JPH08110818A - Flow proportional control valve - Google Patents
Flow proportional control valveInfo
- Publication number
- JPH08110818A JPH08110818A JP27032294A JP27032294A JPH08110818A JP H08110818 A JPH08110818 A JP H08110818A JP 27032294 A JP27032294 A JP 27032294A JP 27032294 A JP27032294 A JP 27032294A JP H08110818 A JPH08110818 A JP H08110818A
- Authority
- JP
- Japan
- Prior art keywords
- pressure
- flow rate
- volatile liquid
- storage tank
- diaphragm
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Pending
Links
Landscapes
- Control Of Fluid Pressure (AREA)
- Loading And Unloading Of Fuel Tanks Or Ships (AREA)
- Filling Or Discharging Of Gas Storage Vessels (AREA)
- Flow Control (AREA)
Abstract
Description
【０００１】[0001]
【産業上の利用分野】本発明は、貯槽に供給する揮発性
液体の供給量と該貯槽内の揮発性液体から蒸発した蒸発
蒸気の吸引量とを、ほぼ等しくすることができる流量比
例制御弁に関するものである。BACKGROUND OF THE INVENTION 1. Field of the Invention The present invention relates to a flow rate proportional control valve capable of making the supply amount of a volatile liquid supplied to a storage tank and the suction amount of vaporized vapor evaporated from the volatile liquid in the storage tank substantially equal. It is about.
【０００２】[0002]
【従来の技術】ガソリン、アルコール、ベンジン等の揮
発性液体を、該液体の供給源からタンク等の貯槽に供給
する場合、揮発性液体の供給によって、貯槽内の揮発性
液体から蒸発した蒸発蒸気が外部に放出されると周囲環
境を汚損するので、貯槽への揮発性液体の供給と同時
に、真空ポンプによって貯槽内の蒸発蒸気を適宜の場所
に吸引する必要がある。この場合、揮発性液体の供給量
と蒸発蒸気の吸引量との差が大きいと貯槽内の圧力が変
動して、貯槽内の蒸発量や蒸気濃度が変動するので、好
ましくない。しかしながら、１個の弁によって、態様が
異なる液体の供給量と蒸発蒸気の吸引量とを制御するこ
とが困難なために、従来は、揮発性液体の供給量と蒸発
蒸気の吸引量を別個の弁によって個別に制御しているの
で、揮発性液体の供給量と蒸気の吸引量をほぼ等しくす
ることが困難である。2. Description of the Related Art When a volatile liquid such as gasoline, alcohol or benzine is supplied from a liquid supply source to a storage tank such as a tank, the vaporized vapor evaporated from the volatile liquid in the storage tank by the supply of the volatile liquid. When is discharged to the outside, the surrounding environment is polluted, so it is necessary to suck the vaporized vapor in the storage tank to an appropriate place by a vacuum pump at the same time as supplying the volatile liquid to the storage tank. In this case, if the difference between the supply amount of the volatile liquid and the suction amount of the evaporation vapor is large, the pressure in the storage tank changes, and the evaporation amount and the vapor concentration in the storage tank change, which is not preferable. However, since it is difficult to control the supply amount of the liquid and the suction amount of the vaporized vapor which are different from each other with one valve, conventionally, the supply amount of the volatile liquid and the suction amount of the vaporized vapor are separated from each other. Since they are individually controlled by the valve, it is difficult to make the supply amount of the volatile liquid and the suction amount of the vapor substantially equal.
【０００３】[0003]
【発明が解決しようとする課題】本発明が解決しようと
する課題は、揮発性液体の供給量とほぼ同量の蒸発蒸気
を吸引できる流量比例制御弁を提供することにある。SUMMARY OF THE INVENTION The problem to be solved by the present invention is to provide a flow rate proportional control valve capable of sucking vaporized vapor of substantially the same amount as the supply amount of volatile liquid.
