JPH08283971A - Aqueous cleaning device - Google Patents
Aqueous cleaning deviceInfo
- Publication number
- JPH08283971A JPH08283971A JP7109099A JP10909995A JPH08283971A JP H08283971 A JPH08283971 A JP H08283971A JP 7109099 A JP7109099 A JP 7109099A JP 10909995 A JP10909995 A JP 10909995A JP H08283971 A JPH08283971 A JP H08283971A
- Authority
- JP
- Japan
- Prior art keywords
- tank
- cleaning
- oil
- rinsing
- liquid
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Pending
Links
Landscapes
- Cleaning By Liquid Or Steam (AREA)
- Cleaning And De-Greasing Of Metallic Materials By Chemical Methods (AREA)
Abstract
Description
【０００１】[0001]
【産業上の利用分野】本発明は水系洗浄装置に関する。BACKGROUND OF THE INVENTION 1. Field of the Invention The present invention relates to an aqueous cleaning device.
【０００２】[0002]
【従来の技術】水系洗浄装置では洗浄槽、すすぎ槽、乾
燥装置へとワークを順次移して洗浄、すすぎ、乾燥の各
工程を行なうが、従来では１つの洗浄槽、１つのすすぎ
槽でそれぞれ洗浄、すすぎを行なっていた。2. Description of the Related Art In a water-based cleaning device, a work is sequentially transferred to a cleaning tank, a rinsing tank, and a drying device to perform cleaning, rinsing, and drying steps. Conventionally, one cleaning tank and one rinsing tank are used for cleaning. I was rinsing.
【０００３】[0003]
【発明が解決しようとする課題】しかしながら、従来の
水系洗浄装置ではこのように１つの洗浄槽、１つのすす
ぎ槽で洗浄工程、すすぎ工程を行なっているため、洗浄
装置内の洗浄液、すすぎ槽内のすすぎ液がすぐに汚れ
て、液寿命が短くなり、またその汚れがワーク引上げ時
に再付着し、乾燥後も汚れとして残るという問題があっ
た。本発明はこのような問題を解決した水系洗浄装置を
提供することを目的としている。However, in the conventional water-based cleaning apparatus, since the cleaning step and the rinsing step are performed in one cleaning tank and one rinsing tank in this way, the cleaning liquid in the cleaning apparatus and the rinsing tank There is a problem that the rinsing liquid becomes dirty immediately and the life of the liquid becomes short, and the dirt reattaches when the work is pulled up, and remains as dirt even after drying. An object of the present invention is to provide a water-based cleaning device that solves such problems.
【０００４】[0004]
【課題を解決するための手段】前記問題を解決するため
に、本発明の水系洗浄装置では、ワークを洗浄液内で洗
浄してワークに付着した油分を浮上分離させる洗浄槽の
他に、前記洗浄槽からオーバーフローする洗浄液及び油
分を受入れ、仕切りによって洗浄液と油分混在洗浄液を
分離してそれぞれオーバーフローさせる油分オーバーフ
ロー槽と、前記油分オーバーフロー槽からさらに仕切り
によってオーバーフローした洗浄液を受入れる水位槽
と、前記水位槽内の洗浄液をフィルターで浄化して前記
洗浄槽へ戻す循環装置とを設けたことを特徴としてい
る。In order to solve the above problems, in the water-based cleaning apparatus of the present invention, in addition to the cleaning tank for cleaning the work in the cleaning liquid to float and separate the oil adhering to the work, the cleaning An oil overflow tank that receives the cleaning liquid and oil that overflow from the tank, separates the cleaning liquid and the oil-containing cleaning liquid by a partition, and overflows each, a water level tank that receives the cleaning liquid that overflows from the oil overflow tank by a partition, and the water level tank And a circulation device for purifying the cleaning liquid of (1) with a filter and returning it to the cleaning tank.
【０００５】また、前記油分オーバーフロー槽にオーバ
ーフローした油分混在洗浄液を受入れて油水分離フィル
ターで分離浄化して前記洗浄槽へ戻す循環用油水分離装
置を設けたことを特徴としている。Further, the present invention is characterized in that a circulating oil / water separator is provided which receives the oil-containing mixed cleaning liquid overflowing in the oil overflow tank, separates and purifies it by an oil / water separation filter and returns it to the cleaning tank.
【０００６】また、複数段の水位の異なるすすぎ槽を設
けて上位のすすぎ槽内のすすぎ液のオーバーフローを順
次下位のすすぎ槽で受入れ、最下位の下位すすぎ槽内の
すすぎ液を前記上位すすぎ槽へ再生装置で浄化しつつ循
環させ、ワークを最下位の下位すすぎ槽から上位すすぎ
槽へと移送する移送装置とを備えたことを特徴としてい
る。Further, a plurality of rinsing tanks having different water levels are provided, and overflows of the rinsing liquid in the upper rinsing tank are sequentially received by the lower rinsing tank, and the rinsing liquid in the lowermost rinsing tank is said upper rinsing tank. And a transfer device for circulating the work while purifying it with a reclaiming device and transferring the work from the lowermost lower rinse tank to the upper rinse tank.
