JPH09113533A - Acceleration sensor - Google Patents
Acceleration sensorInfo
- Publication number
- JPH09113533A JPH09113533A JP26750595A JP26750595A JPH09113533A JP H09113533 A JPH09113533 A JP H09113533A JP 26750595 A JP26750595 A JP 26750595A JP 26750595 A JP26750595 A JP 26750595A JP H09113533 A JPH09113533 A JP H09113533A
- Authority
- JP
- Japan
- Prior art keywords
- piezoelectric element
- support
- side surfaces
- acceleration sensor
- output terminal
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Withdrawn
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- Measuring Fluid Pressure (AREA)
Abstract
Description
【0001】[0001]
【発明の属する技術分野】本発明は圧電素子を用いた二
軸検知の片持ち梁型の加速度センサに関するものであ
る。BACKGROUND OF THE INVENTION 1. Field of the Invention The present invention relates to a biaxial detection cantilever type acceleration sensor using a piezoelectric element.
【0002】[0002]
【従来の技術】図11,図12は従来の二軸の圧電型の
加速度センサの構造を示しており、この図示する従来例
では、一次成形体であって圧電素子1を支持固定する支
持体2’は上面が開口し、両側面から出力端子6a,6
bをインサート成形により内部の空所10’内に貫通さ
せている。そして出力端子6a,6bを貫通させた両側
面に直交する一側面には上端が開口した溝11’を貫通
させ、この溝11’を介して圧電素子1の先端部を空所
10’内に臨ませてある。2. Description of the Related Art FIGS. 11 and 12 show the structure of a conventional biaxial piezoelectric acceleration sensor. In the illustrated conventional example, a support body for supporting and fixing a piezoelectric element 1 is a primary molded body. The upper surface of 2'is open and the output terminals 6a, 6
b is inserted into the inner space 10 'by insert molding. Then, a groove 11 'having an open upper end is penetrated through one side surface orthogonal to both side surfaces through which the output terminals 6a, 6b are penetrated, and the tip portion of the piezoelectric element 1 is inserted into the space 10' through this groove 11 '. I am facing.
【0003】空所10’内には圧電素子1を傾斜させて
支えるためのテーパを設けたリブ17a、17bを両側
に設けており、空所10’内に挿入された圧電素子1の
一端部の下向きの側面と、これに対応する出力端子6a
の先端部上面との間に形成される凹部に銀ペースト20
a’を注入塗布して両者を電気的に接続し、また圧電素
子1の一端部の上向きの側面とこれに対応する出力端子
6bの上面とにかけて銀ペースト20b’を注入塗布し
て両者の間を電気的に接続し、更に圧電素子1及び銀ペ
ースト20a’,20b’を覆うように接着剤21’を
塗布注入して圧電素子1を固定している。Ribs 17a and 17b provided with taper for inclining and supporting the piezoelectric element 1 are provided on both sides in the cavity 10 ', and one end of the piezoelectric element 1 inserted in the cavity 10' is provided. Downward side surface and the corresponding output terminal 6a
The silver paste 20 in the recess formed between the upper surface of the tip of the
a'is injected and applied to electrically connect the two, and silver paste 20b 'is applied and applied between the upward side surface of one end of the piezoelectric element 1 and the corresponding upper surface of the output terminal 6b. Are electrically connected, and an adhesive 21 ′ is applied and injected so as to cover the piezoelectric element 1 and the silver pastes 20a ′ and 20b ′, and the piezoelectric element 1 is fixed.
【0004】[0004]
【発明が解決しようとする課題】ところで上記の構造の
従来例では、スライドコアの抜き等の金型構造上制約で
リブ17a,17bを形成する場合、その位置をずらせ
る必要があり、しかも上面開口の溝11’を介して圧電
素子1を空所10’に挿入する構造であるため、圧電素
子1の上部に接着剤21’が多く漏れ出し、そのため圧
電素子1の固定位置がばらついて電圧感度が製品間でば
らつくという問題がある。また圧電素子1の上、下位置
がばらついたり、圧電素子1が上、下方向に傾くなどの
問題が生じ、これまた電圧感度のばらつきを招いたり、
シールド用の金属ケース内に収納する際に金属ケースに
圧電素子1が接触する等の問題があった。By the way, in the conventional example of the above structure, when the ribs 17a and 17b are formed due to the restriction of the die structure such as the slide core removal, the positions of the ribs 17a and 17b need to be shifted, and the upper surface of the ribs 17a and 17b must be displaced. Since the piezoelectric element 1 is inserted into the space 10 ′ through the groove 11 ′ of the opening, a large amount of the adhesive 21 ′ leaks to the upper portion of the piezoelectric element 1, and the fixing position of the piezoelectric element 1 varies, which causes a voltage difference. There is a problem that the sensitivity varies among products. Further, there arises a problem that the upper and lower positions of the piezoelectric element 1 vary, the piezoelectric element 1 tilts upward and downward, and this also causes variation in voltage sensitivity.
There is a problem that the piezoelectric element 1 comes into contact with the metal case when it is housed in the metal case for shielding.
