JPH09235672A - Production of coated cemented carbide tool - Google Patents
Production of coated cemented carbide toolInfo
- Publication number
- JPH09235672A JPH09235672A JP32340096A JP32340096A JPH09235672A JP H09235672 A JPH09235672 A JP H09235672A JP 32340096 A JP32340096 A JP 32340096A JP 32340096 A JP32340096 A JP 32340096A JP H09235672 A JPH09235672 A JP H09235672A
- Authority
- JP
- Japan
- Prior art keywords
- layer
- vapor deposition
- chemical vapor
- cemented carbide
- group
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Granted
Links
Landscapes
- Cutting Tools, Boring Holders, And Turrets (AREA)
- Chemical Vapour Deposition (AREA)
- Other Surface Treatments For Metallic Materials (AREA)
Abstract
Description
【０００１】[0001]
【産業上の利用分野】本発明は耐摩耗性に優れた切削用
及び耐摩耗用の被覆超硬質合金工具に関するものであ
る。BACKGROUND OF THE INVENTION 1. Field of the Invention The present invention relates to a cutting and wear-resistant coated super-hard alloy tool having excellent wear resistance.
【０００２】[0002]
【従来の技術】従来、超硬合金を基体とし、その表面に
耐摩耗性に富んだＴｉＣ、ＴｉＮなどの硬質皮膜を被覆
した被覆超硬合金工具は、表面の耐摩耗性と基体の強靭
性を兼ね備えており、広く実用に供されている。しか
し、ＴｉＣ、ＴｉＮ被覆の合金はすくい面上のクレータ
ー摩耗が著しく、工具寿命が短くなるなどの欠点があっ
た。このため、上記欠点を除く手段として、種々の皮膜
を形成する方法が提案されているが、いずれも問題点を
有し、かならずしも満足出来るものは実現されていな
い。例えば、 ＴｉＣ、ＴｉＮのかわりにＡｌ2Ｏ3単
層を被覆する方法−特開昭５４−１５８７８０号等、
ＴｉＣ、ＴｉＮのかわりにＴｉＢ2 単層を被覆する方
法−特開昭５４−７４８１６号等、 ＴｉＣ、ＴｉＮ
の表面に更にＡｌ2Ｏ3を被覆し、２層構造の皮膜とする
方法（２層）−特開昭５５−１１９１６５号等、 Ｔ
ｉＢ2の表面にＡｌ2Ｏ3を被覆し、２層構造皮膜を形成
する方法−特開昭５５−８４８５号等、が示されてい
る。2. Description of the Related Art Conventionally, a coated cemented carbide tool in which a cemented carbide is used as a base and its surface is coated with a hard coating such as TiC or TiN which is rich in abrasion resistance is provided by abrasion resistance of the surface and toughness of the base. It is widely used for practical use. However, alloys coated with TiC and TiN have drawbacks such as significant crater wear on the rake face and shortened tool life. For this reason, methods for forming various coatings have been proposed as means for eliminating the above-mentioned drawbacks, but all of them have problems, and none of them has always been satisfactory. For example, a method of coating a single layer of Al 2 O 3 instead of TiC or TiN-Japanese Patent Application Laid-Open No. 54-158780,
TiC, a method for coating a TiB 2 monolayers in place of TiN - JP 54-74816, etc., TiC, TiN
A method of forming a two-layered film by further coating Al 2 O 3 on the surface of the film (two layers)-JP-A-55-119165, T
coated with Al 2 O 3 on the surface of iB 2, a method of forming a two-layer structure film - like 55-8485 JP, are the shown.
