JPH08110376A - Ultrasonic wave transducer - Google Patents
Ultrasonic wave transducerInfo
- Publication number
- JPH08110376A JPH08110376A JP6246649A JP24664994A JPH08110376A JP H08110376 A JPH08110376 A JP H08110376A JP 6246649 A JP6246649 A JP 6246649A JP 24664994 A JP24664994 A JP 24664994A JP H08110376 A JPH08110376 A JP H08110376A
- Authority
- JP
- Japan
- Prior art keywords
- ultrasonic wave
- ultrasonic
- housing
- electrodes
- piezoelectric elements
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Pending
Links
Landscapes
- Transducers For Ultrasonic Waves (AREA)
- Measurement Of Velocity Or Position Using Acoustic Or Ultrasonic Waves (AREA)
- Measuring Volume Flow (AREA)
Abstract
Description
【０００１】[0001]
【産業上の利用分野】本発明は媒体中の音波の伝播時間
を検出して超音波が伝播する媒体の流速や超音波を反射
する物体までの距離などを測定する超音波計測装置に用
いる超音波を発生して受信する超音波送受波器に関す
る。さらに詳述すると、送波器から変調された超音波を
送波し、受波器で受波される変調超音波の位相の送波側
との関係を分析して送受波器間の媒体中の音波の伝播時
間を検出する変調波法超音波流速計などの超音波計測装
置に用いる超音波送波器に関する。BACKGROUND OF THE INVENTION 1. Field of the Invention The present invention relates to an ultrasonic measuring device for detecting the propagation time of a sound wave in a medium and measuring the flow velocity of the medium in which the ultrasonic wave propagates and the distance to an object reflecting the ultrasonic wave. The present invention relates to an ultrasonic wave transmitter / receiver that generates and receives sound waves. More specifically, the ultrasonic wave modulated by the transmitter is transmitted, and the relationship between the phase of the modulated ultrasonic wave received by the receiver and the transmitting side is analyzed to analyze the medium in the space between the transmitter and receiver. The present invention relates to an ultrasonic wave transmitter used in an ultrasonic wave measuring device such as a modulated wave ultrasonic wave velocity meter for detecting the propagation time of sound waves.
【０００２】[0002]
【従来の技術】従来、変調波法の超音波測定装置に用い
る超音波送受波器では、励振回路の効率を高めるため超
音波振動子をその固有振動数で励振し、帯域の狭い単一
の周波数の超音波を発生させて測定対象の媒体に打ち込
み、受信側では送波側と同一の固有振動数を有する受波
器で受信しており、しばしば同一の超音波振動子を送波
と受波に切替えて使用している。2. Description of the Related Art Conventionally, in an ultrasonic wave transmitter / receiver used in an ultrasonic wave measuring apparatus using a modulated wave method, an ultrasonic wave oscillator is excited at its natural frequency in order to enhance the efficiency of an excitation circuit, and a single band with a narrow band is used. An ultrasonic wave of a frequency is generated and driven into the medium to be measured, and the receiving side receives it with a receiver having the same natural frequency as the transmitting side. We switch to wave and are using.
【０００３】図７は超音波送受波器を配管内の両側に設
けて配管内を流れる流体の流速を計測する超音波流量計
の構成の一例を示す図である。図７において、1aと1bと
が超音波送受波器であり、一定の期間一方の超音波送受
波器、たとえば1aに変換器30に設けられた励振回路から
の変調された超音波励振電圧が印加されて超音波を放射
し、この間、もう一方の超音波送受波器1bは受波モード
となり、送波モードの超音波送受波器1aから放射されて
配管10内の流体40を伝播してきた超音波を受波する。そ
して、送波超音波励振信号と受波超音波信号との相関が
変換器30の相関分析部で解析され、この解析結果にもと
づいて配管10内の流体40を伝播した超音波の伝播時間T1
が検出される。FIG. 7 is a diagram showing an example of the structure of an ultrasonic flowmeter for measuring the flow velocity of a fluid flowing in a pipe by providing ultrasonic wave transmitters / receivers on both sides of the pipe. In FIG. 7, reference numerals 1a and 1b denote ultrasonic wave transmitters / receivers, and one ultrasonic wave transmitter / receiver, for example, 1a is a modulated ultrasonic wave excitation voltage from an excitation circuit provided in the converter 30. It is applied and emits ultrasonic waves, while the other ultrasonic transducer 1b is in the receiving mode, and is propagated through the fluid 40 in the pipe 10 radiated from the ultrasonic transducer 1a in the transmitting mode. Receive ultrasonic waves. Then, the correlation between the transmitted ultrasonic wave excitation signal and the received ultrasonic wave signal is analyzed by the correlation analysis unit of the converter 30, and the propagation time T1 of the ultrasonic wave propagated through the fluid 40 in the pipe 10 based on the analysis result.
