JPH09104965A - High toughness coated member - Google Patents
High toughness coated memberInfo
- Publication number
- JPH09104965A JPH09104965A JP28683295A JP28683295A JPH09104965A JP H09104965 A JPH09104965 A JP H09104965A JP 28683295 A JP28683295 A JP 28683295A JP 28683295 A JP28683295 A JP 28683295A JP H09104965 A JPH09104965 A JP H09104965A
- Authority
- JP
- Japan
- Prior art keywords
- coating
- high toughness
- coated
- substrate
- layer
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Pending
Links
Landscapes
- Cutting Tools, Boring Holders, And Turrets (AREA)
- Physical Vapour Deposition (AREA)
Abstract
Description
【０００１】[0001]
【発明の属する技術分野】本発明は金属、合金またはセ
ラミックス焼結体の基体上にＴｉとＡｌと他の金属元素
との化合物でなる被膜を被覆してなる高靭性被覆部材に
関し、具体的には、金属、合金またはセラミックス焼結
体の基体上に高硬度、高靭性を有した被膜を被覆して、
例えば旋削工具，フライス工具，ドリル，エンドミルに
代表される切削用工具、スリッタ−などの切断刃，裁断
刃とダイス，パンチなどの型工具とノズルなどの耐腐食
耐摩耗部材として代表される耐摩耗用工具、ビットに代
表される土木建設用工具として最適な高靭性被覆部材に
関する。BACKGROUND OF THE INVENTION 1. Field of the Invention The present invention relates to a high toughness coated member obtained by coating a metal, alloy or ceramics sintered body substrate with a coating film of a compound of Ti, Al and another metal element. Is a metal, alloy or ceramic sintered body coated with a film having high hardness and high toughness,
For example, turning tools, milling tools, drills, cutting tools typified by end mills, cutting blades such as slitters, cutting blades and dies, die tools such as punches, and wear-resistant typified by nozzles and other corrosion-resistant wear-resistant members. TECHNICAL FIELD The present invention relates to a high toughness covering member most suitable as a civil engineering construction tool represented by a tool and a bit.
【０００２】[0002]
【従来の技術】金属、合金およびセラミックスの基体上
に厚さが２０μｍ以下のセラミックスの被膜を被覆し、
基体と被膜とのそれぞれの特性を有効に引き出して、長
寿命を達成しようとした被覆部材が多数提案されてい
る。この被覆部材に被膜を被覆する方法は、大別すると
化学蒸着法（ＣＶＤ法）と物理蒸着法（ＰＶＤ法）があ
る。これらのうち、特にＰＶＤ法により被覆された被膜
は、基体の強度を劣化させることなく耐摩耗性を高める
利点がある。そのために、一般に強度，耐欠損性を重要
視するドリル、エンドミル、フライス用スロ−アウェイ
チップに代表される被覆切削工具の被膜は、ＰＶＤ法に
より被覆されているのが現状である。2. Description of the Related Art A ceramic film having a thickness of 20 μm or less is coated on a substrate of metal, alloy or ceramics,
A large number of coating members have been proposed in which the respective characteristics of the substrate and the coating film are effectively brought out to achieve a long service life. The method of coating the coating on the coating member is roughly classified into a chemical vapor deposition method (CVD method) and a physical vapor deposition method (PVD method). Among these, the coating film coated by the PVD method has the advantage of increasing the wear resistance without deteriorating the strength of the substrate. For this reason, coatings of coated cutting tools typified by drills, end mills, and throw-away inserts for milling, which generally emphasize strength and fracture resistance, are currently coated by a PVD method.
【０００３】従来から耐摩耗性を向上させるために窒化
チタンの被膜を被覆することはよく知られている。しか
しながら、窒化チタンを代表とする金属窒化物は高温で
酸化されやすく、耐摩耗性が著しく劣化するという問題
がある。この窒化チタン被膜の酸化の問題を改善しょう
として１９８０年代中頃から提案されたものに、（Ｔｉ
Ａｌ）Ｎの被膜，（ＴｉＡｌＶ）Ｎの被膜および（Ｔｉ
ＡｌＣｒ）Ｎの被膜に代表される被覆部材に関するもの
があり、その代表的なものとして特開昭６２−５６５６
５号公報，特開平２−１３８４５８号公報および特開平
４−１２８３６３号公報がある。It has been well known that a titanium nitride film is coated to improve wear resistance. However, metal nitrides typified by titanium nitride are liable to be oxidized at high temperatures, and have a problem that wear resistance is significantly deteriorated. A proposal made in the mid-1980s to improve the problem of oxidation of this titanium nitride film, (Ti
Al) N coating, (TiAlV) N coating and (Ti
There is a coating member typified by a coating of AlCr) N, and a representative one thereof is JP-A-62-5656.
No. 5, JP-A-2-138458 and JP-A-4-128363.
【０００４】[0004]
【発明が解決しようとする課題】ＴｉＡｌ化合物の被膜
に関する先行技術としての特開昭６２−５６５６５号公
報には、基体の表面にＴｉとＡｌの炭化物，窒化物およ
び炭窒化物のうちの１種の単層または２種以上の複層で
なる硬質被覆層を０．５〜１０μｍ厚さで形成した耐摩
耗性に優れた表面被覆硬質部材について記載されてい
る。JP-A-62-56565, which is a prior art relating to a TiAl compound coating, discloses one of Ti and Al carbides, nitrides and carbonitrides on the surface of a substrate. The surface-coated hard member having excellent wear resistance, which comprises a hard coating layer having a thickness of 0.5 to 10 μm, the hard coating layer consisting of a single layer or two or more types of multiple layers.
【０００５】同公報に記載の表面被覆硬質部材は、開発
当初の通りにＴｉ化合物の被膜に比べて耐酸化性および
耐摩耗性の向上した被覆硬質部材ではあるが、逆に機械
的性質が劣化し、工具、特に苛酷な条件で用いられる切
削工具へ適用した場合に切削性能が低下するという問題
がある。つまり、同公報に記載の表面被覆硬質部材は、
被膜中にＡｌを含有させることにより、Ｔｉ化合物の被
膜に比較して被膜表面の化学的性質の向上を達成した反
面、破壊靭性値が低下すること、特に高速切削用切削工
具として用いると、高温による被膜の酸化，急激な摩耗
の進行，熱衝撃性による劣化および被削材との溶着によ
り短寿命になるという問題がある。The surface-coated hard member described in the above publication is a hard coated member having improved oxidation resistance and wear resistance as compared with the Ti compound coating as originally developed, but conversely the mechanical properties are deteriorated. However, there is a problem that the cutting performance deteriorates when applied to a tool, particularly a cutting tool used under severe conditions. That is, the surface-coated hard member described in the publication,
By containing Al in the coating, the chemical properties of the coating surface are improved as compared with the coating of a Ti compound, but the fracture toughness value decreases, especially when used as a cutting tool for high-speed cutting. There is a problem that the life of the coating is shortened due to the oxidation of the coating film due to aging, the rapid progress of wear, the deterioration due to thermal shock, and the welding to the work material.
