JPH10168505A - Low density molybdenum sintered compact and its production - Google Patents
Low density molybdenum sintered compact and its productionInfo
- Publication number
- JPH10168505A JPH10168505A JP32962296A JP32962296A JPH10168505A JP H10168505 A JPH10168505 A JP H10168505A JP 32962296 A JP32962296 A JP 32962296A JP 32962296 A JP32962296 A JP 32962296A JP H10168505 A JPH10168505 A JP H10168505A
- Authority
- JP
- Japan
- Prior art keywords
- sintered body
- low
- density
- powder
- density molybdenum
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Granted
Links
Abstract
Description
【０００１】[0001]
【発明の属する技術分野】本発明は，低密度モリブデン
（Ｍｏ）焼結体とその製造方法に関し，詳しくは，焼成
炉用の敷き皿，放電電極，流体のフィルター等に用いら
れる低密度モリブデン焼結体とその製造方法に関する。BACKGROUND OF THE INVENTION 1. Field of the Invention The present invention relates to a low-density molybdenum (Mo) sintered body and a method of manufacturing the same, and more particularly, to a low-density molybdenum (Mo) sintered body used for a baking dish, a discharge electrode, a fluid filter, and the like. The present invention relates to a binder and a method for producing the same.
【０００２】[0002]
【従来の技術】高融点金属であるモリブデン（以下，Ｍ
ｏと示す）製品の要求項目として空孔度の高い（低密度
の）製品の利用法がある。例えば，焼成炉用の敷き皿と
しての利用法がある。この際問題となるのは，Ｍｏと被
焼成物の接触面では，被焼成物からのガス抜けが良くな
く，その結果，被焼成物にソリ等の欠陥が発生する場合
がある。これを解決する為に空孔度の高いＭｏ製品が要
求されている。2. Description of the Related Art Molybdenum (hereinafter referred to as M
One requirement for the product (denoted as o) is the use of a product with a high porosity (low density). For example, there is a method of using as a spreading plate for a firing furnace. At this time, the problem is that the gas coming out of the object to be fired is not good at the contact surface between Mo and the object to be fired, and as a result, defects such as warpage may occur in the object to be fired. In order to solve this, Mo products with high porosity are required.
【０００３】また，別用途としては，電子部品として，
低密度のＭｏ焼結体の空孔にＢａ等の物質を含漫させ，
放電電極として用いられたり，流体のフィルターとして
の金属焼結体が用いられる。これらの場合は，適度な空
孔率と高強度が要求される。Another application is as an electronic component.
The pores of the low density Mo sintered body are impregnated with substances such as Ba,
A metal sintered body is used as a discharge electrode or as a fluid filter. In these cases, appropriate porosity and high strength are required.
【０００４】純Ｍｏの理論密度は１０．２ｇ／ｃｍ3 で
あるのに対し，一般的な粉末冶金法で得られる焼結体の
密度は，８．７〜９．９ｇ／ｃｍ3 である。特に，焼結
体を次工程で塑性加工を行う場合は塑性加工時に割れが
生じる場合が多い為，９．６ｇ／ｃｍ3 以上の密度が必
要である。ここで言う一般的な粉末冶金法とは，粒径３
〜１０μｍのＭｏ粉末をプレス成型し，それを真空もし
くは水素雰囲気で焼結し焼結体を得るものである。[0004] While the theoretical density of pure Mo is 10.2 g / cm 3 , the density of a sintered body obtained by a general powder metallurgy method is 8.7 to 9.9 g / cm 3 . In particular, when the sintered body is subjected to plastic working in the next step, cracks often occur during the plastic working, so that a density of 9.6 g / cm 3 or more is required. The general powder metallurgy method referred to here is a particle size 3
Press powder of Mo powder of 10 to 10 μm is sintered in a vacuum or hydrogen atmosphere to obtain a sintered body.
