JPH0843106A - Vibrating gyro - Google Patents
Vibrating gyroInfo
- Publication number
- JPH0843106A JPH0843106A JP6175546A JP17554694A JPH0843106A JP H0843106 A JPH0843106 A JP H0843106A JP 6175546 A JP6175546 A JP 6175546A JP 17554694 A JP17554694 A JP 17554694A JP H0843106 A JPH0843106 A JP H0843106A
- Authority
- JP
- Japan
- Prior art keywords
- vibrator
- vibration
- holding
- support member
- holding plate
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Pending
Links
Landscapes
- Gyroscopes (AREA)
Abstract
Description
【０００１】[0001]
【産業上の利用分野】この発明は音片型振動子を用いた
振動ジャイロに関し、特に、振動ジャイロを構成する振
動子の支持構造に関するものである。BACKGROUND OF THE INVENTION 1. Field of the Invention The present invention relates to a vibrating gyroscope using a sound piece type vibrator, and more particularly to a support structure for a vibrator which constitutes the vibrating gyro.
【０００２】[0002]
【従来の技術】図３（Ａ）はこの発明の背景となる従来
の振動ジャイロの一例を示す斜視図であり、図３（Ｂ）
はその断面図である。振動ジャイロ１は、振動子２を含
む。振動子２は、例えばエリンバなどの恒弾性金属から
なり、正３角柱状に形成される。振動子２の３つの側面
には、それぞれ圧電素子３ａ，３ｂ，３ｃが形成され
る。圧電素子３ａ，３ｂ，３ｃは、例えば圧電セラミッ
クの両面に電極を形成したものである。そして、この圧
電素子３ａ，３ｂ，３ｃが、振動子２の側面に接着さ
れ、このうち２つの圧電素子３ａ，３ｂが、駆動用およ
び出力信号検出用として用いられる。また、他の圧電素
子３ｃは、帰還用として用いられる。2. Description of the Related Art FIG. 3A is a perspective view showing an example of a conventional vibrating gyro, which is the background of the present invention, and FIG.
Is a sectional view thereof. The vibration gyro 1 includes a vibrator 2. The vibrator 2 is made of a constant elastic metal such as elinvar, and is formed in a regular triangular prism shape. Piezoelectric elements 3a, 3b, 3c are formed on the three side surfaces of the vibrator 2, respectively. The piezoelectric elements 3a, 3b, 3c are, for example, piezoelectric ceramics with electrodes formed on both sides. The piezoelectric elements 3a, 3b, 3c are adhered to the side surface of the vibrator 2, and the two piezoelectric elements 3a, 3b are used for driving and for detecting an output signal. The other piezoelectric element 3c is used for feedback.
【０００３】振動子２は、そのノード点付近の稜線部分
７で支持部材４に支持される。支持部材４は、タングス
テン等から成る高い弾性率を有する細い線材を、略コの
字状に成形したものである。支持部材４は、支持台５に
固定される。The vibrator 2 is supported by a support member 4 at a ridge line portion 7 near its node point. The support member 4 is formed by forming a thin wire material having a high elastic modulus, such as tungsten, into a substantially U-shape. The support member 4 is fixed to the support base 5.
【０００４】この振動ジャイロ１では、圧電素子３ａ，
３ｂと圧電素子３ｃとの間に、自励振駆動するための帰
還ループとして発振回路などが接続される。そして、発
振回路からの駆動信号によって、振動子２は圧電素子３
ｃの形成面と主に垂直に屈曲振動を生じる。この状態
で、振動子２の軸を中心として回転すると、コリオリ力
によって、振動子２の振動方向が変わり、圧電素子３
ａ，３ｂ間に出力差が生じる。その出力差を測定するこ
とによって、回転角速度を検知することができる。ここ
で、支持部材４を高い弾性率を有する細い線材から成形
しているのは、振動子２の振動を基板に漏洩させず、ま
た振動子の振動を妨げない振動吸収効果を得るためであ
る。In this vibrating gyro 1, the piezoelectric elements 3a,
An oscillation circuit or the like is connected between 3b and the piezoelectric element 3c as a feedback loop for self-excited driving. Then, the vibrator 2 causes the piezoelectric element 3 to move in response to the drive signal from the oscillation circuit.
