JPH085811A - Production of diffraction grating - Google Patents
Production of diffraction gratingInfo
- Publication number
- JPH085811A JPH085811A JP6132975A JP13297594A JPH085811A JP H085811 A JPH085811 A JP H085811A JP 6132975 A JP6132975 A JP 6132975A JP 13297594 A JP13297594 A JP 13297594A JP H085811 A JPH085811 A JP H085811A
- Authority
- JP
- Japan
- Prior art keywords
- diffraction grating
- glass
- mold
- shape
- base plate
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Pending
Links
Landscapes
- Diffracting Gratings Or Hologram Optical Elements (AREA)
Abstract
Description
【０００１】[0001]
【産業上の利用分野】本発明は、例えば透過型としても
用いられる、ガラス製の回折格子の製造方法に関するも
のである。BACKGROUND OF THE INVENTION 1. Field of the Invention The present invention relates to a method for manufacturing a diffraction grating made of glass, which is also used as a transmission type.
【０００２】[0002]
【従来の技術】最近、マイクロオプティックスのめざま
しい発展により微細な形態を持った光学素子が盛んに利
用されているが、そのなかでもサブミクロンの精度で形
状形成された回折格子も幅広い分野で活用されている。2. Description of the Related Art Recently, due to the remarkable development of micro-optics, optical elements with fine shapes have been widely used. Among them, diffraction gratings formed with sub-micron precision are also used in a wide range of fields. Has been done.
【０００３】その製造方法としては、以前から知られて
いるように高精度なルーリングエンジンを用いて基板に
直接刻印する方法や、レジスト膜を形成した基板を物理
的にエッチングして鋸状のパターンを形成する方法、等
が用いられてきた。As a manufacturing method thereof, as is known in the art, a method of directly stamping on a substrate by using a highly accurate ruling engine, or a sawtooth pattern by physically etching a substrate on which a resist film is formed is used. Have been used.
【０００４】しかしながら、これらの製作方法では、１
個の回折格子を製作するのに、多大な時間を要するこ
と、高精度なものを安定して製作することが難しい。そ
こで、最近になって、特開平２−１９９４０２のよう
に、超硬合金等の型の母材上に貴金属合金薄膜を成膜
し、その上にレジストを形成して貴金属合金薄膜を物理
的にエッチングすることにより回折格子パターンを形成
し、これを型として用いて（図４）、平板ガラス上に押
しつけて、上記型の反転形状を転写して回折格子を作製
するような方法も提案されている。However, in these manufacturing methods, 1
It takes a lot of time to manufacture individual diffraction gratings, and it is difficult to stably manufacture high-precision diffraction gratings. Therefore, recently, as in Japanese Patent Laid-Open No. 2-199402, a precious metal alloy thin film is formed on a base material of a mold such as cemented carbide, and a resist is formed thereon to physically form the precious metal alloy thin film. A method has also been proposed in which a diffraction grating pattern is formed by etching, is used as a mold (FIG. 4), and is pressed onto a flat glass plate to transfer an inverted shape of the mold to produce a diffraction grating. There is.
【０００５】[0005]
【発明が解決しようとする課題】しかしながら、上記の
ような従来の方法では、やはり高性能のものを安定して
大量に製作することができなかった。その理由として
は、このような貴金属合金膜をエッチングすることによ
り得られた型によって加圧成形され、その反転形状を持
った回折格子では十分な回折効率が得られないという問
題点があった。さらに、加圧成形を続けるに従い、型の
溝パターンの高さが徐々に変化し、そのため反転転写さ
れた回折格子も徐々に性能が劣化するという問題点もあ
った。However, with the conventional method as described above, it is still impossible to stably manufacture a large amount of high-performance products. The reason is that there is a problem in that sufficient diffraction efficiency cannot be obtained with a diffraction grating that is pressure-molded by a mold obtained by etching such a noble metal alloy film and has an inverted shape. Further, as the pressure molding is continued, the height of the groove pattern of the mold gradually changes, so that the performance of the reversibly transferred diffraction grating also gradually deteriorates.
