JPH08222493A - Gas purifier - Google Patents
Gas purifierInfo
- Publication number
- JPH08222493A JPH08222493A JP2423195A JP2423195A JPH08222493A JP H08222493 A JPH08222493 A JP H08222493A JP 2423195 A JP2423195 A JP 2423195A JP 2423195 A JP2423195 A JP 2423195A JP H08222493 A JPH08222493 A JP H08222493A
- Authority
- JP
- Japan
- Prior art keywords
- outflow
- side valve
- inflow
- pipe
- gas
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Pending
Links
Abstract
Description
【０００１】[0001]
【産業上の利用分野】本発明は工業用のガス精製機に係
り、特に液晶パネルや半導体素子、その他の電子素子の
製造工程において用いられる処理ガスを精製するための
ガス精製機に関する。BACKGROUND OF THE INVENTION 1. Field of the Invention The present invention relates to an industrial gas purifier, and more particularly to a gas purifier for purifying a processing gas used in a manufacturing process of liquid crystal panels, semiconductor devices and other electronic devices.
【０００２】[0002]
【従来の技術】液晶パネルや半導体素子、その他の電子
素子等の製造プロセスでは、ガラス基板やウエハの表面
処理工程において各種のガスが用いられる。2. Description of the Related Art Various gases are used in the surface treatment process of glass substrates and wafers in the manufacturing process of liquid crystal panels, semiconductor devices, other electronic devices and the like.
【０００３】上記のガスは、例えばガラス基板や半導体
ウエハの表面処理におけるＣＶＤ、拡散処理、プラズマ
加工、あるいはエッチングなどのプロセスでは、アルゴ
ン、酸素、窒素、水素等のガスが使用される。Gases such as argon, oxygen, nitrogen, and hydrogen are used as the above-mentioned gas in processes such as CVD, diffusion treatment, plasma processing, and etching in the surface treatment of glass substrates and semiconductor wafers.
【０００４】上記のプロセスで使用されるガスは、当該
プロセスを経た後に吸着剤、触媒、フィルタ等を充填し
た精製筒に通して不純物などを除去して回収し、再びプ
ロセスに使用するようにして資源効率を向上し、あるい
は環境への影響を無くしている。そのため、上記した製
造所にはガス精製機が設置されている。After passing through the process, the gas used in the above process is passed through a purification column filled with an adsorbent, a catalyst, a filter, etc. to remove impurities and be recovered, and then used again in the process. Improves resource efficiency or eliminates environmental impact. Therefore, a gas refiner is installed in the above-mentioned manufacturing plant.
【０００５】図４は従来のガス精製機の構成を説明する
模式図であって、１は流入主管、２ａは第１流入分岐
管、２ｂは第２流入分岐管、３ａは第１精製筒、３ｂは
第２精製筒、４ａは第１流出管、４ｂは第２流出管、５
は流出主管、６ａは第１流入側バルブ、６ｂは第２流入
側バルブ、７ａは第１流出側バルブ、７ｂは第２流出側
バルブ、８は計測分岐管、９は計測側バルブ、１０は露
点計である。FIG. 4 is a schematic view for explaining the structure of a conventional gas purifier. 1 is an inflow main pipe, 2a is a first inflow branch pipe, 2b is a second inflow branch pipe, 3a is a first refining pipe, 3b is a second purification tube, 4a is a first outflow pipe, 4b is a second outflow pipe, 5
Is an outflow main pipe, 6a is a first inflow side valve, 6b is a second inflow side valve, 7a is a first outflow side valve, 7b is a second outflow side valve, 8 is a measurement branch pipe, 9 is a measurement side valve, 10 is It is a dew point meter.
【０００６】同図において、ガスを精製する精製筒は第
１精製筒３ａと第２精製筒３ｂの２本からなり、第１流
入側バルブ６ａと第２流入側バルブ６ｂの一方、例えば
第１流入側バルブ６ａと、第１流出側バルブ７ａとを開
いて第１流入分岐管２ａを介して主管１から流入する精
製処理するガスを第１精製筒３ａに通して精製する。こ
のとき、第２流入側バルブ６ｂと第２流出側バルブ７ｂ
は閉じており、第２精製筒３ｂにはガスを通さない。In the figure, a refining cylinder for refining gas is composed of a first refining cylinder 3a and a second refining cylinder 3b. One of the first inflow side valve 6a and the second inflow side valve 6b, for example, the first inflow side valve 6a. The inflow side valve 6a and the first outflow side valve 7a are opened, and the gas to be purified, which flows in from the main pipe 1 through the first inflow branch pipe 2a, is passed through the first purification cylinder 3a to be purified. At this time, the second inflow side valve 6b and the second outflow side valve 7b
Is closed, and gas is not passed through the second refining cylinder 3b.
【０００７】第１精製筒３ａで精製されたガスは第１流
出管４ａから流出主管５を通って製造プロセス、または
貯蔵手段に渡される。The gas purified in the first purification column 3a is passed from the first outflow pipe 4a through the outflow main pipe 5 to the manufacturing process or storage means.
【０００８】原料ガスを通さない側の精製筒、ここでは
第２精製筒３ｂはその吸着剤、触媒あるいはフィルタの
交換等を行う再生処理を施す。The refining cylinder on the side where the raw material gas does not pass, here the second refining cylinder 3b, is subjected to a regeneration process such as replacement of its adsorbent, catalyst or filter.
【０００９】また、精製されたガスの純度監視は、ガス
の純度がその露点と相関関係を有することを利用して、
流出主管５に設置した計測分岐管８に計測側バルブ９を
介して取りつけた露点計１０により行われる。The purity of the purified gas is monitored by utilizing the fact that the purity of the gas has a correlation with its dew point.
This is performed by a dew point meter 10 attached to a measurement branch pipe 8 installed in the outflow main pipe 5 via a measurement side valve 9.
【００１０】図５は従来の精製筒切換タイミングの説明
図であって、図４における２本の精製筒を交互に使用し
て、一方を使用中に他方の再生処理を行う行う場合の両
精製筒の稼働時間と再生のための休止時間例を説明する
ものである。FIG. 5 is an explanatory view of the conventional purification cylinder switching timing, in which two purification cylinders in FIG. 4 are alternately used and one purification process is performed while the other purification process is performed. An example of an operating time of a cylinder and a pause time for regeneration will be described.
【００１１】図示したように、第１，第２精製筒３，３
ｂは、その稼働時間を１２時間としており、第１精製筒
３ａを１２時間使用した時点で第２精製筒３ｂに切換
え、第２精製筒３ｂの稼働中に第１精製筒３ａに再生処
理を施すようにしている。As shown, the first and second purification tubes 3 and 3
The operating time of b is 12 hours, the first refining cylinder 3a is switched to the second refining cylinder 3b when the first refining cylinder 3a is used for 12 hours, and the regeneration processing is performed on the first refining cylinder 3a during the operation of the second refining cylinder 3b. I am trying to give it.
