JPH08304657A - Two-dimensional optical array and its production - Google Patents
Two-dimensional optical array and its productionInfo
- Publication number
- JPH08304657A JPH08304657A JP13574595A JP13574595A JPH08304657A JP H08304657 A JPH08304657 A JP H08304657A JP 13574595 A JP13574595 A JP 13574595A JP 13574595 A JP13574595 A JP 13574595A JP H08304657 A JPH08304657 A JP H08304657A
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- Prior art keywords
- optical array
- parallel
- optical
- windows
- square hole
- Prior art date
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Abstract
Description
【０００１】[0001]
【産業上の利用分野】本発明は、光並列伝送に用いる二
次元配列ＬＤ（ＰＤ）アレイ等から構成される光モジュ
ールと結合する、光ファイバを精度良く配置した二次元
光アレイ及びその製造方法に関する。BACKGROUND OF THE INVENTION 1. Field of the Invention The present invention relates to a two-dimensional optical array in which optical fibers are accurately arranged, which is coupled with an optical module composed of a two-dimensional array LD (PD) array used for optical parallel transmission, and a manufacturing method thereof. Regarding
【０００２】[0002]
【従来の技術】光並列伝送においては、ＬＤ（ＰＤ）を
アレイ化して送受信の集積密度を大きくすることが行な
われる。これらを用いたアレイ化ＬＤ（ＰＤ）モジュー
ルではＬＤ（ＰＤ）アレイに光信号を入出力するため
に、精密に光ファイバを配列固定した光アレイが必要と
される。アレイ配列としては一次元配列（直線状配列）
が一般的であるが、面発光レーザを用いた場合には更に
高集積化した二次元配列モジュールが可能であり、二次
元アレイが必要となる。2. Description of the Related Art In parallel optical transmission, LDs (PDs) are arrayed to increase the transmission / reception integration density. An arrayed LD (PD) module using these requires an optical array in which optical fibers are precisely arranged and fixed in order to input and output an optical signal to the LD (PD) array. One-dimensional array (linear array)
However, when a surface emitting laser is used, a more highly integrated two-dimensional array module is possible and a two-dimensional array is required.
【０００３】例えば、精度良く外径を揃えたマイクロフ
ェルールに光ファイバを結線し、マイクロフェルールを
二次元に積層することにより、二次元光アレイ化する方
法がしられている（１９９３年電子情報通信学会春期大
会、Ｃ−３０７）。また、微細超精密放電加工により、
金属基板等に光ファイバ挿入穴を二次元配列精度良く加
工することも技術的には可能である。For example, there is known a method of forming a two-dimensional optical array by connecting an optical fiber to a micro ferrule having an outer diameter accurately aligned and stacking the micro ferrules two-dimensionally (Electronic Information Communication in 1993). Spring Conference, C-307). In addition, by micro ultra-precision electrical discharge machining,
It is technically possible to process the optical fiber insertion holes in the metal substrate or the like with a high two-dimensional alignment accuracy.
【０００４】[0004]
【発明が解決しようとする課題】しかしながら、前者の
方法では個々のマイクロフェルールにそれぞれ十分な外
径精度及び、光ファイバ挿入穴との偏心精度を必要と
し、更にアレイの心数分必要であるため、非常にコスト
のかかるものとなる上に、心数が増える程、積層誤差も
大きくなるという問題がある。又、後者の方法では、加
工配列精度は十分であるが、多大な加工時間が必要であ
り、量産には向かず、コストも安くならない。However, in the former method, each microferrule requires sufficient outer diameter accuracy and eccentricity accuracy with respect to the optical fiber insertion hole, and the number of cores of the array is required. However, in addition to being very costly, there is a problem that the stacking error increases as the number of cores increases. Further, in the latter method, the processing arrangement accuracy is sufficient, but a large processing time is required, which is not suitable for mass production and the cost cannot be reduced.
【０００５】[0005]
【課題を解決するための手段】本発明者らは上記課題を
種々検討した結果、夫々異なる光アレイ基板に複数個の
長孔からなる複数の平行格子窓（角穴部材）を互いに略
直交して配置し、両孔の交差部で二次元配列した角穴部
材を形成することにより、低コスト且つ量産に適した二
次元光アレイ及びその製法が提供できることを見出し、
本発明を完成するに至った。As a result of various studies on the above-mentioned problems, the inventors of the present invention have made a plurality of parallel lattice windows (square hole members) formed of a plurality of long holes in different optical array substrates substantially orthogonal to each other. Found that it is possible to provide a two-dimensional optical array and a manufacturing method thereof that are suitable for mass production at low cost by forming a square hole member that is two-dimensionally arranged at the intersection of both holes.
The present invention has been completed.
