JPH10101352A - Production of quartz glass tube and device for the production - Google Patents
Production of quartz glass tube and device for the productionInfo
- Publication number
- JPH10101352A JPH10101352A JP27748496A JP27748496A JPH10101352A JP H10101352 A JPH10101352 A JP H10101352A JP 27748496 A JP27748496 A JP 27748496A JP 27748496 A JP27748496 A JP 27748496A JP H10101352 A JPH10101352 A JP H10101352A
- Authority
- JP
- Japan
- Prior art keywords
- outer diameter
- quartz glass
- glass tube
- internal pressure
- setting jig
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Granted
Links
Classifications
-
- C—CHEMISTRY; METALLURGY
- C03—GLASS; MINERAL OR SLAG WOOL
- C03B—MANUFACTURE, SHAPING, OR SUPPLEMENTARY PROCESSES
- C03B23/00—Re-forming shaped glass
- C03B23/04—Re-forming tubes or rods
- C03B23/07—Re-forming tubes or rods by blowing, e.g. for making electric bulbs
Landscapes
- Chemical & Material Sciences (AREA)
- Engineering & Computer Science (AREA)
- Materials Engineering (AREA)
- Organic Chemistry (AREA)
- Re-Forming, After-Treatment, Cutting And Transporting Of Glass Products (AREA)
- Glass Melting And Manufacturing (AREA)
Abstract
Description
【０００１】[0001]
【発明の属する技術分野】本発明は、石英ガラス製中空
管を使用して半導体製造装置の炉心管等の半導体治具部
材や光ファイバー用石英ガラス管等に使用される中空石
英ガラス管の製造方法とその装置に関する。BACKGROUND OF THE INVENTION 1. Field of the Invention The present invention relates to a method for manufacturing a hollow quartz glass tube used for a semiconductor jig member such as a furnace tube of a semiconductor manufacturing apparatus or a quartz glass tube for an optical fiber using a quartz glass hollow tube. A method and apparatus.
【０００２】[0002]
【従来の技術】従来より、中空石英ガラス管の製造方法
は、石英ガラス製厚肉シリンダを使用して、その一端を
封止した状態で内部に内圧用の窒素等の圧縮ガスを導入
した状態で所定引抜き径を持つダイスに導入し、前記内
圧を加圧して、ダイス内で前記シリンダを膨らませなが
ら前記ダイス径により外径を規制しつつ引き出し、所定
外径を持つ薄肉筒状部材である石英ガラス管を得るよう
にしている。2. Description of the Related Art Conventionally, a method of manufacturing a hollow quartz glass tube has been described in which a thick gas cylinder made of quartz glass is used, and a compressed gas such as nitrogen for internal pressure is introduced into the inside thereof with one end thereof sealed. Introduced to a die having a predetermined drawing diameter, pressurizing the internal pressure, pulling out while regulating the outer diameter by the die diameter while expanding the cylinder in the die, quartz which is a thin cylindrical member having a predetermined outer diameter I try to get a glass tube.
【０００３】かかる装置を図８に基づいて例示的に説明
するに、図において、炉体１０２に石英ガラス製シリン
ダ１００を加熱軟化させる筒状発熱体１０３を配置する
とともにその出口側にダイス支持部１０４を設け、該ダ
イス支持部１０４内周に回転自在に嵌挿され、所定内径
を持つダイス本体１０５を取り付ける。そして上記ダイ
ス本体１０５内径より小さい外径を持つ前記石英ガラス
製シリンダ１００を先端を封止した状態でダイス本体に
挿入しつつ矢印１０６方向に回転させながら窒素または
空気等を矢印Ｐ方向にシリンダ１００内に導入して内圧
を発生させ、前記ダイス本体１０５内でシリンダ内径を
膨らませながら矢印１０７方向に回転引き出すことによ
り、ダイス本体１０５により外径規制された所定外径Ｄ
１を持つ石英ガラス管を形成することが出来る。（実用
新案登録第２５０２８６８号）An example of such an apparatus will be described with reference to FIG. 8. Referring to FIG. 8, a cylindrical heating element 103 for heating and softening a quartz glass cylinder 100 is disposed in a furnace body 102, and a die supporting portion is provided at an outlet side thereof. A die body 105 having a predetermined inner diameter is rotatably inserted into the inner periphery of the die supporting portion 104 and has a predetermined inner diameter. The quartz glass cylinder 100 having an outer diameter smaller than the inner diameter of the die body 105 is inserted into the die body with the tip sealed, and rotated in the direction of arrow 106 while nitrogen or air or the like is moved in the direction of arrow P in the cylinder 100. The inside diameter of the cylinder is increased by expanding the cylinder inside the die body 105 in the direction indicated by the arrow 107, thereby generating an internal pressure.
1 can be formed. (Utility model registration No. 2502868)
【０００４】[0004]
【発明が解決しようとする課題】かかる装置において
は、下記問題点を内蔵している。即ち、 １）ダイス本体１０５内で、加熱軟化した石英ガラス製
シリンダ１００を内圧Ｐにより膨らませ、ダイス径によ
り外径規制をするため、内圧の選択により外径精度はあ
る程度確保できるが、前記短幅のダイス本体内で膨出さ
せて外径規制する為に、図７（Ｂ）に示すように規制時
点の肉厚の変動が大きく、幅方向に肉厚に波を打つ場合
がある。 ２）上記問題に対しダイス幅を長くすることも考えられ
るが、ダイスとシリンダ外周との摺動抵抗が増大し引抜
きがうまく行かないのみならず、加熱炉も必然的に長く
なる問題があり、コスト高の原因を形成する。 ３）又、加熱炉の温度は２０００℃以上である為に、ダ
イス幅を長くするグラファイト製のダイス本体は脆く破
損され易く、又ダイス本体を支持するダイス支持部１０
４もこれに対応して必然的に長くなり、特にダイス支持
部は金属（Ｃｕ）で形成され内部に冷却媒体が還流可能
な冷却手段が付加されているために、これを加熱炉内部
まで延在させる事は中々困難であるのみならず構造も複
雑化する。 ４）前記ダイス本体は、上記製作する石英ガラス管の外
径のそれぞれに対応して準備するとともに、その都度交
換する必要があり、取り換えに伴う冷却時間等による休
転時間の増大延いては稼動率低下の問題がある。Such an apparatus has the following problems. 1) In the die body 105, the heated and softened quartz glass cylinder 100 is inflated by the internal pressure P, and the outer diameter is regulated by the die diameter. In order to regulate the outer diameter by swelling in the die main body, the thickness at the time of regulation is largely varied as shown in FIG. 2) In order to solve the above problem, it is conceivable to increase the die width. However, there is a problem that the sliding resistance between the die and the outer periphery of the cylinder is increased so that the drawing is not performed well and the heating furnace is inevitably lengthened. Form the cause of high costs. 3) Since the temperature of the heating furnace is 2000 ° C. or higher, the graphite die body for increasing the die width is fragile and easily broken, and the die supporting portion 10 for supporting the die body.