【０００３】の方法では、超硬質基体とＴｉＢ2の親
和性が弱いこと、及び被削材の鉄と２硼化物とが反応
し、クレーター摩耗を生じやすいことなどの欠点を有し
ている。 の方法は、超硬質基体とＡｌ2Ｏ3間の親和
性が弱く、基体と皮膜の結合力は十分でないという欠点
を有している。の方法によるＴｉＣ−Ａｌ2Ｏ3被覆さ
れた品物は上記及びに比較し、より好ましい特性を
もつため広く実用に供されているが、Ａｌ2Ｏ3とＴｉＣ
又はＴｉＮ間の親和性が弱く、その結合力は改善の余地
がある。の方法は、上記の方法と同様、密着強度が
不十分であるが、被削材との反応をＡｌ2Ｏ3層によって
防止しているため、耐クレーター性は良好である。[0003] The method described above has disadvantages such as that the affinity between the super-hard substrate and TiB 2 is weak, and that iron and diboride of the work material react with each other and crater wear easily occurs. The method (1) has a drawback that the affinity between the ultra-hard substrate and Al 2 O 3 is weak, and the bonding force between the substrate and the coating is not sufficient. 'S TiC-Al 2 O 3 coated article according to the method as compared to the above and have been subjected to practical use widely for having more preferred properties, Al 2 O 3 and TiC
Alternatively, the affinity between TiN is weak, and its binding force has room for improvement. This method has insufficient adhesion strength as in the above method, but has good crater resistance because the reaction with the work material is prevented by the Al 2 O 3 layer.
【０００４】そのため、上記単層皮膜及び２層構造皮膜
の特長を維持しながら、その欠点を解消するために、例
えばＴｉＣ、ＴｉＮの表面に中間層としてＴｉ（Ｃ、
Ｎ）、Ｔｉ（Ｃ、Ｏ）、Ｔｉ（Ｃ、Ｎ、Ｏ）を被覆し、
その上に外層としてＡｌ2Ｏ3を被覆し３層構造の皮膜を
形成する方法（特開昭５５−１４８７６４号等）が提案
されている。[0004] Therefore, in order to eliminate the drawbacks while maintaining the features of the single-layer coating and the two-layer coating, for example, Ti (C,
N), Ti (C, O), Ti (C, N, O),
A method of forming a three-layered film by coating Al 2 O 3 as an outer layer thereon (Japanese Patent Application Laid-Open No. 55-148768) has been proposed.
【０００５】[0005]
【発明が解決しようとする課題】この方法は上記の方
法の欠点を改善するために、内層のＴｉＣ層と中間層の
被覆方法を変えることにより形成したものであり、その
両者の特徴を最大限に生かそうとするものである。さら
に、切削加工工具に要求されるより一層の長寿命化（耐
摩耗性の向上）を計ったものである。本発明は上記実情
に鑑み成されたものであり上記従来技術の欠点を改良
し、皮膜各層間−特に内層と中間層の粒度に着目し、特
に耐摩耗性に優れる被覆超硬合金を提供することを目的
とするもので有る。This method is formed by changing the coating method of the inner TiC layer and the intermediate layer in order to improve the drawbacks of the above-mentioned method. To make the most of it. Further, the life of the cutting tool is further extended (the wear resistance is improved). SUMMARY OF THE INVENTION The present invention has been made in view of the above circumstances, improves the above-mentioned disadvantages of the prior art, and provides a coated cemented carbide that is particularly excellent in wear resistance, focusing on the particle size of each layer of the coating-particularly the inner layer and the intermediate layer. It is intended for that purpose.
【０００６】[0006]
【課題を解決するための手段】本発明は超硬質合金基体
の表面に、少なくともＴｉＣＮ層を設け、前記ＴｉＣＮ
層が有機ＣＮ化合物を使用した中温化学蒸着法により成
膜され、柱状晶からなり、その直上に粒状から成る層を
２種以上の反応ガスを用いた高温化学蒸着法から成膜し
たことを特徴とする製造法であり、より具体的には、内
層として、まず中温化学蒸着法を用いて、ＴｉＮ、Ｔｉ
ＣＮ等を被覆し、前記ＴｉＣＮ層を柱状に成膜させ、か
つ、直上に高温化学蒸着法から成膜した中間層、すなわ
ち第３層としてＴｉの炭化物、窒化物、炭窒化物の１種
又は２種以上を設け、外層、すなわち第４層としてＡｌ
2Ｏ3層又はＴｉＮ層の１種又は２種以上を設ける。特
に、第３層の粒子は第２層すなわち柱状晶の粒度の影響
により粒度を細かくすることができるため、第２層の厚
膜化と、それより外側の層の粒状化、耐摩耗性を兼ね備
えた構成としたものである。According to the present invention, at least a TiCN layer is formed on the surface of a cemented carbide substrate, and the TiCN layer is formed.
