JPH09315831A - Furnace core tube made of quartz glass and its production - Google Patents
Furnace core tube made of quartz glass and its productionInfo
- Publication number
- JPH09315831A JPH09315831A JP13552296A JP13552296A JPH09315831A JP H09315831 A JPH09315831 A JP H09315831A JP 13552296 A JP13552296 A JP 13552296A JP 13552296 A JP13552296 A JP 13552296A JP H09315831 A JPH09315831 A JP H09315831A
- Authority
- JP
- Japan
- Prior art keywords
- quartz glass
- core tube
- furnace core
- semi
- female
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Pending
Links
Classifications
-
- C—CHEMISTRY; METALLURGY
- C03—GLASS; MINERAL OR SLAG WOOL
- C03B—MANUFACTURE, SHAPING, OR SUPPLEMENTARY PROCESSES
- C03B23/00—Re-forming shaped glass
- C03B23/02—Re-forming glass sheets
- C03B23/023—Re-forming glass sheets by bending
- C03B23/03—Re-forming glass sheets by bending by press-bending between shaping moulds
- C03B23/0307—Press-bending involving applying local or additional heating, cooling or insulating means
-
- C—CHEMISTRY; METALLURGY
- C03—GLASS; MINERAL OR SLAG WOOL
- C03B—MANUFACTURE, SHAPING, OR SUPPLEMENTARY PROCESSES
- C03B23/00—Re-forming shaped glass
- C03B23/20—Uniting glass pieces by fusing without substantial reshaping
Landscapes
- Chemical & Material Sciences (AREA)
- Engineering & Computer Science (AREA)
- Materials Engineering (AREA)
- Organic Chemistry (AREA)
- Glass Melting And Manufacturing (AREA)
- Re-Forming, After-Treatment, Cutting And Transporting Of Glass Products (AREA)
Abstract
Description
【０００１】[0001]
【発明の属する技術分野】本発明は、石英ガラス製炉芯
管の製造方法に関する。TECHNICAL FIELD The present invention relates to a method of manufacturing a quartz glass furnace core tube.
【０００２】[0002]
【従来の技術】シリコンの単結晶を引き上げてインゴッ
トを作り、このインゴットをスライスして製造されたシ
リコンウエハは半導体素子として用いるために、そのウ
エハ表面を酸化したり、窒化物の絶縁層で覆い必要な部
分を削り取ったりして、そこにｐ型又はｎ型になるよう
に不純物を拡散させるなどの処理を行っている。2. Description of the Related Art A silicon wafer manufactured by pulling a silicon single crystal to form an ingot and slicing the ingot is used as a semiconductor element. Therefore, the surface of the wafer is oxidized or covered with an insulating layer of nitride. A necessary portion is shaved off, and a process of diffusing impurities so as to be p-type or n-type is performed.
【０００３】これらウエハ表面の酸化や不純物の拡散工
程などにおいては、電気炉の中に石英ガラス製炉芯管を
納め、その石英ガラス製炉芯管中に、石英ガラス製の石
英ボードに載置されたシリコンウエハを挿入して処理を
行う。In the process of oxidizing the surface of the wafer and diffusing impurities, a quartz glass furnace core tube is placed in an electric furnace, and the quartz glass furnace core tube is placed on a quartz glass quartz board. The processed silicon wafer is inserted and processed.
【０００４】不純物の拡散工程においては、前記石英ガ
ラス製炉芯管内に、塩化ホスホリル（ＰＯＣｌ3 ）や窒
化ケイ素（Ｓｉ3 Ｎ4 ）などのガスを導入しつつ、電気
炉の温度を約１１００℃に設定して、不純物の拡散を行
う。In the impurity diffusion step, while introducing a gas such as phosphoryl chloride (POCl 3 ) or silicon nitride (Si 3 N 4 ) into the quartz glass furnace core tube, the temperature of the electric furnace is set to about 1100 ° C. To diffuse the impurities.
【０００５】前記石英ガラス製炉芯管は、たとえば、図
１０に示すように、天然水晶粉から電気熔融法又は酸水
素火炎熔融法により、円柱状のインゴットを製造する。
たとえば、長さ１７００ｍｍで外径が１７０〜１８０ｍ
ｍの円柱状のインゴットを製造する。For the quartz glass furnace core tube, as shown in FIG. 10, for example, a cylindrical ingot is manufactured from natural quartz powder by an electric melting method or an oxyhydrogen flame melting method.
For example, the length is 1700 mm and the outer diameter is 170 to 180 m.
A m-shaped cylindrical ingot is manufactured.
