JPH0813149A - Evacuating valve for cvd device - Google Patents
Evacuating valve for cvd deviceInfo
- Publication number
- JPH0813149A JPH0813149A JP16594594A JP16594594A JPH0813149A JP H0813149 A JPH0813149 A JP H0813149A JP 16594594 A JP16594594 A JP 16594594A JP 16594594 A JP16594594 A JP 16594594A JP H0813149 A JPH0813149 A JP H0813149A
- Authority
- JP
- Japan
- Prior art keywords
- valve
- bellows
- vacuum exhaust
- heater
- sheath
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Granted
Links
Landscapes
- Details Of Valves (AREA)
- Chemical Vapour Deposition (AREA)
Abstract
Description
【０００１】[0001]
【産業上の利用分野】本発明は、ＣＶＤ装置の真空排気
弁に関する。BACKGROUND OF THE INVENTION 1. Field of the Invention The present invention relates to a vacuum exhaust valve for a CVD apparatus.
【０００２】[0002]
【従来の技術】従来、ＣＶＤ装置の真空排気系に設けら
れる弁は、図６に示すように右側にガス流入口１を有
し、下側にガス流出口２を有する弁箱３内で、上側のア
クチュエータ４により開閉動作する弁体５の作動連結部
をベローズ６でシールしている。弁体５の弁座７に当接
するシールガスケット８にはフッ素ゴムが用いられてい
る。ところで、排ガス温度が１３０℃以下だと、弁座７
やシートガスケット８の表面及びベローズ６に生成物が
付着し、閉弁時、ガスがリークする。この為、弁を加熱
するのであるが、シートガスケット８にフッ素ゴムを使
用しているので、弁の加熱の限界が１５０℃程度であ
る。しかし、弁箱３の外面に取付けたラバーヒータ９の
加熱では、外部が１５０℃でも内部は８０℃程度であ
り、弁内が真空の場合はさらに低い。このようにラバー
ヒータ９による外部からの加熱では、弁箱３と内部との
温度差が大きく、弁体５やベローズ６を１３０℃以上に
加熱できず、弁体５やベローズ６は生成物の付着を余儀
なくされていた。従って、弁内の洗浄を頻繁に行わなけ
ればならず、ベローズの寿命も短く、弁の耐久性が乏し
かった。2. Description of the Related Art Conventionally, a valve provided in a vacuum exhaust system of a CVD apparatus has a gas inlet 1 on the right side and a gas outlet 2 on the lower side in a valve box 3 as shown in FIG. The bellows 6 seals the operation connecting portion of the valve body 5 which is opened and closed by the upper actuator 4. Fluorine rubber is used for the seal gasket 8 that contacts the valve seat 7 of the valve body 5. By the way, if the exhaust gas temperature is below 130 ° C, the valve seat 7
The product adheres to the surface of the sheet gasket 8 and the bellows 6, and gas leaks when the valve is closed. Therefore, the valve is heated. However, since the sheet gasket 8 is made of fluororubber, the heating limit of the valve is about 150 ° C. However, when the rubber heater 9 attached to the outer surface of the valve box 3 is heated, the inside temperature is about 80 ° C. even when the outside temperature is 150 ° C., and is even lower when the inside of the valve is vacuum. As described above, when the rubber heater 9 heats the outside from the outside, the temperature difference between the valve box 3 and the inside is large, and the valve body 5 and the bellows 6 cannot be heated to 130 ° C. or higher. Had to adhere. Therefore, the interior of the valve must be frequently washed, the bellows has a short life, and the valve has poor durability.
【０００３】[0003]
【発明が解決しようとする課題】そこで本発明は、弁内
を、弁体やベローズ等に生成物が付着しないように安定
した加熱を行うことができるようにしたＣＶＤ装置の真
空排気弁を提供しようとするものである。SUMMARY OF THE INVENTION Therefore, the present invention provides a vacuum exhaust valve for a CVD apparatus capable of performing stable heating inside the valve so that the product does not adhere to the valve body or bellows. Is what you are trying to do.