【００１２】このように２本の精製筒を交互に切換え使
用することにより、ガス精製処理プロセスを停止させる
ことなく、精製ガスを生産装置に供給できる。By alternately using the two refining cylinders in this manner, the refined gas can be supplied to the production apparatus without stopping the gas refining process.
【００１３】１本の精製筒を何時間稼働させるかは精製
する対象ガスの種類と流量に従って精製純度が許容値以
下とならないように安全を考慮した時間とするが、ここ
では汎用されている精製筒を用いた場合について上記の
ような稼働時間を設定した例で説明する。The number of hours for which one purifying cylinder is operated depends on the type and flow rate of the target gas to be refined and is a time considering safety so that the purifying purity does not fall below an allowable value. The case where a cylinder is used will be described with an example in which the above operating time is set.
【００１４】なお、この種のガス精製機は当該技術分野
では周知であるので、改めて文献は挙げない。Since this type of gas purifier is well known in the art, no reference is made to it.
【００１５】[0015]
【発明が解決しようとする課題】上記従来の技術におい
ては、使用するガス精製筒の稼働時間は最大ガス処理量
に安全率を加味し、また瞬時最大流量にも対処できるよ
うに、最大使用量の１．５〜２．０倍程度の処理能力が
残っている時点に交換時期を設定して切換えている。In the above-mentioned conventional technique, the operating time of the gas refining cylinder to be used is such that the maximum gas treatment amount takes into consideration the safety factor and the instantaneous maximum flow rate can be dealt with. The replacement time is set and switched at the time when a processing capacity of about 1.5 to 2.0 times the remaining capacity remains.
【００１６】精製筒の再生は、休止した精製筒を図示し
ない再生装置側の配管システムに組入れて再生処理流体
を通すことによって、その吸着剤、触媒あるいはフィル
タを初期状態に回復させる。In the regeneration of the refining cylinder, the adsorbent, the catalyst or the filter is restored to the initial state by incorporating the stopped refining cylinder into the piping system of the regenerator (not shown) and passing the regeneration treatment fluid.
【００１７】上記再生装置における再生処理流体の流通
には電力が使用される。したがって、精製筒に処理能力
が残っているものを時間で切換えることによる電力の無
駄があり、長期間にわたるこの無駄な電力の積算量は無
視できない程のものとなり、省エネルギーの観点から極
めて大きな問題となっていると共に、頻繁な切換えに要
する作業量の多くなり、結果として製品のコストを押し
上げるという問題もあった。Electric power is used to circulate the regeneration treatment fluid in the regeneration device. Therefore, there is a waste of electric power due to the switching of the purifying cylinder with remaining processing capacity in time, and the accumulated amount of this unnecessary electric power over a long period cannot be ignored, which is an extremely serious problem from the viewpoint of energy saving. In addition, the amount of work required for frequent switching increases, resulting in an increase in product cost.
【００１８】本発明の目的は、上記従来技術の諸問題を
解消し、精製筒の能力を最大限に使用して再生に要する
電力を低減し、切換えに要する作業量を節約したガス精
製機を提供することにある。An object of the present invention is to solve the above-mentioned problems of the prior art, reduce the electric power required for regeneration by maximizing the capacity of the refining cylinder, and save the work required for switching. To provide.
【００１９】[0019]
【課題を解決するための手段】上記目的を達成するため
に、請求項１に記載の第１の発明は、第１精製筒３ａと
第２精製筒３ｂとを交互に使用して原料ガスを精製する
ガス精製機において、原料ガスを導入する流入主管１か
ら流入する原料ガスを前記第１精製筒３ａと第２精製筒
３ｂの何れかに供給する第１流入分岐管２ａおよび第２
流入分岐管２ｂと、前記第１精製筒３ａと第２精製筒３
ｂからの精製ガスをそれぞれ流出させる第１流出管４ａ
および第２流出管４ｂと、前記第１流出管４ａおよび第
２流出管４ｂの何れかからの精製ガスを流出させる流出
主管５と、前記第１流入分岐管２ａおよび第２流入分岐
管２ｂのそれぞれに設置した第１流入側バルブ６ａおよ
び第２流入側バルブ６ｂと、前記第１流出管４ａおよび
第２流出管４ｂのそれぞれに設置した第１流出側バルブ
７ａおよび第２流出側バルブ７ｂと、前記流入主管１に
流入する原料ガスの流量を積算する積算流量計１１とを
備え、前記積算流量計の積算流量に応じて前記第１精製
筒３ａと第２精製筒３ｂを切り換えることを特徴とす
る。In order to achieve the above object, the first invention according to claim 1 uses the source gas by alternately using the first refining cylinder 3a and the second refining cylinder 3b. In a gas purifier for refining, a first inflow branch pipe 2a and a second inflow branch pipe 2a for supplying a raw material gas flowing in from a main gas introduction pipe 1 for introducing a raw material gas to either the first refining cylinder 3a or the second purifying cylinder 3b
Inflow branch pipe 2b, first refining cylinder 3a and second refining cylinder 3
First outflow pipe 4a for respectively flowing out the purified gas from b
And a second outflow pipe 4b, an outflow main pipe 5 for outflowing the purified gas from any of the first outflow pipe 4a and the second outflow pipe 4b, and the first inflow branch pipe 2a and the second inflow branch pipe 2b. A first inflow-side valve 6a and a second inflow-side valve 6b respectively installed, and a first outflow-side valve 7a and a second outflow-side valve 7b respectively installed in the first outflow pipe 4a and the second outflow pipe 4b, respectively. And an integrating flow meter 11 for integrating the flow rate of the raw material gas flowing into the inflow main pipe 1, and switching between the first refining cylinder 3a and the second refining cylinder 3b according to the integrated flow rate of the cumulative flow meter. And
【００２０】また、請求項２に記載の第２の発明は、前
記流出主管５に計測分岐管８と計測側バルブ９を介して
露点計１０を備え、前記露点計によりガス精製純度を監
視することを特徴とする。In a second aspect of the present invention, the outflow main pipe 5 is provided with a dew point meter 10 via a measurement branch pipe 8 and a measurement side valve 9, and the gas purification purity is monitored by the dew point meter. It is characterized by
【００２１】さらに、請求項３に記載の第３の発明は、
前記積算流量計１１の算出量を電気信号に変換して出力
する積算流量信号発生器１４と、前記積算流量信号発生
器１４からの電気信号に基づいて前記第１精製筒３ａと
第２精製筒３ｂの切換時期を表示する切換表示装置１５
とを備え、前記切換表示装置１５の表示に従って前記第
１精製筒３ａと第２精製筒３ｂの切換えを行うことを特
徴とする。Further, a third invention according to claim 3 is
An integrated flow rate signal generator 14 that converts the calculated amount of the integrated flow meter 11 into an electric signal and outputs the electric signal, and the first purification cylinder 3a and the second purification cylinder based on the electric signal from the integrated flow rate signal generator 14. Switching display device 15 for displaying switching timing of 3b
And switching between the first refining cylinder 3a and the second refining cylinder 3b according to the display of the switching display device 15.
