JPH08313248A - Apparatus and method for probe-type measurement of surface roughness - Google Patents
Apparatus and method for probe-type measurement of surface roughnessInfo
- Publication number
- JPH08313248A JPH08313248A JP12211095A JP12211095A JPH08313248A JP H08313248 A JPH08313248 A JP H08313248A JP 12211095 A JP12211095 A JP 12211095A JP 12211095 A JP12211095 A JP 12211095A JP H08313248 A JPH08313248 A JP H08313248A
- Authority
- JP
- Japan
- Prior art keywords
- detector
- measured
- surface roughness
- value
- stylus
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Granted
Links
Landscapes
- Measurement Of Length, Angles, Or The Like Using Electric Or Magnetic Means (AREA)
- Length Measuring Devices With Unspecified Measuring Means (AREA)
Abstract
Description
【0001】[0001]
【産業上の利用分野】本発明は、鏡面仕上げを施した金
属表面の表面粗さ等、被測定物表面の微小な凹凸等の表
面粗さを定量的に測定する、触針式表面粗さ測定器及び
測定方法に関し、測定精度の向上を図るべく考えたもの
である。BACKGROUND OF THE INVENTION The present invention relates to a stylus-type surface roughness for quantitatively measuring surface roughness such as surface roughness of a metal surface having a mirror finish, such as fine irregularities on the surface of an object to be measured. The measurement device and the measurement method are intended to improve the measurement accuracy.
【0002】[0002]
【従来の技術】例えば、鏡面仕上げを施した金属表面の
表面粗さを測定する為に、従来から各種の触針式表面粗
さ測定器が使用されている。上記表面粗さを表すパラメ
ータとしては、算術平均粗さ(Ra )、最大高さ(R
y )、十点平均粗さ(Rz )、凹凸の平均間隔(S
m )、局部山頂の平均間隔(S)、負荷長さ率(tp )
が、国際規格に対応してJIS(日本工業規格)に規定
されている(B0601−1994)。上記従来の触針
式表面粗さ測定器は、上記パラメータのうち、最大高
さ、十点平均粗さ等、縦方向に亙る粗さを表すパラメー
タを測定するものであった。2. Description of the Related Art For example, in order to measure the surface roughness of a mirror-finished metal surface, various kinds of stylus-type surface roughness measuring instruments have been conventionally used. The parameters representing the surface roughness include arithmetic mean roughness (R a ), maximum height (R a ).
y ), ten-point average roughness (R z ), average spacing of irregularities (S
m), local peaks of average spacing (S), the load length ratio (t p)
Is specified in JIS (Japanese Industrial Standard) corresponding to the international standard (B0601-1994). The above-mentioned conventional stylus type surface roughness measuring device measures, among the above-mentioned parameters, parameters such as maximum height and ten-point average roughness, which represent roughness in the vertical direction.
【0003】しかしながら、上記凹凸の平均間隔、局部
山頂の平均間隔等、横方向に亙る粗さを表すパラメータ
が上記JISに規定された事に伴い、最近ではこれら横
方向に亙る粗さを表すパラメータを測定可能な表面粗さ
測定器が使用されている。この様な、表面粗さを表すパ
ラメータのうちの横方向(水平方向)に亙る粗さを表す
パラメータを測定可能な触針式表面粗さ測定器は、例え
ば図2に示す様に構成されている。However, with the fact that the parameters representing the roughness across the lateral direction, such as the average interval between the irregularities and the local peaks, are defined in the JIS, recently, the parameters representing the roughness across the lateral direction. A surface roughness measuring instrument capable of measuring is used. Such a stylus-type surface roughness measuring instrument capable of measuring a parameter representing a lateral (horizontal) roughness among the parameters representing a surface roughness is configured as shown in FIG. 2, for example. There is.
【0004】即ち、この触針式表面粗さ測定器は、被測
定物1を載置する為の測定ステージ2を備える。この測
定ステージ2の上方には、上記被測定物1の表面に接触
自在な触針3を有し、この表面を走査する事で被測定物
1の断面の輪郭を検出する検出器4を設けている。触針
3は、ダイヤモンドにより造られ、その先端の曲率半径
は例えば2μmである。又、検出器4は、例えば上記触
針3の上下運動を拡大して検出する差動変圧器から成
る。そして、この検出器4は、被測定物1の表面の粗さ
を表すパラメータのうち、上記Sm 、S等の横方向に亙
る粗さを表す少なくとも一のパラメータを検出自在とし
ている。勿論、表面の粗さを表す複数のパラメータを測
定する様にも構成できる。検出器4の構造としては、他
にも圧電変換器やインダクタンス変調式変換器等、種々
の構造が考えられ、又、実際に使用されている。5は移
送手段で、上記検出器4を上記表面の走査自在とすべ
く、この検出器4を横方向(水平な一方向で、図2の左
右方向)に移動させる。この移送手段5は検出器4の移
送速度を複数段階に亙って可変としている。そして、一
の移送速度を選択した場合、当該測定作業が終了するま
で、その選択した一の速度のまま(即ち、定速で)上記
検出器4を移送させる。That is, this stylus type surface roughness measuring instrument is provided with a measuring stage 2 on which an object to be measured 1 is placed. Above the measuring stage 2, there is provided a stylus 3 which can be brought into contact with the surface of the object to be measured 1, and a detector 4 which detects the contour of the cross section of the object to be measured 1 by scanning the surface. ing. The stylus 3 is made of diamond, and the radius of curvature of its tip is, for example, 2 μm. The detector 4 is composed of, for example, a differential transformer that magnifies and detects the vertical movement of the stylus 3. The detector 4 is capable of detecting at least one of the parameters representing the roughness of the surface of the DUT 1 representing the roughness in the lateral direction such as S m and S. Of course, it can also be configured to measure a plurality of parameters representing the surface roughness. As the structure of the detector 4, various structures such as a piezoelectric converter and an inductance modulation type converter are conceivable and actually used. Reference numeral 5 denotes a transfer means, which moves the detector 4 in the lateral direction (one horizontal direction, the horizontal direction in FIG. 2) so that the detector 4 can scan the surface. This transfer means 5 makes the transfer speed of the detector 4 variable in a plurality of steps. When one transfer speed is selected, the detector 4 is transferred at the selected one speed (that is, at a constant speed) until the measurement work is completed.
