JPH08131979A - Washing apparatus - Google Patents
Washing apparatusInfo
- Publication number
- JPH08131979A JPH08131979A JP30030894A JP30030894A JPH08131979A JP H08131979 A JPH08131979 A JP H08131979A JP 30030894 A JP30030894 A JP 30030894A JP 30030894 A JP30030894 A JP 30030894A JP H08131979 A JPH08131979 A JP H08131979A
- Authority
- JP
- Japan
- Prior art keywords
- water
- tank
- detergent
- cleaning
- washing
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Pending
Links
Landscapes
- Separation Using Semi-Permeable Membranes (AREA)
- Coating Apparatus (AREA)
- Cleaning By Liquid Or Steam (AREA)
Abstract
Description
【０００１】[0001]
【産業上の利用分野】本発明は半導体の製造工程などに
おいて使用される洗浄装置に関する。BACKGROUND OF THE INVENTION 1. Field of the Invention The present invention relates to a cleaning device used in a semiconductor manufacturing process or the like.
【０００２】[0002]
【従来の技術】従来、半導体の製造工程では、たとえば
ウェーハやプリント基板の洗浄を行うのに、洗剤として
フロンが使用されていた。ところが、フロンは環境破壊
を起こすおそれがあるため、近年フロン代替洗剤として
界面活性剤などを使用して半導体の洗浄を行うことが試
みられている。2. Description of the Related Art Conventionally, CFCs have been used as a detergent in a semiconductor manufacturing process, for example, for cleaning a wafer or a printed circuit board. However, since CFCs may cause environmental damage, it has been attempted in recent years to clean semiconductors by using a surfactant or the like as a CFC substitute detergent.
【０００３】[0003]
【発明が解決しようとする課題】界面活性剤などを洗剤
として使用する場合、洗浄後、洗剤を貯溜した洗浄槽か
ら被洗浄物を取り出してから、被洗浄物に付着する洗剤
を取り除くために、洗浄水を貯溜したすすぎ槽に被洗浄
物を浸漬してすすぎを行う必要がある。このため、大き
なすすぎ槽を用意しなければならず、洗浄装置の構成が
複雑になるという問題点を有する。When a surfactant or the like is used as a detergent, in order to remove the detergent attached to the article to be washed after removing the article to be washed from the washing tank storing the detergent after washing, It is necessary to perform rinsing by immersing the object to be cleaned in a rinsing tank that stores cleaning water. For this reason, a large rinsing tank must be prepared, and the configuration of the cleaning device becomes complicated.
【０００４】このような問題点を解決する方法として、
洗浄槽から被洗浄物を取り出すとき、シャワー器から放
出される水ですすぎを行うことが考えられる。しかし、
この場合には、シャワー器から放出される水によって洗
浄槽に貯溜される洗剤が希釈されることとなり、良好な
洗浄を継続して行えないという新たな問題点が生じるこ
とになる。従って、この方法によって、良好な洗浄を継
続して行うためには、頻繁に洗浄槽の洗剤を入替えて洗
剤の濃度を一定に保つ必要があり、洗浄に要する処理が
煩雑になる。As a method of solving such a problem,
When taking out the object to be cleaned from the cleaning tank, it is possible to rinse with water discharged from the shower. But,
In this case, the water discharged from the shower device dilutes the detergent stored in the cleaning tank, which causes another problem that good cleaning cannot be continuously performed. Therefore, in order to continuously perform good cleaning by this method, it is necessary to frequently replace the detergent in the cleaning tank to keep the concentration of the detergent constant, which complicates the treatment required for cleaning.
【０００５】本発明は、上記の点に鑑みてなされたもの
で、洗浄槽に貯溜される洗剤の濃度を変化させず、しか
も大型のすすぎ槽を設置することも必要としない、洗浄
装置を提供することを目的とする。The present invention has been made in view of the above points, and provides a cleaning device that does not change the concentration of the detergent stored in the cleaning tank and does not require the installation of a large rinsing tank. The purpose is to do.
