JPH10110846A - Vessel switching type fluid element - Google Patents
Vessel switching type fluid elementInfo
- Publication number
- JPH10110846A JPH10110846A JP28342896A JP28342896A JPH10110846A JP H10110846 A JPH10110846 A JP H10110846A JP 28342896 A JP28342896 A JP 28342896A JP 28342896 A JP28342896 A JP 28342896A JP H10110846 A JPH10110846 A JP H10110846A
- Authority
- JP
- Japan
- Prior art keywords
- pressure side
- valve
- side pipe
- container
- pressure
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
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- Servomotors (AREA)
- Measuring Volume Flow (AREA)
Abstract
Description
【０００１】[0001]
【産業上の利用分野】本発明は、微小な流量を制御する
ための装置、とくに、容器を高圧側と低圧側に交互に接
続して、弁の開閉周波数に比例した平均流量の流体を、
容器を介して高圧側から低圧側へ汲みだす容器切替式流
体素子に係わる。BACKGROUND OF THE INVENTION 1. Field of the Invention The present invention relates to a device for controlling a minute flow rate, and more particularly, to a method in which a container is alternately connected to a high pressure side and a low pressure side so that a fluid having an average flow rate proportional to the opening and closing frequency of a valve is provided.
The present invention relates to a container switching type fluid element that pumps from a high pressure side to a low pressure side via a container.
【０００２】[0002]
【従来の技術】流量の調節をおこなうには、通常、調節
弁が用いられる。従来の調節弁は、いずれも、流体の流
路が可変となっていて、バルブプラグを動かすなどの機
械的な手段で流路断面積を調整して、流量を調節してい
る。微小流量の調節には、ニードルバルブが使用される
ことが多いが、やはり、ニードル型のバルブプラグを動
かして流路断面積を調整している。2. Description of the Related Art To control the flow rate, a control valve is usually used. In all of the conventional control valves, the flow path of the fluid is variable, and the flow rate is adjusted by adjusting the cross-sectional area of the flow path by mechanical means such as moving a valve plug. A needle valve is often used to adjust the minute flow rate, but again, the cross-sectional area of the flow path is adjusted by moving a needle-type valve plug.
【０００３】[0003]
【発明が解決しようとする課題】機械的に流路断面積を
変化させる従来の調節弁では、バルブプラグ等を移動さ
せるためのアクチュエーターやアクチュエーターの位置
決めをするためのポジショナー等を用いる。このため、
流量調節装置全体の構造は複雑となる。微小な流量の調
節を目的とする調節弁では、弁差圧が小さくなるため弁
本体は小型化が可能であるが、流路の隙間が微小になる
ため、工作や組立てに精度が要求され、また、弁制御に
も高い精度を要求される。このため、微小流量調節装置
全体では、やはり構造は複雑になり、価格も高くなる。
本発明の目的は、構造が単純な小型で低価格の微小流量
調節装置を実現することである。A conventional control valve that mechanically changes the cross-sectional area of a flow passage uses an actuator for moving a valve plug or the like, a positioner for positioning the actuator, and the like. For this reason,
The structure of the entire flow control device becomes complicated. In a control valve for the purpose of fine flow adjustment, the valve body can be miniaturized because the differential pressure of the valve is small, but the gap between the flow passages is small, so precision is required for machining and assembly. High precision is also required for valve control. For this reason, the structure of the entire micro flow control device is still complicated and the price is high.
SUMMARY OF THE INVENTION An object of the present invention is to realize a small-sized and low-priced minute flow regulator having a simple structure.
【０００４】[0004]
【課題を解決するための手段】上記課題を解決するた
め、本発明においては、間欠的に開閉する弁によって、
容器を高圧側管路と低圧側管路に交互に間欠的に接続
し、前記弁の間欠開閉周波数に比例する平均流量の流体
を、高圧側管路から低圧側管路へ流す。In order to solve the above-mentioned problems, in the present invention, a valve that opens and closes intermittently is provided.
