JPH0999567A - Piezo-actuator - Google Patents
Piezo-actuatorInfo
- Publication number
- JPH0999567A JPH0999567A JP7284605A JP28460595A JPH0999567A JP H0999567 A JPH0999567 A JP H0999567A JP 7284605 A JP7284605 A JP 7284605A JP 28460595 A JP28460595 A JP 28460595A JP H0999567 A JPH0999567 A JP H0999567A
- Authority
- JP
- Japan
- Prior art keywords
- displacement
- piezoelectric element
- piezo
- triangular wave
- magnifying mechanism
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Pending
Links
Landscapes
- Impact Printers (AREA)
Abstract
Description
【０００１】[0001]
【技術分野】本発明は，ピエゾアクチュエータの出力部
を構成する変位拡大機構の振動を抑制する技術に関す
る。TECHNICAL FIELD The present invention relates to a technique for suppressing vibration of a displacement magnifying mechanism that constitutes an output portion of a piezo actuator.
【０００２】[0002]
【従来技術】印字ヘッドのワイヤ等を高速で駆動するア
クチュエータとして，圧電素子を用いたピエゾアクチュ
エータが知られている。これは，圧電素子に電圧を印加
して圧電素子に変位を生じさせ，変位拡大機構を介して
出力（作動点）の変位量を増幅するものである。そし
て，通常は圧電素子に対して印加する電圧波形は，図
６，図７の符号４９に示すように，通常三角波が用いら
れ，これによって圧電素子の変位はプラスまたはマイナ
ス方向にほぼ等速度で変化する。2. Description of the Related Art A piezo actuator using a piezoelectric element is known as an actuator for driving a wire or the like of a print head at high speed. This is to apply a voltage to the piezoelectric element to cause the piezoelectric element to be displaced, and to amplify the displacement amount of the output (operating point) via the displacement magnifying mechanism. As a voltage waveform normally applied to the piezoelectric element, a triangular wave is normally used as shown by reference numeral 49 in FIGS. 6 and 7, whereby the piezoelectric element is displaced in the plus or minus direction at substantially the same speed. Change.
【０００３】また，上記変位拡大機構には，例えば，梃
子式の変位拡大機構があり，支点と圧電素子の力の作用
点との距離Ａよりも出力となる変位の作動点と支点との
距離Ｂを大きくする（Ｂ＞Ａ）ことにより，上記作動点
における変位量ΔＬ’を，作用点の変位量ΔＬよりも大
きくすることが出来る（ΔＬ’＝ΔＬ＊Ｂ／Ａ）。な
お，多言するまでもなく上記作用点と作動点とは，支点
と同一サイドにあっても良く，反対側にあっても良い。The displacement magnifying mechanism is, for example, a lever type displacement magnifying mechanism, and the distance between the working point and the fulcrum of the displacement, which is an output, is larger than the distance A between the fulcrum and the point of action of the force of the piezoelectric element. By increasing B (B> A), the displacement amount ΔL ′ at the operating point can be made larger than the displacement amount ΔL at the operating point (ΔL ′ = ΔL * B / A). Needless to say, the action point and the action point may be on the same side as the fulcrum or on the opposite side.
【０００４】[0004]
【解決しようとする課題】しかしながら，上記従来のピ
エゾアクチュエータには，次のような問題点がある。そ
れは，圧電素子の変位をプラス及びマイナス方向に脈動
させた場合に，変位の方向が変わる変向点または変位の
速度が大きく変わる変速点等において，変位拡大機構に
共振周波数近傍の減衰振動が発生し，これに伴って作動
点が振動することである。本発明は，かかる従来の問題
点に鑑みてなされたものであり，変位拡大機構の作動点
における振動を抑制することのできるピエゾアクチュエ
ータを提供しようとするものである。However, the above-mentioned conventional piezo actuator has the following problems. When the displacement of the piezoelectric element is pulsated in the plus and minus directions, a damping vibration near the resonance frequency occurs in the displacement magnifying mechanism at the turning point where the displacement direction changes or the shifting point where the displacement speed changes significantly. However, the operating point vibrates accordingly. The present invention has been made in view of such conventional problems, and an object of the present invention is to provide a piezo actuator capable of suppressing vibration at an operating point of a displacement magnifying mechanism.