【０００５】[0005]
【発明が解決しようとする課題】焼結部品で低密度のも
のを作る場合には，プレス圧をなるべく低くする方が低
密度の焼結体が得られるので，バインダを添加したもの
でプレスする。その後，脱バインダ工程を施すことで相
対密度で約７０〜９０％のＭｏ焼結製品を作成すること
は可能であった。In order to produce a low-density sintered part, a low-density sintered body can be obtained by reducing the pressing pressure as much as possible. . Thereafter, by performing a binder removal process, it was possible to produce a Mo sintered product having a relative density of about 70 to 90%.
【０００６】しかし，バインダを添加する場合は，バイ
ンダ添加による純度の問題があった。更に，これらの製
品は，相対密度で約８５％以下になると強度的にもろく
なる問題があった。However, when a binder is added, there is a problem of purity due to the addition of the binder. Furthermore, these products have a problem that the strength becomes brittle when the relative density is about 85% or less.
【０００７】そこで，本発明の一技術的課題は，低密度
かつ高強度の製品を安価で純度良く作成することができ
る低密度モリブデン焼結体及びその製造方法を提供する
ことにある。It is an object of the present invention to provide a low-density molybdenum sintered body capable of producing low-density and high-strength products at low cost and high purity, and a method for producing the same.
【０００８】また，本発明の他の技術的課題は，前記低
密度モリブデン焼結体を用いた焼成炉用敷皿，放電電
極，及び流体フィルター等の製品を提供することにあ
る。Another technical object of the present invention is to provide products such as a baking pan, a discharge electrode, and a fluid filter using the low-density molybdenum sintered body.
【０００９】[0009]
【課題を解決するための手段】本発明によれば，６０ｋ
ｇ／ｍｍ2 以上の曲げ強度と，７０〜８５％の相対密度
とを有することを特徴とする低密度モリブデン焼結体が
得られる。According to the present invention, a 60k
A low-density molybdenum sintered body characterized by having a bending strength of at least g / mm 2 and a relative density of 70 to 85% is obtained.
【００１０】また，本発明によれば，Ｍｏ凝集粉を１２
００〜１８００℃で熱処理後解砕し，粒度６０〜１５０
μｍのＭｏ粗粒粉を作り，それをプレス後，焼結するこ
とを特徴とする低密度モリブデン焼結体の製造方法が得
られる。Further, according to the present invention, the Mo agglomerated powder is
Crushed after heat treatment at 00-1800 ° C, particle size 60-150
A method for producing a low-density molybdenum sintered body characterized in that a coarse Mo powder having a thickness of μm is produced, pressed, and then sintered.
【００１１】また，本発明によれば，前記低密度モリブ
デン焼結体の製造方法において，前記焼結温度は約１８
００℃であることを特徴とする低密度モリブデン焼結体
の製造方法が得られる。According to the present invention, in the method for producing a low-density molybdenum sintered body, the sintering temperature is about 18%.
A method for producing a low-density molybdenum sintered body characterized by being at 00 ° C. is obtained.
【００１２】また，本発明によれば，前記低密度モリブ
デン焼結体の製造方法において，前記プレスの際の圧力
は，２〜５トン／ｃｍ2 であることを特徴とする低密度
モリブデン焼結体の製造方法が得られる。According to the present invention, in the method for producing a low-density molybdenum sintered body, the pressure at the time of the pressing is 2 to 5 ton / cm 2. A method for producing the body is obtained.
【００１３】また，本発明によれば，前記低密度モリブ
デン焼結体の製造方法において，前記Ｍｏ凝集粉は，６
０〜１５０μｍであることを特徴とする低密度モリブデ
ン焼結体の製造方法が得られる。According to the present invention, in the method for producing a low-density molybdenum sintered body, the Mo agglomerated powder may contain
A method for producing a low-density molybdenum sintered body characterized by having a thickness of 0 to 150 μm is obtained.