The container is alternately and intermittently connected to the high pressure side line and the low pressure side line, and a fluid having an average flow rate proportional to the intermittent opening / closing frequency of the valve flows from the high pressure side line to the low pressure side line.
【０００５】[0005]
【作用】間欠的に開閉する弁を用いて容器を高圧側管路
と低圧側管路に交互に接続すると、容器によって流体が
高圧側から低圧側へ汲みだされる。弁の開閉の一周期に
汲みだされる流体の量は、高圧側と低圧側の流体の圧力
および温度と容器の容積とで決まる。このような流体素
子において、弁の開閉周期を変化させると、単位時間内
に容器によって汲みだす回数が変化するから、流体の平
均流量を調節することができる。すなわち、高圧側管路
と低圧側管路の間の等価的な流体抵抗を、弁の開閉周波
数によって変化させることができる。When the container is alternately connected to the high-pressure side line and the low-pressure side line using a valve that opens and closes intermittently, fluid is pumped from the high-pressure side to the low-pressure side by the container. The amount of fluid pumped in one cycle of opening and closing of the valve is determined by the pressure and temperature of the fluid on the high and low pressure sides and the volume of the container. In such a fluid element, when the opening / closing cycle of the valve is changed, the number of times of pumping by the container per unit time changes, so that the average flow rate of the fluid can be adjusted. That is, the equivalent fluid resistance between the high-pressure side line and the low-pressure side line can be changed by the valve opening / closing frequency.
【０００６】[0006]
【実施例】図１は、本発明の第一実施例である。図１に
おいて、１は容積Ｖ0 の容器、２は、高圧側管路３およ
び低圧側管路４ならびに容器１に接続された弁である。
５は高圧側管路に取り付けられた容積Ｖ1 の圧力溜、６
は低圧側管路に取り付けられた容積Ｖ2 の圧力溜であ
る。高圧側管路から低圧側管路へは容器１を介して気体
が流れており、圧力溜５、圧力溜６および容器１内には
気体が充満している。圧力溜５および圧力溜６の中の圧
力はそれぞれＰ1 およびＰ2 、それぞれの圧力溜の中の
温度は室温Ｔ0 に等しい。なお、圧力溜５および６は、
その容積が容器１の容積に較べてはるかに大きく作られ
ている。７は制御回路であり、弁２に対して制御信号を
出力している。弁２に対する制御信号は、図２に示すよ
うに、容器１と高圧側管路３とを周波数ｆで間欠的に接
続し、一方、容器１と低圧側管路４とを、高圧側とπだ
けずれた位相で間欠的に接続するような信号である。FIG. 1 shows a first embodiment of the present invention. In FIG. 1, reference numeral 1 denotes a container having a volume V 0 , and 2 denotes a valve connected to the high-pressure side pipe 3 and the low-pressure side pipe 4 and the container 1.
5 is a pressure reservoir having a volume V 1 attached to the high pressure side pipeline, 6
Is the pressure reservoir volume V 2 which is attached to the low pressure side pipe line. Gas flows from the high-pressure side line to the low-pressure side line via the container 1, and the pressure reservoir 5, the pressure reservoir 6, and the container 1 are filled with gas. The pressures in the pressure reservoirs 5 and 6 are P 1 and P 2 , respectively, and the temperature in each pressure reservoir is equal to room temperature T 0 . The pressure reservoirs 5 and 6 are
The volume is made much larger than the volume of the container 1. A control circuit 7 outputs a control signal to the valve 2. As shown in FIG. 2, the control signal for the valve 2 intermittently connects the container 1 and the high pressure side line 3 at a frequency f, while connecting the container 1 and the low pressure side line 4 to the high pressure side It is a signal that is connected intermittently with a phase shifted by only one.