【0005】上記検出器4は、被測定物1の表面を走査
する事により、所定の基準長さL(例えば、0.8mm)
当たり所定の回数n(例えば、1500回)の検出を行
なう。これら基準長さL及び回数nの各値は、JISに
より規定されており、この規定に従って決定する。この
様に、所定長さL当たり所定回数nの検出を行なうべ
く、上記検出器4は、上記表面を一定の距離間隔d(=
L/n)ごとに検出する。この為に、制御器7は検出器
4を、この検出器4が上記一定距離間隔dに対応する一
定時間間隔ごとに検出作業を行なう様に制御する。即
ち、上記検出器4は選択された一定速度v´で上記表面
を走査する。従って、一定時間間隔tごとに検出作業を
行なわせれば、この検出器4はv´・tなる距離ごとに
検出する事になる。そこで、このv´・tが上記距離間
隔dに等しく(v´・t=d)なる様に上記一定時間間
隔tを選べば、所定の基準長さL当たり所定のn回の検
出を行なう事ができる。この様な演算処理は、演算手段
によって行なわれる。この様な演算手段は、図2に示す
例に於いては上記制御器7内に設けられているが、この
他にも制御器7とは別途設けられたマイクロコンピュー
タ等によって行なう事もできる。又、上記制御器7が上
記検出器4に上記一定時間間隔で検出作業を行なわせら
れる様に、この一定時間間隔を計測するタイマ6を設け
ている。The detector 4 scans the surface of the DUT 1 to give a predetermined reference length L (for example, 0.8 mm).
The detection is performed a predetermined number of times n (for example, 1500 times). Each value of the reference length L and the number of times n is specified by JIS, and is determined according to this specification. In this way, in order to detect the predetermined number of times n for the predetermined length L, the detector 4 causes the surface to have a constant distance d (=
Detect every L / n). For this reason, the controller 7 controls the detector 4 so that the detector 4 performs the detection operation at a constant time interval corresponding to the constant distance interval d. That is, the detector 4 scans the surface at a selected constant velocity v '. Therefore, if the detection work is performed at constant time intervals t, the detector 4 will detect at each distance v'.t. Therefore, if the constant time interval t is selected so that this v ′ · t becomes equal to the distance interval d (v ′ · t = d), a predetermined n times of detection is performed for a predetermined reference length L. You can Such arithmetic processing is performed by the arithmetic means. In the example shown in FIG. 2, such calculating means is provided in the controller 7, but in addition to this, a microcomputer or the like provided separately from the controller 7 may be used. Further, a timer 6 for measuring the constant time interval is provided so that the controller 7 can cause the detector 4 to perform the detection work at the constant time interval.
【0006】尚、上記検出器4が検出する検出値は、上
記制御器7に送られる以前に、増幅・検波手段10によ
り増幅、検波され、更に、A/D変換器8によりアナロ
グデータからディジタルデータに変換される。又、上記
制御器7は、これらディジタル化された検出値に基づい
て、上記被測定物1の表面の粗さを表す、断面曲線や粗
さ曲線等を求める他、前記凹凸の平均間隔Sm 等、上記
表面の粗さを表すパラメータのうちの横方向に亙る粗さ
を表すパラメータを算出する。この後、ディスプレイ、
印刷機等の表示・出力手段9により表示、或は出力され
る。The detection value detected by the detector 4 is amplified and detected by the amplification / detection means 10 before being sent to the controller 7, and further converted from analog data to digital data by the A / D converter 8. Converted to data. Further, the controller 7 obtains a cross-section curve, a roughness curve, etc. representing the surface roughness of the DUT 1 based on these digitized detection values, and also the average interval S m of the irregularities. Of the parameters representing the surface roughness, etc., the parameter representing the roughness across the lateral direction is calculated. After this, the display,
It is displayed or output by the display / output means 9 such as a printing machine.
【0007】[0007]
【発明が解決しようとする課題】ところが、上述した従
来の測定器に於いては、以下に述べる様な解決すべき課
題が存在する。即ち、触針式表面粗さ測定器の測定精度
を向上させる為には、上記一定距離間隔を厳密に規制す
る必要がある。ところで、上述した様に従来の測定器に
於いては、この一定距離間隔に代えて、この一定距離間
隔に比例する一定時間間隔に基づいて上記検出器4を制
御している。従って、上記一定距離間隔を厳密に規制す
る為には、上記一定時間間隔を厳密に規制する必要があ
る。そして、この為には上記移動速度の精度を向上さ
せるか、或は、移送速度を微調整可能に構成する事が
考えられる。又、上記移送手段5にディジタルスケー
ルを組み込み、このスケールの読みによって上記一定距
離間隔を高精度にする事が考えられる。However, the above-mentioned conventional measuring instrument has the following problems to be solved. That is, in order to improve the measurement accuracy of the stylus type surface roughness measuring device, it is necessary to strictly regulate the above-mentioned constant distance interval. By the way, as described above, in the conventional measuring device, the detector 4 is controlled based on a constant time interval proportional to the constant distance interval instead of the constant distance interval. Therefore, in order to strictly regulate the constant distance interval, it is necessary to strictly regulate the constant time interval. For this purpose, it is conceivable to improve the accuracy of the moving speed or to make the transfer speed finely adjustable. It is also conceivable to incorporate a digital scale in the transfer means 5 and make the fixed distance intervals highly accurate by reading the scale.
