JPH0920527A - Jig for heat-treating thin sheet glass - Google Patents
Jig for heat-treating thin sheet glassInfo
- Publication number
- JPH0920527A JPH0920527A JP16840495A JP16840495A JPH0920527A JP H0920527 A JPH0920527 A JP H0920527A JP 16840495 A JP16840495 A JP 16840495A JP 16840495 A JP16840495 A JP 16840495A JP H0920527 A JPH0920527 A JP H0920527A
- Authority
- JP
- Japan
- Prior art keywords
- heat treatment
- jig
- thin glass
- thin sheet
- sheet glass
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Granted
Links
Landscapes
- Liquid Crystal (AREA)
- Re-Forming, After-Treatment, Cutting And Transporting Of Glass Products (AREA)
Abstract
Description
【0001】[0001]
【産業上の利用分野】本発明は薄板ガラスの熱処理用治
具に関し、詳しくは、液晶ディスプレイパネル等に使用
される薄板ガラスを熱処理する際に、前記薄板ガラスを
水平に載置した状態で熱処理炉に導入される板状の熱処
理用治具に関する。BACKGROUND OF THE INVENTION 1. Field of the Invention The present invention relates to a jig for heat treatment of thin glass, and more specifically, when heat treating thin glass used for a liquid crystal display panel or the like, it is heat-treated in a state where the thin glass is placed horizontally. The present invention relates to a plate-shaped heat treatment jig that is introduced into a furnace.
【0002】[0002]
【従来の技術】例えば、液晶ディスプレイパネル等に
は、厚さ1mm程度の薄板ガラスが使用される。この種
の薄板ガラスの製造では、ガラス成形した後、図4に示
すようにセッターと称される熱処理用治具1上に薄板ガ
ラス2を水平に載置した状態で熱処理炉に導入して熱処
理を行なっている。この熱処理用治具1として、従来
は、一般にアルミナセラミックス製のものが使用されて
いる。前述した熱処理は以下のようにして行なわれる。2. Description of the Related Art For example, a thin glass plate having a thickness of about 1 mm is used for a liquid crystal display panel or the like. In the production of this kind of thin glass, after glass forming, the thin glass 2 is horizontally placed on a heat treatment jig 1 called a setter as shown in FIG. Are doing. As the heat treatment jig 1, conventionally, a jig made of alumina ceramics is generally used. The above-mentioned heat treatment is performed as follows.
【0003】即ち、成形後の薄板ガラスを熱処理用治具
上に水平に載置した状態で熱処理炉に導入する。この熱
処理炉では、熱処理用治具上に載置された前記薄板ガラ
スが、ガラスの歪み点以上の所定の処理温度まで加熱昇
温され、一定時間保持されて徐冷された後、熱処理炉か
ら排出される。この熱処理によって薄板ガラスは歪みが
除去される。That is, the thin glass sheet after forming is placed horizontally on a heat treatment jig and introduced into a heat treatment furnace. In this heat treatment furnace, the thin glass placed on the heat treatment jig is heated and heated to a predetermined treatment temperature equal to or higher than the strain point of the glass, held for a certain period of time and gradually cooled, and then removed from the heat treatment furnace. Is discharged. This heat treatment removes the strain from the thin glass sheet.
【0004】その後、前記熱処理炉から排出された熱処
理用治具上の薄板ガラスを熱処理用治具から分離する。
この薄板ガラスの熱処理用治具からの分離は、一般に薄
板ガラスを真空吸着する吸着パッドを具備した取り出し
装置によって行なわれる。Then, the thin glass sheet on the heat treatment jig discharged from the heat treatment furnace is separated from the heat treatment jig.
The separation of the thin glass from the heat treatment jig is generally performed by a take-out device equipped with a suction pad for vacuum-sucking the thin glass.
【0005】[0005]
【発明が解決しようとする課題】ところで、前述した従
来の熱処理用治具は、熱膨張係数が約71×10-7/℃
のアルミナセラミックスからなるため、膨張・収縮が大
きく、その結果、反りが発生して平坦度が損なわれる。
また、この治具はアルミナのセラミックス微粉末よりな
る焼結体であるため、内部に多数の気孔(ボイド)が存
在し、熱処理により熱処理用治具が昇温された際に、気
孔に内在していた不純物質がガスとして発生し、薄板ガ
ラスを汚染する。By the way, the above-mentioned conventional heat treatment jig has a thermal expansion coefficient of about 71 × 10 −7 / ° C.
