JPH08278316A - Inter atomic force microscope - Google Patents

Inter atomic force microscope

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Publication number
JPH08278316A
JPH08278316A JP7083625A JP8362595A JPH08278316A JP H08278316 A JPH08278316 A JP H08278316A JP 7083625 A JP7083625 A JP 7083625A JP 8362595 A JP8362595 A JP 8362595A JP H08278316 A JPH08278316 A JP H08278316A
Authority
JP
Japan
Prior art keywords
light
cantilever
light source
reflecting
sample surface
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Granted
Application number
JP7083625A
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Japanese (ja)
Other versions
JP3327041B2 (en
Inventor
Katsushi Nakano
勝志 中野
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Nikon Corp
Original Assignee
Nikon Corp
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Filing date
Publication date
Application filed by Nikon Corp filed Critical Nikon Corp
Priority to JP08362595A priority Critical patent/JP3327041B2/en
Priority to US08/513,650 priority patent/US5656769A/en
Publication of JPH08278316A publication Critical patent/JPH08278316A/en
Priority to US08/967,215 priority patent/US6018991A/en
Application granted granted Critical
Publication of JP3327041B2 publication Critical patent/JP3327041B2/en
Anticipated expiration legal-status Critical
Expired - Fee Related legal-status Critical Current

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  • Length Measuring Devices With Unspecified Measuring Means (AREA)

Abstract

PURPOSE: To provide an interatomic force microscope where light for detecting interatomic force can always be applied to a cantilever even at the time of probe scanning and which has a compact and simple probe scanning drive device. CONSTITUTION: An interatomic force microscope is provided with a drive member 1 for scanning sample surface which can be displaced on a plane being in parallel with the sample surface and a cantilever beam 31 which is provided at one edge of the drive member 1 for scanning sample surface and where the amount of deflection changes according to interatomic force which a tip 32 with a sharp tip receives. Also, it is provided with a light source 5 for applying light to the cantilever beam 31, a reflection member 10 which is provided at the drive member 1 for scanning sample surface and has a reflection surface at a position where the distance from an edge in that the drive member 1 for scanning sample surface becomes 1/2 of the total length of a part where the drive member 1 for scanning sample surface, and a light reception member 12 which has a light reception surface being divided into a plurality of parts and receives reflection light from the cantilever beam 31 which is reflected from the reflection member 10 using a light reception surface.

Description

【発明の詳細な説明】Detailed Description of the Invention

【０００１】[0001]

【従来の技術】近年、試料表面に探針を近づけて２次元
平面内で走査し、試料と探針との間に作用するトンネル
電流や原子間力などを検出することにより試料表面の微
細構造を観察する走査型プローブ顕微鏡の開発、改良が
盛んに行われている。図１１および図１２は、走査型プ
ローブ顕微鏡の一つである従来の原子間力顕微鏡の概念
構成図である。探針には、試料面上を走査するチップ１
０４とカンチレバー１０３とから構成されている。ま
た、表面を観察する試料１０７は、円筒型圧電駆動機構
の自由端側に配置される。この圧電駆動機構について
は、円筒状の圧電素子１００でできており、円筒型圧電
素子の内側に図示していないグランドの電極を持ち、外
側に４分割された電極１０２を持つ構成である。駆動方
法は、外側の対向する電極１０２に、グランドの電極に
対してそれぞれ正負反対の電圧を印加する。その結果、
円筒状の圧電素子１００は横方向にたわむことができ
る。この横方向に撓む現象を利用して、ＸあるいはＹ方
向の走査駆動が行われる。また、Ｚ方向の走査駆動は外
側の電極にそれぞれ同電圧のオフセットを印加する。円
筒状の圧電素子１００がＺ方向に伸縮変位することがで
きる。これらの動作を行うことにより３次元微動駆動が
実現されている。2. Description of the Related Art In recent years, a microstructure on the surface of a sample is detected by bringing the probe close to the surface of the sample and scanning it in a two-dimensional plane to detect tunnel current or atomic force acting between the sample and the probe. Development and improvement of scanning probe microscopes for observing images have been actively carried out. 11 and 12 are conceptual configuration diagrams of a conventional atomic force microscope which is one of scanning probe microscopes. The tip is a tip 1 that scans over the sample surface.
04 and cantilever 103. The sample 107 whose surface is to be observed is arranged on the free end side of the cylindrical piezoelectric drive mechanism. This piezoelectric drive mechanism is made up of a cylindrical piezoelectric element 100, and has a ground electrode (not shown) inside the cylindrical piezoelectric element and a four-divided electrode 102 outside. As a driving method, positive and negative voltages are applied to the opposing electrodes 102 on the outer side with respect to the ground electrode. as a result,
The cylindrical piezoelectric element 100 can bend laterally. By utilizing this phenomenon of bending in the lateral direction, scanning drive in the X or Y direction is performed. Further, scanning drive in the Z direction applies offsets of the same voltage to the outer electrodes. The cylindrical piezoelectric element 100 can be expanded and contracted in the Z direction. By performing these operations, three-dimensional fine movement drive is realized.

【０００２】一般に、原子間力顕微鏡において用いられ
ている原子間力の検出方法は、光てこ法を用いて検出し
ている。この光てこ法の場合、光源１０５とカンチレバ
ー１０３の位置関係および光検出器１０６とカンチレバ
ー１０３の位置関係が相対的に不動でなければならな
い。従って、従来のカンチレバーと光てこ法を使った原
子間力顕微鏡における検出系は、固定されており、試料
側を走査することで試料表面の形状を観察していた。In general, the atomic force detecting method used in the atomic force microscope uses an optical lever method. In the case of this optical lever method, the positional relationship between the light source 105 and the cantilever 103 and the positional relationship between the photodetector 106 and the cantilever 103 must be relatively immobile. Therefore, the detection system in the atomic force microscope using the conventional cantilever and the optical lever method is fixed, and the shape of the sample surface is observed by scanning the sample side.

【０００３】しかしながら、この試料駆動による走査方
法では、大面積の試料や質量の大きい試料の観察を行う
場合、走査が困難となる。よって、現在ではチップを有
するカンチレバー自体を走査して試料の表面を観察する
原子間力顕微鏡が要求されている。そのカンチレバーを
走査する原子間力顕微鏡の従来技術の一例として、カン
チレバーと光てこ法を用いた原子間力検出系を１つの構
造の中に組み込み、それら全体を走査することによっ
て、光源とカンチレバーの位置関係および光検出器とカ
ンチレバーの位置関係が相対的に保たれている方法であ
る（特開平６−８２２４９号に記載の技術）。However, in the scanning method by driving the sample, the scanning becomes difficult when observing a sample having a large area or a sample having a large mass. Therefore, at present, there is a demand for an atomic force microscope that scans the cantilever itself having a tip to observe the surface of the sample. As an example of the conventional technique of an atomic force microscope that scans the cantilever, an atomic force detection system using the cantilever and the optical lever method is incorporated into one structure, and by scanning the entire structure, the light source and the cantilever are scanned. This is a method in which the positional relationship and the positional relationship between the photodetector and the cantilever are relatively maintained (the technique described in JP-A-6-82249).

【０００４】一方、最近では、原子間力顕微鏡を光学顕
微鏡に搭載し、試料を同時観察することも行われてい
る。その方法として、対物レンズを包み込める大きさを
有した円筒状の圧電駆動素子を利用し、その一端を対物
レンズの鏡筒に固定する。また、他端には透明な板状の
部材を張り付け、その板状の部材にカンチレバーとチッ
ポを有した探針を固定する。この方法では、光学顕微鏡
で原子間力顕微鏡で走査している直上を観察するため
に、円筒型圧電駆動部材の内部に対物レンズを配置して
いる。（特開平２−２８１１０３号に記載の技術）。On the other hand, recently, an atomic force microscope is mounted on an optical microscope to simultaneously observe a sample. As the method, a cylindrical piezoelectric drive element having a size capable of enclosing the objective lens is used, and one end thereof is fixed to the lens barrel of the objective lens. Further, a transparent plate-shaped member is attached to the other end, and a probe having a cantilever and a tip is fixed to the plate-shaped member. In this method, an objective lens is arranged inside the cylindrical piezoelectric driving member in order to observe the area directly above the scanning with the atomic force microscope with the optical microscope. (Technology described in JP-A-2-281103).

【０００５】[0005]

【発明が解決しようとする課題】従来の光てこ法を利用
し、原子間力を検出するた原子間力顕微鏡では、大面積
の試料を測定しようとすると、その試料の質量により、
圧電駆動部材の共振周波数の低下を招き、観察が困難で
あった。また、従来の方法では、光てこ法による原子間
力の検出系全体を走査するため、必然的に走査する部材
が大きな質量を持つことになり、高速な走査は不可能で
あった。In the atomic force microscope which detects the atomic force by using the conventional optical lever method, when a large area sample is measured, the mass of the sample causes
The resonance frequency of the piezoelectric driving member was lowered, and it was difficult to observe. Further, in the conventional method, since the whole atomic force detection system by the optical lever method is scanned, the member to be scanned inevitably has a large mass and high-speed scanning is impossible.

【０００６】よって、本発明の目的は、原子間力検出用
の光が、探針走査時でも、常にカンチレバー上に照射す
ることができ、コンパクトで簡単な探針走査駆動装置を
有する原子間力顕微鏡を提供することにある。Therefore, it is an object of the present invention to provide light for atomic force detection, which can always irradiate the cantilever even during scanning of the probe, and which has a compact and simple probe scanning drive device. To provide a microscope.

【０００７】[0007]

【課題を解決するための手段】上記課題を解決するため
に、本発明では、試料面に対し平行な平面において変位
可能な試料面走査用駆動部材と、その試料面走査用駆動
部材の一端に設けられ、先端が尖ったチップが受ける原
子間力に応じて撓み量が変化する片持ち梁と、その片持
ち梁に光を照射するための光源と、試料面走査用駆動部
材に設けられ、前記試料面走査用駆動部材の変位する端
からの距離が、前記試料面走査用駆動部材の変位する部
分の全長に対し２分の１となる位置に反射面を有した反
射部材と、複数に分割された受光面を有し、反射部材に
よって反射された片持ち梁からの反射光を前記受光面で
受光する受光部材とを備えることとした（請求項１記載
の発明）。In order to solve the above problems, according to the present invention, a sample surface scanning drive member that is displaceable in a plane parallel to the sample surface and one end of the sample surface scanning drive member are provided. Provided, the cantilever whose deflection amount changes according to the atomic force received by the tip with a sharp tip, a light source for irradiating the cantilever with light, and a sample surface scanning drive member, A plurality of reflecting members each having a reflecting surface at a position where the distance from the displaced end of the sample surface scanning drive member is ½ of the entire length of the displaced portion of the sample surface scanning drive member; A light receiving member having a divided light receiving surface and receiving reflected light from the cantilever reflected by the reflecting member on the light receiving surface is provided (the invention according to claim 1).

【０００８】更に、本発明では、反射部材については、
光源からの光を片持ち梁に照射し、かつ片持ち梁の反射
光を受光部材に照射することが好ましい（請求項２記載
の発明）。更に、本発明では、光源と反射部材との間
に、光源からの光と片持ち梁からの反射光とを分割する
分割部材を設けることが好ましい（請求項３記載の発
明）。Further, in the present invention, as for the reflecting member,
It is preferable that the light from the light source is applied to the cantilever and the light reflected by the cantilever is applied to the light receiving member (the invention according to claim 2). Further, in the present invention, it is preferable to provide a dividing member for dividing the light from the light source and the reflected light from the cantilever between the light source and the reflecting member (the invention according to claim 3).

【０００９】更に本発明では、その光源からの光の光軸
に対し不動であり、その光源からの光を反射部材に照射
し、かつ反射部材を反射した光源からの光を受光部材に
照射する光路変換部材を光源からの光の光軸上に設ける
ことが好ましい（請求項４記載の発明）。そして、本発
明では、更に試料面に対し垂直な方向であるＺ方向に伸
縮可能なＺ方向用圧電駆動部材を設け、更にそのＺ方向
用圧電駆動部材の試料面側の一端に前記片持ち梁を試料
面走査用駆動部材の一端に設けることが好ましい（請求
項５記載の発明）。Further, according to the present invention, the light from the light source is immovable with respect to the optical axis, the light from the light source is applied to the reflecting member, and the light from the light source reflected by the reflecting member is applied to the light receiving member. It is preferable to provide the optical path changing member on the optical axis of the light from the light source (the invention according to claim 4). Further, in the present invention, a Z-direction piezoelectric drive member that is expandable / contractible in the Z direction, which is a direction perpendicular to the sample surface, is further provided, and the cantilever is provided at one end of the Z-direction piezoelectric drive member on the sample surface side. Is preferably provided at one end of the sample surface scanning driving member (the invention according to claim 5).

【００１０】また、反射部材によって反射された前記光
源からの光を前記片持ち梁に照射し、かつ、前記片持ち
梁からの反射光を反射部材に照射する照射部材を試料面
走査用駆動部材の一端に設けることが好ましい（請求項
６記載の発明）。また、本発明では試料面走査用駆動部
材については、複数の圧電体を積層した圧電駆動部材で
あることが好ましい（請求項７記載の発明）。Further, an irradiation member for irradiating the cantilever beam with the light from the light source reflected by the reflecting member and for irradiating the reflecting member with the reflected light from the cantilever beam is a driving member for scanning the sample surface. Is preferably provided at one end (the invention according to claim 6). Further, in the present invention, the sample surface scanning driving member is preferably a piezoelectric driving member in which a plurality of piezoelectric bodies are laminated (the invention according to claim 7).

