JPH08117711A - Cleaning device - Google Patents
Cleaning deviceInfo
- Publication number
- JPH08117711A JPH08117711A JP28269594A JP28269594A JPH08117711A JP H08117711 A JPH08117711 A JP H08117711A JP 28269594 A JP28269594 A JP 28269594A JP 28269594 A JP28269594 A JP 28269594A JP H08117711 A JPH08117711 A JP H08117711A
- Authority
- JP
- Japan
- Prior art keywords
- water
- discharge port
- ultrasonic
- inlet pipe
- frequency
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Pending
Links
Landscapes
- Cleaning By Liquid Or Steam (AREA)
Abstract
Description
【０００１】[0001]
【産業上の利用分野】この発明は、被洗浄物に流水を当
てて洗浄するタイプの洗浄装置であって、前記流水に超
音波振動を与えて洗浄効果を増進させたものに関する。BACKGROUND OF THE INVENTION 1. Field of the Invention The present invention relates to a cleaning device of the type in which running water is applied to the object to be cleaned, and the cleaning effect is enhanced by applying ultrasonic vibration to the running water.
【０００２】[0002]
【従来の技術】従来より、この種の超音波振動を利用し
た流水式の洗浄装置は、例えば特開昭５６−６０６７７
号公報にも見られるように公知である。こうした従来の
装置を図１を用いて説明する。１はノズル管、２は超音
波振動子である。超音波振動子２は、超音波をできるだ
け損失なく被洗浄物へ伝えるため、ノズル管１の吐出口
３と正対する位置に設けられ、吐出水流の運動方向と略
平行に超音波を照射する。このためノズル管１は水流を
超音波振動子２の側方より導き振動子２の前方で転向さ
せるような流路を形成しており、振動子２はこの水流が
転向する位置で超音波を与えるよう構成されていた。2. Description of the Related Art Conventionally, a flowing water type cleaning device utilizing ultrasonic vibration of this type is disclosed in, for example, Japanese Patent Laid-Open No. 56-60677.
It is known as can be seen in the publication. Such a conventional device will be described with reference to FIG. Reference numeral 1 is a nozzle tube, and 2 is an ultrasonic transducer. The ultrasonic transducer 2 is provided at a position directly facing the discharge port 3 of the nozzle tube 1 in order to transmit the ultrasonic wave to the object to be cleaned with as little loss as possible, and irradiates the ultrasonic wave substantially parallel to the movement direction of the discharged water flow. For this reason, the nozzle tube 1 forms a flow path that guides the water flow from the side of the ultrasonic transducer 2 and diverts it in front of the ultrasonic transducer 2, and the transducer 2 sends ultrasonic waves at the position where this water stream diverts. Was configured to give.
【０００３】[0003]
【発明が解決しようとする課題】しかし、このような従
来の構成では、流路がＬ字形に転向されるため、図１の
Ｃ部にキャビテーションもしくは乱流を生じて蛇行した
水流となり、流水の方向と超音波の照射方向とが必ずし
も一致せず効率の良い洗浄が得られないばかりか、超音
波が蛇行流に乗って管路壁で反射・減衰を繰返し、エネ
ルギー損失が著しいという欠点があった。なお、水流と
超音波の方向性を揃えるには、振動子２から吐出口３ま
でのノズル管１の長さを十分確保すれば解消可能である
が、その分ノズル管１の寸法が大きくなり使用上の制約
を受ける不都合があった。However, in such a conventional structure, since the flow path is turned into an L-shape, a cavitation or a turbulent flow is generated in the C portion of FIG. In addition to the fact that the direction of irradiation and the direction of irradiation of ultrasonic waves do not always match, efficient cleaning cannot be obtained, and ultrasonic waves ride on a meandering flow and are repeatedly reflected and attenuated by the pipe wall, which causes a significant energy loss. It was In order to make the directions of the water flow and the ultrasonic wave uniform, this can be solved by securing a sufficient length of the nozzle tube 1 from the vibrator 2 to the discharge port 3, but the size of the nozzle tube 1 increases accordingly. There was an inconvenience due to restrictions on use.