【０００６】すなわち、本発明は： 光ファイバ外径に略等しい幅の複数個の長孔からな
る２つの平行格子窓を、夫々異なる光アレイ基板に互い
に略直交して配置することによって、両孔の交差部にて
二次元に配列された角穴部材が形成されており、更に前
記角穴部に光ファイバが挿入され、その光ファイバが二
次元に精密配列固定されている二次元光アレイを提供す
る。また、 光ファイバ外径に略等しい幅の複数個の長孔からな
る３つ以上の平行格子窓が夫々相異なる光アレイ基板に
設けられており、且つ相接する平行格子窓同士は互いに
略直交に配置され、それにより形成される二次元に配列
された角穴位置は、どの相接する平行格子窓においても
同軸位置にあり、更に前記角穴部に光ファイバが挿入さ
れ、その光ファイバが二次元に精密配列固定されている
二次元光アレイを提供する。また、That is, according to the present invention: Two parallel grating windows each having a plurality of elongated holes each having a width substantially equal to the outer diameter of the optical fiber are arranged on different optical array substrates so as to be substantially orthogonal to each other. A two-dimensional optical array in which a square hole member is formed in a two-dimensional array at the intersection of the optical fiber is inserted into the square hole, and the optical fiber is precisely arranged and fixed in a two-dimensional manner. provide. Further, three or more parallel lattice windows made of a plurality of long holes each having a width substantially equal to the outer diameter of the optical fiber are provided on different optical array substrates, and the parallel lattice windows contacting each other are substantially orthogonal to each other. The two-dimensionally arranged square hole positions formed by the same are coaxial positions in any parallel lattice windows that are in contact with each other, and an optical fiber is further inserted into the square hole portion, and the optical fiber is Provided is a two-dimensional optical array in which a two-dimensional precision array is fixed. Also,
【０００７】 前記平行格子窓の何れかの重ね合わせ
部近傍まで端面が研磨してある点にも特徴を有する。ま
た、 前記平行格子窓は無機材料を材質とする点にも特徴
を有する。また、 前記基板はシリコンを材質とする点にも特徴を有す
る。また、 光ファイバ外径に略等しい幅の複数個の長孔からな
る２つの平行格子窓を、夫々異なる光アレイ基板に互い
に略直交して配置して、両孔の交差部で二次元に配列し
た角穴部材を形成し、次いで前記角穴部に光ファイバを
挿入して、光ファイバを二次元に精密配列固定する二次
元光アレイの製造方法を提供する。また、Another feature is that the end face is polished to the vicinity of any of the overlapping portions of the parallel lattice window. The parallel lattice window is also characterized in that it is made of an inorganic material. The substrate is also characterized in that it is made of silicon. In addition, two parallel grating windows made of a plurality of long holes each having a width substantially equal to the outer diameter of the optical fiber are arranged on different optical array substrates substantially orthogonal to each other, and are arranged two-dimensionally at the intersection of both holes. A method for manufacturing a two-dimensional optical array is provided, in which the square hole member is formed, and then an optical fiber is inserted into the square hole portion to fix the optical fibers in a two-dimensional precise array. Also,
【０００８】 光ファイバ外径に略等しい幅の複数個
の長孔からなる３つ以上の平行格子窓が夫々相異なる光
アレイ基板に設けられ、かつ相接する平行格子窓同士は
互いに略直交して配置し、更に、それにより形成される
二次元に配列された角穴位置がどの相接する平行格子窓
においても同軸位置になるようにし、次いで前記角穴部
に光ファイバを挿入して、光ファイバを二次元に精密配
列固定する二次元光アレイの製造方法を提供する。ま
た、Three or more parallel lattice windows, each of which is composed of a plurality of elongated holes having a width substantially equal to the outer diameter of the optical fiber, are provided on different optical array substrates, and the parallel lattice windows that are in contact with each other are substantially orthogonal to each other. Further arranged so that the two-dimensionally arranged square hole positions are coaxial positions in any adjoining parallel lattice windows, and then an optical fiber is inserted into the square hole portion, Provided is a method for manufacturing a two-dimensional optical array in which optical fibers are precisely arranged and fixed in two dimensions. Also,
【０００９】 光ファイバ外径に略等しい幅の複数個
の長孔からなる２つ以上の平行格子窓が夫々異なる光ア
レイ基板に設けられたものを用い、初めに、第一の平行
格子窓の各長孔に各々所定の本数の光ファイバを挿入
し、次に第二の平行格子窓を、第一の平行格子窓と略直
交する方向にて、第一の平行格子窓の同一長孔を通った
光ファイバは第二の平行格子窓では各々異なった長孔を
通るように各光ファイバを挿入するという操作を所定の
平行格子窓数だけ繰返し、更に、相隣接する平行格子窓
同士はほぼ密着するようにして、光ファイバを二次元に
精密配列固定した二次元光アレイの製造方法を提供す
る。また、 光ファイバを角穴部材に固定後、前記平行格子窓の
何れかの重ね合わせ部から０．５ｍｍ以内まで端面を研
磨する点にも特徴を有する。また、 (10) 前記平行格子窓の加工は研削加工による点にも
特徴を有する。また、 (11) 前記角穴又は長孔に挿入する光ファイバの先端
は予めテーパ処理しておく点にも特徴を有する。また、 (12) 前記テーパ処理は溶融延伸による点にも特徴を
有する。First, the two parallel grating windows, each of which has a plurality of long holes each having a width substantially equal to the outer diameter of the optical fiber, provided on different optical array substrates are used. Insert a predetermined number of optical fibers into each long hole, then the second parallel grating window, the same long hole of the first parallel grating window in the direction substantially orthogonal to the first parallel grating window. The operation of inserting each optical fiber so that the passing optical fiber passes through the different long holes in the second parallel grating window is repeated by a predetermined number of parallel grating windows, and the parallel grating windows adjacent to each other are almost Provided is a method for manufacturing a two-dimensional optical array in which optical fibers are precisely arranged and fixed in a two-dimensional manner so as to be in close contact with each other. Another feature is that after the optical fiber is fixed to the square hole member, the end face is polished to within 0.5 mm from any overlapping portion of the parallel lattice window. Further, (10) the processing of the parallel lattice window is also characterized in that it is performed by grinding. (11) Another feature is that the tip of the optical fiber to be inserted into the square hole or the long hole is previously tapered. (12) The taper process is also characterized in that it is melt-stretched.