Flexural vibration occurs mainly perpendicular to the surface on which c is formed. In this state, when rotating about the axis of the vibrator 2, the vibration direction of the vibrator 2 is changed by the Coriolis force, and the piezoelectric element 3
An output difference occurs between a and 3b. The rotational angular velocity can be detected by measuring the output difference. Here, the reason why the supporting member 4 is formed from a thin wire having a high elastic modulus is to obtain a vibration absorbing effect that does not leak the vibration of the vibrator 2 to the substrate and does not hinder the vibration of the vibrator. .
【０００５】[0005]
【発明が解決しようとする課題】しかしながら、外部か
ら過剰衝撃を受けた場合、支持部材４は細い線材からな
るため変形してしまうことが懸念され、この結果、所定
の振動が得られなくなり、特性の劣化や誤検知などを生
じるおそれがあった。However, when an excessive impact is applied from the outside, it is feared that the supporting member 4 will be deformed because it is made of a thin wire material. As a result, a predetermined vibration cannot be obtained and the characteristic There is a risk of deterioration and false detection.
【０００６】それゆえに、この発明の主たる目的は、従
来の振動子の支持構造と変わらない振動吸収効果を維持
しつつ、外部からの過剰衝撃による変形を防止できる支
持構造を提供することである。Therefore, a main object of the present invention is to provide a support structure capable of preventing the deformation due to an excessive impact from the outside while maintaining the vibration absorbing effect which is the same as that of the conventional vibrator support structure.
【０００７】[0007]
【課題を解決するための手段】本発明は、上記目的を達
成するために、柱状の振動子と、該振動子の側面に設け
られた駆動・検出手段と、前記振動子のノード点付近を
支持する板状の支持部材とを備え、前記支持部材を、前
記振動子のノード点付近での断面の重心を通り、かつ前
記振動子の屈曲振動方向と垂直である直線の延長上の位
置で保持したことを特徴とする。また、前記支持部材を
枠状に成形し、前記支持部材を保持する位置に接続部を
設け、前記振動子を前記支持部材の枠の内側に接合する
ことにより支持することを特徴とする。また、前記支持
部材を長手方向の側面の一部分によって保持する長板状
の保持板と、壁部を有する断面が略コの字状の保持台と
を備え、前記保持板を、前記保持台の壁部上面に前記振
動子の軸方向と平行にして前記保持板の端部もしくは端
部よりも内側の一部分のみで取り付け、前記保持板の端
部もしくは端部よりも内側の一部分以外の部分と前記保
持台の壁部上面の間には空隙部を介在させたことを特徴
とする。In order to achieve the above object, the present invention provides a columnar vibrator, drive / detection means provided on the side surface of the vibrator, and a vicinity of a node point of the vibrator. A plate-shaped support member for supporting the support member at a position on an extension of a straight line that passes through the center of gravity of the cross section near the node point of the vibrator and is perpendicular to the bending vibration direction of the vibrator. Characterized by holding. Further, the supporting member is formed in a frame shape, a connecting portion is provided at a position for holding the supporting member, and the vibrator is joined to the inside of the frame of the supporting member to support the vibrator. In addition, a long plate-shaped holding plate that holds the support member by a part of the side surface in the longitudinal direction, and a holding base having a wall portion and having a substantially U-shaped cross-section are provided. Attached to the upper surface of the wall portion in parallel with the axial direction of the oscillator by only an end portion of the holding plate or a portion inside the end portion, and an end portion of the holding plate or a portion other than a portion inside the end portion A void is provided between the upper surfaces of the walls of the holding table.
【０００８】[0008]
【作用】振動子の支持部材が板材からなるため、外部か
らの過剰衝撃による変形を防止することができる。ま
た、支持部材を、振動子のノード点付近での断面の重心
を通り、かつ振動子の振動の屈曲方向と垂直である直線
の延長上の位置で保持するので、振動子から支持部材を
介して保持板に伝わる振動を最小にできる。さらに、保
持板は端部のみで保持台に保持されることにより、保持
板は端部を節として振動するので、保持台への振動の漏
洩が少なく、また振動子の振動を妨げない。Since the supporting member of the vibrator is made of a plate material, it is possible to prevent deformation due to excessive impact from the outside. In addition, since the supporting member is held at a position on an extension of a straight line that passes through the center of gravity of the cross section near the node point of the vibrator and is perpendicular to the bending direction of the vibration of the vibrator, The vibration transmitted to the holding plate can be minimized. Further, since the holding plate is held by the holding table only at the ends, the holding plate vibrates with the ends as nodes, so that the vibration leaks to the holding table is small and the vibration of the vibrator is not hindered.