【０００７】また、すすぎ液を噴射装置によって霧状に
吹き付けて、洗浄槽から引き上げたワークに付着した洗
浄液を洗い流して洗浄槽に戻して、洗浄槽内の洗浄液の
減少分を補給するようにしたことを特徴としている。Further, the rinsing liquid is sprayed in an atomized form by a spraying device to wash away the cleaning liquid adhering to the workpiece pulled out from the cleaning tank and return it to the cleaning tank to replenish the reduced amount of the cleaning liquid in the cleaning tank. It is characterized by that.
【０００８】[0008]
【作用】このように本発明の水系洗浄装置では、ワーク
を洗浄液内で洗浄してワークに付着した油分を浮上分離
させる洗浄槽の他に、前記洗浄槽からオーバーフローす
る洗浄液及び油分を受入れ、仕切りによって洗浄液と油
分を分離してそれぞれオーバーフローさせる油分オーバ
ーフロー槽と、前記油分オーバーフロー槽からオーバー
フローした洗浄液を受入れる水位槽と、前記水位槽内の
洗浄液をフィルターで浄化して前記洗浄槽へ戻す循環装
置とを設けたため、洗浄槽から洗浄液とワークを洗浄し
た際に浮上分離した油分とが油分オーバーフロー槽で受
入れられ、この油分オーバーフロー槽から油分がオーバ
ーフローして除去され、さらにオーバーフロー槽から洗
浄液が水位槽に受入れられ、この水位槽内の洗浄液がフ
ィルターで浄化されつつ洗浄槽へ戻されて、常に上位か
ら下位へとオーバーフローして洗浄液から油分が除去さ
れつつ循環するので、洗浄液の液寿命が長くなり、ワー
クの洗浄性が向上する。As described above, in the water-based cleaning apparatus of the present invention, in addition to the cleaning tank for cleaning the work in the cleaning liquid to float and separate the oil component adhering to the work, the cleaning liquid and the oil component overflowing from the cleaning tank are received and partitioned. An oil overflow tank that separates and separates the cleaning liquid and oil from each other, a water level tank that receives the cleaning liquid that overflows from the oil overflow tank, and a circulation device that cleans the cleaning liquid in the water level tank with a filter and returns it to the cleaning tank. Since the cleaning liquid is provided from the cleaning tank, the oil that floats and separates when the workpiece is cleaned is received by the oil overflow tank, the oil is overflowed and removed from the oil overflow tank, and the cleaning liquid is further transferred from the overflow tank to the water level tank. After being received, the cleaning liquid in this water tank is purified by a filter. While being returned to the cleaning tank, is always oil from the cleaning solution to overflow from the upper to the lower circulates while being removed, the cleaning liquid of the liquid life is prolonged, thereby improving the cleaning of the workpiece.
【０００９】また、油分オーバーフロー槽にオーバーフ
ローされた油分混在洗浄液を受入れて油水分離装置の油
水分離フィルターで油分を分離除去して分離浄化した洗
浄液が洗浄槽に戻され循環するため、洗浄液の液寿命が
一層長くなり、ワークの洗浄性が一層向上する。Further, since the cleaning liquid which has overflowed into the oil overflow tank and receives the oil-containing mixed cleaning liquid is separated and separated and purified by the oil-water separation filter of the oil-water separator, the cleaning liquid is returned to the cleaning tank and circulated, so that the cleaning liquid has a liquid life. Becomes even longer, and the workability of the work is further improved.
【００１０】また、複数段の水位の異なるすすぎ槽を設
けて上位のすすぎ槽内のすすぎ液のオーバーフローを順
次下位のすすぎ槽で受入れ、最下位の下位すすぎ槽内の
すすぎ液を前記上位すすぎ槽へ再生装置で浄化しつつ循
環させ、ワークを最下位の下位すすぎ槽から上位すすぎ
槽へと移送する移送装置とを備えたため、すすぎ液が上
記のすすぎ液から下位のすすぎ槽へと常に再生装置で浄
化しつつ循環するので、すすぎ液の液寿命が長くなり、
ワークの洗浄性が向上する。Further, a plurality of stages of rinsing tanks having different water levels are provided, and overflows of the rinsing liquid in the upper rinsing tank are sequentially received by the lower rinsing tank, and the rinsing liquid in the lowermost rinsing tank is said upper rinsing tank. Since it is equipped with a transfer device that circulates while purifying with a regenerator and transfers the work from the lowermost lower rinsing tank to the upper rinsing tank, the rinsing liquid is always regenerated from the above rinsing liquid to the lower rinsing tank. Because it circulates while purifying with, the life of the rinse liquid is extended,
Workability is improved.
【００１１】また、すすぎ液を噴射装置によって霧状に
吹き付けて、洗浄槽から引き上げたワークに付着した洗
浄液を洗い流して洗浄槽に戻して、洗浄槽内の洗浄液の
減少分を補給するようにしているため、洗浄液の減少分
が自動的に補給される。Further, the rinsing liquid is sprayed in an atomized form by a spraying device to wash away the cleaning liquid adhering to the workpiece pulled out from the cleaning tank and return it to the cleaning tank to replenish the depleted portion of the cleaning liquid in the cleaning tank. Therefore, the reduced amount of cleaning liquid is automatically replenished.
