JPH0815526B2 - Static electricity removal structure of HEPA filter - Google Patents
Static electricity removal structure of HEPA filterInfo
- Publication number
- JPH0815526B2 JPH0815526B2 JP62044573A JP4457387A JPH0815526B2 JP H0815526 B2 JPH0815526 B2 JP H0815526B2 JP 62044573 A JP62044573 A JP 62044573A JP 4457387 A JP4457387 A JP 4457387A JP H0815526 B2 JPH0815526 B2 JP H0815526B2
- Authority
- JP
- Japan
- Prior art keywords
- hepa filter
- static electricity
- filter
- electricity removing
- hepa
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Expired - Fee Related
Links
Description
【発明の詳細な説明】 〔産業上の利用分野〕 本発明はフィルタの静電気除去構造、特に、HEPAフィ
ルタ（High Efficiency Particulate Air Fiter）の静
電気除去構造に関するものである。The present invention relates to a static electricity removing structure for a filter, and more particularly to a static electricity removing structure for a HEPA filter (High Efficiency Particulate Air Fiter).
一般に、HEPAフィルタは極めて高い捕集性能を持つフ
ィルタとして良く知られており、微粉末を取り扱う様々
な技術分野、たとえば薬品の製造工程や半導体製造用の
クリーンルームなどの技術分野において利用されてい
る。Generally, the HEPA filter is well known as a filter having an extremely high collection performance, and is used in various technical fields for handling fine powder, for example, in the technical fields such as a chemical manufacturing process and a clean room for semiconductor manufacturing.
ところが、通常のHEPAフィルタは捕集性能が高い反
面、その厚みが相当大きくなるため、捕集後のクリー・
アップが困難であり、使い捨てにせざるを得ない。特
に、ダスト濃度の高い場所でHEPAフィルタを使用しよう
とすると、そのライフタイムが短くなり、使用に不適で
あるなどの問題がある。However, while the normal HEPA filter has a high collection performance, its thickness is considerably large, so the
It is difficult to put it up, and it must be thrown away. In particular, when the HEPA filter is used in a place where the dust concentration is high, its lifetime is shortened, which is unsuitable for use.
特に、HEPAフィルタでたとえば金属の微粉、硫黄粉、
複写機用トナー、さらには小麦粉の如き有機物の微粉な
どを捕集して行き過程で粉末との摩擦などの起因して過
大な静電気がHEPAフィルタに蓄積され、火花によ粉塵爆
発を起こす危険性がある。Especially with HEPA filter, for example, fine metal powder, sulfur powder,
Danger of causing dust explosion due to sparks due to excessive static electricity accumulated in the HEPA filter due to friction with powder in the process of collecting toner for copying machines and fine powder of organic substances such as wheat flour There is.
しかしながら、通常のHEPAフィルタには静電気除去対
策は施されておらず、静電気の帯電による爆発の危険性
は未解決のままであることを本発明者は見い出した。However, the present inventor has found that a normal HEPA filter is not provided with a static electricity removal measure, and the risk of explosion due to static electricity remains unsolved.
本発明の目的は、静電気の帯電による爆発の危険性を
回避できるHEPAフィルタの静電気除去構造を提供するこ
とにある。An object of the present invention is to provide a static electricity removing structure for a HEPA filter that can avoid the risk of explosion due to static electricity charging.
本発明のHEPAフィルタの静電気除去構造は、HEPAフィ
ルタに向けて圧縮空気を噴出して付着物を除去するクリ
ーニングユニットを備え、フィルタエレメントを互いに
離間させるセパレータどうしを導電手段で互いに接続し
てアースさせると共に、この導電手段を可撓性材料によ
り構成したものである。The static electricity removing structure of the HEPA filter of the present invention includes a cleaning unit for ejecting compressed air toward the HEPA filter to remove deposits, and the separators for separating the filter elements are connected to each other by a conductive means to be grounded. At the same time, the conductive means is made of a flexible material.
上記した手段によれば、HEPAフィルタに帯電しようと
する静電気はセパレータから各セパレータどうしを互い
に接続する導電手段を介してアースに放出されるので、
HEPAフィルタに過大な静電気が蓄積されることがなく、
静電気による粉塵爆発の危険性等の不具合を回避するこ
とが可能となる。According to the above means, the static electricity that tends to be charged to the HEPA filter is discharged from the separator to the ground through the conductive means that connects the separators to each other.
