JPH0972338A - Static pressure gas bearing device - Google Patents
Static pressure gas bearing deviceInfo
- Publication number
- JPH0972338A JPH0972338A JP7223421A JP22342195A JPH0972338A JP H0972338 A JPH0972338 A JP H0972338A JP 7223421 A JP7223421 A JP 7223421A JP 22342195 A JP22342195 A JP 22342195A JP H0972338 A JPH0972338 A JP H0972338A
- Authority
- JP
- Japan
- Prior art keywords
- bearing
- bearing member
- housing
- shaft member
- turbine
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Granted
Links
Classifications
-
- B—PERFORMING OPERATIONS; TRANSPORTING
- B05—SPRAYING OR ATOMISING IN GENERAL; APPLYING FLUENT MATERIALS TO SURFACES, IN GENERAL
- B05B—SPRAYING APPARATUS; ATOMISING APPARATUS; NOZZLES
- B05B5/00—Electrostatic spraying apparatus; Spraying apparatus with means for charging the spray electrically; Apparatus for spraying liquids or other fluent materials by other electric means
- B05B5/025—Discharge apparatus, e.g. electrostatic spray guns
- B05B5/04—Discharge apparatus, e.g. electrostatic spray guns characterised by having rotary outlet or deflecting elements, i.e. spraying being also effected by centrifugal forces
- B05B5/0415—Driving means; Parts thereof, e.g. turbine, shaft, bearings
Landscapes
- Magnetic Bearings And Hydrostatic Bearings (AREA)
- Support Of The Bearing (AREA)
Abstract
Description
【０００１】[0001]
【発明の属する技術分野】本発明は、例えば静電塗装等
用の軸部材を支持する静圧気体軸受装置に関する。BACKGROUND OF THE INVENTION 1. Field of the Invention The present invention relates to a static pressure gas bearing device for supporting a shaft member for electrostatic coating or the like.
【０００２】[0002]
【従来の技術】このように高速回転される軸部材を支持
する従来の静圧気体軸受装置としては、例えば図４に示
すようなものがある。この静圧気体軸受装置は、ラジア
ル軸受面及びスラスト軸受面を多孔質部材で構成して、
そのラジアル軸受面とスラスト軸受面とから圧縮供給さ
れた気体が噴出するようにし、このラジアル軸受面を有
する二つのラジアル軸受部材とスラスト軸受面を有する
一対のスラスト軸受部材とを互いに独立して配設したも
のである。2. Description of the Related Art As a conventional static pressure gas bearing device for supporting such a shaft member rotated at a high speed, there is, for example, one shown in FIG. In this static pressure gas bearing device, the radial bearing surface and the thrust bearing surface are made of a porous member,
The gas compressed and supplied from the radial bearing surface and the thrust bearing surface is jetted out, and two radial bearing members having the radial bearing surface and a pair of thrust bearing members having the thrust bearing surface are arranged independently of each other. It was set up.
【０００３】このうち、高速回転される軸部材Ａのラジ
アル荷重を支持するラジアル軸受部材Ｂは、軸線方向に
長い円筒状に形成され、特に軸部材Ａのモーメントを支
持するために、夫々多孔質部材Ｚが軸受ケースＣに収納
された二つのラジアル軸受部材Ｂを軸線方向に所定間隔
離間してハウジングＤの内孔に弾性支持する。この従来
例では、前記軸受ケースＣとハウジングＤとの間にゴム
製等の弾性部材からなるＯリングＥを介装して、当該ラ
ジアル軸受部材Ｂを弾性支持している。このようにラジ
アル軸受部材Ｂを弾性支持することにより、高速回転さ
れる軸部材Ａのラジアル方向（径方向）への振れ回りが
後述するようにして吸収される。なお、円筒状のラジア
ル軸受部材Ｂの多孔質部材Ｚの両端面は、前記軸受ケー
スＣやハウジングＤによって閉塞され、ハウジングＤに
形成された給気口Ｆから圧縮気体が供給されると、各ラ
ジアル軸受部材Ｂの内周面から圧縮気体が噴出して、当
該軸部材Ａの外周面とラジアル軸受部材Ｂの内周面との
間に所定のラジアル軸受隙間Ｈを形成して当該軸部材Ａ
をラジアル方向に非接触に支持する。ここで、高速回転
される軸部材Ａがラジアル方向に振れ回ると、各ラジア
ル軸受隙間Ｈが一定になるように、前記弾性部材からな
るＯリングＥの変形を伴って前記軸受ケースＣを含むラ
ジアル軸受部材Ｂがラジアル方向に移動して、当該軸部
材Ａのラジアル方向への振れ回りが吸収される。Of these, the radial bearing member B which supports the radial load of the shaft member A rotated at a high speed is formed in a cylindrical shape which is long in the axial direction, and in particular, in order to support the moment of the shaft member A, each is made of a porous material. The member Z elastically supports the two radial bearing members B housed in the bearing case C at predetermined intervals in the axial direction in the inner hole of the housing D. In this conventional example, an O-ring E made of an elastic member made of rubber or the like is interposed between the bearing case C and the housing D to elastically support the radial bearing member B. By elastically supporting the radial bearing member B in this manner, whirling of the shaft member A rotated at high speed in the radial direction (radial direction) is absorbed as described later. Both end surfaces of the porous member Z of the cylindrical radial bearing member B are closed by the bearing case C and the housing D, and when compressed gas is supplied from the air supply port F formed in the housing D, Compressed gas is ejected from the inner peripheral surface of the radial bearing member B to form a predetermined radial bearing gap H between the outer peripheral surface of the shaft member A and the inner peripheral surface of the radial bearing member B.
Is supported in the radial direction in a non-contact manner. Here, when the shaft member A rotated at a high speed swings in the radial direction, the radial ring including the bearing case C is accompanied by the deformation of the O-ring E made of the elastic member so that the radial bearing gaps H become constant. The bearing member B moves in the radial direction, and the whirling of the shaft member A in the radial direction is absorbed.
