JPH09329015A - Corona discharge element and gas treatment device using it - Google Patents
Corona discharge element and gas treatment device using itInfo
- Publication number
- JPH09329015A JPH09329015A JP15253396A JP15253396A JPH09329015A JP H09329015 A JPH09329015 A JP H09329015A JP 15253396 A JP15253396 A JP 15253396A JP 15253396 A JP15253396 A JP 15253396A JP H09329015 A JPH09329015 A JP H09329015A
- Authority
- JP
- Japan
- Prior art keywords
- discharge
- gas
- porous filter
- electrodes
- corona discharge
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Granted
Links
Classifications
-
- F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
- F01—MACHINES OR ENGINES IN GENERAL; ENGINE PLANTS IN GENERAL; STEAM ENGINES
- F01N—GAS-FLOW SILENCERS OR EXHAUST APPARATUS FOR MACHINES OR ENGINES IN GENERAL; GAS-FLOW SILENCERS OR EXHAUST APPARATUS FOR INTERNAL COMBUSTION ENGINES
- F01N3/00—Exhaust or silencing apparatus having means for purifying, rendering innocuous, or otherwise treating exhaust
- F01N3/08—Exhaust or silencing apparatus having means for purifying, rendering innocuous, or otherwise treating exhaust for rendering innocuous
- F01N3/0892—Electric or magnetic treatment, e.g. dissociation of noxious components
-
- F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
- F01—MACHINES OR ENGINES IN GENERAL; ENGINE PLANTS IN GENERAL; STEAM ENGINES
- F01N—GAS-FLOW SILENCERS OR EXHAUST APPARATUS FOR MACHINES OR ENGINES IN GENERAL; GAS-FLOW SILENCERS OR EXHAUST APPARATUS FOR INTERNAL COMBUSTION ENGINES
- F01N2240/00—Combination or association of two or more different exhaust treating devices, or of at least one such device with an auxiliary device, not covered by indexing codes F01N2230/00 or F01N2250/00, one of the devices being
- F01N2240/28—Combination or association of two or more different exhaust treating devices, or of at least one such device with an auxiliary device, not covered by indexing codes F01N2230/00 or F01N2250/00, one of the devices being a plasma reactor
Landscapes
- Engineering & Computer Science (AREA)
- Chemical & Material Sciences (AREA)
- Health & Medical Sciences (AREA)
- Chemical Kinetics & Catalysis (AREA)
- Toxicology (AREA)
- Combustion & Propulsion (AREA)
- Mechanical Engineering (AREA)
- General Engineering & Computer Science (AREA)
- Processes For Solid Components From Exhaust (AREA)
- Treating Waste Gases (AREA)
- Electrostatic Separation (AREA)
Abstract
Description
【０００１】[0001]
【発明の属する技術分野】この発明はディーゼルエンジ
ン、各種ボイラーなどの排気ガス中に含まれる粒子状汚
染物質ならびにガス状汚染物質を除去・分解したり、各
種有機溶剤や有機塩素剤、悪臭などを含有するガスを浄
化するためのコロナ放電素子ならびにそれを用いたガス
処理装置に関するものである。BACKGROUND OF THE INVENTION 1. Field of the Invention The present invention removes and decomposes particulate pollutants and gaseous pollutants contained in exhaust gas from diesel engines, various boilers, etc., and removes various organic solvents, organochlorine agents, odors, etc. The present invention relates to a corona discharge element for purifying contained gas and a gas treatment device using the same.
【０００２】[0002]
【従来の技術】従来のコロナ放電素子は図９に示すよう
に２つの絶縁された電極１ａ、４ａ間に稠密な誘電体２
ａを挟み込み、該両電極間に交流高電圧またはパルス電
圧９を印加することにより無声放電と呼ばれる形式の放
電を発生させたり、図１０に示すように稠密な誘電体２
ａの一側面に誘導電極１ａを、他側面に放電電極４ｂを
設け該両電極間に交流高電圧またはパルス電圧を印加す
ることにより沿面放電と呼ばれる形式の放電を発生させ
ていた。2. Description of the Related Art As shown in FIG. 9, a conventional corona discharge element has a dense dielectric 2 between two insulated electrodes 1a and 4a.
By sandwiching a and applying an alternating high voltage or a pulse voltage 9 between the electrodes, a discharge of the type called silent discharge is generated, or as shown in FIG.
The induction electrode 1a is provided on one side surface of the a and the discharge electrode 4b is provided on the other side surface thereof, and an AC high voltage or a pulse voltage is applied between the both electrodes to generate a discharge called a creeping discharge.