Since it is made of alumina ceramics, the expansion and contraction are large, and as a result, warpage occurs and flatness is impaired.
Also, since this jig is a sintered body made of alumina ceramic fine powder, it has a large number of pores (voids) inside, and when the jig for heat treatment is heated by heat treatment, it is present in the pores. The existing impurities are emitted as gas and contaminate the thin glass sheet.
【0006】更に、熱処理後、薄板ガラスは熱処理用治
具に密着した状態となっているため、迅速に分離するこ
とが困難であり、取り出し装置により無理に分離させる
と、薄板ガラスに過度な応力がかかり破損することがあ
る。Further, after the heat treatment, the thin glass plate is in a state of being in intimate contact with the heat treatment jig, so that it is difficult to separate the glass plate quickly. It may be damaged and damaged.
【0007】本発明は上記問題点に鑑みて提案されたも
ので、その目的とするところは、反りが生じず平坦度を
長く確保することができると共に、熱処理用治具に密着
している薄板ガラスの分離を容易に且つ迅速に行なえる
ようにした薄板ガラスの熱処理用治具を提供することに
ある。The present invention has been proposed in view of the above problems, and an object thereof is to provide a thin plate which is capable of ensuring a long flatness without warpage and being in close contact with a heat treatment jig. It is an object of the present invention to provide a jig for heat treatment of thin glass, which enables easy and quick glass separation.
【0008】[0008]
【課題を解決するための手段】上記目的を達成するため
の技術的手段として、本発明は、薄板ガラスが水平に載
置された状態で熱処理炉に導入される板状の熱処理用治
具において、熱膨張係数が15×10-7/℃以下の結晶
化ガラスからなり、かつ、薄板ガラスとの接触面に通じ
る通気孔が設けられていることを特徴とする。As a technical means for achieving the above object, the present invention provides a plate-shaped heat treatment jig which is introduced into a heat treatment furnace in a state where thin glass sheets are horizontally mounted. It is characterized in that it is made of crystallized glass having a coefficient of thermal expansion of 15 × 10 −7 / ° C. or less, and that it is provided with an air vent communicating with the contact surface with the thin glass plate.
【0009】[0009]
【作用】本発明の熱処理用治具では、熱膨張係数が15
×10-7/℃以下の低膨張の結晶化ガラスからなるの
で、熱処理炉の使用温度下で熱膨張及び収縮が少ないた
め反りが生じず長期間に亘って平坦度を確保できる。ま
た、結晶化ガラスであって、アルミナセラミックス焼結
体のように内部に多数の気孔(ボイド)が存在しないの
で、熱処理の昇温時に不純物ガスが発生することもない
ため、薄板ガラスの表面を汚染しない。更に、薄板ガラ
スとの接触面に通じる通気孔を有するので、熱処理後、
熱処理用治具に密着状態にある薄板ガラスを分離する際
に、通気孔から空気が速やかに侵入して薄板ガラスを熱
処理用治具から容易に分離できる。The heat treatment jig of the present invention has a thermal expansion coefficient of 15
Since it is made of low-expansion crystallized glass of x10 -7 / ° C or less, there is little thermal expansion and contraction at the operating temperature of the heat treatment furnace, so that warpage does not occur and flatness can be secured for a long period of time. In addition, since it is a crystallized glass and does not have many pores (voids) inside unlike the alumina ceramics sintered body, no impurity gas is generated when the temperature of the heat treatment is raised. Do not pollute. Furthermore, since it has a ventilation hole that communicates with the contact surface with the thin glass, after heat treatment,
When separating the thin glass sheet that is in close contact with the heat treatment jig, the air can quickly enter through the ventilation holes to easily separate the thin glass sheet from the heat treatment jig.
【0010】[0010]
【実施例】本発明の実施例を、図1乃至図3に示して説
明する。DETAILED DESCRIPTION OF THE PREFERRED EMBODIMENTS An embodiment of the present invention will be described with reference to FIGS.
