JPH08190007A - Optical reflection mirror and its production - Google Patents
Optical reflection mirror and its productionInfo
- Publication number
- JPH08190007A JPH08190007A JP1753595A JP1753595A JPH08190007A JP H08190007 A JPH08190007 A JP H08190007A JP 1753595 A JP1753595 A JP 1753595A JP 1753595 A JP1753595 A JP 1753595A JP H08190007 A JPH08190007 A JP H08190007A
- Authority
- JP
- Japan
- Prior art keywords
- resin film
- substrate member
- optical
- resin
- reflecting
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Pending
Links
Landscapes
- Telescopes (AREA)
- Optical Elements Other Than Lenses (AREA)
Abstract
Description
【０００１】[0001]
【産業上の利用分野】本発明は光学反射鏡及びその製造
方法に係り、特に反射望遠鏡の主鏡や副鏡として好適な
高精度の反射面を有する反射鏡に関する。BACKGROUND OF THE INVENTION 1. Field of the Invention The present invention relates to an optical reflecting mirror and a manufacturing method thereof, and more particularly to a reflecting mirror having a highly accurate reflecting surface suitable as a main mirror or a sub mirror of a reflecting telescope.
【０００２】[0002]
【従来の技術】従来、反射望遠鏡等の主鏡や副鏡には、
ガラスを研磨して高精度な凹面を形成し、この凹面の表
面にアルミニウムや銀等の金属薄膜を蒸着して形成した
凹面鏡が用いられている。2. Description of the Related Art Conventionally, a main mirror and a sub mirror such as a reflecting telescope are
A concave mirror formed by polishing glass to form a highly accurate concave surface and depositing a metal thin film such as aluminum or silver on the surface of the concave surface is used.
【０００３】[0003]
【発明が解決しようとする課題】この種の凹面鏡の製造
においては、ガラスの研磨に手間がかかり、特に径の大
きい鏡が必要とされる場合に製造コストが高くなるとい
う問題点がある。また、光学収差を低減するために凹面
を非球面等の高精度な特殊形状に形成する必要が生じて
も、研磨により反射面を形成しているのでこのような特
殊形状を得ること自体が困難であり、ましてや精度の良
い加工を行うことは不可能であるという問題点もある。In the manufacture of this type of concave mirror, there is a problem that it takes a lot of time to polish the glass and the manufacturing cost becomes high especially when a mirror having a large diameter is required. Even if it is necessary to form the concave surface into a highly precise special shape such as an aspherical surface to reduce optical aberration, it is difficult to obtain such a special shape because the reflecting surface is formed by polishing. However, there is a problem that it is impossible to perform highly accurate processing.
【０００４】そこで本発明は上記問題点を解決するもの
であり、その課題は、製造コストを低減できるとともに
任意形状の反射面を容易に形成することのできる新規構
造の光学反射鏡及びその製造方法を実現することにあ
る。Therefore, the present invention solves the above-mentioned problems, and an object of the invention is to provide an optical reflecting mirror having a novel structure capable of reducing the manufacturing cost and easily forming a reflecting surface having an arbitrary shape, and a manufacturing method thereof. Is to realize.
【０００５】[0005]
【課題を解決するための手段】上記課題を解決するため
に、所定の曲面からなる反射面を備えた光学反射鏡にお
いて、本発明が講じた手段は、前記反射面にほぼ沿った
表面部を有する基板部材と、前記表面部の上に直接若し
くは間接的に、光学的精度を備えた曲面からなる表面を
持つように成形された樹脂皮膜と、該樹脂皮膜の表面上
に被着された反射性薄膜とを設けるものである。In order to solve the above-mentioned problems, in the optical reflecting mirror having a reflecting surface consisting of a predetermined curved surface, the means taken by the present invention is a surface portion substantially along the reflecting surface. A substrate member, a resin film formed on the surface portion directly or indirectly so as to have a curved surface having optical accuracy, and a reflection applied on the surface of the resin film. Thin film is provided.
【０００６】ここで、前記基板部材を、ガラス、セラミ
ックス、その他の低膨張係数を備えた材質で構成するこ
とが好ましい。Here, it is preferable that the substrate member is made of glass, ceramics, or other material having a low expansion coefficient.
【０００７】この場合においては、前記樹脂皮膜を、低
膨張係数を備えた樹脂材料で成形されていることが望ま
しい。In this case, it is desirable that the resin film is formed of a resin material having a low expansion coefficient.
【０００８】特に、前記樹脂皮膜を液晶ポリマー若しく
は非晶性樹脂で構成することが効果的である。In particular, it is effective to form the resin film with a liquid crystal polymer or an amorphous resin.
【０００９】また、前記基板部材の表面部には、前記樹
脂皮膜側から前記反射面の光軸方向に見て隠れる部分を
持つ表面構造を設けることが好ましい。Further, it is preferable that the surface portion of the substrate member is provided with a surface structure having a portion hidden from the resin film side in the optical axis direction of the reflecting surface.
【００１０】次に、所定の曲面からなる反射面を備えた
光学反射鏡の製造方法としては、前記反射面にほぼ沿っ
た表面部を有する基板部材を形成し、該基板部材を金型
内に収容してインサート成形により前記表面部上に光学
的精度を備えた曲面からなる表面を持つように樹脂皮膜
を成形し、その後、該樹脂皮膜の表面上に反射薄膜を形
成するものである。Next, as a method of manufacturing an optical reflecting mirror having a reflecting surface having a predetermined curved surface, a substrate member having a surface portion substantially along the reflecting surface is formed, and the substrate member is placed in a mold. The resin film is housed and insert-molded so as to have a curved surface having optical accuracy on the surface portion, and then a reflective thin film is formed on the surface of the resin film.