【0008】しかしながら、上述した様な〜の解決
策では、表面粗さ測定装置自体の価格が高騰したり、移
送手段5の調整作業が面倒になる事が避けられない。即
ち、上記の移動速度の精度を向上させる解決策の場
合、構成各部材の製造に時間と労力とを要する等、製造
コスト、ひいては触針式表面粗さ測定器自体の価格が高
騰する。又、のディジタルスケールを組み込む解決策
の場合、部品点数の増加に伴う製造コストの増加が避け
られない。更に、の検出器4の移送速度を微調整可能
にする解決策の場合、移送速度の調整が面倒で実用的で
はない。本発明の触針式表面粗さ測定器及び測定方法
は、上述の様な事情に鑑み、煩雑な作業を要せず、しか
もコストの増大を招く事なく、測定精度の向上を図るべ
く考えたものである。However, with the solutions of (1) to (3) described above, it is inevitable that the price of the surface roughness measuring device itself rises and the adjustment work of the transfer means 5 becomes troublesome. That is, in the case of the solution for improving the accuracy of the moving speed, it takes time and labor to manufacture each component member, and thus the manufacturing cost and the price of the stylus type surface roughness measuring device itself increase. Further, in the case of the solution incorporating the digital scale, the increase in manufacturing cost due to the increase in the number of parts is unavoidable. Further, in the case of the solution that allows the transfer speed of the detector 4 to be finely adjusted, the transfer speed adjustment is troublesome and impractical. The stylus type surface roughness measuring instrument and measuring method of the present invention have been made in view of the circumstances as described above in order to improve the measurement accuracy without requiring complicated work and increasing the cost. It is a thing.
【0009】[0009]
【課題を解決するための手段】本発明の表面粗さ測定装
置及び測定方法のうち、請求項1に記載した測定装置に
関する発明は、被測定物の表面に接触自在な触針を有
し、この表面を走査する検出器と、この検出器を上記表
面の走査自在とすべく、この検出器を上記被測定物に対
して定速で相対移動させる移送手段と、上記検出器に所
定の基準長さ当たり所定の回数の検出を行なわせるべ
く、この検出回数に対応する一定時間間隔ごとに上記検
出器に検出作業を行なわせる制御器と、上記一定時間間
隔を計測するタイマと、上記検出器により検出された複
数の検出値に基づいて、上記表面の粗さを表すパラメー
タのうちの水平方向に亙る粗さを表す少なくとも一のパ
ラメータを算出する演算手段とを備える。Of the surface roughness measuring apparatus and the measuring method of the present invention, the invention relating to the measuring apparatus according to claim 1 has a stylus which can be brought into contact with the surface of an object to be measured, A detector for scanning the surface, a transfer means for moving the detector at a constant speed relative to the object to be measured so that the detector can scan the surface, and a predetermined reference for the detector. In order to detect a predetermined number of times per length, a controller that causes the detector to perform a detection operation at constant time intervals corresponding to the number of times of detection, a timer that measures the constant time interval, and the detector. And a calculation means for calculating at least one parameter representing the roughness in the horizontal direction among the parameters representing the roughness of the surface, based on the plurality of detection values detected by.
【0010】特に本発明の触針式表面粗さ測定器に於い
ては、上記パラメータの値が既知の基準片を備えてい
る。又、上記演算手段は、上記検出器がこの基準片の表
面を走査して得られる、上記パラメータの実際の値と、
このパラメータの既知の値と、予め設定された上記検出
器の被測定物に対する相対速度とによって、実際の相対
速度を算出し、この実際の相対速度に基づいて上記一定
時間間隔を算出する機能を有する事を特徴としている。In particular, the stylus type surface roughness measuring instrument of the present invention is provided with a reference piece whose values of the above parameters are known. Further, the calculating means is an actual value of the parameter obtained by the detector scanning the surface of the reference piece,
A known value of this parameter and the relative speed of the detector relative to the object to be measured, which is set in advance, calculate the actual relative speed, and the function of calculating the constant time interval based on the actual relative speed. It is characterized by having.
【0011】又、請求項2に記載した測定方法に関する
発明は、被測定物の表面に接触自在な触針を有し、この
表面を走査する検出器と、この検出器を上記表面の走査
自在とすべく、この検出器を上記被測定物に対して定速
で相対移動させる移送手段と、上記検出器に所定の基準
長さ当たり所定の回数の検出を行なわせるべく、この検
出回数に対応する一定時間間隔ごとに上記検出器に検出
作業を行なわせる制御器と、上記一定時間間隔を計測す
るタイマと、上記検出器により検出された複数の検出値
に基づいて、上記表面の粗さを表すパラメータのうちの
水平方向に亙る粗さを表す少なくとも一のパラメータを
算出する演算手段とを備えた表面粗さ測定装置により、
被測定物の表面粗さを検出する表面粗さ測定方法に関す
る。The invention relating to the measuring method described in claim 2 has a stylus which is capable of contacting the surface of the object to be measured, and a detector for scanning this surface, and this detector for freely scanning the surface. Therefore, in order to make the detector relatively move with respect to the object to be measured at a constant speed, and correspond to the number of detections so that the detector can detect a predetermined number of times for a predetermined reference length. Based on a plurality of detection values detected by the controller, a controller that causes the detector to perform a detection operation at fixed time intervals, a timer that measures the fixed time interval, and the surface roughness. By a surface roughness measuring device provided with a calculating means for calculating at least one parameter representing the roughness across the horizontal direction of the parameters represented,
The present invention relates to a surface roughness measuring method for detecting the surface roughness of an object to be measured.
