JPH0979963A - Miniature hardness tester - Google Patents
Miniature hardness testerInfo
- Publication number
- JPH0979963A JPH0979963A JP23677395A JP23677395A JPH0979963A JP H0979963 A JPH0979963 A JP H0979963A JP 23677395 A JP23677395 A JP 23677395A JP 23677395 A JP23677395 A JP 23677395A JP H0979963 A JPH0979963 A JP H0979963A
- Authority
- JP
- Japan
- Prior art keywords
- indenter
- disturbance
- sample
- indenters
- measurement
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Granted
Links
Classifications
-
- G—PHYSICS
- G01—MEASURING; TESTING
- G01N—INVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIR CHEMICAL OR PHYSICAL PROPERTIES
- G01N2203/00—Investigating strength properties of solid materials by application of mechanical stress
- G01N2203/02—Details not specific for a particular testing method
- G01N2203/026—Specifications of the specimen
- G01N2203/0286—Miniature specimen; Testing on microregions of a specimen
Landscapes
- Investigating Strength Of Materials By Application Of Mechanical Stress (AREA)
Abstract
Description
【０００１】[0001]
【発明の属する技術分野】本発明は、圧子を試料に微小
荷重で押圧し、その押圧荷重に対する圧子の変位量など
を検出して試料の硬さを測定する微小硬度計に関する。BACKGROUND OF THE INVENTION 1. Field of the Invention The present invention relates to a micro hardness tester for pressing an indenter against a sample with a minute load and detecting the displacement of the indenter with respect to the pressing load to measure the hardness of the sample.
【０００２】[0002]
【従来の技術】本出願人による特開平５−８５０１９号
公報には、自動平衡型電子天秤タイプの荷重装置を用い
て圧子を試料に押圧し、その押圧荷重に対する圧子の変
位量を検出して試料の硬さを測定する微小硬度計が開示
されている。この種の微小硬度計では、圧子の試料への
押圧荷重が非常に微小なため、周囲に騒音が発生するだ
けで圧子が上下に振れて試料表面を複数回叩き、測定結
果に悪影響を与えることがある。図９は圧子が試料に当
接するまでの荷重装置への供給電流と圧子変位の時間的
変化を示す図であり、図中のＴは騒音等の外乱による圧
子の変位を示している。2. Description of the Related Art In Japanese Patent Laid-Open No. 5-85019 by the present applicant, an indenter is pressed against a sample by using a load device of an automatic balance type electronic balance type, and the displacement amount of the indenter with respect to the pressing load is detected. A micro hardness tester for measuring the hardness of a sample is disclosed. In this type of micro hardness tester, the pressing load of the indenter on the sample is very small, so the indenter sways up and down and taps the sample surface multiple times by only generating noise in the surroundings, which adversely affects the measurement results. There is. FIG. 9 is a diagram showing a change over time in the supply current to the loading device and the displacement of the indenter until the indenter comes into contact with the sample, and T in the figure indicates the displacement of the indenter due to disturbance such as noise.
【０００３】[0003]
【発明が解決しようとする課題】上記外乱による影響を
なくすために、従来は比較的静かな深夜に測定を行うな
どの措置をとっており、作業者の負担となっていた。ま
た測定者が測定結果を見て外乱の有無を判定しており、
このため初心者と熟練者とで測定データに差が生じるな
どの不都合もあった。In order to eliminate the influence of the above-mentioned disturbance, conventionally, measures such as taking measurements at a relatively quiet midnight have been taken, which is a burden on the operator. Also, the measurer judges the presence or absence of disturbance by looking at the measurement result,
For this reason, there is an inconvenience such as a difference in measurement data between a beginner and an expert.
【０００４】本発明の目的は、外乱の起きやすい環境下
でも外乱による測定結果の影響を極力抑えた微小硬度計
を提供することにある。An object of the present invention is to provide a micro hardness tester in which the influence of the measurement result due to the disturbance is suppressed as much as possible even in an environment where the disturbance easily occurs.
