JPH09257421A - Optical displacement sensor - Google Patents

Optical displacement sensor

Info

Publication number
JPH09257421A
JPH09257421A JP7048796A JP7048796A JPH09257421A JP H09257421 A JPH09257421 A JP H09257421A JP 7048796 A JP7048796 A JP 7048796A JP 7048796 A JP7048796 A JP 7048796A JP H09257421 A JPH09257421 A JP H09257421A
Authority
JP
Japan
Prior art keywords
light receiving
displacement
emitting laser
surface emitting
receiving means
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Granted
Application number
JP7048796A
Other languages
Japanese (ja)
Other versions
JP3639377B2 (en
Inventor
Masataka Ito
正孝 伊藤
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Olympus Corp
Original Assignee
Olympus Optical Co Ltd
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Olympus Optical Co Ltd filed Critical Olympus Optical Co Ltd
Priority to JP07048796A priority Critical patent/JP3639377B2/en
Publication of JPH09257421A publication Critical patent/JPH09257421A/en
Application granted granted Critical
Publication of JP3639377B2 publication Critical patent/JP3639377B2/en
Anticipated expiration legal-status Critical
Expired - Fee Related legal-status Critical Current

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Classifications

    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01S—DEVICES USING THE PROCESS OF LIGHT AMPLIFICATION BY STIMULATED EMISSION OF RADIATION [LASER] TO AMPLIFY OR GENERATE LIGHT; DEVICES USING STIMULATED EMISSION OF ELECTROMAGNETIC RADIATION IN WAVE RANGES OTHER THAN OPTICAL
    • H01S5/00—Semiconductor lasers
    • H01S5/10—Construction or shape of the optical resonator, e.g. extended or external cavity, coupled cavities, bent-guide, varying width, thickness or composition of the active region
    • H01S5/14—External cavity lasers
    • H01S5/141—External cavity lasers using a wavelength selective device, e.g. a grating or etalon
    • H01S5/142—External cavity lasers using a wavelength selective device, e.g. a grating or etalon which comprises an additional resonator
    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01S—DEVICES USING THE PROCESS OF LIGHT AMPLIFICATION BY STIMULATED EMISSION OF RADIATION [LASER] TO AMPLIFY OR GENERATE LIGHT; DEVICES USING STIMULATED EMISSION OF ELECTROMAGNETIC RADIATION IN WAVE RANGES OTHER THAN OPTICAL
    • H01S5/00—Semiconductor lasers
    • H01S5/10—Construction or shape of the optical resonator, e.g. extended or external cavity, coupled cavities, bent-guide, varying width, thickness or composition of the active region
    • H01S5/18—Surface-emitting [SE] lasers, e.g. having both horizontal and vertical cavities
    • H01S5/183—Surface-emitting [SE] lasers, e.g. having both horizontal and vertical cavities having only vertical cavities, e.g. vertical cavity surface-emitting lasers [VCSEL]

Landscapes

  • Instruments For Measurement Of Length By Optical Means (AREA)
  • Length Measuring Devices By Optical Means (AREA)
  • Optical Transform (AREA)

Abstract

PROBLEM TO BE SOLVED: To provide an optical displacement sensor by which the direction and the amount of the displacement of an object can be measured always precisely, whose configuration is extremely simple, by which a displacement can be measured with high accuracy and which is compact. SOLUTION: An optical displacement sensor is provided with a vertical resonator- type surface emitting laser 21, with an external reflection means 22, with a light- receiving means 23a and a light-receiving means 23b and with a displacement detection means 28. The surface emitting laser 21 and the external reflection means 22 constitute a complex resonator. The light-receiving means 23a measures a periodic change in a laser output generated due to the relative displacement between the surface emitting laser 21 and the external reflection means 22, and the light-receiving means 23b detects interference fringes generated by the multiple reflection between the surface emitting laser 21 and the external reflection means 22. The light receiving means 23a and the light-receiving means 23b are arranged in positions whose phase is different regarding interference fringes formed in the external reflection means 22. The displacement detection means 28 detects the relative displacement between the surface emitting laser 21 and the external reflection means 22 on the basis of periodical output signals of the light-receiving means 23a, 23b.

Description

【発明の詳細な説明】Detailed Description of the Invention

【０００１】[0001]

【発明の属する技術分野】本発明は、対象物の変位を光
学的に測定する光学式変位センサに関する。BACKGROUND OF THE INVENTION 1. Field of the Invention The present invention relates to an optical displacement sensor that optically measures the displacement of an object.

【０００２】[0002]

【従来の技術】特開平７−５５４２３号は、垂直共振器
型面発光レーザを用いた光学式変位センサを開示してい
る。この光学式変位センサは、図１５に示すように、垂
直共振器型面発光レーザ１と外部ミラー２が組み合わさ
れた複合共振器を備え、外部ミラー２の移動に伴って生
じるレーザ光の強度変化を検出する受光手段３を有して
いる。外部ミラー２から帰還するレーザ光の位相は、外
部ミラー２と垂直共振器型面発光レーザ１の相対的な変
位により決まり、レーザ光の波長の１／２に相当する変
位量の周期でレーザ光出力が変動する。この変位量は、
計数装置４で変動の周期数を計数し、これに演算装置５
でレーザ光の波長の１／２を乗じることにより算出され
る。これにより、極めて簡単な構成で高精度の変位測定
が可能なコンパクトな光学式変位センサが実現されてい
る。2. Description of the Related Art Japanese Unexamined Patent Publication No. 7-55523 discloses an optical displacement sensor using a vertical cavity surface emitting laser. As shown in FIG. 15, this optical displacement sensor includes a compound resonator in which a vertical cavity surface emitting laser 1 and an external mirror 2 are combined, and the intensity change of the laser light caused by the movement of the external mirror 2. It has a light receiving means 3 for detecting. The phase of the laser light returned from the external mirror 2 is determined by the relative displacement of the external mirror 2 and the vertical cavity surface emitting laser 1, and the laser light is displaced at a cycle of a displacement amount corresponding to 1/2 of the wavelength of the laser light. The output fluctuates. This displacement is
The counting device 4 counts the number of fluctuation periods, and the calculation device 5
Is calculated by multiplying by 1/2 of the wavelength of the laser light. As a result, a compact optical displacement sensor capable of highly accurate displacement measurement with an extremely simple structure is realized.

【０００３】[0003]

【発明が解決しようとする課題】特開平７−５５４２３
号は、外部ミラー２の移動方向を判別する三つの手法を
開示している。第一の手法では、外部ミラー２が垂直共
振器型面発光レーザ１から遠ざかるときにはレーザ出力
のピークが減少し、反対に近づくときに増大する性質を
利用し、ピークの高さを調べることにより外部ミラー２
の移動方向を判別している。Problems to be Solved by the Invention JP-A-7-55423
No. 3 discloses three methods for determining the moving direction of the external mirror 2. The first method uses the property that the peak of the laser output decreases when the external mirror 2 moves away from the vertical cavity surface emitting laser 1 and increases when the external mirror 2 approaches the vertical cavity surface emitting laser 1. Mirror 2
Is determining the direction of movement.

【０００４】第二の手法では、外部ミラー２からの反射
光の位相をシフトする手段を設けて、レーザ出力の変化
の一周期中に大小のピークが発生するようにし、大小の
ピークの現れる順番を検知することにより外部ミラー２
の移動方向を判別している。In the second method, means for shifting the phase of the reflected light from the external mirror 2 is provided so that large and small peaks are generated during one cycle of the change in the laser output, and the order of appearance of the large and small peaks. External mirror 2 by detecting
Is determining the direction of movement.

【０００５】第三の手法では、垂直共振器型面発光レー
ザと外部ミラーからなる二組の共振器を設け、その一方
の光路中に位相シフト手段を設け、レーザ光出力の周期
的な変化に位相差を有する二つの信号を得、これに基づ
いて外部ミラー２の移動方向を判別している。In the third method, two sets of resonators, each consisting of a vertical cavity surface emitting laser and an external mirror, are provided, and a phase shift means is provided in the optical path of one of the resonators so that the laser light output changes periodically. Two signals having a phase difference are obtained, and the moving direction of the external mirror 2 is determined based on the two signals.

【０００６】しかしながら、第一と第二の手法では、レ
ーザ出力の周期的変化の一周期内で外部ミラーの移動方
向が繰り返し反転した場合の対応策については何も示唆
していない。つまり、受光手段３からの信号に基づいて
常に外部ミラー２の変位を検知しているため、受光手段
３からの出力信号がたまたま一方向に移動している時と
似た波形となった場合には、外部ミラー２が実際には一
方向に移動していないにも関わらず、装置は誤って外部
ミラー２が一方向に移動したものと判断してしまう。ま
た、受光手段３からの出力信号の波形が移動時の波形に
似ていない場合や、外的要因などで出力変動が生じる場
合等において、装置は誤った信号を出力し続けることに
なる。However, the first and second methods do not suggest any countermeasure for the case where the moving direction of the external mirror is repeatedly reversed within one cycle of the periodic change of the laser output. That is, since the displacement of the external mirror 2 is always detected based on the signal from the light receiving means 3, when the output signal from the light receiving means 3 has a waveform similar to that when it happens to move in one direction. , The device erroneously determines that the external mirror 2 has moved in one direction, even though the external mirror 2 has not actually moved in one direction. Further, when the waveform of the output signal from the light receiving means 3 does not resemble the waveform during movement, or when the output changes due to external factors, the device will continue to output an erroneous signal.

【０００７】また、第三の手法では、二つの垂直共振器
型面発光レーザを用いているため、両者の特性の相違
（例えば発振波長の相違）がある場合には、検知される
変位は実際の変位とは異なってしまい、測定結果は精度
の高いものとは言えない。Further, in the third method, since two vertical cavity surface emitting lasers are used, when there is a difference in characteristics between the two (for example, a difference in oscillation wavelength), the detected displacement is actually However, the measurement result cannot be said to be highly accurate.

【０００８】本発明の目的は、対象物の変位の方向と量
を常に正確に測定できる、極めて簡単な構成で高精度な
変位測定が可能なコンパクトな光学式変位センサを提供
することである。言い換えれば、本発明の目的は、一周
期内で外部ミラーの移動方向が繰り返し反転した場合に
もエラーを発生しない光学式変位センサを提供すること
である。An object of the present invention is to provide a compact optical displacement sensor capable of always accurately measuring the direction and amount of displacement of an object and having a very simple structure and capable of highly accurate displacement measurement. In other words, an object of the present invention is to provide an optical displacement sensor that does not generate an error even when the movement direction of the external mirror is repeatedly reversed within one cycle.

【０００９】[0009]

【課題を解決するための手段】本発明による光学式変位
センサは、上部反射手段と下部反射手段からなる垂直共
振器を有する垂直共振器型面発光レーザと、この垂直共
振器型面発光レーザと組み合わさって複合共振器を構成
する外部反射手段と、第一の受光手段と、第一の受光手
段の出力信号に対して所定の位相差を持つ信号を出力す
る第二の受光手段と、第一の受光手段と第二の受光手段
から出力される周期的な出力信号から垂直共振器型面発
光レーザと外部反射手段の間の相対的な変位を検出する
変位検出手段とを備えている。ここで、「複合共振器」
とは、上部反射手段と下部反射手段からなる光学共振器
と、外部反射手段と下部反射手段と上部反射手段からな
る光学共振器が組み合わされた形態の光学系を意味す
る。An optical displacement sensor according to the present invention is a vertical cavity surface emitting laser having a vertical cavity composed of an upper reflecting means and a lower reflecting means, and this vertical cavity surface emitting laser. External reflection means that combine to form a composite resonator; first light receiving means; second light receiving means for outputting a signal having a predetermined phase difference with respect to the output signal of the first light receiving means; Displacement detecting means for detecting relative displacement between the vertical cavity surface emitting laser and the external reflecting means from the periodic output signals output from the one light receiving means and the second light receiving means. Where "composite resonator"
Means an optical system in which an optical resonator including an upper reflecting means and a lower reflecting means and an optical resonator including an external reflecting means, a lower reflecting means and an upper reflecting means are combined.

