JPH08292118A - Pressure sensor - Google Patents
Pressure sensorInfo
- Publication number
- JPH08292118A JPH08292118A JP7101324A JP10132495A JPH08292118A JP H08292118 A JPH08292118 A JP H08292118A JP 7101324 A JP7101324 A JP 7101324A JP 10132495 A JP10132495 A JP 10132495A JP H08292118 A JPH08292118 A JP H08292118A
- Authority
- JP
- Japan
- Prior art keywords
- pressure sensor
- fixed
- connector
- sensor chip
- recess
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Granted
Links
Landscapes
- Measuring Fluid Pressure (AREA)
Abstract
Description
【０００１】[0001]
【産業上の利用分野】本発明は、コネクタを有する圧力
センサに関する。FIELD OF THE INVENTION The present invention relates to a pressure sensor having a connector.
【０００２】[0002]
【従来の技術】従来、この種の圧力センサとして図４及
び図５に示す構成のものが存在する。このものは、金属
製のボディA と、ボディA に装着される圧力センサチッ
プB と、圧力センサチップB と外部機器との間の信号を
入出力する端子G1を導出した樹脂製のコネクタC と、ボ
ディA に溶接固定される金属製の固定部材D と、を備え
てなっている。2. Description of the Related Art Conventionally, pressure sensors of this type have the structures shown in FIGS. This is a resin connector C that has a metal body A, a pressure sensor chip B mounted on the body A, and a terminal G 1 for inputting and outputting signals between the pressure sensor chip B and external equipment. And a metal fixing member D welded and fixed to the body A.
【０００３】さらに詳しくは、ボディA は、比較的背の
高い円筒部A2により開口部分を形成された凹所A1が設け
られ、その凹所A1の最も奥には、圧力センサチップB が
貫通して設けられた流入孔A3を閉塞するよう気密固定さ
れるとともに、圧力センサチップB にワイヤボンディン
グにより接続されたプリント基板E 、貫通コンデンサF1
を設けたシールド部材F 、貫通コンデンサF1に接続され
る端子G1を設けた端子ブロックG 、端子C1を挿通して端
子ブロックG に装着される防水キャップH が、順次凹所
A1内に配設される。More specifically, the body A is provided with a recess A 1 having an opening formed by a relatively tall cylindrical portion A 2 , and the pressure sensor chip B is provided at the innermost part of the recess A 1. Is airtightly fixed so as to block the inflow hole A 3 provided through, and the printed circuit board E and the feedthrough capacitor F 1 connected to the pressure sensor chip B by wire bonding.
A shield member F, a terminal block G provided with a terminal G 1 connected to the feedthrough capacitor F 1 , and a waterproof cap H inserted through the terminal C 1 and attached to the terminal block G are sequentially recessed.
It is located in A 1 .
【０００４】コネクタC は、端子G1を導出した側と反対
側へ円筒状に延出した支持部C1が、ボディA の円筒部A2
の内側に位置するとともに、ボディA に固定部D1を溶接
固定された固定部材D により押圧されることによって、
シールド部材F をボディA との間に挟持してボディA に
支持固定される。このとき、コネクタC の支持部C1とボ
ディA の円筒部A2との間に存在する隙間は、ゴム系の封
止部材I が支持部C1に設けた周回溝C2に装着されること
によって防水状態になっている。In the connector C, the support portion C 1 which is cylindrically extended to the side opposite to the side from which the terminal G 1 is led out is the cylindrical portion A 2 of the body A.
By being pressed by the fixing member D, which is located inside the body and the fixing portion D 1 is welded and fixed to the body A,
The shield member F is sandwiched between the body A and supported and fixed to the body A. At this time, the gap existing between the supporting portion C 1 of the connector C and the cylindrical portion A 2 of the body A is attached to the circular groove C 2 provided in the supporting portion C 1 by the rubber sealing member I 1. It is waterproof.
【０００５】そして、この圧力センサは、圧力がボディ
A の流入孔A3から圧力センサチップB に加わると、その
ときの圧力センサチップB の歪みで圧力を検出するよう
になっており、その検出信号が端子G1を介して伝送され
る。This pressure sensor has a pressure
When the pressure sensor chip B is applied to the pressure sensor chip B from the inflow hole A 3 of A, the pressure is detected by the strain of the pressure sensor chip B at that time, and the detection signal is transmitted through the terminal G 1 .