【００１１】また、本発明では、試料面走査用駆動部材
については、一端が支持部材に固定され、試料面と平行
な方向であるＸ方向に伸縮可能なＸ方向用圧電駆動部材
と、一端が支持部材に固定され、試料面と平行な方向で
ありかつ前記Ｘ方向とは異なる方向であるＹ方向に伸縮
可能なＹ方向用圧電駆動部材とからなっても良い（請求
項８記載の発明）。Further, according to the present invention, the sample surface scanning driving member has one end fixed to the supporting member and expandable and contractible in the X direction which is a direction parallel to the sample surface, and one end. It may be composed of a Y direction piezoelectric drive member which is fixed to the support member and is capable of expanding and contracting in the Y direction which is a direction parallel to the sample surface and different from the X direction (the invention according to claim 8). .

【００１２】また、本発明では、支持部材と、一端が屈
曲可能なヒンジを介して支持部材に固定され、試料面と
平行な方向であるＸ方向に伸縮可能であるＸ方向用圧電
駆動部材と、一端が屈曲可能なヒンジを介して支持部材
に固定され、かつ、他端が屈曲可能なヒンジを介してＸ
方向用圧電駆動部材に固定され、試料面と平行な方向で
ありかつＸ方向とは異なる方向であるＹ方向に伸縮可能
なＹ方向用圧電駆動部材と、Ｘ方向用圧電駆動部材の他
端に固定され、試料面に対し垂直な方向に伸縮可能なＺ
方向用圧電駆動部材と、そのＺ方向用圧電駆動部材の試
料面側の一端に設けられ、先端の尖ったチップが受ける
原子間力に応じて撓み量が変化する片持ち梁と、片持ち
梁に光を照射するための光源と、Ｘ方向用圧電駆動部材
の他端に設けられ、光源からの光を片持ち梁に照射する
ための照射部材と、Ｘ方向用圧電駆動部材に設けられ、
光源からの光を前記照射部材に照射する反射部材と、片
持ち梁から反射された光を受光し、複数に分割された受
光面を有した受光部材とを備えており、そして、その反
射部材の反射面は、Ｘ方向用圧電駆動部材の一端に設け
られた屈曲可能なヒンジの屈曲する中心から反射部材の
反射面までの距離と、反射部材で反射された光の光路に
おける反射部材の反射面から照射部材を経て片持ち梁ま
での距離とが、等しい場所に有した（請求項９記載の発
明）。Further, according to the present invention, a supporting member and an X-direction piezoelectric driving member which is fixed to the supporting member via a hinge whose one end is bendable and is capable of expanding and contracting in the X direction which is a direction parallel to the sample surface. , One end is fixed to the support member via a bendable hinge and the other end is bent via a bendable X
The Y direction piezoelectric drive member fixed to the direction piezoelectric drive member and expandable / contractible in the Y direction, which is a direction parallel to the sample surface and different from the X direction, and the other end of the X direction piezoelectric drive member. It is fixed and can expand and contract in the direction perpendicular to the sample surface.
Direction piezoelectric drive member, a cantilever beam provided at one end on the sample surface side of the Z direction piezoelectric drive member, and the amount of bending of which varies according to the atomic force received by a tip with a sharp tip, and a cantilever beam. And a light source for irradiating light to the other end of the X-direction piezoelectric drive member, and an irradiation member for irradiating the cantilever with light from the light source, and an X-direction piezoelectric drive member,
The light emitting member is provided with a reflecting member for irradiating the irradiating member with light from a light source, and a light receiving member for receiving the light reflected from the cantilever and having a light receiving surface divided into a plurality of parts. The reflection surface of is the distance from the bending center of the bendable hinge provided at one end of the X-direction piezoelectric drive member to the reflection surface of the reflection member, and the reflection of the reflection member in the optical path of the light reflected by the reflection member. The distance from the surface to the cantilever through the irradiation member is equal to each other (the invention according to claim 9).

【００１３】請求項９記載の発明について、反射部材で
は、光源からの光を照射部材へ反射し、かつ、照射部材
によって照射された光源からの光を受光部材に反射する
ことが好ましい（請求項１０記載の発明）。更に請求項
９の発明について、光源と反射部材との間に、光源から
の光と片持ち梁からの反射光とを分割する分割部材を設
けることが好ましい（請求項１１記載の発明）。In the invention according to claim 9, it is preferable that the reflecting member reflects the light from the light source to the irradiation member and reflects the light from the light source irradiated by the irradiation member to the light receiving member. Invention of 10.). Further, with respect to the invention of claim 9, it is preferable that a dividing member for dividing the light from the light source and the reflected light from the cantilever is provided between the light source and the reflecting member (the invention according to claim 11).

【００１４】更に請求項９記載の発明について、その光
源と反射部材との間に光源からの光軸に対し不動に設け
られ、その光源からの光を反射部材に照射し、かつ、反
射部材によって反射された片持ち梁からの反射光を受光
部材に照射する光路変換部材を光源からの光軸上に設け
ることが好ましい（請求項１２記載の発明）。以上の構
成でもって、課題を解決した。Further, in the invention according to claim 9, it is provided between the light source and the reflecting member immovably with respect to the optical axis from the light source, and the light from the light source is applied to the reflecting member, and by the reflecting member. It is preferable to provide an optical path conversion member for irradiating the light receiving member with the reflected light from the reflected cantilever on the optical axis from the light source (the invention according to claim 12). The above configuration has solved the problem.

【００１５】[0015]

【作用】本発明によれば、光てこ法による原子間力の検
出は、カンチレバーの撓み量に応じ、反射光の光軸変化
を検出している。よって、この方法でカンチレバーの撓
み量を正確に検出するための必要条件は次の２点であ
る。 カンチレバーへの入射光の光軸が変わらない。According to the present invention, the detection of the interatomic force by the optical lever method detects the change of the optical axis of the reflected light according to the bending amount of the cantilever. Therefore, the following two points are necessary conditions for accurately detecting the bending amount of the cantilever by this method. The optical axis of the incident light on the cantilever does not change.

【００１６】カンチレバーの撓み量が一定である場
合、反射光を受光する光検出器の受光位置が変わらな
い。 本発明者は、この２点に着目し、各方向における駆動部
材が駆動することによって、カンチレバーとチップの構
成を有した探針が移動してもカンチレバーへの入射光の
光軸が変化せず、かつ、カンチレバーの撓み量が一定で
ある場合、反射光の光軸に対して、反射光を受光する光
検出器の受光位置が変わらない光学系を発明した。When the amount of bending of the cantilever is constant, the light receiving position of the photodetector that receives the reflected light does not change. The present inventor pays attention to these two points, and by driving the driving member in each direction, the optical axis of the incident light on the cantilever does not change even if the probe having the structure of the cantilever moves. Moreover, when the amount of bending of the cantilever is constant, an optical system in which the light receiving position of the photodetector that receives the reflected light does not change with respect to the optical axis of the reflected light has been invented.

【００１７】また、本発明では、カンチレバーの付近に
光学顕微鏡を配置出来るようにするため、光源と受光部
材とを駆動部材上に配置しない構成を採った。そこで、
本発明では、試料面と平行な平面において変位し探針を
試料面に対し平行に移動させることができる駆動部材上
に、光源からの光をカンチレバーに照射するための反射
部材を設けることによって、光源からの光の光軸が、常
に一定の関係を持つようにした。この関係を保つため、
駆動部材が変位したとしても、常にカンチレバーに照射
できる様にするため、駆動部材が変位する部分の中心
（駆動部材が変位する全長と、駆動部材の端から反射部
材までの距離との比が２：１となるような位置）に反射
面が有るようにした。この様にすることで、例え駆動部
材が変位しても、反射部材によって反射された光源から
の光軸は、カンチレバーが固定された端において、カン
チレバーに対する入射光軸は、常に一定になる。Further, in the present invention, the light source and the light receiving member are not arranged on the driving member so that the optical microscope can be arranged near the cantilever. Therefore,
In the present invention, by providing the reflecting member for irradiating the cantilever with the light from the light source on the driving member that can be displaced in the plane parallel to the sample surface and move the probe parallel to the sample surface, The optical axis of the light from the light source always has a fixed relationship. To keep this relationship
Even if the drive member is displaced, the cantilever can always be irradiated with the light so that the center of the portion where the drive member is displaced (the ratio of the total length of displacement of the drive member to the distance from the end of the drive member to the reflection member is 2 There is a reflection surface at the position (1). By doing so, even if the driving member is displaced, the optical axis from the light source reflected by the reflecting member is always the same as the incident optical axis with respect to the cantilever at the end where the cantilever is fixed.

【００１８】また、カンチレバーの撓み量の変化は、あ
まり大きくないので、カンチレバーによって反射された
反射光を試料面走査用駆動部材に取り付けられた反射部
材で反射させ、受光部材に照射するようにしても構わな
い。この様にすることで、光源と受光部材とを近くにま
とめて配置できる。ところで、光源からの光の光軸とカ
ンチレバーからの反射光の光軸とがほとんど平行である
ので、光源と受光部材とを配置することが出来ないとい
う場合には、光源からの光とカンチレバーからの反射光
とを分割する分割部材とを反射部材と光源との間に配置
することでこの問題を解消することが出来る。Further, since the change in the amount of bending of the cantilever is not so large, the reflected light reflected by the cantilever is reflected by the reflecting member attached to the sample surface scanning driving member and is irradiated on the light receiving member. I don't mind. By doing so, the light source and the light receiving member can be arranged close to each other. By the way, since the optical axis of the light from the light source and the optical axis of the reflected light from the cantilever are almost parallel to each other, when the light source and the light receiving member cannot be arranged, the light from the light source and the cantilever are separated from each other. This problem can be solved by disposing a splitting member that splits the reflected light of 1) between the reflecting member and the light source.

【００１９】また、光源からの光の光軸に対して、反射
面の角度が一定である光路変換部材を設け、光源からの
光を反射部材に照射させると、光源や受光部材を反射部
材の反射面に直接、光を照射できる位置に配置しなくて
も構わなくなり、任意の位置に配置することが出来る。
また、試料面走査用駆動部材の一端に試料面に対し垂直
に変位することが出来るＺ方向用圧電駆動部材を設け、
Ｚ方向用圧電駆動部材を伸縮することでカンチレバーの
撓み量を制御することが出来る。Further, when an optical path changing member whose reflection surface has a constant angle with respect to the optical axis of the light from the light source is provided and the light from the light source is applied to the reflecting member, the light source and the light receiving member are moved to the reflecting member. The reflecting surface does not have to be directly arranged at a position where light can be emitted, and can be arranged at an arbitrary position.
In addition, a Z-direction piezoelectric drive member that can be displaced perpendicularly to the sample surface is provided at one end of the sample surface scanning drive member.
The amount of bending of the cantilever can be controlled by expanding and contracting the Z-direction piezoelectric drive member.

【００２０】また、反射部材によって反射された光源か
らの光をカンチレバーに直接照射出来ないような場合
は、カンチチレバーを固定した試料面走査用駆動部材の
一端に反射部材によって反射された光源からの光をカン
チレバーに照射する照射部材を設けることが好ましい。
この照射部材は、試料面走査用駆動部材の一端に固定さ
れているので、試料面走査用駆動部材が撓むなどして変
位しても、反射部材からの反射光の光軸に対しては常に
同じ角度の反射面を有することになる。よって、常にカ
ンチレバーに光源からの光を照射することが出来る。When the cantilever cannot be directly irradiated with the light from the light source reflected by the reflecting member, the light from the light source reflected by the reflecting member is attached to one end of the sample surface scanning driving member with the cantilever fixed. It is preferable to provide an irradiation member for irradiating the cantilever.
Since this irradiation member is fixed to one end of the sample surface scanning drive member, even if the sample surface scanning drive member is displaced by bending or the like, the irradiation member does not move with respect to the optical axis of the reflected light from the reflecting member. It will always have reflective surfaces at the same angle. Therefore, the cantilever can always be irradiated with the light from the light source.

【００２１】ところで、請求項８記載の発明について
は、反射部材をＸ方向用圧電駆動部材上に設け、固定さ
れた位置については、Ｘ方向用圧電駆動部材と支持部材
との間に設けられたヒンジの屈曲する中心から反射部材
の反射面までの距離と、反射部材の反射面から照射部材
を経て片持ち梁までの反射部材からの反射光が片持ち梁
へ到達する光路における距離とが同じなる場所（ヒンジ
の屈曲する中心からの反射部材の反射面までの距離：反
射部材の反射面から照射部材を経て片持ち梁までの距離
＝１：１の関係を持つ位置）に反射面を有するよう固定
した。この位置に反射部材を配置すれば、ヒンジに固定
された圧電駆動部材に、支持部材に対する角度変化がお
きても、反射部材は、その角度変化と同じ量角度変化を
起こす。角度変化を起こすことによって、常にＸ方向用
圧電駆動部材の一端に設けられた照射部材に照射するこ
とができる。よって、カンチレバーが移動しても、常に
照射することができる。 また、反射部材と光源との間
に、カンチレバーからの反射光と光源からの光とを分割
する分割部材を設けると、光源からの光の光軸とカンチ
レバーからの反射光の光軸とを完全に変えられることが
できる。この様な原子間力顕微鏡は、カンチレバーの撓
み量はごく小さいものなので、光源からの光の光軸とカ
ンチレバーからの反射光の光軸が、ほとんど平行になっ
てしまう。そこで、分割部材を設れば、光源と受光部材
の配置が簡単になる。According to the eighth aspect of the invention, the reflection member is provided on the X-direction piezoelectric drive member, and the fixed position is provided between the X-direction piezoelectric drive member and the support member. The distance from the bending center of the hinge to the reflecting surface of the reflecting member is the same as the distance in the optical path from the reflecting surface of the reflecting member to the cantilever through the illuminating member to the cantilever. Has a reflection surface at a position (distance from the center of bending of the hinge to the reflection surface of the reflection member: distance from the reflection surface of the reflection member to the cantilever through the irradiation member = 1: 1) Fixed as By disposing the reflecting member at this position, even if the piezoelectric driving member fixed to the hinge changes in angle with respect to the supporting member, the reflecting member causes an angle change by the same amount as the angle change. By changing the angle, the irradiation member provided at one end of the X-direction piezoelectric drive member can be always irradiated. Therefore, even if the cantilever moves, irradiation can always be performed. Further, if a dividing member that divides the reflected light from the cantilever and the light from the light source is provided between the reflecting member and the light source, the optical axis of the light from the light source and the optical axis of the reflected light from the cantilever are completely formed. Can be changed to In such an atomic force microscope, since the amount of bending of the cantilever is very small, the optical axis of the light from the light source and the optical axis of the reflected light from the cantilever are almost parallel. Therefore, if the dividing member is provided, the arrangement of the light source and the light receiving member can be simplified.

