JPH09257513A - Rotation angle sensor - Google Patents
Rotation angle sensorInfo
- Publication number
- JPH09257513A JPH09257513A JP9340196A JP9340196A JPH09257513A JP H09257513 A JPH09257513 A JP H09257513A JP 9340196 A JP9340196 A JP 9340196A JP 9340196 A JP9340196 A JP 9340196A JP H09257513 A JPH09257513 A JP H09257513A
- Authority
- JP
- Japan
- Prior art keywords
- rotation angle
- slot
- needle
- disc
- discharge electrode
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Pending
Links
Landscapes
- Transmission And Conversion Of Sensor Element Output (AREA)
- Measurement Of Length, Angles, Or The Like Using Electric Or Magnetic Means (AREA)
Abstract
Description
【０００１】[0001]
【発明の属する技術分野】本発明は、回転体の回転角ま
たは回転数をコロナ放電を利用して検出するようにした
回転角センサに関する。BACKGROUND OF THE INVENTION 1. Field of the Invention The present invention relates to a rotation angle sensor for detecting the rotation angle or the number of rotations of a rotating body by using corona discharge.
【０００２】[0002]
【従来の技術】従来、コロナ放電を利用した回転角セン
サは、例えば図１１に示すようになっている（例えば、
特開昭５４−２８６４８号公報）。図において、１はモ
ータ軸などの被測定体となる回転体、２は回転体１に固
定された絶縁円板２１で形成された回転円板、３は絶縁
円板２１の外周付近の同心円上に等間隔で同一幅に形成
された複数のスリット、４はスリット３を挟むように回
転円板２の一方側に設けられた板状導電体、５は板状導
電体４とスリット３を挟んで対向して設けられた針状の
放電電極、６は直流電源からなる放電用電源、７は負荷
抵抗、８出力電圧を増幅するための増幅回路である。こ
のような構成により、針状の放電電極５に放電用電源６
より高電圧を印加してコロナ放電させると、回転円板２
に形成されたスリット３を通り、板状導電体４に放電電
流が検出される。回転円板２は回転体１と一体に回転す
るから回転速度の増加に応じて間隔が狭くなるパルス状
の出力特性が得られ、その出力特性から回転角または回
転数を検出する。2. Description of the Related Art Conventionally, a rotation angle sensor utilizing corona discharge is shown in, for example, FIG. 11 (for example,
JP-A-54-28648). In the figure, 1 is a rotating body to be measured, such as a motor shaft, 2 is a rotating disk formed by an insulating disk 21 fixed to the rotating body 3, and 3 is a concentric circle near the outer circumference of the insulating disk 21. A plurality of slits formed at equal intervals and having the same width, 4 is a plate-shaped conductor provided on one side of the rotating disk 2 so as to sandwich the slit 3, and 5 is a plate-shaped conductor 4 and the slit 3 are sandwiched. 1. A needle-shaped discharge electrode is provided so as to face each other, 6 is a discharge power source composed of a DC power source, 7 is a load resistance, and 8 is an amplifier circuit for amplifying the output voltage. With such a configuration, the needle-shaped discharge electrode 5 is connected to the discharge power source 6
When a higher voltage is applied to cause corona discharge, the rotating disk 2
A discharge current is detected in the plate-shaped conductor 4 through the slit 3 formed in the. Since the rotating disc 2 rotates integrally with the rotating body 1, a pulse-like output characteristic in which the interval becomes narrower as the rotation speed increases, and the rotation angle or the number of rotations is detected from the output characteristic.
【０００３】[0003]
【発明が解決しようとする課題】ところが、上記従来技
術では、針状電極および板状導電体と回転円板の３者の
間で位置合わせが必要となるため、針状電極と板状導電
体の間の空隙を小さくすることが難しく、したがって空
隙が大きくなるためコロナ放電を発生させるには高電圧
が必要であり、コストが高くなるという問題があった。
また、電界を集中させて印加電圧を下げるためには針状
電極の先端を極めて微細にすることが必要であるが、従
来の針状の構造ではフォトリソグラフィ技術を適用する
ことが困難で、電極先端を鋭利にするのに限界があり、
電界を十分集中させることが難しいため、印加電圧は数
ｋＶの高電圧にする必要があるという問題があった。本
発明は、電極間の距離を小さくすると共に、電極の先端
を微細加工技術により微細にすることにより、放電電圧
を下げ、安全でかつ装置の小型化を図ることができる回
転角センサを提供することを目的とするものである。However, in the above-mentioned prior art, since the alignment between the needle electrode and the plate-shaped conductor and the rotating disk is required, the needle electrode and the plate-shaped conductor are required. Since it is difficult to reduce the gap between them, and the gap becomes large, a high voltage is required to generate corona discharge, and there is a problem that the cost becomes high.