【０００６】[0006]
【課題を解決するための手段】上記目的を達成するため
に、請求項１に係る洗浄装置は、被洗浄物が浸漬される
洗剤を貯溜した洗浄槽と、洗浄槽から取り出された被洗
浄物が浸漬される洗浄水を貯溜したすすぎ槽とを備えた
洗浄装置において、洗浄槽の上方に配置されて洗浄槽か
ら取り出された被洗浄物に水を放出してすすぐシャワー
器と、洗剤から水を分離する第１分離手段と、洗浄槽か
ら洗剤を導出して第１分離手段に導入する洗剤導出路
と、第１分離手段で分離された水を回収してシャワー器
に供給する第１水回収路と、第１分離手段から流出する
濃縮洗剤を洗浄槽に戻す洗剤回収路とを設けたものであ
る。In order to achieve the above object, a cleaning apparatus according to a first aspect of the present invention is a cleaning tank in which a detergent in which an object to be cleaned is stored is stored, and an object to be cleaned taken out from the cleaning tank. In a cleaning device equipped with a rinsing tank that stores cleaning water in which is immersed, a rinsing shower device that discharges water to an object to be cleaned that is arranged above the cleaning tank and is taken out from the cleaning tank, and water is rinsed from the detergent. First separating means for separating water, a detergent outlet for introducing the detergent from the cleaning tank and introducing the detergent into the first separating means, and first water for collecting the water separated by the first separating means and supplying the water to the shower device. A recovery path and a detergent recovery path for returning the concentrated detergent flowing out from the first separating means to the cleaning tank are provided.
【０００７】また、請求項２に係る洗浄装置は、請求項
１の洗浄装置に、さらに洗浄水から水を分離する第２分
離手段と、すすぎ槽から洗浄水を導出して第２分離手段
に導入する洗浄水導出路と、第２分離手段で分離された
水を回収してすすぎ槽に戻す第２水回収路と、第２分離
手段から流出する濃縮洗浄水を洗浄水導出路に導入する
帰還路とを設けたものである。A cleaning device according to a second aspect is the same as the cleaning device according to the first aspect, further comprising a second separating means for separating water from the cleaning water and a second separating means for discharging the cleaning water from the rinsing tank. Introducing wash water outflow path, a second water recovery path for recovering water separated by the second separating means and returning it to the rinsing tank, and introducing concentrated wash water flowing out from the second separating means into the wash water outflow path. A return route is provided.
【０００８】[0008]
【作用】上記請求項１に係る洗浄装置によれば、被洗浄
物の洗浄に用いられる洗浄槽の洗剤は洗剤導出路を経て
第１分離手段に導入される。第１分離手段により洗剤か
ら分離された水は、第１水回収路を経てシャワー器に供
給されて洗浄槽から取り出された被洗浄物のすすぎに使
用された後、洗浄槽に戻される。一方、第１分離手段よ
り流出する濃縮洗剤は洗剤回収路を経て洗浄槽に戻され
る。かくして洗浄槽に貯溜される洗剤の濃度は常に一定
に維持される。According to the cleaning apparatus of the first aspect, the detergent in the cleaning tank used for cleaning the object to be cleaned is introduced into the first separating means through the detergent outlet path. The water separated from the detergent by the first separating means is supplied to the shower device via the first water recovery passage and used for rinsing the object to be cleaned taken out from the cleaning tank, and then returned to the cleaning tank. On the other hand, the concentrated detergent flowing out from the first separating means is returned to the washing tank through the detergent recovery passage. Thus, the concentration of the detergent stored in the washing tank is always kept constant.
【０００９】また、上記請求項２に係る洗浄装置によれ
ば、洗浄槽で洗浄されシャワー器ですすがれた被洗浄物
に対してさらにすすぎを行うために設けられたすすぎ槽
の洗浄水は、洗浄水導出路を経て第２分離手段に導入さ
れ、ここで分離された水は第２水回収路を経てすすぎ槽
に回収されるとともに、第２分離手段から流出する濃縮
洗浄水は、帰還路を経て上記洗浄水導出路に戻されて再
度第２分離手段に導入されるので、すすぎ槽の洗浄水は
常に汚れのない状態に維持される。According to the cleaning apparatus of the second aspect, the cleaning water in the rinsing tank provided for further rinsing the object to be cleaned that has been cleaned in the cleaning tank and rinsed with the shower is The water that has been introduced into the second separating means via the water outlet path is separated into the rinse tank via the second water collecting path, and the concentrated cleaning water flowing out from the second separating means flows through the return path. After that, the cleaning water is returned to the cleaning water outlet and is again introduced into the second separating means, so that the cleaning water in the rinsing tank is always kept clean.