【０００５】[0005]
【課題を解決するための手段】一実施の形態を示す図１
に対応づけて説明すると、本発明は、圧子１５を駆動し
て試料ＴＰに押圧することにより試料ＴＰの硬さを測定
する微小硬度計に適用される。そして、請求項１の発明
は、異なるタイミングで検出された２つの圧子の変位量
の差から圧子１５に外乱が作用しているか否かを判定す
る判定手段６と、圧子１５の駆動開始から圧子１５が試
料ＴＰに当接するまでの間に判定手段６により外乱が作
用していると判定されると、圧子１５を停止させる駆動
制御手段６とを具備する。このように請求項１の発明で
は、圧子１５の駆動開始から圧子１５が試料ＴＰに当接
するまでの間に外乱が発生すると圧子１５が停止され
る。請求項２の発明は、上記判定手段６と、圧子１５が
試料ＴＰに押圧されているときに判定手段により外乱が
作用していると判定されると、外乱発生の旨を表示す
る、および／または測定を中止する制御手段６とを具備
する。このように請求項２の発明では、圧子１５が試料
ＴＰに押圧されているときに外乱が発生すると、外乱発
生の旨が表示される、および／または測定が中止され
る。FIG. 1 shows an embodiment of the present invention.
The present invention is applied to a micro hardness meter that measures the hardness of the sample TP by driving the indenter 15 and pressing it against the sample TP. Then, the invention of claim 1 determines the presence or absence of disturbance on the indenter 15 based on the difference between the displacement amounts of the two indenters detected at different timings, and the indenter from the start of driving the indenter 15. When the determination unit 6 determines that the disturbance is acting before the contact of the sample 15 with the sample TP, the drive control unit 6 that stops the indenter 15 is provided. As described above, according to the first aspect of the invention, if disturbance occurs between the start of driving the indenter 15 and the contact of the indenter 15 with the sample TP, the indenter 15 is stopped. According to the second aspect of the present invention, when the determination means 6 and the determination means determine that the disturbance is acting when the indenter 15 is pressed against the sample TP, the fact that the disturbance has occurred is displayed, and / Alternatively, the control means 6 for stopping the measurement is provided. As described above, according to the second aspect of the present invention, when a disturbance occurs while the indenter 15 is pressed against the sample TP, the fact that the disturbance occurs is displayed and / or the measurement is stopped.
【０００６】なお、本発明の構成を説明する上記課題を
解決するための手段の項では、本発明を分かり易くする
ために実施の形態の図を用いたが、これにより本発明が
実施の形態に限定されるものではない。[0006] In the section of the means for solving the above-mentioned problems, which explains the configuration of the present invention, the drawings of the embodiments are used to make the present invention easier to understand. However, the present invention is not limited to this.
【０００７】[0007]
【発明の実施の形態】図１〜図５により本発明の一実施
の形態を説明する。図１は本発明に係る微小硬度計の全
体構成図である。枠体１に昇降可能に設けられた試料台
２には、互いに直交するＸＹ方向に移動可能なステージ
３が着脱自在に設けられ、ステージ３上に試料ＴＰが載
置固定される。BEST MODE FOR CARRYING OUT THE INVENTION An embodiment of the present invention will be described with reference to FIGS. FIG. 1 is an overall configuration diagram of a micro hardness tester according to the present invention. A stage 3 movable in XY directions orthogonal to each other is detachably provided on a sample table 2 that is vertically movable on a frame body 1, and a sample TP is placed and fixed on the stage 3.
【０００８】枠体１内に設けられた自動平衡型電子天秤
タイプの荷重装置１０は、図２にも示すように、マグネ
ット１１ａおよび電磁コイル１１ｂから成る電磁力発生
装置１１を有し、この装置１１は制御装置６から電磁コ
イル１１ｂに供給される電流に応じた磁界を発生する。
電磁力発生装置１１の図示下方には、支点Ｆ回りに揺動
可能なレバー１２の一端が位置して電磁コイル１１ｂと
連結され、電磁力発生装置１１で発生する磁界によりレ
バー１２が支点Ｆを中心に回動する。電磁コイル１１ｂ
への供給電流を増加させることによりレバー１２の回動
量が増加し、供給電流を一定値に保持するとレバー１２
はそのときの回動姿勢で保持される。As shown in FIG. 2, a load device 10 of an automatic balance type electronic balance type provided in the frame 1 has an electromagnetic force generator 11 composed of a magnet 11a and an electromagnetic coil 11b. Reference numeral 11 generates a magnetic field according to the current supplied from the control device 6 to the electromagnetic coil 11b.