【０００５】[0005]
【課題の解決手段】請求項１にかかる発明は，電圧信号
を機械的な変位に変換する圧電素子と，この圧電素子の
機械的な変位量を拡大する変位拡大機構と，上記圧電素
子を駆動する電圧信号を発生する駆動部とを有するピエ
ゾアクチュエータにおいて，上記圧電素子を駆動する電
圧信号は，三角波を基調とし，三角波の頂点近傍と最下
降点近傍に電圧の変化をその前後部よりも緩やかにした
平滑部を設けた変形三角波の波形を有しており，上記平
滑部の継続時間長は，上記変位拡大機構の共振周波数の
周期の４０〜６０％の間にあることを特徴とするピエゾ
アクチュエータにある。According to a first aspect of the present invention, a piezoelectric element that converts a voltage signal into a mechanical displacement, a displacement magnifying mechanism that magnifies a mechanical displacement amount of the piezoelectric element, and a piezoelectric element that drives the piezoelectric element. In a piezo actuator having a drive unit for generating a voltage signal for driving, the voltage signal for driving the piezoelectric element is based on a triangular wave, and changes in voltage near the apex and the lowest point of the triangular wave are more gradual than those before and after. The piezo is characterized in that it has a modified triangular waveform provided with a smoothing part, and the duration of the smoothing part is between 40 and 60% of the cycle of the resonance frequency of the displacement magnifying mechanism. On the actuator.
【０００６】本発明において最も注目すべきことは，三
角波の頂点近傍と最下降点近傍に電圧の変化をその前後
部よりも緩やかにした平滑部を設けたことであり，この
平滑部の継続時間長は，上記変位拡大機構の共振周波数
の周期Ｔの４０〜６０％の間にあることである。圧電素
子を駆動する電圧波形を上記のような変形三角波とする
ことにより，変位拡大機構の振動を効果的に吸収または
減衰させることが出来る。What is most noticeable in the present invention is that a smoothing section is provided near the apex and the lowest point of the triangular wave so that the change in voltage is slower than that before and after the smoothing section. The length is between 40 and 60% of the period T of the resonance frequency of the displacement magnifying mechanism. By making the voltage waveform for driving the piezoelectric element a modified triangular wave as described above, the vibration of the displacement magnifying mechanism can be effectively absorbed or damped.
【０００７】即ち，三角波状に圧電素子の変位が変化す
る場合，三角波の山又は谷の変向点において，変位拡大
機構に振動が励起されるが，上記平滑部を設けてこの振
動の励起後の約半周期（５０±１０％）の間三角波の変
向を留保し，その後に三角波の方向を反転させること
（図２の曲線４１参照）により，変位拡大機構の振動を
大幅に抑制することが出来る。That is, when the displacement of the piezoelectric element changes like a triangular wave, vibration is excited in the displacement magnifying mechanism at the turning point of the peak or valley of the triangular wave. For about half a cycle (50 ± 10%) of the triangular wave, the direction of the triangular wave is retained, and then the direction of the triangular wave is reversed (see curve 41 in Fig. 2) to significantly suppress the vibration of the displacement magnifying mechanism. Can be done.
【０００８】これは，詳細を後述するように，振動によ
る変位が，山側でプラス（谷側ではマイナス）の方向に
およそ半周期の間変化し，その後振動の変位量がマイナ
ス（谷側ではプラス）の方向に変化するのにほぼ同期し
て，即ち変位拡大機構の共振周波数の周期Ｔの約５０％
のタイミングに，素子本体による基本変位が平滑部から
再び三角波による変位に，上記振動の変位の変化と同一
の方向に変化するため，励起された振動のエネルギーが
吸収されることによる。As will be described later in detail, this is because the displacement due to vibration changes in the plus direction on the mountain side (minus on the valley side) for about a half cycle, and then the displacement amount of vibration is minus (plus on the valley side). ) Almost in synchronism with the change in the direction of, ie, about 50% of the period T of the resonance frequency of the displacement magnifying mechanism.