Further, in order to concentrate the electric field and reduce the applied voltage, it is necessary to make the tip of the needle-shaped electrode extremely fine, but it is difficult to apply photolithography technology with the conventional needle-shaped structure, There is a limit to sharpening the tip,
Since it is difficult to sufficiently concentrate the electric field, there is a problem that the applied voltage needs to be a high voltage of several kV. The present invention provides a rotation angle sensor in which the distance between electrodes is reduced and the tips of the electrodes are made fine by a fine processing technique, so that the discharge voltage can be lowered and the device can be made safe and miniaturized. That is the purpose.
【０００４】[0004]
【課題を解決するための手段】上記課題を解決するた
め、本発明は、回転体と同一回転角で回転し得る絶縁円
板からなる回転円板と、前記絶縁円板に同心円上で円周
方向に所定のスロットピッチで配置された複数のスロッ
トと、前記スロットを通して放電し得る放電電極と、前
記スロットを挟み前記放電電極と対向するように設けら
れた導電体と、前記放電電極と前記導電体との間に電圧
を印加する放電用電源と、前記放電電極を流れる電流を
検出する電流検出手段とを備えた回転角センサにおい
て、前記回転円板は前記絶縁円板と前記絶縁円板の一方
の表面に設けられた導電体で形成された導電円板とから
なり、前記放電電極は絶縁体からなる支持体と前記支持
体上に間隔をあけて前記スロットを通して前記導電円板
に先端が対向するように配置された１対の針状電極とか
らなるものである。また、前記放電電極は、１組目の前
記１対の針状電極が半径方向に所定間隔をあけて設けら
れ、前記１組目の針状電極から円周方向に前記スリット
ピッチの（１＋１／Ｎ）倍（Ｎは正の整数）のピッチで
Ｎ組の針状電極を設けたものである。また、前記スロッ
トは、半径の異なるＭ個（Ｍは正の整数）の同心円上に
設けられ、かつ互いに円周方向に１／Ｍスロットピッチ
ずつずらしてあり、前記放電電極は、円周方向にスロッ
トピッチだけ間隔をあけ、かつ前記Ｍ個の同心円上に放
射状に配列されているものである。また、前記スリット
は、２個の同心円上に配置され互いに円周方向にスロッ
トピッチの１／４だけずらしてあり、前記放電電極は、
前記２個の同心円上で半径方向に配列してあるものであ
る。前記スリットは、前記絶縁円板の表面の１か所に設
けた基準スロットと、前記絶縁円板の同心円を１周する
円形スロットとを備え、前記放電電極は、前記基準スロ
ットの同心円上に配置され針状電極と、前記円形スロッ
トの同心円上に配置された針状電極とを備えたものであ
る。また、前記絶縁円板は、前記導電円板の表面に形成
された潤滑性樹脂からなる薄膜からなるものである。ま
た、前記放電電極は、表面にＰｔ，Ａｕ，ＴｉまたはＷ
の薄膜を形成した針状電極を設けてあるものである。In order to solve the above-mentioned problems, the present invention provides a rotating disk made of an insulating disk that can rotate at the same rotation angle as a rotating body, and a circular disk concentric with the insulating disk. Direction, a plurality of slots arranged at a predetermined slot pitch, a discharge electrode capable of discharging through the slot, a conductor provided so as to face the discharge electrode with the slot interposed therebetween, the discharge electrode and the conductive material. In a rotation angle sensor equipped with a discharge power source for applying a voltage between the body and a current detection means for detecting a current flowing through the discharge electrode, the rotary disc is composed of the insulating disc and the insulating disc. The discharge electrode is formed of a conductive disk provided on one surface, and the discharge electrode has a support made of an insulating material and a tip on the conductive disk through the slot with a space provided on the support. To face It is made of a placed a pair of needle-shaped electrodes. Further, the discharge electrode is provided with a pair of the needle electrodes of the first set at predetermined intervals in the radial direction, and the slit pitch of (1 + 1/1 /) is provided in the circumferential direction from the needle electrodes of the first set. N) needle electrodes are provided at a pitch of N) times (N is a positive integer). The slots are provided on M concentric circles with different radii (M is a positive integer) and are displaced from each other by 1 / M slot pitch in the circumferential direction, and the discharge electrodes are arranged in the circumferential direction. The slots are spaced by a slot pitch and are radially arranged on the M concentric circles. Further, the slits are arranged on two concentric circles and are displaced from each other in the circumferential direction by 1/4 of the slot pitch, and the discharge electrodes are
The two concentric circles are arranged in the radial direction. The slit includes a reference slot provided at one location on the surface of the insulating disc and a circular slot that makes a circle around a concentric circle of the insulating disc, and the discharge electrode is arranged on the concentric circle of the reference slot. And a needle-shaped electrode arranged on the concentric circle of the circular slot. The insulating disc is a thin film made of a lubricating resin formed on the surface of the conductive disc. The discharge electrode has Pt, Au, Ti or W on the surface.
