JPH097763A - Manufacture of organic thin film el element - Google Patents
Manufacture of organic thin film el elementInfo
- Publication number
- JPH097763A JPH097763A JP7153155A JP15315595A JPH097763A JP H097763 A JPH097763 A JP H097763A JP 7153155 A JP7153155 A JP 7153155A JP 15315595 A JP15315595 A JP 15315595A JP H097763 A JPH097763 A JP H097763A
- Authority
- JP
- Japan
- Prior art keywords
- layer
- thin film
- organic thin
- organic
- film
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Granted
Links
- 239000010409 thin film Substances 0.000 title claims abstract description 53
- 238000004519 manufacturing process Methods 0.000 title claims description 14
- 239000010408 film Substances 0.000 claims abstract description 35
- 229920005989 resin Polymers 0.000 claims abstract description 23
- 239000011347 resin Substances 0.000 claims abstract description 23
- 238000000034 method Methods 0.000 claims description 26
- 239000011230 binding agent Substances 0.000 claims description 10
- 239000006185 dispersion Substances 0.000 claims description 5
- 239000011368 organic material Substances 0.000 claims description 4
- 230000002093 peripheral effect Effects 0.000 claims description 4
- 229910052751 metal Inorganic materials 0.000 abstract description 11
- 239000002184 metal Substances 0.000 abstract description 11
- 230000005525 hole transport Effects 0.000 abstract description 9
- 229920006267 polyester film Polymers 0.000 abstract description 8
- 238000010030 laminating Methods 0.000 abstract 2
- 238000005485 electric heating Methods 0.000 abstract 1
- 239000010410 layer Substances 0.000 description 81
- 239000003795 chemical substances by application Substances 0.000 description 5
- 239000000463 material Substances 0.000 description 4
- -1 tris (8-quinolinol) aluminum Chemical compound 0.000 description 4
- YMWUJEATGCHHMB-UHFFFAOYSA-N Dichloromethane Chemical compound ClCCl YMWUJEATGCHHMB-UHFFFAOYSA-N 0.000 description 3
- WHXSMMKQMYFTQS-UHFFFAOYSA-N Lithium Chemical compound [Li] WHXSMMKQMYFTQS-UHFFFAOYSA-N 0.000 description 3
- 229910052782 aluminium Inorganic materials 0.000 description 3
- XAGFODPZIPBFFR-UHFFFAOYSA-N aluminium Chemical compound [Al] XAGFODPZIPBFFR-UHFFFAOYSA-N 0.000 description 3
- 230000015572 biosynthetic process Effects 0.000 description 3
- 238000010549 co-Evaporation Methods 0.000 description 3
- 239000011521 glass Substances 0.000 description 3
- 238000002347 injection Methods 0.000 description 3
- 239000007924 injection Substances 0.000 description 3
- 229910052744 lithium Inorganic materials 0.000 description 3
- 239000000243 solution Substances 0.000 description 3
- 238000004544 sputter deposition Methods 0.000 description 3
- WYURNTSHIVDZCO-UHFFFAOYSA-N Tetrahydrofuran Chemical compound C1CCOC1 WYURNTSHIVDZCO-UHFFFAOYSA-N 0.000 description 2
- 238000000576 coating method Methods 0.000 description 2
- 238000007796 conventional method Methods 0.000 description 2
- 238000003618 dip coating Methods 0.000 description 2
- PCHJSUWPFVWCPO-UHFFFAOYSA-N gold Chemical compound [Au] PCHJSUWPFVWCPO-UHFFFAOYSA-N 0.000 description 2
- 229910052738 indium Inorganic materials 0.000 description 2
- APFVFJFRJDLVQX-UHFFFAOYSA-N indium atom Chemical compound [In] APFVFJFRJDLVQX-UHFFFAOYSA-N 0.000 description 2
- 229920005990 polystyrene resin Polymers 0.000 description 2
- 229920000915 polyvinyl chloride Polymers 0.000 description 2
- 239000004800 polyvinyl chloride Substances 0.000 description 2
- 238000007789 sealing Methods 0.000 description 2
- 239000000758 substrate Substances 0.000 description 2
- 238000001771 vacuum deposition Methods 0.000 description 2
- 238000007740 vapor deposition Methods 0.000 description 2
- UWRZIZXBOLBCON-VOTSOKGWSA-N (e)-2-phenylethenamine Chemical class N\C=C\C1=CC=CC=C1 UWRZIZXBOLBCON-VOTSOKGWSA-N 0.000 description 1
- BCMCBBGGLRIHSE-UHFFFAOYSA-N 1,3-benzoxazole Chemical class C1=CC=C2OC=NC2=C1 BCMCBBGGLRIHSE-UHFFFAOYSA-N 0.000 description 1
- YZVWKHVRBDQPMQ-UHFFFAOYSA-N 1-aminopyrene Chemical class C1=C2C(N)=CC=C(C=C3)C2=C2C3=CC=CC2=C1 YZVWKHVRBDQPMQ-UHFFFAOYSA-N 0.000 description 1