【００１２】[0012]
【実施例】以下、図面に基づいて本発明の実施例を説明
する。図１は本発明の水系洗浄装置の一実施例を示して
いる。洗浄槽１は内部に揺動を含む外圧を発生させる装
置例えば超音波発振装置２が設けられ、またヒーター３
が設けられていて、水に洗剤が溶解された洗浄液内でワ
ークＷを超音波発振装置２による外圧で洗浄するための
ものである。Embodiments of the present invention will be described below with reference to the drawings. FIG. 1 shows an embodiment of the water-based cleaning apparatus of the present invention. The cleaning tank 1 is internally provided with a device for generating an external pressure including rocking, for example, an ultrasonic oscillator 2, and a heater 3
Is provided for cleaning the work W by the external pressure of the ultrasonic oscillator 2 in the cleaning liquid in which the detergent is dissolved in water.
【００１３】洗浄槽には導電率計４が設けられていて、
この導電率計４で検知される導電率値に基づいて洗剤供
給装置５及び水供給装置（図示せず）からの洗剤及び水
の注入量が制御されて洗浄液の濃度が設定した濃度に維
持される。また、洗浄槽１には温度計７が設けられてい
て検知された温度に基づいてヒーター３がＯＮ・ＯＦＦ
制御されて、洗浄槽１内の洗浄液の温度が設定した一定
温度に維持される。The cleaning tank is provided with a conductivity meter 4,
Based on the conductivity value detected by the conductivity meter 4, the detergent and water injection amounts from the detergent supply device 5 and the water supply device (not shown) are controlled to maintain the concentration of the cleaning liquid at the set concentration. It Further, the cleaning tank 1 is provided with a thermometer 7, and the heater 3 is turned on / off based on the detected temperature.
The temperature of the cleaning liquid in the cleaning tank 1 is controlled and maintained at the set constant temperature.
【００１４】洗剤供給装置５からは弱アルカリ性の分離
型洗剤が供給され、この洗浄液内でワーク（特に金属加
工品）Ｗに付着した油分が超音波発振装置２による外圧
で剥がれて分離し液面に浮上する。A weak alkaline separation type detergent is supplied from the detergent supply device 5, and the oil content adhering to the work (particularly metal processed product) W in the cleaning liquid is peeled off and separated by the external pressure by the ultrasonic oscillator 2 to separate the liquid surface. To surface.
【００１５】洗浄槽１に隣接して洗浄槽１内の洗浄液及
び分離した油分を受入れる油分オーバーフロー槽８が設
けられている。この油分オーバーフロー槽８には液面の
上部にある油分とその下の洗浄液とを分離するための仕
切り９ａ〜９ｃが設けられている。即ち、仕切り９ａが
油分オーバーフロー槽８の中央の上方から所定深さまで
設けられ、仕切り９ｂが水位槽１０との境界壁１１との
間に通路を構成するように温度計７の上方から温度計７
の底部近傍まで達するように設けられ、仕切り９ａ、９
ｂの間で、仕切り９ｂが温度計７の底部から所定高さま
で設けられている。このため、洗浄槽１と油分オーバー
フロー槽８との境界壁１２の上端を越えてオーバーフロ
ーした洗浄液と油分は仕切り９ａと境界壁１２との間に
流入し、軽い油分が浮上して仕切り９ａと境界壁１２の
間に溜まり、その側方（図１の紙面に垂直な方向）から
油分混在洗浄液がオーバーフローし、洗浄液は仕切り９
ａの下端から仕切り９ｂの下端を通って仕切り９ｂと境
界壁１１との間を上昇して境界壁１１の上端を越えてオ
ーバーフローして水位槽１０へ流入する。An oil overflow tank 8 for receiving the cleaning liquid and the separated oil in the cleaning tank 1 is provided adjacent to the cleaning tank 1. The oil overflow tank 8 is provided with partitions 9a to 9c for separating the oil above the liquid surface and the cleaning liquid thereunder. That is, the partition 9a is provided from above the center of the oil content overflow tank 8 to a predetermined depth, and the partition 9b forms a passage between the water level tank 10 and the boundary wall 11 from above the thermometer 7 to the thermometer 7
The partition 9a, 9 is provided so as to reach near the bottom of the
Between b, the partition 9b is provided from the bottom of the thermometer 7 to a predetermined height. Therefore, the cleaning liquid and the oil component overflowing beyond the upper end of the boundary wall 12 between the cleaning tank 1 and the oil overflow tank 8 flow into between the partition 9a and the boundary wall 12, and a light oil component floats to the boundary 9a. It collects between the walls 12, and the oil-containing cleaning liquid overflows from the side (the direction perpendicular to the paper surface of FIG. 1), and the cleaning liquid is separated by the partition 9
From the lower end of a through the lower end of the partition 9b, it rises between the partition 9b and the boundary wall 11, overflows beyond the upper end of the boundary wall 11, and flows into the water level tank 10.
【００１６】油分オーバーフロー槽８にオーバーフロー
して循環用油水分離装置１３に受入れられた油分混在液
は、油水分離フィルタで油水分離されて油分が除去さ
れ、分離浄化された洗浄液が洗浄槽１へ戻され循環され
る。水位槽１０内の洗浄液は、ポンプ１４による循環装
置で洗浄槽１へ循環される。The oil-mixed liquid overflowing into the oil overflow tank 8 and received by the circulating oil-water separator 13 is separated into oil and water by an oil-water separation filter to remove oil, and the separated and purified cleaning liquid is returned to the cleaning tank 1. Is circulated. The cleaning liquid in the water level tank 10 is circulated to the cleaning tank 1 by a circulation device using the pump 14.