【０００４】一方、高速回転される軸部材Ａのスラスト
荷重を分担する一対のスラスト軸受部材Ｊは、方形断面
を有するリング状に形成されている。軸部材Ａに一体に
形成されたフランジ部Ｋの両端面と各スラスト軸受部材
Ｊの一方の端面との間に、夫々所定のスラスト軸受隙間
Ｌが形成されるようにして、当該フランジ部Ｋの両側に
スラスト軸受部材Ｊが配設され、各スラスト軸受部材Ｊ
はハウジングＤにリジッドに固定支持される。なお、前
記スラスト軸受部材Ｊのうち、前記軸部材Ａのフランジ
部Ｋの端面に対向しない端面及び外周面はハウジングＤ
に密着されて閉塞される。ハウジングＤに形成された給
気口Ｍから圧縮気体が供給されると、スラスト軸受部材
Ｊの前記一方の端面から圧縮気体が噴出されて、その気
体圧力が前記軸部材Ａのフランジ部Ｋを非接触に支持す
る。On the other hand, the pair of thrust bearing members J, which bear the thrust load of the shaft member A rotated at a high speed, are formed in a ring shape having a rectangular cross section. A predetermined thrust bearing gap L is formed between both end surfaces of the flange portion K integrally formed with the shaft member A and one end surface of each thrust bearing member J, so that the flange portion K of the flange portion K is formed. Thrust bearing members J are arranged on both sides, and each thrust bearing member J
Is rigidly supported by the housing D. In the thrust bearing member J, the end surface and the outer peripheral surface that do not face the end surface of the flange portion K of the shaft member A have a housing D.
Is closely attached to and closed. When the compressed gas is supplied from the air supply port M formed in the housing D, the compressed gas is ejected from the one end surface of the thrust bearing member J, and the gas pressure causes the flange portion K of the shaft member A not to flow. Support contact.
【０００５】なお、噴出された圧縮気体は、ハウジング
Ｄに形成された排気口Ｇ及びハウジングＤと軸部材Ａと
の間の隙間から当該ハウジングＤの外部に排気される。The jetted compressed gas is exhausted to the outside of the housing D through the exhaust port G formed in the housing D and the gap between the housing D and the shaft member A.
【０００６】[0006]
【発明が解決しようとする課題】しかしながら、前記従
来の静圧気体軸受装置では、前記スラスト軸受部材及び
ラジアル軸受部材を正確に位置決めする必要があるが、
互いに独立した前記スラスト軸受部材Ｊとラジアル軸受
部材Ｂとを軸方向に正確に位置出しして組立てることが
非常に困難であり、またその調整には大変な手間と時
間，或いは熟練を要する。また、スラスト軸受について
は、各スラスト軸受部材Ｊが、ハウジングＤにリジッド
に固定支持されているため、高速回転される軸部材Ａの
振れ回りから前記フランジ部Ｋがスラスト方向（軸方
向）に振れてスラスト軸受部材Ｊに接触し、軸部材Ａの
回転速度が低下するばかりでなく、軸受かじりという不
具合が発生することもあった。また、スラスト軸受部材
とラジアル軸受部材とを軸方向の両側に併設する関係か
ら、ラジアル負荷容量，ラジアル剛性及びモーメント剛
性が低い。また、ハウジングＤの軸方向寸法が大きくな
ってしまうという問題もある。However, in the conventional static pressure gas bearing device, it is necessary to accurately position the thrust bearing member and the radial bearing member.
It is very difficult to accurately position and assemble the thrust bearing member J and the radial bearing member B, which are independent of each other, in the axial direction, and the adjustment thereof requires a great deal of labor, time, and skill. Regarding the thrust bearing, since each thrust bearing member J is rigidly fixedly supported by the housing D, the flange portion K swings in the thrust direction (axial direction) from the whirling of the shaft member A that is rotated at high speed. The thrust bearing member J may come into contact with the thrust bearing member J to lower the rotation speed of the shaft member A, and a problem such as bearing galling may occur. Further, since the thrust bearing member and the radial bearing member are provided on both sides in the axial direction, the radial load capacity, the radial rigidity and the moment rigidity are low. There is also a problem that the axial dimension of the housing D becomes large.
【０００７】本発明は、これらの諸問題に鑑みて開発さ
れたものであり、部品が少なくてコストが安価であり、
組立・調整が簡便であり、特にスラスト荷重を支持する
軸受部材と軸部材との接触を回避でき、更に従来に比し
てラジアル負荷容量，ラジアル剛性及びモーメント剛性
を大きくすることのできる静圧気体軸受装置を提供する
ことを目的とするものである。The present invention was developed in view of these problems, has a small number of parts, and is inexpensive.
Hydrostatic gas that is easy to assemble and adjust, avoids contact between the bearing member that supports the thrust load and the shaft member, and can increase the radial load capacity, radial rigidity, and moment rigidity compared to conventional models. The purpose of the present invention is to provide a bearing device.
【０００８】[0008]
【課題を解決するための手段】上記目的を達成するため
に、本発明の静圧気体軸受装置は、円筒状に形成された
軸受部材の内周面と両端面とに気体噴出部を設け、当該
軸受部材の内周面内に軸部材を挿通して当該軸部材の軸
方向中間部に一体に形成されたフランジ部の両側に軸受
部材を夫々配設し、各軸受部材はハウジングの内孔に弾
性支持され、各軸受部材の一方の端面と当該一方の端面
に対向する軸部材のフランジ部端面との間に夫々スラス
ト軸受隙間を形成し、各軸受部材の他方の端面と当該他
方の端面に対向するハウジングとの間に夫々スラスト方
向隙間を形成したことを特徴とするものである。In order to achieve the above object, a static pressure gas bearing device of the present invention is provided with a gas ejection portion on the inner peripheral surface and both end surfaces of a cylindrical bearing member. The shaft member is inserted into the inner peripheral surface of the bearing member, and the bearing members are respectively arranged on both sides of the flange portion integrally formed at the axially intermediate portion of the shaft member. Elastically supported by each of the bearing members, a thrust bearing gap is formed between one end surface of each bearing member and the end surface of the flange portion of the shaft member facing the one end surface, and the other end surface of each bearing member and the other end surface thereof are formed. It is characterized in that a thrust direction gap is formed between the housing and the housing facing each other.
