JPH0915082A - Helium leak detector - Google Patents
Helium leak detectorInfo
- Publication number
- JPH0915082A JPH0915082A JP7159659A JP15965995A JPH0915082A JP H0915082 A JPH0915082 A JP H0915082A JP 7159659 A JP7159659 A JP 7159659A JP 15965995 A JP15965995 A JP 15965995A JP H0915082 A JPH0915082 A JP H0915082A
- Authority
- JP
- Japan
- Prior art keywords
- mass spectrometric
- leak
- oil
- test
- pump
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Granted
Links
Classifications
-
- G—PHYSICS
- G01—MEASURING; TESTING
- G01M—TESTING STATIC OR DYNAMIC BALANCE OF MACHINES OR STRUCTURES; TESTING OF STRUCTURES OR APPARATUS, NOT OTHERWISE PROVIDED FOR
- G01M3/00—Investigating fluid-tightness of structures
- G01M3/02—Investigating fluid-tightness of structures by using fluid or vacuum
- G01M3/04—Investigating fluid-tightness of structures by using fluid or vacuum by detecting the presence of fluid at the leakage point
- G01M3/20—Investigating fluid-tightness of structures by using fluid or vacuum by detecting the presence of fluid at the leakage point using special tracer materials, e.g. dye, fluorescent material, radioactive material
-
- F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
- F04—POSITIVE - DISPLACEMENT MACHINES FOR LIQUIDS; PUMPS FOR LIQUIDS OR ELASTIC FLUIDS
- F04C—ROTARY-PISTON, OR OSCILLATING-PISTON, POSITIVE-DISPLACEMENT MACHINES FOR LIQUIDS; ROTARY-PISTON, OR OSCILLATING-PISTON, POSITIVE-DISPLACEMENT PUMPS
- F04C2220/00—Application
- F04C2220/50—Pumps with means for introducing gas under pressure for ballasting
Landscapes
- Physics & Mathematics (AREA)
- General Physics & Mathematics (AREA)
- Examining Or Testing Airtightness (AREA)
Abstract
Description
【０００１】[0001]
【産業上の利用分野】本発明は、封止検査や密閉検査な
どを行う際に利用されるヘリウムリークディテクタに関
するものである。BACKGROUND OF THE INVENTION 1. Field of the Invention The present invention relates to a helium leak detector used when performing a sealing inspection or a sealing inspection.
【０００２】[0002]
【従来の技術】配管等の漏れの有無を検査するにあたっ
て、有力な手段となるものの一つにヘリウムリークディ
テクタがある。この装置は、図３に示すように、ヘリウ
ム（Ｈｅ）のみを検出する質量分析部ＡＮＡＬと、この
質量分析部ＡＮＡＬを被試験体ＥＸＰと共に真空排気し
得る位置に配設されるメインポンプたるターボ分子ポン
プ（ＴＭＰ）１と、このＴＭＰ１のバックポンプとして
機能する油回転真空ポンプ（ＲＰ）２とを備えるととも
に、被試験体ＥＸＰとＴＭＰ１の間にテストバルブＴＶ
を配置し、ＴＭＰ１とＲＰ２の間に遮断バルブＦＶを配
置し、さらに被試験体ＥＸＰとＲＰ２とを直接連通する
ラインに中間バルブＢＶを配置して構成される。図にお
いてＴＰは被試験体ＥＸＰを装置に対して着脱するため
のテストポートである。2. Description of the Related Art A helium leak detector is one of the effective means for inspecting pipes for leaks. As shown in FIG. 3, this apparatus includes a mass spectrometric unit ANAL that detects only helium (He), and a turbo that is a main pump that is arranged at a position where the mass spectrometric unit ANAL can be evacuated together with the device under test EXP. A molecular pump (TMP) 1 and an oil rotary vacuum pump (RP) 2 that functions as a back pump of the TMP 1 are provided, and a test valve TV is provided between the DUT EXP and the TMP 1.
Is arranged, a shutoff valve FV is arranged between TMP1 and RP2, and an intermediate valve BV is arranged in a line which directly communicates the DUT EXP and RP2. In the figure, TP is a test port for attaching / detaching the device under test EXP to / from the device.