【００１７】従って、洗浄液は洗浄槽１→油分オーバー
フロー槽８→水位槽１０→洗浄槽１の順及び洗浄槽１→
油分オーバーフロー槽８→循環用油水分離装置１３→洗
浄槽１の順で常に循環されていて、洗浄槽１でワークを
洗浄するときに発生した油分は常に除去されるため、洗
浄液の寿命を長く延ばすことができ、ワークの洗浄性を
向上させることができる。Therefore, the cleaning liquid is in the order of cleaning tank 1 → oil overflow tank 8 → water level tank 10 → cleaning tank 1 and cleaning tank 1 →
The oil overflow tank 8 is circulated in the order of the oil / water separator 13 for circulation and the cleaning tank 1, and the oil content generated when cleaning the workpiece in the cleaning tank 1 is always removed, so that the life of the cleaning liquid is prolonged. It is possible to improve the cleaning property of the work.
【００１８】また、ポンプ１４による循環装置の経路に
フィルター１５を設けて洗浄液の汚れを除去することに
よって、洗浄液の寿命を一層長く延ばすことができる。
なお、このように洗浄液の循環において蒸発などによっ
て水分が失われるので、水供給装置（図示せず）からそ
の分を補給する。Further, the life of the cleaning liquid can be further extended by providing the filter 15 in the passage of the circulation device by the pump 14 to remove the dirt of the cleaning liquid.
Since water is lost due to evaporation or the like in the circulation of the cleaning liquid in this way, the water is replenished from a water supply device (not shown).
【００１９】なお、この水分補給は、ワークＷを洗浄後
に後述する移送装置５０でワークＷを引き上げて洗浄槽
１の洗浄液の液面の上方で停止させ、噴射装置１７でワ
ークＷに補給分に見合うだけの水を霧状に吹きつけるこ
とによって行なってもよい。なお、この噴射装置１７に
用いる水は、後述するすすぎ槽２０から供給してもよ
い。このようにワークＷに霧状に吹きつけた水はワーク
Ｗに付着した洗浄液を洗い流すと共に、洗浄槽１に落下
する。For the water supply, after the work W is cleaned, the work W is pulled up by the transfer device 50 described later and stopped above the surface of the cleaning liquid in the cleaning tank 1, and the work W is replenished to the work W by the injection device 17. It may be performed by spraying water in an appropriate amount. The water used for the spraying device 17 may be supplied from the rinse tank 20 described later. The water sprayed on the work W in this way flushes the cleaning liquid adhering to the work W and drops into the cleaning tank 1.
【００２０】洗浄槽１の側方には順番に第一、第二、第
三すすぎ槽２０、２１、２２が互いに隣接して設けら
れ、第一、第二すすぎ槽２０、２１間の境界壁２３は、
第二、第三すすぎ槽２１、２２間の境界壁２４より低く
なっている。このため、上位の第三すすぎ槽２２内のす
すぎ液はオーバーフローすると、第二すすぎ槽２１に受
入れられ、第二すすぎ槽２１内のすすぎ液はオーバーフ
ローすると最下位の第一すすぎ槽２０に受入れられる。
最下位の第一すすぎ槽２０内のすすぎ液はポンプ２５に
よる循環装置で最上位の第三すすぎ槽２２に循環され
る。このため、すすぎ液は第三すすぎ槽２２→第二すす
ぎ槽２１→第一すすぎ槽２０→第三すすぎ槽２２のよう
に常に循環されており、そして、ポンプ２５による循環
装置の経路にリンス再生装置２６が設けられていて、す
すぎ液を浄化することによって、一層すすぎ液の寿命を
長く延ばすことができ、ワークの洗浄性を向上させるこ
とができる。First, second and third rinse tanks 20, 21 and 22 are provided adjacent to each other in order on the side of the cleaning tank 1, and a boundary wall between the first and second rinse tanks 20 and 21 is provided. 23 is
It is lower than the boundary wall 24 between the second and third rinse tanks 21 and 22. Therefore, when the rinse solution in the upper third rinse tank 22 overflows, it is received in the second rinse tank 21, and when the rinse solution in the second rinse tank 21 overflows, it is received in the lowest first rinse tank 20. .
The rinsing liquid in the lowermost first rinsing tank 20 is circulated to the uppermost third rinsing tank 22 by the circulation device by the pump 25. Therefore, the rinse liquid is constantly circulated in the order of the third rinse tank 22 → the second rinse tank 21 → the first rinse tank 20 → the third rinse tank 22, and the rinse regeneration is performed in the path of the circulation device by the pump 25. By providing the device 26 and purifying the rinsing liquid, the life of the rinsing liquid can be further extended and the workability of the work can be improved.
【００２１】第一すすぎ槽２０に、あるいは第二、第三
すすぎ槽２１、２２にも揺動を含む外圧を発生させる装
置、例えば超音波発振装置２７が設けることができる。
また、第一すすぎ槽２０にはヒーター２８及び温度計２
９が設けられていて、温度計２９で検知された温度に基
づいてヒーター２８がＯＮ・ＯＦＦ制御されて、第一す
すぎ槽２０内のすすぎ液の温度が設定した一定温度に維
持される。The first rinsing tank 20 or the second and third rinsing tanks 21 and 22 may be provided with a device for generating an external pressure including rocking, for example, an ultrasonic oscillating device 27.