4 is inevitably elongated, and in particular, since the die support portion is made of metal (Cu) and a cooling means capable of circulating a cooling medium is added inside, the die support portion is extended to the inside of the heating furnace. It is not only difficult to place them, but also the structure becomes complicated. 4) The die body needs to be prepared corresponding to each of the outer diameters of the quartz glass tube to be manufactured, and needs to be replaced each time. There is a problem of rate reduction.
【０００５】本発明は、上記問題点に鑑みなされたもの
で、即ち、外径精度並びに肉厚バラツキを最小に押さえ
ることができ、また、製造する石英ガラス管の外径の変
更の都度交換する必要のない外径設定治具を備えた石英
ガラス管の製造装置を提供するようにしたものである。The present invention has been made in view of the above-mentioned problems, that is, it is possible to minimize the outer diameter accuracy and thickness variation, and to replace the outer diameter every time the outer diameter of a quartz glass tube to be manufactured is changed. An object of the present invention is to provide an apparatus for manufacturing a quartz glass tube having an unnecessary outer diameter setting jig.
【０００６】また、請求項２記載の発明は、前記発明の
目的に加え、外径規制につき、製造する石英ガラス管の
外径変更に随意対応できるようにした、外径制御による
均一肉厚を持つ石英ガラス管の製造装置の提供を目的と
したものである。Further, in addition to the object of the present invention, the invention according to claim 2 has a uniform wall thickness by controlling the outer diameter so that the outer diameter can be arbitrarily changed with respect to the outer diameter regulation. The purpose is to provide an apparatus for manufacturing a quartz glass tube.
【０００７】また、請求項３記載の発明は、現場作業員
による手動操作を改めて外径規制とともに、内圧制御の
自動化を図った石英ガラス管の製造装置の提供を目的と
したものである。Another object of the present invention is to provide an apparatus for manufacturing a quartz glass tube in which manual operation performed by a field worker is newly controlled and the internal pressure control is automated.
【０００８】また、請求項４及び請求項５記載の発明
は、更に精度のよい石英ガラス管の外径と肉厚制御を可
能とする石英ガラス管御の製造装置の提供を目的とした
ものである。Another object of the present invention is to provide a quartz glass tube manufacturing apparatus capable of controlling the outer diameter and thickness of the quartz glass tube with higher accuracy. is there.
【０００９】また、請求項６記載の発明は、更に精度の
よい石英ガラス管の外径と均一肉厚を有する石英ガラス
管の製造方法の提供を目的としたものである。Another object of the present invention is to provide a method for manufacturing a quartz glass tube having a more accurate outer diameter and a uniform thickness of the quartz glass tube.
【００１０】[0010]
【課題を解決するための手段】かかる課題を解決するた
めに、請求項１記載の発明は、先端を封止してチューブ
状に形成させた石英ガラス製中空管を加熱軟化させる加
熱手段と、前記中空管内部に内圧用ガスを導入するとと
もに加熱軟化させた中空管を膨出させる内圧生成手段
と、前記膨出させた加熱軟化状態にある中空管（以下石
英ガラス管という）外周面に接触させ外径規制させる外
径設定治具とを備え、前記石英ガラス管を加熱手段内で
軸方向に移動させつつ所定外径の石英ガラス管を製造す
る装置において、前記外径設定治具との接触手前位置
で、外径設定治具通過後の石英ガラス管外径Ｄ１を僅か
上回る石英ガラス管外径Ｄ２を持つ膨張部を形成するよ
うに外径規制若しくは内圧制御可能に構成したことを特
徴とするものである。In order to solve the above-mentioned problems, the invention according to claim 1 comprises a heating means for heating and softening a quartz glass hollow tube whose end is sealed and formed into a tube shape. An internal pressure generating means for introducing a gas for internal pressure into the hollow tube and expanding the heat-softened hollow tube, and a hollow tube in the heated and softened state (hereinafter referred to as a quartz glass tube) An outer diameter setting jig for contacting the outer peripheral surface to control the outer diameter, wherein the outer diameter setting jig is provided in an apparatus for manufacturing a quartz glass tube having a predetermined outer diameter while moving the quartz glass tube in an axial direction in a heating means. At the position just before the contact with the jig, the outer diameter can be regulated or the inner pressure can be controlled so as to form an expansion portion having a quartz glass tube outer diameter D2 slightly larger than the quartz glass tube outer diameter D1 after passing through the outer diameter setting jig. It is characterized by having done.
【００１１】上記内圧操作は炉内部での膨張部の膨らみ
状況の目視観測結果に基づき、手動バルブ操作により行
ってもよく、又レーザ外径測定器よりの測定結果に基づ
いて電磁弁等によるバルブ操作により行ってもよい。The internal pressure operation may be performed by manual valve operation based on the result of visual observation of the state of expansion of the expansion section inside the furnace, or may be performed by a valve such as an electromagnetic valve based on the measurement result from a laser outer diameter measuring device. Operation may be performed.
【００１２】この場合請求項２記載のように、前記外径
設定治具の規制幅を変位可能に構成するとともに、外径
規制後の石英ガラス管外径を計測する手段を設け、該計
測手段による計測値に基づいて外径設定治具の規制幅若
しくは内圧を制御しながら所定外径の石英ガラス管を得
るようにするのがよく、より具体的には請求項３記載の
ように、前記外径規制は、非加熱領域からの遠隔測定で
得られた石英ガラス管膨張部外径と外径設定治具通過後
の石英ガラス管外径との差△Ｄを演算して、該△Ｄが適
正設定範囲に維持されるように内圧制御を行うのがよ
い。In this case, the restricting width of the outer diameter setting jig is configured to be displaceable, and means for measuring the outer diameter of the quartz glass tube after the outer diameter is restricted is provided. It is preferable to obtain a quartz glass tube having a predetermined outer diameter while controlling the regulation width or the inner pressure of the outer diameter setting jig based on the measurement value by the above. More specifically, as described in claim 3, The outer diameter control calculates the difference ΔD between the outer diameter of the expanded portion of the quartz glass tube obtained by remote measurement from the non-heating area and the outer diameter of the quartz glass tube after passing through the outer diameter setting jig, and calculates the ΔD It is preferable to perform internal pressure control so that is maintained in an appropriate setting range.
