JPH08148363A - Manufacturing for laminated inductor - Google Patents
Manufacturing for laminated inductorInfo
- Publication number
- JPH08148363A JPH08148363A JP3108595A JP3108595A JPH08148363A JP H08148363 A JPH08148363 A JP H08148363A JP 3108595 A JP3108595 A JP 3108595A JP 3108595 A JP3108595 A JP 3108595A JP H08148363 A JPH08148363 A JP H08148363A
- Authority
- JP
- Japan
- Prior art keywords
- laminated inductor
- value
- thermal shock
- laminated
- magnetic
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Granted
Links
Landscapes
- Manufacturing Cores, Coils, And Magnets (AREA)
- Coils Or Transformers For Communication (AREA)
Abstract
Description
【０００１】[0001]
【産業上の利用分野】本発明は、積層インダクタの製造
方法に関する。BACKGROUND OF THE INVENTION 1. Field of the Invention The present invention relates to a method for manufacturing a laminated inductor.
【０００２】[0002]
【従来の技術】従来の積層インダクタは、表面に内部電
極となる導体パターンを形成した、磁性体層となる磁性
体シートを複数枚積層し、磁性体シートに設けたスルー
ホールを介して各導体パターン相互間を接続した積層体
からなり、これを焼成することにより製造されていた。2. Description of the Related Art In a conventional laminated inductor, a plurality of magnetic sheets serving as magnetic layers, each having a conductor pattern serving as an internal electrode formed on the surface thereof, are laminated and each conductor is provided through a through hole provided in the magnetic sheet. It was composed of a laminated body in which patterns were connected to each other and was manufactured by firing.
【０００３】この積層インダクタでは、焼成過程におい
て最高温度付近で磁性体層と内部電極が焼結一体化する
が、最高温度から室温まで冷却する際に、磁性体層と内
部電極との熱膨張率の違いから応力磁歪が発生し、磁気
特性を低下させるという問題があり、その解決策とし
て、図３に示すように、磁性体層２１と内部電極２２間
の全部、或いは一部に空隙２３を設けることにより、磁
性体層２１と内部電極２２との熱膨張率の違いから発生
する応力磁歪を緩和させる方法が採られていた。In this laminated inductor, the magnetic layer and the internal electrode are sintered and integrated near the maximum temperature during the firing process, but when cooled from the maximum temperature to room temperature, the coefficient of thermal expansion between the magnetic layer and the internal electrode. There is a problem that stress magnetostriction occurs due to the difference between the magnetic properties and the magnetic properties, and as a solution to this problem, as shown in FIG. By providing it, the method of relaxing the stress magnetostriction generated due to the difference in thermal expansion coefficient between the magnetic layer 21 and the internal electrode 22 has been adopted.
【０００４】[0004]
【発明が解決しようとする課題】ところが、このような
従来の積層インダクタでは、磁性体層２１と内部電極２
２間に設けられた空隙２３に、積層体２４の両端面に形
成された外部電極２５に対しメッキを施す際に使用する
メッキ液、若しくは外部電極２５を回路基板などに半田
付けする際に使用するワックス、或いは水分が外部電極
２５を通じて浸入することがあった。これら液体の浸入
により、内部電極２２は腐食して積層インダクタのＬ値
及びＱ値が変化し、最悪の場合には内部電極２２が断線
に至る恐れがあった。However, in such a conventional laminated inductor, the magnetic layer 21 and the internal electrode 2 are used.
A plating solution used for plating the external electrodes 25 formed on both end surfaces of the laminated body 24 in the space 23 provided between the two, or used for soldering the external electrodes 25 to a circuit board or the like. There is a case where the wax or the moisture that has been introduced permeates through the external electrode 25. Due to the infiltration of these liquids, the internal electrodes 22 are corroded, the L value and the Q value of the laminated inductor are changed, and in the worst case, the internal electrodes 22 may be broken.
