JPH09144939A - Opening and closing valve and selector valve device using the same - Google Patents

Opening and closing valve and selector valve device using the same

Info

Publication number
JPH09144939A
JPH09144939A JP30450095A JP30450095A JPH09144939A JP H09144939 A JPH09144939 A JP H09144939A JP 30450095 A JP30450095 A JP 30450095A JP 30450095 A JP30450095 A JP 30450095A JP H09144939 A JPH09144939 A JP H09144939A
Authority
JP
Japan
Prior art keywords
valve
stem
valve body
piezo element
fluid
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Pending
Application number
JP30450095A
Other languages
Japanese (ja)
Inventor
Susumu Ogawa
進 小川
Ryosuke Doi
亮介 土肥
Michio Yamaji
道雄 山路
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Fujikin Inc
Original Assignee
Fujikin Inc
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Fujikin Inc filed Critical Fujikin Inc
Priority to JP30450095A priority Critical patent/JPH09144939A/en
Publication of JPH09144939A publication Critical patent/JPH09144939A/en
Pending legal-status Critical Current

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  • Valve Housings (AREA)
  • Fluid-Driven Valves (AREA)
  • Electrically Driven Valve-Operating Means (AREA)
  • Multiple-Way Valves (AREA)

Abstract

PROBLEM TO BE SOLVED: To accomplish the decrease of capacity of a driving device part, great miniaturization of an opening and closing valve, and the high-speed operation by integrally housing a piezoelectric element in a valve body, and operating a diaphragm valve element in the valve opening or valve closing direction through a process of directly transmitting driving force to be produced by a piezoelectric element to a stem operating body. SOLUTION: A valve body 2 is formed into a square block shape, a valve chamber 3 as a recessed part having a circular section is formed on the central part, the piezoelectric element housing parts 4 as recessed parts having square sections are formed on both right and left sides, and a stem operating and housing part 5 as a recessed part having a square section is formed above the valve chamber 3. When the prescribed valve opening signals are input to both piezoelectric elements 18, the piezoelectric elements 18 are extended by the prescribed dimension, a stem operating body 12 is lifted upward against elastic reaction of an elastic body 13 by the prescribed dimension, and pressing force in the valve closing direction, to be applied to a diaphragm valve element 6 is removed. Therefore, the diaphragm valve element 6 is restored to the initial reverse pan shape and made into the valve opening state.

Description

【発明の詳細な説明】Detailed Description of the Invention

【０００１】[0001]

【発明の属する技術分野】本発明は、主としてガスクロ
マトグラフィ装置や半導体製造装置等に於いて使用され
る切換弁装置とこれに用いる開閉弁の改良に係り、切換
弁装置の大幅な小形化と、流体の漏洩や純度の低下を防
止できるようにした切換弁装置及びこれに用いる開閉弁
に関するものである。BACKGROUND OF THE INVENTION 1. Field of the Invention The present invention relates to an improvement of a switching valve device mainly used in a gas chromatography device, a semiconductor manufacturing device and the like and an on-off valve used for the switching valve device. The present invention relates to a switching valve device capable of preventing fluid leakage and deterioration of purity, and an on-off valve used for the same.

【０００２】[0002]

【従来の技術】従来からガスクロマトグラフィ装置や半
導体製造装置等の切換弁装置には、所謂ロータリー型の
切換弁装置が多く使用されており、図１６（Ａ）及び図
１６（Ｂ）は前記ロータリー型の四方切換弁装置の一例
を示すものである。当該切換弁装置は、ローター収納穴
１００ｅ及びこれに夫々連通する第１入口１００ａ、第
２入口１００ｂ、第１出口１００ｃ、第２出口１００ｄ
を有するボディ１００と、ボディ１００のローター収納
穴１００ｅ内へ回転自在に挿入され、外周面に各入口１
００ａ、１００ｂと各出口１００ｃ、１００ｄを連通す
る円弧状の第１スロット１０１ａ及び第２スロット１０
１ｂを形成した合成樹脂製のローター１０１と、ロータ
ー１０１の回転駆動装置（図示省略）等から構成されて
おり、第１入口１００ａには第１流体流入管（図示省
略）が、第２入口１００ｂには第２流体流入管（図示省
略）が、第１出口１００ｃには第１流体流出管（図示省
略）が、第２出口１００ｄには第２流体流出管（図示省
略）が夫々接続されている。2. Description of the Related Art Conventionally, a so-called rotary type switching valve device has been often used for a switching valve device such as a gas chromatography device or a semiconductor manufacturing device, and FIGS. 16 (A) and 16 (B) show the rotary type. 1 illustrates an example of a four-way switching valve device of a type. The switching valve device includes a rotor housing hole 100e and a first inlet 100a, a second inlet 100b, a first outlet 100c, and a second outlet 100d that communicate with the rotor housing hole 100e.
And a rotor 100 that is rotatably inserted into the rotor housing hole 100e of the body 100 and has the inlets 1 on the outer peripheral surface.
00a, 100b and the respective outlets 100c, 100d are communicated with each other in the arc-shaped first slot 101a and second slot 10
1b is formed of a synthetic resin rotor 101, a rotation driving device for the rotor 101 (not shown), and the like. A first fluid inlet pipe (not shown) is provided at the first inlet 100a, and a second inlet 100b is provided. Is connected to a second fluid inflow pipe (not shown), the first outlet 100c is connected to a first fluid outflow pipe (not shown), and the second outlet 100d is connected to a second fluid outflow pipe (not shown). There is.

【０００３】而して、前記切換弁装置に於いて、ロータ
ー１０１を回転させて図１６（Ａ）の状態にすると、第
１流体流入管からの流体が第１入口１００ａ→第１スロ
ット１０１ａ→第１出口１００ｃを経て第１流体流出管
へ流れると共に、第２流体流入管からの流体が第２入口
１００ｂ→第２スロット１０１ｂ→第２出口１００ｄを
経て第２流体流出管へ流れる。又、ローター１０１を回
転させて図１６（Ｂ）の状態にすると、第１流体流入管
からの流体が第１入口１００ａ→第１スロット１０１ａ
→第２出口１００ｄを経て第２流体流出管へ流れると共
に、第２流体流入管からの流体が第２入口１００ｂ→第
２スロット１０１ｂ→第１出口１００ｃを経て第１流体
流出管へ流れる。In the switching valve device, when the rotor 101 is rotated to the state shown in FIG. 16 (A), the fluid from the first fluid inflow pipe is the first inlet 100a → the first slot 101a → The fluid from the second fluid inflow pipe flows to the second fluid outflow pipe via the second inlet 100b → the second slot 101b → the second outlet 100d while flowing to the first fluid outflow pipe via the first outlet 100c. Further, when the rotor 101 is rotated to the state of FIG. 16 (B), the fluid from the first fluid inflow pipe is changed from the first inlet 100a to the first slot 101a.
→ While flowing to the second fluid outflow pipe via the second outlet 100d, the fluid from the second fluid inflow pipe flows to the first fluid outflow pipe via the second inlet 100b → the second slot 101b → the first outlet 100c.