【００２２】そして、請求項４に記載の第４の発明は、
第１精製筒３ａと、第２精製筒３ｂとを交互に使用して
原料ガスを精製するガス精製機において、原料ガスを導
入する流入主管１から流入する原料ガスを前記第１精製
筒３ａと第２精製筒３ｂの何れかに供給する第１流入分
岐管２ａおよび第２流入分岐管２ｂと、前記第１精製筒
３ａと第２精製筒３ｂからの精製ガスをそれぞれ流出さ
せる第１流出管４ａおよび第２流出管４ｂと、前記第１
流出管４ａおよび第２流出管４ｂの何れかからの精製ガ
スを流出させる流出主管５と、前記第１流入分岐管２ａ
および第２流入分岐管２ｂのそれぞれに設置した第１流
入側バルブ６ａおよび第２流入側バルブ６ｂと、前記第
１流出管４ａおよび第２流出管４ｂのそれぞれに設置し
た第１流出側バルブ７ａおよび第２流出側バルブ７ｂ
と、前記第１流入側バルブ６ａおよび第２流入側バルブ
６ｂをそれぞれ自動開閉する第１流入側バルブ開閉装置
１２ａおよび第２流入側バルブ開閉装置１２ｂと、前記
第１流出側バルブ７ａおよび第２流出側バルブ７ｂをそ
れぞれ自動開閉する第１流出側バルブ開閉装置１３ａお
よび第２流出側バルブ開閉装置１３ｂと、前記流入主管
１に流入する原料ガスの流量を積算する積算流量計１１
と、前記積算流量計１１の算出量を電気信号に変換して
出力する積算流量信号発生器１４と、前記積算流量信号
発生器１４からの電気信号に基づいて前記第１流入側バ
ルブ開閉装置１２ａおよび前記第１流出側バルブ開閉装
置１３ａと、前記第２流入側バルブ開閉装置１２ｂおよ
び第２流出側バルブ開閉装置１３ｂとを自動開閉する制
御装置１６を備え、前記積算流量計の積算流量に応じて
前記第１精製筒３ａと第２精製筒３ｂを自動切り換えす
ることを特徴とする。The fourth invention according to claim 4 is
In a gas refiner for purifying a raw material gas by alternately using a first purifying cylinder 3a and a second purifying cylinder 3b, a raw material gas flowing from an inflow main pipe 1 for introducing the raw material gas is supplied to the first purifying cylinder 3a. A first inflow branch pipe 2a and a second inflow branch pipe 2b to be supplied to any of the second purification columns 3b, and a first outflow pipe for outflowing the purified gas from the first purification column 3a and the second purification column 3b, respectively. 4a and the second outflow pipe 4b, and the first
Outflow main pipe 5 for flowing out the purified gas from either outflow pipe 4a or second outflow pipe 4b, and said first inflow branch pipe 2a
And a first inflow side valve 6a and a second inflow side valve 6b installed in the second inflow branch pipe 2b and a first outflow side valve 7a installed in the first outflow pipe 4a and the second outflow pipe 4b, respectively. And the second outflow side valve 7b
A first inflow side valve opening / closing device 12a and a second inflow side valve opening / closing device 12b for automatically opening / closing the first inflow side valve 6a and the second inflow side valve 6b, respectively, the first outflow side valve 7a and the second inflow side valve opening / closing device 12b. A first outflow-side valve opening / closing device 13a and a second outflow-side valve opening / closing device 13b that automatically open and close the outflow-side valve 7b, respectively, and an integrated flow meter 11 that integrates the flow rates of the raw material gases flowing into the inflow main pipe 1.
And an integrated flow rate signal generator 14 for converting the calculated amount of the integrated flow meter 11 into an electric signal and outputting the electric signal, and the first inflow side valve opening / closing device 12a based on the electric signal from the integrated flow rate signal generator 14. And a control device 16 for automatically opening and closing the first outflow-side valve opening / closing device 13a and the second inflow-side valve opening / closing device 12b and the second outflow-side valve opening / closing device 13b, according to the integrated flow rate of the integrated flowmeter. The first refining cylinder 3a and the second refining cylinder 3b are automatically switched.
【００２３】そしてまた、請求項５に記載の第５の発明
は、前記流出主管５に計測分岐管８と計測側バルブ９を
介して露点計１０を備え、前記露点計によりガス精製純
度を監視することを特徴とする。Further, in a fifth aspect of the present invention, the outflow main pipe 5 is provided with a dew point meter 10 via a measurement branch pipe 8 and a measurement side valve 9, and the gas purification purity is monitored by the dew point meter. It is characterized by doing.
【００２４】そしてさらに、請求項６に記載の第６の発
明は、前記制御装置１６に前記第１精製筒３ａと第２精
製筒３ｂの選択状態を表示する表示装置１７を備えたこ
とを特徴とする。Further, the sixth invention according to claim 6 is characterized in that the control device 16 is provided with a display device 17 for displaying a selection state of the first refining cylinder 3a and the second refining cylinder 3b. And
【００２５】なお、精製筒は２本の場合に限るものでは
なく、複数本を２系統としたり、あるいは精製筒ごと、
または複数系統ごとに積算流量計を設置して上記と同様
に前記積算流量計を設置してもよい。The number of the refining cylinders is not limited to two, but a plurality of refining cylinders may be provided in two systems, or each refining cylinder may be
Alternatively, an integrating flow meter may be installed for each of a plurality of systems, and the integrating flow meter may be installed in the same manner as above.
【００２６】[0026]
【作用】上記第１の発明の構成において、第１流入分岐
管２ａおよび第２流入分岐管２ｂは、原料ガスを導入す
る流入主管１から流入する原料ガスを第１精製筒３ａと
第２精製筒３ｂの何れか一方に供給する。In the structure of the first aspect of the present invention, the first inflow branch pipe 2a and the second inflow branch pipe 2b use the first purification cylinder 3a and the second purification pipe to feed the raw material gas flowing from the inflow main pipe 1 for introducing the raw material gas. It is supplied to either one of the cylinders 3b.
【００２７】第１流出管４ａおよび第２流出管４ｂは、
第１精製筒３ａと第２精製筒３ｂの何れかからの精製ガ
スを流出主管５に流す。The first outflow pipe 4a and the second outflow pipe 4b are
Purified gas from either the first refining cylinder 3a or the second refining cylinder 3b is caused to flow into the outflow main pipe 5.
【００２８】流出主管５は、第１流出管４ａおよび第２
流出管４ｂの何れかからの精製ガスを生産装置などの後
段プロセスに供給する。The outflow main pipe 5 includes the first outflow pipe 4a and the second outflow pipe 4a.
The purified gas from any of the outflow pipes 4b is supplied to a subsequent process such as a production device.