【０００６】次に、このインゴットの長軸方向に貫通孔
を明ける。たとえば、１１０〜１２０ｍｍの貫通孔を明
けて、外径が１７０〜１８０ｍｍで肉厚が３０ｍｍのイ
ンゴットにする。次に、再熔融法又は横引き管引き法に
より厚肉の円筒体を製造し、次に、旋盤加工により薄肉
の円筒体を製造する。Next, a through hole is opened in the long axis direction of this ingot. For example, an ingot having an outer diameter of 170 to 180 mm and a wall thickness of 30 mm is formed by forming through holes of 110 to 120 mm. Next, a thick-walled cylinder is manufactured by a remelting method or a horizontal pipe drawing method, and then a thin-walled cylinder is manufactured by lathing.
【０００７】前述の再熔融法では、図１１に示すよう
に、カーボン坩堝７１に円筒状のインゴット７２を入
れ、抵抗炉や高周波炉により２０００℃以上でインゴッ
ト７２を熔解し、ダイス７３とマンドレル７４により厚
肉の円筒体７５を製造する。In the above-mentioned remelting method, as shown in FIG. 11, a cylindrical ingot 72 is put in a carbon crucible 71, and the ingot 72 is melted at a temperature of 2000 ° C. or higher by a resistance furnace or a high-frequency furnace to form a die 73 and a mandrel 74. A thick cylindrical body 75 is manufactured by.
【０００８】この再熔融法は、種々の外径及び肉厚の円
筒体を精度良く製造でき優れた方法であるが、製造され
た円筒体の内周面に円周方向に沿って、スパイラル状の
ヘアーラインと呼ばれる微細な皺や筋と呼ばれるやや細
い皺ができてしまう。[0008] This remelting method is an excellent method capable of accurately manufacturing cylindrical bodies having various outer diameters and wall thicknesses, but it is a spiral method along the circumferential direction on the inner peripheral surface of the manufactured cylindrical body. Fine wrinkles called hair lines and slightly fine wrinkles called streaks are created.
【０００９】再熔融法により厚み６〜７ｍｍに製造され
たものを、旋盤加工においては厚み３〜４ｍｍにするこ
とができる。これらヘアーラインや筋は、次工程の旋盤
加工によりほぼ消失することもあるが、多くの場合にお
いては残ってしまう。A product manufactured to a thickness of 6 to 7 mm by the remelting method can be made to a thickness of 3 to 4 mm in lathe processing. These hair lines and streaks may almost disappear by lathe processing in the next step, but in many cases they remain.
【００１０】たとえば、再熔融法で製造された直径１５
０ｍｍの円筒体を旋盤加工により直径３００ｍｍのもの
に加工する場合には、微細なヘアーラインはほぼ消失す
ることもあるが、再熔融法で製造された直径２００ｍｍ
の円筒体を旋盤加工により直径３００ｍｍのものに加工
する場合には、微細なヘアーラインといえども消失させ
ることが難しい。For example, the diameter 15 produced by the remelting method.
When a 0 mm cylinder is machined to a diameter of 300 mm by lathing, fine hair lines may almost disappear, but a diameter of 200 mm produced by the remelting method.
It is difficult to eliminate even a fine hairline when the cylindrical body of No. 3 is processed by lathe processing to have a diameter of 300 mm.
【００１１】前述の横引き管引き法は、貫通孔を明けた
円柱状のインゴットを、炉を用いて厚肉円筒体にするも
ので、たとえば、長さが１７００ｍｍで外径が１７０〜
１８０ｍｍで肉厚が３０ｍｍのインゴットから、長さが
１７００ｍｍで外径が１７０〜２００ｍｍで肉厚が６〜
７ｍｍの厚肉円筒体を作る。In the above-mentioned horizontal drawing method, a cylindrical ingot with a through hole is made into a thick cylindrical body by using a furnace. For example, the length is 1700 mm and the outer diameter is 170-.
From an ingot with a thickness of 180 mm and a thickness of 30 mm, a length of 1700 mm, an outer diameter of 170 to 200 mm and a thickness of 6 to
Make a 7 mm thick cylinder.
【００１２】横引き管引き法では、再熔融法とは異なり
種々の外径及び肉厚の円筒体が製造困難であり、ヘアー
ラインや筋は、円筒体の内周面の円周方向ではなく、内
周面の長寸方向に生じるが、加工歪みによる面の脈動
や、偏肉（肉厚の偏り）が生じやすいという問題があ
る。次工程の旋盤加工を経ても偏肉はなくならない。Unlike the remelting method, it is difficult to manufacture a cylindrical body having various outer diameters and wall thicknesses by the horizontal drawing method, and hair lines and streaks are not formed in the circumferential direction of the inner peripheral surface of the cylindrical body. Although it occurs in the longitudinal direction of the inner peripheral surface, there is a problem that pulsation of the surface due to processing strain and uneven thickness (uneven thickness) are likely to occur. The uneven thickness does not disappear even after lathe processing in the next process.