【０００６】一方、特開平２−１３８４５８号公報に
は、基体上にＡｌ量またはＶ量を段階的もしくは連続的
に増加させた（ＴｉＡｌＶ）Ｎ系の組成構造を有する複
合被膜を被覆した複合硬質材料について開示されてい
る。また、特開平４−１２８３６３号公報には、基体の
表面に（ＴｉＡｌＣｒ）Ｎの被膜を被覆した複合材料に
ついて開示されている。[0006] On the other hand, Japanese Patent Laid-Open No. 2-138458 discloses a composite hard coated with a composite coating having a (TiAlV) N-based composition structure in which the Al content or V content is increased stepwise or continuously. The material is disclosed. Further, JP-A-4-128363 discloses a composite material in which the surface of a substrate is coated with a (TiAlCr) N film.
【０００７】これら両公報に記載の複合材料のうち、前
公報は、基体と被膜との熱膨張差による界面における応
力を考慮し、被膜の耐剥離性を高めようとしたものであ
り、後公報は、被膜の耐腐食性を高めようとしたもので
あるが、両公報共に膜生成が困難であること、膜自体が
脆性なために切削用工具のような苛酷な用途では剥離ま
たはチッピングを生じ易くて短寿命になるという問題が
ある。Among the composite materials described in both of these publications, the former publication is intended to enhance the peel resistance of the coating in consideration of the stress at the interface due to the difference in thermal expansion between the substrate and the coating. Is an attempt to improve the corrosion resistance of the coating, but in both publications it is difficult to form a film, and the film itself is brittle, so peeling or chipping occurs in severe applications such as cutting tools. There is a problem that it is easy and has a short life.
【０００８】本発明は、上述のような問題点を解決した
もので、具体的には、低温領域から高温領域に至るまで
の広い領域において、高靭性，高硬度性，耐摩耗性，耐
酸化性，耐熱衝撃性，耐欠損性，耐溶着性のある被膜お
よび耐剥離性の被膜を被覆したことにより一層長寿命と
なる高靭性被覆部材の提供を目的とする。The present invention solves the above-mentioned problems. Specifically, it has high toughness, high hardness, wear resistance and oxidation resistance in a wide range from a low temperature region to a high temperature region. It is an object of the present invention to provide a high toughness coated member having a longer life by coating a coating having heat resistance, thermal shock resistance, chipping resistance, welding resistance and peeling resistance.
【０００９】[0009]
【課題を解決するための手段】本発明者らは、超硬合金
の基体上にＴｉとＡｌとの化合物の被膜を被覆した被覆
部材が、低温領域で使用すると割合に優れた効果を発揮
するのに対し、高温領域で使用するとその効果が低減さ
れるという問題を検討していたところ、ＴｉとＡｌとさ
らに第３の金属元素を含めた化合物でなる被膜とし、か
つ第３の金属元素を選定することにより、高靭性な被膜
となること、また低温から高温の領域に至るまで耐摩耗
性の低減が生じなく、寿命が向上するということを見出
し、本発明を完成するに至ったものである。Means for Solving the Problems The present inventors show that a coating member obtained by coating a film of a compound of Ti and Al on a cemented carbide substrate exhibits a relatively excellent effect when used in a low temperature range. On the other hand, as a result of studying the problem that the effect is reduced when used in a high temperature region, a film made of a compound containing Ti and Al and a third metal element, and the third metal element is used. By selecting, it was found that the coating has a high toughness and that the wear resistance is not reduced from the low temperature to the high temperature region and the life is improved, and the present invention has been completed. is there.
【００１０】本発明の高靭性被覆部材は、金属材料，焼
結合金またはセラミックス焼結体でなる基体上に被膜を
被覆してなる被覆部材において、該被膜がＴｉ元素と、
Ａｌ元素と、Ｎｉ，Ｃｏ，Ｆｅ，Ｍｎ，Ｙの中の少なく
とも１種の金属元素と、炭素および／または窒素の非金
属元素とでなる単層もしくは多層の高靭性被膜が被覆さ
れたことを特徴とする。The high toughness coating member of the present invention is a coating member obtained by coating a coating on a substrate made of a metal material, a sintered alloy or a ceramics sintered body, wherein the coating contains Ti element,
A single-layer or multi-layer high-toughness coating composed of an Al element, at least one metal element of Ni, Co, Fe, Mn, and Y and a non-metal element of carbon and / or nitrogen is coated. Characterize.
【００１１】[0011]
【発明の実施の態様】本発明の高靭性被覆部材における
基体は、被膜を被覆するときに加熱する温度に耐えるこ
とができる金属部材，焼結合金またはセラミックス焼結
体でなり、具体的には、例えばステンレス鋼，耐熱合
金，高速度鋼，ダイス鋼，Ｔｉ合金，Ａｌ合金に代表さ
れる金属部材、超硬合金，サ−メット，粉末ハイスの焼
結合金、Ａｌ2Ｏ3系焼結体，Ｓｉ3Ｎ4系焼結体，サイア
ロン系焼結体，ＺｒＯ2系焼結体のセラミックス焼結体
を挙げることができる。これらのうち、切削用工具また
は耐摩耗用工具として用いるときには、超硬合金，窒素
含有ＴｉＣ系サ−メットもしくはセラミックス焼結体の
基体が好ましい。BEST MODE FOR CARRYING OUT THE INVENTION The substrate in the high toughness coated member of the present invention is a metal member, a sintered alloy or a ceramic sintered body capable of withstanding the temperature of heating when coating the coating, and specifically, , For example, stainless steel, heat resistant alloys, high speed steels, die steels, Ti alloys, metal members typified by Al alloys, cemented carbides, cermets, powdered high speed sintered alloys, Al 2 O 3 based sintered bodies. , Si 3 N 4 series sintered bodies, sialon series sintered bodies, and ZrO 2 series sintered bodies. Of these, when used as a cutting tool or a wear-resistant tool, a cemented carbide, a nitrogen-containing TiC-based cermet or a ceramic sintered body is preferable.
