JPH09263470A - Sliding member and wear resistant member - Google Patents

Sliding member and wear resistant member

Info

Publication number
JPH09263470A
JPH09263470A JP7437096A JP7437096A JPH09263470A JP H09263470 A JPH09263470 A JP H09263470A JP 7437096 A JP7437096 A JP 7437096A JP 7437096 A JP7437096 A JP 7437096A JP H09263470 A JPH09263470 A JP H09263470A
Authority
JP
Japan
Prior art keywords
thin film
sliding
diamond thin
ceramics
synthetic pseudo
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Pending
Application number
JP7437096A
Other languages
Japanese (ja)
Inventor
Tetsuji Hayasaki
哲治 早▲さき▼
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Kyocera Corp
Original Assignee
Kyocera Corp
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Kyocera Corp filed Critical Kyocera Corp
Priority to JP7437096A priority Critical patent/JPH09263470A/en
Publication of JPH09263470A publication Critical patent/JPH09263470A/en
Pending legal-status Critical Current

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Classifications

    • C—CHEMISTRY; METALLURGY
    • C04—CEMENTS; CONCRETE; ARTIFICIAL STONE; CERAMICS; REFRACTORIES
    • C04B—LIME, MAGNESIA; SLAG; CEMENTS; COMPOSITIONS THEREOF, e.g. MORTARS, CONCRETE OR LIKE BUILDING MATERIALS; ARTIFICIAL STONE; CERAMICS; REFRACTORIES; TREATMENT OF NATURAL STONE
    • C04B41/00—After-treatment of mortars, concrete, artificial stone or ceramics; Treatment of natural stone
    • C04B41/009—After-treatment of mortars, concrete, artificial stone or ceramics; Treatment of natural stone characterised by the material treated
    • C—CHEMISTRY; METALLURGY
    • C04—CEMENTS; CONCRETE; ARTIFICIAL STONE; CERAMICS; REFRACTORIES
    • C04B—LIME, MAGNESIA; SLAG; CEMENTS; COMPOSITIONS THEREOF, e.g. MORTARS, CONCRETE OR LIKE BUILDING MATERIALS; ARTIFICIAL STONE; CERAMICS; REFRACTORIES; TREATMENT OF NATURAL STONE
    • C04B41/00—After-treatment of mortars, concrete, artificial stone or ceramics; Treatment of natural stone
    • C04B41/45—Coating or impregnating, e.g. injection in masonry, partial coating of green or fired ceramics, organic coating compositions for adhering together two concrete elements
    • C04B41/50—Coating or impregnating, e.g. injection in masonry, partial coating of green or fired ceramics, organic coating compositions for adhering together two concrete elements with inorganic materials
    • C04B41/5001—Coating or impregnating, e.g. injection in masonry, partial coating of green or fired ceramics, organic coating compositions for adhering together two concrete elements with inorganic materials with carbon or carbonisable materials
    • C04B41/5002—Diamond

Landscapes

  • Chemical & Material Sciences (AREA)
  • Engineering & Computer Science (AREA)
  • Ceramic Engineering (AREA)
  • Materials Engineering (AREA)
  • Structural Engineering (AREA)
  • Organic Chemistry (AREA)
  • Inorganic Chemistry (AREA)
  • Chemical Vapour Deposition (AREA)
  • Crystals, And After-Treatments Of Crystals (AREA)
  • Physical Vapour Deposition (AREA)

Abstract

PROBLEM TO BE SOLVED: To improve wear and sliding resistances by coating the surface of a ceramic substrate with a thin film of synthetic pseudo-diamond. SOLUTION: A thin film 11 of synthetic pseudo-diamond having 0.1-5μm thickness is formed by an IVD method on the surface of a ceramic substrate 12.