At this timing, the basic displacement due to the element body changes from the smooth portion to the displacement due to the triangular wave again in the same direction as the change in the above-described vibration displacement, and thus the energy of the excited vibration is absorbed.
【０００９】なお，振動の減衰効果は，上記平滑部の時
間長が変位拡大機構の共振周波数の周期Ｔの２分の１に
近い方がより大きくなる。しかしながら，平滑部の時間
長が５０±１０％の範囲にあれば，実用上十分な効果を
発揮することができる（図４及び図５参照）。そして，
より好ましくは，上記時間長を５０±５％程度にするこ
とが好ましい。The vibration damping effect becomes greater when the time length of the smoothing portion is closer to one half of the cycle T of the resonance frequency of the displacement magnifying mechanism. However, if the time length of the smooth portion is in the range of 50 ± 10%, a practically sufficient effect can be exhibited (see FIGS. 4 and 5). And
More preferably, the time length is set to about 50 ± 5%.
【００１０】また，上記平滑部における電圧変化（圧電
素子の変位）の程度は，出来るだけ平滑にしフラット化
する方がより効果的であ。従って，請求項２記載のよう
に平滑部を電圧が変化しない定電圧部とすることが好ま
しい。Further, it is more effective that the degree of voltage change (displacement of the piezoelectric element) in the smooth portion is smoothed and flattened. Therefore, it is preferable that the smoothing section is a constant voltage section in which the voltage does not change.
【００１１】また，上記変位拡大機構には，例えば，請
求項３記載のように，支点を中心にして揺動する梃子式
の変位拡大機構があり，上記支点と作動部との距離Ｂよ
りも短い距離Ａに圧電素子の力の作用点を設けたものが
ある。支点と圧電素子の作用点との距離をＡとし支点と
作動点との距離をＢとしたとき，これによって，変位出
力の作動点における変位量ΔＬ’を，圧電素子の力の作
用点の変位量ΔＬよりも大きくすることが出来るからで
ある（ΔＬ’＝ΔＬ＊Ｂ／Ａ）。The displacement magnifying mechanism includes, for example, a lever type displacement magnifying mechanism that swings about a fulcrum as described in claim 3, and the displacement magnifying mechanism is more than the distance B between the fulcrum and the operating portion. There is one in which a point of action of the force of the piezoelectric element is provided at a short distance A. When the distance between the fulcrum and the point of action of the piezoelectric element is A, and the distance between the fulcrum and the operating point is B, the displacement amount ΔL 'at the operating point of the displacement output is calculated as follows: This is because it can be made larger than the amount ΔL (ΔL '= ΔL * B / A).
【００１２】[0012]
実施形態例 本例は，図１に示すように，電圧信号を機械的な変位に
変換する圧電素子１０と，圧電素子１０の機械的な変位
量を拡大する変位拡大機構２０と，圧電素子１０を駆動
する電圧信号を発生する図示しない駆動部とを有するピ
エゾアクチュエータ１である。図２に示すように，圧電
素子１０を駆動する電圧信号は，三角波４１５を基調と
し，三角波の頂点近傍と最下降点近傍に電圧の変化をそ
の前後部よりも緩やかにした平滑部４１１，４１２を設
けた変形三角波４１の波形を有しており，平滑部４１
１，４１２の継続時間長ｔは，上記変位拡大機構２０の
共振周波数の周期Ｔの４０〜６０％の間にある５０％の
値に設定されている。そして，平滑部４１１，４１２は
電圧が変化しない定電圧部である。Embodiment Example In this embodiment, as shown in FIG. 1, a piezoelectric element 10 for converting a voltage signal into a mechanical displacement, a displacement magnifying mechanism 20 for enlarging the mechanical displacement amount of the piezoelectric element 10, and a piezoelectric element 10 are provided. The piezoelectric actuator 1 includes a drive unit (not shown) that generates a voltage signal for driving the. As shown in FIG. 2, the voltage signal for driving the piezoelectric element 10 is based on the triangular wave 415, and smoothing parts 411 and 412 are provided in which the voltage changes are made more gradual near the apex and the lowest point of the triangular wave than at the front and rear thereof. Has a waveform of a modified triangular wave 41,
The duration t of 1,412 is set to a value of 50% which is between 40% and 60% of the cycle T of the resonance frequency of the displacement magnifying mechanism 20. The smoothing sections 411 and 412 are constant voltage sections whose voltage does not change.