Further, the first rinsing tank 20 has a heater 28 and a thermometer 2
9 is provided, the heater 28 is ON / OFF controlled based on the temperature detected by the thermometer 29, and the temperature of the rinse liquid in the first rinse tank 20 is maintained at the set constant temperature.
【００２２】また、第三すすぎ槽２２はヒーター３０及
び温度計３１が設けられていて、温度計３１で検知され
た温度に基づいてヒーター３０がＯＮ・ＯＦＦ制御され
て、第三すすぎ槽２２内のすすぎ液の温度が設定した一
定温度に維持される。Further, the third rinse tank 22 is provided with a heater 30 and a thermometer 31, and the heater 30 is ON / OFF controlled based on the temperature detected by the thermometer 31, so that the inside of the third rinse tank 22 is controlled. The rinsing liquid temperature is maintained at the set constant temperature.
【００２３】ワークは移送装置５０によって第一すすぎ
槽２０、第二すすぎ槽２１、第三すすぎ槽２２に順次移
送されて浸漬される。なお、すすぎ液の循環において蒸
発などによって、あるいは噴射装置１７に供給すること
によって水分が失われるので、リンス再生装置２６にそ
の分だけ水供給装置３２によって市水を自動的に補給す
る。なお、すすぎ槽は複数段であれば２段でも４段以上
でもよく、超音波発振装置を複数のすすぎ槽に設けても
よい。The work is sequentially transferred by the transfer device 50 to the first rinse tank 20, the second rinse tank 21, and the third rinse tank 22 and immersed therein. In addition, since water is lost by evaporation or the like in the circulation of the rinse liquid or by being supplied to the spraying device 17, the rinse regenerating device 26 is automatically replenished with city water by the water supply device 32. It should be noted that the rinsing tank may have two stages or four or more stages as long as it has a plurality of stages, and the ultrasonic oscillator may be provided in a plurality of rinsing baths.
【００２４】第三すすぎ槽２２の側方には、上部に開閉
蓋４０を備えた真空乾燥槽４１が設けられていて、減圧
ポンプ４２によって真空乾燥槽４１内を減圧することが
できる。また、真空乾燥槽４１の内部には加熱ヒーター
４３が設けられ、この熱をワークに与えるために、真空
にならない状態での真空乾燥槽４１内の空気を攪拌する
ためのファン４４が設けられている。４５はファンモー
ターである。A vacuum drying tank 41 having an opening / closing lid 40 on the upper portion is provided beside the third rinsing tank 22, and the inside of the vacuum drying tank 41 can be decompressed by the decompression pump 42. Further, a heater 43 is provided inside the vacuum drying tank 41, and a fan 44 is provided to agitate the air in the vacuum drying tank 41 in a non-vacuum state in order to apply this heat to the work. There is. 45 is a fan motor.
【００２５】これらの洗浄槽１、第一すすぎ槽２０、第
二すすぎ槽２１、第三すすぎ槽２２、真空乾燥槽４１の
上部には、ワークＷを懸吊して洗浄槽１の上部へ移送
し、次に洗浄槽１内の洗浄液に浸漬し、予め定めた時間
後上昇させて第一すすぎ槽２０の上部へ移送し、このよ
うにして順次第一すすぎ槽２０、第二すすぎ槽２１、第
三すすぎ槽２２内のすすぎ液にそれぞれ予め定めた時間
浸漬し、次に真空乾燥槽４１内に予め定めた時間入れた
後、運び出す移送装置５０が設けられている。A work W is suspended above the cleaning tank 1, the first rinsing tank 20, the second rinsing tank 21, the third rinsing tank 22, and the vacuum drying tank 41 and transferred to the upper part of the cleaning tank 1. Then, it is immersed in the cleaning liquid in the cleaning tank 1, raised after a predetermined time and transferred to the upper part of the first rinse tank 20, and in this way, the first rinse tank 20, the second rinse tank 21, A transfer device 50 is provided, which is immersed in the rinsing liquid in the third rinsing tank 22 for a predetermined time, then put in the vacuum drying tank 41 for a predetermined time, and then carried out.
【００２６】真空乾燥槽４１ではワークＷを入れた後、
開閉蓋４０を閉じ、加熱ヒーター４３の余熱をファン４
４で真空乾燥槽４１内の空気を攪拌してワークＷに熱を
与えた後、減圧ポンプ４２で減圧して乾燥させ、次に常
気圧に戻して開閉蓋４０を開いてワークを移送装置５０
で運び出す。このようにワークに熱を与えるのは、減圧
すると沸点が上がりワークに付着した水分が気化してこ
の気化熱で熱が奪われてワークが凍結するので、これを
防ぐためである。この真空乾燥装置によって低温で短時
間で乾燥させることができる。After the work W is put in the vacuum drying tank 41,
The open / close lid 40 is closed, and the residual heat of the heater 43 is removed by the fan 4
In step 4, the air in the vacuum drying tank 41 is agitated to heat the work W, and then the work W is decompressed and dried, and then the atmospheric pressure is restored to open and close the opening / closing lid 40 to transfer the work 50.