【０００７】弁２がこのように制御されたとき、容器１
内の圧力Ｐ0 は、図２のように、高圧側圧力溜５の圧力
Ｐ1 と低圧側圧力溜６の圧力Ｐ2 が交番する矩形波信号
となる。容器１が高圧側管路３に接続されると、容器１
には高圧側管路から気体が流入し、圧力はＰ1 に等しく
なる。このときの容器１内の気体の状態方程式を考える
と、When valve 2 is controlled in this way, container 1
The pressure P of the inner 0, as in FIG. 2, a rectangular wave signal pressure P 1 and the pressure P 2 of the low-pressure side pressure reservoir 6 of the high-pressure side pressure reservoir 5 alternates. When the container 1 is connected to the high pressure line 3, the container 1
Gas flows from the high-pressure side pipe line in the pressure is equal to P 1. Considering the equation of state of the gas in the container 1 at this time,
【０００８】[0008]
【数１】 (Equation 1)
【０００９】である。ここで、Ｍ1 は容器１内の気体の
質量、Ｒは気体定数、ｍは気体の分子量である。次に、
容器１が低圧側管路４に接続されると、容器１内の気体
の一部は低圧側管路に流出し、圧力がＰ2 に下がる。こ
のときの容器１内の気体の状態方程式は、容器１内の気
体の質量をＭ2 として、[0009] Here, M 1 is the mass of the gas in the container 1, R is the gas constant, m is the molecular weight of the gas. next,
When the container 1 is connected to the low pressure side pipe 4, a portion of the gas in the container 1 flows to the low pressure side pipe, the pressure drops to P 2. The equation of state of the gas in the container 1 at this time is as follows, where the mass of the gas in the container 1 is M 2 .
【００１０】[0010]
【数２】 (Equation 2)
【００１１】となる。すなわち、容器１が弁２によって
高圧側管路３と低圧側管路４に交互に接続されることに
より、弁開閉の一周期τについて質量（Ｍ1 −Ｍ2 ）だ
けの気体が、高圧側から低圧側へ汲みだされることにな
る。このように、容器１には、弁２の開閉の一周期ごと
に間欠的に気体が流入・流出するが、管路に圧力溜が設
置されているため、間欠的な流れは平滑され、高圧側圧
力溜５へ流入する流れおよび低圧側圧力溜６から流出す
る流れは、どちらもほぼ定常流となる。そして、その単
位時間当たりの質量流量Ｑはｆ（Ｍ1 −Ｍ2 ）に等し
い。従って、弁２の開閉周波数ｆを変えることで、質量
流量Ｑを調節することができる。また、数１および数２
から分かるように、Ｍ1 およびＭ2 は容器１の容積Ｖ0
に比例するから、容積の異なる容器を使うことで、様々
の流量レンジの調節弁を実現することができる。## EQU1 ## That is, since the container 1 is alternately connected to the high-pressure side line 3 and the low-pressure side line 4 by the valve 2 , gas of only mass (M 1 −M 2 ) is generated for one cycle τ of valve opening and closing. From the low pressure side. As described above, the gas flows in and out of the container 1 intermittently every one cycle of opening and closing of the valve 2. However, since the pressure reservoir is installed in the pipeline, the intermittent flow is smoothed, The flow flowing into the side pressure reservoir 5 and the flow flowing out of the low pressure side pressure reservoir 6 are almost steady flows. Then, the mass flow rate Q per unit time is equal to f (M 1 −M 2 ). Therefore, the mass flow rate Q can be adjusted by changing the opening / closing frequency f of the valve 2. Equation 1 and Equation 2
As can be seen, M 1 and M 2 are the volumes V 0 of container 1
Therefore, by using containers having different capacities, control valves having various flow ranges can be realized.