Excessive static electricity does not accumulate on the HEPA filter,
It is possible to avoid problems such as the danger of dust explosion due to static electricity.
第１図は本発明によるHEPAフィルタの静電気除去構造
の一実施例の拡大部分平面図、第２図はその部分側面
図、第３図は本発明のHEPAフィルタを装着できる集塵装
置の一部切欠平面図、第４図はその一部切欠正面図、第
５図はその一部切欠側面図である。FIG. 1 is an enlarged partial plan view of an embodiment of a static electricity removing structure for a HEPA filter according to the present invention, FIG. 2 is a partial side view thereof, and FIG. 3 is a part of a dust collector to which the HEPA filter of the present invention can be mounted. A cutaway plan view, FIG. 4 is a partially cutaway front view thereof, and FIG. 5 is a partially cutaway side view thereof.
この実施例において、HEPAフィルタＦは集塵装置１の
上部のフィルタハウジング２内に４個装着されている。In this embodiment, four HEPA filters F are mounted in the filter housing 2 above the dust collector 1.
この集塵装置１は、フィルタハウジング２等を支持す
る架台３と、図示しないい真空ポンプ等の吸引手段によ
り原料が吸収されるホッパ４と、このホッパ４への原料
吸入口５と、捕集物の収容のための容器６と、HEPAフィ
ルタＦの支持用のフィルタベース７と、HEPAフィルタＦ
を着脱可能に固定するフィルタ着脱具８と、HEPAフィル
タＦに向けて圧縮空気を噴出して付着物を除去するクリ
ーニングユニット９と、ハウジングドア10と、圧力計11
と、HEPAフィルタＦで捕集物を捕集されたガスが排出さ
れる排気口12とからなる。The dust collector 1 includes a pedestal 3 that supports a filter housing 2 and the like, a hopper 4 that absorbs a raw material by a suction means such as a vacuum pump (not shown), a raw material suction port 5 to the hopper 4, and a collection device. A container 6 for accommodating objects, a filter base 7 for supporting the HEPA filter F, and a HEPA filter F
A filter attachment / detachment 8 for removably fixing the air conditioner, a cleaning unit 9 for ejecting compressed air toward the HEPA filter F to remove adhered substances, a housing door 10, and a pressure gauge 11
And the exhaust port 12 through which the gas collected by the HEPA filter F is discharged.
本実施例のHEPAフィルタＦは、たとえばガラス繊維と
通気性樹脂フィルタまたは樹脂繊維、特に非粘着性樹脂
繊維の不織布等の積層物を上下方向に襞状に構成した襞
状構造のフィルタエレメント13よりなり、第２図で見て
下方から上方に通過するガスの中に含まれる微粉等の捕
集物を捕集する。このHEPAフィルタＦのフィルタエレメ
ント13の各襞状部どうしを互いに離間状態に保持するた
め、金属板の屈曲構造よりなる複数枚のセパレータ14が
フィルタエレレント13の各空間内に上下方向に挿入さ
れ、その両端は固定剤15により金属製のフィルタケーシ
ング16に固定されている。The HEPA filter F of the present embodiment comprises a filter element 13 having a fold-like structure in which a laminate of glass fiber and a breathable resin filter or a resin fiber, especially a non-woven fabric of non-adhesive resin fiber is formed in a fold shape in the vertical direction. As a result, the collected substances such as fine powder contained in the gas passing from the lower side to the upper side in FIG. 2 are collected. In order to keep the fold-like portions of the filter element 13 of the HEPA filter F separated from each other, a plurality of separators 14 each having a bent structure of a metal plate are vertically inserted into each space of the filter element 13. Both ends thereof are fixed to a metal filter casing 16 with a fixing agent 15.
このHEPAフィルタＦの各セパレータ14どうしはこのま
までは互いに離間された状態であるが、本実施例では、
各セパレータ14の上端および下端を互いに横断する方向
（第１図および第２図の左右方向）の２ヶ所に下撓性か
つ導電性の物質よりなる導電手段17を設け、各セパレー
タ14どうしを互いに導電接続している。The separators 14 of the HEPA filter F are separated from each other as they are, but in this embodiment,
Conducting means 17 made of a downward-flexible and conductive substance is provided at two locations in the direction crossing the upper end and the lower end of each separator 14 (the left-right direction in FIGS. 1 and 2), and the respective separators 14 are connected to each other. Conductive connection.