【００１１】この場合において、前記基板部材の表面部
には、前記成形時においてアンダーカット部を前記樹脂
皮膜に形成するための表面構造を形成することが好まし
い。In this case, it is preferable that a surface structure for forming an undercut portion on the resin film at the time of molding is formed on the surface portion of the substrate member.
【００１２】[0012]
【作用】請求項１によれば、基板部材に反射面にほぼ沿
った表面部を設け、この上に表面を光学的精度をもった
表面を備えた樹脂皮膜を成形して、この樹脂皮膜の表面
上に反射性薄膜を形成することにより、反射面を樹脂皮
膜の成形により精度良く形成しつつ、樹脂皮膜の強度不
足、歪み発生等を基板部材の支持により補完することが
できるので、高精度の光学反射鏡とすることができる。
ここで、基板部材には反射面にほぼ沿った表面部を設け
るだけでよいため、基板部材の加工精度は不要であり、
さらに、インサート成形の技術により樹脂皮膜の成形も
容易にできるので、迅速かつ低コストに製造できる。According to the present invention, the substrate member is provided with a surface portion substantially along the reflecting surface, and a resin film having a surface having optical precision is formed on the surface portion, and the resin film By forming a reflective thin film on the surface, it is possible to form a reflective surface with high precision by molding a resin film, and at the same time, it is possible to supplement the lack of strength of the resin film, the occurrence of distortion, etc. by the support of the substrate member, thus achieving high accuracy. Can be an optical reflector.
Here, since it is only necessary to provide the substrate member with a surface portion substantially along the reflecting surface, the processing accuracy of the substrate member is unnecessary,
Further, since the resin film can be easily formed by the insert molding technique, it can be manufactured quickly and at low cost.
【００１３】請求項２によれば、上記基板部材を低膨張
係数を備えた材質で構成することにより、熱膨張に伴う
反射面の変形を抑制することができる。According to the second aspect, by forming the substrate member with a material having a low expansion coefficient, it is possible to suppress deformation of the reflecting surface due to thermal expansion.
【００１４】請求項３によれば、樹脂皮膜についても低
膨張係数を備えた材質で構成することにより、熱膨張に
伴う反射面の変形をさらに低減することができる。According to the third aspect, since the resin film is also made of a material having a low expansion coefficient, the deformation of the reflecting surface due to the thermal expansion can be further reduced.
【００１５】請求項４によれば、線膨張係数が低い点で
液晶ポリマー若しくは非晶性樹脂を用いて樹脂皮膜を形
成することが好ましい。According to the fourth aspect, it is preferable to form the resin film by using the liquid crystal polymer or the amorphous resin in that the linear expansion coefficient is low.
【００１６】請求項５によれば、基板部材の表面部に樹
脂皮膜側から反射面の光軸方向に見て隠れる部分を持つ
表面構造を設けることにより、成形の離型時に樹脂皮膜
と基板部材との密着力を高めることができるので、基板
部材から樹脂皮膜が剥がれ落ちることがなく、また、製
造後においても、基板部材と樹脂皮膜との剥離を防止す
ることができる。According to the present invention, the surface structure of the substrate member having a portion hidden from the resin film side when viewed in the optical axis direction of the reflection surface from the resin film side is provided. Since it is possible to increase the adhesiveness with the resin film, it is possible to prevent the resin film from peeling off from the substrate member, and to prevent the substrate member and the resin film from peeling off even after the manufacturing.
【００１７】請求項６によれば、基板部材には反射面に
ほぼ沿った表面部を設けるだけでよいため、基板部材の
加工精度は不要であり、さらに、インサート成形の技術
により樹脂皮膜の成形も容易にできるので、迅速かつ低
コストに製造できる。また、反射面は樹脂皮膜の表面形
状により形成することができるので、非球面等の特殊な
形状でも高精度に形成することができる。According to the sixth aspect of the present invention, since the substrate member only needs to be provided with the surface portion substantially along the reflecting surface, the processing accuracy of the substrate member is not required, and the resin film is formed by the insert molding technique. Since it can be easily manufactured, it can be manufactured quickly and at low cost. Further, since the reflecting surface can be formed by the surface shape of the resin film, it can be formed with high precision even in a special shape such as an aspherical surface.
【００１８】請求項７によれば、基板部材の表面部に成
形時においてアンダーカット部を樹脂皮膜に形成するた
めの表面構造を形成することにより、成形の離型時に樹
脂皮膜と基板部材との密着力を高めることができるの
で、基板部材から樹脂皮膜が剥がれ落ちることがなく、
また、製造後においても、基板部材と樹脂皮膜との剥離
を防止することができる。According to the seventh aspect, the surface structure for forming the undercut portion in the resin film at the time of molding is formed on the surface part of the substrate member, so that the resin film and the substrate member are separated from each other at the time of releasing from the molding. Since the adhesion can be increased, the resin film does not peel off from the substrate member,
Further, it is possible to prevent peeling between the substrate member and the resin film even after the manufacturing.
【００１９】[0019]
【実施例】次に、図面を参照して本発明に係る光学反射
鏡の実施例を説明する。図１は本実施例の光学反射鏡を
製造する工程を簡略化して示す概略工程図である。
（ａ）に示すように、基板部材１は、ガラス、セラミッ
クス、低膨張率を有する鋼材等の低い熱膨張係数をもつ
材料からなる母材を研磨、鋳造若しくは成形・焼結等に
より成形して所望の凹面部１０を形成したものである。
凹面部１０の表面は鏡面である必要はなく、むしろ所定
の粗さ若しくは凹凸が存在するように必要ならば表面に
溝や条目を設けることが望ましい。Embodiments of the optical reflecting mirror according to the present invention will now be described with reference to the drawings. FIG. 1 is a schematic process diagram showing a simplified process of manufacturing the optical reflecting mirror of this embodiment.