One end of a lever 12 which is swingable around a fulcrum F is located below the electromagnetic force generator 11 and is connected to an electromagnetic coil 11b. The lever 12 moves the fulcrum F by the magnetic field generated by the electromagnetic force generator 11. Rotate to the center. Electromagnetic coil 11b
The amount of rotation of the lever 12 increases by increasing the supply current to the lever 12, and if the supply current is kept at a constant value,
Is held in the rotation posture at that time.
【０００９】レバー１２の他端は板ばね１３およびブラ
ケットＢＲを介して圧子保持部材１４に連結され、保持
部材１４の図示下端には上記ステージ３上の試料ＴＰを
押圧するための圧子１５が取付けられている。１６は、
一端が保持部材１４の上下部に、他端が固定部１７にそ
れぞれ回動可能に連結された一対のリンクであり、これ
らのリンク１６により平行リンク機構が構成される。レ
バー１２の回動に従って保持部材１４すなわち圧子１５
は、平行リンク機構の作用により同一姿勢を保ちつつ昇
降する。The other end of the lever 12 is connected to an indenter holding member 14 via a leaf spring 13 and a bracket BR, and an indenter 15 for pressing the sample TP on the stage 3 is attached to the lower end of the holding member 14 in the figure. Has been. 16 is
One end is a pair of links rotatably connected to the upper and lower portions of the holding member 14, and the other end is rotatably connected to the fixed portion 17, and these links 16 constitute a parallel link mechanism. In accordance with the rotation of the lever 12, the holding member 14, that is, the indenter 15
Moves up and down while maintaining the same posture by the action of the parallel link mechanism.
【００１０】図１の４は圧子１５の変位量を検出する差
動トランス式の変位検出器であり、その検出結果は変位
測定器（アンプ）５を介して制御装置６に入力される。
制御装置６は、変位測定器５からの入力信号と、圧子１
５による試料ＴＰへの押圧荷重（電磁コイル１１ｂへの
供給電流から得られる）とに基づいて所定の演算処理を
行い、試料ＴＰの硬さデータとして出力する。また制御
装置６は、変位測定器５からの入力信号に基づいて外乱
発生の有無を検出し、その検出結果に基づいて圧子１５
の動作を制御する。制御装置６には表示装置７が接続さ
れ、種々の情報を表示する。Reference numeral 4 in FIG. 1 denotes a differential transformer type displacement detector for detecting the amount of displacement of the indenter 15, and the detection result is input to the control device 6 via the displacement measuring device (amplifier) 5.
The control device 6 receives the input signal from the displacement measuring device 5 and the indenter 1.
Predetermined arithmetic processing is performed based on the pressing load (obtained from the current supplied to the electromagnetic coil 11b) on the sample TP by 5 and output as hardness data of the sample TP. Further, the control device 6 detects the presence or absence of disturbance occurrence based on the input signal from the displacement measuring device 5, and based on the detection result, the indenter 15
Control the behavior of. A display device 7 is connected to the control device 6 and displays various information.
【００１１】なお、２０は補助的装置としての光学モニ
タ装置であり、対物レンズ２１や接眼レンズ２２等を備
え、試料ＴＰの表面における試験位置を測定したり、圧
子１５によって試料表面に形成された窪みの状態を作業
者が観察するために用いられる。Reference numeral 20 denotes an optical monitor device as an auxiliary device, which is provided with an objective lens 21, an eyepiece lens 22 and the like, which measures a test position on the surface of the sample TP and is formed on the sample surface by an indenter 15. It is used by the operator to observe the state of the depression.