【００２２】また、光路変換部材を光源と反射部材との
間に設ける。その作用については、先に述べたとおりで
あり、請求項８の発明についても同様である。以下に、
実施例でもって、本発明を更に詳しく説明するが、本発
明はこれに限られるものではない。An optical path changing member is provided between the light source and the reflecting member. The operation is as described above, and the same applies to the invention of claim 8. less than,
The present invention will be described in more detail with reference to examples, but the present invention is not limited thereto.

【００２３】[0023]

【実施例】【Example】

（実施例１）図１は、本発明にかかる実施例１に係る原
子間力顕微鏡を示した構成斜視図である。この原子間力
顕微鏡には、駆動部材として、２枚の圧電体を貼り合わ
し、それぞれの圧電体の一番面の広い面とその面に対向
する面の両面に電極を設けたバイモルフ型圧電駆動部材
１を用いた。このバイモルフ型圧電駆動部材１は、その
一端を支持基板６に固定されている。このバイモルフ型
圧電駆動部材１は、それぞれの圧電体に同方向の電圧を
印加した場合には、それぞれの圧電体が試料１４の面と
平行な軸であるＸ軸に平行で同じ方向に伸縮する。(Embodiment 1) FIG. 1 is a configuration perspective view showing an atomic force microscope according to Embodiment 1 of the present invention. In this atomic force microscope, as a driving member, two piezoelectric bodies are bonded to each other, and electrodes are provided on both the widest surface of the respective piezoelectric bodies and the surface opposite to that surface. The member 1 was used. The bimorph type piezoelectric driving member 1 has one end fixed to the support substrate 6. In the bimorph type piezoelectric driving member 1, when a voltage in the same direction is applied to each piezoelectric body, each piezoelectric body expands and contracts in the same direction in parallel with the X axis which is an axis parallel to the surface of the sample 14. .

【００２４】また、それぞれの圧電体に異方向の電圧を
印加した場合には、一方の圧電体がＸ軸に平行に収縮
し、他方の圧電体がＸ軸に平行に伸長することで、バイ
モルフ型圧電駆動部材１自体が撓む。この様にして、他
端がＸ軸とは異なるＹ軸と平行な方向に振ることができ
る圧電駆動部材である。このバイモルフ型圧電駆動部材
１を用いて試料面と平行なＸＹ平面において探針を駆動
することを可能としている。Further, when voltages in different directions are applied to the respective piezoelectric bodies, one piezoelectric body contracts in parallel with the X axis and the other piezoelectric body extends in parallel with the X axis, whereby the bimorph is formed. The die piezoelectric drive member 1 itself bends. In this way, the other end is a piezoelectric drive member that can be swung in a direction parallel to the Y axis, which is different from the X axis. The bimorph type piezoelectric driving member 1 can be used to drive the probe on the XY plane parallel to the sample surface.

【００２５】更にこの原子間力顕微鏡には、バイモルフ
型圧電駆動部材１の全長に対する中間の位置に、第２の
反射部材１０を設けた。そして、バイモルフ型圧電駆動
部材１の他端には、Ｚ方向用圧電駆動部材２を設けた。
このＺ方向用圧電駆動部材２は、試料面と垂直な方向に
複数の圧電体を積層した構成を有している。このＺ方向
用圧電駆動部材２を伸縮させることによって、Ｚ軸と平
行な方向に駆動することが出来る。また、更にバイモル
フ型圧電駆動部材１の他端には、第３の反射部材を設け
た。Further, in this atomic force microscope, the second reflecting member 10 is provided at an intermediate position with respect to the entire length of the bimorph type piezoelectric driving member 1. Then, the Z-direction piezoelectric drive member 2 was provided at the other end of the bimorph type piezoelectric drive member 1.
The Z-direction piezoelectric drive member 2 has a structure in which a plurality of piezoelectric bodies are laminated in a direction perpendicular to the sample surface. By expanding and contracting the Z-direction piezoelectric drive member 2, it can be driven in a direction parallel to the Z-axis. Further, a third reflecting member is provided on the other end of the bimorph type piezoelectric driving member 1.

【００２６】また、Ｚ方向用圧電駆動部材２の試料面側
の他端には、カンチレバー３１とチップ３２とを有した
探針３とを固定している。ところで、支持基板４は、試
料１４と探針３との位置調整を行うためのマイクロメー
ター１３を３カ所に設けた。更に支持基板４には、レー
ザー光源５、コリーメートレンズ６、偏光ビームスプリ
ッター７、λ／４板８及び４分割ポジションセンサーフ
ォトダイオード１２とが設けられている。このレーザー
光源５は、カンチレバー３１の撓み量を検出するための
光源であり、実施例１では半導体レーザーを用いた。ま
た、４分割ポジションセンサーフォトダイオードは、受
光面を十字に分割して４つの受光面を有したフォトダイ
オードである。これは、カンチレバーの撓み量を検出す
るためのもので、カンチレバーの撓みの変化による受光
面上の光スポットの移動量を検出する。コリーメートレ
ンズ６については、焦点がカンチレバー３１上で結ぶ様
な光学系である。A probe 3 having a cantilever 31 and a tip 32 is fixed to the other end of the Z-direction piezoelectric drive member 2 on the sample surface side. By the way, the supporting substrate 4 was provided with the micrometer 13 for adjusting the positions of the sample 14 and the probe 3 at three positions. Further, the supporting substrate 4 is provided with a laser light source 5, a collimate lens 6, a polarization beam splitter 7, a λ / 4 plate 8 and a 4-division position sensor photodiode 12. The laser light source 5 is a light source for detecting the amount of bending of the cantilever 31, and a semiconductor laser is used in the first embodiment. The four-division position sensor photodiode is a photodiode having four light-receiving surfaces obtained by dividing the light-receiving surface into crosses. This is for detecting the bending amount of the cantilever, and detects the moving amount of the light spot on the light receiving surface due to the change in the bending of the cantilever. The collimate lens 6 is an optical system in which the focus is on the cantilever 31.

【００２７】これらレーザー光源５、コリーメートレン
ズ６、偏光ビームスプリッター７、λ／４板８及び４分
割ポジションセンサーフォトダイオード１２は、それぞ
れ支持基板１７に位置調整できるよう固定されている。
また、実施例１での原子間力顕微鏡は、先に説明した第
２の反射部材１０及び第３の反射部材１１の他に第１の
反射部材９とを有している。第１の反射部材９は、バイ
モルフ型圧電駆動部材１の長手方向での中間の位置より
Ｚ方向用圧電駆動部材２側で、かつ、バイモルフ型圧電
駆動部材の直上の支持基板４に固定されている。The laser light source 5, the collimator lens 6, the polarization beam splitter 7, the λ / 4 plate 8 and the four-division position sensor photodiode 12 are fixed to the support substrate 17 so that their positions can be adjusted.
In addition, the atomic force microscope according to the first embodiment includes the first reflecting member 9 in addition to the second reflecting member 10 and the third reflecting member 11 described above. The first reflecting member 9 is fixed to the support substrate 4 on the Z direction piezoelectric driving member 2 side from the middle position in the longitudinal direction of the bimorph type piezoelectric driving member 1 and directly above the bimorph type piezoelectric driving member. There is.

【００２８】これらの反射部材は、レーザー光源５から
の光をカンチレバー３１へ入射し、カンチレバー３１の
反射光を４分割ポジションセンサーフォトダイオード１
２へ入射させるためのものである。具体的には、レーザ
ー光源５からの光を第１の反射部材９により、第２の反
射部材１０へ反射させる。更に第２の反射部材１０に入
射した光は、第２の反射部材によって第３の反射部材１
１へ反射させる。また更に第３の反射部材に入射した光
は、カンチレバー３２へ入射する。カンチレバー３２か
らの反射光は、逆の経路を辿って、４分割ポジションセ
ンサーフォトダイオード１２に入射される。These reflecting members make the light from the laser light source 5 incident on the cantilever 31 and reflect the reflected light from the cantilever 31 into the four-division position sensor photodiode 1.
It is for making the light incident on 2. Specifically, the light from the laser light source 5 is reflected by the first reflecting member 9 to the second reflecting member 10. Further, the light incident on the second reflecting member 10 is transmitted by the second reflecting member to the third reflecting member 1
Reflect to 1. Further, the light that has entered the third reflecting member enters the cantilever 32. The reflected light from the cantilever 32 follows the reverse path and is incident on the four-division position sensor photodiode 12.

【００２９】次に、実施例１における原子間力顕微鏡の
カンチレバーの撓み量測定について説明する。レーザー
光源５の光は偏光しているため、あらかじめ偏光面と偏
光ビームスプリッター７により反射される様に調整して
おくことにより、偏光ビームスプリッター７で反射す
る。その反射した光はλ／４板８により円偏光となる。
円偏光となった光は、第１の反射部材９、第２の反射部
材１０、第３の反射部材１１を反射してゆきカンチレバ
ー３１に入射する。カンチレバー３１に入射した光は、
カンチレバー３１の撓み量に応じて光軸が変わって反射
する。カンチレバー３１によって反射された光は、第３
の反射部材１１、第２の反射部材１０、第１の反射部材
９を経て再びλ／４板８に入射する。ここでカンチレバ
ー３１からの反射光は、レーザー光源５からの入射光に
対し、偏光面が直交した偏光面を持つことになる。そし
て、偏光ビームスプリッター７を透過して４分割ポジシ
ョンセンサーフォトダイオード１２に入射し、光スポッ
トが発生する。この時、光スポットの位置を４分割ポジ
ションセンサーフォトダイオード１２のそれぞれの受光
面から得られる電流をデーターとして取り上げて、カン
チレバー３１の撓み量を算出する。Next, the deflection amount measurement of the cantilever of the atomic force microscope in the first embodiment will be described. Since the light from the laser light source 5 is polarized, it is reflected by the polarization beam splitter 7 by adjusting the polarization plane and the polarization beam splitter 7 in advance. The reflected light is circularly polarized by the λ / 4 plate 8.
The circularly polarized light is reflected by the first reflecting member 9, the second reflecting member 10, and the third reflecting member 11, and then enters the cantilever 31. The light incident on the cantilever 31 is
The optical axis changes according to the amount of bending of the cantilever 31, and is reflected. The light reflected by the cantilever 31 is
After passing through the reflecting member 11, the second reflecting member 10, and the first reflecting member 9, the light enters the λ / 4 plate 8 again. Here, the reflected light from the cantilever 31 has a polarization plane whose polarization plane is orthogonal to that of the incident light from the laser light source 5. Then, the light passes through the polarization beam splitter 7 and enters the 4-division position sensor photodiode 12, and a light spot is generated. At this time, the deflection amount of the cantilever 31 is calculated by taking the current of each light receiving surface of the 4-division position sensor photodiode 12 as the data for the position of the light spot.