【０００４】[0004]

【発明が解決しようとする課題】ところで、前記ロータ
リー式の切換弁装置では、ローター１０１がボディ１０
０のローター収納穴１００ｅ内で摺動する構成としてい
るため、ローター収納穴１００ｅの内周面とローター１
０１の外周面との間を完全にシールすることは難しく、
流体が目的とする出口以外の出口へ漏洩したり、切換弁
装置の外部へ漏洩したりすると云う問題がある。又、ロ
ーター１０１の各スロット１０１ａ、１０１ｂの位置を
変えて流体の流れる方向を切り換えるようにしているた
め、弁を切換え操作したときに各スロット１０１ａ、１
０１ｂに溜まった流体が他の管路へ流れて行くと云う問
題がある。更に、合成樹脂製ローター１０１が金属製ボ
ディ１００へ接触回転する構造になっているため、ロー
ター１０１の磨耗が比較的激しいだけでなく、塵埃等が
摺動面へ噛み込んだ場合には、ローター１０１の外表面
が簡単に損傷を受けると云う問題がある。加えて、ロー
ター１０１が樹脂製であるため水素ガス等の侵透が発生
し、クロマトグラフィ装置等に於いてはプロセスの分析
結果に大きな悪影響を及ぼすと云う問題がある。そのう
え、樹脂製ローター１０１の回転が接触回転であるた
め、比較的大きな回動トルクを必要とし、弁駆動装置が
必然的に大形になると共に、切換動作の高速化が困難に
なる。By the way, in the rotary type switching valve device, the rotor 101 has the body 10
Since it is configured to slide in the rotor storage hole 100e of No. 0, the inner peripheral surface of the rotor storage hole 100e and the rotor 1
It is difficult to completely seal between the outer peripheral surface of 01,
There is a problem that the fluid leaks to an outlet other than the intended outlet or leaks to the outside of the switching valve device. Further, since the positions of the slots 101a and 101b of the rotor 101 are changed to switch the direction of fluid flow, when the valves are switched, the slots 101a and 1b are switched.
There is a problem that the fluid accumulated in 01b flows to another pipeline. Further, since the rotor 101 made of synthetic resin is configured to rotate in contact with the metal body 100, not only is the rotor 101 worn relatively hard, but also when dust or the like is caught in the sliding surface, There is a problem that the outer surface of 101 is easily damaged. In addition, since the rotor 101 is made of resin, there is a problem that penetration of hydrogen gas or the like occurs, which greatly affects the analysis result of the process in a chromatography device or the like. In addition, since the rotation of the resin rotor 101 is contact rotation, a relatively large turning torque is required, the valve drive device is necessarily large, and it is difficult to speed up the switching operation.

【０００５】本発明は、従前のこの種切換弁装置に於け
る上述の如き問題を解決せんとするものであり、流体の
漏洩や切換作動時の流体混合による純度低下をほぼ完全
に防止することができ、しかも、切換弁装置の大幅な小
形化及び作動の高速化が図れると共に、Ｈ2 ガス等の侵
透による様々な不都合を完全に排除できるようにした切
換弁装置とこれに用いる開閉弁を提供せんとするもので
ある。The present invention is intended to solve the above-mentioned problems in the conventional switching valve device of this type, and to prevent leakage of fluid and deterioration of purity due to fluid mixing during switching operation almost completely. In addition, the switching valve device can be significantly downsized and the operation speed can be increased, and various inconveniences due to penetration of H 2 gas and the like can be completely eliminated, and a switching valve used for the switching valve device. Is intended to be provided.

【０００６】[0006]

【課題を解決するための手段】本件開閉弁は、流体流入
通路、流体流出通路、弁座を有する弁室及びピエゾ素子
収納部を夫々設けたバルブボディと，弁座と対向状に配
設され、弁室の上方を気密状に閉鎖する金属薄板製のダ
イヤフラム弁体と，ダイヤフラム弁体の上方に配設さ
れ、ダイヤフラム弁体を弁座側へ押圧するステムと，断
面形状がほぼＴ字形を呈してステムの上方に配設され、
その下端部をステムの上端部へ接当若しくは連結させた
ステム作動体と，ステム作動体の上方に配設され、弾性
体を介してステム作動体を付勢するバネ押え板と，バル
ブボディのピエゾ素子収納部内に縦向きに配設され、そ
の一端をステム作動体にまた他端をバルブボディに支持
すると共に作動時に弾性体の弾力に抗してステム作動体
を駆動するピエゾ素子とを発明の基本構成とするもので
ある。The on-off valve of the present invention is provided with a valve body provided with a fluid inflow passage, a fluid outflow passage, a valve chamber having a valve seat, and a piezo element accommodating portion, and a valve body facing the valve seat. , A diaphragm valve body made of a thin metal plate that hermetically closes the upper part of the valve chamber, a stem that is arranged above the diaphragm valve body and presses the diaphragm valve body toward the valve seat side, and has a substantially T-shaped cross section. It is arranged above the stem,
A stem actuating body whose lower end is abutted or connected to the upper end of the stem, a spring retainer plate disposed above the stem actuating body and biasing the stem actuating body through an elastic body, and a valve body A piezo element which is vertically arranged in a piezo element housing part, supports one end of the piezo element with a stem actuation body and the other end with a valve body, and drives the stem actuation body against the elastic force of an elastic body during operation. The basic configuration of

【０００７】また、本件切換弁装置は、偶数個の上記開
閉弁を組み合せて一体とし、隣接する２個の開閉弁の流
体流入通路同志を並列状に連通せしめて流体入口とする
と共に、前記２個の開閉弁の流体流出通路同志を並列状
に連通せしめて流体出口としたことを発明の基本構成と
するものである。Further, in the switching valve device of the present invention, an even number of the on-off valves are combined and integrated, and the fluid inflow passages of two adjacent on-off valves are connected in parallel to each other to form a fluid inlet. The fluid outlets of the individual on-off valves are connected in parallel to form a fluid outlet, which is a basic configuration of the invention.