【０００６】又、他の型材料を考えた場合、ガラスレン
ズの成形に用いられるような、例えば、超硬合金やセラ
ミックス等では、高性能な回折格子の製作に対応できる
ような、高い表面粗さを持ち且つ高精度な形状に格子パ
ターンを製作することが難しく、実際には型の製作が困
難であるというのが実状であった。In consideration of other mold materials, for example, cemented carbide and ceramics, which are used for molding glass lenses, have a high surface roughness that can be used to manufacture high-performance diffraction gratings. In reality, it is difficult to manufacture a lattice pattern in a highly precise and precise shape, and it is actually difficult to manufacture a mold.
【０００７】本発明は、高性能な回折格子を安定して安
価に供給するための製造方法を提供することを目的とす
る。An object of the present invention is to provide a manufacturing method for stably and inexpensively supplying a high-performance diffraction grating.
【０００８】[0008]
【課題を解決するための手段】上記のような問題点を解
決し、高性能な回折格子を安定して安価に供給するため
に鋭意研究した結果、石英ガラス基板の表面を回折格子
の形状に加工し、この基板上に貴金属薄膜を成膜し、こ
れを型として用いて、熱軟化したガラス部材に押し当て
て、ガラス部材の表面に回折格子の形状を転写すること
により所望の高い性能の回折格子を安定して製造できる
ことを見いだし、本発明を成すに至った。[Means for Solving the Problems] As a result of intensive studies to solve the above problems and stably supply a high-performance diffraction grating at low cost, the surface of a quartz glass substrate was formed into a diffraction grating shape. After processing, deposit a precious metal thin film on this substrate, use it as a mold, press it against a heat-softened glass member, and transfer the shape of the diffraction grating to the surface of the glass member to obtain the desired high performance. The inventors have found that a diffraction grating can be manufactured stably, and have completed the present invention.
【０００９】[0009]
【作用】本発明のように、石英ガラス基板の平面上に回
折格子の形状を形成することにより、高い表面粗さと高
精度な形状を持った回折格子の成形用の型としての形状
仕様を十分満足することができるようになる。また、こ
れをガラス成形用の型として用いる場合には、このまま
では、加熱軟化した際にガラス素材との間で、加圧成形
の工程において融着を起こしてしまう。それに対処する
ため、格子形状の形成された基板面の上に、ガラスに対
して離型効果のある貴金属薄膜を成膜しておく。この貴
金属薄膜には、よく知られているような、白金、パラジ
ウム、イリジウム、ロジウム等の周期律表のＶIII族元
素及びその合金が使用できる。成膜したままでは型とし
ての強度上十分でないものについては、成膜後にベーキ
ング処理を行うことによって、膜強度を改善することが
可能である。By forming the shape of the diffraction grating on the plane of the quartz glass substrate as in the present invention, the shape specification as a mold for molding the diffraction grating having a high surface roughness and a highly accurate shape can be sufficiently obtained. You will be able to be satisfied. Further, when this is used as a mold for glass molding, if it is left as it is, it will cause fusion bonding with the glass material when it is softened by heating in the step of pressure molding. In order to cope with this, a noble metal thin film having a releasing effect on glass is formed on the surface of the substrate having the lattice shape. For this noble metal thin film, well-known elements such as platinum, palladium, iridium, rhodium, and other elements of Group VIII of the Periodic Table and alloys thereof can be used. If the formed film is not sufficiently strong as a mold, it is possible to improve the film strength by performing a baking treatment after the film formation.
【００１０】このような処理を行った石英ガラス製の型
を用いて、加熱軟化したガラス素材を加圧成形すること
により、回折格子の形状がガラス素材の上に反転転写さ
れる。これによって、光学性能の高い回折格子を安定し
て大量安価に製造することができる。ガラス素材を加熱
軟化する条件および加圧成形する条件は、用いるガラス
素材の熱的性質、機械的性質に応じて、当然やや異なる
条件が必要になるので、使用する硝種によって、最適に
設定して成形工程を行えばよい。The shape of the diffraction grating is inverted and transferred onto the glass material by press-molding the heat-softened glass material using a mold made of quartz glass which has been subjected to such a treatment. As a result, a diffraction grating having high optical performance can be stably manufactured in large quantities at low cost. The conditions for heating and softening the glass material and the conditions for pressure molding naturally need to be slightly different depending on the thermal and mechanical properties of the glass material used.Therefore, the optimum setting should be made according to the glass type used. A molding process may be performed.