【０００４】[0004]
【課題を解決するための手段】上記課題を解決するため
の本発明のＣＶＤ装置の真空排気弁は、一側にガス流入
口又はガス流出口を有し、下側にガス流出口又はガス流
入口を有する弁箱内で、上側のアクチュエータにより開
閉動作する弁体の作動連結部をベローズでシールしたＣ
ＶＤ装置の真空排気弁に於いて、前記ベローズ内で弁体
の作動連結部の外周側に弾性伸縮可能なコイル状のシー
スヒータを配し、その下端を弁体の上側に固定し、上端
を弁箱内天井面で固定の上、弁箱外のリード線に接続し
てなるものである。前記シースヒータのみで弁内を１８
０〜２００℃に連続加熱する場合もあるが、シースヒー
タを温度制御する場合は、弁箱内でシースヒータの内周
側に、同一レベルで、同一コイル数のシース熱電対を同
心に配し、その下端を弁体の上側に固定し、上端を弁箱
内天井面で固定の上、弁箱外のリード線に接続する。上
記はシースヒータを弁箱内から温度制御するものである
が、弁箱外から温度制御するように温度調整器を設け、
この温度調整器にシースヒータのリード線及びシース熱
電対のリード線を接続するようにしても良い。また、弁
内を内部からシースヒータにより加熱するばかりではな
く、弁箱の外面にラバーヒータを取付けて、弁の外部か
らも加熱するようにしても良い。この場合、それらの温
度制御は弁外の温度調整器により行うようにすると良
い。A vacuum exhaust valve of a CVD apparatus of the present invention for solving the above problems has a gas inlet or a gas outlet on one side and a gas outlet or a gas outlet on the lower side. In the valve box having the inlet, the operation connecting part of the valve body that is opened and closed by the upper actuator is sealed with a bellows C
In a vacuum exhaust valve of a VD device, an elastically expandable coil-shaped sheath heater is arranged on the outer peripheral side of the operation connecting portion of the valve body in the bellows, the lower end thereof is fixed to the upper side of the valve body, and the upper end thereof is fixed to the valve. It is fixed on the ceiling surface inside the box and then connected to the lead wires outside the valve box. 18 inside the valve only with the sheath heater
In some cases, the sheath heater is continuously heated to 0 to 200 ° C., but when controlling the temperature of the sheath heater, the sheath thermocouples having the same level and the same number of coils are concentrically arranged on the inner peripheral side of the sheath heater in the valve box. The lower end is fixed to the upper side of the valve body, the upper end is fixed to the ceiling surface inside the valve box, and then connected to the lead wire outside the valve box. Although the above is to control the temperature of the sheath heater from inside the valve box, a temperature controller is provided to control the temperature from outside the valve box,
The sheath heater lead wire and the sheath thermocouple lead wire may be connected to this temperature controller. Further, not only the inside of the valve is heated by the sheath heater, but a rubber heater may be attached to the outer surface of the valve box to heat the valve from the outside. In this case, it is advisable to control those temperatures by a temperature controller outside the valve.
【０００５】[0005]
【作用】上記のように本発明の真空排気弁は、ベローズ
内で弁体の作動連結部の外周側に弾性伸縮可能なコイル
状のシースヒータを配し、その下端を弁体の上側に固定
し、上端を弁箱内天井面で固定の上、弁箱外のリード線
に接続しているので、弁開及び弁閉時、シースヒータは
弁体の昇降と一体に短縮、伸長して弾性変位するので、
弁体やベローズはくまなく平均的に安定して加熱され、
特にシースヒータの内側にシース熱電対を備えている場
合は、シーヒータによる加熱温度を所要の範囲に設定で
きて、安定した温度制御ができる。従って、弁体やベロ
ーズに生成物が付着しにくくなり、弁内の洗浄の頻度が
激減し、ベローズの寿命が延び、弁の耐久性が向上す
る。また、シースヒータは、弾性伸縮可能に金属パイプ
をコイルスプリング状に成形し、その内部にヒータ線を
通したものであるから、弁の開閉動作時ヒータ線は引張
りや曲げ等の外力を受けずにコイルスプリング状の金属
パイプ内で自由に変位し、摩滅や断線等が生じることが
ない。As described above, in the vacuum exhaust valve of the present invention, the elastically expandable coil-shaped sheath heater is arranged on the outer peripheral side of the operation connecting portion of the valve body in the bellows, and the lower end thereof is fixed to the upper side of the valve body. Since the upper end is fixed to the ceiling surface inside the valve box and connected to the lead wire outside the valve box, the sheath heater shortens and expands elastically as the valve body moves up and down when the valve is opened and closed. So
The valve body and bellows are heated stably throughout the whole,
In particular, when a sheath thermocouple is provided inside the sheath heater, the heating temperature by the sheath heater can be set within a required range, and stable temperature control can be performed. Therefore, the product is unlikely to adhere to the valve body or the bellows, the frequency of cleaning the inside of the valve is drastically reduced, the life of the bellows is extended, and the durability of the valve is improved. In addition, since the sheath heater is formed by molding a metal pipe into a coil spring shape so that it can be elastically expanded and contracted, and a heater wire is passed through the inside, the heater wire does not receive external force such as pulling or bending when the valve is opened and closed. It is freely displaced in the coil spring metal pipe, and is not worn or broken.
