JPH0993067A - Production of piezoelectric ceramic oscillator - Google Patents
Production of piezoelectric ceramic oscillatorInfo
- Publication number
- JPH0993067A JPH0993067A JP27183895A JP27183895A JPH0993067A JP H0993067 A JPH0993067 A JP H0993067A JP 27183895 A JP27183895 A JP 27183895A JP 27183895 A JP27183895 A JP 27183895A JP H0993067 A JPH0993067 A JP H0993067A
- Authority
- JP
- Japan
- Prior art keywords
- piezoelectric ceramic
- resonance frequency
- ceramic vibrator
- oscillator
- vibrator
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Pending
Links
- 239000000919 ceramic Substances 0.000 title claims abstract description 89
- 238000004519 manufacturing process Methods 0.000 title claims abstract description 24
- 239000000463 material Substances 0.000 description 15
- 238000000034 method Methods 0.000 description 10
- 239000000853 adhesive Substances 0.000 description 5
- 230000001070 adhesive effect Effects 0.000 description 5
- 239000004925 Acrylic resin Substances 0.000 description 4
- 150000001252 acrylic acid derivatives Chemical class 0.000 description 4
- 239000002184 metal Substances 0.000 description 3
- 229910052751 metal Inorganic materials 0.000 description 3
- 229910001374 Invar Inorganic materials 0.000 description 2
- XEEYBQQBJWHFJM-UHFFFAOYSA-N Iron Chemical compound [Fe] XEEYBQQBJWHFJM-UHFFFAOYSA-N 0.000 description 2
- 208000009596 Tooth Mobility Diseases 0.000 description 2
- 238000007796 conventional method Methods 0.000 description 2
- 230000000704 physical effect Effects 0.000 description 2
- 230000010287 polarization Effects 0.000 description 2
- 239000000523 sample Substances 0.000 description 2
- 229910000906 Bronze Inorganic materials 0.000 description 1
- OAICVXFJPJFONN-UHFFFAOYSA-N Phosphorus Chemical compound [P] OAICVXFJPJFONN-UHFFFAOYSA-N 0.000 description 1
- 229910045601 alloy Inorganic materials 0.000 description 1
- 239000000956 alloy Substances 0.000 description 1
- 229910002113 barium titanate Inorganic materials 0.000 description 1
- JRPBQTZRNDNNOP-UHFFFAOYSA-N barium titanate Chemical compound [Ba+2].[Ba+2].[O-][Ti]([O-])([O-])[O-] JRPBQTZRNDNNOP-UHFFFAOYSA-N 0.000 description 1
- 239000010974 bronze Substances 0.000 description 1
- 229910010293 ceramic material Inorganic materials 0.000 description 1
- 239000011248 coating agent Substances 0.000 description 1
- 238000000576 coating method Methods 0.000 description 1
- KUNSUQLRTQLHQQ-UHFFFAOYSA-N copper tin Chemical compound [Cu].[Sn] KUNSUQLRTQLHQQ-UHFFFAOYSA-N 0.000 description 1
- 230000007423 decrease Effects 0.000 description 1
- NKZSPGSOXYXWQA-UHFFFAOYSA-N dioxido(oxo)titanium;lead(2+) Chemical compound [Pb+2].[O-][Ti]([O-])=O NKZSPGSOXYXWQA-UHFFFAOYSA-N 0.000 description 1
- 229910052742 iron Inorganic materials 0.000 description 1
- 229910000833 kovar Inorganic materials 0.000 description 1
- 238000005259 measurement Methods 0.000 description 1
- 238000002844 melting Methods 0.000 description 1
- 230000008018 melting Effects 0.000 description 1
- 229910000679 solder Inorganic materials 0.000 description 1
- 239000010935 stainless steel Substances 0.000 description 1
- 229910001220 stainless steel Inorganic materials 0.000 description 1
Classifications
-
- G—PHYSICS
- G01—MEASURING; TESTING
