JPH09137900A - Piping for high purity chemical - Google Patents
Piping for high purity chemicalInfo
- Publication number
- JPH09137900A JPH09137900A JP7318598A JP31859895A JPH09137900A JP H09137900 A JPH09137900 A JP H09137900A JP 7318598 A JP7318598 A JP 7318598A JP 31859895 A JP31859895 A JP 31859895A JP H09137900 A JPH09137900 A JP H09137900A
- Authority
- JP
- Japan
- Prior art keywords
- pipe
- synthetic resin
- chemical resistance
- tube
- inner pipe
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Pending
Links
Landscapes
- Rigid Pipes And Flexible Pipes (AREA)
- Pipeline Systems (AREA)
Abstract
Description
【０００１】[0001]
【発明の属する技術分野】本発明は高純度の液状薬品を
使用箇所に供給するための配管として好適な耐薬品性で
かつ耐薬液透過性を有する配管に関する。BACKGROUND OF THE INVENTION 1. Field of the Invention The present invention relates to a pipe which is suitable as a pipe for supplying a high-purity liquid chemical to a place of use and has chemical resistance and chemical liquid permeation resistance.
【０００２】[0002]
【従来の技術】高純度液状薬品を、その使用箇所に供給
するための配管設備として、例えば、特公平５−５０６
４０号に開示された構造のものがある。図３はかかる構
造の配管設備であって、１は外管、２は内管、３は箱状
構造の分岐用ボックス、４は継手部分である。上記配管
設備において、１本もしくは複数本のふっ素樹脂製の内
管２は耐薬品性の合成樹脂から成る外管１内に挿通さ
れ、外管１は開閉自在箇所５を介して分岐用ボックス３
と一体的に連結して構成されている。分岐用ボックス３
内には、例えば、液止め１３、逆止弁１４が設けられ、
また内管２より漏出した液状薬品を誘導する管６、セン
サー８及びバルブ７等が取り付けられている。2. Description of the Related Art As a piping facility for supplying a high-purity liquid chemical to its place of use, for example, Japanese Patent Publication No. 5-506.
There is a structure disclosed in No. 40. FIG. 3 shows a piping facility having such a structure, in which 1 is an outer pipe, 2 is an inner pipe, 3 is a box-shaped branch box, and 4 is a joint portion. In the above piping equipment, one or a plurality of fluororesin inner pipes 2 are inserted into an outer pipe 1 made of a chemical resistant synthetic resin, and the outer pipe 1 is provided with a branching box 3 via an openable / closable portion 5.
It is configured by integrally connecting with. Box for branch 3
Inside, for example, a liquid stopper 13 and a check valve 14 are provided,
Further, a pipe 6, a sensor 8 and a valve 7 for guiding the liquid chemical leaked from the inner pipe 2 are attached.
【０００３】[0003]
【発明が解決しようとする課題】さて上述したような従
来の配管設備には下記の如き問題点を有する。 （１）内管と外管との間に隙間が生じるため、必然的に
外管の径が太くなり、従って狭い隙間への配管が困難で
ある。 （２）外管を形成する合成樹脂として、ＰＶＣ（塩化ビ
ニル樹脂）、ＰＶＤＦ（ふっ化ビニリデン樹脂）、ＰＦ
Ａ（四ふっ化エチレン−パーフルオロアルキルビニルエ
ーテル共重合体樹脂）等の硬質樹脂を使用しているため
可撓性に乏しく、配管が大がかりとなりやすい。 （３）内管を形成するふっ素樹脂の薬液透過性が比較的
大きいため、前記分岐用ボックス、開閉自在箇所、その
他の前記した設備が必要となり、装置全体が大型となっ
てかなりの空間を占有することとなり、設備コストもか
なりかかってしまう。The conventional piping equipment as described above has the following problems. (1) Since a gap is created between the inner pipe and the outer pipe, the diameter of the outer pipe inevitably becomes large, and thus it is difficult to pipe the narrow gap. (2) PVC (vinyl chloride resin), PVDF (vinylidene fluoride resin), PF as the synthetic resin forming the outer tube
Since a hard resin such as A (ethylene tetrafluoride-perfluoroalkyl vinyl ether copolymer resin) is used, the flexibility is poor and the piping tends to be large. (3) Since the chemical permeability of the fluororesin forming the inner tube is relatively large, the branch box, the openable and closable part, and the other facilities described above are required, and the entire device becomes large and occupies a considerable space. Therefore, the facility cost will be considerably increased.