【０００４】[0004]
【課題を解決するための手段】上記課題を解決するた
め、本発明の流量比例制御弁は、揮発性液体を貯槽に供
給するとともに、該貯槽において揮発性液体から蒸発し
た蒸発蒸気を、揮発性液体の供給量とほぼ同量吸引する
ための流量比例制御弁であって、上記流量比例制御弁
が、揮発性液体の供給源に連通する供給口と、上記貯槽
に連通する排出口と、上記貯槽に連通する蒸発蒸気の入
口と、真空源に連通する蒸発蒸気の出口と、上記供給口
と排出口の間を流れる揮発性液体の流量を定める該揮発
性液体の圧力をパイロット圧として、入口と出口の間の
蒸発蒸気の流量を定める該蒸発蒸気の圧力を制御するこ
とにより、貯槽から吸引する蒸発蒸気の流量を、揮発性
液体の貯槽への供給量とほぼ同量に制御する流量制御手
段とを備えていることを特徴としている。In order to solve the above problems, a flow rate proportional control valve of the present invention supplies a volatile liquid to a storage tank, and at the same time, evaporates vaporized vapor from the volatile liquid in the storage tank. A flow rate proportional control valve for sucking an amount substantially equal to the supply amount of liquid, wherein the flow rate proportional control valve includes a supply port communicating with a supply source of volatile liquid, a discharge port communicating with the storage tank, and The inlet of the vaporized vapor that communicates with the storage tank, the outlet of the vaporized vapor that communicates with the vacuum source, and the inlet of the volatile liquid that determines the flow rate of the volatile liquid that flows between the supply port and the exhaust port as the pilot pressure. Flow rate control that controls the flow rate of the vaporized vapor drawn from the storage tank by controlling the pressure of the vaporized vapor that determines the flow rate of the vaporized vapor between the outlet and the outlet so that the flow rate of the vaporized liquid is approximately the same as the supply amount of the volatile liquid to the storage tank. Having means It is characterized.
【０００５】また、同様の課題を解決するため、上記流
量比例制御弁における流量制御手段が、供給口と排出口
の間の第１オリフィスと、該第１オリフィスより上流側
の揮発性液体の圧力が作用する第１圧力室と、該第１圧
力室と大気圧が作用する第１呼吸室とを区画する第１ダ
イフフラムと；入口と出口の間の第２オリフィスと、該
第２オリフィスより下流側で真空圧が作用する第２圧力
室と、該第２圧力室と大気圧が作用する第２呼吸室とを
区画しかつ受圧面積が第１ダイヤフラムより大きい第２
ダイヤフラムと、上記第２オリフィスの下流側において
入口と出口間の流路中に設けた弁座と；上記第１ダイヤ
フラムと第２ダイヤフラムを一体に変位させるステム
と、該ステムに設けた上記弁座を開閉する弁体とを備え
ていることを特徴としている。In order to solve the same problem, the flow rate control means in the flow rate proportional control valve uses a first orifice between the supply port and the discharge port and the pressure of the volatile liquid upstream of the first orifice. A first pressure chamber that acts on the first pressure chamber, and a first diaphragm that separates the first pressure chamber and the first breathing chamber on which the atmospheric pressure acts; a second orifice between an inlet and an outlet, and a downstream of the second orifice. A second pressure chamber on the side of which a vacuum pressure acts and a second breathing chamber on which the second pressure chamber and the atmospheric pressure act and which has a pressure receiving area larger than the first diaphragm.
A diaphragm, a valve seat provided in the flow path between the inlet and the outlet on the downstream side of the second orifice; a stem for integrally displacing the first diaphragm and the second diaphragm, and the valve seat provided on the stem. And a valve body that opens and closes.
【０００６】さらに、同様の課題を解決するため、上記
流量制御手段における第２圧力室を第２オリフィスと弁
座間の流路に連通させ、該第２圧力室の圧力を、上記弁
座の開度によって制御された圧力としたことを特徴とし
ている。Further, in order to solve the same problem, the second pressure chamber in the flow rate control means is communicated with the flow path between the second orifice and the valve seat, and the pressure of the second pressure chamber is opened. The feature is that the pressure is controlled by the degree.
