JPH081592Y2 - Ceramic plate heater support structure - Google Patents
Ceramic plate heater support structureInfo
- Publication number
- JPH081592Y2 JPH081592Y2 JP1992081494U JP8149492U JPH081592Y2 JP H081592 Y2 JPH081592 Y2 JP H081592Y2 JP 1992081494 U JP1992081494 U JP 1992081494U JP 8149492 U JP8149492 U JP 8149492U JP H081592 Y2 JPH081592 Y2 JP H081592Y2
- Authority
- JP
- Japan
- Prior art keywords
- plate heater
- ceramic plate
- heater
- support structure
- sic
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Expired - Lifetime
Links
Landscapes
- Resistance Heating (AREA)
Description
【考案の詳細な説明】[Detailed description of the device]
【０００１】[0001]
【産業上の利用分野】この考案は、例えば、乾燥機や調
理器あるいはＩＣ基板、チップ等を処理するような工業
用電気炉等に用いられるセラミック板状ヒータの支持構
造に関する。BACKGROUND OF THE INVENTION 1. Field of the Invention The present invention relates to a support structure for a ceramic plate heater used in, for example, a dryer, a cooker, an industrial electric furnace for processing IC substrates, chips and the like.
【０００２】[0002]
【従来の技術】従来、上述例のセラミック板状ヒータ、
例えばセラミックとしてＳｉＣ（炭化ケイ素、シリコン
カーバイトのこと）を用いたＳｉＣ板状ヒータの支持構
造としては図６に示す如き構造が想定される。2. Description of the Related Art Conventionally, a ceramic plate heater of the above-mentioned example,
For example, a structure as shown in FIG. 6 is assumed as a support structure of a SiC plate heater using SiC (silicon carbide, silicon carbide) as ceramics.
【０００３】すなわち、ＳｉＣ板状ヒータ６１の背面
に、ステンレス製のボルト６２およびナット６３を用い
て、凸型の絶縁碍子６４と凹型の絶縁碍子６５とを取付
け、これら両絶縁碍子６４，６５により形成され上述の
ボルト６２と完全に絶縁された環状の凹溝部６６に、ス
テンレス製のブラケット６７を配設して、このブラケッ
ト６７の基端部６７ａをステンレス製のベース６８にボ
ルトアップする支持構造である。That is, a convex type insulator 64 and a concave type insulator 65 are attached to the back surface of the SiC plate heater 61 by using stainless steel bolts 62 and nuts 63, and these insulators 64, 65 are used. A support structure in which a bracket 67 made of stainless steel is disposed in an annular groove 66 that is formed and is completely insulated from the bolt 62 described above, and a base end portion 67a of the bracket 67 is bolted up to a base 68 made of stainless steel. Is.
【０００４】しかし、このような従来のリジット固定構
造においては次のような問題点がある。つまり、ＳｉＣ
の熱膨張係数（５．５×１０-6／℃）とステンレスの熱
膨張係数との差異により、ＳｉＣ板状ヒータ６１とボル
ト６２との熱膨張率が大幅に異なるため、ステンレス製
ボルト６２の熱膨張応力がＳｉＣ板状ヒータ６１に作用
して、このＳｉＣ板状ヒータ６１が破損する問題点があ
り、また炉内の熱風でＳｉＣ板状ヒータ６１が振動した
場合には、このＳｉＣ板状ヒータ６１にクラックが発生
する問題点が懸念される。However, there are the following problems in such a conventional rigid fixing structure. That is, SiC
The coefficient of thermal expansion of the SiC plate heater 61 and the bolt 62 is greatly different due to the difference between the coefficient of thermal expansion (5.5 × 10 −6 / ° C.) of stainless steel and the coefficient of thermal expansion of stainless steel. There is a problem that the thermal expansion stress acts on the SiC plate heater 61 and the SiC plate heater 61 is damaged, and when the SiC plate heater 61 vibrates due to hot air in the furnace, the SiC plate heater 61 is vibrated. There is a concern that the heater 61 may crack.