- G01N—INVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIR CHEMICAL OR PHYSICAL PROPERTIES
- G01N29/00—Investigating or analysing materials by the use of ultrasonic, sonic or infrasonic waves; Visualisation of the interior of objects by transmitting ultrasonic or sonic waves through the object
- G01N29/22—Details, e.g. general constructional or apparatus details
- G01N29/24—Probes
- G01N29/2437—Piezoelectric probes
- G01N29/245—Ceramic probes, e.g. lead zirconate titanate [PZT] probes
Landscapes
- Chemical & Material Sciences (AREA)
- Engineering & Computer Science (AREA)
- Ceramic Engineering (AREA)
- Physics & Mathematics (AREA)
- Health & Medical Sciences (AREA)
- Life Sciences & Earth Sciences (AREA)
- Analytical Chemistry (AREA)
- Biochemistry (AREA)
- General Health & Medical Sciences (AREA)
- General Physics & Mathematics (AREA)
- Immunology (AREA)
- Pathology (AREA)
- Piezo-Electric Or Mechanical Vibrators, Or Delay Or Filter Circuits (AREA)
- Investigating Or Analyzing Materials By The Use Of Ultrasonic Waves (AREA)
- Dental Tools And Instruments Or Auxiliary Dental Instruments (AREA)
- Ultra Sonic Daignosis Equipment (AREA)
Abstract
Description
【０００１】[0001]
【発明の属する技術分野】本発明は、圧電セラミック振
動子の製造方法に関し、特に希望する低周波の共振周波
数を正確に持つ圧電セラミック振動子を、歩留り良く得
ることのできる圧電セラミック振動子の製造方法に関す
るものである。BACKGROUND OF THE INVENTION 1. Field of the Invention The present invention relates to a method for manufacturing a piezoelectric ceramic vibrator, and more particularly to manufacturing a piezoelectric ceramic vibrator capable of obtaining a piezoelectric ceramic vibrator having a desired low resonance frequency accurately with a high yield. It is about the method.
【０００２】[0002]
【従来の技術及びその課題】円板状の圧電セラミック振
動子の共振周波数は、一般的に下記の式により算出され
る。2. Description of the Related Art The resonance frequency of a disk-shaped piezoelectric ceramic vibrator is generally calculated by the following formula.
【０００３】[0003]
【式１】 なお、上記式中、 α ： 境界条件定数 Ｔ ： 振動子の総厚 ｒ ： 支持又は固定径（半径） Ｙ ： シム材のヤング率 ρ ： シム材の密度 σ ： シム材のポアソン比 である。(Equation 1) In the above formula, α: boundary condition constant T: total thickness of oscillator r: supporting or fixed diameter (radius) Y: Young's modulus of shim material ρ: density of shim material σ: Poisson's ratio of shim material.
【０００４】そのため、該円板状の圧電セラミック振動
子の共振周波数を低減するには、通常、上記式から明ら
かなようにその振動子の厚み（Ｔ）を薄くする、また該
振動子を支持又は固定する径（ｒ）を大きくする等の方
策が採られている。ここで、圧電セラミック振動子の厚
みを薄くすることは、該振動子の強度が低下することか
ら限界があり、また該振動子を支持又は固定する径を大
きくすることは、小型化の要求に反する結果となる。そ
こで、強度的に満足でき、しかも小型で低周波、例えば
７００Ｈｚ以下の共振周波数を持つ圧電セラミック振動
子を製造することは、非常に困難なものとされていた。Therefore, in order to reduce the resonance frequency of the disk-shaped piezoelectric ceramic oscillator, the thickness (T) of the oscillator is usually thinned and the oscillator is supported as is clear from the above equation. Alternatively, measures such as increasing the diameter (r) to be fixed are adopted. Here, there is a limit to reducing the thickness of the piezoelectric ceramic oscillator because the strength of the oscillator decreases, and increasing the diameter for supporting or fixing the oscillator is a demand for downsizing. The result will be contrary. Therefore, it has been extremely difficult to manufacture a piezoelectric ceramic vibrator that is satisfactory in strength, small in size, and has a low frequency, for example, a resonance frequency of 700 Hz or less.