【０００３】この装置におけるリークテストは、次の手
順に従って行われる。先ず中間バルブＢＶ及びテストバ
ルブＴＶを閉、遮断バルブＦＶを開に保持して、ＴＭＰ
１及びＲＰ２を起動することにより、質量分析部ＡＮＡ
Ｌを所定真空度にまで排気する。図４における太線はこ
のとき排気が進行している箇所を示している。次に、テ
ストポートＴＰに被試験体ＥＸＰを接続して、今度はテ
ストバルブＴＶ及び遮断バルブＦＶを閉、中間バルブＢ
Ｖを開に保持して、図５に太線で示すようにＲＰ２によ
り被試験体ＥＸＰを所定真空度にまで排気する。その
後、中間バルブＢＶを閉、テストバルブＴＶ及び遮断バ
ルブＦＶを開に保持することにより、図６に太線で示す
ような排気ラインを構成して、被試験体ＥＸＰにＨｅを
吹き付ける。このとき、被試験体ＥＸＰに漏れがあれ
ば、質量分析部ＡＮＡＬにＨｅの一部が回り込んで、そ
の漏れに略比例したＨｅが検出され、結果的に被試験体
ＥＸＰの気密度が間接的測定されることになる。The leak test in this device is performed according to the following procedure. First, the intermediate valve BV and the test valve TV are closed, the shutoff valve FV is held open, and the TMP is held.
1 and RP2 are activated,
The L is evacuated to a predetermined vacuum degree. The thick line in FIG. 4 indicates the portion where the exhaust is advancing at this time. Next, the device under test EXP is connected to the test port TP, this time the test valve TV and the shutoff valve FV are closed, and the intermediate valve B.
V is kept open, and the test object EXP is exhausted to a predetermined vacuum degree by RP2 as shown by the thick line in FIG. After that, the intermediate valve BV is closed and the test valve TV and the shutoff valve FV are held open to form an exhaust line as shown by a thick line in FIG. 6, and He is sprayed on the test object EXP. At this time, if there is a leak in the device under test EXP, a part of He flows into the mass spectrometric unit ANAL, He that is substantially proportional to the leak is detected, and as a result, the airtightness of the device under test EXP is indirectly measured. Will be measured.
【０００４】[0004]
【発明が解決しようとする課題】ところが、被試験体Ｅ
ＸＰから大量のＨｅがリーク（グロスリークと称され
る）した場合に、その後のリークテスト時に、質量分析
部ＡＮＡＬ内でのＨｅのバックグラウンド値（ゼロ点）
が十分に低下せず、そのため何ら問題のない良質な被試
験体ＥＸＰをも不良品と判定するなど、有効なテストが
行えない状態に陥ることがある。However, the device under test E
When a large amount of He leaks from XP (referred to as gross leak), the background value of He (zero point) in the mass spectrometric unit ANAL during the subsequent leak test.
Does not decrease sufficiently, so that a good quality test object EXP without any problem may be determined to be a defective product, and an effective test may not be performed.
【０００５】その原因について究明したところ、グロス
リーク時にはＴＭＰ１のバックポンプとして働いている
ＲＰ２にＨｅ濃度の極端に高い空気が大量に吸込まれ、
このときＲＰ２の油中にＨｅが溶け込むとともに、溶け
込んだＨｅの気泡が時間とともに再び吸気口側から放出
され、これが質量分析部ＡＮＡＬに逆流してバックグラ
ウンド値を上昇させていること事が明らかになった。Upon investigating the cause, a large amount of air having an extremely high He concentration is sucked into RP2, which acts as a back pump of TMP1, at the time of gross leak,
At this time, He was dissolved in the oil of RP2, and the dissolved He bubbles were again discharged from the intake port side with time, and this flowed back to the mass spectrometric unit ANAL and increased the background value. became.
【０００６】このような不都合を解消するために、装置
全体の稼働を停止してＲＰ２の油を新油と入れ替えるこ
とで対処することも考えられるが、このようにすると装
置全体を再度立ち上げるまでのダウンタイムが長時間に
及び、装置の稼働効率に大きな支障が出るとともに、メ
ンテナンスにも多大なコストと労力が必要となる。In order to solve such inconvenience, it may be possible to deal with it by stopping the operation of the entire apparatus and replacing the oil of RP2 with a new oil. However, if this is done, the entire apparatus is restarted. The down time is long, the operation efficiency of the device is seriously hindered, and the maintenance requires a large cost and labor.
【０００７】本発明は、このような課題に着目してなさ
れたものであって、油回転真空ポンプの油に大量のＨｅ
が混入した場合にも、その油を速やかに退避させ、これ
により質量分析部のバックグランド値を速やかに低下さ
せて、リークテストを有効に再開できるようにしたヘリ
ウムリークディテクタを提供することを目的としてい
る。The present invention has been made in view of these problems, and a large amount of He is added to the oil of the oil rotary vacuum pump.
The purpose of the present invention is to provide a helium leak detector capable of promptly evacuating the oil even if it is mixed with the oil, thereby quickly lowering the background value of the mass spectrometric section and effectively restarting the leak test. I am trying.
【０００８】[0008]
【課題を解決するための手段】本発明は、かかる目的を
達成するために、次のような構成を採用したものであ
る。In order to achieve the above object, the present invention employs the following configuration.