【００１３】請求項６記載の発明は、先端を封止してチ
ューブ状に形成させた石英ガラス製中空管を加熱炉で加
熱軟化させ、該中空管内部に内圧用ガスを導入するとと
もに、外径設定治具を前記加熱軟化状態にある石英ガラ
ス管外周面に接触させ、外径規制させた状態で、前記石
英ガラス管を軸方向に移動させつつ所定外径の石英ガラ
ス管を製造する方法において、上記石英ガラス管の加熱
軟化領域を内圧操作により、外径設定治具接触手前位置
で、外径設定治具通過後の石英ガラス管外径Ｄ１を僅か
上回る石英ガラス管外径Ｄ２を持つ膨張部を形成させ、
該膨張部を外径設定治具に侵入させながら前記石英ガラ
ス管の外径規制を行うとともに、前記外径規制は、非加
熱領域からの遠隔測定で得られた石英ガラス管膨張部外
径と外径設定治具通過後の石英ガラス管外径との差△Ｄ
を演算して、該△Ｄが適正設定範囲に維持されるように
内圧制御を行うことを特徴とする石英ガラス管の製造方
法にある。この場合、具体的な数値としては、前記膨張
量△Ｄ＝［（Ｄ２−Ｄ１）／２］の適正設定範囲が、略
０＜△Ｄ≦１ｍｍ、好ましくは０＜△Ｄ≦０．５ｍｍで
あるのがよい。According to a sixth aspect of the present invention, a hollow tube made of quartz glass whose end is sealed and formed into a tube shape is heated and softened in a heating furnace, and an internal pressure gas is introduced into the hollow tube. An outer diameter setting jig is brought into contact with the outer peripheral surface of the quartz glass tube in the heat-softened state, and in a state where the outer diameter is regulated, the quartz glass tube is moved in the axial direction to manufacture a quartz glass tube having a predetermined outer diameter. In the method, the heating and softening region of the quartz glass tube is subjected to an internal pressure operation to a position just before the contact with the outside diameter setting jig, and the outside diameter D2 of the quartz glass tube slightly exceeding the outside diameter D1 of the quartz glass tube after passing through the outside diameter setting jig. To form an inflatable part with
While regulating the outer diameter of the quartz glass tube while allowing the expanded portion to enter the outer diameter setting jig, the outer diameter regulation is the outer diameter of the expanded portion of the quartz glass tube obtained by remote measurement from a non-heated area. Difference from outer diameter of quartz glass tube after passing through outer diameter setting jig ΔD
And controlling the internal pressure so that the ΔD is maintained in an appropriate setting range. In this case, as a specific numerical value, the appropriate setting range of the expansion amount ΔD = [(D2−D1) / 2] is approximately 0 <ΔD ≦ 1 mm, preferably 0 <ΔD ≦ 0.5 mm. There should be.
【００１４】かかる発明によれば、外径規制手前で石英
ガラス製シリンダの外径を内圧操作と加熱軟化とにより
均一な薄肉状筒体に薄肉膨張させ、爾後外径設定治具を
介して外径規制をすることにより、外径精度並びに肉厚
精度の向上を図ることが出来る。According to this invention, the outer diameter of the quartz glass cylinder is thinned and expanded into a uniform thin cylindrical body by internal pressure operation and heating softening before the outer diameter regulation, and then the outer diameter is set via the outer diameter setting jig. By regulating the diameter, it is possible to improve the outer diameter accuracy and the wall thickness accuracy.
【００１５】なお、前記外径設定治具は加熱炉出口側の
加熱温度分布立ち下がり部に位置し、該外径設定治具に
よる外径規制後石英ガラス管を加熱させないようにする
のがよい。そして更に具体的には請求項５記載のよう
に、前記外径設定治具は、中空管状母材を挟んで母材半
径方向に変位可能な一対の平行規制板により構成され、
前記外径設定治具により外径規制後の母材外径が所定外
径Ｄ１に近付くように前記一対の平行規制板の規制幅を
制御可能に構成するのがよい。The outer diameter setting jig is located at the falling part of the heating temperature distribution on the heating furnace outlet side, and it is preferable that the outer diameter setting jig does not heat the quartz glass tube after the outer diameter is restricted by the outer diameter setting jig. . And more specifically, as set forth in claim 5, the outer diameter setting jig is constituted by a pair of parallel regulating plates capable of being displaced in the base material radial direction with the hollow tubular base material interposed therebetween,
It is preferable that the control width of the pair of parallel control plates is controllable by the outer diameter setting jig so that the outer diameter of the base material after the outer diameter control approaches the predetermined outer diameter D1.
【００１６】かかる構成によれば、従来のリング状ダイ
スによる外径規制では、被外径規制石英ガラス管を回転
状態で挟持する板状部材による回転狭窄機能を使用した
ため、石英ガラス管の外径寸法の変更に対しても板状部
材の間隔を制御するだけで問題なく処理できる。また、
高温石英ガラス管に接するグラファイト製板状部材の冷
却も簡単にできる効果を持つ。According to such a configuration, in the conventional outer diameter regulation by the ring-shaped die, the rotation constriction function by the plate-like member that sandwiches the outer diameter regulated quartz glass tube in a rotating state is used. Even if the dimensions are changed, it can be processed without any problem simply by controlling the interval between the plate members. Also,
This has the effect that cooling of the graphite plate-like member in contact with the high-temperature quartz glass tube can be simplified.
【００１７】[0017]
【発明の実施の形態】以下、本発明の実施例の形態を、
図示例と共に説明する。ただし、この実施例に記載され
ている構成部品の寸法、形状、その相対的位置等は特に
特定的な記載がないかぎりは、この発明の範囲をそれに
限定する趣旨ではなく、単なる説明例にすぎない。図１
は本発明の基本構成に係る石英ガラス管の製造装置で、
１０は厚肉の石英ガラス製シリンダで、先端を丸封させ
るとともに、他端の開口部を窒素導入治具１６で封止
し、内圧調整バルブ１８を介して石英ガラス製シリンダ
１０内に内圧が導入可能に構成されている。又、丸封さ
れた石英ガラス製シリンダ１０の軸側には、中心軸に沿
ってダミーロッド２３が延設されており、該ダミーロッ
ド２３の自由端側と石英ガラス製シリンダ１０の基端側
にはそれぞれ移動回転治具２２Ａ及び２２Ｂが回転自在
に支持されており、該移動回転治具２２Ａ、２２Ｂによ
り石英ガラス製シリンダ１０を回転させながら加熱炉内
に沿って中心軸上を移動可能に構成されている。DESCRIPTION OF THE PREFERRED EMBODIMENTS Hereinafter, embodiments of the present invention will be described.
This will be described together with the illustrated example. However, unless otherwise specified, the dimensions, shapes, relative positions, and the like of the components described in this embodiment are not intended to limit the scope of the present invention, but are merely illustrative examples. Absent. FIG.
Is an apparatus for manufacturing a quartz glass tube according to the basic configuration of the present invention,
Reference numeral 10 denotes a thick quartz glass cylinder whose tip is round-sealed, the opening at the other end is sealed with a nitrogen introduction jig 16, and the internal pressure is reduced into the quartz glass cylinder 10 via an internal pressure adjusting valve 18. It is configured to be installable. A dummy rod 23 extends along the central axis on the shaft side of the sealed quartz glass cylinder 10, and the free end side of the dummy rod 23 and the base end side of the quartz glass cylinder 10. Are rotatably supported by moving rotary jigs 22A and 22B, respectively, so that the movable rotary jigs 22A and 22B can move on the central axis along the heating furnace while rotating the quartz glass cylinder 10. It is configured.