【０００５】また、圧電セラミック振動子は、その製造
工程中の種々の要因、例えば使用する圧電セラミックス
或いはシム材自体の物性、或いは厚み等の微妙なバラツ
キ、圧電セラミックスとシム材とを接着する、例えば嫌
気性型紫外線硬化型変性アクリレート樹脂の物性、或い
は塗布厚み等による接着状況の微妙なバラツキ、更には
該圧電セラミック振動子を支持又は固定する部分の状態
等により、得られる圧電セラミック振動子の共振周波数
が個々に相違し、特に低周波の共振周波数を持つ圧電セ
ラミック振動子を製造する場合には、上記要因による共
振周波数のバラツキが大きく影響し、希望する低周波の
共振周波数を正確に持つ圧電セラミック振動子を歩留り
良く量産することは困難なものとされていた。Further, the piezoelectric ceramic vibrator has various factors during its manufacturing process, for example, the physical properties of the piezoelectric ceramic or the shim material itself to be used, or slight variations in the thickness or the like, and the piezoelectric ceramic and the shim material are bonded together. For example, depending on the physical properties of the anaerobic UV-curable modified acrylate resin, or slight variations in the adhesion state due to the coating thickness, and the state of the portion that supports or fixes the piezoelectric ceramic oscillator, Resonance frequencies are different from each other, and especially when manufacturing a piezoelectric ceramic resonator having a low resonance frequency, variations in the resonance frequency due to the above factors have a great influence, and the desired low resonance frequency can be obtained accurately. It has been considered difficult to mass-produce piezoelectric ceramic resonators with high yield.
【０００６】本発明は、上述した従来の低周波の共振周
波数を持つ圧電セラミック振動子を製造する場合に存在
する課題に鑑み成されたものであって、その目的は、希
望する低周波の共振周波数を正確に持ち、かつ小型で強
度的にも満足できる圧電セラミック振動子を、歩留り良
く得ることのできる圧電セラミック振動子の製造方法を
提供することにある。The present invention has been made in view of the problems existing when manufacturing the above-described conventional piezoelectric ceramic oscillator having a low resonance frequency, and its object is to achieve a desired low frequency resonance. It is an object of the present invention to provide a method for manufacturing a piezoelectric ceramic vibrator, which can obtain a piezoelectric ceramic vibrator having an accurate frequency, a small size, and satisfactory strength, with a high yield.
【０００７】[0007]
【課題を解決するための手段】本発明は、上記した目的
を達成するため、先ず希望する共振周波数より高い共振
周波数を持つ円板状の圧電セラミック振動子を製造し、
該円板状の圧電セラミック振動子の中心に、重りを圧電
セラミック振動子に触れない状態で載置し得る棒体を立
設し、該棒体に載置する重りの量を、圧電セラミック振
動子の共振周波数を測定しながら変更することにより、
希望する共振周波数を正確に持つ圧電セラミック振動子
を製造することとした。In order to achieve the above object, the present invention first manufactures a disk-shaped piezoelectric ceramic vibrator having a resonance frequency higher than a desired resonance frequency,
At the center of the disk-shaped piezoelectric ceramic oscillator, a rod body is provided which can be placed without touching the piezoelectric ceramic oscillator, and the amount of the weight placed on the rod is determined by the piezoelectric ceramic vibration. By changing while measuring the resonance frequency of the child,
It was decided to manufacture a piezoelectric ceramic oscillator having the desired resonance frequency accurately.
【０００８】上記した本発明にかかる圧電セラミック振
動子の製造方法によれば、共振周波数の微調整が可能と
なるため、正確な共振周波数を有する振動子を歩留り良
く製造することが可能となる。According to the above-described method for manufacturing a piezoelectric ceramic vibrator of the present invention, since the resonance frequency can be finely adjusted, a vibrator having an accurate resonance frequency can be manufactured with a high yield.
【０００９】また、本発明にかかる圧電セラミック振動
子の製造方法は、先ず希望する共振周波数より高い共振
周波数を持つ円板状の圧電セラミック振動子を製造し、
該圧電セラミック振動子の中心に、重りの荷重による負
荷をかけ、該圧電セラミック振動子の共振周波数を低い
方向に移行させるものであるため、式１に示した圧電セ
ラミック振動子自体の厚み（Ｔ）を極端に薄くすること
なく、また該圧電セラミック振動子の支持、或いは固定
径（ｒ）を極端に大きくすることなく、その振動子に負
荷する重みの量を変更することにより、低周波の共振周
波数を持つ圧電セラミック振動子を製造することが出来
るため、小型で強度的にも満足できる圧電セラミック振
動子を製造することが可能となる。In the method for manufacturing a piezoelectric ceramic vibrator according to the present invention, first, a disk-shaped piezoelectric ceramic vibrator having a resonance frequency higher than a desired resonance frequency is manufactured,
Since the load of a weight is applied to the center of the piezoelectric ceramic vibrator to shift the resonance frequency of the piezoelectric ceramic vibrator in the lower direction, the thickness (T ) Is not extremely thinned, and the amount of weight to be applied to the piezoelectric ceramic vibrator is changed or the fixed diameter (r) is not extremely increased. Since it is possible to manufacture a piezoelectric ceramic resonator having a resonance frequency, it is possible to manufacture a piezoelectric ceramic resonator that is small and has satisfactory strength.
