JPH10214675A - Ceramic heater - Google Patents
Ceramic heaterInfo
- Publication number
- JPH10214675A JPH10214675A JP9019345A JP1934597A JPH10214675A JP H10214675 A JPH10214675 A JP H10214675A JP 9019345 A JP9019345 A JP 9019345A JP 1934597 A JP1934597 A JP 1934597A JP H10214675 A JPH10214675 A JP H10214675A
- Authority
- JP
- Japan
- Prior art keywords
- temperature
- heating
- resistor
- resistors
- ceramic heater
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Granted
Links
Landscapes
- Surface Heating Bodies (AREA)
- Resistance Heating (AREA)
Abstract
Description
【0001】[0001]
【発明の属する技術分野】本発明はセラミック体中に発
熱抵抗体と温度センサ用の感温抵抗体を埋設したセラミ
ックヒータに関するものである。BACKGROUND OF THE INVENTION 1. Field of the Invention The present invention relates to a ceramic heater in which a heating resistor and a temperature-sensitive resistor for a temperature sensor are embedded in a ceramic body.
【0002】[0002]
【従来技術とその課題】従来からセラミック体中に発熱
抵抗体を埋設した平板状、あるいは管状、円柱状のセラ
ミックヒータは各方面で汎用されている。ところがセラ
ミックヒータによって加熱される液体、気体等の被加熱
物体は一般に所定の温度範囲内に維持されるように制御
されることが多い。即ち、所定の温度範囲の下限になる
と、ヒータに通電して、該ヒータの発熱によって被加熱
物体を加熱し上限温度に達するとヒータへの通電を止
め、加熱を停止するという動作を自動的にくり返すよう
にした自動温度制御装置が広く用いられている。このよ
うな装置には被加熱物体の温度を時間遅れがなく、かつ
正確に検出する温度センサが必要であるが、従来から用
いられているサーモスタット、サーミスタ等の温度セン
サではヒータと一体化することが出来なかったため別個
に設置しなければならず、その位置によっては被加熱物
体の温度分布が不均一な加熱状態となったり、また酸化
雰囲気中、酸アルカリ液中、及び腐食性ガス体中など特
殊な環境下での使用にはかなり制約があった。2. Description of the Related Art Conventionally, a flat, tubular or cylindrical ceramic heater having a heating resistor embedded in a ceramic body has been widely used in various fields. However, an object to be heated such as a liquid or a gas heated by the ceramic heater is generally controlled so as to be maintained within a predetermined temperature range. That is, when the temperature reaches the lower limit of the predetermined temperature range, the heater is energized, the object to be heated is heated by the heat generated by the heater, and when the temperature reaches the upper limit temperature, the energization to the heater is stopped and the operation of stopping the heating is automatically performed. An automatic temperature control device that is repeated is widely used. Such a device requires a temperature sensor that accurately detects the temperature of the object to be heated without time delay, but a temperature sensor such as a thermostat or thermistor that has been conventionally used must be integrated with a heater. Could not be installed, it must be installed separately, depending on its position, the temperature distribution of the object to be heated may be uneven, or it may be in an oxidizing atmosphere, in an acid-alkaline solution, in a corrosive gas, etc. There were considerable restrictions on use in special environments.
【0003】これに対して特開昭59−71281号な
どに記載されるような発熱抵抗体と感温抵抗体を併設し
たセラミックが実用化されている。On the other hand, ceramics having a heat-generating resistor and a temperature-sensitive resistor as described in Japanese Patent Application Laid-Open No. 59-71281 have been put to practical use.
【0004】図14はこのような円筒状のセラミックヒ
ータHを示したもので、セラミックより成る円筒体にヒ
ータとしての帯状の発熱抵抗体1が埋設され、該発熱抵
抗体1の両端に設けた端子2,2′から通電することに
より発熱するようになっているが、この発熱抵抗体1と
併せて温度センサとして使用するための感温抵抗体3が
埋設された構造に形成されていた。FIG. 14 shows such a cylindrical ceramic heater H. A strip-shaped heating resistor 1 as a heater is embedded in a cylindrical body made of ceramic and provided at both ends of the heating resistor 1. Although heat is generated when electricity is supplied from the terminals 2 and 2 ′, the heat-generating resistor 1 and the temperature-sensitive resistor 3 used as a temperature sensor are embedded in the structure.