As shown in (a), the substrate member 1 is formed by polishing, casting or molding / sintering a base material made of a material having a low coefficient of thermal expansion such as glass, ceramics, and steel having a low expansion coefficient. The desired concave surface portion 10 is formed.
The surface of the concave portion 10 does not have to be a mirror surface, but rather it is desirable to provide a groove or a groove on the surface so that a predetermined roughness or unevenness is present.
【００２０】一方、金型の型板２には、上記凹面部１０
に対向するように凸面部２０が形成される。この凸面部
２０は、製造される光学反射鏡の凹面状の反射面に対応
した高精度な凸面に形成されている。この凸面部２０
は、（ｂ）に示すように、基板部材１と型板２とを合致
させると上記凹面部１０との間に所定の間隙が存在する
ように形成されている。次に、凹面部１０と凸面部２０
との間に液晶ポリマー、非晶性樹脂等の低い熱膨張係数
をもつ合成樹脂３を流動状態で充填し、冷却することに
より固化せしめる。この合成樹脂としては、ＰＭＭＡ等
のメタクリル樹脂、ポリカーボネート、ＡＳ樹脂、ＢＳ
樹脂、ポリアミドイミド等の線膨張係数が３〜６×１０
5 程度若しくはそれ以下の材料を用いることが好まし
い。On the other hand, the concave plate 10 is provided on the mold plate 2 of the mold.
The convex portion 20 is formed so as to face the. The convex surface portion 20 is formed as a highly accurate convex surface corresponding to the concave reflecting surface of the manufactured optical reflecting mirror. This convex portion 20
As shown in (b), when the substrate member 1 and the template 2 are aligned with each other, a predetermined gap is formed between the concave surface portion 10 and the substrate member 1. Next, the concave surface portion 10 and the convex surface portion 20
A synthetic resin 3 having a low coefficient of thermal expansion, such as a liquid crystal polymer or an amorphous resin, is filled in a fluid state between and, and is solidified by cooling. As the synthetic resin, methacrylic resin such as PMMA, polycarbonate, AS resin, BS
Linear expansion coefficient of resin, polyamide-imide, etc. is 3-6 × 10
It is preferable to use a material of about 5 or less.
【００２１】さらに、（ｃ）に示すように、基板部材１
と型板２とを型開きすると、樹脂皮膜３０は凹面部１０
の上に付着したまま凸面部２０から離れ、樹脂皮膜３０
の表面３１は、凸面部２０の曲面とは逆の凹曲面に成形
される。最後に、樹脂皮膜３０の表面３１上にアルミニ
ウム、銀等の金属薄膜４を蒸着法等により形成すること
により、高精度の凹面鏡を完成させることができる。Further, as shown in (c), the substrate member 1
When the mold plate 2 and the mold plate 2 are opened, the resin film 30 has a concave surface portion 10.
The resin coating 30
The surface 31 of is formed into a concave curved surface that is the reverse of the curved surface of the convex surface portion 20. Finally, by forming the metal thin film 4 of aluminum, silver or the like on the surface 31 of the resin film 30 by a vapor deposition method or the like, a highly accurate concave mirror can be completed.
【００２２】図２は異なる実施例における基板部材５の
断面形状及び正面形状を示すものである。上述の基板部
材１の凹面部１０の表面上には粗面若しくは多数のラン
ダムな溝若しくは条目を形成して、離型時に樹脂皮膜３
０が凹面部１０から剥がれ落ちないようにしている。し
かし、この基板部材５においては、基板部材５の凹面部
５０上に、中央凹部６２及び環状溝６３，６４を形成し
て、樹脂皮膜６０と基板部材５との密着力を高めてい
る。FIG. 2 shows a sectional shape and a front shape of the substrate member 5 in another embodiment. A rough surface or a large number of random grooves or lines are formed on the surface of the concave portion 10 of the substrate member 1 described above, and the resin coating 3 is formed at the time of mold release.
0 is prevented from peeling off from the concave portion 10. However, in this substrate member 5, the central concave portion 62 and the annular grooves 63 and 64 are formed on the concave surface portion 50 of the substrate member 5 to enhance the adhesive force between the resin film 60 and the substrate member 5.
【００２３】この中央凹部６２、環状溝６３，６４にお
いては、図１に示す型板２と同様に水平方向に離型する
場合、それぞれの断面形状をその離型方向に対して樹脂
皮膜６０がアンダーカット部Ａ，Ｂ，Ｃを持つように形
成している。このアンダーカット部Ａ，Ｂ，Ｃを設ける
ことにより、樹脂皮膜６０は基板部材５に対して充分な
密着力を備え、離型時においても基板部材５から剥がれ
落ちることがない。また、光学反射鏡が完成した後にお
いても、熱や衝撃により樹脂皮膜６０が基板部材５から
剥離したり、樹脂皮膜６０が浮き上がったりすることを
防止することができる。In the central recess 62 and the annular grooves 63 and 64, when the mold is horizontally released as in the case of the template 2 shown in FIG. It is formed so as to have undercut portions A, B, and C. By providing the undercut portions A, B, and C, the resin film 60 has sufficient adhesion to the substrate member 5 and does not peel off from the substrate member 5 even at the time of mold release. Further, even after the optical reflecting mirror is completed, it is possible to prevent the resin film 60 from peeling off from the substrate member 5 and the resin film 60 from rising due to heat or impact.