【００１３】また，変位拡大機構２０は，図１に示すよ
うに，支点Ｓを中心にして揺動する梃子式の変位拡大機
構であって，上記支点Ｓと作動部２１との距離Ｂよりも
短い距離Ａに圧電素子１０の力の作用点Ｆを設けたもの
である。そして，変位拡大機構２０に設けた空隙２９の
大きさＧは，作動部２１の最大変位量ΔＬｍ（１３０μ
ｍ）よりも大きい値（０．３〜０．４ｍｍ）に設定され
ている。Further, as shown in FIG. 1, the displacement magnifying mechanism 20 is a lever-type displacement magnifying mechanism that swings about a fulcrum S, and is more than a distance B between the fulcrum S and the operating portion 21. The point F of action of the force of the piezoelectric element 10 is provided at a short distance A. The size G of the gap 29 provided in the displacement magnifying mechanism 20 is determined by the maximum displacement amount ΔLm (130 μm) of the operating portion 21.
m) is set to a larger value (0.3 to 0.4 mm).
【００１４】以下，それぞれについて説明を補足する。
圧電素子１０は，素子本体１１と，ピストン１２と，ハ
ウジング１３とを有しており，素子本体１１は，図示し
ないハウジング１３の底面に固定されている。そして，
変位拡大機構２０の胴部２２の下方はハウジング１３の
上部にネジ止めされている。変位拡大機構２０の材質
は，アルミ合金である。A supplementary explanation will be given below for each of them.
The piezoelectric element 10 has an element body 11, a piston 12, and a housing 13, and the element body 11 is fixed to the bottom surface of a housing 13 (not shown). And
The lower portion of the body portion 22 of the displacement magnifying mechanism 20 is screwed to the upper portion of the housing 13. The material of the displacement magnifying mechanism 20 is an aluminum alloy.
【００１５】一方，ピストン１２は，胴部２２との間に
介設された板バネ１４の付勢力によって素子本体１１の
上端面１１１に押圧されている。そして，素子本体１１
と共に上下に揺動し，これに伴って支点Ｆが上下動す
る。ピストン１２の材質は，鋼材である。なお，同図に
おいて，符号１６は，Ｏリングである。On the other hand, the piston 12 is pressed against the upper end surface 111 of the element body 11 by the urging force of the leaf spring 14 provided between the piston 12 and the body portion 22. And the element body 11
Along with this, it swings up and down, and the fulcrum F moves up and down accordingly. The material of the piston 12 is steel. In the figure, reference numeral 16 is an O-ring.
【００１６】素子本体１１に電圧が印加されると，素子
本体１１は同図の上方に伸長し，作用点Ｆを介して変位
拡大機構２０の作動部２１を押し上げる。そして，梃子
の原理により，作動部２１の変位量ΔＬ’は，作用点Ｆ
における変位量ΔＬよりも拡大される（ΔＬ’＝ΔＬ＊
Ｂ／Ａ）。When a voltage is applied to the element body 11, the element body 11 extends upward in the figure and pushes up the actuating portion 21 of the displacement magnifying mechanism 20 via the point of action F. Then, according to the principle of leverage, the displacement amount ΔL ′ of the working portion 21 is
Is larger than the displacement amount ΔL at ΔL ′ = ΔL *
B / A).