【０００９】すなわち、本発明に係るヘリウムリークデ
ィテクタは、ヘリウムのみを検出する質量分析部と、こ
の質量分析部を被試験体と共に真空排気するメインポン
プと、このメインポンプのバックポンプとして機能する
油回転真空ポンプとを具備してなるものにおいて、前記
油回転真空ポンプに、ガスバラスト口を備えたものを採
用し、そのガスバラスト口に選択的に開閉可能な電磁弁
を設けるとともに、前記質量分析部で測定されるヘリウ
ム測定値が予め定めた敷居値を上回った場合に前記電磁
弁を一定時間開に保持する制御を行う制御手段を設けて
なることを特徴とする。That is, the helium leak detector according to the present invention comprises a mass spectrometric section for detecting only helium, a main pump for evacuating the mass spectrometric section together with the DUT, and an oil functioning as a back pump for the main pump. A rotary vacuum pump, wherein the oil rotary vacuum pump is equipped with a gas ballast port, the gas ballast port is provided with a solenoid valve that can be selectively opened and closed, and the mass spectrometry is performed. When the helium measurement value measured by the section exceeds a predetermined threshold value, control means for controlling the solenoid valve to be kept open for a certain period of time is provided.
【００１０】[0010]
【作用】このような構成において、敷居値にグロスリー
クに対応する値を与えておけば、実際にグロスリークが
発生して油回転真空ポンプ内に大量のＨｅが吸い込ま
れ、それが油中に溶け込んでも、質量分析部のヘリウム
測定値が敷居値を越えたことをもって制御手段が働き、
油回転真空ポンプのガスバラスト口に付帯して設けた電
磁弁を一定時間開に保持する制御を行うので、油回転真
空ポンプ内に大気が導入され、その大気により油回転真
空ポンプ内の油が撹拌されて、油中に気泡状態で溶け込
んでいるＨｅがその大気の撹拌作用によって速やかに排
出される。このため、油中のＨｅ濃度が急速に低下し、
その後にリークテストを再開しても、油回転真空ポンプ
からのＨｅの放出量が著しく低減され、Ｈｅが質量分析
部に回り込んでバックグラウンド値を上昇させる不都合
が飛躍的に改善される。しかも、本発明によると、その
間に油回転真空ポンプは勿論のこと、質量分析部や高真
空ポンプ等の他の装置部分の稼働を停止させる必要がな
いため、システムの連続稼働性に大きな悪影響が及ぶこ
ともなく、グロスリーク後のリークテストを極めて短い
ロスタイムの後に引き続き有効に再開することが可能に
なる。In such a structure, if the threshold value is given a value corresponding to the gross leak, a gross leak actually occurs and a large amount of He is sucked into the oil rotary vacuum pump, which is submerged in the oil. Even if it melts, the control means works when the measured value of helium in the mass spectrometric section exceeds the threshold value,
Since the solenoid valve attached to the gas ballast port of the oil rotary vacuum pump is controlled to be held open for a certain period of time, air is introduced into the oil rotary vacuum pump, and the atmosphere causes the oil in the oil rotary vacuum pump to change. He that is agitated and dissolved in oil in a bubble state is quickly discharged by the agitating action of the atmosphere. Therefore, the concentration of He in the oil rapidly decreases,
Even if the leak test is restarted after that, the amount of released He from the oil rotary vacuum pump is remarkably reduced, and the inconvenience that He enters the mass spectrometric section and raises the background value is dramatically improved. Moreover, according to the present invention, it is not necessary to stop the operation of other device parts such as the mass spectrometric unit and the high vacuum pump, not to mention the oil rotary vacuum pump, during which the operation of the system is greatly adversely affected. Without being extended, it will be possible to continue the leak test after the gross leak effectively after a very short loss time.
【００１１】[0011]
【実施例】以下、本発明の一実施例を、図面を参照して
説明する。An embodiment of the present invention will be described below with reference to the drawings.
【００１２】図１に示すヘリウムリークディテクタは、
図３に示したものと基本的に同様の構成からなる。つま
り、このものも、ヘリウム（Ｈｅ）のみを検出する質量
分析部ＡＮＡＬと、この質量分析部ＡＮＡＬを被試験体
ＥＸＰと共に真空排気し得る位置に配設されるメインポ
ンプたるターボ分子ポンプ（ＴＭＰ）１と、このＴＭＰ
１のバックポンプとして機能する油回転真空ポンプ（Ｒ
Ｐ）２とを備えるとともに、被試験体ＥＸＰとＴＭＰ１
の間にテストバルブＴＶを配置し、ＴＭＰ１とＲＰ２の
間に遮断バルブＦＶを配置し、さらに被試験体ＥＸＰと
ＲＰ２とを直接連通するラインに中間バルブＢＶをそれ
ぞれ配置して構成されるものである。The helium leak detector shown in FIG.