【００１０】以下、本発明を図面を参考して具体的に説
明する。下記に図示される平行格子窓は光アレイ基板と
同じでも或いは光アレイ基板に一部でも良い。図１−
（ａ）〜（ｃ）は２つの平行格子窓を夫々異なる光アレ
イ基板に備えた角穴部材（平行格子窓）の分解斜視図で
ある（請求項１の発明に対応する）。特に、図１−
（ａ）は夫々異なる２つの平板状光アレイ基板に備えた
角穴部材（平行格子窓）の場合の分解斜視図である、The present invention will be specifically described below with reference to the drawings. The parallel grating window illustrated below may be the same as or part of the optical array substrate. Figure 1-
(A)-(c) is an exploded perspective view of a square hole member (parallel lattice window) provided with two parallel lattice windows on different optical array substrates (corresponding to the invention of claim 1). In particular,
(A) is an exploded perspective view in the case of a square hole member (parallel lattice window) provided in two different flat optical array substrates,
【００１１】図１−（ｂ）は夫々異なる２つの凹部状光
アレイ基板に備えた角穴部材（平行格子窓）を該凹部が
背中合わせとなるように組み合わせた分解斜視図であ
る。図１−（ｃ）は夫々異なる２つの凹部状光アレイ基
板に備えた角穴部材（平行格子窓）を、一方の光アレイ
基板の凹部に他方の光アレイ基板の凹部が嵌合するよう
に組み合わせた分解斜視図である。図１において、１は
上方光アレイ基板、２は下方光アレイ基板、３は上方格
子窓、４は下方格子窓、５は上方凹部、６は下方凹部で
ある。FIG. 1- (b) is an exploded perspective view in which two different concave-shaped optical array substrates are provided with square hole members (parallel lattice windows) so that the concave portions are back-to-back. In FIG. 1- (c), the rectangular hole members (parallel grating windows) provided in two different concave optical array substrates are arranged so that the concave portions of one optical array substrate fit into the concave portions of the other optical array substrate. It is a disassembled perspective view which combined. In FIG. 1, 1 is an upper optical array substrate, 2 is a lower optical array substrate, 3 is an upper lattice window, 4 is a lower lattice window, 5 is an upper recess, and 6 is a lower recess.
【００１２】光アレイ基板に設ける平行格子窓は、図１
−（ｃ）に示されるように互いに嵌合し易くするように
下方凹部６内に上方凹部５を配置させても、又は図１−
（ｂ）に示されるように角穴部材（平行格子窓）３、４
に挿入される光ファイバが整列固定し易くするために、
凹部５、６が互いに背中合わせになるように配置させて
もよい。しかし、図１−（ａ）に示されるように光アレ
イ基板自体を凹部等に加工せずにそのまま平行格子窓を
光アレイ基板内に設けてもよい。要するに、２つの角穴
部材（平行格子窓）が夫々異なる光アレイ基板に互いに
略直交して配置できれば、角穴部材（平行格子窓）の形
状やその向きは特に制限されない。The parallel grating window provided on the optical array substrate is shown in FIG.
The upper recess 5 may be arranged in the lower recess 6 to facilitate the fitting together as shown in FIG.
As shown in (b), square hole members (parallel lattice windows) 3, 4
To make it easy to align and fix the optical fiber inserted in
You may arrange | position so that the recessed parts 5 and 6 may be back-to-back mutually. However, as shown in FIG. 1- (a), the parallel array window may be provided in the optical array substrate as it is without processing the optical array substrate itself into a recess or the like. In short, if the two square hole members (parallel lattice windows) can be arranged on the different optical array substrates substantially orthogonal to each other, the shape and direction of the square hole members (parallel lattice window) are not particularly limited.
【００１３】図２−（ａ）〜（ｂ）は３つの角穴部材
（平行格子窓）を夫々異なる光アレイ板に備えた角穴部
材（平行格子窓）の分解斜視図である（請求項２の発明
に対応する）。図２−（ａ）は光アレイ基板自体を凹部
等に加工せずにそのまま角穴部材（平行格子窓）を光ア
レイ基板内に設けた、３つの平板状光アレイ基板に備え
た角穴部材（平行格子窓）の分解斜視図である。2 (a) and 2 (b) are exploded perspective views of a square hole member (parallel lattice window) provided with three square hole members (parallel lattice window) on different optical array plates (claims). 2 corresponds to the invention). FIG. 2- (a) is a square hole member provided on three flat plate-like optical array substrates in which the square hole member (parallel lattice window) is provided in the optical array substrate as it is without processing the optical array substrate itself into a recess or the like. It is an exploded perspective view of (parallel lattice window).
【００１４】図２−（ｂ）は３つの凹部状光アレイ基板
に備えた角穴部材（平行格子窓）を、一方の光アレイ基
板の凹部に他方の光アレイ基板の凹部が嵌合するように
互いに組み合わせた分解斜視図である。図２において、
１１は上方光アレイ基板、１２は中央光アレイ基板、１
３は下方光アレイ基板、１４は上方格子窓、１５は中央
格子窓、１６は下方格子窓、１７は上板凹部、１８は中
板凹部、１９は下板凹部である。FIG. 2- (b) shows that the rectangular hole members (parallel lattice windows) provided in the three concave optical array substrates are fitted in the concave portions of one optical array substrate and the concave portions of the other optical array substrate. FIG. 3 is an exploded perspective view showing a combination with each other. In FIG.