【0012】この様な本発明の測定方法に於いては、先
ず、被測定物の測定に先立ち、上記パラメータの値が既
知の基準片の表面を上記検出器により走査する事により
上記パラメータの実際の値を測定し、この実際の値と、
上記パラメータの既知の値と、予め設定された上記検出
器の被測定物に対する相対速度とによって、実際の相対
速度を算出し、次いで、この実際の相対速度の値に基づ
いて上記一定時間間隔を算出し、この一定時間間隔に基
づいて、上記被測定物の表面粗さの測定作業を行なう事
を特徴としている。In such a measuring method of the present invention, first of all, prior to the measurement of the object to be measured, the surface of the reference piece whose value of the above parameter is known is scanned by the above-mentioned detector to actually measure the above-mentioned parameter. And measure this actual value,
A known value of the parameter and a preset relative velocity of the detector with respect to the object to be measured are used to calculate an actual relative velocity, and then the constant time interval is set based on the value of the actual relative velocity. It is characterized in that the surface roughness of the object to be measured is calculated and calculated based on this constant time interval.
【0013】[0013]
【作用】上述の様に構成される本発明の触針式表面粗さ
測定器を用いて本発明の測定方法により、被測定物表面
の表面粗さを測定する際の作用自体は、前述した従来の
測定器の場合と同様である。特に、本発明の測定器の場
合、表面粗さを表すパラメータのうちの水平方向に亙る
粗さを表す少なくとも一のパラメータが既知の基準片を
備えている。そして、被測定物の表面粗さを測定するの
に先立って、この基準片を走査し、上記パラメータの実
際の値を検出する。この場合、検出器が検出作業を行な
う一定時間間隔は、所定の基準長さと、この基準長さ当
たりの検出回数と、設定された上記検出器の移送速度と
から、演算手段により予め求められる。更に、この演算
手段は、上記パラメータの実際の値と、このパラメータ
の既知の値と、予め設定されている検出器の移送速度と
の各値を用いて、実際の移送速度を求める。そして、こ
の実際の移送速度により、この実際の移送速度に応じた
一定時間間隔を算出する。この後、基準片に代えて被測
定物の表面粗さの測定作業を行なう。この測定に於い
て、上記一定時間間隔は、検出器の実際の移送速度に応
じたものである為、移送速度の設定値と実際の値とずれ
に基づく測定値の誤差が僅少になり、測定精度が向上す
る。The action itself when measuring the surface roughness of the surface of the object to be measured by the measuring method of the present invention using the stylus type surface roughness measuring instrument of the present invention configured as described above is as described above. This is similar to the case of the conventional measuring device. In particular, in the case of the measuring device of the present invention, at least one parameter representing the roughness across the horizontal direction among the parameters representing the surface roughness is provided with a known reference piece. Then, prior to measuring the surface roughness of the object to be measured, the reference piece is scanned to detect the actual value of the above parameter. In this case, the constant time interval in which the detector performs the detection work is obtained in advance by the calculation means from the predetermined reference length, the number of detections per this reference length, and the set transfer speed of the detector. Further, the calculating means obtains the actual transfer speed by using the actual value of the above parameter, the known value of this parameter, and the preset transfer speed of the detector. Then, from this actual transfer speed, a constant time interval corresponding to this actual transfer speed is calculated. After that, the work of measuring the surface roughness of the object to be measured is performed in place of the reference piece. In this measurement, since the above-mentioned fixed time interval corresponds to the actual transfer speed of the detector, the error between the set value of the transfer speed and the measured value based on the deviation from the actual value is very small, Accuracy is improved.
【0014】[0014]
【実施例】次に、本発明の測定装置の実施例に就いて説
明する。尚、本発明の触針式表面粗さ測定器の基本的な
構造は、前記図2に示す従来の測定装置と同様である
為、同等部分に就いては、重複する説明を省略、或は簡
略化し、以下、本発明の特徴部分を主に説明する。本発
明の触針式表面粗さ測定器に於いては、表面の凹凸の平
均間隔Sm (単位はmm)の値が既知の基準片を備える。
この凹凸の平均間隔Sm が、被測定物の表面の粗さを表
すパラメータのうちの水平方向(横方向)に亙る粗さを
表す少なくとも一のパラメータである。又、制御器7は
演算手段を含んで構成されている。従って、この制御器
7は、上記Sm に関し、検出器4がこの基準片の表面を
走査して得られる実際の値Sm1と、既知の値Sm2と、予
め設定された検出器4の移送速度v1 (mm/s )とによ
り、 v=(Sm2/Sm1)・v1 ・・・(1) で求められる、実際の移送速度vを算出する機能を有す
る。更に、この実際の移送速度vと、前記基準長さL
と、検出回数nとの各値により、 T=(L/v)/n・・・(2) を計算する事で、検出器4を制御する一定時間間隔Tを
算出する機能を有する。EXAMPLES Next, examples of the measuring apparatus of the present invention will be described. Since the basic structure of the stylus type surface roughness measuring instrument of the present invention is the same as that of the conventional measuring apparatus shown in FIG. 2, duplicate description will be omitted for the same parts. For simplification, the characteristic part of the present invention will be mainly described below. The stylus type surface roughness measuring device of the present invention is provided with a reference piece having a known average interval S m (unit: mm) of surface irregularities.