Is detected.
【０００４】上記の超音波送受波器1aから1bへの所定時
間の変調超音波の伝送が終了すると、こんどは伝送の方
向を反転して1bから1aの方向へ所定の時間超音波の伝送
が行われ、この方向への配管流体中の超音波伝播時間T2
が検出される。そして伝播時間の差(T1-T2) から配管内
流体の流速が検出されるのでこれを出力する。When the transmission of the modulated ultrasonic waves from the ultrasonic transducers 1a to 1b for a predetermined time is completed, the transmission direction is reversed and the ultrasonic waves are transmitted from the direction 1b to 1a for a predetermined time. Ultrasonic wave propagation time T2 in the pipe fluid in this direction
Is detected. The flow velocity of the fluid in the pipe is detected from the difference in propagation time (T1-T2), and this is output.
【０００５】上述のように送受波超音波の相関関係の解
析によって伝播時間の検出を可能とするには、伝送超音
波に目印となるなんらかの変調がほどこされていること
が必要である。ところで、変調波は公知のように伝送を
担う搬送波の周波数を中心に変調方式によって定まる周
波数の広がりを有しているので、超音波送受波器は変調
によって生じる側波帯周波数の超音波も効率よく伝送す
る特性のものであると同時に、変調側波帯範囲外の周波
数の超音波は遮断してノイズの影響を受けないような特
性のものであることが望まれる。As described above, in order to be able to detect the propagation time by analyzing the correlation between the transmitted and received ultrasonic waves, it is necessary that the transmitted ultrasonic waves be subjected to some modulation. By the way, since the modulation wave has a frequency spread determined by the modulation method centering on the frequency of the carrier wave that is responsible for transmission as is well known, the ultrasonic wave transmitter / receiver is also effective for the ultrasonic wave of the sideband frequency generated by the modulation. At the same time, it is desirable that it has a characteristic of transmitting well, and at the same time has a characteristic of blocking an ultrasonic wave having a frequency outside the modulation sideband range and not being influenced by noise.
【０００６】[0006]
【発明が解決しようとする課題】超音波送受波器を、固
有振動数が同一であるそれぞれ１ケの超音波振動子によ
って構成し、この超音波振動子の固有振動周波数で励振
送波して受信する従来技術の超音波送受波器によれば、
超音波振動子の固有振動数の超音波は効率よく伝送され
るが、変調法による測定を行うとき、変調によって生じ
る側波帯域周波数の超音波成分の伝送が抑制されてしま
うので、変調法の効果が顕著に得られないという問題が
ある。An ultrasonic wave transmitter / receiver is composed of one ultrasonic wave oscillator each having the same natural frequency, and is excited and transmitted at the natural vibration frequency of the ultrasonic wave oscillator. According to the prior art ultrasonic transducer of receiving,
Although the ultrasonic wave of the natural frequency of the ultrasonic transducer is efficiently transmitted, the transmission of the ultrasonic component of the sideband frequency generated by the modulation is suppressed when the measurement by the modulation method is performed. There is a problem that the effect cannot be remarkably obtained.
【０００７】本発明は、従来技術にもとづく超音波送受
波器を変調法による超音波計測装置に適用する場合に生
じる上記の問題点を解決し、変調法で必要とされる周波
数帯域の超音波を高い効率で伝送でき、かつ雑音周波数
成分の侵入が抑制される超音波送受波器を提供して、変
調法による微少な時間差の正確な検出を可能とすること
を課題とする。The present invention solves the above-mentioned problems that occur when an ultrasonic transmitter / receiver based on the prior art is applied to an ultrasonic measuring device by a modulation method, and an ultrasonic wave in a frequency band required by the modulation method is solved. It is an object of the present invention to provide an ultrasonic wave transmitter / receiver capable of transmitting signals with high efficiency and suppressing intrusion of noise frequency components, and enabling accurate detection of a minute time difference by the modulation method.