11 is an upper optical array substrate, 12 is a central optical array substrate, 1
3 is a lower optical array substrate, 14 is an upper lattice window, 15 is a central lattice window, 16 is a lower lattice window, 17 is an upper plate recess, 18 is a middle plate recess, and 19 is a lower plate recess.
【００１５】この場合、光アレイ基板に設ける角穴部材
（平行格子窓）は、図１の場合と同様に取り扱うことが
できる。そして、該角穴部材（平行格子窓）を設けた光
アレイ基板の個数は図示に限定されず、使用される用途
に応じて増減できる。上記図１−（ｂ）、（ｃ）及び図
２−（ｂ）は研削加工にて加工可能な例を示すものであ
る。図３は角穴部材（平行格子窓）を備えた複合光アレ
イ基板において、その角穴部材（平行格子窓）が略直交
して配置された状態を示す説明図である。In this case, the square hole member (parallel lattice window) provided on the optical array substrate can be handled in the same manner as in FIG. The number of optical array substrates provided with the square hole members (parallel lattice windows) is not limited to that shown in the figure, and can be increased or decreased according to the intended use. FIG. 1- (b), (c) and FIG. 2- (b) show examples that can be processed by grinding. FIG. 3 is an explanatory diagram showing a state in which the square hole members (parallel lattice windows) are arranged substantially orthogonally in the composite optical array substrate including the square hole members (parallel lattice windows).
【００１６】図３−（イ）は上方光アレイ基板１の下側
に下方光アレイ基板２を重ね合わせた場合の平行格子窓
の状態を示す説明図である。図３−（ロ）は上方平行格
子窓３が設けられた上板光アレイ基板１の状態を示す。
図３−（ハ）は下方平行格子窓４が設けられた下方光ア
レイ基板２の状態を示す。FIG. 3A is an explanatory view showing the state of the parallel grating window when the lower optical array substrate 2 is superposed on the lower side of the upper optical array substrate 1. FIG. 3B shows a state of the upper optical array substrate 1 provided with the upper parallel grating window 3.
FIG. 3C shows a state of the lower optical array substrate 2 provided with the lower parallel grating window 4.
【００１７】図４は、本発明の複合二次元光アレイ基板
を用いて光ファイバを二次元に精密配列固定する方法を
示す説明図である（請求項８の発明に対応する）。図４
−（イ）は、第一、及び第二の平行格子窓と挿入される
光ファイバＡの関係を示す状態図である。図４−（ロ）
は、第一、及び第二の平行格子窓の各長孔に所定の本数
の光ファイバＡを挿入し状態を示す状態図である。図４
−（ハ）は、第一、及び第二のの平行格子窓に光ファイ
バを挿入後の、相隣接する平行格子窓同士がほぼ密着し
て配置され、光ファイバが二次元に精密配列固定した状
態を示す状態図である。また、予め各平行格子窓同士を
組み合わせた後に光ファイバを挿入してももちろん良
い。FIG. 4 is an explanatory view showing a method for precisely arranging and fixing optical fibers in a two-dimensional manner using the composite two-dimensional optical array substrate of the present invention (corresponding to the invention of claim 8). FIG.
-(A) is a state diagram showing the relationship between the optical fiber A to be inserted with the first and second parallel grating windows. Figure 4- (b)
[Fig. 6] is a state diagram showing a state in which a predetermined number of optical fibers A are inserted into each of the long holes of the first and second parallel grating windows. FIG.
-(C) shows that after inserting the optical fibers into the first and second parallel grating windows, the adjacent parallel grating windows are arranged so as to be in close contact with each other, and the optical fibers are precisely arranged and fixed in two dimensions. It is a state diagram showing a state. It is also possible to insert the optical fiber after combining the parallel grating windows with each other in advance.
【００１８】従って、図４−（ロ）に示されるように、
第一の平行格子窓４の各長孔に各々所定の本数の光ファ
イバＡを挿入した後に、次に第二の平行格子窓３を、第
一の平行格子窓４と略直交する方向にて、第一の平行格
子窓４の同一長孔を通った光ファイバが第二の平行格子
窓３では各々異なった長孔を通るように各光ファイバを
挿入させる。Therefore, as shown in FIG.
After inserting a predetermined number of optical fibers A into each long hole of the first parallel grating window 4, the second parallel grating window 3 is then placed in a direction substantially orthogonal to the first parallel grating window 4. The respective optical fibers are inserted so that the optical fibers passing through the same elongated hole of the first parallel grating window 4 pass through different elongated holes of the second parallel grating window 3.
【００１９】次に、図４−（ハ）に示されるように、そ
の結果、第一の平行格子窓４、第二の平行格子窓３に光
ファイバＡが挿入された後には、相隣接する平行格子窓
３、４同士はほぼ密着して配置されて、光ファイバＡが
二次元に精密配列固定した状態となる。図５は、角穴又
は長孔に挿入する光ファイバＡの先端が予め加工処理さ
れてテーパＣを設けた状態を示す斜視図である。Next, as shown in FIG. 4C, as a result, after the optical fiber A is inserted into the first parallel grating window 4 and the second parallel grating window 3, they are adjacent to each other. The parallel grating windows 3 and 4 are arranged so as to be in close contact with each other, and the optical fibers A are two-dimensionally and precisely arranged and fixed. FIG. 5 is a perspective view showing a state in which the tip of the optical fiber A to be inserted into the square hole or the long hole is preliminarily processed and a taper C is provided.