- ZOKIJILZFXPFTO-UHFFFAOYSA-N 4-methyl-n-[4-[1-[4-(4-methyl-n-(4-methylphenyl)anilino)phenyl]cyclohexyl]phenyl]-n-(4-methylphenyl)aniline Chemical compound C1=CC(C)=CC=C1N(C=1C=CC(=CC=1)C1(CCCCC1)C=1C=CC(=CC=1)N(C=1C=CC(C)=CC=1)C=1C=CC(C)=CC=1)C1=CC=C(C)C=C1 ZOKIJILZFXPFTO-UHFFFAOYSA-N 0.000 description 1
- CFNMUZCFSDMZPQ-GHXNOFRVSA-N 7-[(z)-3-methyl-4-(4-methyl-5-oxo-2h-furan-2-yl)but-2-enoxy]chromen-2-one Chemical compound C=1C=C2C=CC(=O)OC2=CC=1OC/C=C(/C)CC1OC(=O)C(C)=C1 CFNMUZCFSDMZPQ-GHXNOFRVSA-N 0.000 description 1
- 239000005725 8-Hydroxyquinoline Substances 0.000 description 1
- XDTMQSROBMDMFD-UHFFFAOYSA-N Cyclohexane Chemical compound C1CCCCC1 XDTMQSROBMDMFD-UHFFFAOYSA-N 0.000 description 1
- FYYHWMGAXLPEAU-UHFFFAOYSA-N Magnesium Chemical group [Mg] FYYHWMGAXLPEAU-UHFFFAOYSA-N 0.000 description 1
- NRCMAYZCPIVABH-UHFFFAOYSA-N Quinacridone Chemical compound N1C2=CC=CC=C2C(=O)C2=C1C=C1C(=O)C3=CC=CC=C3NC1=C2 NRCMAYZCPIVABH-UHFFFAOYSA-N 0.000 description 1
- 229920002433 Vinyl chloride-vinyl acetate copolymer Polymers 0.000 description 1
- 230000004888 barrier function Effects 0.000 description 1
- KAKZBPTYRLMSJV-UHFFFAOYSA-N butadiene group Chemical class C=CC=C KAKZBPTYRLMSJV-UHFFFAOYSA-N 0.000 description 1
- 239000000969 carrier Substances 0.000 description 1
- 239000011248 coating agent Substances 0.000 description 1
- 230000006866 deterioration Effects 0.000 description 1
- 230000005611 electricity Effects 0.000 description 1
- 239000007772 electrode material Substances 0.000 description 1
- 238000005401 electroluminescence Methods 0.000 description 1
- 239000012992 electron transfer agent Substances 0.000 description 1
- AMGQUBHHOARCQH-UHFFFAOYSA-N indium;oxotin Chemical compound [In].[Sn]=O AMGQUBHHOARCQH-UHFFFAOYSA-N 0.000 description 1
- 239000005001 laminate film Substances 0.000 description 1
- 239000007788 liquid Substances 0.000 description 1
- 229910052749 magnesium Inorganic materials 0.000 description 1
- 239000011777 magnesium Substances 0.000 description 1
- 150000004866 oxadiazoles Chemical class 0.000 description 1
- 150000007978 oxazole derivatives Chemical class 0.000 description 1
- 229960003540 oxyquinoline Drugs 0.000 description 1
- DGBWPZSGHAXYGK-UHFFFAOYSA-N perinone Chemical class C12=NC3=CC=CC=C3N2C(=O)C2=CC=C3C4=C2C1=CC=C4C(=O)N1C2=CC=CC=C2N=C13 DGBWPZSGHAXYGK-UHFFFAOYSA-N 0.000 description 1
- 238000000206 photolithography Methods 0.000 description 1
- 229920003227 poly(N-vinyl carbazole) Polymers 0.000 description 1
- 229920000515 polycarbonate Polymers 0.000 description 1
- 239000004417 polycarbonate Substances 0.000 description 1
- 150000004033 porphyrin derivatives Chemical class 0.000 description 1
- 238000003825 pressing Methods 0.000 description 1
- 238000007650 screen-printing Methods 0.000 description 1
- 239000003566 sealing material Substances 0.000 description 1
- 229910052709 silver Inorganic materials 0.000 description 1
- 239000004332 silver Substances 0.000 description 1
- 239000002356 single layer Substances 0.000 description 1
- 239000002904 solvent Substances 0.000 description 1
- YLQBMQCUIZJEEH-UHFFFAOYSA-N tetrahydrofuran Natural products C=1C=COC=1 YLQBMQCUIZJEEH-UHFFFAOYSA-N 0.000 description 1
- 150000004867 thiadiazoles Chemical class 0.000 description 1
Classifications
-
- H—ELECTRICITY
- H10—SEMICONDUCTOR DEVICES; ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
- H10K—ORGANIC ELECTRIC SOLID-STATE DEVICES
- H10K71/00—Manufacture or treatment specially adapted for the organic devices covered by this subclass
- H10K71/50—Forming devices by joining two substrates together, e.g. lamination techniques
-
- H—ELECTRICITY
- H10—SEMICONDUCTOR DEVICES; ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
- H10K—ORGANIC ELECTRIC SOLID-STATE DEVICES
- H10K50/00—Organic light-emitting devices
- H10K50/80—Constructional details
- H10K50/84—Passivation; Containers; Encapsulations
Landscapes
- Engineering & Computer Science (AREA)
- Manufacturing & Machinery (AREA)
- Electroluminescent Light Sources (AREA)
- Luminescent Compositions (AREA)
Abstract
Description
【０００１】[0001]
【産業上の利用分野】本発明は、有機薄膜のＥＬ（エレ
クトロルミネッセンス）現象を利用した発光デバイスの
製造方法に関する。BACKGROUND OF THE INVENTION 1. Field of the Invention The present invention relates to a method for manufacturing a light emitting device utilizing the EL (electroluminescence) phenomenon of an organic thin film.