Is provided with a needle-shaped electrode on which a thin film is formed.
【０００５】[0005]
【発明の実施の形態】以下、本発明を図に示す実施例に
ついて説明する。図１は本発明の第１の実施例を示す正
断面図である。図において、１はモータ軸などの被測定
体となる回転体、２は回転体１に固定された絶縁円板２
１を備えた回転円板、３は絶縁円板２１の外周付近の同
心円上に等間隔の角度ピッチｐで同一幅に形成された複
数のスリット、２２は絶縁円板２１の一方の面に塗布ま
たは貼付された導電円板で、絶縁円板２１と一体で回転
円板２を形成している。５はスリット３を挟んで導電円
板２２と反対側に空隙を介して対向する放電電極で、絶
縁体からなる支持体５１に間隔を置いて固定された針状
電極５ａ、５ｂからなり、針状電極５ａ，５ｂの先端は
鋭利に尖って、導電円板２２に向けられている。６は直
流電源からなる放電用電源、７は負荷抵抗、８は出力電
圧を増幅するための増幅回路である。放電電極６の作製
方法は、図２（ａ）に示すように、絶縁体からなる支持
体５１の上に配線５２を固定し、配線５２上に放電電極
用金属材料をメッキまたはスパッタリング等の膜堆積方
法によって金属膜５３を形成する。その後、フォトリソ
グラフィ技術により、金属膜５３の上にレジスト膜５４
を塗布して熱処理を加えた後、円形のパターンを有する
マスクによって紫外線露光を行い、レジスト膜５４を現
像する。その後、金属膜５３が銅の場合は、支持体５１
を塩化第２鉄、ステンレスの場合は王水等のエッチング
液に浸漬して金属膜５３を等方的に除去すると、図２
（ｂ）に示すように、先端の鋭利な形状の針状電極６
ａ，６ｂを得ることができる。なお、レジスト膜５４は
剥離液に浸すことによって除去できる。BEST MODE FOR CARRYING OUT THE INVENTION The present invention will be described below with reference to embodiments shown in the drawings. FIG. 1 is a front sectional view showing a first embodiment of the present invention. In the figure, 1 is a rotating body which is a measured body such as a motor shaft, and 2 is an insulating disk 2 fixed to the rotating body 1.
1 is a rotary disk, 3 is a plurality of slits formed on the concentric circle near the outer circumference of the insulating disk 21 at equal angular pitches p with the same width, and 22 is applied to one surface of the insulating disk 21. Alternatively, the rotating disk 2 is formed integrally with the insulating disk 21 by the attached conductive disk. Reference numeral 5 is a discharge electrode that faces the conductive disk 22 with the slit 3 in between and is opposed via a gap. The discharge electrode 5 is composed of needle electrodes 5a and 5b fixed to a support 51 made of an insulating material at intervals. The tips of the electrodes 5a and 5b are sharply pointed and directed toward the conductive disk 22. Reference numeral 6 is a discharging power source including a DC power source, 7 is a load resistor, and 8 is an amplifier circuit for amplifying an output voltage. As shown in FIG. 2A, the method for producing the discharge electrode 6 is as follows. A wiring 52 is fixed on a support 51 made of an insulator, and a metal material for a discharge electrode is plated or sputtered on the wiring 52. The metal film 53 is formed by the deposition method. After that, a resist film 54 is formed on the metal film 53 by photolithography.
After applying and heat treatment, the resist film 54 is developed by exposing it to ultraviolet rays using a mask having a circular pattern. After that, when the metal film 53 is copper, the support 51
2 is immersed in an etching solution such as aqua regia in the case of ferric chloride or stainless steel to remove the metal film 53 isotropically.
As shown in (b), the needle-shaped electrode 6 has a sharp tip.
a and 6b can be obtained. The resist film 54 can be removed by immersing it in a stripping solution.