【0005】ところが、このような従来のセラミックヒ
ータHではセラミック体中に、ヒータとしての発熱抵抗
体1が密に埋設された発熱領域Kと温度センサとしての
感温抵抗体3が密に埋設された感温領域Lとにほぼ2分
されており、この感温領域Lの感温抵抗体3は同一のセ
ラミック体中に埋設されている発熱抵抗体1から伝導す
る熱による影響を受け易く、被加熱物体の性質によって
は、実際の被加熱物体の温度と若干異なる値を示してし
まう傾向があった。However, in such a conventional ceramic heater H, a heating region K in which a heating resistor 1 as a heater is densely embedded and a temperature-sensitive resistor 3 as a temperature sensor are densely embedded in a ceramic body. The temperature-sensitive resistor 3 in the temperature-sensitive region L is easily affected by heat conducted from the heating resistor 1 embedded in the same ceramic body. Depending on the properties of the object to be heated, the temperature of the object to be heated tends to be slightly different from the actual temperature.
【0006】[0006]
【課題を解決するための手段】本発明は上述の如き実情
に鑑みて開発したものでセラミックヒータを製作する工
程において、セラミックグリーンシートに発熱抵抗体を
プリントする際、温度センサ用の感温抵抗体パターンも
同時にプリントするか、または別のセラミックグリーン
シートに感温抵抗体パターンをプリントして焼結一体化
し、かつ発熱抵抗体の発熱領域に上記感温抵抗体を併設
したもので、特殊雰囲気中における使用にも十分耐える
とともに発熱抵抗体そのものの正確な温度を検出し、そ
れに基づき被加熱物体を所望温度に加熱することができ
るセラミックヒータを提供せんとするものである。SUMMARY OF THE INVENTION The present invention has been developed in view of the above-mentioned circumstances. In the process of manufacturing a ceramic heater, when a heating resistor is printed on a ceramic green sheet, a temperature-sensitive resistor for a temperature sensor is used. The body pattern is also printed at the same time, or the temperature-sensitive resistor pattern is printed on another ceramic green sheet and sintered and integrated, and the above-mentioned temperature-sensitive resistor is added to the heat-generating area of the heat-generating resistor. It is an object of the present invention to provide a ceramic heater capable of sufficiently withstanding use in a room and detecting an accurate temperature of the heating resistor itself and heating the object to be heated to a desired temperature based thereon.
【0007】[0007]
【発明の実施の形態】以下、図によって本発明の実施形
態を説明すれば、図1は円柱状のセラミックヒータHの
焼成前の状態を示す部分展開図であり、また、図2は成
型後のセラミックヒータの要部破断図であり、セラミッ
クよるなる円柱体中にヒータとしての帯状の発熱抵抗体
1が埋設され、該発熱抵抗体1の両端に設けた端子、
2,2′から通電することにより発熱するようになって
いるが、この発熱抵抗体1と併せて温度センサとして使
用するための感温抵抗体3が上記発熱抵抗体1が密に埋
設された発熱領域Kの全域にわたって併設された構造に
形成されている。ところでこのような円柱状のセラミッ
クヒータHの製作工程は図3に示す如く、高温時におい
ても電気絶縁性、熱伝導性に優れたアルミナ、ベリリア
等の粉末を原料とするセラミック生シートS1上に発熱
抵抗体1とする抵抗体パターンR1を形成するには、所
要の発熱量とする抵抗値が設定できるような櫛歯状、渦
巻状等の任意の形状で、所定の幅、厚み、長さに、タン
グステン、モリブデン−マンガン等のペーストを用い、
スクリーンプリントなどの厚膜手法によって形成し、こ
の発熱抵抗体パターンR1の形成と同時に温度センサと
して用いるための抵抗体パターンR1,R2をセラミッ
ク生シートS1と同様の材料より形成した円柱状の芯材
S2に挟着積層した後、得られた円柱状の生セラミック
体を焼成雰囲気中で焼結一体化すればよい。DESCRIPTION OF THE PREFERRED EMBODIMENTS Hereinafter, an embodiment of the present invention will be described with reference to the drawings. FIG. 1 is a partially developed view showing a state before firing a cylindrical ceramic heater H, and FIG. FIG. 2 is a cutaway view of a main part of the ceramic heater of FIG. 1, in which a strip-shaped heating resistor 1 as a heater is embedded in a cylindrical body made of ceramic, and terminals provided at both ends of the heating resistor 1;
Although heat is generated by supplying electricity from the heat generating resistors 2 and 2 ', a heat-sensitive resistor 3 for use as a temperature sensor together with the heat-generating resistor 1 is densely embedded with the heat-generating resistor 1. The heat generating region K is formed in a structure provided side by side over the entire region. By the way, as shown in FIG. 3, the manufacturing process of such a cylindrical ceramic heater H is performed on a ceramic raw sheet S1 made of a powder of alumina, beryllia, or the like having excellent electrical insulation and thermal conductivity even at a high temperature. In order to form the resistor pattern R1 serving as the heating resistor 1, a predetermined width, thickness, and length may be used, such as a comb-like shape or a spiral shape, in which a resistance value having a required heating value can be set. To, using a paste such as tungsten, molybdenum-manganese,
A columnar core material formed by a thick film technique such as screen printing and forming the resistor patterns R1 and R2 for use as a temperature sensor simultaneously with the formation of the heating resistor pattern R1 from the same material as the ceramic raw sheet S1. After being sandwiched and laminated on S2, the obtained columnar green ceramic body may be sintered and integrated in a firing atmosphere.