【０００４】本発明の目的はかかる従来の問題点を解決
して構成簡単で、しかも小型かつ安価な耐薬液透過性に
優れた高純度薬品用配管を提供することにある。SUMMARY OF THE INVENTION It is an object of the present invention to solve the above problems of the prior art and to provide a high-purity chemical pipe which has a simple structure, is small in size, is inexpensive, and has excellent chemical liquid permeability.
【０００５】[0005]
【課題を解決するための手段】上記目的を達成するた
め、本発明の高純度薬品用配管は、耐薬品性を有する第
１の合成樹脂から成る高純度の薬品を流通させるための
内管と、該内管の外周に密着するように形成された耐薬
液透過性を有する第２の合成樹脂から成る外管と、を備
えたことを要旨としている。In order to achieve the above object, the high-purity chemical pipe of the present invention comprises an inner pipe for circulating a high-purity chemical consisting of a first synthetic resin having chemical resistance. And an outer tube made of a second synthetic resin having a chemical liquid permeation resistance and formed so as to come into close contact with the outer circumference of the inner tube.
【０００６】上述した本発明の配管において、前記外管
の肉厚が５μｍ〜３ｍｍの範囲内としてもよい。更に、
第１の合成樹脂としてＰＦＡを、第２の合成樹脂として
ＰＶＤＦ、塩化ビニリデン樹脂又はポリエチレンを用い
てもよい。In the above-mentioned piping of the present invention, the wall thickness of the outer tube may be in the range of 5 μm to 3 mm. Furthermore,
PFA may be used as the first synthetic resin, and PVDF, vinylidene chloride resin, or polyethylene may be used as the second synthetic resin.
【０００７】[0007]
【発明の実施の形態】本発明の実施の形態としては、図
１に示すように、耐薬品性を有する第１の合成樹脂、例
えば、ＰＦＡで内管２０を形成し、該内管２０の外周に
密着して、耐薬液透過性を有する第２の合成樹脂、例え
ば、ＰＶＤＦ、塩化ビニリデン樹脂又はポリエチレンで
外管２１を形成して成る。BEST MODE FOR CARRYING OUT THE INVENTION As an embodiment of the present invention, as shown in FIG. 1, an inner pipe 20 is formed from a first synthetic resin having chemical resistance, for example, PFA, and the inner pipe 20 is formed. The outer tube 21 is formed in close contact with the outer periphery by a second synthetic resin having chemical liquid resistance, such as PVDF, vinylidene chloride resin, or polyethylene.
【０００８】本発明の高純度薬品用配管は耐薬品性と耐
薬液透過性の両特性を兼備しており、しかも外管の肉厚
を、５μｍ〜３ｍｍ、好適には２５μｍ〜２ｍｍの範囲
とすることにより、配管全体の可撓性を損なわないよう
にすることができ、しかもエルボ、チーズ等の継手類が
不要となるので、全体構成は非常に簡単で、占有面積を
さほど必要とせず、更には経済性にも優れたものとな
る。The high purity chemical pipe of the present invention has both chemical resistance and chemical liquid permeation resistance, and the thickness of the outer pipe is 5 μm to 3 mm, preferably 25 μm to 2 mm. By doing so, it is possible not to impair the flexibility of the entire piping, and since elbows, joints such as cheese are unnecessary, the overall configuration is very simple, does not require much occupied area, In addition, the economy is excellent.
【０００９】[0009]
【実施例】以下図面に示す本発明の実施例を説明する。
図１は本発明の高純度薬品用配管の一実施例で、２０は
高純度の薬品を流通させるための内管であり、耐薬品性
を有する第１の合成樹脂から成る。２１は内管２０の外
周に密着して形成された外管で、耐薬液透過性を有する
第２の合成樹脂から成る。DETAILED DESCRIPTION OF THE PREFERRED EMBODIMENTS An embodiment of the present invention shown in the drawings will be described below.
FIG. 1 shows an embodiment of a pipe for high-purity chemicals of the present invention. Reference numeral 20 denotes an inner pipe for circulating a high-purity chemical, which is made of a first synthetic resin having chemical resistance. Reference numeral 21 denotes an outer tube which is formed in close contact with the outer circumference of the inner tube 20 and is made of a second synthetic resin having chemical liquid permeation resistance.