【００１１】このように、本発明を用いることにより、
いままで高価であったガラス製の高性能な回折格子を安
価に安定して製造することが可能になる。As described above, by using the present invention,
It becomes possible to stably manufacture a high-performance glass diffraction grating, which has been expensive until now, at a low cost.
【００１２】[0012]
【実施例】以下、本発明の実施例について、図面を用い
て詳細に説明する。Embodiments of the present invention will be described in detail below with reference to the drawings.
【００１３】図２は、本実施例で用いた型の断面図であ
る。型として用いたものは１０ｍｍ×１０ｍｍで厚さが
３ｍｍの石英ガラス基板である。この基板の一面を鏡面
研磨した後、その平面上にエッチングによって回折格子
のパターンを形成した。形成したパターンはピッチが１
００μｍで、溝幅は５０μｍ、深さが約０．３μｍであ
る。FIG. 2 is a sectional view of the mold used in this embodiment. The mold used was a quartz glass substrate having a size of 10 mm × 10 mm and a thickness of 3 mm. After mirror-polishing one surface of this substrate, a diffraction grating pattern was formed on the flat surface by etching. The formed pattern has a pitch of 1
The groove width is 50 μm and the depth is about 0.3 μm.
【００１４】このパターンの上に、純白金（Ｐｔが９
９．９重量％以上）膜４をスパッタリングによって、膜
厚３００Åの厚さに成膜した。さらに今回は、成膜後、
５×１０~5Torrの真空中において８００゜Ｃで６０分間
のベーキングを行った。On this pattern, pure platinum (Pt is 9
The film 4 was formed into a film having a thickness of 300 Å by sputtering. Furthermore, this time, after film formation,
Baking was performed at 800 ° C. for 60 minutes in a vacuum of 5 × 10 5 Torr.
【００１５】貴金属膜の厚さは、回折格子パターンの溝
の深さによっても異なるが、膜の安定性などを考慮する
と、１０００Å以下が好ましく、３０Å以上で３００Å
以下であれば十分な効果を発揮する。The thickness of the noble metal film varies depending on the depth of the grooves of the diffraction grating pattern, but considering the stability of the film, it is preferably 1000 Å or less, and 30 Å or more and 300 Å.
If it is below, a sufficient effect is exhibited.
【００１６】このようにして得られた回折格子パターン
を形成した石英ガラス基板を、図１のように加圧成型時
の上型２として用いて、光学ガラス部材１の加圧成形を
行った。The optical glass member 1 was pressure-molded by using the quartz glass substrate having the diffraction grating pattern thus obtained as the upper mold 2 at the time of pressure molding as shown in FIG.
【００１７】ガラス部材１を上型２と下型５との間に挿
入したワーク２０の、加圧成形状態の断面図を図１に示
す。実施例で用いたガラス部材１の硝種はＦＣ３、形状
は両面を鏡面研磨した平行平板で、大きさは８ｍｍ×８
ｍｍ、厚さは１．５ｍｍである。FIG. 1 shows a sectional view of a work 20 in which the glass member 1 is inserted between the upper mold 2 and the lower mold 5 in a pressure-molded state. The glass type of the glass member 1 used in the example is FC3, the shape is a parallel flat plate whose both surfaces are mirror-polished, and the size is 8 mm × 8.
mm and the thickness is 1.5 mm.
【００１８】本実施例の回折格子の製造手順を図１、図
３を用いて説明する。本実施例では、図３に示すような
構造の加圧成型装置を用いて、回折格子を製造する。A procedure for manufacturing the diffraction grating of this embodiment will be described with reference to FIGS. In this embodiment, a diffraction grating is manufactured using a pressure molding device having a structure as shown in FIG.