【００３０】カンチレバー３１の撓み量の算出について
具体的に図４を用いて説明する。カンチレバー３１の撓
み量が変化すると、カンチレバー３１を反射したレーザ
ー光の光軸が変化する。この反射光の光軸の変化は、４
分割ポジションセンサー１２における光のスポットの位
置の変化として表れる。この光のスポットの位置の変化
は、４分割ポジションセンサーフォトダイオード１２の
それぞれの受光面から得られる電流の相違によって検出
される。それぞれ４つの受光面から得られる電流をＩ／
Ｖ変換機４１ａ、４１ｂで、それぞれの電流に対応する
電圧に変換する。Ｉ／Ｖ変換機で変換された電圧は、差
動増幅器４２に入力される。そこで、それぞれの電圧の
差を算出し、ＣＰＵ４３に入力する。ＣＰＵ４３では、
それぞれの電圧の差から、カンチレバー３１の撓み量の
変化を算出する。次に、ＣＰＵ４３では、カンチレバー
３１が一定の撓み量になるようＺ方向用圧電駆動部材２
を変位させるようピエゾ駆動回路４４へＺ方向用圧電駆
動部材２を変位させる信号を出力する。また、ピエゾ駆
動回路４４からそれぞれの圧電駆動部材の伸縮量は、Ｃ
ＰＵ４３に入力される。ＣＰＵ４３では、それぞれの圧
電駆動部材の伸縮量から、それぞれの試料面の位置にお
ける凹凸の大きさを算出し、そのデーターをメモリー４
５に出力する。そして、このメモリー４５から、一括し
て位置のデーターとその位置における凹凸の情報を表示
装置４６に出力する。そして、表示装置４６では、３次
元的に試料表面の像を表示する。The calculation of the bending amount of the cantilever 31 will be specifically described with reference to FIG. When the bending amount of the cantilever 31 changes, the optical axis of the laser light reflected by the cantilever 31 changes. The change in the optical axis of this reflected light is 4
It appears as a change in the position of the light spot on the divided position sensor 12. This change in the position of the light spot is detected by the difference in the currents obtained from the respective light receiving surfaces of the 4-division position sensor photodiode 12. The current obtained from each of the four light receiving surfaces is I /
The V converters 41a and 41b convert the voltages into corresponding voltages. The voltage converted by the I / V converter is input to the differential amplifier 42. Therefore, the difference between the voltages is calculated and input to the CPU 43. In the CPU 43,
The change in the amount of bending of the cantilever 31 is calculated from the difference between the voltages. Next, in the CPU 43, the Z-direction piezoelectric drive member 2 is adjusted so that the cantilever 31 has a constant bending amount.
A signal for displacing the Z-direction piezoelectric drive member 2 is output to the piezo drive circuit 44 so as to displace. Further, the expansion / contraction amount of each piezoelectric drive member from the piezo drive circuit 44 is C
It is input to the PU 43. The CPU 43 calculates the size of the unevenness at each sample surface position from the amount of expansion and contraction of each piezoelectric drive member, and stores the data in the memory 4
5 is output. Then, from this memory 45, the position data and the information of the unevenness at that position are collectively output to the display device 46. Then, the display device 46 three-dimensionally displays the image of the sample surface.

【００３１】ところで、バイモルフ型圧電駆動部材１を
駆動させた場合に各反射部材がどの様な働きをするかを
説明する。バイモルフ型圧電駆動部材１を撓ませること
によって駆動させ、探針３を移動させた時を説明する。
図２は、バイモルフ型圧電駆動部材１を動作させた時の
状態を模式的に表した図である。（ａ）はバイモルフ型
圧電駆動部材１を撓ませた時を模式的に表した図であ
る。（ｂ）はバイモルフ型圧電駆動部材１が撓んだとき
の曲率半径をＲ1 とし、その曲率半径Ｒ1 の中心をＯ1
とし、第２の反射部材１０とその反射部材に入射される
光軸とその反射部材によって反射された光軸との関係を
示した図である。図２では、第２の反射部材１０の位置
をＭ1 とし、バイモルフ型圧電駆動部材１の支持基板４
に固定された固定端と第２の反射部材１０までの距離を
ｄ1 とし、バイモルフ型圧電駆動部材１の他端をＢ1 と
した。Now, how each reflecting member works when the bimorph type piezoelectric driving member 1 is driven will be described. A case where the bimorph type piezoelectric drive member 1 is driven by bending and the probe 3 is moved will be described.
FIG. 2 is a diagram schematically showing a state when the bimorph type piezoelectric driving member 1 is operated. FIG. 3A is a diagram schematically showing the bimorph type piezoelectric drive member 1 when it is bent. In (b), the radius of curvature when the bimorph type piezoelectric driving member 1 is bent is R 1, and the center of the radius of curvature R 1 is O 1
FIG. 4 is a diagram showing the relationship between the second reflecting member 10, the optical axis incident on the reflecting member, and the optical axis reflected by the reflecting member. In FIG. 2, the position of the second reflecting member 10 is M 1, and the supporting substrate 4 of the bimorph type piezoelectric driving member 1 is shown.
The distance between the fixed end fixed to and the second reflecting member 10 was d 1, and the other end of the bimorph type piezoelectric driving member 1 was B 1 .

【００３２】バイモルフ型圧電駆動部材１の曲率半径Ｒ
1 の時のＡ1Ｏ1Ｂ1 の角度を２θ1とすると、このと
き、第２の反射部材１０の反射面の角度変化は、図２
（ｂ）で示されたＭ1 とＯ1 を結ぶ線とＡ1 とＯ1 を結
ぶ線との角度と同じになる。よって、第２の反射部材１
０は、θ1 傾くことになる。第２の反射部材１０がθ1
傾くと第２の反射部材の入射光の光軸と反射光の光軸の
なす角度は、２θ1 となり、反射された光の光軸は、曲
率半径Ｒ1 で撓んでいるバイモルフ型圧電駆動部材１の
他端における接線と同じになる。Radius of curvature R of the bimorph type piezoelectric driving member 1
When the angle of the A 1 O 1 B 1 in the case of 1 and 2 [Theta] 1, this time, the angle change in the reflecting surface of the second reflecting member 10, FIG. 2
The angle between the line connecting M 1 and O 1 and the line connecting A 1 and O 1 shown in (b) is the same. Therefore, the second reflecting member 1
0 is inclined by θ 1 . The second reflecting member 10 is θ 1
When tilted, the angle formed by the optical axis of the incident light and the optical axis of the reflected light of the second reflecting member becomes 2θ 1 , and the optical axis of the reflected light is bent with the radius of curvature R 1 to bend the bimorph type piezoelectric driving member. It becomes the same as the tangent line at the other end of 1.

【００３３】つまり、バイモルフ型圧電駆動部材１の撓
みがどのくらいになっても第２の反射部材１０からの反
射光の光軸は、バイモルフ型圧電駆動部材１の他端にお
ける接線と平行になりバイモルフ型圧電駆動部材１が撓
んでも、第２の反射部材１０からの反射光は、バイモル
フ型圧伝駆動部材１の延長上に設けられた第３の反射部
材１１の同じところに入射することができるということ
である。That is, no matter how much the bimorph type piezoelectric driving member 1 bends, the optical axis of the reflected light from the second reflecting member 10 becomes parallel to the tangent line at the other end of the bimorph type piezoelectric driving member 1. Even if the die-type piezoelectric driving member 1 bends, the reflected light from the second reflecting member 10 may be incident on the same portion of the third reflecting member 11 provided on the extension of the bimorph-type pressure transmission driving member 1. It means that you can.

【００３４】ところで、バイモルフ型圧電駆動部材１を
長手方向（Ｘ軸と平行な方向）に駆動した場合は、第２
の反射部材からの反射光の光軸とバイモルフ型圧電駆動
部材１の軸とは、平行であるのでバイモルフ型圧電駆動
部材１に固定された第３の反射部材１１には、必ず第２
の反射部材からの反射光が照射される。ところで、第２
の反射部材１０と第３の反射部材１１だけでは、レーザ
ー光源５を支持基板４に固定してカンチレバー３１に光
を照射する事が出来ないので、実施例１では、更にバイ
モルフ型圧電駆動部材１の直上に設けた第１の反射部材
９を設けている。そこで実施例１では、この第１の反射
部材９を使い、光をＸ軸に対しほぼ平行になるように第
２の反射部材１０に入射させている。そのことについ
て、次に説明する。By the way, when the bimorph type piezoelectric driving member 1 is driven in the longitudinal direction (the direction parallel to the X axis), the second
Since the optical axis of the light reflected from the reflecting member and the axis of the bimorph-type piezoelectric driving member 1 are parallel to each other, the second reflecting member 11 fixed to the bimorph-type piezoelectric driving member 1 must always have the second
The reflected light from the reflecting member is emitted. By the way, second
It is impossible to fix the laser light source 5 to the support substrate 4 and irradiate the cantilever 31 with light only by the reflecting member 10 and the third reflecting member 11 of FIG. The first reflecting member 9 provided immediately above is provided. Therefore, in the first embodiment, the first reflecting member 9 is used and the light is made incident on the second reflecting member 10 so as to be substantially parallel to the X axis. This will be described next.

【００３５】第２の反射部材１０が、バイモルフ型圧電
駆動部材１が撓むことによって、ＸＹ平面上においてθ
の角度変化したときの状態を模式的に図３に示した。図
３の（ａ）は、第２の反射部材の反射面の法線上から見
たときの模式図である。図３の（ｂ）は、ＸＹ平面の法
線上から見たときの模式図である。図３の（ｃ）は斜視
したときの模式図である。ところで、Ｏは第２の反射部
材の受光位置である。Ｏ’はＸＹ平面に対する法線上の
点であり、Ｏから発した法線上である。ＢＯはＸＹ平面
における入射光軸を示しており、ＤＯはＸＹ平面上にお
ける第２の反射部材の反射面からの法線を示している。
また、ＯＣは第２の反射部材によって反射された反射光
軸を示している。ＡＯは第１の反射部材９によって反射
された光が第２の反射部材１０に入射する光軸を示して
おり、ＥＦＯで形成される面は、第２の反射部材の反射
面に対して、垂直な面を示している。点Ｏ’、Ａ、Ｂ、
Ｃ、Ｄ、Ｅ、Ｆは、それぞれＯから等しい距離にある。
説明上ここでの説明では、これらの各点とＯからの距離
を１とする。The second reflecting member 10 causes the bimorph type piezoelectric driving member 1 to bend, thereby causing θ in the XY plane.
FIG. 3 schematically shows the state when the angle is changed. FIG. 3A is a schematic diagram when viewed from the normal line of the reflecting surface of the second reflecting member. FIG. 3B is a schematic diagram when viewed from the normal line of the XY plane. FIG. 3C is a schematic diagram when viewed in perspective. By the way, O is the light receiving position of the second reflecting member. O'is a point on the normal to the XY plane, and is on the normal originating from O. BO indicates the incident optical axis on the XY plane, and DO indicates the normal line from the reflecting surface of the second reflecting member on the XY plane.
Further, OC indicates the reflected optical axis reflected by the second reflecting member. AO indicates the optical axis on which the light reflected by the first reflecting member 9 enters the second reflecting member 10, and the surface formed by EFO is the same as the reflecting surface of the second reflecting member. It shows a vertical plane. Points O ', A, B,
C, D, E and F are each at equal distance from O.
For the sake of explanation, the distance from each of these points and O is set to 1 in the description here.

【００３６】バイモルフ型圧電駆動部材１が駆動したこ
とにより、第２の反射部材１０がθ角度変化したとき、
第２の反射部材１０の反射面の法線がＥＯからＦＯにな
る。これに従い、第２の反射部材１０を反射した反射光
の光軸が、ＢＯ方向からＯＣ方向になる。ところで、Ｏ
ＣとＤＯとが成す角度をθ’とすると、θ’はθより小
さくなる。その理由は図３（ａ）を用いて説明する。入
射する光の光軸ＡＯと第２の反射部材の反射面の法線Ｆ
Ｏのなす角度と、反射した光の光軸ＯＣと法線ＦＯとの
なす角度とは等しい。この入射光軸ＡＯと反射光軸ＯＣ
とをそれぞれＸＹ平面上に写影投射したときのそれぞれ
のＤＯに対する角度は異なってしまう。このことからθ
に比べθ’は小さくなる。When the second reflecting member 10 changes in the θ angle due to the driving of the bimorph type piezoelectric driving member 1,
The normal line of the reflecting surface of the second reflecting member 10 changes from EO to FO. Accordingly, the optical axis of the reflected light reflected by the second reflecting member 10 is from the BO direction to the OC direction. By the way, O
If the angle formed by C and DO is θ ′, θ ′ becomes smaller than θ. The reason will be described with reference to FIG. The optical axis AO of the incident light and the normal F of the reflecting surface of the second reflecting member
The angle formed by O and the angle formed by the optical axis OC of the reflected light and the normal line FO are equal. The incident optical axis AO and the reflected optical axis OC
The angles with respect to the respective DOs when the and are projected onto the XY plane are different. From this, θ
Θ'is smaller than

【００３７】次にθ’の角度をθで表してみる。ところ
で第１の反射部材９によって反射された光が、第２の反
射部材１０への入射する光軸とＸＹ平面との角度をα、
入射光軸と弧Ｏ’Ｂとの交点をＡとし、点Ａと軸ＯＯ’
との距離ｄとすると式（１）の様に表すことが出来る。 ｄ＝ｃｏｓα ・・・（１） 点ＡをＸＹ平面に写影投射し、そのときの線ＤＯと点
Ａ、及び線ＤＯと点Ｃとの距離をｈとすると、式（２）
の様に表すことが出来る。Next, the angle of θ'is represented by θ. By the way, the angle of the light reflected by the first reflecting member 9 between the optical axis incident on the second reflecting member 10 and the XY plane is α,
Let A be the intersection of the incident optical axis and the arc O'B, and let point A and the axis OO '.
It can be expressed as in Expression (1), where d is the distance between and. d = cos α (1) When the point A is projected by projection onto the XY plane and the distances between the line DO and the point A and the line DO and the point C at that time are h, equation (2)
Can be expressed as

【００３８】 ｈ＝ｓｉｎθ’＝ｄ×ｓｉｎθ ・・・（２） 次に式（１）を式（２）に代入すると式（３）の様にな
る。 ｓｉｎθ’＝ｃｏｓα×ｓｉｎθ ・・・（３） ところで、バイモルフ型圧電駆動部材１の中点における
角度変化は、非常に小さいのでｓｉｎθ＝θ、ｓｉｎ
θ’＝θ’と置き換えると、 θ’＝θ×ｃｏｓα ・・・（４） となる。第１の反射部材９の位置と試料面からの距離
と、第２の反射部材１０の位置と試料面からの距離と
は、第１の反射部材９へ入射させる光軸を第２の反射部
材１０へ近づけることで近づけることが出来るので、α
を１０度程度とすることができる。ここでαを１０度と
代入すると、式（５）の様に表すことが出来る。H = sin θ ′ = d × sin θ (2) Next, when Expression (1) is substituted into Expression (2), Expression (3) is obtained. sin θ ′ = cos α × sin θ (3) By the way, since the angle change at the midpoint of the bimorph type piezoelectric drive member 1 is very small, sin θ = θ, sin
When θ ′ = θ ′ is replaced, θ ′ = θ × cos α (4) The position of the first reflecting member 9 and the distance from the sample surface, and the position of the second reflecting member 10 and the distance from the sample surface are such that the optical axis incident on the first reflecting member 9 is the second reflecting member. Since it can be approached by approaching 10, α
Can be about 10 degrees. Here, if α is substituted with 10 degrees, it can be expressed as in Expression (5).