【０００５】それゆえ、本発明の主たる目的は、磁性体
層と内部電極間に空隙を設けずとも磁気特性の良好な積
層インダクタの製造方法を提供することである。Therefore, a main object of the present invention is to provide a method for manufacturing a laminated inductor having good magnetic characteristics without providing a gap between the magnetic layer and the internal electrode.
【０００６】[0006]
【課題を解決するための手段】上記の目的を達成するた
めに、本発明は、表面に内部電極となる導体パターンを
形成した磁性体層を積層し、一定の圧力を加えたのち、
焼成することにより積層体を得る工程と、前記積層体に
外部電極を形成する工程と、前記積層体に対し、温度差
１２０℃以上となる熱衝撃処理を一回以上行う工程とを
含むことを特徴とする。In order to achieve the above-mentioned object, the present invention laminates a magnetic layer having a conductor pattern to be an internal electrode on the surface thereof, and after applying a constant pressure,
Including a step of obtaining a laminated body by firing, a step of forming an external electrode on the laminated body, and a step of subjecting the laminated body to a thermal shock treatment at a temperature difference of 120 ° C. or more once or more. Characterize.
【０００７】[0007]
【作用】上記の構成によれば、積層体に対し熱衝撃処理
を行うことにより、内部電極と磁性体層間とに大きな応
力をかけ、内部電極を構成するＡｇを伸ばし、Ａｇ結晶
を再配列させ、焼成後の冷却過程における内部電極と磁
性体層間に発生する磁性体の応力磁歪を緩和することが
できる。According to the above structure, the laminated body is subjected to the thermal shock treatment, so that a large stress is applied between the internal electrode and the magnetic material layer, the Ag constituting the internal electrode is extended, and the Ag crystals are rearranged. The stress magnetostriction of the magnetic substance generated between the internal electrode and the magnetic substance layer in the cooling process after firing can be relaxed.
【０００８】[0008]
【実施例】以下、本発明による積層インダクタの製造方
法の実施例を図面を用いて説明する。まず、図１に示す
ように、Ｎｉ−Ｚｎ−Ｃｕフェライトのスラリーからグ
リーンシート法により形成した積層体の磁性体層となる
磁性体シートを複数枚用意し、そのうち磁性体シート１
〜５の表面に例えばＡｇ等の導電材料からなるペースト
を厚膜印刷することにより、内部電極となる導体パター
ン１ａ〜５ａを形成し、導体パターン１ａ〜４ａの一方
端部付近に導体パターン１ａ〜５ａを相互に電気的に接
続するスルーホール７を形成する。そして、磁性体シー
ト１〜５を他の磁性体シート８〜１０，１１〜１３で挟
むようにして重ね合せ、一定の圧力を加えたのち、例え
ば空気中で加熱してバインダーを燃焼除去させ、８５０
〜１０００℃程度の温度で焼成して積層体１４を得る。
さらに、図２に示すように、積層体１４の対向する両端
面に例えばＡｇ等の導電材料からなる導電ペーストを塗
布して焼き付けることにより外部電極１５，１５を形成
し、外部電極１５，１５にＮｉ及びＳｎのメッキを行
い、積層インダクタ１６を構成する。DETAILED DESCRIPTION OF THE PREFERRED EMBODIMENTS An embodiment of a method for manufacturing a laminated inductor according to the present invention will be described below with reference to the drawings. First, as shown in FIG. 1, a plurality of magnetic material sheets to be a magnetic material layer of a laminated body formed from a slurry of Ni—Zn—Cu ferrite by a green sheet method are prepared.