【０００６】放電用電源６により放電電極５に電圧を印
加すると、針状電極５ａ→導電円板２２→針状電極５ｂ
というルートでコロナ放電が起こり、その時に流れる電
流は負荷抵抗７を用いて電圧として増幅回路８に入力さ
れて、放電電流として検出される。このような構成によ
り、導電円板２２は回転円板２に固定され、放電電極５
の二つの針状電極５ａ，５ｂは支持体５１に固定されて
いるので、放電電極５と導電円板２２の間の空隙の設定
が容易となるため、空隙を微小化でき、コロナ放電開始
電圧が低下するため、印加する放電電圧を下げることが
できる。また、針状電極５ａ，５ｂをフォトリソグラフ
ィ技術によって先端を鋭利に形成することができるの
で、コロナ放電電圧が低下し、印加する放電電圧を下げ
ることができる。When a voltage is applied to the discharge electrode 5 by the discharge power source 6, the needle electrode 5a → the conductive disk 22 → the needle electrode 5b.
Corona discharge occurs along this route, and the current flowing at that time is input as voltage to the amplifier circuit 8 using the load resistor 7 and detected as discharge current. With such a configuration, the conductive disk 22 is fixed to the rotating disk 2 and the discharge electrode 5
Since the two needle-shaped electrodes 5a and 5b are fixed to the support body 51, the gap between the discharge electrode 5 and the conductive disk 22 can be easily set, so that the gap can be made smaller and the corona discharge starting voltage can be reduced. Is lower, the applied discharge voltage can be lowered. Further, since the tips of the needle-shaped electrodes 5a and 5b can be sharply formed by the photolithography technique, the corona discharge voltage is lowered and the applied discharge voltage can be lowered.
【０００７】図３は本発明の第２の実施例の回転円板２
を示す正面図、図４は支持体５１を示した正面図であ
る。上記第１の実施例では放電電極５は、支持体５１に
針状電極５ａと５ｂを半径方向に配列して１組設けただ
けであるが、この場合、放電電極５は、支持体５１に針
状電極５ａと５ｂを半径方向に配列して１組とし、円周
方向にスリットの角度ピッチｐに対して、１個目から２
個目までの間隔を（１＋１／Ｎ）倍、２個目から３個目
までの間隔を（１＋２／Ｎ）倍、…という角度ピッチで
Ｎ個配置してある。このように放電電極５を配置するこ
とにより、スロットの角度ピッチ１ピッチ当たりにＮ個
の電圧ピークを検出することができるため、単純に回転
角の検出分解能をＮ倍に高めることができる。FIG. 3 shows a rotating disk 2 according to a second embodiment of the present invention.
FIG. 4 is a front view showing the support 51. In the first embodiment, the discharge electrode 5 is formed by providing the support 51 with the needle electrodes 5a and 5b arranged in the radial direction only one set, but in this case, the discharge electrode 5 is provided on the support 51. The needle electrodes 5a and 5b are arranged in the radial direction to form one set, and the first to the second electrodes are arranged with respect to the angular pitch p of the slits in the circumferential direction.
N intervals are arranged at an angular pitch of (1 + 1 / N) times the interval to the second and (1 + 2 / N) times the interval from the second to the third. By arranging the discharge electrodes 5 in this manner, N voltage peaks can be detected per angular pitch of the slots, so that the detection resolution of the rotation angle can be simply increased to N times.
【０００８】図５は本発明の第３の実施例の回転円板２
を示す正面図、図６は支持体５１を示した正面図であ
る。この場合、絶縁円板２１には円周方向に角度ピッチ
ｐでスリット３を同心円状に複数列（Ｍ列）配列し、外
周側から２列目は１列目からｐ／Ｍだけ回転方向に回転
させた位置に設け、順次、２列目は１列目から２ｐ／
Ｍ，…Ｍ列目は１列目からｐだけ回転させた位置に設け
てある。放電電極５は、フォトリソグラフィ技術により
一括して支持体５１上に、スリット３のＭ個の列にそれ
ぞれ対応して半径方向、すなわち放射状にＭ対の針状電
極５ａと５ｂを配置し、かつ針状電極５ａと５ｂを円周
方向に角度ピッチｐだけ離して形成してある。このよう
な構成により、回転体１がスリットの１ピッチ分回転し
たときに、Ｍ個の電圧ピークを検出することができるの
で、回転角の分解能をＭ倍にすることができる。FIG. 5 shows a rotating disk 2 according to a third embodiment of the present invention.