【0008】なお、抵抗体パターンR1,R2の形成段
階で、各抵抗体パターンR1,R2の端部に端子部U,
U′,V,V′を形成しておく。これら端子部U,
U′,V,V′は抵抗体パターンR1,R2のプリント
前に生シートS1の当該部位に貫通孔を形成し、該貫通
孔内にタングステン、モリブデン−マンガン等の導電性
材料を詰設しておき、その後、抵抗体パターンR1,R
2をプリントする。そして円柱状生セラミック体を焼結
後、該端子部U,U′,V,V′にニッケルメッキ等を
施すことによって図1に示された端子2,2′となし、
銀ロウ付等によって同図には図示しないリード線が結合
される。このような円柱状の場合はセラミック生シート
S1に抵抗体パターンR1,R2をプリントしたものを
円柱状の芯材S2にまるめて重ね合わせて加工したが、
平板状の基体S2に重ね合わせれば図4及び図5に示す
ように平板状のセラミックヒータHを得ることができ、
また、その他にも焼成前の加工により所望の形状に形成
することが可能である。さらにセラミックヒータは上述
の如き製作方法に限らず、例えば、平板あるいは円柱形
状に予め焼成したセラミック体に抵抗体パターンをプリ
ントし、その上に絶縁体を被着した後、焼成することに
より製作することもできるし、同じく焼成したセラミッ
ク体に、生シートに抵抗体パターンをプリントしたもの
を貼り合わせた後、焼成一体化することによっても製作
することができる。In the step of forming the resistor patterns R1 and R2, terminal portions U and R are connected to the ends of the resistor patterns R1 and R2.
U ', V, V' are formed in advance. These terminals U,
U ', V, and V' form through holes in the corresponding portions of the raw sheet S1 before printing the resistor patterns R1 and R2, and fill conductive materials such as tungsten and molybdenum-manganese in the through holes. After that, the resistor patterns R1, R
Print 2. After sintering the columnar green ceramic body, the terminals U, U ', V, V' are plated with nickel or the like to form the terminals 2, 2 'shown in FIG.
Lead wires (not shown) are connected by silver brazing or the like. In the case of such a columnar shape, the ceramic raw sheet S1 on which the resistor patterns R1 and R2 are printed is rounded and overlapped on a cylindrical core material S2.
4 and 5, a flat ceramic heater H can be obtained as shown in FIGS. 4 and 5.
In addition, it is possible to form a desired shape by processing before firing. Further, the ceramic heater is not limited to the above-described manufacturing method. For example, the ceramic heater is manufactured by printing a resistor pattern on a ceramic body previously fired in a flat plate or a columnar shape, applying an insulator thereon, and then firing. Alternatively, it can be manufactured by bonding a ceramic sheet which has been printed with a resistor pattern on a raw sheet, and then firing and integrating the ceramic body.