【０００３】また、ディーゼルエンジンの排気ガス中に
含まれる粒子状汚染物質を除去するために図１１に示す
ような蜂の巣状のセラミックフィルタ１１を用い、処理
対象ガス５がガス入口１２から入って多孔質セラミック
フィルタ１１を通過ガス１０で示すように通過する際に
粒子状汚染物質を分離除去し、ガス出口１３から処理終
了ガス６として排出していた。Further, a honeycomb ceramic filter 11 as shown in FIG. 11 is used to remove particulate pollutants contained in the exhaust gas of a diesel engine, and a gas 5 to be treated enters from a gas inlet 12 and is porous. When passing through the high-quality ceramic filter 11 as indicated by the passing gas 10, particulate contaminants were separated and removed, and the gas was discharged from the gas outlet 13 as the treatment completed gas 6.
【０００４】このような従来の無声放電コロナ放電素子
や沿面放電コロナ放電素子ではプラズマを発生させ、プ
ラズマ中に生成されるラジカルと排ガス中のガス状汚染
物質との化学反応を発生させることはできたが、粒子状
汚染物質は除去することはできなかった。In such a conventional silent discharge corona discharge element or creeping discharge corona discharge element, it is not possible to generate plasma and to cause a chemical reaction between radicals generated in the plasma and gaseous pollutants in the exhaust gas. However, particulate contaminants could not be removed.
【０００５】また、無声放電コロナ放電素子や沿面放電
コロナ放電素子で発生するプラズマは放電空間３ａの空
隙で疎らに発生する極細いチャネルや稠密な誘電体の表
面で形成される結果、ラジカルと排ガス中のガス状汚染
物質の分子との衝突確率が小さく処理に時間がかかって
いた。Further, the plasma generated in the silent discharge corona discharge element or the creeping discharge corona discharge element is formed on the surface of the dense dielectric material or the extremely thin channels sparsely generated in the voids of the discharge space 3a, resulting in radicals and exhaust gas. The probability of collision with the molecules of the gaseous pollutants inside was small and it took a long time to process.
【０００６】一方、セラミックフィルタではディーゼル
排ガス中のカーボンを主成分とする粒子状汚染物質は除
去することはできたが、ガス状汚染物質に対しては効果
がなかった。On the other hand, the ceramic filter was able to remove the particulate pollutants containing carbon as the main component in the diesel exhaust gas, but was ineffective against the gaseous pollutants.
【０００７】さらに、セラミックフィルタで排ガス中よ
り除去した粒子状汚染物質はフィルタ上に蓄積され目詰
りを生じるため、定期的に加熱してカーボンを燃焼させ
て取り除く作業が必要であった。Further, since particulate contaminants removed from the exhaust gas by the ceramic filter are accumulated on the filter and cause clogging, it is necessary to periodically heat and burn the carbon to remove it.
【０００８】その際、局所的に温度が異常上昇してセラ
ミックフィルタが破損する場合があった。At that time, the temperature may abnormally rise locally and the ceramic filter may be damaged.
【０００９】[0009]
【発明が解決しようとする課題】この発明の目的は排ガ
ス中の粒子状汚染物質とガス状汚染物質を同時に除去す
ることで清浄なガスとして外部に放出できるようにする
ことである。SUMMARY OF THE INVENTION An object of the present invention is to simultaneously remove particulate pollutants and gaseous pollutants in exhaust gas so that they can be released to the outside as clean gas.
【００１０】他の目的はプラズマで生成されるラジカル
とガス状汚染物質分子との衝突確率を高めて、そのガス
状汚染物質分子を酸化作用と還元作用で分解して安全な
分子に変換するために要する時間（処理時間）を短くす
ることである。Another object is to increase the probability of collision between radicals generated in plasma and molecules of gaseous pollutants, and to decompose the gaseous pollutant molecules by oxidation and reduction to convert them into safe molecules. Is to shorten the time required for (processing time).
【００１１】また他の目的は、ディーゼル排ガス中のカ
ーボンを主成分とする粒子状汚染物質を分解する場合、
プラズマにより低温で二酸化炭素として除去し、前記セ
ラミックフィルタの局所加熱による破損などを防止する
ことである。Another object is to decompose carbonaceous particulate pollutants in diesel exhaust gas.
It is to remove carbon dioxide as low-temperature carbon dioxide by plasma to prevent the ceramic filter from being damaged by local heating.
【００１２】さらに他の目的は、ディーゼル排ガス中の
カーボンを主成分とする粒子状汚染物質を排ガス中の窒
素酸化物の還元剤として作用させ、窒素酸化物を窒素に
変換して処理することである。[0012] Still another object is to treat the particulate pollutants mainly containing carbon in the diesel exhaust gas as a reducing agent for nitrogen oxides in the exhaust gas and converting the nitrogen oxides into nitrogen for treatment. is there.