The layer is formed by a medium temperature chemical vapor deposition method using an organic CN compound, is composed of a columnar crystal, and a granular layer is formed directly thereon by a high temperature chemical vapor deposition method using two or more kinds of reaction gases. The manufacturing method is as follows. More specifically, as the inner layer, first, by using a medium temperature chemical vapor deposition method, TiN, Ti
One of Ti carbide, nitride, and carbonitride as a third layer, that is, an intermediate layer that is formed by columnar formation of the TiCN layer by coating with CN or the like, and is formed directly above by a high temperature chemical vapor deposition method, or Two or more types are provided, and Al is used as the outer layer, that is, the fourth layer.
One or more 2 O 3 layers or TiN layers are provided. In particular, the particles of the third layer can be made finer due to the effect of the particle size of the second layer, that is, the columnar crystals, so that the thickening of the second layer and the granulation and abrasion resistance of the outer layer can be achieved. It has a combined structure.
【０００７】本発明における基体としての超硬質合金
は、周期率表の４ａ、５ａ、６ａ族の炭化物、窒化物、
炭窒化物のうちの一種以上と、Ｆｅ、Ｎｉ、Ｃｏ、Ｗ、
Ｍｏ、Ｃｒのうちの一種以上とよりなる超硬質合金が適
用される。また、本発明における各被覆層を形成するこ
とは、既知の成膜法を応用することによって可能であ
り、例えば内層を構成するＴｉＣＮまたはＴｉＮ皮膜に
ついては、 ＴｉＣｌ4＋（ＣＨ3）ＣＮ＋２Ｈ2→ＴｉＣＮ＋ＨＣｌ ＴｉＣｌ4＋２Ｈ2 →Ｔｉ＋４ＨＣｌ ＣＨ4 →Ｃ＋２Ｈ2 Ｔｉ＋Ｃ →ＴｉＣ あるいは、 ＴｉＣｌ4＋２Ｈ2 →Ｔｉ＋４ＨＣｌ Ｔｉ＋１／２Ｎ2 →ＴｉＮ のように、Ｔｉのハロゲン化物を気化し、還元及び炭化
あるいは窒化反応によって得ることができる。[0007] The super-hard alloy as a substrate in the present invention includes carbides, nitrides of groups 4a, 5a and 6a of the periodic table.
One or more of carbonitrides, Fe, Ni, Co, W,
A super-hard alloy consisting of one or more of Mo and Cr is applied. The formation of each coating layer in the present invention is possible by applying a known film forming method. For example, for the TiCN or TiN film constituting the inner layer, TiCl 4 + (CH 3 ) CN + 2H 2 → TiCN + HCl TiCl 4 + 2H 2 → Ti + 4HCH 4 → CH 4 → C + 2H 2 Ti + C → TiC or TiCl 4 + 2H 2 → Ti + 4HCl Ti + 1 / 2N 2 → TiN Vaporization of Ti halide and reduction and carbonization or nitriding to obtain it Can be.
【０００８】次に、内層の厚さを２．０〜１０μｍ、中
間層の厚さを０．１〜５μｍ、外層の厚さを０．５〜１
０μｍとすることが望ましい。その理由は以下の通りで
ある。 （１）内層のＴｉＮ、ＴｉＣＮのうちのいずれか一種か
らなる内層の厚さが２．０μｍ未満では柱状晶の生成が
十分でなく、また１０μｍを超えるとＴｉＣＮ等の層は
本質的に脆く欠損しやすくなるため、内層の厚さは２．
０〜１０μｍとするのが望ましい。Next, the thickness of the inner layer is 2.0 to 10 μm, the thickness of the intermediate layer is 0.1 to 5 μm, and the thickness of the outer layer is 0.5 to 1 μm.
