JPH0865795A - Ultrasonic sensor - Google Patents
Ultrasonic sensorInfo
- Publication number
- JPH0865795A JPH0865795A JP19691094A JP19691094A JPH0865795A JP H0865795 A JPH0865795 A JP H0865795A JP 19691094 A JP19691094 A JP 19691094A JP 19691094 A JP19691094 A JP 19691094A JP H0865795 A JPH0865795 A JP H0865795A
- Authority
- JP
- Japan
- Prior art keywords
- matching layer
- acoustic matching
- ultrasonic sensor
- piezoelectric element
- radiation surface
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Granted
Links
Landscapes
- Transducers For Ultrasonic Waves (AREA)
- Measurement Of Velocity Or Position Using Acoustic Or Ultrasonic Waves (AREA)
Abstract
Description
【0001】[0001]
【産業上の利用分野】本発明は超音波センサに関し、超
音波の送波又は送受波を行う超音波センサに関する。BACKGROUND OF THE INVENTION 1. Field of the Invention The present invention relates to an ultrasonic sensor, and more particularly to an ultrasonic sensor for transmitting or receiving ultrasonic waves.
【0002】[0002]
【従来の技術】従来より超音波を利用して物体の検知や
距離の測定を行う超音波センサがある。例えば、特開平
5−244692号公報には圧電素子と振動ケースと共
振体と基台及び防振体からなり、圧電素子により振動ケ
ースを駆動して超音波を送波する超音波センサが記載さ
れている。この公報のものは圧電素子の外周縁部に溝を
形成して圧電素子を振動ケースに接着する際の余分な接
着材を上記溝で吸収する構成として安定した出力を得る
ことを目的としている。2. Description of the Related Art Conventionally, there is an ultrasonic sensor for detecting an object and measuring a distance by using ultrasonic waves. For example, Japanese Patent Application Laid-Open No. 5-244692 discloses an ultrasonic sensor including a piezoelectric element, a vibrating case, a resonator, a base and a vibration isolator, and driving the vibrating case by the piezoelectric element to transmit ultrasonic waves. ing. The object of this publication is to obtain a stable output by forming a groove in the outer peripheral edge portion of the piezoelectric element and absorbing excess adhesive material when the piezoelectric element is bonded to the vibration case by the groove.
【0003】[0003]
【発明が解決しようとする課題】従来の超音波センサは
安定した出力音圧を得られるものの、車載等で使用する
ための更なる出力音圧の増強については開示がない。Although the conventional ultrasonic sensor can obtain a stable output sound pressure, there is no disclosure about further enhancement of the output sound pressure for use in a vehicle.
【0004】車両の対地速度や車高を測定する車載用の
超音波センサでは路面が濡れたアスファルト等の場合
は、路面による超音波の反射が小さくなるため、出力音
圧を大きくする必要があり、従来の超音波センサではま
だ出力音圧が不足であるという問題があった。In the case of an on-vehicle ultrasonic sensor for measuring the ground speed and vehicle height of a vehicle, when the road surface is wet asphalt or the like, the reflection of ultrasonic waves by the road surface becomes small, so that the output sound pressure must be increased. However, the conventional ultrasonic sensor has a problem that the output sound pressure is still insufficient.
【0005】本発明は上記の点に鑑みなさたもので、音
響整合層を加熱する等により、出力音圧を増大させる超
音波センサを提供することを目的とする。The present invention has been made in view of the above points, and an object of the present invention is to provide an ultrasonic sensor for increasing the output sound pressure by heating an acoustic matching layer or the like.
【0006】[0006]
【課題を解決するための手段】請求項1に記載の発明
は、ガラスバルーンを混合した樹脂からなる音響整合層
に圧電素子を固定した超音波センサにおいて、上記音響
整合層を加熱する加熱手段を設ける。According to a first aspect of the present invention, in an ultrasonic sensor in which a piezoelectric element is fixed to an acoustic matching layer made of resin mixed with glass balloon, a heating means for heating the acoustic matching layer is provided. Set up.