【００１８】前記基端側に設けた内圧導入部（窒素導入
治具１６及び内圧調整バルブ１８）を介しての内圧操作
Ｐと並行する前記石英ガラス製シリンダを加熱軟化膨張
させる加熱炉１３は、周囲に断熱材１３ａが巻き回され
た円筒状の電気炉で構成されているとともに、該加熱炉
１３の外側に基部を持ちダミーロッド２３側よりシリン
ダ１０の軸線と平行に一対のホルダ１４ａが加熱炉１３
内側末端付近に向け延設され、その延設端である自由端
側にグラファイト製平行規制板１４ｂが石英ガラス管に
対面する位置に配設されている。即ち、外径設定治具１
４は一対のホルダ１４ａと一対の平行規制板１４ｂとか
らなる。前記ホルダ１４ａは銅部材で内部に冷媒が還流
可能に構成され、平行規制板１４ｂを裏面側より冷却さ
せるとともに、石英ガラス管１２のラジアル方向の矢印
Ａに沿い手動操作にて互いに反対方向に変位可能に構成
する。平行規制板１４ｂは、加熱軟化により膨張した石
英ガラス管１２を狭持するようにして石英ガラス管１２
の回転と相俟ってその挟圧力により外径規制を可能に
し、且つ石英ガラス管１２の長軸方向に平行に配設され
た一対のグラファイト製平行規制板１４ｂにより構成さ
れている。The heating furnace 13 for heating and softening and expanding the quartz glass cylinder in parallel with the internal pressure operation P via an internal pressure introducing portion (a nitrogen introducing jig 16 and an internal pressure adjusting valve 18) provided on the base end side includes: It is constituted by a cylindrical electric furnace around which a heat insulating material 13a is wound, and has a base outside the heating furnace 13 and heats a pair of holders 14a from the dummy rod 23 side in parallel with the axis of the cylinder 10. Furnace 13
A graphite parallel regulating plate 14b is provided on the free end side, which is an extended end, near the inner end, at a position facing the quartz glass tube. That is, the outer diameter setting jig 1
4 comprises a pair of holders 14a and a pair of parallel regulating plates 14b. The holder 14a is formed of a copper member so that the refrigerant can be recirculated therein, cools the parallel regulating plate 14b from the back side, and is displaced in the opposite directions by manual operation along the radial arrow A of the quartz glass tube 12. Configure as possible. The parallel regulating plate 14b holds the quartz glass tube 12 so as to sandwich the quartz glass tube 12 expanded by heating and softening.
In combination with the rotation of the quartz glass tube 12, the outer diameter can be regulated by the clamping pressure, and the quartz glass tube 12 is constituted by a pair of graphite parallel regulating plates 14b arranged in parallel with the longitudinal direction.
【００１９】かかる構成によれば、加熱炉１３内に設け
た外径規制用の平行規制板１４ｂの間隔を所定外径Ｄ１
に設定した後、石英ガラス製シリンダ１０を回転させな
がら加熱炉１３に挿入させて加熱軟化させ、窒素導入治
具１６及びバルブ１８を介してシリンダ１０内に内圧Ｐ
を加圧する。そして略２３００℃の加熱温度で加熱軟化
させた石英ガラス製シリンダ１０が平行規制板１４ｂに
接触する手前で、所定外径Ｄ１を僅かに上回る石英ガラ
ス管１２の外径Ｄ２を持つ膨張部１１を形成させ、該膨
張部１１を前記平行規制板１４ｂにより押圧させながら
外径規制をして、図７（Ａ）に示すように所定外径Ｄ１
の均一肉厚を持つ石英ガラス管１２を得ることが出来
る。According to this configuration, the distance between the parallel regulating plates 14b for regulating the outer diameter provided in the heating furnace 13 is set to the predetermined outer diameter D1.
After the quartz glass cylinder 10 is rotated, it is inserted into the heating furnace 13 while rotating to heat and soften, and the internal pressure P is introduced into the cylinder 10 via the nitrogen introducing jig 16 and the valve 18.
Press. Before the quartz glass cylinder 10 heated and softened at a heating temperature of about 2300 ° C. comes into contact with the parallel regulating plate 14b, the expanding portion 11 having the outer diameter D2 of the quartz glass tube 12 slightly exceeding the predetermined outer diameter D1 is removed. The outer diameter is regulated while the expanding portion 11 is pressed by the parallel regulating plate 14b, and a predetermined outer diameter D1 is formed as shown in FIG.
The quartz glass tube 12 having a uniform thickness can be obtained.
【００２０】上記内圧操作は、本実施例では内圧を内圧
調整バルブ１８により手動操作して所定外径Ｄ１より微
小膨張した膨張部１１の外径Ｄ２を前記外径設定治具１
４により押圧させるようにしてある。そして前記膨張部
位１１における微小膨張分である△Ｄ（＝［Ｄ２−Ｄ
１］／２）が大きくなった場合は平行規制板１４ｂはホ
ルダ１４ａの自由端側に配設されているために、該平行
規制板１４ｂはその際広がり現象を起こし高精度の外径
規制ができない。従って上記△Ｄの適切な値の適正設定
範囲は、０＜△Ｄ≦０．５〜１ｍｍ程度が好ましく、よ
り好ましくは０＜△Ｄ≦０．５ｍｍがよく、この範囲内
においては外径、肉厚が安定した石英ガラス管１２の製
造が可能である。つまり、△Ｄが上記適正設定範囲内に
あるよう、内圧制御することが本発明の必須条件とな
る。又、外径設定治具１４の設定位置は、図２に示すよ
うに、加熱炉１３内の加熱温度分布が立ち下がり位置に
外径設定治具１４の平行規制板１４ｂを配置して外径規
制を行うのが良い。In the present embodiment, the internal pressure operation is performed by manually operating the internal pressure by the internal pressure adjusting valve 18 to set the outer diameter D2 of the expansion portion 11 slightly expanded from the predetermined outer diameter D1 to the outer diameter setting jig 1.
4 for pressing. ΔD (= [D2−D
When 1] / 2) becomes large, the parallel regulating plate 14b is disposed on the free end side of the holder 14a, and the parallel regulating plate 14b causes a spread phenomenon at that time, and the outer diameter is regulated with high precision. Can not. Therefore, an appropriate setting range of an appropriate value of the above ΔD is preferably about 0 <ΔD ≦ 0.5 to 1 mm, more preferably 0 <ΔD ≦ 0.5 mm. It is possible to manufacture a quartz glass tube 12 having a stable thickness. That is, it is an essential condition of the present invention to control the internal pressure so that ΔD is within the appropriate setting range. As shown in FIG. 2, the setting position of the outer diameter setting jig 14 is determined by disposing the parallel regulating plate 14b of the outer diameter setting jig 14 at a position where the heating temperature distribution in the heating furnace 13 falls. It is good to regulate.