【０００８】[0008]

【発明の実施の形態】以下、図面に基づいて本発明の実
施の態様を説明する。図１は本発明に係る開閉弁の縦断
面図であり、図２は図１のＡ−Ａ視図、図３は図１のＢ
−Ｂ視図である。図１乃至図３に於いて、１はケース
体、２はバルブボディ、３は弁室、３ａは弁座、４はピ
エゾ素子収納部、５はステム作動体収納部、６はダイヤ
フラム弁体、７はダイヤフラム押えナット、８はダイヤ
フラム押え、９は流入継手、１０は流出継手、１１はス
テム、１２はステム作動体、１３は弾性体、１４はバネ
押え、１５はバネ押え板、１６は調整ねじ、１７はボー
ル、１８はピエゾ素子、１９は連結金具、２０はスラス
トベアリングである。BEST MODE FOR CARRYING OUT THE INVENTION Embodiments of the present invention will be described below with reference to the drawings. 1 is a vertical cross-sectional view of an on-off valve according to the present invention, FIG. 2 is a view taken along line AA of FIG. 1, and FIG. 3 is B of FIG.
FIG. 1 to 3, 1 is a case body, 2 is a valve body, 3 is a valve chamber, 3a is a valve seat, 4 is a piezo element housing portion, 5 is a stem actuating body housing portion, 6 is a diaphragm valve body, 7 is a diaphragm retainer nut, 8 is a diaphragm retainer, 9 is an inflow joint, 10 is an outflow joint, 11 is a stem, 12 is a stem actuating body, 13 is an elastic body, 14 is a spring retainer, 15 is a spring retainer plate, 16 is an adjustment A screw, 17 is a ball, 18 is a piezo element, 19 is a connecting fitting, and 20 is a thrust bearing.

【０００９】前記ケース体１は金属材又は合成樹脂材に
よって角筒状に形成されており、バルブボディ２へ着脱
自在に固定されている。また、ケース体１の上端部又は
下端部には、後述するように組付け用レールへ着脱自在
に固定するため固定用治具（図示省略）が取付けられて
いる。尚、当該ケース体１は必要に応じて用いられるも
のであり、これを省略しても良いことは勿論である。The case body 1 is formed of a metal material or a synthetic resin material in a rectangular tube shape, and is detachably fixed to the valve body 2. Further, a fixing jig (not shown) is attached to the upper end portion or the lower end portion of the case body 1 so as to be detachably fixed to an assembly rail as described later. The case body 1 is used as needed, and it goes without saying that it may be omitted.

【００１０】前記バルブボディ２はステンレス鋼や耐食
性特殊鋼等から四角形のブロック状に形成されており、
中央部には断面円形の凹部である弁室３が、また、左・
右両側部には断面四角形の凹部であるピエゾ素子収納部
４が、更に弁室３の上方には、断面四角形の凹部である
ステム作動体収納部５が夫々形成されている。また、当
該バルブボディ２には、弁室２へ連通する流体流入通路
２ａと流体流出通路２ｂとが穿設されており、更に弁室
２の底面には弁座３ａが形成されている。尚、前記流体
流入通路２ａ及び流体流出通路２ｂの端部には、流入継
手９及び流出継手１０が夫々設けられている。The valve body 2 is formed of stainless steel, corrosion-resistant special steel or the like in a rectangular block shape.
In the center, a valve chamber 3 that is a recess with a circular cross section is provided.
A piezo element accommodating portion 4 which is a concave portion having a quadrangular cross section is formed on both right side portions, and a stem actuation body accommodating portion 5 which is a concave portion having a quadrangular cross section is formed above the valve chamber 3. Further, a fluid inflow passage 2a and a fluid outflow passage 2b communicating with the valve chamber 2 are bored in the valve body 2, and a valve seat 3a is formed on the bottom surface of the valve chamber 2. An inflow joint 9 and an outflow joint 10 are provided at the ends of the fluid inflow passage 2a and the fluid outflow passage 2b, respectively.

【００１１】前記弁室３内には、弁座３ａと対向状に金
属薄板から成る逆皿形のダイヤフラム弁体６が配設され
ており、その外周縁部は、弁室３内へ螺着したダイヤフ
ラム押えナット７の下端面と弁室３の底面との間で、ダ
イヤフラム押え８を介設して気密状に挾持されている。
尚、ダイヤフラム弁体６はステム１１を介して下方向へ
押圧されることにより、弾性変形をして弁座３ａへ当接
し、また下方向への押圧力が除去されると、初期の逆皿
形の形態へその弾性又は流体圧によって自動的に復帰す
る。Inside the valve chamber 3, an inverted dish-shaped diaphragm valve body 6 made of a thin metal plate is disposed so as to face the valve seat 3a, and an outer peripheral edge portion thereof is screwed into the valve chamber 3. The diaphragm retainer nut 7 is sandwiched between the lower end surface of the diaphragm retainer nut 7 and the bottom surface of the valve chamber 3 in an airtight manner with the diaphragm retainer 8 interposed.
When the diaphragm valve body 6 is pressed downward via the stem 11, it is elastically deformed and comes into contact with the valve seat 3a, and when the downward pressing force is removed, the initial reverse tray is removed. It automatically returns to its shape by its elasticity or fluid pressure.

【００１２】即ち、ダイヤフラム弁体６の上方には金属
製又は硬質合成樹脂製のステム１１とステム作動体１２
と弾性体（皿バネ）１３とバネ押え１４等が配設されて
おり、ステム作動体１２はバルブボディ２へ取付けたバ
ネ押え板１５、調整ねじ１６及びボール１７を介して弾
性体１３の弾力により常時下方向（閉弁方向）へ押圧さ
れている。That is, above the diaphragm valve body 6, a stem 11 made of metal or hard synthetic resin and a stem actuating body 12 are provided.
An elastic body (disc spring) 13, a spring retainer 14 and the like are provided, and the stem actuating body 12 has a spring retainer plate 15 attached to the valve body 2, an adjusting screw 16 and a ball 17 for elastic force of the elastic body 13. Is always pressed downward (valve closing direction).