FIG. 6 is a front view showing the support 51. In this case, the slits 3 are concentrically arranged in multiple rows (M rows) on the insulating disk 21 at an angular pitch p in the circumferential direction, and the second row from the outer peripheral side is rotated by p / M from the first row in the rotation direction. It is installed in the rotated position, and the second row is sequentially 2p / from the first row.
The Mth, ... Mth column is provided at a position rotated by p from the first column. In the discharge electrode 5, M pairs of needle-shaped electrodes 5a and 5b are arranged in a radial direction, that is, radially corresponding to the M rows of the slits 3 on the support body 51 collectively by a photolithography technique, and The needle-shaped electrodes 5a and 5b are formed so as to be separated from each other in the circumferential direction by an angular pitch p. With such a configuration, when the rotating body 1 rotates by one pitch of the slit, M voltage peaks can be detected, so that the resolution of the rotation angle can be increased by M times.
【０００９】図７は本発明の第４の実施例を示す側断面
図である。この場合、絶縁円板２１には、図９に示すよ
うに、同心円上に外周側の第１列目に角度ピッチｐでス
リット３ａを設け、外周から第２列目に第１列目から回
転方向に１／４ｐ回転した位置に角度ピッチｐでスリッ
ト３ｂを設け、外周から第３列目に基準スリット３ｃを
１個設け、第４列目は１周する円形スリット３ｄを設け
てある。放電電極５は、図１０に示すように、支持体５
１の上にスリット３の１列目から４列目に対応して半径
方向に１列に針状電極５ａ，５ｂ，５ｃ，５ｄを設け、
針状電極５ａ，５ｂ，５ｃにはそれぞれ負荷抵抗７ａ，
７ｂ，７ｃを介して放電用電源６の陰極に接続するとと
もに、それぞれ増幅回路８ａ，８ｂ，８ｃによって放電
電流を検出するようにしてある。針状電極５ｄは放電用
電源６の陽極に接続してある。このような構成により、
回転体１を回転すると、図８に示すように、第１列目の
スリット３ａで針状電極５ａから信号Ａが出力され、第
２列目のスリット３ｂで針状電極５ｂから信号Ａに対し
て１／４ピッチずれた信号Ｂが出力され、第３列目の基
準スリット３ｃで針状電極５ｃから１周に１パルス発生
する信号Ｃが出力される。なお、円形スリット３ｄには
針上電極５ｄと導電円板２２との間の放電が通る。した
がって、信号ＡおよびＢによって従来の１列のスリット
から得られる回転角の分解能の１／４の分解能で回転角
が検出され、信号Ｃを基準に信号ＡおよびＢをカウント
することで、回転角の絶対位置を検出することができ
る。なお、基準スロットは上記第１、第２および第２の
実施例の場合に用いて、絶対位置を検出するようにして
もよい。FIG. 7 is a side sectional view showing a fourth embodiment of the present invention. In this case, as shown in FIG. 9, the insulating disk 21 is provided with slits 3a concentrically on the first row on the outer peripheral side at an angular pitch p and rotates from the first row on the second row to the outer periphery. Slits 3b are provided at a position rotated by 1 / 4p in the direction at an angular pitch p, one reference slit 3c is provided in the third row from the outer circumference, and a circular slit 3d is provided in the fourth row for one turn. The discharge electrode 5 is, as shown in FIG.
1, needle electrodes 5a, 5b, 5c, 5d are provided in one row in the radial direction corresponding to the first to fourth rows of the slit 3 on
The needle electrodes 5a, 5b and 5c are respectively provided with load resistors 7a,
The discharge current is connected to the cathode of the discharge power source 6 via 7b and 7c, and the discharge current is detected by the amplifier circuits 8a, 8b and 8c, respectively. The needle electrode 5d is connected to the anode of the power supply 6 for discharge. With such a configuration,
When the rotating body 1 is rotated, as shown in FIG. 8, the signal A is output from the needle-shaped electrode 5a through the slit 3a in the first row and the signal A is output from the needle-shaped electrode 5b in the slit 3b in the second row. Then, a signal B shifted by a 1/4 pitch is output, and a signal C for generating one pulse per revolution from the needle electrode 5c is output by the reference slit 3c in the third row. In addition, the discharge between the needle electrode 5d and the conductive disk 22 passes through the circular slit 3d. Therefore, the rotation angle is detected by the signals A and B at a resolution of 1/4 of the resolution of the rotation angle obtained from the conventional one-row slit, and the rotation angles are detected by counting the signals A and B with the signal C as a reference. The absolute position of can be detected. The reference slot may be used in the first, second and second embodiments to detect the absolute position.