【００１４】また，本発明によれば，前記低密度モリブ
デン焼結体から実質的になることを特徴とする焼成炉用
敷皿が得られる。Further, according to the present invention, there is provided a baking dish for a firing furnace, which is substantially made of the low-density molybdenum sintered body.
【００１５】また，本発明によれば，前記低密度モリブ
デン焼結体を基部に用い，前記基部に形成された空孔
に，Ｂａ化合物を含浸してなることを特徴とする放電電
極が得られる。Further, according to the present invention, there is provided a discharge electrode characterized in that the low-density molybdenum sintered body is used as a base and pores formed in the base are impregnated with a Ba compound. .
【００１６】さらに，本発明によれば，前記低密度モリ
ブデン焼結体を用いたことを特徴とする流体フィルター
が得られる。Further, according to the present invention, there is provided a fluid filter using the low-density molybdenum sintered body.
【００１７】[0017]
【発明の実施の形態】以下，本発明の実施の形態につい
て説明する。Embodiments of the present invention will be described below.
【００１８】まず，本発明の低密度モリブデン焼結体の
製造の原理について，図１を参照して説明する。First, the principle of manufacturing the low-density molybdenum sintered body of the present invention will be described with reference to FIG.
【００１９】図１（ａ）は本発明の実施の形態による低
密度モリブデン焼結体の構造を説明するための概略図で
あり，左図は粗粒Ｍｏ粉プレス体を示し，右図はこの粗
粒Ｍｏ粉プレス体を焼結した後の粗粒Ｍｏ粉焼結体を夫
々示している。FIG. 1A is a schematic view for explaining the structure of a low-density molybdenum sintered body according to an embodiment of the present invention. The left figure shows a coarse Mo powder pressed body, and the right figure shows this. The coarse Mo powder sintered body after sintering the coarse Mo powder pressed body is shown respectively.
【００２０】また，図１（ｂ）は比較のために従来のモ
リブデン焼結体の構造を説明するための概略図であり，
左図は通常のＭｏ粉プレス体を示し，右図はこの通常の
Ｍｏ粉プレス体を焼結した後の通常Ｍｏ粉焼結体を夫々
示している。FIG. 1B is a schematic diagram for explaining the structure of a conventional molybdenum sintered body for comparison.
The left figure shows a normal Mo powder pressed body, and the right figure shows a normal Mo powder sintered body after sintering this normal Mo powder pressed body.
【００２１】本発明においては，粒度の粗い粉末（以
下，Ｍｏ粗粒粉と呼ぶ）を使用する。In the present invention, a powder having a coarse particle size (hereinafter referred to as Mo coarse powder) is used.
【００２２】即ち，本発明において使用されるＭｏ粗粒
粉とは，６０〜１５０μｍの目開きのふるいで分けられ
たＭｏ凝集粉を約１２００〜１８００℃で真空もしくは
水素雰囲気にて高温熱処理し，更にそれを解砕した粒径
６０〜１５０μｍＭｏ純度９９．９％以上の粉末であ
る。That is, the Mo coarse powder used in the present invention is a Mo agglomerated powder separated by a sieve having a mesh size of 60 to 150 μm and subjected to a high temperature heat treatment at about 1200 to 1800 ° C. in a vacuum or hydrogen atmosphere. Further, it is a powder having a particle size of 60 to 150 μmmo and a purity of 99.9% or more obtained by crushing it.
【００２３】このＭｏ粗粒粉は，通常のＭｏ粉とＭｏ粗
粒粉との焼結のされ方が若干異なる。つまり，本発明で
用いるＭｏ粗粒粉は，プレス前に熱処理を施す事によ
り，その粒子自体が焼結している。その為，図１（ａ）
に示すようにプレス体の状態で密度は同一でも，図１
（ｂ）に示す通常のＭｏ粉より大きな空孔２０を有す
る。これらのプレス体を焼結すると通常のＭｏ粉のプレ
ス体はｌつ１つの粒子１０が小さい為，粒子１０同士の
接触面積が大きくなり，図中の×印で示される空孔２０
が消滅していく。This Mo coarse powder slightly differs in the way in which normal Mo powder and Mo coarse powder are sintered. That is, the Mo coarse powder used in the present invention is subjected to a heat treatment before pressing, whereby the particles themselves are sintered. Therefore, FIG. 1 (a)
As shown in Fig. 1, even if the density is the same in the state of the pressed body,
It has pores 20 larger than the normal Mo powder shown in (b). When these pressed bodies are sintered, a normal Mo powder pressed body has a small contact area between particles 10 because each particle 10 is small.