【０００５】このような問題点を解決するために、無機
繊維質の断熱材や熱膨張緩衝材を用いた場合には、炉内
のクリーン度が阻害されるので、例えばＩＣ基板やチッ
プ等を処理するようなクリーン度が要求される処理炉に
おいては、無機繊維質の断熱材や熱膨張緩衝材を使用す
ることは不可能である。In order to solve such a problem, when an inorganic fiber heat insulating material or a thermal expansion buffer material is used, the cleanliness inside the furnace is impaired, so that, for example, an IC substrate, a chip, etc. In a processing furnace that requires cleanliness to be processed, it is impossible to use an inorganic fiber heat insulating material or a thermal expansion buffer material.
【０００６】[0006]
【考案が解決しようとする課題】この考案は、無機繊維
質の断熱材や熱膨張緩衝材を用いず、炉内のクリーン度
を確保しつつ、ユニットケースとセラミック板状ヒータ
との熱膨張係数の差異に起因する同板状ヒータの破損を
確実に防止することができ、また炉内の熱風による振動
を良好に吸収してセラミック板状ヒータにクラックが生
ずるのを確実に防止することができるセラミック板状ヒ
ータの支持構造の提供を目的とする。SUMMARY OF THE INVENTION The present invention does not use an inorganic fiber heat insulating material or a thermal expansion buffering material, and secures the cleanliness in the furnace, and the coefficient of thermal expansion between the unit case and the ceramic plate heater. It is possible to reliably prevent damage to the plate-shaped heater due to the difference between the two, and it is possible to reliably prevent the ceramic plate-shaped heater from cracking due to good absorption of vibration due to hot air in the furnace. An object is to provide a support structure for a ceramic plate heater.
【０００７】[0007]
【課題を解決するための手段】この考案は、炉内に配設
される炭化珪素（Ｓｉｃ）製セラミック板状ヒータの支
持構造であって、セラミック板状ヒータの外側部に複数
個被着する断面コ字状のＡｌ 2 Ｏ 3 製絶縁部材と、上記
絶縁部材の外側部に所定間隙を隔てて複数個被着する断
面コ字状のユニットケースと、上記絶縁部材およびユニ
ットケース間の所定間隙に介設され、上記セラミック板
状ヒータを下部より弾性支持する複数個の耐熱金属製バ
ネもしくはコイル状スプリングからなる付勢手段とを備
えたセラミック板状ヒータの支持構造であることを特徴
とする。SUMMARY OF THE INVENTION The present invention is a supporting structure for a ceramic plate heater made of silicon carbide (Sic) arranged in a furnace, and a plurality of ceramic plate heaters are attached to the outer side of the ceramic plate heater. An insulating member made of Al 2 O 3 having a U-shaped cross-section, a unit case having a U-shaped cross-section that is attached to the outer portion of the insulating member with a predetermined gap, and the predetermined gap between the insulating member and the unit case. A plurality of heat-resistant metal bars that elastically support the ceramic plate heater from below.
The support structure of the ceramic plate-shaped heater is provided with a biasing unit composed of a coil or a coil-shaped spring .
【０００８】[0008]
【考案の効果】この考案によれば、炭化珪素製セラミッ
ク板状ヒータを上述のような付勢手段で弾性支持するこ
とにより、従来の金属製ヒータのようなリジット固定を
回避したので、炭化珪素製セラミック板状ヒータに対し
て熱膨張応力が作用することなく、同炭化珪素製板状ヒ
ータの破損を確実に防止することができる効果がある。According to the present invention, the silicon carbide ceramic plate heater is elastically supported by the urging means as described above, thereby avoiding rigid fixing as in the conventional metal heater. Therefore, the thermal expansion stress does not act on the silicon carbide ceramic plate heater, and the silicon carbide plate heater can be reliably prevented from being damaged.
