JPH10153537A - Method and apparatus for formation of cross section of sample - Google Patents
Method and apparatus for formation of cross section of sampleInfo
- Publication number
- JPH10153537A JPH10153537A JP30960596A JP30960596A JPH10153537A JP H10153537 A JPH10153537 A JP H10153537A JP 30960596 A JP30960596 A JP 30960596A JP 30960596 A JP30960596 A JP 30960596A JP H10153537 A JPH10153537 A JP H10153537A
- Authority
- JP
- Japan
- Prior art keywords
- sample
- polished
- jig
- polishing
- cross
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Withdrawn
Links
Landscapes
- Sampling And Sample Adjustment (AREA)
- Testing Or Measuring Of Semiconductors Or The Like (AREA)
Abstract
Description
【０００１】[0001]
【発明の属する技術分野】本発明は、半導体等の断面構
造の観察に適した試料の断面形成方法及び同装置に関す
るものである。BACKGROUND OF THE INVENTION 1. Field of the Invention The present invention relates to a method and an apparatus for forming a cross section of a sample suitable for observing a cross-sectional structure of a semiconductor or the like.
【０００２】[0002]
【従来の技術】従来から、半導体等の試料の断面構造を
観察するにあたって、試料を樹脂体の中に埋め込み、こ
の樹脂体と一体に試料を研磨することにより観察用の断
面を形成することが行われている。2. Description of the Related Art Conventionally, when observing a cross-sectional structure of a sample such as a semiconductor, it is necessary to form a cross section for observation by embedding the sample in a resin body and polishing the sample integrally with the resin body. Is being done.
【０００３】この種の試料断面の形成作業では、予め定
められた位置（目標研磨位置）まで正確に試料を研磨す
ることが要求され、そのため従来は、目標研磨位置とし
て試料にけがき線等を付し、このけがき線を樹脂体を介
して作業者が目視確認しながら慎重に試料を研磨してい
た。しかし、樹脂体を介して目標位置を正確に確認する
ことは難しく、そこで、最近では例えば特開昭６４−４
５１２４号公報に開示されるように、試料に付されたけ
がき線等の目標研磨位置を直接目視できるような空洞を
樹脂体に形成し、これによって樹脂体を介さずに目標研
磨位置を直接目視しながら研磨作業を行うといった試料
の断面形成方法が提案されている。[0003] In this kind of work for forming a sample cross section, it is required to polish the sample accurately to a predetermined position (target polishing position). Therefore, conventionally, a scribe line or the like is formed on the sample as the target polishing position. The sample was carefully polished while the operator visually checked the scribe line through the resin body. However, it is difficult to accurately confirm the target position via the resin body.
As disclosed in Japanese Patent No. 5124, a cavity is formed in the resin body so that the target polishing position such as a scribe line attached to the sample can be directly viewed, whereby the target polishing position can be directly viewed without passing through the resin body. There has been proposed a method for forming a cross section of a sample, such as performing a polishing operation while polishing.
【０００４】[0004]
【発明が解決しようとする課題】しかし、特開昭６４−
４５１２４号公報に開示される方法であっても目標研磨
位置を目視確認しながら過剰研磨、あるいは研磨不足に
注意しながら慎重に研磨する必要がある点は何ら変わら
ず、そのため依然として試料の断面形成に時間を要して
いる。However, Japanese Unexamined Patent Publication No.
Even with the method disclosed in Japanese Patent No. 45124, there is no difference in that it is necessary to polish carefully while paying attention to excessive polishing or insufficient polishing while visually confirming the target polishing position. It takes time.
【０００５】また、試料表面に垂直な断面を形成する必
要がある場合でも、上記従来の方法では、作業者の目視
確認に依存しているために研磨角度等を調整するのが難
しく、作業者に熟練が要求されている。[0005] Even when it is necessary to form a cross section perpendicular to the surface of the sample, it is difficult to adjust the polishing angle and the like in the above-mentioned conventional method because it depends on the visual confirmation of the operator. Skill is required.