【００１３】次に、図１２に示すように、ブロー法によ
って、すなわち、一端を加熱して閉じた石英ガラス製の
管８５を旋盤（図示せず）に取り付け、開放他端より配
管８７を通して、不活性ガスを吹き込んで、閉じられた
一端を鏝９０で形状を整えつつ、バーナ８８により酸水
素炎８９で加熱して球状に膨らませて成形し、成形終了
後、球状に膨らませていた部分を略半球状に切り出して
半球殻体を製造する。Next, as shown in FIG. 12, by a blow method, that is, a tube 85 made of quartz glass whose one end is heated and closed is attached to a lathe (not shown), and a pipe 87 is introduced from the open other end. While blowing an inert gas and shaping the closed end with a trowel 90, the burner 88 heats with an oxyhydrogen flame 89 to swell into a spherical shape for molding, and after the molding is completed, the portion that has been bulged into a spherical shape is omitted. A hemispherical shell is manufactured by cutting out into a hemispherical shape.
【００１４】次に、図１３に示すように、前記再熔融法
又は前記横引き管引き法により製造された薄肉の円筒体
１０１と、前記ブロー法により製造された半球殻体１０
２とを加熱熔接して、一端が閉じた円筒状の石英ガラス
製炉芯管を製造していた。Next, as shown in FIG. 13, a thin-walled cylindrical body 101 manufactured by the remelting method or the horizontal pulling tube method and a hemispherical shell body 10 manufactured by the blowing method.
And 2 were heated and welded to produce a cylindrical quartz glass furnace core tube with one end closed.
【００１５】このようにして製造された石英ガラス製炉
芯管は、バーナなどによる加熱処理が多いこともありそ
の製造コストが高く、省エネルギー上も問題であった。Since the quartz glass furnace core tube manufactured in this manner is often heat-treated by a burner or the like, its manufacturing cost is high and there is a problem in energy saving.
【００１６】このようにして製造された石英ガラス製炉
芯管は、再熔融法の場合には、製造された円筒体の内周
面に円周方向に沿ってヘアーラインや筋を、横引き管引
き法の場合には、製造のための加工歪みによる面の脈動
や偏肉などの欠陥部分を生じやすかった。In the case of the remelting method, the quartz glass furnace core tube produced in this manner has a hairline or streaks along the circumferential direction on the inner peripheral surface of the produced cylindrical body, and a horizontal drawing tube. In the case of the pulling method, defects such as pulsation of the surface and uneven thickness due to processing strain for manufacturing were likely to occur.
【００１７】かかる石英ガラス製炉芯管を用いたシリコ
ンウエハの不純物拡散処理においては、前述の欠陥部分
にガスが当たりガスの淀みができたり、また、偏肉によ
る熱容量の違いから炉芯管に温度ムラを生じるために、
ガスの拡散が均一に行われず、ウエハに施された膜厚が
変動し、ｐ型領域又はｎ型領域の厚みも変動してウエハ
の歩留りりが低下するという問題があった。In the impurity diffusion processing of a silicon wafer using such a quartz glass furnace core tube, gas is stagnation due to the above-mentioned defective portion, and the furnace core tube is affected by a difference in heat capacity due to uneven thickness. In order to cause uneven temperature,
There is a problem that the diffusion of gas is not performed uniformly, the film thickness applied to the wafer is changed, and the thickness of the p-type region or the n-type region is also changed, so that the yield of the wafer is reduced.
【００１８】[0018]
【発明が解決しようとする課題】本発明は前述の課題を
解決すべくなされたものであり、シリコンウエハの処理
に適した石英ガラス製炉芯管の製造方法の提供を目的と
する。SUMMARY OF THE INVENTION The present invention has been made to solve the above problems, and an object thereof is to provide a method of manufacturing a quartz glass furnace core tube suitable for processing a silicon wafer.
【００１９】[0019]
【課題を解決するための手段】本発明は、内面部分が、
製造しようとする半製品の外表面を成形する成形内面部
分と、この成形内面部分に連なり水平面から２０〜７０
度の角度で拡がった辷り込み部分とを有する雌型に、石
英ガラス板を乗せ、その曲げ加工温度まで加熱し、加熱
された石英ガラスを雄型により押圧成形する方法によ
り、半製品であるキャップ状の１個の半球殻体及び該半
球殻体に対応する形状の複数個の半円筒体をそれぞれ個
別に製造し、次いでこれら半製品の所定の端面同士を加
熱熔接して、一端が閉じた円筒状の石英ガラス製炉芯管
を製造することを特徴とする石英ガラス製炉芯管の製造
方法を提供する。According to the present invention, the inner surface portion is
A molding inner surface portion for molding the outer surface of the semi-finished product to be manufactured, and 20 to 70 from the horizontal surface which is continuous with the molding inner surface portion.
A semi-finished cap is manufactured by placing a quartz glass plate on a female mold having a sloping-in portion that expands at an angle of degrees, heating it to its bending temperature, and pressing the heated quartz glass with a male mold. -Shaped hemispherical shell and a plurality of semi-cylindrical bodies each having a shape corresponding to the hemispherical shell are individually manufactured, and then predetermined end faces of these semi-finished products are heat-welded to each other to close one end. A method of manufacturing a quartz glass furnace core tube, which comprises manufacturing a cylindrical quartz glass furnace core tube.