【００１０】[0010]
【実施例】図１は本発明の一実施例に係る洗浄装置を示
す概略構成図である。この洗浄装置は、たとえば半導体
装置の製造工程においてウェーハ、プリント基板などの
被洗浄物Ｍを洗浄するのに使用するものであり、被洗浄
物Ｍが浸漬される所定濃度の洗剤Ａを貯溜した洗浄槽１
の底部は、途中にポンプ２、プレフィルタ３、油水分離
器４およびポンプ５を上流側よりこれらの順序で介在さ
せた洗剤導出用配管６を介して、逆浸透圧型フィルタ７
の一次側に連通させてある。上記プレフィルタ３、油水
分離器４および逆浸透圧型フィルタ７が、洗剤Ａから水
を分離する第１分離手段Ｓ１を構成している。洗剤とし
ては例えば、イソプロピルアルコール等の低級アルコー
ル、界面活性剤などに超純水（ミクロンオーダーの微粒
子を殆んど含まない水）を加えて、所定の濃度としたも
のが使用される。DETAILED DESCRIPTION OF THE PREFERRED EMBODIMENTS FIG. 1 is a schematic block diagram showing a cleaning apparatus according to an embodiment of the present invention. This cleaning device is used for cleaning an object to be cleaned M such as a wafer and a printed circuit board in a semiconductor device manufacturing process, for example, and is a cleaning device in which a predetermined concentration of detergent A in which the object to be cleaned M is immersed is stored. Tank 1
The bottom portion of the reverse osmotic pressure type filter 7 has a pump 2, a pre-filter 3, an oil-water separator 4 and a pump 5 in the order from the upstream side in the order of a detergent outlet pipe 6.
It is connected to the primary side of. The pre-filter 3, the oil / water separator 4 and the reverse osmotic pressure type filter 7 constitute a first separating means S1 for separating water from the detergent A. As the detergent, for example, a lower alcohol such as isopropyl alcohol, a surfactant, or the like, and ultrapure water (water containing almost no micron-order fine particles) added thereto to have a predetermined concentration are used.
【００１１】上記プレフィルタ３は、洗剤導出用配管６
に流入する洗剤Ａから比較的粒度の大きいごみなどを除
去する能力をもつフィルタである。上記油水分離器４
は、洗剤導出用配管６に流入する洗剤Ａから油分を除去
する機能をもつ装置である。上記逆浸透圧型フィルタ７
は、逆浸透圧法により洗剤Ａから水を分離する分離手段
である。この逆浸透圧型フィルタ７に付加する逆浸透圧
が過大になると、フィルタ７を傷めるので、逆浸透圧が
適正な範囲に保たれるよう、洗剤Ａにおける洗剤の濃度
を適正な値に設定することが望ましい。なお、所望の場
合には、逆浸透圧型フィルタ７に代えて、浸透気化によ
り洗剤Ａから水を分離する浸透気化型フィルタを使用す
ることもできる。The prefilter 3 is provided with a detergent outlet pipe 6
The filter has the ability to remove dust and the like having a relatively large particle size from the detergent A flowing into the filter. The oil-water separator 4
Is a device having a function of removing oil from the detergent A flowing into the detergent discharge pipe 6. The reverse osmotic pressure type filter 7
Is a separating means for separating water from the detergent A by the reverse osmosis method. If the reverse osmotic pressure applied to the reverse osmotic pressure type filter 7 becomes excessive, the filter 7 will be damaged. Therefore, the concentration of the detergent in the detergent A should be set to an appropriate value so that the reverse osmotic pressure is kept in an appropriate range. Is desirable. If desired, instead of the reverse osmotic pressure type filter 7, a permeation type filter that separates water from the detergent A by permeation may be used.
【００１２】上記逆浸透圧型フィルタ７の二次側の水の
出口は、水回収用配管８を介してシャワー器９に連通さ
せてある。このシャワー器９は上記洗浄槽１の上方に配
置され、水回収用配管８を経て逆浸透圧型フィルタ７か
ら導出されてくる水を洗浄槽１内に放出するものであ
り、この放水により洗浄槽１の洗剤Ａから取り出される
被洗浄物Ｍのすすぎが行われる。また、逆浸透圧型フィ
ルタ７の濾過されない濃縮洗剤の出口は、洗剤回収用配
管１０を介して上記洗浄槽１の上部空間に連通させてあ
り、これにより、逆浸透圧型フィルタ７で分離される濃
縮洗剤は洗剤回収用配管１０を経て洗浄槽１に回収され
る。上記洗剤回収用配管１０の途中には、仕切弁１１を
有する排液管１２が連結されている。The outlet of water on the secondary side of the reverse osmotic pressure type filter 7 is connected to a shower device 9 through a water recovery pipe 8. The shower device 9 is arranged above the cleaning tank 1 and discharges the water, which is led out from the reverse osmotic pressure type filter 7 through the water recovery pipe 8, into the cleaning tank 1. The water is discharged from the cleaning tank 1. The article to be cleaned M taken out of the detergent A of No. 1 is rinsed. Further, the outlet of the non-filtered concentrated detergent of the reverse osmosis filter 7 is communicated with the upper space of the cleaning tank 1 through the detergent recovery pipe 10, whereby the concentrated separation separated by the reverse osmosis filter 7 is performed. The detergent is collected in the cleaning tank 1 through the detergent collecting pipe 10. A drain pipe 12 having a sluice valve 11 is connected in the middle of the detergent recovery pipe 10.