【００２１】さて前記実施例においては、製造された石
英ガラス管１２の外径をオペレータがノギスで測定し、
所定外径から外れた場合にホルダ１４ａの間隔調整を手
動で行うために、外径測定作業と前記治具による設定作
業を頻繁に行う必要があり、また、得られた石英ガラス
管１２の外径変動も大きく歩留まり低下の原因を形成す
る。In the above embodiment, the outside diameter of the manufactured quartz glass tube 12 is measured by a caliper by an operator.
In order to manually adjust the distance between the holders 14a when the outer diameter deviates from the predetermined outer diameter, it is necessary to frequently perform an outer diameter measuring operation and a setting operation using the jig. Large diameter fluctuations also cause a decrease in yield.
【００２２】そこで、上記問題を解決する為に、図３に
示すように、石英ガラス管１２の外径測定をレーザ外径
測定器等による遠隔測定を行い、得られた石英ガラス管
１２の外径と所定外径との差をコンピュータで演算して
外径規制の精度向上を図るのがよい。図３は、前記外径
規制を自動的に行う本発明の他の実施例を示す石英ガラ
ス管の製造装置で、１９は加熱炉１３の外部出口側に配
設されたレーザ外径測定器、２１はホルダ１４ａを介し
て一対の平行規制板１４ｂを矢印Ａの幅方向に変位させ
るホルダ自動調整用モータ、２０は外径自動調整用制御
機器で、レーザ外径測定器により測定した検出信号によ
り正しい規制外径Ｄ１との偏差量△ｄに基づくホルダ自
動調整用モータ２１を駆動制御する。Therefore, in order to solve the above problem, as shown in FIG. 3, the outer diameter of the quartz glass tube 12 is measured by remote measurement using a laser outer diameter measuring device or the like. The difference between the diameter and the predetermined outer diameter is preferably calculated by a computer to improve the accuracy of the outer diameter regulation. FIG. 3 is a quartz glass tube manufacturing apparatus showing another embodiment of the present invention for automatically controlling the outer diameter, and 19 is a laser outer diameter measuring instrument arranged on the outside exit side of the heating furnace 13. Reference numeral 21 denotes a holder automatic adjustment motor for displacing the pair of parallel regulating plates 14b in the width direction of the arrow A via the holder 14a, and reference numeral 20 denotes a control device for automatically adjusting the outer diameter, which is determined by a detection signal measured by a laser outer diameter measuring device. The drive control of the holder automatic adjustment motor 21 is performed based on the deviation amount Δd from the correct regulation outer diameter D1.
【００２３】次にかかる構成の動作を図４に基づいて説
明する。 １）先ず予め、正しい規制外径Ｄ１を外径自動調整用制
御機器２０に入力して置く。 ２）次に外径自動調整用制御機器２０を介してホルダ自
動調整用モータ２１を駆動制御させ、ホルダ１４ａを介
して一対の平行規制板１４ｂの間隔を所定外径Ｄ１に設
定する。 ３）次に前記実施形態に基づく石英ガラス管１２の製造
を開始し、該ガラス管を前記間隔設定をした一対の平行
規制板１４ｂに接触安定させる。 ４）外径自動調整用制御機器２０を自動運転モードに切
り換える。 ５）レーザ外径測定器１９（走査形外径測定器による遮
断パルス数のカウント出力）で石英ガラス管１２の外径
Ｄ１を測定する。 ６）測定された外径データを外径自動調整用制御機器２
０のコンピュータに取込み設定されている所定外径Ｄ１
との偏差量（△ｄ）の値を求める。 ７）求めた前記偏差量（△ｄ）の分だけ、グラファイト
製の平行規制板１４ｂをホルダ１４ａを介して移動させ
るために、ホルダ自動調整用モータ２１に信号を送る。 ８）ホルダ自動調整用モータ２１が作動し、平行規制板
１４ｂはホルダ１４ａを介して移動する。 ９）オペレータは、炉内を監視しながら、石英ガラス管
１２を前記グラファイト製の平行規制板１４ｂに接触さ
せる。 １０）上記 ５）〜８）までの操作を繰り返し行うこと
によって、偏差量（△ｄ）の値を極力小さくすることが
可能となる。これにより、製造された石英ガラス管１２
の外径は、非常に安定したものになる。Next, the operation of the above configuration will be described with reference to FIG. 1) First, the correct regulation outer diameter D1 is input to the outer diameter automatic adjustment control device 20 in advance and stored. 2) Next, the drive of the holder automatic adjustment motor 21 is controlled via the outer diameter automatic adjustment control device 20, and the interval between the pair of parallel regulating plates 14b is set to the predetermined outer diameter D1 via the holder 14a. 3) Next, the manufacture of the quartz glass tube 12 based on the above-described embodiment is started, and the glass tube is stably contacted with the pair of parallel regulating plates 14b having the above-mentioned interval. 4) The controller 20 for automatically adjusting the outer diameter is switched to the automatic operation mode. 5) The outer diameter D1 of the quartz glass tube 12 is measured by the laser outer diameter measuring device 19 (count output of the number of cut-off pulses by the scanning outer diameter measuring device). 6) Control device 2 for automatically adjusting the measured outside diameter
0 is a predetermined outer diameter D1 set in the computer
Is determined. 7) A signal is sent to the holder automatic adjusting motor 21 in order to move the graphite parallel regulating plate 14b via the holder 14a by the calculated deviation (△ d). 8) The motor 21 for holder automatic adjustment operates, and the parallel regulating plate 14b moves via the holder 14a. 9) The operator brings the quartz glass tube 12 into contact with the graphite parallel regulating plate 14b while monitoring the inside of the furnace. 10) By repeating the above operations 5) to 8), the value of the deviation amount (量 d) can be minimized. Thereby, the manufactured quartz glass tube 12
Has a very stable outer diameter.
【００２４】図５は前記内圧操作をも自動化した他の実
施例である。該実施例による内圧自動操作は、手動によ
る内圧調整バルブ１８の代りに設けたガス導入用内圧自
動調整電磁バルブ１８ａとリリース用電磁バルブ１８ｂ
と、該バルブ群を開閉制御するガス内圧自動調整装置３
０と、該内圧自動調整装置３０に連携する画像処理装置
３２と、該画像処理装置３２に映像信号を入力する膨張
部１１の外径Ｄ２を測定する画像処理装置用ＣＣＤカメ
ラ３１、３１と、同じく前記画像処理装置３２にカウン
タ信号を入力する石英ガラス管１２の外径Ｄ１を測定す
るレーザ外径測定器１９（走査形外径測定器による遮断
パルス数のカウント数により検出）とよりなる。そして
外径規制後の加熱炉１３の出口側の石英ガラス管外径
（所定外径Ｄ１）に対するレーザ測定器１９よりのカウ
ンタ計測信号と、膨張部１１の外径Ｄ２の前記ＣＣＤカ
メラ３１による映像信号とを入力して、前記［Ｄ２とＤ
１との差△ｄを画像処理装置３２で演算し、演算した△
ｄと前記適正設定範囲（０＜△Ｄ≦０．５ｍｍ）とを内
圧自動調整装置３０で比較し、その比較結果に基づきガ
ス導入用内圧自動調整電磁バルブ１８ａとリリース用電
磁バルブ１８ｂとを制御し、内圧操作の自動制御を行う
もので、前記△ｄが常に前記適正設定範囲で変動するよ
うにして、より安定した肉厚を持つ石英ガラス管１２が
得られるようにしてある。FIG. 5 shows another embodiment in which the internal pressure operation is also automated. The automatic operation of the internal pressure according to the present embodiment is performed by a solenoid valve 18a for automatically adjusting the internal pressure for gas introduction and a solenoid valve 18b for release provided in place of the manual internal pressure adjustment valve 18.
