JPH09312407A - Optical coupler between monitor diode and laser diode - Google Patents

Optical coupler between monitor diode and laser diode

Info

Publication number
JPH09312407A
JPH09312407A JP9032193A JP3219397A JPH09312407A JP H09312407 A JPH09312407 A JP H09312407A JP 9032193 A JP9032193 A JP 9032193A JP 3219397 A JP3219397 A JP 3219397A JP H09312407 A JPH09312407 A JP H09312407A
Authority
JP
Japan
Prior art keywords
groove
laser diode
diode
monitor
spherical lens
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Pending
Application number
JP9032193A
Other languages
Japanese (ja)
Inventor
Joerg Dipl Phys Hehmann
ヨルグ・ヘーマン
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Alcatel Lucent SAS
Original Assignee
Alcatel Alsthom Compagnie Generale dElectricite
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Alcatel Alsthom Compagnie Generale dElectricite filed Critical Alcatel Alsthom Compagnie Generale dElectricite
Publication of JPH09312407A publication Critical patent/JPH09312407A/en
Pending legal-status Critical Current

Links

Classifications

    • GPHYSICS
    • G02OPTICS
    • G02BOPTICAL ELEMENTS, SYSTEMS OR APPARATUS
    • G02B6/00Light guides; Structural details of arrangements comprising light guides and other optical elements, e.g. couplings
    • G02B6/24Coupling light guides
    • G02B6/42Coupling light guides with opto-electronic elements
    • G02B6/4201Packages, e.g. shape, construction, internal or external details
    • G02B6/4204Packages, e.g. shape, construction, internal or external details the coupling comprising intermediate optical elements, e.g. lenses, holograms
    • G02B6/4214Packages, e.g. shape, construction, internal or external details the coupling comprising intermediate optical elements, e.g. lenses, holograms the intermediate optical element having redirecting reflective means, e.g. mirrors, prisms for deflecting the radiation from horizontal to down- or upward direction toward a device
    • HELECTRICITY
    • H01ELECTRIC ELEMENTS
    • H01SDEVICES USING THE PROCESS OF LIGHT AMPLIFICATION BY STIMULATED EMISSION OF RADIATION [LASER] TO AMPLIFY OR GENERATE LIGHT; DEVICES USING STIMULATED EMISSION OF ELECTROMAGNETIC RADIATION IN WAVE RANGES OTHER THAN OPTICAL
    • H01S5/00Semiconductor lasers
    • H01S5/02Structural details or components not essential to laser action
    • H01S5/022Mountings; Housings
    • H01S5/023Mount members, e.g. sub-mount members
    • H01S5/02325Mechanically integrated components on mount members or optical micro-benches
    • H01S5/02326Arrangements for relative positioning of laser diodes and optical components, e.g. grooves in the mount to fix optical fibres or lenses
    • HELECTRICITY
    • H01ELECTRIC ELEMENTS
    • H01SDEVICES USING THE PROCESS OF LIGHT AMPLIFICATION BY STIMULATED EMISSION OF RADIATION [LASER] TO AMPLIFY OR GENERATE LIGHT; DEVICES USING STIMULATED EMISSION OF ELECTROMAGNETIC RADIATION IN WAVE RANGES OTHER THAN OPTICAL
    • H01S5/00Semiconductor lasers
    • H01S5/005Optical components external to the laser cavity, specially adapted therefor, e.g. for homogenisation or merging of the beams or for manipulating laser pulses, e.g. pulse shaping
    • HELECTRICITY
    • H01ELECTRIC ELEMENTS
    • H01SDEVICES USING THE PROCESS OF LIGHT AMPLIFICATION BY STIMULATED EMISSION OF RADIATION [LASER] TO AMPLIFY OR GENERATE LIGHT; DEVICES USING STIMULATED EMISSION OF ELECTROMAGNETIC RADIATION IN WAVE RANGES OTHER THAN OPTICAL
    • H01S5/00Semiconductor lasers
    • H01S5/02Structural details or components not essential to laser action
    • H01S5/022Mountings; Housings
    • H01S5/0225Out-coupling of light
    • H01S5/02251Out-coupling of light using optical fibres
    • HELECTRICITY
    • H01ELECTRIC ELEMENTS
    • H01SDEVICES USING THE PROCESS OF LIGHT AMPLIFICATION BY STIMULATED EMISSION OF RADIATION [LASER] TO AMPLIFY OR GENERATE LIGHT; DEVICES USING STIMULATED EMISSION OF ELECTROMAGNETIC RADIATION IN WAVE RANGES OTHER THAN OPTICAL
    • H01S5/00Semiconductor lasers
    • H01S5/06Arrangements for controlling the laser output parameters, e.g. by operating on the active medium
    • H01S5/068Stabilisation of laser output parameters
    • H01S5/0683Stabilisation of laser output parameters by monitoring the optical output parameters
    • HELECTRICITY
    • H01ELECTRIC ELEMENTS
    • H01SDEVICES USING THE PROCESS OF LIGHT AMPLIFICATION BY STIMULATED EMISSION OF RADIATION [LASER] TO AMPLIFY OR GENERATE LIGHT; DEVICES USING STIMULATED EMISSION OF ELECTROMAGNETIC RADIATION IN WAVE RANGES OTHER THAN OPTICAL
    • H01S5/00Semiconductor lasers
    • H01S5/40Arrangement of two or more semiconductor lasers, not provided for in groups H01S5/02 - H01S5/30
    • H01S5/4025Array arrangements, e.g. constituted by discrete laser diodes or laser bar
    • H01S5/4031Edge-emitting structures