【００１３】なお、上記逆浸透圧型フィルタ７の上流側
または下流側には、洗剤Ａに殺菌処理を施す紫外線殺菌
装置を配置してもよい。An ultraviolet sterilizer for sterilizing the detergent A may be arranged upstream or downstream of the reverse osmosis filter 7.
【００１４】上記洗浄槽１の次段には、洗浄槽１で洗浄
された被洗浄物Ｍの二次すすぎを行うすすぎ槽１３が配
置されている。このすすぎ槽１３は、超純水からなる洗
浄水Ｂを貯溜する複数の分離槽１３ａ〜１３ｃを順次段
差をもたせたカスケード状に接続して構成される。最下
段の分離槽１３ｃに隣接して設けられた導出槽１４の底
部は、洗浄水導出用配管１５を介してタンク１６に連通
させてある。また、このタンク１６の底部は、途中にポ
ンプ１７、マイクロフィルタ１８、逆浸透圧型フィルタ
１９およびイオン吸着器２０を上流側よりこれらの順序
で介在させた連結管２１を介して限外濾過型フィルタ２
２の一次側に連通させてある。A rinsing tank 13 for performing secondary rinsing of the object M to be cleaned washed in the cleaning tank 1 is arranged at the next stage of the cleaning tank 1. The rinsing tank 13 is configured by connecting a plurality of separation tanks 13a to 13c, which store the cleaning water B made of ultrapure water, in a cascade form with a step. The bottom of the outlet tank 14 provided adjacent to the lowermost separation tank 13c is in communication with the tank 16 via the cleaning water outlet pipe 15. The bottom of the tank 16 has an ultrafiltration type filter through a connecting pipe 21 in which a pump 17, a micro filter 18, a reverse osmosis type filter 19 and an ion adsorber 20 are interposed in this order from the upstream side. Two
It is connected to the primary side of 2.
【００１５】上記マイクロフィルタ１８、逆浸透圧型フ
ィルタ１９、イオン吸着器２０および限外濾過型フィル
タ２２は、洗浄水導出用配管１５を経てすすぎ槽１３よ
り流入する洗浄水Ｂから超純水を分離する第２分離手段
Ｓ２を構成している。そのうち、マイクロフィルタ１８
は洗浄水Ｂから粒径0.1 μｍ以上の不純物を除去する能
力をもつフィルタであり、逆浸透圧型フィルタ１９は洗
浄水Ｂから粒径0.1 〜0.01μｍの範囲の不純物を除去す
る能力をもつフィルタである。また、イオン吸着器２０
は洗浄水Ｂのイオンを吸着除去する機能を有している。The microfilter 18, the reverse osmotic pressure type filter 19, the ion adsorber 20 and the ultrafiltration type filter 22 separate ultrapure water from the wash water B flowing from the rinse tank 13 through the wash water outlet pipe 15. It constitutes the second separating means S2. Among them, the micro filter 18
Is a filter having the ability to remove impurities having a particle size of 0.1 μm or more from the wash water B, and the reverse osmosis filter 19 is a filter having the ability to remove impurities having a particle size of 0.1 to 0.01 μm from the wash water B. is there. In addition, the ion adsorber 20
Has a function of adsorbing and removing the ions of the washing water B.