【００１３】[0013]
【課題を解決するための手段】この発明のコロナ放電素
子およびそれを用いた処理装置は金属や半導体などで作
製された互に絶縁された一対の電極間に、セラミックな
どの誘電体で作製した多孔質フィルタとアルミナなどの
セラミックや、石英ガラスなどのガラスで作製した稠密
な誘電体を夫々少なくとも１つずつ挟み込んでコロナ放
電素子を構成し、該両電極間に交流高電圧もしくはパル
ス高電圧を印加して沿面放電、無声放電、ボイド放電の
少なくとも１つの放電形態を有するコロナ放電を発生さ
せ、非平衡プラズマを発生させるものである。DISCLOSURE OF THE INVENTION A corona discharge element according to the present invention and a processing apparatus using the same are made of a dielectric material such as ceramic between a pair of mutually insulated electrodes made of metal or semiconductor. At least one dense dielectric made of a porous filter and ceramics such as alumina or glass such as quartz glass is sandwiched between them to form a corona discharge element, and an AC high voltage or a pulse high voltage is applied between both electrodes. A non-equilibrium plasma is generated by applying a corona discharge having at least one discharge mode of creeping discharge, silent discharge, and void discharge.
【００１４】この時、排ガスなどの処理対象ガスを該多
孔質フィルタを通過させる過程で粒子状汚染物質を多孔
質フィルタ上に堆積して排ガスから分離するものであ
る。At this time, in the process of passing the gas to be treated such as exhaust gas through the porous filter, particulate contaminants are deposited on the porous filter and separated from the exhaust gas.
【００１５】同時に、多孔質フィルタ表面上では沿面放
電が、内部の微小空隙状の細孔内ではボイド放電が、多
孔質フィルタの両側もしくは片側では無声放電が、それ
らの各放電の少なくとも１つが発生しており、放電プラ
ズマで生成されるラジカルとガス状汚染物質が多孔質フ
ィルタの表面及び内部の細孔内で衝突するために、従来
の放電空間におけるガス中のみで衝突する場合と比較し
て衝突確率が大きくなり、ガス状汚染物質の酸化・還元
反応が促進され処理時間が低減できる。At the same time, at least one of creeping discharge is generated on the surface of the porous filter, void discharge is generated inside the minute void-like pores inside, and silent discharge is generated on both sides or one side of the porous filter. Since the radicals generated in the discharge plasma and the gaseous pollutants collide with each other in the surface and inside the pores of the porous filter, compared with the case of colliding only in the gas in the conventional discharge space. The collision probability increases, the oxidation / reduction reaction of gaseous pollutants is promoted, and the processing time can be reduced.
【００１６】特に、ディーゼルエンジンから排出される
排ガスでは、排ガス中のカーボンを主成分とする粒子状
汚染物質は多孔質フィルタで濾過される際、そのフィル
タ上に堆積するが、そこに存在する放電プラズマ中の酸
化性ラジカルの作用で二酸化炭素に酸化され、ガス状物
質となって前記フィルタ上から除去される。In particular, in the exhaust gas discharged from a diesel engine, when the particulate pollutant containing carbon as a main component in the exhaust gas is filtered by the porous filter, it is deposited on the filter, but the discharge existing there. Oxidizing radicals in the plasma oxidize the carbon dioxide to form a gaseous substance that is removed from the filter.
【００１７】この時、カーボンを主成分とする粒子状汚
染物質の二酸化炭素への酸化反応は低温で進行するた
め、セラミックフィルタの損傷につながる局所加熱など
の問題は発生しない。At this time, since the oxidation reaction of the particulate pollutant containing carbon as a main component to carbon dioxide proceeds at a low temperature, problems such as local heating leading to damage to the ceramic filter do not occur.
【００１８】また、ディーゼルエンジンから排出される
排ガスは酸素濃度が高いため、放電生成プラズマだけで
は排ガス中の窒素酸化物は一層高次の酸化物、例えば一
酸化窒素は二酸化窒素に酸化されるのみで、排ガス中の
窒素酸化物を除去することが難しいが、カーボン状粒子
の共存で、特に、セラミックフィルタの表面で放電生成
プラズマの作用を受けると窒素酸化物は窒素にまで還元
されるため、排ガス中の窒素酸化物を除去することが可
能となる。Further, since the exhaust gas discharged from the diesel engine has a high oxygen concentration, the nitrogen oxides in the exhaust gas are only oxidized to higher oxides, for example, nitric oxide is oxidized to nitrogen dioxide only by the discharge-generated plasma. In, it is difficult to remove the nitrogen oxides in the exhaust gas, but in the coexistence of carbon-like particles, particularly when the effect of discharge-generated plasma on the surface of the ceramic filter, the nitrogen oxides are reduced to nitrogen, It becomes possible to remove nitrogen oxides in the exhaust gas.