【００２０】前記辷り込み部分の形状は、断面形状が直
線状である必要はなく、曲線状であって、２０〜７０度
の角度で拡がっていてもよい。また、該容器の外表面を
成形する部分と辷り込み部分は曲面で結ばれていること
が成形の点から好ましい。The shape of the squeezed-in portion does not need to be linear in cross section, and may be curved and spread at an angle of 20 to 70 degrees. Further, from the viewpoint of molding, it is preferable that the portion for molding the outer surface of the container and the squinting portion are connected by a curved surface.
【００２１】図２に示すように、雌型４ａの内面部分の
うち、容器の外表面を成形する部分Ｈと辷り込み部分Ｊ
とが、その断面形状が曲線により結ばれている場合にお
いては、その曲線の変曲点Ｅ、Ｅにおける接線が水平面
となす角度Ｄを２０〜７０度の角度とする。As shown in FIG. 2, of the inner surface portion of the female die 4a, a portion H for molding the outer surface of the container and a sloping portion J.
When the cross-sectional shape is connected by a curved line, the angle D formed by the tangents at the inflection points E of the curved line and the horizontal plane is 20 to 70 degrees.
【００２２】辷り込み部分の角度が７０度超では容器の
開口部が波状になりやすく、辷り込み部分の角度が２０
度未満ではガラスのフローが悪く様々な製品欠点を生じ
やすい。このように雌型に２０〜７０度の角度で拡がっ
た辷り込み部分があることにより、所望の形状のものが
低コストで生産できる。If the angle of the slip-in portion exceeds 70 degrees, the opening of the container is likely to be wavy, and the angle of the slip-in portion is 20.
If it is less than 100 ° C., the glass flow is poor and various product defects are likely to occur. As described above, since the female die has the tuck-in portion which is spread at an angle of 20 to 70 degrees, a desired shape can be produced at low cost.
【００２３】辷り込み部分は、雌型の全周にわたって連
続して設けられていることが好ましいが、連続して設け
ない場合においても、少なくとも雌型の全周囲にわたっ
て設けることが重要である。たとえば雌型の熱容量を小
さくしたいなどの場合においては、対称な櫛歯状の辷り
込み部分を全周にわたって設ける方法を用いても相応の
効果が得られる。It is preferable that the siding-in portion is continuously provided over the entire circumference of the female mold, but even if it is not continuously provided, it is important to provide at least the entire circumference of the female mold. For example, when it is desired to reduce the heat capacity of the female die, a corresponding effect can be obtained even by using a method of providing symmetrical comb-toothed sloping-in portions over the entire circumference.
【００２４】雌型が３つ以上の分割雌型の一組から構成
されていて、雄型による押圧成形前においては、分割雌
型の一組が、半製品の外表面を成形する成形内面部分を
形成するように連結されているが、雄型が上方より下り
てきて雌型により押圧成形が終了した以降に、分割雌型
の一組が分割して、成形された半製品から型離れするこ
とにより、半製品が製造されるのが好ましい。The female die is composed of a set of three or more divided female dies, and before press molding by the male die, one set of the divided female dies forms an inner surface portion for forming the outer surface of the semi-finished product. However, after the male mold comes down from above and the press molding is completed by the female mold, one set of split female molds is divided and separated from the molded semi-finished product. This preferably produces a semi-finished product.
【００２５】前述のように、雌型に２０〜７０度の角度
で拡がった辷り込み部分があることにより、所望の形状
のものが低コストで生産できるが、成形された製品の内
側開口部に微細なクラックが発生することがあり、その
ため研磨やファイアポリッシュなどの処置が必要になる
ことがあるという課題を残していた。As described above, since the female mold has the sloping-in portion which is spread at an angle of 20 to 70 degrees, a desired shape can be produced at low cost, but the inner opening portion of the molded product can be manufactured. There is a problem that fine cracks may be generated, which may require treatments such as polishing and fire polishing.
【００２６】本発明は、新たに生じたこの課題に対し
て、前記石英ガラス製容器の製造方法を提供するのであ
る。The present invention provides a method of manufacturing the above-mentioned quartz glass container for the newly created problem.
【００２７】この型離れが早すぎると容器が寸法不良に
なり、型離れが遅すぎると容器内面にクラックが発生す
るので、適正なタイミングで型離れするように調整す
る。If the mold release is too early, the dimension of the container will be poor, and if the mold release is too slow, cracks will occur on the inner surface of the container. Therefore, the mold is adjusted so as to be released at an appropriate timing.