Description

【発明の詳細な説明】Detailed Description of the Invention

【０００１】[0001]

【発明の属する技術分野】本発明は、製缶用治工具、ハ
サミ、包丁等の刃物類、ピンセット等に用いられる摺動
部材あるいは耐摩耗部材に関する。BACKGROUND OF THE INVENTION 1. Field of the Invention The present invention relates to a sliding member or wear resistant member used for jigs and tools for can-making, scissors, knives such as knives, tweezers and the like.

【０００２】[0002]

【従来の技術】耐摩耗部材、摺動部材等には金属あるい
はセラミックス等が用いられてきた。ところが、耐摩耗
部材あるいは摺動部材に用いられる金属は長期の使用で
錆の発生があり耐腐食性において問題があった。一方、
セラミックスでバルブなどの摺動部材を形成すると相手
材との疑着等が発生し易いという問題点があった。さら
に近年、耐摩耗性、耐摺動性の向上が市場より要求され
ていた。2. Description of the Related Art Metals or ceramics have been used for wear resistant members, sliding members and the like. However, the metal used for the wear resistant member or the sliding member has a problem in corrosion resistance since rust is generated after long-term use. on the other hand,
When a sliding member such as a valve is formed of ceramics, there is a problem that susceptibility to the mating material is likely to occur. Further, in recent years, the market has demanded improvement in wear resistance and sliding resistance.

【０００３】この解決方法として、ＣＶＤやスパッタリ
ングによる合成疑似ダイヤモンド薄膜を被覆し、セラミ
ックス自体の硬度を高めたり、あるいは摺動性を高める
ことが提案されている（特願平３−２２３１９０号参
照）。As a solution to this problem, it has been proposed to coat a synthetic pseudo-diamond thin film by CVD or sputtering to increase the hardness of the ceramics itself or the slidability (see Japanese Patent Application No. 3-223190). .

【０００４】[0004]

【発明が解決しようとする課題】しかし、ＣＶＤやスパ
ッタリングによる合成疑似ダイヤモンド薄膜ではセラミ
ックスと被膜の間に中間層を設ける必要があり、中間層
がないと被膜部分が剥がれ易くなるという問題があった
（特開平５−７９０６９号公報参照）。また、中間層を
設けるにしても製造工程が複雑になるといった問題があ
った。However, in the synthetic pseudo-diamond thin film formed by CVD or sputtering, it is necessary to provide an intermediate layer between the ceramic and the film, and there is a problem that the film portion is easily peeled off without the intermediate layer. (See Japanese Patent Laid-Open No. 5-79069). Further, even if the intermediate layer is provided, there is a problem that the manufacturing process becomes complicated.

【０００５】そこで、本発明は、耐摩耗性、耐摺動性に
優れた部材を得ることを目的とする。Therefore, an object of the present invention is to obtain a member having excellent wear resistance and sliding resistance.

【０００６】[0006]

【課題を解決するための手段】本発明は、上記事情に鑑
み、高硬度、耐腐食性、耐摩耗性に優れるセラミックス
を用いて、その摺動面にＩＶＤ（Ｉｏｎ Ｖａｐｏｕｒ
Ｄｅｐｏｓｉｔｉｏｎ、イオン蒸着法）による合成疑
似ダイヤモンド薄膜（ＤＬＣ、ｉ−カーボン、アモルフ
ァスカーボン）を被覆したことを特徴とする。なお、イ
オン蒸着法とは、金属の蒸着と同時に反応ガスをイオン
ビームとして母材表面に注入し、被膜を形成することを
いう。この方法を用いることで従来の被膜方法が抱えて
いた問題点である被膜の剥がれや、中間層の生成といっ
た無駄な工程を省くことが可能である。In view of the above circumstances, the present invention uses ceramics having high hardness, corrosion resistance and wear resistance, and has IVD (Ion Vapor) on its sliding surface.
It is characterized in that it is coated with a synthetic pseudo diamond thin film (DLC, i-carbon, amorphous carbon) by Deposition, ion deposition method. The ion deposition method means that a reaction gas is injected as an ion beam onto the surface of the base material at the same time as metal deposition to form a coating film. By using this method, it is possible to eliminate unnecessary steps such as peeling of the coating and formation of an intermediate layer, which are problems that the conventional coating method has.