【0007】請求項2に記載の発明は、樹脂からなる音
響整合層に圧電素子を固定した超音波センサにおいて、
上記音響整合層の放射面に沿う方向の力を放射面と直角
方向の力に変換するよう配向された繊維を上記音響整合
層に設ける。According to a second aspect of the present invention, there is provided an ultrasonic sensor in which a piezoelectric element is fixed to an acoustic matching layer made of resin,
Fibers are provided in the acoustic matching layer that are oriented to convert forces along the emitting surface of the acoustic matching layer into forces perpendicular to the emitting surface.
【0008】請求項3に記載の発明は、音響整合層に圧
電素子を固定し、上記音響整合層をボデー部で支持した
超音波センサにおいて、上記音響整合層はボディー部に
対して微小間隙をもって支持される。According to a third aspect of the present invention, in an ultrasonic sensor in which a piezoelectric element is fixed to an acoustic matching layer and the acoustic matching layer is supported by a body portion, the acoustic matching layer has a minute gap with respect to the body portion. Supported.
【0009】請求項4に記載の発明は、ガラスバルーン
を混合した樹脂からなる音響整合層に圧電素子を固定し
た超音波センサにおいて、ガラスバルーンを上記音響整
合層の放射面で高密度となるよう分布させる。According to a fourth aspect of the present invention, in an ultrasonic sensor in which a piezoelectric element is fixed to an acoustic matching layer made of resin mixed with a glass balloon, the glass balloon has a high density on the radiation surface of the acoustic matching layer. Distribute.
【0010】[0010]
【作用】請求項1に記載の発明においては、音響整合層
を加熱することにより、音響整合層の弾性率を最適な状
態として出力音圧を増大することができる。According to the first aspect of the present invention, by heating the acoustic matching layer, the output sound pressure can be increased with the elastic modulus of the acoustic matching layer being in an optimum state.
【0011】請求項2に記載の発明においては、音響整
合層に設けた繊維によって圧電素子の駆動による放射面
に沿う方向の力が放射面と直角方向に変換されるため、
上記変換された分だけ出力音圧が増大する。According to the second aspect of the present invention, since the fibers provided in the acoustic matching layer convert the force in the direction along the radiation surface due to the driving of the piezoelectric element to the direction perpendicular to the radiation surface,
The output sound pressure increases by the amount converted.
【0012】請求項3に記載の発明においては、音響整
合層がボディ部に対して微小間隙をもっているため、音
響整合層の振動がボディ部によって制限されず、自由に
振動し出力音圧が増大する。According to the third aspect of the present invention, since the acoustic matching layer has a minute gap with respect to the body portion, the vibration of the acoustic matching layer is not limited by the body portion and can freely vibrate to increase the output sound pressure. To do.
【0013】請求項4に記載の発明においては、音響整
合層の放射面にガラスバルーンが高密度で分布している
ため、音響整合層の音響インピーダンスは放射面に向け
て徐々に小さくなり空気との整合性が向上し、損失が小
さくなるための出力音圧が増大し、また、ガラスバルー
ンを撥水処理することにより、放射面の撥水効果が大き
くなる。In the invention according to claim 4, since the glass balloons are distributed at a high density on the radiation surface of the acoustic matching layer, the acoustic impedance of the acoustic matching layer becomes gradually smaller toward the radiation surface and becomes smaller than that of air. Is improved, the output sound pressure for reducing the loss is increased, and the water-repellent effect of the radiation surface is increased by the water-repellent treatment of the glass balloon.
【0014】[0014]
【実施例】図1は本発明の一実施例の構成図を示す。同
図中、超音波センサは基台部10、支持体11、圧電素
子14、音響整合層15より大略構成されている。支持
体11の一端は基台部10に固定され、支持体11の他
端に音響整合層15が固定されている。また、音響整合
層15の駆動面(下面)15aには圧電素子14が固着
されている。FIG. 1 is a block diagram showing an embodiment of the present invention. In the figure, the ultrasonic sensor is generally composed of a base 10, a support 11, a piezoelectric element 14, and an acoustic matching layer 15. One end of the support 11 is fixed to the base portion 10, and the acoustic matching layer 15 is fixed to the other end of the support 11. The piezoelectric element 14 is fixed to the driving surface (lower surface) 15a of the acoustic matching layer 15.
