JPH08185819A - Fluorescent printer head - Google Patents
Fluorescent printer headInfo
- Publication number
- JPH08185819A JPH08185819A JP32456094A JP32456094A JPH08185819A JP H08185819 A JPH08185819 A JP H08185819A JP 32456094 A JP32456094 A JP 32456094A JP 32456094 A JP32456094 A JP 32456094A JP H08185819 A JPH08185819 A JP H08185819A
- Authority
- JP
- Japan
- Prior art keywords
- printer head
- fluorescent
- driving circuit
- film
- thin film
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Granted
Links
Landscapes
- Printers Or Recording Devices Using Electromagnetic And Radiation Means (AREA)
- Cathode-Ray Tubes And Fluorescent Screens For Display (AREA)
Abstract
Description
【０００１】[0001]
【産業上の利用分野】本発明は蛍光プリンタヘッドに関
し、特に駆動回路を内蔵した蛍光プリンタヘッドに関す
る。BACKGROUND OF THE INVENTION 1. Field of the Invention The present invention relates to a fluorescent printer head, and more particularly to a fluorescent printer head having a drive circuit built therein.
【０００２】[0002]
【従来の技術】デジタル電子写真式複写機やプリンタ，
ファクシミリ装置に用いられている画像形成装置は、帯
電、露光、現像、転写のそれぞれの工程を順次繰り返す
ことにより、画像を形成する。具体的には、コロナ放電
等の帯電手段により帯電された感光体に、露光装置によ
る光信号の書き込みを行うことにより静電潜像が形成さ
れる。これをトナーにより現像し、その画像を転写紙上
に転写する。2. Description of the Related Art Digital electrophotographic copying machines and printers,
An image forming apparatus used in a facsimile machine forms an image by sequentially repeating the steps of charging, exposing, developing and transferring. Specifically, an electrostatic latent image is formed by writing an optical signal by an exposure device on a photoconductor charged by a charging unit such as corona discharge. This is developed with toner, and the image is transferred onto transfer paper.
【０００３】一般に、これらの露光装置は半導体レーザ
を光源とし、ポリゴンミラーによりビームを紙送り方向
とは垂直方向に走査する方法、もしくは１次元に配列さ
れたＬＥＤアレイを用いた光ヘッドを用いている。Generally, these exposure apparatuses use a semiconductor laser as a light source and scan a beam with a polygon mirror in a direction perpendicular to the paper feeding direction, or use an optical head using a one-dimensionally arranged LED array. There is.
【０００４】このような露光装置に対し、蛍光表示管を
発光素子として用いた蛍光プリンタヘッドが提案（画像
電子学会誌、１９９年、第２０巻、第４号、第３７３頁
参照）され、さらに小型、高性能、低コストを実現する
ための手段としてポリシリコン薄膜トランジスタにより
駆動される蛍光プリンタヘッド（Ｓｏｃｉｅｔｙ ｏｆ
Ｐｈｏｔｏ−Ｏｐｔｉｃａｌ Ｉｎｓｔｒｕｍｅｎｔ
ａｔｉｏｎ Ｅｎｇｉｎｅｅｒｓ−Ｔｈｅ Ｉｎｔｅｒ
ｎａｔｉｏｎａｌ Ｓｏｃｉｅｔｙ ｆｏｒＯｐｔｉｃ
ａｌ Ｅｎｇｉｎｅｅｒｉｎｇ，Ｐｒｏｃｅｅｄｉｎ
ｇ．第２１７１巻、第６６頁、１９９４年、参照）が提
案されている。For such an exposure apparatus, a fluorescent printer head using a fluorescent display tube as a light emitting element has been proposed (see Journal of Image Electronics Engineers, 199, Volume 20, No. 4, page 373). A fluorescent printer head driven by a polysilicon thin film transistor as a means for realizing small size, high performance, and low cost.
Photo-Optical Instrument
ation Engineers-The Inter
national Society for Optic
al Engineering, Proceedin
g. 2171, 66, 1994).
【０００５】図３は従来の蛍光プリンタヘッドを説明す
るための模式的断面図である。FIG. 3 is a schematic sectional view for explaining a conventional fluorescent printer head.
