays. It is to have done.
【0012】[0012]
【発明の構成】上記目的を達成するために、本発明の面
積流量計は、垂直な測定管内を上方へ流れる流体によっ
て上下動させられる移動子の位置を検出して流量を求め
る面積流量計において、前記移動子を、被測定液たる薬
液と接する外層の本体がフッ素樹脂で構成され、この外
層本体は、非磁性体製にして耐薬性を有する密封金属容
器を内蔵し、この密封金属容器の中にマグネットが収納
されたもので構成してある。In order to achieve the above object, an area flow meter according to the present invention is an area flow meter for detecting a position of a moving element which is moved up and down by a fluid flowing upward in a vertical measuring pipe to obtain a flow rate. The main body of the outer layer, which is in contact with the liquid medicine to be measured, is made of a non-magnetic material, and the outer layer body contains a sealed metal container made of a non-magnetic material and having chemical resistance. It is configured with a magnet stored inside.
【0013】[0013]
【実施例】以下に本発明の実施例を図1、図2に基いて
説明する。図1において符号1は面積流量計用の測定管
で、この実施例では内側面がテーパー面としてある。符
号2は測定管内の移動子を示し、その外層たる本体2a
が密封金属容器2bを内蔵し、この金属容器の中にマグ
ネットMが収納されたものとしてある。DETAILED DESCRIPTION OF THE PREFERRED EMBODIMENTS An embodiment of the present invention will be described below with reference to FIGS. In FIG. 1, reference numeral 1 denotes a measuring tube for an area flow meter, and in this embodiment, an inner surface is a tapered surface. Reference numeral 2 denotes a moving element in the measuring tube, and a main body 2a as an outer layer thereof.
Has a built-in sealed metal container 2b in which a magnet M is housed.
【0014】しかして外層本体2aはPFA、PTFE
などのフッ素樹脂で構成し、金属容器はPFA、PTF
Eなどのフッ素樹脂を透過する薬液の分子によって腐食
されず、かつ非磁性体製のものとしてあり、2パーツの
接合部が溶接8された密封容器としてある。なお、図面
では外層本体は接合部が溶着7された2パーツのもので
構成してあるが、モールド成形により1パーツの一体物
の場合もある。The outer layer body 2a is made of PFA, PTFE
And metal containers made of PFA, PTF
It is not corroded by molecules of a chemical solution that permeates a fluororesin such as E and is made of a non-magnetic material. It is a hermetically sealed container in which two parts are welded 8. In the drawings, the outer layer main body is composed of two parts with the joint 7 welded. However, the outer layer main body may be an integral part of one part by molding.
【0015】このような構造の移動子においては、PF
A、PTFEなどのフッ素樹脂外層2aを透過する薬液
の腐食成分とマグネットMとの接触が金属容器2bによ
って阻止されるため、マグネットは長期使用においても
腐食されることはない。In the mover having such a structure, PF
Since the metal container 2b prevents the corrosion component of the chemical solution such as A or PTFE that permeates the fluororesin outer layer 2a from coming into contact with the magnet M, the magnet is not corroded even in long-term use.
【0016】一方、外層本体2aのフッ素樹脂を透過し
た薬液の成分中に、金属容器2bの外壁から金属中に含
まれる不純物が溶出するが、これらは分子が大きいため
に外層本体2aのフッ素樹脂を透過できず、したがって
測定管を通る薬液には金属容器2bからの金属イオンや
不純物が溶出、混入することはなく、薬液は汚染されな
い。On the other hand, impurities contained in the metal are eluted from the outer wall of the metal container 2b into the components of the chemical solution which have passed through the fluororesin of the outer layer body 2a. Therefore, metal ions and impurities from the metal container 2b are not eluted or mixed into the chemical solution passing through the measurement tube, and the chemical solution is not contaminated.
【0017】また、金属容器は非磁性材料であるから、
マグネットが発生する磁力線に支障を与えることはな
く、移動子の磁気検出方式の面積流量計の動作に何ら悪
影響を及ぼすことはない。Further, since the metal container is a non-magnetic material,
There is no hindrance to the magnetic lines of force generated by the magnet, and there is no adverse effect on the operation of the magnetic detection type area flow meter of the moving element.