【００１２】この基体上に被覆される被膜は、単層また
は多層でなる上述の高靭性被膜のみでなる場合、もしく
は後述するように高靭性被膜と他の膜とを組合わせた積
層膜とすることも好ましいことである。この被膜の総膜
厚さは、０．５〜２０μｍからなることが好ましく、特
に耐剥離性および耐摩耗性から１．０〜１０μｍでなる
ことが好ましい。また、用途および形状により被膜の厚
さを選定することが好ましく、例えばエンドミル，ドリ
ル，フライス用切削工具に用いるときには被膜厚さを薄
くすることが好ましく、具体的には、例えば１．０〜５
μｍの被膜厚さでなることが好ましい。The film to be coated on the substrate is a single layer or a multi-layered high toughness film described above, or a laminated film in which a high toughness film and another film are combined as described later. Is also preferable. The total film thickness of this coating is preferably 0.5 to 20 μm, and particularly preferably 1.0 to 10 μm in terms of peel resistance and abrasion resistance. Further, it is preferable to select the thickness of the coating depending on the use and shape, and it is preferable to reduce the thickness of the coating when used in a cutting tool for end mills, drills, and milling machines, for example, 1.0 to 5
It is preferable that the film thickness is μm.
【００１３】本発明の高靭性被覆部材における高靭性被
膜は、具体的には、例えば（Ｔｉ，Ａｌ，Ｎｉ）Ｃ、
（Ｔｉ，Ａｌ，Ｎｉ）Ｎ、（Ｔｉ，Ａｌ，Ｎｉ）ＣＮ、
（Ｔｉ，Ａｌ，Ｃｏ）Ｃ、（Ｔｉ，Ａｌ，Ｃｏ）Ｎ、
（Ｔｉ，Ａｌ，Ｃｏ）ＣＮ、（Ｔｉ，Ａｌ，Ｆｅ）Ｃ，
（Ｔｉ，Ａｌ，Ｍｎ）Ｎ、（Ｔｉ，Ａｌ，Ｙ）Ｎ、（Ｔ
ｉ，Ａｌ，Ｎｉ，Ｃｏ）Ｎ、または（Ｔｉ，Ａｌ，Ｎ
ｉ）Ｎ−Ｃｏ、（Ｔｉ，Ａｌ，Ｎｉ）Ｎ−Ｎｉ、（Ｔ
ｉ，Ａｌ，Ｎｉ）ＣＮ−Ｃｏ、（Ｔｉ，Ａｌ，Ｙ）Ｎ−
Ｎｉ、（Ｔｉ，Ａｌ，Ｃｏ）Ｎ−Ｃｏ、（Ｔｉ，Ａｌ，
Ｃｏ）ＣＮ−Ｃｏ、（Ｔｉ，Ａｌ，Ｆｅ）Ｃ−Ｆｅ、
（Ｔｉ，Ａｌ，Ｍｎ）Ｎ−Ｍｎ、（Ｔｉ，Ａｌ，Ｎｉ，
Ｃｏ）Ｎ−Ｃｏ、もしくは（Ｔｉ，Ａｌ）Ｎ−Ｃｏ、
（Ｔｉ，Ａｌ）Ｎ−Ｎｉ、（Ｔｉ，Ａｌ）ＣＮ−Ｃｏ、
（Ｔｉ，Ａｌ）ＣＮ−Ｎｉ、（Ｔｉ，Ａｌ）Ｎ−Ｍｎ、
（Ｔｉ，Ａｌ）Ｎ−Ｆｅを挙げることができる。この高
靭性被膜は、０．５〜１０μｍでなる膜厚さでなること
が好ましく、特に耐衝撃性を重要視する用途においては
０．５〜５μｍでなる膜厚さでなることが好ましい。The high toughness coating of the high toughness coating member of the present invention is specifically, for example, (Ti, Al, Ni) C,
(Ti, Al, Ni) N, (Ti, Al, Ni) CN,
(Ti, Al, Co) C, (Ti, Al, Co) N,
(Ti, Al, Co) CN, (Ti, Al, Fe) C,
(Ti, Al, Mn) N, (Ti, Al, Y) N, (T
i, Al, Ni, Co) N or (Ti, Al, N
i) N-Co, (Ti, Al, Ni) N-Ni, (T
i, Al, Ni) CN-Co, (Ti, Al, Y) N-
Ni, (Ti, Al, Co) N-Co, (Ti, Al,
Co) CN-Co, (Ti, Al, Fe) C-Fe,
(Ti, Al, Mn) N-Mn, (Ti, Al, Ni,
Co) N-Co, or (Ti, Al) N-Co,
(Ti, Al) N-Ni, (Ti, Al) CN-Co,
(Ti, Al) CN-Ni, (Ti, Al) N-Mn,
(Ti, Al) N-Fe can be mentioned. The high toughness coating preferably has a film thickness of 0.5 to 10 μm, and particularly preferably 0.5 to 5 μm in applications where importance is attached to impact resistance.
【００１４】これらの高靭性被膜は、化学量論組成また
は非化学量論組成でなる場合でもよいが、特に、（Ｔｉ
a、Ａｌb、Ｘ1-a-b）ＣyＮ1-yの式で表わせる複合窒化
物および複合炭窒化物でなる単層または複層からなるこ
とが好ましい。［但し、式中のＴｉはチタン、Ａｌはア
ルミニウム、ＸはＮｉ（ニッケル），Ｃｏ（コバル
ト），Ｆｅ（鉄），Ｍｎ（マンガン），Ｙ（イットリウ
ム）の中の１種以上を示し、ａ、ｂはそれぞれＴｉおよ
びＡｌの原子比を、ｙは炭素の原子比を表す。また、ａ
＋ｂ＜１、０．０５≦ａ≦０．７５、０．０５ ≦ｂ≦
０．９０、 ０≦ｙ≦０．９５の関係にある］These high toughness coatings may be of stoichiometric composition or non-stoichiometric composition, but in particular (Ti
It is preferably composed of a single layer or multiple layers made of a composite nitride and a composite carbonitride represented by the formula a , Al b , X 1-ab ) C y N 1-y . [However, in the formula, Ti represents titanium, Al represents aluminum, X represents one or more of Ni (nickel), Co (cobalt), Fe (iron), Mn (manganese), and Y (yttrium). , B represent the atomic ratio of Ti and Al, and y represents the atomic ratio of carbon. Also, a
+ B <1, 0.05 ≦ a ≦ 0.75, 0.05 ≦ b ≦
0.90, 0 ≦ y ≦ 0.95]
【００１５】本発明の高靭性被覆部材における被膜の構
成は、高靭性，高強度性，高耐摩耗性および優れた付着
性を有している高靭性被膜を、基体に隣接して直接形成
させる第１の構成とすること、または基体と高靭性被膜
との間に下地層および／または内層でなる他の膜を介在
させて積層でなる第２の構成とすること、さらには第１
の構成もしくは第２の構成でなる高靭性被膜の表面に外
層および／または最外層を形成した積層でなる第３の構
成とすることも好ましい。The coating composition of the high toughness coating member of the present invention is such that a high toughness coating having high toughness, high strength, high wear resistance and excellent adhesion is directly formed adjacent to the substrate. The first configuration, or the second configuration in which the base layer and the high-toughness coating are laminated by interposing another film that is an underlayer and / or an inner layer, and the first configuration
It is also preferable to adopt the third structure which is a laminated structure in which the outer layer and / or the outermost layer is formed on the surface of the high toughness coating having the above structure or the second structure.