【００１０】上記の構成において、好ましくは、第一の
受光手段は垂直共振器型面発光レーザの光軸上に位置し
ており、第二の受光手段は垂直共振器型面発光レーザの
光軸外に位置し、垂直共振器型面発光レーザと外部反射
手段の間の多重反射により生じる干渉縞の一部を受光す
る。In the above structure, preferably, the first light receiving means is located on the optical axis of the vertical cavity surface emitting laser, and the second light receiving means is the optical axis of the vertical cavity surface emitting laser. It is located outside and receives a part of interference fringes generated by multiple reflection between the vertical cavity surface emitting laser and the external reflection means.

【００１１】本発明による別の光学式変位センサは、上
部反射手段と下部反射手段からなる垂直共振器を有する
垂直共振器型面発光レーザと、垂直共振器型面発光レー
ザと組み合わさって複合共振器を構成する外部反射手段
と、垂直共振器型面発光レーザと外部反射手段の間の多
重反射により生じる干渉縞の明暗の分布を検出する受光
素子アレイと、受光素子アレイから出力された信号から
垂直共振器型面発光レーザと外部反射手段の間の相対的
な変位を検出する変位検出手段とを備えている。Another optical displacement sensor according to the present invention is a vertical cavity surface emitting laser having a vertical cavity composed of an upper reflecting means and a lower reflecting means, and a compound resonance in combination with a vertical cavity surface emitting laser. From the signal output from the light receiving element array, and the light receiving element array that detects the distribution of light and shade of interference fringes caused by multiple reflection between the vertical cavity surface emitting laser and the outer reflecting means. Displacement detection means for detecting relative displacement between the vertical cavity surface emitting laser and the external reflection means is provided.

【００１２】[0012]

【発明の実施の形態】以下、図面を参照しながら本発明
の実施の形態について説明する。 〔第一の実施の形態（図１に対応）〕第一の実施の形態
の光学式変位センサの構成を図１に示す。図１に示すよ
うに、光学式変位センサは、垂直共振器型面発光レーザ
２１、外部反射手段２２、第一の受光手段２３ａと第二
の受光手段２３ｂ、変位検出手段２８を有している。垂
直共振器型面発光レーザ２１と外部反射手段２２は組み
合わさって複合共振器を構成している。ここで複合共振
器とは、垂直共振器型面発光レーザ２１の上部反射手段
と下部反射手段からなる光学共振器と、垂直共振器型面
発光レーザ２１の下部反射手段と外部反射手段２２から
なる光学共振器と、垂直共振器型面発光レーザ２１の上
部反射手段と外部反射手段２２からなる光学共振器とが
組み合わさった光学系を意味する。Embodiments of the present invention will be described below with reference to the drawings. [First Embodiment (corresponding to FIG. 1)] FIG. 1 shows the configuration of an optical displacement sensor according to the first embodiment. As shown in FIG. 1, the optical displacement sensor includes a vertical cavity surface emitting laser 21, an external reflection unit 22, a first light receiving unit 23a and a second light receiving unit 23b, and a displacement detecting unit 28. . The vertical cavity surface emitting laser 21 and the external reflection means 22 are combined to form a composite cavity. Here, the compound resonator includes an optical resonator including an upper reflecting means and a lower reflecting means of the vertical cavity surface emitting laser 21, and a lower reflecting means of the vertical cavity surface emitting laser 21 and an external reflecting means 22. It means an optical system in which an optical resonator and an optical resonator including an upper reflection means of the vertical cavity surface emitting laser 21 and an external reflection means 22 are combined.

【００１３】外部反射手段２２には、ガラス等の平滑面
に金属の蒸着膜等の反射層を設けたものが適している。
第一の受光手段２３ａは、垂直共振器型面発光レーザ２
１と外部反射手段２２との間の相対的な位置変化に起因
して生じるレーザ出力の周期的変化を計測し、第二の受
光手段２３ｂは、垂直共振器型面発光レーザ２１と外部
反射手段２２の間の多重反射により生じる干渉縞を検出
する。第一の受光手段２３ａと第二の受光手段２３ｂに
は、シリコンフォトダイオード等の半導体受光素子が適
している。受光手段２３ａと２３ｂは、後述する干渉縞
に関して異なる位相の位置に配置されている。変位検出
手段２８は、第一の受光手段２３ａと第二の受光手段２
３ｂから出力される周期的な出力信号から、垂直共振器
型面発光レーザ２１と外部反射手段２２の間の相対的な
位置変化を検知する。As the external reflection means 22, one having a reflecting layer such as a metal vapor deposition film on a smooth surface such as glass is suitable.
The first light receiving means 23a is a vertical cavity surface emitting laser 2
1 and the external reflection means 22 measure the periodical change in the laser output caused by the relative position change, and the second light receiving means 23b is the vertical cavity surface emitting laser 21 and the external reflection means. The interference fringes caused by multiple reflections between 22 are detected. A semiconductor light receiving element such as a silicon photodiode is suitable for the first light receiving means 23a and the second light receiving means 23b. The light receiving means 23a and 23b are arranged at positions of different phases with respect to interference fringes described later. The displacement detecting means 28 includes a first light receiving means 23a and a second light receiving means 2
A relative position change between the vertical cavity surface emitting laser 21 and the external reflection means 22 is detected from the periodic output signal output from 3b.

【００１４】垂直共振器型面発光レーザ２１からの出力
光は、矢印２７で模式的に示されるように、垂直共振器
型面発光レーザ２１と外部反射手段２２の間で多重反射
する。その一部は垂直共振器型面発光レーザ２１に戻
り、距離Ｌで決まる戻り光の位相により垂直共振器型面
発光レーザ２１のレーザ出力に強弱が生じる。The output light from the vertical cavity surface emitting laser 21 is multiply reflected between the vertical cavity surface emitting laser 21 and the external reflection means 22, as schematically shown by an arrow 27. A part of it returns to the vertical cavity surface emitting laser 21, and the phase of the return light determined by the distance L causes a strong or weak laser output of the vertical cavity surface emitting laser 21.

【００１５】一方、出力光は矢印２７で示される多重反
射により同心円状の干渉縞を形成する。この干渉縞は、
距離Ｌが変化するに伴い、Ｌの変化量λ／２（λは出力
光の波長）を一周期とし、Ｌが増加するときには同心円
の外側から内側へ移動し、Ｌが減少するときには同心円
の内側から外側へ移動する。第一の受光手段２３ａと第
二の受光手段２３ｂは干渉縞の異なる位相の位置に配置
されているので、その出力は略同じ周期で異なる位相の
周期的な信号となり、Ｌの増減に対応して時間軸上での
相互の位相の進みと遅れの関係が反転する。On the other hand, the output light forms concentric interference fringes by the multiple reflection indicated by the arrow 27. This interference fringe is
As the distance L changes, the change amount λ / 2 of L (λ is the wavelength of the output light) is set as one cycle, and when L increases, it moves from the outside of the concentric circle to the inside, and when L decreases, the inside of the concentric circle. To move outward from. Since the first light receiving means 23a and the second light receiving means 23b are arranged at the positions of different phases of the interference fringes, their outputs become periodic signals of different phases at substantially the same period, and correspond to the increase or decrease of L. Thus, the relationship between the advance and the delay of the mutual phase on the time axis is reversed.

【００１６】図２（Ａ）と図２（Ｂ）は、発明者が実験
により観察した干渉縞と、その移動の様子を示した模式
図である。図２（Ｂ）は干渉縞の形状を、図２（Ａ）は
干渉縞の直径方向を横軸にとったときの光強度分布を示
している。同図から分かるように、Ｌの増加に伴って干
渉縞が外側から内側に移動するのが観察された。ここ
で、図２（Ａ）のＸ＝Ｘ0 とＸ＝Ｘ1 の位置（検出出力
間の位相差がθ≠ｎπとなる位置）に配置された第一の
受光手段２３ａと第二の受光手段２３ｂの出力信号をそ
れぞれ図３（Ａ）と図３（Ｂ）に示す。なお、実際の出
力信号の波形は、受光手段２３ａと２３ｂ、外部反射手
段２２、垂直共振器型面発光レーザ２１の相互間の位置
関係、垂直共振器型面発光レーザ２１の構造や駆動条件
等によって異なるが、以下の説明では簡単のため略正弦
波であるものとする。2 (A) and 2 (B) are schematic diagrams showing the interference fringes observed by the inventor through experiments and the manner of movement thereof. 2B shows the shape of the interference fringes, and FIG. 2A shows the light intensity distribution when the diameter direction of the interference fringes is taken along the horizontal axis. As can be seen from the figure, it was observed that the interference fringes moved from the outside to the inside as L increased. Here, the first light receiving means 23a and the second light receiving means arranged at the positions of X = X 0 and X = X 1 (the position where the phase difference between the detected outputs is θ ≠ nπ) in FIG. 2A. The output signals of the means 23b are shown in FIGS. 3 (A) and 3 (B), respectively. The actual waveform of the output signal is the positional relationship among the light receiving means 23a and 23b, the external reflection means 22, the vertical cavity surface emitting laser 21, the structure and driving conditions of the vertical cavity surface emitting laser 21, and the like. Although different depending on the case, it is assumed in the following description that it is a substantially sine wave for simplicity.

【００１７】変位検出手段２８は、第一の受光手段２３
ａと第二の受光手段２３ｂからの出力信号に基づいて、
垂直共振器型面発光レーザ２１と外部反射手段２２との
間の相対的な変位を検知する。The displacement detecting means 28 is the first light receiving means 23.
a and the output signal from the second light receiving means 23b,
The relative displacement between the vertical cavity surface emitting laser 21 and the external reflection means 22 is detected.

【００１８】変位の検知には、例えば、ｘｙ平面上にお
いて、受光手段２３ａからの出力信号をｘ軸にとり、受
光手段２３ｂからの出力信号をｙ軸にとって得られる軌
跡（リサージュ曲線）を利用する手法が適用できる。こ
の場合、変位方向はプロット点がリサージ曲線上を移動
する方向で判断され、変位量はプロット点がリサージュ
曲線上を移動した周期数にλ／２を乗じて求められる。To detect the displacement, for example, on the xy plane, a trajectory (Lissajous curve) obtained by taking the output signal from the light receiving means 23a on the x axis and the output signal from the light receiving means 23b on the y axis is used. Can be applied. In this case, the displacement direction is determined by the direction in which the plot point moves on the Lissajous curve, and the amount of displacement is obtained by multiplying the number of cycles of the plot point moving on the Lissajous curve by λ / 2.

【００１９】あるいは、別の手法として、受光手段２３
ａと２３ｂからの出力信号を二値化して信号処理する手
法が適用できる。以下、図４を参照しながら、二値化に
よる信号処理に基づく変位検出手段２８の具体例につい
て説明する。図４において、上段は変位検出手段２８の
構成を示すブロック図であり、下段は処理される波形を
模式的に示している。下段の左右は入力される二信号の
位相差が逆の場合を比較して表している。Alternatively, as another method, the light receiving means 23
A method of binarizing the output signals from a and 23b and performing signal processing can be applied. Hereinafter, with reference to FIG. 4, a specific example of the displacement detecting means 28 based on signal processing by binarization will be described. In FIG. 4, the upper stage is a block diagram showing the configuration of the displacement detecting means 28, and the lower stage schematically shows the processed waveform. The left and right sides of the lower row represent the case where the phase difference between the two input signals is opposite.