【０００８】[0008]
【課題を解決するための手段】上記の課題を達成するた
め、第１の発明では、端面に電極が密着して設けられた
厚さの異なる複数の圧電素子を音響的に接合してなる積
層超音波振動子と、積層超音波振動子に音響的に接合さ
れたクサビとを、複数の端子を備えたハウジング内にモ
ールドして設け、積層超音波振動子を構成する各圧電素
子の端面の電極から引き出された導線をハウジングが備
える端子に接続して超音波送受波器を構成する。In order to achieve the above-mentioned object, in the first invention, a laminated structure in which a plurality of piezoelectric elements having different thicknesses and provided with electrodes adhered to the end faces are acoustically joined An ultrasonic transducer and a wedge acoustically bonded to the laminated ultrasonic transducer are provided by molding in a housing having a plurality of terminals, and the end surface of each piezoelectric element forming the laminated ultrasonic transducer is An ultrasonic wave transmitter / receiver is configured by connecting a lead wire drawn from the electrode to a terminal provided in the housing.
【０００９】また、第２の発明では、積層超音波振動子
を構成する厚さの異なる複数の圧電素子それぞれの端面
の電極を互いに絶縁して接合し、前記各圧電素子の電極
から引き出された導線を並列接続してハウジングが備え
る端子に接続して超音波送受波器を構成する。According to the second aspect of the invention, the electrodes on the end faces of the piezoelectric elements having different thicknesses that constitute the laminated ultrasonic vibrator are insulated from each other and joined together, and are drawn out from the electrodes of the piezoelectric elements. An ultrasonic wave transmitter / receiver is configured by connecting conductors in parallel and connecting to terminals provided in the housing.
【００１０】[0010]
【作用】第１の発明による超音波送受波器の積層超音波
振動子を構成する圧電素子の端面の電極から引き出され
た導線が接続されたハウジングに設けた端子間に、それ
ぞれの圧電素子の厚さで定まる機械的共振周波数の逆数
の関係にあるパルス幅の電圧パルスを印加されたとき効
率よく励振されるので、ハウジングに設けた端子間にパ
ルス幅を変調した電圧パルスを印加すると、そのパルス
幅に対応する厚さの圧電素子が励振され、変調によって
生じる側波帯域周波数の超音波成分が効率よく放射され
る。そして、受信側モードとした超音波送受波器では、
入射した超音波の振動数成分に相当する機械的共振周波
数に対応する厚さの圧電素子が超音波振動に感応して発
生した電荷にもとずく電圧信号が圧電素子の電極に接続
されたハウジングの端子間に現れる。According to the first aspect of the invention, between the terminals provided on the housing to which the lead wire drawn from the electrode on the end face of the piezoelectric element constituting the laminated ultrasonic vibrator of the ultrasonic transducer is connected, the piezoelectric element of each piezoelectric element is connected. When a voltage pulse with a pulse width having a reciprocal relation of the mechanical resonance frequency determined by the thickness is applied, it is efficiently excited.Therefore, when a voltage pulse with a pulse width modulated is applied between the terminals provided on the housing, The piezoelectric element having a thickness corresponding to the pulse width is excited, and the ultrasonic component of the sideband frequency generated by the modulation is efficiently radiated. Then, in the ultrasonic transmitter / receiver set to the receiving side mode,
A housing in which a voltage signal based on the electric charge generated by a piezoelectric element having a thickness corresponding to the mechanical resonance frequency corresponding to the frequency component of the incident ultrasonic wave is connected to the electrode of the piezoelectric element Appears between the terminals.
【００１１】また、第２の発明による超音波送受波器で
は、超音波振動子を構成する各圧電素子の端面の電極は
並列に接続されてハウジングに設けた端子に接続されて
いるので、このハウジングの端子間に変調した励振電圧
を印加すると、変調によって生じた側波帯周波数に近い
共振周波数をもつ圧電素子の振動が強く励起されて、そ
の振動数の超音波が発生し、受信側モードとした超音波
送受波器では、入射した超音波の振動数成分に相当する
機械的共振周波数に対応する厚さの圧電素子が超音波振
動に感応して発生した電荷にもとずく電圧信号がハウジ
ングの端子間に現れる。In the ultrasonic wave transmitter / receiver according to the second aspect of the invention, the electrodes on the end faces of the piezoelectric elements forming the ultrasonic vibrator are connected in parallel and are connected to the terminals provided on the housing. When a modulated excitation voltage is applied between the terminals of the housing, the vibration of the piezoelectric element, which has a resonance frequency close to the sideband frequency generated by the modulation, is strongly excited, and ultrasonic waves of that frequency are generated. In the ultrasonic transducer, the voltage signal based on the electric charge generated by the piezoelectric element having a thickness corresponding to the mechanical resonance frequency corresponding to the frequency component of the incident ultrasonic wave is generated in response to the ultrasonic vibration. Appears between the terminals of the housing.