【０００４】また、この種の洗浄装置において、洗浄力
を向上させるには超音波振動子の出力を上げる必要があ
るが、現在知られている振動子では物性の限界や変換効
率の低下により１個の振動子で得られる出力には限界が
ある。このため、例えば特開昭６２−６５７８４号公報
に見られるように、複数の振動子を使用して超音波出力
を上げる試みが知られている。しかし、水流と複数の超
音波照射の方向を揃えることが容易ではなく、十分な効
果が得られていなかった。また、超音波振動子は、同じ
材質・サイズの振動子であっても、微妙な固体差により
大きな振幅で良好に共振できる固有の振動数（以下これ
を固有振動数という）が異なり、例えば、市販の１.５
ＭＨz相当の振動子では固有振動数が１.５〜１.７ＭＨz
程度の範囲でバラツキがあることが知られている。振動
子はその固有振動数で振動させれば最も高い出力が得ら
れるが、それぞれ異なる固有振動数の音波を合成させる
と互いに打ち消しあうことになり、複数の振動子を使っ
ても必ずしも希望するような高い出力が得られない問題
もあった。In addition, in this type of cleaning apparatus, it is necessary to increase the output of the ultrasonic vibrator in order to improve the cleaning power. However, in the currently known vibrators, the physical properties are limited and the conversion efficiency is lowered. There is a limit to the output that can be obtained with each oscillator. Therefore, for example, as disclosed in Japanese Patent Laid-Open No. 62-65784, an attempt to increase ultrasonic output by using a plurality of transducers is known. However, it was not easy to align the direction of water flow with the direction of multiple ultrasonic waves, and a sufficient effect was not obtained. In addition, even if the ultrasonic transducers are of the same material and size, they have different natural frequencies (hereinafter referred to as “natural frequencies”) that can resonate well with large amplitude due to subtle differences in solids. 1.5 on the market
In the oscillator corresponding to MHz, the natural frequency is 1.5 to 1.7 MHz
It is known that there are variations within a certain range. The highest output can be obtained by vibrating the oscillators at their natural frequencies, but they will cancel each other out by combining sound waves of different natural frequencies. There was also a problem that high output could not be obtained.
【０００５】[0005]
【課題を解決するための手段】この発明は、被洗浄物に
流水を当てて洗浄するタイプの洗浄装置であって、前記
流水に超音波振動を与えるようにしたものにおいて、水
源と接続する入水管と、該入水管と連通し先端の吐出口
に向けて先細となる形状をもつノズルチャンバーとを備
え、前記入水管と吐出口とは略同心に設けられると共
に、前記ノズルチャンバーには、入水管を挾むように位
置して複数の超音波振動子を吐出口に向けて臨ませたこ
とを特徴として、複数の超音波振動子を使用して流水に
効率良く超音波を乗せエネルギー損失も少ない超音波洗
浄を達成したものである。SUMMARY OF THE INVENTION The present invention relates to a cleaning device of the type in which running water is applied to an object to be cleaned, which is designed to apply ultrasonic vibration to the running water, and which is connected to a water source. A water pipe and a nozzle chamber communicating with the water pipe and having a shape that tapers toward the discharge port at the tip are provided, and the water pipe and the discharge port are provided substantially concentrically, and the nozzle chamber is The feature is that multiple ultrasonic transducers are positioned so as to sandwich the water pipe so as to face the discharge port.Using multiple ultrasonic transducers, ultrasonic waves can be efficiently applied to running water and there is little energy loss. Sonic cleaning has been achieved.