【００２０】変位検出手段２８は、第一の二値化回路２
８ａ、微分回路２８ｂ、第二の二値化回路２８ｃ、乗算
回路２８ｄを有している。受光手段２３ａの出力信号は
第一の二値化回路２８ａによって０と１に二値化され、
信号Ａが得られる。この信号Ａは微分回路２８ｂによっ
て時間で微分され、信号Ｂが得られる。一方、受光手段
２３ｂの出力信号は第二の二値化回路２８ｃによって０
と１に二値化され、信号Ｃが得られる。信号Ｂと信号Ｃ
は乗算回路２８ｄによって乗算され、信号Ｄが得られ
る。図の左右を比較すると容易に理解できるように、信
号Ｄは、一周期ごとに出力されるパルス信号であり、受
光手段２３ａと２３ｂの出力信号の位相関係に対応する
符号を有している。従って、変位方向は信号Ｄの符号で
判断され、変位量はパルス数にλ／２を乗じて求められ
る。The displacement detecting means 28 is the first binarization circuit 2
8a, a differentiation circuit 28b, a second binarization circuit 28c, and a multiplication circuit 28d. The output signal of the light receiving means 23a is binarized into 0 and 1 by the first binarization circuit 28a,
The signal A is obtained. The signal A is differentiated with respect to time by the differentiating circuit 28b to obtain the signal B. On the other hand, the output signal of the light receiving means 23b is set to 0 by the second binarization circuit 28c.
And binarized to 1 to obtain the signal C. Signal B and Signal C
Is multiplied by the multiplication circuit 28d to obtain the signal D. As can be easily understood by comparing the left and right sides of the figure, the signal D is a pulse signal output for each cycle and has a code corresponding to the phase relationship between the output signals of the light receiving means 23a and 23b. Therefore, the displacement direction is determined by the sign of the signal D, and the displacement amount is obtained by multiplying the pulse number by λ / 2.

【００２１】以上の説明から分かるように、本実施形態
の光学式変位センサは、垂直共振器型面発光レーザ２１
と外部反射手段２２の間の相対的な変位量（変位の絶対
値）のみならず変位方向も検出できる。しかも、外部ミ
ラー移動方向の反転が繰り返された場合でもエラーは発
生しない。As can be seen from the above description, the optical displacement sensor according to this embodiment has the vertical cavity surface emitting laser 21.
It is possible to detect not only the relative displacement amount (absolute value of displacement) between the external reflection means 22 and the external reflection means 22, but also the displacement direction. Moreover, no error occurs even when the reversal of the movement direction of the external mirror is repeated.

【００２２】勿論、この実施の形態の各構成は各種の変
形や変更が可能である。例えば、本実施形態では受光手
段２３ａと２３ｂは外部反射手段２２の表面に配置され
たが、垂直共振器型面発光レーザ２１と外部反射手段２
２の間の空間に配置されても一向に構わない。また、第
一の受光手段２３ａは垂直共振器型面発光レーザ２１の
光軸上に配置されたが、これ以外の場所に配置されても
一向に構わない。さらに、第一の受光手段２３ａと第二
の受光手段２３ｂを一体に形成した光学素子アレイとし
てもよい。Of course, each structure of this embodiment can be variously modified and changed. For example, although the light receiving means 23a and 23b are arranged on the surface of the external reflection means 22 in the present embodiment, the vertical cavity surface emitting laser 21 and the external reflection means 2 are arranged.
It does not matter if it is arranged in the space between the two. Further, the first light receiving means 23a is arranged on the optical axis of the vertical cavity surface emitting laser 21, but it may be arranged at a place other than this. Furthermore, an optical element array in which the first light receiving means 23a and the second light receiving means 23b are integrally formed may be used.

【００２３】〔第二の実施の形態（図５に対応）〕第二
の実施の形態の光学式変位センサの構成を図５に示す。
第一の実施の形態の部材と同等の部材は同一の符号で示
し、その詳しい説明はここでは省略する。[Second Embodiment (corresponding to FIG. 5)] FIG. 5 shows the configuration of an optical displacement sensor according to a second embodiment.
The same members as those in the first embodiment are designated by the same reference numerals, and detailed description thereof will be omitted here.

【００２４】本実施形態では、図５に示すように、第一
の受光手段２３ａは垂直共振器型面発光レーザ２１の裏
面に配置されており、垂直共振器型面発光レーザ２１の
裏面放射光４１を受光する。従って、矢印２７で示され
る多重反射の光路中には第二の受光手段２３ｂのみが配
置されている。In the present embodiment, as shown in FIG. 5, the first light receiving means 23a is arranged on the back surface of the vertical cavity surface emitting laser 21, and the back surface emitting light of the vertical cavity surface emitting laser 21 is arranged. 41 is received. Therefore, only the second light receiving means 23b is arranged in the multiple reflection optical path indicated by the arrow 27.

【００２５】裏面放射光４１は外部反射手段２２の移動
に伴ってやはり強弱を生じるので、本実施形態において
も第一の実施の形態と同様の手法により変位の方向と量
が求められる。Since the intensity of the backside radiated light 41 also varies with the movement of the external reflection means 22, the direction and amount of displacement can be obtained by the same method as in the first embodiment also in this embodiment.

【００２６】この実施の形態は第一の実施の形態で得ら
れる効果の他に以下に述べる特有の効果を有する。第一
の実施の形態では第一の受光手段２３ａを垂直共振器型
面発光レーザ２１の光軸上に配置したときに最も変調度
の高い信号を取り出すことができるが、複合共振器中の
光軸上に第一の受光手段２３ａを配置すると受光手段の
縁辺での光線の回折・散乱等によって迷光が生じ、信号
レベルの低下を招いたり、出力信号のノイズとなるおそ
れがある。This embodiment has the following unique effects in addition to the effects obtained in the first embodiment. In the first embodiment, when the first light receiving means 23a is arranged on the optical axis of the vertical cavity surface emitting laser 21, the signal with the highest modulation degree can be taken out. If the first light receiving means 23a is arranged on the axis, stray light is generated due to diffraction and scattering of light rays at the edge of the light receiving means, which may lead to a decrease in signal level and noise in the output signal.

【００２７】これに対して、本実施形態の光学式変位セ
ンサにおいては複合共振器中の光軸上に受光手段が位置
しないので、光量損失が減少し、変調度の大きな出力信
号が得られる。On the other hand, in the optical displacement sensor of this embodiment, since the light receiving means is not located on the optical axis in the composite resonator, the light quantity loss is reduced and an output signal with a large modulation degree can be obtained.

【００２８】〔第三の実施の形態（図６に対応）〕第三
の実施の形態の光学式変位センサの構成を図６に示す。
第二の実施の形態の部材と同等の部材は同一の符号で示
し、その詳しい説明はここでは省略する。[Third Embodiment (corresponding to FIG. 6)] FIG. 6 shows the configuration of an optical displacement sensor according to the third embodiment.
The same members as those of the second embodiment are designated by the same reference numerals, and detailed description thereof will be omitted here.

【００２９】本実施形態では、図６に示すように、外部
反射手段２２はハーフミラーであり、第二の受光手段２
３ｂは外部反射手段２２に対して垂直共振器型面発光レ
ーザ２１の反対側に配置されており、外部反射手段２２
を透過した光を受光する。外部反射手段２２には、平滑
なガラス基板等の光透過性の材料に金属薄膜等を施した
ものを用いることができる。In this embodiment, as shown in FIG. 6, the external reflection means 22 is a half mirror, and the second light receiving means 2 is used.
3b is arranged on the opposite side of the vertical cavity surface emitting laser 21 with respect to the external reflection means 22.
The light that has passed through is received. As the external reflection means 22, a light transmissive material such as a smooth glass substrate provided with a metal thin film or the like can be used.

【００３０】出力光は矢印２７で示される多重反射によ
り干渉縞を形成する。第一の受光手段２３ａは裏面放射
光４１を受光し、第二の受光手段２３ｂは外部反射手段
２２を透過した干渉光を受光する。従って、第二の実施
の形態と同様の手法により変位の方向と量を求めること
ができる。The output light forms an interference fringe by the multiple reflection indicated by the arrow 27. The first light receiving means 23a receives the backside emission light 41, and the second light receiving means 23b receives the interference light transmitted through the external reflection means 22. Therefore, the direction and amount of displacement can be obtained by the same method as in the second embodiment.

【００３１】この実施の形態は、第二の実施の形態で得
られる効果の他に次のような特有の効果を有する。本実
施形態の光学式変位センサでは、複合共振器の光路中に
受光手段がいっさい存在しないので、受光手段の縁辺で
の光の回折により発生する迷光による測定への悪影響を
受けることがない。This embodiment has the following unique effects in addition to the effects obtained in the second embodiment. In the optical displacement sensor of the present embodiment, since no light receiving means is present in the optical path of the composite resonator, there is no adverse effect on measurement due to stray light generated by diffraction of light at the edge of the light receiving means.

【００３２】また、次のような別の効果も有する。第一
と第二の実施の形態においては受光手段２３ａまたは受
光手段２３ｂと変位検出手段２８を接続するための電気
配線を外部反射手段２２に対して設ける必要がある。こ
のとき、外部反射手段２２と垂直共振器型面発光レーザ
２１の間の相対的な変位を測定するためには、外部反射
手段２２の垂直共振器型面発光レーザ２１に対する相対
的な変位を妨げないために、この電気配線はフレキシブ
ル配線部材等の柔軟な配線部材が望ましい。しかし、こ
のような配線部材を選択した場合であっても配線部材の
曲げ弾性等に起因する抵抗力が作用し、外部反射手段２
２の変位を物理的に妨害したり、外部反射手段２２にた
わみ等の変形を生じさせたりする可能性がある。その結
果、測定対象物の変位が正確に測定できなくなるおそれ
がある。つまり、一般の光学式変位測定が本来有する非
接触センシングの利点の一部が損なわれる場合が生じ得
る。これに対して、本実施の形態では外部反射手段２２
に電気配線を付与する必要がないため、電気配線部材に
よる外部反射手段２２の移動に対する物理的な妨害等が
生じず、正確な変位測定が行なえる。Further, there is another effect as follows. In the first and second embodiments, it is necessary to provide an electric wiring for connecting the light receiving means 23a or the light receiving means 23b and the displacement detecting means 28 to the external reflecting means 22. At this time, in order to measure the relative displacement between the external reflection means 22 and the vertical cavity surface emitting laser 21, the relative displacement of the external reflection means 22 with respect to the vertical cavity surface emitting laser 21 is prevented. Therefore, a flexible wiring member such as a flexible wiring member is desirable for this electric wiring. However, even when such a wiring member is selected, the resistance force due to the bending elasticity of the wiring member acts and the external reflection means 2
There is a possibility that the displacement of 2 may be physically obstructed or that the external reflection means 22 may be deformed, such as flexed. As a result, the displacement of the measurement object may not be accurately measured. That is, some of the advantages of non-contact sensing originally possessed by general optical displacement measurement may be impaired. On the other hand, in the present embodiment, the external reflection means 22
Since it is not necessary to provide the electric wiring to, the physical displacement of the external reflection means 22 by the electric wiring member is not physically disturbed, and the displacement can be accurately measured.

【００３３】〔第四の実施の形態（図７に対応）〕第四
の実施の形態の光学式変位センサの構成を図７に示す。
第三の実施の形態の部材と同等の部材は同一の符号で示
し、その詳しい説明はここでは省略する。[Fourth Embodiment (corresponding to FIG. 7)] FIG. 7 shows the configuration of an optical displacement sensor according to the fourth embodiment.
The same members as the members of the third embodiment are designated by the same reference numerals, and detailed description thereof will be omitted here.

【００３４】本実施形態では、図７に示すように、外部
反射手段２２は基板２２ａとハーフミラー層２２ｂとか
らなっている。また、基板２２ａの中に第二の受光手段
２３ｂが形成されている。このような外部反射手段２２
は半導体製造プロセスによって作製可能である、例え
ば、基板２２ａには表面が鏡面状のシリコン基板を使用
し、その一部にフォトダイオードを形成して受光手段２
３ｂとし、その上層に窒化シリコン薄膜等の光透過性の
電気絶縁層を介して金属蒸着薄膜等のハーフミラー層２
２ｂを形成して得られる。In this embodiment, as shown in FIG. 7, the external reflection means 22 comprises a substrate 22a and a half mirror layer 22b. Further, the second light receiving means 23b is formed in the substrate 22a. Such external reflection means 22
Can be manufactured by a semiconductor manufacturing process. For example, a silicon substrate having a mirror-like surface is used for the substrate 22a, and a photodiode is formed on a part of the silicon substrate to form the light receiving means 2.
3b, and a half mirror layer 2 such as a metal vapor-deposited thin film formed on the upper layer with a light-transmitting electrically insulating layer such as a silicon nitride thin film interposed therebetween
It is obtained by forming 2b.