【０００６】本発明は、上記問題を解決するためになさ
れたものであり、精度よく、かつ速やかに観察用断面を
形成することができる試料の断面形成方法及び同装置を
提供することを目的としている。SUMMARY OF THE INVENTION The present invention has been made to solve the above problems, and has as its object to provide a method and an apparatus for forming a cross section of a sample, which can form a cross section for observation accurately and promptly. I have.
【０００７】[0007]
【課題を解決するための手段】上記課題を解決するため
に、本発明は、試料を所定位置まで研磨して観察用の断
面を形成する方法において、試料を樹脂に埋め込んでそ
の周面に雄ねじを螺設した円柱状の試料封入体を形成
し、これを、先端に試料の目標研磨面と平行な規制面を
有し、内面に雌ねじを有した筒状体に対して螺合挿入す
るとともに、上記試料の目標研磨面と上記規制面とが同
一面となって、研磨対象部分が上記筒状体から先端外部
に突出するように試料封入体を筒状体に対して取着し、
この状態で上記筒状体の先端から突出した研磨対象部分
を研磨するようにしたものである（請求項１）。なお、
請求項１の記載において「筒状体」とは、いわゆる貫通
穴を有するもの以外に、片側にのみ開口する中空柱状の
ものも含む趣旨である。In order to solve the above-mentioned problems, the present invention relates to a method for forming a cross section for observation by polishing a sample to a predetermined position. Is formed into a cylindrical sample enclosure, which is screwed into a cylindrical body having a regulating surface at the tip parallel to the target polishing surface of the sample and having an internal thread on the inner surface. The target polishing surface of the sample and the regulation surface are the same surface, and the sample enclosure is attached to the cylindrical body so that the polishing target portion protrudes outside the distal end from the cylindrical body,
In this state, the portion to be polished protruding from the tip of the tubular body is polished (claim 1). In addition,
In the description of the first aspect, the term “cylindrical body” includes a hollow columnar body that is opened only on one side, in addition to a body having a so-called through hole.
【０００８】このような方法によれば、規制面がサンド
ペーパー等の研磨部材に当接するまで試料封入体を研磨
すれば、筒状体の規制面によって試料封入体のそれ以上
の研磨が阻止されて目標研磨位置に対して過不足なく試
料封入体を研磨することができ、しかも研磨面における
傾斜誤差の発生を抑えることができる。特に、試料封入
体を筒状体に螺合挿入するので、試料封入体を筒状体に
対して相対的に回転させることにより試料封入体を筒状
体に対して容易に出し入れすることができ、これによっ
て目標研磨面と規制面との位置合わせを容易に行うこと
ができる。According to such a method, if the sample enclosure is polished until the regulating surface comes into contact with the polishing member such as sandpaper, further polishing of the sample enclosure is prevented by the regulating surface of the cylindrical body. Thus, the sample enclosure can be polished to the target polishing position without excess or deficiency, and the occurrence of a tilt error on the polished surface can be suppressed. In particular, since the sample inclusion body is screwed into the cylindrical body, the sample inclusion body can be easily taken in and out of the cylindrical body by rotating the sample inclusion body relative to the cylindrical body. Thus, the alignment between the target polishing surface and the regulating surface can be easily performed.
【０００９】また、本発明は、試料を所定位置まで研磨
して観察用の断面を形成する装置であって、試料を樹脂
に埋め込んだ試料封入体を螺合挿入するためのねじ穴か
らなる中空部を有する筒状体と、この筒状体の先端に形
成されて軸心と直交する平面により形成される規制面と
を具備しているものである（請求項２）。The present invention also relates to an apparatus for polishing a sample to a predetermined position to form a cross section for observation, wherein the hollow is formed by a screw hole for screw-inserting a sample enclosure in which the sample is embedded in a resin. And a regulating surface formed at a tip of the tubular body and formed by a plane perpendicular to the axis.
【００１０】この装置によれば、上記請求項１記載の方
法を好適に実施することが可能となる。つまり、試料を
樹脂に埋め込んでその周面に雄ねじを螺設した円柱状の
試料封入体を形成し、これを筒状体に螺合挿入して、試
料の目標研磨面が筒状体の規制面と同一面となるように
した後、試料封入体の筒状体からの突出部分を研磨する
ことにより観察用断面を得ることができる。[0010] According to this apparatus, the method described in claim 1 can be suitably performed. In other words, a sample is embedded in a resin, and a cylindrical sample encapsulant in which a male screw is screwed on the peripheral surface is formed. This is screwed into a cylindrical body, and the target polishing surface of the sample is regulated by the cylindrical body. After making the surface flush with the surface, the protruding portion of the sample enclosure from the cylindrical body is polished to obtain a cross section for observation.