【0009】このように本発明によるセラミックヒータ
Hは発熱抵抗体1と温度センサとして用いる発熱抵抗体
3の両方を同一セラミック体中に埋設したもので、端子
2,2′からの通電によって発熱抵抗体1が発熱し、セ
ラミック体が温度上昇することにより周囲の被加熱物体
を加熱する。また感温抵抗体3は発熱抵抗体1の温度に
応じた抵抗値を示すことからは発熱抵抗体1の温度を端
子2′より感温抵抗体3の抵抗値によって測定すること
ができる。As described above, the ceramic heater H according to the present invention has both the heating resistor 1 and the heating resistor 3 used as a temperature sensor buried in the same ceramic body. The body 1 generates heat, and the surrounding body to be heated is heated by increasing the temperature of the ceramic body. Further, since the temperature-sensitive resistor 3 shows a resistance value corresponding to the temperature of the heat-generating resistor 1, the temperature of the heat-generating resistor 1 can be measured from the terminal 2 'by the resistance value of the temperature-sensitive resistor 3.
【0010】しかも、感温抵抗体3は発熱抵抗体1を密
に埋設した発熱領域Kに埋設されるので発熱抵抗体1の
温度変化を鋭敏に感知し、常に適切にセラミックヒータ
Hを作用させることができる。このように被加熱物の温
度ではなく発熱抵抗体1の温度を正確、鋭敏に感知する
ので、上記セラミックヒータHは被加熱物体の性状や状
態に係わらず最も信頼性高く作用するのである。とくに
上記実施形態のセラミックヒータHは感温抵抗体3を上
記発熱抵抗体1に近接させ、かつ、そのパターンに沿っ
て形成したので発熱抵抗体1の温度を感知する力が非常
に高いという特徴を有している。なお、発熱抵抗体1と
感温抵抗体3との間隙は0.2〜3mmであることが望
ましい。これは上記間隙が0.2mm未満の場合、発熱
抵抗体1と感温抵抗体3との絶縁性に問題が生じる恐れ
があり、他方3mmより広い場合には発熱抵抗体1の発
熱に対する感知力が不十分となる恐れがあるためであ
る。Further, since the temperature-sensitive resistor 3 is buried in the heat-generating region K in which the heat-generating resistor 1 is densely buried, the temperature change of the heat-generating resistor 1 is sharply sensed and the ceramic heater H is always operated appropriately. be able to. As described above, the temperature of the heating resistor 1 is sensed accurately and sharply, not the temperature of the object to be heated, so that the ceramic heater H operates with the highest reliability regardless of the property or state of the object to be heated. In particular, since the ceramic heater H of the above embodiment has the temperature-sensitive resistor 3 close to the heating resistor 1 and is formed along the pattern thereof, the temperature sensing resistor 1 has a very high temperature sensing power. have. It is desirable that the gap between the heating resistor 1 and the temperature-sensitive resistor 3 is 0.2 to 3 mm. If the gap is less than 0.2 mm, there is a possibility that a problem may occur in the insulation between the heating resistor 1 and the temperature-sensitive resistor 3. Is likely to be insufficient.
【0011】しかしながら本発明はそのような実施形態
に限定されるものではなく、図6(a)の如く感温抵抗
体3の面積を広くするために感温抵抗体3の蛇行回数を
増やしたものや、同図(b)の如く発熱領域Kの後方側
に感温抵抗体3を密としたものや、同図(c)の如く発
熱領域Kの前方側に感温抵抗体3を密としたものであっ
てもよい。However, the present invention is not limited to such an embodiment, and the number of meandering of the temperature-sensitive resistor 3 is increased in order to increase the area of the temperature-sensitive resistor 3 as shown in FIG. The temperature-sensitive resistor 3 is densely provided on the rear side of the heating region K as shown in FIG. 3B, or the temperature-sensitive resistor 3 is densely provided on the front side of the heating region K as shown in FIG. May be used.
【0012】次に、図7及び図8に本発明の他実施形態
を示し、図7は焼成前のセラミックヒータHの部分展開
図であり、また、図8はその要部破断図である。このセ
ラミックヒータHは、発熱抵抗体1のパターンと感温抵
抗体3のパターンをそれぞれ別のセラミック生シートS
1′、S1にプリントし、円柱状の芯材S2に感温抵抗
体3をプリントした生シートS1′をまるめて重ね合わ
せ、その上に発熱抵抗体1をプリントした生シートS1
をまるめて重ね合わせて成形したもので、図8に示すよ
うに発熱抵抗体1と感温抵抗体3とが上下階層状に配置
されることになる。また、図9及び図10に同様のセラ
ミックヒータHであって板状のセラミックヒータHを示
し、図9、図10はそれぞれ上記図7、図8に対応した
ものとなっている。これら図7乃至図10に示す如く発
熱抵抗体1と感温抵抗体3とが上下階層状に配置された
セラミックヒータHの利点としては、発熱抵抗体1と感
温抵抗体3とそれぞれの密度を高めることができるの
で、発熱量の点からもまた熱感知力の点からも有利にな
る点が挙げられる。7 and 8 show another embodiment of the present invention. FIG. 7 is a partial development view of the ceramic heater H before firing, and FIG. 8 is a cutaway view of a main part thereof. In the ceramic heater H, the pattern of the heating resistor 1 and the pattern of the temperature-sensitive resistor 3 are respectively separated into separate ceramic raw sheets S.