【００３５】この実施の形態は、第三の実施の形態と同
様の効果の他に、次のような特有の効果を有する。外部
反射手段２２と第二の受光手段２３ｂを一体的に製作で
きるので、部品数が少なく、組立が容易である。This embodiment has the following unique effects in addition to the same effects as the third embodiment. Since the external reflection means 22 and the second light receiving means 23b can be integrally manufactured, the number of parts is small and the assembly is easy.

【００３６】なお、この発明の実施の各構成は各種の変
更が可能である。例えば、第一の受光手段２３ａと第二
の受光手段２３ｂを共に基板２２ａに製作した場合も同
様の利点が得られる。Various modifications can be made to each configuration of the embodiment of the present invention. For example, the same advantage can be obtained when both the first light receiving means 23a and the second light receiving means 23b are manufactured on the substrate 22a.

【００３７】〔第五の実施の形態（図８に対応）〕第五
の実施の形態の光学式変位センサの構成を図８に示す。
第四の実施の形態の部材と同等の部材は同一の符号で示
し、その詳しい説明はここでは省略する。[Fifth Embodiment (corresponding to FIG. 8)] FIG. 8 shows the configuration of an optical displacement sensor according to the fifth embodiment.
The same members as the members of the fourth embodiment are designated by the same reference numerals, and detailed description thereof will be omitted here.

【００３８】本実施形態では、図８に示すように、垂直
共振器型面発光レーザ２１と同一基板に第一の受光手段
２３ａと第二の受光手段２３ｂが形成されている。この
ような構造体はフォトリソグラフィー等の半導体製造プ
ロセスによって作製可能である。In this embodiment, as shown in FIG. 8, a first light receiving means 23a and a second light receiving means 23b are formed on the same substrate as the vertical cavity surface emitting laser 21. Such a structure can be manufactured by a semiconductor manufacturing process such as photolithography.

【００３９】本実施形態は次に述べる特有の効果を有す
る。垂直共振器型面発光レーザ２１と第一の受光手段２
３ａと第二の受光手段２３ｂを同一基板に形成すること
により、部品数が少なくなり、組立工程が簡略化され、
製造コストが低減される。また、垂直共振器型面発光レ
ーザ２１と第一の受光手段２３ａと第二の受光手段２３
ｂは半導体製造技術によって高い位置精度で基板に形成
されるため、組立時に相互の位置関係の調整が不要であ
る。This embodiment has the following unique effects. Vertical cavity surface emitting laser 21 and first light receiving means 2
By forming 3a and the second light receiving means 23b on the same substrate, the number of parts is reduced and the assembly process is simplified.
Manufacturing costs are reduced. Further, the vertical cavity surface emitting laser 21, the first light receiving means 23a, and the second light receiving means 23.
Since b is formed on the substrate with high positional accuracy by the semiconductor manufacturing technology, it is not necessary to adjust the mutual positional relationship during assembly.

【００４０】本実施形態では、第一の受光手段２３ａと
第二の受光手段２３ｂを共に垂直共振器型面発光レーザ
２１の基板に形成したが、これらのいずれか一方のみを
基板に形成した場合も同様の利点が得られる。In the present embodiment, both the first light receiving means 23a and the second light receiving means 23b are formed on the substrate of the vertical cavity surface emitting laser 21, but only one of them is formed on the substrate. Has similar advantages.

【００４１】〔第六の実施の形態（図９に対応）〕第六
の実施の形態の光学式変位センサの構成を図９に示す。
図９に示すように、光学式変位センサは、垂直共振器型
面発光レーザ２１、外部反射手段２２、一次元の受光素
子アレイ８１、変位検出手段８２を有している。[Sixth Embodiment (corresponding to FIG. 9)] FIG. 9 shows the configuration of an optical displacement sensor according to the sixth embodiment.
As shown in FIG. 9, the optical displacement sensor includes a vertical cavity surface emitting laser 21, an external reflection unit 22, a one-dimensional light receiving element array 81, and a displacement detection unit 82.

【００４２】垂直共振器型面発光レーザ２１と外部反射
手段２２は組み合わさって複合共振器を構成している。
ここで複合共振器とは、垂直共振器型面発光レーザ２１
の上部反射手段と下部反射手段からなる光学共振器と、
垂直共振器型面発光レーザ２１の下部反射手段と外部反
射手段２２からなる光学共振器と、垂直共振器型面発光
レーザ２１の上部反射手段と外部反射手段２２からなる
光学共振器とが組み合わさった光学系を意味する。The vertical cavity surface emitting laser 21 and the external reflection means 22 are combined to form a composite cavity.
Here, the compound resonator means a vertical cavity surface emitting laser 21.
An optical resonator comprising an upper reflecting means and a lower reflecting means of
An optical resonator composed of a lower reflection means of the vertical cavity surface emitting laser 21 and an external reflection means 22 is combined with an optical resonator composed of an upper reflection means of the vertical cavity surface emitting laser 21 and an external reflection means 22. Optical system.

【００４３】受光素子アレイ８１は外部反射手段２２に
設けられており、外部反射手段２２の表面に形成される
干渉縞の間隔に比べて十分に小さい間隔で並んだ多数の
受光素子を有し、例えば図２（Ａ）のＸ0 ≦Ｘ≦Ｘ1 に
相当する範囲を延びている。受光素子アレイ８１には、
例えばＣＣＤ（電荷結合デバイス）ラインセンサ等が使
用される。The light receiving element array 81 is provided in the external reflecting means 22, and has a large number of light receiving elements arranged at intervals sufficiently smaller than the intervals of the interference fringes formed on the surface of the external reflecting means 22. For example, it extends in a range corresponding to X 0 ≦ X ≦ X 1 in FIG. In the light receiving element array 81,
For example, a CCD (charge coupled device) line sensor or the like is used.

【００４４】第一の実施の形態に関して図２（Ａ）と図
２（Ｂ）を用いて説明したように、外部反射手段２２の
表面に形成される同心円状の干渉縞は外部反射手段２２
の移動に伴って移動し、しかも、外部反射手段２２が垂
直共振器型面発光レーザ２１から遠ざかるときには干渉
縞は周囲から中心へ、近づくときには中心から周囲へと
移動する。As described with reference to FIGS. 2A and 2B regarding the first embodiment, the concentric interference fringes formed on the surface of the external reflection means 22 are the external reflection means 22.
When the external reflection means 22 moves away from the vertical cavity surface emitting laser 21, the interference fringes move from the periphery to the center, and when approaching, move from the center to the periphery.

【００４５】受光素子アレイ８１は、外部反射手段２２
の表面に形成される干渉縞の明暗分布を検知し、図２
（Ａ）のＸ0 ≦Ｘ≦Ｘ1 の範囲に相当する波形信号を出
力する。変位検出手段８２はこの波形信号から干渉縞の
移動を検知し、垂直共振器型面発光レーザ２１と外部反
射手段２２との間の相対的な変位を検知する。The light receiving element array 81 includes the external reflection means 22.
The distribution of interference fringes formed on the surface of the
A waveform signal corresponding to the range of X 0 ≦ X ≦ X 1 in (A) is output. The displacement detection means 82 detects the movement of the interference fringes from this waveform signal, and detects the relative displacement between the vertical cavity surface emitting laser 21 and the external reflection means 22.

【００４６】以下、図１０を参照しながら、変位検出手
段８２の具体例について説明する。図１０において、上
段は変位検出手段８２の構成を示すブロック図であり、
下段は処理される信号の波形を模式的に示している。下
段の左右は干渉縞の移動の向きが逆の場合を比較して表
している。A specific example of the displacement detecting means 82 will be described below with reference to FIG. In FIG. 10, the upper part is a block diagram showing the configuration of the displacement detecting means 82,
The lower part schematically shows the waveform of the signal to be processed. The left and right sides of the lower row represent the case where the movement direction of the interference fringes is opposite.

【００４７】時間Ｔ＝Ｔ0 の時点において受光素子アレ
イ８１からの信号が入力され、信号波形記憶装置８２ａ
に記憶される。この波形の横軸は受光素子アレイ８１の
受光面の位置に対応したものであり、この位置をＸで表
す。この信号波形は、ピーク検出回路８２ｂに送られて
処理され、ピーク位置Ｐ1 、Ｐ2 、Ｐ3 が検出され、ピ
ーク位置で立ち上がるパルスを有する信号Ａが得られ
る。このピーク位置はピーク位置記憶装置８２ｃにより
記憶される。一方、信号波形記憶装置８２ａに記憶され
た信号波形は、微分回路８２ｄに送られて位置Ｘで微分
され、信号Ｂが得られる。この信号Ｂはさらに二値化反
転回路８２ｇにより＋１と−１に二値化されるとともに
正負の符号が反転され、信号Ｃが得られる。At time T = T 0 , the signal from the light-receiving element array 81 is input, and the signal waveform storage device 82a.
Is stored. The horizontal axis of this waveform corresponds to the position of the light receiving surface of the light receiving element array 81, and this position is represented by X. This signal waveform is sent to the peak detection circuit 82b and processed, peak positions P 1 , P 2 and P 3 are detected, and a signal A having a pulse rising at the peak position is obtained. This peak position is stored by the peak position storage device 82c. On the other hand, the signal waveform stored in the signal waveform storage device 82a is sent to the differentiating circuit 82d and differentiated at the position X to obtain the signal B. The signal B is further binarized by the binarization inverting circuit 82g into +1 and -1 and the positive and negative signs are inverted, and the signal C is obtained.

【００４８】次いで時間Ｔ＝Ｔ1 ＝Ｔ0 ＋ΔＴの時点に
おいて受光素子アレイ８１からの信号が入力され、信号
波形記憶装置８２ａに記憶される。この信号波形は、ピ
ーク検出回路８２ｂに送られて処理され、ピーク位置Ｐ
4 、Ｐ5 、Ｐ6 が検出され、ピーク位置で立ち上がるパ
ルスを有する信号Ｄが得られる。Then, at time T = T 1 = T 0 + ΔT, the signal from the light-receiving element array 81 is input and stored in the signal waveform storage device 82a. This signal waveform is sent to the peak detection circuit 82b for processing, and the peak position P
4 , P 5 and P 6 are detected, and a signal D having a pulse rising at the peak position is obtained.

【００４９】ここで、信号Ｃと信号Ｄを乗算回路８２ｅ
で乗算することにより、波形の移動方向に応じた符号を
有する信号Ｅが得られる。この符号を符号検出回路８２
ｈで検出することにより、波形の移動方向に対応した符
号が得られる。図１０においては、右に移動するときは
プラス、左に移動するときはマイナスの符号が得られ
る。Here, the signal C and the signal D are multiplied by the multiplication circuit 82e.
By multiplying by, a signal E having a sign corresponding to the moving direction of the waveform is obtained. The code is detected by the code detection circuit 82.
By detecting with h, the code corresponding to the moving direction of the waveform can be obtained. In FIG. 10, a plus sign is obtained when moving to the right, and a minus sign is obtained when moving to the left.