【００１６】限外濾過型フィルタ２２は洗浄水Ｂから粒
径0.01μm 以下の物質を除去する能力を有し、ここで洗
浄水Ｂは、濾過液である超純水と、濾過されない濃縮洗
浄水とに分離される。この限外濾過型フィルタ２２の二
次側の濾過水用出口は、水回収用配管２３を介して上記
すすぎ槽１３の最上段の分離槽１３ａに連通させてあ
り、限外濾過型フィルタ２２の濃縮洗浄水用出口は、帰
還路２４を介して上記タンク１６に連通させてある。こ
れにより、限外濾過型フィルタ２２で分離された超純水
は水回収用配管２３を経てすすぎ槽１３に回収されて再
利用されるとともに、分離された濃縮洗浄水は帰還路２
４を経てタンク１６に戻される。The ultrafiltration type filter 22 has the ability to remove substances having a particle size of 0.01 μm or less from the wash water B. Here, the wash water B is ultrapure water which is a filtrate and concentrated wash water which is not filtered. And separated. The outlet for filtered water on the secondary side of the ultrafiltration filter 22 is communicated with the uppermost separation tank 13a of the rinse tank 13 via a water recovery pipe 23, and The concentrated cleaning water outlet is communicated with the tank 16 via a return path 24. As a result, the ultrapure water separated by the ultrafiltration filter 22 is collected in the rinsing tank 13 through the water collecting pipe 23 and reused, and the separated concentrated cleaning water is returned to the return path 2.
It is returned to the tank 16 via 4.
【００１７】上記タンク１６は給水管２５を介して給水
源（図示せず）に連通させてあり、この給水管２５を経
て粒径１μｍ程度以上の微粒子をほとんど含まない超純
水がタンク１６に補給される。２６はタンク１６から洗
浄水Ｂを排出するドレン配管である。The tank 16 is connected to a water supply source (not shown) via a water supply pipe 25, and ultrapure water containing almost no fine particles having a particle size of about 1 μm or more is supplied to the tank 16 via the water supply pipe 25. Will be replenished. Reference numeral 26 is a drain pipe for discharging the cleaning water B from the tank 16.
【００１８】次に、上記洗浄装置の動作を説明する。半
導体装置の製造ラインを経て送られてきた、たとえばウ
ェハー、プリント基板などの被洗浄物Ｍは、まず洗浄槽
１に貯溜された洗剤Ａに浸漬され、この洗剤Ａにより被
洗浄物Ｍの洗浄が行われる。洗浄槽１の洗剤Ａは洗剤導
出用配管６を経てプレフィルタ３、油水分離器４に順次
流入し、洗浄にともない洗剤Ａに混入あるいは溶解した
粗ごみや油分が除去される。さらに洗剤Ａは逆浸透圧型
フィルタ７に流入し、ここで濾過された水と濾過されな
い濃縮洗剤とに分離され、分離された水は水回収用配管
８およびシャワー器９を経て洗浄槽１に回収されるとと
もに、濃縮洗剤液は洗剤回収用配管１０を経て洗浄槽１
に回収される。したがって、洗浄槽１における洗剤Ａ中
の洗剤の濃度は常に一定に維持されることになり、最適
な条件の洗剤Ａで継続して被洗浄物を洗浄することがで
きるので、洗剤Ａを頻繁に入れ換える必要がない。しか
も水が循環して再利用されるので、経済的である。Next, the operation of the cleaning device will be described. A cleaning object M such as a wafer or a printed circuit board sent through a semiconductor device manufacturing line is first immersed in a detergent A stored in a cleaning tank 1, and the cleaning object M is cleaned by the cleaning agent A. Done. The detergent A in the cleaning tank 1 sequentially flows into the prefilter 3 and the oil / water separator 4 via the detergent outlet pipe 6, and coarse dust and oil components mixed or dissolved in the detergent A are removed during cleaning. Furthermore, the detergent A flows into the reverse osmotic pressure type filter 7 and is separated into filtered water and unfiltered concentrated detergent, and the separated water is recovered in the cleaning tank 1 through the water recovery pipe 8 and the shower device 9. At the same time, the concentrated detergent liquid is passed through the detergent recovery pipe 10 to the washing tank 1
Will be collected. Therefore, the concentration of the detergent in the detergent A in the cleaning tank 1 is always kept constant, and the object to be washed can be continuously washed with the detergent A under the optimum condition, so that the detergent A is frequently used. No need to switch. Moreover, the water is circulated and reused, which is economical.
【００１９】洗浄された被洗浄物Ｍは洗剤Ａ中から取り
出される際に、シャワー器９から放出される水によって
一次すすぎが行われ、洗剤Ａから引き上げられる被洗浄
物Ｍに付着する洗剤のほとんどが水とともに洗浄槽１に
回収される。When the cleaned object M to be cleaned is taken out from the detergent A, most of the detergent attached to the object M to be cleaned is subjected to primary rinsing by the water discharged from the shower unit 9. Is collected in the cleaning tank 1 together with water.