Disappears.
【００２４】しかし，本発明で用いるＭｏ粗粒粉プレス
体は粒子１０同士の接触が，通常のＭｏ粉に比べ少ない
為，接触している部分のみが焼結され結果的に焼結体中
に図中の×印で示されるような大きな空孔２０が残る。However, in the pressed body of Mo coarse powder used in the present invention, since the contact between the particles 10 is smaller than that of ordinary Mo powder, only the contacting parts are sintered and consequently the sintered body Large holes 20 remain as indicated by crosses in the figure.
【００２５】次に，本発明のモリブデン焼結体を得るた
めに，上述のように作製されたＭｏ粗粒粉をプレス圧力
２〜５トン／ｃｍ2 でプレス成型し，更に約１８００℃
の真空もしくは水素雰囲気で焼結する。ここで，通常の
Ｍｏ粉からの焼結体で低密度品を得ようとすれば焼結を
途中で止める状態になり，焼結体の強度は低下する。Next, in order to obtain the molybdenum sintered body of the present invention, the Mo coarse powder produced as described above is press-molded at a pressing pressure of 2 to 5 ton / cm 2 , and further, at about 1800 ° C.
In a vacuum or hydrogen atmosphere. Here, if an attempt is made to obtain a low-density product using a sintered body of ordinary Mo powder, sintering will be stopped halfway, and the strength of the sintered body will decrease.
【００２６】しかし，本発明によるＭｏ粗粒粉からの焼
結体は，粒子自体がある程度焼結されている為，高温で
焼結しても収縮が起こりにくく，そのため高強度で低密
度のＭｏ焼結体を得る事ができる。However, in the sintered body from the Mo coarse powder according to the present invention, since the particles themselves are sintered to some extent, shrinkage hardly occurs even when sintered at a high temperature. A sintered body can be obtained.
【００２７】以下，本発明の低密度モリブデン焼結体の
製造の具体例について説明する。Hereinafter, a specific example of the production of the low density molybdenum sintered body of the present invention will be described.
【００２８】（第１の実施の形態）ふるい目開き６０〜
１５０μｍでふるい分けられたＭｏ凝集粉を１２００
℃，１４００℃，１６００℃，１８００℃にて熱処理を
行い，それらを解砕して平均粒径約１００μｍのＭｏ粗
粒粉を作製した。さらに，直径６０ｍｍの金型にて圧力
を変えてプレス成形しその後１８００℃にて焼結した。(First Embodiment) Sieve opening 60 to
Mo agglomerated powder sieved at 150 μm was 1200
C., 1400.degree. C., 1600.degree. C., and 1800.degree. C., heat treatment was performed, and they were crushed to produce Mo coarse powder having an average particle size of about 100 .mu.m. Further, it was press-formed by changing the pressure in a mold having a diameter of 60 mm, and then sintered at 1800 ° C.
【００２９】また，市販の４μｍのＭｏ粉，即ち，非熱
処理Ｍｏ粉でも，バインダーを混合後，同様の方法で作
製し，両者を比較した。但し，市販のＭｏ粉のプレス体
は焼結の前に４００℃で脱バインダーを行った。それぞ
れの密度の変化を調べた結果を図２に示す。Also, a commercially available 4 μm Mo powder, that is, a non-heat-treated Mo powder, was prepared by the same method after mixing the binder, and the two were compared. However, a commercially available pressed body of Mo powder was debindered at 400 ° C. before sintering. FIG. 2 shows the result of examining the change in each density.