【００２０】図６はメタルフランジＤに本発明の角穴部
材（平行格子窓）Ｅを組み込み、光ファイバＡを挿入し
た状態を示し、図６−（イ）はその側面図、図６−
（ロ）はその下方断面図であり、光ファイバＡの端面の
状態を示すものである。本発明による複合二次元光アレ
イの製造における光ファイバ配列の基準となる長孔加工
は、市販されている高精度ダイサ等を用いればサブミク
ロンの配列精度は容易に達成できる。FIG. 6 shows a state in which the square hole member (parallel lattice window) E of the present invention is incorporated in the metal flange D and the optical fiber A is inserted, and FIG. 6- (a) is a side view thereof and FIG.
(B) is a lower sectional view thereof, showing a state of the end face of the optical fiber A. The long hole processing, which is the standard of the optical fiber array in the production of the composite two-dimensional optical array according to the present invention, can easily achieve submicron array accuracy by using a commercially available high-precision dicer or the like.
【００２１】また、溝幅についても、磨耗の少ないブレ
ード及び基板材質、例えばシリコンを選択することによ
り１μｍ程度の研削加工の制御は可能である。角穴に挿
入された状態の光ファイバは、１ヶ所の長孔内では、上
下又は左右の一方向しか規制しない。このため、長孔の
長手方向内では光ファイバの剛性の範囲内での曲がりが
生じ、結果として配列精度の劣化を生じる可能性があ
る。光アレイの端面研磨を重ね合わせ部近傍まで行なう
ことは、曲がりの影響を小さくするうえで有効であり、
特に０．５ｍｍ以内、好ましくは０．２ｍｍ以下まで研
磨するのがよい。Regarding the groove width, it is possible to control the grinding process to about 1 μm by selecting a blade and a substrate material which are less worn, such as silicon. The optical fiber inserted in the rectangular hole regulates only one direction, up and down or left and right, within one long hole. For this reason, bending may occur within the rigidity of the optical fibers within the longitudinal direction of the long holes, and as a result, the array accuracy may deteriorate. It is effective to polish the end face of the optical array to the vicinity of the overlapping part to reduce the influence of bending.
In particular, it is preferable to polish to within 0.5 mm, preferably 0.2 mm or less.
【００２２】また、平行格子窓の積層数枚、即ち光アレ
イ基板の枚数を多くすることも、曲がり自体を小さくす
るうえで有効である。また、光ファイバ先端を、例えば
溶融延伸等により予めテーパ加工しておくと、組立作業
性は一層よくなる。なお、光アレイ基板材質としては、
ＬＤ（ＰＤ）の信頼性上、ガス発生の恐れのない無機材
料を用いるのが望ましく、更に加工性のよいシリコンを
材質とするとよい。Further, increasing the number of laminated parallel grating windows, that is, the number of optical array substrates is also effective in reducing the bending itself. Further, if the tip of the optical fiber is previously tapered by, for example, melt drawing, the workability of assembling is further improved. As the material of the optical array substrate,
In terms of reliability of the LD (PD), it is desirable to use an inorganic material that does not generate gas, and it is preferable to use silicon, which has better processability.
【００２３】[0023]
【作用】本発明によると、複数個の光アレイ基板に備え
た平行格子窓（角穴部材）を互いに略直交して配置し、
両孔の交差部で二次元配列した角穴部材を形成したの
で、配列精度を向上させた複合二次元光アレイを提供で
きる。各平行格子窓を光ファイバに順次通しながら組み
立てる本発明の方法によると、位置の自由度がきくため
に、作業性がよい利点がある。また、本発明では、１枚
の光アレイ基板上に高密度に加工し、後で切断チップ化
できるため、量産性に富み、低コスト化に有利である。According to the present invention, parallel grating windows (square hole members) provided on a plurality of optical array substrates are arranged substantially orthogonal to each other,
Since the two-dimensionally arrayed rectangular hole members are formed at the intersections of both holes, it is possible to provide a composite two-dimensional optical array with improved arraying accuracy. According to the method of the present invention in which the parallel grating windows are sequentially assembled through the optical fiber, the degree of freedom in position is increased, which has the advantage of good workability. Further, in the present invention, it is possible to perform high-density processing on one optical array substrate and later cut into chips, which is advantageous in mass productivity and cost reduction.
【００２４】[0024]
【実施例】実施例により本発明を詳細に説明するが、そ
れらは本発明の望ましい範囲を制限しない。図６は本発
明による８×８二次元光アレイの実施例を説明するもの
である。基板にはシリコンを用い、まずダイサによる研
削加工により、図１（ｂ）の例に示す溝加工を行なっ
た。光ファイバ外径１２５μｍに対し、溝幅は１２７±
１μｍ、溝ピッチは２５０±０．５μｍとした。又、光
ファイバを固定後、両平行格子窓の重ね合わせ部から
０．１ｍｍ以内迄端面研磨を行なった。The invention is illustrated in greater detail by the examples, which do not limit the desired scope of the invention. FIG. 6 illustrates an embodiment of an 8 × 8 two-dimensional optical array according to the present invention. Silicon was used for the substrate, and the groove processing shown in the example of FIG. 1B was first performed by grinding with a dicer. The outer diameter of the optical fiber is 125 μm, and the groove width is 127 ±
The groove pitch was 1 μm and the groove pitch was 250 ± 0.5 μm. Further, after fixing the optical fiber, end face polishing was performed to within 0.1 mm from the overlapping portion of both parallel grating windows.