【００５０】減算回路８２ｆは、ピーク位置記憶装置８
２ｃに記憶されたＴ＝Ｔ1 におけるピーク位置からＴ＝
Ｔ0 におけるピーク位置を減算し、これにより符号を含
めたピーク移動量すなわち干渉縞の移動量を算出する。
この際、符号検出回路８２ｈの出力に応じて、波形の移
動方向が右側の時には、Ｔ＝Ｔ0 の時のピーク位置Ｐm
に対してＰm ＜Ｐn の条件を満たす最小の、Ｔ＝Ｔ1 の
時のピーク位置Ｐn を選択してＰn −Ｐm を演算すれば
よい。また、波形の移動方向が左側の時には、Ｔ＝Ｔ0
の時のピーク位置Ｐm に対してＰm ＞Ｐn の条件を満た
す最大の、Ｔ＝Ｔ1 の時のピーク位置Ｐn を選択してＰ
n −Ｐm を演算すればよい。この減算は、任意の一つの
ピークに関して行なってもよいが、複数のピークに関し
て算出して平均を取ってもよい。The subtraction circuit 82f is used in the peak position storage device 8
From the peak position at T = T 1 stored in 2c, T =
The peak position at T 0 is subtracted, and thereby the peak movement amount including the sign, that is, the movement amount of the interference fringes is calculated.
At this time, according to the output of the code detection circuit 82h, when the moving direction of the waveform is on the right side, the peak position P m when T = T 0.
In contrast, the minimum peak position P n when T = T 1 is selected to satisfy the condition of P m <P n , and P n −P m may be calculated. When the moving direction of the waveform is on the left side, T = T 0
The maximum peak position P n when T = T 1 is selected for P m > P n with respect to the peak position P m when P
It suffices to calculate n −P m . This subtraction may be performed for any one peak, but may be calculated for a plurality of peaks and averaged.

【００５１】このように、変位検出手段８２は符号を含
めたピーク移動量すなわち干渉縞の移動量を算出する。
さらに、受光素子アレイ８１は干渉縞の間隔に対して厳
密に位置合わせを行う必要がないので、光学式変位セン
サを製造する際の組立・調整が容易である。In this way, the displacement detecting means 82 calculates the peak movement amount including the sign, that is, the movement amount of the interference fringes.
Further, since the light receiving element array 81 does not need to be precisely aligned with the interval of the interference fringes, it is easy to assemble and adjust when manufacturing the optical displacement sensor.

【００５２】勿論、この実施の形態の各構成は種々の変
形や変更が可能である。例えば、本実施形態では干渉縞
の移動量を検出する手法により変位量を検出したが、受
光素子アレイ８１を構成する受光素子中の特定の一つの
受光素子からの出力信号に着目し、その周期的な変化か
ら変位量を検出してもよい。Of course, various modifications and changes can be made to each structure of this embodiment. For example, although the displacement amount is detected by the method of detecting the movement amount of the interference fringes in the present embodiment, the output signal from a specific one light receiving element in the light receiving elements forming the light receiving element array 81 is focused and its cycle is determined. The displacement amount may be detected based on the dynamic change.

【００５３】また、本実施形態では干渉縞の移動方向を
検出する手法により変位方向を検出したが、受光素子ア
レイ８１を構成する受光素子中の特定の二つの受光素子
から出力される位相差を持った信号に着目し、第一の実
施の形態と同じ手法により変位方向を検出してもよい。Further, in the present embodiment, the displacement direction is detected by the method of detecting the moving direction of the interference fringes. However, the phase difference output from two specific light receiving elements in the light receiving elements forming the light receiving element array 81 is calculated. The displacement direction may be detected by focusing on the held signal and using the same method as in the first embodiment.

【００５４】〔第七の実施の形態（図１１に対応）〕第
七の実施の形態の光学式変位センサの構成を図１１に示
す。第六の実施の形態の部材と同等の部材は同一の符号
で示し、その詳しい説明はここでは省略する。[Seventh Embodiment (corresponding to FIG. 11)] FIG. 11 shows the configuration of the optical displacement sensor according to the seventh embodiment. The same members as the members of the sixth embodiment are designated by the same reference numerals, and detailed description thereof will be omitted here.

【００５５】本実施形態では、図１１に示すように、外
部反射手段２２はハーフミラーであり、受光素子アレイ
８１は外部反射手段２２に対して垂直共振器型面発光レ
ーザ２１の反対側に配置されており、外部反射手段２２
を透過した光を受光する。変位の方向と量は第六の実施
の形態と同じ手法により求められる。In this embodiment, as shown in FIG. 11, the external reflection means 22 is a half mirror, and the light receiving element array 81 is arranged on the opposite side of the vertical cavity surface emitting laser 21 with respect to the external reflection means 22. And the external reflection means 22
The light that has passed through is received. The direction and amount of displacement can be obtained by the same method as in the sixth embodiment.

【００５６】本実施形態は、第六の実施の形態の効果の
他に、以下に述べる特有の効果を有する。本実施の形態
の光学式変位センサは、複合共振器の光路中に受光素子
アレイが存在しないので、受光素子アレイの縁辺での光
の回折により発生する迷光による測定への悪影響が回避
される。また、外部反射手段２２に電気配線を設ける必
要がないため、第三の実施の形態と同様に、電気配線に
よる外部反射手段２２の移動に対する物理的な妨害等が
生じることはなく、正確な変位測定が行なえる。The present embodiment has the following unique effects in addition to the effects of the sixth embodiment. In the optical displacement sensor according to the present embodiment, since the light receiving element array does not exist in the optical path of the composite resonator, adverse effects on measurement due to stray light generated by diffraction of light at the edge of the light receiving element array are avoided. Further, since it is not necessary to provide electric wiring to the external reflection means 22, there is no physical obstruction to the movement of the external reflection means 22 due to the electric wiring, as in the third embodiment, and accurate displacement is achieved. You can measure.

【００５７】〔第八の実施の形態（図１２に対応）〕第
八の実施の形態の光学式変位センサの構成を図１２に示
す。第七の実施の形態の部材と同等の部材は同一の符号
で示し、その詳しい説明はここでは省略する。[Eighth Embodiment (corresponding to FIG. 12)] FIG. 12 shows the configuration of the optical displacement sensor of the eighth embodiment. The same members as the members of the seventh embodiment are designated by the same reference numerals, and detailed description thereof will be omitted here.

【００５８】本実施形態では、図１２に示すように、外
部反射手段２２は基板２２ａとハーフミラー層２２ｂと
からなっている。また、基板２２ａには第四の実施の形
態と同様の手法により受光素子アレイ８１が形成されて
いる。変位の方向と量は第六の実施の形態と同じ手法に
より求められる。In this embodiment, as shown in FIG. 12, the external reflection means 22 comprises a substrate 22a and a half mirror layer 22b. Further, the light receiving element array 81 is formed on the substrate 22a by the same method as that of the fourth embodiment. The direction and amount of displacement can be obtained by the same method as in the sixth embodiment.

【００５９】本実施形態は、第七の実施の形態の効果の
他に、次に述べる特有の効果を有する。外部反射手段２
２と受光素子アレイ８１が一体的に作製されるので、部
品数が少なくなり、組立が容易になる。The present embodiment has the following unique effects in addition to the effects of the seventh embodiment. External reflection means 2
Since the light receiving element array 81 and the light receiving element array 81 are integrally formed, the number of parts is reduced and the assembly is facilitated.

【００６０】〔第九の実施の形態（図１３に対応）〕第
九の実施の形態の光学式変位センサの構成を図１３に示
す。第六の実施の形態の部材と同等の部材は同一の符号
で示し、その詳しい説明はここでは省略する。[Ninth Embodiment (corresponding to FIG. 13)] FIG. 13 shows the configuration of an optical displacement sensor according to the ninth embodiment. The same members as the members of the sixth embodiment are designated by the same reference numerals, and detailed description thereof will be omitted here.

【００６１】本実施形態では、図１３に示すように、垂
直共振器型面発光レーザ２１と同一基板に受光素子アレ
イ８１が形成されている。受光素子アレイ８１は、垂直
共振器型面発光レーザ２１の基板に容易に製作できるフ
ォトダイオードアレイが適している。このような受光素
子アレイは半導体製造プロセスによって製作可能であ
る。In this embodiment, as shown in FIG. 13, a light receiving element array 81 is formed on the same substrate as the vertical cavity surface emitting laser 21. The light receiving element array 81 is preferably a photodiode array that can be easily manufactured on the substrate of the vertical cavity surface emitting laser 21. Such a light receiving element array can be manufactured by a semiconductor manufacturing process.

【００６２】本実施形態は、次のような特有の効果を奏
する。垂直共振器型面発光レーザ２１と受光素子アレイ
８１を同一基板上に形成することにより、部品数が少な
くなり、組立工程が簡略化され、製造コストが低減され
る。This embodiment has the following unique effects. By forming the vertical cavity surface emitting laser 21 and the light receiving element array 81 on the same substrate, the number of parts is reduced, the assembly process is simplified, and the manufacturing cost is reduced.

【００６３】〔第十の実施の形態（図１４に対応）〕第
十の実施の形態の光学式変位センサの構成を図１４に示
す。第六の実施の形態の部材と同等の部材は同一の符号
で示し、その詳しい説明はここでは省略する。[Tenth Embodiment (corresponding to FIG. 14)] FIG. 14 shows the configuration of the optical displacement sensor of the tenth embodiment. The same members as the members of the sixth embodiment are designated by the same reference numerals, and detailed description thereof will be omitted here.

【００６４】本実施形態の光学式変位センサは、図１４
に示すように、垂直共振器型面発光レーザ２１の裏面放
射光４１を受光する変位量検出用受光手段１０１と、受
光素子アレイ８１と受光手段１０１の出力信号から垂直
共振器型面発光レーザ２１と外部反射手段２２との間の
相対的な変位を検知する変位検出手段１０２を有してい
る。変位量検出用受光手段１０１には例えばＰＩＮ型フ
ォトダイオード（Ｐ型半導体とＮ型半導体の間に高抵抗
層を形成したフォトダイオード）等の高速応答型の受光
素子が適している。The optical displacement sensor of this embodiment is shown in FIG.
As shown in FIG. 3, the vertical cavity surface emitting laser 21 is detected from the displacement detecting light receiving means 101 for receiving the backside emission light 41 of the vertical cavity surface emitting laser 21, the light receiving element array 81 and the output signal of the light receiving means 101. It has a displacement detection means 102 for detecting a relative displacement between the external reflection means 22 and the external reflection means 22. A fast response type light receiving element such as a PIN type photodiode (a photodiode in which a high resistance layer is formed between a P type semiconductor and an N type semiconductor) is suitable for the displacement amount detecting light receiving means 101.

【００６５】変位検出手段１０２は、変位速度が所定速
度以上のときは、受光手段１０１の出力する周期的な信
号から変位量を検知するが、変位方向は一定であるの
で、変位方向の検知は行わない。反対に、変位速度が所
定速度以下のときは、変位検出手段１０２は、受光手段
１０１の出力する周期的な信号から変位量を検知すると
共に、変位方向が変わる可能性があるので、第六の実施
の形態と同じ手法により受光素子アレイ８１の出力信号
から変位方向を検知する。ここで述べた変位速度は受光
手段１０１の出力信号から検知される変位量を時間微分
することで容易に得られる。When the displacement speed is equal to or higher than a predetermined speed, the displacement detecting means 102 detects the displacement amount from the periodic signal output from the light receiving means 101, but since the displacement direction is constant, the displacement direction cannot be detected. Not performed. On the other hand, when the displacement speed is equal to or lower than the predetermined speed, the displacement detection unit 102 detects the displacement amount from the periodic signal output from the light receiving unit 101 and the displacement direction may change. The displacement direction is detected from the output signal of the light receiving element array 81 by the same method as in the embodiment. The displacement velocity described here can be easily obtained by time-differentiating the displacement amount detected from the output signal of the light receiving unit 101.