【０００９】また炉内の熱風により炭化珪素製セラミッ
ク板状ヒータが振動した際には、上述の付勢手段がこの
振動を吸収するので、炭化珪素製セラミック板状ヒータ
にクラックが発生するのを確実に防止することができる
効果がある。[0009] When the hot air by silicon carbide ceramic <br/> click plate heater in the furnace is vibrated, since the urging means described above to absorb the vibration, cracks in the ceramic plate heater silicon carbide There is an effect that it is possible to reliably prevent the occurrence of.
【００１０】加えて、無機繊維質の断熱材や熱膨張緩衝
材を用いないので、炉内のクリーン度を確保することが
でき、例えばＩＣ基板、チップ等を処理するようなクリ
ーン度が要求される処理炉に最適である。In addition, since no inorganic fiber heat insulating material or thermal expansion cushioning material is used, cleanliness in the furnace can be secured, and cleanliness is required, for example, for processing IC substrates, chips and the like. Most suitable for processing furnaces.
【００１１】さらに、上述の各効果を発揮しつつ、板状
ヒータを炭化珪素（ＳｉＣ）製と成したので抵抗発熱性
に優れることは勿論、この炭化珪素製セラミック板状ヒ
ータを複数個のＡｌ 2 Ｏ 3 製絶縁部材、複数個のユニッ
トケースおよび複数個の上記付勢手段で支持するため、
振動吸収性を確保しつつ、板状ヒータの良好な支持力を
確保することができる効果がある。 Further, while exhibiting the above-mentioned respective effects,
Since the heater is made of silicon carbide (SiC), resistance heating
Of course, this silicon carbide ceramic plate-shaped heater
A plurality of Al 2 O 3 insulating members and a plurality of units
To be supported by the case and a plurality of the biasing means,
Good support for the plate heater while ensuring vibration absorption
There is an effect that can be secured .
【００１２】[0012]
【実施例】この考案の一実施例を以下図面に基づいて詳
述する。図面はセラミック板状ヒータの支持構造を示
し、図１乃至図４において炉内に位置するステンレス製
のベース１を設け、このベース１の上下左右の合計４箇
所にはステンレス製のボルト２、ナット３を用いてブラ
ケット４…を取付けている。上述のブラケット４は図４
にも示す如く基端垂直部４ａと遊端垂直部４ｂとを中間
水平部４ｃで一体連結した断面略Ｚ字状のステンレス製
のブラケットである。そして、これら合計４個のブラケ
ット４…の炉内方側には後に詳述する支持機構５を介し
てＳｉＣ板状ヒータ６を取付けている。DETAILED DESCRIPTION OF THE PREFERRED EMBODIMENTS An embodiment of the present invention will be described in detail below with reference to the drawings. The drawings show a support structure for a ceramic plate heater. In FIGS. 1 to 4, a stainless steel base 1 is provided in the furnace, and stainless steel bolts 2 and nuts are provided at a total of four positions on the top, bottom, left and right of this base 1. 3 are used to attach the brackets 4 ... The above-mentioned bracket 4 is shown in FIG.
As is also shown, the base end vertical portion 4a and the free end vertical portion 4b are integrally connected by an intermediate horizontal portion 4c, which is a bracket made of stainless steel having a substantially Z-shaped cross section. Further, a SiC plate heater 6 is attached to the inside of the furnace of these four brackets 4 ... Through a supporting mechanism 5 which will be described in detail later.