【００１０】[0010]
【発明の実施の形態】以下、上記した本発明にかかる圧
電セラミック振動子の製造方法の実施の形態につき説明
する。BEST MODE FOR CARRYING OUT THE INVENTION Embodiments of the method for manufacturing a piezoelectric ceramic vibrator according to the present invention described above will be described below.
【００１１】圧電セラミックス材料としては、公知のチ
タン酸バリウム系セラミックス、チタン酸鉛系セラミッ
クス、ＰＺＴ系セラミックス或いは三成分系セラミック
ス等が使用でき、これらのセラミックスを常法によって
成形、焼成、分極して円板状の圧電セラミックスを製造
する。As the piezoelectric ceramic material, known barium titanate-based ceramics, lead titanate-based ceramics, PZT-based ceramics or ternary-component ceramics can be used. A disk-shaped piezoelectric ceramic is manufactured.
【００１２】得られた上記圧電セラミックスを、該圧電
セラミックスより大きい径の円板状の金属板（シム材）
に接着剤を用いて貼り合わせる。この場合、使用目的に
応じて圧電セラミックスをシム材の両面に貼り合わせる
バイモルフ型、或いは圧電セラミックスをシム材の片面
に貼り合わせるユニモルフ型のいずれとしても良く、ま
た、バイモルフ型の圧電セラミック振動子とする場合に
は、貼り合わせる２枚の圧電セラミックスの分極方向を
シム材を中心にして対称に貼り合わせるシリーズタイ
プ、或いは圧電セラミックスの分極方向を同一方向に貼
り合わせるパラレルタイプのいずれとしても良い。ま
た、使用するシム材料としては、ＳＵＳ316 、リン青
銅、42アロイ、インバ、スパーインバ或いはコバール等
の通常使用されているシム材料を本発明においても使用
でき、また圧電セラミックスとシム材との接着も、一般
の有機系接着剤、例えば嫌気性型紫外線硬化型変性アク
リレート樹脂等を用いて常法によって行えば良い。A disk-shaped metal plate (shim material) having a diameter larger than that of the obtained piezoelectric ceramic is obtained.
It is pasted together using an adhesive. In this case, either a bimorph type in which piezoelectric ceramics are attached to both sides of a shim material or a unimorph type in which piezoelectric ceramics are attached to one side of a shim material may be used depending on the purpose of use. In this case, the two piezoelectric ceramics to be bonded may be either of a series type in which the polarization directions of the piezoelectric ceramics are symmetrically bonded to each other around the shim material, or a parallel type in which the polarization directions of the piezoelectric ceramics are bonded to the same direction. As the shim material to be used, a commonly used shim material such as SUS316, phosphor bronze, 42 alloy, invar, spar invar or kovar can also be used in the present invention, and the adhesion between the piezoelectric ceramics and the shim material can also be used. It may be carried out by a conventional method using a general organic adhesive, for example, an anaerobic type ultraviolet curable modified acrylate resin.
【００１３】次に、上記圧電セラミック振動子の中心
に、該圧電セラミック振動子に触れない状態で重りを載
置し得る棒体を立設する。この棒体の構造としては、例
えば鉄、ステンレス等の金属により作製された、先細り
の段部を有する棒体とすれば良い。Next, at the center of the piezoelectric ceramic vibrator, a rod body on which a weight can be placed without touching the piezoelectric ceramic vibrator is erected. As the structure of this rod body, for example, a rod body made of metal such as iron or stainless steel and having a tapered step may be used.