The structure is basically similar to that shown in FIG. That is, this is also a mass spectrometric unit ANAL that detects only helium (He), and a turbo molecular pump (TMP) that is a main pump that is arranged at a position where the mass spectrometric unit ANAL can be evacuated together with the device under test EXP. 1 and this TMP
Oil rotary vacuum pump (R
P) 2 and the device under test EXP and TMP1
The test valve TV is arranged between the two, the shutoff valve FV is arranged between the TMP1 and the RP2, and the intermediate valve BV is arranged in a line which directly connects the DUT EXP and the RP2. is there.
【００１３】また、リークテストに係る手順も図４〜図
６に沿って説明した従来のものと同様であって、先ず中
間バルブＢＶ及びテストバルブＴＶを閉、遮断バルブＦ
Ｖを開に保持して、ＴＭＰ１及びＲＰ２を起動すること
により、質量分析部ＡＮＡＬを所定真空度にまで排気す
る（図４参照）。次に、テストポートＴＰに被試験体Ｅ
ＸＰを接続して、今度はテストバルブＴＶ及び遮断バル
ブＦＶを閉、中間バルブＢＶを開に保持して、ＲＰ２に
より被試験体ＥＸＰを所定真空度にまで排気する（図５
参照）。その後、中間バルブＢＶを閉、テストバルブＴ
Ｖ及び遮断バルブＦＶを開に保持し、被試験体ＥＸＰに
Ｈｅを吹き付ける（図６参照）。このとき、被試験体Ｅ
ＸＰに漏れがあれば、質量分析部ＡＮＡＬにＨｅの一部
が回り込んで、その漏れに略比例したＨｅが検出され、
結果的に被試験体ＥＸＰの気密度が間接的測定されるこ
とになる。The procedure for the leak test is also the same as the conventional one described with reference to FIGS. 4 to 6. First, the intermediate valve BV and the test valve TV are closed and the shutoff valve F is closed.
By holding V open and activating TMP1 and RP2, the mass spectrometric unit ANAL is evacuated to a predetermined degree of vacuum (see FIG. 4). Next, the test object E is attached to the test port TP.
XP is connected, this time the test valve TV and the shutoff valve FV are closed, the intermediate valve BV is held open, and the test object EXP is exhausted to a predetermined vacuum degree by RP2 (FIG. 5).
reference). After that, the intermediate valve BV is closed and the test valve T
The V and the shutoff valve FV are held open, and He is sprayed on the test object EXP (see FIG. 6). At this time, the device under test E
If there is a leak in XP, a part of He will enter the mass spectrometric unit ANAL, and He that is approximately proportional to the leak will be detected.
As a result, the airtightness of the device under test EXP is indirectly measured.
【００１４】以上において、被試験体ＥＸＰの密閉性や
封止状態が極めて劣悪であったり、被試験体ＥＸＰと粗
引きラインとの接続箇所（テストポートＴＰ部分）の真
空シールが不十分ないしは破損したりしていて、大量の
Ｈｅの漏洩（グロスリーク）が発生した場合には、別異
のシーケンス制御によって速やかにテストを終了する措
置等が講じられるのであるが、このときＴＭＰ１のバッ
クポンプとして働いているＲＰ２にＨｅ濃度の極端に高
い空気が大量に吸込まれるため、ＲＰ２の油中にＨｅが
溶け込む。このため、グロスリーク後にリークテストを
再開した場合に、溶け込んだＨｅの気泡が時間とともに
再び吸気口側から放出され、これが質量分析部ＡＮＡＬ
に逆流してバックグラウンド値を上昇させ、リークテス
トを事実上、続行不能な状態におとしめる。In the above, the sealing property and the sealing state of the test object EXP are extremely poor, or the vacuum seal at the connection portion (test port TP part) between the test object EXP and the roughing line is insufficient or damaged. If a large amount of He leaks (gross leak), a different sequence control is taken to quickly end the test. At this time, as a back pump of TMP1. Since a large amount of air having an extremely high He concentration is sucked into working RP2, He dissolves in the oil of RP2. Therefore, when the leak test is restarted after the gross leak, the dissolved He bubbles are again discharged from the intake port side with the lapse of time.
Backflow to increase the background value, effectively stopping the leak test.
【００１５】そこで、本実施例は、ＲＰ２に、ガスバラ
スト口２１を備えたものを採用し、そのガスバラスト口
２１に選択的に大気を導入して、上記の不具合を解消す
るようにしている。Therefore, in this embodiment, the RP2 having the gas ballast port 21 is adopted, and the atmosphere is selectively introduced into the gas ballast port 21 to eliminate the above-mentioned problems. .