【0005】更に出力端子6a,6bの上面の位置を同
じ高さとしているため、銀ペースト20a’,20b’
の注入容積が図12に示すように異なり、特に圧電素子
1の下向きの側面に対する銀ペースト20a’の接合面
積が狭くなって、熱や、外力に対する剥離強度が低くな
る問題や、圧電素子1の上面と出力端子6aの先端部の
上面との間の距離が小さくなって圧電素子1の上面に回
った銀ペースト20a’により圧電素子1の上部異極間
での短絡発生が生じるという問題があった。Further, since the positions of the upper surfaces of the output terminals 6a and 6b are set to the same height, the silver pastes 20a 'and 20b' are formed.
12, the bonding area of the silver paste 20a ′ on the downward side surface of the piezoelectric element 1 is narrowed, and the peeling strength against heat and external force is reduced. There is a problem that the distance between the upper surface and the upper surface of the tip portion of the output terminal 6a becomes small and the silver paste 20a ′ that has spread to the upper surface of the piezoelectric element 1 causes a short circuit between the upper and lower electrodes of the piezoelectric element 1. It was
【0006】本発明は上記問題点に鑑みて為されたもの
で、請求項1の発明の目的とするところは、圧電素子を
支持体で固定する際に用いる接着剤が圧電素子上へ漏れ
出すのを防ぐことができ、また圧電素子の上、下位置が
ばらつかず安定した特性が得られる加速度センサを提供
するにある。また請求項2の発明の目的とするところ
は、請求項1の発明の目的に加えて、圧電素子の固定が
容易に行える加速度センサを提供するにある。The present invention has been made in view of the above problems, and it is an object of the invention of claim 1 that an adhesive used for fixing a piezoelectric element with a support leaks out onto the piezoelectric element. Another object of the present invention is to provide an acceleration sensor which can prevent the above-mentioned phenomenon and can obtain stable characteristics without the upper and lower positions of the piezoelectric element being varied. In addition to the object of the invention of claim 1, an object of the invention of claim 2 is to provide an acceleration sensor capable of easily fixing a piezoelectric element.
【0007】請求項3の発明の目的とするところは、圧
入固定でありながら圧電素子の傾斜角が正確に得られる
加速度センサを提供するにある。請求項4の発明の目的
とするところは、圧電素子の両側面と各出力端子との接
続を行う導電性接着剤の接着面積を下向きの側面側でも
上向きの側面側と略同じ広さとして熱や外力に対して剥
離強度のばらつきが少なく且つ剥離強度を大きくして安
定した特性が得られ、また圧電素子の上部の異極間の短
絡発生が起こりにくい加速度センサを提供するにある。An object of the invention of claim 3 is to provide an acceleration sensor in which the tilt angle of the piezoelectric element can be accurately obtained while being press-fitted and fixed. The object of the invention of claim 4 is to make the bonding area of the conductive adhesive for connecting the both side surfaces of the piezoelectric element and each output terminal substantially the same as that of the downward side surface side and the upward side surface side. Another object of the present invention is to provide an acceleration sensor in which variation in peel strength with respect to external force and external force is small, peel strength is increased, stable characteristics are obtained, and a short circuit between different poles on the upper portion of a piezoelectric element does not easily occur.
【0008】[0008]
【課題を解決するための手段】上記目的を達成するため
に請求項1の発明では、断面矩形の圧電素子の一端部を
支持固定する合成樹脂成形品からなる支持体を略直方体
に形成し、該支持体の内部に設けてある空所内に支持体
の両側の側面より貫通させた出力端子の先端を臨ませる
とともに、前記両側面に直交する支持体の一側面に外部
から前記空所に貫通し圧電素子の両側面が傾くようにし
て圧電素子の一端部を挿入する横孔を開口し、横孔を介
して挿入されて空所内に臨んだ圧電素子の一端部を接着
固定し且つ圧電素子の両側面に夫々に対応した前記出力
端子の先端を電気的に接続したことを特徴とし、横孔に
挿入した圧電素子の上部部位に支持体の壁が存在するこ
とになって、この壁により空所内に注入した接着剤が圧
電素子の上部へ回り込むのを防止することができるとと
もに、圧電素子の上下方向の動きを防止でき、その結果
圧電素子の固定端の位置のばらつきが無くなり、圧電素
子の特性を安定化させることができる。In order to achieve the above object, according to the invention of claim 1, a support made of a synthetic resin molded product for supporting and fixing one end of a piezoelectric element having a rectangular cross section is formed into a substantially rectangular parallelepiped. The tip of the output terminal penetrating from both sides of the support is exposed in the space provided inside the support, and the one side of the support orthogonal to the both sides is penetrated from the outside to the space. Then, a lateral hole into which one end of the piezoelectric element is inserted is opened so that both side surfaces of the piezoelectric element are inclined, and one end of the piezoelectric element that is inserted through the lateral hole and faces the cavity is fixed by adhesion. It is characterized in that the corresponding ends of the output terminals are electrically connected to both side surfaces of the support, and the wall of the support body exists at the upper portion of the piezoelectric element inserted in the lateral hole. The adhesive injected into the void will spread to the top of the piezoelectric element. It is possible to prevent the writing of, can prevent the vertical movement of the piezoelectric element, as a result there is no variation in the position of the fixed end of the piezoelectric element, it is possible to stabilize the characteristics of the piezoelectric element.