【００３０】焼結体の密度は熱処理温度が上昇するとと
もに低＜なった。また，プレス圧を増加することによ
り，焼結体密度は高くなった。The density of the sintered body decreased as the heat treatment temperature increased. The density of the sintered body was increased by increasing the pressing pressure.
【００３１】（第２の実施の形態）第１の実施の形態で
作製したＭｏ粗粒粉を用い，１０×３０ｍｍの金型を使
って，厚さ約６ｍｍのプレス体を作り，１６００〜１８
００℃で焼結したときの密度の変化を図３に示す。ま
た，この時のプレス体の強度を超硬工具協会規格ＣＩＳ
０２６に基づき三点曲げ試験で測定した．その結果を
図４に示す。(Second Embodiment) Using the Mo coarse powder prepared in the first embodiment, a pressed body having a thickness of about 6 mm is formed using a 10 × 30 mm mold, and a press body of 1600 to 18 mm is formed.
FIG. 3 shows the change in density when sintering at 00 ° C. In addition, the strength of the pressed body at this time was determined by the Carbide Tool Association standard CIS.
026 based on a three-point bending test. FIG. 4 shows the results.
【００３２】密度については，焼結温度が高くなる程，
高くなり，また熱処理温度の低いもののほうが，高くな
った。曲げ強度についても，焼結温度が高くなるほど高
くなり熱処理温度の低いものが高くなった。As for the density, as the sintering temperature increases,
The heat treatment temperature was higher and the heat treatment temperature was lower. The bending strength also increased as the sintering temperature increased, and the bending strength increased at lower heat treatment temperatures.
【００３３】市販のＭｏ粉を用い，このテストと同様の
密度を出すため，３トン／ｃｍ2 でプレスし，４００℃
で脱バインダを行った後，１６００℃で焼結体を得た。
その焼結体の相対密度は，８５．３％であった。また，
上記と同様に三点曲げ試験を行い，曲げ強度を測定した
ところ，５２ｋｇ／ｍｍ2 であった。この焼結体密度は
１２００℃熱処理品の１８００℃焼結体とほぼ同様であ
るが，曲げ強度は明らかに低かった。Ｍｏ粗粒粉の焼結
体は，粒子自身がある程度まで焼結されて密度が上がっ
ている為，図１（ｂ）に示すように空孔２０を内包した
状態になる。Using commercially available Mo powder, press at 3 tons / cm 2 to obtain the same density as in this test,
After removing the binder by using, a sintered body was obtained at 1600 ° C.
The relative density of the sintered body was 85.3%. Also,
A three-point bending test was performed in the same manner as described above, and the bending strength was measured. As a result, it was 52 kg / mm 2 . The sintered body density was almost the same as that of the 1800 ° C sintered body of the 1200 ° C heat-treated product, but the bending strength was clearly lower. Since the sintered body of the Mo coarse powder has its density increased by sintering the particles themselves to a certain extent, the sintered body contains the pores 20 as shown in FIG. 1B.
【００３４】[0034]
【発明の効果】以上説明したように，本発明では，いま
までに不可能であった多孔質のＭｏ焼結体を作製する事
が出来る低密度モリブデン焼結体及びその製造方法を提
供することができる。As described above, the present invention provides a low-density molybdenum sintered body capable of producing a porous Mo sintered body which has been impossible so far, and a method for producing the same. Can be.
【００３５】また，本発明によれば，相対密度約７０〜
８５％の低密度焼結製品がバインダを添加せず作製する
ことができる低密度モリブデン焼結体及びその製造方法
を提供することができる。According to the present invention, the relative density is about 70 to
The present invention can provide a low-density molybdenum sintered body that can be manufactured without adding a binder to a low-density sintered product of 85% and a method for manufacturing the same.