【０００９】[0009]
【発明の実施の形態】本発明の静圧気体軸受装置では、
図１に示すように、例えば多孔質部材を用いて円筒状の
軸受部材１を形成することで、例えばその外周面から圧
縮気体が供給されると、その内周面と両端面とから当該
圧縮気体が噴出されるように当該内周面と両端面とに気
体噴出部２ａ〜２ｃを設ける。また、軸受部材１の外周
面は軸方向中央部の円周溝を除く箇所が目つぶし加工を
施されている。そして、軸部材３の軸方向中間部に両側
部より大径に一体に形成されたフランジ部４の両側から
当該軸部材３の外側に各軸受部材１を被せ、当該軸受部
材１の内周面内に軸部材３を挿通して当該フランジ部４
の両側に軸受部材１を夫々配設する。この状態で、軸部
材３を軸受部材１ごとハウジング５のハウジング本体５
ｃの内孔５ａ内に挿入し、各軸受部材１と当該ハウジン
グ５の内孔５ａとの間に、ゴム製等の弾性部材からなる
Ｏリング等の弾性支持部材６を介装するなどにより当該
軸受部材１をハウジング５の内孔５ａが弾性支持する。
また、図１では前記軸部材３のフランジ部４の端面に対
向しない両軸受部材１の外側端面にハウジング５のサイ
ドカバー５ｂを被せる。これにより、各軸受部材１の内
側端面（一方の端面）と当該一方の端面に対向する軸部
材３のフランジ部４の端面との間に夫々所定寸法のスラ
スト軸受隙間７ａが形成され、そして各軸受部材１の外
側端面（他方の端面）と当該他方の端面に対向するハウ
ジング５（サイドカバー５ｂ）との間に、夫々所定寸法
のスラスト方向隙間（ダンパー用隙間）７ｂが形成され
る。そして、ハウジング５に形成された給気口９から各
軸受部材１の外周面に圧縮気体が供給されて、前記各軸
受部材１の内周面及び両端面に設けられた気体噴出部２
ａ，２ｂ，２ｃから圧縮気体が噴出し、そのうちの内周
面気体噴出部２ａから噴出された気体圧力によって当該
軸受部材１の内周面と軸部材３の外周面との間に所定寸
法のラジアル軸受隙間８が形成され、当該軸部材３をラ
ジアル方向に支持すると共に、各軸受部材１の内側端面
の気体噴出部２ｂから噴出された圧縮気体の圧力がフラ
ンジ部４，即ち軸部材３をスラスト方向に支持する。ま
た、各軸受部材１自体は、当該軸受部材１の外側端面の
気体噴出部２ｃから噴出された圧縮気体の圧力により、
ハウジング５（サイドカバー５ｂ）に非接触にスラスト
方向に支持されている。なお、排気はハウジング５に形
成された排気口１０及び軸部材３とサイドカバー５ｂと
の間の隙間から行われる。従って、高速回転される軸部
材３のラジアル荷重及びモーメントは前記二つのラジア
ル軸受隙間８内の気体圧力で受けられ、軸部材３のスラ
スト荷重は前記フランジ部４側のスラスト軸受隙間７ａ
の気体圧力で受けられる。また、当該軸部材３のラジア
ル方向の振れ回りは、従来と同様に、前記ラジアル軸受
隙間８が一定になるように、Ｏリング等の弾性支持部材
６の変形を伴って、軸受部材１がラジアル方向に移動す
ることで吸収され、そのスラスト方向の振れは、前記フ
ランジ部４の両側のスラスト軸受隙間７ａが一定になる
ように、前記Ｏリング等の弾性支持部材６の変形及び前
記ハウジング５（サイドカバー５ｂ）と軸受部材１との
間のスラスト方向隙間７ｂの変化を伴って、軸受部材１
がスラスト方向に移動することで吸収される。特に当該
フランジ部４側のスラスト軸受隙間７ａ及びハウジング
５（サイドカバー５ｂ）側のスラスト方向隙間７ｂの気
体圧力によって速やかに減衰され、当該フランジ部４及
び軸部材３を各軸受部材１に対して軸線方向の所定位置
に維持する。従って、軸部材３及びそのフランジ部４
が、ラジアル方向にもスラスト方向にも各軸受部材１に
接触することがない。また、各軸受部材１が、軸部材３
のラジアル荷重とスラスト荷重との両方を支持し、一つ
の軸受部材１でラジアル軸受隙間８とスラスト軸受隙間
７ａとスラスト方向隙間７ｂとを同時に形成することが
でき、前述のようにスラスト方向への大きな振れを前記
フランジ部４側のスラスト軸受隙間７ａ及びハウジング
５（サイドカバー５ｂ）側のスラスト方向隙間７ｂで吸
収することができるため、軸部材３に対する軸受部材１
の位置精度出しが容易となるから、そのための組立・調
整が簡便となる。また、各軸受部材１の軸線方向長さを
長くしたり、隣合う軸受部材１の間隔を広げたりするこ
とができるので、ラジアル負荷容量やモーメント剛性を
大きくすることができ、またハウジング５の軸方向寸法
を小さくすることも可能となる。即ち、同じ大きさの外
観を持つ従来の静圧気体軸受装置と較べると、従来より
大きなラジアル負荷容量を得ることができる。BEST MODE FOR CARRYING OUT THE INVENTION In the static pressure gas bearing device of the present invention,
As shown in FIG. 1, for example, by forming a cylindrical bearing member 1 using a porous member, for example, when compressed gas is supplied from the outer peripheral surface thereof, the compressed gas is compressed from the inner peripheral surface and both end surfaces thereof. Gas ejection portions 2a to 2c are provided on the inner peripheral surface and both end surfaces so that the gas is ejected. In addition, the outer peripheral surface of the bearing member 1 is subjected to a crushing process at a portion except the circumferential groove in the central portion in the axial direction. Then, each bearing member 1 is covered on the outer side of the shaft member 3 from both sides of the flange portion 4 integrally formed in the axially intermediate portion of the shaft member 3 so as to have a larger diameter than both side portions, and the inner peripheral surface of the bearing member 1 is covered. The shaft member 3 is inserted into the flange portion 4
The bearing members 1 are arranged on both sides of each. In this state, the shaft member 3 and the bearing member 1 together with the housing body 5 of the housing 5
By inserting the elastic support member 6 such as an O-ring made of an elastic member such as rubber between each bearing member 1 and the inner hole 5a of the housing 5, The inner hole 5a of the housing 5 elastically supports the bearing member 1.