【０００２】[0002]
【従来の技術】ある種の有機薄膜を電極で挟み込み通電
すると、双方の電極から注入された正孔および電子が有
機薄膜内で再結合し、このときのエネルギーにより発光
現象が生じることが知られている。この現象を利用した
ものは有機薄膜ＥＬ素子と呼ばれ各種発光デバイスへの
応用が期待されている。ＥＬ現象は単層の有機薄膜を電
極でサンドイッチした構造でも得られるが、より低い電
圧印加で高輝度を得るためには電極から有機発光膜への
キャリアの注入効率を向上させる必要があるので、電極
と有機発光層とのエネルギー障壁を源し、有機発光膜へ
のキャリア移動を容易にすることを目的として、電極と
有機発光層との間にキャリア注入層もしくはキャリア輸
送層を付加した積層構造が提案されている。2. Description of the Related Art It is known that when an organic thin film of a certain kind is sandwiched between electrodes and electricity is applied, holes and electrons injected from both electrodes are recombined in the organic thin film, and the energy at this time causes a light emission phenomenon. ing. A device utilizing this phenomenon is called an organic thin film EL device and is expected to be applied to various light emitting devices. The EL phenomenon can also be obtained in a structure in which a single-layer organic thin film is sandwiched by electrodes, but in order to obtain high brightness at a lower voltage application, it is necessary to improve the injection efficiency of carriers from the electrodes to the organic light emitting film. A laminated structure in which a carrier injection layer or a carrier transport layer is added between the electrode and the organic light-emitting layer for the purpose of facilitating carrier transfer to the organic light-emitting film by providing an energy barrier between the electrode and the organic light-emitting layer. Is proposed.
【０００３】例としては、陽極／有機正孔輸送層／有機
発光層／陰極（特開昭５７−５１７８１）、陽極／有機
発光層／有機電子輸送層／陰極（Ｃ．Ａｄａｃｈｉ，
Ｔ．Ｔｕｔｓｕｉ，Ｓ．Ｓａｉｔｏ，Ａｐｐｌ．Ｐｈｙ
ｓ．Ｌｅｔｔ．，５５，１４８９（１９８９））、陽極
／複数の有機正孔注入輸送層／有機発光層／複数の有機
電子注入輸送層／陰極（特開平６−３１４５９４）など
が挙げられる。For example, anode / organic hole transport layer / organic light emitting layer / cathode (JP-A-57-51781), anode / organic light emitting layer / organic electron transport layer / cathode (C. Adachi,
T. Tutsui, S .; Saito, Appl. Phy
s. Lett. , 55, 1489 (1989)), anode / a plurality of organic hole injecting / transporting layers / organic light emitting layer / a plurality of organic electron injecting / transporting layers / cathode (JP-A-6-314594), and the like.
【０００４】電極材料としては、光を取り出す都合上、
陽極にはインジウム・錫酸化物（ＩＴＯ）や金箔などの
透光性薄膜が、陰極にはマグネシウム、アルミニウム、
インジウムまたはこれらを母材として銀、リチウムなど
を適宜ドーピングした薄膜が用いられている（たとえば
特開平５−１２１１７２）。As an electrode material, for the convenience of extracting light,
The anode is a transparent thin film such as indium tin oxide (ITO) or gold foil, and the cathode is magnesium, aluminum,
A thin film in which indium or a base material of indium is appropriately doped with silver, lithium or the like is used (for example, JP-A-5-121172).
【０００５】これらの薄膜積層構造体は、一般に湿気や
熱に対する耐久性に乏しいので、光硬化性の樹脂で全面
をカバーしガラスなどを貼り付ける（特開平６−３３８
３９２）、注入口を有するガラス等の容器に入れ液体封
止材を封入する（特開平７−１１２４７）などの封止方
法が開示されている。また従来から無機ＥＬの封止方法
として用いられているラミネートフィルムで被覆する
（特開昭６０−１４７９８）方法も開示されている。Since these thin film laminated structures generally have poor resistance to moisture and heat, the entire surface is covered with a photocurable resin and glass or the like is attached (Japanese Patent Laid-Open No. 6-338).
392), a sealing method is disclosed in which a liquid sealing material is enclosed in a container such as glass having an injection port (Japanese Patent Laid-Open No. 7-11247). Also disclosed is a method of coating with a laminate film which has been conventionally used as a method for sealing an inorganic EL (JP-A-60-14798).