【００２０】上記一次すすぎを終えた被洗浄物Ｍは次段
のすすぎ槽１３に移され、ここで仕上げのすすぎが行わ
れる。この場合のすすぎは、被洗浄物Ｍを下段の分離槽
１３ｃの洗浄水Ｂから上段の分離槽１３ｂ，１３ａの洗
浄水Ｂへと順次浸漬を繰り返すことにより行われる。し
たがって、下段の分離槽の洗浄水Ｂほど汚れの度合いが
大きくなる。The object to be cleaned M which has been subjected to the above primary rinsing is transferred to the rinsing tank 13 in the next stage, where the final rinsing is performed. In this case, the rinsing is performed by sequentially immersing the object to be cleaned M from the cleaning water B in the lower separation tank 13c to the cleaning water B in the upper separation tanks 13b and 13a. Therefore, the cleaning water B in the lower separation tank is more contaminated.
【００２１】最下段の分離槽１３ｃからオーバフローし
た洗浄水Ｂは、導出槽１４、洗浄水導出用配管１５、タ
ンク１６、連結管２１を経てマイクロフィルタ１８、逆
浸透圧型フィルタ１９およびイオン吸着器２０に順次流
入し、粒径0.01μｍまでの不純微粒子およびイオンが除
去される。さらに洗浄水Ｂは限外濾過型フィルタ２２に
流入し、ここで粒径0.01μm 以下の不純物を除去した濾
過洗浄水（超純水）と濾過されない濃縮洗浄水とに分離
される。濾過洗浄水は水回収用配管２３を経てすすぎ槽
１３の最上段の分離槽１３ａに回収され、濃縮洗浄水は
帰還路２４を経てタンク１６に戻される。The cleaning water B overflowing from the lowermost separation tank 13c is passed through the outlet tank 14, the outlet pipe 15 for cleaning water, the tank 16 and the connecting pipe 21, and then the microfilter 18, the reverse osmotic pressure type filter 19 and the ion adsorber 20. Then, the impure fine particles with a particle size of up to 0.01 μm and ions are removed. Further, the wash water B flows into the ultrafiltration type filter 22 where it is separated into filtered wash water (ultra pure water) from which impurities having a particle size of 0.01 μm or less are removed and concentrated wash water which is not filtered. The filtered cleaning water is collected in the uppermost separation tank 13a of the rinse tank 13 via the water recovery pipe 23, and the concentrated cleaning water is returned to the tank 16 via the return path 24.
【００２２】したがって、すすぎ槽１３には、その最上
段の分離槽１３ａから再生された超純水が洗浄水Ｂとし
て循環的に補給され、各段の分離槽１３ａ〜１３ｃの洗
浄水Ｂは常に一定の清澄度に維持される。すなわち、た
とえば分離槽１３ａの洗浄水Ｂの不純物含有量は0.1ppm
程度に、分離槽１３ｂの洗浄水Ｂの不純物含有量は10pp
m 程度に、分離槽１３ｃの洗浄水Ｂの不純物含有量は10
00ppm 程度に維持される。Therefore, the ultrapure water regenerated from the uppermost separation tank 13a is cyclically replenished to the rinsing tank 13 as the cleaning water B, and the cleaning water B in each of the separation tanks 13a to 13c is always supplied. Maintains a constant clarity. That is, for example, the impurity content of the wash water B in the separation tank 13a is 0.1 ppm.
The impurity content of the washing water B in the separation tank 13b is about 10 pp.
The impurity content of the washing water B in the separation tank 13c is about 10 m
It is maintained at around 00ppm.
【００２３】ここで、被洗浄物Ｍはすすぎ槽１３に入る
前に、シャワー器９によって大まかにすすぎが施されて
いるから、被洗浄物Ｍによってすすぎ槽１３内に持ち込
まれる洗剤の量はごくわずかである。したがって、すす
ぎ槽１３に貯溜された洗浄水Ｂの汚れの程度が小さくて
すむので、すすぎ槽１３を小さくしても仕上げすすぎの
効果を充分上げることができる。しかも、超純水である
濾過洗浄水は、やはり循環して再利用されるので経済的
である。Here, since the object to be cleaned M is roughly rinsed by the shower device 9 before entering the rinsing tank 13, the amount of the detergent brought into the rinsing tank 13 by the object to be cleaned M is very small. Few. Therefore, since the cleaning water B stored in the rinsing tank 13 can be contaminated to a small extent, the effect of finishing rinsing can be sufficiently enhanced even if the rinsing tank 13 is made small. Moreover, the filtered cleaning water, which is ultrapure water, is also circulated and reused, which is economical.