The average interval S m between the irregularities is at least one parameter representing the roughness over the horizontal direction (lateral direction) among the parameters representing the surface roughness of the measured object. Further, the controller 7 is configured to include a calculation means. Therefore, the controller 7 relates to the aforementioned S m, the detector 4 is the actual value S m1 obtained by scanning the surface of the reference piece, a known value S m @ 2, a detector 4 which is set in advance With the transfer speed v 1 (mm / s), it has a function of calculating the actual transfer speed v obtained by v = (S m2 / S m1 ) · v 1 (1). Further, the actual transfer speed v and the reference length L
And the number of detections n, T = (L / v) / n (2) is calculated to have a function of calculating a constant time interval T for controlling the detector 4.
【0015】上述の様な構成を有する本発明の触針式表
面粗さ測定器を用いて、本発明の測定方法により、被測
定物1の表面粗さを測定する際の作用は、図1に示す通
りである。即ち、被測定物1の測定作業に先立ち、ステ
ップ1として測定ステージ2上面に基準片を載置する。
そして、ステップ2として、上記制御器7に、測定条件
である基準長さL、この基準長さL当たりの検出回数
n、予め知られている基準片表面のSm の値Sm2を入力
する。又、検出器4の移送速度を適宜選択し、当該移送
速度v1 を入力する。そして、ステップ3として、これ
ら各値により上記制御器7は、上記各値に対応する上記
一定時間間隔T1 を算出する。即ち、 T1 =(L/v1 )/n により上記一定時間間隔T1 を算出する。この時間間隔
T1 はタイマ6に入力し、上記基準片の表面の測定作業
に入る(ステップ4)。When the surface roughness of the object 1 to be measured is measured by the measuring method of the present invention using the stylus type surface roughness measuring instrument of the present invention having the above-described structure, the operation shown in FIG. As shown in. That is, prior to the measurement work of the DUT 1, as a step 1, the reference piece is placed on the upper surface of the measurement stage 2.
Then, in step 2, the controller 7 is input with the reference length L, which is the measurement condition, the number of times of detection n per the reference length L, and the value S m2 of the S m of the reference piece surface known in advance. . Further, the transfer speed of the detector 4 is appropriately selected and the transfer speed v 1 is input. Then, in step 3, the controller 7 calculates the constant time interval T 1 corresponding to each of the above values from these values. That is, the constant time interval T 1 is calculated by T 1 = (L / v 1 ) / n. This time interval T 1 is input to the timer 6 and the measurement of the surface of the reference piece is started (step 4).
【0016】この基準片の測定作業は、前述した様に、
従来の測定器により被測定物1表面を測定する場合と全
く同様である。即ち、タイマ6の計測する上記時間間隔
T1ごとに上記検出器4により当該表面を検出する。そ
して、この検出作業により得られる複数の検出値(アナ
ログデータ)を、検波・増幅手段10により検波し、増
幅した後、A/D変換器8によりディジタルデータに変
換して上記制御器7に送る。このデータにより、上記S
m の実際の値Sm1を求める(ステップ5)。そして、上
記Sm1を求めたならば、ステップ6で、この値Sm1と、
上記既知の値Sm2と、上記移送速度v1 とを、上記(1)
式に代入し、検出器4の実際の移送速度vを求める(ス
テップ6)。As described above, the measurement work of this reference piece is as follows.
This is exactly the same as the case where the surface of the DUT 1 is measured by the conventional measuring device. That is, the surface is detected by the detector 4 at each time interval T 1 measured by the timer 6. Then, a plurality of detection values (analog data) obtained by this detection work are detected by the detection / amplification means 10, amplified, and then converted into digital data by the A / D converter 8 and sent to the controller 7. . Based on this data, S
determining the actual value S m1 of m (step 5). Then, if the above S m1 is obtained, at step 6, this value S m1
The known value S m2 and the transfer velocity v 1 are set to the above (1).
Substituting into the equation, the actual transfer speed v of the detector 4 is obtained (step 6).
【0017】上述の様にして、実際の移送速度vを求め
たならば、このvの値を上記制御器7に記憶させる。こ
の制御器7は、先に入力済みの各値L、n、v1 も記憶
されているが、これら各値のうち、上記L、n、及び上
記実際の移送速度vの各値を上記(2) 式に代入し、上記
実際の移送速度に対応した一定時間間隔Tを算出する
(ステップ7)。このTの値は上記制御器7に記憶させ
ると共に、上記タイマ6が、新たにこの時間間隔Tを計
測する様に設定する(ステップ8)。When the actual transfer speed v is obtained as described above, the value of this v is stored in the controller 7. The controller 7 also stores the values L, n, and v 1 that have been input in advance. Among these values, the values of L, n, and the actual transfer speed v are Substituting into equation (2), a constant time interval T corresponding to the actual transfer speed is calculated (step 7). The value of T is stored in the controller 7, and the timer 6 is set to newly measure the time interval T (step 8).