【００１２】なお、実際には、弁２が切替わった後、容
器１内の圧力は、過渡状態を経て定常状態に達する。こ
のため、容器１内の圧力波形は、詳細に見れば図２に示
した矩形波形とは異なり、図３に示すように、弁の切り
替わった直後に過渡応答波形が現れたのちにＰ1 または
Ｐ2 に収束する波形となる。一般に管路中の気体はイナ
ータンスを持っているから、弁が開いた瞬間に容器１へ
流入あるいは流出することはできない。管路のイナータ
ンスが大きいと、過渡状態の持続時間は長くなり、過渡
応答が収束するまでに長い時間がかかる。本実施例で
は、圧力溜５および６を設置し、圧力溜と容器１の間を
短く接続することで、圧力溜と容器１の間の管路のイナ
ータンスを小さくし、過渡状態の持続期間が短くなるよ
うにしている。すなわち、本実施例の圧力溜５および６
は、前記のように間欠的な流れを平均する平滑コンデン
サーの役割とともに、過渡応答を改善するバイパスコン
デンサーの役割を果たしている。本実施例においては、
弁２の開いている期間τ1 を過渡状態の持続時間より十
分に長くなるように設定しているので、弁２の開いてい
る期間内に、容器１内の気体の状態は、数１または数２
で示される状態に達する。従って、弁の切り替わった直
後に過渡状態の期間が存在しても、容器１によって汲み
だされる気体の質量は影響を受けない。Incidentally, in practice, after the valve 2 is switched, the pressure in the container 1 reaches a steady state through a transient state. Therefore, the pressure waveform in the container 1, unlike the rectangular waveform shown in FIG. 2 when viewed in detail, as shown in FIG. 3, P 1 or after the transient response waveform appeared immediately after switching of the valve a waveform to converge to P 2. Generally, the gas in the pipeline has inertance and cannot flow into or out of the container 1 at the moment when the valve is opened. If the inertance of the pipeline is large, the duration of the transient is long, and it takes a long time for the transient response to converge. In this embodiment, the pressure reservoirs 5 and 6 are installed, and the connection between the pressure reservoir and the container 1 is short-circuited, so that the inertance of the pipeline between the pressure reservoir and the container 1 is reduced, and the duration of the transient state is reduced. I try to be shorter. That is, the pressure reservoirs 5 and 6 of this embodiment
Plays a role of a smoothing capacitor for averaging intermittent flow as described above and a role of a bypass capacitor for improving transient response. In this embodiment,
Since the period τ 1 during which the valve 2 is open is set to be sufficiently longer than the duration of the transient state, the state of the gas in the container 1 during the period during which the valve 2 is open becomes Number 2
The state indicated by is reached. Therefore, even if there is a transient period immediately after the switching of the valve, the mass of gas pumped by the container 1 is not affected.
【００１３】（第二実施例）図４は、気体の微小流量測
定に応用した本発明の第二実施例である。図４におい
て、１は容積Ｖ0 の容器である。１１は、高圧側管路３
と容器１を間欠的に接続する弁、１２は、低圧側管路４
と容器１を間欠的に接続する弁である。５は、高圧側管
路３に取り付けられた容積Ｖ1 の圧力溜、６は、高圧側
管路４に取り付けられた容積Ｖ2 の圧力溜である. 圧力
溜５および６の中の気体の圧力はそれぞれＰ1 およびＰ
2 、また温度はそれぞれＴ1 およびＴ2 である。１３
は、容器１内の気体の温度を測定する温度計、１４は、
容器１内の圧力を検出している圧力計である。１５は、
信号処理装置で、高圧側の弁１１および低圧側の弁１２
に制御信号を出力するとともに、温度計１３および圧力
計１４からの信号を受けて、流量を計算して、指示計器
１６に出力している。(Second Embodiment) FIG. 4 shows a second embodiment of the present invention applied to measurement of a minute flow rate of gas. 4, 1 is a container volume V 0. 11 is a high pressure side line 3
A valve for intermittently connecting the container and the container 1, 12 is a low-pressure side line 4.
And a valve for connecting the container 1 intermittently. 5, the pressure reservoir volume V 1 which is mounted on the high pressure side conduit 3, 6 is a pressure reservoir volume V 2 which is mounted on the high pressure side conduit 4. Of gas in the pressure reservoir 5 and 6 Pressure is P 1 and P respectively
2 and the temperatures are T 1 and T 2 respectively. 13
Is a thermometer that measures the temperature of the gas in the container 1, and 14 is
This is a pressure gauge that detects the pressure in the container 1. 15 is
In the signal processing device, a high pressure side valve 11 and a low pressure side valve 12
In addition to receiving a control signal from the thermometer 13 and the pressure gauge 14, it calculates a flow rate and outputs it to the indicating instrument 16.