The conductor patterns 1a to 5a serving as internal electrodes are formed by thick-film printing a paste made of a conductive material such as Ag on the surfaces of the conductor patterns 1a to 4a, and the conductor patterns 1a to 4a are formed near one end of the conductor patterns 1a to 4a. A through hole 7 for electrically connecting the 5a to each other is formed. Then, the magnetic sheets 1 to 5 are superposed so as to be sandwiched by the other magnetic sheets 8 to 10 and 11 to 13 and a certain pressure is applied, and then the binder is burned and removed by heating in air, for example, and 850
The laminate 14 is obtained by firing at a temperature of about 1000 ° C.
Further, as shown in FIG. 2, external electrodes 15 and 15 are formed by applying a conductive paste made of a conductive material such as Ag to the opposite end surfaces of the laminated body 14 and baking the same to form external electrodes 15 and 15. The laminated inductor 16 is formed by plating Ni and Sn.
【０００９】なお、上述の実施例では、Ｎｉ−Ｚｎ−Ｃ
ｕフェライトの磁性体シートを用いたが、Ｎｉフェライ
ト、Ｎｉ−Ｚｎフェライト、Ｎｉ−Ｃｕフェライト、Ｍ
ｎ−Ｚｎフェライト等のスピネル型フェライトであって
もよく、磁性体層の形成方法はグリーンシート法の他の
印刷方法であってもよい。In the above embodiment, Ni--Zn--C was used.
Although a magnetic sheet of u-ferrite was used, Ni-ferrite, Ni-Zn ferrite, Ni-Cu ferrite, M
Spinel type ferrite such as n-Zn ferrite may be used, and the magnetic layer may be formed by another printing method such as the green sheet method.
【００１０】また、導体パターン１ａ〜５ａの材料にＡ
ｇを用いたが、Ａｇ−Ｐｄであってもよく、導体パター
ン１ａ〜５ａの形成方法は、塗布、転写、スパッタリン
グ等であってもよい。Further, the material of the conductor patterns 1a to 5a is A
Although g is used, Ag-Pd may be used, and the method for forming the conductor patterns 1a to 5a may be coating, transfer, sputtering, or the like.
【００１１】また、外部電極１５，１５の材料にＡｇを
用いたが、Ａｇ−Ｐｄ，Ｎｉ，Ｃｕ或いはＡｇを含めた
これらの合金であってもよく、外部電極１５，１５の形
成方法は、印刷、蒸着、スパッタリング等であってもよ
く、磁性体シート１〜１３を重ね合せ、一定の圧力を加
えた焼成する前の状態で外部電極１５，１５を形成し、
同時に一体焼成してもよい。Although Ag is used as the material of the external electrodes 15 and 15, Ag-Pd, Ni, Cu or alloys thereof containing Ag may be used. The method of forming the external electrodes 15 and 15 is as follows. It may be printing, vapor deposition, sputtering, etc., the magnetic sheets 1 to 13 are superposed, and the external electrodes 15 and 15 are formed in a state before firing under a constant pressure,
It may be fired at the same time.
【００１２】次に、この積層インダクタ１６に冷熱衝撃
装置を用いて、急加熱した後、急冷却する、または急冷
却したのち、急加熱することにより、低温時と高温時と
の温度差が１２０℃以上となる熱衝撃処理を一回以上行
う。なお、この熱衝撃処理は積層体１４の両端面に外部
電極１５，１５を形成した後、つまり外部電極１５，１
５にメッキを行う前であってもよい。Next, the laminated inductor 16 is rapidly heated by using a thermal shock device and then rapidly cooled, or rapidly cooled and then rapidly heated, so that the temperature difference between the low temperature and the high temperature is 120. Perform thermal shock treatment at a temperature of ℃ or more once or more. The thermal shock treatment is performed after forming the external electrodes 15, 15 on both end surfaces of the laminated body 14, that is, the external electrodes 15, 1.
It may be before plating on No. 5.