【００１３】前記ステム作動体１２は断面形状がほぼＴ
字形に形成されており、上方部は四角形の平盤状に、ま
た下方部はほぼ円柱状に形成されている。また、図１に
示す如く平盤状の上方部の左右方向の両翼部には、後述
する弁駆動用のピエゾ素子１８の端部を連結するための
連結金具１９が固定されている。更に、平盤状の上方部
の前後方向の端部には、ガイド孔１２ａが穿設されてい
る。当該ステム作動体１２は、上方部を前記バルブボデ
ィ２のステム作動体収納部５内へ、また下方の突出部を
ダイヤフラム押えナット７の中央挿通孔７ａ内へ、更
に、そのガイド孔１２ａ内へバルブボディ２に立設した
ガイド柱２ｃを挿通せしめた状態で、バルブボディ２の
上方に配設されている。The stem actuating body 12 has a substantially T-shaped cross section.
The upper portion is formed in a quadrangular flat plate shape, and the lower portion is formed in a substantially cylindrical shape. Further, as shown in FIG. 1, connecting metal fittings 19 for connecting end portions of a piezo element 18 for driving a valve, which will be described later, are fixed to both left and right wing portions of a flat plate-shaped upper portion. Further, a guide hole 12a is formed at the front-rear end of the flat plate-shaped upper portion. The stem actuating body 12 has an upper part in the stem actuating body housing 5 of the valve body 2, a lower protruding part in the central insertion hole 7a of the diaphragm holding nut 7, and further in the guide hole 12a. It is arranged above the valve body 2 in a state in which a guide column 2c erected on the valve body 2 is inserted.

【００１４】前記バネ押え板１５は四角状に形成されて
おり、４個の取付ねじ１５ａにより弾性体１３を圧縮せ
しめた状態で、バルブボディ２の上面側へ押圧固定され
ている。The spring retainer plate 15 is formed in a square shape, and is pressed and fixed to the upper surface side of the valve body 2 in a state where the elastic body 13 is compressed by the four mounting screws 15a.

【００１５】前記各ピエゾ素子１８は、バルブボディ２
に形成したピエゾ素子収納部４内へ縦向きに夫々収納さ
れており、その両端部はスラストベアリング２０を介し
てバルブボディ２及びステム作動体１２側の連結金具１
９へ連結されている。Each piezo element 18 is a valve body 2
Each of them is vertically housed in a piezo element housing portion 4 formed on the both sides, and both end portions of the piezo element housing portion 4 are connected through a thrust bearing 20 to the valve body 2 and the stem actuating body 12 side connecting fitting 1
Linked to 9.

【００１６】尚、本実施例に於いては図１に示す如くス
ラストベアリング２０を介してピエゾ素子１８の両端部
を支持固定する構成としているが、スラストベアリング
２０の使用に代えて図４に示す如くボール２１を介設す
るか又は直接に、ピエゾ素子１８の両端をステム作動体
１２又はバルブボディ２へ支持固定すると共に、調整ね
じ２２によってピエゾ素子１８の保持固定力を調整する
構成としてもよい。In this embodiment, as shown in FIG. 1, both ends of the piezo element 18 are supported and fixed via the thrust bearing 20, but the thrust bearing 20 is used instead of the thrust bearing 20 shown in FIG. As described above, the balls 21 may be interposed or directly to support and fix both ends of the piezo element 18 to the stem actuation body 12 or the valve body 2, and the holding screw of the piezo element 18 may be adjusted by the adjusting screw 22. .

【００１７】また、前記図１乃至図４の開閉弁では、弾
性体１３の弾性力によりダイヤフラム弁体６を常時弁座
３ａ側へ接当させ、ピエゾ素子１８の伸長作動によって
ステム１１を引き上げて開弁状態にする所謂ノーマルク
ローズ型の開閉弁としているが、ピエゾ素子１８を短縮
作動型のものとし、常時開状態にあるダイヤフラム弁体
６を、ピエゾ素子１８の短縮作動によりステム１１を押
圧して閉弁状態にするノーマルオープン型の開閉弁とす
ることも可能である。In the on-off valve shown in FIGS. 1 to 4, the diaphragm valve body 6 is constantly brought into contact with the valve seat 3a side by the elastic force of the elastic body 13, and the stem 11 is pulled up by the extension operation of the piezo element 18. Although a so-called normally closed type opening / closing valve that opens the valve is used, the piezo element 18 is shortened and the diaphragm valve body 6 in the normally open state is pressed by the stem 11 by the shortening operation of the piezo element 18. It is also possible to use a normally open type on-off valve that closes the valve.

【００１８】図５は第３実施態様に係る開閉弁を示すも
のであり、伸長型のピエゾ素子１８を用いて開閉弁をノ
ーマルオープン型の構成としたものである。即ち、常時
はバネ２３によってステム作動体１２が上方へ持ち上げ
られており、ダイヤフラム弁体６はその弾性力又は流体
圧によって開弁状態に保持されている。そして、ピエゾ
素子１８が伸長作動することにより、バネ２３の弾力に
抗してステム作動体１２が下方へ押圧され、ダイヤフラ
ム弁体６が弁座３ａへ当接する。尚、図５に於いて、２
４は調整ねじである。FIG. 5 shows an on-off valve according to the third embodiment, in which the on-off valve is a normally open type structure using an extension type piezo element 18. That is, the stem actuating body 12 is normally lifted upward by the spring 23, and the diaphragm valve body 6 is held in the valve open state by its elastic force or fluid pressure. When the piezo element 18 is extended, the stem actuating body 12 is pressed downward against the elastic force of the spring 23, and the diaphragm valve body 6 contacts the valve seat 3a. In addition, in FIG.
Reference numeral 4 is an adjusting screw.

【００１９】前記図１乃至図５の各実施態様ではステム
１１とステム作動体１２とを別体としているが、両者を
連結若しくは一体的に形成してもよいことは勿論であ
る。また、前記各実施態様ではケース体１を使用し、バ
ルブボディ２をケース体１内へ収納するようにしている
が、ケース体１を取り除いてもよいことは勿論である。In each of the embodiments shown in FIGS. 1 to 5, the stem 11 and the stem actuating body 12 are separate bodies, but it goes without saying that they may be connected or integrally formed. Further, in each of the above-described embodiments, the case body 1 is used and the valve body 2 is housed in the case body 1. However, it goes without saying that the case body 1 may be removed.