【０００６】また、被洗浄物に流水を当てて洗浄するタ
イプの洗浄装置であって、前記流水に超音波振動を与え
るようにしたものにおいて、水源からの流水を導入し吐
出口より放出させるノズルチャンバーに複数の超音波振
動子を臨ませ、前記複数の超音波振動子は、いずれも同
位相・同周波数で駆動され、それぞれの固有振動数を含
む範囲の周波数帯で周波数が可変されることを特徴とし
て、複数の超音波振動子を効率良く駆動して効果的な洗
浄と装置の耐久性の向上を可能にしたものである。Further, a cleaning device of the type in which running water is applied to the object to be cleaned, in which ultrasonic vibration is applied to the running water, a nozzle for introducing running water from a water source and discharging it from a discharge port A plurality of ultrasonic transducers are exposed to the chamber, and the plurality of ultrasonic transducers are driven with the same phase and the same frequency, and the frequency is variable in the frequency band including the natural frequency of each. Is characterized by efficiently driving a plurality of ultrasonic transducers and enabling effective cleaning and improvement in durability of the apparatus.
【０００７】[0007]
【作用】これにより、入水管と吐出口とが略同心に設け
られノズルチャンバー内にあって流水は入水管から吐出
口へ直線的に移動することができる。また、超音波振動
子は入水管を挾むように位置して吐出口に向けられるか
ら、チャンバー内の流水方向に対して小さな傾きで超音
波を照射でき、流水に沿って超音波を乗せることができ
る。As a result, the water inlet pipe and the discharge port are provided substantially concentrically, and the running water can be linearly moved from the water inlet pipe to the discharge port in the nozzle chamber. Also, since the ultrasonic transducer is positioned so as to sandwich the water inlet pipe and is directed to the discharge port, ultrasonic waves can be emitted with a small inclination with respect to the direction of flowing water in the chamber, and ultrasonic waves can be placed along the flowing water. .
【０００８】また、複数の超音波振動子を同位相・同周
波数で駆動するようにすれば、超音波が互いに打ち消し
あうことがなく、効率良く振幅を増幅させることができ
て、より高い出力の合成超音波が得られ、また駆動回路
も共通１個の回路で良い。このとき、複数の超音波振動
子をそれぞれの固有振動数を含む範囲の周波数帯で周波
数が可変するように駆動すれば、振動子は交互に自分の
固有振動数で振動することになり、複数の振動子を偏り
なく振動させてそれぞれの寿命を平準化できる。Further, if a plurality of ultrasonic transducers are driven with the same phase and the same frequency, the ultrasonic waves do not cancel each other out, the amplitude can be amplified efficiently, and a higher output is obtained. A synthetic ultrasonic wave can be obtained, and a common drive circuit is sufficient. At this time, if a plurality of ultrasonic transducers are driven so that the frequency varies in the frequency band in the range including the respective natural frequencies, the transducers will alternately vibrate at their own natural frequencies. It is possible to level the life of each by vibrating the vibrator of B evenly.
【０００９】[0009]
【実施例】以下、その実施例について図面を基に説明す
る。図２は本発明の一実施例の断面説明図、図３は同実
施例の平面説明図である。洗浄装置１１は、入水管１２
と複数（本例では４個）の超音波振動子１３1〜１３4を
備えたベース体１４と、先端を吐出口１５としたノズル
体１６とを接合させてなり、内部に先端の吐出口に向け
て先細となる形状をもつノズルチャンバー１７形成す
る。Embodiments of the present invention will be described below with reference to the drawings. 2 is a cross-sectional explanatory view of an embodiment of the present invention, and FIG. 3 is a plan explanatory view of the same embodiment. The cleaning device 11 includes an inlet pipe 12
And a base body 14 provided with a plurality (four in this example) of ultrasonic transducers 13 1 to 13 4 and a nozzle body 16 having a tip as a discharge port 15 are joined to each other. A nozzle chamber 17 having a tapered shape is formed.