【００１４】信号処理装置１５から弁１１および１２に
加えられる制御信号ＶＣ11およびＶＣ12は、図５に示す
ような信号である。このような弁制御により、容器１は
高圧側管路３と低圧側管路４に交互に接続されるので、
圧力計１４の出力は、図５のように、Ｐ1 とＰ2 の間を
交番する周期τの矩形波信号となる。また、本実施例で
は、圧力溜中の気体の温度が室温に平衡していない場合
を想定しており、この場合、温度計１３の出力も、高圧
側の温度Ｔ1 と低圧側の温度Ｔ2 の間を交番する周期τ
の矩形波信号となる。容器１が高圧側管路３と接続され
ている期間の、容器１内の気体の状態方程式は、容器内
の気体の質量をＭ1 として[0014] The signal processing apparatus control signal VC 11 and VC 12 15 applied to the valve 11 and 12 is a signal as shown in FIG. By such valve control, the container 1 is alternately connected to the high-pressure side line 3 and the low-pressure side line 4,
The output of the pressure gauge 14 is a rectangular wave signal having a period τ alternating between P 1 and P 2 as shown in FIG. Further, in the present embodiment assumes the case where the temperature of the gas in the pressure reservoir is not in equilibrium to room temperature, in this case, the output of the thermometer 13 also, the temperature T of the temperature T 1 of the low-pressure side of the high-pressure side Period τ alternating between 2
Of the square wave signal. The equation of state of the gas in the container 1 during the period in which the container 1 is connected to the high-pressure-side pipe 3 is as follows, with the mass of the gas in the container being M 1.
【００１５】[0015]
【数３】 (Equation 3)
【００１６】である。一方、容器１が低圧側管路４と接
続されている期間の、容器１内の気体の状態方程式は、
容器内の気体の質量をＭ2 として## EQU1 ## On the other hand, the equation of state of the gas in the container 1 during the period in which the container 1 is connected to the low-pressure side pipeline 4 is as follows:
Let the mass of the gas in the container be M 2
【００１７】[0017]
【数４】 (Equation 4)
【００１８】である。高圧側管路３と接続された期間に
は容器１内へ気体が流入し、容器１が低圧側管路４に接
続された期間には気体は低圧管路側へ流出する。その量
は、弁開閉の一周期τごとに（Ｍ1 −Ｍ2 ）であり、単
位時間当たりの平均質量流量Ｑはｆ（Ｍ1 −Ｍ2 ）であ
る。（Ｍ1 −Ｍ2 ）は、数３および数４より## EQU1 ## The gas flows into the container 1 during the period when the container 1 is connected to the high-pressure line 3, and flows out toward the low-pressure line when the container 1 is connected to the low-pressure line 4. The amount is (M 1 -M 2 ) for each cycle τ of valve opening and closing, and the average mass flow rate Q per unit time is f (M 1 -M 2 ). (M 1 −M 2 ) is obtained from Equations 3 and 4.
【００１９】[0019]
【数５】 (Equation 5)
【００２０】となる。今、弁開閉周波数ｆと数５のｍ、
Ｒ、Ｖ0 は既知であるから、質量流量Ｑは、圧力計１４
および温度計１３の出力から計算することが出来る。な
お、本実施例においても、実際には、弁が切替わった
後、容器１内の気体の状態は、過渡状態を経て定常状態
に達する。本実施例では、管路に圧力溜５および６を設
置して過渡応答の持続時間を短くした上で、容器１が高
圧側管路３または低圧側管路４に接続されている期間τ
1 が、過渡応答の持続時間より十分に長くなるように制
御信号を設定している。## EQU1 ## Now, the valve opening / closing frequency f and the number 5 m,
Since R and V 0 are known, the mass flow rate Q
And the output of the thermometer 13. In addition, also in this embodiment, actually, after the valve is switched, the state of the gas in the container 1 reaches a steady state through a transient state. In this embodiment, the pressure reservoirs 5 and 6 are installed in the pipeline to shorten the duration of the transient response, and the period τ when the container 1 is connected to the high-pressure pipeline 3 or the low-pressure pipeline 4 is set.