【００１４】その後、圧電セラミック振動子に立設した
上記棒体に、インピーダンス フェイズゲイン アナラ
イザー等により圧電セラミック振動子の共振周波数を測
定しながら、重りを載置していくことにより、圧電セラ
ミック振動子の共振周波数を希望する共振周波数のもの
に正確に合わせ、その後、載置した上記重りを接着剤等
により棒体に固定する。After that, while the resonance frequency of the piezoelectric ceramic oscillator is being measured by an impedance phase gain analyzer or the like on the rod erected on the piezoelectric ceramic oscillator, a weight is placed on the rod, whereby the piezoelectric ceramic oscillator is mounted. The resonance frequency is accurately adjusted to the desired resonance frequency, and then the placed weight is fixed to the rod body with an adhesive or the like.
【００１５】[0015]
【実施例】先ず、ＰＺＴ系セラミックス〔圧電定数（ｄ
31）：−３６０×１０-12 ｍ／ｖ、圧電出力定数
（ｇ31）：−８．７５×１０-3ｖ／Ｎ〕を常法によって
成形、焼成、分極して厚み５０μｍ、直径１０ｍｍ、孔
径２．９ｍｍの円板状の圧電セラミックスを製造した。
得られた上記圧電セラミックスを、Ｂｅ−Ｃｕミルハー
ドン材により作製した、厚み４０μｍ、直径１２．８ｍ
ｍ、孔径１．５ｍｍの円板状のシム材に接着剤（嫌気性
型紫外線硬化型変性アクリレート樹脂）を用いて貼り合
わせ、バイモルフ型でシリーズタイプの圧電セラミック
振動子を作製した。この圧電セラミック振動子の中心
に、ＳＫ材で作製した図２に示した寸法形状の棒体を立
設し、該棒体に、42アロイで作製した厚み４０μｍ、直
径１２．８ｍｍ、孔径１．５ｍｍの円板状の金属板を載
置・固定し、後記する重りを該圧電セラミック振動子に
触れない状態で載置し得るステージを形成した。この圧
電セラミック振動子の共振周波数を、直径１２ｍｍの周
辺固定の状態でインピーダンス フェイズゲイン アナ
ライザー（横河・ヒューレット・パッカード株式会社
製：４１９４Ａ）によって測定したところ、６７０Ｈｚ
程度であった。その後、上記圧電セラミック振動子の中
心に立設した棒体に、図１或いは図３に示すように糸半
田を溶かすことにより形成した円板状の重り（直径約８
ｍｍ、孔径２ｍｍで、重量０．５ｇ及び０．２５ｇの２
種）を、表１に示すようにその総重量を種々変更して載
置し、該圧電セラミック振動子の共振周波数の変化を各
々測定した。その測定結果を、表１に併記すると共に、
図４に図示した。なお共振周波数の測定は、重りの量を
種々に変更した圧電セラミック振動子を、直径１２ｍｍ
の周辺固定の状態でインピーダンス フェイズゲイン
アナライザー（横河・ヒューレット・パッカード株式会
社製：４１９４Ａ）によって各々測定した。EXAMPLES First, PZT ceramics [piezoelectric constant (d
31 ): −360 × 10 −12 m / v, piezoelectric output constant (g 31 ): −8.75 × 10 −3 v / N] by a conventional method, fired, and polarized to have a thickness of 50 μm and a diameter of 10 mm, A disk-shaped piezoelectric ceramic having a hole diameter of 2.9 mm was manufactured.
The obtained piezoelectric ceramics were made of Be-Cu mill hardened material, thickness 40 μm, diameter 12.8 m.
A disc-shaped shim material having a diameter of 1.5 mm and a hole diameter of 1.5 mm was bonded using an adhesive (anaerobic UV-curable modified acrylate resin) to produce a bimorph type series-type piezoelectric ceramic vibrator. At the center of this piezoelectric ceramic oscillator, a rod body made of SK material and having the dimensions and shape shown in FIG. 2 was erected, and a thickness of 40 μm, a diameter of 12.8 mm, and a hole diameter of 1. A 5 mm disk-shaped metal plate was placed and fixed, and a stage was formed on which a weight described later could be placed without touching the piezoelectric ceramic vibrator. The resonance frequency of this piezoelectric ceramic oscillator was measured by an impedance phase gain analyzer (Yokogawa / Hewlett-Packard: 4194A) with a diameter of 12 mm fixed at the periphery, and found to be 670 Hz.