また、導電手段17の両端はHEPAフィルタＦのフィルタ
ケーシング16に導電接続されている。そして、フィルタ
ケーシング16はフィルタベース７および架台３等の装置
構成部材あるいは特別なアース配線18（第１図）等を介
してもしくは直接的にアース19に接続されている。Both ends of the conductive means 17 are conductively connected to the filter casing 16 of the HEPA filter F. The filter casing 16 is connected to the earth 19 via a device base such as the filter base 7 and the gantry 3 or a special earth wiring 18 (FIG. 1) or directly.
したがって、本実施例においては、HEPAフィルタＦの
フィルタエレメント13を離間させるセパレータ14は導電
手段17等を介してアース19に導電接続されている。Therefore, in this embodiment, the separator 14 for separating the filter element 13 of the HEPA filter F is electrically connected to the ground 19 via the conductive means 17 and the like.
次に、本実施例の作用について説明する。 Next, the operation of this embodiment will be described.
まず、捕集されるべき微粉を含んだガスは、図示しな
い真空ポンプ等の吸引手段の吸引力により原料吸入口５
からホッパ４内に吸入され、該ホッパ４からその上方に
吸引される。First, the gas containing fine powder to be collected is sucked by the raw material suction port 5 by the suction force of suction means such as a vacuum pump (not shown).
Is sucked into the hopper 4 from above, and is sucked upward from the hopper 4.
次いで、ガスはホッパ４の上方のHEPAフィルタＦに到
達し、該HEPAフィルタＦを通過して該ガス中の微粉等が
捕集された後、清浄状態のガスのみが排気口12から集塵
装置１の外部に排出される。Next, the gas reaches the HEPA filter F above the hopper 4, and after passing through the HEPA filter F to collect fine particles and the like in the gas, only the gas in the clean state is discharged from the exhaust port 12 to the dust collector. 1 is discharged to the outside.
HEPAフィルタＦで捕集された微粉等はクリーニングユ
ニット９で該HEPAフィルタＦの上方側から圧縮空気を噴
出することにより該HEPAフィルタＦから落下し、ホッパ
４内を経て容器６の中に集められる。容器６の微粉等の
捕集物は必要に応じて適宜外部に回収される。The fine powder or the like collected by the HEPA filter F drops from the HEPA filter F by ejecting compressed air from the upper side of the HEPA filter F by the cleaning unit 9, and is collected in the container 6 through the inside of the hopper 4. . Collected substances such as fine powder in the container 6 are appropriately collected outside as necessary.
上記の捕集工程において、HEPAフィルタＦには、摩擦
等により発生して微粉に帯電していた静電気が過大に蓄
積され、粉塵爆発等の原因となるおそれがある。それに
ついて、本実施例では、フィルタエレメント13の襞状部
分を互いに離間させているセパレータ14どうしが導電手
段17で互いに導電接続され、かつ該導電手段17からフィ
ルタケーシング16およびアース配線18を経てアース19に
導電接続されている。In the above collecting step, the HEPA filter F may excessively accumulate the static electricity generated by friction and charged in the fine powder, which may cause dust explosion or the like. With respect to this, in the present embodiment, the separators 14 that separate the pleated portions of the filter element 13 from each other are conductively connected to each other by the conductive means 17, and are grounded from the conductive means 17 via the filter casing 16 and the ground wire 18. Conductively connected to 19.
したがって、本実施例においては、HEPAフィルタＦに
帯電しようとする静電気は各セパレータ14から導電手段
17、フィルタケーシング16およびアース配線18を経てア
ース19に導かれ、放電される。Therefore, in this embodiment, the static electricity that tends to charge the HEPA filter F is transferred from each separator 14 to the conductive means.
It is led to the earth 19 via 17, the filter casing 16 and the earth wiring 18, and is discharged.
その結果、本実施例の集塵装置１では、HEPAフィルタ
Ｆに過大な静電気が蓄積されて粉塵爆発を起こす危険性
を排除できる。As a result, in the dust collector 1 of the present embodiment, it is possible to eliminate the risk of dust explosion due to excessive static electricity being accumulated in the HEPA filter F.