【０００６】[0006]
【発明が解決しようとする課題】上記した従来の圧力セ
ンサにあっては、コネクタC は、ボディA に固定される
とき、固定部材D の固定部D1をボディA の円筒部A2に溶
接固定し、その固定部材D により支持部C1が押圧される
ことによってボディA に支持固定されており、例えば加
圧変形することによってボディA にかしめ固定された場
合のように、加圧変形した際の残留応力がボディA に装
着されている圧力センサチップB の歪みゲージに加わる
こともなく、圧力検出精度に悪影響を与えずに済む。In the conventional pressure sensor described above, when the connector C is fixed to the body A, the fixing portion D 1 of the fixing member D is welded to the cylindrical portion A 2 of the body A. It is fixed and is supported and fixed to the body A by pressing the supporting portion C 1 by the fixing member D, and is deformed by pressure, for example, when it is caulked and fixed to the body A by being deformed by pressure. The residual stress is not applied to the strain gauge of the pressure sensor chip B mounted on the body A, and the pressure detection accuracy is not adversely affected.
【０００７】しかしながら、この場合、コネクタC の支
持部C1とボディA の円筒部A2との間には隙間が存在する
ために、わざわざ封止部材I を支持部C1の周回溝C2に装
着して防水状態にする必要がある。However, in this case, since there is a gap between the supporting portion C 1 of the connector C and the cylindrical portion A 2 of the body A, the sealing member I is purposely moved to the circumferential groove C 2 of the supporting portion C 1. It is necessary to attach it to and make it waterproof.
【０００８】また、ボディA の凹所A1は、コネクタC の
支持部C1を内側に位置させるために比較的背の高い円筒
部A2により開口部分を形成され、さらに貫通コンデンサ
F1を設けたシールド部材F を収容するためにも、圧力セ
ンサチップB が固定される最も奥の位置まではかなり深
くなっており、圧力センサチップB を固定したり、その
圧力センサチップB をワイヤボンディングによりプリン
ト基板E に接続する組立作業がやり難くなる。Further, the recess A 1 of the body A is formed with an opening portion by a relatively tall cylindrical portion A 2 in order to position the supporting portion C 1 of the connector C inside, and further, a through capacitor.
In order to accommodate the shield member F provided with F 1 , the pressure sensor chip B is fixed to the deepest position, and the pressure sensor chip B is fixed or the pressure sensor chip B is fixed. The assembly work for connecting to the printed circuit board E by wire bonding becomes difficult.
【０００９】本発明は、上記事由に鑑みてなしたもの
で、その第１の目的とするところは、別部材を用いるこ
となく容易に防水性を確保できる圧力センサを提供し、
第２の目的とするところは、組立作業がやり易い圧力セ
ンサを提供することにある。The present invention has been made in view of the above circumstances. A first object of the present invention is to provide a pressure sensor capable of easily ensuring waterproofness without using a separate member.
A second object is to provide a pressure sensor that is easy to assemble.
【００１０】[0010]
【課題を解決するための手段】上記した課題を解決する
ために、請求項１記載のものは、凹所を形成された金属
製のボディと、ボディの凹所に装着される圧力センサチ
ップと、圧力センサチップと外部機器との間の信号を入
出力する端子を導出した樹脂製のコネクタと、ボディに
溶接固定される金属製の固定部材と、を備えた圧力セン
サにおいて、前記コネクタは、前記固定部材と一体成形
して形成された構成にしてある。In order to solve the above-mentioned problems, according to the first aspect of the present invention, a metal body having a recess is formed, and a pressure sensor chip mounted in the recess of the body. In a pressure sensor including a resin connector in which a terminal for inputting and outputting a signal between the pressure sensor chip and an external device is led out, and a metal fixing member that is welded and fixed to a body, the connector is The fixing member is integrally formed with the fixing member.