【００２４】図３はさらに異なる実施例における基板部
材７の断面形状及び正面形状を示すものであり、基板部
材７の凹面部７０の表面上には螺旋状溝７１が形成され
ている。この螺旋状溝７１は、凹面部７０の中心から時
計周りに広がるように螺旋状に形成されたものであり、
その断面形状は、凹面部７０の表面を垂直に掘り下げる
ことによって凹面部７０の表面に対して直交した両側面
を備えている。この螺旋状溝７１は、その両側面の形成
により樹脂皮膜８０と基板部材７との接着面積を増加さ
せるので、両者の密着力を増加させる。また、その側面
は、凹面部７０が凹面である故に、凹面部７０の表面上
に形成される樹脂皮膜８０の表面によって規定される反
射面の光軸に対して角度をもって形成されるので、樹脂
皮膜８０の成形時に螺旋状溝７１の左右側面のうち中心
部から広がり方向に見て左側の側面がアンダーカット部
になることから、離型時等に樹脂皮膜８０が凹面部７０
から剥離したり、樹脂皮膜が浮き上がってしまったりす
ることが防止される。FIG. 3 shows a sectional shape and a front shape of a substrate member 7 in a further different embodiment, and a spiral groove 71 is formed on the surface of the concave surface portion 70 of the substrate member 7. The spiral groove 71 is formed in a spiral shape so as to spread clockwise from the center of the concave surface portion 70.
The cross-sectional shape is provided with both side surfaces orthogonal to the surface of the concave surface portion 70 by vertically digging down the surface of the concave surface portion 70. Since the spiral groove 71 increases the adhesion area between the resin film 80 and the substrate member 7 by forming the both side surfaces thereof, the adhesion force between them is increased. Moreover, since the side surface of the concave portion 70 is a concave surface, the side surface is formed at an angle with respect to the optical axis of the reflecting surface defined by the surface of the resin film 80 formed on the surface of the concave portion 70. Since the left side surface of the left and right side surfaces of the spiral groove 71 when viewed from the center when forming the coating film 80 is an undercut portion, the resin coating film 80 has a concave surface portion 70 at the time of mold release.
It is prevented that the resin film is peeled off or the resin film is lifted up.
【００２５】上記図２（ａ）及び（ｂ）に示す環状溝及
び螺旋状溝の形状には特に高い精度が要求されないた
め、容易に形成することができる。また、基板部材の表
面形状も、最終的に形成される反射面の形状にほぼ沿っ
たものであれば、精度は要求されない。例えば、非球面
の反射面を形成する場合でも、基板部材の表面は容易に
形成できる球面状に加工すればよく、さらに、反射面か
ら大きくはずれない範囲ならば、相互に異なる方向を指
向した複数の平面部を有する表面形状であってもよい。Since the annular groove and the spiral groove shown in FIGS. 2A and 2B do not require particularly high precision, they can be easily formed. Further, the surface shape of the substrate member is not required to be accurate as long as it is substantially in accordance with the shape of the reflection surface to be finally formed. For example, even in the case of forming an aspherical reflecting surface, the surface of the substrate member may be processed into a spherical shape that can be easily formed. Further, within a range that does not greatly deviate from the reflecting surface, a plurality of members that are oriented in different directions It may be a surface shape having a flat portion.
【００２６】上記実施例では、樹脂皮膜を基板部材上に
ある程度薄く成形することにより、反射面の精度を確保
しながら、加工の手間及びコストを低減することがで
き、従来よりも極めて短時間かつ低コストに高精度の反
射鏡を製造することができる。この場合、反射面の精度
は樹脂皮膜の表面形状によって規定されるが、その樹脂
皮膜は基板部材上に担持されているため、反射面の強度
を確保することができるとともに、反射面の変形も防止
され、光学反射鏡としての耐久性を高めることができ
る。In the above embodiment, the resin coating is formed on the substrate member to be thin to a certain extent, whereby the precision and accuracy of the reflecting surface can be secured, and the labor and cost of processing can be reduced. A highly accurate reflecting mirror can be manufactured at low cost. In this case, the accuracy of the reflecting surface is regulated by the surface shape of the resin film, but since the resin film is carried on the substrate member, the strength of the reflecting surface can be secured and the deformation of the reflecting surface is also possible. It can be prevented and the durability as an optical reflecting mirror can be improved.
【００２７】ここで、反射面の精度を高めるには、基板
部材及び樹脂皮膜の材料として線膨張係数の低いものを
選定する必要があり、さらに樹脂皮膜の材料としては、
硬化時の収縮率の低いものを選定することが好ましい。
ただし、本実施例の樹脂皮膜を薄く形成することによっ
て、樹脂の硬化収縮による樹脂皮膜の品質低下や歪みの
発生等を抑制することができる。なお、上記実施例の光
学反射鏡は凹面鏡であるが、本発明はこれに限定される
ものではなく、凸面鏡やその他の任意の光学的曲面を備
えた反射鏡であっても同様に形成することができ、同様
の効果を奏するものである。Here, in order to improve the accuracy of the reflecting surface, it is necessary to select a material having a low linear expansion coefficient as the material of the substrate member and the resin coating, and as the material of the resin coating,
It is preferable to select a material having a low shrinkage factor during curing.
However, by forming the resin film of the present embodiment thin, it is possible to suppress the deterioration of the quality of the resin film, the occurrence of distortion, etc. due to the curing shrinkage of the resin. Although the optical reflecting mirror of the above-mentioned embodiment is a concave mirror, the present invention is not limited to this, and a convex mirror or a reflecting mirror having any other optical curved surface may be similarly formed. The same effect can be obtained.