【0009】請求項2の発明では、請求項1の発明にお
いて、前記横孔の内面には前記圧電素子の外周面に圧接
するリブを設けたことを特徴とし、リブにより横孔内に
圧電素子を圧入挿入することができ、そのため圧電素子
の固定が容易にできる。請求項3の発明では、請求項2
の発明において、前記圧電素子の傾斜角を設定する前記
横孔の2つの内面以外の内面に前記リブを設けたので、
圧電素子の傾斜角を正確に得ることができる。According to a second aspect of the present invention, in the first aspect of the present invention, a rib is provided on the inner surface of the lateral hole, the rib being in pressure contact with the outer peripheral surface of the piezoelectric element. Can be press-fitted and inserted, so that the piezoelectric element can be easily fixed. In the invention of claim 3, claim 2
In the invention, since the ribs are provided on the inner surface other than the two inner surfaces of the lateral hole that sets the inclination angle of the piezoelectric element,
The tilt angle of the piezoelectric element can be accurately obtained.
【0010】請求項4の発明では、前記圧電素子の下向
きの側面に対応する出力端子の先端を、上向きの側面に
対応する出力端子の先端よりも高さ位置が下方となるよ
うに当該出力端子の先部を折曲形成し、圧電素子の両側
面と夫々に対応する出力端子との間を導電性接着剤で電
気的に接続したことを特徴とし、圧電素子の両側面での
導電性接着剤の接着面積を略同じ広さとすることがで
き、そのため外力や熱に対する剥離強度のばらつきが少
なく安定した特性が得られる。According to a fourth aspect of the present invention, the tip of the output terminal corresponding to the downward side surface of the piezoelectric element is lower than the tip of the output terminal corresponding to the upward side surface of the output terminal. The front end of the piezoelectric element is bent, and both sides of the piezoelectric element and the corresponding output terminals are electrically connected with a conductive adhesive. The adhesive areas of the agents can be made substantially the same, and therefore, stable characteristics can be obtained with little variation in peel strength against external force or heat.
【0011】[0011]
【発明の実施の形態】以下、本発明の実施形態を図面を
参照して説明する。図2は本発明の実施形態の一部破断
省略した概略の斜視図を示しており、本実施形態は、二
枚の圧電セラミック片を接合したバイモルフ型圧電素子
からなる圧電素子1の一端部を合成樹脂成形品からなる
支持体2により支持固定するとともに、この圧電素子1
と支持体2とを含めてシールド用の金属ケース3内に収
納し、更にこの金属ケース3ごとインサート成形により
耐熱性の液晶樹脂からなるケース4に収納し、ケース4
の両側に金属ケース4に接続されたグランド端子5、5
と、支持体2内で圧電素子1に接続され、金属ケース3
に対して絶縁された正、負の出力端子6a,6bとを露
出させたもので、圧電素子1をケース4の底面(支持体
2の底面)に対して直交する垂直軸に対して所定角度だ
け傾斜させて支持体2に支持固定することにより、ケー
ス4の底面に対して平行する軸Xと垂直な軸Yの二つの
方向の加速度を検出することができる高感度の片持ち梁
型の加速度センサを構成している。Embodiments of the present invention will be described below with reference to the drawings. FIG. 2 shows a schematic perspective view of the embodiment of the present invention with a part thereof omitted. In the present embodiment, one end portion of a piezoelectric element 1 composed of a bimorph type piezoelectric element in which two piezoelectric ceramic pieces are joined is shown. The piezoelectric element 1 is supported and fixed by a support 2 made of a synthetic resin molded product.
And the support 2 are housed in a metal case 3 for shielding, and the metal case 3 is housed in a case 4 made of heat-resistant liquid crystal resin by insert molding.
Ground terminals 5, 5 connected to the metal case 4 on both sides of
Is connected to the piezoelectric element 1 in the support 2, and the metal case 3
The positive and negative output terminals 6a and 6b insulated from each other are exposed, and the piezoelectric element 1 has a predetermined angle with respect to a vertical axis orthogonal to the bottom surface of the case 4 (bottom surface of the support body 2). The cantilever type of high sensitivity capable of detecting accelerations in two directions of an axis X parallel to the bottom surface of the case 4 and an axis Y perpendicular to the bottom surface of the case 4 by inclining only and supporting and fixing to the support 2. It constitutes an acceleration sensor.