【００１１】また、請求項２のものは、請求項１記載の
ものにおいて、前記ボディに溶接固定される前記固定部
材の固定部が筒状に形成されるとともに、前記コネクタ
の端子を貫通してシールド接続する貫通コンデンサーを
有したシールド部材が、上記筒状の固定部の内方に収容
されて前記ボディに装着された構成にしてある。According to a second aspect of the present invention, in the first aspect, the fixing portion of the fixing member, which is fixed to the body by welding, is formed in a tubular shape and penetrates the terminal of the connector. A shield member having a penetrating capacitor for shield connection is housed inside the cylindrical fixing portion and attached to the body.
【００１２】また、請求項３のものは、請求項２記載の
ものにおいて、前記シールド部材及び前記ボディは、互
いに係合する係合手段が設けられた構成にしてある。A third aspect of the present invention is the structure according to the second aspect, wherein the shield member and the body are provided with engaging means for engaging each other.
【００１３】[0013]
【作用】請求項１記載のものによれば、コネクタは、固
定部材との間が一体成形により防水状態になっていると
ともに、その一体成形された固定部材は固定部でもって
ボディに溶接固定されて防水状態になっている。According to the first aspect of the present invention, the connector is waterproof by integrally molding with the fixing member, and the fixing member integrally molded is welded and fixed to the body by the fixing portion. It is waterproof.
【００１４】請求項２記載のものによれば、貫通コンデ
ンサーを有したシールド部材は、筒状に形成された固定
部材の固定部の内方に収容されて圧力センサチップを装
着するボディの凹所には収容されないから、凹所の奥行
きは深くならない。According to the second aspect of the present invention, the shield member having the feedthrough capacitor is housed inside the fixing portion of the fixing member formed in a tubular shape, and the recess of the body for mounting the pressure sensor chip is provided. The depth of the recess does not become deep because it is not housed in.
【００１５】請求項３記載のものによれば、シールド部
材は、係合手段によりボディに位置決めして配設され
る。According to the third aspect, the shield member is positioned and disposed on the body by the engaging means.
【００１６】[0016]
【実施例】本発明の一実施例を図１乃至図３に基づいて
以下に説明する。DETAILED DESCRIPTION OF THE PREFERRED EMBODIMENTS An embodiment of the present invention will be described below with reference to FIGS.
【００１７】1 はボディで、鋼又はステンレス等の金属
により、一方面側に同心円状の段を有する凹所1aを設け
て六角ボルト状に形成され、その凹所1aの円状の開口周
縁部1bの外側には、凹部1cが円周に沿って等間隔の４箇
所に切り欠いて形成され、また凹所1aの中心位置には圧
力を測定する対象物の流入する流入孔1dが外部まで貫通
して設けられている。Reference numeral 1 denotes a body, which is made of a metal such as steel or stainless steel and is formed in a hexagonal bolt shape by providing a recess 1a having a concentric circular step on one surface side, and a circular opening peripheral portion of the recess 1a. On the outside of 1b, recesses 1c are formed by cutting out at four locations at equal intervals along the circumference, and in the center of the recess 1a, there is an inflow hole 1d into which the object whose pressure is to be measured flows in. It is provided through.
【００１８】2 は圧力センサチップで、シリコンダイヤ
フラム上に拡散抵抗を配することによって歪みゲージを
形成されている。この圧力センサチップ2 は、金属台座
2aに接合されたガラス台座2b上に接合して搭載された状
態で、その金属台座2aをレーザ溶接によりボディ1 の凹
所1aの最も奥に位置する流入孔1dを閉塞するよう気密固
定される。Reference numeral 2 is a pressure sensor chip, and a strain gauge is formed by arranging a diffusion resistance on a silicon diaphragm. This pressure sensor chip 2 has a metal base
The metal pedestal 2a is hermetically fixed by laser welding so that the metal pedestal 2a is mounted on the glass pedestal 2b joined to 2a by laser welding so as to block the inflow hole 1d located at the deepest position in the recess 1a of the body 1. .
【００１９】3 はプリント基板で、温度補償や増幅等の
回路が配され、その中央に設けた角孔3aに圧力センサチ
ップ2 を位置させてボディ1 の凹所1aにシリコン系接着
剤により固定されるとともに、圧力センサチップ2 とは
ワイヤボンディングにより接続される。A printed circuit board 3 is provided with circuits for temperature compensation, amplification, etc., and the pressure sensor chip 2 is positioned in a square hole 3a provided in the center of the printed circuit board and fixed in the recess 1a of the body 1 with a silicone adhesive. At the same time, the pressure sensor chip 2 is connected by wire bonding.