【0018】外層本体2aのフッ素樹脂を透過する薬液
の成分に耐え、かつ非磁性体である金属には薬液の種
類、濃度、使用温度などによって適するものを選択すれ
ばよいが、最も腐食性が強く、フッ素樹脂を透過しやす
いフッ酸にも対抗できるものとしてニッケル・クロム・
モリブデン合金のハステロイCが好適である。ハステロ
イC以外に、鉛、Kモネル、ハステロイBなども濃度、
使用温度によっては対抗でき、これらによってもコスト
が著しく上昇することはない。The metal which is resistant to the components of the chemical solution permeating the fluororesin of the outer layer main body 2a and which is a non-magnetic material may be selected according to the type, concentration, operating temperature and the like of the chemical solution. Nickel, chromium,
Hastelloy C, a molybdenum alloy, is preferred. In addition to Hastelloy C, lead, K monel, Hastelloy B, etc.
Depending on the operating temperature, this can be countered and does not significantly increase the cost.
【0019】発明者らは外層本体2aがPFAで、金属
容器2bがハステロイCからなる図2のような移動子の
試料(外径が22mm,長さが22mm)を高濃度のフ
ッ酸に長期間浸漬してハステロイCの容器の耐蝕実験を
したところ、ハステロイCの容器は全く腐食されず、か
つフッ酸中にハステロイCの金属イオンが溶出しておら
ず、薬液が汚染されてないことを確認した。The inventors of the present invention have prepared a sample of a moving member (outer diameter 22 mm, length 22 mm) as shown in FIG. 2 in which the outer layer body 2a is made of PFA and the metal container 2b is made of Hastelloy C. A corrosion test was conducted on the Hastelloy C container after immersion for a period of time. confirmed.
【0020】この実験結果から、本発明における前記サ
イズの移動子においては、外層本体2aの肉厚は2mm
程度、金属容器2bの肉厚は1mm程度と本体及び金属
容器に薄肉のものを使用でき、それだけ移動子内に体積
の大きいマグネットを設けることができて、マグネット
の位置の検出が容易な面積流量計を提供できるという利
点がある。From the experimental results, it is found that the outer layer main body 2a has a thickness of 2 mm
The thickness of the metal container 2b is about 1 mm, so that the main body and the metal container can be thin, and a magnet with a large volume can be provided in the mover, and the area flow rate is easy to detect the position of the magnet. There is an advantage that a meter can be provided.
【0021】上記移動子を備える面積流量計の移動子検
知手段の一例は図1に示すごとくで、測定管外に設けた
磁気センサ3にて移動子のマグネットの位置を検出し、
その位置を電子回路4で演算して流量信号として出力す
る。An example of the moving element detecting means of the area flow meter having the moving element is as shown in FIG. 1, and the position of the magnet of the moving element is detected by a magnetic sensor 3 provided outside the measuring tube.
The position is calculated by the electronic circuit 4 and output as a flow signal.
【0022】また、測定管が透明でない場合、移動子の
位置を目視で知ることができないが、本発明の移動子を
備えるものでは、測定管外に、移動子の上下動に伴って
上下動または水平軸回りに回転する磁気カップリング追
従体を設け、この追従体の位置により流量を捉えること
ができる。なお、測定管にはテーパー管のほかに、内面
の適所に絞り部を設けた前述の図4のものもある。Further, when the measuring tube is not transparent, the position of the moving element cannot be visually recognized. However, in the case where the moving element of the present invention is provided, the moving element moves up and down along with the up and down movement of the moving element. Alternatively, a magnetic coupling follower that rotates about a horizontal axis is provided, and the flow rate can be determined based on the position of the follower. In addition to the taper tube, there is also a measurement tube having the above-described FIG. 4 in which a throttle portion is provided at an appropriate position on the inner surface.
【図1】本発明に係る面積流量計の一例を示す縦断面
図。FIG. 1 is a longitudinal sectional view showing an example of an area flow meter according to the present invention.
【図2】本発明に係る面積流量計に使用する移動子の試
料を示す縦断面図。FIG. 2 is a longitudinal sectional view showing a sample of a moving element used in the area flow meter according to the present invention.