And an automatic gas pressure adjusting device 3 for controlling the opening and closing of the valve group
0, an image processing device 32 that cooperates with the internal pressure automatic adjustment device 30, an image processing device CCD camera 31, 31 that measures the outer diameter D2 of the expansion section 11 that inputs a video signal to the image processing device 32, Similarly, a laser outer diameter measuring device 19 for measuring the outer diameter D1 of the quartz glass tube 12 for inputting a counter signal to the image processing device 32 (detected by the number of cutoff pulses by the scanning outer diameter measuring device). Then, a counter measurement signal from the laser measuring device 19 with respect to the outer diameter (predetermined outer diameter D1) of the quartz glass tube on the outlet side of the heating furnace 13 after the outer diameter regulation, and an image of the outer diameter D2 of the expansion section 11 by the CCD camera 31. And the signals [D2 and D2]
The difference △ d from 1 is calculated by the image processing device 32, and the calculated △
d and the appropriate setting range (0 <△ D ≦ 0.5 mm) are compared by the internal pressure automatic adjusting device 30, and based on the comparison result, the internal pressure automatic adjusting electromagnetic valve 18 a and the release electromagnetic valve 18 b are controlled. The automatic control of the internal pressure operation is performed so that Δd always fluctuates in the appropriate setting range, so that the quartz glass tube 12 having a more stable wall thickness can be obtained.
【００２５】次にかかる実施例の動作手順を図６に示す
ブロック図に基づいて説明する。 １）石英ガラス管１２の引き始めの部分は、オペレータ
による手動操作で行う。 ２）石英ガラス管１２の外径が所定の外径Ｄ１になり安
定したところで、自動運転に入る。 ３）まず、レーザ外径測定器１９で石英ガラス管１２の
外径Ｄ１を測定し、Ｄ１データを形成するカウンタ出力
を画像処理装置３２に入力させる。 ４）画像処理用ＣＣＤカメラ３１、３１により膨張部外
径を測定し、Ｄ２データを形成する映像信号を画像処理
装置３２に入力させる。 ５）画像処理装置３２のコンピュータで、前記入力した
Ｄ１データとＤ２データとの演算処理により△ｄを求め
る。 ６）求めた△ｄを内圧自動調整装置３０のコンピュータ
におくる。 ７）内圧自動調整装置３０のコンピュータには、予め前
記△ｄの範囲を設定しておく。設定範囲は、更に０．１
ｍｍ＜△Ｄ≦０．４ｍｍに設定してある。 ８）内圧自動調整装置３０のコンピュータは、前記△ｄ
が前記△Ｄの設定範囲に入るように、内圧→ガス導入用
内圧自動調整電磁バルブ１８ａとリリース用電磁バルブ
１８ｂとを作動させる。 ９）電磁バルブの制御方法は、△ｄが△Ｄの設定範囲の
下限値に近付いた場合、内圧自動調整電磁バルブ１８ａ
を開け、リリース用電磁バルブ１８ｂを閉じ、石英ガラ
ス製シリンダ１０に内圧をかける。一方△Ｄの上限に近
付いた場合、内圧自動調整電磁バルブ１８ａを閉じ、リ
リース用電磁バルブ１８ｂを開け、石英ガラス製シリン
ダ１０より内圧を抜く。なお、上記３）〜９）までのフ
ィードバックスピードを速くすることによって、△Ｄの
設定範囲を狭めることが可能となる。結果として、製造
された石英ガラス管１２の肉厚は非常に安定したものに
なる。Next, the operation procedure of this embodiment will be described with reference to the block diagram shown in FIG. 1) The starting portion of the quartz glass tube 12 is manually operated by an operator. 2) When the outer diameter of the quartz glass tube 12 becomes a predetermined outer diameter D1 and becomes stable, automatic operation starts. 3) First, the outer diameter D1 of the quartz glass tube 12 is measured by the laser outer diameter measuring device 19, and a counter output for forming D1 data is input to the image processing device 32. 4) The outer diameter of the expanded portion is measured by the image processing CCD cameras 31 and 31, and a video signal for forming D2 data is input to the image processing device 32. 5) The computer of the image processing device 32 obtains △ d by the arithmetic processing of the input D1 data and D2 data. 6) Send the obtained Δd to the computer of the internal pressure automatic adjusting device 30. 7) The range of △ d is set in advance in the computer of the internal pressure automatic adjusting device 30. The setting range is 0.1
mm <△ D ≦ 0.4 mm. 8) The computer of the internal pressure automatic adjusting device 30 has the above-mentioned Δd
The internal pressure → internal pressure automatic adjustment electromagnetic valve 18a and the release electromagnetic valve 18b are operated so that the pressure falls within the set range of ΔD. 9) The control method of the electromagnetic valve is such that when △ d approaches the lower limit value of the setting range of △ D, the internal pressure automatic adjustment electromagnetic valve 18a
Is opened, the release electromagnetic valve 18b is closed, and an internal pressure is applied to the quartz glass cylinder 10. On the other hand, when approaching the upper limit of ΔD, the internal pressure automatic adjustment electromagnetic valve 18 a is closed, the release electromagnetic valve 18 b is opened, and the internal pressure is released from the quartz glass cylinder 10. The setting range of ΔD can be narrowed by increasing the feedback speed of the above 3) to 9). As a result, the thickness of the manufactured quartz glass tube 12 becomes very stable.
【００２６】従って本実施例によれば、△Ｄに基づいて
内圧が自動制御されるため、製造された石英ガラス管１
２の寸法精度は顕著に向上し、特に外径規制の手前で内
圧操作及び加熱炉１３における温度操作により膨張部を
形成するようにしたため、外径精度ばかりでなく肉厚の
バラツキも最小に押 さえることができる。また、フィ
ードバック数値制御による内圧制御により、外径、肉厚
ともに精度の高い石英ガラス管１２を得ることが可能で
ある。Therefore, according to the present embodiment, since the internal pressure is automatically controlled based on ΔD, the manufactured quartz glass tube 1
The dimensional accuracy of (2) is remarkably improved. In particular, since the expansion portion is formed by the internal pressure operation and the temperature operation in the heating furnace 13 just before the outer diameter regulation, not only the outer diameter accuracy but also the thickness variation is minimized. Can be sustained. Further, by controlling the internal pressure by the feedback numerical control, it is possible to obtain the quartz glass tube 12 with high accuracy in both the outer diameter and the wall thickness.