【０００７】[0007]
【作用】貯槽内に揮発性液体が貯留されているときは、
該貯槽内における蒸発蒸気の圧力はほぼ大気圧に等しく
なっている。流量比例制御弁によって貯槽に揮発性液体
を供給すると、該流量比例制御弁の流量制御手段が、供
給口と排出口の間を流れる揮発性液体の流量を定める該
揮発性液体の圧力をパイロット圧として入口と出口との
間に設けた弁の開度を調整して、入口と出口間を流れる
蒸発蒸気の流量を定める該蒸発蒸気の圧力を制御し、こ
れによって貯槽から吸引される蒸発蒸気の流量を制御す
るので、揮発性液体の流量に対する圧力の作用力と蒸発
蒸気の流量に対する圧力の作用力とをほぼ等しくするこ
とによって、貯槽から吸引される蒸発蒸気の流量を揮発
性液体の供給量とほぼ等しくすることができる。[Operation] When volatile liquid is stored in the storage tank,
The pressure of the vaporized vapor in the storage tank is substantially equal to the atmospheric pressure. When the volatile liquid is supplied to the storage tank by the flow rate proportional control valve, the flow rate control means of the flow rate proportional control valve sets the pilot pressure of the volatile liquid that determines the flow rate of the volatile liquid flowing between the supply port and the discharge port. As a result, the opening degree of a valve provided between the inlet and the outlet is adjusted to control the pressure of the vaporized vapor that determines the flow rate of the vaporized vapor flowing between the inlet and the outlet, and thereby the vaporized vapor drawn from the storage tank Since the flow rate is controlled, the flow rate of the vaporized vapor drawn from the storage tank can be adjusted by making the pressure acting on the flow rate of the volatile liquid and the pressure acting on the flow rate of the vaporizing vapor almost equal. Can be approximately equal to.
【０００８】具体的には、第１オリフィスと第１圧力室
に作用する揮発性液体の圧力とによって、貯槽に供給さ
れる揮発性液体の流量（供給量）が定まり、第２オリフ
ィスと第２圧力室に作用する蒸発蒸気の圧力とによっ
て、貯槽から吸引される蒸発蒸気の流量（吸引量）が定
まる。また、揮発性液体の圧力による第１ダイヤフラム
の作用力と、蒸発蒸気の圧力による第２ダイヤフラムの
作用力とが、ステムに対向して作用して入口と出口間に
設けた弁の開度が調整され、これによって第２圧力室に
作用する蒸発蒸気の圧力が定まるので、第１ダイヤフラ
ムと第２ダイヤフラムの受圧面積比をこれらの作用力が
ほぼ等しくなるようにすることによって、蒸発蒸気の吸
引量を揮発性液体の供給量とほぼ等しくすることができ
る。Specifically, the flow rate (supply amount) of the volatile liquid supplied to the storage tank is determined by the pressure of the volatile liquid acting on the first orifice and the first pressure chamber, and the second orifice and the second orifice. The flow rate (amount of suction) of the vaporized vapor sucked from the storage tank is determined by the pressure of the vaporized vapor acting on the pressure chamber. Further, the acting force of the first diaphragm due to the pressure of the volatile liquid and the acting force of the second diaphragm due to the pressure of the evaporating vapor act in opposition to the stem and the opening degree of the valve provided between the inlet and the outlet is increased. Since the pressure of the vaporized vapor that is adjusted and acts on the second pressure chamber is determined by the adjustment, the pressure-receiving area ratios of the first diaphragm and the second diaphragm are made equal to each other so that the acting forces are substantially equal to each other. The amount can be approximately equal to the supply of volatile liquid.