【０００６】[0006]
【実施例】本発明によるＣＶＤ装置の真空排気弁の一実
施例を図によって説明すると、図１に示すように一側に
ガス流入口１を有し、下側にガス流出口２を有する弁箱
３内で、上側にアクチュエータ、本例の場合エアーシリ
ンダー４により開閉動作する弁体５の作動連結部をベロ
ーズ６でシールし、弁座７に当接する弁体５のシートガ
スケット８にフッ素ゴムを用いた真空排気弁に於いて、
前記ベローズ６の内部にて前記エアーシリンダー４のピ
ストンロッド９及びこれに連結されて前記弁体５の上面
中央のホルダー１０に連結された押し棒１１をスライド
させる弁箱３の上板１２の中央より垂設された筒状体１
３の外周側に、弾性伸縮可能なシースヒータ１４を配し
ている。この弾性伸縮可能なシースヒータ１４は、弾性
伸縮可能に金属パイプをコイルスプリング状に成形し、
その内部にヒータ線を通したものであり、その下端は渦
巻状に内方に巻いて弁体５の上面のホルダー１０上に環
状板１５にて押え、ボルト１６にて締付け固定し、上端
は弁箱３内の天井面で固定の上、弁箱３外のリード線１
７に接続されている。尚、他の実施例として、前記シー
スヒータ１４の内周側に、図３に示すように同一レベ
ル、同一コイル数でシース熱電対１８が同心に配され、
その下端が弁体５の上側に固定され、上端が弁箱３内の
天井面で固定の上、弁箱３外のリード線１９に接続され
ているものもある。DETAILED DESCRIPTION OF THE PREFERRED EMBODIMENTS An example of a vacuum exhaust valve of a CVD apparatus according to the present invention will be described with reference to the drawing. As shown in FIG. 1, a valve having a gas inlet 1 on one side and a gas outlet 2 on the lower side. Inside the box 3, an actuator is provided on the upper side, and in the case of this example, the operation connecting portion of the valve body 5 that is opened and closed by the air cylinder 4 is sealed with a bellows 6, and the seat gasket 8 of the valve body 5 that abuts the valve seat 7 is made of fluororubber. In the vacuum exhaust valve using
Inside the bellows 6, the piston rod 9 of the air cylinder 4 and a push rod 11 connected to the piston rod 9 connected to the holder 10 at the center of the upper surface of the valve body 5 are slid. The cylindrical body 1 hung vertically
An elastically expandable / contractible sheath heater 14 is disposed on the outer peripheral side of 3. The elastically expandable / contractible sheath heater 14 is made by elastically expanding / contracting a metal pipe into a coil spring shape.
A heater wire is passed through the inside thereof, and the lower end thereof is wound inward in a spiral shape and pressed on the holder 10 on the upper surface of the valve body 5 by the annular plate 15 and fixed by tightening with the bolt 16, and the upper end is After fixing on the ceiling surface inside the valve box 3, lead wire 1 outside the valve box 3
Connected to 7. As another embodiment, the sheath thermocouples 18 are concentrically arranged on the inner peripheral side of the sheath heater 14 at the same level and the same number of coils as shown in FIG.
In some cases, the lower end is fixed to the upper side of the valve body 5, the upper end is fixed to the ceiling surface inside the valve box 3, and then connected to the lead wire 19 outside the valve box 3.
