JPH08318114A - Electret filter - Google Patents

Electret filter

Info

Publication number
JPH08318114A
JPH08318114A JP12654895A JP12654895A JPH08318114A JP H08318114 A JPH08318114 A JP H08318114A JP 12654895 A JP12654895 A JP 12654895A JP 12654895 A JP12654895 A JP 12654895A JP H08318114 A JPH08318114 A JP H08318114A
Authority
JP
Japan
Prior art keywords
electret
films
film
porous fluororesin
converted
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Pending
Application number
JP12654895A
Other languages
Japanese (ja)
Inventor
Reiji Hirata
麗司 平太
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Nitto Denko Corp
Original Assignee
Nitto Denko Corp
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Nitto Denko Corp filed Critical Nitto Denko Corp
Priority to JP12654895A priority Critical patent/JPH08318114A/en
Publication of JPH08318114A publication Critical patent/JPH08318114A/en
Pending legal-status Critical Current

Links

Abstract

PURPOSE: To further increase the efficiency to collect the dust suspending in the atmosphere by laminating porous fluororesin films one on another and converting the laminate to an electret. CONSTITUTION: A specified number of porous fluororesin films are laminated one on another, and the film is converted to an electret. A porous fluororesin film consisting of a polytetrafluoroethylene is appropriately used from the standpoint of its resistance to heat and chemicals. Although the thickness, etc., of the film are appropriately set, the thickness is ordinarily controlled to 5-5O0μm, the diameter of the micropore to 0.1-20μm and the porosity to 70-95%. The films can be partially bonded or fused to one another in the shape of point, streak, reticulation, etc. The film laminate is converted to a thermal electret, mechanoelectret, etc., by the respective conversion processes. Alternately, the films converted to an electret can be laminated. Consequently, an electret filter capable of collecting dust with high efficiency and decreased in pressure drop is obtained.

Description

【発明の詳細な説明】Detailed Description of the Invention

【０００１】[0001]

【産業上の利用分野】本発明は半導体、電子機器、薬
品、生化学的物質等の製造雰囲気や、電子機器の内部雰
囲気を清浄化するため等に用いるエレクトレットフィル
タの改良に関するものである。BACKGROUND OF THE INVENTION 1. Field of the Invention The present invention relates to an improvement in an electret filter used for cleaning semiconductor, electronic equipment, chemicals, biochemical substances and the like, and for cleaning the internal atmosphere of electronic equipment.

【０００２】[0002]

【従来の技術】エレクトレットフィルタはクーロン力と
誘起力を利用して雰囲気中に浮遊する塵埃を除去するも
のである。かようなエレクトレットフィルタとしては、
例えば、１枚のフッ素樹脂多孔質フィルムをエレクトレ
ット化したものが知られている。2. Description of the Related Art An electret filter removes dust floating in an atmosphere by utilizing Coulomb force and induction force. As such an electret filter,
For example, it is known that one fluororesin porous film is electretized.

【０００３】[0003]

【発明が解決しようとする課題】ところで、近年、上記
製品の製造雰囲気や機器内部の雰囲気の清浄化を一段と
高めることが要求されることが多くなってきている。し
かし、従来のエレクトレットフィルタによれば、塵埃の
捕集率は９９．９８５％程度（塵埃の粒径が約０．１〜
０．１５μｍのとき）が限度であり、かような要求には
応えることができない。従って、本発明は粉塵に対する
捕集率をより高めたエレクトレット化フィルタを提供す
ることを目的とする。By the way, in recent years, it has been increasingly demanded to further enhance the cleaning of the atmosphere for manufacturing the above products and the atmosphere inside the equipment. However, according to the conventional electret filter, the dust collection rate is about 99.985% (the particle size of dust is about 0.1
(When 0.15 μm) is the limit, and such a request cannot be met. Therefore, an object of the present invention is to provide an electretized filter having a higher dust collection rate.

【０００４】[0004]

【課題を解決するための手段】本発明に係るエレクトレ
ットフィルタは多孔質フッ素樹脂フィルムが所定枚重ね
合わされており、且つ、これら多孔質フッ素樹脂フィル
ムがエレクトレット化されていることを特徴とするもの
である。Means for Solving the Problems The electret filter according to the present invention is characterized in that a predetermined number of porous fluororesin films are superposed, and these porous fluororesin films are electretized. is there.