【００２９】前記第１流入分岐管２ａおよび第２流入分
岐管２ｂのそれぞれに設置した第１流入側バルブ６ａお
よび第２流入側バルブ６ｂは流入主管１からの原料ガス
を各精製筒３ａ，３ｂに供給する。The first inflow side valve 6a and the second inflow side valve 6b, which are installed in the first inflow branch pipe 2a and the second inflow branch pipe 2b, respectively, feed the raw material gas from the inflow main pipe 1 into the purifying cylinders 3a, 3b. Supply to.
【００３０】前記第１流出管４ａおよび第２流出管４ｂ
のそれぞれに設置した第１流出側バルブ７ａおよび第２
流出側バルブ７ｂは各精製筒３ａ，３Ｂからの精製ガス
を流出主管５に流す。The first outflow pipe 4a and the second outflow pipe 4b
The first outflow side valve 7a and the second outflow side valve 7a installed in each of the
The outflow side valve 7b allows the refined gas from each of the refining cylinders 3a and 3B to flow into the outflow main pipe 5.
【００３１】積算流量計１１は、流入主管１に流入する
原料ガスの流量を積算し、その積算流量に応じて前記第
１精製筒３ａと第２精製筒３ｂを切り換え時期を知らせ
る。また、上記第２の発明の発明の構成において、前記
流出主管５に計測分岐管８と計測側バルブ９を介して設
置した露点計１０でガス精製純度を監視する。The integrated flow meter 11 integrates the flow rates of the raw material gases flowing into the inflow main pipe 1, and notifies the timing of switching between the first refining cylinder 3a and the second refining cylinder 3b according to the integrated flow rate. In the configuration of the second aspect of the invention, the gas purification purity is monitored by the dew point meter 10 installed in the outflow main pipe 5 via the measurement branch pipe 8 and the measurement side valve 9.
【００３２】さらに、上記第３の発明の構成において、
積算流量信号発生器１４は積算流量計１１の算出量を電
気信号に変換して出力する。Further, in the structure of the third invention,
The integrated flow signal generator 14 converts the calculated amount of the integrated flow meter 11 into an electric signal and outputs it.
【００３３】切換表示装置１５は積算流量信号発生器１
４からの電気信号に基づいて第１精製筒３ａと第２精製
筒３ｂの切換時期を表示する。The switching display device 15 is the integrated flow signal generator 1
The switching timing of the first refining cylinder 3a and the second refining cylinder 3b is displayed based on the electric signal from 4.
【００３４】この切換表示装置１５の表示に従って第１
精製筒３ａと第２精製筒３ｂの切換えを行う。According to the display of the switching display device 15, the first
The purifying cylinder 3a and the second purifying cylinder 3b are switched.
【００３５】そして、上記第４の発明の構成において、
第１流入分岐管２ａおよび第２流入分岐管２ｂは、原料
ガスを導入する流入主管１から流入する原料ガスを第１
精製筒３ａと第２精製筒３ｂの何れか一方に供給する。In the structure of the fourth invention,
The first inflow branch pipe 2a and the second inflow branch pipe 2b first feed the raw material gas flowing from the inflow main pipe 1 into which the raw material gas is introduced.
It is supplied to either one of the purification cylinder 3a and the second purification cylinder 3b.
【００３６】第１流出管４ａおよび第２流出管４ｂは、
第１精製筒３ａと第２精製筒３ｂの何れかからの精製ガ
スを流出主管５に流出させる。The first outflow pipe 4a and the second outflow pipe 4b are
Purified gas from either the first refining cylinder 3a or the second refining cylinder 3b is caused to flow out to the outflow main pipe 5.
【００３７】流出主管５は第１流出管４ａおよび第２流
出管４ｂの何れかからの精製ガスを生産装置などの後段
プロセスに流出させる。The outflow main pipe 5 allows the purified gas from either the first outflow pipe 4a or the second outflow pipe 4b to flow out to a subsequent process such as a production apparatus.
【００３８】前記第１流入分岐管２ａおよび第２流入分
岐管２ｂのそれぞれに設置した第１流入側バルブ６ａお
よび第２流入側バルブ６ｂは流入主管１からの原料ガス
を第１精製筒３ａと第２精製筒３ｂの何れか一方に供給
する。The first inflow side valve 6a and the second inflow side valve 6b, which are installed in the first inflow branch pipe 2a and the second inflow branch pipe 2b, respectively, feed the raw material gas from the inflow main pipe 1 to the first refining cylinder 3a. It is supplied to either one of the second refining cylinders 3b.
【００３９】第１流出管４ａおよび第２流出管４ｂのそ
れぞれに設置した第１流出側バルブ７ａおよび第２流出
側バルブ７ｂは第１精製筒３ａ，第２精製筒３ｂからの
精製ガスを流出主管５に流す。The first outflow-side valve 7a and the second outflow-side valve 7b installed in each of the first outflow pipe 4a and the second outflow pipe 4b flow out the purified gas from the first refining cylinder 3a and the second refining cylinder 3b. Pour into the main pipe 5.
【００４０】第１流入側バルブ開閉装置１２ａおよび第
２流入側バルブ開閉装置１２ｂは、第１流入側バルブ６
ａおよび第２流入側バルブ６ｂをそれぞれ自動開閉して
原料ガスを何れか一方の精製筒に供給する。The first inflow side valve opening / closing device 12a and the second inflow side valve opening / closing device 12b are the first inflow side valve 6
a and the second inflow side valve 6b are automatically opened and closed to supply the raw material gas to either one of the purification tubes.
【００４１】第１流出側バルブ開閉装置１３ａおよび第
２流出側バルブ開閉装置１３ｂは、第１流出側バルブ７
ａおよび第２流出側バルブ７ｂをそれぞれ自動開閉して
精製したガスを流出主管５に流す。The first outflow-side valve opening / closing device 13a and the second outflow-side valve opening / closing device 13b are the first outflow-side valve 7
A and the second outflow side valve 7b are automatically opened and closed to flow the purified gas into the outflow main pipe 5.
【００４２】積算流量計１１は流入主管１に流入する原
料ガスの流量を積算し、積算流量信号発生器１４は積算
流量計１１の算出量を電気信号に変換して制御装置１６
に与える。The integrated flow meter 11 integrates the flow rates of the raw material gases flowing into the inflow main pipe 1, and the integrated flow rate signal generator 14 converts the calculated amount of the integrated flow meter 11 into an electric signal to control the controller 16.
Give to.
【００４３】第１流入側バルブ開閉装置１２ａおよび第
１流出側バルブ開閉装置１３ａ、第２流入側バルブ開閉
装置１２ｂおよび第２流出側バルブ開閉装置１３ｂは、
制御装置１６からの開閉信号に基づいて第１流入側バル
ブ６ａおよび第１流出側バルブ７ａ、第２流入側バルブ
６ｂおよび第２流出側バルブ７ｂを開閉する。The first inflow side valve opening / closing device 12a, the first outflow side valve opening / closing device 13a, the second inflow side valve opening / closing device 12b and the second outflow side valve opening / closing device 13b are
The first inflow-side valve 6a, the first outflow-side valve 7a, the second inflow-side valve 6b, and the second outflow-side valve 7b are opened / closed based on the open / close signal from the control device 16.