【００１６】これらの被膜の構成を具体的に例示する
と、基体上に順次被覆される被膜の構成が基体−高靭性
被膜でなる第１の構成、基体−下地層−高靭性被膜、基
体−内層−高靭性被膜、基体−下地層−内層−高靭性被
膜でなる第２の構成、基体−高靭性被膜−外層、基体−
高靭性被膜−外層−最外層、基体−下地層−高靭性被膜
−外層、基体−内層−高靭性被膜−外層、基体−内層−
高靭性被膜−外層−最外層、基体−下地層−内層−高靭
性被膜−外層でなる第３の構成を挙げることができる。Concretely exemplifying the constitutions of these coatings, the constitution of the coatings successively coated on the substrate is a base-high toughness coating, a first constitution, a base-underlayer-high toughness coating, a base-inner layer. -High toughness coating, substrate-Underlayer-Inner layer-Second structure consisting of high toughness coating, substrate-High toughness coating-Outer layer, substrate-
High toughness coating-outer layer-outermost layer, substrate-underlayer-high toughness coating-outer layer, substrate-inner layer-high toughness coating-outer layer, substrate-inner layer-
There can be mentioned a third constitution comprising high toughness coating-outer layer-outermost layer, substrate-underlayer-inner layer-high toughness coating-outer layer.
【００１７】この被膜の構成における下地層は、具体的
には、例えばＴｉ，ＴｉＡｌ，Ｔｉ3Ａｌ，ＴｉＡｌ3，
Ｗ，に代表される金属または合金の１種の単層または２
種以上の複層でなるものを挙げることができる。また、
内層および外層は、具体的には、例えば周期律表の４
ａ，５ａ，６ａ族元素の炭化物，窒化物，炭酸化物，窒
酸化物およびこれらの相互固溶体の１種の単層または２
種以上の複層でなるものを挙げることができる。さら
に、最外層は、具体的には、例えば酸化アルミニウム，
（ＴｉＡｌ）Ｎ，（ＴｉＡｌ）ＣＮ，（ＴｉＡｌ）ＣＮ
Ｏの１種の単層または２種以上の複層でなるものを挙げ
ることができる。The underlayer in the structure of this coating is specifically, for example, Ti, TiAl, Ti 3 Al, TiAl 3 ,
One kind of metal or alloy represented by W, or 2
There may be mentioned ones composed of two or more layers. Also,
The inner layer and the outer layer are specifically, for example, 4 of the periodic table.
a single layer of carbides, nitrides, carbonates, oxynitrides of the a, 5a, 6a group elements and their mutual solid solutions or 2
There may be mentioned ones composed of two or more layers. Further, the outermost layer is specifically, for example, aluminum oxide,
(TiAl) N, (TiAl) CN, (TiAl) CN
Examples thereof include a single layer of O and a multi-layer of two or more types.
【００１８】これらの被膜の構成は、基体に隣接して直
接高靭性被膜を形成することも好ましく、また基体と高
靭性被膜との間にＴｉの炭化物，窒化物，炭窒化物，炭
酸化物，窒酸化物，炭窒酸化物の中の１種の単層または
２種以上の複層でなる内層を介在させることも特に好ま
しいことである。With respect to the constitution of these coatings, it is also preferable to form a high toughness coating directly adjacent to the substrate, and Ti carbides, nitrides, carbonitrides, carbonates, etc. of Ti are provided between the substrate and the high toughness coating. It is also particularly preferable to interpose an inner layer composed of one single layer or two or more multi-layers of nitroxide and carbonitride.
【００１９】本発明の高靭性被覆部材は、従来から市販
されているステンレス鋼，耐熱合金，高速度鋼，ダイス
鋼，Ｔｉ合金，Ａｌ合金に代表される金属部材、超硬合
金，サ−メット，粉末ハイスの焼結合金、Ａｌ2Ｏ3系焼
結体，Ｓｉ3Ｎ4系焼結体，サイアロン系焼結体，ＺｒＯ
2系焼結体のセラミックス焼結体を基体とし、好ましく
はＪＩＳ規格Ｂ４０５３の超硬合金の使用選択基準の中
で分類されているＰ２０〜Ｐ４０，Ｍ２０〜４０および
Ｋ１０〜Ｋ２０相当の超硬合金材質、特に好ましくはＰ
３０，Ｍ２０，Ｍ３０相当の超硬合金材質でなる基体を
用いればよい。この基体の表面を、必要に応じて研磨
し、超音波，有機溶剤などによる洗浄処理を行った後、
従来から行われている物理蒸着法（ＰＶＤ法），化学蒸
着法（ＣＶＤ法）またはプラズマＣＶＤ法により基体上
に被膜を被覆することにより作製することができる。The high toughness coated member of the present invention is a metal member typified by conventionally commercially available stainless steel, heat resistant alloy, high speed steel, die steel, Ti alloy, Al alloy, cemented carbide and cermet. , Powdered HSS sintered alloy, Al 2 O 3 system sintered body, Si 3 N 4 system sintered body, Sialon system sintered body, ZrO
A cemented carbide corresponding to P20 to P40, M20 to 40 and K10 to K20, which is based on a ceramic sintered body of a 2 series sintered body as a base, and is preferably classified in the usage selection criteria of cemented carbide according to JIS standard B4053. Material, particularly preferably P
A substrate made of a cemented carbide material corresponding to 30, M20, M30 may be used. The surface of this substrate is polished as needed, and after being subjected to cleaning treatment with ultrasonic waves, an organic solvent, etc.,
It can be prepared by coating a film on a substrate by a conventional physical vapor deposition method (PVD method), chemical vapor deposition method (CVD method) or plasma CVD method.
【００２０】基体上に被膜を被覆する場合は、必要に応
じて被覆する下地層を含めて、それぞれの膜質に応じて
ＰＶＤ法，ＣＶＤ法，またはプラズマＣＶＤ法を使い分
けることもできる。これらのうち、製造工程上から全て
の被膜を、イオンプレ−ティング法またはスパッタリン
グ法に代表されるＰＶＤ法で行うことが好ましく、この
中でもイオンプレ−ティング法、特にア−クイオンプレ
−ティング法で被覆処理することが好ましい。In the case of coating the film on the substrate, the PVD method, the CVD method, or the plasma CVD method can be used properly depending on the quality of each film, including an underlayer to be coated if necessary. Among these, it is preferable to perform all coatings from the manufacturing process by a PVD method typified by an ion plating method or a sputtering method. Among them, coating treatment is preferably performed by an ion plating method, particularly an arc ion plating method. Is preferred.