【００１２】図３により制御装置６による硬さ測定動作
の制御手順を説明する。所定の測定開始操作がなされる
とこのプログラムが起動され、ステップＳ１で外乱の有
無を判定する。この判定は次のようにして行う。図４は
電磁コイル１１ｂに供給する電流と圧子変位量の時間的
変化を示すものである。通常は供給電流の増加に従って
圧子１５の下方つまり試料ＴＰ側への変位量が増加する
が、外乱が発生するとＴで示すように変位量が小刻みに
上下する。そこで本実施の形態では、電流増加時に所定
時間ごとに変位測定器５から入力される圧子１５の初期
位置からの変位量Ｄ（ｔ）をモニタし、前回の値Ｄ（ｔ
−１）と比較してＤ（ｔ）≦Ｄ（ｔ−１）の場合、換言
すれば、圧子１５を下降させようとしているにも拘らず
圧子１５の上昇あるいは停滞が検出された場合に外乱発
生と判断する。なお、測定開始当初は前回の圧子１５の
変位量Ｄ（ｔ−１）が存在しないから上記比較が行え
ず、この場合は外乱なしと判断する。The control procedure of the hardness measuring operation by the controller 6 will be described with reference to FIG. This program is started when a predetermined measurement start operation is performed, and the presence or absence of disturbance is determined in step S1. This determination is performed as follows. FIG. 4 shows a temporal change in the current supplied to the electromagnetic coil 11b and the indenter displacement amount. Normally, the displacement amount to the lower side of the indenter 15, that is, to the sample TP side increases as the supply current increases, but when disturbance occurs, the displacement amount fluctuates little by little as indicated by T. Therefore, in this embodiment, the displacement amount D (t) from the initial position of the indenter 15 input from the displacement measuring device 5 is monitored every predetermined time when the current is increased, and the previous value D (t
In the case of D (t) ≦ D (t−1) compared with −1), in other words, when the indenter 15 is going to be moved down, the disturbance or the stagnation of the indenter 15 is detected. Determined to occur. At the beginning of the measurement, since the previous displacement amount D (t-1) of the indenter 15 does not exist, the above comparison cannot be performed. In this case, it is determined that there is no disturbance.
【００１３】外乱発生と判断した場合はステップＳ２で
電流の増加を停止して圧子１５を停止させ、予め決めら
れた所定時間Δｔだけ待機してステップＳ１に戻る。こ
の所定時間Δｔは、発生した外乱が収まるのに十分な時
間とされる。外乱なしと判断した場合にはステップＳ３
で電磁コイル１１ｂへの供給電流を増加させ、圧子１５
を下降させる。ステップＳ４では圧子１５が試料ＴＰに
当接したか否かを判定し、当接していなければステップ
Ｓ１に戻って上述の処理を繰返し、当接していればステ
ップＳ５に進む。当接したか否かは、例えば圧子１５の
単位時間の変位量が所定値未満になったか否かで判断す
ればよい。When it is judged that a disturbance has occurred, the increase of the current is stopped to stop the indenter 15 in step S2, and the process returns to step S1 after waiting for a predetermined time Δt. The predetermined time Δt is set to a time sufficient for the generated disturbance to subside. If it is determined that there is no disturbance, step S3
To increase the current supplied to the electromagnetic coil 11b,
To lower. In step S4, it is determined whether or not the indenter 15 has come into contact with the sample TP. If not in contact, the process returns to step S1 to repeat the above processing, and if in contact, the process proceeds to step S5. Whether or not the contact has occurred may be determined by, for example, whether or not the displacement amount of the indenter 15 per unit time is less than a predetermined value.
【００１４】ステップＳ５では圧子１５の変位量を読み
取り、電磁コイル１１ｂへの供給電流の増加を継続しつ
つステップＳ６に進む。圧子１５が試料ＴＰに当接した
後は供給電流の増加に従って圧子１５の試料ＴＰへの押
圧荷重が増加し、圧子１５によって試料表面に形成され
る窪みの深さが増加する。ステップＳ６では上述と同様
にして外乱の有無を判定し、外乱が生じた場合にはステ
ップＳ７でフラグを設定してステップＳ８に進み、外乱
なしの場合にはそのままステップＳ８に進む。ステップ
Ｓ８では測定終了か否かを判定し、電磁コイル１１ｂへ
の供給電流から求まる押圧荷重がまだ予め設定された設
定荷重に達していなければ測定終了でないと判断してス
テップＳ５に戻り、上述の処理を繰返す。ステップＳ５
での変位読み取りは、圧子１５の試料ＴＰへの押圧力が
単位量だけ増加するたびに行われる。In step S5, the displacement amount of the indenter 15 is read, and the process proceeds to step S6 while continuing to increase the current supplied to the electromagnetic coil 11b. After the indenter 15 contacts the sample TP, the pressing load of the indenter 15 on the sample TP increases as the supply current increases, and the depth of the recess formed on the sample surface by the indenter 15 increases. In step S6, the presence or absence of disturbance is determined in the same manner as described above. If a disturbance occurs, a flag is set in step S7 and the process proceeds to step S8. If there is no disturbance, the process proceeds directly to step S8. In step S8, it is determined whether or not the measurement is finished, and if the pressing load obtained from the current supplied to the electromagnetic coil 11b has not reached the preset set load, it is determined that the measurement is not finished and the process returns to step S5, and Repeat the process. Step S5
The displacement reading is performed every time the pressing force of the indenter 15 against the sample TP increases by a unit amount.