【００２０】4 はシールド部材で、金属材料により、円
形の箱型に形成され、その開口周縁部には凸部4aが円周
に沿って等間隔の４箇所に突設され、底部には貫通孔を
有する貫通コンデンサ4bが設けられている。このシール
ド部材4 は、凸部4aがボディ1 に設けた凹部1cに係合
し、つまり互いに係合する凸部4a及び凹部1cが係合手段
となって位置決めして装着されるとともに、プリント基
板3 に予めはんだ付けした端子片3aが貫通コンデンサ4b
の貫通孔に通された状態ではんだ付けして固定され、端
子片3aにより伝送される信号を外部ノイズから守るよう
になっている。Numeral 4 is a shield member, which is formed of a metal material in a circular box shape, and projections 4a are formed at four circumferentially equidistant intervals on the peripheral edge of the opening and penetrate through the bottom. A feedthrough capacitor 4b having a hole is provided. In this shield member 4, the convex portion 4a is engaged with the concave portion 1c provided in the body 1, that is, the convex portion 4a and the concave portion 1c which are engaged with each other are positioned and mounted as engaging means, and the printed circuit board is mounted. Terminal piece 3a pre-soldered on 3 is feedthrough capacitor 4b
It is fixed by being soldered in a state where it is passed through the through hole, and protects the signal transmitted by the terminal piece 3a from external noise.
【００２１】5 は端子ブロックで、端子5aを同時成形し
て形成され、シールド部材4 上に搭載される。このとき
端子5aに設けた接続部5bに端子片3aがはんだ接続され
る。Reference numeral 5 denotes a terminal block, which is formed by simultaneously molding the terminals 5 a and is mounted on the shield member 4. At this time, the terminal piece 3a is soldered to the connecting portion 5b provided on the terminal 5a.
【００２２】6 は防水キャップで、ゴム系材料により、
貫通孔6aを有して平板状に形成され、その貫通孔6aに上
記端子5aを挿通して端子ブロック5 に装着される。6 is a waterproof cap, made of rubber material,
It is formed in a flat plate shape having a through hole 6a, and the terminal 5a is inserted into the through hole 6a and mounted on the terminal block 5.
【００２３】7 は固定部材で、金属材料により、図３に
示すように、筒状の固定部7aを有して有底円筒状に形成
され、その底部には中央に大穴7b及びその大穴7bの回り
４箇所に***7cが設けられている。Reference numeral 7 denotes a fixing member, which is made of a metal material and has a cylindrical fixing portion 7a as shown in FIG. 3 and is formed in a cylindrical shape with a bottom. A large hole 7b and a large hole 7b are formed in the center of the bottom portion. Small holes 7c are provided at four locations around the.
【００２４】8 はコネクタで、合成樹脂により、固定部
材7 と一体成形して形成される。すなわち、コネクタ8
は、角筒状の着脱部8aが形成されるとともに、固定部材
7 が、図１に示すように、***7cを埋めて流れた成形樹
脂により内側に形成された成形支持部8bでもって外れな
いよう一体成形される。Reference numeral 8 denotes a connector, which is made of synthetic resin and integrally formed with the fixing member 7. I.e. connector 8
The rectangular tubular attaching / detaching portion 8a is formed, and the fixing member
As shown in FIG. 1, 7 is integrally molded by molding resin that fills the small hole 7c and flows so as not to come off by the molding support portion 8b formed inside.
【００２５】そして、固定部材7 が、筒状の固定部7aの
内方にシールド部材4 を収容して、固定部7aの端部7dを
ボディ1 にレーザー又は抵抗溶接により固定される。こ
のとき、シールド部材4 はコネクタ8 の成形支持部8bと
ボディ1 との間で挟持され、また端子ブロック5 及び防
水キャップ6 は固定部材7 の大穴7bに挿通されるととも
に、端子ブロック5 に設けた端子5aは防水キャップ6 に
より防水された状態でコネクタ8 の着脱部8aから導出さ
れる。The fixing member 7 accommodates the shield member 4 inside the cylindrical fixing portion 7a, and the end portion 7d of the fixing portion 7a is fixed to the body 1 by laser or resistance welding. At this time, the shield member 4 is sandwiched between the molded support portion 8b of the connector 8 and the body 1, and the terminal block 5 and the waterproof cap 6 are inserted into the large hole 7b of the fixing member 7 and provided on the terminal block 5. The terminal 5a is led out from the attaching / detaching portion 8a of the connector 8 while being waterproofed by the waterproof cap 6.