【００１６】詳述すると、このＲＰ２は、図２に示すよ
うに、シリンダ２２内の偏心位置に内接状態でロータ２
３を配置し、このロータ２３に半径方向に突没可能に収
容したベーン２４の先端をシリンダ２２の内周に摺接さ
せ、シリンダ２２、ロータ２３、ベーン２４によって仕
切られるポンプ室Ｐにポンプ油を充填してロータ２３を
回転駆動することにより、吸気口２５から吸入したガス
を圧縮しながら排気口２６へ送り出すという周知のポン
プ作用を営むものである。また、排気しようとするガス
が水蒸気等のような凝縮性を有したガスである場合に、
圧縮によるガスの液化、それに起因したポンプ全体の性
能劣化を防止するために、図示ＲＰ２は、排気口２６の
近傍にガスバラスト口２１を開口させており、ガスが圧
縮される前にこのガスバラスト口２１より大気を導入し
て、ガスを分圧を高めずに排気する機能を備え併せてい
る。More specifically, as shown in FIG. 2, this RP2 is inscribed in an eccentric position in the cylinder 22 in a rotor 2 state.
3 is arranged, and the tip of the vane 24 housed in the rotor 23 so as to be capable of projecting and retracting in the radial direction is slidably contacted with the inner circumference of the cylinder 22, and pump oil is pumped into the pump chamber P partitioned by the cylinder 22, the rotor 23 and the vane 24. Is filled and the rotor 23 is driven to rotate, thereby performing a well-known pump action of discharging the gas sucked from the intake port 25 to the exhaust port 26 while compressing the gas. Also, when the gas to be exhausted is a gas having a condensable property such as water vapor,
In order to prevent liquefaction of the gas due to compression and deterioration of the performance of the entire pump due to the liquefaction, the illustrated RP2 has a gas ballast port 21 opened near the exhaust port 26, and the gas ballast is compressed before the gas is compressed. It also has a function of introducing the atmosphere through the port 21 and exhausting the gas without increasing the partial pressure.
【００１７】そして、本実施例では、そのガスバラスト
口２１に開閉可能に電磁弁ＧＢＶを付帯して設けるとと
もに、この電磁弁ＧＢＶを、本発明の制御手段としての
役割を担うマイクロコンピュータユニット４によって開
閉制御するようにしている。In this embodiment, a solenoid valve GBV is attached to the gas ballast port 21 so as to be openable and closable, and the solenoid valve GBV is provided by the microcomputer unit 4 serving as the control means of the present invention. It is designed to open and close.
【００１８】電磁弁ＧＢＶは、入力される電気信号によ
ってガスバラスト口２１を少なくとも開状態と閉状態と
に選択的に切り換えて保持し得る通常のものである。The solenoid valve GBV is a conventional one that can selectively hold the gas ballast port 21 at least in an open state and a closed state by an input electric signal.
【００１９】マイクロコンピュータユニット４は、ＣＰ
Ｕ、メモリ及びインターフェース等を具備してなる既知
のもので、そのメモリ内には所定のプログラムが格納さ
れ、ＣＰＵはそのプログラムに沿って質量分析部ＡＮＡ
Ｌから測定値Ｓを入力して所定の比較、演算を行い、前
記電磁弁ＧＢＶに開閉信号ａを出力するようになってい
る。The microcomputer unit 4 is a CP
U is a known device including a memory, an interface and the like, and a predetermined program is stored in the memory, and the CPU follows the mass analysis unit ANA in accordance with the program.
A measured value S is input from L, a predetermined comparison and calculation are performed, and an opening / closing signal a is output to the solenoid valve GBV.