In addition, in FIG. 1, the side covers 5b of the housing 5 are covered on the outer end surfaces of both bearing members 1 that do not face the end surface of the flange portion 4 of the shaft member 3. As a result, the thrust bearing gap 7a having a predetermined size is formed between the inner end surface (one end surface) of each bearing member 1 and the end surface of the flange portion 4 of the shaft member 3 facing the one end surface, and A thrust direction clearance (damper clearance) 7b having a predetermined size is formed between the outer end surface (the other end surface) of the bearing member 1 and the housing 5 (side cover 5b) facing the other end surface. Compressed gas is supplied to the outer peripheral surface of each bearing member 1 from the air supply port 9 formed in the housing 5, and the gas ejection portion 2 provided on the inner peripheral surface and both end surfaces of each bearing member 1 is supplied.
Compressed gas is ejected from a, 2b, and 2c, and the gas pressure ejected from the inner peripheral surface gas ejecting portion 2a of the compressed gas has a predetermined dimension between the inner peripheral surface of the bearing member 1 and the outer peripheral surface of the shaft member 3. A radial bearing gap 8 is formed to support the shaft member 3 in the radial direction, and the pressure of the compressed gas ejected from the gas ejection portion 2b on the inner end surface of each bearing member 1 causes the flange portion 4, that is, the shaft member 3 to move. Support in the thrust direction. In addition, each bearing member 1 itself, due to the pressure of the compressed gas ejected from the gas ejection portion 2c of the outer end surface of the bearing member 1,
It is supported in the thrust direction in a non-contact manner with the housing 5 (side cover 5b). The exhaust is performed through the exhaust port 10 formed in the housing 5, the gap between the shaft member 3 and the side cover 5b. Therefore, the radial load and moment of the shaft member 3 which is rotated at high speed are received by the gas pressure in the two radial bearing gaps 8, and the thrust load of the shaft member 3 is the thrust bearing gap 7a on the flange portion 4 side.
It can be received at gas pressure of. As for the whirling of the shaft member 3 in the radial direction, as in the conventional case, the bearing member 1 is radially deformed so that the elastic bearing member 6 such as an O-ring is deformed so that the radial bearing gap 8 becomes constant. Is absorbed by moving in the direction, and the vibration in the thrust direction is deformed and the elastic support member 6 such as the O-ring is deformed so that the thrust bearing gaps 7a on both sides of the flange portion 4 become constant. With the change in the thrust direction clearance 7b between the side cover 5b) and the bearing member 1, the bearing member 1
Is absorbed by moving in the thrust direction. In particular, the thrust bearing gap 7a on the side of the flange portion 4 and the thrust direction gap 7b on the side of the housing 5 (side cover 5b) are rapidly damped by the gas pressure, and the flange portion 4 and the shaft member 3 with respect to each bearing member 1. Maintain in place in the axial direction. Therefore, the shaft member 3 and its flange portion 4
However, there is no contact with each bearing member 1 in either the radial direction or the thrust direction. Further, each bearing member 1 is replaced by the shaft member 3
Both the radial load and the thrust load can be supported, and the radial bearing gap 8, the thrust bearing gap 7a, and the thrust direction gap 7b can be simultaneously formed by one bearing member 1. As described above, Since a large runout can be absorbed by the thrust bearing gap 7a on the flange portion 4 side and the thrust direction gap 7b on the housing 5 (side cover 5b) side, the bearing member 1 with respect to the shaft member 3 can be absorbed.
Since it is easy to obtain the position accuracy of, the assembly / adjustment for that becomes easy. Further, since the axial length of each bearing member 1 can be increased and the interval between the adjacent bearing members 1 can be increased, the radial load capacity and moment rigidity can be increased, and the shaft of the housing 5 can be increased. It is also possible to reduce the directional dimension. That is, as compared with the conventional static pressure gas bearing device having the same appearance, a larger radial load capacity than the conventional one can be obtained.
【００１０】[0010]
【実施例】以下に、本発明の静圧気体軸受装置の一実施
例を図２を用いて説明する。この実施例は、前記図１に
示す静圧気体軸受装置を高速で回転される静電塗装用エ
アスピンドルに適用したものであり、基本的な軸受装置
の構成については同図１に示すものと同様であるため、
同様の構成部材については同等の符号を附してその詳細
な説明を省略する。ここで、図１の静圧気体軸受装置と
の最も大きな差異は、前記ハウジング５を形成する図示
の右側のサイドカバー５ｂと、軸受部材１を収納するハ
ウジング本体５ｃとの間に、軸部材３となるエアスピン
ドルを高速回転させるためのタービン機構１１を介装し
たことであり、従って図１の右側サイドカバー５ｂ側ス
ラスト方向隙間７ｂは、右側軸受部材１の外側端部の気
体噴出部２ｃと後述するハウジング５のタービン機構用
ハウジング１４との間に形成されることになる。また、
エアスピンドルを構成する軸部材３は、中空構造とさ
れ、その内径面内に、回転されない塗料供給管３０が挿
通され、当該軸部材３の左側サイドカバー５ｂからの突
出部には、供給される塗料を霧化するための塗装用治具
３１が取付けられている。また、前記各軸受部材１への
圧縮気体の給気口９は、装置の後方，即ち図示の右方か
ら圧縮気体が供給できるように、前記右側サイドカバー
５ｂから各軸受部材１の外周面に連通されている。な
お、この右側サイドカバー５ｂには、タービン，即ち軸
部材３であるエアスピンドルの回転速度を、光や磁気を
利用して検出する回転速度センサ３２が取付けられてい
る。DESCRIPTION OF THE PREFERRED EMBODIMENTS An embodiment of the static pressure gas bearing device of the present invention will be described below with reference to FIG. In this embodiment, the static pressure gas bearing device shown in FIG. 1 is applied to an electrostatic coating air spindle rotated at high speed, and the basic structure of the bearing device is shown in FIG. Is similar, so
Similar components are designated by the same reference numerals and detailed description thereof will be omitted. Here, the biggest difference from the hydrostatic gas bearing device of FIG. 1 is that the shaft member 3 is provided between the side cover 5b on the right side of the drawing that forms the housing 5 and the housing body 5c that houses the bearing member 1. The turbine mechanism 11 for rotating the air spindle at a high speed is interposed. Therefore, the thrust direction gap 7b on the right side cover 5b side in FIG. It will be formed between the housing 5 and the turbine mechanism housing 14, which will be described later. Also,
The shaft member 3 that constitutes the air spindle has a hollow structure, and the non-rotating paint supply pipe 30 is inserted into the inner diameter surface of the shaft member 3, and the shaft member 3 is supplied to the protruding portion from the left side cover 5b. A painting jig 31 for atomizing the paint is attached. Further, the compressed gas supply port 9 to each of the bearing members 1 is provided on the outer peripheral surface of each bearing member 1 from the right side cover 5b so that the compressed gas can be supplied from the rear of the device, that is, the right side in the drawing. It is in communication. A rotation speed sensor 32 that detects the rotation speed of the turbine, that is, the air spindle that is the shaft member 3 using light or magnetism is attached to the right side cover 5b.