【００１３】この熱衝撃処理を行うことにより、内部電
極１ａ〜５ａと磁性体層１〜５間とに大きな応力をか
け、内部電極１ａ〜５ａを構成するＡｇを伸ばして、Ａ
ｇ結晶を再配列させ、焼成後の冷却過程における内部電
極１ａ〜５ａと磁性体層１〜５間に発生する磁性体の応
力磁歪を緩和する。これにより、積層インダクタ１６は
Ｌ値、Ｑ値、直流重畳特性（Ｌ値が−５％変化するとき
の直流印加電流値）、並びに温度特性を向上させること
ができる。By carrying out this thermal shock treatment, a large stress is applied between the internal electrodes 1a to 5a and the magnetic layers 1 to 5 so that Ag which constitutes the internal electrodes 1a to 5a is extended, and A
The g crystals are rearranged to relax the stress magnetostriction of the magnetic substance generated between the internal electrodes 1a to 5a and the magnetic layers 1 to 5 in the cooling process after firing. As a result, the laminated inductor 16 can improve the L value, the Q value, the DC superposition characteristic (DC applied current value when the L value changes by -5%), and the temperature characteristic.
【００１４】また、この積層インダクタ１６では内部電
極１ａ〜５ａと磁性体層１〜５が密着しているため空隙
が生じず、従来のように、磁性体層と内部電極間に設け
られた空隙に、外部電極にメッキするときに使用するメ
ッキ液、若しくは半田付けするときにに使用するワック
ス、或いは水分が浸入することもなく、内部電極１ａ〜
５ａが劣化して特性が低下することもない。Further, in this laminated inductor 16, since the internal electrodes 1a to 5a and the magnetic layers 1 to 5 are in close contact with each other, no void is generated, and a void provided between the magnetic layer and the internal electrode as in the conventional case. In addition, the plating liquid used when plating the external electrodes, the wax used when soldering, or the moisture does not enter, and the internal electrodes 1a to
5a does not deteriorate and the characteristics do not deteriorate.
【００１５】以下に、熱衝撃処理の温度差、処理回数を
変えて、積層インダクタのＬ値、Ｑ値、直流重畳特性、
並びに温度特性の変化を調べた実験結果を示す。Below, the L value, Q value, DC superposition characteristics of the laminated inductor are changed by changing the temperature difference and the number of times of thermal shock processing.
Also, the experimental results for examining the change in temperature characteristics are shown.
【００１６】今回の実験では、寸法が縦１．２５ｍｍ×
横２．０ｍｍ×高さ０．９ｍｍであり、コイルのターン
数が６．５ターンの積層インダクタを使用する。なお、
積層インダクタの寸法、コイルのターン数については実
験者が任意に選択でき、特に指定されるものではない。In this experiment, the size is 1.25 mm long.
A laminated inductor having a width of 2.0 mm and a height of 0.9 mm and having a coil turn number of 6.5 turns is used. In addition,
The dimensions of the laminated inductor and the number of turns of the coil can be arbitrarily selected by the experimenter and are not particularly specified.
【００１７】条件１では、積層インダクタに冷熱衝撃装
置を用いて温度差５０℃となる熱衝撃処理を１回の処理
回数で行った。条件２では、積層インダクタに冷熱衝撃
装置を用いて温度差１００℃となる熱衝撃処理を１回、
５回、５０回の処理回数で行った。条件３では、積層イ
ンダクタに冷熱衝撃装置を用いて温度差１２０℃となる
熱衝撃処理を１回、５回、５０回の処理回数で行った。
条件４では、積層インダクタに冷熱衝撃装置と、冷却時
には液体窒素を併用して温度差２００℃となる熱衝撃処
理を１回の処理回数で行った。また、これらの各条件と
比較するために、比較例１として熱衝撃処理を行う前の
積層インダクタを用意した。Under the condition 1, the thermal shock treatment with a temperature difference of 50 ° C. was performed on the laminated inductor by using a cooling and thermal shock device in a single treatment. Under condition 2, a thermal shock treatment was used for the laminated inductor to obtain a temperature difference of 100 ° C. once,
The treatment was performed 5 times and 50 times. Under the condition 3, the thermal shock treatment with the temperature difference of 120 ° C. was performed once, 5 times, and 50 times by using the cooling and thermal shock device for the laminated inductor.