【0018】上述した様に、実際の移送速度vに基づく
時間間隔Tを求める事により、検出器4による検出作業
は、正確に所定の一定距離間隔Dで行なわれる。即ち、
上記移送速度vと上記一定時間間隔Tとの積v・Tは、
正確に上記距離Dとなる。これに対して、従来方法のま
まで測定作業を行なった場合、検出器4は、時間間隔T
1 のまま検出作業を行なう。従って、この場合の距離間
隔D1 は、v・T1 となる。上記T1 は移送速度v1 に
基づいて算出されたものであり、上記移送速度v1 が実
際の移送速度vに対して誤差が存在している為、上記T
1 も誤差を有する。従って、上記距離間隔D1 は、所定
の距離間隔Dに対してずれが存在する。本発明は、この
様なずれを、上述したステップ1〜ステップ8の処理に
よって解消する。As described above, by detecting the time interval T based on the actual transfer speed v, the detection work by the detector 4 is accurately performed at the predetermined fixed distance interval D. That is,
The product v · T of the transfer speed v and the constant time interval T is
The distance is exactly D. On the other hand, when the measurement work is performed by the conventional method as it is, the detector 4 is
1 still carry out the detection work. Therefore, the distance interval D 1 in this case is v · T 1 . The above T 1 is calculated based on the transfer speed v 1 , and since the above transfer speed v 1 has an error with respect to the actual transfer speed v, the above T 1
1 also has an error. Therefore, the distance D 1 has a deviation from the predetermined distance D. The present invention eliminates such a shift by the processing of steps 1 to 8 described above.
【0019】上述した様に、上記基準片を測定する事に
より、実際の移送速度に応じた時間間隔Tを求め、この
時間間隔Tをタイマ6に設定したならば、測定ステージ
2上に載置されている基準片を取り除き、代わりに、表
面粗さを測定すべき被測定物1を載置する(ステップ
9)。そして、従来方法(上記基準片の測定作業)と同
様にして、この被測定物1の表面を検出器4により走査
し、この被測定物1の表面粗さを表す各種パラメータの
値を求める(ステップ10)。As described above, by measuring the reference piece, the time interval T corresponding to the actual transfer speed is obtained, and if this time interval T is set in the timer 6, it is placed on the measuring stage 2. The reference piece described above is removed, and instead, the DUT 1 whose surface roughness is to be measured is placed (step 9). Then, similarly to the conventional method (measurement work of the reference piece), the surface of the DUT 1 is scanned by the detector 4, and the values of various parameters representing the surface roughness of the DUT 1 are obtained ( Step 10).
【0020】尚、上述の実施例に於いては、検出器4の
移送速度を、基準片の表面の凹凸の平均間隔Sm の値を
測定する事で求める例に就いて説明したが、他に局部山
頂の平均間隔S等、横方向に亙る粗さを表すパラメータ
を測定する事でも行なえる。この場合には、上記基準片
として当該パラメータが既知のものを採用する。又、上
述の実施例に於いて、検出器4を可動とし、測定ステー
ジ2を固定しているが、これとは反対に測定ステージ2
を可動とし、検出器4を固定する構造にも適用できる。
更には、上記検出器4を可動とすると共に上記測定ステ
ージ2を省略した構造とする事もできる。更に、本発明
は、検出器が被測定物に対して相対移動する(被測定物
表面を走査する)事で、横方向に亙る粗さを表すパラメ
ータを検出する表面粗さ測定器に適用する事ができる。In the above embodiment, the transfer speed of the detector 4 is determined by measuring the value of the average interval S m between the irregularities on the surface of the reference piece. It can also be performed by measuring a parameter representing the roughness across the lateral direction, such as the average interval S between local peaks. In this case, the reference piece having a known parameter is adopted. Further, in the above-described embodiment, the detector 4 is movable and the measurement stage 2 is fixed. On the contrary, the measurement stage 2 is fixed.
It is also applicable to a structure in which the detector 4 is movable and the detector 4 is fixed.
Further, the detector 4 may be movable and the measurement stage 2 may be omitted. Further, the present invention is applied to a surface roughness measuring device that detects a parameter representing roughness in the lateral direction by moving the detector relative to the measured object (scanning the surface of the measured object). I can do things.
【0021】[0021]
【発明の効果】本発明の触針式表面粗さ測定器及び測定
方法は、上述の様に構成され作用する為、表面粗さを表
すパラメータのうちの水平方向に亙る粗さを表すパラメ
ータの測定を正確に行なえる。しかも、本発明の場合、
調整作業の繁雑化や製造コストの増大を招来する事がな
く、実用性の高い触針式表面粗さ測定器及び測定方法を
得られる。Since the stylus type surface roughness measuring instrument and the measuring method of the present invention are constructed and operate as described above, one of the parameters expressing the surface roughness of the parameters expressing the surface roughness is You can make accurate measurements. Moreover, in the case of the present invention,
It is possible to obtain a highly practical stylus-type surface roughness measuring device and measuring method without causing a complicated adjusting work and an increase in manufacturing cost.
【図1】本発明の作用を示すフローチャート。FIG. 1 is a flowchart showing the operation of the present invention.
【図2】表面粗さ測定装置の1例を示すブロック図。FIG. 2 is a block diagram showing an example of a surface roughness measuring device.