【０００７】上記のように構成された実施例の図１に示
す真空排気弁は、エアーシリンダー４の上室にエアーを
供給して作動すると、ピストンロッド９に連結された押
し棒１１が押され、弁体５がベローズ６を伸長して下降
し、図２に示すように弁座７に弁体５の下面のシートガ
スケット８が押し付けられてシールされ、弁閉状態とな
る。エアーシリンダー４の上室のエアーを抜き、下室に
エアーを供給して逆に作動すると、ピストンロッド９に
連結された押し棒１１が引き上げられ、弁体５がベロー
ズ６を短縮して上昇し、図１に示すように弁座７から弁
体５のシートガスケット８が離れて弁開状態となる。こ
のような弁閉及び弁開状態でも、図１の実施例の真空排
気弁は、ベローズ６の内部にて弁体５の上面のホルダー
１０に下端が固定され、上端が弁箱３内の天井面に固定
されて弁体５と一体に上下動する弾性伸縮可能なシース
ヒータ１４が設けられているので、ベローズ６は全長に
わたってシースヒータ１４からの輻射熱により平均的に
安定して１８０〜２００℃に連続的に加熱され、弁体５
はシースヒータ１４の下端部からホルダー１０を介して
熱伝導を受けて加熱される。特に図３の実施例の真空排
気弁にあっては、シースヒータ１４による加熱は、シー
ス熱電対１８により予め設定された１４０℃〜１６０℃
の範囲の加熱温度で加熱され、安定した温度制御がなさ
れる。かくして、図３の真空排気弁では、ベローズ６や
弁体５に生成物が付着しにくくなり、従って、弁内の洗
浄の頻度が激減し、ベローズ６の寿命が延び、弁の耐久
性が向上する。The vacuum exhaust valve shown in FIG. 1 of the embodiment configured as described above is operated by supplying air to the upper chamber of the air cylinder 4, and the push rod 11 connected to the piston rod 9 is pushed. The valve body 5 extends down the bellows 6 and descends, and as shown in FIG. 2, the seat gasket 8 on the lower surface of the valve body 5 is pressed against the valve seat 7 to be sealed, and the valve is closed. When air in the upper chamber of the air cylinder 4 is evacuated and air is supplied to the lower chamber to operate in reverse, the push rod 11 connected to the piston rod 9 is pulled up, and the valve body 5 shortens the bellows 6 and rises. As shown in FIG. 1, the seat gasket 8 of the valve body 5 separates from the valve seat 7 and the valve is opened. Even in such a valve closed and valve open state, the vacuum exhaust valve of the embodiment of FIG. 1 has the lower end fixed to the holder 10 on the upper surface of the valve body 5 inside the bellows 6, and the upper end the ceiling inside the valve box 3. Since the elastically expandable sheath heater 14 fixed to the surface and moving up and down integrally with the valve body 5 is provided, the bellows 6 is continuously stable at 180 to 200 ° C. over the entire length due to the radiant heat from the sheath heater 14. The valve body 5
Is heated by receiving heat conduction from the lower end of the sheath heater 14 through the holder 10. Particularly in the vacuum exhaust valve of the embodiment of FIG. 3, the heating by the sheath heater 14 is performed at 140 ° C. to 160 ° C. preset by the sheath thermocouple 18.
It is heated at a heating temperature in the range of, and stable temperature control is performed. Thus, in the vacuum exhaust valve of FIG. 3, the product is less likely to adhere to the bellows 6 and the valve body 5, so that the frequency of cleaning inside the valve is drastically reduced, the life of the bellows 6 is extended, and the durability of the valve is improved. To do.