【０００７】なお、上記セラミックスとしてはＡｌ2 Ｏ
3 系、ＺｒＯ2 系、Ｓｉ系、Ｂ系、Ｔｉ系であることが
望ましい。これらのセラミックスは、硬度が１０００ｋ
ｇ／ｍｍ2 以上であり、かつ耐腐食性にも優れており、
それ自身の耐摩耗性、耐摺動性も高くすることができ
る。本発明によれば、摺接部分が高硬度で自己潤滑性に
優れたものであるため、耐摩耗性、耐摺動性を高く出来
る。そのため、相手材との疑着等が発生しにくく、良好
なものが得られる。As the ceramics, Al 2 O is used.
Desirably, it is 3 type, ZrO 2 type, Si type, B type and Ti type. These ceramics have a hardness of 1000k
g / mm 2 or more and excellent corrosion resistance,
Its own wear resistance and sliding resistance can also be improved. According to the present invention, since the sliding contact portion has high hardness and excellent self-lubricating property, wear resistance and sliding resistance can be increased. Therefore, suspicion of the mating material is unlikely to occur, and a good material can be obtained.

【０００８】[0008]

【発明の実施の態様】以下、本発明を添付する図面に基
づいて詳細に説明する。本発明の摺動部材とは、使用す
る際に定まった相手部材と摺動するような部材のことで
あり、また耐摩耗部材とは使用する際に他部材と接触、
摺動、衝突し、耐摩耗性を要求される部材のことであ
る。具体的には、製缶用部材、バイオ用部材、液晶ガラ
スカッター、ハサミ、包丁、ピンセットなどの工具、液
体（粘性液体も含む）、粉体、気体、繊維用のノズル、
ガラス繊維カッター、ガラス繊維ガイドキャプスタン、
ボンディングキャピラリー、ワイヤーガイドなどの金属
繊維雑用ガイド、トラベラー、トラベラーリング、繊維
用糸ガイド、フリクションディスクなどの繊維用摺動部
材、半導体アーム、導電性部材、磁器ヘッド、Ｘ線ミラ
ー、ミラー、ガイドレール、エアスライド、スピンド
ル、ベアリング、各種バルブなどの摺動部材がある。BEST MODE FOR CARRYING OUT THE INVENTION The present invention will be described below in detail with reference to the accompanying drawings. The sliding member of the present invention is a member that slides with a mating member that has been determined when it is used, and the abrasion resistant member is in contact with other members when it is used,
A member that slides, collides, and is required to have wear resistance. Specifically, can-making members, biotechnology members, liquid crystal glass cutters, scissors, knives, tools such as tweezers, liquids (including viscous liquids), powders, gas, nozzles for fibers,
Fiberglass cutter, fiberglass guide capstan,
Bonding capillaries, metal fiber miscellaneous guides such as wire guides, travelers, traveler rings, fiber thread guides, fiber sliding members such as friction disks, semiconductor arms, conductive members, porcelain heads, X-ray mirrors, mirrors, guide rails. , Sliding members such as air slides, spindles, bearings, and various valves.

【０００９】図１は、本発明に係わる合成疑似ダイヤモ
ンド薄膜１１を被覆したセラミックス１２の概略図であ
る。この合成疑似ダイヤモンド薄膜１１上に他部材を摺
動させることで、例えばディスクバルブなどとして使用
できる。図２は、本発明に係わる合成疑似ダイヤモンド
薄膜１１を被覆した製缶用部材１３の概略図である。こ
の合成疑似ダイヤモンド薄膜１１側を缶に押し当てて加
工することができる。FIG. 1 is a schematic view of a ceramic 12 coated with a synthetic pseudo diamond thin film 11 according to the present invention. By sliding another member on the synthetic pseudo diamond thin film 11, it can be used, for example, as a disk valve. FIG. 2 is a schematic view of a can-making member 13 coated with the synthetic pseudo diamond thin film 11 according to the present invention. This synthetic pseudo diamond thin film 11 side can be pressed against a can for processing.