【０００６】これらの有機薄膜ＥＬ素子の従来の製造方
法は、図３（ａ）〜（ｆ）に示すように、ガラスや樹脂
フィルムなどの透光性基板１上に陽極層２として透明電
極をスパッタ法や真空蒸着法などによって形成し
（ａ）、その上に上記したような有機正孔輸送層３、有
機発光層４、有機電子輸送層５などを、真空蒸着法、溶
液塗布法、ＬＢ法、スクリーン印刷法など公知の薄膜形
成技術によって順次積層（ｂ）〜（ｄ）、更にその上に
陰極層６として金属層を真空蒸着法やスパッタ法などを
用いて形成した後（ｅ）、外部リード８の取り付けと封
止（ｆ）を行っていた。In the conventional manufacturing method of these organic thin film EL elements, as shown in FIGS. 3A to 3F, a transparent electrode is formed as an anode layer 2 on a transparent substrate 1 such as glass or resin film. It is formed by a sputtering method or a vacuum vapor deposition method (a), and the organic hole transport layer 3, the organic light emitting layer 4, the organic electron transport layer 5 and the like described above are formed thereon by a vacuum vapor deposition method, a solution coating method, an LB method. Method, a screen printing method, or other known thin film forming techniques, which are sequentially stacked (b) to (d), and a metal layer is further formed thereon as a cathode layer 6 by a vacuum deposition method or a sputtering method (e), The external lead 8 was attached and sealed (f).
【０００７】[0007]
【発明が解決しようとする課題】この従来の有機ＥＬ素
子の製造方法では、単一の基板上に陽極層／有機薄膜層
／陰極層を順次積層するので、有機薄膜層を形成後に陰
極層となる金属層を形成する工程が存在する。ところ
が、一般に有機薄膜層を均一に形成することは困難であ
ることに加え、経時や温度によっても膜表面の平坦性が
変化するので、有機薄膜層を形成した後に金属層を均一
に形成するのは更に困難である。また、首尾良く有機薄
膜層を均一に形成することができたとしても、次に形成
する金属は成膜時エネルギーが高いので有機薄膜層にダ
メージを与える恐れがある。これらは積層膜の膜厚ばら
つきやピンホールの発生を招き、発光品位の著しい低下
となる。In this conventional method for manufacturing an organic EL device, since the anode layer / organic thin film layer / cathode layer are sequentially laminated on a single substrate, the cathode layer is formed after the organic thin film layer is formed. There is a step of forming a metal layer of However, in general, it is difficult to form an organic thin film layer uniformly, and since the flatness of the film surface changes with time and temperature, it is necessary to form a metal layer uniformly after forming the organic thin film layer. Is even more difficult. Further, even if the organic thin film layer can be formed successfully, the metal to be formed next has a high energy during film formation, so that the organic thin film layer may be damaged. These lead to variations in the film thickness of the laminated film and the occurrence of pinholes, resulting in a significant deterioration in light emission quality.
【０００８】[0008]
【課題を解決するための手段】本発明の有機薄膜ＥＬ素
子の製造方法は、前述した従来の製造方法の欠点である
有機薄膜層の形成後に金属層を形成する工程を排除する
ために、一方の防湿フィルム上に透光性の陽極層とｎ
（ｎ≧１）層からなる有機薄膜層のうちのｍ（ｍ≧０）
層を順に積層させて形成し、他方の防湿フィルム上に陰
極層と残りのｎ−ｍ層からなる有機薄膜層を順に積層さ
せて形成した後、双方の積層膜を対向させて貼り合わ
せ、周辺部を接着または融着封止するようにした（請求
項１）。In order to eliminate the step of forming a metal layer after the formation of the organic thin film layer, which is a drawback of the conventional manufacturing method described above, the method for producing an organic thin film EL element of the present invention is And a transparent anode layer on the moisture-proof film
M (m ≧ 0) of the organic thin film layers composed of (n ≧ 1) layers
Layers are laminated in order, and a cathode layer and the remaining organic thin film layer consisting of nm layers are laminated on the other moisture-proof film in this order, and then both laminated films are laminated to face each other. The parts are bonded or fused and sealed (claim 1).
【０００９】また、貼り合わせ面の密着性を向上させる
ため、上記防湿フィルム上に積層する有機薄膜層のう
ち、貼り合わせ界面と有機薄膜層は、有機材を樹脂バイ
ンダーに分散させた樹脂分散膜とし、この樹脂バインダ
ーが軟化する温度下で圧着して貼り合わせるようにした
（請求項２）。Further, in order to improve the adhesion of the bonding surface, among the organic thin film layers laminated on the moisture-proof film, the bonding interface and the organic thin film layer are a resin dispersion film in which an organic material is dispersed in a resin binder. Then, the resin binder is pressure-bonded at a temperature at which it softens (Claim 2).