【００２６】上記した圧力センサは、コネクタ7 の着脱
部8aに、外部機器に接続された被着脱部を着脱自在に挿
着して使用され、圧力を測定する対象物が外部からボデ
ィ1の流入孔1dに流入すると、その圧力が歪みゲージで
ある圧力センサチップ2 に加わり、そのときの歪みで圧
力を検出するようになっており、その検出出力信号及び
外部機器から入力信号がコネクタ8 詳しくは端子5aを介
して伝送されるとともに、その伝送信号はシールド部材
4 により外部ノイズから守られる。The pressure sensor described above is used by detachably attaching the detachable portion connected to the external device to the detachable portion 8a of the connector 7, and the object whose pressure is to be measured flows into the body 1 from the outside. When flowing into the hole 1d, the pressure is applied to the pressure sensor chip 2 which is a strain gauge, and the pressure is detected by the strain at that time, and the detection output signal and the input signal from the external device are the connector 8 The signal is transmitted via the terminal 5a and the transmitted signal is shielded.
Protected from external noise by 4.
【００２７】かかる圧力センサにあっては、上記したよ
うに、コネクタ8 は、端子5aとの間は防水キャップ6 に
より、固定部材7 との間は一体成形によりそれぞれ防水
状態になっているとともに、その一体成形された固定部
材7 は固定部7aでもってボディ1 に溶接固定されて防水
状態になっているから、従来例の封止部材等の別部材を
用いることなく容易に防水性を確保できる。In this pressure sensor, as described above, the connector 8 is waterproofed by the waterproof cap 6 between the terminal 5a and the fixed member 7 by integral molding, and Since the integrally formed fixing member 7 is welded and fixed to the body 1 by the fixing portion 7a to be in a waterproof state, the waterproof property can be easily ensured without using a separate member such as the sealing member of the conventional example. .
【００２８】また、貫通コンデンサー4bを有したシール
ド部材4 は、筒状に形成された固定部材7 の固定部7aの
内方に収容されてボディ1 の凹所1aには収容されないか
ら、その凹所1aの奥行きは深くならず、従って、圧力セ
ンサチップ2 を凹所1aの最も奥に固定したり、その圧力
センサチップ2 をワイヤボンディングによりプリント基
板3 に接続する等の組立作業がやり易くなる。Further, the shield member 4 having the feedthrough capacitor 4b is housed inside the fixing portion 7a of the cylindrical fixing member 7 and is not housed in the recess 1a of the body 1, so that the recess The depth of the place 1a does not become deep, so that the assembly work such as fixing the pressure sensor chip 2 to the deepest part of the recess 1a or connecting the pressure sensor chip 2 to the printed circuit board 3 by wire bonding becomes easy. .
【００２９】また、シールド部材4 は、互いに係合する
凸部4a及び凹部1cからなる係合手段によりボディ1 に位
置決めして配設することができる。Further, the shield member 4 can be positioned and disposed in the body 1 by the engaging means composed of the convex portion 4a and the concave portion 1c which are engaged with each other.
【００３０】なお、上記係合手段は、シールド部材4 を
ボディ1 に敢えて位置決めする必要がない場合は、設け
なくてもよい。The engaging means may be omitted if it is not necessary to position the shield member 4 on the body 1.
【００３１】また、自動機等により、圧力センサチップ
2 やワイヤボンディング等の組立作業が容易に行えるよ
うな場合は、従来例と同様に、ボディ1 の凹所A1は比較
的背の高い円筒部により開口部分を形成され、その凹所
内にシールド部材4 を収容するようにしてもよい。Further, the pressure sensor chip is
If the assembly work such as 2 or wire bonding can be performed easily, the recess A 1 of the body 1 has an opening formed by a relatively tall cylindrical part, and the shield is placed in the recess as in the conventional example. The member 4 may be housed.