【００１１】[0011]
【発明の実施の形態】本発明の実施の形態について図面
を用いて説明する。Embodiments of the present invention will be described with reference to the drawings.
【００１２】図１は、本発明に係る試料の断面形成方法
を説明する断面図である。この図に示すように、本方法
では片側（同図では下側）に開口する中空柱状の治具
（筒状体）１０を用いて試料２を研磨する。つまり、半
導体等の試料２を透明エポキシ樹脂３で封止した円柱状
の試料封入体１を治具１０の内部に挿入取着し、作業者
が把持具１０を把持して試料封入体１のうち治具１０か
ら外部に突出している部分をサンドペーパー１８に押し
当てながら試料封入体１を研磨することにより試料２に
観察用断面を形成するものである。以下、詳しく説明す
る。FIG. 1 is a sectional view for explaining a method for forming a section of a sample according to the present invention. As shown in this figure, in this method, the sample 2 is polished using a hollow column-shaped jig (cylindrical body) 10 that opens on one side (the lower side in the figure). That is, a columnar sample enclosure 1 in which a sample 2 such as a semiconductor is sealed with a transparent epoxy resin 3 is inserted and attached inside a jig 10, and an operator grips the gripper 10 to remove the sample enclosure 1. The cross section for observation is formed in the sample 2 by polishing the sample enclosure 1 while pressing the portion protruding outside from the jig 10 against the sandpaper 18. The details will be described below.
【００１３】上記治具１０は、上記サンドペーパー１８
により研磨され難い、例えばステンレス鋼等の硬質材料
から形成されており、その内面には雌ねじ１２が形成さ
れている。また、治具１０の先端、すなわち開口縁部に
は、雌ねじ１２の軸心方向と直交する平面からなる規制
面１４が形成されている。なお、この規制面１４の平面
度及び治具１０の軸心に対する直角度は高い精度で設け
られている。The jig 10 includes the sandpaper 18
It is made of a hard material, such as stainless steel, which is difficult to be polished, and has an internal thread 12 formed on its inner surface. Further, at the tip of the jig 10, that is, at the edge of the opening, a regulating surface 14 formed of a plane perpendicular to the axial direction of the female screw 12 is formed. The flatness of the regulating surface 14 and the perpendicularity to the axis of the jig 10 are provided with high accuracy.
【００１４】一方、上記試料封入体１は、例えば、試料
２を上部開口を有した中空円柱状の容器の内部に保持
し、そこへ透明エポキシ樹脂３を流し込んで硬化させて
取り出した後、その周面に雄ねじ５を形成したものであ
り、試料２の表面には研磨目標面を示すけがき線４が付
され、このけがき線４が試料封入体１の軸心と直交する
ようにエポキシ樹脂３によって試料２が封止されてい
る。On the other hand, the sample enclosure 1, for example, holds the sample 2 inside a hollow cylindrical container having an upper opening, pours the transparent epoxy resin 3 into the container, cures it, takes it out, and removes it. A male screw 5 is formed on the peripheral surface, and a scribe line 4 indicating a polishing target surface is provided on the surface of the sample 2. The scribe line 4 is perpendicular to the axis of the sample enclosure 1. The sample 2 is sealed with the resin 3.