【００１５】押圧荷重が設定荷重に達していれば測定終
了と判断してステップＳ９に進み、フラグ設定の有無を
判定する。フラグが設定されていれば、ステップＳ１０
で表示装置７に外乱有りの旨の表示を行って処理を終了
し、フラグが設定されていなければ表示を行わずに終了
する。以上の手順により例えば図５に示すような荷重−
変位（窪みの深さ）特性が得られる。図５（ａ）は外乱
なしの場合を、図５（ｂ）は外乱ありの場合をそれぞれ
示している。If the pressing load has reached the set load, it is judged that the measurement is completed and the process proceeds to step S9 to judge whether or not the flag is set. If the flag is set, step S10
Then, the display device 7 displays that there is a disturbance, and the process ends. If the flag is not set, the process ends without displaying. By the above procedure, for example, the load as shown in FIG.
The displacement (depth of the depression) characteristic is obtained. FIG. 5A shows the case without disturbance, and FIG. 5B shows the case with disturbance.
【００１６】本実施の形態では、圧子１５が試料ＴＰに
当接するまでの期間に外乱が発生すると、図４に示すよ
うに圧子１５の下降が停止され、外乱が収まるのに十分
な時間Δｔが経過してから再び下降が開始される。した
がって、圧子１５が試料ＴＰに当接するときに試料ＴＰ
の表面を叩くおそれがなく、異常データの発生を最小限
に抑制できる。一方、圧子１５が試料ＴＰに当接してか
らは、例えば図５（ｂ）のように外乱が発生した場合に
その旨が表示装置７に表示される。この表示が測定者に
データの再採取を促すことになり、測定値の信頼性を高
めることができる。なお、外乱発生の旨の表示は測定中
に行ってもよいし、測定後に行ってもよい。In the present embodiment, when a disturbance occurs until the indenter 15 comes into contact with the sample TP, the descending of the indenter 15 is stopped as shown in FIG. 4, and a sufficient time Δt for the disturbance to settle. After the elapse, the descent is started again. Therefore, when the indenter 15 contacts the sample TP, the sample TP
There is no danger of hitting the surface of the, and the occurrence of abnormal data can be suppressed to a minimum. On the other hand, after the indenter 15 comes into contact with the sample TP, when the disturbance occurs, for example, as shown in FIG. 5B, the fact is displayed on the display device 7. This display prompts the measurer to recollect the data, and the reliability of the measured value can be improved. The display of the occurrence of disturbance may be displayed during the measurement or after the measurement.
【００１７】以上の実施の形態の構成において、変位検
出装置４が検出手段を、制御装置６が駆動制御手段およ
び制御手段をそれぞれ構成する。In the configuration of the above embodiment, the displacement detection device 4 constitutes detection means, and the control device 6 constitutes drive control means and control means.
【００１８】以上では、圧子１５が試料ＴＰを押圧して
いるときに外乱が発生すると、その旨の表示を行うよう
にしたが、例えば図６に示すように、外乱の発生に伴っ
て測定を中止するようにしてもよい。In the above description, if a disturbance occurs while the indenter 15 is pressing the sample TP, a message to that effect is displayed. However, as shown in FIG. 6, for example, measurement is performed in accordance with the occurrence of the disturbance. It may be canceled.