To carry out. The heat is applied to the work in this way because the boiling point rises when the pressure is reduced and the moisture adhering to the work is vaporized, and the heat is taken away by the heat of vaporization and the work freezes. With this vacuum dryer, it is possible to dry at a low temperature in a short time.
【００２７】例えば洗浄するワークＷが金属製精密加工
部品の場合、洗浄槽１内の弱アルカリ性の分離型洗剤を
溶解させた洗浄液の温度を５０°Ｃにし、５分間ワーク
を浸漬して超音波洗浄を行ない、次に第一すすぎ槽２０
内のすすぎ液の温度を３５°Ｃにして５分間ワークを浸
漬して超音波すすぎを行ない、次にワークを第二すすぎ
槽２１内のすすぎ液に２分間浸漬してすすぎ、次に第三
すすぎ槽２２のすすぎ液の温度を３５°Ｃにして２分間
ワークを浸漬してすすぎ、次に開閉蓋４０を開いて真空
乾燥槽４１内にワークをいれて開閉蓋４０を閉じ、加熱
ヒーター４３で熱して真空乾燥槽４１内の温度を８５°
Ｃにし、ファン４４を２分間作動させて真空乾燥槽４１
内の空気を攪拌してワークに熱を与え、次に減圧ポンプ
４２を５分間作動させて真空にしてワークを乾燥させ、
次に常気圧に戻して開閉蓋４０を開いてワークを運び出
す。For example, when the work W to be cleaned is a metal precision-machined part, the temperature of the cleaning solution in the cleaning tank 1 in which the weakly alkaline separation type detergent is dissolved is set to 50 ° C., the work is immersed for 5 minutes, and ultrasonic waves are applied. Wash, then first rinse tank 20
The temperature of the rinsing liquid therein is set to 35 ° C. and the work is immersed for 5 minutes for ultrasonic rinsing, and then the work is immersed in the rinsing liquid in the second rinsing tank 21 for 2 minutes for rinsing, and then the third rinse. The work is immersed in the rinsing liquid in the rinsing tank 22 at a temperature of 35 ° C. for 2 minutes for rinsing, and then the opening / closing lid 40 is opened to put the work in the vacuum drying tank 41 and the opening / closing lid 40 is closed. To heat the temperature in the vacuum drying tank 41 to 85 °
C, operate the fan 44 for 2 minutes, and vacuum dry tank 41
The air inside is agitated to heat the work, and then the vacuum pump 42 is operated for 5 minutes to apply a vacuum to dry the work,
Next, the pressure is returned to atmospheric pressure, the opening / closing lid 40 is opened, and the work is carried out.
【００２８】[0028]
【発明の効果】以上説明したように、本発明の水系洗浄
装置では、ワークを洗浄液内で洗浄してワークに付着し
た油分を浮上分離させる洗浄槽の他に、前記洗浄槽から
オーバーフローする洗浄液及び油分を受入れ、仕切りに
よって洗浄液と油分を分離してそれぞれオーバーフロー
させる油分オーバーフロー槽と、前記油分オーバーフロ
ー槽からオーバーフローした洗浄液を受入れる水位槽
と、前記水位槽内の洗浄液をフィルターで浄化して前記
洗浄槽へ戻す循環装置とを設けたため、洗浄槽から洗浄
液とワークを洗浄した際に分離した油分とがオーバーフ
ロー槽で受入れられ、このオーバーフロー槽から油分が
オーバーフローして除去され、さらにオーバーフロー槽
から洗浄液が水位槽に受入れられ、この水位槽内の洗浄
液がフィルターで浄化されつつ洗浄槽へ戻されて、常に
上位から下位へとオーバーフローして洗浄液から油分が
除去されつつ循環するので、洗浄液の液寿命が長くな
り、ワークの洗浄性が向上する。As described above, in the water-based cleaning apparatus of the present invention, in addition to the cleaning tank for cleaning the work in the cleaning liquid to float and separate the oil adhering to the work, the cleaning liquid overflowing from the cleaning tank and An oil overflow tank that receives the oil and separates the cleaning fluid and the oil by the partition and overflows each, a water level tank that receives the cleaning fluid that overflows from the oil overflow tank, and the cleaning tank that cleans the cleaning fluid in the water level tank with a filter Since a circulation device for returning to the back is installed, the cleaning liquid from the cleaning tank and the oil content separated when cleaning the workpiece are received in the overflow tank, the oil content is overflowed and removed from this overflow tank, and the cleaning liquid from the overflow tank reaches the water level. The cleaning liquid in the water tank is received by the tank and is cleaned by a filter. It returned to by while cleaning tank, always because oil from the cleaning solution to overflow from the upper to the lower circulates while being removed, the cleaning liquid of the liquid life is prolonged, thereby improving the cleaning of the workpiece.
【００２９】また、油水分離装置によって油分オーバー
フロー槽にオーバーフローされた油分混在洗浄液を受入
れて油水分離装置の油水分離フィルターで油分が除去さ
れ、分離浄化された洗浄液を洗浄槽に戻して循環するの
で、一層洗浄液の寿命が長くなり、ワークの洗浄性が一
層向上する。Further, since the oil-mixed cleaning liquid overflowed to the oil overflow tank by the oil-water separator is received, the oil is removed by the oil-water separation filter of the oil-water separator, and the separated and purified cleaning liquid is returned to the cleaning tank for circulation. The life of the cleaning liquid is further extended and the workability of the work is further improved.