【００１９】まず、図１のように、ガラス部材１を、下
型５の鏡面研磨した平面部の上に載せ、その上に上述の
石英ガラスの上型２をセットする。この時、石英ガラス
の上型２の回折格子パターンが形成された面が、ガラス
部材１と接するように配置する。この成形用のワーク２
０を、図３の加圧成形装置の載せ台６の上に設置する。
そして、リークバルブ１７を閉じ、バルブ１４、１５、
１６を操作して、ワーク２０が配置された装置本体１１
のチャンバー１８内を、油回転ポンプ１２、油拡散ポン
プ１３により、真空計１９が５×１０~5Torrを示すまで
真空に引く。その後、ヒーター８によって、ワーク２０
全体を加熱することにより、ガラス部材１を４５０゜Ｃ
に加熱し軟化させる。そして、プレス軸７を介して、シ
リンダー１０により１２０ｋｇｆの荷重を、下型５と上
型２との間に負荷し、ガラス部材１を加圧成形した。ワ
ーク２０の熱がシリンダー１０に伝導しないように、プ
レス軸７には、断熱板９が取り付けられている。First, as shown in FIG. 1, the glass member 1 is placed on the mirror-polished flat surface of the lower mold 5, and the upper mold 2 of the quartz glass is set thereon. At this time, the surface of the upper mold 2 of the quartz glass on which the diffraction grating pattern is formed is arranged so as to be in contact with the glass member 1. This forming work 2
0 is set on the mounting table 6 of the pressure molding apparatus of FIG.
Then, the leak valve 17 is closed and the valves 14, 15,
16 to operate the apparatus main body 11 on which the work 20 is placed
The chamber 18 is evacuated by the oil rotary pump 12 and the oil diffusion pump 13 until the vacuum gauge 19 indicates 5 × 10 5 Torr. After that, the work 20 is heated by the heater 8.
By heating the whole, the glass member 1 is heated to 450 ° C.
Heat to soften. Then, a load of 120 kgf was applied between the lower mold 5 and the upper mold 2 by the cylinder 10 via the press shaft 7 to press-mold the glass member 1. A heat insulating plate 9 is attached to the press shaft 7 so that the heat of the work 20 is not conducted to the cylinder 10.
【００２０】このような条件で、ガラス部材１を１００
０個、加圧成形を行った後でも、石英ガラスの上型２は
変化すること無く、又、得られた回折格子はその光学性
能においても、最初の成形品と同様な性能が安定して得
られた。Under these conditions, the glass member 1 is
Even after pressure molding, the upper mold 2 of the quartz glass did not change, and the obtained diffraction grating had stable optical performance similar to that of the first molded product. Was obtained.
【００２１】本実施例では、貴金属薄膜の成膜に物理的
蒸着法としてスパッタリングを用いたが、本発明ではこ
れに限るものではなく、真空蒸着、イオンプレーティン
グ、イオンミキシング等いずれを用いてもよい。In this embodiment, sputtering was used as the physical vapor deposition method for forming the noble metal thin film, but the present invention is not limited to this, and any of vacuum vapor deposition, ion plating, ion mixing, etc. may be used. Good.
【００２２】又、本実施例では、ガラス部材としてはＦ
Ｃ３を用いたが、これに限るものではなく、必要な光学
性能を満足するガラスであれば、ＢＳＣ７他、常用され
ている光学ガラスのいかなるものにも、回折格子を形成
することができる。もちろん硝種が異なれば、その屈折
率に応じて、格子の溝の深さが微妙に異なってくるの
で、石英ガラスの型の製作の際に対応すればよい。In this embodiment, the glass member is F
Although C3 is used, the present invention is not limited to this, and the diffraction grating can be formed on any commonly used optical glass such as BSC7 as long as the glass satisfies the required optical performance. Of course, if the type of glass is different, the depth of the grooves of the grating will be subtly different depending on the refractive index, so this can be dealt with when manufacturing the mold of quartz glass.