【００１０】なお、上記実施例では、回転円板２は、導
電円板２２を絶縁体からなる回転円板２に貼付または塗
布して作製した例について説明したが、次のような作製
方法で作製してもよい。すなわち、導電円板２２の表面
にレジスト膜（感光性樹脂）を塗布する。この時、必要
とするスリットを設ける絶縁膜の厚さにレジスト膜の厚
さを合わせる。続いて、ポジ型のレジストであれば、絶
縁膜のスリットパターンに対して反転したパターンマス
クを用いて紫外線露光し、ネガ型の場合は、スリットパ
ターンそのままのパターンマスクを用いて紫外線露光し
て現像する。次にその表面にテフロン樹脂などの潤滑性
樹脂からなる薄膜をスパッタリングなどを用いて絶縁膜
からなる絶縁円板２１を形成する。続いてレジストの現
像液に浸してレジストを除去すると、図９に示すような
所望のスリットパターンが得られる。このように導電円
板２２の表面に薄膜の絶縁円板２１を設けると、導電円
板２２と放電電極５との間の空隙を小さくすることがで
きるので、放電電圧を２００Ｖ程度に低くすることがで
きるとともに、放電電極５が絶縁円板２１に接触しても
電極の消耗を少なくすることができる。また、放電電極
５は、支持体５１の表面に設けた配線５２に先端が鋭利
な形状の針状電極５ａ，５ｂを形成した後、さらにＰ
ｔ，Ａｕ，Ｔｉ，Ｗなどの薄膜をメッキなどの方法によ
り形成すると、電極の消耗を低減することができる。な
お、上記実施例では絶縁円板が回転体に機械的に固定さ
れた例について説明したが、絶縁円板と回転体とを電磁
気的に結合して、互いに同一回転角で回転するようにし
たものでもよい。また、上記第１の実施例から第４の実
施例までに説明した回転円板と放電電極との関係を複数
選択して一つの回転円板と支持体に設けて、更に分解能
を向上するように利用することも可能である。In the above embodiment, the rotary disc 2 is described as an example in which the conductive disc 22 is attached or applied to the rotary disc 2 made of an insulating material. You may produce. That is, a resist film (photosensitive resin) is applied to the surface of the conductive disk 22. At this time, the thickness of the resist film is adjusted to the thickness of the insulating film provided with the required slit. Next, in the case of a positive type resist, UV exposure is performed using a pattern mask that is the reverse of the slit pattern of the insulating film, and in the case of a negative type resist, UV exposure is performed using the pattern mask of the slit pattern as it is and development. To do. Next, a thin film made of a lubricating resin such as Teflon resin is formed on the surface by sputtering or the like to form an insulating disk 21 made of an insulating film. Then, when the resist is removed by immersing it in a resist developing solution, a desired slit pattern as shown in FIG. 9 is obtained. When the thin insulating disk 21 is provided on the surface of the conductive disk 22 in this manner, the gap between the conductive disk 22 and the discharge electrode 5 can be reduced, so that the discharge voltage should be reduced to about 200V. Moreover, even if the discharge electrode 5 contacts the insulating disk 21, the consumption of the electrode can be reduced. Further, in the discharge electrode 5, after the needle-shaped electrodes 5a and 5b having sharp tips are formed on the wiring 52 provided on the surface of the support body 51, P is further added.
When a thin film of t, Au, Ti, W or the like is formed by a method such as plating, the consumption of electrodes can be reduced. In the above embodiment, an example in which the insulating disc is mechanically fixed to the rotating body has been described, but the insulating disc and the rotating body are electromagnetically coupled to each other so that they rotate at the same rotation angle. It may be one. Further, by selecting a plurality of relationships between the rotating disk and the discharge electrode described in the first to fourth embodiments and providing them on one rotating disk and the support, it is possible to further improve the resolution. It can also be used for.
【００１１】[0011]
【発明の効果】以上述べたように、本発明によれば、放
電電極と回転円板の導電体との間の空隙の設定が容易
で、かつ正確にできるため、空隙の微小化が容易とな
り、コロナ放電開始電圧を低減し、印加電圧を下げるこ
とができる。また、フォトリソグラフィ技術を用いて鋭
利な先端を持った放電電極を形成することができるの
で、コロナ放電開始電圧を低減し、印加電圧を下げるこ
とができる。したがって、印加電圧を低減できるため、
放電用電源や放電電極を小さくすることができ、安全で
コストの安い回転角センサを提供できる効果がある。As described above, according to the present invention, it is possible to easily and accurately set the gap between the discharge electrode and the conductor of the rotating disk, which facilitates miniaturization of the gap. It is possible to reduce the corona discharge starting voltage and the applied voltage. Further, since the discharge electrode having a sharp tip can be formed by using the photolithography technique, the corona discharge starting voltage can be reduced and the applied voltage can be lowered. Therefore, since the applied voltage can be reduced,
The power supply for discharge and the discharge electrode can be made small, and there is an effect that a safe and inexpensive rotation angle sensor can be provided.