【００６６】変位方向が反転する際およびその前後の時
刻では必然的に変位速度は０（ゼロ）および０（ゼロ）
近傍（すなわち比較的低速）になるので、変位検出手段
１０２は変位方向を正しく検出できる。これにより、受
光素子アレイ８１の動作速度を上回る高速な変位や、変
位検出手段１０２が変位方向検知に要する信号処理速度
を上回る高速な変位に対しても変位検知可能な、高速で
動作する光学式変位センサを提供できる。本実施形態に
おいて変位方向の反転が繰り返された場合にも正確な測
定が行われるのは言うまでもない。At the time when the displacement direction is reversed and before and after the time, the displacement speed is inevitably 0 (zero) and 0 (zero).
The displacement detection means 102 can detect the displacement direction correctly because it is in the vicinity (that is, relatively low speed). As a result, a high-speed optical system capable of detecting displacement even at high-speed displacement exceeding the operating speed of the light-receiving element array 81 and at high-speed displacement exceeding the signal processing speed required by the displacement detecting means 102 for detecting the displacement direction. A displacement sensor can be provided. Needless to say, accurate measurement is performed even when the inversion of the displacement direction is repeated in the present embodiment.

【００６７】本発明は、上述の実施の形態に何等限定さ
れるものではない。発明の要旨を逸脱しない範囲で行な
われる実施は、すべて本発明に含まれる。本発明は以下
の各項に記した技術思想を含んでいる。The present invention is not limited to the above embodiment. The present invention includes all implementations performed without departing from the gist of the invention. The present invention includes the technical ideas described in the following sections.

【００６８】１．［構成］上部反射手段と下部反射手段
からなる垂直共振器を有する垂直共振器型面発光レーザ
と、この垂直共振器型面発光レーザと組み合わさって複
合共振器を構成する外部反射手段と、第一の受光手段
と、前記第一の受光手段の出力信号に対して所定の位相
差を有する出力信号を出力する第二の受光手段とを有
し、前記第一及び第二の受光手段からそれぞれ出力され
る周期的な出力信号から前記垂直共振器型面発光レーザ
と前記外部反射手段との間の相対的な変位を検出する変
位検出手段を備えていることを特徴とする光学式変位セ
ンサ。1. [Structure] A vertical cavity surface emitting laser having a vertical resonator composed of an upper reflecting means and a lower reflecting means, an external reflecting means which is combined with the vertical cavity surface emitting laser to form a compound resonator, One light receiving means and a second light receiving means for outputting an output signal having a predetermined phase difference with respect to the output signal of the first light receiving means, and each of the first and second light receiving means. An optical displacement sensor, comprising: displacement detecting means for detecting relative displacement between the vertical cavity surface emitting laser and the external reflecting means from a periodic output signal outputted.

【００６９】［対応する実施の形態］第一、第二、第
三、第四、第五の実施の形態が対応する。なお、「複合
共振器」とは、上部反射手段と下部反射手段からなる光
学共振器と、外部反射手段と下部反射手段及び上部反射
手段からなる光学共振器が組み合わされた形態の光学系
を意味する。[Corresponding Embodiment] The first, second, third, fourth and fifth embodiments correspond. The "composite resonator" means an optical system in which an optical resonator including an upper reflecting means and a lower reflecting means and an optical resonator including an external reflecting means, a lower reflecting means and an upper reflecting means are combined. To do.

【００７０】［作用］第一及び第二の受光手段によって
垂直共振器型面発光レーザと外部反射手段との間の相対
的な変位に応じた周期的かつ相互に所定の位相差を有す
る二つの出力信号を検出し、それらの信号から変位検出
手段によって相対的な変位を検出する。[Operation] The two first and second light receiving means periodically and mutually have a predetermined phase difference according to the relative displacement between the vertical cavity surface emitting laser and the external reflection means. The output signals are detected, and the relative displacement is detected from the signals by the displacement detection means.

【００７１】［効果］周期的かつ相互に所定の位相差を
有する二つの出力信号から変位を検出するので、高精度
で安定した測定の可能な光学式変位センサを提供でき
る。 ２．［構成］第１項の光学式変位センサにおいて、前記
変位検出手段が変位方向の検出を行うことを特徴とする
光学式変位センサ。[Effect] Since the displacement is detected from two output signals which have a predetermined phase difference with each other periodically, it is possible to provide an optical displacement sensor capable of highly accurate and stable measurement. 2. [Structure] The optical displacement sensor according to the first item, wherein the displacement detecting means detects a displacement direction.

【００７２】［対応する実施の形態］第一、第二、第
三、第四、第五の実施の形態が対応する。「変位方向の
検出」とは、垂直共振器型面発光レーザと外部反射手段
との距離が増加しているのか減少しているのかを検出す
ることを意味する。[Corresponding Embodiment] The first, second, third, fourth and fifth embodiments correspond. "Detection of displacement direction" means to detect whether the distance between the vertical cavity surface emitting laser and the external reflection means is increasing or decreasing.

【００７３】［作用効果］第一及び第二の受光手段によ
って位置変化量の増減に応じて相互の位相関係の変化す
る周期的信号を検出し、変位検出手段によってそれらの
周期的な信号の位相関係から相対的な変位方向を検出す
るので、変位方向が反転した場合にも正確な変位量を測
定できる。[Effect] The first and second light receiving means detect the periodic signals whose mutual phase relationship changes in accordance with the increase or decrease of the position change amount, and the displacement detecting means detects the phase of these periodic signals. Since the relative displacement direction is detected from the relationship, the accurate displacement amount can be measured even when the displacement direction is reversed.

【００７４】３．［構成］第１項、第２項記載の光学式
変位センサにおいて、前記第一の受光手段及び第二の受
光手段の二つの受光手段の内、一方の受光手段を前記垂
直共振器型面発光レーザの光軸上に配置し、他方の受光
手段を前記垂直共振器型面発光レーザと外部反射手段の
間の多重反射により生じる干渉縞の一部を検出するよう
に前記垂直共振器型面発光レーザの光軸外に配置したこ
とを特徴とする光学式変位センサ。3. [Structure] In the optical displacement sensor according to the first or second aspect, one of the two light receiving means, the first light receiving means and the second light receiving means, has one of the light receiving means as the vertical cavity surface emitting light. The vertical cavity surface emitting device is arranged on the optical axis of the laser, and the other light receiving means is used to detect a part of interference fringes caused by multiple reflection between the vertical cavity surface emitting laser and the external reflecting means. An optical displacement sensor, which is arranged outside the optical axis of the laser.

【００７５】［対応する実施の形態］第一、第二、第
三、第四の実施の形態が対応する。 ［作用効果］第一の受光手段は、垂直共振器型面発光レ
ーザの光軸上に配置されるので、レーザ光の強度分布の
最大ピーク周辺の光を受光し、強度の大きな、すなわち
振幅の大きな信号を出力する。従って、電磁ノイズ等の
外乱に対して耐性の高い光学式変位センサが得られる。[Corresponding Embodiment] The first, second, third, and fourth embodiments correspond. [Operation and Effect] Since the first light receiving means is arranged on the optical axis of the vertical cavity surface emitting laser, it receives light around the maximum peak of the intensity distribution of the laser light, and has a high intensity, that is, an amplitude. Output a large signal. Therefore, it is possible to obtain an optical displacement sensor having high resistance to disturbance such as electromagnetic noise.

【００７６】４．［構成］第３項の光学式変位センサに
おいて、前記垂直共振器型面発光レーザが両面出射型の
垂直共振器型面発光レーザであり、前記第一の受光手段
が前記垂直共振器型面発光レーザに対して前記外部反射
手段と反対側に配置されていることを特徴とする光学式
変位センサ。4. [Configuration] In the optical displacement sensor according to the third aspect, the vertical cavity surface emitting laser is a dual emission vertical cavity surface emitting laser, and the first light receiving means is the vertical cavity surface emitting laser. An optical displacement sensor, which is arranged on the opposite side of the laser from the external reflection means.

【００７７】［対応する実施の形態］第二、第三、第四
の実施の形態が対応する。 ［作用効果］少なくとも一つの受光手段が複合共振器の
外に配置されるため、複合共振器中の光量損失が減少
し、強度の大きな変位出力信号が得られる。そのため、
電磁ノイズ等の外乱に対して耐性の高い光学式変位セン
サが提供できる。また、少なくとも一つの受光手段が複
合共振器の外に配置されることにより、複合共振器中に
受光手段を配置した場合に生じる回折光等の有害な迷光
が軽減もしくは排除される。[Corresponding Embodiment] The second, third, and fourth embodiments correspond. [Operation and Effect] Since at least one light receiving means is arranged outside the composite resonator, the light quantity loss in the composite resonator is reduced, and a displacement output signal having a large intensity can be obtained. for that reason,
It is possible to provide an optical displacement sensor having high resistance to disturbance such as electromagnetic noise. Further, by disposing at least one light receiving means outside the composite resonator, harmful stray light such as diffracted light generated when the light receiving means is arranged in the composite resonator is reduced or eliminated.

【００７８】５．［構成］第１項、第２項の光学式変位
センサにおいて、前記第一の受光手段が前記垂直共振器
型面発光レーザと前記外部反射手段との間の多重反射に
より生じる干渉縞の第一の部分を受光する垂直共振器型
面発光レーザであり、前記第二の受光手段が前記干渉縞
の前記第一の部分と異なる第二の部分を受光する受光手
段であることを特徴とする光学式変位センサ。5. [Structure] In the optical displacement sensor according to the first or second aspect, the first light receiving means has first interference fringes generated by multiple reflection between the vertical cavity surface emitting laser and the external reflecting means. Is a vertical-cavity surface-emitting laser that receives light from the first portion, and the second light receiving means is light receiving means that receives a second portion different from the first portion of the interference fringes. Displacement sensor.

【００７９】［対応する実施の形態］第一、第五の実施
の形態が対応する。 ［作用効果］干渉縞上の第一及び第二の受光手段が受光
する部分を適宜選択することによって垂直共振器型面発
光レーザと外部反射手段との間の相対的な位置の変化の
方向に応じて相互の位相関係の変化する周期的信号を検
出することができる。変位検出手段によってそれらの周
期的な信号の位相関係から相対的な変位方向を検出する
ので、変位方向が反転した場合にも正確な変位量を測定
することの可能な光学式変位センサが得られる。[Corresponding Embodiment] The first and fifth embodiments correspond. [Effect] By appropriately selecting the portions of the interference fringes to be received by the first and second light receiving means, the relative position between the vertical cavity surface emitting laser and the external reflection means can be changed. Accordingly, it is possible to detect a periodic signal whose mutual phase relationship changes. Since the displacement detecting means detects the relative displacement direction from the phase relationship of those periodic signals, it is possible to obtain an optical displacement sensor capable of accurately measuring the displacement amount even when the displacement direction is reversed. .

【００８０】６．［構成］第１項、第２項、第３項、第
４項、第５項の光学式変位センサにおいて、前記所定の
位相差がθ≠ｎπ（θは位相差、ｎは整数）であること
を特徴する光学式変位センサ。6. [Configuration] In the optical displacement sensor of the first, second, third, fourth, and fifth terms, the predetermined phase difference is θ ≠ nπ (θ is a phase difference, n is an integer). An optical displacement sensor characterized in that

【００８１】［対応する実施の形態］第一、第二、第
三、第四、第五の実施の形態が対応する。 ［作用効果］第一及び第二の受光手段が出力する信号の
位相差をθ≠ｎπ（θは位相差、ｎは整数）とすること
で、相互の位相関係による変位方向検出が可能となり、
変位方向が反転した場合にも正確な変位量を測定でき
る。[Corresponding Embodiment] The first, second, third, fourth, and fifth embodiments correspond. [Operation and Effect] By setting the phase difference between the signals output from the first and second light receiving means as θ ≠ nπ (θ is a phase difference, n is an integer), the displacement direction can be detected by the mutual phase relationship.
An accurate amount of displacement can be measured even when the displacement direction is reversed.

【００８２】７．［構成］第１項、第２項、第３項、第
５項、第６項の光学式変位センサにおいて、第一及び第
二の受光手段が一体に形成された受光素子アレイを有す
ることを特徴とする光学式変位センサ。7. [Structure] In the optical displacement sensor according to the first, second, third, fifth and sixth terms, the first and second light receiving means have a light receiving element array integrally formed. A characteristic optical displacement sensor.