【００２０】以下、そのプログラムに沿って制御の手順
を説明する。通常は電磁弁ＧＢＶは閉状態に保持されて
いる。ＣＰＵは質量分析部ＡＮＡＬから入力される測定
値Ｓを予め定めた敷居値Ｓ0 と定期的に比較する。この
敷居値Ｓ0 は、ＲＰ２内に許容量を越えるＨｅが導入さ
れる可能性のあるレベル、つまりグロスリークレベルに
対応する測定値に設定される。そして、入力される測定
値Ｓがその敷居値Ｓ0を上回っていると判断した場合に
は、グロスリークと判定して、前記電磁弁ＧＢＶを一定
時間開状態に保持する。これにより、ガスバラスト口２
１を介して外部から大量の大気がＲＰ２のポンプ室Ｐ内
に導入される。グロスリークの際には、ＲＰ２のポンプ
室Ｐ内に大量のＨｅが吸い込まれ、それが油中に気泡の
形で溶け込んだ状態になっているが、そのＨｅはガスバ
ラスト口２１を介して導入される大気により内部で撹拌
されるので、Ｈｅはその大気の撹拌作用によって速やか
に排気口２６から排出される。このため、油中のＨｅ濃
度が急速に低下し、その後にリークテストを再開して
も、ＲＰ２からのＨｅ放出量が著しく低減され、Ｈｅが
質量分析部ＡＮＡＬに回り込んでバックグラウンド値を
上昇させる不都合が飛躍的に改善される。しかも、本実
施例によると、その間にＲＰ２は勿論のこと、質量分析
部ＡＮＡＬやＴＭＰ１等の他の装置部分の稼働を停止さ
せる必要がないため、装置の連続稼働性に大きな悪影響
を及ぼすこともなく、グロスリーク後のリークテストを
極めて短いロスタイムの後に引き続き有効に再開するこ
とが可能になる。その上、以上の制御は全て自動的に行
われるため、知識の乏しい者でも装置を適正に取り扱う
ことができ、装置の利用率と使い勝手を有効に向上させ
ることが可能になる。The control procedure will be described below according to the program. Normally, the solenoid valve GBV is kept closed. The CPU periodically compares the measured value S input from the mass spectrometric unit ANAL with a predetermined threshold value S0. This threshold value S0 is set to a level at which He exceeding the allowable amount may be introduced into RP2, that is, a measurement value corresponding to the gross leak level. When it is determined that the input measured value S is higher than the threshold value S0, it is determined to be gross leak, and the solenoid valve GBV is held open for a certain period of time. As a result, the gas ballast port 2
A large amount of atmospheric air is introduced into the pump chamber P of the RP 2 from the outside via 1. At the time of a gross leak, a large amount of He is sucked into the pump chamber P of the RP2 and is dissolved in the oil in the form of bubbles, but the He is introduced through the gas ballast port 21. The He is rapidly discharged from the exhaust port 26 by the stirring action of the atmosphere because it is internally stirred by the atmosphere. For this reason, the concentration of He in the oil rapidly decreases, and even if the leak test is restarted after that, the amount of He released from RP2 is significantly reduced, and He enters the mass spectrometric unit ANAL and the background value rises. The inconvenience caused is dramatically improved. Moreover, according to the present embodiment, it is not necessary to stop the operation of the RP2 and other device parts such as the mass spectrometric unit ANAL and TMP1 during that time, which may have a great adverse effect on the continuous operation of the device. Without it, it becomes possible to restart the leak test after the gross leak effectively after an extremely short loss time. In addition, since all the above controls are performed automatically, even a person with little knowledge can properly handle the device, and the utilization rate and usability of the device can be effectively improved.
【００２１】なお、各部の具体的な構成は、上述した実
施例のみに限定されるものではなく、本発明の趣旨を逸
脱しない範囲で種々変形が可能である。The specific structure of each part is not limited to the above-described embodiment, but various modifications can be made without departing from the spirit of the present invention.
【００２２】[0022]
【発明の効果】本発明に係るヘリウムリークディテクタ
は、以上説明した構成であるから、グロスリークが発生
した場合に、それを検知し、油回転真空ポンプ内に一時
的に大気を導入して、油中に溶け込んだＨｅを撹拌して
速やかに排出することができる。このため、グロスリー
ク後にリークテストを再開しても、質量分析部のバック
グラウンド値を低い値に保持して、有効なリークテスト
を行うことが可能になる。しかも、その間に連続稼働性
を損なうことがなく、操作に不慣れな者が取り扱っても
自動的にグロスリークから立ち直れるため、装置の稼働
効率や使い勝手を有効に向上させることができるという
優れた効果が奏される。Since the helium leak detector according to the present invention has the structure described above, when a gross leak occurs, it is detected and the atmosphere is temporarily introduced into the oil rotary vacuum pump, He dissolved in the oil can be stirred and quickly discharged. Therefore, even if the leak test is restarted after the gross leak, it is possible to hold the background value of the mass spectrometric unit at a low value and perform an effective leak test. Moreover, in the meantime, continuous operation is not impaired, and even if a person who is unfamiliar with the operation handles it, it can automatically recover from the gross leak, which is an excellent effect that the operation efficiency and usability of the device can be effectively improved. Played.
【図１】本発明の一実施例を示す回路図。FIG. 1 is a circuit diagram showing one embodiment of the present invention.
【図２】同実施例で用いられる油回転真空ポンプの概略
的な断面図。FIG. 2 is a schematic sectional view of an oil rotary vacuum pump used in the embodiment.
【図３】従来例を示す図１に対応した回路図。FIG. 3 is a circuit diagram corresponding to FIG. 1 showing a conventional example.