It was about. Thereafter, as shown in FIG. 1 or FIG. 3, a disc-shaped weight (diameter about 8 mm) formed by melting the solder wire on the rod erected at the center of the piezoelectric ceramic vibrator.
mm, hole diameter 2mm, weight 0.5g and 0.25g 2
As shown in Table 1, the seeds) were placed with various changes in the total weight, and changes in the resonance frequency of the piezoelectric ceramic vibrator were measured. The measurement results are also shown in Table 1, and
It is illustrated in FIG. The resonance frequency was measured using a piezoelectric ceramic vibrator with various weights and a diameter of 12 mm.
Impedance phase gain when fixed around
Each was measured by an analyzer (Yokogawa / Hewlett-Packard Co., Ltd .: 4194A).
【００１６】[0016]
【表１】 [Table 1]
【００１７】表１及び図４より、圧電セラミック振動子
の中心に負荷する重りの量を変更すると、該圧電セラミ
ック振動子の共振周波数が変化することが判明する。こ
れにより、圧電セラミック振動子の中心に負荷する重り
の量を変更し、希望する共振周波数を正確に持つ圧電セ
ラミック振動子を製造できることが分かる。From Table 1 and FIG. 4, it is found that changing the amount of weight applied to the center of the piezoelectric ceramic vibrator changes the resonance frequency of the piezoelectric ceramic vibrator. As a result, it can be seen that the amount of weight applied to the center of the piezoelectric ceramic vibrator can be changed to manufacture a piezoelectric ceramic vibrator having a desired resonance frequency accurately.
【００１８】上記の方法により、希望する共振周波数
（４５０Ｈｚ）を持つ圧電セラミック振動子を得られた
重りの量（２．２５ｇ）で、該重りを接着剤（嫌気性型
変性アクリレート樹脂）で棒体に固定し、希望する低周
波の共振周波数を正確に持つ圧電セラミック振動子とし
た。A piezoelectric ceramic oscillator having a desired resonance frequency (450 Hz) was obtained by the above method, and the weight (2.25 g) was applied to the piezoelectric ceramic vibrator with an adhesive (anaerobic modified acrylate resin). It was fixed to the body, and it was a piezoelectric ceramic oscillator that had exactly the desired low resonance frequency.
【００１９】上記圧電セラミック振動子を、図５に示す
ようにＴ−Ｍ（Tooth Mobility）テスター用プローブの
振動子として使用したところ、４５０Ｈｚ程度の単一周
波数で共振し、繰り返し使用にも十分に耐えられる強度
を有する圧電セラミック振動子であることが判明した。As shown in FIG. 5, when the piezoelectric ceramic vibrator was used as a vibrator of a probe for a TM (Tooth Mobility) tester, it resonated at a single frequency of about 450 Hz, which was sufficient for repeated use. It has been found that the piezoelectric ceramic vibrator has a strength that can be endured.
【００２０】[0020]
【発明の効果】以上、説明した本発明にかかる圧電セラ
ミック振動子の製造方法によれば、希望する低周波の共
振周波数を正確に持ち、かつ小型で強度的にも満足でき
る圧電セラミック振動子を、歩留り良く製造することが
可能となる。As described above, according to the method of manufacturing a piezoelectric ceramic vibrator according to the present invention, a piezoelectric ceramic vibrator having a desired low resonance frequency, a small size, and a satisfactory strength can be obtained. Therefore, it becomes possible to manufacture with high yield.
【図１】本発明にかかる圧電セラミック振動子の製造方
法により作製した圧電セラミック振動子の一例を示した
斜視図である。FIG. 1 is a perspective view showing an example of a piezoelectric ceramic vibrator manufactured by a method for manufacturing a piezoelectric ceramic vibrator according to the present invention.
【図２】本発明において使用する重り載置用の棒体の一
例を示した斜視図である。FIG. 2 is a perspective view showing an example of a weight-mounting rod body used in the present invention.
【図３】本発明にかかる圧電セラミック振動子の製造方
法により作製した圧電セラミック振動子の一例を概念的
に示した側面図である。FIG. 3 is a side view conceptually showing an example of a piezoelectric ceramic vibrator manufactured by the method for manufacturing a piezoelectric ceramic vibrator according to the present invention.
【図４】圧電セラミック振動子に負荷する重りの量と、
共振周波数との関係を示した図である。FIG. 4 shows the amount of weight loaded on the piezoelectric ceramic vibrator,
It is the figure which showed the relationship with the resonance frequency.