1 被測定物 2 測定ステージ 3 触針 4 検出器 5 移送手段 6 タイマ 7 制御器 8 A/D変換器 9 表示・出力手段 10 検波・増幅手段 1 object to be measured 2 measuring stage 3 stylus 4 detector 5 transfer means 6 timer 7 controller 8 A / D converter 9 display / output means 10 detection / amplification means
Claims (2)
し、この表面を走査する検出器と、この検出器を上記表
面の走査自在とすべく、この検出器を上記被測定物に対
して定速で相対移動させる移送手段と、上記検出器に所
定の基準長さ当たり所定の回数の検出を行なわせるべ
く、この検出回数に対応する一定時間間隔ごとに上記検
出器に検出作業を行なわせる制御器と、上記一定時間間
隔を計測するタイマと、上記検出器により検出された複
数の検出値に基づいて、上記表面の粗さを表すパラメー
タのうちの水平方向に亙る粗さを表す少なくとも一のパ
ラメータを算出する演算手段とを備えた触針式表面粗さ
測定器に於いて、 上記パラメータの値が既知の基準片を備えると共に、 上記演算手段は、上記検出器がこの基準片の表面を走査
して得られる、上記パラメータの実際の値と、このパラ
メータの既知の値と、予め設定された上記検出器の被測
定物に対する相対速度とによって、実際の相対速度を算
出し、この実際の相対速度に基づいて上記一定時間間隔
を算出する機能を有する事を特徴とする、触針式表面粗
さ測定器。1. A detector having a stylus capable of coming into contact with the surface of an object to be measured, the detector scanning the surface, and the detector for allowing the detector to scan the surface. In order to allow the detector to detect a predetermined number of times for a predetermined reference length with a transfer means that moves at a constant speed with respect to the detector, the detector performs a detection operation at regular time intervals corresponding to the number of times of detection. Based on a plurality of detection values detected by the controller, a timer that measures the constant time interval, and a plurality of detection values detected by the detector, the roughness across the horizontal direction among the parameters representing the roughness of the surface is determined. In a stylus type surface roughness measuring instrument having a computing means for calculating at least one parameter, the reference value of the parameter is known, and the computing means is provided with Obtained by scanning the surface of the piece The actual value of the above parameter, the known value of this parameter, and the relative speed of the preset detector with respect to the object to be measured, calculate the actual relative speed, and based on this actual relative speed. A stylus-type surface roughness measuring instrument having a function of calculating the above-mentioned constant time interval.
し、この表面を走査する検出器と、この検出器を上記表
面の走査自在とすべく、この検出器を上記被測定物に対
して定速で相対移動させる移送手段と、上記検出器に所
定の基準長さ当たり所定の回数の検出を行なわせるべ
く、この検出回数に対応する一定時間間隔ごとに上記検
出器に検出作業を行なわせる制御器と、上記一定時間間
隔を計測するタイマと、上記検出器により検出された複
数の検出値に基づいて、上記表面の粗さを表すパラメー
タのうちの水平方向に亙る粗さを表す少なくとも一のパ
ラメータを算出する演算手段とを備えた触針式表面粗さ
測定器により、被測定物の表面粗さを検出する触針式表
面粗さ測定方法に於いて、 被測定物の測定に先立ち、上記パラメータの値が既知の
基準片の表面を上記検出器により走査する事により上記
パラメータの実際の値を測定し、この実際の値と、上記
パラメータの既知の値と、予め設定された上記検出器の
被測定物に対する相対速度とによって、実際の相対速度
を算出し、次いで、この実際の相対速度の値に基づいて
上記一定時間間隔を算出し、この一定時間間隔に基づい
て、上記被測定物の表面粗さの測定作業を行なう事を特
徴とする、触針式表面粗さ測定方法。2. A detector which has a stylus capable of coming into contact with the surface of the object to be measured and which scans the surface, and a detector which allows the detector to scan the surface of the object. In order to allow the detector to detect a predetermined number of times for a predetermined reference length with a transfer means that moves at a constant speed with respect to the detector, the detector performs a detection operation at regular time intervals corresponding to the number of times of detection. Based on a plurality of detection values detected by the controller, a timer that measures the constant time interval, and a plurality of detection values detected by the detector, the roughness across the horizontal direction among the parameters representing the roughness of the surface is determined. A stylus-type surface roughness measuring method for detecting the surface roughness of an object to be measured by a stylus-type surface roughness measuring instrument having a calculating means for calculating at least one parameter Prior to measurement, the values of the above parameters have The actual value of the parameter is measured by scanning the surface of the reference piece with the detector, and the actual value, the known value of the parameter, and the preset object to be measured of the detector. By the relative speed, to calculate the actual relative speed, then calculate the constant time interval based on the value of the actual relative speed, based on the constant time interval, the surface roughness of the measured object. A stylus-type surface roughness measuring method characterized by performing measurement work.