【００１２】[0012]
【実施例】第１の発明に基づいて構成した超音波送受波
器１の一実施例の断面構造を図１に示し、この図によっ
て本発明を説明する。図１において、２は、端面に電極
が密着して設けられた厚さの異なる圧電素子の複数個、
図示の実施例では４素子を端面が音響的に密着するよう
に接合して構成した積層超音波振動子であり、３は積層
超音波振動子２が放射する超音波振動を計測対象の媒体
に案内する圧電素子の音響特性に近い特性の部材からな
るクサビであり、積層超音波振動子２とは音響的に密に
接合されている。そして、８は積層超音波振動子２とク
サビ３とを納めるハウジングであり、このハウジング８
の端面には、積層超音波振動子２を構成する圧電素子21
ないし24各々の端面に設けられた電極を接続する端子７
が設けられ、電極と端子とを接続した状態でモールド材
９によって封止されている。DETAILED DESCRIPTION OF THE PREFERRED EMBODIMENTS A cross-sectional structure of an embodiment of an ultrasonic wave transmitter / receiver 1 constructed according to the first invention is shown in FIG. In FIG. 1, 2 is a plurality of piezoelectric elements having different thicknesses, in which electrodes are closely attached to the end faces,
In the illustrated embodiment, a laminated ultrasonic transducer is formed by joining four elements so that the end faces are acoustically closely contacted, and 3 is ultrasonic vibration radiated by the laminated ultrasonic transducer 2 as a medium to be measured. It is a wedge made of a member having characteristics close to the acoustic characteristics of the piezoelectric element to be guided, and is acoustically densely joined to the laminated ultrasonic vibrator 2. The reference numeral 8 designates a housing for accommodating the laminated ultrasonic transducer 2 and the wedge 3.
On the end face of the piezoelectric element 21 that constitutes the laminated ultrasonic transducer 2.
No. 7 to 24 Terminals 7 for connecting the electrodes provided on each end face
Is provided and is sealed by the molding material 9 in a state where the electrode and the terminal are connected.
【００１３】積層超音波振動子２を構成する複数の圧電
素子21〜24それぞれの厚さが図２に例示のようにｔｉ
（ｉ＝１，２，３，４）である場合、各圧電素子の機械
的共振周波数ｆｉは下記式（１）で与えられる。As shown in FIG. 2, the thickness of each of the plurality of piezoelectric elements 21 to 24 constituting the laminated ultrasonic transducer 2 is ti.
When (i = 1, 2, 3, 4), the mechanical resonance frequency fi of each piezoelectric element is given by the following equation (1).
【００１４】[0014]
【数１】ｆｉ＝Ｎ／ｔｉ （１） ここに、Ｎは圧電素子部材に固有の周波数定数（ｍ・ｋ
Ｈz ） ｔｉは圧電素子の厚み（ｍｍ） そして、積層超音波振動子２を構成する圧電素子21〜24
は、それぞれの機械的共振周波数ｆｉと下記式（２）の
関係にある電圧パルスを印加されたとき効率よく励振さ
れる。## EQU1 ## fi = N / ti (1) where N is a frequency constant (m · k) peculiar to the piezoelectric element member.
Hz) ti is the thickness (mm) of the piezoelectric element, and the piezoelectric elements 21 to 24 constituting the laminated ultrasonic vibrator 2
Are efficiently excited when a voltage pulse having the relationship of the following formula (2) with each mechanical resonance frequency fi is applied.
【００１５】[0015]
【数２】ｆｉ＝１／Ｔｉ （２） ここに、Ｔｉは圧電素子ｉに印可する電圧パルスの時間
巾（ｓ） 式（１）と式（２）の関係から、積層超音波振動子２か
ら最も効率良く超音波を発生させるには、それぞれの圧
電素子に印加する電圧パルスを、下記式（３）の関係が
成り立つスキャニング時間Ｔｉの間隔で切り換えるとよ
い。## EQU00002 ## fi = 1 / Ti (2) where Ti is the time width (s) of the voltage pulse applied to the piezoelectric element i. From the relationship between the equations (1) and (2), the laminated ultrasonic transducer 2 Therefore, in order to generate the ultrasonic wave most efficiently, it is preferable to switch the voltage pulse applied to each piezoelectric element at intervals of the scanning time Ti that satisfies the relationship of the following formula (3).