【図４】リークテストの一般的な手順を説明する図３に
対応した図。FIG. 4 is a diagram corresponding to FIG. 3 for explaining a general procedure of a leak test.
【図５】リークテストの一般的な手順を説明する図３に
対応した図。FIG. 5 is a diagram corresponding to FIG. 3 illustrating a general procedure of a leak test.
【図６】リークテストの一般的な手順を説明する図３に
対応した図。FIG. 6 is a diagram corresponding to FIG. 3 for explaining a general procedure of a leak test.
ＡＮＡＬ…質量分析部 ＥＸＰ…被試験体 ＧＢＶ…電磁弁 １…メインポンプ（ターボ分子ポンプ；ＴＭＰ） ２…油回転真空ポンプ；ＲＰ ４…制御手段（マイクロコンピュータユニット） ２１…ガスバラスト口 ANAL ... Mass spectrometry unit EXP ... Device under test GBV ... Solenoid valve 1 ... Main pump (turbo molecular pump; TMP) 2 ... Oil rotary vacuum pump; RP 4 ... Control means (microcomputer unit) 21 ... Gas ballast port
Claims (1)
の質量分析部を被試験体と共に真空排気するメインポン
プと、このメインポンプのバックポンプとして機能する
油回転真空ポンプとを具備してなるものにおいて、 前記油回転真空ポンプに、ガスバラスト口を備えたもの
を採用し、そのガスバラスト口に選択的に開閉可能な電
磁弁を設けるとともに、前記質量分析部で測定されるヘ
リウム測定値が予め定めた敷居値を上回った場合に前記
電磁弁を一定時間開に保持する制御を行う制御手段を設
けてなることを特徴とするヘリウムリークディテクタ。1. A mass spectrometric section for detecting only helium, a main pump for evacuating the mass spectrometric section together with an object to be tested, and an oil rotary vacuum pump functioning as a back pump of the main pump. In the thing, the oil rotary vacuum pump adopts one having a gas ballast port, and a helium measurement value measured by the mass spectrometric unit is provided with a solenoid valve that can be selectively opened and closed at the gas ballast port. A helium leak detector characterized by comprising control means for controlling the solenoid valve to remain open for a certain period of time when a predetermined threshold value is exceeded.
Priority Applications (4)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP15965995A JP3358394B2 (en) | 1995-06-26 | 1995-06-26 | Helium leak detector |
| TW085100332A TW293086B (en) | 1995-06-26 | 1996-01-12 | |
| CN96106153A CN1083575C (en) | 1995-06-26 | 1996-04-26 | Helium leakage detector |
| KR1019960018916A KR100217434B1 (en) | 1995-06-26 | 1996-05-31 | Helium leak detector |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP15965995A JP3358394B2 (en) | 1995-06-26 | 1995-06-26 | Helium leak detector |
Publications (2)
| Publication Number | Publication Date |
|---|---|
| JPH0915082A true JPH0915082A (en) | 1997-01-17 |
| JP3358394B2 JP3358394B2 (en) | 2002-12-16 |
Family
ID=15698544
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP15965995A Expired - Fee Related JP3358394B2 (en) | 1995-06-26 | 1995-06-26 | Helium leak detector |
Country Status (4)
| Country | Link |
|---|---|
| JP (1) | JP3358394B2 (en) |
| KR (1) | KR100217434B1 (en) |
| CN (1) | CN1083575C (en) |
| TW (1) | TW293086B (en) |
Cited By (2)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JP2015014285A (en) * | 2013-07-05 | 2015-01-22 | プファイファー・ヴァキューム・ゲーエムベーハー | Diaphragm vacuum pump |
| US10094381B2 (en) | 2015-06-05 | 2018-10-09 | Agilent Technologies, Inc. | Vacuum pump system with light gas pumping and leak detection apparatus comprising the same |
Families Citing this family (4)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| US8555704B2 (en) * | 2008-10-20 | 2013-10-15 | Agilent Technologies, Inc. | Calibration systems and methods for tracer gas leak detection |
| WO2011078835A1 (en) * | 2009-12-22 | 2011-06-30 | Ima Life North America Inc. | Monitoring freeze drying with gas measurement on vaccum pump exhaust |
| KR102272114B1 (en) | 2019-11-13 | 2021-07-02 | 서울대학교산학협력단 | Method to remove condensed water in gas export pipeline using hydrogel particles |
| CN110823468A (en) * | 2019-12-16 | 2020-02-21 | 中国商用飞机有限责任公司 | One-way valve failure detection device and method for detecting failure of one-way valve |
-
1995
- 1995-06-26 JP JP15965995A patent/JP3358394B2/en not_active Expired - Fee Related
-
1996
- 1996-01-12 TW TW085100332A patent/TW293086B/zh not_active IP Right Cessation
- 1996-04-26 CN CN96106153A patent/CN1083575C/en not_active Expired - Fee Related