【0015】音響整合層15はエポキシ樹脂に直径十数
ミクロンで中空のガラスバルーンを混合して円盤状に形
成したものである。これは樹脂だけだと重量が重くなり
音響インピーダンスが空気に対して大きく、空気との音
響インピーダンスの整合がとれないので、ガラスバルー
ンを混合して重量を軽くして空気との音響インピーダン
スの整合性をとっている。The acoustic matching layer 15 is formed by mixing an epoxy resin with a hollow glass balloon having a diameter of several tens of microns to form a disk shape. This is because if you use only resin, the weight will be heavy and the acoustic impedance will be large compared to air, so you can not match the acoustic impedance with air, so mix the glass balloon to reduce the weight and match the acoustic impedance with air. Is taking.
【0016】この音響整合層15の外周にはヒータ20
が配設されている。このヒータ20はヒータ制御回路2
2のオン・オフ制御により、オン時にヒータ電源23か
ら電源を供給されて音響整合層15を加熱する。A heater 20 is provided on the outer periphery of the acoustic matching layer 15.
Is provided. This heater 20 is a heater control circuit 2
By the on / off control of No. 2, when the power is turned on, power is supplied from the heater power supply 23 to heat the acoustic matching layer 15.
【0017】圧電素子14は例えばPZT(チタン酸ジ
ルコン酸鉛)系の圧電セラミックで円盤状に形成したも
のである。圧電素子14の両面に設けられた端子14
a,14bには信号源24から所定周波数の信号が供給
される。圧電素子14は上記信号の印加によって、主
に、径方向(矢印X方向)に伸縮して振動する。この圧
電素子14の振動によって音響整合層15が振動し、音
響整合層15の放射面(上面)15bから超音波が発せ
られる。The piezoelectric element 14 is made of, for example, a PZT (lead zirconate titanate) type piezoelectric ceramic and is formed in a disk shape. Terminals 14 provided on both sides of the piezoelectric element 14
A signal having a predetermined frequency is supplied from the signal source 24 to a and 14b. The piezoelectric element 14 expands and contracts mainly in the radial direction (arrow X direction) and vibrates by the application of the signal. The acoustic matching layer 15 vibrates due to the vibration of the piezoelectric element 14, and ultrasonic waves are emitted from the radiation surface (upper surface) 15b of the acoustic matching layer 15.
【0018】なお、圧電素子14、音響整合層15夫々
には温度センサ25,26が夫々設けられており、温度
センサ25,26夫々の検出温度はヒータ制御回路22
に供給されている。The piezoelectric element 14 and the acoustic matching layer 15 are respectively provided with temperature sensors 25 and 26, and the temperature detected by each of the temperature sensors 25 and 26 is the heater control circuit 22.
Is supplied to
【0019】ここで、音響整合層15は前述の如く音響
インピーダンスを小さくするためにガラスバルーンを混
合されている。このため音響整合層15は樹脂単体で形
成した場合よりも弾性率が大きく、つまり硬くなってい
る。圧電素子に信号源24から信号を供給してヒータ2
0に通電して音響整合層15を加熱すると、音響整合層
15の温度は図2の実線Iに示す如く上昇し、これと共
に超音波センサの出力する音圧は図2の実線IIに示す如
く、音響整合層15の温度がTbからTaの範囲でピー
クとなり、温度がTb(例えば40℃)以下、及びTa
(例えば60℃)以上で小さくなる。Here, the acoustic matching layer 15 is mixed with a glass balloon in order to reduce the acoustic impedance as described above. For this reason, the acoustic matching layer 15 has a larger elastic modulus, that is, is harder than when it is formed of a resin alone. A signal is supplied from the signal source 24 to the piezoelectric element to heat the heater 2.
When the acoustic matching layer 15 is heated by energizing to 0, the temperature of the acoustic matching layer 15 rises as shown by the solid line I in FIG. 2, and the sound pressure output from the ultrasonic sensor is also shown by the solid line II in FIG. , The temperature of the acoustic matching layer 15 peaks in the range from Tb to Ta, and the temperature is Tb (for example, 40 ° C.) or lower, and Ta
It becomes smaller above (for example, 60 ° C.).
【0020】また、音響整合層15の温度・弾性率特性
は図3の実線のようになる。ここで0℃近傍の音響整合
層15の弾性率をAとすると、温度Tbの弾性率は略
0.9A、温度Taの弾性率は略0.7Aに相当する。The temperature / elastic modulus characteristic of the acoustic matching layer 15 is as shown by the solid line in FIG. Assuming that the elastic modulus of the acoustic matching layer 15 near 0 ° C. is A, the elastic modulus at the temperature Tb is approximately 0.9 A and the elastic modulus at the temperature Ta is approximately 0.7 A.