Landscapes

  • Physics & Mathematics (AREA)
  • General Physics & Mathematics (AREA)
  • Optics & Photonics (AREA)
  • Condensed Matter Physics & Semiconductors (AREA)
  • Electromagnetism (AREA)
  • Optical Couplings Of Light Guides (AREA)
  • Semiconductor Lasers (AREA)
  • Light Receiving Elements (AREA)

Abstract

PROBLEM TO BE SOLVED: To improve optical coupling efficiency in such a manner that a monitor diode can efficiently receive back light emitted from a laser diode. SOLUTION: A monitor diode 11 and a laser diode 6 are arranged so that one of the diodes is positioned behind the other on an identical plane of a substrate 3, the diodes are separated by a groove 7 having a slanted reflective end 9, so that light emitted from the laser diode 6 is reflected by the reflective end 9 of the groove 7 and coupled with the monitor diode 11. A spherical lens 10 is arranged within the groove 7 behind the laser diode 6 so that the lens collects the emitted light and forms its focus on the reflective end 9 of the groove 7.

Description

【発明の詳細な説明】Detailed Description of the Invention

【0001】[0001]

【発明の属する技術分野】本発明は、モニタダイオード
をレーザダイオードに光学的に結合するために、小さい
支持プレート上の同一平面においてそれらの一方が他方
の後方に位置するように設置され、また、傾斜した反射
性端部を有する溝によって互いに分離され、レーザダイ
オードにより放射された背面光が溝の反射性端部からモ
ニタダイオードに反射される装置に関する。そのような
結合装置は、特に光学通信システムにおいて使用され
る。
BACKGROUND OF THE INVENTION 1. Field of the Invention The present invention is directed to optically coupling a monitor diode to a laser diode so that one of them lies behind the other in the same plane on a small support plate, and It relates to a device in which the back light emitted by the laser diode is reflected from the reflective end of the groove to the monitor diode, which is separated from each other by the groove having inclined reflective ends. Such coupling devices are used especially in optical communication systems.

【0002】[0002]

【従来の技術】前記のような構成を有する結合装置は、
DE-C-43 13 492から知られている。この結合装置におい
てエッジ放射レーザダイオードが使用されているが、背
面光の1/2だけしかV形溝中に放射されない。V形溝
の傾斜した前面および側面は、できる限り多くのストレ
ー光を反射するために完全に反射性である。
2. Description of the Related Art A coupling device having the above structure is
Known from DE-C-43 13 492. Edge-emitting laser diodes are used in this coupling device, but only half the back light is emitted into the V-groove. The sloping front and sides of the V-groove are fully reflective to reflect as much stray light as possible.

【0003】[0003]

【発明が解決しようとする課題】本発明の目的は、モニ
タダイオードがレーザダイオードから放射された完全な
量の背面光を受け取ることができるように光学的結合の
効率を向上させることである。
It is an object of the present invention to improve the efficiency of optical coupling so that the monitor diode can receive the full amount of backside light emitted from the laser diode.