【０００６】図３に示すように、ガラス基板１の上にポ
リシリコン薄膜トランジスタ（ＴＦＴ）を用いた駆動回
路２２をガラス基板１，真空容器側壁２０，ガラス板２
１で囲まれた真空容器内に内蔵させて形成し、この真空
容器内に形成して直熱形カソードとなるフィラメント２
６から放出される熱電子を加速してアノード上の蛍光体
膜３４に衝突させ発光させる電子管で、駆動回路２２を
含む表面に形成した絶縁膜２７の上の蛍光体膜３４の近
傍に設けたグリッド２５により蛍光体膜３４に衝突させ
る電子流を制御する。As shown in FIG. 3, a driving circuit 22 using a polysilicon thin film transistor (TFT) is provided on a glass substrate 1, a glass substrate 1, a vacuum container side wall 20, and a glass plate 2.
Filament 2 which is formed by being built in a vacuum container surrounded by 1 and which is formed in this vacuum container to serve as a directly heated cathode 2
An electron tube for accelerating thermoelectrons emitted from 6 to collide with the phosphor film 34 on the anode to emit light, and is provided in the vicinity of the phosphor film 34 on the insulating film 27 formed on the surface including the drive circuit 22. The grid 25 controls the electron flow that collides with the phosphor film 34.
【０００７】このような蛍光プリンタヘッドは、各蛍光
体膜に薄膜トランジスタ駆動回路２２を接続して蛍光体
膜の電位を制御、保持するスタティック駆動を行うこと
により、低電圧ながらも高い輝度を得ることができる。
また、６００℃以下の低温プロセスで作成されるポリシ
リコン薄膜トランジスタ駆動回路２２を、蛍光表示管を
構成する真空容器内部に内蔵して形成することにより、
蛍光プリンタヘッドの小型化、コスト低減が得られる。In such a fluorescent printer head, a thin film transistor drive circuit 22 is connected to each phosphor film to perform static drive for controlling and maintaining the potential of the phosphor film, thereby obtaining high brightness at a low voltage. You can
Further, by forming the polysilicon thin film transistor drive circuit 22 formed by a low temperature process of 600 ° C. or lower in the vacuum container constituting the fluorescent display tube,
It is possible to reduce the size and cost of the fluorescent printer head.
【０００８】[0008]
【発明が解決しようとする課題】この従来の蛍光プリン
タヘッドは、駆動回路を真空容器に内蔵して蛍光表示部
に近接させて配置しているため、電源又は接地端子から
の配線が長くなり、駆動回路に外部から電磁波が進入し
易く、そのノイズにより駆動回路が誤動作し易いという
問題があった。In this conventional fluorescent printer head, since the driving circuit is built in the vacuum container and arranged in the vicinity of the fluorescent display portion, the wiring from the power source or the ground terminal becomes long, There is a problem in that electromagnetic waves easily enter the drive circuit from the outside and the noise easily causes the drive circuit to malfunction.
【０００９】電子写真式画像形成装置においては、感光
体の帯電、転写時に数キロボルト程度の高電圧が必要で
あり、また、感光体駆動用のモータなどノイズ源も多
い。半導体レーザによる方法では、発光部を感光体から
離れた位置に配置可能であり電磁シールドも容易にでき
るが、蛍光プリントヘッドを用いる場合、画像形成装置
の小型化に伴い特に帯電器と露光器が非常に近接して配
置されることが多く、ノイズによる誤動作を生じ易い。In the electrophotographic image forming apparatus, a high voltage of several kilovolts is required at the time of charging and transferring the photoconductor, and there are many noise sources such as a motor for driving the photoconductor. In the method using the semiconductor laser, the light emitting portion can be arranged at a position away from the photoconductor, and the electromagnetic shield can be easily provided.However, when the fluorescent print head is used, the charger and the exposure device are especially required as the image forming apparatus is downsized. It is often arranged very close to each other, and malfunction due to noise is likely to occur.
【００１０】本発明の目的は、外部ノイズによる誤動作
を防止した蛍光プリンタヘッドを提供することにある。An object of the present invention is to provide a fluorescent printer head which prevents malfunction due to external noise.
【００１１】[0011]
【課題を解決するための手段】本発明の第１の蛍光プリ
ンタヘッドは、薄膜トランジスタを用いて構成される駆
動回路を蛍光表示部の真空容器内に内蔵させた蛍光プリ
ンタヘッドにおいて、前記駆動回路の周囲を取囲んで被
覆し外部ノイズを遮蔽する導電体膜を有する。A first fluorescent printer head of the present invention is a fluorescent printer head in which a driving circuit formed by using thin film transistors is built in a vacuum container of a fluorescent display section. It has a conductive film that surrounds and covers the surroundings to shield external noise.