【０００８】また、シースヒータ１４は、弾性伸縮可能
に金属パイプをコイルスプリング状に成形し、その内部
にヒータ線を通したものであるから、弁の開閉動作時ヒ
ータ線は引張りや曲げ等の外力を受けずにコイルスプリ
ング状の金属パイプ内で自由に変位し、摩滅や断線等が
生じることがない。尚、上記図３の実施例はシースヒー
タ１４を弁箱３内から温度制御するものであるが、弁箱
３外から温度制御する為に、図４に示すように弁箱３外
に温度調整器２０を設け、この温度調整器２０にシース
ヒータ１４のリード線１７及びシース熱電対１８のリー
ド線１９を接続すると良い。また弁内を内部からシース
ヒータ１４により加熱するばかりではなく、図５に示す
ように弁箱３の外面にラバーヒータ２１を取付けて、弁
の外部からも加熱するようにしても良い。この場合、ラ
バーヒータ２１の温度制御は、図示のようにシースヒー
タ１４の場合と同様弁外の温度調整器２０により行う為
に、それらのラバーヒータ２１のリード線２２、ラバー
ヒータ用シース熱電対のリード線２３を、温度調整器２
０に接続すると良い。Further, since the sheath heater 14 is formed by forming a metal pipe into a coil spring shape so as to be elastically expandable and contractable, and passing a heater wire through the inside thereof, the heater wire is pulled by an external force such as pulling or bending when the valve is opened and closed. It is freely displaced within the coil spring-shaped metal pipe without being subjected to abrasion, and is not worn or broken. In the embodiment shown in FIG. 3, the temperature of the sheath heater 14 is controlled from the inside of the valve box 3. However, in order to control the temperature from the outside of the valve box 3, as shown in FIG. 20 is provided, and the lead wire 17 of the sheath heater 14 and the lead wire 19 of the sheath thermocouple 18 may be connected to the temperature controller 20. Further, not only the inside of the valve is heated by the sheath heater 14 but also the rubber heater 21 may be attached to the outer surface of the valve box 3 as shown in FIG. In this case, since the temperature control of the rubber heater 21 is performed by the temperature controller 20 outside the valve as in the case of the sheath heater 14 as shown in the figure, the lead wire 22 of the rubber heater 21 and the sheath thermocouple for the rubber heater 21 are controlled. Connect the lead wire 23 to the temperature controller 2
Connect to 0.
【０００９】[0009]
【発明の効果】以上の通り本発明の真空排気弁は、アク
チュエータにより開閉動作する弁体の作動連結部をシー
ルしたベローズの内部に、弁体と一体に作動可能にシー
スヒータを設けているので、弁開及び弁閉状態でも弁体
やベローズを平均的に安定して加熱することができ、特
にシースヒータの内側にシース熱電対を配したものにあ
ってはシース熱電対により所要の温度に安定した温度制
御ができる。従って、弁体やベローズに生成物が付着し
にくくなり、その結果、弁内の洗浄の頻度が激減し、ベ
ローズの寿命が延び、弁の耐久性が向上する。As described above, in the vacuum exhaust valve of the present invention, the sheath heater is provided inside the bellows which seals the operation connecting portion of the valve body which is opened and closed by the actuator so as to be integrally operable with the valve body. Even when the valve is open and closed, the valve body and bellows can be heated stably on average. Especially, in the case where the sheath thermocouple is arranged inside the sheath heater, the sheath thermocouple stabilizes the temperature to the required temperature. The temperature can be controlled. Therefore, the product is unlikely to adhere to the valve body or the bellows, and as a result, the frequency of cleaning the inside of the valve is drastically reduced, the life of the bellows is extended, and the durability of the valve is improved.
【図１】本発明の真空排気弁の一実施例を示す弁開状態
の縦断面図である。FIG. 1 is a vertical cross-sectional view of an embodiment of a vacuum exhaust valve of the present invention in a valve open state.
【図２】図１の真空排気弁の弁閉状態を示す縦断面図で
ある。FIG. 2 is a vertical cross-sectional view showing a closed state of the vacuum exhaust valve of FIG.
【図３】本発明の真空排気弁の他の実施例を示す弁閉状
態の縦断面図である。FIG. 3 is a vertical cross-sectional view showing another embodiment of the vacuum exhaust valve of the present invention in a valve closed state.
【図４】本発明の真空排気弁を弁外から温度制御する場
合の実施例の概略図である。FIG. 4 is a schematic view of an embodiment in which the temperature of the vacuum exhaust valve of the present invention is controlled from outside the valve.
【図５】本発明の真空排気弁を弁内と弁外から加熱し、
弁外から温度制御する場合の実施例を示す概略図であ
る。FIG. 5: The vacuum exhaust valve of the present invention is heated from inside and outside the valve,
It is a schematic diagram showing an example in the case of controlling the temperature from outside the valve.
【図６】従来の真空排気弁を示す一部破断正面図であ
る。FIG. 6 is a partially cutaway front view showing a conventional vacuum exhaust valve.