【００４４】これにより、積算流量計の積算流量に応じ
て前記第１精製筒３ａと第２精製筒３ｂを自動切り換え
する。As a result, the first refining cylinder 3a and the second refining cylinder 3b are automatically switched according to the cumulative flow rate of the cumulative flow meter.
【００４５】そしてまた、上記第５の発明の構成におい
て、流出主管５に計測分岐管８と計測側バルブ９を介し
て設置した露点計１０でガス精製純度を監視する。In the configuration of the fifth aspect of the invention, the gas purification purity is monitored by the dew point meter 10 installed in the outflow main pipe 5 via the measurement branch pipe 8 and the measurement side valve 9.
【００４６】そしてさらに、上記第６の発明の構成にお
いて、前記制御装置１６に備えた表面装置１７は、第１
精製筒３ａと第２精製筒３ｂの選択状態を表示する。Further, in the structure of the sixth invention, the surface device 17 provided in the control device 16 is the first device.
The selection states of the refining cylinder 3a and the second refining cylinder 3b are displayed.
【００４７】[0047]
【実施例】以下、本発明の実施例につき、図面を参照し
て詳細に説明する。Embodiments of the present invention will now be described in detail with reference to the drawings.
【００４８】図１は本発明の第１実施例によるガス精製
機の概略構成を説明する模式図であって、１は原料ガス
を導入する流入主管、２ａは第１流入分岐管、２ｂは第
２流入分岐管、３ａは第１精製筒、３ｂは第２精製筒、
４ａは第１流出管、４ｂは第２流出管、５は流出主管、
６ａは第１流入側バルブ、６ｂは第２流入側バルブ、７
ａは第１流出側バルブ、７ｂは第２流出側バルブ、８は
計測分岐管、９は計測側バルブ、１０は露点計、１１は
積算流量計、１４は積算流量信号発生器、１５は切換表
示装置である。FIG. 1 is a schematic diagram for explaining a schematic structure of a gas purifier according to a first embodiment of the present invention, in which 1 is an inflow main pipe for introducing a raw material gas, 2a is a first inflow branch pipe, and 2b is a first inflow branch pipe. 2 inflow branch pipe, 3a is a first refining cylinder, 3b is a second refining cylinder,
4a is a first outflow pipe, 4b is a second outflow pipe, 5 is an outflow main pipe,
6a is a first inflow side valve, 6b is a second inflow side valve, 7
a is a first outflow side valve, 7b is a second outflow side valve, 8 is a measurement branch pipe, 9 is a measurement side valve, 10 is a dew point meter, 11 is an integrated flow meter, 14 is an integrated flow rate signal generator, and 15 is a switch. It is a display device.
【００４９】同図において、精製すべき原料ガスを流入
させる流入主管１と精製したガスを生産装置に供給する
流出主管５の間に第１精製筒３ａと第２精製筒３ｂを並
列に接続する。In the figure, a first refining cylinder 3a and a second refining cylinder 3b are connected in parallel between an inflow main pipe 1 for introducing a raw material gas to be purified and an outflow main pipe 5 for supplying a refined gas to a production apparatus. .
【００５０】第１流入分岐管２ａおよび第２流入分岐管
２ｂは、原料ガスを導入する流入主管１から流入する原
料ガスを第１精製筒３ａと第２精製筒３ｂの何れか一方
に与える。The first inflow branch pipe 2a and the second inflow branch pipe 2b supply the raw material gas flowing from the main inflow pipe 1 for introducing the raw material gas to either the first refining cylinder 3a or the second refining cylinder 3b.
【００５１】そして、第１流出管４ａおよび第２流出管
４ｂは、第１精製筒３ａと第２精製筒３ｂのそれぞれ接
続され、精製されたガスを流出主管５に流し、生産装置
などの後段プロセスに供給する。The first outflow pipe 4a and the second outflow pipe 4b are connected to the first refining cylinder 3a and the second refining cylinder 3b, respectively, and the refined gas is allowed to flow into the main outflow pipe 5, and the latter stage of the production device or the like is connected. Supply to the process.
【００５２】前記第１流入分岐管２ａおよび第２流入分
岐管２ｂのそれぞれに設置した第１流入側バルブ６ａお
よび第２流入側バルブ６ｂは流入主管１からの原料ガス
を精製筒３ａ，３ｂの何れかに供給する。The first inflow-side valve 6a and the second inflow-side valve 6b installed in the first inflow branch pipe 2a and the second inflow branch pipe 2b, respectively, supply the raw material gas from the inflow main pipe 1 to the purifying cylinders 3a, 3b. Supply to either.
【００５３】前記第１流出管４ａおよび第２流出管４ｂ
のそれぞれに設置した第１流出側バルブ７ａおよび第２
流出側バルブ７ｂは、各精製筒３ａ，３Ｂの何れかから
の精製ガスを流出主管５に流す。The first outflow pipe 4a and the second outflow pipe 4b
The first outflow side valve 7a and the second outflow side valve 7a installed in each of the
The outflow-side valve 7b causes the purified gas from any one of the purification tubes 3a and 3B to flow into the outflow main pipe 5.
【００５４】積算流量計１１は通過した原料ガスの流量
に対する精製度を基準とした切換え時期表示を行うよう
に構成してあり、流入主管１に流入する原料ガスの流量
を積算し、その積算流量に応じて前記第１精製筒３ａと
第２精製筒３ｂを切り換え時期を知らせる。The integrated flow meter 11 is configured to display the switching timing based on the degree of purification with respect to the flow rate of the raw material gas that has passed, and integrates the flow rate of the raw material gas flowing into the inflow main pipe 1 to obtain the integrated flow rate. According to the above, the switching timing of the first refining cylinder 3a and the second refining cylinder 3b is notified.
【００５５】また、積算流量計１１に取付けた積算流量
信号発生器１４は、当該積算流量計１１の積算流量値を
電気信号に変換し、これを切換表示装置１５に与えて精
製筒の切換え作業の到来を作業者に知らせる。Further, the integrated flow rate signal generator 14 attached to the integrated flow rate meter 11 converts the integrated flow rate value of the integrated flow rate meter 11 into an electric signal, which is given to the switching display device 15 to switch the refining cylinder. Inform workers of the arrival of
【００５６】切換え表示装置１５は単に切換え時期の表
示のみでもよいが、何れの精製筒が稼働中であるか、あ
るいは第１精製筒３ａと第２精製筒３ｂの切換え方向を
指示するように構成することによって、作業者の作業を
容易にすることができる。The switching display device 15 may display only the switching time, but is configured to indicate which refining cylinder is in operation or the switching direction between the first refining cylinder 3a and the second refining cylinder 3b. By doing so, the work of the worker can be facilitated.