【００２０】次に、図１乃至図４に基づいて本発明の開
閉弁の作動について説明する。バネ押え板１５及びバネ
押え１４を介して弾性体１３を押圧することにより、ス
ラスト作動体１２は常時所定の押圧力で閉弁方向に押圧
されている。これにより、ステム１１を介してダイヤフ
ラム弁体６は弁座３ａへ接当され、流体通路が閉鎖した
閉弁状態になっている。今、所定の弁開信号が両ピエゾ
素子１８へ入力されると、ピエゾ素子１８は所定寸法だ
け伸長し、これによりステム作動体１２が所定寸法だけ
弾性体１３の弾性反力に抗して上方へ持ち上げられ、ダ
イヤフラム弁体６にかかる閉弁方向の押圧力が除去され
る。これにより、ダイヤフラム弁体６はそれ自体の弾性
力若しくは弾性力と流体圧の作用により初期の逆皿形
（又は平板状）に復原し、開弁状態となる。尚、この開
閉弁は、図１の上・下を逆向きにした状態でも使用され
るため、押圧力が除去されると、ステム１１及びステム
作動体１２は自重で開弁方向に移動する。その結果、図
１の弁ではステム１１を開弁方向へ付勢する復帰用スプ
リングを設けていないが、この復帰用スプリングを設け
るようにしてもよい。また、ピエゾ素子１８の伸長量を
制御することにより、弁開度の調整が行えることは勿論
である。Next, the operation of the on-off valve of the present invention will be described with reference to FIGS. By pressing the elastic body 13 via the spring retainer plate 15 and the spring retainer 14, the thrust actuating body 12 is always pressed in the valve closing direction with a predetermined pressing force. As a result, the diaphragm valve body 6 is brought into contact with the valve seat 3a via the stem 11 and is in a valve closed state in which the fluid passage is closed. Now, when a predetermined valve opening signal is input to both piezo elements 18, the piezo elements 18 expand by a predetermined dimension, which causes the stem actuation body 12 to move upward by a predetermined dimension against the elastic reaction force of the elastic body 13. And the pressing force in the valve closing direction applied to the diaphragm valve body 6 is removed. As a result, the diaphragm valve body 6 is restored to the initial inverted dish shape (or flat plate shape) by the elastic force of itself or the action of the elastic force and the fluid pressure, and becomes the valve open state. Since this on-off valve is used even when the upper and lower sides of FIG. 1 are reversed, the stem 11 and the stem actuating body 12 move in the valve opening direction by their own weight when the pressing force is removed. As a result, the valve of FIG. 1 does not have a return spring for urging the stem 11 in the valve opening direction, but this return spring may be provided. Further, it is needless to say that the valve opening can be adjusted by controlling the extension amount of the piezo element 18.

【００２１】[0021]

【実施例】作動試験用の開閉弁として、ケース体１の外
形寸法が横幅２６ｍｍ、縦幅２６ｍｍ、高さ３７ｍｍ
で、最高使用圧力６ｋｇｆ／ｃｍ2 、流体流入・流出継
手９、１０の寸法１／１６インチ、弁室３及び流体通路
２ａ、２ｂの内容積０．０１ｃｃ、ダイヤフラム弁体１
１の厚さ０．１５ｍｍ（ステンレス鋼）、弁座３ａの中
心内径２ｍｍφ、ピエゾ素子１８の変位０．０１５ｍ
ｍ、シート押え用変位分０．００５ｍｍ、ダイヤフラム
弁体６の変位（リフト）０．０１ｍｍ、ピエゾ素子１８
の最大駆動力約８０ｋｇ、入力信号１５０Ｖ、２０ｍＡ
（最大）のものを製作し、流体を空気、水素、及び窒素
として作動試験を行なった。試験の結果によれば、最大
流量１４００ｃｃ／ｍｉｎ（一次流体圧１ｋｇｆ／ｃｍ
2 、二次側開放）、弁座リーク１×１０-10 Ａｃｃ／ｓ
ｅｃ以下、Ｃｖ値０．００３７の開閉弁が得られた。[Example] As an opening / closing valve for an operation test, the outer dimensions of the case body 1 are 26 mm in width, 26 mm in height, and 37 mm in height.
The maximum working pressure is 6 kgf / cm 2 , the size of the fluid inflow / outflow coupling 9, 10 is 1/16 inch, the inner volume of the valve chamber 3 and the fluid passages 2 a and 2 b is 0.01 cc, and the diaphragm valve body 1
Thickness of 1 is 0.15 mm (stainless steel), center inner diameter of valve seat 3a is 2 mmφ, displacement of piezo element 18 is 0.015 m
m, displacement for seat pressing 0.005 mm, displacement (lift) of diaphragm valve body 0.01 mm, piezo element 18
Maximum driving force of 80kg, input signal 150V, 20mA
The (maximum) one was manufactured, and the operation test was conducted using air, hydrogen, and nitrogen as fluids. According to the test results, the maximum flow rate is 1400 cc / min (the primary fluid pressure is 1 kgf / cm
2 , secondary side open), valve seat leak 1 × 10 -10 Acc / s
An on-off valve having a Cv value of 0.0037 or less with ec or less was obtained.

【００２２】また、本発明では２本のピエゾ素子１８を
使用しているが、図６に示す如くバルブボディ２に埋込
み型コネクター２５とリード線２５ａの挿通孔とを設
け、当該コネクター２５を介して両ピエゾ素子１８へ並
列的に給電を行なう構成としている。Further, in the present invention, the two piezoelectric elements 18 are used. However, as shown in FIG. 6, the valve body 2 is provided with an embedded connector 25 and an insertion hole for the lead wire 25a. Power is supplied to both piezoelectric elements 18 in parallel.

【００２３】図７乃至９図は本発明に係る切換弁装置の
流路系統図を示すものであり、図７は四方切換弁装置、
図８は六方切換弁装置、図９は十方切換弁装置を夫々示
すものである。即ち、各切換弁装置は前記開閉弁Ａを４
個、６個又は１０個組み合せることにより形成されてお
り、図７乃至図９に於いて２７、２９、３１、３３、３
５は流体出口、２６、２８、３０、３２、３４は流体入
口である。例えば図７の四方切換弁装置では、流体入口
２６→流体出口２７、流体入口２８→流体出口２９へ夫
々流れていた流体が、流体入口２６→流体出口２９、流
体入口２８→流体出口３１の方向に夫々切換わることに
なる。7 to 9 show a flow path system diagram of the switching valve device according to the present invention. FIG. 7 shows a four-way switching valve device,
FIG. 8 shows a six-way switching valve device, and FIG. 9 shows a ten-way switching valve device. That is, each switching valve device has the opening / closing valve A
It is formed by combining 6 pieces, 6 pieces or 10 pieces, and in FIGS. 7 to 9, 27, 29, 31, 33, 3 are formed.
5 is a fluid outlet, and 26, 28, 30, 32, 34 are fluid inlets. For example, in the four-way switching valve device of FIG. 7, the fluids flowing from the fluid inlet 26 → the fluid outlet 27, the fluid inlet 28 → the fluid outlet 29 respectively flow in the direction of the fluid inlet 26 → the fluid outlet 29, the fluid inlet 28 → the fluid outlet 31. Will be switched to each.