【００２５】この結果、各光ファイバの配列精度は全て
設計値に対して３μｍ以下にすることができた。この値
はＧＩ型光ファイバ（コア径５０μｍ）に対しては十分
なものである。８枚の８心光ファイバテープは先端のみ
上記角穴部材にて位置決めを行ない、後部はメタルフラ
ンジ内にてエポキシ樹脂のような接着剤にて固定した。
また、平行格子窓は１枚のシリコンウエハから１００チ
ップ以上がとれ、量産化にも有効であることが確認され
た。As a result, the array accuracy of each optical fiber could be set to 3 μm or less with respect to the design value. This value is sufficient for a GI type optical fiber (core diameter 50 μm). The eight 8-core optical fiber tapes were positioned by the square hole member only at the tip and fixed at the rear by an adhesive such as epoxy resin in the metal flange.
In addition, it was confirmed that 100 or more chips could be taken from a single silicon wafer for the parallel lattice window, which was also effective for mass production.
【００２６】[0026]
【発明の効果】以上説明したように、本発明の複合二次
元光アレイによると、複数個の光アレイ基板に備えた平
行格子窓（角穴部材）を互いに略直交して配置し、両孔
の交差部で二次元配列した角穴部材を形成したので、配
列精度を向上させることができ、二次元光アレイの低コ
スト量産化に効果がある。As described above, according to the composite two-dimensional optical array of the present invention, parallel grating windows (square hole members) provided on a plurality of optical array substrates are arranged substantially orthogonal to each other, and both holes are formed. Since the square hole members that are two-dimensionally arrayed are formed at the intersections, the arraying accuracy can be improved, and this is effective for low-cost mass production of the two-dimensional optical array.
【図１】２つの平行格子窓を夫々異なる光アレイ基板に
備えた角穴部材（平行格子窓）の分解斜視図である。特
に、図１−（ａ）は夫々異なる２つの平板状光アレイ基
板に備えた角穴部材（平行格子窓）の場合の分解斜視図
である、図１−（ｂ）は夫々異なる２つの凹部状光アレ
イ基板に備えた角穴部材（平行格子窓）を該凹部が背中
合わせとなるように組み合わせた分解斜視図である。図
１−（ｃ）は夫々異なる２つの凹部状光アレイ基板に備
えた角穴部材（平行格子窓）を、一方の光アレイ基板の
凹部に他方の光アレイ基板板の凹部が嵌合するように組
み合わせた分解斜視図である。FIG. 1 is an exploded perspective view of a square hole member (parallel lattice window) provided with two parallel lattice windows on different optical array substrates. In particular, FIG. 1- (a) is an exploded perspective view in the case of a square hole member (parallel lattice window) provided on two different flat optical array substrates, and FIG. 1- (b) is two different concave portions. FIG. 8 is an exploded perspective view of a rectangular hole array member (parallel lattice window) provided in the light array substrate combined so that the concave portions are back to back. In FIG. 1- (c), the rectangular hole members (parallel lattice windows) provided in the two different concave optical array substrates are arranged so that the concave portions of one optical array substrate fit into the concave portions of the other optical array substrate plate. FIG.
【図２】３つの角穴部材（平行格子窓）を夫々異なる光
アレイ板に備えた角穴部材（平行格子窓）の分解斜視図
である。図２−（ａ）は光アレイ基板自体を凹部等に加
工せずにそのまま平行格子窓を光アレイ基板内に設け
た、３つの平板状光アレイ基板に備えた角穴部材（平行
格子窓）の分解斜視図である。図２−（ｂ）は３つの凹
部状光アレイ基板に備えた角穴部材（平行格子窓）を、
一方の光アレイ基板の凹部に他方の光アレイ基板の凹部
が嵌合するように互いに組み合わせた分解斜視図であ
る。FIG. 2 is an exploded perspective view of a square hole member (parallel lattice window) provided with three square hole members (parallel lattice window) on different optical array plates. FIG. 2- (a) is a square hole member (parallel lattice window) provided on three flat plate-like optical array substrates in which the parallel lattice windows are provided in the optical array substrate as they are without processing the optical array substrate itself into concave portions. FIG. FIG. 2- (b) shows square hole members (parallel lattice windows) provided on three concave optical array substrates,
FIG. 7 is an exploded perspective view of the optical array substrates, which are combined with each other so that the concave portions of the other optical array substrate fit into the concave portions of the optical array substrate.
【図３】角穴部材（平行格子窓）を備えた複合光アレイ
基板において、その角穴部材（平行格子窓）が略直交し
て配置された状態を示す説明図である。図３−（イ）は
上方光アレイ基板１の下側に下方光アレイ基板２を重ね
合わせた場合の平行格子窓の状態を示す説明図である。
図３−（ロ）は上方平行格子窓３が設けられた上板光ア
レイ基板１の状態を示す。図３−（ハ）は下方平行格子
窓４が設けられた下方光アレイ基板２の状態を示す。FIG. 3 is an explanatory view showing a state in which the square hole member (parallel lattice window) is arranged substantially orthogonally in the composite optical array substrate including the square hole member (parallel lattice window). FIG. 3A is an explanatory diagram showing a state of the parallel grating window when the lower optical array substrate 2 is superposed on the lower side of the upper optical array substrate 1.
FIG. 3B shows a state of the upper optical array substrate 1 provided with the upper parallel grating window 3. FIG. 3C shows a state of the lower optical array substrate 2 provided with the lower parallel grating window 4.