【００１０】ベース体１５において、入水管１２は、吐
出口１５と同心となるよう超音波振動子１３1〜１３4を
取り付けたベース１８の中央に設けられ、所定の長さを
有して水源からの洗浄水を直線的にノズルチャンバー１
７内へ導入するようにしている。前記ベース１８に対し
て４個の超音波振動子１３1〜１３4が、入水管１２を挾
み入水管１２との同心円上で略等間隔となるように配置
され、振動子１３1〜１３4はいずれも吐出口に向け吐出
口における流水の流心線Ｒと相互に略等しい角度で交わ
る方向へ超音波を照射できるよう傾けられている。In the base body 15, the water inlet pipe 12 is provided at the center of a base 18 to which the ultrasonic transducers 13 1 to 13 4 are attached so as to be concentric with the discharge port 15, and has a predetermined length. Nozzle chamber 1
I am trying to introduce it into 7. The base 18 four ultrasonic transducers 131-134 respect are arranged so as to be substantially equal intervals on a concentric circle with the water inlet tube 12 sandwiched a water inlet pipe 12, the vibrator 131-134 All 4 are inclined toward the discharge port so that ultrasonic waves can be emitted in a direction intersecting the flow line R of the flowing water at the discharge port at substantially the same angle.
【００１１】ノズル体１６は、プラスチック製で先細の
漏斗状に構成され、フランジ２０においてベース体１５
と接合固定される。先端の吐出口１５には金属製のパイ
プ２１が取り付けられている。ノズル体１６はプラスチ
ックの成形品であるが、プラスチックは超音波を吸収す
ると発熱して変形する恐れがあるため、超音波が集中す
る吐出口１５部を超音波を良く反射し熱にも強い金属で
カバーしたものである。なお、２２は水源２３からの洗
浄水を洗浄装置１１へ送る弁装置（電磁弁）である。The nozzle body 16 is made of plastic and has a tapered funnel shape.
It is fixed by joining with. A metal pipe 21 is attached to the discharge port 15 at the tip. The nozzle body 16 is a plastic molded product, but the plastic may generate heat and deform when it absorbs ultrasonic waves. Therefore, the discharge port 15 where the ultrasonic waves are concentrated reflects the ultrasonic waves well and is strong against heat. It was covered by. Reference numeral 22 is a valve device (electromagnetic valve) that sends the cleaning water from the water source 23 to the cleaning device 11.
【００１２】図４は上記実施例の制御系を示すブロック
図である。２５は基準とする一定周波数ｆ0の信号を発
生する基準周波発生回路、２６は該発生回路２５からの
基準周波を分周して所定範囲の周波数帯ｆ1〜ｆnの駆動
信号を出力するスイープ回路、２７はスイープ回路２６
へ掃引タイミングを与えるマイクロコンピュータを含む
制御回路、２８はスイープ回路２６からの駆動信号を増
幅して超音波振動子１３1〜１３4へ与える増幅回路であ
る。FIG. 4 is a block diagram showing the control system of the above embodiment. Reference numeral 25 is a reference frequency generating circuit for generating a signal having a constant frequency f 0 as a reference, and 26 is a sweep for dividing the reference frequency from the generating circuit 25 and outputting drive signals in a frequency band f 1 to fn within a predetermined range. Circuit, 27 is a sweep circuit 26
A control circuit including a microcomputer that gives a sweep timing to the reference numeral 28 is an amplifier circuit that amplifies the drive signal from the sweep circuit 26 and gives it to the ultrasonic transducers 13 1 to 13 4 .
【００１３】超音波振動子１３1〜１３4は、それぞれ並
列に接続されて増幅回路２８からの出力を受け、同位相
・同周波数で駆動されることになる。なお、スイープ回
路２６で与える周波数帯ｆ1〜ｆnは、超音波振動子１３
1〜１３4それぞれの固有振動数を含む範囲で、なお且つ
できるだけ限定された狭い範囲で設定されることが好ま
しい。すなわち、周波数が変化するに伴い、いずれかの
超音波振動子が固有振動数に近い高出力の発振ができる
状態を継続させるものである。The ultrasonic transducers 13 1 to 13 4 are connected in parallel, receive the output from the amplifier circuit 28, and are driven at the same phase and the same frequency. It should be noted that the frequency bands f 1 to fn given by the sweep circuit 26 are in the ultrasonic transducer 13
It is preferable to set within a range including the natural frequencies of 1 to 13 4 and within a narrow range limited as much as possible. That is, as the frequency changes, one of the ultrasonic transducers is kept in a state capable of high-power oscillation close to the natural frequency.