【００２８】好ましい１例では、分割雌型の各々にキー
取付け部が設けてあり、雌型キーがキー取付け部同士を
連結することにより分割雌型の一組が連結されている。
また、雌型、雌型キー及び雄型の材質の１例としては窒
化ホウ素、炭化ケイ素又はカーボンがある。なお、容器
に寸法不良やクラックなどの欠点が発生しないように雌
型キーの太さを調整する必要がある。In a preferred example, each of the split female dies is provided with a key mounting portion, and a female key connects the key mounting portions to each other to connect a set of split female dies.
Further, as an example of the material of the female die, the female key and the male die, there is boron nitride, silicon carbide or carbon. It is necessary to adjust the thickness of the female key so that defects such as dimensional defects and cracks do not occur in the container.
【００２９】好ましい他の１例では、成形炉内に雄型、
石英ガラスよりも熱膨張係数の大きいリング型及び雌型
が少なくとも配置されており、リング型の熱膨張係数は
雌型のそれより大きいか等しく、リング型が２つ以上の
分割リング型の一組から構成されていて、雄型により押
圧成形前においては、分割リング型の一組がリングキー
により連結されており、しかも分割雌型の一組はリング
型により上部を把持されるようにして連結されており、
雄型が上方より下りてきて雄型により押圧成形が終了す
ると炉内の温度が下げられ、それに伴ってリング型に取
り付けられたリングキーが切断して、分割雌型の一組が
分割し成形された容器から型離れすることを特徴とする
石英ガラス製容器の製造方法がある。In another preferable example, a male mold is provided in a molding furnace.
At least a ring type and a female type having a coefficient of thermal expansion larger than that of quartz glass are arranged. The coefficient of thermal expansion of the ring type is greater than or equal to that of the female type, and the ring type is a pair of split ring types. Before pressing by the male mold, one set of split ring molds is connected by the ring key, and one set of split female molds is connected so that the upper part is gripped by the ring mold. Has been done,
When the male die comes down from above and the press molding is completed by the male die, the temperature inside the furnace is lowered, the ring key attached to the ring die is cut accordingly, and one set of split female die is divided and formed. There is a method of manufacturing a quartz glass container, which is characterized in that the mold is released from the prepared container.
【００３０】[0030]
【発明の実施の形態】図１は、石英ガラス製炉芯管に使
用される半球殻体の成形直後の状態を示す。炉８内に雌
型４が置かれており、その上に成形直後の半球殻体１１
ａが乗っていて、さらに半球殻体１１ａの上には雄型２
が乗っていて、さらにリング型５が雄型２を囲むように
取り付けられている。DESCRIPTION OF THE PREFERRED EMBODIMENTS FIG. 1 shows a hemispherical shell used in a quartz glass furnace core tube immediately after being molded. A female mold 4 is placed in a furnace 8, and a hemispherical shell 11 immediately after molding is placed on the female mold 4.
a is on the top of the hemispherical shell 11a
And a ring mold 5 is attached so as to surround the male mold 2.
【００３１】炉８内に置かれたこれらの型２、４、５
と、石英ガラス板が設定された温度曲線で熱処理されて
半球殻体１１ａに成形される。この成形の前に真空装置
と不活性ガスボンベを用いて、炉内２０の雰囲気が不活
性ガス雰囲気に変えられる。２８は真空装置に連結され
た配管であり、３０は不活性ガスボンベに連結された配
管である。炉内には温度センサ２３が設置してあり、配
線２４により温度に関する信号が制御盤に伝えられる。
制御盤は、予め設定した温度曲線になるように、配線２
２を通じヒータ２１を制御している。These molds 2, 4, 5 placed in a furnace 8
Then, the quartz glass plate is heat-treated with a set temperature curve to be molded into the hemispherical shell 11a. Before this molding, the atmosphere in the furnace 20 is changed to an inert gas atmosphere by using a vacuum device and an inert gas cylinder. 28 is a pipe connected to a vacuum device, and 30 is a pipe connected to an inert gas cylinder. A temperature sensor 23 is installed in the furnace, and a signal relating to the temperature is transmitted to the control panel by the wiring 24.
The control panel has wiring 2 so that the temperature curve is preset.
The heater 21 is controlled through 2.
【００３２】図２、図５は、雌型４の説明図であり、雌
型キーを備えていない分割雌型である。区間Ｈは容器の
外表面を成形する部分、区間Ｊ、Ｊは辷り込み部分であ
る。この容器の外表面を成形する部分と辷り込み部分と
を結ぶ曲線の変曲点における接線が水平面となす角度
（図２の角度Ｄ）を２０〜７０度の角度とする。2 and 5 are explanatory views of the female die 4, which is a split female die without a female die key. The section H is a portion for molding the outer surface of the container, and the sections J and J are siding portions. The angle (angle D in FIG. 2) formed by the tangent to the horizontal plane at the inflection point of the curve connecting the portion forming the outer surface of the container and the squinting portion is set to an angle of 20 to 70 degrees.