【００１０】内管２０を構成する耐薬品性を有する第１
の合成樹脂としては、例えば、ＰＴＦＥ（四ふっ化エチ
レン樹脂）、ＦＥＰ（四ふっ化エチレン−六ふっ化プロ
ピレン共重合体樹脂）、ＰＦＡ（四ふっ化エチレン−パ
ーフルオロアルキルビニルエーテル共重合体樹脂）、Ｐ
ＥＥＫ（ポリエーテルエーテルケトン）、ＰＰＳ（ポリ
フェニレンサルファイド）、ＰＥＳ（ポリエーテルサル
フォン）が使用されるが、使用液体が高純度薬品という
ことから中でもイオンの溶出が極めて小さいＰＦＡの使
用が望ましい。The first having chemical resistance which constitutes the inner pipe 20.
Examples of the synthetic resin include PTFE (ethylene tetrafluoride resin), FEP (ethylene tetrafluoride-propylene hexafluoride copolymer resin), PFA (ethylene tetrafluoride-perfluoroalkyl vinyl ether copolymer resin). , P
EEK (polyether ether ketone), PPS (polyphenylene sulfide), and PES (polyether sulfone) are used. However, since the liquid used is a high-purity chemical, it is preferable to use PFA with extremely small ion elution.
【００１１】また、外管２１を構成する耐薬液透過性を
有する第２の合成樹脂としては、例えば、ＰＶＤＦ（ふ
っ化ビニリデン樹脂）、塩化ビニリデン樹脂、ふっ化ビ
ニル樹脂、ポリエチレン、ポリエチレンテレフタレー
ト、ＰＣＴＦＥ（三ふっ化塩化エチレン樹脂）、ハイド
ロクロライドゴム、ポリアミド、ポリアセタールが使用
されるが、中でも成形性に優れ、かつ耐薬品性にも優れ
ているＰＶＤＦ、塩化ビニリデン樹脂、ポリエチレンの
使用が望ましい。Examples of the second synthetic resin having resistance to chemical permeation that constitutes the outer tube 21 include PVDF (vinylidene fluoride resin), vinylidene chloride resin, vinyl fluoride resin, polyethylene, polyethylene terephthalate, PCTFE. (Trifluoroethylene chloride resin), hydrochloride rubber, polyamide, and polyacetal are used. Among them, PVDF, vinylidene chloride resin, and polyethylene, which have excellent moldability and chemical resistance, are preferably used.
【００１２】外管２１の形成方法については、内管２０
と共に押出しで成形するか、外管２１をチューブにして
内管２０内に嵌挿するか、フィルムにして巻装するか、
あるいは外管２１となる熱収縮チューブを内管２０に被
せて熱で固着密着するか、または外管２１として第２の
合成樹脂を内管の外周にコーティングするなどにより成
形する方法がとられる。さらに、上記外管２１を構成す
る樹脂を複数用い、また形成方法も複数用いることによ
り多重管構造としてもよい。For the method of forming the outer tube 21, the inner tube 20
Together with extrusion, whether the outer tube 21 is made into a tube and fitted into the inner tube 20, or wound as a film,
Alternatively, a method may be used in which a heat-shrinkable tube serving as the outer tube 21 is covered on the inner tube 20 so as to be fixed and adhered by heat, or the outer tube 21 is molded by coating a second synthetic resin on the outer circumference of the inner tube. Furthermore, a multi-tube structure may be formed by using a plurality of resins forming the outer tube 21 and using a plurality of forming methods.
【００１３】実施例１ ＰＦＡと塩化ビニリデン樹脂を共に押出し成形すること
により、内径９．５ｍｍ、外径１２．０ｍｍのＰＦＡ製
の内管と、塩化ビニリデン樹脂で外径１２．７ｍｍの外
管から成る二重管を作製した。 実施例２ 内径９．５ｍｍ、外径１２．０ｍｍのＰＦＡ製の内管に
ポリエチレン製フィルム（厚さ１００μｍ）を螺旋状に
多重に巻き、熱融着して総外径１２．７ｍｍの外管を形
成した二重管を作製した。 比較例 内径９．５ｍｍ、外径１２．７ｍｍのＰＦＡチューブを
比較例として用いた。上記実施例及び比較例の管（チュ
ーブ）に対し、塩素ガス透過係数を図２に示す下記測定
方法で行った結果を表１に示す。EXAMPLE 1 PFA and vinylidene chloride resin were co-extruded to form an inner pipe made of PFA having an inner diameter of 9.5 mm and an outer diameter of 12.0 mm and an outer pipe made of vinylidene chloride resin having an outer diameter of 12.7 mm. A double tube consisting of Example 2 An outer tube having a total outer diameter of 12.7 mm was obtained by spirally winding a polyethylene film (100 μm in thickness) in a spiral manner on a PFA inner tube having an inner diameter of 9.5 mm and an outer diameter of 12.0 mm, and heat-sealing. A double tube having the above was formed. Comparative Example A PFA tube having an inner diameter of 9.5 mm and an outer diameter of 12.7 mm was used as a comparative example. Table 1 shows the results of the chlorine gas permeation coefficient measured by the following measuring method shown in FIG. 2 for the tubes of the above Examples and Comparative Examples.