【００１０】[0010]
【実施例】次に本発明の実施例について図面を参照して
説明する。図１（ａ）〜（ｅ）は本発明の有機薄膜ＥＬ
素子の製造方法の第１の実施例を示す工程図である。厚
さ１００μｍの透明ポリエステルフィルム１ａ上に陽極
層としてＩＴＯ２をスパッタ法にて形成し、フォトリソ
グラフィー法を用いて所望のパターンとし（ａ）、続い
て有機正孔輸送層３として１，１−ビス−（４−ジパラ
トリルアミノフェニル）シクロヘキサンを真空蒸着法に
より５００オングストローム形成した（ｂ）。Next, an embodiment of the present invention will be described with reference to the drawings. 1A to 1E show the organic thin film EL of the present invention.
FIG. 6 is a process chart showing a first example of a method for manufacturing an element. ITO2 is formed as a positive electrode layer on a transparent polyester film 1a having a thickness of 100 μm by a sputtering method, and a desired pattern is formed by using a photolithography method (a), and then 1,1-bis is used as an organic hole transport layer 3. -(4-Diparatolylaminophenyl) cyclohexane was formed in a thickness of 500 angstrom by the vacuum deposition method (b).
【００１１】次に他方のポリエステルフィルム１ｂ上
に、まず陰極層６としてアルミニウムとリチウムを速度
比約７０：１で、所望のパターンのシャドウマスクを用
いて共蒸着法により２０００オングストローム形成し
（ｃ）、続いて有機発光材としてトリス（８−キノリノ
ール）アルミニウム、樹脂バインダーとしてフレーク上
のポリスチレン樹脂を重量比１：２でジクロロメタンに
溶解して２重量％の溶液を作り、ディップコート法によ
り樹脂分散型有機発光層４を７００オングストローム形
成した（ｄ）。Next, on the other polyester film 1b, first, aluminum and lithium were formed as the cathode layer 6 at a speed ratio of about 70: 1 by a co-evaporation method using a shadow mask having a desired pattern to form 2000 angstroms (c). Then, tris (8-quinolinol) aluminum as an organic light emitting material and polystyrene resin on flakes as a resin binder were dissolved in dichloromethane at a weight ratio of 1: 2 to prepare a 2% by weight solution, and a resin dispersion type was prepared by a dip coating method. The organic light emitting layer 4 was formed to 700 angstrom (d).
【００１２】その後双方の積層膜を対向させ、ポリスチ
レン樹脂の軟化点である９０℃で加圧して貼り合わせ、
周辺部は外部リードと共に電熱シーラーにて融着封止し
た（ｅ）。完成した有機薄膜ＥＬ素子は印加電圧１０Ｖ
で輝度３１０ｃｄ／ｍ2 の緑色発光を得た。After that, both laminated films are made to face each other, and they are adhered by applying pressure at 90 ° C. which is the softening point of the polystyrene resin,
The peripheral part was fusion-sealed with an external lead with an electrothermal sealer (e). Applied voltage is 10V for the completed organic thin film EL device
And green light emission with a luminance of 310 cd / m 2 was obtained.
【００１３】第２の実施例を図２（ａ）〜（ｅ）に示
す。厚さ１００μｍの透明ポリエステルフィルム１ａ上
には陽極層としてパターニングしたＩＴＯ２のみを形成
した（ａ）。次に他方のポリエステルフィルム１ｂ上
に、まず陰極層６としてアルミニウムとリチウムを速度
比約７０：１で、所望のパターンのシャドウマスクを用
いて共蒸着法により２０００オングストローム形成し
（ｂ）、続いて有機発光層４としてトリス（８−キノリ
ノール）アルミニウムにキナクリドンを１ｍｏｌ％ドー
プしながら共蒸着法により６５０オングストローム形成
した（ｃ）。A second embodiment is shown in FIGS. 2 (a)-(e). Only ITO2 patterned as an anode layer was formed on the transparent polyester film 1a having a thickness of 100 μm (a). Next, on the other polyester film 1b, first, aluminum and lithium were formed as the cathode layer 6 at a speed ratio of about 70: 1 by a co-evaporation method using a shadow mask having a desired pattern to form 2000 angstroms (b). As organic light emitting layer 4, 650 angstrom was formed by co-evaporation method while doping tris (8-quinolinol) aluminum with 1 mol% of quinacridone.
【００１４】さらに、この上に有機正孔輸送剤として
１，１−ビス−（４−ジパラトリルアミノフェニル）シ
クロヘキサン、樹脂バインダーとして粉末状のポリ塩化
ビニル樹脂を重量比１：１でテトラヒドロフランに溶解
して１重量％の溶液を作り、ディップコート法により樹
脂分散型有機正孔輸送層３を５００オングストローム形
成した（ｄ）。その後双方の積層膜を対向させ、ポリ塩
化ビニル樹脂の軟化点である８０℃で加圧して貼り合わ
せ、周辺部は外部リード８と共に電熱シーラーにて融着
封止した（ｅ）。完成した有機薄膜ＥＬ素子は印加電圧
１２Ｖで輝度３４０ｃｄ／ｍ2 の緑色発光を得た。Further, 1,1-bis- (4-diparatolylaminophenyl) cyclohexane as an organic hole transport agent and powdered polyvinyl chloride resin as a resin binder were added to tetrahydrofuran at a weight ratio of 1: 1. A 1% by weight solution was dissolved to form a resin dispersion type organic hole transport layer 3 of 500 angstrom by the dip coating method (d). After that, both laminated films were opposed to each other, and they were pressed and bonded at 80 ° C., which is the softening point of the polyvinyl chloride resin, and the peripheral portion was fusion-sealed together with the external lead 8 with an electric heat sealer (e). The completed organic thin film EL device emitted green light with a brightness of 340 cd / m 2 at an applied voltage of 12V.