【００２４】図１０乃至図１２は切換弁装置を形成する
開閉弁の組み付け説明図であり、図１０は四方切換弁装
置、図１１は六方切換弁装置、図１２は十方切換弁装置
を夫々示すものである。例えば、図１０の四方切換弁装
置は４個の開閉弁Ａ1 〜Ａ4 を図示のように組み付け、
各流体入口通路２ａ、２ａ間及び各流体流出通路２ｂ、
２ｂ間を夫々Ｔ型継手３６で接続することにより形成さ
れている。又、図１０の四方切換弁装置に於いては、外
形寸法が横幅５２ｍｍ、縦幅５２ｍｍ、高さ３７ｍｍに
形成されており、図１１の六方切換弁装置では横幅７８
ｍｍ、縦幅５２ｍｍ、高さ３７ｍｍに、図１２の十方切
換弁装置では横幅１３０ｍｍ、縦幅５２ｍｍ、高さ３７
ｍｍに夫々形成されている。FIGS. 10 to 12 are explanatory views of the assembly of the on-off valve forming the switching valve device. FIG. 10 is a four-way switching valve device, FIG. 11 is a six-way switching valve device, and FIG. 12 is a ten-way switching valve device. It is shown. For example, in the four-way switching valve device of FIG. 10, four on-off valves A 1 to A 4 are assembled as shown in the figure,
Between each fluid inlet passage 2a, 2a and each fluid outflow passage 2b,
They are formed by connecting the 2b's with T-shaped joints 36, respectively. Further, in the four-way switching valve device of FIG. 10, the outer dimensions are formed to have a width of 52 mm, a vertical width of 52 mm, and a height of 37 mm.
mm, vertical width 52 mm, and height 37 mm. In the ten-way switching valve device of FIG. 12, width 130 mm, vertical width 52 mm, height 37
mm respectively.

【００２５】[0025]

【実施例】図１３乃至図１５は四方切換弁装置の一実施
例を示すものであり、開閉弁Ａのケース本体１（若しく
はバルブボディ２）に固定用治具３７を取り付け、別途
に設けた取付けレール３８へ固定爪３９を介して取り外
し自在に組付け固定する構成としたものである。尚、図
１３乃至図１５に於いて２ａは流体流入路、２ｂは流体
流出路、４０はレール固定用ナットである。また、本実
施例に於いては、前記図１乃至図４で示した開閉弁Ａの
上面側に固定用治具３７を取付け、これを上・下逆向き
にした状態でレール３８へ組付け固定するようにしてい
る。13 to 15 show an embodiment of a four-way switching valve device, in which a fixing jig 37 is attached to the case body 1 (or valve body 2) of the on-off valve A and is separately provided. It is configured to be detachably assembled and fixed to the mounting rail 38 via the fixing claw 39. 13 to 15, 2a is a fluid inflow passage, 2b is a fluid outflow passage, and 40 is a rail fixing nut. Further, in this embodiment, a fixing jig 37 is attached to the upper surface side of the on-off valve A shown in FIGS. 1 to 4, and is attached to the rail 38 with the jigs 37 upside down. I'm trying to fix it.

【００２６】本実施例の場合、固定爪３９を矢印方向へ
引き抜くことにより、ケース体１はレール３８から取り
外しされる。また、本実施例では取付け用レール３８を
用いて開閉弁Ａを組み付けるようにしているが、連結杆
等を用いて開閉弁Ａの本体ケース１又はバルブボディ２
同志を外部から連結するようにしてもよい。In this embodiment, the case 1 is removed from the rail 38 by pulling out the fixing claw 39 in the arrow direction. Further, in this embodiment, the opening / closing valve A is assembled by using the mounting rail 38, but the main body case 1 or the valve body 2 of the opening / closing valve A is connected by using the connecting rod or the like.
The comrades may be connected from the outside.

【００２７】[0027]

【発明の効果】本発明に於いては、弁駆動用にピエゾ素
子を用いると共に、バルブボディの内部にピエゾ素子を
一体的に収容し、ピエゾ素子の発生する駆動力を直接ス
テム作動体へ伝達してダイヤフラム弁体を開弁又は閉弁
方向へ作動させる構成としている。その結果、シリンダ
装置等の弁駆動装置を別途に設ける従前の開閉弁に比較
して駆動装置部分の容積を著しく減少させることがで
き、開閉弁の大幅な小形化及び作動の高速化が可能とな
る。また、金属薄板製のダイヤフラム弁体を弁座面へ当
離座させる構成としているため、従前の合成樹脂製ロー
タリ型弁体を使用する場合に比較して水素ガスの侵透や
ガスの漏洩が少なくなり、分析結果の悪化等を防止する
ことができる。更に、ピエゾ素子の両端部をボール若し
くはスラストベアリングを介してバルブボディ及びステ
ム作動体へ接当若しくは連結する構成としているため、
ピエゾ素子自体の回転が可能になってその組み付けが容
易になると共に、ピエゾ素子の軸芯を容易に垂直姿勢に
保持することができる。According to the present invention, the piezo element is used for driving the valve, and the piezo element is integrally housed inside the valve body so that the driving force generated by the piezo element is directly transmitted to the stem actuation body. The diaphragm valve element is operated in the valve opening or closing direction. As a result, the volume of the drive unit can be significantly reduced as compared with the conventional on-off valve in which a valve drive unit such as a cylinder device is separately provided, and it is possible to greatly reduce the size of the on-off valve and speed up the operation. Become. In addition, since the diaphragm valve element made of a thin metal plate is pushed into and out of contact with the valve seat surface, the penetration of hydrogen gas and the leakage of gas are less likely to occur as compared with the conventional rotary valve element made of synthetic resin. It is possible to prevent the deterioration of the analysis result and the like. Furthermore, since both ends of the piezo element are abutted or connected to the valve body and the stem actuation body via balls or thrust bearings,
The piezo element itself can be rotated to facilitate its assembly, and the axis of the piezo element can be easily held in a vertical posture.