【００１９】図７は外乱の大きさに応じて処理を変える
ようにした他の実施の形態を示している。ステップＳ６
で外乱発生と判断されるとステップＳ２１に進み、外乱
の大きさが基準値以上か否かを判定する。基準値以上の
場合、つまり外乱により測定値の信頼性が著しく低下す
るおそれがある場合には測定を中止し、基準値未満の場
合、つまり外乱による影響がさほど問題にならない場合
にはステップＳ７でフラグを設定してステップＳ８に進
む。フラグが設定された場合には測定そのものは中止さ
れないが、外乱が発生した旨の表示がなされる。上記基
準値は設定荷重に応じて予め入力された値が用いられ、
設定荷重が大きいほど基準値は大きい。FIG. 7 shows another embodiment in which the processing is changed according to the magnitude of the disturbance. Step S6
When it is determined that the disturbance has occurred, the process proceeds to step S21, and it is determined whether the magnitude of the disturbance is equal to or larger than the reference value. If it is equal to or higher than the reference value, that is, if the reliability of the measured value may significantly decrease due to disturbance, the measurement is stopped, and if it is less than the reference value, that is, if the influence of the disturbance does not cause much problem, then in step S7. The flag is set and the process proceeds to step S8. When the flag is set, the measurement itself is not stopped, but an indication that disturbance has occurred is displayed. The reference value is a value input in advance according to the set load,
The larger the set load, the larger the reference value.
【００２０】図８は外乱発生時に上記設定荷重の大きさ
に応じて処理を変えるようにした他の実施の形態を示し
ている。ステップＳ６で外乱発生と判断されるとステッ
プＳ３１に進み、設定荷重が基準値以上か否かを判定す
る。基準値未満の場合には外乱が測定値に大きな影響を
及ぼすものと判断して測定を中止し、基準値以上の場合
には外乱が測定値にさほど大きな影響を与えないと判断
してステップＳ７でフラグを設定する。フラグが設定さ
れた場合には測定そのものは中止されないが、外乱が発
生した旨の表示がなされる。FIG. 8 shows another embodiment in which the processing is changed according to the magnitude of the set load when a disturbance occurs. If it is determined in step S6 that a disturbance has occurred, the process proceeds to step S31, and it is determined whether the set load is equal to or greater than the reference value. When it is less than the reference value, it is determined that the disturbance has a great influence on the measured value and the measurement is stopped. When it is more than the reference value, it is determined that the disturbance does not have a great influence on the measured value and the step S7 is performed. To set the flag. When the flag is set, the measurement itself is not stopped, but an indication that disturbance has occurred is displayed.
【００２１】なお以上では、Ｄ（ｔ）≦Ｄ（ｔ−１）が
判定されると外乱発生と判断するようにしたが、例えば
各タイミングにおける圧子変位Ｄ（ｔ）から圧子変位の
変化率ΔＤを求め、この変化率ΔＤから外乱の有無を検
出するようにしてもよい。また、圧子の駆動機構の構成
は自動平衡型電子天秤タイプのものに限定されない。さ
らに、圧子により試料表面に形成された窪みの深さを硬
さデータとして検出する例を示したが、例えば窪みの幅
を硬さデータとして検出するものにも本発明を適用でき
る。In the above description, when D (t) ≤D (t-1) is determined, it is determined that the disturbance has occurred. For example, the rate of change ΔD of the indenter displacement from the indenter displacement D (t) at each timing. The presence or absence of disturbance may be detected from this change rate ΔD. The structure of the indenter drive mechanism is not limited to the automatic balance type electronic balance type. Further, although an example in which the depth of the depression formed on the sample surface by the indenter is detected as hardness data has been shown, the present invention can be applied to, for example, one in which the width of the depression is detected as hardness data.