【0011】本発明に係る熱処理用治具11は、主成分
として、SiO2 ,Al2 O3 ,Li2 O,P2 O5 ,
TiO2 ,ZrO2 、及びアルカリ金属酸化物を含有す
る板状ガラスを加熱して結晶化処理することによって得
られた結晶化ガラスからなっており、熱膨張係数が15
×10-7/℃以下である。この結晶化ガラスは、低熱膨
張係数を有しているため、後述する熱処理により高温状
態に晒されても高い平坦度を維持することができるもの
である。尚、この結晶化ガラス(日本電気硝子株式会社
製:ネオセラムN−0,N−11)は、低熱膨張係数等
の熱的特性のみではなく、機械的特性、化学的特性にお
いても優れている。The heat treatment jig 11 according to the present invention has SiO 2 , Al 2 O 3 , Li 2 O, P 2 O 5 , and
It is made of crystallized glass obtained by heating and crystallizing a plate glass containing TiO 2 , ZrO 2 , and an alkali metal oxide, and has a thermal expansion coefficient of 15
× 10 −7 / ° C. or less. Since this crystallized glass has a low coefficient of thermal expansion, it can maintain high flatness even when it is exposed to a high temperature state by a heat treatment described later. The crystallized glass (Neoceram N-0, N-11 manufactured by Nippon Electric Glass Co., Ltd.) is excellent not only in thermal characteristics such as a low coefficient of thermal expansion but also in mechanical characteristics and chemical characteristics.
【0012】この熱処理用治具11は、その上に載置さ
れる薄板ガラス12より若干大き目の矩形状を有し、例
えば、厚さ3mm程度の板状体であって、図1に示す実
施例では、その四隅部のそれぞれに、薄板ガラス12と
の接触面に通じて空気を導入する通気孔である微小な貫
通穴13が形成してある。この貫通穴13は、各隅部で
対角線上に二つずつ並んで形成され、更に、二つの対角
線の交差点である中央に一つの貫通穴13が形成されて
いる。The heat treatment jig 11 has a rectangular shape slightly larger than the thin glass plate 12 placed thereon, and is, for example, a plate-like body having a thickness of about 3 mm. In the example, in each of the four corners, minute through holes 13 are formed which are ventilation holes for introducing air through the contact surface with the thin glass plate 12. Two through holes 13 are formed side by side on a diagonal line at each corner, and further, one through hole 13 is formed at the center of the intersection of the two diagonal lines.
【0013】上記熱処理用治具を使用した薄板ガラスの
熱処理は、以下のようにして行なわれる。The heat treatment of the thin sheet glass using the above heat treatment jig is performed as follows.
【0014】まず、熱処理治具の上面に薄板ガラスを載
置した状態で熱処理炉に導入する。この時、薄板ガラス
は熱処理用治具上でその四隅部及び中央部の貫通穴の上
方開口部を塞いだ状態となる。薄板ガラスを載せた熱処
理用治具は、耐熱鋼網からなる搬送コンベア(図示せ
ず)により熱処理炉内を移送され、熱処理炉内で、薄板
ガラスはガラスの歪み点以上の徐冷点付近の所定の処理
温度まで加熱昇温される。このようにして熱処理用治具
上の薄板ガラスを前記の温度に一定時間保持して歪みを
除去した後、熱処理炉から排出する。この熱処理中、本
発明の熱処理用治具は、反りが生じず高い平坦度を維持
し、しかも、熱処理用治具の内部に多数の気孔(ボイ
ド)が存在しないので、不純物ガスが発生することもな
い。First, the thin glass sheet is placed on the upper surface of the heat treatment jig and introduced into the heat treatment furnace. At this time, the thin glass plate is in a state in which the upper openings of the through holes at the four corners and the central part thereof are closed on the heat treatment jig. The heat treatment jig on which the thin glass is placed is transferred in the heat treatment furnace by a conveyor (not shown) made of a heat-resistant steel net, and the thin glass is placed in the vicinity of the annealing point above the strain point of the glass in the heat treatment furnace. It is heated up to a predetermined processing temperature. In this way, the thin glass sheet on the heat treatment jig is held at the above temperature for a certain period of time to remove the strain, and then discharged from the heat treatment furnace. During this heat treatment, the jig for heat treatment of the present invention maintains high flatness without warpage, and moreover, since many pores (voids) do not exist inside the jig for heat treatment, impurity gas is generated. Nor.
【0015】その後、熱処理炉から排出された熱処理用
治具上に密着している薄板ガラスを熱処理用治具から分
離する。Thereafter, the thin glass sheet that is in close contact with the heat treatment jig discharged from the heat treatment furnace is separated from the heat treatment jig.