【００３６】また，本発明によれば，前処理（熱処理）
されたＭｏ粗粒粉を使用する事により，低密度で高強度
のＭｏ焼結製品ができ，その前処理の温度によって密度
をコントロールする事も可能である低密度モリブデン焼
結体及びその製造方法を提供することができる。Further, according to the present invention, pretreatment (heat treatment)
Low-density molybdenum sintered body and low-density molybdenum sintered body and high-strength molybdenum sintered body using low-density molybdenum powder and high-strength Mo sintered product Can be provided.
【００３７】また，本発明によれば，従来の粉末冶金法
を用いたモリブデン製品の製造工程を利用することがで
き，特別の装置や機械を必要としないので安価かつ容易
に製造できる低密度モリブデン焼結体及びその製造方法
を提供することができる。Further, according to the present invention, a molybdenum product manufacturing process using a conventional powder metallurgy method can be used, and no special equipment or machine is required, so that low-density molybdenum can be manufactured easily at low cost. A sintered body and a method for manufacturing the same can be provided.
【００３８】さらに，本発明によれば，前記低密度モリ
ブデン焼結体を用いた焼成炉用敷皿，放電電極，及び流
体フィルター等の製品が得られる。Further, according to the present invention, products such as a baking pan, a discharge electrode, and a fluid filter using the low-density molybdenum sintered body can be obtained.
【図面の簡単な説明】[Brief description of the drawings]
【図１】（ａ）は本発明の実施の形態による低密度モリ
ブデン焼結体の構造を説明するための概略図である。 （ｂ）比較の為に，通常のＭｏ粉を用いたモリブデン焼
結体の構造を説明するための概略図である。FIG. 1A is a schematic view for explaining the structure of a low-density molybdenum sintered body according to an embodiment of the present invention. (B) It is the schematic for demonstrating the structure of the molybdenum sintered compact using normal Mo powder for comparison.
【図２】本発明の実施の形態によるＭｏ粗粒粉の密度変
化を示す図である。FIG. 2 is a diagram showing a change in density of Mo coarse powder according to the embodiment of the present invention.
【図３】本発明の実施の形態による焼結体の相対密度と
焼結温度との関係を示す図である。FIG. 3 is a diagram showing a relationship between a relative density and a sintering temperature of a sintered body according to the embodiment of the present invention.
【図４】本発明の実施の形態による焼結体の強度と焼結
温度との関係を示す図である。FIG. 4 is a diagram showing a relationship between strength of a sintered body and a sintering temperature according to an embodiment of the present invention.
１０ 粒子 ２０ 空孔 10 particles 20 holes
───────────────────────────────────────────────────── フロントページの続き (51)Int.Cl.6 識別記号 ＦＩ Ｈ０１Ｊ 1/14 Ｈ０１Ｊ 1/14 Ｂ 9/04 9/04 Ｊ Ｍ ──────────────────────────────────────────────────続 き Continued on the front page (51) Int.Cl. 6 Identification code FI H01J 1/14 H01J 1/14 B 9/04 9/04 J M
Claims (8)
０〜８５％の相対密度とを有することを特徴とする低密
度モリブデン焼結体。1. A bending strength of 60 kg / mm 2 or more,
A low-density molybdenum sintered body having a relative density of 0 to 85%.
処理後解砕し，粒度６０〜１５０μｍのＭｏ粗粒粉を作
り，それをプレス後，焼結することを特徴とする低密度
モリブデン焼結体の製造方法。2. A low-density molybdenum sintering method characterized by crushing Mo heat-agglomerated powder at 1200 to 1800 ° C. after heat treatment to produce Mo coarse-grained powder having a particle size of 60 to 150 μm, followed by pressing and sintering. How to make the body.
の製造方法において，前記焼結温度は約１８００℃であ
ることを特徴とする低密度モリブデン焼結体の製造方
法。3. The method for producing a low-density molybdenum sintered body according to claim 2, wherein the sintering temperature is about 1800 ° C.