【００２８】次に、上記図１に示す光学反射鏡の製造工
程中、樹脂皮膜の形成に際して用いることのできる射出
成形法の一例について図３を参照して説明する。上記樹
脂皮膜の形成には、基板部材上への樹脂液の塗布後に型
板を取付けたりすることもできるが、射出成形法が最も
製造効率及び製造コストの観点からみて好ましい。ま
た、樹脂の硬化法としては、樹脂の成分に応じて、熱硬
化、紫外線硬化等の種々の硬化特性を採用することがで
きる。Next, an example of an injection molding method that can be used for forming a resin film in the manufacturing process of the optical reflecting mirror shown in FIG. 1 will be described with reference to FIG. To form the resin film, a template may be attached after applying the resin liquid onto the substrate member, but the injection molding method is most preferable from the viewpoint of manufacturing efficiency and manufacturing cost. Further, as the resin curing method, various curing characteristics such as heat curing and ultraviolet curing can be adopted depending on the components of the resin.
【００２９】図３に示すように、射出成形機の固定側に
設けられた図示しない射出ノズルから射出口９０を介し
て樹脂が注入され、導入孔９１を経てゲート部材９２内
に導かれる。ゲート部材９２は、固定側型板９３内に嵌
合固定された固定側コア９４内に挿入固定されている。
固定側型板９３には、可動側型板９５が対向配置され、
その内部に可動側コア９６が嵌合固定されている。可動
側型板９５の背面には可動側ダイプレート９７が配置さ
れ、この可動側ダイプレート９７に穿設された通孔を通
して突出ロッド９８が出没するようになっている。可動
側コア９６の内部には、成形コア９９が出没自在に収容
されており、この成形コア９９を上記突出ロッド９８が
押し出すように構成されている。As shown in FIG. 3, resin is injected from an injection nozzle (not shown) provided on the fixed side of the injection molding machine through an injection port 90, and is introduced into a gate member 92 through an introduction hole 91. The gate member 92 is inserted and fixed in a fixed side core 94 fitted and fixed in a fixed side template 93.
The movable side mold plate 95 is arranged to face the fixed side mold plate 93,
The movable core 96 is fitted and fixed in the inside thereof. A movable die plate 97 is arranged on the back surface of the movable die plate 95, and a projecting rod 98 is projected and retracted through a through hole formed in the movable die plate 97. A molding core 99 is housed in the movable side core 96 so as to be retractable, and the protruding rod 98 pushes out the molding core 99.
【００３０】固定側コア９４内には、上述したものと同
材質の基板部材１００が収容されている。この基板部材
１００は中央に円形の貫通孔１００ａを備え、この貫通
孔１００ａに上記ゲート部材９２を嵌合させるようにし
て位置決め固定されている。この基板部材１００をイン
サート部品として取付けて型を閉じると、ゲート部材９
２、基板部材１００、可動側コア９５、成形コア９９に
より、薄いお碗型のキャビティ１１０が形成される。A substrate member 100 made of the same material as that described above is housed in the fixed core 94. The substrate member 100 is provided with a circular through hole 100a in the center, and the gate member 92 is fitted and positioned and fixed in the through hole 100a. When this board member 100 is attached as an insert part and the mold is closed, the gate member 9
2, the substrate member 100, the movable core 95, and the molding core 99 form a thin bowl-shaped cavity 110.
【００３１】キャビティ１１０は約０．５〜１．５ｍｍ
程度の厚さに形成され、成形コア９９の表面の凸面部に
より、光学的曲面、すなわち、使用する最短波長λ〜λ
／８程度の精度を持つ曲面に樹脂皮膜の表面を成形でき
るようになっている。この実施例における基板部材１０
０は、反射望遠鏡に用いられる反射鏡を製造するための
ものであり、その貫通孔１００ａの部分に形成された樹
脂皮膜が成形後に除去されることにより、貫通孔をもつ
光学反射鏡が製造される。Cavity 110 is approximately 0.5-1.5 mm
The convex core on the surface of the molding core 99, which is formed to a thickness of about 100 nm, is an optical curved surface, that is, the shortest wavelength λ to λ used.
The surface of the resin film can be molded on a curved surface with an accuracy of about / 8. Substrate member 10 in this embodiment
0 is for manufacturing a reflecting mirror used for a reflecting telescope, and an optical reflecting mirror having a through hole is manufactured by removing the resin film formed on the through hole 100a after molding. It
【００３２】キャビティ１１０には、ゲート部材９２の
ゲート口９２ａから樹脂が注入されるが、樹脂の粘性に
より、樹脂が充分に流れる範囲内でキャビティ１１０の
厚さを薄く形成することが好ましい。この実施例では、
基板部材１００の中央に貫通孔が存在することにより、
キャビティ１１０の中央部から樹脂を注入することがで
き、樹脂の流れを良くすることができるので、樹脂皮膜
の厚さを薄く形成することができる。このことにより、
成形時の硬化収縮に伴うひけの量や歪み量を低減するこ
とができ、高精度の反射面を形成することができる。The resin is injected into the cavity 110 from the gate port 92a of the gate member 92, but it is preferable that the cavity 110 is formed thin within a range in which the resin sufficiently flows due to the viscosity of the resin. In this example,
Due to the presence of the through hole in the center of the substrate member 100,
Since the resin can be injected from the central portion of the cavity 110 and the flow of the resin can be improved, the resin film can be formed thin. By this,
It is possible to reduce the amount of sink marks and the amount of distortion that accompany curing shrinkage during molding, and it is possible to form a highly accurate reflecting surface.