【0004】[0004]

【課題を解決するための手段】本発明は、モニタダイオ
ードとレーザダイオードを同一平面において一方が他方
の後方に位置するように設置し、傾斜した反射性端部を
有する溝により互いに分離され、レーザダイオードによ
り放射された光が前記溝の反射性の端部により反射され
てモニタダイオードに結合されるモニタダイオードとレ
ーザダイオードを光学的に結合する光学的結合装置にお
いて、レーザダイオードの背後に球状レンズが溝中に配
置され、放射された光を収集して溝の反射性端部にその
焦点を結んでいることを特徴とする光学的結合装置によ
ってこの目的を達成する。特に、本発明によって得られ
る利点は、モニタダイオードによって検知された高レベ
ルの信号強度のために、レーザダイオードを制御するた
めの制御電子装置は、簡単な方法で設計されることがで
きる。増幅器回路において信号を処理するために別に必
要とされる余分の努力も省略されることができる。本発
明は、図面に示された実施形態によって詳細に説明され
る。
SUMMARY OF THE INVENTION The present invention provides a laser diode and a monitor diode which are placed one behind the other in the same plane, separated from each other by a groove having slanted reflective ends. In the optical coupling device for optically coupling the monitor diode and the laser diode, in which the light emitted by the diode is reflected by the reflective end of the groove and coupled to the monitor diode, a spherical lens is provided behind the laser diode. This object is achieved by an optical coupling device which is arranged in the groove and which collects the emitted light and focuses it on the reflective end of the groove. In particular, the advantage obtained by the invention is that due to the high level of signal strength detected by the monitor diode, the control electronics for controlling the laser diode can be designed in a simple way. The extra effort separately required to process the signal in the amplifier circuit can also be omitted. The invention is explained in detail by the embodiments shown in the drawings.

【0005】[0005]

【発明の実施の形態】図1および図2において、光学的
結合装置のための小さい支持プレートが参照番号1 で示
されている。それはシリコンで作られ、幾つかの並列し
て隣接した列に並べられた結合装置を有している。それ
らの構造および動作はそれぞれの例において同一である
ので、その中の1つだけが以下に説明される。
1 and 2, a small support plate for an optical coupling device is designated by the reference numeral 1. It is made of silicon and has several side-by-side coupling devices in parallel. Since their structure and operation are the same in each example, only one of them will be described below.

【0006】前表面2 の領域において、小さい支持プレ
ート1 は、表面3 に作られ、前表面2 において開いてい
るV形溝4 を有し、その中にガラスファイバ5 が固着さ
れている。エッジ放射レーザダイオード6 は、ファイバ
5 の端部の前で支持プレート1 に取付けられ、信号光を
ガラスファイバ5 中に放射する。別のV形溝7 がレーザ
ダイオード6 の後方、すなわち背面光を放射する側で支
持プレートに設けられる。前述されたもののように、V
形溝7 は異方性エッチングによって生成され、それ故に
V字形の断面をを有しているのではなく、この場合にお
いては2つの傾斜した溝の端部8,9 も同様に有してい
る。本発明の場合において、溝の横方向の傾斜および溝
の端部のエッジは同じ傾斜度を有している。
In the region of the front surface 2, a small support plate 1 has a V-shaped groove 4 made in the surface 3 and open in the front surface 2, in which the glass fiber 5 is fixed. Edge emitting laser diode 6 is a fiber
It is attached to the support plate 1 in front of the end of 5 and emits the signal light into the glass fiber 5. Another V-shaped groove 7 is provided in the support plate behind the laser diode 6, i.e. on the side emitting back light. V, like the one described above
The groove 7 is produced by anisotropic etching and therefore does not have a V-shaped cross section, but in this case also the ends 8 and 9 of the two beveled grooves. . In the case of the invention, the lateral inclination of the groove and the edge at the end of the groove have the same inclination.

【0007】レーザダイオード6 に隣接した溝の端部8
において、球状レンズ10が例えば接着剤等によってそれ
が3つの全てのエッジによって支持されるような方法で
V形溝7 に取付けられている。V形溝7 の位置および幅
は、球状レンズ10がレーザチャンネルに関して最適な位
置に位置されるように選択される。球状レンズ10からレ
ーザダイオード6 までの距離はそれぞれの溝の端部8 の
エッジによって定められ、球状レンズ10における光軸の
高さはV形溝7 の幅によって定められ、レンズの直径を
考慮に入れる。この例において、V形溝7 の幅は、球状
レンズ10の光軸がレーザダイオード6 の光軸の下方に位
置されるように選択される。
End of groove 8 adjacent to laser diode 6
At, a spherical lens 10 is mounted in the V-shaped groove 7 in such a way that it is supported by all three edges, for example by glue or the like. The position and width of the V-shaped groove 7 are selected so that the spherical lens 10 is located in the optimum position with respect to the laser channel. The distance from the spherical lens 10 to the laser diode 6 is determined by the edge of the end 8 of each groove, and the height of the optical axis in the spherical lens 10 is determined by the width of the V-shaped groove 7, taking the diameter of the lens into consideration. Put in. In this example, the width of the V-shaped groove 7 is selected so that the optical axis of the spherical lens 10 is located below the optical axis of the laser diode 6.