【0016】即ち、図2(a)に示すように熱処理用治
具11上の薄板ガラス12の四隅部に取り出し装置の吸
着パッド14a〜14dを押し当てて真空吸着し、薄板
ガラス12を持ち上げて、熱処理用治具11から分離す
る。この時、同図(b)に示すように薄板ガラス12の
吸着パッド14aが位置する部位の直下に、下方開口部
を開放した貫通穴13が存在するので、その貫通穴13
から薄板ガラス12と熱処理用治具11との間に空気が
流入して、その結果、吸着パッド14aに吸着された薄
板ガラス12を熱処理用治具11から容易に離すことが
可能となる。図示しない他の三隅部についても同様に、
吸着パッド14b,14c,14dで真空吸着して薄板
ガラス12を熱処理用治具11から容易に分離できる。That is, as shown in FIG. 2 (a), the suction pads 14a to 14d of the take-out device are pressed against the four corners of the thin glass plate 12 on the heat treatment jig 11 for vacuum suction, and the thin glass plate 12 is lifted. , And separated from the heat treatment jig 11. At this time, as shown in FIG. 2B, a through hole 13 having a lower opening is present immediately below the portion of the thin glass plate 12 where the suction pad 14a is located.
From this, air flows between the thin glass plate 12 and the heat treatment jig 11, and as a result, the thin glass plate 12 adsorbed by the suction pad 14a can be easily separated from the heat treatment jig 11. Similarly for other three corners not shown,
The thin glass sheet 12 can be easily separated from the heat treatment jig 11 by vacuum suction with the suction pads 14b, 14c, 14d.
【0017】尚、上記実施例の場合、貫通穴13を対角
線に沿って四隅部に二つずつ配置したものであるが、こ
の貫通穴13の位置、その個数及び形状は上記実施例に
限らず適宜設定し得る。また、通気孔として貫通穴に限
らず、図3(a)(b)に示すような凹溝15にしても
よい。本発明では、貫通穴、凹溝に限定されることな
く、熱処理用治具の薄板ガラスとの接触面に通じる通気
孔を設けるものであればよい。In the case of the above embodiment, two through holes 13 are arranged at four corners along a diagonal line, but the position, number and shape of the through holes 13 are not limited to those in the above embodiment. It can be set appropriately. Further, the ventilation hole is not limited to the through hole, and may be the concave groove 15 as shown in FIGS. In the present invention, the ventilation hole is not limited to the through hole and the concave groove, and any ventilation hole may be provided as long as it is provided on the surface of the heat treatment jig that contacts the thin glass sheet.
【0018】[0018]
【発明の効果】本発明の熱処理用治具は、熱膨張係数が
15×10-7/℃以下の結晶化ガラスからなっているの
で、熱膨張及び収縮が少ないため、熱処理用に供した場
合に反りが生じず高い平坦度を確保でき、また、内部に
気孔がないので不純物ガスが発生せず、薄板ガラスを汚
染することがない。更に、薄板ガラスとの接触面に通じ
る通気孔を有するので、熱処理用治具から薄板ガラスを
容易かつ迅速に分離することができる。Since the jig for heat treatment of the present invention is made of crystallized glass having a coefficient of thermal expansion of 15 × 10 −7 / ° C. or less, thermal expansion and shrinkage are small, and therefore, when it is used for heat treatment. There is no warp and a high flatness can be secured, and since there are no pores inside, no impurity gas is generated and the thin glass sheet is not contaminated. Further, since it has a vent hole communicating with the contact surface with the thin glass sheet, the thin glass sheet can be easily and quickly separated from the heat treatment jig.
【図1】(a)は本発明の熱処理用治具の一実施例を示
す平面図、(b)は(a)の要部拡大断面図FIG. 1A is a plan view showing an embodiment of a heat treatment jig of the present invention, and FIG. 1B is an enlarged cross-sectional view of a main part of FIG.
【図2】(a)は本発明の熱処理用治具上の薄板ガラス
を吸着パッドで分離する状態を示す斜視図、(b)は
(a)の要部拡大断面図FIG. 2A is a perspective view showing a state where thin glass on a heat treatment jig of the present invention is separated by a suction pad, and FIG.
【図3】(a)は本発明に係る熱処理用治具の他の実施
例を示す平面図、(b)は(a)の要部拡大断面図3 (a) is a plan view showing another embodiment of the heat treatment jig according to the present invention, and FIG. 3 (b) is an enlarged cross-sectional view of a main part of FIG. 3 (a).
【図4】従来の熱処理用治具上に薄板ガラスを載置した
状態を示す斜視図FIG. 4 is a perspective view showing a state in which a thin glass plate is placed on a conventional heat treatment jig.