Under the condition 4, a thermal shock device was used together with the laminated inductor and liquid nitrogen at the time of cooling, and a thermal shock process with a temperature difference of 200 ° C. was performed once. Moreover, in order to compare with each of these conditions, a laminated inductor before thermal shock treatment was prepared as Comparative Example 1.
【００１８】そして、条件１〜４及び比較例１の積層イ
ンダクタの特性の測定方法として、まず基板に取り付け
た直後の積層インダクタのＬ値、Ｑ値、及び直流抵抗Ｒ
ｄｃを測定し、その後４０℃、９０〜９５％ＲＨの耐湿
槽に１０００時間投入し、層から取り出した後、再度積
層インダクタのＬ値、Ｑ値、及び直流抵抗Ｒｄｃを測定
した。なお、このときの基板付け条件は、まず基板に接
着剤で積層インダクタを付け、ハロゲン系のフラックス
を塗布し、２５０℃の６×４はんだに浸せきし、水で洗
浄を行った。Then, as a method for measuring the characteristics of the laminated inductor of Conditions 1 to 4 and Comparative Example 1, first, the L value, the Q value, and the DC resistance R of the laminated inductor immediately after being mounted on the substrate.
dc was measured, and after that, it was put in a humidity resistant tank at 40 ° C. and 90 to 95% RH for 1000 hours, taken out from the layer, and then the L value, Q value, and DC resistance Rdc of the laminated inductor were measured again. In addition, regarding the substrate attachment conditions at this time, first, a laminated inductor was attached to the substrate with an adhesive, a halogen-based flux was applied, the substrate was dipped in 6 × 4 solder at 250 ° C., and washed with water.
【００１９】条件１〜４及び比較例１の積層インダクタ
の特性を測定した結果を表１に示す。Table 1 shows the results of measuring the characteristics of the laminated inductors of Conditions 1 to 4 and Comparative Example 1.
【００２０】[0020]
【表１】 [Table 1]
【００２１】表１に示すように、温度差５０℃となる熱
衝撃処理を行った条件１と温度差１００℃となる熱衝撃
処理を行った条件２の積層インダクタでは、比較例１の
積層インダクタに比較して、Ｌ値、Ｑ値、直流重畳特
性、及び温度特性がともにそれ程効果はない。しかし、
温度差１２０℃となる熱衝撃処理を行った条件３の積層
インダクタでは、Ｌ値、Ｑ値、及び直流重畳特性が向上
し、温度特性においても、温度による変化率が小さくな
っていることが確認できる。そして、温度差２００℃と
なる熱衝撃処理を行った条件４の積層インダクタでは、
Ｌ値、Ｑ値、及び直流重畳特性がさらに向上し、温度に
よる変化率もさらに小さくなっていることが確認でき
る。As shown in Table 1, in the laminated inductor under the condition 1 in which the thermal shock treatment with the temperature difference of 50 ° C. and the condition 2 under the thermal shock treatment with the temperature difference of 100 ° C., the laminated inductor of Comparative Example 1 is used. In comparison with, the L value, the Q value, the DC superposition characteristic, and the temperature characteristic are not so effective. But,
It was confirmed that in the laminated inductor under the condition 3 in which the thermal shock treatment with the temperature difference of 120 ° C. was performed, the L value, the Q value, and the DC superposition characteristic were improved, and the temperature characteristic had a small rate of change with temperature. it can. Then, in the laminated inductor under the condition 4 which is subjected to the thermal shock treatment with the temperature difference of 200 ° C.,
It can be confirmed that the L value, the Q value, and the DC superposition characteristic are further improved, and the rate of change with temperature is further reduced.