【0012】ここで主要な構成要件である圧電素子1と
支持体2との関係を更に説明する。図1は本実施形態の
圧電素子1と支持体2との概念的な関係を示すものであ
る。支持体2は外形が略直方体の樹脂成形品であって、
上面が開口した空所10を内部に形成し、この空所10
内に先端が臨む出力端子6a,6bをインサート成形に
より両側面に貫通させている。またこの両側面に対して
直交する一側面に断面矩形で図において上下方向の軸に
対して傾斜させた横孔11を貫通形成してあり、この横
孔11を介して断面矩形の圧電素子1の一端部を傾斜さ
せた状態で挿入させてその一端部を空所10内に臨ま
せ、空所内10で圧電素子1の両側面と夫々に対応する
出力端子6a,6bとを電気的に接続するとともに接着
固定している。Here, the relationship between the piezoelectric element 1 and the support 2 which is a main constituent element will be further described. FIG. 1 shows a conceptual relationship between the piezoelectric element 1 and the support 2 of this embodiment. The support 2 is a resin molded product whose outer shape is a substantially rectangular parallelepiped,
A void 10 having an open upper surface is formed inside, and the void 10
The output terminals 6a and 6b, the ends of which are exposed to the inside, are penetrated through both sides by insert molding. Further, a lateral hole 11 having a rectangular cross section and inclined with respect to an axis in the vertical direction in the drawing is formed through one side surface orthogonal to the both side surfaces, and the piezoelectric element 1 having a rectangular cross section is formed through the lateral hole 11. One end of the piezoelectric element 1 is inserted in a tilted state so that the one end faces the inside of the void 10, and in the void 10 both side surfaces of the piezoelectric element 1 and the corresponding output terminals 6a, 6b are electrically connected. It is also fixed by adhesion.
【0013】図3乃至図6は出力端子6a,6bをイン
サートして成形した支持体2の上面図、正面図、断面
図、側面図を夫々示しており、支持体2は図7に示すよ
うに予め出力端子6a,6b及びグランド端子5,5を
金属フープ材7を打ち抜いて形成し、この形成後出力端
子6a,6bの対向する先端部間にインサート成形され
るものである。3 to 6 are a top view, a front view, a sectional view and a side view, respectively, of a support body 2 formed by inserting the output terminals 6a and 6b, and the support body 2 is as shown in FIG. The output terminals 6a and 6b and the ground terminals 5 and 5 are previously formed by punching out the metal hoop material 7, and after this formation, insert molding is performed between the opposed tip portions of the output terminals 6a and 6b.
【0014】支持体2は横孔11の開口した一側面を前
側とすると、両側面の中央に前端よりやや後方から後端
にかけて突出部12を一体に形成し、この突出部12の
側面より出力端子6a,6bを突出させている。突出部
12は金属ケース3の後部に設けた切欠溝(図示せず)
には後方より嵌まり、金属ケース3に接触することなく
出力端子6a,6bを外部に突出させるとともに金属ケ
ース3の位置決めとなるものである。When one side surface of the support body 2 in which the lateral hole 11 is opened is defined as a front side, a projecting portion 12 is integrally formed in the center of both side surfaces from a slightly rearward side to a rearward side, and the side surface of the projecting portion 12 outputs. The terminals 6a and 6b are projected. The protruding portion 12 is a notch groove (not shown) provided in the rear portion of the metal case 3.
The output terminals 6a and 6b are projected to the outside without contacting the metal case 3, and the metal case 3 is positioned.
【0015】そして支持体2の後端には支持体2よりも
外周方向に突出した後端部2aを形成し、金属ケース3
のストッパと機能する。横孔11は図8に示すように断
面形状が矩形であって、その4つの内面の内の上向きの
二つの傾斜面a,bが挿入される圧電素子1の下向きと
なった側面と下面とが当接して圧電素子1の傾斜角(例
えば25°)を決める面となり、残りの下向きの二つの
傾斜面c,dには圧電素子1の上向きの側面と、上面と
に圧接する断面が半円状のリブ13a,13bを挿入方
向に形成しており、このリブ13a,13bによりがた
つきなく圧電素子1を横孔11に圧入することができる
ようになっている。At the rear end of the support body 2, a rear end portion 2a projecting in the outer peripheral direction from the support body 2 is formed.
Function as a stopper. As shown in FIG. 8, the lateral hole 11 has a rectangular cross-sectional shape, and has two downward facing side surfaces and a lower surface of the piezoelectric element 1 into which two upward facing inclined surfaces a and b are inserted. Contact each other to form a surface that determines the inclination angle (for example, 25 °) of the piezoelectric element 1, and the other two downward-facing inclined surfaces c and d have a cross-section that is in pressure contact with the upper side surface of the piezoelectric element 1 and the upper surface. Circular ribs 13a and 13b are formed in the insertion direction, and the piezoelectric element 1 can be press-fitted into the lateral hole 11 without rattling due to the ribs 13a and 13b.
【0016】空所10の底部には、傾斜した状態で挿入
された圧電素子1の下面と下向き傾斜面とを支える面1
0a,10bを上記面a,bに連続して形成するととも
に、圧電素子1の下面を支える面10aの中央部には面
10aの幅方向に横断する凹溝14aを形成してある。
この凹溝14aは空所10の一側面に沿って上下方向に
形成された凹溝14bに連結されている。尚孔16はイ
ンサート時の押えピン抜け孔である。出力端子6a,6
bの支持体1の両側面から突出する高さ位置は同じ高さ
であるが、空所10内では圧電素子1の下向き傾斜面と
なる側面に対応する出力端子6aの先端を出力端子6b
の先端位置より下方位置となるように出力端子6aの先
端部を折り曲げ形成して、夫々の出力端子6a,6bを
空所10内に臨ましている。また空所10内に臨んだ出
力端子6a,6bの先端部の上面には凹部15を夫々形
成している。図9は凹部15を設けた出力端子6aの先
端部の斜視図である。At the bottom of the cavity 10, a surface 1 for supporting the lower surface of the piezoelectric element 1 inserted in an inclined state and the downwardly inclined surface.