【００８３】［対応する実施の形態］第一、第五の実施
の形態が対応する。 ［作用効果］第一及び第二の受光手段が一体に形成され
た受光素子アレイを有する構成とすることによって、セ
ンサの部品数が削減され、調整が容易で極めて簡単な構
成の光学式変位センサが提供できる。[Corresponding Embodiment] The first and fifth embodiments correspond. [Effects] By providing the light receiving element array in which the first and second light receiving means are integrally formed, the number of sensor parts is reduced, and the optical displacement sensor is easy to adjust and has a very simple structure. Can be provided.

【００８４】８．［構成］第１項、第２項、第３項、第
４項、第５項、第６項、第７項の光学式変位センサにお
いて、前記外部反射手段は光の一部を透過するハーフミ
ラーであり、前記第一及び第二の受光手段の少なくとも
ひとつの受光手段が前記ハーフミラーに対して前記垂直
共振器型面発光レーザと反射側に配置されていることを
特徴とする光学式変位センサ。8. [Configuration] In the optical displacement sensor according to the first, second, third, fourth, fifth, sixth, and seventh terms, the external reflection means is a half that transmits a part of light. An optical displacement, which is a mirror, wherein at least one light receiving means of the first and second light receiving means is arranged on the vertical cavity surface emitting laser and the reflection side with respect to the half mirror. Sensor.

【００８５】［対応する実施の形態］第三、第四の実施
の形態が対応する。 ［作用効果］少なくとも一つの受光手段が複合共振器の
外に配置されることにより、複合共振器中に受光手段を
配置した場合に生じる回折光等の有害な迷光が軽減もし
くは排除される。[Corresponding Embodiment] The third and fourth embodiments correspond. [Operation and Effect] By disposing at least one light receiving means outside the composite resonator, harmful stray light such as diffracted light generated when the light receiving means is arranged in the composite resonator is reduced or eliminated.

【００８６】９．［構成］第８項の光学式変位センサに
おいて、同一基板中の上層に前記ハーフミラーが形成さ
れ、下層に第一及び第二の受光手段の少なくともひとつ
の受光手段が形成されていることを特徴とする光学式変
位センサ。9. [Structure] In the optical displacement sensor according to item 8, the half mirror is formed in an upper layer in the same substrate, and at least one of the first and second light receiving means is formed in a lower layer. Optical displacement sensor.

【００８７】［対応する実施の形態］第四の実施の形態
が対応する。 ［作用効果］ハーフミラーと受光手段が同一基板中に形
成されることにより、センサの部品数が少なくなり、調
整が容易で極めて簡単な構成の光学式変位センサが得ら
れる。[Corresponding Embodiment] The fourth embodiment corresponds to this. [Function and Effect] Since the half mirror and the light receiving means are formed on the same substrate, the number of sensor parts is reduced, and an optical displacement sensor with a simple adjustment and a very simple structure can be obtained.

【００８８】１０．［構成］第１項、第２項、第５項、
第６項、第７項の光学式変位センサにおいて、前記第一
及び第二の受光手段の少なくともひとつの受光手段が前
記垂直共振器面発光レーザと同一基板上に形成されてい
ることを特徴とする光学式変位センサ。10. [Structure] First term, second term, fifth term,
In the optical displacement sensor according to items 6 and 7, at least one of the first and second light receiving means is formed on the same substrate as the vertical cavity surface emitting laser. Optical displacement sensor that does.

【００８９】［対応する実施の形態］第五の実施の形態
が対応する。 ［作用効果］垂直共振器型面発光レーザと受光手段が同
一基板中に形成されていることによって、センサの部品
数が少なくなり、調整が容易で極めて簡単な構成の光学
式変位センサが得られる。[Corresponding Embodiment] The fifth embodiment corresponds to this. [Operation and Effect] Since the vertical cavity surface emitting laser and the light receiving means are formed on the same substrate, the number of sensor parts is reduced, and an optical displacement sensor having an extremely simple structure that can be easily adjusted is obtained. .

【００９０】１１．［構成］上部反射手段と下部反射手
段からなる垂直共振器を有する垂直共振器型面発光レー
ザと、この垂直共振器型面発光レーザと組み合わさって
複合共振器を構成する外部反射手段と、前記垂直共振器
型面発光レーザと前記外部反射手段との間の多重反射に
より生じる干渉縞の明暗の分布を検出する受光素子アレ
イと、前記受光素子アレイから出力された信号から前記
垂直共振器型面発光レーザと前記外部反射手段との間の
相対的な変位を検出する変位検出手段を備えていること
を特徴とする光学式変位センサ。(11) [Structure] A vertical cavity surface emitting laser having a vertical cavity composed of an upper reflecting means and a lower reflecting means, an external reflecting means which is combined with the vertical cavity surface emitting laser to form a compound resonator, A light-receiving element array for detecting a light-dark distribution of interference fringes generated by multiple reflection between a vertical-cavity surface-emitting laser and the external reflection means, and the vertical-cavity surface based on a signal output from the light-receiving element array. An optical displacement sensor comprising displacement detecting means for detecting relative displacement between the light emitting laser and the external reflecting means.

【００９１】［対応する実施の形態］第六、第七、第
八、第九の実施の形態が対応する。「受光素子アレイ」
は、実施の形態の中の一次元の受光素子アレイ８１が該
当するが、二次元の受光素子アレイであってもよい。[Corresponding Embodiment] The sixth, seventh, eighth, and ninth embodiments correspond to this. "Photodetector array"
Corresponds to the one-dimensional light receiving element array 81 in the embodiment, but may be a two-dimensional light receiving element array.

【００９２】［作用］受光素子アレイによって垂直共振
器型面発光レーザと前記外部反射手段との間の多重反射
により生じる干渉縞の明暗の分布を検出し、その信号か
ら変位検出手段によって相対的な変位を検出する。[Operation] The light-receiving element array detects the bright and dark distribution of the interference fringes caused by the multiple reflection between the vertical cavity surface emitting laser and the external reflection means, and the displacement detection means detects the relative distribution from the signal. Detect displacement.

【００９３】［効果］干渉縞の明暗の分布を検知して相
対的な変位を検出するので、例えば電源変動による垂直
共振器型面発光レーザの出力変化等の外乱の影響を受け
にくい光学式変位センサが得られる。[Effect] Since the relative displacement is detected by detecting the light and dark distribution of the interference fringes, the optical displacement is less likely to be affected by disturbance such as output change of the vertical cavity surface emitting laser due to power supply fluctuation. A sensor is obtained.

【００９４】１２．［構成］第１１項の光学式変位セン
サにおいて、前記変位検出手段が変位方向の検出を行う
ことを特徴とする光学式変位センサ。 ［対応する実施の形態］第六、第七、第八、第九の実施
の形態が対応する。12. [Configuration] The optical displacement sensor according to the eleventh item, wherein the displacement detecting means detects the displacement direction. [Corresponding Embodiment] The sixth, seventh, eighth, and ninth embodiments correspond.

【００９５】［作用効果］変位検出手段が干渉縞の明暗
の分布から相対的な変位方向を検出するので、変位方向
が反転した場合にも正確な変位を測定できる。 １３．［構成］第１２項の光学式変位センサにおいて、
前記垂直共振器型面発光レーザと前記外部反射手段との
間の相対的な変位によって生じる周期的な光出力の変化
を検出する変位量検出用受光手段を備え、前記変位検出
手段が前記受光素子アレイによって出力される信号から
変位方向の検出を行うとともに、前記変位検出手段が前
記変位量検出用受光手段によって検出された周期的な光
出力の変化によって変位量を検出することを特徴とする
光学式変位センサ。[Operation and effect] Since the displacement detecting means detects the relative displacement direction from the distribution of light and shade of the interference fringes, the accurate displacement can be measured even when the displacement direction is reversed. 13. [Configuration] In the optical displacement sensor according to the twelfth item,
Displacement amount detecting light receiving means for detecting a periodic change in optical output caused by relative displacement between the vertical cavity surface emitting laser and the external reflecting means, the displacement detecting means being the light receiving element. An optical system characterized in that the displacement direction is detected from a signal output by the array, and the displacement detecting means detects the displacement amount based on the periodical change in the optical output detected by the displacement amount detecting light receiving means. Displacement sensor.

【００９６】［対応する実施の形態］第十の実施の形態
が対応する。変位量検出用受光手段には垂直共振器型面
発光レーザ２１の裏面放射光４１を受光する受光手段１
０１が対応するが、これに限らず、例えば受光素子アレ
イ８１と一体に形成されたものであってもよい。[Corresponding Embodiment] The tenth embodiment corresponds. The light receiving means for detecting the displacement amount is a light receiving means 1 for receiving the backside emission light 41 of the vertical cavity surface emitting laser 21.
01 corresponds, but is not limited to this, and may be formed integrally with the light receiving element array 81, for example.

【００９７】［作用効果］垂直共振器型面発光レーザと
外部反射手段との間の距離が一様に増加もしくは減少す
る際には、変位量検出用受光手段から出力される周期的
な出力信号から相対的な変位量を検出するので、受光素
子アレイから変位検出手段に信号を転送する速度や変位
検出手段が干渉縞の明暗の分布から相対的な変位量を検
出する信号処理速度に制限されることなく、高速な変位
量検出が可能になる。一方、垂直共振器型面発光レーザ
と外部反射手段との間の変位方向が反転する際およびそ
の前後の時刻では必然的に変位速度は０（ゼロ）および
０（ゼロ）近傍（すなわち比較的低速）になるので、第
１２項と同様に変位検出手段が干渉の明暗の分布から相
対的な変位方向を検出する。よって、変位方向が反転し
た場合にも正確な変位を測定できる。したがって、第１
２項の構成で得られる効果に加えて、高速時にも正確な
変位検出が可能になるという特有の効果を有する。[Operation and Effect] When the distance between the vertical cavity surface emitting laser and the external reflection means uniformly increases or decreases, a periodic output signal outputted from the displacement detecting light receiving means. Since the relative displacement amount is detected from the light receiving element array, the signal transfer speed from the light receiving element array to the displacement detecting device and the signal processing speed at which the displacement detecting device detects the relative displacement amount from the light and dark distribution of the interference fringes are limited. It becomes possible to detect the displacement amount at high speed. On the other hand, when the displacement direction between the vertical cavity surface emitting laser and the external reflection means is inverted and before and after the time, the displacement speed is necessarily 0 (zero) and near 0 (zero) (that is, a relatively low speed). ), The displacement detecting means detects the relative displacement direction from the light-dark distribution of interference as in the 12th term. Therefore, accurate displacement can be measured even when the displacement direction is reversed. Therefore, the first
In addition to the effect obtained by the configuration of item 2, there is a unique effect that accurate displacement detection is possible even at high speed.

【００９８】１４．［構成］第１３項の光学式変位セン
サにおいて、前記変位量検出用受光手段が高速応答受光
素子であることを特徴とする光学式変位センサ。 ［対応する実施の形態］第十の実施の形態が対応する。14. [Structure] The optical displacement sensor according to the item 13, wherein the light receiving means for detecting the displacement amount is a high-speed response light receiving element. [Corresponding Embodiment] The tenth embodiment corresponds.

【００９９】［作用効果］変位量検出用受光手段が高速
応答受光素子であることにより、高速な変位に対しても
正確な出力信号が得られるので、高速な変位の測定に好
適な光学式変位センサが得られる。[Operation and effect] Since the light receiving means for detecting the displacement amount is a high-speed response light receiving element, an accurate output signal can be obtained even for a high-speed displacement, so that an optical displacement suitable for high-speed displacement measurement A sensor is obtained.