【００２７】[0027]
【発明の効果】以上記載のごとく本発明によれば、外径
精度並びに肉厚バラツキを最小に押さえることができ、
また、製造する石英ガラス管の外径変更の都度交換する
必要がなく、生産性の極めて高い石英ガラス管の製造方
法とその装置を得ることが出来る。As described above, according to the present invention, it is possible to minimize the outer diameter accuracy and the thickness variation,
In addition, there is no need to replace the quartz glass tube to be manufactured each time the outer diameter of the tube is changed, and a method and apparatus for manufacturing a quartz glass tube with extremely high productivity can be obtained.
【図１】本発明の第１実施例に係わる石英ガラス管の製
造装置の概略構成図である。FIG. 1 is a schematic configuration diagram of an apparatus for manufacturing a quartz glass tube according to a first embodiment of the present invention.
【図２】加熱炉内の温度分布と外径設定治具（平行規制
板）の配置図を示す。FIG. 2 shows a temperature distribution in a heating furnace and an arrangement diagram of an outer diameter setting jig (parallel regulating plate).
【図３】本発明の第２実施例で、外径規制の自動化を図
った石英ガラス管の製造装置の概略構成図である。FIG. 3 is a schematic configuration diagram of an apparatus for manufacturing a quartz glass tube in which the outer diameter regulation is automated in a second embodiment of the present invention.
【図４】図３の外径規制の制御機構を示すブロック図で
ある。FIG. 4 is a block diagram showing a control mechanism for controlling the outer diameter of FIG. 3;
【図５】本発明の第３実施例で、内圧制御と外径規制の
自動化を図った石英ガラス管の製造装置の概略構成図で
ある。FIG. 5 is a schematic configuration diagram of a quartz glass tube manufacturing apparatus according to a third embodiment of the present invention, in which internal pressure control and outer diameter control are automated.
【図６】図５の内圧制御の制御機構の概略の構成を示す
ブロック図である。FIG. 6 is a block diagram illustrating a schematic configuration of a control mechanism of the internal pressure control of FIG. 5;
【図７】本発明により製造した石英ガラス管の肉厚バラ
ツキを従来装置に比較して示す断面図で、（Ａ）は本発
明による製造法による場合を示し、（Ｂ）は従来装置に
よる場合を示す。7A and 7B are cross-sectional views showing thickness variations of a quartz glass tube manufactured according to the present invention in comparison with a conventional apparatus, wherein FIG. 7A shows a case according to the manufacturing method according to the present invention, and FIG. Is shown.
【図８】従来の石英ガラス管の製造装置の概略構成図で
ある。FIG. 8 is a schematic configuration diagram of a conventional quartz glass tube manufacturing apparatus.
１０ 石英ガラス製シリンダ １１ 膨張部 １２ 石英ガラス管 １３ 加熱炉 １４ 外径設定治具 １４ａ ホルダ １４ｂ 平行規制板 １８ 内圧調整バルブ １８ａ 内圧自動調整電磁バルブ １８ｂ リリース用電磁バルブ １９ レーザ外径測定器 ２０ 外径自動調整用制御機器 ２１ ホルダ自動調整用モータ ３０ 内圧自動調整装置 ３１ 画像処理装置用ＣＣＤカメラ ３２ 画像処理装置 DESCRIPTION OF SYMBOLS 10 Quartz glass cylinder 11 Expansion part 12 Quartz glass tube 13 Heating furnace 14 Outer diameter setting jig 14a Holder 14b Parallel regulating plate 18 Internal pressure adjusting valve 18a Internal pressure automatic adjusting electromagnetic valve 18b Electromagnetic valve for release 19 Laser outer diameter measuring instrument 20 Outside Automatic diameter adjustment control device 21 Holder automatic adjustment motor 30 Internal pressure automatic adjustment device 31 CCD camera for image processing device 32 Image processing device
Claims (6)
石英ガラス製中空管を加熱軟化させる加熱手段と、 前記中空管内部に内圧用ガスを導入するとともに加熱軟
化させた中空管を膨出させる内圧生成手段と、 前記膨出させた加熱軟化状態にある中空管（以下石英ガ
ラス管という）外周面に接触させ外径規制させる外径設
定治具とを備え、 前記石英ガラス管を加熱手段内で軸方向に移動させつつ
所定外径の石英ガラス管を製造する装置において、 前記外径設定治具との接触手前位置で、外径設定治具通
過後の石英ガラス管外径Ｄ１を僅か上回る石英ガラス管
外径Ｄ２を持つ膨張部を形成するように外径規制若しく
は内圧制御可能に構成したことを特徴とする石英ガラス
管の製造装置。1. A heating means for heating and softening a hollow tube made of quartz glass formed in a tube shape by sealing a tip thereof, and a hollow which is heated and softened while introducing a gas for internal pressure into the inside of the hollow tube. An internal pressure generating means for expanding the tube; and an outer diameter setting jig for restricting the outer diameter of the hollow tube in a heated and softened state (hereinafter referred to as a quartz glass tube) in contact with the outer peripheral surface thereof, the quartz being provided. In an apparatus for manufacturing a quartz glass tube having a predetermined outer diameter while moving a glass tube in an axial direction within a heating means, a quartz glass tube after passing through an outer diameter setting jig at a position short of contact with the outer diameter setting jig. An apparatus for manufacturing a quartz glass tube, characterized in that the outer diameter can be regulated or the internal pressure can be controlled so as to form an expanded portion having an outer diameter D2 slightly larger than the outer diameter D1.
構成するとともに、外径規制後の石英ガラス管外径を計
測する手段を設け、該計測手段による計測値に基づいて
外径設定治具の規制幅若しくは内圧を制御しながら所定
外径の石英ガラス管を得るようにしたことを特徴とする
請求項１記載の石英ガラス管の製造装置。And a means for measuring the outer diameter of the quartz glass tube after the outer diameter is regulated, wherein the outer diameter setting jig is configured so as to be displaceable, and the outer diameter is set based on a measured value by the measuring means. 2. A quartz glass tube manufacturing apparatus according to claim 1, wherein a quartz glass tube having a predetermined outer diameter is obtained while controlling a regulation width or an internal pressure of the setting jig.
測定で得られた石英ガラス管膨張部外径と外径設定治具
通過後の石英ガラス管外径との差△Ｄを演算して、該△
Ｄを適正設定範囲に維持するように内圧制御を行うこと
を特徴とする請求項１記載の石英ガラス管の製造装置。3. The outer diameter regulation calculates a difference ΔD between the outer diameter of the expanded portion of the quartz glass tube obtained by remote measurement from the non-heating area and the outer diameter of the quartz glass tube after passing through the outer diameter setting jig. Then,
2. The apparatus for manufacturing a quartz glass tube according to claim 1, wherein the internal pressure is controlled so that D is maintained within an appropriate setting range.