【００１５】そして、研磨作業においては、上述のよう
に治具１０に雌ねじ１２が形成されているので、試料封
入体１を直接治具１０に螺合挿入することにより試料封
入体１を治具１０に取着する。そして、図２に示すよう
に、試料２に付したけがき線４が規制面１４と一致する
（面一となる）ように試料封入体１と治具１０の軸方向
の相対位置を調整する。この際、試料封入体１は治具１
０に螺合挿入されるものであるから、試料封入体１を回
すだけで容易に試料２の位置合わせを行うことができ
る。In the polishing operation, since the female screw 12 is formed in the jig 10 as described above, the sample enclosure 1 is screwed and inserted directly into the jig 10 so that the sample enclosure 1 is fixed. Attach to 10. Then, as shown in FIG. 2, the relative position of the sample enclosure 1 and the jig 10 in the axial direction is adjusted so that the scribe line 4 attached to the sample 2 coincides with the regulation surface 14 (becomes flush). . At this time, the sample enclosure 1 is
Since it is screw-inserted into 0, the sample 2 can be easily positioned just by turning the sample enclosure 1.
【００１６】調整が完了したら、治具１０を作業者が把
持し、規制面１４から突出した試料封入体１の端面をサ
ンドペーパー１８に押し当てた状態で治具１０を略水平
に往復移動させて試料封入体１を研磨する。When the adjustment is completed, the operator grips the jig 10 and reciprocates the jig 10 substantially horizontally while pressing the end surface of the sample enclosure 1 protruding from the regulating surface 14 against the sandpaper 18. Then, the sample enclosure 1 is polished.
【００１７】こうして規制面１４の全体がサンドペーパ
ー１８に当接するまで試料封入体１を研磨すると、上述
のように試料２の目標研磨面が規制面１４と面一にされ
ているため、過不足なく、しかも、目標研磨面に対して
研磨面が傾斜することなく試料２が研磨され、これによ
り所望の観察用断面が形成されることになる。When the sample enclosure 1 is polished until the entire regulation surface 14 comes into contact with the sandpaper 18, the target polished surface of the sample 2 is flush with the regulation surface 14 as described above. In addition, the sample 2 is polished without the polished surface being inclined with respect to the target polished surface, whereby a desired observation cross section is formed.
【００１８】このように上記の方法によれば、治具１０
を往復移動させて規制面１４がサンドペーパー１８に当
接するまで試料封入体１を研磨すれば、特に作業者が過
剰研磨、あるいは研磨不足に注意をはらいながら慎重な
作業を行わなくても所望の観察用断面を適切に形成する
ことができる。そのため、けがき線等を目視で確認しな
がら慎重に研磨を行っていた従来のこの種の作業に比べ
ると、作業の効率及び精度を共に効果的に向上させるこ
とができる。As described above, according to the above method, the jig 10
Is reciprocated and the sample enclosure 1 is polished until the regulating surface 14 comes in contact with the sandpaper 18, so that the operator can perform desired polishing without paying careful attention to excessive polishing or insufficient polishing. The observation section can be appropriately formed. Therefore, both the efficiency and accuracy of the work can be effectively improved as compared with the conventional work of this type, in which polishing is carefully performed while visually checking a scribe line or the like.
【００１９】ところで、上記の方法では、試料封入体１
を治具１０に螺合挿入して試料封入体１を治具１０に取
着しているので、研磨中に試料封入体１が不意に回転す
るとけがき線４の位置が規制面１４からずれて、過剰研
磨、あるいは研磨不足を招く虞れがある。従って、例え
ば図２に示すように、治具１０の内部にコイルばね２２
を設け、治具１０に挿入された試料封入体１を適度に軸
方向に付勢することにより試料封入体１の不要な回転を
防止するようにしてもよい。なお、同図の例では、試料
封入体１を付勢する手段としてコイルばねを用いている
が、板ばねやゴム等の弾性部材を用いるようにしてもよ
い。By the way, in the above method, the sample enclosure 1
Is screwed into the jig 10 to attach the sample inclusion body 1 to the jig 10. If the sample inclusion body 1 rotates unexpectedly during polishing, the position of the scribe line 4 shifts from the regulating surface 14. As a result, excessive polishing or insufficient polishing may be caused. Accordingly, for example, as shown in FIG.
May be provided, and the sample enclosure 1 inserted into the jig 10 may be appropriately urged in the axial direction to prevent unnecessary rotation of the sample enclosure 1. Although a coil spring is used as means for biasing the sample enclosure 1 in the example of FIG. 1, an elastic member such as a plate spring or rubber may be used.