【０００９】この場合、供給口と排出口の間に第１オリ
フィスを、入口と出口の間に第２オリフィスをそれぞれ
設けたことによって、揮発性液体及び蒸発蒸気の流量に
対する第１圧力室及び第２圧力室の圧力幅を大きくでき
るので、流量比例制御弁の精度を向上させることができ
る。In this case, by providing the first orifice between the supply port and the discharge port and the second orifice between the inlet port and the outlet port, respectively, the first pressure chamber and the first pressure chamber with respect to the flow rates of the volatile liquid and the evaporating vapor are provided. Since the pressure width of the two pressure chambers can be increased, the accuracy of the flow rate proportional control valve can be improved.
【００１０】[0010]
【実施例】図は本発明の実施例を示し、この流量比例制
御弁１は、適宜の手段によって一体に組み付けられた第
１、第２、第３、第４ボディ２，３，４，５を備え、第
１ボディ２と第２ボディ３間に、第１ダイヤフラム７の
周縁が、第３ボディ４と第４ボディ５間に、これよりも
大径の第２ダイヤフラム８の周縁が、それぞれ挟持され
ている。DETAILED DESCRIPTION OF THE PREFERRED EMBODIMENTS The drawings show an embodiment of the present invention, in which the flow rate proportional control valve 1 is integrally assembled by appropriate means to the first, second, third and fourth bodies 2, 3, 4, and 5. Between the first body 2 and the second body 3, the peripheral edge of the first diaphragm 7 is between the third body 4 and the fourth body 5, and the peripheral edge of the second diaphragm 8 having a larger diameter than that. It is pinched.
【００１１】上記第１ボディ２は、同一直線上に開設さ
れた揮発性液体の供給口１０と排出口１１を備え、供給
口１０は揮発性液体の供給源１２に、排出口１１は自動
車の燃料タンク等の適宜の貯槽１３に、ホース等によっ
てそれぞれ連通可能とされている（図２参照）。また、
供給口１０と排出口１１の間に、揮発性液体の流量に対
する上流側の圧力を増幅するための第１オリフィス１４
が、該オリフィス１４の上流側に、供給口１０を第１ダ
イヤフラム７で区画された第１圧力室１５に連通させる
第１導通ポート１６がそれぞれ形成され、第１ダイヤフ
ラム７と第２ボディ３間の第１呼吸室１７は、大気圧導
通ポート１８によって外部に連通している。したがっ
て、第１圧力室１５には、貯槽１３に供給される揮発性
液体の流量ＱL を決定する圧力ＰL が作用する。The first body 2 is provided with a volatile liquid supply port 10 and a discharge port 11 which are opened on the same straight line. The supply port 10 is a volatile liquid supply source 12 and the discharge port 11 is an automobile. A suitable storage tank 13 such as a fuel tank can be connected by a hose or the like (see FIG. 2). Also,
Between the supply port 10 and the discharge port 11, a first orifice 14 for amplifying the upstream pressure with respect to the flow rate of the volatile liquid.
However, on the upstream side of the orifice 14, a first conduction port 16 for communicating the supply port 10 with the first pressure chamber 15 defined by the first diaphragm 7 is formed, and between the first diaphragm 7 and the second body 3. The first breathing chamber 17 is communicated with the outside by the atmospheric pressure conduction port 18. Accordingly, the first pressure chamber 15, the pressure P L to determine the flow rate Q L of the volatile liquid to be supplied to the storage tank 13 acts.