【図１】 本発明の第１の実施例を示す側断面図であ
る。FIG. 1 is a side sectional view showing a first embodiment of the present invention.
【図２】 本発明の第１の実施例の針状電極を形成する
途中の工程を示す説明図である。FIG. 2 is an explanatory view showing a process in the middle of forming the needle-shaped electrode of the first embodiment of the present invention.
【図３】 本発明の第２の実施例の絶縁円板を示す正面
図である。FIG. 3 is a front view showing an insulating disk according to a second embodiment of the present invention.
【図４】 本発明の第２の実施例の放電電極を示す正面
図である。FIG. 4 is a front view showing a discharge electrode according to a second embodiment of the present invention.
【図５】 本発明の第３の実施例の絶縁円板を示す正面
図である。FIG. 5 is a front view showing an insulating disc according to a third embodiment of the present invention.
【図６】 本発明の第３の実施例の放電電極を示す正面
図である。FIG. 6 is a front view showing a discharge electrode according to a third embodiment of the present invention.
【図７】 本発明の第４の実施例を示す側断面図であ
る。FIG. 7 is a side sectional view showing a fourth embodiment of the present invention.
【図８】 本発明の第４の実施例の動作を示す波形図で
ある。FIG. 8 is a waveform chart showing the operation of the fourth embodiment of the present invention.
【図９】 本発明の第４の実施例の絶縁円板を示す正面
図である。FIG. 9 is a front view showing an insulating disc according to a fourth embodiment of the present invention.
【図１０】 本発明の第４の実施例の放電電極を示す正
面図である。FIG. 10 is a front view showing a discharge electrode according to a fourth embodiment of the present invention.
【図１１】 従来例を示す側断面図である。FIG. 11 is a side sectional view showing a conventional example.
１：回転体、２：回転円板、２１：絶縁円板、２２：導
電円板、３、３ａ，３ｂ，３ｃ，３ｄ：スロット、５：
放電電極、５ａ，５ｂ，５ｃ，５ｄ：針状電極、５１：
支持体、５２：配線、５３：金属膜、５４：レジスト
膜、６：放電用電源、７：負荷抵抗、８：増幅回路1: Rotating body, 2: Rotating disk, 21: Insulating disk, 22: Conducting disk, 3a, 3b, 3c, 3d: Slot, 5:
Discharge electrode, 5a, 5b, 5c, 5d: Needle electrode, 51:
Support, 52: Wiring, 53: Metal film, 54: Resist film, 6: Discharge power supply, 7: Load resistance, 8: Amplifier circuit
Claims (7)
板からなる回転円板と、前記絶縁円板に同心円上で円周
方向に所定のスロットピッチで配置された複数のスロッ
トと、前記スロットを通して放電し得る放電電極と、前
記スロットを挟み前記放電電極と対向するように設けら
れた導電体と、前記放電電極と前記導電体との間に電圧
を印加する放電用電源と、前記放電電極を流れる電流を
検出する電流検出手段とを備えた回転角センサにおい
て、前記回転円板は前記絶縁円板と前記絶縁円板の一方
の表面に設けられた導電体で形成された導電円板とから
なり、前記放電電極は絶縁体からなる支持体と前記支持
体上に間隔をあけて前記スロットを通して前記導電円板
に先端が対向するように配置された１対の針状電極とか
らなることを特徴とする回転角センサ。1. A rotating disk made of an insulating disk that can rotate at the same rotation angle as a rotating body, and a plurality of slots concentrically arranged on the insulating disk in a circumferential direction at a predetermined slot pitch. A discharge electrode capable of discharging through the slot, a conductor provided so as to face the discharge electrode with the slot interposed therebetween, a discharge power supply for applying a voltage between the discharge electrode and the conductor, In a rotation angle sensor provided with a current detection means for detecting a current flowing through a discharge electrode, the rotating disc is a conductive circle formed of the insulating disc and a conductor provided on one surface of the insulating disc. The discharge electrode comprises a support made of an insulator, and a pair of needle-like electrodes arranged on the support so as to be opposed to the conductive disc through the slot. Is characterized by Rotation angle sensor.