【００１１】前記タービン機構１１としては、軸部材３
の後方端部，即ち図示の右側端部に、軸部材３を正回転
させるためのタービン用羽根１２と、軸部材３を停止さ
せるための逆転用となるタービン逆転用羽根１３とを、
当該軸部材３と一体に形成している。また、前記右側サ
イドカバー５ｂからタービン機構用ハウジング１４を介
して前記タービン用羽根１２まで圧縮気体を供給するタ
ービン用給気口１５と、当該タービン用給気口１５内の
圧縮気体を前記タービン用羽根１２に向けて噴出するタ
ービン用ノズル１６とが設けられ、更に同じく前記右側
サイドカバー５ｂからタービン機構用ハウジング１４を
介して前記タービン逆転用羽根１３まで圧縮気体を供給
するタービン逆転用給気口１７と、当該タービン逆転用
給気口１７内の圧縮気体を前記タービン逆転用羽根１３
に向けて噴出するタービン逆転用ノズル１８とが設けら
れている。As the turbine mechanism 11, the shaft member 3 is used.
A turbine blade 12 for rotating the shaft member 3 in the forward direction, and a turbine reverse rotation blade 13 for stopping the shaft member 3 at the rear end, that is, the right end shown in the drawing.
It is formed integrally with the shaft member 3. Further, a turbine air supply port 15 for supplying compressed gas from the right side cover 5b to the turbine blades 12 via the turbine mechanism housing 14, and a compressed gas in the turbine air supply port 15 for the turbine. A turbine nozzle 16 for ejecting toward the blades 12 is provided, and similarly, a turbine reverse rotation supply port for supplying compressed gas from the right side cover 5b to the turbine reverse rotation blades 13 via a turbine mechanism housing 14 is also provided. 17 and the compressed gas in the turbine reversing air supply port 17 to the turbine reversing blades 13.
And a turbine reversing nozzle 18 for ejecting toward.
【００１２】次に本実施例の静電塗装装置及び静圧気体
軸受装置の作用について説明する。まず、図２の左方に
配設される被塗装物をプラス電位又はゼロ電位に帯電
し、前記軸部材３とは一緒に回転しない塗料供給管３０
を介して、装置の後方，即ち図示の右方から、例えばマ
イナス電位に帯電された塗料が供給されると、塗料は当
該塗料供給管３０の先端，即ち図示の左方端部から、軸
部材３に一体化された塗装用治具３１に導かれ、その遠
心力及び塗装用治具３１の形状によって図示の左方向に
噴射される。すると、塗料と被塗装物との間の電磁力に
よって軽量に霧化された塗料が被塗装物に吸引され、塗
料は被塗装物に行き渡って付着し、ムラのない安定した
塗装が達成される。Next, the operation of the electrostatic coating device and the static pressure gas bearing device of this embodiment will be described. First, a paint supply pipe 30 that charges the object to be coated arranged on the left side of FIG. 2 to a positive potential or zero potential and does not rotate together with the shaft member 3
When the paint charged to, for example, a negative potential is supplied from the rear of the apparatus, that is, the right side in the drawing through the device, the paint is supplied from the tip of the paint supply pipe 30, that is, the left end in the drawing, to the shaft member. 3 is guided to the coating jig 31 integrated with the nozzle 3 and is jetted in the left direction in the drawing due to the centrifugal force and the shape of the coating jig 31. Then, the lightly atomized paint is attracted to the object to be painted by the electromagnetic force between the paint and the object to be painted, and the paint spreads and adheres to the object to achieve a stable and uniform coating. .
【００１３】ここで、静電塗装装置の軸部材３は、例え
ば塗料のバラツキなどによって大きく振れ回る可能性が
あるが、前述のように本実施例の静圧気体軸受装置で
は、軸部材３の振れ回りに対して大きな吸収力があり、
またそのスラスト成分に対して十分な減衰力があるた
め、従来のように軸受かじり等の問題が発生することは
ない。Here, the shaft member 3 of the electrostatic coating device may swing around greatly due to, for example, variations in paint, but as described above, in the static pressure gas bearing device of this embodiment, the shaft member 3 of There is a great absorbing power for whirling,
Further, since there is a sufficient damping force for the thrust component, problems such as bearing galling do not occur unlike the conventional case.
【００１４】次に、本発明の静圧気体軸受装置を前述の
ような静電塗装用エアスピンドルに適用した他の実施例
を図３を用いて説明する。この実施例の静電塗装用エア
スピンドルの基本的な軸受装置の構成については前記図
１及び図２に示すものと同様であり、図１及び図２に示
す構成部材と同様の構成部材については同等の符号を附
してその詳細な説明を省略する。Next, another embodiment in which the static pressure gas bearing device of the present invention is applied to the electrostatic coating air spindle as described above will be described with reference to FIG. The structure of the basic bearing device of the air spindle for electrostatic coating of this embodiment is the same as that shown in FIGS. 1 and 2, and the same constituent members as those shown in FIGS. The same reference numerals are given and detailed description thereof is omitted.