【００１２】第２ボディ３には、蒸発蒸気の入口２０と
出口２１が同一直線上に開設されており、入口２０は上
記貯槽１３に、出口２１は真空源としての真空ポンプ２
２に、ホース等によってそれぞれ連通可能とされている
（図２参照）。また、入口２０と出口２１は、第２ボデ
ィ３に形成した、蒸発蒸気の流量に対する下流側の圧力
を増幅するための第２オリフィス２３と、流路２４と、
第３ボディ４に形成した凹部２５とによって連通し、流
路２４の凹部２５側に弁座２６が形成されている。第２
ダイヤフラム８で区画された第２圧力室２８は第２導通
ポート２９によって上記凹部２５に連通し、第２ダイヤ
フラム８と第４ボディ５間の第２呼吸室３０は、大気圧
導通ポート３１によって外部に連通している。したがっ
て、第２圧力室２８には、真空ポンプ２２で吸引される
貯槽１３の蒸発蒸気の流量ＱV を決定する蒸発蒸気の圧
力ＰV が作用する。The second body 3 is provided with an inlet 20 and an outlet 21 for vaporized vapor on the same straight line. The inlet 20 is in the storage tank 13 and the outlet 21 is a vacuum pump 2 as a vacuum source.
2 can be connected to each other by a hose or the like (see FIG. 2). Further, the inlet 20 and the outlet 21 are a second orifice 23 formed in the second body 3 for amplifying the pressure on the downstream side with respect to the flow rate of the vaporized vapor, a flow path 24,
A valve seat 26 is formed in the flow path 24 on the side of the recess 25 so as to communicate with the recess 25 formed in the third body 4. Second
The second pressure chamber 28 partitioned by the diaphragm 8 communicates with the recess 25 by the second conduction port 29, and the second breathing chamber 30 between the second diaphragm 8 and the fourth body 5 is externally connected by the atmospheric pressure conduction port 31. Is in communication with. Therefore, the pressure P v of the vaporized vapor, which determines the flow rate Q v of the vaporized vapor in the storage tank 13 sucked by the vacuum pump 22, acts on the second pressure chamber 28.
【００１３】第１ダイヤフラム７と第２ダイヤフラム８
は、第２ボディ３に開設した貫通孔３３を気密に貫通す
るとともに、上記流路２４及び第３ボディに開設した貫
通孔を通るステム３４によって一体変位可能に連結さ
れ、ステム３４に弁座２６を凹部２５側から開閉する弁
体３５が一体に形成されている。したがって、第１ダイ
ヤフラム７で区画された第１圧力室１５と、第２ダイヤ
フラム８で区画された第２圧力室２８と、これらのダイ
ヤフラムを連結するステム３４の弁体２５及び弁座２６
とによって、第１圧力室１５に供給された揮発性液体の
圧力をパイロット圧として、蒸発蒸気の圧力ＰV を制御
する制御手段が構成される。また、第２呼吸室３０に
は、真空ポンプ２２の運転が停止したときに、弁体３５
によって弁座２６を閉鎖させるための、付勢力の小さい
弁ばね３６が縮設されている。図２中の符号３８は、流
量調整弁である。First diaphragm 7 and second diaphragm 8
Penetrates through the through hole 33 formed in the second body 3 in an airtight manner, and is integrally displaceably connected by the stem 34 passing through the flow path 24 and the through hole formed in the third body. A valve body 35 that opens and closes from the recess 25 side is integrally formed. Therefore, the first pressure chamber 15 partitioned by the first diaphragm 7, the second pressure chamber 28 partitioned by the second diaphragm 8, and the valve body 25 and valve seat 26 of the stem 34 connecting these diaphragms.
With the above, a control unit configured to control the pressure P V of the vaporized vapor with the pressure of the volatile liquid supplied to the first pressure chamber 15 as the pilot pressure is configured. Further, in the second breathing chamber 30, when the operation of the vacuum pump 22 is stopped, the valve body 35
A valve spring 36 having a small biasing force for closing the valve seat 26 is contracted. Reference numeral 38 in FIG. 2 is a flow rate adjusting valve.