1 ', S1 and a raw sheet S1' on which a temperature-sensitive resistor 3 is printed on a columnar core material S2 are rounded and superimposed, and a raw sheet S1 on which a heating resistor 1 is printed.
The heating resistors 1 and the temperature-sensitive resistors 3 are arranged in an upper and lower hierarchy as shown in FIG. 9 and 10 show a similar ceramic heater H, that is, a plate-like ceramic heater H. FIGS. 9 and 10 correspond to FIGS. 7 and 8, respectively. The advantages of the ceramic heater H in which the heating resistor 1 and the temperature-sensitive resistor 3 are arranged in the upper and lower layers as shown in FIGS. 7 to 10 are as follows. Can be increased, which is advantageous in terms of both the calorific value and the heat sensing power.
【0013】なお、本発明は上記実施形態に限定される
ものでなく、発明の目的を逸脱しない限り任意の形態と
することができることは言うまでもない。It is needless to say that the present invention is not limited to the above-described embodiment, but can be in any form without departing from the object of the invention.
【0014】実験例 本発明の効果を確認するため以下の実験を行った。 Experimental Example The following experiment was conducted to confirm the effect of the present invention.
【0015】本発明品として、図11に示す如く全長1
10mm、発熱領域Kの長さ60mmで該発熱領域Kに
発熱抵抗体1と感温抵抗体3とを発熱領域K内に併設
し、外周にはフランジ4を具備し、そして発熱抵抗体1
の端子2にリード線5をロウ付し、他方の感温抵抗体3
の端子2′にリード線6をロウ付してなるアルミナ製ヒ
ータHを作製した。As a product of the present invention, as shown in FIG.
A heating resistor 1 and a temperature-sensitive resistor 3 are provided in the heating region K in the heating region K, and a flange 4 is provided on the outer periphery.
Lead 5 is soldered to the terminal 2 of
A heater H made of alumina was prepared by brazing the lead wire 6 to the terminal 2 '.
【0016】これに対して比較例品として、図12に示
す如く全長110mm、発熱領域Kの長さ60mm、感
温領域Lの長さ2mm(両領域の間隙2mm)で該発熱
領域Kに発熱抵抗体1と感温抵抗体3を別領域に設け、
外周にはフランジ4を具備し、そして発熱抵抗体1の端
子2にリード線5をロウ付し、他方の感温抵抗体3の端
子2′にリード線6をロウ付してなるアルミナ製ヒータ
Hを作製した。On the other hand, as a comparative example, as shown in FIG. 12, a heat is generated in the heat-generating region K with a total length of 110 mm, a length of the heat-generating region K of 60 mm, and a length of the temperature-sensitive region L of 2 mm (a gap between both regions is 2 mm). A resistor 1 and a temperature-sensitive resistor 3 are provided in different areas,
Alumina heater provided with a flange 4 on the outer periphery, a lead wire 5 brazed to the terminal 2 of the heating resistor 1, and a lead wire 6 brazed to the terminal 2 'of the other temperature sensitive resistor 3. H was produced.
【0017】これらヒータHを大気中にて昇温させ、温
度とセンサー抵抗比との関係について実験した。なお、
発熱抵抗体1および感温抵抗体3はタングステンを使用
し、本発明品において発熱抵抗体1と感温抵抗体3との
距離を0.5mmとした。この実験の結果を図13に示
す。The temperature of the heater H was raised in the atmosphere, and an experiment was conducted on the relationship between the temperature and the sensor resistance ratio. In addition,
The heating resistor 1 and the temperature-sensitive resistor 3 used tungsten, and the distance between the heating resistor 1 and the temperature-sensitive resistor 3 was 0.5 mm in the present invention. FIG. 13 shows the results of this experiment.