Desirably, it is 0 μm. The reason is as follows. (1) If the thickness of the inner layer made of any one of TiN and TiCN is less than 2.0 μm, columnar crystals are not sufficiently generated, and if it exceeds 10 μm, the layer such as TiCN is essentially brittle and defective. The inner layer has a thickness of 2.
Desirably, the thickness is 0 to 10 μm.
【０００９】（２）中間層のＴｉの炭化物、窒化物、炭
窒化物の１種以上から構成される中間層の厚さが０．１
μｍ未満では粒度を調整するのに不十分であり、また５
μｍを超えると全体の厚さが厚くなり脆く成るため、欠
損しやすくなる。このため中間層の厚さは０．１〜５μ
ｍとするのが望ましい。また、この層の構造はＴｉの炭
化物、窒化物、炭窒化物を組み合わせた方が特性を効果
的に発揮できるため、２層以上とするのが望ましい。 （３）外層のＡｌ2Ｏ3層及び／又はＴｉＮ層は、０．５
μｍ未満では中間層の欠点である被削材との反応を防止
できず、また、５μｍを越えるとＡｌ2Ｏ3層は本質的に
脆いため、欠損しやすくなるため０．５〜５μｍとする
のが良い。(2) The thickness of the intermediate layer composed of at least one of Ti carbide, nitride and carbonitride is 0.1
If it is less than μm, it is insufficient to adjust the particle size.
If it exceeds μm, the entire thickness becomes thick and brittle, so that it is easily broken. Therefore, the thickness of the intermediate layer is 0.1 to 5 μm.
m is desirable. In addition, the structure of this layer is desirably two or more layers because the characteristics can be more effectively exhibited by combining Ti carbide, nitride, and carbonitride. (3) The outer Al 2 O 3 layer and / or TiN layer is 0.5
If the thickness is less than μm, the reaction with the work material, which is a defect of the intermediate layer, cannot be prevented. If the thickness exceeds 5 μm, the Al 2 O 3 layer is inherently brittle and easily breaks. Is good.
【００１０】[0010]
【実施例】次に本発明による被覆超硬質合金を実施例に
よって具体的に説明する。但し、本発明はこれら実施例
の範囲に限定されるものでないことは言うまでもない。
超硬質体の基体としてＷＣ７２％、８％ＴｉＣ、（Ｔａ
Ｎｂ）Ｃ１１％、Ｃｏ９％（重量％）なる組成に粉末を
配合し、真空中１４００℃で一時間焼結し、得られた焼
結体からＧ級のスローアウェィチップを作成した。次い
で以下に示す各成膜条件で被覆処理することにより表１
に示す皮膜構造の試料１〜３を得た。尚、膜厚の測定は
チップを研摩しＳＥＭ（走査型電子顕微鏡）にて、組織
観察を行い測定した。Next, the coated super-hard alloy according to the present invention will be described in detail with reference to examples. However, it goes without saying that the present invention is not limited to the scope of these examples.
WC 72%, 8% TiC, (Ta
Nb) Powder was blended with a composition of 11% C and 9% Co (% by weight), and sintered at 1400 ° C. for 1 hour in a vacuum. Next, coating was performed under each of the film forming conditions described below to obtain the results shown in Table 1.
Samples 1 to 3 having the film structures shown in Table 1 were obtained. The film thickness was measured by polishing the chip and observing the structure with an SEM (scanning electron microscope).