【０００９】[0009]
【実施例】図１（Ａ）はこの発明の一実施例を示す振動
ジャイロの斜視図であり、図１（Ｂ）はその断面図であ
る。振動ジャイロ１０は、振動子１２を含む。振動子１
２は、例えばエリンバ等の恒弾性金属、石英、ガラス、
水晶、セラミックス等、一般的に機械的振動を生じる材
料からなり、正３角柱状に形成される。1A is a perspective view of a vibrating gyroscope showing an embodiment of the present invention, and FIG. 1B is a sectional view thereof. The vibrating gyro 10 includes a vibrator 12. Oscillator 1
2 is a constant elastic metal such as Elinba, quartz, glass,
It is made of a material that generally causes mechanical vibration, such as crystal and ceramics, and is formed into a regular triangular prism shape.
【００１０】振動子１２の３つの側面には、それぞれ圧
電素子１３ａ，１３ｂ，１３ｃが形成される。圧電素子
１３ａ，１３ｂ，１３ｃは、例えば圧電セラミックスの
両面に電極を形成したものである。そして、この圧電素
子１３ａ，１３ｂ，１３ｃが、振動子１２の側面に接着
され、このうち２つの圧電素子１３ａ，１３ｂが、駆動
用および出力信号検出用として用いられる。また、他の
圧電素子１３ｃは、帰還用として用いられる。Piezoelectric elements 13a, 13b, 13c are formed on the three side surfaces of the vibrator 12, respectively. The piezoelectric elements 13a, 13b, 13c are, for example, piezoelectric ceramics with electrodes formed on both sides. The piezoelectric elements 13a, 13b, 13c are adhered to the side surface of the vibrator 12, and two of the piezoelectric elements 13a, 13b are used for driving and detecting an output signal. The other piezoelectric element 13c is used for feedback.
【００１１】支持部材１４は、Ｆｅ−Ｎｉ合金、恒弾性
鋼等の板材からなり、ほぼロの字型の枠状に成形され
る。振動子１２は、そのノード点付近の稜線部分の接合
点１７で、支持部材１４の枠の内側の上辺中央部に、ス
ポット溶接やレーザ溶接、半田付け、銀ロウ付け等で接
合される。支持部材１４の板材の厚みは、０．１〜１ｍ
ｍ程度が望ましく、またロの字型の枠の幅は、板材の厚
みよりも充分大きくすることが望ましい。なお、支持部
材１４を前述のロの字型の枠状の代わりに、台形型や楕
円型等の枠状に成形しても良い。The support member 14 is made of a plate material such as Fe-Ni alloy or constant elasticity steel, and is formed into a substantially square frame shape. The vibrator 12 is joined by spot welding, laser welding, soldering, silver brazing, or the like to the central portion of the upper side of the inside of the frame of the support member 14 at the joining point 17 of the ridge portion near its node point. The thickness of the plate material of the support member 14 is 0.1 to 1 m.
It is desirable that the width is approximately m, and that the width of the square frame is sufficiently larger than the thickness of the plate material. Note that the support member 14 may be formed in a frame shape such as a trapezoidal shape or an elliptical shape instead of the above-mentioned square frame shape.
【００１２】保持台１５は、Ｆｅ−Ｎｉ合金、恒弾性
鋼、アルミニウム等の非鉄金属、セラミックス、ガラ
ス、ガラス充填エポキシ樹脂等からなり、一対の壁部１
５ａを有し、振動子１２の下側部分のほぼ全体を覆うよ
うに断面がコの字状に成形される。また、壁部１５ａの
それぞれの上面には、後述する保持板１６と保持台１５
の壁部上面の間に空隙部を設けるために、保持板１６の
接合位置に対応して凹部２０が形成される。The holding table 15 is made of Fe--Ni alloy, constant elasticity steel, non-ferrous metal such as aluminum, ceramics, glass, glass-filled epoxy resin, etc.
5a and has a U-shaped cross section so as to cover almost the entire lower portion of the vibrator 12. Further, a holding plate 16 and a holding table 15 which will be described later are provided on the upper surfaces of the wall portions 15a.
In order to provide a gap between the upper surfaces of the walls of the concave portion 20, the concave portion 20 is formed at the joining position of the holding plate 16.