【００１４】上記流量比例制御弁１を流れる揮発性液体
の流量ＱL と、蒸発蒸気の流量ＱVは、第１オリフィス
１４と第２オリフィス２３とによって決定される揮発性
液体の圧力ＰL と蒸発蒸気の圧力ＰV とによって定ま
り、蒸発蒸気の圧力ＰV は、弁体３５の開度によって制
御される真空圧となる。したがって、ステム３４には、
第１ダイヤフラム７に作用する揮発性液体の圧力ＰL
と、第２ダイヤフラム８に作用する弁体３５の開度によ
って制御された真空圧Ｐv とが対向して作用し、かつ第
１呼吸室１７と第２呼吸室３０がいずれも外気に連通し
ているので、貯槽１３から吸引される蒸発蒸気の流量Ｑ
V は、揮発性液体の圧力ＰL をパイロット圧力として、
蒸発蒸気の圧力ＰV を制御することによって制御され
る。この場合、弁ばね３６の付勢力は、ダイヤフラムの
作用力に比べて小さいので、考慮しなくてよい。The flow rate Q L of the volatile liquid flowing through the flow rate proportional control valve 1 and the flow rate Q V of the vaporized vapor are the pressure P L of the volatile liquid determined by the first orifice 14 and the second orifice 23. determined by the pressure P V of the evaporating steam, the pressure P V of the evaporation steam is a vacuum pressure which is controlled by the opening degree of the valve body 35. Therefore, the stem 34 has
Pressure P L of the volatile liquid acting on the first diaphragm 7
And the vacuum pressure P v controlled by the opening degree of the valve element 35 acting on the second diaphragm 8 act in opposition, and both the first breathing chamber 17 and the second breathing chamber 30 communicate with the outside air. Therefore, the flow rate Q of the vaporized vapor sucked from the storage tank 13
V is the pressure P L of the volatile liquid as the pilot pressure,
It is controlled by controlling the pressure P v of the vaporized vapor. In this case, since the biasing force of the valve spring 36 is smaller than the acting force of the diaphragm, it need not be considered.
【００１５】したがって、揮発性液体の圧力ＰL による
第１ダイヤフラム７の作用力をＦLとし、弁３６の開度
によって制御された真空圧Ｐv による第２ダイヤフラム
８の作用力をＦV とすると、第１ダイヤフラム７と第２
ダイヤフラム８の有効受圧面積がＦL ／ＱL ≒ＦV ／Ｑ
V （ＱL ≒ＱV ）となるように、これらのダイヤフラム
の有効受圧面積を設定することによって、貯槽１３に供
給される揮発性液体の流量ＱL と貯槽１３から吸引され
る蒸発蒸気の流量ＱV とを、ほぼ等しくすることができ
る。この場合、弁体３５が、上記ステム３４に対向して
作用するダイヤフラム７と８の作用力が平衡する位置に
移動して、弁座２６の開口量が該弁座２６を流れる蒸発
蒸気の流量ＱV に応じた量となることは、勿論である。
また、蒸発蒸気の吸引量は、揮発性液体の供給量と厳密
に同量にしなくてもよく、吸引量を供給量より１割ない
し３割程大きくしてもよいので、第１ダイヤフラム７の
作用力を、第２ダイヤフラム８の作用力より若干大きく
すると、蒸発蒸気の吸引量を、揮発性液体の供給量より
若干多くすることができる。[0015] Therefore, the acting force of the first diaphragm 7 due to pressure P L of the volatile liquid and F L, the force acting on the second diaphragm 8 by the vacuum pressure P v, which is controlled by the degree of opening of the valve 36 and F V Then, the first diaphragm 7 and the second diaphragm 7
Effective pressure-receiving area of the diaphragm 8 is F L / Q L ≒ F V / Q
By setting the effective pressure receiving areas of these diaphragms so that V (Q L ≈Q V ), the flow rate Q L of the volatile liquid supplied to the storage tank 13 and the flow rate of the vaporized vapor sucked from the storage tank 13 are set. Q V can be approximately equal. In this case, the valve body 35 moves to a position where the acting forces of the diaphragms 7 and 8 acting opposite to the stem 34 are in equilibrium, and the opening amount of the valve seat 26 causes the flow rate of vaporized vapor flowing through the valve seat 26. Of course, the amount depends on Q V.