【００１４】[0014]
【表１】 [Table 1]
【００１５】測定方法：前記実施例１，２及び比較例の
１０ｍの管（チューブ）２２に５kgf／cm2（＝３６８cm
Ｈｇ）の塩酸を流し、あらかじめこの管（チューブ）の
部分を密閉容器２３で囲んでおき、チューブ２２より容
器２３内に透過すると、Ｃｌ2が同容器内に入れておい
たＫＩ（ヨウ化カリウム）と反応してＩ2（ヨウ素）を
生成するので、これを水に溶かしてチオ硫酸ナトリウム
で滴定することにより、透過した塩素ガスの透過係数を
求めた。なお、２４は流量計、２５は薬液ポンプ、２
６，２７はバルブ、２８はＫＩを入れたトレーである。Measuring method: 5 kgf / cm 2 (= 368 cm) in the 10 m tube 22 of Examples 1 and 2 and Comparative Example.
Hg) hydrochloric acid is flowed, the portion of this tube (tube) is surrounded in advance by a closed container 23, and when it permeates into the container 23 through the tube 22, Cl 2 is stored in the same container (potassium iodide). ) To produce I 2 (iodine), this was dissolved in water and titrated with sodium thiosulfate to determine the permeation coefficient of the permeated chlorine gas. In addition, 24 is a flow meter, 25 is a chemical pump, 2
6 and 27 are valves, and 28 is a tray containing KI.
【００１６】表１に示すように本発明の如く内管２０の
外側に塩化ビニリデン樹脂等の耐ガス透過性に優れた合
成樹脂を外管２１として設けることにより、塩素ガス透
過係数を塩化ビニリデン樹脂の場合３０℃で１／１００
０以下、８０℃で約１／１００とすることができた。外
管としてポリエチレンを用いた場合でも、３０℃、８０
℃とも約１／７とすることができた。As shown in Table 1, the outer tube 21 is provided with a synthetic resin having excellent gas permeation resistance such as vinylidene chloride resin on the outside of the inner tube 20 as in the present invention. 1/100 at 30 ℃
It was 0 or less, and could be about 1/100 at 80 ° C. Even when polyethylene is used as the outer tube, 30 ° C, 80
It was possible to set the temperature to about 1/7.
【００１７】[0017]
【発明の効果】以上説明したように本発明によれば、耐
薬品性及び耐薬液透過性の両特性に優れた配管を得るこ
とができ、特に半導体製造プロセス等に多く用いられる
高純度薬品用配管として好適であり、配管における純度
の低下なしに、簡単かつ経済性に優れた配管を提供で
き、またこの配管を用いることにより半導体製造工場等
のクリーンルーム内の透過ガスによる汚染防止に効果と
なし得る。As described above, according to the present invention, it is possible to obtain a pipe having both excellent chemical resistance and chemical liquid permeation resistance, and particularly for high purity chemicals often used in semiconductor manufacturing processes and the like. It is suitable as a pipe, and it can provide a pipe that is simple and economical without deteriorating the purity of the pipe. By using this pipe, there is no effect in preventing contamination by permeated gas in a clean room such as a semiconductor manufacturing factory. obtain.
【図１】本発明の一実施例を示す斜視図である。FIG. 1 is a perspective view showing an embodiment of the present invention.
【図２】本発明の実施例と比較例の測定方法を示す図で
ある。FIG. 2 is a diagram showing a measuring method of an example of the present invention and a comparative example.
【図３】従来の配管設備を示す説明図である。FIG. 3 is an explanatory diagram showing a conventional piping facility.
２０ 内管 ２１ 外管 20 inner tube 21 outer tube
───────────────────────────────────────────────────── フロントページの続き (72)発明者 我部山 民樹 千葉県千葉市美浜区中瀬１−７−１ 住友 ケミカルエンジニアリング株式会社内 (72)発明者 作間 富二夫 千葉県千葉市美浜区中瀬１−７−１ 住友 ケミカルエンジニアリング株式会社内 ─────────────────────────────────────────────────── ─── Continuation of front page (72) Inventor Tamaki Gabeyama 1-7-1 Nakase, Mihama-ku, Chiba-shi, Chiba Sumitomo Chemical Engineering Co., Ltd. (72) Tomoji Sakuma Nakase, Nakase, Mihama-ku, Chiba-shi, Chiba -7-1 Sumitomo Chemical Engineering Co., Ltd.