【００３９】θ’＝０．９８θ ・・・（５） この式（５）からわかるように第２の反射部材における
入射光軸と反射光軸のＸＹ平面への写影投射したときの
角度は、１．９７θとなりほぼ２θに近似した角度とな
る。よって、第１の反射部材９からの反射光を第２の反
射部材１０へ照射し、第２の反射部材１０からの反射光
を第３の反射部材１１へ照射するときに、バイモルフ型
圧電駆動部材１が撓んで変位した場合に、微妙な光軸の
ズレが起きるが、至って微小な誤差のためカンチレバー
の撓み量を検出には、影響が少ない。Θ ′ = 0.98θ (5) As can be seen from the equation (5), the angle when the incident optical axis and the reflected optical axis of the second reflecting member are projected onto the XY plane by projection. The angle is 1.97θ, which is an angle close to 2θ. Therefore, when the reflected light from the first reflecting member 9 is applied to the second reflecting member 10 and the reflected light from the second reflecting member 10 is applied to the third reflecting member 11, a bimorph type piezoelectric drive When the member 1 bends and is displaced, a slight deviation of the optical axis occurs, but it is very insignificant in detecting the bending amount of the cantilever due to a very small error.

【００４０】その影響を減らしたい場合には、光軸のズ
レはバイモルフ型圧電駆動部材１の撓み量に比例して、
光軸のズレの大きさが決まるため、ピエゾ駆動回路４４
からバイモルフ型圧電駆動部材１の撓み量に関する信号
をＣＰＵ４３に入力し、その信号をもとにしてＣＰＵ４
３でカンチレバーの撓み量に関するデーターに補正をす
ればよい。In order to reduce the influence, the deviation of the optical axis is proportional to the bending amount of the bimorph type piezoelectric driving member 1,
Since the size of the deviation of the optical axis is determined, the piezo drive circuit 44
To the CPU 43, based on which signal is input to the CPU 43.
The data regarding the amount of deflection of the cantilever may be corrected in step 3.

【００４１】以上のとおり説明をした実施例１の原子間
力顕微鏡は、探針３の近傍には第３の反射部材１１しか
ないため、光学顕微鏡の対物レンズ５１を図５の様に配
置できる。この様にすることで、狭い範囲で微小な試料
表面を実施例１の原子間力顕微鏡で観察しながら、広範
囲を光学顕微鏡で同時に観察することができ、原子間力
顕微鏡で観察した対象を光学顕微鏡で見ながら、使用者
がすばやく原子間力顕微鏡の探針３を所定の位置に移動
させることが出来る。Since the atomic force microscope of the first embodiment described above has only the third reflecting member 11 in the vicinity of the probe 3, the objective lens 51 of the optical microscope can be arranged as shown in FIG. . By doing so, it is possible to simultaneously observe a wide range with an optical microscope while observing a minute sample surface in a narrow range with the atomic force microscope of Example 1, and to observe the object observed with the atomic force microscope. The user can quickly move the probe 3 of the atomic force microscope to a predetermined position while observing with a microscope.

【００４２】（実施例２）本発明に係る実施例２を図６
に示す。この原子間力顕微鏡は、実施例１のバイモルフ
型圧電駆動部材１及びＺ方向用圧電駆動部材２の代わり
にチューブ型圧電駆動部材６１を設けた。また、支持基
板４の代わりに支持基板６３、６４とを設けた。この支
持基板６３には、実施例１と同じレーザー光源５、コリ
ーメーターレンズ６、偏光ビームスプリッター７、λ／
４板８が設けられている。また、更にチューブ型圧電駆
動部材６１が固定されている。そして、レーザー光源５
からの光を第１の反射部材９に照射する第４の反射部材
６２を有している。この第４の反射部材６２は、レーザ
ー光源５からの光を第１の反射部材９に照射させるだけ
のものであるので、レーザー光源５からの光を直接、第
１の反射部材９に照射できるように配置すれば、設けな
くとも構わない。(Second Embodiment) FIG. 6 shows a second embodiment according to the present invention.
Shown in In this atomic force microscope, a tube type piezoelectric driving member 61 was provided instead of the bimorph type piezoelectric driving member 1 and the Z direction piezoelectric driving member 2 of the first embodiment. Further, instead of the support substrate 4, support substrates 63 and 64 are provided. The same laser light source 5, collimator lens 6, polarization beam splitter 7, and λ /
Four plates 8 are provided. Further, the tube-type piezoelectric drive member 61 is further fixed. And the laser light source 5
It has a fourth reflecting member 62 for irradiating the first reflecting member 9 with light from. Since the fourth reflecting member 62 only irradiates the first reflecting member 9 with the light from the laser light source 5, it is possible to directly irradiate the first reflecting member 9 with the light from the laser light source 5. If it arranges like this, it does not need to be provided.

【００４３】また、支持基板６４と支持基板６３とは、
脱着可能になっている。そのほか実施例１と同じ符号を
付した部材は、実施例１と同じ部材であるので説明を省
略する。ところで、このチューブ型圧電駆動部材６１
は、円筒上の圧電体に、内側全面に電極を設け、更に外
側に複数の電極を設けたものであり、内側に設けた電極
と外側に設けた電極とに電圧を印加し、内側に対して外
側に設けられたそれぞれの電極に任意の電圧を印加する
ことで任意の位置に探針３を移動させることが出来る。
試料面に対し平行に探針３を移動させる場合、このチュ
ーブ型圧電駆動部材６１をバイモルフ型圧電駆動部材１
と同様に撓みを生じさせて探針３を移動させるので、実
施例１と同じ方法でレーザー光源５からの光をカンチレ
バー３１に照射することが出来る。The support substrate 64 and the support substrate 63 are
It is removable. In addition, the members denoted by the same reference numerals as those in the first embodiment are the same members as those in the first embodiment, and the description thereof will be omitted. By the way, this tube-type piezoelectric drive member 61
Is a cylindrical piezoelectric body provided with electrodes on the entire inner surface and further provided with a plurality of electrodes on the outer side. Voltage is applied to the electrode provided on the inner side and the electrode provided on the outer side, and The probe 3 can be moved to an arbitrary position by applying an arbitrary voltage to each electrode provided on the outer side.
When the probe 3 is moved parallel to the sample surface, the tube type piezoelectric driving member 61 is replaced with the bimorph type piezoelectric driving member 1.
Since the probe 3 is moved by causing the bending similarly to, the cantilever 31 can be irradiated with the light from the laser light source 5 by the same method as in the first embodiment.

【００４４】この実施例２では、レーザー光源５からの
光は、偏光ビームスプリッター７、λ／４板を経て、第
４の反射部材６２に反射されて、第１の反射部材９に入
射する。そこで、第１の反射部材９を反射した光は、チ
ューブ型圧電駆動部材６１が駆動すると反射面の角度が
変化する第２の反射部材１０に照射し、反射されてカン
チレバー３１に照射される。そして、カンチレバー３１
を反射した反射光は、再び第２の反射部材１０に到達し
て、第１の反射部材９へ反射される。そして、第１の反
射部材９、第４の反射部材６２、λ／４板８を経て、偏
光ビームスプリッター７を透過し４分割ポジションセン
サーフォトダイオード１２に到達する。このとき、カン
チレバー３１の撓み量が変化していれば、４分割ポジシ
ョンセンサーフォトダイオード１２上の光スポットの位
置が変化し、そのときの４分割ポジションセンサーフォ
トダイオード１２のそれぞれの受光面からの電流を検出
してカンチレバーの撓み量を検出することが出来る。こ
の様に実施例２で挙げたチューブ型圧電駆動部材６１よ
うな一つの圧電駆動部材で３次元的に駆動できる部材を
用いれば、第３の反射部材を設けることなくカンチレバ
ー３１に光源からの光を照射することが出来、かつ反射
光を４分割ポジションセンサーフォトダイオード１２ま
で導くことが出来る。 （実施例３）次に本発明に係る実施例３の原子間力顕微
鏡について説明する。In the second embodiment, the light from the laser light source 5 passes through the polarization beam splitter 7 and the λ / 4 plate, is reflected by the fourth reflecting member 62, and enters the first reflecting member 9. Therefore, the light reflected by the first reflecting member 9 is applied to the second reflecting member 10 in which the angle of the reflecting surface changes when the tube-type piezoelectric driving member 61 is driven, and is reflected and applied to the cantilever 31. And the cantilever 31
The reflected light reflected by reaches the second reflecting member 10 again and is reflected by the first reflecting member 9. Then, the light passes through the polarization beam splitter 7 through the first reflecting member 9, the fourth reflecting member 62, and the λ / 4 plate 8 and reaches the four-division position sensor photodiode 12. At this time, if the deflection amount of the cantilever 31 is changed, the position of the light spot on the 4-division position sensor photodiode 12 is changed, and the current from each light-receiving surface of the 4-division position sensor photodiode 12 at that time is changed. Can be detected to detect the bending amount of the cantilever. In this way, if a member that can be three-dimensionally driven by one piezoelectric driving member such as the tube-type piezoelectric driving member 61 described in the second embodiment is used, the light from the light source can be provided to the cantilever 31 without providing the third reflecting member. Can be emitted, and the reflected light can be guided to the 4-division position sensor photodiode 12. (Embodiment 3) Next, an atomic force microscope according to Embodiment 3 of the present invention will be described.

【００４５】図７に示したものは、実施例３の原子間力
顕微鏡の斜視構成図である。実施例３では、実施例１で
のバイモルフ型圧電駆動部材１の代わりに一端が支持基
板４に固定されていて、試料面と平行な平面におけるＸ
方向に伸縮可能なＸ方向用圧電駆動部材７１と、両端に
ヒンジ７４ａ、７４ｂを設け、Ｘ方向とは垂直な方向で
試料面と平行に伸縮可能なＹ方向用圧電駆動部材７２と
を設けた。そして、ヒンジ７４ｂは、屈曲しないブロッ
ク部分を有している。このＸ方向用圧電駆動部材７１の
他端はヒンジ７４ｂのブロック部分に固定されていて、
Ｙ方向用圧電駆動部材７２が伸縮すると、Ｘ方向用圧電
駆動部材が撓む様になっている。また、Ｘ方向用圧電駆
動部材７１が伸縮したときは、ヒンジ７４ａ、ヒンジ７
４ｂが屈曲することで、Ｙ方向用圧電駆動部材７２は屈
曲しないようになっている。FIG. 7 is a perspective view of the atomic force microscope of the third embodiment. In Example 3, one end is fixed to the support substrate 4 instead of the bimorph type piezoelectric driving member 1 in Example 1, and X in a plane parallel to the sample surface.
A piezoelectric driving member 71 for the X direction, which is expandable / contractible in the direction, and hinges 74a, 74b are provided at both ends, and a piezoelectric driving member 72 for the Y direction, which is expandable / contractible in a direction perpendicular to the X direction and parallel to the sample surface, is provided. . The hinge 74b has a block portion that does not bend. The other end of the X-direction piezoelectric drive member 71 is fixed to the block portion of the hinge 74b,
When the Y-direction piezoelectric drive member 72 expands and contracts, the X-direction piezoelectric drive member bends. When the X-direction piezoelectric drive member 71 expands and contracts, the hinge 74a, the hinge 7
By bending 4b, the Y-direction piezoelectric drive member 72 is prevented from bending.

【００４６】ところで、ヒンジ７４ｂのブロック部分に
は、試料面に対し垂直に伸縮することが出来るＺ方向用
圧電駆動部材７３を設けている。また、Ｚ方向用圧電駆
動部材７３の試料面側の一端には、探針３が設けられて
いる。これらＸ方向用圧電駆動部材７１とＹ方向用圧電
駆動部材７２とＺ方向用圧電駆動部材７３とで、探針３
を任意の位置に移動させることが出来る。By the way, the block portion of the hinge 74b is provided with a Z-direction piezoelectric drive member 73 capable of expanding and contracting perpendicularly to the sample surface. The probe 3 is provided at one end of the Z-direction piezoelectric drive member 73 on the sample surface side. The X-direction piezoelectric drive member 71, the Y-direction piezoelectric drive member 72, and the Z-direction piezoelectric drive member 73 make up the probe 3
Can be moved to any position.