【００２１】本発明の高靭性被覆部材における被膜をイ
オンプレ−ティング法で作製する場合について、さらに
詳述すると、金属源としては金属チタン、金属アルミニ
ウムおよびその他の金属（Ｘ元素）の３種類を独立して
用いてもよく、またはそれぞれの元素を含有している合
金を使用してもよい。金属のイオン化の方法もア−ク放
電の他、グロ−放電または高周波加熱などのいずれでも
よい。イオンプレ−ティング法で使用するガスは、窒化
物を生成するためのガス、すなわち窒素ガスの他、窒素
を含んだアンモニアなどの化合物ガスを用いてもよい。
この反応ガスを炉内に導入し、金属源としての金属また
は合金をイオン化し、基体に負のバイアスを印加して被
膜を合成することが好ましい。The case where the coating film of the high toughness coating member of the present invention is produced by the ion plating method will be described in more detail. As a metal source, three types of metal titanium, metal aluminum and other metal (X element) are independently prepared. Alternatively, an alloy containing each element may be used. The method of ionizing the metal may be arc discharge, glow discharge, high-frequency heating, or the like. The gas used in the ion plating method may be a gas for forming a nitride, that is, a nitrogen gas, or a compound gas such as ammonia containing nitrogen.
It is preferable to introduce this reaction gas into the furnace, ionize the metal or alloy as the metal source, and apply a negative bias to the substrate to synthesize the coating.
【００２２】[0022]
【作用】本発明の高靭性被覆部材は、高靭性被膜が被膜
全体の破壊靭性値を向上させる作用をし、かつ基体と被
膜との界面近傍に残留する応力を緩和する作用をし、特
に超硬合金でなる基体の場合には付着性を高める作用を
し、これらの作用により被覆部材全体の優れた特性を達
成させているものである。The high-toughness coated member of the present invention has the function that the high-toughness coating improves the fracture toughness value of the entire coating and also relaxes the residual stress in the vicinity of the interface between the substrate and the coating. In the case of a base made of a hard alloy, it has the function of increasing the adhesiveness, and these effects achieve the excellent properties of the entire covering member.
【００２３】[0023]
【実施例１】市販されている形状ＳＮＧＮ１２０４０８
の超硬合金（ＪＩＳ規格Ｂ４０５３のＰ３０相当材質）
を基体とし、この基体表面を有機溶剤で洗浄した後、ア
ーク放電プラズマ法のチャンバー内に設置し、（逃げ面
とすくい面へ同時に被覆できる治具を用いて設置）、チ
ャンバー内を１．０×１０-6〜３．０×１０-6Ｔｏｒｒ
の真空とした。次いでチャンバー内を表１に示すガス組
成およびガス圧に保持し、基体を約４５０℃に加熱し
た。最初に電流を約８００Ａに保持しながらＴｉイオン
をアーク放電して、基体に２分間ボンバードさせた。次
に、アーク放電電流を約１００Ａに保ち、Ｔｉ−Ａｌ−
Ｎｉ合金を約３０分間放電させ、表１に示す組成の異な
るターゲットを用いて本発明品１〜５および比較品１〜
３を得た。Example 1 Commercially available shape SNGN120408
Cemented Carbide (Material equivalent to P30 of JIS B4053)
As a base, and after cleaning the surface of the base with an organic solvent, the base is placed in a chamber of the arc discharge plasma method (installed using a jig capable of simultaneously coating the flank and the rake face), and the inside of the chamber is set to 1.0. × 10 -6 to 3.0 × 10 -6 Torr
Of vacuum. Then, the inside of the chamber was maintained at the gas composition and gas pressure shown in Table 1, and the substrate was heated to about 450 ° C. First, Ti ions were arc-discharged while maintaining the current at about 800 A, and the substrate was bombarded for 2 minutes. Next, the arc discharge current was maintained at about 100 A, and Ti-Al-
The Ni alloy was discharged for about 30 minutes, and targets 1 to 5 of the present invention and comparative products 1 to 1 were used by using targets having different compositions shown in Table 1.
3 was obtained.
【００２４】こうして得た本発明品１〜５および比較品
１〜３のそれぞれの被膜は、Ｘ線回折装置、電子顕微鏡
およびＥＤＸ装置により調べて（Ｔｉ、Ａｌ、Ｎｉ）Ｎ
化合物が合成されていることを確認した。本発明品１〜
５および比較品１〜３の被膜組成成分は、Ｘ線回折装置
およびグロー放電発光分析装置により解析し、また、そ
れぞれの被膜厚さは走査型電子顕微鏡で調べて、表２に
示した。次いで、本発明品１〜５および比較品１〜３を
用いて被削材：Ｓ４５Ｃ（ＨＢ１９０）、切削速度３０
０ｍ／ｍｉｎ、送り：０．５ｍｍ／ｒｅｖ、切込み：
２．０ｍｍ、切削時間：６０ｍｉｎ、乾式切削試験によ
る第１切削条件と被削材：Ｓ４８Ｃ、切削速度１５０ｍ
／ｍｉｎ、送り：０．３ｍｍ／ｒｅｖ、切込み：１．５
ｍｍ、切削時間：３０ｍｉｎ、乾式切削試験による第２
切削条件で、切削試験を行い、それぞれの平均逃げ面摩
耗幅を測定し、その結果を表２に併記した。The respective coating films of the invention products 1 to 5 and the comparative products 1 to 3 thus obtained were examined by an X-ray diffractometer, an electron microscope and an EDX device to obtain (Ti, Al, Ni) N.
It was confirmed that the compound was synthesized. Invention product 1
The coating composition components of Sample No. 5 and Comparative Products 1 to 3 were analyzed by an X-ray diffractometer and a glow discharge emission spectrometer, and the coating thickness of each was examined by a scanning electron microscope. Then, using the present products 1 to 5 and the comparative products 1 to 3, a work material: S45C (HB190), a cutting speed of 30
0 m / min, feed: 0.5 mm / rev, depth of cut:
2.0 mm, cutting time: 60 min, first cutting condition by dry cutting test and work material: S48C, cutting speed 150 m
/ Min, feed: 0.3 mm / rev, depth of cut: 1.5
mm, cutting time: 30 min, second by dry cutting test
A cutting test was performed under cutting conditions, and the average flank wear width was measured, and the results are also shown in Table 2.