【００１３】図１において左側の上下方向中央部にはベ
ース１にＬ字状のブラケット７を取付け、このブラケッ
ト７の起立部に配設された凸型絶縁碍子８および凹型絶
縁碍子９には、ターミナルボルト１０およびターミナル
ナット１１，１１を取付け、凹型絶縁碍子９内方（図１
の右方）のターミナルボルト１０およびターミナルナッ
ト１１間には例えばニッケル製の圧着端子１２，１２を
挟持させている。ここで、上述のターミナルボルト１０
およびターミナルナット１１はステンレスで構成されて
いるが、その他、ＮｉやインコネルなどＮｉ−Ｃｒ系の
耐熱合金で構成してもよい。In FIG. 1, an L-shaped bracket 7 is attached to the base 1 at the central portion in the vertical direction on the left side, and the convex insulator 8 and the concave insulator 9 arranged at the upright portion of the bracket 7 are Terminal bolts 10 and terminal nuts 11 and 11 are attached and the inside of the concave insulator 9 (see FIG.
Between the terminal bolt 10 and the terminal nut 11 (on the right side of FIG. 2), crimp terminals 12, 12 made of nickel, for example, are held. Here, the above-mentioned terminal bolt 10
The terminal nut 11 and the terminal nut 11 are made of stainless steel, but may be made of a Ni—Cr heat resistant alloy such as Ni or Inconel.
【００１４】上述の圧着端子１２，１２には２つのリー
ド碍子１３，１４で絶縁保護されたリード線１５，１５
の一端を接続する一方、ＳｉＣ板状ヒータ６の中央部上
下に取付けた電極１６，１６に、上述の各リード線１
５，１５を電気接続している。Lead wires 15, 15 insulated and protected by two lead insulators 13, 14 are provided on the above-mentioned crimp terminals 12, 12.
One end of each of the lead wires 1 is connected to the electrodes 16 and 16 mounted above and below the central portion of the SiC plate heater 6.
5 and 15 are electrically connected.
【００１５】すなわち、上述の電極１６，１６を図３に
示す如くステンレス製のボルトで構成し、このボルトに
螺合した複数の電極ナット１７，１７間に圧着端子１
８，１８を挟持させると共に、この圧着端子１８，１８
には２つのリード碍子１９，２０を介してリード線１
５，１５の他端を接続している。That is, the above-mentioned electrodes 16 and 16 are constituted by stainless steel bolts as shown in FIG. 3, and the crimp terminal 1 is provided between a plurality of electrode nuts 17 and 17 screwed onto the bolts.
8 and 18 are clamped, and these crimp terminals 18 and 18
The lead wire 1 through the two lead insulators 19 and 20.
The other ends of 5, 15 are connected.
【００１６】ところで、上述の支持機構５は図４に示す
如く構成している。つまり、ＳｉＣ板状ヒータ６の上下
の各外側部（但し、図４では合計４つの支持機構５…の
うちの１つのみを示す）に複数個（但し、図４ではその
一部のみを示す）被着する断面コ字状で、かつＡｌ2 Ｏ
3 （アルミナ）製の絶縁部材２１と、この絶縁部材２１
の外側部に所定間隙Ｇを隔てて複数個被着する断面コ字
状で、かつステンレス製のユニットケース２２とを備
え、このユニットケース２２と上述の絶縁部材２１との
間の所定間隙Ｇに、耐熱金属製の板バネ２３を介設し
て、この板バネ２３でＳｉＣ板状ヒータ６を弾性支持す
べく構成している。By the way, the above-mentioned support mechanism 5 is constructed as shown in FIG. That is, each outer part of the upper and lower SiC plate heater 6 (however, shows only one of the support mechanism 5 ... of total of four in FIG. 4) a plurality (although in its FIG. 4
Shows a part only) in U-shaped cross section deposited, and Al 2 O
Insulating member 21 made of 3 (alumina) and this insulating member 21
The outer portion at a predetermined gap G in U-shaped cross section to a plurality deposition of, and a stainless steel unit case 22, a predetermined gap G between the unit case 22 and the insulating member 21 described above A leaf spring 23 made of heat-resistant metal is interposed, and the leaf spring 23 elastically supports the SiC plate heater 6.