【００１２】本発明の第２の蛍光プリンタヘッドは、薄
膜トランジスタを用いて構成される駆動回路を蛍光表示
部の真空容器内に内蔵させた蛍光プリンタヘッドにおい
て、前記真空容器の外表面を被覆して設けた透明導電体
膜を有する。A second fluorescent printer head of the present invention is a fluorescent printer head in which a driving circuit constituted by using a thin film transistor is built in a vacuum container of a fluorescent display section, and the outer surface of the vacuum container is covered. It has a provided transparent conductor film.
【００１３】[0013]
【実施例】次に、本発明について図面を参照して説明す
る。Next, the present invention will be described with reference to the drawings.
【００１４】図１は本発明の第１の実施例を説明するた
めの模式的断面図である。FIG. 1 is a schematic sectional view for explaining a first embodiment of the present invention.
【００１５】図１に示すように、ガラス基板１の上にリ
ンをドープした低抵抗のポリシリコン膜を減圧気相成長
（ＬＰＣＶＤ）法により堆積した厚さ１００ｎｍの導電
体膜２と酸化シリコン膜からなる絶縁膜３とを順次積層
して形成した後、この２層を順次パターニングする。次
に、酸化シリコン膜の上にアモルファスシリコン膜を１
００ｎｍの厚さに堆積してアモルファスシリコン膜にＮ
チャネルＴＦＴ形成用のリン及びＰチャネルＴＦＴ形成
用のホウ素を選択的にそれぞれイオン注入した後エキシ
マレーザ（波長３０８ｎｍ）を照射してアニールし、こ
れをパターニングしてポリシリコン層からなるチャネル
層４及び低抵抗ポリシリコン層からなるソース・ドレイ
ン領域５を形成する。As shown in FIG. 1, a low resistance polysilicon film doped with phosphorus is deposited on a glass substrate 1 by low pressure vapor deposition (LPCVD) to form a 100 nm thick conductor film 2 and a silicon oxide film. After the insulating film 3 made of is sequentially laminated, the two layers are sequentially patterned. Next, an amorphous silicon film is formed on the silicon oxide film.
The amorphous silicon film is deposited with a thickness of 00 nm and N
Phosphorus for forming a channel TFT and boron for forming a P-channel TFT are selectively ion-implanted, and then an excimer laser (wavelength 308 nm) is irradiated to anneal, and this is patterned to form a channel layer 4 made of a polysilicon layer and Source / drain regions 5 made of a low resistance polysilicon layer are formed.
【００１６】次に、全面にＬＰＣＶＤ法により酸化シリ
コン膜を１５０ｎｍの厚さに堆積してゲート絶縁膜８を
形成し、ゲート絶縁膜８の上にリンをドープしたポリシ
リコン膜を２００ｎｍの厚さに堆積してパターニング
し、ゲート電極７を形成し、薄膜トランジスタ（ＴＦ
Ｔ）アレイを形成する。次に、ゲート電極７を含む表面
にスパッタ法により酸化シリコン膜を３００ｎｍの厚さ
に堆積して層間絶縁膜９を堆積する。次に、層間絶縁膜
９及びゲート絶縁膜８を選択的にエッチングして第１の
コンタクトホールを形成し、第１のコンタクトホールを
含む表面にアルミニウム膜を堆積してパターニングし、
第１のコンタクトホールのソース・ドレイン領域５と接
続するアルミニウム配線６を形成する。次に、全面にス
パッタ法により酸化シリコン膜を３００ｎｍの厚さに堆
積して保護膜１０を形成し、導電体膜２に達する第２の
コンタクトホールを形成してアルミニウム膜を堆積して
パターニングし、第２のコンタクトホールの導電体膜２
と接続してＴＦＴアレイの上を被覆する導電体膜１１を
形成する。ここで、導電体膜２は接地され、外部からの
ノイズを遮蔽して蛍光プリンタヘッドの誤動作を防止す
る。Next, a silicon oxide film is deposited on the entire surface by LPCVD to a thickness of 150 nm to form a gate insulating film 8, and a phosphorus-doped polysilicon film having a thickness of 200 nm is formed on the gate insulating film 8. Then, the gate electrode 7 is formed on the thin film transistor (TF) and patterned.