【００１６】[0016]
【数３】ｆｉ＝Ｎ／ｔｉ＝１／ＪＴｉ （３） （Ｊは自然数） スキャニングによる送信波形を図３に示す。周波数は、
スキャニングした時点での振動子電極間の厚みにより決
まるため、任意の波形を成形することが可能である。## EQU3 ## fi = N / ti = 1 / JTi (3) (J is a natural number) FIG. 3 shows a transmission waveform by scanning. Frequency is
Since it is determined by the thickness between the transducer electrodes at the time of scanning, it is possible to shape an arbitrary waveform.
【００１７】つぎに、第２の発明に基づいて構成した超
音波送受波器１の一実施例の断面構造を図５に示し、こ
の図によって第２の発明を説明する。図５の実施例の超
音波送受波器が、図１に例示の第１の発明による超音波
送受波器と異なる点は、積層超音波振動子を構成する圧
電素子の端面の電極が互いに絶縁されて接合され、各電
極はそれぞれ並列に接続されて２個の端子7aと7bとに接
続されている点にある。Next, FIG. 5 shows a sectional structure of an embodiment of the ultrasonic wave transmitter / receiver 1 constructed according to the second invention, and the second invention will be described with reference to this drawing. The ultrasonic transducer according to the embodiment of FIG. 5 is different from the ultrasonic transducer according to the first invention illustrated in FIG. 1 in that the electrodes on the end faces of the piezoelectric elements constituting the laminated ultrasonic transducer are insulated from each other. Each of the electrodes is connected in parallel and connected to the two terminals 7a and 7b.
【００１８】このように構成された積層超音波振動子の
二つの端子間に変調された励振電圧を印加すると、変調
によって生じた側波帯周波数に近い共振周波数をもつ圧
電素子の振動が強く励振されて、その振動数の超音波が
発生し、クサビ３を通じて計測対象の媒体中に伝送され
る。一方、図５の構成の超音波送受波器が受波器として
作用するときには、受波した超音波の振動数に最も近い
共振周波数をもつ圧電素子が強く振動して端面の電極間
に振動の変位に応ずる電荷を発生する。そこで積層超音
波振動子２に接続される増巾回路を電荷増巾形の増巾器
としておくと、積層超音波振動子の圧電素子に発生した
電荷は電荷増巾形増巾器に収集され、収集された電荷に
応じた出力信号が電荷増巾形の増巾器から得られる。When a modulated excitation voltage is applied between the two terminals of the laminated ultrasonic vibrator thus constructed, the vibration of the piezoelectric element having a resonance frequency close to the sideband frequency generated by the modulation is strongly excited. Then, an ultrasonic wave of that frequency is generated and transmitted through the wedge 3 into the medium to be measured. On the other hand, when the ultrasonic wave transmitter / receiver configured as shown in FIG. 5 acts as a wave receiver, the piezoelectric element having a resonance frequency closest to the frequency of the received ultrasonic wave vibrates strongly, causing vibration between the electrodes on the end faces. Generates an electric charge according to the displacement. Therefore, if the amplification circuit connected to the laminated ultrasonic transducer 2 is a charge amplification type amplifier, the charges generated in the piezoelectric element of the laminated ultrasonic transducer are collected in the charge amplification type amplifier. An output signal corresponding to the collected charges is obtained from the charge amplifier type amplifier.
【００１９】[0019]
【発明の効果】本発明による超音波送受波器は、異なる
共振周波数の複数の圧電素子を音響的に結合して個々の
圧電素子の音響伝送周波数の和の周波数範囲の音波の伝
送を可能にしているので、変調波法によって計測を行う
場合に個別の圧電素子の共振周波数に制約されることな
く種々のモードで変調をかけることができるので、送受
波間の相関を顕著明瞭にとらえられ、送受波器間の超音
波伝播時間を短時間で正確に検出できるようになり、そ
の結果正確な超音波計測の実行が可能になるという効果
が得られる。The ultrasonic transducer according to the present invention acoustically couples a plurality of piezoelectric elements having different resonance frequencies to enable transmission of sound waves in the frequency range of the sum of the acoustic transmission frequencies of the individual piezoelectric elements. Therefore, when measurement is performed by the modulated wave method, modulation can be performed in various modes without being restricted by the resonance frequency of individual piezoelectric elements, so the correlation between transmitted and received waves can be clearly captured, and The ultrasonic wave propagation time between wave instruments can be accurately detected in a short time, and as a result, accurate ultrasonic wave measurement can be performed.