【００２０】また、このような試料封入体１のずれ対策
の他の例として、試料封入体１と治具１０との相対回転
が比較的生じ難くなるように試料封入体１と治具１０の
はめあいを設定することも考えられる。しかし、この場
合には、治具に対する試料封入体１の取着やけがき線４
の位置合わせが行い難くなることも考えられるので、こ
の点を考慮してはめあい関係を定めるのが望ましい。Further, as another example of the countermeasure for the displacement of the sample enclosure 1, as described above, the sample enclosure 1 and the jig 10 are relatively hardly rotated relative to each other. It is also conceivable to set a fit. However, in this case, the attachment of the sample enclosure 1 to the jig or the scribe line 4
Since it is conceivable that it may be difficult to perform the positioning, it is desirable to determine the fitting relationship in consideration of this point.
【００２１】なお、上記試料封入体１の説明では省略し
たが、試料封入体１に雄ねじ５を形成するには、一般的
なねじ切り、すなわち、ダイヘッドやねじ切り旋盤を用
いたねじ切り作業により雄ねじ５を形成することができ
る。しかし、試料が半導体等の場合には試料封入体１が
比較的小さいものとなり、試料封入体１を旋盤等に保持
することが難しいため、例えば、図３に示すように内面
にねじ切り刃２６を有した円筒状の治具２４を構成し、
試料２をエポキシ樹脂３で封止した後の円柱体に対して
この治具２４を回転させながら通して雄ねじ５を刻設す
るようにしてもよい。Although not described in the description of the sample enclosure 1, the external thread 5 is formed in the sample enclosure 1 by a general threading operation, that is, a thread cutting operation using a die head or a screw turning lathe. Can be formed. However, when the sample is a semiconductor or the like, the sample enclosure 1 is relatively small, and it is difficult to hold the sample enclosure 1 on a lathe or the like. For example, as shown in FIG. Constituting a cylindrical jig 24 having
The male screw 5 may be carved by passing the jig 24 through the cylindrical body after the sample 2 is sealed with the epoxy resin 3 while rotating the jig 24.
【００２２】[0022]
【発明の効果】以上説明したように、本発明は、試料を
所定位置まで研磨して観察用の断面を形成する方法にお
いて、試料を樹脂に埋め込んでその周面に雄ねじを螺設
した円柱状の試料封入体を形成し、これを、先端に試料
の目標研磨面と平行な規制面を有し、内面に雌ねじを有
した筒状体に対して螺合挿入するとともに、上記試料の
目標研磨面と上記規制面とが同一面となって、研磨対象
部分が上記筒状体から先端外部に突出するように試料封
入体を筒状体に対して取着し、この状態で上記筒状体の
先端から突出した研磨対象部分を研磨するようにしたの
で、過不足なく、しかも、目標研磨面に対して研磨面を
傾斜させるなどすることなく試料を適切に目標研磨面ま
で研磨することができる。そのため、研磨作業の効率及
び精度を共に向上させることができる。As described above, the present invention relates to a method for forming a cross section for observation by polishing a sample to a predetermined position, wherein the sample is embedded in a resin and a male screw is screwed on a peripheral surface thereof. A sample inclusion body is formed, and this is screwed into a cylindrical body having a regulating surface parallel to the target polishing surface of the sample at the tip and having an internal thread on the inner surface, and the target polishing of the sample is performed. The surface and the regulating surface are flush with each other, and the sample enclosure is attached to the cylindrical body so that the portion to be polished protrudes from the cylindrical body to the outside of the distal end. Since the portion to be polished protruding from the tip of the polished surface is polished, the sample can be appropriately polished to the target polished surface without excess or deficiency and without tilting the polished surface with respect to the target polished surface. . Therefore, the efficiency and accuracy of the polishing operation can both be improved.
【図１】本発明に係る試料の断面形成方法を説明する断
面図である。FIG. 1 is a cross-sectional view illustrating a method for forming a cross-section of a sample according to the present invention.
【図２】上記断面形成方法における変形例を示す断面図
である。FIG. 2 is a cross-sectional view showing a modification of the cross-section forming method.
【図３】試料封入体の形成方法を説明する図である。FIG. 3 is a diagram illustrating a method of forming a sample enclosure.