【図５】本発明にかかる圧電セラミック振動子の製造方
法により作製した圧電セラミック振動子を、Ｔ−Ｍ（To
oth Mobility）テスター用プローブの振動子として使用
した状態を概念的に示した断面図である。FIG. 5 shows a piezoelectric ceramic resonator manufactured by the method for manufacturing a piezoelectric ceramic resonator according to the present invention,
(oth mobility) is a cross-sectional view conceptually showing a state in which the probe is used as a transducer.
───────────────────────────────────────────────────── フロントページの続き (72)発明者 伊原 健裕 埼玉県所沢市岩岡町716−７ (72)発明者 武藤 敏 埼玉県日高市高萩605−19−６ ─────────────────────────────────────────────────── ─── Continuation of the front page (72) Inventor Takehiro Ihara 716-7 Iwaoka-cho, Tokorozawa, Saitama Prefecture (72) Inventor Satoshi Muto 605-19-6 Takahagi, Hidaka City, Saitama Prefecture
Claims (2)
波数を持つ円板状の圧電セラミック振動子を製造し、該
円板状の圧電セラミック振動子の中心に、重りを前記圧
電セラミック振動子に触れない状態で載置し得る棒体を
立設し、該棒体に載置する重りの量を、圧電セラミック
振動子の共振周波数を測定しながら変更することによ
り、希望する共振周波数を正確に持つ圧電セラミック振
動子を製造することを特徴とする、圧電セラミック振動
子の製造方法。1. First, a disk-shaped piezoelectric ceramic vibrator having a resonance frequency higher than a desired resonance frequency is manufactured, and a weight is touched on the piezoelectric ceramic vibrator at the center of the disk-shaped piezoelectric ceramic vibrator. By setting up a rod that can be placed without it and changing the amount of weight placed on the rod while measuring the resonance frequency of the piezoelectric ceramic oscillator, have the desired resonance frequency accurately. A method of manufacturing a piezoelectric ceramic vibrator, which comprises manufacturing a piezoelectric ceramic vibrator.
以下の低周波の共振周波数であることを特徴とする、請
求項１記載の圧電セラミック振動子の製造方法。2. The desired resonance frequency is 700 Hz
The method of manufacturing a piezoelectric ceramic resonator according to claim 1, wherein the resonance frequency is the following low frequency.
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP27183895A JPH0993067A (en) | 1995-09-26 | 1995-09-26 | Production of piezoelectric ceramic oscillator |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP27183895A JPH0993067A (en) | 1995-09-26 | 1995-09-26 | Production of piezoelectric ceramic oscillator |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| JPH0993067A true JPH0993067A (en) | 1997-04-04 |
Family
ID=17505576
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP27183895A Pending JPH0993067A (en) | 1995-09-26 | 1995-09-26 | Production of piezoelectric ceramic oscillator |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPH0993067A (en) |
Cited By (4)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| WO2013090863A1 (en) * | 2011-12-16 | 2013-06-20 | Perimetrics, Llc | System and method for determining structural characteristics of an object |
| US9358089B2 (en) | 2010-06-19 | 2016-06-07 | Perimetrics, Llc | System and method for determining structural characteristics of an object |
| US9869606B2 (en) | 2011-06-18 | 2018-01-16 | Perimetrics, Llc | System and method for determining structural characteristics of an object |
| US11493415B2 (en) | 2016-12-30 | 2022-11-08 | Perimetrics, Inc. | System and method for determining structural characteristics of an object |
-
1995
- 1995-09-26 JP JP27183895A patent/JPH0993067A/en active Pending
Cited By (4)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| US9358089B2 (en) | 2010-06-19 | 2016-06-07 | Perimetrics, Llc | System and method for determining structural characteristics of an object |
| US9869606B2 (en) | 2011-06-18 | 2018-01-16 | Perimetrics, Llc | System and method for determining structural characteristics of an object |
| WO2013090863A1 (en) * | 2011-12-16 | 2013-06-20 | Perimetrics, Llc | System and method for determining structural characteristics of an object |
| US11493415B2 (en) | 2016-12-30 | 2022-11-08 | Perimetrics, Inc. | System and method for determining structural characteristics of an object |
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