【００２２】[0022]
【発明の効果】請求項１の発明によれば、圧子の駆動開
始から圧子が試料に当接するまでの間に外乱発生と判定
されると圧子を停止するようにしたので、圧子が試料に
当接するときに圧子が試料表面を叩くことがなく、測定
精度の向上が図れる。したがって、わざわざ深夜に測定
を行う必要がなく、作業者の負担が軽減される。請求項
２の発明によれば、圧子が試料に押圧されているときに
所定値以上の外乱が検出されると、外乱発生の旨を表示
するか測定を中止するようにした。上記外乱発生の表示
を行うようにすれば、測定者の熟練度に拘らず再測定が
必要か否かを的確に判断できる。また測定を中止するよ
うにすれば、外乱の影響による精度の低い測定結果が出
力されることがなくなる。According to the first aspect of the invention, the indenter is stopped when it is determined that a disturbance has occurred between the start of driving the indenter and the contact of the indenter with the sample. The indenter does not hit the surface of the sample at the time of contact, and the measurement accuracy can be improved. Therefore, it is not necessary to take measurements at midnight, and the burden on the operator is reduced. According to the second aspect of the invention, when a disturbance having a predetermined value or more is detected while the indenter is pressed against the sample, the fact that the disturbance is generated is displayed or the measurement is stopped. By displaying the occurrence of the disturbance, it is possible to accurately determine whether or not the remeasurement is necessary regardless of the skill of the measurer. If the measurement is stopped, the measurement result with low accuracy due to the influence of disturbance is not output.
【図１】本発明の一実施の形態に係る微小硬度計の全体
構成を示す構成図。FIG. 1 is a configuration diagram showing an overall configuration of a micro hardness tester according to an embodiment of the present invention.
【図２】荷重装置の詳細を示す図。FIG. 2 is a diagram showing details of a load device.
【図３】硬さ測定処理の制御手順を示すフローチャー
ト。FIG. 3 is a flowchart showing a control procedure of hardness measurement processing.
【図４】圧子が試料に当接する前の荷重装置への供給電
流および圧子変位の時間的変化を示す図。FIG. 4 is a diagram showing a change over time in the supply current to the loading device and the displacement of the indenter before the indenter contacts the sample.
【図５】圧子が試料に当接した後の押圧荷重と圧子変位
との関係を示す図。FIG. 5 is a diagram showing a relationship between a pressing load and an indenter displacement after the indenter contacts the sample.
【図６】他の実施の形態における制御手順を示すフロー
チャート。FIG. 6 is a flowchart showing a control procedure according to another embodiment.
【図７】他の実施の形態における制御手順を示すフロー
チャート。FIG. 7 is a flowchart showing a control procedure according to another embodiment.
【図８】他の実施の形態における制御手順を示すフロー
チャート。FIG. 8 is a flowchart showing a control procedure according to another embodiment.
【図９】従来試験機における圧子が試料に当接した後の
押圧荷重と圧子変位との関係を示す図。FIG. 9 is a diagram showing a relationship between a pressing load and an indenter displacement after the indenter comes into contact with a sample in a conventional testing machine.
３ ステージ ４ 変位検出器 ５ 変位測定器 ６ 制御装置 ７ 表示装置 １０ 荷重装置 １５ 圧子 ２０ 光学モニタ ＴＰ 試料 3 Stage 4 Displacement Detector 5 Displacement Measuring Device 6 Control Device 7 Display Device 10 Loading Device 15 Indenter 20 Optical Monitor TP Sample
Claims (2)
り試料の硬さを測定する微小硬度計において、異なるタ
イミングで検出された２つの圧子の変位量の差から前記
圧子に外乱が作用しているか否かを判定する判定手段
と、前記圧子の駆動開始から圧子が試料に当接するまで
の間に前記判定手段により外乱が作用していると判定さ
れると、前記圧子を停止させる駆動制御手段とを具備す
ることを特徴とする微小硬度計。1. In a micro hardness tester for measuring hardness of a sample by driving the indenter and pressing it against the sample, a disturbance acts on the indenter due to a difference in displacement amount of two indenters detected at different timings. And a drive control for stopping the indenter when it is determined by the determination means that disturbance is acting between the start of driving the indenter and the contact of the indenter with the sample. A micro hardness tester comprising:
り試料の硬さを測定する微小硬度計において、異なるタ
イミングで検出された２つの圧子の変位量の差から前記
圧子に外乱が作用しているか否かを判定する判定手段
と、前記圧子が前記試料に押圧されているときに前記判
定手段により外乱が作用していると判定されると、外乱
発生の旨を表示する、および／または測定を中止する制
御手段とを具備することを特徴とする微小硬度計。2. In a micro hardness tester for measuring hardness of a sample by driving the indenter and pressing it against the sample, a disturbance acts on the indenter due to a difference in displacement amount of two indenters detected at different timings. Determining means for determining whether or not there is a disturbance, and when the determining means determines that a disturbance is acting when the indenter is pressed against the sample, displays that disturbance has occurred, and / or A micro hardness tester comprising: a control means for stopping the measurement.