【図3】面積流量計の基本原理を示す縦断面図。FIG. 3 is a longitudinal sectional view showing the basic principle of the area flow meter.
【図4】他の面積流量計の基本原理を示す縦断面図。FIG. 4 is a longitudinal sectional view showing the basic principle of another area flow meter.
【図5】磁気検出タイプの従来の面積流量計を示す縦断
面図。FIG. 5 is a longitudinal sectional view showing a conventional magnetic detection type area flow meter.
【図6】光センサデバイスで検出するタイプの従来の面
積流量計の縦断面図。FIG. 6 is a longitudinal sectional view of a conventional area flow meter of the type detecting with an optical sensor device.
1・・・測定管 2・・・移動子 2a・・・外層本体 2b・・・金属容器 M・・・マグネット 3・・・磁気センサ 4・・・電子回路 5a・・・投光器 5b・・・受光器 6・・・電子回路 DESCRIPTION OF SYMBOLS 1 ... Measuring tube 2 ... Moving element 2a ... Outer layer main body 2b ... Metal container M ... Magnet 3 ... Magnetic sensor 4 ... Electronic circuit 5a ... Projector 5b ... Receiver 6 ・ ・ ・ Electronic circuit
───────────────────────────────────────────────────── フロントページの続き (72)発明者 杉 時夫 東京都港区芝公園1丁目7番24号 東京計 装株式会社内 ────────────────────────────────────────────────── ─── Continued on the front page (72) Inventor Tokio Sugi 1-7-24 Shiba Park, Minato-ku, Tokyo Inside Tokyo Keiso Co., Ltd.
Claims (3)
て上下動させられる移動子の位置を検出して流量を求め
る面積流量計において、前記移動子を、被測定液たる薬
液と接する外層の本体がフッ素樹脂で構成され、この外
層本体が、非磁性体製にして耐薬性を有する密封金属容
器を内蔵し、この金属容器の中にマグネットが収納され
たもので構成してなる面積流量計。1. An area flowmeter for detecting a position of a moving element which is moved up and down by a fluid flowing upward in a vertical measuring pipe to determine a flow rate, wherein the moving element is an outer layer main body in contact with a chemical solution as a liquid to be measured. Are made of a non-magnetic material, a sealed metal container made of a nonmagnetic material and having a chemical resistance, and a magnet accommodated in the metal container.
測定管外の磁気センサにて検出する請求項1に記載の面
積流量計。2. The area flow meter according to claim 1, wherein the position of the moving element is detected by a magnet sensor inside the moving element outside the measuring tube.
ッ素樹脂で構成し、このが外層本体が、非磁性体製にし
て耐薬性を有する密封金属容器を内蔵し、この金属容器
の中にマグネットが収納されてなる面積流量計用の移動
子。3. A main body of an outer layer which is in contact with a chemical solution as a liquid to be measured is made of a fluororesin. The outer layer main body is made of a non-magnetic material and has a built-in hermetically sealed metal container having chemical resistance. A moving element for an area flow meter with a magnet housed in it.
Priority Applications (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP5984197A JPH10239122A (en) | 1997-02-27 | 1997-02-27 | Area flowmeter and its moving element |
Applications Claiming Priority (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP5984197A JPH10239122A (en) | 1997-02-27 | 1997-02-27 | Area flowmeter and its moving element |
Publications (1)
Publication Number | Publication Date |
---|---|
JPH10239122A true JPH10239122A (en) | 1998-09-11 |
Family
ID=13124851
Family Applications (1)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
JP5984197A Pending JPH10239122A (en) | 1997-02-27 | 1997-02-27 | Area flowmeter and its moving element |
Country Status (1)
Country | Link |
---|---|
JP (1) | JPH10239122A (en) |
Cited By (1)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JP2003028681A (en) * | 2001-07-17 | 2003-01-29 | Nippon Soda Co Ltd | Flowmeter |
-
1997
- 1997-02-27 JP JP5984197A patent/JPH10239122A/en active Pending
Cited By (1)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JP2003028681A (en) * | 2001-07-17 | 2003-01-29 | Nippon Soda Co Ltd | Flowmeter |
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