【０００５】本発明において用いる多孔質フィルムはポ
リテトラフルオロエチレン（以下、「ＰＴＦＥ」とい
う）、テトラフルオロエチレン−パーフルオロアルキル
ビニルエーテル共重合体、テトラフルオロエチレン−ヘ
キサフルオロプロピレン共重合体、エチレン−テトラフ
ルオロエチレン共重合体、ポリフッ化ビニリデン、ポリ
クロロトリフルオロエチレン等のフッ素樹脂から成るも
のであり、耐熱性、耐薬品性の点からはＰＴＦＥから成
るものが好適である。The porous film used in the present invention is polytetrafluoroethylene (hereinafter referred to as "PTFE"), tetrafluoroethylene-perfluoroalkylvinylether copolymer, tetrafluoroethylene-hexafluoropropylene copolymer, ethylene-tetrafluoroethylene. It is made of fluororesin such as fluoroethylene copolymer, polyvinylidene fluoride, polychlorotrifluoroethylene, etc. From the viewpoint of heat resistance and chemical resistance, PTFE is preferable.

【０００６】この多孔質フッ素樹脂フィルムの厚さ等は
適宜設定できるが、通常、厚さ約５〜５００μｍ、微細
孔の孔径約０．１〜２０μｍ、気孔率約７０〜９５％の
ものが用いられる。The thickness and the like of this porous fluororesin film can be appropriately set, but normally, a thickness of about 5 to 500 μm, a fine pore diameter of about 0.1 to 20 μm, and a porosity of about 70 to 95% are used. To be

【０００７】そして、本発明においては上記多孔質フッ
素樹脂フィルムの所定枚が重ね合わされる。フッ素樹脂
フィルム相互は点状、筋状、網目状等に部分的に接着あ
るいは融着させてもよい。In the present invention, a predetermined number of the above porous fluororesin films are superposed. The fluororesin films may be partially adhered or fused in a dot shape, a stripe shape, a mesh shape, or the like.

【０００８】このような本発明に係るエレクトレットフ
ィルタは多孔質フッ素樹脂フィルムを所定枚重ね合わ
せ、次いで、この重ね合わせ体に熱エレクトレット、エ
レクトロエレクトレット、メカノエレクトレット、ラジ
オエレクトレット、マグネットエレクトレット等のエレ
クトレット化法を適用してエレクトレット化する方法、
あるいはエレクトレット化された多孔質フッ素樹脂フィ
ルムを所定枚重ね合わせる方法等により得ることができ
る。In the electret filter according to the present invention, a predetermined number of porous fluororesin films are superposed on each other, and the superposed body is then electretized by a thermal electret, an electro electret, a mechano electret, a radio electret, a magnet electret or the like. To apply electret,
Alternatively, it can be obtained by a method of stacking a predetermined number of electretized porous fluororesin films.

【０００９】本発明に係るエレクトレットフィルタはこ
のように所定枚の多孔質フッ素樹脂フィルムを重ね合わ
せたものであり、使用時における圧力損失が増加するこ
とが懸念されたが、実施例にも示されているように圧力
損失の増加という不都合は生じないことが確認された。The electret filter according to the present invention is formed by stacking a predetermined number of porous fluororesin films in this way, and there was a concern that pressure loss during use would increase, but it is also shown in Examples. As described above, it was confirmed that the inconvenience of increase in pressure loss does not occur.

【００１０】[0010]

【実施例】以下、実施例により本発明を更に詳細に説明
する。The present invention will be described in more detail with reference to the following examples.

【００１１】実施例 厚さ１７μｍ、微細孔の平均孔径３μｍ、気孔率９０％
のＰＴＦＥ多孔質フィルムを５枚重ね合わせる。次に、
重ね合わせた多孔質フィルムに１０ｋｖ／ｃｍの条件で
１０秒間コロナ放電処理を行ってエレクトレットフィル
タを得た。Example: Thickness 17 μm, average fine pore diameter 3 μm, porosity 90%
5 sheets of PTFE porous film are piled up. next,
The superposed porous films were subjected to corona discharge treatment for 10 seconds under a condition of 10 kv / cm to obtain an electret filter.