【００１９】[0019]
【発明の実施の形態】金属や半導体などで作製された互
に絶縁された一対の電極間にアルミナセラミックなどの
誘電体で作製した多孔質フィルタと、アルミナなどのセ
ラミックや石英ガラスなどのガラスで作製した稠密な誘
電体を、少なくとも１つずつ挟み込んだコロナ放電素子
を構成し、両電極間に交流高電圧もしくはパルス高電圧
を印加することで沿面放電、無声放電、ボイド放電の少
なくとも１つの放電形態を有するコロナ放電を発生させ
非平衡プラズマを発生させる。BEST MODE FOR CARRYING OUT THE INVENTION A porous filter made of a dielectric material such as alumina ceramic between a pair of mutually insulated electrodes made of metal or semiconductor, and a ceramic such as alumina or glass such as quartz glass. At least one discharge of creeping discharge, silent discharge, and void discharge by forming a corona discharge element in which at least one dense dielectric is sandwiched and applying high AC voltage or high pulse voltage between both electrodes A morphological corona discharge is generated to generate a non-equilibrium plasma.
【００２０】処理対象排ガスを上記コロナ放電素子の多
孔質フィルタを通過させて浄化する場合は、該多孔質フ
ィルタの内部にそこを通過させるためのガス流路を設け
る。When the exhaust gas to be treated is purified by passing through the porous filter of the corona discharge element, a gas passage is provided inside the porous filter for passing therethrough.
【００２１】処理対象排ガス中の粒子状汚染物質は多孔
質フィルタにより濾過される際、除去され、ガス状汚染
物質は放電プラズマで生成されるラジカルにより安全な
ガスに分解して除去される。The particulate pollutants in the exhaust gas to be treated are removed when being filtered by the porous filter, and the gaseous pollutants are decomposed and removed into a safe gas by the radicals generated by the discharge plasma.
【００２２】特に、処理対象排ガスがディーゼルエンジ
ンの排ガスの場合、カーボンを主成分とする粒子状汚染
物質は多孔質フィルタで濾過される際、放電プラズマの
作用で低温酸化して二酸化炭素に変換されて放出される
ため、多孔質フィルタは常に目詰まりのない状態が保持
されるうえに、排ガス中のガス状汚染物質の窒素酸化物
を放電プラズマの作用の下で還元して安全な窒素ガスと
して放出できる。Particularly, when the exhaust gas to be treated is the exhaust gas of a diesel engine, when the particulate pollutant containing carbon as a main component is filtered by a porous filter, it is oxidized at a low temperature by the action of discharge plasma and converted into carbon dioxide. Since the porous filter is always released without clogging, the nitrogen oxides of the gaseous pollutants in the exhaust gas are reduced under the action of discharge plasma to produce safe nitrogen gas. Can be released.
【００２３】[0023]
【実施例】この発明のコロナ放電素子の実施例を添付の
図面で説明すると図１に示すように、アルミナなどのセ
ラミックや石英などのガラスで作製した稠密な誘電体２
ａに密着して、導体または半導体の板、網、蒸着膜など
で作製した誘導電極１ａと、これに平行して放電極４ａ
を配置して、誘電体２ａ、放電極４ａの間にセラミック
などの誘電体で構成された板状の多孔質フィルタ１４ａ
を置いて放電空間３ａ、３ｂを形成する。DETAILED DESCRIPTION OF THE PREFERRED EMBODIMENTS An embodiment of the corona discharge element of the present invention will be described with reference to the accompanying drawings. As shown in FIG. 1, a dense dielectric 2 made of ceramic such as alumina or glass such as quartz.
Induction electrode 1a made of a conductor or semiconductor plate, net, vapor-deposited film, and the like, and discharge electrode 4a in parallel with a.
And a plate-like porous filter 14a made of a dielectric such as ceramic between the dielectric 2a and the discharge electrode 4a.
To form discharge spaces 3a and 3b.
【００２４】そして、両電極１ａ、４ａは互に絶縁して
保持し、該両電極１ａ、４ａ間にリード線７、８を介し
て交流高圧電源もしくは高圧パルス電源９を接続するも
のである。The electrodes 1a and 4a are held insulated from each other, and an AC high voltage power source or a high voltage pulse power source 9 is connected between the electrodes 1a and 4a via lead wires 7 and 8.