【００１５】ここで、図２の静電塗装用エアスピンドル
との最も大きな差異は、前記図２の実施例でハウジング
５の右部分に設けられたタービン機構１１が、本実施例
ではハウジング５の軸方向中間部，即ち前記軸部材３の
フランジ部４に設けられていることであり、従って本実
施例のハウジング本体５ｃが前記図２のタービン機構用
ハウジング１４を兼任する。このため、本実施例のフラ
ンジ部４は、前記図２のものに比して軸方向に少し長く
なっているが、フランジ部４の各端面４ａは前記各軸受
部材１の内側端面の気体噴出部２ｂから噴出された圧縮
気体の圧力を受けて、両者の間に前記スラスト軸受隙間
７ａを構成し、もって前記と同様にフランジ部４，即ち
軸部材３をスラスト方向に支持する。Here, the biggest difference from the electrostatic coating air spindle of FIG. 2 is that the turbine mechanism 11 provided in the right portion of the housing 5 in the embodiment of FIG. It is provided on the intermediate portion in the axial direction, that is, on the flange portion 4 of the shaft member 3. Therefore, the housing body 5c of the present embodiment also serves as the turbine mechanism housing 14 of FIG. Therefore, the flange portion 4 of the present embodiment is slightly longer in the axial direction than that of FIG. 2, but each end surface 4a of the flange portion 4 has a gas jet from the inner end surface of each bearing member 1. Upon receiving the pressure of the compressed gas ejected from the portion 2b, the thrust bearing gap 7a is formed between the two, and thus the flange portion 4, that is, the shaft member 3 is supported in the thrust direction similarly to the above.
【００１６】一方、前記タービン機構１１としては、前
記軸部材３のフランジ部４の外周部にタービン用羽根１
２が設けられ、またフランジ部４の外周面にはタービン
用羽根１２の軸方向両側に円周溝４ｃがそれぞれ形成さ
れている。タービン用羽根１２の半径方向外方端を結ぶ
円の直径即ちタービン用羽根１２の外径は軸受部材１の
内径面より大径であり、またタービン用羽根１２を軸部
材３と一体に形成している。また、ハウジング５にはタ
ービン用羽根１２に対して、図３ｂに示すように前記右
側サイドカバー５ｂから圧縮気体を供給するタービン用
給気口１５と、当該タービン用給気口１５内の圧縮気体
を前記タービン用羽根１２に向けて噴出するタービン用
ノズル１６とが設けられると共に、図３ａに示すよう
に、同じく前記右側サイドカバー５ｂからタービン用羽
根１２に圧縮気体を供給するタービン逆転用給気口１７
と、当該タービン逆転用給気口１７内の圧縮気体を前記
タービン用羽根１２に向けて噴出するタービン逆転用ノ
ズル１８とが設けられている。従って、前記図２に示す
実施例と異なり、本実施例では前記タービン用羽根１２
が、前記タービン逆転用羽根１３を兼任することにな
る。また、タービン用ノズル１６とタービン逆転用ノズ
ル１８とは軸部材３の軸新を含む平面に対して対称に傾
斜している。On the other hand, as the turbine mechanism 11, the turbine blade 1 is provided on the outer peripheral portion of the flange portion 4 of the shaft member 3.
2 are provided, and circumferential grooves 4c are formed on the outer peripheral surface of the flange portion 4 on both axial sides of the turbine blade 12. The diameter of a circle connecting the radially outer ends of the turbine blades 12, that is, the outer diameter of the turbine blades 12 is larger than the inner diameter surface of the bearing member 1, and the turbine blades 12 are formed integrally with the shaft member 3. ing. In addition, as shown in FIG. 3B, the housing 5 includes a turbine air supply port 15 for supplying compressed gas from the right side cover 5b to the turbine blade 12, and a compressed gas in the turbine air supply port 15. And a turbine nozzle 16 for ejecting the gas toward the turbine blade 12, and as shown in FIG. 3a, the turbine reverse rotation air supply for supplying compressed gas from the right side cover 5b to the turbine blade 12 as well. Mouth 17
And a turbine reversing nozzle 18 for ejecting the compressed gas in the turbine reversing air supply port 17 toward the turbine blade 12. Therefore, unlike the embodiment shown in FIG. 2, the turbine blade 12 is used in this embodiment.
However, it also serves as the blade 13 for reversing the turbine. Further, the turbine nozzle 16 and the turbine reversing nozzle 18 are inclined symmetrically with respect to a plane including the axis of the shaft member 3.
【００１７】従って、前記タービン用給気口１５を介し
てタービン用ノズル１６からタービン用羽根１２に圧縮
気体を噴射すると、その圧力でタービン用羽根１２が回
転され、もって軸部材３が高速回転される。また、前記
タービン用給気口１５への圧縮気体の供給を停止して、
前記タービン逆転用給気口１７を介してタービン逆転用
ノズル１８からタービン用羽根１２に圧縮気体を噴射す
ると、その圧力がタービン用羽根１２を逆回転させる方
向に作用して、軸部材３の回転が減速される。Therefore, when the compressed gas is injected from the turbine nozzle 16 to the turbine blades 12 through the turbine air supply port 15, the pressure causes the turbine blades 12 to rotate, thereby rotating the shaft member 3 at a high speed. It Further, the supply of the compressed gas to the turbine air supply port 15 is stopped,
When the compressed gas is injected from the turbine reversing nozzle 18 to the turbine blade 12 through the turbine reversing air supply port 17, the pressure acts in a direction to rotate the turbine blade 12 in the reverse direction, thereby rotating the shaft member 3. Is slowed down.
【００１８】ここで、前記図２の静電塗装用エアスピン
ドルのように静圧気体軸受装置とタービン機構とを軸方
向に併設すると、前記フランジ部４とタービン用羽根１
２との間に軸受部材１があるので組立工程での規制か
ら、タービン用羽根１２の外径を、前記軸受部材１の外
径より小さいものにしなければならない。タービン機構
１１の軸トルクは、同等の噴射気体圧力に対してタービ
ン用羽根１２の外径が大きいほど大きくなるから、この
ようにタービン用羽根１２の外径が小さいと出力トルク
も小さくなってしまう。一方、図３に示す本実施例の静
電塗装用エアスピンドルでは、軸受部材１の内径より大
きい外径のタービン用羽根１２を設定することができる
ので、同等の噴射気体圧力に対して当該タービン機構１
１の出力トルクを大きくすることができ、もってエアス
ピンドルの回転特性を安定することができるという利点
もある。また、タービン用羽根１２が受けるトルクを軸
受方両側の軸受部材１がバランス良く受けることがで
き、回転精度が向上する。更に、二つの軸受部材１の間
隔が広くなるので外部モーメント負荷に対して強くな
る。また、タービン機構用ハウジング１４を軸受用ハウ
ジング本体５ｃと一体にするなど、部品点数を低減して
コストを低廉化できると共に、エアスピンドル装置を軸
線方向に小さくすることも可能となる。When the static pressure gas bearing device and the turbine mechanism are arranged side by side in the axial direction like the electrostatic coating air spindle of FIG. 2, the flange portion 4 and the turbine blade 1 are arranged.