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP23677395A JP3440653B2 (en) | 1995-09-14 | 1995-09-14 | Micro hardness tester |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP23677395A JP3440653B2 (en) | 1995-09-14 | 1995-09-14 | Micro hardness tester |
Publications (2)
| Publication Number | Publication Date |
|---|---|
| JPH0979963A true JPH0979963A (en) | 1997-03-28 |
| JP3440653B2 JP3440653B2 (en) | 2003-08-25 |
Family
ID=17005587
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP23677395A Expired - Fee Related JP3440653B2 (en) | 1995-09-14 | 1995-09-14 | Micro hardness tester |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JP3440653B2 (en) |
Cited By (10)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JP2004251698A (en) * | 2003-02-19 | 2004-09-09 | Akashi Corp | Hardness tester |
| JP2006220493A (en) * | 2005-02-09 | 2006-08-24 | Mitsutoyo Corp | Material testing machine |
| JP2007155460A (en) * | 2005-12-02 | 2007-06-21 | Shimadzu Corp | Low-temperature type hardness meter |
| JP2009063480A (en) * | 2007-09-07 | 2009-03-26 | Citizen Holdings Co Ltd | Hardness meter |
| JP2011013033A (en) * | 2009-06-30 | 2011-01-20 | Wd Media Singapore Pte Ltd | Nano indentation test method and apparatus of the same |
| JP2012247388A (en) * | 2011-05-31 | 2012-12-13 | Shimadzu Corp | Hardness testing machine |
| DE112006003935B4 (en) * | 2006-06-20 | 2012-12-20 | Shimadzu Corp. | Material testing machine of the penetration type, test method and test program product |
| JP2013140115A (en) * | 2012-01-06 | 2013-07-18 | Mitsutoyo Corp | Hardness tester and program |
| CN108827807A (en) * | 2017-04-28 | 2018-11-16 | 株式会社三丰 | Hardness-testing device and non-transitory computer-readable medium |
| CN110987690A (en) * | 2018-10-03 | 2020-04-10 | 株式会社三丰 | Hardness tester |
-
1995
- 1995-09-14 JP JP23677395A patent/JP3440653B2/en not_active Expired - Fee Related
Cited By (12)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JP2004251698A (en) * | 2003-02-19 | 2004-09-09 | Akashi Corp | Hardness tester |
| JP2006220493A (en) * | 2005-02-09 | 2006-08-24 | Mitsutoyo Corp | Material testing machine |
| JP2007155460A (en) * | 2005-12-02 | 2007-06-21 | Shimadzu Corp | Low-temperature type hardness meter |
| JP4711067B2 (en) * | 2005-12-02 | 2011-06-29 | 株式会社島津製作所 | Low temperature type hardness tester |
| DE112006003935B4 (en) * | 2006-06-20 | 2012-12-20 | Shimadzu Corp. | Material testing machine of the penetration type, test method and test program product |
| JP2009063480A (en) * | 2007-09-07 | 2009-03-26 | Citizen Holdings Co Ltd | Hardness meter |
| JP2011013033A (en) * | 2009-06-30 | 2011-01-20 | Wd Media Singapore Pte Ltd | Nano indentation test method and apparatus of the same |
| JP2012247388A (en) * | 2011-05-31 | 2012-12-13 | Shimadzu Corp | Hardness testing machine |
| JP2013140115A (en) * | 2012-01-06 | 2013-07-18 | Mitsutoyo Corp | Hardness tester and program |
| US9291538B2 (en) | 2012-01-06 | 2016-03-22 | Mitutoyo Corporation | Hardness tester and program |
| CN108827807A (en) * | 2017-04-28 | 2018-11-16 | 株式会社三丰 | Hardness-testing device and non-transitory computer-readable medium |
| CN110987690A (en) * | 2018-10-03 | 2020-04-10 | 株式会社三丰 | Hardness tester |
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| Publication number | Publication date |
|---|---|
| JP3440653B2 (en) | 2003-08-25 |
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