【００４７】そして、Ｘ方向用圧電駆動部材７１の長手
方向の中間位置には、第２の反射部材１０が設けられて
おり、また、第３の反射部材１１は、ヒンジ７４ｂのブ
ロック部分に設けられている。そして、第１の反射部材
９は、実施例１と同様なころに取り付けられている。と
ころで、レーザー光源５からカンチレバー３１に光が入
射する経路およびカンチレバー３１の反射光が４分割ポ
ジションセンサーフォトダイオード１２に反射光が入射
する経路は、実施例１と同じである。よってここでの説
明は省略する。また、実施例１と同一な符号を付された
部材は、実施例１と同じものなので説明を省略する。The second reflecting member 10 is provided at an intermediate position in the longitudinal direction of the X-direction piezoelectric driving member 71, and the third reflecting member 11 is provided in the block portion of the hinge 74b. Has been. The first reflecting member 9 is attached to the same rollers as in the first embodiment. By the way, the path through which light is incident from the laser light source 5 onto the cantilever 31 and the path through which reflected light from the cantilever 31 is reflected through the four-division position sensor photodiode 12 are the same as in the first embodiment. Therefore, the description here is omitted. Further, the members designated by the same reference numerals as those in the first embodiment are the same as those in the first embodiment, and the description thereof will be omitted.

【００４８】ところで、実施例３におけるＸ方向用圧電
駆動部材７１に発生する撓み方は、自由端に集中荷重す
る片持ち梁の撓み方である。よって、図８を参考にして
説明すると、片持ち梁の長さをｋ、自由端に作用する集
中荷重をＰ、自由端からの距離ｘにおける、梁の傾きを
νとすると式（６）として表される。By the way, the bending method that occurs in the X-direction piezoelectric drive member 71 in the third embodiment is the bending method of the cantilever beam that applies concentrated load to the free end. Therefore, referring to FIG. 8, assuming that the length of the cantilever beam is k, the concentrated load acting on the free end is P, and the inclination of the beam at the distance x from the free end is ν, Equation (6) is obtained. expressed.

【００４９】[0049]

【数１】 [Equation 1]

【００５０】次に梁の自由端の傾きと梁の中心の傾きと
を比較するため、式（６）にｘ＝０とｘ＝１／２を代入
し、比率を算出すると、梁の自由端の傾き：梁の中心の
傾き＝４：３となる。このことから、Ｘ方向用圧電駆動
部材７１の中央に設けられた第２の反射部材の角度変化
が実施例１の第２の反射部材の起こす角度変化に比べて
大きくなることがわかる。そこで、式（４）から、第２
の反射部材に入射するＸＹ平面との角度αを調整するこ
とで第２の反射部材１０で反射される角度θ’を小さく
させる。実施例３でも、実施例１、２と同様に第２の反
射部材１６によって反射された光の角度を自由端の振れ
た角度の１／２にしなければならない。そのようにする
ため、第２の反射部材１０にによって反射される光の角
度θ’を（２／３）θにすればよいので、式（３）よ
り、α＝４８．２度の角度にすればよい。この様にし
て、第２の反射部材に入射する角度を４８．２度になる
ように第１の反射部材の位置および角度を調整すること
によって探針を走査中でも常にカンチレバーに光が照射
されるようになる。Next, in order to compare the inclination of the free end of the beam with the inclination of the center of the beam, by substituting x = 0 and x = 1/2 into the equation (6) and calculating the ratio, the free end of the beam is calculated. Inclination: inclination of the center of the beam = 4: 3. From this, it is understood that the angle change of the second reflecting member provided in the center of the X-direction piezoelectric drive member 71 is larger than the angle change caused by the second reflecting member of the first embodiment. Therefore, from equation (4), the second
The angle θ ′ reflected by the second reflecting member 10 is reduced by adjusting the angle α with respect to the XY plane incident on the reflecting member. Also in the third embodiment, the angle of the light reflected by the second reflecting member 16 must be set to 1/2 of the swing angle of the free end, as in the first and second embodiments. In order to do so, the angle θ ′ of the light reflected by the second reflecting member 10 may be set to (2/3) θ. Therefore, according to the equation (3), α = 48.2 degrees. do it. In this way, by adjusting the position and angle of the first reflecting member so that the angle of incidence on the second reflecting member is 48.2 degrees, the cantilever is always irradiated with light even while scanning the probe. Like

【００５１】（実施例４）図９に示した図は、本発明に
係る実施例４の原子間力顕微鏡についての斜視構成図で
ある。実施例１で挙げられた符号と同じ符号のものは、
実施例１と同じものなので、ここでの説明は省略する。(Embodiment 4) FIG. 9 is a perspective constitutional view of an atomic force microscope of Embodiment 4 according to the present invention. The same reference numerals as those used in Example 1 are
Since it is the same as that of the first embodiment, the description thereof is omitted here.

【００５２】実施例４では、実施例１でのバイモルフ型
圧電駆動部材１の代わりに、Ｘ方向に複数の圧電体を積
層し、Ｘ方向にのみ伸縮可能なＸ方向用圧電駆動部材９
１と、Ｙ方向に複数の圧電体を積層し、Ｙ方向にのみ伸
縮可能なＹ方向用圧電駆動部材９２とを設けた。Ｘ方向
用圧電駆動部材９１は、一端がヒンジ９４ａを介して支
持基板４に固定されている。そして、Ｘ方向用圧電駆動
部材９１の他端には、ブロック９６が固定されている。
また、Ｙ方向用圧電駆動部材９２は、一端がヒンジ９４
ｂを介して支持基板４に固定されており、他端がヒンジ
９４ｃを介してブロック９６に固定されている。この様
にＸ方向用圧電駆動部材９１とＹ方向用圧電駆動部材９
２とはヒンジ９４ｃとブロック９６とを介して互いに直
角に取り付けられている。In the fourth embodiment, instead of the bimorph type piezoelectric driving member 1 of the first embodiment, a plurality of piezoelectric bodies are laminated in the X direction, and the X direction piezoelectric driving member 9 is expandable only in the X direction.
1 and a piezoelectric driving member 92 for Y direction, which is formed by stacking a plurality of piezoelectric bodies in the Y direction and is expandable and contractible only in the Y direction. One end of the X-direction piezoelectric drive member 91 is fixed to the support substrate 4 via a hinge 94a. A block 96 is fixed to the other end of the X-direction piezoelectric drive member 91.
The Y-direction piezoelectric drive member 92 has a hinge 94 at one end.
It is fixed to the support substrate 4 via b, and the other end is fixed to the block 96 via a hinge 94c. In this way, the X-direction piezoelectric drive member 91 and the Y-direction piezoelectric drive member 9
2 are attached at right angles to each other via a hinge 94c and a block 96.

【００５３】ところで、ヒンジ９４ａ、９４ｂ、９４ｃ
は、Ｘ方向とＹ方向とを含むＸＹ平面に対して屈曲可能
な部材であり、Ｘ方向用圧電駆動部材９１またはＹ方向
用圧電駆動部材９２が駆動して変位することで、これら
のヒンジ９４が屈曲する。よって、実施例４ではＸ方向
用圧電駆動部材９１及びＹ方向用圧電駆動部材９２が変
位しても、撓むことが無い。この様にすることでＸ方向
用圧電駆動部材９１及びＹ方向用圧電駆動部材９２に応
力が掛からなくなるため、各圧電駆動部材が割れるとい
った問題が解消されるようになった。By the way, the hinges 94a, 94b, 94c
Is a member that is bendable with respect to the XY plane including the X direction and the Y direction, and the hinge 94 is formed by driving and displacing the X direction piezoelectric driving member 91 or the Y direction piezoelectric driving member 92. Bends. Therefore, in Example 4, even if the X-direction piezoelectric drive member 91 and the Y-direction piezoelectric drive member 92 are displaced, they do not bend. By doing so, stress is not applied to the X-direction piezoelectric drive member 91 and the Y-direction piezoelectric drive member 92, so that the problem that each piezoelectric drive member is cracked has been solved.

【００５４】ところで、ブロック９６には、支持体で支
持された反射面を有した第３の反射部材１１が固定され
ている。また、ブロック９６には、試料面に対して垂直
な方向に伸縮可能なＺ方向用圧電駆動部材９３が取り付
けられている。また、このＺ方向用圧電駆動部材９３の
試料面側の一端には探針３が設けられている。また、Ｘ
方向用圧電駆動部材９１には、レーザー光源５から発し
第１の反射部材９によって反射された光を第３の反射部
材１１へ反射するための部材である第２の反射部材９５
を設けている。この第２の反射部材９５は、ヒンジ９４
ａの屈曲する中心から第２の反射部材９５までの距離
と、第２の反射部材９５から第３の反射部材１１を経て
カンチレバー３１までの距離とが同じになる位置に反射
面を有するよう固定しており、この位置でレーザー光か
らの光を反射している。By the way, a third reflecting member 11 having a reflecting surface supported by a support is fixed to the block 96. Further, a Z-direction piezoelectric drive member 93 that can expand and contract in a direction perpendicular to the sample surface is attached to the block 96. The probe 3 is provided at one end of the Z-direction piezoelectric drive member 93 on the sample surface side. Also, X
The directional piezoelectric driving member 91 has a second reflecting member 95 which is a member for reflecting the light emitted from the laser light source 5 and reflected by the first reflecting member 9 to the third reflecting member 11.
Is provided. The second reflecting member 95 has a hinge 94.
It is fixed so that the distance from the bending center of a to the second reflecting member 95 and the distance from the second reflecting member 95 through the third reflecting member 11 to the cantilever 31 are the same so as to have a reflecting surface. The light from the laser beam is reflected at this position.

【００５５】実施例４におけるカンチレバー撓み量の検
出方法は、実施例１と同じなので省略する。次に、Ｙ方
向用圧電駆動部材９２が駆動した場合、レーザー光源５
から発した光がカンチレバー３１に照射することについ
て説明する。図１０は、Ｙ方向用圧電駆動部材９２が駆
動して変位したとき、Ｘ方向用圧電駆動部材９１がヒン
ジ９４ａを中心に傾いた角度を表した図である。The method of detecting the deflection amount of the cantilever in the fourth embodiment is the same as that in the first embodiment, and will be omitted. Next, when the Y-direction piezoelectric drive member 92 is driven, the laser light source 5
The irradiation of the light emitted from the cantilever 31 will be described. FIG. 10 is a diagram showing an angle at which the X-direction piezoelectric drive member 91 is tilted about the hinge 94a when the Y-direction piezoelectric drive member 92 is driven and displaced.

【００５６】まず、Ｙ方向用圧電駆動部材９２が駆動し
ていないときは、第２の反射部材９５への入射光の光軸
と反射光の光軸は一緒である。次にＹ方向用駆動部材９
２が駆動したときは、第２の反射部材への入射光の光軸
と反射光の光軸は異なる。この様子を図１０（ａ）に示
す。次に図１０（ｂ）では、Ｘ方向用圧電駆動部材９１
が傾いたときの軸をＯ2Ｂ2で表せる。ところで、Ｏ2 は
ヒンジ９４ａの屈曲する中心である。また、Ａ2 は、Ｙ
方向用圧電駆動部材９２が駆動したときの第２の反射部
材９５がレーザー光源からの光を受光する位置である。
Ｂ2 は、Ｙ方向用圧電駆動部材９２が駆動した場合の第
２の反射部材９５から第３の反射部材１１までの距離
と、第３の反射部材１１からカンチレバー３１までの距
離を合わせた距離を直線的に示した場合の位置である。
Ｃ2 は、Ｙ方向用圧電駆動部材９２が変位していないと
きに、第２の反射部材９５がレーザー光源５からの光を
受光する位置である。Ｌ2 は、ヒンジ９４ａの屈曲する
中心Ｏ2 からＣ2 までの距離である。First, when the Y-direction piezoelectric drive member 92 is not driven, the optical axis of the incident light on the second reflecting member 95 and the optical axis of the reflected light are the same. Next, the Y direction drive member 9
When 2 is driven, the optical axis of the incident light on the second reflecting member is different from the optical axis of the reflected light. This state is shown in FIG. Next, in FIG. 10B, the piezoelectric drive member 91 for X direction is used.
The axis when tilted can be expressed by O 2 B 2 . By the way, O 2 is the center of bending of the hinge 94a. A 2 is Y
This is the position where the second reflecting member 95 receives the light from the laser light source when the direction piezoelectric driving member 92 is driven.
B 2 is a distance obtained by combining the distance from the second reflecting member 95 to the third reflecting member 11 and the distance from the third reflecting member 11 to the cantilever 31 when the Y-direction piezoelectric driving member 92 is driven. Is the position when is shown linearly.
C 2 is a position where the second reflecting member 95 receives the light from the laser light source 5 when the Y-direction piezoelectric drive member 92 is not displaced. L 2 is the distance from the center O 2 of bending of the hinge 94a to C 2.

【００５７】Ｙ方向用圧電駆動部材９２が駆動したとき
に、Ｘ方向用圧電駆動部材９１は、Ｏ2 を中心にθ2 傾
くとする。この時の第２の反射部材９５の反射面は、入
射した光軸に対してＡ2Ｃ2の線と同じ傾きを持つ。第２
の反射部材９５もθ2 傾くことになる。この時の第２の
反射部材９５への入射光と反射光の光軸の関係は、２θ
2 となる。よって、第２の反射部材９５によって反射さ
れた光は、Ｂ2 に到達する。その証明は、次の通りであ
る。When the Y-direction piezoelectric drive member 92 is driven, the X-direction piezoelectric drive member 91 is inclined by θ 2 about O 2 . At this time, the reflecting surface of the second reflecting member 95 has the same inclination as the line A 2 C 2 with respect to the incident optical axis. Second
Therefore, the reflecting member 95 is also inclined by θ 2 . At this time, the relationship between the incident light on the second reflecting member 95 and the optical axis of the reflected light is 2θ.
It becomes 2 . Therefore, the light reflected by the second reflecting member 95 reaches B 2 . The proof is as follows.