T) Form an array. Then, a silicon oxide film is deposited to a thickness of 300 nm on the surface including the gate electrode 7 by a sputtering method to deposit an interlayer insulating film 9. Next, the interlayer insulating film 9 and the gate insulating film 8 are selectively etched to form a first contact hole, and an aluminum film is deposited and patterned on the surface including the first contact hole,
An aluminum wiring 6 connected to the source / drain region 5 of the first contact hole is formed. Next, a silicon oxide film is deposited to a thickness of 300 nm on the entire surface by sputtering to form a protective film 10, a second contact hole reaching the conductor film 2 is formed, and an aluminum film is deposited and patterned. , The conductor film 2 of the second contact hole
Then, a conductor film 11 covering the TFT array is formed by connecting with the. Here, the conductor film 2 is grounded and shields noise from the outside to prevent malfunction of the fluorescent printer head.
【００１７】図２は本発明の第２の実施例を説明するた
めの模式的断面図である。FIG. 2 is a schematic sectional view for explaining the second embodiment of the present invention.
【００１８】図２に示すように、ガラス基板１の上に第
１の実施例で説明した薄膜トランジスタにより構成され
る駆動回路２２を搭載してガラス基板１，真空容器側壁
２０，ガラス板２１で囲まれる真空容器内に内蔵させ、
真空容器内のフィラメント２６から放出される熱電子を
加速して衝突させ発光させる蛍光体膜２４を配線２３を
介して駆動回路２２に接続し、蛍光体膜２４の電位を制
御する。駆動回路２２を含む表面に形成した絶縁膜２７
上の蛍光体膜２４の近傍に設けたグリッド２５により電
子流を制御する。このように構成した蛍光プリンタヘッ
ドの外表面にＩＴＯ（Ｉｎｄｉｕｍ Ｔｉｎ Ｏｘｉｄ
ｅ）からなる透明導電膜２８を形成して被覆し接地する
ことにより外部からのノイズを遮蔽し、駆動回路２２の
誤動作を防止している。As shown in FIG. 2, a drive circuit 22 constituted by the thin film transistor described in the first embodiment is mounted on a glass substrate 1 and surrounded by a glass substrate 1, a vacuum container side wall 20 and a glass plate 21. Built in the vacuum container,
The phosphor film 24 that accelerates and collides the thermoelectrons emitted from the filament 26 in the vacuum container to emit light is connected to the drive circuit 22 via the wiring 23, and the potential of the phosphor film 24 is controlled. Insulating film 27 formed on the surface including drive circuit 22
The grid 25 provided near the upper phosphor film 24 controls the electron flow. An ITO (Indium Tin Oxid) is formed on the outer surface of the fluorescent printer head configured as described above.
By forming and covering the transparent conductive film 28 made of e), noise from the outside is shielded by the grounding and the malfunction of the drive circuit 22 is prevented.
【００１９】[0019]
【発明の効果】以上説明したように本発明は、薄膜トラ
ンジスタを用いる駆動回路を蛍光表示部の真空容器内に
内蔵させた蛍光プリンタヘッドの駆動回路又は蛍光プリ
ンタヘッドの外表面を導電体膜で被覆することにより、
外部ノイズを遮蔽して駆動回路の誤動作を防止できると
いう効果を有する。As described above, according to the present invention, the driving circuit of the fluorescent printer head in which the driving circuit using the thin film transistor is built in the vacuum container of the fluorescent display portion or the outer surface of the fluorescent printer head is covered with the conductor film. By doing
This has the effect of shielding external noise and preventing malfunction of the drive circuit.
【図１】本発明の第１の実施例を説明するための模式的
断面図。FIG. 1 is a schematic sectional view for explaining a first embodiment of the present invention.
【図２】本発明の第２の実施例を説明するための模式的
断面図。FIG. 2 is a schematic sectional view for explaining a second embodiment of the present invention.
【図３】従来の蛍光プリンタヘッドの一例を説明するた
めの模式的断面図。FIG. 3 is a schematic cross-sectional view for explaining an example of a conventional fluorescent printer head.