【0018】図13から明らかなようにヒーター表面温
度が200℃の時の上記比較例品のセンサー抵抗比(R
T /R2 3 )が約1.3であるのに対し、本発明品は約
1.65であり、本発明品のほうがヒーター温度の感知
力が高いことを確認した。As apparent from FIG. 13, the sensor resistance ratio (R) of the comparative example when the heater surface temperature is 200 ° C.
While T / R 2 3) is about 1.3, the product of the present invention is about 1.65, more products of the present invention was confirmed to be sensed force heater temperature is high.
【0019】[0019]
【発明の効果】叙上のように本発明によれば、セラミッ
ク体中に発熱抵抗体と温度センサ用の感温抵抗体を発熱
抵抗体の発熱領域に併設したものであるから、ヒータ
とは別に温度センサを設置する必要がなく、また温度セ
ンサの設置個所による被加熱物体の温度分布に加熱むら
が生じることなく、正確かつ一様な温度分布に加熱制御
することは可能となる。高熱伝導性、電気絶縁、耐熱
性物体により抵抗体が包囲されているため、温度変化に
伴う応答性にすぐれ、かつ高温時の電気絶縁性もきわめ
て安定である。物理的、化学的に安定なセラミックに
より抵抗体が包囲されているため、空気との接触により
発熱抵抗体が酸化消耗せず、ヒータとしてまた温度セン
サとして腐食性液体中など特殊環境下にて使用すること
も可能であること。被加熱物体でなく発熱抵抗体の温
度を感温抵抗体の温度に対応した抵抗値によって測定す
るものであり、きわめて鋭敏な温度制御可能である。As described above, according to the present invention, a heating resistor and a temperature sensing resistor for a temperature sensor are provided in a ceramic body in a heating region of the heating resistor. It is not necessary to separately install a temperature sensor, and it is possible to control the heating to an accurate and uniform temperature distribution without causing uneven heating in the temperature distribution of the object to be heated due to the location of the temperature sensor. Since the resistor is surrounded by a high thermal conductivity, electrical insulation, and a heat-resistant material, it has excellent responsiveness with temperature changes, and has extremely stable electrical insulation at high temperatures. Since the resistor is surrounded by physically and chemically stable ceramics, the heating resistor does not oxidize due to contact with air and is used as a heater or a temperature sensor in a special environment such as in a corrosive liquid. It is also possible to do. The temperature of the heating resistor, not the object to be heated, is measured by a resistance value corresponding to the temperature of the temperature-sensitive resistor, and extremely sensitive temperature control is possible.
【0020】以上のように、本発明によれば、多くの特
徴をもち、工業上汎用性のあるヒータを提供することが
できる。As described above, according to the present invention, an industrially versatile heater having many features can be provided.
【図1】本発明の実施形態によるセラミックヒータの焼
成前の状態を示す部分展開図である。FIG. 1 is a partial development view showing a state before firing of a ceramic heater according to an embodiment of the present invention.
【図2】図1の焼成前のセラミックヒータの要部破断図
である。FIG. 2 is a fragmentary cutaway view of the ceramic heater before firing in FIG. 1;
【図3】図1の焼成前のセラミックヒータを構成する生
シートの展開図である。FIG. 3 is a development view of a raw sheet constituting the ceramic heater before firing in FIG. 1;
【図4】本発明の他実施形態によるセラミックヒータの
焼成前の状態を示す部分展開図である。FIG. 4 is a partial development view showing a state before firing of a ceramic heater according to another embodiment of the present invention.
【図5】図4の焼成前のセラミックヒータの要部破断図
である。FIG. 5 is a cutaway view of a main part of the ceramic heater before firing in FIG. 4;
【図6】本発明の他実施形態を示し、(a)〜(c)は
それぞれ焼成前のセラミックヒータを構成する生シート
の展開図である。FIG. 6 shows another embodiment of the present invention, and (a) to (c) are development views of raw sheets constituting a ceramic heater before firing, respectively.
【図7】本発明の他実施形態によるセラミックヒータの
焼成前の状態を示す部分展開図である。FIG. 7 is a partial development view showing a state before firing of a ceramic heater according to another embodiment of the present invention.
【図8】図7の焼成前のセラミックヒータの要部破断図
である。8 is a fragmentary cutaway view of the ceramic heater before firing of FIG. 7;
【図9】本発明の他実施形態によるセラミックヒータの
焼成前の状態を示す部分展開図である。FIG. 9 is a partial development view showing a state before firing of a ceramic heater according to another embodiment of the present invention.