【００３３】図４はまた別の金型構造を示すものであ
る。この金型は、基板部材として上記図１乃至図２に示
す貫通孔のないものを用いるためのものである。固定側
型板１２０の内部には固定側コア１２１が嵌合され、可
動側型板１２２には可動側コア１２３が嵌合固定されて
いる。また、可動側ダイプレート１２４を通して導入さ
れる突出ロッド１２５により突き出されるように構成さ
れ、可動側コア１２３内に出没自在に収容された成形コ
ア１２６が設けられている。FIG. 4 shows another mold structure. This mold is for using the substrate member without the through hole shown in FIGS. 1 and 2 as the substrate member. A fixed core 121 is fitted inside the fixed mold plate 120, and a movable core 123 is fitted and fixed to the movable mold plate 122. Further, a molding core 126 configured to be projected by a projecting rod 125 introduced through the movable side die plate 124 and housed in the movable side core 123 so as to be retractable and retractable is provided.
【００３４】固定側型板１２０には導入孔１２０ａが設
けられ、固定側コア１２１にはゲート口１２１ａが形成
されている。固定側コア１２１の内部には、上記図１乃
至図２に記載されたものとほぼ同様の基板部材１３０が
インサート部品として位置決めピン１２７により位置決
めされた状態で嵌合固定されている。この状態で型を閉
じると、基板部材１３０、固定側コア１２１、可動側コ
ア１２３、成形コア１２６によってキャビティ１４０が
構成される。このキャビティ１４０内には、その側方に
設けられたゲート口１２１ａから樹脂が注入され、上記
と同様にして樹脂皮膜が形成される。The stationary mold plate 120 is provided with an introduction hole 120a, and the stationary core 121 is formed with a gate opening 121a. Substantially the same substrate member 130 as that described in FIGS. 1 and 2 is fitted and fixed inside the fixed core 121 in a state of being positioned by a positioning pin 127 as an insert component. When the mold is closed in this state, the substrate member 130, the fixed core 121, the movable core 123, and the molding core 126 form a cavity 140. Resin is injected into the cavity 140 from a gate opening 121a provided on the side thereof, and a resin film is formed in the same manner as described above.
【００３５】上述のように、上記実施例においては、基
板部材の表面にラフな曲面形状を予め形成しておき、そ
の表面上に樹脂皮膜を成形することによって高精度な曲
面形状を実現し、さらにその上に反射性薄膜を被着する
ことにより、迅速かつ容易に高精度な光学反射鏡を製造
できるので、製造コストを著しく低減できる。また、樹
脂皮膜の表面により光学的曲面を形成するので、任意の
曲面形状を容易に形成でき、種々の光学的用途に対応す
ることができる。また、基板部材により反射面の剛性及
び耐久性の向上と反射面の精度維持とを図ることができ
る一方、樹脂皮膜により反射面の精度と反射面の特殊形
状とを容易に得ることができ、両者の結合により、従来
よりも極めて低コストで精度の高い光学反射鏡を製造で
きるものである。As described above, in the above-described embodiment, a rough curved surface shape is formed in advance on the surface of the substrate member, and a resin film is molded on the surface to realize a highly accurate curved surface shape. Further, by depositing a reflective thin film on it, a highly accurate optical reflecting mirror can be manufactured quickly and easily, so that the manufacturing cost can be remarkably reduced. Further, since the optical curved surface is formed by the surface of the resin film, it is possible to easily form an arbitrary curved surface shape, and it is possible to cope with various optical applications. In addition, the substrate member can improve the rigidity and durability of the reflecting surface and maintain the accuracy of the reflecting surface, while the resin film can easily obtain the accuracy of the reflecting surface and the special shape of the reflecting surface. By combining the two, it is possible to manufacture a highly accurate optical reflecting mirror at a much lower cost than before.
【００３６】上記実施例においては、基板部材の上に直
接に樹脂皮膜を成形したが、基板部材と樹脂皮膜との間
に接着層を設けたり、基板部材の表面の凹凸を平滑化す
る、基板部材との熱膨張率の相違を緩和するなどの種々
の目的で他の層を設ける等、樹脂皮膜を基板部材上に間
接的に形成しても良い。また、表面に形成する反射性薄
膜は、全反射膜に限らず、ハーフミラーや偏光反射膜等
の種々の反射特性を備えたものが包含される。In the above embodiment, the resin film was formed directly on the substrate member. However, an adhesive layer may be provided between the substrate member and the resin film, or unevenness on the surface of the substrate member may be smoothed. The resin film may be indirectly formed on the substrate member, for example, by providing another layer for various purposes such as relaxing the difference in the coefficient of thermal expansion from the member. Further, the reflective thin film formed on the surface is not limited to a total reflection film, but includes a film having various reflection characteristics such as a half mirror and a polarized reflection film.
【００３７】[0037]
【発明の効果】以上説明したように本発明によれば以下
の効果を奏する。請求項１によれば、基板部材に反射面
にほぼ沿った表面部を設け、この上に表面を光学的精度
をもった表面を備えた樹脂皮膜を成形して、この樹脂皮
膜の表面上に反射性薄膜を形成することにより、反射面
を樹脂皮膜の成形により精度良く形成しつつ、樹脂皮膜
の強度不足、歪み発生等を基板部材の支持により補完す
ることができるので、高精度の光学反射鏡とすることが
できる。ここで、基板部材には反射面にほぼ沿った表面
部を設けるだけでよいため、基板部材の加工精度は不要
であり、さらに、インサート成形の技術により樹脂皮膜
の成形も容易にできるので、迅速かつ低コストに製造で
きる。As described above, the present invention has the following effects. According to claim 1, the substrate member is provided with a surface portion substantially along the reflecting surface, a resin film having a surface having optical accuracy is formed on the surface portion, and the resin film is formed on the surface of the resin film. By forming a reflective thin film, the reflective surface can be formed accurately by molding a resin film, while the lack of strength and distortion of the resin film can be complemented by the support of the substrate member. It can be a mirror. Here, since it is only necessary to provide the surface portion of the substrate member substantially along the reflecting surface, the processing accuracy of the substrate member is not required, and the resin film can be easily formed by the insert molding technique. And it can be manufactured at low cost.