【００５８】三角形Ｏ2Ａ2Ｃ2 と三角形Ｂ2Ａ2Ｃ2 とに
着眼して、 角Ｏ2Ｃ2Ａ2 と角Ｂ2Ｃ2Ａ2 はそれぞれ同じであ
り、かつ直角である。 Ｏ2Ｃ2との距離とＣ2Ｂ2との距離同じである。 また、三角形Ｏ2Ａ2Ｃ2 のＡ2Ｃ2と三角形Ｂ2Ａ2Ｃ
2 のＡ2Ｃ2とは、共通である。Focusing on the triangle O 2 A 2 C 2 and the triangle B 2 A 2 C 2 , the angles O 2 C 2 A 2 and B 2 C 2 A 2 are respectively the same and at right angles. The distance from O 2 C 2 is the same as the distance from C 2 B 2 . In addition, the triangle A 2 C 2 of O 2 A 2 C 2 and the triangle B 2 A 2 C
2 is common to A 2 C 2 .

【００５９】以上の、、から、三角形Ｏ2Ａ2Ｃ2
と三角形Ｂ2Ａ2Ｃ2 は合同である。そして、三角形Ｏ2
Ａ2Ｃ2 と三角形Ｂ2Ａ2Ｃ2 は線Ａ2Ｃ2に対し線対称で
ある。ここで、レーザー光が第２の反射部材９５の反射
面Ａ2Ｃ2により反射されなければ、レーザー光はＯ2 に
達する。そのＯ2 に達するレーザー光が、反射面Ａ2Ｃ2
により反射されたなら、Ｏ2 の線Ａ2Ｃ2に対し線対称な
点Ｂ2 に反射されるのである。よって、Ｙ方向用圧電駆
動部材９２の変位量がどのくらいでも、第３の反射部材
１１に第２の反射部材９５からの反射光を照射すること
が出来る。From the above, from, the triangle O 2 A 2 C 2
And the triangle B 2 A 2 C 2 are congruent. And the triangle O 2
A 2 C 2 and the triangle B 2 A 2 C 2 are line-symmetric with respect to the line A 2 C 2 . Here, if the laser light is not reflected by the reflecting surface A 2 C 2 of the second reflecting member 95, the laser light reaches O 2 . The laser light reaching the O 2 is reflected by the reflecting surface A 2 C 2
If it is reflected by, it will be reflected at a point B 2 which is line-symmetric with respect to the O 2 line A 2 C 2 . Therefore, no matter how much the Y direction piezoelectric drive member 92 is displaced, the third reflecting member 11 can be irradiated with the reflected light from the second reflecting member 95.

【００６０】ところで、Ｘ方向用圧電駆動部材９１を駆
動した場合については、駆動量が圧電駆動部材９１に比
べ十分に小さいので、第２の反射部材９５は、常にヒン
ジ９４ａの屈曲する中心からカンチレバー３１までの距
離のほぼ中央に位置するため、レーザー光源からの光を
カンチレバー３１に照射することができる。ところで、
実施例４においても、実施例１と同様に第１の反射部材
９から第２の反射部材９５へレーザー光源５からの光を
反射する際、図１０に示すようにＸ方向用圧電駆動部材
９１の伸縮方向に必ずしも平行に入射しない。しかしな
がら、実施例１で図３で用いて説明したとおり、Ｘ方向
用圧電駆動部材９１の軸とは、ほとんど誤差の範囲内で
入射するので問題ない。しかし、この誤差が問題になる
ような場合は、実施例１と同様な方法で誤差を修正でき
る。By the way, when the X-direction piezoelectric drive member 91 is driven, the drive amount is sufficiently smaller than that of the piezoelectric drive member 91, so that the second reflecting member 95 is always cantilevered from the bending center of the hinge 94a. Since it is located almost in the center of the distance to 31, the light from the laser light source can be applied to the cantilever 31. by the way,
Also in the fourth embodiment, when the light from the laser light source 5 is reflected from the first reflecting member 9 to the second reflecting member 95 as in the case of the first embodiment, as shown in FIG. Does not necessarily enter in parallel to the expansion and contraction direction of. However, as described with reference to FIG. 3 in the first embodiment, there is no problem because the light is incident on the axis of the X-direction piezoelectric drive member 91 within a margin of error. However, if this error causes a problem, the error can be corrected by the same method as in the first embodiment.

【００６１】ところで、以上に挙げた実施例について、
第３の反射部材から反射された光の光軸をカンチレバー
の反射面に対して垂直になるよう、第３の反射部材の反
射面を取り付ければ、カンチレバー３１が撓んで変化す
る４分割ポジションセンサーフォトダイオード１２上の
反射光の変化が大きくなり、測定検出感度が高く取れる
ことが出来る。By the way, regarding the above-mentioned examples,
If the reflecting surface of the third reflecting member is attached so that the optical axis of the light reflected from the third reflecting member is perpendicular to the reflecting surface of the cantilever, the cantilever 31 will bend and change. The change of the reflected light on the diode 12 becomes large, and the measurement and detection sensitivity can be made high.

【００６２】ところで、この様に以上に挙げた実施例
１、３、４における原子間力顕微鏡は、圧電駆動部材に
よって支持する原子間力を検出するための部材が、２つ
の反射部材だけであるので、走査する質量を比較的小さ
くすることができ、探針３をＸ方向及びＹ方向のどちら
の方向に対して、高速に走査することが出来る。また、
走査させる質量が小さくなったため、共振周波数を高く
することが出来る。この様に共振周波数を高く出来るこ
とで、振動に対する影響が少なくなり、探針３を走査し
ても分解能を高くすることが出来る。By the way, in the atomic force microscopes of the above-mentioned Examples 1, 3, and 4, the members for detecting the atomic force supported by the piezoelectric driving member are only two reflecting members. Therefore, the mass to be scanned can be made relatively small, and the probe 3 can be scanned at high speed in either the X direction or the Y direction. Also,
Since the mass to be scanned is reduced, the resonance frequency can be increased. Since the resonance frequency can be increased in this way, the influence on vibration is reduced and the resolution can be increased even when the probe 3 is scanned.

【００６３】また、カンチレバー３１へ入射する光およ
びカンチレバー３１から反射された光は、同じ経路を辿
るため、λ／４板８や偏光ビームスプリッター７を第１
の反射部材９とレーザー光源５との間に挿入すること
で、レーザー光源５と４分割ポジションセンサーフォト
ダイオード１２とを近くに配置することができら。よっ
て、以上に挙げた実施例における原子間力顕微鏡は、従
来のものに比べコンパンクトになった。Since the light incident on the cantilever 31 and the light reflected from the cantilever 31 follow the same path, the λ / 4 plate 8 and the polarization beam splitter 7 are first moved.
It is possible to dispose the laser light source 5 and the four-division position sensor photodiode 12 close to each other by inserting them between the reflection member 9 and the laser light source 5. Therefore, the atomic force microscopes in the above-described examples are more compact than the conventional ones.

【００６４】また、以上に挙げた実施例における原子間
力顕微鏡では、探針３の上にレーザー光源や４分割ポジ
ションセンサーフォトダイオードを設けていないため、
光学顕微鏡の対物レンズを探針の直上、直下及び真横に
配置することが出来る。従来の原子間力顕微鏡と比較し
て、以上に挙げた実施例では、探針上にレーザー光源や
４分割ポジションセンサーフォトダイオードを配置する
ことを避けることが出来るため、薄型に出来る。よっ
て、光学顕微鏡にこの原子間力顕微鏡を搭載する際に
は、光学顕微鏡の設計変更や改造が不要であり、既存の
光学顕微鏡の機能を最大限に活用しながら、原子間力顕
微鏡との同時観察を行うことを可能とした。また、原子
間力顕微鏡を狭い範囲内で観察し、同時に広い範囲内を
光学顕微鏡で観察することができるため、顕微鏡として
の利用価値が格段に向上することができる。Further, in the atomic force microscope in the above-mentioned embodiments, since the laser light source and the four-division position sensor photodiode are not provided on the probe 3,
The objective lens of the optical microscope can be arranged just above, just below, and just beside the probe. In comparison with the conventional atomic force microscope, in the above-described embodiments, it is possible to avoid disposing a laser light source or a four-division position sensor photodiode on the probe, so that the probe can be made thin. Therefore, when this atomic force microscope is mounted on an optical microscope, it is not necessary to change the design or modification of the optical microscope. It was possible to make observations. Moreover, since the atomic force microscope can be observed in a narrow range and at the same time a wide range can be observed with an optical microscope, the utility value as a microscope can be significantly improved.

【００６５】ところで、以上に挙げた実施例での第１の
反射部材、第２の反射部材および第３の反射部材は、鏡
でもまたはプリズムでも良い。レーザー光の光軸を変え
られるものであればいっこうに構わない。また、カンチ
レバーからの反射光が十分強いものであれば、λ／４板
と偏光ビームスプリッターの変わりに、ハーフミラーを
用いることでも構わない。By the way, the first reflecting member, the second reflecting member and the third reflecting member in the above-mentioned embodiments may be mirrors or prisms. Anything can be used as long as it can change the optical axis of the laser beam. If the reflected light from the cantilever is sufficiently strong, a half mirror may be used instead of the λ / 4 plate and the polarization beam splitter.

【００６６】[0066]

【発明の効果】本発明では、試料面と平行な平面におい
て変位可能な試料面走査用駆動部材に反射部材を設け、
その設ける位置を試料面走査用駆動部材の変位する部分
の全長に対し、反射部材から試料面走査用駆動部材の変
位する端からの距離が２分の１となる位置に固定するこ
とで、片持ち梁の直上または直下に光源や受光部材を設
けずに片持ち梁の変位量を検出することが出来、かつ、
非常にコンパクトな原子間力顕微鏡が得られるようにな
った。According to the present invention, the reflecting member is provided on the sample surface scanning driving member which is displaceable on a plane parallel to the sample surface,
By fixing the position to be provided to a position where the distance from the reflecting member to the displaced end of the sample surface scanning drive member is ½ of the entire length of the displaced portion of the sample surface scanning drive member, The amount of displacement of the cantilever can be detected without providing a light source or light-receiving member directly above or below the cantilever, and
It became possible to obtain a very compact atomic force microscope.

【００６７】また、光源から片持ち梁へ光を入射する経
路と片持ち梁の反射光を受光部材に入射する経路とが同
じなので、受光部材と光源とを比較的近傍に配置するこ
とが出来るので、この原子間力顕微鏡に必要な空間スペ
ースが少なくて済む様になった。更に、従来の原子間力
顕微鏡に比べ、空間スペースが少ない割には、カンチレ
バーから受光部材までの光路の長さが長いので、その長
さに比例して、受光部材における光スポットの位置の変
化量も大きくなるよって、カンチレバーの撓み量の検出
感度も非常に良くなる。Further, since the path of light incident on the cantilever from the light source and the path of incident light of the cantilever on the light receiving member are the same, the light receiving member and the light source can be arranged relatively close to each other. Therefore, the space required for this atomic force microscope can be reduced. Furthermore, compared to the conventional atomic force microscope, the optical path length from the cantilever to the light-receiving member is long despite the small space space, so the position of the light spot on the light-receiving member changes in proportion to the length. As the amount increases, the sensitivity of detecting the amount of bending of the cantilever also becomes very good.

【図面の簡単な説明】[Brief description of drawings]

【図１】：本発明に係る実施例１の原子間力顕微鏡の斜
視構成図である。FIG. 1 is a perspective configuration diagram of an atomic force microscope according to a first embodiment of the present invention.

【図２】：実施例１におけるバイモルフ型圧電駆動部材
が変位したときの圧電駆動部材の様子と第２の反射部材
によって反射された光の光軸との関係を示した図であ
る。FIG. 2 is a diagram showing a relationship between a state of a piezoelectric driving member when a bimorph type piezoelectric driving member is displaced in Example 1 and an optical axis of light reflected by a second reflecting member.

【図３】：実施例１における第１の反射部材からの反射
光が第２の反射部材に入射し、そして反射されたときの
光の光軸を示した図である。FIG. 3 is a diagram showing an optical axis of light when reflected light from the first reflecting member in Example 1 is incident on and reflected by the second reflecting member.

【図４】：実施例１におけるカンチレバーの撓み量を算
出する構成を示したブロック図である。FIG. 4 is a block diagram showing a configuration for calculating a bending amount of the cantilever in the first embodiment.

【図５】：実施例１における原子間力顕微鏡に光学顕微
鏡の対物レンズを設けたときの図である。5 is a diagram when an objective lens of an optical microscope is provided on the atomic force microscope in Example 1. FIG.

【図６】：本発明に係る実施例２の原子間力顕微鏡の斜
視構成図である。FIG. 6 is a perspective configuration diagram of an atomic force microscope according to a second embodiment of the present invention.

【図７】：本発明に係る実施例３の原子間力顕微鏡の斜
視構成図である。FIG. 7 is a perspective configuration diagram of an atomic force microscope according to a third embodiment of the present invention.

【図８】：実施例３のＸ方向用圧電駆動部材７１に発生
する撓み方の説明図である。FIG. 8 is an explanatory diagram of how to bend the X-direction piezoelectric drive member 71 according to the third embodiment.

【図９】：本発明に係る実施例４の原子間力顕微鏡の斜
視構成図である。FIG. 9 is a perspective configuration diagram of an atomic force microscope of Example 4 according to the present invention.

【図１０】：実施例４についてのＹ方向用圧電駆動部材
が変位したときの圧電駆動部材の様子と第２の反射部材
によって反射された光の光軸との関係を示した図であ
る。FIG. 10 is a diagram showing the relationship between the state of the piezoelectric driving member when the Y direction piezoelectric driving member is displaced and the optical axis of the light reflected by the second reflecting member in the fourth embodiment.