【００１４】図５は実施例の動作を説明するフローチャ
ート図である。以下、この図を用いて実施例の動作を説
明する。制御回路２７へ開始入力があれば洗浄がスター
トされまず弁装置２２が開弁され(１)、設定時間ｔだけ
待機する(２)。ここで、入水管１２より洗浄水が導入さ
れると、洗浄水はノズルチャンバー１７内の空気を取り
込みながら吐出口１５より排出され、数秒後にはチャン
バー１７内が完全に洗浄水で満たされる。この状態に達
したところで超音波振動子１３1〜１３4が駆動され、超
音波出力が開始される(３)。これと同時にスイープ回路
２６には掃引信号が与えられ所定時間毎に所定の周波数
間隔で出力周波数が可変される。こうして洗浄が実行さ
れ、制御回路２７へ終了入力があれば(４)、超音波振動
子１３1〜１３4の駆動を停止した後(５)、弁装置２２を
閉じて洗浄を終了する。FIG. 5 is a flow chart for explaining the operation of the embodiment. Hereinafter, the operation of the embodiment will be described with reference to FIG. If there is a start input to the control circuit 27, cleaning is started and the valve device 22 is first opened (1) and waits for the set time t (2). Here, when the cleaning water is introduced from the water inlet pipe 12, the cleaning water is discharged from the discharge port 15 while taking in the air in the nozzle chamber 17, and the chamber 17 is completely filled with the cleaning water after a few seconds. When this state is reached, the ultrasonic transducers 13 1 to 13 4 are driven and ultrasonic output is started (3). At the same time, a sweep signal is given to the sweep circuit 26, and the output frequency is changed at a predetermined frequency interval every predetermined time. Thus, the cleaning is executed, and if there is an end input to the control circuit 27 (4), the driving of the ultrasonic transducers 13 1 to 13 4 is stopped (5) and then the valve device 22 is closed to complete the cleaning.
【００１５】このように、洗浄開始時にノズルチャンバ
ー１７内の空気が完全に排出されるのを待って超音波振
動子を駆動するようにし、振動子を空気に触れた状態で
駆動して異常発振を生じないようにし、装置の耐久性を
高めている。なお、設定時間ｔは、吐出する洗浄水の水
量に応じ適宜に設定することができる。また、振動子の
駆動周波数は常時可変され、複数の振動子が交互に固有
振動数で発振することとなり、特定の振動子のみを高出
力状態におくことがなく、一層の耐久性が得られる。As described above, the ultrasonic oscillator is driven after waiting for the air in the nozzle chamber 17 to be completely discharged at the start of cleaning, and the oscillator is driven in contact with the air to cause abnormal oscillation. To improve the durability of the device. The set time t can be set appropriately according to the amount of the wash water to be discharged. Further, the driving frequency of the vibrator is constantly variable, and a plurality of vibrators alternately oscillate at the natural frequency, so that only a specific vibrator is not put in a high output state and further durability can be obtained. .
【００１６】[0016]
【発明の効果】以上のように、この発明によれば、入水
管と吐出口とを同心としてノズルチャンバー内を直線的
に洗浄水を通過させ、ここへ超音波を乗せるので、出力
される超音波の多くは最短距離で被洗浄物に到達するこ
とができ、効果の高い洗浄が可能になる。また、超音波
振動子は入水管を挾むように位置して吐出口に向けられ
るから、チャンバー内の流水方向に対して小さな傾きで
超音波を照射でき、流水に沿って複数の超音波を乗せる
ことができ、効率良く高出力の超音波洗浄が得られる。As described above, according to the present invention, the washing water is linearly passed through the nozzle chamber with the water inlet pipe and the discharge port being concentric with each other, and the ultrasonic waves are applied to the washing water. Most of the sound waves can reach the object to be cleaned in the shortest distance, which enables highly effective cleaning. Also, since the ultrasonic transducer is positioned so as to sandwich the water inlet pipe and is directed to the discharge port, ultrasonic waves can be emitted with a small inclination with respect to the flowing water direction in the chamber, and multiple ultrasonic waves can be placed along the flowing water. Therefore, ultrasonic cleaning with high output can be efficiently obtained.