【００１７】次に，本例のピエゾアクチュエータ１の振
動抑制作用について説明する。従来のように，素子本体
１１を，図６，図７に示すように，三角波４９によって
駆動すると，電圧が増加（又は減少）から減少（又は増
加）に切り替わる変向点４９１において，変位拡大機構
２０に振動が励起され，変位量ΔＬ’は，符号６９のよ
うに脈動波を含んだ形で変化する。この変位曲線６９
は，図７に示すように，励起された減衰振動の変位６９
２と，圧電素子１０によるの三角波の変位６９１とが重
畳したものである。Next, the vibration suppressing action of the piezo actuator 1 of this embodiment will be described. When the element body 11 is driven by the triangular wave 49 as shown in FIGS. 6 and 7 as in the conventional case, the displacement magnifying mechanism is provided at the turning point 491 where the voltage switches from increasing (or decreasing) to decreasing (or increasing). Vibration is excited in 20, and the displacement amount ΔL ′ changes in a form including a pulsating wave as indicated by reference numeral 69. This displacement curve 69
Is the displacement 69 of the excited damping vibration, as shown in FIG.
2 and the triangular wave displacement 691 by the piezoelectric element 10 are superposed.
【００１８】一方，本例のピエゾアクチュエータ１で
は，実験データを表した図２，図３に示すように，素子
本体１１は，変形三角波４１によって駆動され，三角波
４１５から平滑部４１１，４１２に切り替わる変向点４
１６において，同様に，振動（周期Ｔ）が励起される。
しかしながら，これによる振動変位６１１（図３）は，
本例では，急速に減衰する。On the other hand, in the piezo actuator 1 of this example, as shown in FIG. 2 and FIG. 3 showing experimental data, the element body 11 is driven by the modified triangular wave 41 to switch from the triangular wave 415 to the smoothing portions 411, 412. Turning point 4
At 16, vibrations (period T) are likewise excited.
However, the resulting vibration displacement 611 (Fig. 3) is
In this example, it decays rapidly.
【００１９】即ち，本例では，図３に示すように，振動
変位６１１が，山側においてプラス（谷側の平滑部４１
２ではマイナス）の方向におよそ半周期の間変化し，そ
の後その変位量がマイナス（谷側の平滑部４１２ではプ
ラス）の値に変化するのにほぼ同期して，即ち変位拡大
機構２０の共振周波数の周期Ｔの５０％のタイミング
に，素子本体１１による基本変位が平滑部４１１，４１
２から再び三角波４１５に，振動変位６１１の変化と同
一の方向に変化する。その結果，励起された振動が吸収
され，振動変位６１１の変位量が大きく減衰する。That is, in this example, as shown in FIG. 3, the vibration displacement 611 is positive on the peak side (the smooth part 41 on the valley side).
2 changes in a negative direction for about half a period, and thereafter, the displacement amount changes to a negative value (in the valley side smooth portion 412, a positive value) almost in synchronism, that is, the resonance of the displacement magnifying mechanism 20. At the timing of 50% of the frequency cycle T, the basic displacement due to the element body 11 is reduced by the smoothing portions 411, 41.
It changes from 2 to the triangular wave 415 again in the same direction as the change of the vibration displacement 611. As a result, the excited vibration is absorbed, and the displacement amount of the vibration displacement 611 is greatly attenuated.
【００２０】その結果，図３に示す本例の変位曲線６１
は，図７に示す変位曲線６９に比べて，上記振動による
脈動が大幅に減少する。なお，実験データから得られた
図４，図５に示すように，平滑部４８１，４７１の時間
長ｔが周期Ｔの４０％よりも小または６０％よりも大の
場合にも，それなりの効果は発揮されるが，効果は小さ
くなる。As a result, the displacement curve 61 of this example shown in FIG.