【００３０】また、複数段の水位の異なるすすぎ槽を設
けて上位のすすぎ槽内のすすぎ液のオーバーフローを順
次下位のすすぎ槽で受入れ、最下位の下位すすぎ槽内の
すすぎ液を前記上位すすぎ槽へ再生装置で浄化しつつ循
環させ、ワークを最下位の下位すすぎ槽から上位すすぎ
槽へと移送する移送装置とを備えたため、すすぎ液が上
記のすすぎ液から下位のすすぎ槽へと常に再生装置で浄
化しつつ循環するので、すすぎ液の液寿命が長くなり、
ワークの洗浄性が向上する。Further, a plurality of rinsing tanks having different water levels are provided, and overflows of the rinsing liquid in the upper rinsing tank are sequentially received by the lower rinsing tank, and the rinsing liquid in the lowermost rinsing tank is said upper rinsing tank. Since it is equipped with a transfer device that circulates while purifying with a regenerator and transfers the work from the lowermost lower rinsing tank to the upper rinsing tank, the rinsing liquid is always regenerated from the above rinsing liquid to the lower rinsing tank. Because it circulates while purifying with, the life of the rinse liquid is extended,
Workability is improved.
【００３１】また、すすぎ液を噴射装置によって霧状に
吹き付けて、洗浄槽から引き上げたワークに付着した洗
浄液を洗い流して洗浄槽に戻して、洗浄槽内の洗浄液の
減少分を補給するようにしているため、洗浄液の減少分
が自動的に補給され、長期にわたって洗浄液を新たに供
給する必要がない。Further, the rinsing liquid is sprayed in a mist form by the spraying device, the cleaning liquid adhering to the workpiece pulled out from the cleaning tank is washed away and returned to the cleaning tank to replenish the reduced amount of the cleaning liquid in the cleaning tank. Therefore, the reduced amount of the cleaning liquid is automatically replenished, and it is not necessary to newly supply the cleaning liquid for a long time.
【図１】本発明の一実施例を示す概略構成図FIG. 1 is a schematic configuration diagram showing an embodiment of the present invention.
１ 洗浄槽 ２ 超音波発振装置 ８ 油分オーバーフロー槽 ９ａ、９ｂ、９ｃ 仕切り １０ 水位槽 １３ 循環用油水分離装置 １４ ポンプ １５ フィルター １７ 噴射装置 ２０ 第一すすぎ槽 ２１ 第二すすぎ槽 ２２ 第三すすぎ槽 ２５ ポンプ ２６ リンス再生装置 ２７ 超音波発振装置 ４０ 開閉蓋 ４１ 真空乾燥槽 ４２ 減圧ポンプ ４３ 加熱ヒーター ４４ ファン ５０ 移送装置 1 Cleaning Tank 2 Ultrasonic Oscillator 8 Oil Overflow Tank 9a, 9b, 9c Partition 10 Water Level Tank 13 Circulating Oil Water Separator 14 Pump 15 Filter 17 Injection Device 20 First Rinse Tank 21 Second Rinse Tank 22 Third Rinse Tank 25 Pump 26 Rinse regeneration device 27 Ultrasonic oscillator 40 Opening / closing lid 41 Vacuum drying tank 42 Decompression pump 43 Heating heater 44 Fan 50 Transfer device
Claims (5)
浄液内で洗浄してワークに付着した油分を浮上分離させ
る洗浄槽と、 前記洗浄槽からオーバーフローする洗浄液及び油分を受
入れ、仕切りによって洗浄液と油分混在洗浄液を分離し
てそれぞれオーバーフローさせる油分オーバーフロー槽
と、 前記油分オーバーフロー槽から、さらに仕切りによって
オーバーフローした洗浄液を受入れる水位槽と、 前記水位槽内の洗浄液をフィルターで浄化して前記洗浄
槽へ戻す循環装置とを備えた水系洗浄装置。1. A cleaning tank equipped with an external pressure generator including rocking, for cleaning a work in a cleaning liquid to float and separate the oil component adhering to the work, and a cleaning liquid which receives the cleaning liquid and the oil component overflowing from the cleaning tank and is partitioned by a partition. And an oil overflow tank for separating and overflowing the oil-mixed cleaning solution, a water level tank for receiving the cleaning solution overflowed by a partition from the oil overflow tank, and a cleaning solution in the water level tank that is purified by a filter to the cleaning tank. A water-based cleaning device equipped with a return circulation device.
ーした油分混在洗浄液を受入れ、油水分離フィルターで
分離浄化して前記洗浄槽へ戻す循環用油水分離装置を備
えた請求項１記載の水系洗浄装置。2. The water-based cleaning apparatus according to claim 1, further comprising an oil / water separator for circulation, which receives the oil-containing mixed cleaning fluid overflowed in the oil overflow tank, separates and purifies it with an oil / water separation filter, and returns it to the cleaning tank.