【００３２】[0032]
【発明の効果】請求項１記載のものは、コネクタは、固
定部材との間が一体成形により防水状態になっていると
ともに、その一体成形された固定部材は固定部でもって
ボディに溶接固定されて防水状態になっているから、従
来例の封止部材等の別部材を用いることなく容易に防水
性を確保できる。According to the first aspect of the present invention, the connector has a waterproof structure formed integrally with the fixing member, and the integrally formed fixing member is welded and fixed to the body by the fixing portion. Since it is in a waterproof state, it is possible to easily ensure waterproofness without using a separate member such as the sealing member of the conventional example.
【００３３】請求項２記載のものは、請求項１記載のも
のの効果に加えて、貫通コンデンサーを有したシールド
部材は、筒状に形成された固定部材の固定部の内方に収
容されてボディの凹所には収容されないから、その凹所
の奥行きは深くならず、従って、圧力センサチップを凹
所の奥に固定する等の組立作業がやり易くなる。According to a second aspect of the present invention, in addition to the effect of the first aspect, the shield member having the feedthrough capacitor is housed inside the fixing portion of the fixing member formed in a tubular shape. Since it is not housed in the recess, the depth of the recess does not become deep, and therefore, the assembling work such as fixing the pressure sensor chip to the back of the recess becomes easy.
【００３４】請求項３記載のものは、請求項２記載のも
のの効果に加えて、シールド部材は、係合手段によりボ
ディに位置決めして配設することができる。According to the third aspect, in addition to the effect of the second aspect, the shield member can be positioned and disposed on the body by the engaging means.
【図１】本発明の一実施例を示す断面図である。FIG. 1 is a sectional view showing an embodiment of the present invention.
【図２】同上の分解斜視図である。FIG. 2 is an exploded perspective view of the same.
【図３】同上の固定部材を示す斜視図である。FIG. 3 is a perspective view showing a fixing member of the above.
【図４】従来例を示す断面図である。FIG. 4 is a cross-sectional view showing a conventional example.
【図５】同上の分解斜視図である。FIG. 5 is an exploded perspective view of the above.
1 ボディ 1a 凹所 1c 係合手段 (詳しくは凹部) 2 圧力センサチップ 4 シールド部材 4a 係合手段 (詳しくは凸部) 4b 貫通コンデンサー 5a 端子 7 固定部材 7a 固定部 8 コネクタ 9 固定部材 1 Body 1a Recess 1c Engaging means (concave for details) 2 Pressure sensor chip 4 Shield member 4a Engaging means (convex for details) 4b Through capacitor 5a Terminal 7 Fixing member 7a Fixing part 8 Connector 9 Fixing member
Claims (3)
ディの凹所に装着される圧力センサチップと、圧力セン
サチップと外部機器との間の信号を入出力する端子を導
出した樹脂製のコネクタと、ボディに溶接固定される金
属製の固定部材と、を備えた圧力センサにおいて、 前記コネクタは、前記固定部材と一体成形して形成され
てなることを特徴とする圧力センサ。1. A resin body in which a metal body having a recess is formed, a pressure sensor chip mounted in the recess of the body, and a terminal for inputting and outputting a signal between the pressure sensor chip and an external device. A pressure sensor comprising a connector made of metal and a metal fixing member that is welded and fixed to a body, wherein the connector is formed integrally with the fixing member.
材の固定部が筒状に形成されるとともに、前記端子を貫
通してシールド接続する貫通コンデンサーを有したシー
ルド部材が、上記筒状の固定部の内方に収容されて前記
ボディに装着されてなることを特徴とする請求項１記載
の圧力センサ。2. A fixing member of the fixing member, which is welded and fixed to the body, is formed in a tubular shape, and a shield member having a through capacitor for penetrating and shield-connecting the terminal is fixed in the tubular shape. The pressure sensor according to claim 1, wherein the pressure sensor is housed inside the portion and mounted on the body.
いに係合する係合手段が設けられたことを特徴とする請
求項２記載の圧力センサ。3. The pressure sensor according to claim 2, wherein the shield member and the body are provided with engaging means for engaging with each other.