【００１７】また、複数の超音波振動子を同位相・同周
波数で駆動するようにすれば、超音波が互いに打ち消し
あうことがなく、効率良く振幅を増幅させることができ
て、より高い出力の合成超音波が得られ、また駆動回路
も共通１個の回路で良いなど、高い洗浄効果を安価で小
型の装置で実現できる。しかも、複数の超音波振動子を
それぞれの固有振動数を含む範囲の周波数帯で周波数が
可変するので、振動子は交互に自分の固有振動数で振動
することになり、複数の振動子を偏りなく振動させてそ
れぞれの寿命を平準化でき、この結果きわめて耐久性の
高い装置が得られる。Further, if a plurality of ultrasonic transducers are driven with the same phase and the same frequency, the ultrasonic waves do not cancel each other out, the amplitude can be amplified efficiently, and a higher output is obtained. A synthetic ultrasonic wave can be obtained, and a common drive circuit can be used as a single circuit, so that a high cleaning effect can be realized with a low-cost and small-sized device. Moreover, since the frequency of the ultrasonic transducers varies in the frequency band in the range including the natural frequencies of the ultrasonic transducers, the transducers vibrate alternately at their own natural frequencies. It can be vibrated without vibration and each life can be leveled, resulting in an extremely durable device.
【図１】従来例の説明図である。FIG. 1 is an explanatory diagram of a conventional example.
【図２】本発明の実施例の断面説明図である。FIG. 2 is a cross-sectional explanatory view of the embodiment of the present invention.
【図３】実施例の平面説明図である。FIG. 3 is an explanatory plan view of the embodiment.
【図４】実施例の制御系を示すブロック図である。FIG. 4 is a block diagram showing a control system of the embodiment.
【図５】実施例の動作を示すフローチャート図である。FIG. 5 is a flowchart showing the operation of the embodiment.
１１ 洗浄装置 １２ 入水管 １３1〜１３4 超音波振動子 １５ 吐出口 １７ ノズルチャンバー11 Cleaning Device 12 Water Inlet 13 1 to 13 4 Ultrasonic Transducer 15 Discharge Port 17 Nozzle Chamber
Claims (3)
の洗浄装置であって、前記流水に超音波振動を与えるよ
うにしたものにおいて、水源と接続する入水管と、該入
水管と連通し先端の吐出口に向けて先細となる形状をも
つノズルチャンバーとを備え、前記入水管と吐出口とは
略同心に設けられると共に、前記ノズルチャンバーに
は、入水管を挾むように位置して複数の超音波振動子を
吐出口に向けて臨ませたことを特徴とする洗浄装置。1. A cleaning device of a type in which running water is applied to an object to be cleaned, wherein ultrasonic vibration is applied to the running water, a water inlet pipe connected to a water source, and a water inlet pipe communicating with the water inlet pipe. A nozzle chamber having a shape that tapers toward the discharge port at the tip, the water inlet pipe and the discharge port are provided substantially concentrically, and a plurality of water chambers are arranged in the nozzle chamber so as to sandwich the water inlet pipe. The cleaning device characterized in that the ultrasonic transducer of is faced to the discharge port.
の洗浄装置であって、前記流水に超音波振動を与えるよ
うにしたものにおいて、水源からの流水を導入し吐出口
より放出させるノズルチャンバーに複数の超音波振動子
を臨ませ、前記複数の超音波振動子は、いずれも同位相
・同周波数で駆動され、それぞれの固有振動数を含む範
囲の周波数帯で周波数が可変されることを特徴とする洗
浄装置。2. A cleaning device of the type in which running water is applied to the object to be cleaned, wherein ultrasonic vibration is applied to the running water, and a nozzle for introducing running water from a water source and discharging it from a discharge port. A plurality of ultrasonic transducers are exposed to the chamber, and the plurality of ultrasonic transducers are driven with the same phase and the same frequency, and the frequency is variable in the frequency band including the natural frequency of each. Cleaning device characterized by.