【００１７】上述の板バネ２３としては例えばステンレ
ス（ＪＩＳ規格ＳＵＳ３０１、Ｎｉ量６〜８％、Ｃ量
０．１％前後で、加工硬化を利用して強度を出したオー
ステナイト系ステンレス）を用いるが、ＳＵＳ３０１に
代えてインコネル等の他の耐熱金属を用いてもよい。As the above-mentioned leaf spring 23, for example, stainless steel (JIS standard SUS301, Ni content 6-8%, C content around 0.1%, austenitic stainless steel having strength by utilizing work hardening) is used. , SUS301, other refractory metal such as Inconel may be used.
【００１８】この実施例では上述の板バネ２３を、その
基端水平部から略垂直方向に折曲げてＵ字部を形成し、
上述の基端水平部を各要素２１，２２間の水平方向の所
定間隙部に配設する一方、上述のＵ字部を各要素２１，
２２間の垂直方向の所定間隙部に配設している。In this embodiment, the above-mentioned leaf spring 23 is bent in a substantially vertical direction from the base end horizontal portion to form a U-shaped portion,
The above-mentioned base end horizontal portion is arranged in a predetermined horizontal gap between the elements 21, 22, while the above-mentioned U-shaped portion is provided in each element 21,
It is arranged in a predetermined gap between the 22 in the vertical direction.
【００１９】さらに上述のユニットケース２２の背面部
２２ａにはステンレス製のボルト２４、ナット２５を用
いて、Ａｌ2 Ｏ3 製の凸型絶縁碍子２６と凹型絶縁碍子
２７とを一体的に取付け、上述のボルト２４に対して完
全に絶縁された各碍子２６，２７間の環状の凹溝部２８
に上述のブラケット４における遊端垂直部４ｂを配設し
て、支持機構５を構成し、合計４組の支持機構５でＳｉ
Ｃ板状ヒータ６の４隅部を支持すべく構成している。Further, a stainless steel bolt 24 and a nut 25 are used to integrally mount a convex insulator 26 and a concave insulator 27 made of Al 2 O 3 on the rear surface 22a of the unit case 22 described above. An annular groove 28 between the insulators 26, 27 that is completely insulated from the bolt 24 described above.
The support mechanism 5 is configured by disposing the free end vertical portion 4b of the bracket 4 described above, and a total of four support mechanisms 5 are used for Si.
It is configured to support the four corners of the C-plate heater 6.
【００２０】このように、上述のＳｉＣ板状ヒータ６を
各要素２１，２２間に介設したステンレス製（耐熱金属
製）の板バネ２３で弾性支持し、既述した従来構造のよ
うなリジット固定を回避したので、ＳｉＣ板状ヒータ６
に対して熱膨張応力が作用することなく、このＳｉＣ板
状ヒータ６の破損を確実に防止することができる効果が
ある。As described above, the above-mentioned SiC plate heater 6 is provided between the elements 21 and 22 and is made of stainless steel (heat-resistant metal).
Since it is elastically supported by the leaf spring 23 of ( made by the manufacturer) to avoid rigid fixation as in the conventional structure described above, the SiC plate heater 6
There is an effect that the damage of the SiC plate-shaped heater 6 can be reliably prevented without the thermal expansion stress acting.
【００２１】また炉内の熱風によりＳｉＣ板状ヒータ６
が振動した際には、上述の板バネ２３がこの振動を吸収
するので、ＳｉＣ板状ヒータ６にクラックが発生するの
を確実に防止することができる効果がある。The SiC plate heater 6 is heated by the hot air in the furnace.
When the plate vibrates, the plate spring 23 absorbs the vibration, and therefore, it is possible to reliably prevent the SiC plate heater 6 from being cracked.