【0008】例えば、約150μmの直径を有し、屈折
率が約1.5である市販の球状レンズ10等の使用が適し
ているとわかった。この場合、球状レンズ10を受けるV
形溝7 の長さは、支持プレート1 の表面3 上のエッジと
エッジの間で約500μmである。これらの状況の下で
得られる利点は、レーザダイオード6 によって放射され
た背面光が他方の溝の端部9 上に焦点を結ばれることで
ある。この溝の端部9は気相付着により金属で被覆され
ており、それは偏向ミラーとして機能し、入射する背面
光をモニタダイオード11に反射する。モニタダイオード
11は、その活性領域が溝の反射性端部9 の直接上に位置
されるように支持プレート1 の表面3 の上に配置され
る。
For example, it has been found suitable to use a commercially available spherical lens 10 having a diameter of about 150 μm and a refractive index of about 1.5. In this case, V that receives the spherical lens 10
The length of the groove 7 is approximately 500 μm between the edges on the surface 3 of the support plate 1. The advantage obtained under these circumstances is that the back light emitted by the laser diode 6 is focused on the end 9 of the other groove. The end portion 9 of this groove is covered with a metal by vapor deposition, and it functions as a deflection mirror, and reflects incident back light to the monitor diode 11. Monitor diode
11 is arranged on the surface 3 of the support plate 1 such that its active area is located directly above the reflective end 9 of the groove.

【0009】シリコンの代りに、別の材料ならびにそれ
ぞれ調整された寸法を有する溝および球状レンズが同様
に使用することができる。
Instead of silicon, other materials and grooves and spherical lenses, each with tailored dimensions, can likewise be used.

【0010】球状レンズ10の光軸がレーザダイオード6
の光軸に下方に位置されることは決定的であり、収集さ
れた背面光は偏向ミラー上にマップされる。
The optical axis of the spherical lens 10 is the laser diode 6
It is decisive to be located below the optical axis of the, and the collected back light is mapped onto the deflection mirror.

【0011】説明された結合装置の構造において、以下
のもの、すなわち、ガラスファイバ5 を有する前方のV
形溝4 、レーザダイオード6 、挿入された球状レンズ10
および反射性端部9 を有する他方のV形溝7 、およびモ
ニタダイオード11は順次構成される。とりわけ、本発明
の利点は、V形溝8,9 が非常に正確に作られ、部分素子
5,10,9も正確に構成されることができ、レーザダイオー
ド6 およびモニタダイオード11が熱圧着結合によって支
持プレート1 に正確に取付けられることが可能であるこ
とによる。必要であるならば、容易に1以上の線形結合
装置に作成されることができる。
In the construction of the coupling device described, the following: a front V with glass fiber 5
Groove 4, laser diode 6, inserted spherical lens 10
And the other V-shaped groove 7 with a reflective end 9 and the monitor diode 11 are constructed in sequence. Among other things, the advantage of the present invention is that the V-shaped grooves 8, 9 are made very precisely and
5, 10 and 9 can also be configured accurately, since the laser diode 6 and the monitor diode 11 can be attached to the support plate 1 precisely by thermocompression bonding. It can easily be made into more than one linear combiner if desired.

【図面の簡単な説明】[Brief description of drawings]

【図1】光学結合装置の横方向からの概略的部分断面
図。
FIG. 1 is a schematic partial cross-sectional view of an optical coupling device from a lateral direction.

【図2】図1の光学結合装置の一部分の平面図。2 is a plan view of a portion of the optical coupling device of FIG.