【００１０】図３は、本発明に係わる合成疑似ダイヤモ
ンド薄膜１１を刃部に被覆したハサミ１４の概略図であ
る。図４は、本発明に係わる合成疑似ダイヤモンド薄膜
１１を刃部に被覆した包丁の概略図である。図５は、本
発明に係わる合成疑似ダイヤモンド薄膜１１を先端把持
部に被覆したピンセットの概略図である。FIG. 3 is a schematic view of scissors 14 in which the blade is coated with the synthetic pseudo diamond thin film 11 according to the present invention. FIG. 4 is a schematic view of a knife in which a blade is coated with the synthetic pseudo diamond thin film 11 according to the present invention. FIG. 5 is a schematic view of tweezers in which the tip holding portion is covered with the synthetic pseudo diamond thin film 11 according to the present invention.

【００１１】図に示すように、Ａｌ2 Ｏ3 、ＡｌＮのＡ
ｌ系、Ｓｉ3 Ｎ4 、ＳｉＣ、ＳｉＮＣのＳｉ系、ＺｒＯ
2 のＺｒ系、ＴｉＣ、ＴｉＣＮ、ＴｉＮ、ＴｉＢのＴｉ
系、ＢＮ、ＢＣのＢ系セラミックスからなる耐摩耗部
材、摺動部材の摺接面にＩＶＤによる合成疑似ダイヤモ
ンド薄膜１１を形成したものである。図の摺接面をもつ
セラミックスを耐摩耗部材、摺動部材として用いれば相
手材との疑着が発生しにくく、良好なものが得られる。As shown in the figure, A of Al 2 O 3 and AlN
1 series, Si 3 N 4 , SiC, Si series of SiNC, ZrO
2 Zr system, TiC, TiCN, TiN, TiB Ti
A synthetic anti-diamond thin film 11 formed by IVD is formed on the sliding contact surface of a wear-resistant member made of B-based ceramics such as B series, BN, and BC, and a sliding member. When ceramics having a sliding contact surface shown in the figure is used as a wear resistant member or a sliding member, susceptibility to the mating material is less likely to occur and a good material can be obtained.

【００１２】なお、合成疑似ダイヤモンド薄膜は、厚み
は０．１〜５μｍであり、０．１μｍ未満では寿命が短
く、５μｍを越えると剥がれやすくなり、また、合成疑
似ダイヤモンドの成膜には時間がかかる。合成疑似ダイ
ヤモンド薄膜を付着させるセラミックスの表面粗さはＲ
ａ０．０３μｍ以上で適当に粗い方が密着し易い。ある
いは母材上に中間層を介してＩＶＤ法により成膜すれ
ば、より密着度を高くできる。The synthetic pseudo-diamond thin film has a thickness of 0.1 to 5 μm. If it is less than 0.1 μm, it has a short life, and if it exceeds 5 μm, it tends to peel off. It takes. The surface roughness of the ceramic to which the synthetic pseudo diamond thin film is attached is R
If a is 0.03 μm or more, it becomes easier to adhere if it is appropriately rough. Alternatively, if the film is formed on the base material via the intermediate layer by the IVD method, the degree of adhesion can be further increased.

【００１３】また、ＩＶＤ法により合成疑似ダイヤモン
ド薄膜を形成する際は、電子ビーム加熱などによる金属
蒸発により基材上に膜を形成しながら、イオン源から数
１０ｅＶ〜数１０ｋｅＶのエネルギーのイオンビームを
照射すれはよい。このようにイオンの高い運動エネルギ
ーを利用して、コーティング初期に基材原子と蒸着原子
および注入イオンの混合層を形成し、比較的低温で密着
度の高い合成疑似ダイヤモンド薄膜を形成することがで
きる。Further, when forming a synthetic pseudo diamond thin film by the IVD method, an ion beam with an energy of several tens eV to several tens keV is emitted from an ion source while forming a film on a substrate by metal evaporation by electron beam heating or the like. Irradiation is good. In this way, by utilizing the high kinetic energy of ions, it is possible to form a mixed layer of substrate atoms, vapor-deposited atoms and implanted ions at the initial stage of coating, and to form a synthetic pseudo-diamond thin film with high adhesion at a relatively low temperature. .