【図１１】：従来の原子間力顕微鏡の構成図である。FIG. 11 is a block diagram of a conventional atomic force microscope.

【図１２】：従来の原子間力顕微鏡の構成図である。FIG. 12 is a configuration diagram of a conventional atomic force microscope.

【符号の説明】[Explanation of symbols]

１ バイモルフ型圧電駆動部材 ２ Ｚ方向用圧電駆動部材 ３ 探針 ３１ カンチレバー ３２ チップ ４、６３、６４ 支持基板 ５ レーザー光源 ６ コリーメートレンズ ７ 偏光ビームスプリッター ８ λ／４板 ９ 第１の反射部材 １０ 第２の反射部材 １１ 第３の反射部材 １２ ４分割ポジションセンサーフォトダイオード １３ マイクロメーター １４ 試料 ５１ 対物レンズ ６１ チューブ型圧電駆動部材 ６２ 第４の反射部材 ７１、９１ Ｘ方向用圧電駆動部材 ７２、９２ Ｙ方向用圧電駆動部材 ７３、９３ Ｚ方向用圧電駆動部材 ７４、９４ ヒンジ ９５ 第２の反射部材 ９６ ブロック １００ 円筒状の圧電体 １０２ 電極 １０３ カンチレバー １０４ チップ １０５ 光源 １０６ 光検出器 DESCRIPTION OF SYMBOLS 1 Bimorph type piezoelectric driving member 2 Z direction piezoelectric driving member 3 Probe 31 Cantilever 32 Chip 4, 63, 64 Support substrate 5 Laser light source 6 Collimate lens 7 Polarization beam splitter 8 λ / 4 plate 9 First reflecting member 10 Second reflection member 11 Third reflection member 12 4-division position sensor photodiode 13 Micrometer 14 Sample 51 Objective lens 61 Tube type piezoelectric drive member 62 Fourth reflection member 71, 91 X direction piezoelectric drive member 72, 92 Piezoelectric drive members for Y direction 73, 93 Piezoelectric drive members for Z direction 74, 94 Hinge 95 Second reflection member 96 Block 100 Cylindrical piezoelectric body 102 Electrode 103 Cantilever 104 Chip 105 Light source 106 Photodetector

Claims (12)

【特許請求の範囲】[Claims] 【請求項１】 試料面に対し平行な平面において変位可
能な試料面走査用駆動部材と、 前記試料面走査用駆動部材の一端に設けられ、先端が尖
ったチップが受ける原子間力に応じて撓み量が変化する
片持ち梁と、 前記片持ち梁に光を照射するための光源と、 前記試料面走査用駆動部材に設けられ、前記試料面走査
用駆動部材の変位する端からの距離が、前記試料面走査
用駆動部材の変位する部分の全長に対し、２分の１とな
る位置に反射面を有した反射部材と、 複数に分割された受光面を有し、前記反射部材によって
反射された前記片持ち梁からの反射光を前記受光面で受
光する受光部材とを備えたことを特徴とする原子間力顕
微鏡。1. A sample surface scanning drive member that is displaceable in a plane parallel to the sample surface, and a tip provided at one end of the sample surface scanning drive member and having a sharp tip depending on the atomic force received by the tip. A cantilever whose deflection amount changes, a light source for irradiating the cantilever with light, and a distance from the displaced end of the sample surface scanning drive member which is provided in the sample surface scanning drive member. , A reflecting member having a reflecting surface at a position that is ½ of the entire length of the displaced portion of the sample surface scanning driving member, and a light receiving surface divided into a plurality of portions, and reflecting by the reflecting member Atomic force microscope, comprising: a light receiving member that receives the reflected light from the cantilever beam on the light receiving surface. 【請求項２】 前記反射部材は、前記光源からの光を前
記片持ち梁に照射し、かつ前記片持ち梁の反射光を前記
受光部材に照射することを特徴とする請求項１記載の原
子間力顕微鏡。2. The atom according to claim 1, wherein the reflecting member irradiates the cantilever with light from the light source, and irradiates the light receiving member with reflected light of the cantilever. Force microscope. 【請求項３】 前記光源と前記反射部材との間に、前記
光源からの光と前記片持ち梁からの反射光とを分割する
分割部材を設けたことを特徴とする請求項２記載の原子
間力顕微鏡。3. The atom according to claim 2, further comprising a dividing member provided between the light source and the reflecting member, for dividing the light from the light source and the reflected light from the cantilever. Force microscope. 【請求項４】 前記光源からの光の光軸に対し不動に固
定され、前記光源からの光を前記反射部材に照射し、か
つ前記反射部材を反射した前記光源からの光を前記受光
部材に照射する光路変換部材を前記光源からの光の光軸
上に設けたことを特徴とする請求項１、２または３記載
の原子間力顕微鏡。4. The light from the light source, which is immovably fixed to the optical axis of the light from the light source, irradiates the light from the light source onto the reflecting member, and reflects the light from the light source onto the light receiving member. The atomic force microscope according to claim 1, wherein an optical path changing member for irradiating is provided on an optical axis of light from the light source. 【請求項５】 試料面に対し垂直な方向であるＺ方向に
伸縮可能なＺ方向用圧電駆動部材を前記試料面走査用駆
動部材の一端に設け、前記Ｚ方向用圧電駆動部材の試料
面側の一端に前記片持ち梁を設けたことを特徴とする請
求項１、２、３または４記載の原子間力顕微鏡。5. A Z-direction piezoelectric drive member that is expandable / contractible in the Z-direction, which is a direction perpendicular to the sample surface, is provided at one end of the sample-surface scanning drive member, and the Z-direction piezoelectric drive member is on the sample surface side. The atomic force microscope according to claim 1, wherein the cantilever is provided at one end of the. 【請求項６】 前記反射部材によって反射された前記光
源からの光を前記片持ち梁に照射し、かつ、前記片持ち
梁からの反射光を前記反射部材に照射する照射部材を前
記試料面走査用駆動部材の一端に設けたことを特徴とす
る請求項１、２、３、４または５記載の原子間力顕微
鏡。6. The sample surface scanning with an irradiation member that irradiates the cantilever with the light from the light source reflected by the reflecting member and irradiates the reflecting member with the light reflected from the cantilever. The atomic force microscope according to claim 1, wherein the atomic force microscope is provided at one end of a driving member for use in a vehicle. 【請求項７】 前記試料面走査用駆動部材は、複数の圧
電体を積層した圧電駆動部材であることを特徴とする請
求項１ないし６記載の原子間力顕微鏡。7. The atomic force microscope according to claim 1, wherein the sample surface scanning drive member is a piezoelectric drive member in which a plurality of piezoelectric bodies are laminated. 【請求項８】 前記試料面走査用駆動部材は、一端が支
持部材に固定され、試料面と平行な方向であるＸ方向に
伸縮可能なＸ方向用圧電駆動部材と、一端が前記支持部
材に固定され、試料面と平行な方向でありかつ前記Ｘ方
向とは異なる方向であるＹ方向に伸縮可能なＹ方向用圧
電駆動部材とからなることを特徴とする請求項１ないし
７記載の原子間力顕微鏡。8. The sample surface scanning drive member has one end fixed to a support member and is expandable / contractible in the X direction parallel to the sample surface, and one end is attached to the support member. 8. An interatomic atom according to claim 1, comprising a Y direction piezoelectric drive member which is fixed and is capable of expanding and contracting in a Y direction which is a direction parallel to the sample surface and different from the X direction. Force microscope. 【請求項９】 支持部材と、 一端が屈曲可能なヒンジを介して前記支持部材に固定さ
れ、試料面と平行な方向であるＸ方向に伸縮可能である
Ｘ方向用圧電駆動部材と、 一端が屈曲可能なヒンジを介して前記支持部材に固定さ
れ、かつ、他端が屈曲可能なヒンジを介して前記Ｘ方向
用圧電駆動部材に固定され、前記試料面と平行な方向で
ありかつＸ方向とは異なる方向であるＹ方向に伸縮可能
なＹ方向用圧電駆動部材と、 前記Ｘ方向用圧電駆動部材の他端に固定され、前記試料
面に対し垂直な方向に伸縮可能なＺ方向用圧電駆動部材
と、 前記Ｚ方向用圧電駆動部材の試料面側の一端に設けら
れ、先端の尖ったチップが受ける原子間力に応じて撓み
量が変化する片持ち梁と、 前記片持ち梁に光を照射するための光源と、 前記Ｘ方向用圧電駆動部材の他端に設けられ、前記光源
からの光を前記片持ち梁に照射するための照射部材と、 前記Ｘ方向用圧電駆動部材に設けられ、前記光源からの
光を前記照射部材に照射する反射部材と、 前記片持ち梁から反射された光を受光し、複数に分割さ
れた受光面を有した受光部材とを備え、 前記反射部材の反射面は、前記Ｘ方向用圧電駆動部材の
一端に設けられた屈曲可能なヒンジの屈曲する中心から
前記反射部材の反射面までの距離と、前記反射部材で反
射された光の光路における前記反射部材の反射面から前
記照射部材を経て前記片持ち梁までの距離とが、等しい
場所に有したことを特徴とする原子間力顕微鏡。9. A support member, an X-direction piezoelectric drive member having one end fixed to the support member via a bendable hinge and expandable and contractable in the X direction parallel to the sample surface, It is fixed to the support member via a bendable hinge, and the other end is fixed to the X-direction piezoelectric drive member via a bendable hinge, and is parallel to the sample surface and in the X-direction. Is a Y direction piezoelectric drive member that can expand and contract in different Y directions, and a Z direction piezoelectric drive that is fixed to the other end of the X direction piezoelectric drive member and that can expand and contract in a direction perpendicular to the sample surface. A member, a cantilever which is provided at one end on the sample surface side of the Z direction piezoelectric drive member, and whose bending amount changes according to an atomic force received by a tip having a pointed tip, and A light source for irradiating, and the X-direction piezoelectric drive unit An irradiation member provided on the other end of the material for irradiating the cantilever with light from the light source, and an X-direction piezoelectric drive member for irradiating the irradiation member with light from the light source. A reflecting member; and a light receiving member that receives light reflected from the cantilever and has a light receiving surface divided into a plurality of portions, wherein the reflecting surface of the reflecting member is one end of the piezoelectric driving member for the X direction. The distance from the bending center of the bendable hinge provided to the reflection surface of the reflection member, and the cantilever from the reflection surface of the reflection member in the optical path of the light reflected by the reflection member through the irradiation member. An atomic force microscope characterized in that the distance to the beam was in the same place. 【請求項１０】 前記反射部材は、前記光源からの光を
前記照射部材へ反射し、かつ、前記照射部材によって照
射された前記光源からの光を前記受光部材に反射するこ
とを特徴とする請求項９記載の原子間力顕微鏡。10. The reflecting member reflects light from the light source to the irradiating member and reflects light from the light source irradiated by the irradiating member to the light receiving member. Item 9. An atomic force microscope according to item 9. 【請求項１１】 前記光源と前記反射部材との間に、前
記光源からの光と前記片持ち梁からの反射光とを分割す
る分割部材を設けたことを特徴とする請求項１０記載の
原子間力顕微鏡。11. The atom according to claim 10, further comprising a dividing member provided between the light source and the reflecting member, for dividing the light from the light source and the reflected light from the cantilever. Force microscope. 【請求項１２】 前記光源と前記反射部材との間に前記
光源からの光軸に対し不動に固定され、前記光源からの
光を前記反射部材に照射し、かつ、前記反射部材によっ
て反射された前記片持ち梁からの反射光を前記受光部材
に照射する光路変換部材を前記光源からの光軸上に設け
たことを特徴とする請求項９、１０または１１記載の原
子間力顕微鏡。12. The light source and the reflecting member are fixedly fixed to an optical axis from the light source, irradiate the reflecting member with the light from the light source, and are reflected by the reflecting member. The atomic force microscope according to claim 9, 10 or 11, wherein an optical path changing member for irradiating the light receiving member with the reflected light from the cantilever is provided on the optical axis from the light source.
JP08362595A 1994-08-11 1995-04-10 Atomic force microscope Expired - Fee Related JP3327041B2 (en)

Priority Applications (3)

Application Number Priority Date Filing Date Title
JP08362595A JP3327041B2 (en) 1995-04-10 1995-04-10 Atomic force microscope
US08/513,650 US5656769A (en) 1994-08-11 1995-08-10 Scanning probe microscope
US08/967,215 US6018991A (en) 1994-08-11 1997-10-28 Scanning probe microscope having cantilever attached to driving member

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP08362595A JP3327041B2 (en) 1995-04-10 1995-04-10 Atomic force microscope

Publications (2)

Publication Number Publication Date
JPH08278316A true JPH08278316A (en) 1996-10-22
JP3327041B2 JP3327041B2 (en) 2002-09-24

Family

ID=13807664

Family Applications (1)

Application Number Title Priority Date Filing Date
JP08362595A Expired - Fee Related JP3327041B2 (en) 1994-08-11 1995-04-10 Atomic force microscope

Country Status (1)

Country Link
JP (1) JP3327041B2 (en)

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP2006023443A (en) * 2004-07-07 2006-01-26 Keyence Corp Microscope system

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP2006023443A (en) * 2004-07-07 2006-01-26 Keyence Corp Microscope system

Also Published As

Publication number Publication date
JP3327041B2 (en) 2002-09-24

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