【００２８】一方、本発明の切換弁装置に於いては、同
一の開閉弁を複数個組付け一体化することにより切換弁
装置を形成する構成としているため、任意の数の流体切
換回路を有する切換弁装置を容易に形成することができ
る。また、本発明の切換弁装置では、弁駆動部が各開閉
弁に分散されているにも拘わらず、弁駆動部をバルブボ
ディ内へ収納することにより開閉弁自体が著しく小形化
されているため、切換弁装置そのものの大幅な小形化が
可能となる。更に、本発明の切換弁装置では、各開閉弁
に夫々単独に弁駆動部が設けられているため、夫々の弁
駆動部の作動を制御することにより、各流路間に任意の
切換時間差を容易に与えることができ、従前の切換弁装
置に比較してその機能が高まることになる。本発明は上
述の通り優れた実用的効用を奏するものである。On the other hand, in the switching valve device of the present invention, since the switching valve device is formed by assembling and integrating a plurality of the same on-off valves, it has an arbitrary number of fluid switching circuits. The switching valve device can be easily formed. Further, in the switching valve device of the present invention, the on-off valve itself is remarkably miniaturized by accommodating the valve drive part in the valve body, although the valve drive part is distributed to each on-off valve. The size of the switching valve device itself can be greatly reduced. Further, in the switching valve device of the present invention, since each on-off valve is provided with a valve driving unit independently, by controlling the operation of each valve driving unit, an arbitrary switching time difference is provided between the respective flow paths. It can be easily provided and its function is enhanced as compared with the conventional switching valve device. The present invention has excellent practical utility as described above.

【図面の簡単な説明】[Brief description of the drawings]

【図１】本発明の開閉弁の縦断面図である。FIG. 1 is a vertical sectional view of an on-off valve according to the present invention.

【図２】図１のＡ−Ａ視図である。FIG. 2 is an AA view of FIG.

【図３】図１のＢ−Ｂ視図である。3 is a BB view of FIG. 1. FIG.

【図４】本発明に係る開閉弁の他の実施態様を示す縦断
面図である。FIG. 4 is a vertical cross-sectional view showing another embodiment of the on-off valve according to the present invention.

【図５】本発明に係る開閉弁の第３実施態様を示す縦断
面図である。FIG. 5 is a vertical sectional view showing a third embodiment of the on-off valve according to the present invention.

【図６】ピエゾ素子とコネクターの取付状況の説明図で
ある。FIG. 6 is an explanatory diagram of a mounting state of a piezo element and a connector.

【図７】四方切換弁装置の流路系統図である。FIG. 7 is a flow path system diagram of a four-way switching valve device.

【図８】六方切換弁装置の流路系統図である。FIG. 8 is a flow path system diagram of a six-way switching valve device.

【図９】十方切換弁装置の流路系統図である。FIG. 9 is a flow path system diagram of a ten-way switching valve device.

【図１０】四方切換弁装置の平面寸法図である。FIG. 10 is a plan view of a four-way switching valve device.

【図１１】六方切換弁装置の平面寸法図である。FIG. 11 is a plan view of a hexagonal switching valve device.

【図１２】十方切換弁装置の平面寸法図である。FIG. 12 is a plan view of a ten-way switching valve device.

【図１３】四方切換弁装置の平面図である。FIG. 13 is a plan view of a four-way switching valve device.

【図１４】図１３のＡ−Ａ視図である。14 is a view taken along line AA of FIG.

【図１５】図１３のＢ−Ｂ視図である。FIG. 15 is a BB view of FIG. 13.

【図１６】従前の四方切換弁装置の流路系統図を示すも
のであり、（Ａ）は切換前の状態を、（Ｂ）は切換後の
状態を示すものである。FIG. 16 is a diagram showing a flow path system of a conventional four-way switching valve device, in which (A) shows a state before switching and (B) shows a state after switching.

【符号の説明】[Explanation of symbols]

Ａは切換弁装置、１はケース体、２はバルブボディ、２
ａは流体流入通路、２ｂは流体流出通路、２ｃはガイド
柱、３は弁室、３ａは弁座、４はピエゾ素子収納部、５
はステム作動体収納部、６はダイヤフラム弁体、７はダ
イヤフラム押えナット、７ａは中央の挿通孔、８はダイ
ヤフラム押え、９は流入継手、１０は流出継手、１１は
ステム、１２はステム作動体、１２ａはガイド孔、１３
は弾性体、１４はバネ押え、１５はバネ押え板、１５ａ
は取付用ねじ、１６は調整ねじ、１７はボール、１８は
ピエゾ素子、１９は連結金具、２０はスラストベアリン
グ、２１はボール、２２は調整ねじ、２３はバネ、２４
は調整ねじ、２５は埋込み型コネクター、２５ａはリー
ド線、２６・２８・３０・３２・３４は流体入口、２７
・２９・３１・３３・３５は流体出口、３６はＴ型継
手、３７は固定用治具、３８は取付けレール、３９は固
定爪、４０はレール固定用ナット。A is a switching valve device, 1 is a case body, 2 is a valve body, 2
a is a fluid inflow passage, 2b is a fluid outflow passage, 2c is a guide column, 3 is a valve chamber, 3a is a valve seat, 4 is a piezo element housing portion, 5
Is a stem actuating body accommodating portion, 6 is a diaphragm valve body, 7 is a diaphragm holding nut, 7a is a central insertion hole, 8 is a diaphragm holding body, 9 is an inflow joint, 10 is an outflow joint, 11 is a stem, and 12 is a stem working body. , 12a are guide holes, 13
Is an elastic body, 14 is a spring retainer, 15 is a spring retainer plate, and 15a
Is a mounting screw, 16 is an adjusting screw, 17 is a ball, 18 is a piezo element, 19 is a connecting fitting, 20 is a thrust bearing, 21 is a ball, 22 is an adjusting screw, 23 is a spring, 24
Is an adjusting screw, 25 is an embedded connector, 25a is a lead wire, 26, 28, 30, 32 and 34 are fluid inlets, 27
29, 31, 33, and 35 are fluid outlets, 36 is a T-shaped joint, 37 is a fixing jig, 38 is a mounting rail, 39 is a fixing claw, and 40 is a rail fixing nut.