In comparison with the displacement curve 69 shown in FIG. 7, the pulsation due to the vibration is significantly reduced. As shown in FIGS. 4 and 5 obtained from the experimental data, even when the time length t of the smoothing units 481 and 471 is smaller than 40% of the period T or larger than 60%, the effect is reasonable. Is exhibited, but the effect is reduced.
【００２１】即ち，図４に示すように，変形三角波４８
における平滑部４８１の時間長ｔを，変位拡大機構２０
の共振振動の周期Ｔの４０％よりも小さな値３８％にし
た場合には，変位曲線６８は，図２の変位曲線６１に比
べてかなり多く脈動成分が残っている。また，図５に示
すように，変形三角波４７における平滑部４７１の時間
長ｔを，変位拡大機構２０の共振振動の周期Ｔの６０％
よりも大きな値６３％にした場合には，変位曲線６７
は，図２の変位曲線６１に比べるとかなり多く脈動成分
が残存する。That is, as shown in FIG. 4, the modified triangular wave 48
The time length t of the smooth portion 481 at
When the value is set to 38%, which is smaller than 40% of the period T of the resonance vibration, the displacement curve 68 has considerably more pulsating components than the displacement curve 61 of FIG. Further, as shown in FIG. 5, the time length t of the smoothing portion 471 in the modified triangular wave 47 is 60% of the cycle T of the resonance vibration of the displacement magnifying mechanism 20.
If the value is 63%, which is larger than
Is considerably larger than the displacement curve 61 in FIG.
【００２２】なお，本例では，平滑部４１１，４１２を
一定電圧としたが，変形三角波における平滑部の電圧の
変化率を三角波の上昇時または下降時の変化率よりも小
さくすることにより，変位拡大機構２０の作動部２１の
変位の脈動を従来より低減することが出来る。In this example, the smoothing portions 411 and 412 are set to a constant voltage, but if the rate of change of the voltage of the smoothing portion in the modified triangular wave is made smaller than the rate of change in the rising or falling of the triangular wave, the displacement is changed. The pulsation of the displacement of the actuating portion 21 of the enlarging mechanism 20 can be reduced as compared with the conventional case.
【００２３】[0023]
【発明の効果】上記のように，本発明によれば，変位拡
大機構の作動点における振動を抑制することのできるピ
エゾアクチュエータを提供することが出来る。As described above, according to the present invention, it is possible to provide the piezo actuator capable of suppressing the vibration at the operating point of the displacement magnifying mechanism.
【図１】実施形態例のピエゾアクチュエータの断面図。FIG. 1 is a sectional view of a piezo actuator according to an embodiment.
【図２】実施形態例のピエゾアクチュエータにおいて圧
電素子への印加電圧と作動部の変位量の変化を示す図。FIG. 2 is a diagram showing changes in the applied voltage to the piezoelectric element and the displacement amount of the operating portion in the piezo actuator of the embodiment.
【図３】図２の部分拡大図。FIG. 3 is a partially enlarged view of FIG.
【図４】実施形態例と同一構造のピエゾアクチュエータ
に対して異なる変形三角波を印加とた場合の印加電圧と
作動部の変位量の変化を示す図（平滑部の時間長ｔ＝
０．３８Ｔ）。FIG. 4 is a diagram showing changes in the applied voltage and the displacement amount of the operating portion when different deformed triangular waves are applied to the piezoelectric actuator having the same structure as that of the embodiment (time length t = of the smoothing portion).
0.38T).
【図５】実施形態例と同一構造のピエゾアクチュエータ
に対して異なる変形三角波を印加とた場合の印加電圧と
作動部の変位量の変化を示す図（平滑部の時間長ｔ＝
０．６３Ｔ）。FIG. 5 is a diagram showing changes in the applied voltage and the displacement amount of the operating part when different deformed triangular waves are applied to the piezoelectric actuator having the same structure as that of the embodiment (the time length t of the smoothing part is t =
0.63T).