【００２２】また、温度差１００℃となる熱衝撃処理を
行った条件２の積層インダクタでは、熱衝撃処理の処理
回数を増やしてもそれ程特性の変化はないが、温度差１
２０℃となる熱衝撃処理を行った条件３の積層インダク
タでは、回数が増すごとにＬ値、Ｑ値、及び直流重畳特
性が向上し、温度による変化率が小さくなっていること
が確認できる。Further, in the laminated inductor under the condition 2 in which the thermal shock treatment with the temperature difference of 100 ° C. is performed, the characteristic does not change so much even if the number of times of the thermal shock treatment is increased, but the temperature difference is 1
It can be confirmed that, in the laminated inductor under the condition 3 which was subjected to the thermal shock treatment at 20 ° C., the L value, the Q value, and the DC superimposition characteristic were improved as the number of times was increased, and the rate of change with temperature was decreased.
【００２３】これにより、温度差１２０℃以上の熱衝撃
処理を加えることで積層インダクタのＬ値、Ｑ値、及び
直流重畳特性が向上し、温度による変化率が小さくなる
ことがわかる。そして、これら特性の向上は、熱衝撃処
理の温度差を大きい程、または熱衝撃処理の回数を増や
す程、顕著であることがわかる。From this, it can be seen that the thermal shock treatment with a temperature difference of 120 ° C. or more improves the L value, the Q value, and the DC superposition characteristic of the laminated inductor, and reduces the rate of change with temperature. It can be seen that the improvement of these characteristics is more remarkable as the temperature difference of the thermal shock treatment is larger or the number of times of the thermal shock treatment is increased.
【００２４】また、磁性体層と内部電極間に空隙を設け
ることにより、磁性体層と内部電極との熱膨張率の違い
から発生する応力を緩和させた従来の積層インダクタと
比較しても、耐湿試験により従来の積層インダクタがＬ
値、Ｑ値が低下し、直流抵抗Ｒｄｃ値が大幅に大きくな
るのに対して、本実施例の積層インダクタはＬ値、Ｑ
値、及びＲｄｃ値は耐湿試験によりほとんど変化しな
い。In addition, by providing a space between the magnetic layer and the internal electrode, the stress generated due to the difference in the coefficient of thermal expansion between the magnetic layer and the internal electrode is relaxed. A conventional multilayer inductor has L
Value and Q value are lowered and the DC resistance Rdc value is significantly increased, whereas the laminated inductor of the present embodiment has L value and Q value.
The value and Rdc value hardly change by the humidity resistance test.
【００２５】[0025]
【発明の効果】以上説明したように、本発明にかかる積
層インダクタの製造方法によれば、熱衝撃処理を行うこ
とにより、焼成後の冷却過程における内部電極と磁性体
層間に発生する磁性体の応力磁歪を緩和し、積層インダ
クタのＬ値、Ｑ値、直流重畳特性、並びに温度特性を向
上させた積層インダクタを容易に且つ短時間で得ること
ができる。また、磁性体層と内部電極が密着して、空隙
ができないもので、従来の磁性体層と内部電極間に空隙
を設けた積層インダクタに比べ、耐湿性の高い積層イン
ダクタを得ることができる。As described above, according to the method of manufacturing a laminated inductor according to the present invention, the thermal shock treatment is performed, so that the magnetic substance generated between the internal electrode and the magnetic substance layer in the cooling process after firing is removed. It is possible to easily and quickly obtain a laminated inductor in which stress magnetostriction is relaxed and the L value, the Q value, the DC superposition characteristic, and the temperature characteristic of the laminated inductor are improved. Further, since the magnetic layer and the internal electrode are in close contact with each other and no void is formed, a laminated inductor having higher moisture resistance can be obtained as compared with the conventional laminated inductor having the void between the magnetic layer and the internal electrode.