【００２２】加えて、無機繊維質の断熱材や熱膨張緩衝
材を用いない構成であるから、炉内のクリーン度を確保
することができ、例えばＩＣ基板、チップ等を処理する
ようなクリーン度が要求される処理炉に有効である。In addition, since the structure does not use an inorganic fiber heat insulating material or a thermal expansion cushioning material, the cleanliness inside the furnace can be ensured, and for example, the cleanliness for processing IC substrates, chips, etc. Is effective for processing furnaces that require
【００２３】さらに、上述の各効果を発揮しつつ、板状
ヒータ６を炭化珪素（ＳｉＣ）製と成したので抵抗発熱
性に優れることは勿論、この炭化珪素製セラミック板状
ヒータ６を複数個のＡｌ 2 Ｏ 3 製絶縁部材２１、複数個
のユニットケース２２および複数個の上記付勢手段で支
持するため、振動吸収性を確保しつつ、板状ヒータ６の
良好な支持力を確保することができる効果がある。 Further, while exhibiting the above-mentioned effects, a plate-like shape is obtained.
Since the heater 6 is made of silicon carbide (SiC), resistance heating
Of course, this silicon carbide ceramic plate
A plurality of heaters 6 made of Al 2 O 3 insulating member 21
Supported by the unit case 22 of FIG.
Therefore, the plate-shaped heater 6 can be held while ensuring vibration absorption.
There is an effect that a good supporting force can be secured.
【００２４】図５はセラミック板状ヒータの支持構造の
他の実施例を示し、図４の先の実施例においては付勢手
段として耐熱金属製板バネ２３を用いたが、図５に示す
この実施例においては付勢手段としてインコネル（Inco
nel 、Ｎｉ−Ｃｒ合金の一つで超耐熱性、耐食性を有す
る高ニッケル合金）製のコイル状スプリング２９を用い
ている。FIG. 5 shows another embodiment of the support structure for the ceramic plate heater. In the previous embodiment of FIG. 4, a heat-resistant metal plate spring 23 was used as the biasing means, which is shown in FIG. In the embodiment, as a biasing means, Inconel
A coil- shaped spring 29 made of a high nickel alloy, which is one of Nel and Ni-Cr alloy and has superheat resistance and corrosion resistance.
【００２５】すなわち、上述のユニットケース２２の背
面側にスプリング配設スペースを形成するために筒部２
２ｂを一体的に形成し、この筒部２２ｂの内径部にネジ
部（図示せず）を形成すると共に、このネジ部に対して
ステンレス製のスプリングリテーナ３０を螺合し、この
スプリングリテーナ３０の前面と上述の絶縁部材２１の
背面との間に、耐熱金属製コイル状スプリング２９を張
架している。That is, in order to form a spring disposing space on the back side of the unit case 22, the cylindrical portion 2 is formed.
2b is integrally formed, a threaded portion (not shown) is formed on the inner diameter of the tubular portion 22b, and a stainless steel spring retainer 30 is screwed onto the threaded portion to form a spring retainer 30. A heat-resistant metal coil- shaped spring 29 is stretched between the front surface and the back surface of the insulating member 21.
【００２６】このように構成しても、先の実施例と略同
様の作用、効果を奏するので、図５において図４と同一
の部分には同一番号および同一符号を付して、その詳し
い説明を省略する。Even with this structure, the same operation and effect as those of the previous embodiment can be obtained. Therefore, in FIG. 5, the same parts as those in FIG. Is omitted.
【００２７】この考案の構成と、上述の実施例との対応
において、この考案の炭化珪素製セラミック板状ヒータ
は、実施例のＳｉＣ板状ヒータ６に対応し、以下同様
に、付勢手段は、第１実施例の耐熱金属製板バネ２３
（図４参照）と、第２実施例の耐熱金属製コイル状スプ
リング２９（図５参照）とに対応する。 In the correspondence between the configuration of the present invention and the above-described embodiment, the silicon carbide ceramic plate heater of the present invention corresponds to the SiC plate heater 6 of the embodiment. The heat-resistant metal leaf spring 23 of the first embodiment
(See FIG. 4), corresponding to the refractory metal coiled spool <br/> ring 29 of the second embodiment (see FIG. 5).