Since the bearing member 1 is located between the bearing member 1 and the bearing member 2, the outer diameter of the turbine blade 12 must be smaller than the outer diameter of the bearing member 1 because of restrictions in the assembly process. The axial torque of the turbine mechanism 11 increases as the outer diameter of the turbine blades 12 increases with respect to the same injection gas pressure. Therefore, when the outer diameter of the turbine blades 12 is small, the output torque also decreases. . On the other hand, in the electrostatic coating air spindle of the present embodiment shown in FIG. 3, the turbine blades 12 having an outer diameter larger than the inner diameter of the bearing member 1 can be set, so that the turbine concerned has the same injection gas pressure. Mechanism 1
There is also an advantage that the output torque of No. 1 can be increased and the rotation characteristics of the air spindle can be stabilized. In addition, the torque received by the turbine blades 12 can be received by the bearing members 1 on both sides of the bearing in a well-balanced manner, and the rotational accuracy is improved. Furthermore, since the gap between the two bearing members 1 is widened, the bearing member 1 is strong against an external moment load. Further, the turbine mechanism housing 14 is integrated with the bearing housing main body 5c to reduce the number of parts to reduce the cost, and the air spindle device can be made smaller in the axial direction.
【００１９】なお、前記軸受部材は、前述のような多孔
質絞り軸受だけでなく、オリフィス絞り軸受や自成絞り
軸受，表面絞り軸受等を使用することも可能である。ま
た、前記図３の実施例ではフランジ部４に設けられたタ
ービン用羽根１２が逆転用羽根を兼任する場合について
説明したが、当該フランジ部４の外周部にタービン用羽
根１２とタービン逆転用羽根とを併設し、タービン用羽
根に圧縮気体を噴射するタービン用ノズルと、タービン
逆転用羽根に圧縮気体を噴射するブレーキ用ノズルとを
夫々独立してハウジング５に設けてもよく、そのように
すればタービン逆転用羽根の形状を最適に設定すること
により軸部材３の停止トルクを大きくすることができ
る。As the bearing member, not only the above-mentioned porous throttle bearing but also an orifice throttle bearing, a self-made throttle bearing, a surface throttle bearing and the like can be used. Further, in the embodiment of FIG. 3 described above, the case where the turbine blade 12 provided on the flange portion 4 also serves as the reversing blade is explained. However, the turbine blade 12 and the turbine reversing blade are provided on the outer peripheral portion of the flange portion 4. And a turbine nozzle for injecting compressed gas to the turbine blade and a brake nozzle for injecting compressed gas to the turbine reversing blade may be separately provided in the housing 5, respectively. For example, the stopping torque of the shaft member 3 can be increased by optimally setting the shape of the turbine reversing blade.
【００２０】[0020]
【発明の効果】以上説明したように、本発明の静圧気体
軸受装置によれば、一つの軸受部材の周囲にラジアル軸
受隙間とスラスト軸受隙間とスラスト方向隙間とを形成
することができ、しかもスラスト軸受隙間は軸部材に一
体に形成されたフランジ部側に形成され、スラスト方向
隙間はハウジング側に形成されるから、スラスト軸受隙
間及びスラスト方向隙間内に噴出される圧縮気体の圧力
によって軸部材のスラスト方向の振れを速やかに減衰し
て吸収することができるから、軸部材及びフランジ部が
軸受部材に接触することがない。また、これに伴って軸
部材に対する軸受部材の位置精度が厳しくなくなるか
ら、装置の組立・調整が簡便で容易になる。また、ラジ
アル軸受部材とスラスト軸受部材との両方を併設する必
要がなくなるから、部品点数が少なく、組立が容易でコ
ストが安価である。更に、隣合う軸受部材を軸方向にあ
る程度離したり、軸受部材の軸方向寸法を長くできるか
ら、ラジアル負荷容量，ラジアル剛性及びモーメント剛
性を大きくできる。また、ハウジングの軸方向寸法を小
さくしたりすることができる。As described above, according to the hydrostatic gas bearing device of the present invention, it is possible to form the radial bearing gap, the thrust bearing gap and the thrust direction gap around one bearing member. Since the thrust bearing gap is formed on the flange side integrally formed with the shaft member and the thrust direction gap is formed on the housing side, the pressure of the compressed gas ejected into the thrust bearing gap and the thrust direction gap causes the shaft member to move. Since the shake in the thrust direction can be quickly attenuated and absorbed, the shaft member and the flange portion do not contact the bearing member. Further, along with this, the positional accuracy of the bearing member with respect to the shaft member becomes less severe, so that the assembly and adjustment of the device are simple and easy. Further, since it is not necessary to provide both the radial bearing member and the thrust bearing member together, the number of parts is small, the assembly is easy and the cost is low. Further, since the adjacent bearing members can be separated from each other to some extent in the axial direction and the axial dimension of the bearing member can be lengthened, radial load capacity, radial rigidity and moment rigidity can be increased. Also, the axial dimension of the housing can be reduced.
【図１】本発明の静圧気体軸受装置の構成図である。FIG. 1 is a configuration diagram of a static pressure gas bearing device of the present invention.
【図２】本発明の静圧気体軸受装置を静電塗装用エアス
ピンドルに使用した一実施例を示す構成図である。FIG. 2 is a configuration diagram showing an embodiment in which the static pressure gas bearing device of the present invention is used in an air spindle for electrostatic coating.
【図３】本発明の静圧気体軸受装置を静電塗装用エアス
ピンドルに使用した他の実施例を示す構成図である。FIG. 3 is a constitutional view showing another embodiment in which the static pressure gas bearing device of the present invention is used in an electrostatic coating air spindle.
【図４】従来の静圧気体軸受装置の構成図である。FIG. 4 is a configuration diagram of a conventional static pressure gas bearing device.