【００１１】（１）試料Ｎｏ１の成膜は、スローアウェ
ィチップを耐熱合金製反応容器内で８００℃に加熱、２
０Ｔｏｒｒの減圧化で、ＴｉＣｌ4 ４％ Ｎ2 ４％
Ｈ2９６％の割合で混合したガスを５ｌ／ｍｉｎの流量
で流し、０．３時間反応させ０．５μｍのＴｉＮ層を被
覆した後、Ｔｉ（ＣＨ3）ＣＮ ４％ Ｎ2 ４％、Ｈ2
９２％の割合で混合したガスを５ｌ／ｍｉｎの流量で
送り、２時間反応させ４μｍのＴｉＣＮ層を被覆し内層
４．５μｍとした。その後、１０Ｔｏｒｒに真空排気
し、１０２０℃に昇温し、ＴｉＣｌ4 ４％ＣＨ4 ４％
Ｈ2 ９２％の割合で混合したガスを２０ｍｉｎ流
し、２μｍのＴｉＣ膜を生成し、中間層とした。次い
で、ＡｌＣｌ3 ５％ ＣＯ2 ５％、ＣＯ １５％ Ｈ
2 ７５％の割合で混合したガスを供給し、温度は１０
２０℃、２時間保持し、１．５μｍのＡｌ2Ｏ3層を被覆
し、最後に、ＴｉＮ膜を０．５μｍ、前記と同様の方法
で成膜し、表面を金色とした。このチップを、曲げ試験
において破断した後、ＳＥＭ（走査型電子顕微鏡）に
て、その破面を観察をした結果を図１に示す。内層部分
は柱状晶がよく発達しているのに対し、中間層は粒状に
成膜されていることが分かり、外層／最外層も中間層の
粒度に近似し、粗粒化していないことが分かる。また、
図２に最外層の表面観察した結果も併せて示す。（写真
の倍率はいずれも５０００倍）(1) The sample No. 1 was formed by heating the throw away chip to 800 ° C. in a heat-resistant alloy reaction container, and
At reduced pressure of 0 Torr, 4% TiCl 4 4% N 2
A gas mixed at a rate of 96% of H 2 was flowed at a flow rate of 5 l / min, reacted for 0.3 hours to coat a 0.5 μm TiN layer, and then Ti (CH 3 ) CN 4% N 2 4% Two
A gas mixed at a rate of 92% was sent at a flow rate of 5 l / min and reacted for 2 hours to coat a 4 μm TiCN layer to form an inner layer of 4.5 μm. Thereafter, the chamber is evacuated to 10 Torr, the temperature is raised to 1020 ° C., and TiCl 4 4% CH 4 4%
A gas mixed at a rate of 92% of H 2 was flowed for 20 minutes to form a 2 μm TiC film, which was used as an intermediate layer. Then, AlCl 3 5% CO 2 5%, CO 15% H
2 A gas mixture of 75% was supplied, and the temperature was 10
The temperature was maintained at 20 ° C. for 2 hours, and a 1.5 μm Al 2 O 3 layer was coated. Finally, a 0.5 μm TiN film was formed by the same method as described above, and the surface was colored gold. FIG. 1 shows the result of observing the fracture surface of this chip by a SEM (scanning electron microscope) after breaking it in a bending test. It can be seen that the columnar crystals are well developed in the inner layer portion, whereas the intermediate layer is formed in a granular form, and the outer layer / outermost layer is similar to the particle size of the intermediate layer and is not coarse-grained. . Also,
FIG. 2 also shows the results of surface observation of the outermost layer. (All photos are 5000x magnification)
【００１２】（２）試料Ｎｏ２の成膜は耐熱合金製反応
容器内で８００℃に加熱し、２０Ｔｏｒｒの減圧化でＴ
ｉＣｌ4 ４％ Ｎ2 ４％ Ｈ2 ９６％の割合で混合
したガスを５ｌ／ｍｉｎの流量で流し、０．５時間反応
させ１．０μｍのＴｉＮ被覆層を得た。その後、試料Ｎ
ｏ１と同様の方法により被覆した。(2) The sample No. 2 film was formed by heating to 800 ° C. in a heat-resistant alloy reaction vessel and reducing the pressure to 20 Torr.
A gas mixed at a rate of iCl 4 4% N 2 4% H 2 96% was flowed at a flow rate of 5 l / min, and reacted for 0.5 hour to obtain a 1.0 μm TiN coating layer. Then, sample N
Coating was carried out in the same manner as in o1.