【００１３】保持板１６は、Ｆｅ−Ｎｉ合金、恒弾性鋼
等の板材からなり、板状に成形され、保持台１５の一対
の壁部１５ａのそれぞれの上面に、振動子１２の軸方向
と平行に延びるように取り付けられる。保持板１６の取
り付けは、その両端の縁部に設けた接合部１９を、スポ
ット溶接やレーザ溶接、半田付け、銀ロウ付け、接着剤
等で接合することにより行う。なお、振動子１２の振動
をより妨げないため、振動子１２の屈曲振動に応じて保
持板１６が屈曲振動するときに保持板１６の端部を自由
端とし、保持台１５に加わるストレスを減少させること
も可能である。その場合、保持板１６をその両端から等
距離ずつ寄った位置のみで保持するために、保持板１６
の長手方向の寸法を保持台１５に形成された凹部２０の
長手方向の寸法よりも小さくし、凹部２０内には、保持
板１６を支持する位置に突起を形成する。また、保持板
１６の両端を折曲して脚部を設け、保持板１６を前記脚
部によって壁部１５ａの上面に取り付けることにより、
保持板１６と保持台１５の壁部上面の間に空隙部を設け
ることも可能である。その場合、保持台１５の壁部１５
ａの上面には凹部２０を設ける必要はない。The holding plate 16 is made of a plate material such as Fe-Ni alloy or constant elasticity steel, and is formed into a plate shape. The holding plate 16 has a pair of wall portions 15a on the upper surface of the holding plate 15 in the axial direction of the vibrator 12. It is attached so as to extend in parallel. The holding plate 16 is attached by joining the joints 19 provided at the edges of both ends thereof by spot welding, laser welding, soldering, silver brazing, adhesive or the like. Since the vibration of the vibrator 12 is not further disturbed, when the holding plate 16 flexurally vibrates in response to the flexural vibration of the vibrator 12, the end portion of the holding plate 16 is set as a free end to reduce stress applied to the holding table 15. It is also possible to let. In that case, in order to hold the holding plate 16 only at positions equidistant from both ends thereof, the holding plate 16
The dimension in the longitudinal direction is smaller than the dimension in the longitudinal direction of the recess 20 formed in the holding base 15, and a projection is formed in the recess 20 at a position for supporting the holding plate 16. Further, both ends of the holding plate 16 are bent to provide leg portions, and the holding plate 16 is attached to the upper surface of the wall portion 15a by the leg portions,
It is also possible to provide a gap between the holding plate 16 and the upper surface of the wall of the holding table 15. In that case, the wall portion 15 of the holding table 15
It is not necessary to provide the recess 20 on the upper surface of a.
【００１４】支持部材１４の、枠の左右辺それぞれの外
側の中央に、接続部１８を設ける。また接続部１８は、
振動子１２のノード点付近での断面の重心１２Ｇを通
り、かつ振動子１２の屈曲振動方向と垂直である直線の
延長上に位置する。支持部材１４は、接続部１８を介し
て保持板１６の長手方向の側面中央部に接合される。A connecting portion 18 is provided at the center of the outside of each of the left and right sides of the frame of the supporting member 14. Further, the connecting portion 18 is
It is located on an extension of a straight line that passes through the center of gravity 12G of the cross section near the node point of the vibrator 12 and is perpendicular to the bending vibration direction of the vibrator 12. The support member 14 is joined to the central portion of the side surface of the holding plate 16 in the longitudinal direction via the connecting portion 18.
【００１５】なお、支持部材１４、保持板１６、接続部
１８は一体に成形されてもよい。The support member 14, the holding plate 16, and the connecting portion 18 may be integrally formed.
【００１６】この振動ジャイロ１０では、圧電素子１３
ａ，１３ｂと圧電素子１３ｃとの間に、自励振駆動する
ための帰還ループとして発振回路（図示せず）などが接
続される。そして、発振回路からの駆動信号によって、
振動子１２は、圧電素子１３ｃの形成面に主に垂直な方
向に屈曲振動する。この状態で、振動子１２の軸を中心
として回転すると、コリオリ力によって、振動子１２の
振動方向が変わり、圧電素子１３ａ，１３ｂ間に出力差
が生じる。その出力差を測定することによって、回転角
速度を検知することができる。In this vibrating gyro 10, the piezoelectric element 13
An oscillation circuit (not shown) or the like is connected between a and 13b and the piezoelectric element 13c as a feedback loop for self-excited driving. Then, by the drive signal from the oscillation circuit,
The vibrator 12 flexurally vibrates mainly in a direction perpendicular to the surface on which the piezoelectric element 13c is formed. In this state, when the vibrator 12 is rotated about its axis, the vibration direction of the vibrator 12 is changed by the Coriolis force, and an output difference occurs between the piezoelectric elements 13a and 13b. The rotational angular velocity can be detected by measuring the output difference.