【図10】図9の焼成前のセラミックヒータの要部破断
図である。10 is a fragmentary cutaway view of the ceramic heater before firing of FIG. 9;
【図11】前記実験例における本発明品としてのセラミ
ックヒータを示し、(a)は平面図、(b)は焼成前の
セラミックヒータを構成する生シートの展開図である。11A and 11B show a ceramic heater as a product of the present invention in the experimental example, wherein FIG. 11A is a plan view and FIG. 11B is a developed view of a raw sheet constituting the ceramic heater before firing.
【図12】前記実験例における比較例品としてのセラミ
ックヒータを示し、(a)は平面図、(b)は焼成前の
セラミックヒータを構成する生シートの展開図である。12A and 12B show a ceramic heater as a comparative example product in the experimental example, wherein FIG. 12A is a plan view and FIG. 12B is a developed view of a raw sheet constituting the ceramic heater before firing.
【図13】前記実験例の結果を示す抵抗比のグラフであ
る。FIG. 13 is a graph of a resistance ratio showing a result of the experimental example.
【図14】従来のセラミックヒータの斜視図である。FIG. 14 is a perspective view of a conventional ceramic heater.
H セラミックヒータ 1 発熱抵抗体 2,2′ 端子 3 感温抵抗体 S1,S1′ 生シート R1,R2 抵抗体パターン U,U′,V,V′端子部 S2 芯材、基体 K 発熱領域 L 感温領域 4 フランジ 5,6 リード線 H Ceramic heater 1 Heating resistor 2, 2 'Terminal 3 Temperature sensitive resistor S1, S1' Raw sheet R1, R2 Resistor pattern U, U ', V, V' terminal portion S2 Core material, base K Heating region L Sensitivity Temperature zone 4 Flange 5, 6 Lead wire
Claims (3)
に埋設した発熱抵抗体の発熱領域に感温抵抗体を密に併
設したことを特徴とするセラミックヒータ。1. A ceramic heater wherein a temperature-sensitive resistor is densely provided in a heat-generating region of a heat-generating resistor embedded in a ceramic body having a desired shape such as a plate shape or a cylindrical shape.
ンに沿って併設してなる請求項1のセラミックヒータ。2. The ceramic heater according to claim 1, wherein said temperature-sensitive resistors are arranged along the pattern of said heating resistors.
層状に併設してなる請求項1乃至請求項2のセラミック
ヒータ。3. The ceramic heater according to claim 1, wherein said temperature-sensitive resistor and said heat-generating resistor are provided side by side in a vertical hierarchy.
Priority Applications (1)
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JP01934597A JP3677366B2 (en) | 1997-01-31 | 1997-01-31 | Ceramic heater |
Applications Claiming Priority (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP01934597A JP3677366B2 (en) | 1997-01-31 | 1997-01-31 | Ceramic heater |
Publications (2)
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JPH10214675A true JPH10214675A (en) | 1998-08-11 |
JP3677366B2 JP3677366B2 (en) | 2005-07-27 |
Family
ID=11996816
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JP01934597A Expired - Fee Related JP3677366B2 (en) | 1997-01-31 | 1997-01-31 | Ceramic heater |
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JP2004311433A (en) * | 2003-03-27 | 2004-11-04 | Kyocera Corp | Ceramic heater |
JP2009285038A (en) * | 2008-05-28 | 2009-12-10 | Parker Corp | Heating device and heater sensor unit |
KR101113713B1 (en) * | 2009-10-23 | 2012-02-27 | (주) 세라트론 | Manufacturing method for a mini type ceramic heater with a built in sensor |
JP2015020605A (en) * | 2013-07-19 | 2015-02-02 | サンデン株式会社 | Vehicle heater |
JP2017117525A (en) * | 2015-12-21 | 2017-06-29 | 京セラ株式会社 | heater |
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JP2020516306A (en) * | 2017-04-18 | 2020-06-11 | アモセンス・カンパニー・リミテッドAmosense Co., Ltd. | Exothermic heater for cigarette type electronic cigarette device |
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JP2018181993A (en) * | 2017-04-10 | 2018-11-15 | 日本特殊陶業株式会社 | Holding apparatus |
JP2020516306A (en) * | 2017-04-18 | 2020-06-11 | アモセンス・カンパニー・リミテッドAmosense Co., Ltd. | Exothermic heater for cigarette type electronic cigarette device |
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