１ ガス流入口 ２ ガス流出口 ３ 弁箱 ４ アクチュエータ ５ 弁体 ６ ベローズ ９ ピストンロッド（弁体の作動連結部） １０ ホルダー １１ 押し棒（弁体の作動連結部） １４ シースヒータ １７ リード線 １８ シース熱電対 １９ リード線 ２０ 温度調整器 ２１ ラバーヒータ ２２ ラバーヒータのリード線 ２３ ラバーヒータ用シース熱電対のリード線 1 Gas Inlet 2 Gas Outlet 3 Valve Box 4 Actuator 5 Valve Body 6 Bellows 9 Piston Rod (Valve Operating Connection) 10 Holder 11 Push Rod (Valve Operating Connection) 14 Sheath Heater 17 Lead Wire 18 Sheath Thermoelectric Pair 19 Lead wire 20 Temperature controller 21 Rubber heater 22 Rubber heater lead wire 23 Rubber heater sheath Thermocouple lead wire
Claims (4)
し、下側にガス流出口又はガス流入口を有する弁箱内
で、上側のアクチュエータにより開閉動作する弁体の作
動連結部をベローズでシールしたＣＶＤ装置の真空排気
弁に於いて、前記ベローズ内で弁体の作動連結部の外周
側に弾性伸縮可能なコイル状のシースヒータを配し、そ
の下端を弁体の上側に固定し、上端を弁箱内天井面で固
定の上、弁箱外のリード線に接続してなるＣＶＤ装置の
真空排気弁。1. A valve body having a gas inlet or a gas outlet on one side and a gas outlet or a gas inlet on the lower side, and an operating connecting portion of a valve body which is opened and closed by an upper actuator. In a vacuum exhaust valve of a CVD device sealed with a bellows, an elastically expandable / contractible coil-shaped sheath heater is arranged on the outer peripheral side of the operation connecting portion of the valve body in the bellows, and its lower end is fixed to the upper side of the valve body. A vacuum exhaust valve for a CVD device, which has its upper end fixed to the ceiling surface inside the valve box and connected to a lead wire outside the valve box.
に於いて、シースヒータを温度制御するシース熱電対
を、シースヒータの内周側に同一レベル同一コイル数で
同心に配し、その下端を弁体の上側に固定し、上端を弁
箱内天井面で固定の上、弁箱外のリード線に接続してな
るＣＶＤ装置の真空排気弁。2. The vacuum exhaust valve of the CVD apparatus according to claim 1, wherein a sheath thermocouple for controlling the temperature of the sheath heater is concentrically arranged on the inner circumferential side of the sheath heater with the same number of coils and the same number of coils. A vacuum exhaust valve for a CVD device, which is fixed to the upper side of the valve body, the upper end is fixed to the ceiling surface inside the valve box, and is connected to the lead wire outside the valve box.
に於いて、弁箱外に於けるシースヒータのリード線及び
シース熱電対のリード線を弁箱外に設置した温度調整器
に接続してなるＣＶＤ装置の真空排気弁。3. The vacuum exhaust valve of the CVD apparatus according to claim 2, wherein the sheath heater lead wire and the sheath thermocouple lead wire outside the valve box are connected to a temperature controller installed outside the valve box. Vacuum exhaust valve for CVD equipment.
に於いて、弁箱外面にラバーヒータを取付け、ラバーヒ
ータのリード線及びシース熱電対のリード線を温度調整
器に接続してなるＣＶＤ装置の真空排気弁。4. The vacuum exhaust valve for a CVD apparatus according to claim 3, wherein a rubber heater is attached to the outer surface of the valve box, and the lead wire of the rubber heater and the lead wire of the sheath thermocouple are connected to a temperature controller. Vacuum exhaust valve for CVD equipment.