【００１２】このエレクトレットフィルタにフタル酸ジ
オクチル粒子（粒径０．１〜０．１５μｍ）を１×１０
10個／ｍ3 の割合で含む風（温度２５℃）を風速５．３
ｃｍ／秒で送風してその捕集率および圧力損失を測定し
たところ、捕集率は９９．９９８％、圧力損失は５５ｍ
ｍＡｑであった。Dioctyl phthalate particles (particle size 0.1 to 0.15 μm) were added to this electret filter in an amount of 1 × 10.
Wind velocity of 10 pieces / m 3 (temperature 25 ℃)
When the air collection rate and pressure loss were measured by blowing air at a rate of cm / sec, the collection rate was 99.998% and the pressure loss was 55 m.
It was mAq.

【００１３】比較例 厚さ８５μｍ、微細孔の平均孔径２μｍ、気孔率９０％
のＰＴＦＥ多孔質フィルム１枚を実施例と同条件でコロ
ナ放電処理することによりエレクトレット化する。この
エレクトレットフィルタについて、実施例と同様にして
試験を行ったところ、捕集率は９９．９８５％、圧力損
失は５７ｍｍＡｑであった。Comparative Example Thickness 85 μm, average fine pore diameter 2 μm, porosity 90%
One of the PTFE porous films of No. 1 is electretized by corona discharge treatment under the same conditions as in the examples. When this electret filter was tested in the same manner as in the example, the collection rate was 99.985% and the pressure loss was 57 mmAq.

【００１４】[0014]

【発明の効果】本発明は上記のように構成されており、
捕集率が高く、しかも、圧力損失が小さいという利点が
ある。The present invention is configured as described above,
There are advantages that the collection rate is high and the pressure loss is small.

Claims (1)

【特許請求の範囲】[Claims] 【請求項１】 多孔質フッ素樹脂フィルムが所定枚重ね
合わされており、且つ、これら多孔質フッ素樹脂フィル
ムがエレクトレット化されていることを特徴とするエレ
クトレットフィルタ。1. An electret filter, characterized in that a predetermined number of porous fluororesin films are laminated, and these porous fluororesin films are electretized.
JP12654895A 1995-05-25 1995-05-25 Electret filter Pending JPH08318114A (en)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP12654895A JPH08318114A (en) 1995-05-25 1995-05-25 Electret filter

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP12654895A JPH08318114A (en) 1995-05-25 1995-05-25 Electret filter

Publications (1)

Publication Number Publication Date
JPH08318114A true JPH08318114A (en) 1996-12-03

Family

ID=14937907

Family Applications (1)

Application Number Title Priority Date Filing Date
JP12654895A Pending JPH08318114A (en) 1995-05-25 1995-05-25 Electret filter

Country Status (1)

Country Link
JP (1) JPH08318114A (en)

Cited By (4)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
WO1998026860A1 (en) * 1996-12-04 1998-06-25 Daikin Industries, Ltd. Filter medium and air filter unit using the same
WO2005009076A1 (en) * 2003-07-22 2005-01-27 Toho Kasei Co., Ltd. Material for heat-resistant electret and heat-resistant electret
JP2015098022A (en) * 2013-10-15 2015-05-28 株式会社ユポ・コーポレーション Filter
CN111437655A (en) * 2020-04-02 2020-07-24 青岛科凯达橡塑有限公司 Electret material for air filtration and preparation method thereof

Cited By (6)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
WO1998026860A1 (en) * 1996-12-04 1998-06-25 Daikin Industries, Ltd. Filter medium and air filter unit using the same
US6261979B1 (en) 1996-12-04 2001-07-17 Daikin Industries, Ltd. Filter medium and air filter unit using the same
WO2005009076A1 (en) * 2003-07-22 2005-01-27 Toho Kasei Co., Ltd. Material for heat-resistant electret and heat-resistant electret
JP2015098022A (en) * 2013-10-15 2015-05-28 株式会社ユポ・コーポレーション Filter
CN111437655A (en) * 2020-04-02 2020-07-24 青岛科凯达橡塑有限公司 Electret material for air filtration and preparation method thereof
CN111437655B (en) * 2020-04-02 2021-10-22 青岛科凯达橡塑有限公司 Electret material for air filtration and preparation method thereof

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