【００２５】該電極間に交流高電圧もしくは高圧パルス
電圧を印加すると図２に示す如く放電空間３ａ、３ｂで
無声放電３ｄが、また、多孔質フィルタ１４ａの表面１
４ｓで、並びに稠密な誘電体２ａの放電空間３ａに接し
た表面２ｓで沿面放電１４ｓｄおよび２ｓｄがさらに、
多孔質フィルタ１４ａ内部の細孔１４ｖではボイド放電
１４ｖｄが発生する。When an AC high voltage or a high voltage pulse voltage is applied between the electrodes, silent discharge 3d is generated in the discharge spaces 3a and 3b as shown in FIG. 2 and the surface 1 of the porous filter 14a.
4s, and the surface discharge 2s in contact with the discharge space 3a of the dense dielectric 2a, creeping discharges 14sd and 2sd are further
The void discharge 14vd is generated in the pores 14v inside the porous filter 14a.
【００２６】これらの無声放電３ｄ、沿面放電１４ｓ
ｄ、２ｓｄ、ボイド放電１４ｖｄでプラズマを生成し、
放電空間３ａ、３ｂもしくは多孔質フィルタ１４ａ内部
の細孔１４ｖに存在するガス分子を励起し、反応性に富
むラジカル例えば図示してないが、酸化性ラジカルとし
てＮＯ*、Ｏ2*、ＯＨなど、還元性ラジカルとしてＮ*、
Ｎ2*、ＣＯ*などやオゾンを大量に生成する。These silent discharge 3d, creeping discharge 14s
d, 2sd, void discharge 14vd to generate plasma,
Radicals that excite gas molecules existing in the discharge spaces 3a, 3b or the pores 14v inside the porous filter 14a and are highly reactive, such as NO * , O2 * , OH, etc. as oxidizing radicals, which are not shown. N * as a reducing radical,
It produces a large amount of N 2 * , CO * , and ozone.
【００２７】また上述のコロナ放電素子を用いたガス処
理装置の実施例も図１に示す通りの装置であって、その
装置の作用状況を示す図２において、ディーゼルエンジ
ン、各種ボイラーなどの排ガスや、有機溶剤、有機塩素
剤、悪臭などを含む空気などの処理対象ガス５を多孔質
フィルタ１４ａの一側の放電空間３ａ内に、その多孔質
フィルタ１４を通過ガス１０として多孔質フィルタ１４
ａの他側の放電空間３ｂを通過するように導入すると、
その際、処理対象ガス５中のガス状汚染物質は放電生成
プラズマ中の電子の射突を直接受けると同時に、プラズ
マで生成されるラジカルやオゾン分子と衝突して酸化・
還元反応し、無害化され処理終了ガス６としてガス処理
装置の外部に放出される。An embodiment of the gas treatment device using the above-mentioned corona discharge element is also the device as shown in FIG. 1, and in FIG. 2 showing the operation state of the device, exhaust gas from diesel engine, various boilers, etc. , A solvent 5 such as an organic solvent, an organic chlorine agent, and air containing a foul odor is placed in the discharge space 3a on one side of the porous filter 14a.
When it is introduced so as to pass through the discharge space 3b on the other side of a,
At that time, the gaseous pollutants in the gas to be treated 5 are directly bombarded with electrons in the discharge-generated plasma, and at the same time, they collide with radicals and ozone molecules generated in the plasma to be oxidized and oxidized.
The gas undergoes a reduction reaction, is rendered harmless, and is discharged to the outside of the gas processing apparatus as a processing-completed gas 6.
【００２８】同時に多孔質フィルタ１４ａは処理対象ガ
ス５を瀘過する際、その中に含まれる粒子状汚染物質を
その表面１４ｓ上に堆積するので、前述の処理対象ガス
５のガス状汚染物質と粒子状汚染物質を同時に除去でき
る。At the same time, the porous filter 14a deposits the particulate pollutants contained therein on the surface 14s when the gas 5 to be treated is filtered, so that the gaseous pollutants of the gas 5 to be treated are Particulate contaminants can be removed at the same time.
【００２９】特に、処理対象ガス５がディーゼルエンジ
ン排ガスの場合には粒子状汚染物質はカーボンを主成分
としており、多孔質フィルタ１４ａ上にカーボンが濾過
堆積するが、放電生成プラズマの作用により、低温酸化
され二酸化炭素として無害化されガスとなって放出され
る。In particular, when the gas 5 to be treated is a diesel engine exhaust gas, the particulate pollutant contains carbon as a main component, and carbon is deposited by filtration on the porous filter 14a. It is oxidized and made harmless as carbon dioxide and released as gas.