【００１５】第１の実施例では、一方の防湿フィルムに
はＩＴＯと１層の有機正孔輸送層を順に積層し、他方の
防湿フィルムには金属層と１層の有機発光層を順に積層
した。In the first embodiment, ITO and one organic hole transport layer are sequentially laminated on one moisture-proof film, and a metal layer and one organic light-emitting layer are sequentially laminated on the other moisture-proof film. .
【００１６】また、第２の実施例では一方の防湿フィル
ムにはＩＴＯのみを形成し、他方の防湿フィルムに金属
層と１層の有機発光層と１層の有機正孔輸送層を順に積
層したが、本実施例では使用しなかった電子輸送層を陰
極層と有機発光層との間に形成することもできる。In the second embodiment, only one ITO film is formed on one moisture-proof film, and a metal layer, one organic light-emitting layer and one organic hole transport layer are sequentially laminated on the other moisture-proof film. However, an electron transport layer, which is not used in this embodiment, can be formed between the cathode layer and the organic light emitting layer.
【００１７】また、各有機薄膜層は複数層でも良いし、
貼り合わせ界面と有機薄膜層を有機材を樹脂バインダー
に分散させた樹脂分散膜とするならば、各有機積層膜を
どちらの防湿フィルムに割り振って積層してもよい。Further, each organic thin film layer may be a plurality of layers,
If the bonding interface and the organic thin film layer are resin-dispersed films in which an organic material is dispersed in a resin binder, each organic laminated film may be allocated to any moisture-proof film to be laminated.
【００１８】本実施例は材料を規定するものではなく、
陽極層としては金箔など、有機正孔輸送剤としては芳香
族３級アミンの他にポリフィリン誘導体など、有機発光
剤としては８−ヒドロキシキノリン金属錯体の他に、ブ
タジエン誘導体、クマリン誘導体、ベンズオキサゾール
誘導体、オキサジアゾール誘導体、オキサゾール誘導
体、チアジアゾール誘導体、スチリルアミン誘導体、ビ
ススチリルベンゼン誘導体、ビススチリルアントラセン
誘導体、ペリノン誘導体、アミノピレン誘導体など、電
子輸送剤としてはナフタルイミド誘導体、ペリレンテト
ラカルボン酸ジイミド誘導体、キナクリドン誘導体な
ど、有機薄膜ＥＬを構成する材料はすべて使用可能であ
る。また、樹脂バインダーとしては、ポリカーボネー
ト、ポリビニルカルバゾール、塩酢ビ共重合樹脂、ホル
マール樹脂などが使用可能であるが、前記した正孔輸送
剤、発光剤、電子輸送剤との相溶性を有し、既に形成し
た薄膜層を侵さない溶剤を適宜選択する必要がある。This embodiment does not specify the material,
The anode layer is a gold foil, the organic hole-transporting agent is an aromatic tertiary amine and a porphyrin derivative, the organic light-emitting agent is an 8-hydroxyquinoline metal complex, a butadiene derivative, a coumarin derivative, and a benzoxazole derivative. , Oxadiazole derivative, oxazole derivative, thiadiazole derivative, styrylamine derivative, bisstyrylbenzene derivative, bisstyrylanthracene derivative, perinone derivative, aminopyrene derivative, etc. Any material that constitutes the organic thin film EL, such as a derivative, can be used. Further, as the resin binder, polycarbonate, polyvinyl carbazole, vinyl chloride vinyl acetate copolymer resin, formal resin and the like can be used, but they have compatibility with the hole transfer agent, the light emitting agent, and the electron transfer agent, It is necessary to appropriately select a solvent that does not attack the already formed thin film layer.