11 熱処理用治具 12 薄板ガラス 13 通気孔(貫通穴) 14a〜14d 吸着パッド 15 通気孔(凹溝) 11 Jig for heat treatment 12 Thin glass 13 Vent (through hole) 14a-14d Adsorption pad 15 Vent (recessed groove)
Claims (1)
処理炉に導入される板状の熱処理用治具において、熱膨
張係数が15×10-7/℃以下の結晶化ガラスからな
り、かつ、薄板ガラスとの接触面に通じる通気孔が設け
られていることを特徴とする薄板ガラスの熱処理用治
具。1. A plate-shaped heat treatment jig, which is introduced into a heat treatment furnace in a state where a thin glass plate is horizontally mounted, is made of crystallized glass having a thermal expansion coefficient of 15 × 10 −7 / ° C. or less, A jig for heat treatment of thin glass, characterized in that a ventilation hole is provided which communicates with a contact surface with the thin glass.
Priority Applications (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP16840495A JP3620610B2 (en) | 1995-07-04 | 1995-07-04 | Thin glass heat treatment jig |
Applications Claiming Priority (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP16840495A JP3620610B2 (en) | 1995-07-04 | 1995-07-04 | Thin glass heat treatment jig |
Publications (2)
Publication Number | Publication Date |
---|---|
JPH0920527A true JPH0920527A (en) | 1997-01-21 |
JP3620610B2 JP3620610B2 (en) | 2005-02-16 |
Family
ID=15867501
Family Applications (1)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
JP16840495A Expired - Fee Related JP3620610B2 (en) | 1995-07-04 | 1995-07-04 | Thin glass heat treatment jig |
Country Status (1)
Country | Link |
---|---|
JP (1) | JP3620610B2 (en) |
Cited By (5)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JP2002114537A (en) * | 2000-10-04 | 2002-04-16 | Nippon Electric Glass Co Ltd | Setter for heat treatment of glass substrate |
US7063584B2 (en) | 2001-05-30 | 2006-06-20 | Matsushita Electric Industrial Co., Ltd. | Method of manufacturing gas discharge display panel, support table, and method of manufacturing support table |
JP2009298697A (en) * | 2009-08-12 | 2009-12-24 | Nippon Electric Glass Co Ltd | Setter for heat treatment of glass substrate |
WO2016068069A1 (en) * | 2014-10-30 | 2016-05-06 | 日本電気硝子株式会社 | Glass base plate heat processing method and glass base plate production method |
WO2019189567A1 (en) * | 2018-03-30 | 2019-10-03 | Hoya株式会社 | Annealing plate, manufacturing method of annealing plate, and manufacturing method of substrate |
-
1995
- 1995-07-04 JP JP16840495A patent/JP3620610B2/en not_active Expired - Fee Related
Cited By (9)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JP2002114537A (en) * | 2000-10-04 | 2002-04-16 | Nippon Electric Glass Co Ltd | Setter for heat treatment of glass substrate |
US7063584B2 (en) | 2001-05-30 | 2006-06-20 | Matsushita Electric Industrial Co., Ltd. | Method of manufacturing gas discharge display panel, support table, and method of manufacturing support table |
JP2009298697A (en) * | 2009-08-12 | 2009-12-24 | Nippon Electric Glass Co Ltd | Setter for heat treatment of glass substrate |
WO2016068069A1 (en) * | 2014-10-30 | 2016-05-06 | 日本電気硝子株式会社 | Glass base plate heat processing method and glass base plate production method |
WO2019189567A1 (en) * | 2018-03-30 | 2019-10-03 | Hoya株式会社 | Annealing plate, manufacturing method of annealing plate, and manufacturing method of substrate |
CN111886649A (en) * | 2018-03-30 | 2020-11-03 | Hoya株式会社 | Plate material for annealing treatment, method for producing plate material for annealing treatment, and method for producing substrate |
JPWO2019189567A1 (en) * | 2018-03-30 | 2021-04-08 | Hoya株式会社 | Annealing plate material, annealing plate manufacturing method, and substrate manufacturing method |
JP2021177440A (en) * | 2018-03-30 | 2021-11-11 | Hoya株式会社 | Plate material for annealing treatment, method for manufacturing plate material for annealing treatment, and method for manufacturing substrate |
CN111886649B (en) * | 2018-03-30 | 2022-08-05 | Hoya株式会社 | Plate material for annealing treatment, method for producing plate material for annealing treatment, and method for producing substrate |
Also Published As
Publication number | Publication date |
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JP3620610B2 (en) | 2005-02-16 |
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