１ ガラス基板 ２，１１ 導電体膜 ３，２７ 絶縁膜 ４ チャネル層 ５ ソース・ドレイン領域 ６ アルミニウム配線 ７ ゲート電極 ８ ゲート絶縁膜 ９ 層間絶縁膜 １０ 保護膜 ２０ 真空容器側壁 ２１ ガラス板 ２２ 駆動回路 ２３ 配線 ２４ 蛍光体膜 ２５ グリッド ２６ フィラメント ２８ 透明導電体膜 1 Glass Substrate 2, 11 Conductor Film 3, 27 Insulating Film 4 Channel Layer 5 Source / Drain Region 6 Aluminum Wiring 7 Gate Electrode 8 Gate Insulating Film 9 Interlayer Insulating Film 10 Protective Film 20 Vacuum Container Sidewall 21 Glass Plate 22 Drive Circuit 23 Wiring 24 Phosphor film 25 Grid 26 Filament 28 Transparent conductor film
Claims (2)
動回路を蛍光表示部の真空容器内に内蔵させた蛍光プリ
ンタヘッドにおいて、前記駆動回路の周囲を取囲んで被
覆し外部ノイズを遮蔽する導電体膜を有することを特徴
とする蛍光プリンタヘッド。1. A fluorescent printer head in which a driving circuit formed by using a thin film transistor is built in a vacuum container of a fluorescent display section, and a conductor film surrounding and surrounding the driving circuit to shield external noise. A fluorescent printer head having:
動回路を蛍光表示部の真空容器内に内蔵させた蛍光プリ
ンタヘッドにおいて、前記真空容器の外表面を被覆して
設けた透明導電体膜を有することを特徴とする蛍光プリ
ンタヘッド。2. A fluorescent printer head in which a drive circuit configured by using a thin film transistor is built in a vacuum container of a fluorescent display unit, and a transparent conductor film provided so as to cover an outer surface of the vacuum container. Fluorescent printer head characterized by.
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP32456094A JP2820047B2 (en) | 1994-12-27 | 1994-12-27 | Fluorescent printer head |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP32456094A JP2820047B2 (en) | 1994-12-27 | 1994-12-27 | Fluorescent printer head |
Publications (2)
| Publication Number | Publication Date |
|---|---|
| JPH08185819A true JPH08185819A (en) | 1996-07-16 |
| JP2820047B2 JP2820047B2 (en) | 1998-11-05 |
Family
ID=18167181
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP32456094A Expired - Lifetime JP2820047B2 (en) | 1994-12-27 | 1994-12-27 | Fluorescent printer head |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JP2820047B2 (en) |
Cited By (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| KR100424967B1 (en) * | 1996-05-03 | 2004-07-23 | 마이크론 테크놀로지 인코포레이티드 | Shielded field emission display |
Citations (5)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPS63129952U (en) * | 1987-02-17 | 1988-08-25 | ||
| JPS6417377A (en) * | 1987-07-10 | 1989-01-20 | Matsushita Electric Ind Co Ltd | Line light source device for printer |
| JPH0162648U (en) * | 1987-10-13 | 1989-04-21 | ||
| JPH03133036A (en) * | 1989-10-19 | 1991-06-06 | Seiko Epson Corp | Active matrix-type fluorescent display apparatus |
| JPH0554839A (en) * | 1991-08-26 | 1993-03-05 | Nec Corp | Fluorescent character display panel |
-
1994
- 1994-12-27 JP JP32456094A patent/JP2820047B2/en not_active Expired - Lifetime
Patent Citations (5)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPS63129952U (en) * | 1987-02-17 | 1988-08-25 | ||
| JPS6417377A (en) * | 1987-07-10 | 1989-01-20 | Matsushita Electric Ind Co Ltd | Line light source device for printer |
| JPH0162648U (en) * | 1987-10-13 | 1989-04-21 | ||
| JPH03133036A (en) * | 1989-10-19 | 1991-06-06 | Seiko Epson Corp | Active matrix-type fluorescent display apparatus |
| JPH0554839A (en) * | 1991-08-26 | 1993-03-05 | Nec Corp | Fluorescent character display panel |
Cited By (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| KR100424967B1 (en) * | 1996-05-03 | 2004-07-23 | 마이크론 테크놀로지 인코포레이티드 | Shielded field emission display |
Also Published As
| Publication number | Publication date |
|---|---|
| JP2820047B2 (en) | 1998-11-05 |
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