【００１９】[0019]
【発明の効果】以上説明したように、本発明の有機薄膜
ＥＬ素子の製造方法は、一方の防湿フィルム上に透光性
の陽極層とｎ（ｎ≧１）層からなる有機薄膜層のうちの
ｍ（ｍ≧０）層を順に積層させて形成し、他方の防湿フ
ィルム上に陰極層と残りのｎ−ｍ層からなる有機薄膜層
を順に積層させて形成した後、双方の積層膜を対向させ
て貼り合わせ、周辺部を接着または融着封止するように
したので、有機薄膜層を形成した後に金属層を形成する
工程が存在せず、概して不均一な有機薄膜層の成膜状態
に影響して金属層も不均一になったり、金属層成膜時の
エネルギーによって既に形成した有機薄膜層がダメージ
を受けることがない。また、防湿フィルム上に積層する
有機薄膜層のうち、貼り合わせ界面となる有機薄膜層の
少なくとも１層は、有機材を樹脂バインダーに分散させ
た樹脂分散膜とし、この樹脂バインダーが軟化する温度
下で圧着して貼り合わせるようにしたので貼り合わせの
密着性も向上し、安定した性能を有した有機薄膜ＥＬ素
子を提供できる。As described above, according to the method of manufacturing an organic thin film EL element of the present invention, one of the organic thin film layers consisting of a light-transmitting anode layer and n (n ≧ 1) layers is formed on one moisture-proof film. M (m ≧ 0) layers are laminated in this order, and a cathode layer and the remaining organic thin film layer consisting of nm layers are formed in this order on the other moisture-proof film, and then both laminated films are formed. Since they are made to face each other and bonded and the peripheral portions are adhered or fusion-sealed, there is no step of forming a metal layer after forming the organic thin film layer, and thus a generally non-uniform film formation state of the organic thin film layer. Therefore, the metal layer does not become non-uniform due to the influence of the above, and the already formed organic thin film layer is not damaged by the energy at the time of forming the metal layer. Further, among the organic thin film layers laminated on the moisture-proof film, at least one of the organic thin film layers serving as the bonding interface is a resin dispersion film in which an organic material is dispersed in a resin binder, and the temperature is set to a temperature at which the resin binder softens. Since the bonding is performed by pressure bonding with, the adhesiveness of the bonding is improved, and an organic thin film EL element having stable performance can be provided.
【図１】本発明の有機薄膜ＥＬ素子の製造方法の第１の
実施例を示す工程図。FIG. 1 is a process drawing showing a first embodiment of a method for manufacturing an organic thin film EL element of the present invention.
【図２】本発明の有機薄膜ＥＬ素子の製造方法の第２の
実施例を示す工程図。FIG. 2 is a process drawing showing a second embodiment of the method for manufacturing an organic thin film EL element of the present invention.
【図３】従来の有機薄膜ＥＬ素子の製造方法を示す工程
図。FIG. 3 is a process drawing showing a conventional method for manufacturing an organic thin film EL element.
１ａ，１ｂ ポリエステルフィルム ２ 陽極層（ＩＴＯ） ３ 有機正孔輸送層 ４ 有機発光層 ５ 有機電子輸送層 ６ 陰極層 ７ 樹脂 ８ 外部リード 1a, 1b Polyester film 2 Anode layer (ITO) 3 Organic hole transport layer 4 Organic light emitting layer 5 Organic electron transport layer 6 Cathode layer 7 Resin 8 External lead
Claims (2)
膜層を陽極層と陰極層の間に配置した積層薄膜を防湿フ
ィルムで挾持してなる有機薄膜ＥＬ素子の製造方法にお
いて、一方の防湿フィルム上に透光性の陽極層と前記ｎ
層からなる有機薄膜層のうちのｍ（ｍ≧０）層を順に積
層させて形成し、他方の防湿フィルム上に陰極層と残り
のｎ−ｍ層からなる有機薄膜層を順に積層させて形成し
た後、双方の積層膜を対向させて貼り合わせ、周辺部を
接着または融着封止することを特徴とする有機薄膜ＥＬ
素子の製造方法。1. A method for manufacturing an organic thin film EL device, comprising a moisture-proof film sandwiching a laminated thin film in which an organic thin film layer consisting of an anode layer and n (n ≧ 1) layers is arranged between an anode layer and a cathode layer, On one moisture-proof film, a transparent anode layer and the n
Among the organic thin film layers consisting of layers, m (m ≧ 0) layers are sequentially laminated and formed, and on the other moisture-proof film, a cathode layer and the remaining organic thin film layers consisting of nm layers are sequentially laminated and formed. After that, both laminated films are made to face each other and bonded, and the peripheral portion is adhered or fusion-sealed, which is characterized in that
Device manufacturing method.
層のうち、貼り合わせ界面となる有機薄膜層は、有機材
を樹脂バインダーに分散させた樹脂分散膜とし、この樹
脂バインダーが軟化する温度下で圧着して貼り合わせる
ことを特徴とする請求項１記載の有機薄膜ＥＬ素子の製
造方法。2. Among the organic thin film layers laminated on the moisture-proof film, the organic thin film layer serving as a bonding interface is a resin dispersion film in which an organic material is dispersed in a resin binder, and at a temperature at which the resin binder softens. The method for manufacturing an organic thin film EL element according to claim 1, wherein the method is pressure-bonding with and bonding.