【００５７】なお、露点計１０は精製ガスの純度を監視
するために設置したものであり、決められた時間間隔
で、あるいは適時に計測側バルブ９を開いてガスの露点
を計測し、その計測値に基づいて精製度を知るものであ
る。The dew point meter 10 is installed to monitor the purity of the purified gas. The dew point of the gas is measured by opening the measurement side valve 9 at a predetermined time interval or at a proper time, and measuring the dew point. The degree of purification is known based on the value.
【００５８】図２は本実施例における第１の精製筒およ
び第２の精製筒の切換えタイミングの説明図である。FIG. 2 is an explanatory diagram of the switching timing of the first refining cylinder and the second refining cylinder in this embodiment.
【００５９】同図においては、最初に図１の第１流入側
バルブ６ａを開いて第１精製筒３ａで精製を行うものと
して説明する。In the figure, the explanation will be made assuming that the first inflow side valve 6a of FIG. 1 is first opened and the refining is performed by the first refining cylinder 3a.
【００６０】まず、ｔ0 において第１精製筒３ａによる
ガス精製を開始する。このとき、第２精製筒３ｂは再生
処理を施している。First, at t 0 , gas purification by the first purification column 3a is started. At this time, the second refining cylinder 3b is undergoing a regeneration process.
【００６１】第１精製筒３ａの使用中に、再生処理を終
了した第２精製筒３ｂは使用待ちの状態で待機させる
（ｔ1 ）。While the first refining cylinder 3a is in use, the second refining cylinder 3b, which has completed the regeneration process, is put on standby in a waiting state (t 1 ).
【００６２】第１精製筒３ａの使用を継続し、積算流量
計１１が切換え時期（ｔ2 ）であることを表示したと
き、第２流入側バルブ６ｂと第２流出側バルブ７ｂを開
き、第１流入側バルブ６ａと第１流出側バルブ７ａを閉
じて第２精製筒３ｂに原料ガスを供給する。When the use of the first refining cylinder 3a is continued and the integrated flow meter 11 indicates that it is the switching time (t 2 ), the second inflow side valve 6b and the second outflow side valve 7b are opened to The 1st inflow side valve 6a and the 1st outflow side valve 7a are closed, and raw material gas is supplied to the 2nd refinement | purification cylinder 3b.
【００６３】そして、第１精製筒３ａには再生処理を施
し、使用待ちとして待機させておく（ｔ3 ）。Then, the first refining cylinder 3a is subjected to a regenerating process and is put on standby as a standby for use (t 3 ).
【００６４】第２精製筒３ｂの使用を継続し、積算流量
計１１が切換え時期を表示したとき（ｔ4 ）、第１流入
側バルブ６ａと第１流出側バルブ７ａを開き、第２流入
側バルブ６ｂと第２流出側バルブ７ｂを閉じて第１精製
筒３ａに原料ガスを供給する。When the second refining cylinder 3b is continuously used and the integrated flow meter 11 indicates the switching time (t 4 ), the first inflow side valve 6a and the first outflow side valve 7a are opened, and the second inflow side is opened. The valve 6b and the second outflow side valve 7b are closed to supply the raw material gas to the first refining cylinder 3a.
【００６５】そして、第２精製筒３ｂには再生処理を施
し、使用待ちとして待機させておく（ｔ5 ）。Then, the second refining cylinder 3b is subjected to a regenerating process, and is put on standby as a standby for use (t 5 ).
【００６６】以下、このサイクルを繰り返して第１精製
筒３ａと第２精製筒３ｂを交互に使用する。Thereafter, this cycle is repeated to alternately use the first refining cylinder 3a and the second refining cylinder 3b.
【００６７】本実施例によれば、精製筒の能力を最大限
に使用して再生に要する電力を低減し、切換えに要する
作業量を節約したガス精製機を提供することができる。According to this embodiment, it is possible to provide a gas purifier in which the capacity of the refining cylinder is used to the maximum, the electric power required for regeneration is reduced, and the amount of work required for switching is saved.
【００６８】図３は本発明の第２実施例によるガス精製
機の概略構成を説明する模式図であって、１２ａは第１
流入側バルブ開閉装置、１２ｂは第２流入側バルブ開閉
装置、１３ａは第１流出側バルブ開閉装置、１３ｂは第
２流出側バルブ開閉装置、１６は制御装置、１７は表示
装置、図１と同一符号は同一部分に対応する。FIG. 3 is a schematic diagram for explaining the schematic structure of a gas purifier according to the second embodiment of the present invention, in which 12a is the first.
Inflow side valve opening / closing device, 12b is second inflow side valve opening / closing device, 13a is first outflow side valve opening / closing device, 13b is second outflow side valve opening / closing device, 16 is control device, 17 is display device, same as FIG. The reference numerals correspond to the same parts.
【００６９】同図においても図１と同様に、精製すべき
原料ガスを流入させる流入主管１と精製したガスを生産
装置に供給する流出主管５の間に第１精製筒３ａと第２
精製筒３ｂを並列に接続する。Also in this figure, as in FIG. 1, the first purifying cylinder 3a and the second purifying cylinder 3a are provided between the inflow main pipe 1 for introducing the raw material gas to be purified and the outflow main pipe 5 for supplying the purified gas to the production apparatus.
The purification cylinders 3b are connected in parallel.
【００７０】第１流入分岐管２ａおよび第２流入分岐管
２ｂは、原料ガスを導入する流入主管１から流入する原
料ガスを第１精製筒３ａと第２精製筒３ｂの何れか一方
に与える。The first inflow branch pipe 2a and the second inflow branch pipe 2b supply the raw material gas flowing from the main inflow pipe 1 for introducing the raw material gas to either one of the first purification cylinder 3a and the second purification cylinder 3b.
【００７１】そして、第１流出管４ａおよび第２流出管
４ｂは、第１精製筒３ａと第２精製筒３ｂのそれぞれ接
続され、精製されたガスを流出主管５に流し、生産装置
などの後段プロセスに供給する。The first outflow pipe 4a and the second outflow pipe 4b are connected to the first refining cylinder 3a and the second refining cylinder 3b, respectively, and the refined gas is allowed to flow into the outflow main pipe 5, and the latter stage of the production apparatus or the like is connected. Supply to the process.
【００７２】前記第１流入分岐管２ａおよび第２流入分
岐管２ｂのそれぞれに設置した第１流入側バルブ６ａお
よび第２流入側バルブ６ｂは流入主管１からの原料ガス
を精製筒３ａ，３ｂの何れかに供給する。The first inflow side valve 6a and the second inflow side valve 6b, which are installed in the first inflow branch pipe 2a and the second inflow branch pipe 2b, respectively, feed the raw material gas from the inflow main pipe 1 into the purifying cylinders 3a, 3b. Supply to either.