なお、本実施例における導電手段17としては、導電材
料の粉末を混入した合成樹脂またはゴムよりなるもの、
あるいは金属の細線からなる綿状物を充填した物質より
なるもの、さらには金属線や金属板、金属棒等、導電体
であれば様々なものを使用できる。特に、導電手段17が
可撓性を有する材料で構成されることにより、セパレー
タ14の振動性が失われないので、該セパレータ14として
の本来の機能が損なわれないという利点が得られる。The conductive means 17 in this embodiment is made of synthetic resin or rubber mixed with conductive material powder,
Alternatively, various substances can be used as long as they are conductors, such as a substance filled with a cotton-like material made of thin metal wires, and further, a metal wire, a metal plate, a metal rod, or the like. In particular, since the conductive means 17 is made of a flexible material, the vibrating properties of the separator 14 are not lost, so that the original function of the separator 14 is not impaired.
なお、本実施例は前記実施例に限定されるものではな
く、他の様々な変形が可能である。It should be noted that this embodiment is not limited to the above embodiment, and various other modifications are possible.
たとえば、導電手段17の構造、配線および個数や、該
導電手段17からのアース接続のとり方、フィルタエレメ
ント13の構造、材料等でも前記実施例以外のものとする
ことができる。フィルタエレメント13はガラス繊維また
は樹脂繊維もしくは通気性樹脂フィルムの積層物の他
に、それらの単層物、さらにはそれら以外の各種の材料
で作ることができる。For example, the structure, the wiring and the number of the conductive means 17, the way of connecting the ground from the conductive means 17, the structure and the material of the filter element 13, etc. may be other than those in the above embodiment. The filter element 13 can be made of a laminated material of glass fiber or resin fiber or a breathable resin film, a single layer thereof, and various other materials.
また、本発明は不要な粉塵等な捕集の他に、たとえば
粉砕機で粉砕された微粉化製品の回収等にも利用でき
る。Further, the present invention can be used not only for collecting unnecessary dusts, but also for collecting finely pulverized products pulverized by a pulverizer.
本発明によれば、フィルタエレメントと、このフィル
タエレメントを互いに離間させるセパレータとを備えた
HEPAフィルタの静電気除去構造であって、前記セパレー
タどうしを導電手段で互いに接続してアースしたことに
より、HEPAフィルタに帯電しようとする静電気が導電手
段によってアースされるので、HEPAフィルタに過大な静
電気が蓄積されて粉塵爆発を起こす危険性を排除でき
る。また、導電手段が可撓性を有する材料で構成される
ことにより、セパレータの振動性が失われないので、セ
パレータとしての本来の機能が損なわれない。According to the present invention, a filter element and a separator for separating the filter element from each other are provided.
With the static electricity removal structure of the HEPA filter, the static electricity that tries to be charged to the HEPA filter is grounded by the conductive means when the separators are connected to each other by the conductive means and grounded. Eliminates the risk of accumulated dust explosion. In addition, since the conductive means is made of a flexible material, the vibration property of the separator is not lost, so that the original function of the separator is not impaired.
第１図は本発明によるHEPAフィルタの静電気除去構造の
一実施例の拡大部分平面図、第２図はその部分側面図、
第３図は本発明のHEPAフィルタを装着できる集塵装置の
一部切欠平面図、第４図はその一部切欠正面図、第５図
はその一部切欠側面図である。 １……集塵装置、 ２……フィルタハウジング、 ３……架台、 ４……ホッパ、 ５……原料吸入口、 ６……容器、 ７……フィルタベース、 ８……フィルタ着脱具、 ９……クリーニングユニット、 10……ハウジングドア、 11……圧力計、 12……排気口、 13……フィルタエレメント、 14……セパレータ、 15……固定剤、 16……フィルタケーシング、 17……導電手段、 18……アース配線、 19……アース、 Ｆ……HEPAフィルタ。FIG. 1 is an enlarged partial plan view of an embodiment of a static electricity removing structure for a HEPA filter according to the present invention, and FIG. 2 is a partial side view thereof.
FIG. 3 is a partially cutaway plan view of a dust collector to which the HEPA filter of the present invention can be attached, FIG. 4 is a partially cutaway front view thereof, and FIG. 5 is a partially cutaway side view thereof. 1 ... Dust collector, 2 ... Filter housing, 3 ... Stand, 4 ... Hopper, 5 ... Raw material inlet, 6 ... Container, 7 ... Filter base, 8 ... Filter attachment / detachment tool, 9 ... … Cleaning unit, 10… Housing door, 11… Pressure gauge, 12… Exhaust port, 13… Filter element, 14… Separator, 15… Fixing agent, 16… Filter casing, 17… Conductive means , 18 …… Ground wiring, 19 …… Ground, F …… HEPA filter.