【0021】ヒータ制御回路22では温度センサ26の
検出温度がTb以下のときヒータ電源23をオンとし、
検出温度がTa以上のときヒータ電源23をオフとする
制御を行う。また、圧電素子14の温度が上昇すると共
振周波数がずれる。このため、ヒータ制御回路22で
は、圧電素子14の共振周波数が1KHz以上ずれる温
度Tcと温度センサ25の検出温度とを比較してこの検
出温度がTc以上となるとヒータ電源23を強制的にオ
フとし共振周波数のずれを抑止している。In the heater control circuit 22, the heater power supply 23 is turned on when the temperature detected by the temperature sensor 26 is Tb or lower,
When the detected temperature is equal to or higher than Ta, the heater power supply 23 is controlled to be turned off. Further, when the temperature of the piezoelectric element 14 rises, the resonance frequency shifts. Therefore, in the heater control circuit 22, the temperature Tc at which the resonance frequency of the piezoelectric element 14 deviates by 1 KHz or more is compared with the detection temperature of the temperature sensor 25, and when the detection temperature becomes Tc or more, the heater power supply 23 is forcibly turned off. The deviation of the resonance frequency is suppressed.
【0022】これにより、図4の実線III に示す従来の
超音波センサの周波数・音圧特性に対して、上記実施例
の周波数・音圧特性は実線IVに示す如く向上する。As a result, in contrast to the frequency / sound pressure characteristic of the conventional ultrasonic sensor shown by the solid line III in FIG. 4, the frequency / sound pressure characteristic of the above embodiment is improved as shown by the solid line IV.
【0023】ところで、圧電素子14は主に径方向(図
1の矢印X方向)に振動し、これによって音響整合層1
5が曲げ応力が発生して音響整合層15が上下方向(矢
印Y方向)に振動し超音波が発せられ、その出力音圧は
音響整合層15の上下方向の振幅に比例する。By the way, the piezoelectric element 14 vibrates mainly in the radial direction (the direction of arrow X in FIG. 1), whereby the acoustic matching layer 1
5 causes bending stress, the acoustic matching layer 15 vibrates in the vertical direction (direction of arrow Y) and emits ultrasonic waves, and the output sound pressure is proportional to the vertical amplitude of the acoustic matching layer 15.
【0024】このため、圧電素子14の径方向振動を音
響整合層15の上下方向振動に効率良く変換するように
音響整合層15に図5(A),(B)に示す如く非伸縮
繊維30を埋設し、音響整合層15に異方性を付与す
る。この非伸縮繊維30としてはSiC等のガラス繊維
を用い、2次元的には図5(A)に示し、3次元的には
図5(B)に示す如く、非伸縮繊維30を駆動面15a
の中心に集中させ、放射面15bで周縁方向に拡げ、円
錐状に配向させる。製造時には非伸縮繊維30を上記の
如く円錐状に配列させて型に入れ、ガラスバルーンを混
合したエポキシ樹脂を型に流し込んで形成する。図6に
その斜視図を示す。Therefore, in order to efficiently convert the radial vibration of the piezoelectric element 14 into the vertical vibration of the acoustic matching layer 15, the acoustic matching layer 15 has a non-stretchable fiber 30 as shown in FIGS. 5 (A) and 5 (B). Are embedded to give the acoustic matching layer 15 anisotropy. As the non-stretchable fiber 30, glass fiber such as SiC is used, and the non-stretchable fiber 30 is used as the non-stretchable fiber 30 as shown in the two-dimensional view of FIG. 5A and the three-dimensional view of FIG. 5B.
Are concentrated in the center of the circle, spread in the peripheral direction at the radiation surface 15b, and oriented in a conical shape. At the time of manufacture, the non-stretchable fibers 30 are arranged in a conical shape as described above and placed in a mold, and an epoxy resin mixed with a glass balloon is poured into the mold to be formed. The perspective view is shown in FIG.