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP7153155A JP2755216B2 (en) | 1995-06-20 | 1995-06-20 | Manufacturing method of organic thin film EL element |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP7153155A JP2755216B2 (en) | 1995-06-20 | 1995-06-20 | Manufacturing method of organic thin film EL element |
Publications (2)
| Publication Number | Publication Date |
|---|---|
| JPH097763A true JPH097763A (en) | 1997-01-10 |
| JP2755216B2 JP2755216B2 (en) | 1998-05-20 |
Family
ID=15556237
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| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP7153155A Expired - Lifetime JP2755216B2 (en) | 1995-06-20 | 1995-06-20 | Manufacturing method of organic thin film EL element |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JP2755216B2 (en) |
Cited By (14)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JP2000173770A (en) * | 1998-10-13 | 2000-06-23 | Sony Internatl Europ Gmbh | Active matrix system display device and manufacture thereof |
| JP2000268954A (en) * | 1999-03-17 | 2000-09-29 | Matsushita Electric Ind Co Ltd | Electroluminescent element |
| JP2002158089A (en) * | 2000-11-21 | 2002-05-31 | Toppan Printing Co Ltd | Organic electroluminescent display element and its manufacturing method |
| JP2002541631A (en) * | 1999-04-07 | 2002-12-03 | マイクロエミッシブ ディスプレイズ リミティド | Optoelectronic display |
| US6520821B1 (en) | 1998-05-18 | 2003-02-18 | Nec Corporation | Device package and device encapsulation method |
| KR100384289B1 (en) * | 2001-02-22 | 2003-05-16 | 주식회사 엘리아테크 | Organic electroluminescent display and encapsulating method thereof |
| WO2005057986A1 (en) * | 2003-12-09 | 2005-06-23 | Nippon Sheet Glass Company, Limited | Surface luminance and manufacturing method thereof |
| JP2005521209A (en) * | 2002-03-20 | 2005-07-14 | 富士写真フイルム株式会社 | Organic thin film element and method for manufacturing the same |
| JP2006019285A (en) * | 2004-07-02 | 2006-01-19 | Konarka Technologies Inc | Organic photovoltaic component with encapsulation |
| US7049161B2 (en) | 2002-12-14 | 2006-05-23 | Samsung Sdi Co., Ltd. | Method of manufacturing substrate, method of manufacturing organic electroluminescent display device using the method, and organic electroluminescent display device |
| JPWO2004112440A1 (en) * | 2003-06-13 | 2006-07-27 | 松下電器産業株式会社 | Light emitting element and display device |
| US7683368B2 (en) | 2005-04-18 | 2010-03-23 | Seiko Epson Corporation | Method of manufacturing semiconductor element, semiconductor element, electronic device, and electronic equipment |
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Citations (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPH06283265A (en) * | 1993-03-25 | 1994-10-07 | Nec Kansai Ltd | Electroluminescent lamp and manufacture thereof and equipment for manufacture thereof |
-
1995
- 1995-06-20 JP JP7153155A patent/JP2755216B2/en not_active Expired - Lifetime
Patent Citations (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPH06283265A (en) * | 1993-03-25 | 1994-10-07 | Nec Kansai Ltd | Electroluminescent lamp and manufacture thereof and equipment for manufacture thereof |
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| JP2000173770A (en) * | 1998-10-13 | 2000-06-23 | Sony Internatl Europ Gmbh | Active matrix system display device and manufacture thereof |
| JP4536184B2 (en) * | 1998-10-13 | 2010-09-01 | ソニー インターナショナル （ヨーロッパ） ゲゼルシャフト ミット ベシュレンクテル ハフツング | Active matrix display device |
| JP2000268954A (en) * | 1999-03-17 | 2000-09-29 | Matsushita Electric Ind Co Ltd | Electroluminescent element |
| JP2002541631A (en) * | 1999-04-07 | 2002-12-03 | マイクロエミッシブ ディスプレイズ リミティド | Optoelectronic display |
| JP2002158089A (en) * | 2000-11-21 | 2002-05-31 | Toppan Printing Co Ltd | Organic electroluminescent display element and its manufacturing method |
| KR100384289B1 (en) * | 2001-02-22 | 2003-05-16 | 주식회사 엘리아테크 | Organic electroluminescent display and encapsulating method thereof |
| JP2005521209A (en) * | 2002-03-20 | 2005-07-14 | 富士写真フイルム株式会社 | Organic thin film element and method for manufacturing the same |
| US7049161B2 (en) | 2002-12-14 | 2006-05-23 | Samsung Sdi Co., Ltd. | Method of manufacturing substrate, method of manufacturing organic electroluminescent display device using the method, and organic electroluminescent display device |
| US7307281B2 (en) | 2002-12-14 | 2007-12-11 | Samsung Sdi Co., Ltd. | Method of manufacturing substrate, method of manufacturing organic electroluminescent display device using the method, and organic electroluminescent display device |
| JP4598673B2 (en) * | 2003-06-13 | 2010-12-15 | パナソニック株式会社 | Light emitting element and display device |
| JPWO2004112440A1 (en) * | 2003-06-13 | 2006-07-27 | 松下電器産業株式会社 | Light emitting element and display device |
| US7868331B2 (en) | 2003-06-13 | 2011-01-11 | Panasonic Corporation | Light-emitting device having a metal oxide semiconductor porous body with an organic light-emitting material |
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| JP2006019285A (en) * | 2004-07-02 | 2006-01-19 | Konarka Technologies Inc | Organic photovoltaic component with encapsulation |
| US7683368B2 (en) | 2005-04-18 | 2010-03-23 | Seiko Epson Corporation | Method of manufacturing semiconductor element, semiconductor element, electronic device, and electronic equipment |
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Free format text: JAPANESE INTERMEDIATE CODE: R250 |
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| EXPY | Cancellation because of completion of term |