Claims (4)

【特許請求の範囲】[Claims] 【請求項1】 モニタダイオードとレーザダイオードを
同一平面において一方が他方の後方に位置するように設
置し、傾斜した反射性端部を有する溝により互いに分離
され、レーザダイオードにより放射された光が前記溝の
反射性の端部により反射されてモニタダイオードに結合
されるモニタダイオードとレーザダイオードを光学的に
結合する光学的結合装置において、 レーザダイオードの背後に球状レンズが前記溝中に配置
され、放射された光を収集して前記溝の反射性端部にそ
の焦点を結ばせることを特徴とする光学的結合装置。
1. A monitor diode and a laser diode are arranged so that one is located behind the other in the same plane, and the light emitted by the laser diode is separated from each other by a groove having an inclined reflective end. In an optical coupling device for optically coupling a monitor diode and a laser diode, which is reflected by the reflective end of the groove and is coupled to the monitor diode, a spherical lens is arranged in the groove behind the laser diode and emits light. An optical coupling device, characterized in that the collected light is collected and focused on the reflective end of the groove.
【請求項2】 球状レンズの光軸は放射されたレーザ光
の光軸の下方に位置している請求項1記載の装置。
2. The apparatus according to claim 1, wherein the optical axis of the spherical lens is located below the optical axis of the emitted laser light.
【請求項3】 溝はV形溝であり、球状レンズはV形溝
の3つの側面に接触することによってレーザダイオード
に隣接してV形溝の端部においてその位置を保持されて
いる請求項1記載の装置。
3. The groove is a V-shaped groove and the spherical lens is held in place at the end of the V-shaped groove adjacent the laser diode by contacting the three sides of the V-shaped groove. 1. The device according to 1.
【請求項4】 球状レンズは約150μmの直径と、約
1.5の屈折率を有し、溝の長さは約500μmである
請求項1乃至3のいずれか1項記載の装置。
4. A device according to claim 1, wherein the spherical lens has a diameter of about 150 μm, an index of refraction of about 1.5 and the length of the groove is about 500 μm.
JP9032193A 1996-02-16 1997-02-17 Optical coupler between monitor diode and laser diode Pending JPH09312407A (en)

Applications Claiming Priority (2)

Application Number Priority Date Filing Date Title
DE19605726A DE19605726A1 (en) 1996-02-16 1996-02-16 Arrangement for optically coupling a monitor diode to a laser diode
DE19605726.4 1996-02-16

Publications (1)

Publication Number Publication Date
JPH09312407A true JPH09312407A (en) 1997-12-02

Family

ID=7785556

Family Applications (1)

Application Number Title Priority Date Filing Date
JP9032193A Pending JPH09312407A (en) 1996-02-16 1997-02-17 Optical coupler between monitor diode and laser diode

Country Status (3)

Country Link
EP (1) EP0790678A3 (en)
JP (1) JPH09312407A (en)
DE (1) DE19605726A1 (en)

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US6459710B1 (en) 2000-11-07 2002-10-01 Axsun Technologies, Inc. Reflector for directing front facet light to monitor diode

Families Citing this family (7)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
DE19944042A1 (en) 1999-09-14 2001-04-12 Siemens Ag Illumination unit for medical examination device
JP4582489B2 (en) 2000-01-21 2010-11-17 住友電気工業株式会社 Light emitting device
CA2335892A1 (en) * 2000-03-20 2001-09-20 Richard Bendicks Bylsma Raised optical detector on optical sub-assembly
US7345316B2 (en) 2000-10-25 2008-03-18 Shipley Company, L.L.C. Wafer level packaging for optoelectronic devices
US6799902B2 (en) 2000-12-26 2004-10-05 Emcore Corporation Optoelectronic mounting structure
US20030057363A1 (en) * 2000-12-26 2003-03-27 Anderson Gene R. Optical power control system
US7078671B1 (en) 2001-08-06 2006-07-18 Shipley Company, L.L.C. Silicon optical microbench devices and wafer-level testing thereof

Family Cites Families (4)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US4293826A (en) * 1979-04-30 1981-10-06 Xerox Corporation Hybrid semiconductor laser/detectors
US5113404A (en) * 1990-07-05 1992-05-12 At&T Bell Laboratories Silicon-based optical subassembly
GB9303783D0 (en) * 1993-02-25 1993-04-14 Northern Telecom Ltd Injection laser and photosensor assembly
DE4313492C1 (en) * 1993-04-24 1994-07-21 Ant Nachrichtentech Optical coupler for laser monitoring diode, esp. for semiconductor laser

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US6459710B1 (en) 2000-11-07 2002-10-01 Axsun Technologies, Inc. Reflector for directing front facet light to monitor diode

Also Published As

Publication number Publication date
EP0790678A2 (en) 1997-08-20
EP0790678A3 (en) 1999-02-10
DE19605726A1 (en) 1997-08-21

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