Priority Applications (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP12211095A JP3539795B2 (en) | 1995-05-22 | 1995-05-22 | Stylus type surface roughness measuring instrument and measuring method |
Applications Claiming Priority (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP12211095A JP3539795B2 (en) | 1995-05-22 | 1995-05-22 | Stylus type surface roughness measuring instrument and measuring method |
Publications (2)
Publication Number | Publication Date |
---|---|
JPH08313248A true JPH08313248A (en) | 1996-11-29 |
JP3539795B2 JP3539795B2 (en) | 2004-07-07 |
Family
ID=14827894
Family Applications (1)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
JP12211095A Expired - Fee Related JP3539795B2 (en) | 1995-05-22 | 1995-05-22 | Stylus type surface roughness measuring instrument and measuring method |
Country Status (1)
Country | Link |
---|---|
JP (1) | JP3539795B2 (en) |
Cited By (3)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JP2013007586A (en) * | 2011-06-22 | 2013-01-10 | Tokyo Seimitsu Co Ltd | Surface roughness measuring device, measurement stand-by time setting method, and measurement stand-by time setting program |
JP5938503B1 (en) * | 2015-08-24 | 2016-06-22 | 新東エスプレシジョン株式会社 | measuring device |
CN110779474A (en) * | 2019-10-16 | 2020-02-11 | 徐州市铜山区嘉量计量检测创新中心 | Workpiece abrasion detection multipoint control positioning closed type light beam detection equipment |
-
1995
- 1995-05-22 JP JP12211095A patent/JP3539795B2/en not_active Expired - Fee Related
Cited By (5)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JP2013007586A (en) * | 2011-06-22 | 2013-01-10 | Tokyo Seimitsu Co Ltd | Surface roughness measuring device, measurement stand-by time setting method, and measurement stand-by time setting program |
JP5938503B1 (en) * | 2015-08-24 | 2016-06-22 | 新東エスプレシジョン株式会社 | measuring device |
KR101677001B1 (en) | 2015-08-24 | 2016-11-16 | 신토 에스 프레시젼 가부시키가이샤 | Measuring apparatus |
US9921401B2 (en) | 2015-08-24 | 2018-03-20 | Sinto S-Precision, Ltd. | Measuring device with alignment and reference position for measurement object |
CN110779474A (en) * | 2019-10-16 | 2020-02-11 | 徐州市铜山区嘉量计量检测创新中心 | Workpiece abrasion detection multipoint control positioning closed type light beam detection equipment |
Also Published As
Publication number | Publication date |
---|---|
JP3539795B2 (en) | 2004-07-07 |
Similar Documents
Publication | Publication Date | Title |
---|---|---|
US7376261B2 (en) | Surface scan measuring device and method of forming compensation table for scanning probe | |
CN113804696B (en) | Method for determining size and area of defect on surface of bar | |
CN102467113A (en) | Controller of mechanical device with parameter learning and parameter learning method thereof | |
JPH08313248A (en) | Apparatus and method for probe-type measurement of surface roughness | |
US6886394B1 (en) | Roughness measuring method and apparatus | |
JP2022179165A (en) | Measurement device and method for calibration measurement device | |
KR100354837B1 (en) | Cracklength measuring device and method of metallic materials | |
KR100285713B1 (en) | Device for measuring length of steel product and measuring method thereof | |
JPH07146125A (en) | Straightness measuring apparatus | |
JPH07218358A (en) | Tension distribution measurement method of a strip of body | |
JPH0611331A (en) | Instrument and method for measuring undulating wear of rail | |
JPH0534145A (en) | Measuring apparatus with automatic offset regulation function | |
JP5009560B2 (en) | Apparatus for measuring the shape of a thin object to be measured | |
JPH10239012A (en) | Contour shape measuring method and contour shape measuring machine | |
JPH0428686A (en) | Installation error measuring device for elevator guide rail | |
JPH09145722A (en) | Scanning probe microscope | |
JPH08210803A (en) | Straightness measuring instrument | |
JPS5855708A (en) | Measuring device for size having temperature compensating function | |
JP2005172700A (en) | Capacitance thickness measuring method | |
JPH08122052A (en) | Profile measuring instrument | |
JPH109852A (en) | Straightness measuring method | |
JPH01237431A (en) | Hardness measuring method in displacement measuring type hardness meter | |
JPH0631365Y2 (en) | Test piece elongation measuring device for material testing machine | |
JPH04232806A (en) | Method and device for adjusting displacement gauge thereof | |
JPH06186028A (en) | Measuring method for straightness of long member |
Legal Events
Date | Code | Title | Description |
---|---|---|---|
A977 | Report on retrieval |
Free format text: JAPANESE INTERMEDIATE CODE: A971007 Effective date: 20040305 |
|
TRDD | Decision of grant or rejection written | ||
A01 | Written decision to grant a patent or to grant a registration (utility model) |
Free format text: JAPANESE INTERMEDIATE CODE: A01 Effective date: 20040323 |
|
A61 | First payment of annual fees (during grant procedure) |
Free format text: JAPANESE INTERMEDIATE CODE: A61 Effective date: 20040323 |
|
R150 | Certificate of patent (=grant) or registration of utility model |
Free format text: JAPANESE INTERMEDIATE CODE: R150 |
|
R250 | Receipt of annual fees |
Free format text: JAPANESE INTERMEDIATE CODE: R250 |
|
FPAY | Renewal fee payment (prs date is renewal date of database) |
Free format text: PAYMENT UNTIL: 20090402 Year of fee payment: 5 |
|
FPAY | Renewal fee payment (prs date is renewal date of database) |
Free format text: PAYMENT UNTIL: 20100402 Year of fee payment: 6 |
|
FPAY | Renewal fee payment (prs date is renewal date of database) |
Free format text: PAYMENT UNTIL: 20110402 Year of fee payment: 7 |
|
FPAY | Renewal fee payment (prs date is renewal date of database) |
Free format text: PAYMENT UNTIL: 20120402 Year of fee payment: 8 |
|
FPAY | Renewal fee payment (prs date is renewal date of database) |
Free format text: PAYMENT UNTIL: 20130402 Year of fee payment: 9 |
|
FPAY | Renewal fee payment (prs date is renewal date of database) |
Free format text: PAYMENT UNTIL: 20130402 Year of fee payment: 9 |
|
FPAY | Renewal fee payment (prs date is renewal date of database) |
Free format text: PAYMENT UNTIL: 20140402 Year of fee payment: 10 |
|
R250 | Receipt of annual fees |
Free format text: JAPANESE INTERMEDIATE CODE: R250 |
|
LAPS | Cancellation because of no payment of annual fees |