【００２３】[0023]
【発明の効果】本発明によれば、いままで高価であった
ガラス製の高性能な回折格子を、比較的簡易な方法によ
って供給することができるようになると共に、高性能を
維持しながら安定してかつ大量安価に供給することも実
現することができる。According to the present invention, a high-performance glass diffraction grating, which has been expensive until now, can be supplied by a relatively simple method, and the high-performance diffraction grating can be stably maintained while maintaining high performance. In addition, it is possible to realize a large quantity and cheap supply.
【図１】 本発明の実施例の加圧成形装置のワーク２０
の断面図である。FIG. 1 is a work 20 of a pressure molding apparatus according to an embodiment of the present invention.
FIG.
【図２】 本発明の実施例の石英ガラスで形成した上型
２の断面図である。FIG. 2 is a cross-sectional view of an upper mold 2 made of quartz glass according to an example of the present invention.
【図３】 本発明で実施例に用いた加圧成形装置のブロ
ック図である。FIG. 3 is a block diagram of a pressure molding apparatus used in an example of the present invention.
【図４】 従来技術の型の斜視図である。FIG. 4 is a perspective view of a prior art mold.
１・・・ガラス部材、２・・・石英ガラス型、３・・・
石英ガラス、４・・・純白金膜、５・・・下型、６・・
・載せ台、７・・・プレス軸、８・・・ヒーター、９・
・・断熱板、１０・・・シリンダー、１１・・・装置本
体、１２・・・油回転ポンプ、１３・・・油拡散ポン
プ、１４、１５、１６・・・バルブ、１７・・・リーク
バルブ、１８・・・チャンバー、１９・・・真空計、２
０・・・ワーク、４１・・・母材、４２・・・保護膜。1 ... Glass member, 2 ... Quartz glass mold, 3 ...
Quartz glass, 4 ... Pure platinum film, 5 ... Lower mold, 6 ...
・ Platform, 7 ... Press axis, 8 ... Heater, 9 ・
..Insulation plate, 10 ... Cylinder, 11 ... Device body, 12 ... Oil rotary pump, 13 ... Oil diffusion pump, 14, 15, 16 ... Valve, 17 ... Leak valve , 18 ... chamber, 19 ... vacuum gauge, 2
0 ... Work, 41 ... Base material, 42 ... Protective film.
Claims (6)
加工する工程と、 前記基板上に金属薄膜を成膜する工程と、 前記基板を熱軟化したガラス部材に押し当てて、ガラス
部材の表面に前記回折格子の形状を転写する工程とを有
することを特徴とする回折格子の製造方法。1. A step of processing a surface of a quartz glass substrate into a shape of a diffraction grating, a step of forming a metal thin film on the substrate, and a step of pressing the substrate against a heat-softened glass member to form a glass member. And a step of transferring the shape of the diffraction grating to the surface thereof.
を形成した後に、前記金属薄膜を熱処理することを特徴
とする回折格子の製造方法。2. The method of manufacturing a diffraction grating according to claim 1, wherein after the metal thin film is formed on the substrate, the metal thin film is heat-treated.
表のＶIII族元素およびその合金のうちいずれかの材料
により形成することを特徴とする回折格子の製造方法。3. The method of manufacturing a diffraction grating according to claim 1, wherein the metal thin film is formed of a material selected from the group VIII elements of the periodic table and alloys thereof.
１０００Å以下であることを特徴とする回折格子の製造
方法。4. The method of manufacturing a diffraction grating according to claim 1, wherein the metal thin film has a thickness of 1000 Å or less.
加工する工程と、 前記基板上に金属薄膜を成膜する工程とを有することを
特徴とする回折格子製造用の型の製造方法。5. A method of manufacturing a mold for manufacturing a diffraction grating, comprising: a step of processing a surface of a quartz glass substrate into a shape of a diffraction grating; and a step of forming a metal thin film on the substrate.
れた石英ガラス基板と、 前記石英ガラス基板上に配置された金属薄膜とを有する
ことを特徴とする回折格子製造用の型。6. A mold for producing a diffraction grating, comprising: a quartz glass substrate having a diffraction grating-shaped irregularity formed on the surface of the substrate; and a metal thin film disposed on the quartz glass substrate.