【００７３】前記第１流出管４ａおよび第２流出管４ｂ
のそれぞれに設置した第１流出側バルブ７ａおよび第２
流出側バルブ７ｂは、各精製筒３ａ，３Ｂの何れかから
の精製ガスを流出主管５に流す。The first outflow pipe 4a and the second outflow pipe 4b
The first outflow side valve 7a and the second outflow side valve 7a installed in each of the
The outflow-side valve 7b causes the purified gas from any one of the purification tubes 3a and 3B to flow into the outflow main pipe 5.
【００７４】積算流量計１１は通過した原料ガスの流量
に対する精製度を基準とした切換え時期表示を行うよう
に構成してあり、流入主管１に流入する原料ガスの流量
を積算し、積算流量信号発生器１４はその積算流量に応
じた電気信号を制御装置１６に与える。The integrated flow meter 11 is configured to display the switching timing based on the degree of purification with respect to the flow rate of the raw material gas that has passed, and integrates the flow rates of the raw material gas flowing into the inflow main pipe 1 to obtain an integrated flow rate signal. The generator 14 gives an electric signal according to the integrated flow rate to the control device 16.
【００７５】最初に第１精製筒３ａで精製を行うものと
すると、上記制御装置１６は積算流量信号発生器１４か
らの電気信号に応じて、第１流入側バルブ開閉装置１２
ａおよび第１流出側バルブ開閉装置１３ａを閉止駆動
し、第２流入側バルブ開閉装置１２ｂおよび第２流出側
バルブ開閉装置１３ｂを開放駆動して第１精製筒３ａか
ら第２精製筒３ｂに切換える。Assuming that the first refining cylinder 3a is used for refining first, the control device 16 controls the first inflow side valve opening / closing device 12 in response to the electric signal from the integrated flow signal generator 14.
a and the first outflow-side valve opening / closing device 13a are driven to be closed, and the second inflow-side valve opening / closing device 12b and the second outflow-side valve opening / closing device 13b are opened to switch from the first refining cylinder 3a to the second refining cylinder 3b. .
【００７６】第１精製筒３ａと第２精製筒３ｂの切換え
タイミングは前記図２と同様に行われるので、詳しい説
明は省略する。The switching timing of the first refining cylinder 3a and the second refining cylinder 3b is the same as that shown in FIG. 2, so a detailed description thereof will be omitted.
【００７７】本実施例によれば、精製筒の能力を最大限
に使用して再生に要する電力を低減し、精製筒の切換え
が自動化されるために人手による切換え作業を要せず、
取扱いの容易なガス精製機を提供することができる。な
お、上記各実施例では、精製筒を２本使用したものとし
て説明したが、本発明はこれに限るものではなく、さら
に多数の精製筒を並列に設置して同様の切換えを行うこ
とも可能である。According to the present embodiment, the capacity of the refining cylinder is used to the maximum, the power required for regeneration is reduced, and since the switching of the refining cylinder is automated, no manual switching work is required.
A gas purifier that is easy to handle can be provided. In addition, in each of the above-described embodiments, the description has been made assuming that two refining cylinders are used, but the present invention is not limited to this, and it is possible to install a larger number of refining cylinders in parallel and perform the same switching. Is.
【００７８】[0078]
【発明の効果】以上説明したように、本発明によれば、
精製筒の能力を最大限に使用して再生に必要とする電力
を低減し、切換えの作業量を節約あるいは切り換えを自
動化したガス精製機を提供することができる。As described above, according to the present invention,
It is possible to provide a gas purifier in which the capacity of the purifying cylinder is used to the maximum, the electric power required for regeneration is reduced, the switching work amount is saved, or the switching is automated.
【図１】本発明の第１実施例によるガス精製機の概略構
成を説明する模式図である。FIG. 1 is a schematic diagram illustrating a schematic configuration of a gas purifier according to a first embodiment of the present invention.
【図２】本発明の第１実施例における第１の精製筒およ
び第２の精製筒の切換えタイミングの説明図である。FIG. 2 is an explanatory diagram of a switching timing of the first refining cylinder and the second refining cylinder in the first embodiment of the present invention.
【図３】本発明の第２実施例によるガス精製機の概略構
成を説明する模式図である。FIG. 3 is a schematic diagram illustrating a schematic configuration of a gas purifier according to a second embodiment of the present invention.
【図４】従来のガス精製機の構成を説明する模式図であ
る。FIG. 4 is a schematic diagram illustrating the configuration of a conventional gas purifier.
【図５】従来の精製筒切換タイミングの説明図である。FIG. 5 is an explanatory diagram of a conventional purification cylinder switching timing.
１ 原料ガスを導入する流入主管 ２ａ 第１流入分岐管 ２ｂ 第２流入分岐管 ３ａ 第１精製筒 ３ｂ 第２精製筒 ４ａ 第１流出管 ４ｂ 第２流出管 ５ 流出主管 ６ａ 第１流入側バルブ ６ｂ 第２流入側バルブ ７ａ 第１流出側バルブ ７ｂ 第２流出側バルブ ８ 計測分岐管 ９ 計測側バルブ １０ 露点計 １１ 積算流量計 １２ａ 第１流入側バルブ開閉装置 １２ｂ 第２流入側バルブ開閉装置 １３ａ 第１流出側バルブ開閉装置 １３ｂ 第２流出側バルブ開閉装置 １４ 積算流量信号発生器 １５ 切換表示装置 １６ 制御装置 １７ 表示装置。 1 Inflow Main Pipe Introducing Raw Material Gas 2a First Inflow Branch Pipe 2b Second Inflow Branch Pipe 3a First Purification Cylinder 3b Second Purification Cylinder 4a First Outflow Pipe 4b Second Outflow Pipe 5 Outflow Main Pipe 6a First Inflow Side Valve 6b 2nd inflow side valve 7a 1st outflow side valve 7b 2nd outflow side valve 8 Measurement branch pipe 9 Measurement side valve 10 Dew point meter 11 Accumulation flow meter 12a 1st inflow side valve opening / closing device 12b 2nd inflow side valve opening / closing device 13a No. 1 Outflow-side valve opening / closing device 13b Second outflow-side valve opening / closing device 14 Integrated flow rate signal generator 15 Switching display device 16 Control device 17 Display device.