【００１４】「実験例」ここで、本発明の摺接面を有す
るセラミックスの耐摩耗性及び摺動性を調べるため、ボ
ールオンディスク型の摩擦摩耗試験機を用いた試験を行
った。比較例として、Ａｌ2 Ｏ3 系セラミックス、Ｚｒ
Ｏ2 系セラミックス、ＳｉＣ系セラミックス、Ｓｉ3 Ｎ
4 系セラミックスを主成分とし、炭化チタンを添加した
セラミックス、ＳＫＨ材を用意した。一方、本発明の実
施例としてＡｌ2 Ｏ3の摺接面に中間層を介在せずにＩ
ＶＤによる合成疑似ダイヤモンド薄膜を被覆したものを
用意した。"Experimental Example" Here, in order to examine the wear resistance and slidability of the ceramic having a sliding contact surface of the present invention, a test was conducted using a ball-on-disc type friction wear tester. As a comparative example, Al 2 O 3 based ceramics, Zr
O 2 system ceramics, SiC system ceramics, Si 3 N
Ceramics and SKH materials containing 4 series ceramics as the main component and titanium carbide added were prepared. On the other hand, as an embodiment of the present invention, the sliding contact surface of Al 2 O 3 has no I
What was coated with a synthetic pseudo diamond thin film by VD was prepared.

【００１５】各試料を、乾式無潤滑下の状態で相手材に
高炭素クロム鋼ＳＵＪ２のボールを用いて、荷重０．５
ｋｇ、相対摺動速度０．１７ｍ／ｓｅｃで摺動試験を行
い、両者間の摩擦係数、両部材の摩耗量を測定した結果
を表１に示す。Each sample was subjected to a load of 0.5 under a dry non-lubricated condition using balls of high carbon chrome steel SUJ2 as a mating material.
Table 1 shows the results obtained by performing a sliding test at a relative sliding speed of 0.17 m / sec in kg and measuring the friction coefficient between them and the amount of wear of both members.

【００１６】[0016]

【表１】 [Table 1]

【００１７】表１より明らかなように No.１〜５の比較
例は摩擦係数が０．４以上と大きく自材摩耗量、相手材
摩耗量共に大きかった。これに対し、本発明の No.７の
Ａｌ 2 Ｏ3 の摺接面にＩＶＤによる合成疑似ダイヤモン
ド薄膜を被覆したものは摩擦係数が０．１と小さく、か
つ自材摩耗量、相手材摩耗量共に小さいことから、耐摩
耗性、耐摺動性に優れていることが分かる。As is clear from Table 1, comparison of Nos. 1-5
An example is a large friction coefficient of 0.4 or more, the amount of wear of its own material, the mating material
The amount of wear was large. On the other hand, in No. 7 of the present invention
Al TwoOThreeIVD composite pseudo diamond on the sliding surface
The one coated with a thin film has a small friction coefficient of 0.1.
Both the amount of wear of its own material and the amount of wear of the mating material are small.
It can be seen that the wear resistance and sliding resistance are excellent.

【００１８】なお、 No.６に示すように、中間層を介し
てＣＶＤ法により合成疑似ダイヤモンド薄膜を形成した
ものでも、耐摩耗性、摺動性に優れていたが、本発明の
No.７では中間層なしで同程度の特性を得られることが
分かる。As shown in No. 6, the synthetic pseudo-diamond thin film formed by the CVD method with the intermediate layer interposed therebetween was excellent in wear resistance and slidability.
It can be seen that in No. 7, the same characteristics can be obtained without the intermediate layer.