1 sets the control signal to be sufficiently longer than the duration of the transient response.
【００２１】本実施例では、容器１に圧力計１４および
温度計１３を取り付けて、容器１内の圧力および温度を
測定しているが、高圧側管路３または低圧側管路４に接
続されている期間の容器１内の圧力および温度を測定す
ることが目的であるから、圧力計および温度計は二つの
圧力溜に取り付けてあっても構わない。この場合、容器
１に取り付ける場合の倍の数の圧力計と温度計が必要で
あるが、逆に、圧力計および温度計に要求される応答速
度の点では、容器１に取り付ける場合よりもずっと遅い
物でよい。また、本実施例では、高圧側管路３と容器１
を断続するための高圧側の弁１１と、低圧側管路４と容
器１を断続するための低圧側の弁１２の二つの弁を用い
ているが、三つのポートを持った一つの弁を用いて、容
器１を高圧側管路と低圧側管路に交互に接続しても構わ
ないことは言うまでもない。In this embodiment, a pressure gauge 14 and a thermometer 13 are attached to the vessel 1 to measure the pressure and temperature in the vessel 1. However, the pressure gauge 14 and the thermometer 13 are connected to the high-pressure pipe 3 or the low-pressure pipe 4. Since the purpose is to measure the pressure and temperature in the container 1 during a certain period, the pressure gauge and the thermometer may be attached to two pressure reservoirs. In this case, twice as many pressure gauges and thermometers as required when mounted on the vessel 1 are required, but conversely, the response speed required for the pressure gauge and the thermometer is much higher than when mounted on the vessel 1. A slow one is fine. In the present embodiment, the high-pressure side pipe 3 and the container 1
And a low-pressure side valve 12 for connecting and disconnecting the low-pressure side line 4 and the container 1 are used, but one valve having three ports is used. It goes without saying that the container 1 may be connected to the high-pressure side line and the low-pressure side line alternately.
【００２２】第一実施例および第二実施例において、容
器１について見ると気体は間欠的に流入・流出している
が、管路中に設置された圧力溜の働きにより、高圧側圧
力溜５に流入する流れ、および低圧側圧力溜から流出す
る流れは、ともに定常流となる。従って、管路の流量調
節や流量測定に本発明の流体素子を用いることによっ
て、管路の流れに非定常成分が発生するということは無
い。管路中の流れが間欠的となっても支障がなく、ま
た、圧力溜がなくても、過渡応答の持続時間が弁の接続
時間τ1 に比べて十分に小さい場合には、圧力溜５また
は６は必ずしも設置する必要はない。In the first embodiment and the second embodiment, the gas is intermittently flowing in and out of the container 1, but the high pressure side pressure reservoir 5 is operated by the pressure reservoir installed in the pipeline. The flow flowing into the tank and the flow flowing out of the low pressure side pressure reservoir are both steady flows. Therefore, by using the fluid element of the present invention for flow rate adjustment and flow rate measurement of a pipeline, an unsteady component does not occur in the flow of the pipeline. If there is no problem even if the flow in the pipeline becomes intermittent, and if the duration of the transient response is sufficiently smaller than the valve connection time τ 1 without the pressure reservoir, the pressure reservoir 5 Or 6 need not necessarily be installed.