The suction amount of the vaporized vapor does not have to be exactly the same as the supply amount of the volatile liquid, and the suction amount may be larger than the supply amount by 10 to 30%. By making the acting force slightly larger than the acting force of the second diaphragm 8, the suction amount of the vaporized vapor can be made slightly larger than the supply amount of the volatile liquid.
【００１６】さらに、固定オリフィス１４と２３とを設
けたことによって、揮発性液体及び蒸発蒸気の流量に対
する第１圧力室１５と第２圧力室２８の圧力幅を大きく
することができるので、流量比例制御弁１の精度が向上
する。Further, since the fixed orifices 14 and 23 are provided, the pressure widths of the first pressure chamber 15 and the second pressure chamber 28 with respect to the flow rates of the volatile liquid and the vapor can be increased, so that the flow rates are proportional. The accuracy of the control valve 1 is improved.
【００１７】[0017]
【発明の効果】本発明における流量比例制御弁は、揮発
性液体の圧力をパイロット圧として、吸引される蒸発蒸
気の圧力を制御することによって、蒸発蒸気の流量を制
御できるので、これらの圧力に基づく作用力をほぼ等し
くすることによって、蒸発蒸気の吸引量を、揮発性液体
の供給量とほぼ等しくすることができる。また、流量制
御手段に設けた第１オリフィス及び第２オリフィスによ
って、揮発性液体の流量に対する第１圧力室の圧力幅、
及び蒸発蒸気の流量に対する第２圧力室の圧力幅を大き
くできるので、流量比例制御弁の精度を向上させること
ができる。The flow rate proportional control valve according to the present invention can control the flow rate of the vaporized vapor by controlling the pressure of the vaporized vapor to be sucked by using the pressure of the volatile liquid as the pilot pressure, so that the pressure of these vapor pressures can be controlled. By making the acting force based on them substantially equal, the suction amount of the vaporized vapor can be made substantially equal to the supply amount of the volatile liquid. In addition, the pressure width of the first pressure chamber with respect to the flow rate of the volatile liquid is controlled by the first orifice and the second orifice provided in the flow rate control means.
Since the pressure width of the second pressure chamber with respect to the flow rate of the evaporated vapor can be increased, the accuracy of the flow rate proportional control valve can be improved.
【図１】実施例の縦断面図である。FIG. 1 is a longitudinal sectional view of an embodiment.
【図２】同じく構成図である。FIG. 2 is a block diagram similarly.
１ 流量比例制御弁 ７，８ ダイヤフラム １０ 供給口 １１ 排出口 １２ 供給源 １３ 貯槽 １４，２３ オリフィス １５，２８ 圧力室 １７，３０ 呼吸室 ２４ 流路 ２６ 弁座 ３４ ステム ３５ 弁体 1 Flow Proportional Control Valve 7,8 Diaphragm 10 Supply Port 11 Discharge Port 12 Supply Source 13 Storage Tank 14,23 Orifice 15,28 Pressure Chamber 17,30 Breathing Chamber 24 Flow Path 26 Valve Seat 34 Stem 35 Valve Body
Claims (3)
貯槽において揮発性液体から蒸発した蒸発蒸気を、揮発
性液体の供給量とほぼ同量吸引するための流量比例制御
弁であって、 上記流量比例制御弁が、揮発性液体の供給源に連通する
供給口と、上記貯槽に連通する排出口と、上記貯槽に連
通する蒸発蒸気の入口と、真空源に連通する蒸発蒸気の
出口と、上記供給口と排出口の間を流れる揮発性液体の
流量を定める該揮発性液体の圧力をパイロット圧とし
て、入口と出口の間の蒸発蒸気の流量を定める該蒸発蒸
気の圧力を制御することにより、貯槽から吸引する蒸発
蒸気の流量を、揮発性液体の貯槽への供給量とほぼ同量
に制御する流量制御手段とを備えている、ことを特徴と
する流量比例制御弁。1. A flow rate proportional control valve for supplying a volatile liquid to a storage tank and sucking the vaporized vapor evaporated from the volatile liquid in the storage tank in an amount substantially equal to the supply amount of the volatile liquid, The flow rate proportional control valve has a supply port that communicates with a supply source of volatile liquid, an exhaust port that communicates with the storage tank, an inlet for vaporized vapor that communicates with the storage tank, and an outlet for vaporized vapor that communicates with a vacuum source. Controlling the pressure of the vaporized vapor that determines the flow rate of the vaporized vapor between the inlet and the outlet, with the pressure of the volatile liquid that determines the flow rate of the volatile liquid flowing between the supply port and the discharge port as the pilot pressure. Therefore, the flow rate proportional control valve is provided with flow rate control means for controlling the flow rate of the vaporized vapor sucked from the storage tank to be approximately the same as the supply amount of the volatile liquid to the storage tank.