【図４】本発明の複合二次元光アレイ基板を用いて光フ
ァイバを二次元に精密配列固定する方法を示す説明図で
ある。図４−（イ）は、第一、及び第二の平行格子窓と
挿入される光ファイバＡの関係を示す状態図である。図
４−（ロ）は、第一、及び第二の平行格子窓の各長孔に
所定の本数の光ファイバＡを挿入し状態を示す状態図で
ある。図４−（ハ）は、第一、及び第二のの平行格子窓
に光ファイバを挿入後の、相隣接する平行格子窓同士が
ほぼ密着して配置され、光ファイバが二次元に精密配列
固定した状態を示す状態図である。FIG. 4 is an explanatory diagram showing a method of precisely arranging and fixing optical fibers in a two-dimensional manner using the composite two-dimensional optical array substrate of the present invention. FIG. 4- (a) is a state diagram showing the relationship between the first and second parallel grating windows and the optical fiber A to be inserted. FIG. 4- (b) is a state diagram showing a state in which a predetermined number of optical fibers A are inserted into each of the long holes of the first and second parallel grating windows. FIG. 4C shows that the optical fibers are inserted into the first and second parallel grating windows, and the parallel grating windows adjacent to each other are almost in close contact with each other. It is a state diagram showing a fixed state.
【図５】角穴又は長孔に挿入する光ファイバＡの先端が
予め加工処理されてテーパＣを設けた状態を示す斜視図
である。FIG. 5 is a perspective view showing a state in which a tip of an optical fiber A to be inserted into a square hole or an elongated hole is preliminarily processed and a taper C is provided.
【図６】メタルフランジＤに本発明の角穴部材（平行格
子窓）Ｅを組み込み、光ファイバＡを挿入した状態を示
し、図６−（イ）はその側面図、図６−（ロ）はその下
方断面図であり、光ファイバＡの端面の状態を示すもの
である。6 shows a state in which a square hole member (parallel lattice window) E of the present invention is incorporated in a metal flange D and an optical fiber A is inserted, FIG. 6- (a) is a side view thereof, and FIG. 6- (b) is shown. FIG. 4 is a lower sectional view thereof, showing a state of the end face of the optical fiber A.
１ 上板光アレイ基板 ２ 下板光アレイ基板 ３ 上方平行格子窓（角穴部材） ４ 下方平行格子窓（角穴部材） ５ 上方凹部 ６ 下方凹部 １１ 上方光アレイ基板 １２ 中央光アレイ基板 １３ 下方光アレイ基板 １４ 上方平行格子窓（角穴部材） １５ 中央平行格子窓（角穴部材） １６ 下方平行格子窓（角穴部材） １７ 上板凹部 １８ 中板凹部 １９ 下板凹部 Ａ 光ファイバ Ｂ 被覆部 Ｃ テーパ部 Ｄ メタルフランジ Ｅ 角穴部材（平行格子窓） Ｆ 光ファイバ端面 1 Upper Plate Optical Array Substrate 2 Lower Plate Optical Array Substrate 3 Upper Parallel Lattice Window (Square Hole Member) 4 Lower Parallel Lattice Window (Square Hole Member) 5 Upper Recess 6 Lower Recess 11 Upper Optical Array Substrate 12 Central Optical Array Substrate 13 Lower Optical array substrate 14 Upper parallel lattice window (square hole member) 15 Central parallel lattice window (square hole member) 16 Lower parallel lattice window (square hole member) 17 Upper plate recess 18 Middle plate recess 19 Lower plate recess A Optical fiber B coating Part C Tapered part D Metal flange E Square hole member (parallel lattice window) F Optical fiber end face
Claims (12)
長孔からなる２つの平行格子窓を、夫々異なる光アレイ
基板に互いに略直交して配置することによって、両孔の
交差部にて二次元に配列された角穴部材が形成されてお
り、更に前記角穴部に光ファイバが挿入され、その光フ
ァイバが二次元に精密配列固定されていることを特徴と
する、二次元光アレイ。1. Two parallel grating windows, each of which is composed of a plurality of elongated holes having a width substantially equal to the outer diameter of the optical fiber, are arranged on different optical array substrates at substantially right angles to each other so that they intersect at the intersection of both holes. Two-dimensionally arranged square hole member, an optical fiber is further inserted in the square hole portion, and the optical fiber is precisely arranged and fixed in two dimensions, a two-dimensional optical array.
長孔からなる３つ以上の平行格子窓が夫々相異なる光ア
レイ基板に設けられており、且つ相接する平行格子窓同
士は互いに略直交に配置され、それにより形成される二
次元に配列された角穴位置は、どの相接する平行格子窓
においても同軸位置にあり、更に前記角穴部に光ファイ
バが挿入され、その光ファイバが二次元に精密配列固定
されていることを特徴とする、二次元光アレイ。2. Three or more parallel lattice windows each having a plurality of long holes each having a width substantially equal to the outer diameter of the optical fiber are provided on different optical array substrates, and the parallel lattice windows adjacent to each other are provided. The two-dimensionally arranged square hole positions arranged substantially orthogonal to each other are at the coaxial positions in any adjacent parallel lattice windows, and an optical fiber is further inserted into the square hole portion. A two-dimensional optical array, in which optical fibers are precisely arranged and fixed in two dimensions.
近傍まで端面が研磨してあることを特徴とする、請求項
１又は２記載の二次元光アレイ。3. The two-dimensional optical array according to claim 1, wherein an end face is polished up to the vicinity of an overlapping portion of any one of the parallel grating windows.