【００１７】また、このように形成された振動ジャイロ
１０における振動子の支持構造は、圧電素子１３ａ，１
３ｂ，１３ｃと発振回路を結ぶ配線の通路としても使用
することができる。The supporting structure of the vibrator in the vibrating gyroscope 10 formed in this way is composed of the piezoelectric elements 13a, 1a.
It can also be used as a passage for a wire connecting the oscillation circuits 3b and 13c.
【００１８】ここで、以下に本実施例の振動ジャイロ１
０において、振動子１２の振動の妨害を抑制し、保持台
１５への振動の漏洩を防止する動作について説明する。Here, the vibration gyro 1 of the present embodiment will be described below.
At 0, the operation of suppressing the vibration interference of the vibrator 12 and preventing the vibration leakage to the holding table 15 will be described.
【００１９】３次元座標軸のＸ軸を、振動子１２の圧電
素子１３ｃを含む面と垂直方向にとり、Ｙ軸を、振動子
１２の圧電素子１３ｃを含む面に水平方向にとり、Ｚ軸
を振動子１２の軸方向にとる。そして、振動子１２の屈
曲振動を、Ｘ軸方向の屈曲振動（以下、Ｆｘモードとす
る）と、Ｙ軸方向の屈曲振動（以下、Ｆｙモードとす
る）に分解して考える。The X-axis of the three-dimensional coordinate axes is perpendicular to the surface of the vibrator 12 including the piezoelectric element 13c, the Y-axis is horizontal to the surface of the vibrator 12 including the piezoelectric element 13c, and the Z-axis is the vibrator. Take 12 axial directions. Then, the bending vibration of the vibrator 12 is decomposed into bending vibration in the X-axis direction (hereinafter, referred to as Fx mode) and bending vibration in the Y-axis direction (hereinafter, referred to as Fy mode).
【００２０】Ｆｘモードの振動に対して、支持部材１４
はＸ軸方向の並進運動エネルギーと、接合部１８を通る
Ｙ軸まわりの回転運動エネルギーを受ける。Ｘ軸方向の
並進運動エネルギーによる支持部材１４の振動は、接続
部１８に収束し、次に保持板１６に拡散され、接合部１
９で振動の節をつくる。Ｙ軸まわりの回転運動エネルギ
ーによる支持部材１４の振動は、接続部１８で節をつく
り、次に保持板１６に拡散され、接合部１９で、また振
動の節をつくる。いっぽうＦｙモードの振動に対して
は、支持部材１４はＹ軸方向の並進運動エネルギーと、
接合点１７を通るＸ軸まわりの回転運動エネルギーを受
ける。Ｙ軸方向の並進運動エネルギーは、接続部１８に
収束し、次に保持板１６に拡散され、接合部１９に再度
収束する。Ｘ軸まわりの回転運動エネルギーによる支持
部材１４の振動は、接合点１７で節をつくり、次に保持
板１６に拡散され、接合部１９に再度収束する。For the Fx mode vibration, the supporting member 14
Receives translational kinetic energy in the X-axis direction and rotational kinetic energy about the Y-axis passing through the joint 18. The vibration of the support member 14 due to the translational kinetic energy in the X-axis direction is converged on the connection portion 18 and then diffused to the holding plate 16, so that the joint portion 1 is joined.
Make a node of vibration with 9. The vibration of the support member 14 due to the rotational kinetic energy about the Y-axis forms a node at the connection 18 and is then diffused to the retaining plate 16 and again at the joint 19 to create a node of vibration. On the other hand, with respect to the Fy mode vibration, the support member 14 has translational kinetic energy in the Y-axis direction,
It receives rotational kinetic energy about the X axis passing through the junction point 17. The translational kinetic energy in the Y-axis direction converges on the connecting portion 18, then diffuses to the holding plate 16, and converges on the joint portion 19 again. The vibration of the support member 14 due to the rotational kinetic energy around the X axis forms a node at the joint point 17, is then diffused to the holding plate 16, and converges again at the joint portion 19.