Priority Applications (2)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP6165945A JP2995450B2 (en) | 1994-06-24 | 1994-06-24 | Vacuum exhaust valve for CVD equipment |
| TW84113389A TW319815B (en) | 1994-06-24 | 1995-12-15 |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP6165945A JP2995450B2 (en) | 1994-06-24 | 1994-06-24 | Vacuum exhaust valve for CVD equipment |
Publications (2)
| Publication Number | Publication Date |
|---|---|
| JPH0813149A true JPH0813149A (en) | 1996-01-16 |
| JP2995450B2 JP2995450B2 (en) | 1999-12-27 |
Family
ID=15822010
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP6165945A Expired - Lifetime JP2995450B2 (en) | 1994-06-24 | 1994-06-24 | Vacuum exhaust valve for CVD equipment |
Country Status (2)
| Country | Link |
|---|---|
| JP (1) | JP2995450B2 (en) |
| TW (1) | TW319815B (en) |
Cited By (8)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| WO1999034192A1 (en) * | 1997-12-25 | 1999-07-08 | Nippon Sanso Corporation | Measuring cell for spectral analysis |
| KR20010007092A (en) * | 1999-06-17 | 2001-01-26 | 가부시키가이샤 벤칸 | Flow control valve |
| KR100445341B1 (en) * | 2001-11-16 | 2004-08-25 | 주성엔지니어링(주) | Apparatus for fabricating a semiconductor device |
| JP2008175265A (en) * | 2007-01-17 | 2008-07-31 | Smc Corp | High vacuum valve |
| WO2012128029A1 (en) * | 2011-03-18 | 2012-09-27 | 東京エレクトロン株式会社 | Gate valve unit, substrate processing device and substrate processing method thereof |
| KR20190041901A (en) * | 2017-10-13 | 2019-04-23 | 캐논 톡키 가부시키가이샤 | Vacuum apparatus, deposition apparatus, and gate valve |
| JP2020148365A (en) * | 2019-03-12 | 2020-09-17 | リンナイ株式会社 | Gas solenoid valve |
| CN112779717A (en) * | 2019-11-07 | 2021-05-11 | 青岛海尔滚筒洗衣机有限公司 | Clothes lifting device for washing machine and roller washing machine |
Families Citing this family (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JP7313169B2 (en) | 2019-03-19 | 2023-07-24 | 株式会社キッツエスシーティー | vacuum bellows hot valve |
-
1994
- 1994-06-24 JP JP6165945A patent/JP2995450B2/en not_active Expired - Lifetime
-
1995
- 1995-12-15 TW TW84113389A patent/TW319815B/zh active
Cited By (12)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| WO1999034192A1 (en) * | 1997-12-25 | 1999-07-08 | Nippon Sanso Corporation | Measuring cell for spectral analysis |
| KR20010007092A (en) * | 1999-06-17 | 2001-01-26 | 가부시키가이샤 벤칸 | Flow control valve |
| KR100445341B1 (en) * | 2001-11-16 | 2004-08-25 | 주성엔지니어링(주) | Apparatus for fabricating a semiconductor device |
| JP2008175265A (en) * | 2007-01-17 | 2008-07-31 | Smc Corp | High vacuum valve |
| WO2012128029A1 (en) * | 2011-03-18 | 2012-09-27 | 東京エレクトロン株式会社 | Gate valve unit, substrate processing device and substrate processing method thereof |
| JP2012197476A (en) * | 2011-03-18 | 2012-10-18 | Tokyo Electron Ltd | Gate valve device, device for processing substrate, and method for processing the substrate |
| KR20140021566A (en) * | 2011-03-18 | 2014-02-20 | 도쿄엘렉트론가부시키가이샤 | Gate valve unit,substrate processing device and substrate processing method thereof |
| US9121515B2 (en) | 2011-03-18 | 2015-09-01 | Tokyo Electron Limited | Gate valve unit, substrate processing device and substrate processing method thereof |
| KR20190041901A (en) * | 2017-10-13 | 2019-04-23 | 캐논 톡키 가부시키가이샤 | Vacuum apparatus, deposition apparatus, and gate valve |
| JP2019073753A (en) * | 2017-10-13 | 2019-05-16 | キヤノントッキ株式会社 | Vacuum device device, vapour deposition device and gate valve |
| JP2020148365A (en) * | 2019-03-12 | 2020-09-17 | リンナイ株式会社 | Gas solenoid valve |
| CN112779717A (en) * | 2019-11-07 | 2021-05-11 | 青岛海尔滚筒洗衣机有限公司 | Clothes lifting device for washing machine and roller washing machine |
Also Published As
| Publication number | Publication date |
|---|---|
| JP2995450B2 (en) | 1999-12-27 |
| TW319815B (en) | 1997-11-11 |
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