【００１３】（３）試料Ｎｏ３の成膜は、従来例のひと
つである耐熱合金製反応容器内で１０５０℃に加熱し、
２０Ｔｏｒｒの減圧化でＴｉＣｌ4 ４％ ＣＨ4 ２％
Ｎ2 ３０％、Ｈ2 ６４％の割合で混合したガスを５
ｌ／ｍｉｎの流量で流し、２．５時間反応させ５μｍの
ＴｉＣＮ被覆層を得た。その後、試料Ｎｏ１と同様の方
法によりに被覆した。(3) Sample No. 3 was formed by heating to 1050 ° C. in a heat-resistant alloy reaction vessel, which is one of the conventional examples.
At reduced pressure of 20 Torr, TiCl 4 4% CH 4 2%
A gas mixture of 30% N 2 and 64% H 2
The mixture was allowed to react at a flow rate of 1 / min for 2.5 hours to obtain a TiCN coating layer of 5 μm. Then, it coated by the same method as the sample No1.
【００１４】これら３種のチップを用い以下の切削条
件、すなわち 鋳物連続切削 被削材 ＦＣ２５（ＨＢ２３０） 切削速度 １８０ｍ／ｍｉｎ 送り ０．３ｍｍ／ｒｅｖ 切り込み １．５ｍｍ 水溶性切削油使用 で切削試験を行った。表１に平均逃げ面摩耗量が０．４
ｍｍ、クレーター摩耗が０．１ｍｍのどちらかに達した
時間を寿命と判断し、その時間を示す。Using these three types of chips, the following cutting conditions were used: casting continuous cutting work material FC25 (HB230) cutting speed 180 m / min feed 0.3 mm / rev depth of cut 1.5 mm cutting test using water-soluble cutting oil went. Table 1 shows that the average flank wear was 0.4
and the time when the crater wear reached either 0.1 mm was determined as the life, and the time is indicated.
【００１５】[0015]
【表１】 [Table 1]
【００１６】試料Ｎｏ（３）のスローアウェイチップは
２５分間の切削で寿命に達しているのに対し、本発明に
よる（１）、（２）は表１から明からかなように４０〜
５０分間切削出来ることがわかる。また本発明によるチ
ップの寿命はいずれも平均逃げ面の摩耗によるものであ
りクレーター摩耗は寿命まで切削してもブレークされず
良好な摩耗形態を示した。The indexable insert of sample No. (3) has reached the end of its life after cutting for 25 minutes, while (1) and (2) according to the present invention show 40 to 40 as is apparent from Table 1.
It can be seen that cutting can be performed for 50 minutes. In addition, the life of each of the tips according to the present invention was due to wear of the average flank, and the crater wear did not break even after cutting until the life, showing a favorable wear mode.
【００１７】更に、前記実施例で用いたものと同じ基体
からなるスローアウェイチツプにＴｉＣ、ＴｉＮまたは
ＴｉＣＮ層の厚さ、Ａｌ2Ｏ3の厚さを種々に変化させた
ものを作成した。成膜の条件は実施例１と同様に行い、
時間の調整で膜厚をコントロールした。得られたものの
膜の構成、膜厚等を表２に示す。また、これらのものを
用い、実施例１と同様な方法で切削試験を行った結果も
同表に示す。Further, a throwaway chip made of the same substrate as used in the above-mentioned examples was prepared by changing the thickness of the TiC, TiN or TiCN layer and the thickness of Al 2 O 3 variously. The conditions for film formation were the same as in Example 1,
The film thickness was controlled by adjusting the time. Table 2 shows the structure, thickness, and the like of the film obtained. The same table also shows the results of cutting tests performed using these materials in the same manner as in Example 1.
【００１８】[0018]
【表２】 [Table 2]
【００１９】表２から明らかなように、本発明による被
覆超硬合金はいずれも優れた耐クレーター摩耗性を有
し、また寿命も永いことがわかる。As is clear from Table 2, all of the coated cemented carbides according to the present invention have excellent crater wear resistance and long life.