【図１】本考案のセラミック板状ヒータの支持構造を炉
内部から見た状態で示す正面図。FIG. 1 is a front view showing a support structure for a ceramic plate heater according to the present invention as viewed from the inside of a furnace.
【図２】図１の右側面図。FIG. 2 is a right side view of FIG.
【図３】図１の平面図。FIG. 3 is a plan view of FIG.
【図４】図２の要部拡大断面図。FIG. 4 is an enlarged cross-sectional view of a main part of FIG.
【図５】セラミック板状ヒータの支持構造の他の実施例
を示す要部拡大断面図。FIG. 5 is an enlarged sectional view of an essential part showing another embodiment of the support structure for the ceramic plate heater.
【図６】従来のセラミック板状ヒータの支持構造を示す
要部拡大断面図。FIG. 6 is an enlarged cross-sectional view of a main part showing a conventional ceramic plate heater support structure.
６…ＳｉＣ板状ヒータ ２１…絶縁部材 ２２…ユニットケース ２３…板バネ ２９…コイル状スプリング Ｇ…間隙6 ... SiC plate heater 21 ... insulating member 22 ... unit case 23 ... plate spring 29 ... coil spring G ... gap
Claims (1)
状ヒータ（６）の支持構造であって、 セラミック板状ヒータ（６）の外側部に複数個被着する
断面コ字状のＡｌ 2 Ｏ 3 製絶縁部材（２１）と、 上記絶縁部材（２１）の外側部に所定間隙（Ｇ）を隔て
て複数個被着する断面コ字状のユニットケース（２２）
と、 上記絶縁部材（２１）およびユニットケース（２２）間
の所定間隙（Ｇ）に介設され、上記セラミック板状ヒー
タ（６）を下部より弾性支持する複数個の耐熱金属製板
バネ（２３）もしくはコイル状スプリング（２９）から
なる付勢手段とを備えたセラミック板状ヒータの支持構
造。1. A support structure for a ceramic plate heater (6) made of silicon carbide, which is disposed in a furnace, wherein a plurality of ceramic plate heaters (6) are attached to the outside of the ceramic plate heater (6) . made of al 2 O 3 insulating member (21), the insulating member (21) U-shaped cross section of the unit case of multiple deposited at a predetermined gap (G) to the outer portion of (22)
And a plurality of heat-resistant metal plates interposed in a predetermined gap (G ) between the insulating member (21) and the unit case (22 ) and elastically supporting the ceramic plate heater (6) from below.
From spring (23) or coiled spring (29)
The support structure of the ceramic plate heater having a biasing means formed.
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP1992081494U JPH081592Y2 (en) | 1992-10-29 | 1992-10-29 | Ceramic plate heater support structure |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP1992081494U JPH081592Y2 (en) | 1992-10-29 | 1992-10-29 | Ceramic plate heater support structure |
Publications (2)
| Publication Number | Publication Date |
|---|---|
| JPH0641091U JPH0641091U (en) | 1994-05-31 |
| JPH081592Y2 true JPH081592Y2 (en) | 1996-01-17 |
Family
ID=13747948
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP1992081494U Expired - Lifetime JPH081592Y2 (en) | 1992-10-29 | 1992-10-29 | Ceramic plate heater support structure |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPH081592Y2 (en) |
Families Citing this family (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN101855429B (en) * | 2007-11-12 | 2013-03-27 | 贝洱两合公司 | Exhaust gas cooler for a motor vehicle |
Family Cites Families (2)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPS53146993A (en) * | 1977-05-27 | 1978-12-21 | Toshiba Silicone | Catalyst composition |
| JPS5949575B2 (en) * | 1978-06-26 | 1984-12-04 | 凸版印刷株式会社 | Net gravure plate making method |
-
1992
- 1992-10-29 JP JP1992081494U patent/JPH081592Y2/en not_active Expired - Lifetime
Also Published As
| Publication number | Publication date |
|---|---|
| JPH0641091U (en) | 1994-05-31 |
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