- 1996-05-31 KR KR1019960018916A patent/KR100217434B1/en not_active IP Right Cessation
Cited By (2)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JP2015014285A (en) * | 2013-07-05 | 2015-01-22 | プファイファー・ヴァキューム・ゲーエムベーハー | Diaphragm vacuum pump |
| US10094381B2 (en) | 2015-06-05 | 2018-10-09 | Agilent Technologies, Inc. | Vacuum pump system with light gas pumping and leak detection apparatus comprising the same |
Also Published As
| Publication number | Publication date |
|---|---|
| CN1142605A (en) | 1997-02-12 |
| KR970002277A (en) | 1997-01-24 |
| JP3358394B2 (en) | 2002-12-16 |
| KR100217434B1 (en) | 1999-09-01 |
| CN1083575C (en) | 2002-04-24 |
| TW293086B (en) | 1996-12-11 |
Similar Documents
| Publication | Publication Date | Title |
|---|---|---|
| US5398543A (en) | Method and apparatus for detection of vacuum leak | |
| US4779449A (en) | Leak detector and leak detection method | |
| JP4037954B2 (en) | Tracer gas leak detector | |
| JP2635587B2 (en) | Device for calibrating the detector of the leak inspection device | |
| JPH11303694A (en) | Diagnostic apparatus for vaporized fuel disposal equipment | |
| JP2013532833A (en) | Leak detector | |
| JPH0915082A (en) | Helium leak detector | |
| JPH051687A (en) | Device for sucking and discharging gas by rotary vane-like hydraulic rotating vacuum pump and helium leakage detector using said device | |
| JPH03154837A (en) | Tracer gas type leakage detection system | |
| JP4277351B2 (en) | Leak inspection apparatus and leak inspection apparatus calibration method | |
| CN109500025B (en) | Automatic tank cleaning instrument and sampling tank cleaning method | |
| JP3116830B2 (en) | Helium leak detector | |
| JP3568667B2 (en) | Leak inspection device | |
| JP3238242B2 (en) | Airtightness inspection method and device | |
| JP3897860B2 (en) | Sealed leak test method | |
| JP3493874B2 (en) | Helium leak test equipment | |
| JP2001235391A (en) | Leak inspecting device | |
| JP2001235387A (en) | Leak inspecting device | |
| JPH034133A (en) | Helium leak detector | |
| JPS6315133A (en) | Method for checking vacuum leak | |
| JPH11241971A (en) | Leak test device | |
| JPH0915083A (en) | Helium leak detector | |
| JP3947059B2 (en) | Operation method for power saving of reverse diffusion helium leak detector | |
| JPS5961738A (en) | Leakage test apparatus | |
| JPH10213516A (en) | Helium leakage detector |
Legal Events
| Date | Code | Title | Description |
|---|---|---|---|
| FPAY | Renewal fee payment (event date is renewal date of database) |
Free format text: PAYMENT UNTIL: 20081011 Year of fee payment: 6 |
|
| FPAY | Renewal fee payment (event date is renewal date of database) |
Free format text: PAYMENT UNTIL: 20081011 Year of fee payment: 6 |
|
| FPAY | Renewal fee payment (event date is renewal date of database) |
Free format text: PAYMENT UNTIL: 20091011 Year of fee payment: 7 |
|
| FPAY | Renewal fee payment (event date is renewal date of database) |
Free format text: PAYMENT UNTIL: 20091011 Year of fee payment: 7 |
|
| FPAY | Renewal fee payment (event date is renewal date of database) |
Free format text: PAYMENT UNTIL: 20101011 Year of fee payment: 8 |
|
| FPAY | Renewal fee payment (event date is renewal date of database) |
Free format text: PAYMENT UNTIL: 20111011 Year of fee payment: 9 |
|
| FPAY | Renewal fee payment (event date is renewal date of database) |
Free format text: PAYMENT UNTIL: 20111011 Year of fee payment: 9 |
|
| FPAY | Renewal fee payment (event date is renewal date of database) |
Free format text: PAYMENT UNTIL: 20121011 Year of fee payment: 10 |
|
| FPAY | Renewal fee payment (event date is renewal date of database) |
Free format text: PAYMENT UNTIL: 20121011 Year of fee payment: 10 |
|
| FPAY | Renewal fee payment (event date is renewal date of database) |
Free format text: PAYMENT UNTIL: 20131011 Year of fee payment: 11 |
|
| LAPS | Cancellation because of no payment of annual fees |