【0025】圧電素子14の振動によって音響整合層1
5が径方向に振動し非伸縮繊維30に図5(A)に示す
如くベクトルaが加わると、ベクトルaは繊維30の長
手方向の成分bと、これと直交する方向の成分cとに分
解され、繊維30は非伸縮性であるために成分cが残
り、音響整合層15は成分cによって上下方向に振動す
る。The acoustic matching layer 1 is generated by the vibration of the piezoelectric element 14.
When 5 vibrates in the radial direction and a vector a is added to the non-stretchable fiber 30 as shown in FIG. 5A, the vector a is decomposed into a component b in the longitudinal direction of the fiber 30 and a component c in the direction orthogonal thereto. Since the fiber 30 is non-stretchable, the component c remains, and the acoustic matching layer 15 vibrates vertically due to the component c.
【0026】これによって音響整合層15の上下方向の
振動の振幅が増大し、出力音圧が増大する。As a result, the amplitude of the vertical vibration of the acoustic matching layer 15 is increased, and the output sound pressure is increased.
【0027】また、図1の如く、音響整合層15が支持
体11に固定されていると、音響整合層15の振動は制
限され、振幅が小さくなる。このため、図7に示す如
く、支持体10の代りにボデー部を支持体16及び枠体
17で形成する。支持体16の一端を基台部10に固定
する。次に、圧電素子14を固着した音響整合層15を
支持体16上に載置し、支持体16の他端に環状の枠体
17を固定する。枠体17は鍔部17aを有しており、
これによって、音響整合層15の周縁部は支持体16及
び枠体17によって挟み込んだ構造となるが、支持体1
6から鍔部17aまでの高さは音響整合層15の高さよ
り数十〜数百ミクロンだけ大とされ、かつ枠体17の内
径は音響整合層15の外径より数十〜数百ミクロンだけ
大とされている。Further, as shown in FIG. 1, when the acoustic matching layer 15 is fixed to the support 11, the vibration of the acoustic matching layer 15 is limited and the amplitude becomes small. Therefore, as shown in FIG. 7, a body portion is formed by the support body 16 and the frame body 17 instead of the support body 10. One end of the support 16 is fixed to the base 10. Next, the acoustic matching layer 15 to which the piezoelectric element 14 is fixed is placed on the support 16, and the annular frame 17 is fixed to the other end of the support 16. The frame body 17 has a collar portion 17a,
As a result, the peripheral portion of the acoustic matching layer 15 has a structure in which it is sandwiched between the support 16 and the frame 17.
The height from 6 to the flange portion 17a is set to be several tens to several hundreds of microns larger than the height of the acoustic matching layer 15, and the inner diameter of the frame body 17 is set to several tens to several hundreds microns from the outer diameter of the acoustic matching layer 15. It is said to be large.
【0028】このため、音響整合層15の振動が制限さ
れることがなくなり、出力音圧が増大する。Therefore, the vibration of the acoustic matching layer 15 is not restricted and the output sound pressure increases.
【0029】車高計測,対地速度計測等の車載用として
超音波センサを用いる場合、音響整合層15に油、ド
ロ、水等が付着すると超音波の反射や拡散が生じ、出力
音圧及び感度が減少する。このため車載用では音響整合
層15の撥水処理は不可欠である。撥水処理は例えばフ
ロオロアルキルシラン0.1+テトラエトキシラン0.
9の溶液を浸した後、300℃程度に加熱して行う。し
かし、音響整合層15は図8に示す如く、ガラスバルー
ン35をエポキシ樹脂36に均一に混合して形成されて
おり、母材としてエポキシ樹脂を用いているために加熱
処理を行うと変形が生じるので上記撥水処理を行うこと
はできない。When an ultrasonic sensor is used for vehicle mounting such as vehicle height measurement and ground speed measurement, if oil, mist, water or the like adheres to the acoustic matching layer 15, the ultrasonic wave is reflected or diffused, resulting in output sound pressure and sensitivity. Is reduced. For this reason, the water-repellent treatment of the acoustic matching layer 15 is indispensable for in-vehicle use. The water repellent treatment is, for example, fluoroalkylsilane 0.1 + tetraethoxylane 0.1.