【００２１】Ｆｘモードの振動は、保持板１６が接合部
１９のみにより保持されることにより、接合部１９を節
としたＸ軸方向の屈曲振動を行うので、接合部１９を介
しての保持台１５への振動の漏洩が少なく、また振動子
１２の振動も妨げられない。いっぽうＦｙモードの振動
の保持板への漏洩はもともと微小であるため、振動子１
２の振動の妨害といった影響は少ない。In the Fx mode vibration, since the holding plate 16 is held only by the joint portion 19, bending vibration in the X-axis direction with the joint portion 19 as a node is performed. Therefore, the holding table through the joint portion 19 is used. There is little leakage of vibration to 15, and the vibration of the vibrator 12 is not disturbed. On the other hand, since the leakage of the Fy mode vibration to the holding plate is originally minute, the vibrator 1
The influence of the vibration of 2 is small.
【００２２】本実施例の振動ジャイロ１０の１メートル
落下試験を行ったところ、振動子１２の支持構造に変形
は認められなかった。振動子１２の振動の尖鋭度Ｑｍを
比較すると、従来のジャイロと変わらない値が得られ
た。このことは、振動子１２の支持構造は強固であり、
かつ振動子１２の振動の抑制作用も従来と変わらないこ
とを示している。また、振動ジャイロ１０の静止時の出
力電圧の温度特性についても、−３０℃〜８５℃の範囲
で１．０ｍＶ以下と、良好な値が得られた。When the 1-meter drop test of the vibrating gyroscope 10 of this embodiment was conducted, no deformation was found in the support structure of the vibrator 12. Comparing the vibration sharpness Qm of the vibrator 12, a value that is not different from that of the conventional gyro was obtained. This means that the support structure of the vibrator 12 is strong,
Moreover, it is shown that the vibration suppressing action of the vibrator 12 is not different from the conventional one. Also, the temperature characteristics of the output voltage of the vibration gyro 10 at rest were as good as 1.0 mV or less in the range of −30 ° C. to 85 ° C.
【００２３】図２は、前述した実施例の変形例を示す振
動ジャイロの斜視図である。この変形例は、Ｆｘモード
の振動に対しては前述した実施例と同等の効果を有しつ
つ、Ｆｙモードの振動に対して、さらなる振動吸収効果
を有するようにしたものである。なお、前述した実施例
と同一若しくは同等の部分については、同じ符号を付し
てその説明を省略する。支持部材１４は、接続部１８を
介して保持板２６の側面端部に接合され、保持板２６は
片端の縁部のみに設けた接合部１９により、保持台２５
の一対の壁部２５ａの上面に形成された凹部２０の一部
を覆うように接合される。このとき、支持部材１４の左
右に位置するそれぞれの保持板２６、接合部１９、凹凸
部２０は支持部材１４に対して保持台２５の長手方向に
沿って互いに相反する方向に延びるように形成し、また
２つの支持部材１４の左側どうし、右側どうしの保持板
２６、接合部１９、凹部２０は保持台２５の長手方向に
沿ってそれぞれ同じ向きに延びるように形成する。FIG. 2 is a perspective view of a vibrating gyroscope showing a modification of the above-described embodiment. This modification has an effect similar to that of the above-described embodiment with respect to Fx mode vibration, and further has a further vibration absorption effect with respect to Fy mode vibration. The same or equivalent parts as those of the above-described embodiment are designated by the same reference numerals, and the description thereof will be omitted. The support member 14 is joined to the side end portion of the holding plate 26 via the connection portion 18, and the holding plate 26 is joined to the holding table 25 by the joining portion 19 provided only on one edge portion.
Are joined so as to cover a part of the concave portion 20 formed on the upper surfaces of the pair of wall portions 25a. At this time, the holding plates 26, the joints 19, and the uneven portions 20 located on the left and right of the support member 14 are formed so as to extend in mutually opposite directions along the longitudinal direction of the holding table 25 with respect to the support member 14. The holding plate 26, the joint portion 19, and the recess 20 on the left side and the right side of the two support members 14 are formed so as to extend in the same direction along the longitudinal direction of the holding table 25.
【００２４】この変形例における振動子の支持構造は、
Ｆｘモードの振動に対しては、前述した実施例と同等の
効果を持つ。いっぽうＦｙモードの振動に対しては、保
持板２６を片端の縁部（接合部１９）のみで支持するの
で、保持板２６の接合部１９を通るＸ軸まわりの回転振
動が発生することにより、振動子１２のＦｙモードの振
動成分をも効果的に吸収できる。その結果、前述の実施
例に比べて、保持台２５への振動の漏洩が少なく、また
振動子１２の振動も妨げられない効果がより大きくな
る。The support structure of the vibrator in this modification is
With respect to the Fx mode vibration, it has the same effect as that of the above-described embodiment. On the other hand, with respect to the vibration in the Fy mode, since the holding plate 26 is supported only by the edge portion (joint portion 19) at one end, rotational vibration around the X axis passing through the joint portion 19 of the holding plate 26 is generated, The Fy mode vibration component of the vibrator 12 can also be effectively absorbed. As a result, as compared with the above-described embodiment, the effect of less leakage of vibration to the holding table 25 and the effect of not disturbing the vibration of the vibrator 12 becomes greater.