１ 試料封入体 ２ 試料 ３ 透明エポキシ樹脂 ４ けがき線 ５ 雄ねじ １０ 治具 １２ 雌ねじ １４ 規制面 １８ サンドペーパー DESCRIPTION OF SYMBOLS 1 Sample inclusion body 2 Sample 3 Transparent epoxy resin 4 Marking line 5 Male screw 10 Jig 12 Female screw 14 Regulation surface 18 Sandpaper
Claims (2)
面を形成する方法において、試料を樹脂に埋め込んでそ
の周面に雄ねじを螺設した円柱状の試料封入体を形成
し、これを、先端に試料の目標研磨面と平行な規制面を
有し、内面に雌ねじを有した筒状体に対して螺合挿入す
るとともに、上記試料の目標研磨面と上記規制面とが同
一面となって、研磨対象部分が上記筒状体から先端外部
に突出するように試料封入体を筒状体に対して取着し、
この状態で上記筒状体の先端から突出した研磨対象部分
を研磨することを特徴とする試料の断面形成方法。In a method of forming a cross section for observation by polishing a sample to a predetermined position, a sample is embedded in a resin, and a cylindrical sample encapsulant having a male screw threaded on a peripheral surface thereof is formed. The tip has a regulating surface parallel to the target polishing surface of the sample, and is screwed into a cylindrical body having an internal thread on the inner surface, and the target polishing surface of the sample and the regulating surface are flush with each other. Become, the sample enclosure is attached to the cylindrical body so that the portion to be polished protrudes from the cylindrical body to the outside of the tip,
A method for forming a cross section of a sample, wherein a portion to be polished protruding from the tip of the cylindrical body is polished in this state.
面を形成する装置であって、試料を樹脂に埋め込んだ試
料封入体を螺合挿入するためのねじ穴からなる中空部を
有する筒状体と、この筒状体の先端に形成されて軸心と
直交する平面により形成される規制面とを具備している
ことを特徴とする試料の断面形成装置。2. An apparatus for polishing a sample to a predetermined position to form a cross section for observation, comprising: a cylinder having a hollow portion having a screw hole for screwing in a sample enclosure in which the sample is embedded in a resin. An apparatus for forming a cross section of a sample, comprising: a cylindrical body; and a regulating surface formed at a front end of the cylindrical body and formed by a plane perpendicular to an axis.
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP30960596A JPH10153537A (en) | 1996-11-20 | 1996-11-20 | Method and apparatus for formation of cross section of sample |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP30960596A JPH10153537A (en) | 1996-11-20 | 1996-11-20 | Method and apparatus for formation of cross section of sample |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| JPH10153537A true JPH10153537A (en) | 1998-06-09 |
Family
ID=17995044
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP30960596A Withdrawn JPH10153537A (en) | 1996-11-20 | 1996-11-20 | Method and apparatus for formation of cross section of sample |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPH10153537A (en) |
Cited By (3)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JP2004109097A (en) * | 2002-09-20 | 2004-04-08 | Toshiba Corp | Polishing jig for physical analysis and method of physical analysis |
| JP2008309730A (en) * | 2007-06-18 | 2008-12-25 | Fujitsu Ltd | Element measurement method and sample scraping device |
| CN111474026A (en) * | 2020-04-27 | 2020-07-31 | 淮阴师范学院 | Manual manufacturing method of mudstone standard test piece |
-
1996
- 1996-11-20 JP JP30960596A patent/JPH10153537A/en not_active Withdrawn
Cited By (3)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JP2004109097A (en) * | 2002-09-20 | 2004-04-08 | Toshiba Corp | Polishing jig for physical analysis and method of physical analysis |
| JP2008309730A (en) * | 2007-06-18 | 2008-12-25 | Fujitsu Ltd | Element measurement method and sample scraping device |
| CN111474026A (en) * | 2020-04-27 | 2020-07-31 | 淮阴师范学院 | Manual manufacturing method of mudstone standard test piece |
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Legal Events
| Date | Code | Title | Description |
|---|---|---|---|
| A300 | Withdrawal of application because of no request for examination |
Free format text: JAPANESE INTERMEDIATE CODE: A300 Effective date: 20040203 |