After immersing the solution of No. 9, heating to about 300 ° C. is performed. However, as shown in FIG. 8, the acoustic matching layer 15 is formed by uniformly mixing the glass balloon 35 with the epoxy resin 36. Since the epoxy resin is used as the base material, the acoustic matching layer 15 is deformed by heat treatment. Therefore, the water repellent treatment cannot be performed.
【0030】このため、本実施例では、まず、ガラスバ
ルーン35に撥水処理を施す。ガラスバルーンは材料が
ガラスであるので撥水処理は可能である。この後、ガラ
スバルーン35をエポキシ樹脂36に混合し、遠心分離
等によって図9に示す如くガラスバルーン35が放射面
15bで高密度となり、駆動面15aで低密度となるよ
うに不均一に分布させて固化させる。Therefore, in this embodiment, first, the glass balloon 35 is subjected to a water repellent treatment. Since the material of the glass balloon is glass, water repellent treatment is possible. After that, the glass balloons 35 are mixed with the epoxy resin 36, and the glass balloons 35 are non-uniformly distributed by centrifugation or the like so that the glass balloons 35 have a high density on the radiation surface 15b and a low density on the driving surface 15a as shown in FIG. Solidify.
【0031】これによって、音響整合層15の放射面1
5bには撥水処理されたガラスバルーン35が高密度に
存在するため、音響整合層15の放射面15bの撥水効
果が大となり、油、ドロ、水等の付着による出力音圧及
び感度の低下を防止できる。ところで、ガラスバルーン
35に撥水処理を施さない場合であっても、音響整合層
15のガラスバルーン密度を駆動面15aから放射面1
5bに向けて高密度となるように傾斜させることによ
り、音響整合層15の音響インピーダンスは放射面に向
けて徐々に小さくなり空気との整合性が向上し、損失が
小さくなるための出力音圧が増大する。As a result, the radiation surface 1 of the acoustic matching layer 15 is
Since the water-repellent glass balloons 35 are present at a high density on 5b, the water-repellent effect of the radiation surface 15b of the acoustic matching layer 15 becomes large, and the output sound pressure and sensitivity due to the adhesion of oil, mist, water, etc. It can prevent the deterioration. By the way, even when the glass balloon 35 is not subjected to the water repellent treatment, the glass balloon density of the acoustic matching layer 15 is changed from the driving surface 15a to the radiation surface 1.
By inclining the acoustic matching layer 15 to have a high density toward 5b, the acoustic impedance of the acoustic matching layer 15 gradually decreases toward the radiating surface, the matching with air is improved, and the output sound pressure for reducing loss is reduced. Will increase.
【0032】[0032]
【発明の効果】上述の如く、請求項1に記載の発明によ
れば、音響整合層を加熱することにより、音響整合層の
弾性率を最適な状態として出力音圧を増大することがで
きる。また、請求項2に記載の発明によれば、音響整合
層に設けた繊維によって圧電素子の駆動による放射面に
沿う方向の力が放射面と直角方向に変換されるため、上
記変換された分だけ出力音圧が増大する。As described above, according to the first aspect of the present invention, by heating the acoustic matching layer, the elastic modulus of the acoustic matching layer can be optimized and the output sound pressure can be increased. According to the invention described in claim 2, the force provided in the acoustic matching layer in the direction along the radiation surface due to the driving of the piezoelectric element is converted into the direction perpendicular to the radiation surface. Only the output sound pressure increases.
【0033】また、請求項3に記載の発明によれば、音
響整合層がボディ部に対して微小間隔をもっているた
め、音響整合層の振動がボディ部によって制限されず、
自由に振動し出力音圧が増大する。Further, according to the third aspect of the invention, since the acoustic matching layer has a minute gap with respect to the body portion, the vibration of the acoustic matching layer is not limited by the body portion,
It vibrates freely and the output sound pressure increases.
【0034】また、請求項4に記載の発明によれば、音
響整合層の放射面にガラスバルーンが高密度で分布して
いるため、音響整合層の音響インピーダンスは放射面に
向けて徐々に小さくなり空気との整合性が向上し、損失
が小さくなるための出力音圧が増大し、また、ガラスバ
ルーンを撥水処理することにより、放射面の撥水効果が
大きくなり、実用上きわめて有用である。According to the invention described in claim 4, since the glass balloons are distributed at a high density on the radiation surface of the acoustic matching layer, the acoustic impedance of the acoustic matching layer gradually decreases toward the radiation surface. It improves the consistency with the air, increases the output sound pressure to reduce the loss, and the water repellent treatment of the glass balloon increases the water repellent effect of the radiation surface, which is extremely useful in practice. is there.