れる少なくとも一段の下位すすぎ槽と、 少なくとも一つのすすぎ槽に設けられた揺動含む外圧発
生装置と、 前記最下位の下位すすぎ槽内のすすぎ液を前記上位すす
ぎ槽へ循環させる循環装置と、 前記循環装置の循環経路に設けられ前記すすぎ液を浄化
する再生装置と、 ワークを前記最下位の下位すすぎ槽から上位すすぎ槽へ
と移送する移送装置とを備えた水系洗浄装置。3. An upper rinsing tank, at least one lower rinsing tank for receiving overflow of the rinsing liquid in the upper rinsing tank, an external pressure generating device provided in at least one rinsing tank for oscillating, and the lowermost rinsing tank. A circulating device for circulating the rinse liquid in the lower rinse tank to the upper rinse tank; a regenerator provided in the circulation path of the circulating device for purifying the rinse liquid; and a work from the lowest lower rinse tank to the upper part. A water-based cleaning device provided with a transfer device for transferring to a rinsing tank.
浄液内で洗浄してワークに付着した油分を浮上分離させ
る洗浄槽と、 前記洗浄槽からオーバーフローする洗浄液及び油分を受
入れ、仕切りによって洗浄液と油分混在洗浄液を分離し
てそれぞれオーバーフローさせる油分オーバーフロー槽
と、 前記油分オーバーフロー槽にオーバーフローした油分混
在洗浄液を受入れ、油水分離フィルターで分離浄化して
前記洗浄槽へ戻す循環用油水分離装置と、 前記油分オーバーフロー槽から、さらに仕切りによって
オーバーフローした洗浄液を受入れる水位槽と、 前記水位槽内の洗浄液をフィルターで浄化して前記洗浄
槽へ戻す循環装置と、 上位すすぎ槽と、 前記上位すすぎ槽内のすすぎ液のオーバーフローを受入
れる少なくとも一段の下位すすぎ槽と、 少なくとも一つのすすぎ槽に設けられた揺動含む外圧発
生装置と、 前記最下位の下位すすぎ槽内のすすぎ液を前記上位すす
ぎ槽へ循環させる循環装置と、 前記循環装置の循環経路に設けられ前記すすぎ液を浄化
する再生装置と、 真空乾燥装置と、 ワークを前記洗浄槽、最下位の下位すすぎ槽から上位す
すぎ槽へ、さらに前記真空乾燥装置へと移送する移送装
置とを備えた水系洗浄装置。4. A cleaning tank equipped with an external pressure generating device including rocking, for cleaning a work in a cleaning liquid to float and separate the oil component adhering to the work, and a cleaning liquid which receives the cleaning liquid and the oil component overflowing from the cleaning tank and is partitioned by a partition. And an oil overflow tank that separates and overflows the oil-mixed cleaning liquid, respectively, receives the oil-mixed cleaning liquid that overflows in the oil overflow tank, separates and purifies with an oil-water separation filter, and returns to the cleaning tank, a circulation oil-water separator, A water level tank that receives the cleaning liquid overflowed by the partition from the oil overflow tank, a circulation device that purifies the cleaning liquid in the water level tank with a filter and returns it to the cleaning tank, an upper rinse tank, and a rinse in the upper rinse tank. At least one lower soot to accept liquid overflow A tank, an external pressure generator provided in at least one rinsing tank that includes rocking, a circulation device that circulates the rinse liquid in the lowermost lower rinse tank to the upper rinse tank, and a circulation path of the circulation device. A reclaiming device provided to purify the rinsing liquid, a vacuum drying device, and a transfer device for transferring the work to the cleaning tank, the lowest rinsing tank from the lowest rinsing tank to the upper rinsing tank, and further to the vacuum drying apparatus were provided. Water-based cleaning device.
すすぎ槽内のすすぎ液を霧状に吹き付けてワークに付着
した洗浄液を洗い流してこれを前記洗浄槽内に戻すこと
によって前記洗浄槽の水分の減少分を補給する噴射装置
を備えた請求項１、３、４記載の水系洗浄装置。5. The water in the cleaning tank is washed by spraying the rinsing liquid in the rinsing tank onto the work pulled up by the transfer device from the cleaning tank to wash away the cleaning liquid adhering to the work and returning it to the inside of the cleaning tank. The water-based cleaning device according to claim 1, further comprising an injection device that replenishes the reduced amount.
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP7109099A JPH08283971A (en) | 1995-04-10 | 1995-04-10 | Aqueous cleaning device |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP7109099A JPH08283971A (en) | 1995-04-10 | 1995-04-10 | Aqueous cleaning device |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| JPH08283971A true JPH08283971A (en) | 1996-10-29 |
Family
ID=14501563
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP7109099A Pending JPH08283971A (en) | 1995-04-10 | 1995-04-10 | Aqueous cleaning device |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPH08283971A (en) |
Cited By (2)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN101773915A (en) * | 2010-01-20 | 2010-07-14 | 常州亿晶光电科技有限公司 | Multistage circulating cleaning equipment for solar cell silicon wafers |
| CN107639070A (en) * | 2017-08-24 | 2018-01-30 | 天津市环欧半导体材料技术有限公司 | A kind of Wafer Cleaning equipment and cleaning |
-
1995
- 1995-04-10 JP JP7109099A patent/JPH08283971A/en active Pending
Cited By (2)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN101773915A (en) * | 2010-01-20 | 2010-07-14 | 常州亿晶光电科技有限公司 | Multistage circulating cleaning equipment for solar cell silicon wafers |
| CN107639070A (en) * | 2017-08-24 | 2018-01-30 | 天津市环欧半导体材料技术有限公司 | A kind of Wafer Cleaning equipment and cleaning |
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