１オリフィスと、該第１オリフィスより上流側の揮発性
液体の圧力が作用する第１圧力室と、該第１圧力室と大
気圧が作用する第１呼吸室とを区画する第１ダイフフラ
ムと；入口と出口の間の第２オリフィスと、該第２オリ
フィスより下流側で真空圧が作用する第２圧力室と、該
第２圧力室と大気圧が作用する第２呼吸室とを区画しか
つ受圧面積が第１ダイヤフラムより大きい第２ダイヤフ
ラムと、上記第２オリフィスの下流側において入口と出
口間の流路中に設けた弁座と；上記第１ダイヤフラムと
第２ダイヤフラムを一体に変位させるステムと、該ステ
ムに設けた上記弁座を開閉する弁体と；を備えている、
ことを特徴とする請求項１に記載した流量比例制御弁。2. The flow rate control means comprises a first orifice between the supply port and the discharge port, a first pressure chamber on which the pressure of the volatile liquid upstream of the first orifice acts, and the first pressure chamber. And a first diaphragm for partitioning a first breathing chamber on which atmospheric pressure acts; a second orifice between the inlet and the outlet, a second pressure chamber on the downstream side of the second orifice, on which a vacuum pressure acts, and A second diaphragm that divides the second pressure chamber and the second breathing chamber where atmospheric pressure acts and has a pressure receiving area larger than the first diaphragm, and is provided in the flow path between the inlet and the outlet downstream of the second orifice. A valve seat, a stem for integrally displacing the first diaphragm and the second diaphragm, and a valve body for opening and closing the valve seat provided on the stem.
The flow rate proportional control valve according to claim 1, wherein.
路に連通させ、該第２圧力室の圧力を、上記弁座の開度
によって制御された圧力とした、ことを特徴とする請求
項２に記載した流量比例制御弁。3. A second pressure chamber is connected to a flow path between the second orifice and the valve seat, and the pressure of the second pressure chamber is a pressure controlled by the opening of the valve seat. The flow rate proportional control valve according to claim 2.
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP27032294A JPH08110818A (en) | 1994-10-07 | 1994-10-07 | Flow proportional control valve |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP27032294A JPH08110818A (en) | 1994-10-07 | 1994-10-07 | Flow proportional control valve |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| JPH08110818A true JPH08110818A (en) | 1996-04-30 |
Family
ID=17484657
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP27032294A Pending JPH08110818A (en) | 1994-10-07 | 1994-10-07 | Flow proportional control valve |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPH08110818A (en) |
Cited By (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JP2007299344A (en) * | 2006-05-08 | 2007-11-15 | Ckd Corp | Flow rate controller |
-
1994
- 1994-10-07 JP JP27032294A patent/JPH08110818A/en active Pending
Cited By (2)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JP2007299344A (en) * | 2006-05-08 | 2007-11-15 | Ckd Corp | Flow rate controller |
| JP4668119B2 (en) * | 2006-05-08 | 2011-04-13 | シーケーディ株式会社 | Flow control device |
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