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP6132975A JPH085811A (en) | 1994-06-15 | 1994-06-15 | Production of diffraction grating |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP6132975A JPH085811A (en) | 1994-06-15 | 1994-06-15 | Production of diffraction grating |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| JPH085811A true JPH085811A (en) | 1996-01-12 |
Family
ID=15093872
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP6132975A Pending JPH085811A (en) | 1994-06-15 | 1994-06-15 | Production of diffraction grating |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPH085811A (en) |
Cited By (3)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN110540357A (en) * | 2019-06-30 | 2019-12-06 | 瑞声科技(新加坡)有限公司 | hot press forming glass and processing method thereof |
| US11072185B2 (en) | 2019-02-15 | 2021-07-27 | Seiko Epson Corporation | Liquid ejecting apparatus |
| US11167560B2 (en) | 2019-03-05 | 2021-11-09 | Seiko Epson Corporation | Damper unit and liquid ejecting apparatus |
-
1994
- 1994-06-15 JP JP6132975A patent/JPH085811A/en active Pending
Cited By (4)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| US11072185B2 (en) | 2019-02-15 | 2021-07-27 | Seiko Epson Corporation | Liquid ejecting apparatus |
| US11167560B2 (en) | 2019-03-05 | 2021-11-09 | Seiko Epson Corporation | Damper unit and liquid ejecting apparatus |
| CN110540357A (en) * | 2019-06-30 | 2019-12-06 | 瑞声科技(新加坡)有限公司 | hot press forming glass and processing method thereof |
| WO2021000131A1 (en) * | 2019-06-30 | 2021-01-07 | 瑞声声学科技(深圳)有限公司 | Hot press molded glass and processing method therefor |
Similar Documents
| Publication | Publication Date | Title |
|---|---|---|
| US4842633A (en) | Method of manufacturing molds for molding optical glass elements and diffraction gratings | |
| KR100390637B1 (en) | Glass substrate forming mold, glass substrate forming glass material, production method for glass substrate and glass substrate for magnetic disk | |
| US5405652A (en) | Method of manufacturing a die for use in molding glass optical elements having a fine pattern of concavities and convexities | |
| JPH05297210A (en) | Metal mold for forming diffraction grating and manufacture thereof, and diffraction grating and manufacture thereof | |
| WO2003023458A2 (en) | Multiple lens molding system and method | |
| JPH085811A (en) | Production of diffraction grating | |
| JP2002226219A5 (en) | ||
| JP3266659B2 (en) | Mold for molding optical element and method for molding optical element | |
| JPS62207726A (en) | Production of pressed lens | |
| CN112062450B (en) | Preparation method of amorphous glass hot-pressing mold and hot-pressing mold | |
| JP2641192B2 (en) | Method for manufacturing glass optical element having fine pattern on surface | |
| JP4554835B2 (en) | Mold for glass and method for producing glass molded product | |
| JPH10231129A (en) | Mold for press molding and glass molded product by the mold | |
| JP2501588B2 (en) | Mold for press molding optical glass element and molding method thereof | |
| JP2001322830A (en) | Press forming method for glass optical element and glass optical element formed by the same | |
| JP2001147309A (en) | Diffraction, grating, method for producing the same, and method for producing compound optical element | |
| JP2003026430A (en) | Mold for molding high-precision prism, method for manufacturing the same and method for manufacturing high-precision prism | |
| JPH07107195B2 (en) | Method for manufacturing press-molding die for optical element and method for manufacturing optical element | |
| JP2004210550A (en) | Molding mold | |
| JPH0226844A (en) | Method for forming optical element | |
| JP2004352584A (en) | Mold for shaping and its manufacturing method | |
| JPH07149528A (en) | Mold for forming microlens array, its production and production of microlens | |
| JPH0712940B2 (en) | Glass lens molding method | |
| JP3799676B2 (en) | Press forming method | |
| JP2003048723A (en) | Press forming method and press formed equipment |