【図1】本発明の一実施例の構成図である。FIG. 1 is a configuration diagram of an embodiment of the present invention.
【図2】音響整合層の音度を出力音圧の関係を示す図で
ある。FIG. 2 is a diagram showing a relationship between a sound level of an acoustic matching layer and an output sound pressure.
【図3】音響整合層の温度・弾性率特性を示す図であ
る。FIG. 3 is a diagram showing temperature / elastic modulus characteristics of an acoustic matching layer.
【図4】音響整合層の周波数・音圧特性を示す図であ
る。FIG. 4 is a diagram showing frequency / sound pressure characteristics of an acoustic matching layer.
【図5】音響整合層の構造を説明するための図である。FIG. 5 is a diagram for explaining the structure of an acoustic matching layer.
【図6】音響整合層の構造を説明するための図である。FIG. 6 is a diagram for explaining the structure of an acoustic matching layer.
【図7】本発明の一実施例の構成図である。FIG. 7 is a configuration diagram of an embodiment of the present invention.
【図8】音響整合層の構造を説明するための図である。FIG. 8 is a diagram for explaining the structure of an acoustic matching layer.
【図9】音響整合層の構造を説明するための図である。FIG. 9 is a diagram for explaining the structure of an acoustic matching layer.
10 基台部 11 支持体 14 圧電素子 15 音響整合層 15b 放射面 20 ヒータ 22 ヒータ制御回路 23 ヒータ電源 24 信号源 25,26 温度センサ 30 非伸縮繊維 35 ガラスバルーン 36 樹脂 10 Base Part 11 Support 14 Piezoelectric Element 15 Acoustic Matching Layer 15b Radiating Surface 20 Heater 22 Heater Control Circuit 23 Heater Power Supply 24 Signal Source 25, 26 Temperature Sensor 30 Non-Expandable Fiber 35 Glass Balloon 36 Resin
Claims (4)
音響整合層に圧電素子を固定した超音波センサにおい
て、 上記音響整合層を加熱する加熱手段を設けたことを特徴
とする超音波センサ。1. An ultrasonic sensor in which a piezoelectric element is fixed to an acoustic matching layer made of resin mixed with glass balloons, wherein heating means for heating the acoustic matching layer is provided.
定した超音波センサにおいて、 上記音響整合層の放射面に沿う方向の力を放射面と直角
方向の力に変換するよう配向された繊維を上記音響整合
層に設けたことを特徴とする超音波センサ。2. An ultrasonic sensor in which a piezoelectric element is fixed to an acoustic matching layer made of resin, and fibers oriented so as to convert a force along a radiation surface of the acoustic matching layer into a force in a direction perpendicular to the radiation surface. An ultrasonic sensor, wherein: is provided on the acoustic matching layer.
響整合層をボデー部で支持した超音波センサにおいて、 上記音響整合層はボディー部に対して微小間隙をもって
支持されることを特徴とする超音波センサ。3. An ultrasonic sensor in which a piezoelectric element is fixed to an acoustic matching layer and the acoustic matching layer is supported by a body portion, wherein the acoustic matching layer is supported with a minute gap with respect to the body portion. Ultrasonic sensor.
音響整合層に圧電素子を固定した超音波センサにおい
て、 撥水処理したガラスバルーンを上記音響整合層の放射面
で高密度となるよう分布させたことを特徴とする超音波
センサ。4. In an ultrasonic sensor in which a piezoelectric element is fixed to an acoustic matching layer made of resin mixed with glass balloons, water-repellent treated glass balloons are distributed so as to have a high density on the radiation surface of the acoustic matching layer. An ultrasonic sensor characterized in that.