【００３３】Ｅ、Ｅは、変曲点であり、変曲点Ｅ、Ｅの
間隔をＧとする。容器の外径に対応する、雌型４の幅が
Ｂ’であり、Ｇ＞Ｂ’である。辷り込み部分の外径がＣ
である。E and E are inflection points, and the interval between the inflection points E and E is G. The width of the female die 4 corresponding to the outer diameter of the container is B ′, and G> B ′. The outside diameter of the snag part is C
It is.
【００３４】図３は、使用される円板状の石英ガラス板
１の図である。図４は、成形された石英ガラス製の半球
殻体１１ａの図であり、（ａ）はその断面図、（ｂ）は
その平面図を示す。FIG. 3 is a diagram of the disk-shaped quartz glass plate 1 used. 4A and 4B are views of the molded quartz glass hemispherical shell body 11a, in which FIG. 4A is a sectional view thereof and FIG. 4B is a plan view thereof.
【００３５】以上説明したように、図３に示す石英ガラ
ス板１が図１に示す製造方法を用いて、型２、４、５に
より、図４に示す半球殻体１１ａに成形される。As described above, the quartz glass plate 1 shown in FIG. 3 is molded into the hemispherical shell 11a shown in FIG. 4 by the molds 2, 4, and 5 using the manufacturing method shown in FIG.
【００３６】図６は、リング型の説明図であり、リング
型５は、分割リング型５ａ、５ｂに分割され、その各々
の両側端の外周面に、キー取付け部としての凸状部４８
ａ及び４９ａ、４８ｂ及び４９ｂが設けてある。断面ロ
字形状のリングキー５０、５１により、くわえ込まれる
ようにして連結されている。FIG. 6 is an explanatory view of a ring type, in which the ring type 5 is divided into split ring types 5a and 5b, and a convex portion 48 as a key attaching portion is formed on the outer peripheral surface of each of both side ends thereof.
a and 49a, 48b and 49b are provided. Ring keys 50 and 51 having a square cross section are connected so as to be gripped.
【００３７】図７、図８に示すように、前述のようにし
て成形された石英ガラス製の半球殻体１１ａと、別途成
形された２個の石英ガラス製の半円筒体１１ｂ、１１ｃ
とを、加熱熔接して石英ガラス製炉芯管１２を製造す
る。符号１３は炉芯管１２の頂上付近に明けられた孔で
ある。本発明の製造方法では、熔接についてはバーナが
使用されるが、半製品の成形についてはバーナは使用さ
れず、省エネルギーの観点からも優れ、製造コストも安
い。また、型２、４、５を用いた成形であるために、ガ
ス拡散に支障となるヘアーラインや筋や偏肉がほぼ生じ
ない。As shown in FIGS. 7 and 8, the quartz glass hemispherical shell body 11a molded as described above and the two separately molded quartz glass semi-cylindrical bodies 11b and 11c.
And are heat-welded to manufacture the quartz glass furnace core tube 12. Reference numeral 13 is a hole opened near the top of the furnace core tube 12. In the production method of the present invention, a burner is used for welding, but a burner is not used for forming a semi-finished product, which is excellent from the viewpoint of energy saving and the production cost is low. In addition, since the molding is performed using the molds 2, 4, and 5, hair lines, streaks, and uneven thickness that hinder gas diffusion hardly occur.
【００３８】半球殻体１１ａは、平面形状が円板状の石
英ガラス板から成形されるが、同様にして、半円筒体１
１ｂ、１１ｃは、平面形状が正方形又は長方形の石英ガ
ラス板から成形される。The hemispherical shell 11a is formed from a quartz glass plate having a disk-like planar shape.
1b and 11c are molded from a quartz glass plate having a square or rectangular planar shape.
【００３９】図９は、シリコンウエハ処理方法の説明図
である。石英ガラス製炉芯管１２がヒータ６２を有する
加熱炉に納められている。ヒータ６２としては、炭化ケ
イ素製のものなどが使用できる。石英ガラス製炉芯管１
２内には、石英ガラス製のボード６１に載置されたシリ
コンウエハ６０が挿入されている。シリカウールの保温
筒６３の上部に、石英ガラス製炉芯管１２が設置されて
おり、ＰＯＣｌ3 やＳｉ3 Ｎ4 などのガスが導入され、
シリコンウエハ６０が処理される。図中の矢印はガスの
流れを示す。符号１４は排ガス管であり、１５は石英ガ
ラス製炉芯管１２の底部に設けられた鍔である。FIG. 9 is an explanatory diagram of a silicon wafer processing method. The quartz glass furnace core tube 12 is housed in a heating furnace having a heater 62. As the heater 62, one made of silicon carbide can be used. Quartz glass furnace core tube 1
A silicon wafer 60 mounted on a board 61 made of quartz glass is inserted into the inside 2. The quartz glass furnace core tube 12 is installed above the heat insulating cylinder 63 of silica wool, and gases such as POCl 3 and Si 3 N 4 are introduced,
The silicon wafer 60 is processed. The arrows in the figure indicate the flow of gas. Reference numeral 14 is an exhaust gas pipe, and 15 is a collar provided at the bottom of the quartz glass furnace core pipe 12.