【００２５】なお、振動子１２の側面に圧電素子を設け
たものについて述べたが、振動子そのものを圧電体で構
成することもでき、その場合は駆動用、出力検出用の電
極を振動子側面に設けて振動ジャイロを構成する。Although the piezoelectric element is provided on the side surface of the vibrator 12, the vibrator itself may be made of a piezoelectric material. In that case, the electrodes for driving and output detection are provided on the side surface of the vibrator. The vibration gyro is provided on the.
【００２６】[0026]
【発明の効果】振動子の支持部材が板材からなるため、
外部からの過剰衝撃による変形を防止することができ
る。また、支持部材を、振動子のノード点付近での断面
の重心を通り、かつ振動子の屈曲振動方向と垂直である
直線の延長上の位置で保持するので、振動子から支持部
材を介して保持板に伝わる振動を最小にできる。さら
に、保持板は端部のみで保持台に保持されることによ
り、端部を節として振動するので、保持台への振動の漏
洩が少なく、また振動子の振動を妨げない良好な振動吸
収効果をも得られる。その結果、より耐振性・耐衝撃性
に優れた振動ジャイロを提供することが可能になる。Since the supporting member of the vibrator is made of a plate material,
It is possible to prevent deformation due to excessive impact from the outside. Further, since the supporting member is held at a position on the extension of a straight line that passes through the center of gravity of the cross section near the node point of the vibrator and is perpendicular to the bending vibration direction of the vibrator, The vibration transmitted to the holding plate can be minimized. Further, since the holding plate is held by the holding table only at the ends, it vibrates with the ends as nodes, so there is little vibration leakage to the holding table, and a good vibration absorption effect that does not interfere with the vibration of the vibrator. Can also be obtained. As a result, it becomes possible to provide a vibration gyro with more excellent vibration resistance and shock resistance.
【図１】（Ａ）は本発明の一実施例を示す振動ジャイロ
の斜視図であり、（Ｂ）はその断面図である。FIG. 1A is a perspective view of a vibrating gyroscope showing an embodiment of the present invention, and FIG. 1B is a sectional view thereof.
【図２】図１に示した実施例の変形例を示す振動ジャイ
ロの斜視図である。FIG. 2 is a perspective view of a vibrating gyroscope showing a modification of the embodiment shown in FIG.
【図３】（Ａ）は従来の振動ジャイロの斜視図であり、
（Ｂ）はその断面図である。FIG. 3A is a perspective view of a conventional vibrating gyro,
(B) is a sectional view thereof.
１０ 振動ジャイロ １２ 振動子 １２Ｇ 振動子の重心 １３ａ，１３ｂ，１３ｃ 圧電素子 １４ 支持部材 １５，２５ 保持台 １５ａ，２５ａ 壁部 １６，２６ 保持板 １７ 接合点 １８ 接続部 １９ 接合部 ２０ 凹部 10 Vibration Gyro 12 Oscillator 12G Center of Gravity of Oscillator 13a, 13b, 13c Piezoelectric Element 14 Supporting Member 15, 25 Holding Base 15a, 25a Wall Part 16, 26 Holding Plate 17 Joining Point 18 Connecting Part 19 Joining Part 20 Recess
Claims (3)
れた駆動・検出手段と、前記振動子のノード点付近を支
持する板状の支持部材とを備え、前記支持部材を、前記
振動子のノード点付近での断面の重心を通り、かつ前記
振動子の屈曲振動方向と垂直である直線の延長上の位置
で保持したことを特徴とする振動ジャイロ。1. A column-shaped vibrator, drive / detection means provided on a side surface of the vibrator, and a plate-shaped support member for supporting the vicinity of a node point of the vibrator, the support member comprising: A vibrating gyro, wherein the vibrating gyro is held at a position on an extension of a straight line that passes through a center of gravity of a cross section of the vibrating element near a node point and is perpendicular to a bending vibration direction of the vibrating element.