ことを特徴とする、請求項１又は２記載の二次元光アレ
イ。4. The two-dimensional optical array according to claim 1, wherein the parallel grating window is made of an inorganic material.
特徴とする、請求項４記載の二次元光アレイ。5. The two-dimensional optical array according to claim 4, wherein the substrate is made of silicon.
長孔からなる２つの平行格子窓を、夫々異なる光アレイ
基板に互いに略直交して配置して、両孔の交差部で二次
元に配列した角穴部材を形成し、次いで前記角穴部に光
ファイバを挿入して、光ファイバを二次元に精密配列固
定することを特徴とする、二次元光アレイの製造方法。6. Two parallel grating windows, each of which is composed of a plurality of long holes having a width substantially equal to the outer diameter of the optical fiber, are arranged on different optical array substrates substantially orthogonal to each other, and two parallel lattice windows are formed at the intersection of both holes. A method for manufacturing a two-dimensional optical array, comprising forming square hole members arranged in a dimension, and then inserting an optical fiber into the square hole portion to fix the optical fibers in a two-dimensional precise array.
長孔からなる３つ以上の平行格子窓が夫々相異なる光ア
レイ基板に設けられ、かつ相接する平行格子窓同士は互
いに略直交して配置し、更に、それにより形成される二
次元に配列された角穴位置がどの相接する平行格子窓に
おいても同軸位置になるようにし、次いで前記角穴部に
光ファイバを挿入して、光ファイバを二次元に精密配列
固定することを特徴とする、二次元光アレイの製造方
法。7. Three or more parallel lattice windows, each of which is composed of a plurality of long holes having a width substantially equal to the outer diameter of the optical fiber, are provided on different optical array substrates, and the parallel lattice windows that are in contact with each other are substantially mutually. They are arranged orthogonally, and the positions of the two-dimensionally arranged square holes are coaxial with each other in the parallel grating windows, and then an optical fiber is inserted into the square holes. And a method of manufacturing a two-dimensional optical array, characterized in that the optical fibers are precisely arranged and fixed in two dimensions.
長孔からなる２つ以上の平行格子窓が夫々異なる光アレ
イ基板に設けられたものを用い、初めに、第一の平行格
子窓の各長孔に各々所定の本数の光ファイバを挿入し、
次に第二の平行格子窓を、第一の平行格子窓と略直交す
る方向にて、第一の平行格子窓の同一長孔を通った光フ
ァイバは第二の平行格子窓では各々異なった長孔を通る
ように各光ファイバを挿入するという操作を所定の平行
格子窓数だけ繰返し、更に、相隣接する平行格子窓同士
はほぼ密着するようにして、光ファイバを二次元に精密
配列固定したことを特徴とする、二次元光アレイの製造
方法。8. A first parallel grating is used in which two or more parallel grating windows each having a plurality of elongated holes each having a width substantially equal to the outer diameter of the optical fiber are provided on different optical array substrates. Insert a predetermined number of optical fibers into each long hole of the window,
Next, the optical fibers that passed through the same elongated hole of the first parallel lattice window in the second parallel lattice window in a direction substantially orthogonal to the first parallel lattice window were different in the second parallel lattice window. Repeat the operation of inserting each optical fiber so that it passes through the long hole for the specified number of parallel grating windows, and make the adjacent parallel grating windows almost in close contact with each other, and fix the optical fibers in a two-dimensional precise array. A method for manufacturing a two-dimensional optical array, characterized in that.
行格子窓の何れかの重ね合わせ部から０．５ｍｍ以内ま
で端面を研磨することを特徴とする、請求項６〜８のい
ずれかに記載の二次元光アレイの製造方法。9. The method according to claim 6, wherein after fixing the optical fiber to the square hole member, the end face is polished to within 0.5 mm from any overlapping portion of the parallel grating window. 2. A method for manufacturing a two-dimensional optical array according to.
ることを特徴とする、請求項６〜８のいずかに記載の二
次元光アレイの製造方法。10. The method for manufacturing a two-dimensional optical array according to claim 6, wherein the parallel grating window is processed by grinding.
バの先端は予めテーパ処理しておくことを特徴とする、
請求項６〜８のいずれかに記載の二次元光アレイの製造
方法。11. A tip of an optical fiber to be inserted into the square hole or the long hole is tapered in advance.
The method for manufacturing a two-dimensional optical array according to claim 6.
を特徴とする、請求項１１記載の二次元光アレイの製造
方法。12. The method of manufacturing a two-dimensional optical array according to claim 11, wherein the taper process is a melt drawing process.
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| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP13574595A JP3482736B2 (en) | 1995-05-10 | 1995-05-10 | Two-dimensional optical array and manufacturing method thereof |
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|---|---|---|---|
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| Publication Number | Publication Date |
|---|---|
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| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| WO2002005001A1 (en) * | 2000-07-10 | 2002-01-17 | Hikari Tech Co., Ltd. | Method of manufacturing multi-core ferrule |
-
1995
- 1995-05-10 JP JP13574595A patent/JP3482736B2/en not_active Expired - Fee Related
Cited By (2)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| WO2002005001A1 (en) * | 2000-07-10 | 2002-01-17 | Hikari Tech Co., Ltd. | Method of manufacturing multi-core ferrule |
| US6711802B2 (en) | 2000-07-10 | 2004-03-30 | Hikari Tech Co., Ltd. | Method of manufacturing multi-core ferrule |
Also Published As
| Publication number | Publication date |
|---|---|
| JP3482736B2 (en) | 2004-01-06 |
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