【図１】本発明の実施例における積層インダクタを構成
する積層体を示す分解斜視図である。FIG. 1 is an exploded perspective view showing a laminated body that constitutes a laminated inductor according to an embodiment of the present invention.
【図２】本発明の実施例における積層インダクタを示す
斜視図である。FIG. 2 is a perspective view showing a laminated inductor according to an embodiment of the present invention.
【図３】従来の積層インダクタを示す断面図である。FIG. 3 is a cross-sectional view showing a conventional laminated inductor.
１〜１３ 磁性体シート（磁性体層） １ａ〜５ａ 導体パターン（内部電極） ７ スルーホール １４ 積層体 １５ 外部電極 １６ 積層インダクタ 1 to 13 Magnetic Sheet (Magnetic Layer) 1a to 5a Conductor Pattern (Internal Electrode) 7 Through Hole 14 Laminated Body 15 External Electrode 16 Laminated Inductor
Claims (1)
した磁性体層を積層し、一定の圧力を加えたのち、焼成
することにより積層体を得る工程と、 前記積層体に外部電極を形成する工程と、 前記積層体に対し、温度差１２０℃以上となる熱衝撃処
理を一回以上行う工程と、 を含むことを特徴とする積層インダクタの製造方法。1. A step of laminating a magnetic layer having a conductor pattern formed as an internal electrode on a surface thereof, applying a constant pressure, and then firing to obtain a laminated body, and forming an external electrode on the laminated body. And a step of subjecting the laminated body to a thermal shock treatment at a temperature difference of 120 ° C. or more once or more, a method of manufacturing a laminated inductor.
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP03108595A JP3601096B2 (en) | 1994-09-22 | 1995-02-20 | Manufacturing method of multilayer inductor |
Applications Claiming Priority (3)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP6-228218 | 1994-09-22 | ||
| JP22821894 | 1994-09-22 | ||
| JP03108595A JP3601096B2 (en) | 1994-09-22 | 1995-02-20 | Manufacturing method of multilayer inductor |
Publications (2)
| Publication Number | Publication Date |
|---|---|
| JPH08148363A true JPH08148363A (en) | 1996-06-07 |
| JP3601096B2 JP3601096B2 (en) | 2004-12-15 |
Family
ID=26369539
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP03108595A Expired - Lifetime JP3601096B2 (en) | 1994-09-22 | 1995-02-20 | Manufacturing method of multilayer inductor |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JP3601096B2 (en) |
Cited By (4)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| EP1011115A1 (en) * | 1998-12-17 | 2000-06-21 | Korea Electronics Technology Institute | Multilayer type chip inductor |
| KR100475620B1 (en) * | 2001-12-14 | 2005-03-15 | 미쓰비시덴키 가부시키가이샤 | Multi-layered inductance element |
| JP2010040860A (en) * | 2008-08-06 | 2010-02-18 | Murata Mfg Co Ltd | Laminated coil component and method of manufacturing the same |
| CN114267513A (en) * | 2020-10-01 | 2022-04-01 | 株式会社村田制作所 | Coil component and method for manufacturing same |
-
1995
- 1995-02-20 JP JP03108595A patent/JP3601096B2/en not_active Expired - Lifetime
Cited By (4)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| EP1011115A1 (en) * | 1998-12-17 | 2000-06-21 | Korea Electronics Technology Institute | Multilayer type chip inductor |
| KR100475620B1 (en) * | 2001-12-14 | 2005-03-15 | 미쓰비시덴키 가부시키가이샤 | Multi-layered inductance element |
| JP2010040860A (en) * | 2008-08-06 | 2010-02-18 | Murata Mfg Co Ltd | Laminated coil component and method of manufacturing the same |
| CN114267513A (en) * | 2020-10-01 | 2022-04-01 | 株式会社村田制作所 | Coil component and method for manufacturing same |
Also Published As
| Publication number | Publication date |
|---|---|
| JP3601096B2 (en) | 2004-12-15 |
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