Claims (6)

【特許請求の範囲】[Claims] 【請求項１】 流体流入通路、流体流出通路、弁座を有
する弁室及びピエゾ素子収納部を夫々設けたバルブボデ
ィと，弁座と対向状に配設され、弁室の上方を気密状に
閉鎖する金属薄板製のダイヤフラム弁体と，ダイヤフラ
ム弁体の上方に配設され、ダイヤフラム弁体を弁座側へ
押圧するステムと，断面形状がほぼＴ字形を呈してステ
ムの上方に配設され、その下端部をステムの上端部へ接
当若しくは連結させたステム作動体と，ステム作動体の
上方に配設され、弾性体を介してステム作動体を付勢す
るバネ押え板と，バルブボディのピエゾ素子収納部内に
縦向きに配設され、その一端をステム作動体にまた他端
をバルブボディに支持すると共にその作動により弾性体
の弾力に抗してステム作動体を駆動するピエゾ素子とよ
り構成した開閉弁。1. A valve body provided with a fluid inflow passage, a fluid outflow passage, a valve chamber having a valve seat, and a piezo element accommodating portion, respectively. The valve body is disposed so as to face the valve seat, and the upper portion of the valve chamber is hermetically sealed. A diaphragm valve body made of a thin metal plate to be closed, a stem arranged above the diaphragm valve body and pushing the diaphragm valve body toward the valve seat side, and a cross-sectional shape showing a substantially T-shape and arranged above the stem. , A stem actuating body whose lower end is abutted or connected to the upper end of the stem, a spring retainer plate disposed above the stem actuating body and biasing the stem actuating body via an elastic body, and a valve body And a piezo element that is vertically arranged in the piezo element housing part, supports one end of the stem actuation body and the other end of the valve body, and drives the stem actuation body against the elastic force of the elastic body by its operation. An on-off valve composed of 【請求項２】 弁室をバルブボディの中央部に設けると
共にピエゾ素子収納部を弁室の両側部に夫々設け、且つ
ピエゾ素子の両端部をスラストベアリングを介設してス
テム作動体とバルブボディへ支持する構成とした請求項
１に記載の開閉弁。2. A stem actuation body and a valve body, wherein a valve chamber is provided in a central portion of a valve body, piezo element housing portions are provided on both sides of the valve chamber, and both end portions of the piezo element are provided with thrust bearings. The on-off valve according to claim 1, wherein the on-off valve is configured to be supported by the on-off valve. 【請求項３】 弁室をバルブボディの中央部に設けると
共にピエゾ素子収納部を弁室の両側部に夫々設け、且つ
ピエゾ素子の両端部をボールを介設してステム作動体と
バルブボディへ支持する構成とした請求項１に記載の開
閉弁。3. A stem actuating body and a valve body, wherein a valve chamber is provided in a central portion of a valve body, piezo element storage portions are provided on both side portions of the valve chamber, and both end portions of the piezo element are provided with balls through a ball. The on-off valve according to claim 1, which is configured to support. 【請求項４】 バルブボディを四角筒状のケース体内へ
収納するようにした請求項１に記載の開閉弁。4. The on-off valve according to claim 1, wherein the valve body is housed in a case body having a rectangular tubular shape. 【請求項５】 流体流入通路、流体流出通路、弁座を有
する弁室及びピエゾ素子収納部を夫々設けたバルブボデ
ィと，弁座と対向状に配設され、弁室の上方を気密状に
閉鎖する金属薄板製のダイヤフラム弁体と，ダイヤフラ
ム弁体の上方に配設され、ダイヤフラム弁体を弁座側へ
押圧するステムと，断面形状がほぼＴ字形を呈してステ
ムの上方に配設され、その下端部をステムの上端部へ接
当若しくは連結させたステム作動体と，ステム作動体の
上方に配設され、弾性体を介してステム作動体を付勢す
るバネ押え板と，バルブボディのピエゾ素子収納部内に
縦向きに配設され、その一端をステム作動体にまた他端
をバルブボディに支持すると共にその作動時に弾性体の
弾力に抗してステム作動体を駆動するピエゾ素子とより
構成した偶数個の開閉弁を組み合せて一体とし、隣接す
る２個の開閉弁の流体流入通路同志を並列状に連通せし
めて流体入口とすると共に、前記２個の開閉弁の流体流
出通路同志を並列状に連通せしめて流体出口とした切換
弁装置。5. A valve body provided with a fluid inflow passage, a fluid outflow passage, a valve chamber having a valve seat and a piezo element accommodating portion, respectively, and the valve body is disposed to face the valve seat, and the upper part of the valve chamber is hermetically sealed. A diaphragm valve body made of a thin metal plate to be closed, a stem arranged above the diaphragm valve body and pushing the diaphragm valve body toward the valve seat side, and a cross-sectional shape showing a substantially T-shape and arranged above the stem. , A stem actuating body whose lower end is abutted or connected to the upper end of the stem, a spring retainer plate disposed above the stem actuating body and biasing the stem actuating body via an elastic body, and a valve body And a piezo element that is vertically arranged in the piezo element housing part and that supports one end of the stem actuation body and the other end of the valve body and that drives the stem actuation body against the elastic force of the elastic body during its operation. An even number of openings Combine the closing valves into one body, connect the fluid inflow passages of two adjacent on-off valves in parallel to form a fluid inlet, and connect the fluid outflow passages of the two on-off valves in parallel. A switching valve device that uses a fluid outlet. 【請求項６】 開閉弁の組付け数を４個、６個、８個、
又は１０個とした請求項５に記載の切換弁装置。6. The number of on-off valves assembled is 4, 6, 8,
Alternatively, the switching valve device according to claim 5, wherein the number is ten.
JP30450095A 1995-11-22 1995-11-22 Opening and closing valve and selector valve device using the same Pending JPH09144939A (en)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP30450095A JPH09144939A (en) 1995-11-22 1995-11-22 Opening and closing valve and selector valve device using the same

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP30450095A JPH09144939A (en) 1995-11-22 1995-11-22 Opening and closing valve and selector valve device using the same

Publications (1)

Publication Number Publication Date
JPH09144939A true JPH09144939A (en) 1997-06-03

Family

ID=17933785

Family Applications (1)

Application Number Title Priority Date Filing Date
JP30450095A Pending JPH09144939A (en) 1995-11-22 1995-11-22 Opening and closing valve and selector valve device using the same

Country Status (1)

Country Link
JP (1) JPH09144939A (en)

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
CN105333195A (en) * 2015-10-26 2016-02-17 无锡市圣科不锈钢气动自控阀门厂 Piezoelectric valve

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
CN105333195A (en) * 2015-10-26 2016-02-17 无锡市圣科不锈钢气动自控阀门厂 Piezoelectric valve

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