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP10132495A JP3440629B2 (en) | 1995-04-25 | 1995-04-25 | Pressure sensor |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP10132495A JP3440629B2 (en) | 1995-04-25 | 1995-04-25 | Pressure sensor |
Publications (2)
| Publication Number | Publication Date |
|---|---|
| JPH08292118A true JPH08292118A (en) | 1996-11-05 |
| JP3440629B2 JP3440629B2 (en) | 2003-08-25 |
Family
ID=14297647
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP10132495A Expired - Fee Related JP3440629B2 (en) | 1995-04-25 | 1995-04-25 | Pressure sensor |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JP3440629B2 (en) |
Cited By (10)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| EP0877240A2 (en) * | 1997-05-09 | 1998-11-11 | Fujikoki Corporation | Semiconductive pressure sensor |
| DE19751096C2 (en) * | 1996-11-20 | 2000-04-06 | Danfoss As | Improved housing for a transmitter, especially a pressure transmitter |
| US6105437A (en) * | 1997-10-10 | 2000-08-22 | Wika Alexander Wiegand Gmbh & Co. | Pressure transducer |
| JP2005049240A (en) * | 2003-07-29 | 2005-02-24 | Nec Schott Components Corp | Pressure sensor |
| JP2005531012A (en) * | 2002-06-22 | 2005-10-13 | ローベルト ボツシユ ゲゼルシヤフト ミツト ベシユレンクテル ハフツング | Equipment for pressure measurement |
| US7100455B2 (en) | 2004-08-27 | 2006-09-05 | Dresser-Nagano, Inc. | System and method for pressure measurement |
| US7252009B2 (en) | 2004-08-27 | 2007-08-07 | Ashcroft-Nagano, Inc. | System and method for pressure measurement |
| US7270010B2 (en) | 2004-08-27 | 2007-09-18 | Ashcroft-Nagano, Inc. | System and method for pressure measurement |
| JP2009114971A (en) * | 2007-11-06 | 2009-05-28 | Denso Corp | Fuel injection valve |
| CN106224134A (en) * | 2016-08-25 | 2016-12-14 | 宁波新思创机电科技股份有限公司 | A kind of integrated form control chamber and there is the electromagnetic valve of this control chamber |
Families Citing this family (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JP5720450B2 (en) * | 2011-07-12 | 2015-05-20 | 株式会社デンソー | Pressure sensor and pressure sensor mounting structure |
-
1995
- 1995-04-25 JP JP10132495A patent/JP3440629B2/en not_active Expired - Fee Related
Cited By (11)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| DE19751096C2 (en) * | 1996-11-20 | 2000-04-06 | Danfoss As | Improved housing for a transmitter, especially a pressure transmitter |
| EP0877240A2 (en) * | 1997-05-09 | 1998-11-11 | Fujikoki Corporation | Semiconductive pressure sensor |
| EP0877240A3 (en) * | 1997-05-09 | 1999-06-16 | Fujikoki Corporation | Semiconductive pressure sensor |
| US6105437A (en) * | 1997-10-10 | 2000-08-22 | Wika Alexander Wiegand Gmbh & Co. | Pressure transducer |
| JP2005531012A (en) * | 2002-06-22 | 2005-10-13 | ローベルト ボツシユ ゲゼルシヤフト ミツト ベシユレンクテル ハフツング | Equipment for pressure measurement |
| JP2005049240A (en) * | 2003-07-29 | 2005-02-24 | Nec Schott Components Corp | Pressure sensor |
| US7100455B2 (en) | 2004-08-27 | 2006-09-05 | Dresser-Nagano, Inc. | System and method for pressure measurement |
| US7252009B2 (en) | 2004-08-27 | 2007-08-07 | Ashcroft-Nagano, Inc. | System and method for pressure measurement |
| US7270010B2 (en) | 2004-08-27 | 2007-09-18 | Ashcroft-Nagano, Inc. | System and method for pressure measurement |
| JP2009114971A (en) * | 2007-11-06 | 2009-05-28 | Denso Corp | Fuel injection valve |
| CN106224134A (en) * | 2016-08-25 | 2016-12-14 | 宁波新思创机电科技股份有限公司 | A kind of integrated form control chamber and there is the electromagnetic valve of this control chamber |
Also Published As
| Publication number | Publication date |
|---|---|
| JP3440629B2 (en) | 2003-08-25 |
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