【００１９】[0019]

【発明の効果】本発明は、上述のように、セラミックス
からなる母材の表面にＩＶＤ法で合成疑似ダイヤモンド
薄膜を被覆した摺動部材・耐摩耗部材であるので、耐摩
耗性、耐摺動性に優れた摺動部材・耐摩耗部材を提供で
きる。また、従来のＣＶＤ法などでは中間層が必要であ
るが、本発明に係るＩＶＤ法では中間層の必要がなく、
製造工程を簡略化できる。As described above, the present invention is a sliding member / abrasion resistant member in which the surface of the base material made of ceramics is coated with the synthetic pseudo diamond thin film by the IVD method. It is possible to provide a sliding member and an abrasion resistant member having excellent properties. Further, the conventional CVD method and the like require an intermediate layer, but the IVD method according to the present invention does not require an intermediate layer.
The manufacturing process can be simplified.

【図面の簡単な説明】[Brief description of drawings]

【図１】本発明に係わる合成疑似ダイヤモンド薄膜を被
覆したセラミックスの概略図である。FIG. 1 is a schematic view of ceramics coated with a synthetic pseudo diamond thin film according to the present invention.

【図２】本発明に係わる合成疑似ダイヤモンドを被覆し
た製缶用部材の概略図である。FIG. 2 is a schematic view of a can-making member coated with a synthetic pseudo diamond according to the present invention.

【図３】本発明に係わる合成疑似ダイヤモンド薄膜を被
覆したハサミの概略図である。FIG. 3 is a schematic view of scissors coated with a synthetic pseudo diamond film according to the present invention.

【図４】本発明に係わる合成疑似ダイヤモンド薄膜を被
覆した包丁の概略図である。FIG. 4 is a schematic view of a knife coated with a synthetic pseudo diamond film according to the present invention.

【図５】本発明に係わる合成疑似ダイヤモンド薄膜を被
覆したピンセットの概略図である。FIG. 5 is a schematic view of tweezers coated with a synthetic pseudo diamond thin film according to the present invention.

【符号の説明】[Explanation of symbols]

１１…合成疑似ダイヤモンド薄膜 １２…セラミックス １３…製缶用部材 １４…ハサミ １５…ピンセット 11 ... Synthetic pseudo diamond thin film 12 ... Ceramics 13 ... Can-making member 14 ... Scissors 15 ... Tweezers

Claims (2)

【特許請求の範囲】[Claims] 【請求項１】 セラミックスからなる母材の表面にＩＶ
Ｄ法で合成疑似ダイヤモンド薄膜を被覆したことを特徴
とする摺動部材。1. An IV is formed on the surface of a base material made of ceramics.
A sliding member coated with a synthetic pseudo diamond thin film by method D. 【請求項２】 セラミックスからなる母材の表面にＩＶ
Ｄ法で合成疑似ダイヤモンド薄膜を被覆したことを特徴
とする耐摩耗部材。2. An IV is formed on the surface of a base material made of ceramics.
A wear-resistant member characterized by being coated with a synthetic pseudo diamond thin film by method D.
JP7437096A 1996-03-28 1996-03-28 Sliding member and wear resistant member Pending JPH09263470A (en)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP7437096A JPH09263470A (en) 1996-03-28 1996-03-28 Sliding member and wear resistant member

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP7437096A JPH09263470A (en) 1996-03-28 1996-03-28 Sliding member and wear resistant member

Publications (1)

Publication Number Publication Date
JPH09263470A true JPH09263470A (en) 1997-10-07

Family

ID=13545216

Family Applications (1)

Application Number Title Priority Date Filing Date
JP7437096A Pending JPH09263470A (en) 1996-03-28 1996-03-28 Sliding member and wear resistant member

Country Status (1)

Country Link
JP (1) JPH09263470A (en)

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