【００３０】また、処理対象ガス５がディーゼルエンジ
ン排ガスの場合には図２に示すように一酸化窒素ＮＯを
主とする窒素酸化物がガス状汚染物質として多く含有さ
れているが、多孔質フィルタ１４ａの表面１４ｓ上に濾
過堆積されたカーボンＣが同図の楕円内の放電プラズマ
中での反応状況に示す如く放電生成プラズマ下では還元
剤として作用し、カーボンＣが低温酸化されて二酸化炭
素ＣＯ2となる反応に付随して、窒素酸化物は還元反応
により窒素Ｎ2となって無害化され処理終了ガス６とな
って外部に排出される。Further, when the gas to be treated 5 is a diesel engine exhaust gas, as shown in FIG. 2, a large amount of nitrogen oxides mainly containing nitric oxide NO is contained as a gaseous pollutant. The carbon C filtered and deposited on the surface 14s of 14a acts as a reducing agent under the discharge-generated plasma as shown in the reaction situation in the discharge plasma in the ellipse in the figure, and the carbon C is oxidized at a low temperature and carbon dioxide CO Along with the reaction of becoming 2 , the nitrogen oxides are reduced to nitrogen N 2 by the reduction reaction and rendered harmless, and are discharged to the outside as the processing end gas 6.
【００３１】この発明のコロナ放電素子及びそれを用い
たガス処理装置実施例は図１に示すものに限定されるも
のでなく、この発明の範囲内で部分的に変更したり、付
加して実施することができる。例えば図１の実施例のよ
うにする代りに、図３のように稠密な誘電体２ｂに密着
して導体または半導体の板、網、蒸着膜などで作製した
放電極４ａを誘導電極１ａに平行に絶縁配置してもよ
い。The corona discharge element of the present invention and the embodiment of the gas treatment apparatus using the same are not limited to those shown in FIG. 1, but are partially modified or added within the scope of the present invention. can do. For example, instead of the embodiment shown in FIG. 1, a discharge electrode 4a made of a conductor or semiconductor plate, a net, a vapor deposition film or the like is closely attached to the dense dielectric 2b as shown in FIG. It may be arranged so as to be insulated.
【００３２】また、図４のように多孔質フィルタ１４ａ
上に直接、スリット状、網状、パンチング状などガスが
通過できるように導体または半導体の板、網、蒸着膜な
どで作製したコロナ放電極４ｂを誘導電極１ａに平行に
絶縁配置してもよい。Further, as shown in FIG. 4, the porous filter 14a
A corona discharge electrode 4b made of a conductor or semiconductor plate, a net, a vapor deposition film or the like may be directly disposed on the insulating member in parallel with the induction electrode 1a so that a gas such as a slit, a net or a punching gas can pass therethrough.
【００３３】さらに図１の実施例のように、誘導電極１
ａ、板状稠密誘電体２ａ、放電空間５、板状誘電体製セ
ラミックフィルタ１４ａでコロナ放電素子を形成する代
りに、平行電極構造のみならず、図５に示すように円筒
状誘導電極４ｃ、放電空間３ａ、３ｂ、円筒状誘電体製
セラミックフィルタ１４ｂ、円筒状稠密誘電体２ｃ、誘
導電極１ｂで同心的に形成してもよい。Further, as in the embodiment of FIG. 1, the induction electrode 1
Instead of forming a corona discharge element with a, the plate-shaped dense dielectric 2a, the discharge space 5, and the plate-shaped dielectric ceramic filter 14a, not only a parallel electrode structure but also a cylindrical induction electrode 4c as shown in FIG. The discharge spaces 3a and 3b, the cylindrical dielectric ceramic filter 14b, the cylindrical dense dielectric 2c, and the induction electrode 1b may be formed concentrically.
【００３４】或は、図６の実施例のように前記図５の実
施例における、円筒状誘電体円筒状誘導電極４ｃの内面
に稠密な円筒状誘電体２ｄを配置することもできる。Alternatively, as in the embodiment of FIG. 6, the dense cylindrical dielectric 2d can be arranged on the inner surface of the cylindrical dielectric induction electrode 4c in the embodiment of FIG.
【００３５】また或は図７に示すように、前記図５の実
施例における円筒状誘導電極４ｃを設ける代りに、円筒
状誘電体製セラミックフィルタ１４ｂの外周に接触して
リング状、若しくは螺旋状コロナ放電極４ｄを配置する
こともできる。Alternatively, as shown in FIG. 7, instead of providing the cylindrical induction electrode 4c in the embodiment of FIG. 5, a ring-shaped or spiral-shaped contact is made with the outer periphery of the cylindrical dielectric ceramic filter 14b. The corona discharge electrode 4d can also be arranged.