【００３８】請求項２によれば、上記基板部材を低膨張
係数を備えた材質で構成することにより、熱膨張に伴う
反射面の変形を抑制することができる。According to the second aspect, by forming the substrate member with a material having a low expansion coefficient, it is possible to suppress the deformation of the reflecting surface due to the thermal expansion.
【００３９】請求項３によれば、樹脂皮膜についても低
膨張係数を備えた材質で構成することにより、熱膨張に
伴う反射面の変形をさらに低減することができる。According to the third aspect, since the resin film is also made of a material having a low expansion coefficient, it is possible to further reduce the deformation of the reflecting surface due to the thermal expansion.
【００４０】請求項４によれば、線膨張係数が低い点で
液晶ポリマー若しくは非晶性樹脂を用いて樹脂皮膜を形
成することが好ましい。According to the fourth aspect, it is preferable to form the resin film by using the liquid crystal polymer or the amorphous resin because of its low linear expansion coefficient.
【００４１】請求項５によれば、基板部材の表面部に樹
脂皮膜側から反射面の光軸方向に見て隠れる部分を持つ
表面構造を設けることにより、成形の離型時に樹脂皮膜
と基板部材との密着力を高めることができるので、基板
部材から樹脂皮膜が剥がれ落ちることがなく、また、製
造後においても、基板部材と樹脂皮膜との剥離を防止す
ることができる。According to the fifth aspect of the present invention, the surface structure of the substrate member is provided with a portion hidden from the resin film side when viewed in the optical axis direction of the reflection surface from the resin film side. Since it is possible to increase the adhesiveness with the resin film, it is possible to prevent the resin film from peeling off from the substrate member, and to prevent the substrate member and the resin film from peeling off even after the manufacturing.
【００４２】請求項６によれば、基板部材には反射面に
ほぼ沿った表面部を設けるだけでよいため、基板部材の
加工精度は不要であり、さらに、インサート成形の技術
により樹脂皮膜の成形も容易にできるので、迅速かつ低
コストに製造できる。また、反射面は樹脂皮膜の表面形
状により形成することができるので、非球面等の特殊な
形状でも高精度に形成することができる。According to the sixth aspect of the present invention, since the substrate member need only be provided with the surface portion substantially along the reflecting surface, the processing precision of the substrate member is not required, and the resin coating is formed by the insert molding technique. Since it can be easily manufactured, it can be manufactured quickly and at low cost. Further, since the reflecting surface can be formed by the surface shape of the resin film, it can be formed with high precision even in a special shape such as an aspherical surface.
【００４３】請求項７によれば、基板部材の表面部に成
形時においてアンダーカット部を樹脂皮膜に形成するた
めの表面構造を形成することにより、成形の離型時に樹
脂皮膜と基板部材との密着力を高めることができるの
で、基板部材から樹脂皮膜が剥がれ落ちることがなく、
また、製造後においても、基板部材と樹脂皮膜との剥離
を防止することができる。According to the seventh aspect, the surface structure for forming the undercut portion in the resin film at the time of molding is formed on the surface part of the substrate member, so that the resin film and the substrate member can be separated from each other at the time of mold release. Since the adhesion can be increased, the resin film does not peel off from the substrate member,
Further, it is possible to prevent peeling between the substrate member and the resin film even after the manufacturing.
【図１】本発明に係る光学反射鏡の実施例の製造工程を
示す概略工程図である。FIG. 1 is a schematic process drawing showing a manufacturing process of an embodiment of an optical reflecting mirror according to the present invention.
【図２】本発明に係る光学反射鏡の別の実施例を示す拡
大断面図（ａ）及び拡大正面図（ｂ）である。FIG. 2 is an enlarged sectional view (a) and an enlarged front view (b) showing another embodiment of the optical reflecting mirror according to the present invention.
【図３】本発明に係る光学反射鏡のさらに別の実施例を
示す拡大断面図（ａ）及び拡大平面図（ｂ）である。FIG. 3 is an enlarged sectional view (a) and an enlarged plan view (b) showing still another embodiment of the optical reflecting mirror according to the present invention.
【図４】上記実施例の製造工程のうち、樹脂皮膜を形成
する工程において使用する射出成形時の金型構造を示す
断面図である。FIG. 4 is a cross-sectional view showing the mold structure at the time of injection molding used in the step of forming a resin film in the manufacturing steps of the above-described embodiment.
【図５】上記実施例の製造工程のうち、樹脂皮膜を形成
する工程において使用する射出成形時の別の金型構造を
示す断面図である。FIG. 5 is a cross-sectional view showing another mold structure at the time of injection molding used in the step of forming the resin film in the manufacturing steps of the above-mentioned embodiment.