【００２４】なお、本発明は、超純水を用いた洗浄装置
に限られるものではなく、通常の水を用いてすすぎを行
う洗浄装置にも適用できる。The present invention is not limited to the cleaning device using ultrapure water, but can be applied to a cleaning device for rinsing with normal water.
【００２５】なお、所望によりすすぎ槽１３およびこれ
に付随する第２分離手段Ｓ２、洗浄水導出路１５、第２
水回収路２３、帰還路２４を省略して洗浄槽１、シャワ
ー器９、第１分離手段Ｓ１、洗剤導出路６、第１水回収
路８および洗剤回収路１０のみで装置を構成することも
できる。この場合、装置の構成が極めて簡略化される。If desired, the rinsing tank 13 and the associated second separating means S2, the washing water outlet 15, and the second
It is also possible to omit the water recovery passage 23 and the return passage 24 and configure the apparatus only with the cleaning tank 1, the shower device 9, the first separating means S1, the detergent outlet passage 6, the first water recovery passage 8 and the detergent recovery passage 10. it can. In this case, the configuration of the device is extremely simplified.
【００２６】[0026]
【発明の効果】以上のように、請求項１の発明によれ
ば、洗浄槽から導出する洗剤を濃縮洗剤と水に分離し、
濃縮洗剤は洗浄槽に、水はシャワー器で放水して洗浄槽
にそれぞれ回収するので、洗剤から取り出した被洗浄物
をシャワー器からの放水ですすいでも、洗剤の濃度を常
に一定に維持でき、洗剤を頻繁に入れかえる必要がな
い。また、水を循環して再利用できるので、経済的であ
る。As described above, according to the invention of claim 1, the detergent discharged from the washing tank is separated into concentrated detergent and water,
Since the concentrated detergent is discharged to the washing tank and the water is discharged to the cleaning tank by the shower device, respectively, the concentration of the detergent can be always maintained constant even if the object to be cleaned taken out from the detergent is rinsed with the water discharged from the shower device. No need to change detergent frequently. In addition, it is economical because water can be circulated and reused.
【００２７】また、請求項２の発明によれば、すすぎ槽
から導出する洗浄水を濾過洗浄水と濾過されない濃縮洗
浄水とに分離し、濃縮洗浄水は再度分離し、濾過洗浄水
はすすぎ槽に回収するので、すすぎ槽の洗浄水を常に一
定清澄度に維持でき、すすぎ槽を小型にすることができ
る。According to the second aspect of the present invention, the washing water discharged from the rinsing tank is separated into filtered washing water and unfiltered concentrated washing water, the concentrated washing water is separated again, and the filtered washing water is rinsed. Since the water is collected in the rinsing tank, the rinsing water in the rinsing tank can always be maintained at a constant clarity, and the rinsing tank can be made compact.
【図１】この発明の一実施例を示す概略構成図である。FIG. 1 is a schematic configuration diagram showing an embodiment of the present invention.
１…洗浄槽、３…プレフィルタ、４…油水分離器、６…
洗剤導出用配管、７…逆浸透圧型フィルタ、８…水回収
用配管（第１水回収路）、９…シャワー器、１０…洗剤
回収用配管（洗剤回収路）、１３…すすぎ槽、１５…洗
浄水導出用配管、１８…マイクロフィルム、１９…逆浸
透圧型フィルタ、２０…イオン吸着器、２１…連結管、
２２…限外濾過型フィルタ、２３…水回収用配管（第２
水回収路）、２４…帰還路、Ｓ１…第１分離手段、Ｓ２
…第２分離手段。1 ... Washing tank, 3 ... Prefilter, 4 ... Oil-water separator, 6 ...
Detergent outlet pipe, 7 ... Reverse osmosis filter, 8 ... Water recovery pipe (first water recovery passage), 9 ... Shower, 10 ... Detergent recovery pipe (detergent recovery passage), 13 ... Rinse tank, 15 ... Cleaning water outlet pipe, 18 ... Microfilm, 19 ... Reverse osmosis type filter, 20 ... Ion adsorber, 21 ... Connection pipe,
22 ... Ultrafiltration type filter, 23 ... Water recovery pipe (second
Water recovery path), 24 ... Return path, S1 ... First separating means, S2
... second separating means.