【００３６】さらに或は図８に示すように前記図７の実
施例におけるリング状若しくは螺旋状コロナ放電極４ｄ
の代りに、金網状コロナ放電極４ｅを設けることも可能
である。Further, as shown in FIG. 8, the ring-shaped or spiral corona discharge electrode 4d in the embodiment of FIG. 7 is used.
Instead of, the wire mesh corona discharge electrode 4e may be provided.
【００３７】上記図３乃至図８に示した実施例の図面符
号中図１及び２に示す図面符号と同一の部分について
は、その部分の名称及び機能についても同一である。In the drawing reference numerals of the embodiment shown in FIGS. 3 to 8, the same parts as the reference numerals shown in FIGS. 1 and 2 have the same names and functions.
【００３８】[0038]
【発明の効果】互に絶縁された一対の電極間に誘電体で
構成された多孔質フィルタおよび稠密な誘電体を夫々少
なくとも１つずつ挟み込んでいることによって処理対象
ガスが該多孔質フィルタを通過する際に、単に放電空間
を通過させるだけの場合に比較して、該多孔質フィルタ
の表面や内部細孔で発生する放電生成プラズマの作用
（電子の射突やラジカル・オゾンとの衝突）を大幅に向
上させることが可能となる。EFFECT OF THE INVENTION At least one porous filter made of a dielectric material and at least one dense dielectric material are sandwiched between a pair of electrodes insulated from each other, so that the gas to be processed passes through the porous filter. When compared with the case of simply passing through the discharge space, the action of discharge-generated plasma generated on the surface of the porous filter or inside pores (electron collision or collision with radical / ozone) It is possible to greatly improve.
【００３９】しかも、多孔質フィルタの表面、内部の細
孔の壁面がラジカル・オゾンとガス状有害物質分子との
反応の場となり酸化・還元反応が促進される。Moreover, the surface of the porous filter and the wall surface of the internal pores serve as a place of reaction between radicals / ozone and molecules of the gaseous toxic substance to promote the oxidation / reduction reaction.
【００４０】これらの結果、単に放電空間を通過させる
だけの場合に比較してガス処理時間を大幅に短縮するこ
とが可能となる。As a result, the gas treatment time can be significantly shortened as compared with the case of simply passing through the discharge space.
【００４１】また、処理対象ガスが粒子状有害物質を含
有する場合には、ガス状有害物質と粒子状有害物質を同
時に除去できる。When the gas to be treated contains particulate harmful substances, the gaseous harmful substances and the particulate harmful substances can be removed at the same time.
【００４２】特に処理対象ガスがディーゼルエンジン排
ガスの場合には多孔質フィルタに濾過・蓄積されたカー
ボンが放電生成プラズマの作用を受け低温酸化され、同
時に窒素酸化物が還元され、それぞれ二酸化炭素、窒素
に変換され無害な処理終了ガスとして放出される。Particularly when the gas to be treated is a diesel engine exhaust gas, the carbon filtered and accumulated in the porous filter is oxidized at a low temperature by the action of discharge-generated plasma, and at the same time, nitrogen oxides are reduced, and carbon dioxide and nitrogen are respectively generated. It is converted into a gas and released as a harmless processing end gas.
【図１】この発明の実施例の断面図である。FIG. 1 is a sectional view of an embodiment of the present invention.
【図２】図１の実施例における作用状況を示す拡大断面
図である。FIG. 2 is an enlarged cross-sectional view showing a working state in the embodiment of FIG.
【図３】この発明の別の実施例の構造断面図である。FIG. 3 is a structural sectional view of another embodiment of the present invention.
【図４】この発明の他の実施例の構造断面図である。FIG. 4 is a structural cross-sectional view of another embodiment of the present invention.
【図５】図１の放電素子を同心円筒状構造にした実施例
である。FIG. 5 is an embodiment in which the discharge element of FIG. 1 has a concentric cylindrical structure.
【図６】図２の放電素子を同心円筒状構造にした実施例
である。FIG. 6 is an embodiment in which the discharge element of FIG. 2 has a concentric cylindrical structure.
【図７】図４の放電素子を同心円筒状構造にした実施例
である。FIG. 7 is an example in which the discharge element of FIG. 4 has a concentric cylindrical structure.
【図８】図７の実施例を部分的に変更した実施例であ
る。FIG. 8 is an embodiment in which the embodiment of FIG. 7 is partially modified.
【図９】従来の放電素子の断面図である。FIG. 9 is a cross-sectional view of a conventional discharge element.