【００４０】石英ガラス製炉芯管１２には、ガス拡散に
支障となるヘアーラインや筋や偏肉がないので、この石
英ガラス製炉芯管１２を用いたシリコンウエハ処理方法
によれば、ガスの拡散が均一に行われ、ウエハに施され
た膜厚が変動せず、ｐ型領域又はｎ型領域の厚みも安定
してウエハの歩留りが高い。Since the quartz glass furnace core tube 12 does not have hair lines, streaks or uneven thickness which hinders gas diffusion, according to the silicon wafer processing method using this quartz glass furnace core tube 12, gas The diffusion is performed uniformly, the film thickness applied to the wafer does not change, the thickness of the p-type region or the n-type region is stable, and the yield of the wafer is high.
【００４１】[0041]
【発明の効果】本発明によれば、シリコンウエハの処理
に適した、ヘアーラインや筋がなく偏肉も少ない石英ガ
ラス製炉芯管の製造方法が提供される。According to the present invention, there is provided a method of manufacturing a quartz glass furnace core tube suitable for treating a silicon wafer, which has no hairline or streak and has less uneven thickness.
【図１】本発明の石英ガラス製炉芯管の製造方法の１実
施例の説明図。FIG. 1 is an explanatory view of an embodiment of a method for manufacturing a quartz glass furnace core tube of the present invention.
【図２】図１の実施例で使用される雌型の断面図。FIG. 2 is a sectional view of a female mold used in the embodiment of FIG.
【図３】図１の実施例で使用される石英ガラス板を示
し、（ａ）はその平面図、（ｂ）はその断面図。3 shows a quartz glass plate used in the embodiment of FIG. 1, (a) is a plan view thereof, and (b) is a sectional view thereof.
【図４】図１の実施例で製造される半球殻体を示し、
（ａ）はその断面図、（ｂ）はその平面図。4 shows a hemispherical shell produced in the example of FIG. 1,
(A) is the sectional view, (b) is the top view.
【図５】図２の雌型を示し、（ａ）はその斜視図、
（ｂ）はその平面図。5 shows the female mold of FIG. 2, (a) is a perspective view thereof,
(B) is the top view.
【図６】図１の実施例で使用されるリング型を示し、
（ａ）はその斜視図、（ｂ）はその平面図、（ｃ）はそ
の断面図。6 shows a ring type used in the embodiment of FIG.
(A) is the perspective view, (b) is the top view, (c) is the sectional view.
【図７】本発明の製造方法に使用される部品の分解斜視
図。FIG. 7 is an exploded perspective view of parts used in the manufacturing method of the present invention.
【図８】本発明の石英ガラス製炉芯管の１実施例の斜視
図。FIG. 8 is a perspective view of an embodiment of the quartz glass furnace core tube of the present invention.
【図９】本発明の石英ガラス製炉芯管を用いたシリコン
ウエハ処理方法の説明図。FIG. 9 is an explanatory view of a silicon wafer processing method using the quartz glass furnace core tube of the present invention.
【図１０】従来の石英ガラス製の薄型の円筒体の作製方
法を説明する工程図。FIG. 10 is a process diagram for explaining a conventional method for manufacturing a thin cylindrical body made of quartz glass.
【図１１】従来の再熔融法を説明する断面図。FIG. 11 is a sectional view illustrating a conventional remelting method.
【図１２】従来のブロー法の説明図。FIG. 12 is an explanatory diagram of a conventional blowing method.
【図１３】従来の石英ガラス製炉芯管の製造に使用され
る部品の分解斜視図。FIG. 13 is an exploded perspective view of components used for manufacturing a conventional quartz glass furnace core tube.
【符号の説明】 １：石英ガラス板 ２：雄型 ４：雌型 ５：リング型 ８：炉 １１ａ：半球殻体 １１ｂ、１１ｃ：半円筒体 １２：石英ガラス製炉芯管 ６０：シリコンウエハ ６１：ボード[Explanation of Codes] 1: Quartz glass plate 2: Male type 4: Female type 5: Ring type 8: Furnace 11a: Hemispherical shell 11b, 11c: Semi-cylindrical 12: Quartz glass furnace core tube 60: Silicon wafer 61 :board
Claims (3)
表面を成形する成形内面部分と、この成形内面部分に連
なり水平面から２０〜７０度の角度で拡がった辷り込み
部分とを有する雌型に、石英ガラス板を乗せ、その曲げ
加工温度まで加熱し、加熱された石英ガラスを雄型によ
り押圧成形して、半製品であるキャップ状の１個の半球
殻体及び該半球殻体に対応する形状の複数個の半円筒体
をそれぞれ個別に製造し、次いでこれら半製品の所定の
端面同士を加熱熔接して、一端が閉じた円筒状の石英ガ
ラス製炉芯管を製造することを特徴とする石英ガラス製
炉芯管の製造方法。1. A female having an inner surface portion having a molded inner surface portion for molding an outer surface of a semi-finished product to be manufactured, and a shackle portion continuous with the inner surface portion and extending at an angle of 20 to 70 degrees from a horizontal plane. A quartz glass plate is placed on a mold, heated to its bending temperature, and the heated quartz glass is pressed and molded by a male mold to form a cap-shaped one hemispherical shell and a semi-finished product. A plurality of semi-cylindrical bodies with corresponding shapes are individually manufactured, and then predetermined end faces of these semi-finished products are heat-welded to produce a cylindrical quartz glass furnace core tube with one end closed. A method for manufacturing a quartz glass furnace core tube, which is characterized.