Claims (8)
メントを互いに離間させるセパレータとを備えたHEPAフ
ィルタの静電気除去構造であって、前記HEPAフィルタに
向けて圧縮空気を噴出して付着物を除去するクリーニン
グユニットを備え、前記セパレータどうしを導電手段で
互いに接続してアースすると共に、前記導電手段を可撓
性材料により構成したことを特徴とするHEPAフィルタの
静電気除去構造。1. A static electricity removing structure for a HEPA filter comprising a filter element and a separator for separating the filter element from each other, wherein a cleaning unit for ejecting compressed air toward the HEPA filter to remove deposits. A static electricity removing structure for a HEPA filter, characterized in that the separators are connected to each other by a conductive means to be grounded, and the conductive means is made of a flexible material.
た合成樹脂またはゴムよりなることを特徴とする特許請
求の範囲第１項記載のHEPAフィルタの静電気除去構造。2. The static electricity removing structure for a HEPA filter according to claim 1, wherein said conductive means is made of synthetic resin or rubber mixed with powder of a conductive material.
物を充填した物質よりなることを特徴とする特許請求の
範囲第１項記載のHEPAフィルタの静電気除去構造。3. The static electricity removing structure for a HEPA filter according to claim 1, wherein the conductive means is made of a material filled with a linear object made of a thin metal wire.
たは樹脂繊維あるいは通気性樹脂フイルム等の単層もし
くは積層物の襞状構造よりなり、該襞状構造の各部分が
前記セパレータによって離間されていることを特徴とす
る特許請求の範囲第１項記載のHEPAフィルタの静電気除
去構造。4. The filter element has a fold-like structure of a single layer or a laminate of glass fiber, resin fiber, breathable resin film or the like, and each part of the fold-like structure is separated by the separator. A static electricity removing structure for a HEPA filter according to claim 1.
を特徴とする特許請求の範囲第４項記載のHEPAフィルタ
の静電気除去構造。5. The static electricity removing structure for a HEPA filter according to claim 4, wherein the resin fiber is made of a non-adhesive resin.
いることを特徴とする特許請求の範囲第１項記載のHEPA
フィルタの静電気除去構造。6. The HEPA according to claim 1, wherein the separator is directly connected to ground.
Static electricity removal structure of the filter.
ケーシングがアースに接続されていることを特徴とする
特許請求の範囲第１項記載のHEPAフィルタの静電気除去
構造。7. The static electricity removing structure for a HEPA filter according to claim 1, wherein the filter casing for fixing the end portion of the separator is connected to the ground.
アースに接続されていることを特徴とする特許請求の範
囲第１項記載のHEPAフィルタの静電気除去構造。8. The static electricity removing structure for a HEPA filter according to claim 1, wherein a part of the device equipped with the HEPA filter is connected to the ground.
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP62044573A JPH0815526B2 (en) | 1987-02-27 | 1987-02-27 | Static electricity removal structure of HEPA filter |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP62044573A JPH0815526B2 (en) | 1987-02-27 | 1987-02-27 | Static electricity removal structure of HEPA filter |
Publications (2)
| Publication Number | Publication Date |
|---|---|
| JPS63209723A JPS63209723A (en) | 1988-08-31 |
| JPH0815526B2 true JPH0815526B2 (en) | 1996-02-21 |
Family
ID=12695245
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP62044573A Expired - Fee Related JPH0815526B2 (en) | 1987-02-27 | 1987-02-27 | Static electricity removal structure of HEPA filter |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPH0815526B2 (en) |
Families Citing this family (3)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| US7883572B2 (en) | 2006-01-12 | 2011-02-08 | Camfil Ab | Cleanable dust filter comprising a zigzag pleated filter pack |
| JP5104530B2 (en) * | 2008-05-08 | 2012-12-19 | 日立工機株式会社 | Centrifuge |
| JP2010240571A (en) * | 2009-04-06 | 2010-10-28 | Kuraray Co Ltd | Filter unit and gas cleaning system |
Family Cites Families (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPS57181327U (en) * | 1981-05-13 | 1982-11-17 |
-
1987
- 1987-02-27 JP JP62044573A patent/JPH0815526B2/en not_active Expired - Fee Related
Also Published As
| Publication number | Publication date |
|---|---|
| JPS63209723A (en) | 1988-08-31 |
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