【００２５】[0025]
【表１】 [Table 1]
【００２６】[0026]
【表２】 [Table 2]
【００２７】[0027]
【実施例２】基体の形状をＴＮＧＡ１６０４０８とした
以外は、実施例１の本発明品１〜５の製造条件と略同様
に処理し、それぞれ本発明品６〜１０を得た。また、実
施例１の比較品１〜３の製造条件と略同様に処理し、そ
れぞれ比較品４〜６を得た。こうして得た本発明品６〜
１０および比較品４〜６のそれぞれの被膜を、実施例１
と同様にして調べて、その結果を表３に示した。Example 2 Inventive products 6 to 10 were obtained by substantially the same processing conditions as those of the inventive products 1 to 5 of Example 1 except that the substrate had a shape of TNGA160408. In addition, comparative products 1 to 3 of Example 1 were treated in substantially the same manner as the manufacturing conditions to obtain comparative products 4 to 6, respectively. The product of the present invention 6 thus obtained
10 and comparative products 4 to 6 were coated with the coatings of Example 1
The results were shown in Table 3.
【００２８】次に、本発明品６〜１０および比較品４〜
６を用いて、被削材：Ｓ４５Ｃ（ＨＢ１９０）、切削速
度３００ｍ／ｍｉｎ、送り：０．５ｍｍ／ｒｅｖ、切込
み：２．０ｍｍ、切削時間：６０ｍｉｎによる乾式切削
試験を行い、そのときの平均逃げ面摩耗幅を測定し、そ
の結果を表３に併記した．Next, the present invention products 6 to 10 and the comparative products 4 to
Using 6, the dry cutting test was carried out with the work material: S45C (HB190), cutting speed 300 m / min, feed: 0.5 mm / rev, depth of cut: 2.0 mm, cutting time: 60 min, and the average clearance at that time The surface wear width was measured, and the results are also shown in Table 3.
【００２９】[0029]
【表３】 [Table 3]
【００３０】[0030]
【実施例３】市販のエンドミル（ＪＩＳ規格Ｂ４０５３
のＭ２０相当の超硬合金製）を基体として用いた以外
は、実施例１の本発明品１〜５の製造条件と略同様に処
理し、それぞれ本発明品１１〜１５を得た。また、実施
例１の比較品１〜３の製造条件と略同様に処理し、それ
ぞれ比較品７〜９を得た。こうして得た本発明品１１〜
１５および比較品７〜９のそれぞれの被膜を、実施例１
と同様にして調べて、その結果を表４に示した。[Example 3] Commercial end mill (JIS standard B4053
(M20 equivalent of cemented carbide) was used as a substrate, and substantially the same processing conditions as those of the inventive products 1 to 5 of Example 1 were performed to obtain inventive products 11 to 15, respectively. In addition, comparative products 1 to 3 of Example 1 were treated in substantially the same manner as the manufacturing conditions to obtain comparative products 7 to 9, respectively. The invention products 11 to 11 thus obtained
15 and comparative films 7-9 were coated with the coatings of Example 1
The results are shown in Table 4.
【００３１】次に、本発明品１１〜１５および比較品７
〜９を用いて被削材：ＳＫＤ６１（ＨＲＣ４１）、送
り：０．０８／ｒｅｖ、切込み：Ａｄ＝１２ｍｍ、Ｒｄ
＝０．８ｍｍ、切削速度：２０ｍ／ｍｉｎ、工具形状：
８ｍｍ径の２枚刃エンドミル、水溶性切削による第３切
削条件と、被削材：ＳＵＳ３０４（ＨＢ１８０）、送
り：０．０３／ｒｅｖ、切込み：Ａｄ＝７ｍｍ、Ｒｄ＝
１ｍｍ、切削速度：５０ｍ／ｍｉｎ、工具形状：５ｍｍ
径の２枚刃エンドミル、水溶性切削による第４切削条件
とで切削試験を行い、それぞれ切削長５０ｍ時における
逃げ面摩耗幅を測定し、その結果を表４に併記した。Next, products 11 to 15 of the present invention and comparative product 7
Work material: SKD61 (HRC41), feed: 0.08 / rev, depth of cut: Ad = 12 mm, Rd
= 0.8 mm, cutting speed: 20 m / min, tool shape:
8mm diameter 2-flute end mill, third cutting condition by water-soluble cutting, work material: SUS304 (HB180), feed: 0.03 / rev, depth of cut: Ad = 7mm, Rd =
1 mm, cutting speed: 50 m / min, tool shape: 5 mm
A cutting test was carried out under the condition of a two-blade end mill having a diameter and a fourth cutting condition by water-soluble cutting, and the flank wear width at a cutting length of 50 m was measured, and the results are also shown in Table 4.
【００３２】[0032]
【表４】 [Table 4]
【００３３】[0033]
【実施例４】市販されている形状ＳＮＧＡ１２０４０８
の超硬合金（ＪＩＳ規格Ｂ４０５３のＰ３０相当材質）
を基体とし、この基体表面を有機溶剤で洗浄した後、ア
ーク放電プラズマ法のチャンバー内に設置し、（逃げ面
とすくい面へ同時に被覆できる治具を用いて設置）、チ
ャンバー内を１．１×１０-5〜１．５×-5５Ｔｏｒｒの
真空とした。次いでチャンバー内をＮ2−ＣＨ4ガス組成
および２．１×１０-2Ｔｏｒｒのガス圧に保持し、基体
を約６００℃に加熱した。最初に電流を約８００Ａに保
持しながらＴｉイオンをアーク放電して、基体に３分間
ボンバードさせた。次に、アーク放電電流を約１００
Ａ，Ｈ2流量：１１０（ＳＣＣＭ），ＣＨ4流量：８０
（ＳＣＣＭ），基体バイアス：−１００Ｖに保ち、Ｔｉ
−Ａｌ−Ｎｉ合金を約３０分間放電させて本発明品１６
を得た。また、Ｈ2流量：９５（ＳＣＣＭ），ＣＨ4流
量：８５（ＳＣＣＭ）としたこと、およびＴｉ−Ａｌ合
金とＹ金属を用いた以外は、本発明品１６と同様に処理
して本発明品１７を得た。さらに、Ｈ2流量：１００
（ＳＣＣＭ），ＣＨ4流量：８０（ＳＣＣＭ）としたこ
と、Ｔｉ金属を用いたこと、および放電時間：５０分間
とした以外は、本発明品１６と同様に処理して比較品１
０を得た。Example 4 Commercially available shape SNGA120408
Cemented Carbide (Material equivalent to P30 of JIS B4053)
As a base, and after cleaning the surface of the base with an organic solvent, the base is placed in a chamber of arc discharge plasma method (installed using a jig capable of simultaneously covering the flank and the rake face), and the inside of the chamber is set to 1.1. × was 10 -5 to 1.5 × -5 5 Torr vacuum. Then, the inside of the chamber was maintained at a N 2 —CH 4 gas composition and a gas pressure of 2.1 × 10 −2 Torr, and the substrate was heated to about 600 ° C. First, Ti ions were arc-discharged while keeping the current at about 800 A, and the substrate was bombarded for 3 minutes. Next, the arc discharge current is set to about 100.