の製造方法において，前記プレスの際の圧力は，２〜５
トン／ｃｍ2 であることを特徴とする低密度モリブデン
焼結体の製造方法。4. The method for producing a low-density molybdenum sintered body according to claim 2, wherein the pressure at the time of pressing is 2-5.
Ton / cm 2. A method for producing a low-density molybdenum sintered body.
の製造方法において，前記Ｍｏ凝集粉は，６０〜１５０
μｍであることを特徴とする低密度モリブデン焼結体の
製造方法。5. The method for producing a low-density molybdenum sintered body according to claim 2, wherein the Mo-agglomerated powder is 60-150.
A method for producing a low-density molybdenum sintered body, characterized by having a thickness of μm.
から実質的になることを特徴とする焼成炉用敷皿。6. A baking dish for a firing furnace, substantially consisting of the low-density molybdenum sintered body according to claim 1.
を基部に用い，前記基部に形成された空孔に，Ｂａ化合
物を含浸してなることを特徴とする放電電極。7. A discharge electrode, wherein the low-density molybdenum sintered body according to claim 1 is used as a base, and holes formed in the base are impregnated with a Ba compound.
を用いたことを特徴とする流体フィルター。8. A fluid filter using the low-density molybdenum sintered body according to claim 1.
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP32962296A JP3869057B2 (en) | 1996-12-10 | 1996-12-10 | Low density molybdenum sintered body and method for producing the same |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP32962296A JP3869057B2 (en) | 1996-12-10 | 1996-12-10 | Low density molybdenum sintered body and method for producing the same |
Publications (2)
| Publication Number | Publication Date |
|---|---|
| JPH10168505A true JPH10168505A (en) | 1998-06-23 |
| JP3869057B2 JP3869057B2 (en) | 2007-01-17 |
Family
ID=18223420
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP32962296A Expired - Fee Related JP3869057B2 (en) | 1996-12-10 | 1996-12-10 | Low density molybdenum sintered body and method for producing the same |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JP3869057B2 (en) |
Cited By (4)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN101988162A (en) * | 2010-11-05 | 2011-03-23 | 西安理工大学 | Method for preparing porous molybdenum metal by adopting powder metallurgy method |
| CN102560214A (en) * | 2012-02-09 | 2012-07-11 | 北京航空航天大学 | Antifoaming gradient porous structure in plasma-facing material |
| WO2017008092A1 (en) | 2015-07-10 | 2017-01-19 | Plansee Se | Metal filter |
| CN112207282A (en) * | 2020-09-17 | 2021-01-12 | 洛阳科威钨钼有限公司 | Preparation method of spraying molybdenum powder |
-
1996
- 1996-12-10 JP JP32962296A patent/JP3869057B2/en not_active Expired - Fee Related
Cited By (4)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN101988162A (en) * | 2010-11-05 | 2011-03-23 | 西安理工大学 | Method for preparing porous molybdenum metal by adopting powder metallurgy method |
| CN102560214A (en) * | 2012-02-09 | 2012-07-11 | 北京航空航天大学 | Antifoaming gradient porous structure in plasma-facing material |
| WO2017008092A1 (en) | 2015-07-10 | 2017-01-19 | Plansee Se | Metal filter |
| CN112207282A (en) * | 2020-09-17 | 2021-01-12 | 洛阳科威钨钼有限公司 | Preparation method of spraying molybdenum powder |
Also Published As
| Publication number | Publication date |
|---|---|
| JP3869057B2 (en) | 2007-01-17 |
Similar Documents
| Publication | Publication Date | Title |
|---|---|---|
| KR100457724B1 (en) | Tungsten target for sputtering and method for preparing thereof | |
| US4108652A (en) | Method for producing a sintered body of high density | |
| EA002736B1 (en) | Low oxygen refractory metal powder for powder metallurgy | |
| KR100260337B1 (en) | Sputtering cathode target for transparent coating and the same method | |
| KR20010029899A (en) | Method of making high density sputtering targets | |