0a and 10b are continuously formed on the surfaces a and b, and a groove 14a is formed in the center of the surface 10a that supports the lower surface of the piezoelectric element 1 so as to cross the width direction of the surface 10a.
The groove 14a is connected to a groove 14b formed in the vertical direction along one side surface of the space 10. The hole 16 is a holding pin removal hole at the time of insertion. Output terminals 6a, 6
Although the height positions of the b projecting from both side surfaces of the support body 1 are the same, the tip of the output terminal 6a corresponding to the side surface of the piezoelectric element 1 which is the downward inclined surface in the space 10 is connected to the output terminal 6b.
The tip of the output terminal 6a is bent and formed so as to be located below the tip of the output terminal 6a, and the output terminals 6a and 6b are exposed in the space 10. Recesses 15 are formed on the upper surfaces of the tips of the output terminals 6a and 6b facing the space 10. FIG. 9 is a perspective view of the tip of the output terminal 6a provided with the recess 15.
【0017】而して圧電素子1を支持体2に固定するに
当たっては出力端子6a,6bやグランド端子5、5を
金属フープ材より分離する前に、一端部を横孔11にリ
ブ13a,13bを利用して圧電素子1の一端部を圧入
挿入させ、その一端部を空所10内に臨ませる。次に図
10に示すように導電性接着剤である銀ペース20aを
圧電素子1の下向きの側面の上部と出力端子6aの先端
部とで形成される凹み部9に空所10の上面開口より注
入塗布して出力端子6aと圧電素子1の下向きの側面と
の間を銀ペースト20aで電気的に接続し、また出力端
子6bの先端部の上面から圧電素子1の上向き側面と凹
所10の面10aの上端より立ち上がった壁とで形成さ
れる凹み部8にかけて銀ペースト20bを注入塗布して
圧電素子1の上向き側面と出力端子6bとを銀ペースト
20bで電気的に接続する。この際出力端子6aの高さ
位置を出力端子6bの高さ位置よりも低くしていること
により、出力端子6aと圧電素子1の下向きの側面との
接着面積を出力端子6bと圧電素子1の上向きの側面と
の接着面積と略同じ広さになり、外力や熱に対する銀ペ
ーストの剥離強度のばらつきが少なく安定した特性が得
られる。また各出力端子6a,6bの凹部15に銀ペー
スト20a,20bが入るため更に剥離強度が高くな
る。When fixing the piezoelectric element 1 to the support 2, the ribs 13a and 13b are formed in the lateral hole 11 at one end before the output terminals 6a and 6b and the ground terminals 5 and 5 are separated from the metal hoop material. Using, the one end of the piezoelectric element 1 is press-fitted and inserted, and the one end is exposed in the space 10. Next, as shown in FIG. 10, a silver paste 20a, which is a conductive adhesive, is inserted into the recess 9 formed by the upper portion of the downward side surface of the piezoelectric element 1 and the tip of the output terminal 6a from the upper opening of the void 10. By injection coating, the output terminal 6a and the downward side surface of the piezoelectric element 1 are electrically connected by the silver paste 20a, and the upward side surface of the piezoelectric element 1 and the recess 10 are formed from the upper surface of the tip of the output terminal 6b. The silver paste 20b is injected and applied to the recess 8 formed by the wall rising from the upper end of the surface 10a to electrically connect the upward side surface of the piezoelectric element 1 and the output terminal 6b with the silver paste 20b. At this time, the height position of the output terminal 6a is set lower than the height position of the output terminal 6b, so that the adhesion area between the output terminal 6a and the downward side surface of the piezoelectric element 1 is made smaller than that of the output terminal 6b and the piezoelectric element 1. The area is almost the same as the area of adhesion to the side surface facing upward, and stable characteristics can be obtained with little variation in peel strength of the silver paste against external force or heat. Further, since the silver pastes 20a and 20b enter the concave portions 15 of the output terminals 6a and 6b, the peeling strength is further increased.
【0018】この銀ペースト20a,20bの注入塗布
後、例えばエポキシ樹脂系の接着剤21を上面開口より
注入する。この際凹溝14bと凹溝14aとを介して接
着剤21が圧電素子1の下面に回り込むことになり、こ
のため銀ペースト20a,20bが毛細管現象で回り込
んでも両ペースト20a,20bを凹溝14及びその内
部の接着剤21により分断して連結を防止する。After the silver pastes 20a and 20b are applied and applied, for example, an epoxy resin adhesive 21 is injected from the top opening. At this time, the adhesive 21 wraps around the lower surface of the piezoelectric element 1 via the groove 14b and the groove 14a. Therefore, even if the silver pastes 20a, 20b wrap around by the capillary phenomenon, the paste 20a, 20b is not grooved. 14 and the adhesive 21 inside thereof are used to divide and prevent connection.