【図１０】従来の沿面放電コロナ放電素子の構造断面図
である。FIG. 10 is a structural cross-sectional view of a conventional creeping discharge corona discharge element.
【図１１】従来のディーゼルエンジン用セラミックフィ
ルタとその内部の部分的拡大断面図である。FIG. 11 is a partially enlarged sectional view of a conventional ceramic filter for a diesel engine and its inside.
１ａ、１ｂ 誘導電極 ２ａ、２ｂ 板状稠密誘電体 ２ｃ、２ｄ 円筒状稠密誘電体 ２ｓ 誘電体の放電空間に接した表面 ２ｓｄ 沿面放電 ３ａ、３ｂ 放電空間 ３ｄ 無声放電 ４ａ 放電極 ４ｂ コロナ放電極 ４ｃ 円筒状誘導電極 ４ｄ リング状または螺旋状コロナ放電極 ４ｅ 金網状コロナ放電極 ５ 処理対象ガス ６ 処理終了ガス ７、８ リード線 ９ 交流高圧電源または高圧パルス電源 １０ 通過ガス １１ 多孔質セラミック壁 １２、１３ ガス出入口孔 １４ａ 多孔質フィルタ １４ｂ 円筒状誘電体製セラミックフィルタ １４ｖ 細孔 １４ｖｄ ボイド放電 １４ｓ 多孔質フィルタの表面 １４ｓｄ 沿面放電 1a, 1b Induction electrodes 2a, 2b Plate-shaped dense dielectric 2c, 2d Cylindrical dense dielectric 2s Surface of dielectric in contact with discharge space 2sd Creeping discharge 3a, 3b Discharge space 3d Silent discharge 4a Discharge electrode 4b Corona discharge electrode 4c Cylindrical induction electrode 4d Ring-shaped or spiral corona discharge electrode 4e Wire mesh corona discharge electrode 5 Processing target gas 6 Processing end gas 7,8 Lead wire 9 AC high-voltage power supply or high-voltage pulse power supply 10 Passing gas 11 Porous ceramic wall 12, 13 Gas inlet / outlet hole 14a Porous filter 14b Cylindrical dielectric ceramic filter 14v Pore 14vd Void discharge 14s Porous filter surface 14sd Creeping discharge
───────────────────────────────────────────────────── フロントページの続き (51)Int.Cl.6 識別記号 庁内整理番号 ＦＩ 技術表示箇所 Ｈ０１Ｔ 23/00 Ｂ０３Ｃ 3/14 ─────────────────────────────────────────────────── ─── Continuation of the front page (51) Int.Cl. 6 Identification code Office reference number FI technical display location H01T 23/00 B03C 3/14
Claims (2)
圧またはパルス高電圧を印加してコロナ放電を発生させ
るコロナ放電素子において、該一対の電極間に誘電体で
構成された多孔質フィルタおよび稠密な誘電体を夫々少
なくとも１つずつ挟み込んだことを特徴とするコロナ放
電素子。1. A corona discharge element for generating a corona discharge by applying a high AC voltage or a high pulse voltage between a pair of electrodes insulated from each other, wherein a porous body made of a dielectric material between the pair of electrodes. A corona discharge element, characterized in that at least one filter and one dense dielectric are sandwiched between each.
圧電源またはパルス高電圧電源を接続し、該一対の電極
間に被処理ガスが通過して濾過されるような細孔を有す
る誘電体で構成された多孔質フィルタおよび調密な誘電
体を夫々少なくとも一つずつ介在することを特徴とする
コロナ放電素子を用いたガス処理装置。2. An AC high voltage power source or a pulse high voltage power source is connected between a pair of electrodes insulated from each other, and pores are provided between the pair of electrodes so that a gas to be treated passes and is filtered. A gas treatment apparatus using a corona discharge element, wherein at least one porous filter made of a dielectric material and at least one dense dielectric material are interposed.
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP15253396A JP4016134B2 (en) | 1996-06-13 | 1996-06-13 | Gas processing equipment |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP15253396A JP4016134B2 (en) | 1996-06-13 | 1996-06-13 | Gas processing equipment |
Publications (2)
| Publication Number | Publication Date |
|---|---|
| JPH09329015A true JPH09329015A (en) | 1997-12-22 |
| JP4016134B2 JP4016134B2 (en) | 2007-12-05 |
Family
ID=15542529
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| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP15253396A Expired - Fee Related JP4016134B2 (en) | 1996-06-13 | 1996-06-13 | Gas processing equipment |
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| Country | Link |
|---|---|
| JP (1) | JP4016134B2 (en) |
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