A, H 2 flow rate: 110 (SCCM), CH 4 flow rate: 80
(SCCM), substrate bias: keep at -100V, Ti
-Al-Ni alloy was discharged for about 30 minutes, and the product of the present invention 16
I got The product of the present invention was processed in the same manner as the product of the present invention 16 except that the H 2 flow rate was 95 (SCCM), the CH 4 flow rate was 85 (SCCM), and the Ti—Al alloy and Y metal were used. I got 17. Furthermore, H 2 flow rate: 100
(SCCM), CH 4 flow rate: 80 (SCCM), Ti metal was used, and discharge time: 50 minutes.
0 was obtained.
【００３４】こうして得た本発明品１６，１７および比
較品１０のそれぞれの被膜を、実施例１における方法と
同様にして調べた結果、本発明品１６は、被膜組成：
（Ｔｉ0.3，Ａｌ0.6，Ｎｉ0.1）Ｃ0.4Ｎ0.6，被膜厚
さ：３．８μｍ，被膜硬さ：２９４０（ＨＶ− ０． ０
５），被膜スクラッチ強度：８５Ｎでなり、本発明品１
７は、被膜組成：（Ｔｉ0.45，Ａｌ0.5，Ｙ0.05）Ｃ0.5
Ｎ0.5，被膜厚さ：３．８μｍ，被膜硬さ：３０００
（ＨＶ− ０． ０５），被膜スクラッチ強度：９０Ｎでな
り、比較品１０は、被膜組成：Ｔｉ（Ｃ0.5，Ｎ0.5），
被膜厚さ：４．０μｍ，被膜硬さ：２５６０（ＨＶ−
０．０５），被膜スクラッチ強度：７０Ｎであった。The products 16 and 17 of the present invention thus obtained and the ratio
Each coating of Comparative Product 10 was prepared according to the method of Example 1.
As a result of the same examination, the product 16 of the present invention had a coating composition:
(Ti0.3, Al0.6, Ni0.1) C0.4N0.6, Coating thickness
S: 3.8 μm, film hardness: 2940 (HV- 0. 0
5), the scratch resistance of the coating film is 85 N.
7 is a film composition: (Ti0.45, Al0.5, Y0.05) C0.5
N0.5, Coating thickness: 3.8 μm, coating hardness: 3000
(HV- 0. 05), coating scratch strength: not 90N
Comparative product 10 has a coating composition: Ti (C0.5, N0.5),
Film thickness: 4.0 μm, film hardness: 2560 (HV-
0.05) and the scratch resistance of the coating film was 70N.
【００３５】[0035]
【発明の効果】本発明の高靭性被覆部材は、従来の（Ｔ
ｉＡｌ）Ｎ被膜を被覆した比較品に対比して、高硬度，
高靭性，耐摩耗性，耐酸化性，耐熱衝撃性，耐欠損性，
耐溶着性を有し、かつ被膜の耐剥離性により一層優れる
ことから、この分野での中速切削領域から高速切削領域
に相当する領域において、長寿命になるという効果があ
る。したがって、本発明の高靭性被覆部材は、従来の被
覆部材の領域である低速切削領域から高速切削領域に至
るまで広い領域で長寿命を達成できるという優れた効果
があること、特にエンドミルおよびドリルとして長寿命
が得られるという効果があること、また高靭性および高
硬度な被膜を被覆した被覆部材であることから、軽切削
領域から重切削領域においても優れた効果を発揮できる
ものである。The high toughness coated member of the present invention has the conventional (T
iAl) N coating has a higher hardness,
High toughness, wear resistance, oxidation resistance, thermal shock resistance, fracture resistance,
Since it has welding resistance and is more excellent in peeling resistance of the coating film, it has an effect of extending the life in a region corresponding to the medium-speed cutting region to the high-speed cutting region in this field. Therefore, the high-toughness coated member of the present invention has an excellent effect that a long life can be achieved in a wide region from a low speed cutting region to a high speed cutting region, which is a region of a conventional covering member, particularly as an end mill and a drill. Since it has an effect of obtaining a long life and is a covering member coated with a film having high toughness and high hardness, it can exhibit an excellent effect also in a light cutting region to a heavy cutting region.
Claims (6)
焼結体でなる基体上に被膜を被覆してなる被覆部材にお
いて、該被膜は、Ｔｉ元素と、Ａｌ元素と、Ｎｉ，Ｃ
ｏ，Ｆｅ，Ｍｎ，Ｙの中の少なくとも１種の金属元素
と、炭素および／または窒素の非金属元素とでなる単層
もしくは多層の高靭性被膜が被覆されたものであること
を特徴とする高靭性被覆部材。1. A covering member comprising a base material made of a metal material, a sintered alloy or a ceramics sintered body and a coating film coated on the substrate. The coating film comprises Ti element, Al element, Ni and C.
characterized by being coated with a single-layer or multi-layer high-toughness coating composed of at least one metal element of o, Fe, Mn, and Y and a non-metal element of carbon and / or nitrogen. High toughness covering member.
る窒化物および炭窒化物の中の１種の単層または２種以
上の複層でなることを特徴とする請求項１記載の高靭性
被覆部材。 （Ｔｉa、Ａｌb、Ｘ１1-a-b）ＣyＮ1-y −−−−（Ａ） ［但し、（Ａ）式中のＴｉはチタン、Ａｌはアルミニウ
ム、ＸはＮｉ（ニッケル），Ｃｏ（コバルト），Ｆｅ
（鉄），Ｍｎ（マンガン），Ｙ（イットリウム）の中の
１種以上を示し、ａ、ｂはそれぞれＴｉおよびＡｌの原
子比を、ｙは炭素の原子比を表す。また、ａ＋ｂ＜１、
０．０５≦ａ≦０．７５、０．０５ ≦ｂ≦０．９０、
０≦ｙ≦０．９５の関係にある］2. The high toughness coating film is formed of one kind of a nitride or carbonitride represented by the following formula (A) or two or more kinds of multi-layers. The high toughness coated member described. (Ti a, Al b, X1 1-ab) C y N 1-y ---- (A) [ where, (A) Ti in formula titanium, Al is aluminum, X is Ni (nickel), Co (Cobalt), Fe
One or more of (iron), Mn (manganese), and Y (yttrium) are shown, where a and b represent the atomic ratio of Ti and Al, and y represents the atomic ratio of carbon. Also, a + b <1,
0.05 ≤ a ≤ 0.75, 0.05 ≤ b ≤ 0.90,
0 ≦ y ≦ 0.95]
を含む窒化物および炭窒化物の中の１種の単層または２
種以上の複層でなることを特徴とする請求項１または２
記載の高靭性被覆部材。3. The high toughness coating is a single layer or a single layer of a nitride and a carbonitride containing Ti, Al and Ni.