【００２０】[0020]
【発明の効果】上述のように、本発明被覆超硬質合金
は、内層にＴｉＮ、ＴｉＣＮと外層Ａｌ2Ｏ3等の中間に
両者と親和性の良い粒状のＴｉの炭化物等を被覆するこ
とによって、層間の粒度を異ならせ、特に耐摩耗性に富
む高性能な被覆超硬工具が得られる。As described above, the coated super-hard alloy of the present invention is obtained by coating the inner layer of TiN, TiCN, the outer layer of Al 2 O 3, etc. with a granular Ti carbide having good affinity for both. In addition, a high-performance coated cemented carbide tool having a different grain size between layers and having particularly high wear resistance can be obtained.
【図１】図１は、本発明被覆超硬工具の金属組織を走査
型電子顕微鏡（ＳＥＭ）でその断面破面を観察した結果
を示す。FIG. 1 shows the results of observing the cross-sectional fracture surface of the metal structure of the coated carbide tool of the present invention with a scanning electron microscope (SEM).
【図２】図２は、図１と同一の試料の金属組織を走査型
電子顕微鏡（ＳＥＭ）で最表面を観察した結果を示す。FIG. 2 shows the result of observing the outermost surface of a metal structure of the same sample as in FIG. 1 by using a scanning electron microscope (SEM).
【図３】図３は図１の要部拡大図を示す。FIG. 3 is an enlarged view of a main part of FIG.
【図４】図４は図１の要部拡大図を示す。FIG. 4 is an enlarged view of a main part of FIG.
Claims (1)
ａ族の炭化物、窒化物、炭窒化物の１種以上、結合金属
としてＦｅ族、Ｃｒ族の１種以上よりなる超硬質合金を
基体とし、前記基体の表面に、少なくともＴｉＣＮ層を
設け、前記ＴｉＣＮ層が有機ＣＮ化合物を使用した中温
化学蒸着法により成膜され、柱状晶からなり、その直上
に粒状から成る層を２種以上の反応ガスを用いた高温化
学蒸着法から成膜したことを特徴とする被覆超硬工具の
製造法。1. A hard phase comprising 4a, 5a, 6 of the periodic table
A super-hard alloy of at least one of a-group carbides, nitrides, and carbonitrides and at least one of Fe-group and Cr-group as a binding metal is used as a base, and at least a TiCN layer is provided on the surface of the base. The TiCN layer was formed by a medium temperature chemical vapor deposition method using an organic CN compound, was formed of a columnar crystal, and a granular layer was formed directly thereon by a high temperature chemical vapor deposition method using two or more kinds of reaction gases. A method of manufacturing coated carbide tools.
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP8323400A JP2974284B2 (en) | 1996-11-19 | 1996-11-19 | Manufacturing method of coated carbide tool |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP8323400A JP2974284B2 (en) | 1996-11-19 | 1996-11-19 | Manufacturing method of coated carbide tool |
Related Parent Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP3163993A Division JP2660180B2 (en) | 1991-06-07 | 1991-06-07 | Coated carbide tool |
Publications (2)
| Publication Number | Publication Date |
|---|---|
| JPH09235672A true JPH09235672A (en) | 1997-09-09 |
| JP2974284B2 JP2974284B2 (en) | 1999-11-10 |
Family
ID=18154298
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP8323400A Expired - Lifetime JP2974284B2 (en) | 1996-11-19 | 1996-11-19 | Manufacturing method of coated carbide tool |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JP2974284B2 (en) |
Cited By (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JP2009541075A (en) * | 2006-06-22 | 2009-11-26 | ケンナメタル インコーポレイテッド | CVD coating scheme comprising alumina and / or titanium containing material and method of making the same |
-
1996
- 1996-11-19 JP JP8323400A patent/JP2974284B2/en not_active Expired - Lifetime
Cited By (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JP2009541075A (en) * | 2006-06-22 | 2009-11-26 | ケンナメタル インコーポレイテッド | CVD coating scheme comprising alumina and / or titanium containing material and method of making the same |
Also Published As
| Publication number | Publication date |
|---|---|
| JP2974284B2 (en) | 1999-11-10 |
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