Priority Applications (1)
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JP6196910A JP3036368B2 (en) | 1994-08-22 | 1994-08-22 | Ultrasonic sensor |
Applications Claiming Priority (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP6196910A JP3036368B2 (en) | 1994-08-22 | 1994-08-22 | Ultrasonic sensor |
Publications (2)
Publication Number | Publication Date |
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JPH0865795A true JPH0865795A (en) | 1996-03-08 |
JP3036368B2 JP3036368B2 (en) | 2000-04-24 |
Family
ID=16365695
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JP6196910A Expired - Fee Related JP3036368B2 (en) | 1994-08-22 | 1994-08-22 | Ultrasonic sensor |
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JP (1) | JP3036368B2 (en) |
Cited By (9)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JP2003143685A (en) * | 2001-11-07 | 2003-05-16 | Murata Mfg Co Ltd | Manufacturing method of acoustic matching layer and the acoustic matching layer manufactured employing the method |
WO2003045585A3 (en) * | 2001-11-27 | 2003-12-04 | Adolf Thies Gmbh & Co Kg | Ultrasound transducer for application in extreme climatic conditions |
KR100891547B1 (en) * | 2008-07-07 | 2009-04-03 | (주)하기소닉 | Ultrasonic sensor with water repellent function |
JP2011039003A (en) * | 2009-08-18 | 2011-02-24 | Panasonic Electric Works Co Ltd | Ultrasonic sensor |
JP2013143587A (en) * | 2012-01-06 | 2013-07-22 | Nippon Ceramic Co Ltd | Aerial ultrasonic wave transducer using acoustic matching layer |
US9105835B2 (en) | 2010-12-10 | 2015-08-11 | Mitsubishi Electric Corporation | Air-coupled ultrasonic sensor |
JP2016225891A (en) * | 2015-06-02 | 2016-12-28 | パナソニックIpマネジメント株式会社 | Ultrasonic vibrator and ultrasonic flowmeter using the same |
JP2018157347A (en) * | 2017-03-16 | 2018-10-04 | ヤマハ株式会社 | Vibration transducer |
JP2019176291A (en) * | 2018-03-28 | 2019-10-10 | パナソニックIpマネジメント株式会社 | Ultrasonic transducer |
Families Citing this family (1)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
EP3933350A1 (en) * | 2020-07-03 | 2022-01-05 | Huba Control Ag | Sensor assembly |
-
1994
- 1994-08-22 JP JP6196910A patent/JP3036368B2/en not_active Expired - Fee Related
Cited By (13)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JP2003143685A (en) * | 2001-11-07 | 2003-05-16 | Murata Mfg Co Ltd | Manufacturing method of acoustic matching layer and the acoustic matching layer manufactured employing the method |
WO2003045585A3 (en) * | 2001-11-27 | 2003-12-04 | Adolf Thies Gmbh & Co Kg | Ultrasound transducer for application in extreme climatic conditions |
US7149151B2 (en) | 2001-11-27 | 2006-12-12 | Adolf Thies Gmbh & Co. Kg | Ultrasound transducer for application in extreme climatic conditions |
KR100891547B1 (en) * | 2008-07-07 | 2009-04-03 | (주)하기소닉 | Ultrasonic sensor with water repellent function |
WO2010005130A1 (en) * | 2008-07-07 | 2010-01-14 | Hagisonic Co., Ltd. | Ultrasonic sensor with water repellent function |
WO2011021086A1 (en) * | 2009-08-18 | 2011-02-24 | パナソニック電工株式会社 | Ultrasonic sensor |
JP2011039003A (en) * | 2009-08-18 | 2011-02-24 | Panasonic Electric Works Co Ltd | Ultrasonic sensor |
US8943893B2 (en) | 2009-08-18 | 2015-02-03 | Panasonic Intellectual Property Management Co., Ltd. | Ultrasonic sensor |
US9105835B2 (en) | 2010-12-10 | 2015-08-11 | Mitsubishi Electric Corporation | Air-coupled ultrasonic sensor |
JP2013143587A (en) * | 2012-01-06 | 2013-07-22 | Nippon Ceramic Co Ltd | Aerial ultrasonic wave transducer using acoustic matching layer |
JP2016225891A (en) * | 2015-06-02 | 2016-12-28 | パナソニックIpマネジメント株式会社 | Ultrasonic vibrator and ultrasonic flowmeter using the same |
JP2018157347A (en) * | 2017-03-16 | 2018-10-04 | ヤマハ株式会社 | Vibration transducer |
JP2019176291A (en) * | 2018-03-28 | 2019-10-10 | パナソニックIpマネジメント株式会社 | Ultrasonic transducer |
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