3. A multi-layer structure comprising one or more layers.
The high toughness coated member described.
窒化物，炭酸化物，窒酸化物，炭窒酸化物の中の１種の
単層または２種以上の複層でなる内層と該内層の表面に
被覆された上記高靭性被膜とからなることを特徴とする
請求項１，２または３記載の高靭性被覆部材。4. The inner layer consisting of a single layer of Ti carbide, nitride, carbonitride, carbon oxide, oxynitride, or oxycarbonitride of Ti, or a multi-layer of two or more thereof. The high-toughness coating member according to claim 1, wherein the high-toughness coating is formed on the surface of the inner layer.
ｍからなることを特徴とする請求項１，２，３または４
記載の高靭性被覆部材。5. The coating has a total thickness of 0.5 to 20 μm.
m, characterized in that it consists of m, 1, 2, 3 or 4.
The high toughness coated member described.
０μｍでなることを特徴とする請求項１，２，３，４ま
たは５記載の高靭性被覆部材。6. The high toughness coating has a thickness of 0.5 to 1
The high toughness covering member according to claim 1, 2, 3, 4, or 5, wherein the covering member has a thickness of 0 μm.
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP28683295A JPH09104965A (en) | 1995-10-06 | 1995-10-06 | High toughness coated member |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP28683295A JPH09104965A (en) | 1995-10-06 | 1995-10-06 | High toughness coated member |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| JPH09104965A true JPH09104965A (en) | 1997-04-22 |
Family
ID=17709621
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP28683295A Pending JPH09104965A (en) | 1995-10-06 | 1995-10-06 | High toughness coated member |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPH09104965A (en) |
Cited By (4)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| WO2003064085A1 (en) * | 2002-01-31 | 2003-08-07 | Mitsubishi Materials Corporation | Coated cutting tool member having hard coating layer and method for forming the hard coating layer on cutting tool |
| WO2007029290A1 (en) * | 2005-09-01 | 2007-03-15 | Osg Corporation | Hard laminated coating and hard laminated coating provided tool |
| JP2008031517A (en) * | 2006-07-28 | 2008-02-14 | Tungaloy Corp | Coated member |
| KR100821535B1 (en) * | 2007-01-17 | 2008-04-14 | 오에스지 가부시키가이샤 | Hard multilayer coating, and hard multilayer coated tool including the hard multilayer coating |
-
1995
- 1995-10-06 JP JP28683295A patent/JPH09104965A/en active Pending
Cited By (9)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| WO2003064085A1 (en) * | 2002-01-31 | 2003-08-07 | Mitsubishi Materials Corporation | Coated cutting tool member having hard coating layer and method for forming the hard coating layer on cutting tool |
| US7144639B2 (en) | 2002-01-31 | 2006-12-05 | Mitsubishi Materials Corporation | Surface-coated cutting tool member having hard coating layer and method for forming the hard coating layer on surface of cutting tool |
| CN1325212C (en) * | 2002-01-31 | 2007-07-11 | 三菱麻铁里亚尔株式会社 | Coated cutting tool member having hard coating layer and method for forming the hard coating layer on cutting tool |
| WO2007029290A1 (en) * | 2005-09-01 | 2007-03-15 | Osg Corporation | Hard laminated coating and hard laminated coating provided tool |
| JPWO2007029290A1 (en) * | 2005-09-01 | 2009-03-12 | オーエスジー株式会社 | Hard laminate coating and hard laminate coating tool |
| US7713612B2 (en) | 2005-09-01 | 2010-05-11 | Osg Corporation | Hard multilayer coating, and hard multilayer coated tool including the hard multilayer coating |
| JP4555862B2 (en) * | 2005-09-01 | 2010-10-06 | オーエスジー株式会社 | Hard laminate coating and hard laminate coating tool |
| JP2008031517A (en) * | 2006-07-28 | 2008-02-14 | Tungaloy Corp | Coated member |
| KR100821535B1 (en) * | 2007-01-17 | 2008-04-14 | 오에스지 가부시키가이샤 | Hard multilayer coating, and hard multilayer coated tool including the hard multilayer coating |
Similar Documents
| Publication | Publication Date | Title |
|---|---|---|
| JP3420024B2 (en) | Laminated coating member including crystal oriented hard film | |
| EP2446987B1 (en) | Tool having coated cubic boron nitride sintered body | |
| EP1347076B1 (en) | PVD-Coated cutting tool insert | |
| KR100674773B1 (en) | Hard films, multilayer hard films, and production methods thereof | |
| JP4373897B2 (en) | Hard film coating member and coating method thereof | |
| JPH08119774A (en) | Combined material having high hardness for tool | |
| JP2006137982A (en) | Hard film coated member, and its coating method | |
| JP3249277B2 (en) | Wear resistant coating | |
| JP2015037834A (en) | Surface coated cutting tool | |
| JPH08104583A (en) | Composite high hardness material for tool | |
| JPH11216601A (en) | Coating tool with hard laminate film | |
| JP3333081B2 (en) | Crystal orientation high strength coated member | |
| JPH10317123A (en) | Crystalline oriented hard coated member | |
| JPH09104965A (en) | High toughness coated member | |
| JP3358696B2 (en) | High strength coating | |
| JP3347244B2 (en) | High toughness coating material | |
| JPH0827562A (en) | Oxidation resistant coated member | |
| WO2020184352A1 (en) | Surface-coated cutting tool | |
| JP3347247B2 (en) | High toughness coating | |
| JP3333080B2 (en) | High-strength coated members with consistent interfaces | |
| JPH0820871A (en) | Wear resistant coating member | |
| JP3179645B2 (en) | Wear resistant coating | |
| JP3130734B2 (en) | Heat resistant coating | |
| JP3606335B2 (en) | High hardness coated member | |
| KR100305885B1 (en) | Coating alloy for a cutting tool/an abrasion resistance tool |
Legal Events
| Date | Code | Title | Description |
|---|---|---|---|
| A02 | Decision of refusal |
Free format text: JAPANESE INTERMEDIATE CODE: A02 Effective date: 20021007 |