【0019】その後接着剤21及び銀ペースト20a,
20bのバインダーが硬化することにより圧電素子1が
出力端子6a,6bに電気的に接続され、また空所10
内で固定されることになる。また圧電素子1を支持体2
の横孔11に圧入挿入したことにより、圧電素子1の上
部にも支持体2の壁が存在することになってこの壁によ
り接着剤21が圧電素子1の上部に回り込むのを防ぎ、
固定端の位置のばらつきを防止する。同時に上記壁が圧
電素子1の重力方向の傾きを押えて圧電素子1の電圧感
度のばらつきを無くしている。After that, the adhesive 21 and the silver paste 20a,
When the binder of 20b is cured, the piezoelectric element 1 is electrically connected to the output terminals 6a and 6b, and the space 10
It will be fixed inside. The piezoelectric element 1 is attached to the support 2
Since the wall of the support body 2 is present also on the upper portion of the piezoelectric element 1 by being press-fitted and inserted into the lateral hole 11 of this, the wall prevents the adhesive 21 from wrapping around the upper portion of the piezoelectric element 1,
Prevents variation in the position of the fixed end. At the same time, the wall suppresses the inclination of the piezoelectric element 1 in the direction of gravity and eliminates the variation in the voltage sensitivity of the piezoelectric element 1.
【0020】このようにして支持体2に圧電素子1の一
端部を固定した後、金属ケース3を被せて圧電素子1を
金属ケース3内に収納するとともに金属ケース3の両側
面にグランド端子5、5の先端折り曲げ片を当接させて
溶接固定し、この後インサート成形によりケース4を成
形し、この成形後に出力端子6a,6b及びグランド端
子5,5を金属フープ材7より切り離して図1に示す加
速度センサを完成するのである。尚ケース4を成形する
際、一次成形体である支持体2は周壁に開口された溝等
がないため、外力に強くて二次成形時の成形条件の幅を
広くすることができる。After fixing one end of the piezoelectric element 1 to the support 2 in this manner, the metal case 3 is covered to house the piezoelectric element 1 in the metal case 3 and the ground terminals 5 are provided on both side surfaces of the metal case 3. 1, the end bent pieces 5 are brought into contact with each other and fixed by welding, and then the case 4 is molded by insert molding. After this molding, the output terminals 6a and 6b and the ground terminals 5 and 5 are separated from the metal hoop material 7, and the case shown in FIG. The acceleration sensor shown in is completed. When the case 4 is molded, the support body 2 which is the primary molding body has no groove or the like opened in the peripheral wall, so that it is strong against external force and the range of molding conditions for the secondary molding can be widened.
【0021】以上のようにして得られた本実施形態の加
速度センサは片持ち梁構造であるため両梁構造の加速度
センサに比べて感度が高く、しかも金属ケース3により
外来ノイズに対して強く、また出力端子6a,6b及び
グランド端子5,5を金属板の端子で構成するため半田
付け部位の信頼性が高く、更に金属フープ材7上で上述
のように組み立てるものであって検査も金属フープ材7
上で行うことができる。更に従来例のプロセス、設備を
殆どそのまま使用でき、また1軸検知の加速度センサの
製造プロセスとして本実施形態に用いるプロセスを利用
することができる。Since the acceleration sensor of the present embodiment obtained as described above has a cantilever structure, it has a higher sensitivity than the acceleration sensor having a double-beam structure, and the metal case 3 is strong against external noise. Further, since the output terminals 6a, 6b and the ground terminals 5, 5 are made of metal plate terminals, the reliability of the soldering portion is high, and the metal hoop material 7 is assembled as described above, and the inspection is performed by the metal hoop. Material 7
Can be done on Further, the process and equipment of the conventional example can be used almost as they are, and the process used in the present embodiment can be used as a manufacturing process of the acceleration sensor for one-axis detection.