Claims (3)
る高純度の薬品を流通させるための内管と、該内管の外
周に密着するように形成された耐薬液透過性を有する第
２の合成樹脂から成る外管と、を備えたことを特徴とす
る高純度薬品用配管。1. An inner tube for circulating a high-purity chemical composed of a first synthetic resin having chemical resistance, and a chemical-liquid-permeating member formed so as to be in close contact with the outer circumference of the inner tube. An outer pipe made of synthetic resin of 2, and a pipe for high-purity chemicals.
内としたことを特徴とする請求項１に記載の高純度薬品
用配管。2. The pipe for high-purity chemicals according to claim 1, wherein the wall thickness of the outer pipe is within a range of 5 μm to 3 mm.
合成樹脂がＰＶＤＦ、塩化ビニリデン樹脂又はポリエチ
レンであることを特徴とする請求項１又は２に記載の高
純度薬品用配管。3. The high-purity chemical pipe according to claim 1, wherein the first synthetic resin is PFA and the second synthetic resin is PVDF, vinylidene chloride resin or polyethylene.
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP7318598A JPH09137900A (en) | 1995-11-13 | 1995-11-13 | Piping for high purity chemical |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP7318598A JPH09137900A (en) | 1995-11-13 | 1995-11-13 | Piping for high purity chemical |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| JPH09137900A true JPH09137900A (en) | 1997-05-27 |
Family
ID=18100931
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP7318598A Pending JPH09137900A (en) | 1995-11-13 | 1995-11-13 | Piping for high purity chemical |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPH09137900A (en) |
Cited By (4)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JP2006130909A (en) * | 2004-10-04 | 2006-05-25 | Asahi Organic Chem Ind Co Ltd | Piping member made of multi-layer coated propylene resin |
| WO2006095857A1 (en) * | 2005-03-10 | 2006-09-14 | Daikin Industries, Ltd. | Chlorotrifluoroethylene copolymer containing laminate and process for production thereof |
| JPWO2005047747A1 (en) * | 2003-11-14 | 2007-11-29 | ダイキン工業株式会社 | Fluid transport pipe, semiconductor manufacturing line system, and liquid crystal panel manufacturing line system |
| US8747973B2 (en) | 2004-04-13 | 2014-06-10 | Daikin Industries, Ltd. | Fluid transfer member |
-
1995
- 1995-11-13 JP JP7318598A patent/JPH09137900A/en active Pending
Cited By (9)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPWO2005047747A1 (en) * | 2003-11-14 | 2007-11-29 | ダイキン工業株式会社 | Fluid transport pipe, semiconductor manufacturing line system, and liquid crystal panel manufacturing line system |
| JP4678303B2 (en) * | 2003-11-14 | 2011-04-27 | ダイキン工業株式会社 | Fluid transport pipe, semiconductor manufacturing line system, and liquid crystal panel manufacturing line system |
| US8747973B2 (en) | 2004-04-13 | 2014-06-10 | Daikin Industries, Ltd. | Fluid transfer member |
| JP2006130909A (en) * | 2004-10-04 | 2006-05-25 | Asahi Organic Chem Ind Co Ltd | Piping member made of multi-layer coated propylene resin |
| WO2006095857A1 (en) * | 2005-03-10 | 2006-09-14 | Daikin Industries, Ltd. | Chlorotrifluoroethylene copolymer containing laminate and process for production thereof |
| EP1859934A1 (en) * | 2005-03-10 | 2007-11-28 | Daikin Industries, Ltd. | Chlorotrifluoroethylene copolymer containing laminate and process for production thereof |
| JPWO2006095857A1 (en) * | 2005-03-10 | 2008-08-21 | ダイキン工業株式会社 | Chlorotrifluoroethylene copolymer-containing laminate and method for producing the same |
| EP1859934A4 (en) * | 2005-03-10 | 2011-08-24 | Daikin Ind Ltd | Chlorotrifluoroethylene copolymer containing laminate and process for production thereof |
| JP4816639B2 (en) * | 2005-03-10 | 2011-11-16 | ダイキン工業株式会社 | Chlorotrifluoroethylene copolymer-containing laminate and method for producing the same |
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