状電極が半径方向に所定間隔をあけて設けてあり、前記
１組目の針状電極から円周方向に前記スリットピッチの
（１＋１／Ｎ）倍（Ｎは正の整数）のピッチでＮ組の針
状電極を設けてある請求項１記載の回転角センサ。2. The discharge electrode, wherein the pair of needle-shaped electrodes of the first set is provided at a predetermined interval in the radial direction, and the slit pitch is circumferentially formed from the needle-shaped electrodes of the first set. 2. The rotation angle sensor according to claim 1, wherein N sets of needle-shaped electrodes are provided at a pitch of (1 + 1 / N) times (N is a positive integer).
は正の整数）の同心円上に設けられ、かつ互いに円周方
向に１／Ｍスロットピッチずつずらしてあり、前記放電
電極は、円周方向にスロットピッチだけ間隔をあけ、か
つ前記Ｍ個の同心円上に放射状に配列されている請求項
１または２記載の回転角センサ。3. The M slots having different radii (M
Are positive integers) and are displaced from each other by 1 / M slot pitch in the circumferential direction, the discharge electrodes are spaced by a slot pitch in the circumferential direction, and the M concentric circles are provided. The rotation angle sensor according to claim 1 or 2, wherein the rotation angle sensors are arranged radially above.
され互いに円周方向にスロットピッチの１／４だけずら
してあり、前記放電電極は、前記２個の同心円上で半径
方向に配列してある請求項１から３までのいずれか１項
に記載の回転角センサ。4. The slits are arranged on two concentric circles and are circumferentially offset from each other by ¼ of a slot pitch, and the discharge electrodes are arranged in a radial direction on the two concentric circles. The rotation angle sensor according to any one of claims 1 to 3.
１か所に設けた基準スロットと、前記絶縁円板の同心円
を１周する円形スロットとを備え、前記放電電極は、前
記基準スロットの同心円上に配置され針状電極と、前記
円形スロットの同心円上に配置された針状電極とを備え
た請求項１から４までのいずれか１項に記載の回転角セ
ンサ。5. The slit includes a reference slot provided at one location on the surface of the insulating disc and a circular slot that makes a circle around a concentric circle of the insulating disc, and the discharge electrode has the reference slot. The rotation angle sensor according to any one of claims 1 to 4, further comprising: a needle-shaped electrode arranged on a concentric circle of the above and a needle-shaped electrode arranged on a concentric circle of the circular slot.
形成された潤滑性樹脂からなる薄膜からなる請求項１か
ら５までのいずれか１項に記載の回転角センサ。6. The rotation angle sensor according to claim 1, wherein the insulating disc is a thin film made of a lubricating resin formed on the surface of the conductive disc.
ｉまたはＷの薄膜を形成した針状電極を設けてある請求
項１から６までのいずれか１項に記載の回転角センサ。7. The discharge electrode has Pt, Au, T on its surface.
The rotation angle sensor according to any one of claims 1 to 6, further comprising a needle-shaped electrode formed with a thin film of i or W.
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP9340196A JPH09257513A (en) | 1996-03-22 | 1996-03-22 | Rotation angle sensor |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP9340196A JPH09257513A (en) | 1996-03-22 | 1996-03-22 | Rotation angle sensor |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| JPH09257513A true JPH09257513A (en) | 1997-10-03 |
Family
ID=14081286
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP9340196A Pending JPH09257513A (en) | 1996-03-22 | 1996-03-22 | Rotation angle sensor |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPH09257513A (en) |
Cited By (2)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| DE10233152A1 (en) * | 2002-07-22 | 2004-02-12 | Abb Patent Gmbh | Rotation angle sensor has an angle disk that rotates with a shaft and has a coded information track that can be read by a stationary read head, said track comprising digital coding and being formed using mechanical molding |
| KR100868263B1 (en) * | 2007-10-24 | 2008-11-11 | 삼성전기주식회사 | Potentiometer sensor for display wall mount |
-
1996
- 1996-03-22 JP JP9340196A patent/JPH09257513A/en active Pending
Cited By (2)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| DE10233152A1 (en) * | 2002-07-22 | 2004-02-12 | Abb Patent Gmbh | Rotation angle sensor has an angle disk that rotates with a shaft and has a coded information track that can be read by a stationary read head, said track comprising digital coding and being formed using mechanical molding |
| KR100868263B1 (en) * | 2007-10-24 | 2008-11-11 | 삼성전기주식회사 | Potentiometer sensor for display wall mount |
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