【0022】[0022]
【発明の効果】請求項1の発明は、断面矩形の圧電素子
の一端部を支持固定する支持体を略直方体に形成し、該
支持体の内部に設けてある空所内に支持体の両側の側面
より貫通させた出力端子の先端を臨ませるとともに、前
記両側面に直交する支持体の一側面に外部から前記空所
に貫通し圧電素子の両側面が傾くようにして圧電素子の
一端部を挿入する横孔を開口し、横孔を介して挿入され
て空所内に臨んだ圧電素子の一端部を接着固定するとと
もに、圧電素子の両側面に夫々対応する前記出力端子の
先端を電気的に接続したので、横孔に挿入した圧電素子
の上部部位に支持体の壁が存在することになって、この
壁により空所内に注入した接着剤が圧電素子の上部へ回
り込むのを防止することができるとともに、圧電素子の
上下方向の動きを防止でき、その結果圧電素子の固定端
の位置のばらつきが無くなり、圧電素子の特性を安定化
させることができ、そのため特性の安定した加速度セン
サが得られるという効果があり、また横孔を支持体の側
面に貫通させる構造であるため開放させた溝を設ける場
合に比べて支持体の外力に対する強度を高めることがで
き、二次成形時の成形条件の幅を広くすることができ、
また従来のプロセスや設備を殆どそのまま使用できるも
のである。According to the invention of claim 1, a support body for supporting and fixing one end portion of a piezoelectric element having a rectangular cross section is formed in a substantially rectangular parallelepiped shape, and the support body is provided in an inner space of the support body on both sides of the support body. The tip of the piezoelectric element is made to pass through from the side and the one end of the piezoelectric element is made so that both side surfaces of the piezoelectric element are inclined so that one side surface of the support orthogonal to the both side surfaces penetrates the space from the outside. A lateral hole to be inserted is opened, and one end of the piezoelectric element which is inserted through the lateral hole and faces the inside of the cavity is adhered and fixed, and the tips of the output terminals respectively corresponding to both side surfaces of the piezoelectric element are electrically connected. Since the connection is made, the wall of the support body exists at the upper portion of the piezoelectric element inserted in the lateral hole, and this wall can prevent the adhesive injected into the cavity from wrapping around to the upper portion of the piezoelectric element. It is possible to move the piezoelectric element vertically. As a result, there is no variation in the position of the fixed end of the piezoelectric element, and the characteristics of the piezoelectric element can be stabilized. Therefore, there is an effect that an acceleration sensor with stable characteristics can be obtained. Since it is a structure that penetrates the side surface of the support, the strength of the support against external force can be increased compared to the case where an open groove is provided, and the range of molding conditions during secondary molding can be widened,
Further, the conventional processes and equipment can be used almost as they are.
【0023】請求項2の発明は、請求項1の発明におい
て、前記横孔の内面には前記圧電素子の外周面に圧接す
るリブを設けたので、リブにより横孔内に圧電素子を圧
入挿入することができ、そのため圧電素子の固定が容易
にできるという効果がある。請求項3の発明は、請求項
2の発明において、前記圧電素子の傾斜角を設定する前
記横孔の2つの内面以外の内面に前記リブを設けたの
で、圧電素子の傾斜角を正確に得ることができるという
効果がある。According to a second aspect of the present invention, in the first aspect of the present invention, since a rib that presses against the outer peripheral surface of the piezoelectric element is provided on the inner surface of the lateral hole, the rib presses and inserts the piezoelectric element into the lateral hole. Therefore, there is an effect that the piezoelectric element can be easily fixed. According to the invention of claim 3, in the invention of claim 2, since the ribs are provided on the inner surfaces other than the two inner surfaces of the lateral hole for setting the tilt angle of the piezoelectric element, the tilt angle of the piezoelectric element is accurately obtained. The effect is that you can.
【0024】請求項4の発明は、前記圧電素子の下向き
の側面に対応する出力端子の先端を、上向きの側面に対
応する出力端子の先端よりも高さ位置が下方となるよう
に当該出力端子の先部を折曲形成し、圧電素子の両側面
と夫々に対応する出力端子との間を導電性接着剤で電気
的に接続したので、圧電素子の両側面での導電性接着剤
の接着面積を略同じ広さとすることができ、そのため外
力や熱に対する剥離強度のばらつきが少なく安定した特
性が得られるという効果がある。According to a fourth aspect of the present invention, the tip of the output terminal corresponding to the downward side surface of the piezoelectric element is positioned so that the height position of the output terminal is lower than the tip of the output terminal corresponding to the upward side surface. Since the tip of the piezoelectric element is bent, and both sides of the piezoelectric element and the corresponding output terminals are electrically connected with a conductive adhesive, the adhesion of the conductive adhesive on both sides of the piezoelectric element The areas can be made substantially the same, and therefore, there is an effect that stable characteristics can be obtained with less variation in peel strength against external force or heat.
【図1】本発明の一実施形態の要部の概略的な分解斜視
図である。FIG. 1 is a schematic exploded perspective view of a main part of an embodiment of the present invention.
【図2】同上の一部破断省略した概略的な斜視図であ
る。FIG. 2 is a schematic perspective view of the same, with a part thereof omitted.
【図3】同上の要部の一部省略せる拡大上面図である。FIG. 3 is an enlarged top view in which a part of the main part of the above can be omitted.
【図4】同上の要部の一部省略せる拡大正面図である。FIG. 4 is an enlarged front view in which a part of the above-mentioned main part can be omitted.
【図5】同上の要部の一部省略せる正面断面図である。FIG. 5 is a front cross-sectional view in which a part of the above-mentioned main part can be omitted.
【図6】同上の要部の一部破断せる側面図である。FIG. 6 is a side view in which a main part of the same is broken away.
【図7】同上に用いる金属フープ材の一部省略する上面
図である。FIG. 7 is a top view in which a part of the metal hoop material used in the above is omitted.
【図8】同上の支持体の横孔の構成説明図である。FIG. 8 is a structural explanatory view of a lateral hole of the above support.
【図9】同上の出力端子の一部省略せる拡大斜視図であ
る。FIG. 9 is an enlarged perspective view in which a part of the output terminal of the same can be omitted.