材を保持する位置に接続部を設け、前記振動子を前記支
持部材の枠の内側に接合することにより支持することを
特徴とする、請求項１記載の振動ジャイロ。2. The support member is formed in a frame shape, a connecting portion is provided at a position for holding the support member, and the vibrator is supported by being joined to the inside of the frame of the support member. The vibration gyro according to claim 1.
よって保持する板状の保持板と、壁部を有する断面が略
コの字状の保持台とを備え、前記保持板を、前記振動子
の軸方向と平行に延びるように前記保持台の壁部上面に
前記保持板の端部もしくは節点付近で取り付け、前記保
持板の端部もしくは節点以外の部分と前記保持台の壁部
上面の間には空隙部を介在させたことを特徴とする、請
求項１、請求項２いずれかに記載の振動ジャイロ。3. A plate-shaped holding plate for holding the supporting member by a part of a side surface in the longitudinal direction, and a holding base having a wall portion and having a substantially U-shaped cross section. Attached to the upper surface of the wall portion of the holding table near the end portion or node of the holding plate so as to extend parallel to the axial direction of the child, and the portion other than the end portion or node of the holding plate and the upper surface of the wall portion of the holding table. The vibrating gyroscope according to any one of claims 1 and 2, characterized in that a void portion is interposed therebetween.
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP6175546A JPH0843106A (en) | 1994-07-27 | 1994-07-27 | Vibrating gyro |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP6175546A JPH0843106A (en) | 1994-07-27 | 1994-07-27 | Vibrating gyro |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| JPH0843106A true JPH0843106A (en) | 1996-02-16 |
Family
ID=15997974
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP6175546A Pending JPH0843106A (en) | 1994-07-27 | 1994-07-27 | Vibrating gyro |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPH0843106A (en) |
Cited By (2)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| EP0902253A2 (en) * | 1997-09-12 | 1999-03-17 | Murata Manufacturing Co., Ltd. | Vibrating gyroscope |
| CN102147253A (en) * | 2010-12-29 | 2011-08-10 | 重庆邮电大学 | Vibrating-beam gyro of vibrating-beam-type dual-cantilever-face bracing structure |
-
1994
- 1994-07-27 JP JP6175546A patent/JPH0843106A/en active Pending
Cited By (3)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| EP0902253A2 (en) * | 1997-09-12 | 1999-03-17 | Murata Manufacturing Co., Ltd. | Vibrating gyroscope |
| EP0902253A3 (en) * | 1997-09-12 | 2000-08-30 | Murata Manufacturing Co., Ltd. | Vibrating gyroscope |
| CN102147253A (en) * | 2010-12-29 | 2011-08-10 | 重庆邮电大学 | Vibrating-beam gyro of vibrating-beam-type dual-cantilever-face bracing structure |
Similar Documents
| Publication | Publication Date | Title |
|---|---|---|
| US20050061073A1 (en) | Vibratory gyroscope and electronic apparatus | |
| US5913244A (en) | Vibrator | |
| JPH1194557A (en) | Oscillation gyro | |
| JPH0843106A (en) | Vibrating gyro | |
| JPH09269227A (en) | Vibration gyroscope | |
| JP2741620B2 (en) | Vibrator support structure | |
| JPH06201386A (en) | Support structure for oscillator | |
| JP3045053B2 (en) | Vibrating gyro | |
| JP3037774B2 (en) | Angular velocity sensor and its vibration isolator | |
| JPH08159775A (en) | Vibration gyroscope | |
| JPH08145688A (en) | Oscillation gyro | |
| JP4256727B2 (en) | Support structure for vibrating gyroscope | |
| JPH0980069A (en) | Acceleration sensor | |
| JPH08145694A (en) | Oscillation gyro | |
| JP2000146593A (en) | Structure and method for supporting oscillating gyro | |
| JPH10332378A (en) | Oscillatory gyroscope | |
| JPH0723689Y2 (en) | Piezoelectric gyro oscillator | |
| JPH0238917A (en) | Vibration gyro | |
| JP3993602B2 (en) | Vibration gyro tuning fork type vibrator mounting structure | |
| JPH08201062A (en) | Oscillation gyro | |
| JPH07167659A (en) | Vibrating gyro | |
| JP2622334B2 (en) | Vibrating gyro | |
| JPH1114368A (en) | Support structure of vibrator | |
| JP2001241953A (en) | Vibrating gyro | |
| JPH10267661A (en) | Vibrator supporting structure |