【図６】実施形態例と同一構造のピエゾアクチュエータ
に対して従来どおり三角波を印加とた場合の印加電圧と
作動部の変位量の変化を示す図。FIG. 6 is a diagram showing changes in applied voltage and displacement of an operating portion when a triangular wave is conventionally applied to a piezoelectric actuator having the same structure as that of the embodiment.
【図７】図６の部分拡大図。7 is a partially enlarged view of FIG.
１０．．．圧電素子， ２０．．．変位拡大機構， Ｆ．．．変位拡大機構に対する力の作用点， Ｓ．．．変位拡大機構の支点， 10. . . Piezoelectric element, 20. . . Displacement magnifying mechanism, F. . . Point of action of force on displacement magnifying mechanism, S. . . Fulcrum of displacement magnifying mechanism,
Claims (3)
素子と，この圧電素子の機械的な変位量を拡大する変位
拡大機構と，上記圧電素子を駆動する電圧信号を発生す
る駆動部とを有するピエゾアクチュエータにおいて，上
記圧電素子を駆動する電圧信号は，三角波を基調とし，
三角波の頂点近傍と最下降点近傍に電圧の変化をその前
後部よりも緩やかにした平滑部を設けた変形三角波の波
形を有しており，上記平滑部の継続時間長は，上記変位
拡大機構の共振周波数の周期の４０〜６０％の間にある
ことを特徴とするピエゾアクチュエータ。1. A piezoelectric element that converts a voltage signal into a mechanical displacement, a displacement magnifying mechanism that magnifies the mechanical displacement of the piezoelectric element, and a drive unit that generates a voltage signal that drives the piezoelectric element. In the piezoelectric actuator having, the voltage signal for driving the piezoelectric element is based on a triangular wave,
The triangular wave has a waveform of a modified triangular wave near the apex and the lowest point of the triangular wave. Piezo actuator characterized in that it is between 40% and 60% of the period of the resonance frequency.
変化しない定電圧部であることを特徴とするピエゾアク
チュエータ。2. The piezo actuator according to claim 1, wherein the smoothing section is a constant voltage section whose voltage does not change.
変位拡大機構は，支点を中心にして揺動する梃子式の変
位拡大機構であって，上記支点と作動部との距離よりも
短い距離に前記圧電素子の力の作用点を設けたものであ
ることを特徴とするピエゾアクチュエータ。3. The displacement magnifying mechanism according to claim 1 or 2, wherein the displacement magnifying mechanism is a lever-type displacement magnifying mechanism that swings about a fulcrum, and the distance is shorter than the distance between the fulcrum and the operating portion. A piezo actuator, wherein a point of action of the force of the piezoelectric element is provided in the.
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP7284605A JPH0999567A (en) | 1995-10-04 | 1995-10-04 | Piezo-actuator |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP7284605A JPH0999567A (en) | 1995-10-04 | 1995-10-04 | Piezo-actuator |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| JPH0999567A true JPH0999567A (en) | 1997-04-15 |
Family
ID=17680628
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP7284605A Pending JPH0999567A (en) | 1995-10-04 | 1995-10-04 | Piezo-actuator |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPH0999567A (en) |
Cited By (2)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JP2018080709A (en) * | 2016-11-14 | 2018-05-24 | シンフォニアテクノロジー株式会社 | Piezoelectric type actuator and piezoelectric type valve |
| CN109569955A (en) * | 2017-09-29 | 2019-04-05 | 精工爱普生株式会社 | Displacement amplifying mechanism and the liquid injection apparatus for having used the displacement amplifying mechanism |
-
1995
- 1995-10-04 JP JP7284605A patent/JPH0999567A/en active Pending
Cited By (2)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JP2018080709A (en) * | 2016-11-14 | 2018-05-24 | シンフォニアテクノロジー株式会社 | Piezoelectric type actuator and piezoelectric type valve |
| CN109569955A (en) * | 2017-09-29 | 2019-04-05 | 精工爱普生株式会社 | Displacement amplifying mechanism and the liquid injection apparatus for having used the displacement amplifying mechanism |
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