１，５，７，１００，１３０ 基板部材 ２ 型板 ３ 樹脂 ４ 金属薄膜 １０ 凹面部 ２０ 凸面部 ３０ 樹脂皮膜 ６２ 中央凹部 ６３，６４ 環状溝 ７１ 螺旋溝 １１０，１４０ キャビティ ９９，１２６ 成形コア 1, 5, 7, 100, 130 Substrate member 2 Template 3 Resin 4 Metal thin film 10 Concave part 20 Convex part 30 Resin film 62 Central recess 63, 64 Annular groove 71 Spiral groove 110, 140 Cavity 99, 126 Molded core
Claims (7)
反射鏡において、 前記反射面にほぼ沿った表面部を有する基板部材と、 前記表面部の上に直接若しくは間接的に、光学的精度を
備えた曲面からなる表面を持つように成形された樹脂皮
膜と、 該樹脂皮膜の表面上に被着された反射性薄膜とを有する
ことを特徴とする光学反射鏡。1. An optical reflecting mirror having a reflecting surface having a predetermined curved surface, wherein a substrate member having a surface portion substantially along the reflecting surface, and optical accuracy directly or indirectly on the surface portion. An optical reflecting mirror comprising: a resin film formed so as to have a curved surface provided with: and a reflective thin film deposited on the surface of the resin film.
ラス、セラミックス、その他の低膨張係数を備えた材質
で構成されていることを特徴とする光学反射鏡。2. The optical reflecting mirror according to claim 1, wherein the substrate member is made of glass, ceramics, or other material having a low expansion coefficient.
膨張係数を備えた樹脂材料で成形されていることを特徴
とする光学反射鏡。3. The optical reflecting mirror according to claim 2, wherein the resin film is formed of a resin material having a low expansion coefficient.
ポリマー若しくは非晶性樹脂からなることを特徴とする
光学反射鏡。4. The optical reflecting mirror according to claim 3, wherein the resin film is made of a liquid crystal polymer or an amorphous resin.
部には、前記樹脂皮膜側から前記反射面の光軸方向に見
て隠れる部分を持つ表面構造を備えていることを特徴と
する光学反射鏡。5. The optical structure according to claim 1, wherein the surface portion of the substrate member has a surface structure having a portion hidden from the resin film side in the optical axis direction of the reflecting surface. Reflector.
反射鏡の製造方法において、 前記反射面にほぼ沿った表面部を有する基板部材を形成
し、該基板部材を金型内に収容してインサート成形によ
り前記表面部上に光学的精度を備えた曲面からなる表面
を持つように樹脂皮膜を成形し、その後、該樹脂皮膜の
表面上に反射薄膜を形成することを特徴とする光学反射
鏡の製造方法。6. A method of manufacturing an optical reflecting mirror having a reflecting surface having a predetermined curved surface, wherein a substrate member having a surface portion substantially along the reflecting surface is formed, and the substrate member is housed in a mold. Optical reflection characterized by forming a resin film on the surface part by insert molding so that it has a curved surface with optical accuracy, and then forming a reflective thin film on the surface of the resin film. Mirror manufacturing method.
部には、前記成形時においてアンダーカット部を前記樹
脂皮膜に形成するための表面構造を形成することを特徴
とする光学反射鏡の製造方法。7. The optical reflecting mirror according to claim 6, wherein a surface structure for forming an undercut portion on the resin film at the time of molding is formed on the surface portion of the substrate member. Method.
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP1753595A JPH08190007A (en) | 1995-01-09 | 1995-01-09 | Optical reflection mirror and its production |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP1753595A JPH08190007A (en) | 1995-01-09 | 1995-01-09 | Optical reflection mirror and its production |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| JPH08190007A true JPH08190007A (en) | 1996-07-23 |
Family
ID=11946623
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP1753595A Pending JPH08190007A (en) | 1995-01-09 | 1995-01-09 | Optical reflection mirror and its production |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPH08190007A (en) |
Cited By (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN113106403A (en) * | 2020-01-09 | 2021-07-13 | 昆山微电子技术研究院 | Coating method for inner curved surface of optical device |
-
1995
- 1995-01-09 JP JP1753595A patent/JPH08190007A/en active Pending
Cited By (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN113106403A (en) * | 2020-01-09 | 2021-07-13 | 昆山微电子技术研究院 | Coating method for inner curved surface of optical device |
Similar Documents
| Publication | Publication Date | Title |
|---|---|---|
| US5468141A (en) | Mold for injection molding of thermoplastic resin | |
| US9387612B2 (en) | Methods and systems for forming a dual layer housing | |
| US20080048349A1 (en) | Low-cost plastic spherical mirror | |
| CN1715034B (en) | Injection mold and injection molding apparatus | |
| JP2002096335A (en) | Mold for molding optical element and method for molding optical element | |
| US11358311B2 (en) | Optical element and method for manufacturing optical element | |
| US5067800A (en) | Composite optical article and method of manufacture thereof | |
| JPH08187793A (en) | Plastic optical member and production thereof | |
| US5717532A (en) | Reflection-type compound optical elements | |
| JPH08190007A (en) | Optical reflection mirror and its production | |
| JPH08201672A (en) | Fixing structure of optical member | |
| JP2008168646A (en) | Molding process of optical element | |
| JPS62144908A (en) | Manufacturing method for fresnel lens molding tool | |
| US5484324A (en) | Stamper for injection molding | |
| US4690370A (en) | Rhodium coated mold | |
| JP4345123B2 (en) | Resin bonded optical element and manufacturing method thereof | |
| JP2004341048A (en) | Optical reflection mirror | |
| JP2774472B2 (en) | Optical reflection mirror and its manufacturing method | |
| JPH11165323A (en) | Mold molding tool and its molding method | |
| JPH03128218A (en) | Manufacture of optical reflecting mirror and molding die | |
| US20020041441A1 (en) | Optical element with microstructures | |
| JP6775107B2 (en) | Manufacturing method of reflective display device, injection mold, and reflective display device | |
| KR20080012297A (en) | Mold for disc molding, mirror plate, and process for producing mold for disc molding | |
| JPH08156030A (en) | Disk molding tool and disk molding method using same | |
| JPH0552481B2 (en) |