の洗浄装置であって、前記流水に超音波振動を与えるよ
うにしたものにおいて、水源と接続する入水管と、該入
水管と連通し先端の吐出口に向けて先細となる形状をも
つノズルチャンバーとを備え、前記入水管と吐出口とは
略同心に設けられると共に、前記ノズルチャンバーに
は、入水管を挾むように位置して複数の超音波振動子を
吐出口に向けて臨ませ、前記複数の超音波振動子は、い
ずれも同位相・同周波数で駆動され、それぞれの固有振
動数を含む範囲の周波数帯で周波数が可変されることを
特徴とする洗浄装置。3. A cleaning device of a type in which running water is applied to the object to be cleaned for washing, wherein the flowing water is subjected to ultrasonic vibration, and a water inlet pipe connected to a water source, and the water inlet pipe communicating with the water inlet pipe. And a nozzle chamber having a shape that tapers toward the discharge port at the tip, the water inlet pipe and the discharge port are provided substantially concentrically, and a plurality of water chambers are arranged in the nozzle chamber so as to sandwich the water inlet pipe. The ultrasonic transducers of are faced to the discharge port, and the plurality of ultrasonic transducers are driven at the same phase and the same frequency, and the frequency is changed in the frequency band including the natural frequency of each. A cleaning device characterized by the following.
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP28269594A JPH08117711A (en) | 1994-10-21 | 1994-10-21 | Cleaning device |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP28269594A JPH08117711A (en) | 1994-10-21 | 1994-10-21 | Cleaning device |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| JPH08117711A true JPH08117711A (en) | 1996-05-14 |
Family
ID=17655859
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP28269594A Pending JPH08117711A (en) | 1994-10-21 | 1994-10-21 | Cleaning device |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPH08117711A (en) |
Cited By (6)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JP2009055024A (en) * | 2007-08-24 | 2009-03-12 | Semes Co Ltd | Substrate cleaning apparatus and substrate cleaning method |
| JP2010110416A (en) * | 2008-11-05 | 2010-05-20 | Fujifilm Corp | Apparatus and method of driving ultrasonic vibrator in ultrasonic washing machine |
| CN103008279A (en) * | 2012-12-31 | 2013-04-03 | 上海远跃制药机械股份有限公司 | High-pressure ultrasonic water gun device for washing medical equipment |
| JP2017183553A (en) * | 2016-03-30 | 2017-10-05 | 株式会社荏原製作所 | Substrate cleaning device and substrate processing apparatus |
| JP2017195335A (en) * | 2016-04-22 | 2017-10-26 | 株式会社荏原製作所 | Substrate cleaning device |
| US11676827B2 (en) | 2016-03-08 | 2023-06-13 | Ebara Corporation | Substrate cleaning apparatus, substrate cleaning method, substrate processing apparatus, and substrate drying apparatus |
-
1994
- 1994-10-21 JP JP28269594A patent/JPH08117711A/en active Pending
Cited By (7)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JP2009055024A (en) * | 2007-08-24 | 2009-03-12 | Semes Co Ltd | Substrate cleaning apparatus and substrate cleaning method |
| US8015986B2 (en) | 2007-08-24 | 2011-09-13 | Semes Co., Ltd. | Apparatus for cleaning substrate and method for cleaning substrate |
| JP2010110416A (en) * | 2008-11-05 | 2010-05-20 | Fujifilm Corp | Apparatus and method of driving ultrasonic vibrator in ultrasonic washing machine |
| CN103008279A (en) * | 2012-12-31 | 2013-04-03 | 上海远跃制药机械股份有限公司 | High-pressure ultrasonic water gun device for washing medical equipment |
| US11676827B2 (en) | 2016-03-08 | 2023-06-13 | Ebara Corporation | Substrate cleaning apparatus, substrate cleaning method, substrate processing apparatus, and substrate drying apparatus |
| JP2017183553A (en) * | 2016-03-30 | 2017-10-05 | 株式会社荏原製作所 | Substrate cleaning device and substrate processing apparatus |
| JP2017195335A (en) * | 2016-04-22 | 2017-10-26 | 株式会社荏原製作所 | Substrate cleaning device |
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