Claims (6)
て原料ガスを精製するガス精製機において、 原料ガスを導入する流入主管から流入する原料ガスを前
記第１精製筒と第２精製筒のそれぞれに供給する第１流
入分岐管および第２流入分岐管と、 前記第１精製筒と第２精製筒のそれぞれからの精製ガス
を流出させる第１流出管および第２流出管と、 前記第１流出管および第２流出管の何れかからの精製ガ
スを流出させる流出主管と、 前記第１流入分岐管および第２流入分岐管のそれぞれに
設置した第１流入側バルブおよび第２流入側バルブと、 前記第１流出管および第２流出管のそれぞれに設置した
第１流出側バルブおよび第２流出側バルブと、 前記流入主管に流入する原料ガスの流量を積算する積算
流量計とを備え、 前記積算流量計の積算流量に応じて前記第１精製筒と第
２精製筒を切り換えることを特徴とするガス精製機。1. A gas purifier for purifying a raw material gas by alternately using a first purifying cylinder and a second purifying cylinder, wherein a raw material gas flowing from a main inlet pipe for introducing the raw material gas is supplied to the first purifying cylinder. A first inflow branch pipe and a second inflow branch pipe supplied to each of the second purification columns, and a first outflow pipe and a second outflow pipe for outflowing the purified gas from each of the first purification column and the second purification column An outflow main pipe for outflowing the purified gas from any one of the first outflow pipe and the second outflow pipe; a first inflow side valve and a first inflow side valve installed in each of the first inflow branch pipe and the second inflow branch pipe; 2 inflow side valves, a first outflow side valve and a second outflow side valve installed in each of the first outflow pipe and the second outflow pipe, and an integrating flow meter for integrating the flow rate of the raw material gas flowing into the inflow main pipe And the integrated flow meter A gas purifier characterized in that the first refining cylinder and the second refining cylinder are switched in accordance with the cumulative flow rate of the gas.
岐管と計測側バルブを介して設置した露点計を備え、前
記露点計によりガス精製純度を監視することを特徴とす
るガス精製機。2. The gas purifier according to claim 1, further comprising a dew point meter installed on the outflow main pipe via a measurement branch pipe and a measurement side valve, and the gas purification purity is monitored by the dew point meter.
計の算出量を電気信号に変換して出力する積算流量信号
発生器と、 前記積算流量信号発生器からの電気信号に基づいて前記
第１精製筒と第２精製筒の切換時期を表示する切換表示
装置とを備え、 前記切換表示装置の表示に従って前記第１精製筒と第２
精製筒の切換えを行うことを特徴とするガス精製機。3. The integrated flow signal generator according to claim 1 or 2, which converts the calculated amount of the integrated flow meter into an electric signal and outputs the electric signal; and the integrated flow signal generator based on the electric signal from the integrated flow signal generator. A first refining cylinder and a second refining cylinder according to the display of the switching display device.
A gas purifier characterized by switching the purifying cylinder.
て原料ガスを精製するガス精製機において、 原料ガスを導入する流入主管から流入する原料ガスを前
記第１精製筒と第２精製筒の何れかに供給する第１流入
分岐管および第２流入分岐管と、 前記第１精製筒と第２精製筒からの精製ガスをそれぞれ
流出させる第１流出管および第２流出管と、 前記第１流出管および第２流出管の何れかからの精製ガ
スを流出させる流出主管と、 前記第１流入分岐管および第２流入分岐管のそれぞれに
設置した第１流入側バルブおよび第２流入側バルブと、 前記第１流出管および第２流出管のそれぞれに設置した
第１流出側バルブおよび第２流出側バルブと、 前記第１流入側バルブおよび第２流入側バルブをそれぞ
れ自動開閉する第１流入側バルブ開閉装置および第２流
入側バルブ開閉装置と、 前記第１流出側バルブおよび第２流出側バルブをそれぞ
れ自動開閉する第１流出側バルブ開閉装置および第２流
出側バルブ開閉装置と、 前記流入主管に流入する原料ガスの流量を積算する積算
流量計と、 前記積算流量計の算出量を電気信号に変換して出力する
積算流量信号発生器と、 前記積算流量信号発生器からの電気信号に基づいて前記
第１流入側バルブ開閉装置および前記第１流出側バルブ
開閉装置と、 前記第２流入側バルブ開閉装置および第２流出側バルブ
開閉装置とを自動開閉する制御装置を備え、 前記積算流量計の積算流量に応じて前記第１精製筒と第
２精製筒を自動切り換えすることを特徴とするガス精製
機。4. A gas purifier for purifying a raw material gas by alternately using a first purifying cylinder and a second purifying cylinder, wherein the raw material gas flowing from a main inlet pipe for introducing the raw material gas is supplied to the first purifying cylinder. A first inflow branch pipe and a second inflow branch pipe to be supplied to any of the second refining tubes, and a first outflow pipe and a second outflow pipe for outflowing the refined gas from the first refining column and the second refining column, respectively. An outflow main pipe for outflowing the purified gas from any one of the first outflow pipe and the second outflow pipe; a first inflow side valve and a first inflow side valve installed in each of the first inflow branch pipe and the second inflow branch pipe; 2 inflow side valves, a first outflow side valve and a second outflow side valve installed in each of the first outflow pipe and the second outflow pipe, and the first inflow side valve and the second inflow side valve are automatically opened and closed, respectively. First inflow valve opening / closing And a second inflow side valve opening / closing device, a first outflow side valve opening / closing device and a second outflow side valve opening / closing device for automatically opening / closing the first outflow side valve and the second outflow side valve, respectively, and flowing into the inflow main pipe. An integrated flow meter that integrates the flow rate of the raw material gas, an integrated flow signal generator that converts the calculated amount of the integrated flow meter into an electric signal and outputs the electric signal, and an integrated signal based on an electric signal from the integrated flow signal generator. A first inflow-side valve opening / closing device, the first outflow-side valve opening / closing device, and a control device that automatically opens / closes the second inflow-side valve opening / closing device and the second outflow-side valve opening / closing device; A gas purifier, wherein the first refining cylinder and the second refining cylinder are automatically switched according to the flow rate.
岐管と計測側バルブを介して露点計を備え、 前記露点計によりガス精製純度を監視することを特徴と
するガス精製機。5. The gas purifier according to claim 4, wherein the outflow main pipe is provided with a dew point meter through a measurement branch pipe and a measurement side valve, and the gas purification purity is monitored by the dew point meter.
に前記第１精製筒と第２精製筒の選択状態を表示する表
示装置を備えたことを特徴とするガス精製機。6. The gas purifier according to claim 4 or 5, wherein the control device is provided with a display device for displaying a selection state of the first refining cylinder and the second refining cylinder.
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP2423195A JPH08222493A (en) | 1995-02-13 | 1995-02-13 | Gas purifier |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP2423195A JPH08222493A (en) | 1995-02-13 | 1995-02-13 | Gas purifier |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| JPH08222493A true JPH08222493A (en) | 1996-08-30 |
Family
ID=12132494
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP2423195A Pending JPH08222493A (en) | 1995-02-13 | 1995-02-13 | Gas purifier |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPH08222493A (en) |
Cited By (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JP2008019127A (en) * | 2006-07-13 | 2008-01-31 | Ricoh Co Ltd | Crystal growth apparatus and crystal production method |
-
1995
- 1995-02-13 JP JP2423195A patent/JPH08222493A/en active Pending
Cited By (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JP2008019127A (en) * | 2006-07-13 | 2008-01-31 | Ricoh Co Ltd | Crystal growth apparatus and crystal production method |
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