【０１００】１５．［構成］第１１項、第１２項、第１
３項の光学式変位センサにおいて、前記外部反射手段は
光の一部を透過するハーフミラーであり、前記受光素子
アレイが前記ハーフミラーに対して前記垂直共振器型面
発光レーザと反対側に配置されていることを特徴とする
光学式変位センサ。15. [Structure] Item 11, Item 12, First
In the optical displacement sensor according to the item 3, the external reflection means is a half mirror that transmits a part of light, and the light receiving element array is arranged on the opposite side of the half mirror from the vertical cavity surface emitting laser. An optical displacement sensor characterized in that

【０１０１】［対応する実施の形態］第七、第八の実施
の形態が対応する。 ［作用効果］複合共振器の外に受光素子アレイが配置さ
れることにより、複合共振器中に受光素子アレイを配置
した場合に生じる回折光等の有害な迷光が排除される。[Corresponding Embodiment] The seventh and eighth embodiments correspond. [Operation and Effect] By disposing the light receiving element array outside the composite resonator, harmful stray light such as diffracted light generated when the light receiving element array is arranged in the composite resonator is eliminated.

【０１０２】１６．［構成］第１５項の光学式変位セン
サにおいて、同一基板中の上層に前記ハーフミラーが形
成され、下層に前記受光素子アレイが形成されているこ
とを特徴とする光学式変位センサ。16. [Structure] The optical displacement sensor according to the item 15, wherein the half mirror is formed in an upper layer and the light receiving element array is formed in a lower layer in the same substrate.

【０１０３】［対応する実施の形態］第八の実施の形態
が対応する。 ［作用効果］ハーフミラーと受光素子アレイが同一基板
中に形成されていることにより、センサの部品数が少な
くなり、調整が容易で極めて簡単な構成の光学式変位セ
ンサが得られる。[Corresponding Embodiment] The eighth embodiment corresponds to the present invention. [Operation and Effect] Since the half mirror and the light receiving element array are formed on the same substrate, the number of sensor parts is reduced, and an optical displacement sensor having a very simple structure that can be easily adjusted is obtained.

【０１０４】１７．［構成］第１１項、第１２項、第１
３項の光学式変位センサにおいて、前記受光素子アレイ
が前記垂直共振器型面発光レーザと同一基板上に形成さ
れていることを特徴とする光学式変位センサ。17. [Structure] Item 11, Item 12, First
3. The optical displacement sensor according to item 3, wherein the light receiving element array is formed on the same substrate as the vertical cavity surface emitting laser.

【０１０５】［対応する実施の形態］第九の実施の形態
が対応する。 ［作用効果］垂直共振器型面発光レーザと受光素子アレ
イが同一基板中に形成されていることにより、センサの
部品数が少なくなり、調整が容易で極めて簡単な構成の
光学式変位センサが得られる。[Corresponding Embodiment] The ninth embodiment corresponds to this. [Operation and effect] Since the vertical cavity surface emitting laser and the light receiving element array are formed on the same substrate, the number of sensor parts is reduced, and an optical displacement sensor with an easy adjustment and an extremely simple structure is obtained. To be

【０１０６】[0106]

【発明の効果】本発明によれば、対象物の変位の方向と
量を常に正確に測定できる、極めて簡単な構成で高精度
な変位測定が可能なコンパクトな光学式変位センサを提
供することができる。According to the present invention, it is possible to provide a compact optical displacement sensor which can always accurately measure the direction and amount of displacement of an object and which enables highly accurate displacement measurement with an extremely simple structure. it can.

【図面の簡単な説明】[Brief description of drawings]

【図１】本発明の第一の実施の形態の光学式変位センサ
の構成を示す。FIG. 1 shows a configuration of an optical displacement sensor according to a first embodiment of the present invention.

【図２】実験により観察した干渉縞とその移動の様子を
示す模式図であり、干渉縞の一断面の光強度分布（Ａ）
と干渉縞の形状（Ｂ）を示す。FIG. 2 is a schematic diagram showing interference fringes observed in an experiment and a state of movement thereof, and a light intensity distribution (A) in one cross section of the interference fringes.
And the shape (B) of the interference fringes.

【図３】図２は、Ｘ＝Ｘ0 に配置された第一の受光手段
の出力信号とＸ＝Ｘ1 の位置に配置された第二の受光手
段の出力信号を示し、同図（Ａ）は距離Ｌが減少すると
き、同図（Ｂ）は距離Ｌが増加するときを示す。FIG. 2 shows an output signal of a first light receiving means arranged at X = X 0 and an output signal of a second light receiving means arranged at a position of X = X 1 , and FIG. ) Shows the case where the distance L decreases, and FIG. 13B shows the case where the distance L increases.

【図４】図１の光学式変位センサの変位検出手段の具体
例を説明するための図である。FIG. 4 is a diagram for explaining a specific example of displacement detecting means of the optical displacement sensor of FIG.

【図５】本発明の第二の実施の形態の光学式変位センサ
の構成を示す。FIG. 5 shows a configuration of an optical displacement sensor according to a second embodiment of the present invention.

【図６】本発明の第三の実施の形態の光学式変位センサ
の構成を示す。FIG. 6 shows a configuration of an optical displacement sensor according to a third embodiment of the present invention.

【図７】本発明の第四の実施の形態の光学式変位センサ
の構成を示す。FIG. 7 shows a configuration of an optical displacement sensor according to a fourth embodiment of the present invention.

【図８】本発明の第五の実施の形態の光学式変位センサ
の構成を示す。FIG. 8 shows a configuration of an optical displacement sensor according to a fifth embodiment of the present invention.

【図９】本発明の第六の実施の形態の光学式変位センサ
の構成を示す。FIG. 9 shows a configuration of an optical displacement sensor according to a sixth embodiment of the present invention.

【図１０】図９の光学式変位センサの変位検出手段の具
体例を説明するための図である。10 is a diagram for explaining a specific example of displacement detecting means of the optical displacement sensor of FIG.

【図１１】本発明の第七の実施の形態の光学式変位セン
サの構成を示す。FIG. 11 shows a configuration of an optical displacement sensor according to a seventh embodiment of the present invention.

【図１２】本発明の第八の実施の形態の光学式変位セン
サの構成を示す。FIG. 12 shows a configuration of an optical displacement sensor according to an eighth embodiment of the present invention.

【図１３】本発明の第九の実施の形態の光学式変位セン
サの構成を示す。FIG. 13 shows a configuration of an optical displacement sensor according to a ninth embodiment of the present invention.

【図１４】本発明の第十の実施の形態の光学式変位セン
サの構成を示す。FIG. 14 shows a configuration of an optical displacement sensor according to a tenth embodiment of the present invention.

【図１５】特開平７−５５４２３号に開示されている光
学式変位センサを示す。FIG. 15 shows an optical displacement sensor disclosed in Japanese Patent Laid-Open No. 7-55423.

【符号の説明】[Explanation of symbols]

２１ 垂直共振器型面発光レーザ ２２ 外部反射手段 ２３ａ，２３ｂ 受光手段 ２８ 変位検出手段 21 Vertical Cavity Surface Emitting Laser 22 External Reflecting Means 23a, 23b Light Receiving Means 28 Displacement Detecting Means

Claims (3)

【特許請求の範囲】[Claims] 【請求項１】上部反射手段と下部反射手段からなる垂直
共振器を有する垂直共振器型面発光レーザと、この垂直
共振器型面発光レーザと組み合わさって複合共振器を構
成する外部反射手段と、第一の受光手段と、第一の受光
手段の出力信号に対して所定の位相差を持つ信号を出力
する第二の受光手段と、第一の受光手段と第二の受光手
段から出力される周期的な出力信号から垂直共振器型面
発光レーザと外部反射手段の間の相対的な変位を検出す
る変位検出手段とを備えている光学式変位センサ。1. A vertical cavity surface emitting laser having a vertical cavity composed of an upper reflecting means and a lower reflecting means, and an external reflecting means which is combined with the vertical cavity surface emitting laser to form a compound resonator. , The first light receiving means, the second light receiving means which outputs a signal having a predetermined phase difference with respect to the output signal of the first light receiving means, and the first light receiving means and the second light receiving means. An optical displacement sensor having a displacement detecting means for detecting a relative displacement between the vertical cavity surface emitting laser and the external reflecting means from a periodic output signal. 【請求項２】請求項１記載の光学式変位センサにおい
て、前記第一の受光手段及び第二の受光手段の二つの受
光手段の内、一方の受光手段を前記垂直共振器型面発光
レーザの光軸上に配置し、他方の受光手段を前記垂直共
振器型面発光レーザと外部反射手段の間の多重反射によ
り生じる干渉縞の一部を検出するように前記垂直共振器
型面発光レーザの光軸外に配置したことを特徴とする光
学式変位センサ。2. The optical displacement sensor according to claim 1, wherein one of the first light receiving means and the second light receiving means is one of the two light receiving means of the vertical cavity surface emitting laser. The vertical cavity surface emitting laser is arranged on the optical axis and the other light receiving means is arranged to detect a part of interference fringes caused by multiple reflection between the vertical cavity surface emitting laser and the external reflection means. An optical displacement sensor, which is arranged outside the optical axis. 【請求項３】上部反射手段と下部反射手段からなる垂直
共振器を有する垂直共振器型面発光レーザと、垂直共振
器型面発光レーザと組み合わさって複合共振器を構成す
る外部反射手段と、垂直共振器型面発光レーザと外部反
射手段の間の多重反射により生じる干渉縞の明暗の分布
を検出する受光素子アレイと、受光素子アレイから出力
された信号から垂直共振器型面発光レーザと外部反射手
段の間の相対的な変位を検出する変位検出手段とを備え
ている光学式変位センサ。3. A vertical cavity surface emitting laser having a vertical cavity composed of an upper reflecting means and a lower reflecting means, and an external reflecting means which is combined with the vertical cavity surface emitting laser to form a compound resonator. A light-receiving element array for detecting the light-dark distribution of interference fringes caused by multiple reflection between the vertical-cavity surface-emitting laser and the external reflection means, and a vertical-cavity surface-emitting laser from the signal output from the light-receiving element array and the external An optical displacement sensor comprising: a displacement detecting means for detecting relative displacement between the reflecting means.
JP07048796A 1996-03-26 1996-03-26 Optical displacement sensor Expired - Fee Related JP3639377B2 (en)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP07048796A JP3639377B2 (en) 1996-03-26 1996-03-26 Optical displacement sensor

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP07048796A JP3639377B2 (en) 1996-03-26 1996-03-26 Optical displacement sensor

Publications (2)

Publication Number Publication Date
JPH09257421A true JPH09257421A (en) 1997-10-03
JP3639377B2 JP3639377B2 (en) 2005-04-20

Family

ID=13432935

Family Applications (1)

Application Number Title Priority Date Filing Date
JP07048796A Expired - Fee Related JP3639377B2 (en) 1996-03-26 1996-03-26 Optical displacement sensor

Country Status (1)

Country Link
JP (1) JP3639377B2 (en)

Cited By (3)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP2007517194A (en) * 2003-12-05 2007-06-28 アルファ イーエックスエックス エービー measuring device
WO2009001283A3 (en) * 2007-06-27 2009-04-02 Koninkl Philips Electronics Nv Optical sensor module and its manufacture
DE102010018322B3 (en) * 2010-04-27 2011-04-07 Laib, Thorsten, Dr. Laser optical sensor for detecting concentration of substances in e.g. gas in chemical laboratory, has external plate coated with sensitive layer that reacts with analytes so that optical thickness of layer is changed by reaction

Cited By (4)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP2007517194A (en) * 2003-12-05 2007-06-28 アルファ イーエックスエックス エービー measuring device
WO2009001283A3 (en) * 2007-06-27 2009-04-02 Koninkl Philips Electronics Nv Optical sensor module and its manufacture
US8378287B2 (en) 2007-06-27 2013-02-19 Koninklijke Philips Electronics N.V. Optical sensor module including a diode laser and a substrate transparent to radiation emitted by the diode laser and a method for manufacturing an optical sensor module
DE102010018322B3 (en) * 2010-04-27 2011-04-07 Laib, Thorsten, Dr. Laser optical sensor for detecting concentration of substances in e.g. gas in chemical laboratory, has external plate coated with sensitive layer that reacts with analytes so that optical thickness of layer is changed by reaction

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