| JPS62226854A (en) | Manufacture of single phase or multiple phase ceramic formedbody | |
| CN1136325C (en) | Platinum material reinforced by oxide dispersion and process for producing the same | |
| JP5265867B2 (en) | Method for producing a high density semi-finished product or component | |
| JP2005171389A (en) | Method for manufacturing tungsten target for sputtering | |
| JPH10168505A (en) | Low density molybdenum sintered compact and its production | |
| JP3764315B2 (en) | Tungsten material and manufacturing method thereof | |
| CN101523531A (en) | Powder modification in the manufacture of solid state capacitor anodes | |
| JP3420377B2 (en) | Method for producing yttrium-aluminum-garnet sintered body | |
| JP3998972B2 (en) | Method for producing sputtering tungsten target | |
| JPH11199948A (en) | Low-temperature-ductile material | |
| JPH04308048A (en) | Production of porous tungsten material | |
| JP3121400B2 (en) | Manufacturing method of tungsten sintered body | |
| JP2004169064A (en) | Copper-tungsten alloy, and method of producing the same | |
| CN114573344B (en) | Two-phase composite microwave dielectric ceramic material and preparation method and application thereof | |
| JPH02271919A (en) | Production of fine powder of titanium carbide | |
| CN117604313A (en) | TiAl intermetallic compound porous material with high Nb content and preparation method thereof | |
| JPH05147917A (en) | Production of fine tungsten-based carbide powder | |
| JPH04180534A (en) | Metallic member having high thermal conductivity and low coefficient of thermal expansion and its production | |
| JP2005320581A (en) | Method for manufacturing porous metal body | |
| JPH09125101A (en) | Molybdenum coarse granule and its production |
Legal Events
| Date | Code | Title | Description |
|---|---|---|---|
| A977 | Report on retrieval |
Free format text: JAPANESE INTERMEDIATE CODE: A971007 Effective date: 20050715 |
|
| A131 | Notification of reasons for refusal |
Free format text: JAPANESE INTERMEDIATE CODE: A131 Effective date: 20050803 |
|
| A521 | Written amendment |
Free format text: JAPANESE INTERMEDIATE CODE: A523 Effective date: 20051003 |
|
| TRDD | Decision of grant or rejection written | ||
| A01 | Written decision to grant a patent or to grant a registration (utility model) |
Free format text: JAPANESE INTERMEDIATE CODE: A01 Effective date: 20060927 |
|
| A61 | First payment of annual fees (during grant procedure) |
Free format text: JAPANESE INTERMEDIATE CODE: A61 Effective date: 20061012 |
|
| R150 | Certificate of patent or registration of utility model |
Free format text: JAPANESE INTERMEDIATE CODE: R150 |
|
| FPAY | Renewal fee payment (event date is renewal date of database) |
Free format text: PAYMENT UNTIL: 20101020 Year of fee payment: 4 |
|
| FPAY | Renewal fee payment (event date is renewal date of database) |
Free format text: PAYMENT UNTIL: 20101020 Year of fee payment: 4 |
|
| FPAY | Renewal fee payment (event date is renewal date of database) |
Free format text: PAYMENT UNTIL: 20111020 Year of fee payment: 5 |
|
| FPAY | Renewal fee payment (event date is renewal date of database) |
Free format text: PAYMENT UNTIL: 20111020 Year of fee payment: 5 |
|
| FPAY | Renewal fee payment (event date is renewal date of database) |
Free format text: PAYMENT UNTIL: 20121020 Year of fee payment: 6 |
|
| FPAY | Renewal fee payment (event date is renewal date of database) |
Free format text: PAYMENT UNTIL: 20131020 Year of fee payment: 7 |
|
| R250 | Receipt of annual fees |
Free format text: JAPANESE INTERMEDIATE CODE: R250 |
|
| LAPS | Cancellation because of no payment of annual fees |