温度分布立ち下がり部に位置し、該外径設定治具による
外径規制後石英ガラス管を加熱させないようにした請求
項１記載の石英ガラス管の製造装置。4. The outer diameter setting jig is located at a falling portion of a heating temperature distribution on the heating furnace outlet side, and the outer diameter setting jig does not heat the quartz glass tube after regulating the outer diameter. An apparatus for manufacturing a quartz glass tube according to the above.
んで母材半径方向に変位可能な一対の平行規制板より構
成され、 前記外径設定治具により外径規制後の母材外径が所定外
径Ｄ１に近づくように前記一対の平行規制板の規制幅を
制御可能に構成したことを特徴とする請求項１記載の石
英ガラス管の製造装置。5. The outer diameter setting jig is composed of a pair of parallel regulating plates that can be displaced in the base material radial direction with a hollow tubular base material interposed therebetween. The apparatus for manufacturing a quartz glass tube according to claim 1, wherein the regulating width of the pair of parallel regulating plates is controllable so that the outer diameter of the material approaches a predetermined outer diameter D1.
石英ガラス製中空管を加熱炉で加熱軟化させ、該中空管
内部に内圧用ガスを導入するとともに、外径設定治具を
前記加熱軟化状態にある石英ガラス管外周面に接触さ
せ、外径規制させた状態で、前記石英ガラス管を軸方向
に移動させつつ所定外径の石英ガラス管を製造する方法
において、 上記石英ガラス管の加熱軟化領域を内圧操作により、外
径設定治具接触手前位置で、外径設定治具通過後の石英
ガラス管外径Ｄ１を僅か上回る石英ガラス管外径Ｄ２を
持つ膨張部を形成させ、該膨張部を外径設定治具に侵入
させながら前記石英ガラス管の外径規制を行うととも
に、前記外径規制は、非加熱領域からの遠隔測定で得ら
れた石英ガラス管膨張部外径と外径設定治具通過後の石
英ガラス管外径との差△Ｄを演算して、該△Ｄが適正設
定範囲に維持するように内圧制御を行うことを特徴とす
る石英ガラス管の製造方法。6. A quartz glass hollow tube whose end is sealed and formed into a tube shape is heated and softened in a heating furnace, an internal pressure gas is introduced into the hollow tube, and an outer diameter setting jig is provided. A method of manufacturing a quartz glass tube having a predetermined outer diameter while moving the quartz glass tube in the axial direction in a state where the quartz glass tube is brought into contact with an outer peripheral surface of the quartz glass tube in the heat-softened state and the outer diameter of the quartz glass tube is regulated. An expansion part having a quartz glass tube outer diameter D2 slightly larger than the quartz glass tube outer diameter D1 after passing through the outer diameter setting jig is formed at the position just before the outer diameter setting jig is contacted by the internal pressure operation in the heating softening region of the glass tube. While controlling the outer diameter of the quartz glass tube while allowing the expanded portion to enter the outer diameter setting jig, the outer diameter control is performed outside the expanded portion of the quartz glass tube obtained by remote measurement from a non-heating area. Quartz glass tube after passing through diameter and outer diameter setting jig By calculating the difference △ D between the diameter, the method for manufacturing a silica glass tube which is characterized in that the pressure control such that the △ D is maintained at the appropriate setting range.
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP27748496A JP4040127B2 (en) | 1996-09-27 | 1996-09-27 | Method and apparatus for manufacturing quartz glass tube |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP27748496A JP4040127B2 (en) | 1996-09-27 | 1996-09-27 | Method and apparatus for manufacturing quartz glass tube |
Publications (2)
| Publication Number | Publication Date |
|---|---|
| JPH10101352A true JPH10101352A (en) | 1998-04-21 |
| JP4040127B2 JP4040127B2 (en) | 2008-01-30 |
Family
ID=17584246
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP27748496A Expired - Lifetime JP4040127B2 (en) | 1996-09-27 | 1996-09-27 | Method and apparatus for manufacturing quartz glass tube |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JP4040127B2 (en) |
Cited By (6)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| WO2003059828A1 (en) * | 2002-01-17 | 2003-07-24 | Sumitomo Electric Industries, Ltd. | Method and device for manufacturing glass tube |
| WO2003064338A1 (en) * | 2002-01-30 | 2003-08-07 | Sumitomo Electric Industries, Ltd. | Method and device for manufacturing glass tube |
| JP2010111557A (en) * | 2008-11-10 | 2010-05-20 | Shinetsu Quartz Prod Co Ltd | Method and device for manufacturing tubular part |
| CN103387330A (en) * | 2013-07-30 | 2013-11-13 | 湖北菲利华石英玻璃股份有限公司 | Quantitative starting method for producing quartz glass ingots |
| JP2019521066A (en) * | 2016-06-07 | 2019-07-25 | コーニング インコーポレイテッド | Method and apparatus for forming a glass tube from a glass base material |
| CN116354590A (en) * | 2023-02-09 | 2023-06-30 | 江苏圣达石英制品有限公司 | Quartz tube expanding device and method |
-
1996
- 1996-09-27 JP JP27748496A patent/JP4040127B2/en not_active Expired - Lifetime
Cited By (8)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| WO2003059828A1 (en) * | 2002-01-17 | 2003-07-24 | Sumitomo Electric Industries, Ltd. | Method and device for manufacturing glass tube |
| WO2003064338A1 (en) * | 2002-01-30 | 2003-08-07 | Sumitomo Electric Industries, Ltd. | Method and device for manufacturing glass tube |
| US6997016B2 (en) | 2002-01-30 | 2006-02-14 | Sumitomo Electric Industries, Ltd. | Method and apparatus for manufacturing glass tube |
| JP2010111557A (en) * | 2008-11-10 | 2010-05-20 | Shinetsu Quartz Prod Co Ltd | Method and device for manufacturing tubular part |
| CN103387330A (en) * | 2013-07-30 | 2013-11-13 | 湖北菲利华石英玻璃股份有限公司 | Quantitative starting method for producing quartz glass ingots |
| JP2019521066A (en) * | 2016-06-07 | 2019-07-25 | コーニング インコーポレイテッド | Method and apparatus for forming a glass tube from a glass base material |
| CN116354590A (en) * | 2023-02-09 | 2023-06-30 | 江苏圣达石英制品有限公司 | Quartz tube expanding device and method |
| CN116354590B (en) * | 2023-02-09 | 2023-12-01 | 江苏圣达石英制品有限公司 | Quartz tube expanding device and method |
Also Published As
| Publication number | Publication date |
|---|---|
| JP4040127B2 (en) | 2008-01-30 |
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