【図10】同上の組立説明図である。FIG. 10 is an assembly explanatory diagram of the above.
【図11】従来例の支持体の上面図である。FIG. 11 is a top view of a conventional support body.
【図12】同上の組立説明図である。FIG. 12 is an assembly explanatory diagram of the above.
1 圧電素子 2 支持体 10 空所 11 横孔 6a,6b 出力端子 DESCRIPTION OF SYMBOLS 1 Piezoelectric element 2 Support 10 Vacancy 11 Horizontal hole 6a, 6b Output terminal
───────────────────────────────────────────────────── フロントページの続き (72)発明者 田中 博久 大阪府門真市大字門真1048番地松下電工株 式会社内 ─────────────────────────────────────────────────── ─── Continuation of the front page (72) Inventor Hirohisa Tanaka 1048, Kadoma, Kadoma City, Osaka Prefecture Matsushita Electric Works Co., Ltd.
Claims (4)
る合成樹脂成形品からなる支持体を略直方体に形成し、
該支持体の内部に設けてある空所内に支持体の両側の側
面より貫通させた出力端子の先端を臨ませるとともに、
前記両側面に直交する支持体の一側面に外部から前記空
所に貫通し圧電素子の両側面が傾くようにして圧電素子
の一端部を挿入する横孔を開口し、横孔を介して挿入さ
れて空所内に臨んだ圧電素子の一端部を接着固定し且つ
圧電素子の両側面に夫々に対応した前記出力端子の先端
を電気的に接続したことを特徴とする加速度センサ。1. A support made of a synthetic resin molded product for supporting and fixing one end of a piezoelectric element having a rectangular cross section is formed into a substantially rectangular parallelepiped.
The tip of the output terminal penetrating from the side surfaces on both sides of the support is exposed in the space provided inside the support,
A lateral hole is inserted into one side surface of the support orthogonal to the both side surfaces so that one end of the piezoelectric element is inserted so that both side surfaces of the piezoelectric element are inclined from the outside so that both side surfaces of the piezoelectric element are inclined, and the lateral hole is inserted through the lateral hole. An acceleration sensor, wherein one end of the piezoelectric element exposed to the inside of the cavity is adhesively fixed, and the ends of the corresponding output terminals are electrically connected to both side surfaces of the piezoelectric element.
に圧接するリブを設けたことを特徴とする請求項1記載
の加速度センサ。2. The acceleration sensor according to claim 1, wherein a rib that is in pressure contact with an outer peripheral surface of the piezoelectric element is provided on an inner surface of the lateral hole.
の2つの内面以外の内面に前記リブを設けたことを特徴
とする請求項2記載の加速度センサ。3. The acceleration sensor according to claim 2, wherein the rib is provided on an inner surface other than the two inner surfaces of the lateral hole that sets the inclination angle of the piezoelectric element.
力端子の先端を、上向きの側面に対応する出力端子の先
端よりも高さ位置が下方となるように当該出力端子の先
部を折曲形成し、圧電素子の両側面と夫々に対応する出
力端子との間を導電性接着剤で電気的に接続したことを
特徴とする請求項1記載の加速度センサ。4. The tip of the output terminal is bent so that the tip of the output terminal corresponding to the downward side surface of the piezoelectric element is lower than the tip of the output terminal corresponding to the upward side surface. 2. The acceleration sensor according to claim 1, wherein the acceleration sensor is formed in a curved shape and electrically connected between both side surfaces of the piezoelectric element and the corresponding output terminals with a conductive adhesive.
Priority Applications (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP26750595A JPH09113533A (en) | 1995-10-16 | 1995-10-16 | Acceleration sensor |
Applications Claiming Priority (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP26750595A JPH09113533A (en) | 1995-10-16 | 1995-10-16 | Acceleration sensor |
Publications (1)
Publication Number | Publication Date |
---|---|
JPH09113533A true JPH09113533A (en) | 1997-05-02 |
Family
ID=17445782
Family Applications (1)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
JP26750595A Withdrawn JPH09113533A (en) | 1995-10-16 | 1995-10-16 | Acceleration sensor |
Country Status (1)
Country | Link |
---|---|
JP (1) | JPH09113533A (en) |
Cited By (2)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JP2005315847A (en) * | 2004-03-29 | 2005-11-10 | Kyocera Corp | Acceleration sensor |
WO2007043140A1 (en) * | 2005-10-04 | 2007-04-19 | Kyocera Corporation | Acceleration sensor |
-
1995
- 1995-10-16 JP JP26750595A patent/JPH09113533A/en not_active Withdrawn
Cited By (3)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JP2005315847A (en) * | 2004-03-29 | 2005-11-10 | Kyocera Corp | Acceleration sensor |
WO2007043140A1 (en) * | 2005-10-04 | 2007-04-19 | Kyocera Corporation | Acceleration sensor |
US7942055B2 (en) | 2005-10-04 | 2011-05-17 | Kyocera Corporation | Acceleration sensor |
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Free format text: JAPANESE INTERMEDIATE CODE: A300 Effective date: 20030107 |