１は軸受部材 ２ａ，２ｂ，２ｃは気体噴出部 ３は軸部材 ４はフランジ部 ５はハウジング ６は弾性支持部材 ７ａはスラスト軸受隙間 ７ｂはスラスト方向隙間 ８はラジアル軸受隙間 ９は給気口 １０は排気口 １１はタービン機構 ３０は塗料供給管 ３１は静電塗装用治具 1 is a bearing member 2a, 2b, 2c is a gas ejection part 3 is a shaft member 4 is a flange part 5 is a housing 6 is an elastic support member 7a is a thrust bearing gap 7b is a thrust direction gap 8 is a radial bearing gap 9 is a supply port 10 Is an exhaust port 11 is a turbine mechanism 30 is a paint supply pipe 31 is an electrostatic coating jig
───────────────────────────────────────────────────── フロントページの続き (72)発明者 佐藤 俊徳 神奈川県藤沢市鵠沼神明一丁目５番50号 日本精工株式会社内 ─────────────────────────────────────────────────── ─── Continued Front Page (72) Inventor Toshinori Sato 1-5-50, Shinmei Kugenuma, Fujisawa-shi, Kanagawa NSK Ltd.
Claims (1)
両端面とに気体噴出部を設け、当該軸受部材の内周面内
に軸部材を挿通して当該軸部材の軸方向中間部に一体に
形成されたフランジ部の両側に軸受部材を夫々配設し、
各軸受部材はハウジングの内孔に弾性支持され、各軸受
部材の一方の端面と当該一方の端面に対向する軸部材の
フランジ部端面との間に夫々スラスト軸受隙間を形成
し、各軸受部材の他方の端面と当該他方の端面に対向す
るハウジングとの間に夫々スラスト方向隙間を形成した
ことを特徴とする静圧気体軸受装置。1. A cylindrical member is provided with gas ejection portions on the inner peripheral surface and both end surfaces of the bearing member, and the shaft member is inserted into the inner peripheral surface of the bearing member to axially intermediate the shaft member. The bearing members are respectively arranged on both sides of the flange portion formed integrally with the section,
Each bearing member is elastically supported in the inner hole of the housing, and a thrust bearing gap is formed between one end surface of each bearing member and the flange portion end surface of the shaft member facing the one end surface. A hydrostatic gas bearing device, characterized in that a thrust direction gap is formed between the other end surface and the housing facing the other end surface.
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP22342195A JP3572737B2 (en) | 1995-06-26 | 1995-08-31 | Hydrostatic gas bearing device |
Applications Claiming Priority (3)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP15906495 | 1995-06-26 | ||
| JP7-159064 | 1995-06-26 | ||
| JP22342195A JP3572737B2 (en) | 1995-06-26 | 1995-08-31 | Hydrostatic gas bearing device |
Publications (2)
| Publication Number | Publication Date |
|---|---|
| JPH0972338A true JPH0972338A (en) | 1997-03-18 |
| JP3572737B2 JP3572737B2 (en) | 2004-10-06 |
Family
ID=26485980
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP22342195A Expired - Fee Related JP3572737B2 (en) | 1995-06-26 | 1995-08-31 | Hydrostatic gas bearing device |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JP3572737B2 (en) |
Cited By (9)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JP2006153070A (en) * | 2004-11-26 | 2006-06-15 | Ckd Corp | Air bearing cylinder and manifold cylinder |
| JP2008095931A (en) * | 2006-10-16 | 2008-04-24 | Shigetaka Yoshimoto | Static pressure gas bearing mechanism, shaft rotation device using the same and spindle motor |
| JP2009036343A (en) * | 2007-08-03 | 2009-02-19 | Ntn Corp | Turning device and ct scanner system |
| DE202008015714U1 (en) * | 2008-11-27 | 2010-04-22 | Ebm-Papst St. Georgen Gmbh & Co. Kg | electric motor |
| JP2013050149A (en) * | 2011-08-30 | 2013-03-14 | Nsk Ltd | Air spindle |
| JP2014194264A (en) * | 2013-03-29 | 2014-10-09 | Abb Kk | Gas bearing spindle |
| WO2018079277A1 (en) * | 2016-10-26 | 2018-05-03 | Ntn株式会社 | Air turbine driving spindle |
| KR20190035750A (en) | 2016-08-04 | 2019-04-03 | 에누티에누 가부시기가이샤 | Air turbine drive spindle |
| CN111623038A (en) * | 2020-07-06 | 2020-09-04 | 德本恒嘉精机(昆山)有限公司 | Ultrahigh-precision hydrostatic bearing |
-
1995
- 1995-08-31 JP JP22342195A patent/JP3572737B2/en not_active Expired - Fee Related
Cited By (13)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JP2006153070A (en) * | 2004-11-26 | 2006-06-15 | Ckd Corp | Air bearing cylinder and manifold cylinder |
| JP4619756B2 (en) * | 2004-11-26 | 2011-01-26 | シーケーディ株式会社 | Air bearing cylinder |
| JP2008095931A (en) * | 2006-10-16 | 2008-04-24 | Shigetaka Yoshimoto | Static pressure gas bearing mechanism, shaft rotation device using the same and spindle motor |
| JP2009036343A (en) * | 2007-08-03 | 2009-02-19 | Ntn Corp | Turning device and ct scanner system |
| DE202008015714U1 (en) * | 2008-11-27 | 2010-04-22 | Ebm-Papst St. Georgen Gmbh & Co. Kg | electric motor |
| JP2013050149A (en) * | 2011-08-30 | 2013-03-14 | Nsk Ltd | Air spindle |
| JP2014194264A (en) * | 2013-03-29 | 2014-10-09 | Abb Kk | Gas bearing spindle |
| KR20190035750A (en) | 2016-08-04 | 2019-04-03 | 에누티에누 가부시기가이샤 | Air turbine drive spindle |
| DE112017003887T5 (en) | 2016-08-04 | 2019-04-18 | Ntn Corporation | Drive spindle for compressed air turbine |
| US11033915B2 (en) | 2016-08-04 | 2021-06-15 | Ntn Corporation | Air turbine drive spindle |
| WO2018079277A1 (en) * | 2016-10-26 | 2018-05-03 | Ntn株式会社 | Air turbine driving spindle |
| CN111623038A (en) * | 2020-07-06 | 2020-09-04 | 德本恒嘉精机(昆山)有限公司 | Ultrahigh-precision hydrostatic bearing |
| CN111623038B (en) * | 2020-07-06 | 2023-08-29 | 德本恒嘉精机(昆山)有限公司 | Ultra-high precision hydrostatic bearing |
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| Publication number | Publication date |
|---|---|
| JP3572737B2 (en) | 2004-10-06 |
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