構成されていて、前記雄型による押圧成形前において
は、該分割雌型の一組が、前記半製品の外表面を成形す
る成形内面部分を形成するように連結されているが、前
記雄型が上方より下りてきて前記雌型により押圧成形が
終了した以降に、該分割雌型の一組が分割して、成形さ
れた前記半製品から型離れすることにより、前記半製品
が製造される請求項１の石英ガラス製炉芯管の製造方
法。2. The female die is composed of a set of three or more divided female dies, and the set of divided female dies is the outer surface of the semi-finished product before pressure molding by the male die. Although it is connected so as to form a molding inner surface portion for molding, after the male mold comes down from above and the pressure molding is completed by the female mold, one set of the divided female molds is divided, The method for producing a quartz glass furnace core tube according to claim 1, wherein the semi-finished product is produced by releasing the molded semi-finished product from the mold.
英ガラス製炉芯管。3. A quartz glass furnace core tube manufactured by the manufacturing method according to claim 1.
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP13552296A JPH09315831A (en) | 1996-05-29 | 1996-05-29 | Furnace core tube made of quartz glass and its production |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP13552296A JPH09315831A (en) | 1996-05-29 | 1996-05-29 | Furnace core tube made of quartz glass and its production |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| JPH09315831A true JPH09315831A (en) | 1997-12-09 |
Family
ID=15153742
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP13552296A Pending JPH09315831A (en) | 1996-05-29 | 1996-05-29 | Furnace core tube made of quartz glass and its production |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPH09315831A (en) |
Cited By (5)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JP2002343722A (en) * | 2001-05-16 | 2002-11-29 | Toshiba Ceramics Co Ltd | Quartz glass furnace core tube for low pressure cvd |
| JP2005298326A (en) * | 2004-04-08 | 2005-10-27 | Schott Ag | Method and apparatus for continuously manufacturing glass tube having adjusted circular shape or profile |
| DE102009050188A1 (en) * | 2009-10-21 | 2011-04-28 | De Dietrich Process Systems Gmbh | Method for the production of cylindrical glass tube component from borosilicate glass for chemical- plant and laboratories, comprises melting one of both edges of the first glass tube part by applying laser energy |
| JP2013023433A (en) * | 2011-07-22 | 2013-02-04 | Schott Ag | Method and apparatus for manufacturing glass tube having prescribed internal shape |
| CN115159819A (en) * | 2022-08-10 | 2022-10-11 | 北京凯德石英股份有限公司 | Method for processing special-shaped quartz tube |
-
1996
- 1996-05-29 JP JP13552296A patent/JPH09315831A/en active Pending
Cited By (7)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JP2002343722A (en) * | 2001-05-16 | 2002-11-29 | Toshiba Ceramics Co Ltd | Quartz glass furnace core tube for low pressure cvd |
| JP2005298326A (en) * | 2004-04-08 | 2005-10-27 | Schott Ag | Method and apparatus for continuously manufacturing glass tube having adjusted circular shape or profile |
| JP4574420B2 (en) * | 2004-04-08 | 2010-11-04 | ショット アクチエンゲゼルシャフト | Method for continuously producing a calibrated circular or irregular glass tube having a predetermined internal shape |
| DE102009050188A1 (en) * | 2009-10-21 | 2011-04-28 | De Dietrich Process Systems Gmbh | Method for the production of cylindrical glass tube component from borosilicate glass for chemical- plant and laboratories, comprises melting one of both edges of the first glass tube part by applying laser energy |
| JP2013023433A (en) * | 2011-07-22 | 2013-02-04 | Schott Ag | Method and apparatus for manufacturing glass tube having prescribed internal shape |
| US8726694B2 (en) | 2011-07-22 | 2014-05-20 | Schott Ag | Method and apparatus for manufacturing glass tubes having a predetermined inner profile, preferably for continuously manufacturing such glass tubes |
| CN115159819A (en) * | 2022-08-10 | 2022-10-11 | 北京凯德石英股份有限公司 | Method for processing special-shaped quartz tube |
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