───────────────────────────────────────────────────── フロントページの続き (72)発明者 水谷 貞三 大阪府大阪市淀川区新高３丁目７番９号 株式会社新三国機械内 ─────────────────────────────────────────────────── ─── Continued front page (72) Inventor Teizo Mizutani 3-7-9 Shintaka, Yodogawa-ku, Osaka-shi, Osaka
Claims (2)
浄槽と、洗浄槽から取り出された被洗浄物が浸漬される
洗浄水を貯溜したすすぎ槽とを備えた洗浄装置におい
て、 洗浄槽の上方に配置されて洗浄槽から取り出された被洗
浄物に水を放出してすすぐシャワー器と、洗剤から水を
分離する第１分離手段と、洗浄槽から洗剤を導出して第
１分離手段に導入する洗剤導出路と、第１分離手段で分
離された水を回収してシャワー器に供給する第１水回収
路と、第１分離手段から流出する濃縮洗剤を洗浄槽に戻
す洗剤回収路とを備えたことを特徴とする洗浄装置。1. A cleaning device comprising a cleaning tank in which a detergent into which an object to be cleaned is stored is stored, and a rinse tank in which cleaning water in which the object to be cleaned is immersed is stored. A shower unit that discharges water to the object to be cleaned which is disposed above the cleaning tank and is taken out from the cleaning tank, a first separating means for separating water from the detergent, and a first separating means for discharging the detergent from the cleaning tank. And a first water collecting path for collecting the water separated by the first separating means and supplying it to the shower device, and a detergent collecting path for returning the concentrated detergent flowing out from the first separating means to the washing tank. And a cleaning device.
水を分離する第２分離手段と、すすぎ槽から洗浄水を導
出して第２分離手段に導入する洗浄水導出路と、第２分
離手段で分離された水を回収してすすぎ槽に戻す第２水
回収路と、第２分離手段から流出する濃縮洗浄水を洗浄
水導出路に導入する帰還路とを備えた洗浄装置。2. The second separation means according to claim 1, further comprising: a second separation means for separating water from the cleaning water; a cleaning water outlet path for discharging the cleaning water from the rinsing tank and introducing the cleaning water into the second separation means. A cleaning device provided with a second water recovery path for recovering the water separated by the means and returning it to the rinsing tank, and a return path for introducing the concentrated cleaning water flowing out from the second separation means into the cleaning water outlet path.
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP30030894A JPH08131979A (en) | 1994-11-08 | 1994-11-08 | Washing apparatus |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP30030894A JPH08131979A (en) | 1994-11-08 | 1994-11-08 | Washing apparatus |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| JPH08131979A true JPH08131979A (en) | 1996-05-28 |
Family
ID=17883220
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP30030894A Pending JPH08131979A (en) | 1994-11-08 | 1994-11-08 | Washing apparatus |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPH08131979A (en) |
Cited By (4)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| US6165918A (en) * | 1999-05-06 | 2000-12-26 | Integrated Device Technology, Inc. | Method for forming gate oxides of different thicknesses |
| JP2006272170A (en) * | 2005-03-29 | 2006-10-12 | Kurita Water Ind Ltd | Sulfuric-acid recycling type washing system |
| JP2008043886A (en) * | 2006-08-17 | 2008-02-28 | Suntory Ltd | Apparatus for cleaning food filling container |
| JP2013163159A (en) * | 2012-02-10 | 2013-08-22 | Water Renaissance Association Partnership | Cleaning apparatus and washing method |
-
1994
- 1994-11-08 JP JP30030894A patent/JPH08131979A/en active Pending
Cited By (4)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| US6165918A (en) * | 1999-05-06 | 2000-12-26 | Integrated Device Technology, Inc. | Method for forming gate oxides of different thicknesses |
| JP2006272170A (en) * | 2005-03-29 | 2006-10-12 | Kurita Water Ind Ltd | Sulfuric-acid recycling type washing system |
| JP2008043886A (en) * | 2006-08-17 | 2008-02-28 | Suntory Ltd | Apparatus for cleaning food filling container |
| JP2013163159A (en) * | 2012-02-10 | 2013-08-22 | Water Renaissance Association Partnership | Cleaning apparatus and washing method |
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