【００２３】[0023]
【発明の効果】本発明の流体素子は、間欠的に開閉する
弁を用いて容器を高圧側管路と低圧側管路に交互に接続
し、容器によって流体を高圧側から低圧側に汲みだす構
造を有している。流量の調節は、弁の開閉周波数を変え
ることで行い、従来の調節弁と異なって、バルブプラグ
等の位置を精密に制御する必要が無い。このため、流量
調節装置の構造は従来に比べて格段に単純化され、小型
化、低価格化が可能になる。微小な流量の制御に適用す
る場合は、弁は小さな差圧の下で単純な開閉動作をする
だけなので、シリコン微細加工技術を用いて作製された
ような非常に小型の弁でも使用できる。構造が単純で、
小型、低価格の流量調節装置を実現できることが本発明
の固有の効果である。According to the fluid element of the present invention, the container is alternately connected to the high-pressure side line and the low-pressure side line by using a valve that opens and closes intermittently, and the fluid is pumped from the high-pressure side to the low-pressure side by the container. It has a structure. The flow rate is adjusted by changing the opening / closing frequency of the valve, and unlike the conventional control valve, there is no need to precisely control the position of a valve plug or the like. For this reason, the structure of the flow control device is significantly simplified as compared with the conventional one, and it is possible to reduce the size and cost. When applied to control of a minute flow rate, the valve simply performs an opening and closing operation under a small differential pressure, so that a very small valve such as one manufactured using silicon micromachining technology can be used. The structure is simple,
It is an inherent effect of the present invention that a small, low-cost flow control device can be realized.
【００２４】また、本発明の流体素子を流量の測定に適
用した場合には、通常の流量計の測定範囲の下限以下の
微小な流量を、簡便かつ高精度に測定することができ
る。構造が単純で、低価格な微小流量測定装置を実現で
きることも、本発明の効果である。When the fluid element of the present invention is applied to the measurement of a flow rate, a minute flow rate equal to or less than the lower limit of the measurement range of an ordinary flow meter can be measured simply and accurately. It is also an advantage of the present invention that a low-cost minute flow rate measuring device having a simple structure can be realized.
【図１】本発明の第一実施例である。FIG. 1 is a first embodiment of the present invention.
【図２】第一実施例における信号の波形図である。FIG. 2 is a waveform diagram of a signal in the first embodiment.
【図３】圧力波形の詳細図である。FIG. 3 is a detailed view of a pressure waveform.
【図４】本発明の第二実施例である。FIG. 4 is a second embodiment of the present invention.
【図５】第二実施例における信号の波形図である。FIG. 5 is a waveform diagram of a signal in the second embodiment.
１ 容器 ２ 弁 ３ 高圧側管路 ４ 低圧側管路 ５、６ 圧力溜 ７ 制御回路 １１、１２ 弁 １３ 温度計 １４ 圧力計 １５ 信号処理装置 １６ 指示計器 DESCRIPTION OF SYMBOLS 1 Container 2 Valve 3 High-pressure side line 4 Low-pressure side line 5, 6 Pressure reservoir 7 Control circuit 11, 12 Valve 13 Thermometer 14 Pressure gauge 15 Signal processing device 16 Indicator
Claims (1)
（３）と低圧側管路（４）に交互に間欠的に接続する弁
（２）とを有し、前記弁の間欠開閉周波数に比例する平
均流量の流体を、前記容器を介して高圧側管路から低圧
側管路へ流すことを特徴とする容器切替式流体素子。1. A container (1) and a valve (2) for intermittently connecting the container to a high-pressure line (3) and a low-pressure line (4) intermittently. A container switching type fluid element, wherein a fluid having an average flow rate proportional to an opening / closing frequency is caused to flow from a high pressure side pipe to a low pressure side pipe through the container.
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP28342896A JPH10110846A (en) | 1996-10-03 | 1996-10-03 | Vessel switching type fluid element |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP28342896A JPH10110846A (en) | 1996-10-03 | 1996-10-03 | Vessel switching type fluid element |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| JPH10110846A true JPH10110846A (en) | 1998-04-28 |
Family
ID=17665412
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP28342896A Pending JPH10110846A (en) | 1996-10-03 | 1996-10-03 | Vessel switching type fluid element |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPH10110846A (en) |
Cited By (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| WO2020009110A1 (en) * | 2018-07-03 | 2020-01-09 | 住友重機械工業株式会社 | Compressor for ultra-low-temperature freezer |
-
1996
- 1996-10-03 JP JP28342896A patent/JPH10110846A/en active Pending
Cited By (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| WO2020009110A1 (en) * | 2018-07-03 | 2020-01-09 | 住友重機械工業株式会社 | Compressor for ultra-low-temperature freezer |
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