【００２０】また圧電素子の電極間を絶縁して接合し電
極を並列に引き出す構成の超音波送受波器においては個
々の圧電素子に同時に励振電圧を印可することができ、
この印加励振電圧に応じて振動が励振されるので、複雑
な変調とかける場合でも励振電源をそのモードで変調し
て超音波振動子に印加すれば所望の変調超音波が得られ
変調励振の装置を簡素に構成しうるという効果が得られ
る。Further, in an ultrasonic wave transmitter / receiver having a structure in which electrodes of a piezoelectric element are insulated and joined to draw out the electrodes in parallel, an exciting voltage can be applied to each piezoelectric element at the same time.
Since the vibration is excited according to the applied excitation voltage, even if complex modulation is applied, if the excitation power supply is modulated in that mode and applied to the ultrasonic transducer, a desired modulated ultrasonic wave can be obtained and a device for modulation excitation. The effect is obtained that the can be configured simply.
【図１】本発明による超音波送受波器の断面図FIG. 1 is a cross-sectional view of an ultrasonic transducer according to the present invention.
【図２】超音波振動子の構成説明図FIG. 2 is an explanatory diagram of a configuration of an ultrasonic transducer
【図３】図１の超音波送受波器の励振方法を説明する図FIG. 3 is a diagram for explaining an excitation method of the ultrasonic transducer of FIG.
【図４】本発明による超音波送受波器伝送特性説明図FIG. 4 is an explanatory view of transmission characteristics of an ultrasonic wave transmitter / receiver according to the present invention.
【図５】本発明の他実施例の断面図FIG. 5 is a sectional view of another embodiment of the present invention.
【図６】図５の超音波送受波器の超音波振動子の構成説
明図6 is an explanatory diagram of a configuration of an ultrasonic transducer of the ultrasonic transmitter / receiver of FIG.
【図７】超音波流量計の構成図FIG. 7 is a block diagram of an ultrasonic flow meter.
【符号の説明】 １，1a，1b 超音波送受波器 ２ 積層振動子 21〜24 圧電素子 ３ クサビ ５，5a，5b 電極 ６ 絶縁層 ７ 端子 ８ ハウジング ９ モールド 10 配管 30 変換器 40 流体[Explanation of symbols] 1,1a, 1b Ultrasonic transducer 2 Multilayer transducer 21-24 Piezoelectric element 3 Wedge 5,5a, 5b Electrode 6 Insulation layer 7 Terminal 8 Housing 9 Mold 10 Piping 30 Transducer 40 Fluid
───────────────────────────────────────────────────── フロントページの続き (51)Int.Cl.6 識別記号 庁内整理番号 ＦＩ 技術表示箇所 Ｈ０４Ｒ 17/00 Ｈ Ｅ ─────────────────────────────────────────────────── ─── Continuation of the front page (51) Int.Cl. 6 Identification code Internal reference number FI Technical indication H04R 17/00 HE
Claims (2)
ドして設けられ、 端面に電極が密着して設けられた厚さの異なる複数の圧
電素子を音響的に接合してなる積層超音波振動子と、こ
の積層超音波振動子に音響的に接合されたクサビと、を
備え積層超音波振動子を構成する各圧電素子の端面の電
極から引き出された導線がハウジングに備えた端子に接
続されてなることを特徴とする超音波送受波器。1. A laminated ultrasonic vibration formed by molding in a housing having a plurality of terminals, and acoustically joining a plurality of piezoelectric elements of different thicknesses, the electrodes being closely attached to the end faces. A conductor and a wedge acoustically bonded to the laminated ultrasonic transducer, and a lead wire drawn from an electrode on the end face of each piezoelectric element forming the laminated ultrasonic transducer is connected to a terminal provided on the housing. An ultrasonic wave transmitter / receiver characterized by the following.
接合され、各電極が並列接続されてハウジングに備えた
端子に引き出されてなることを特徴とする請求項１に記
載の超音波送受波器。2. The ultrasonic wave transmitter / receiver according to claim 1, wherein the electrodes on the end faces of the respective piezoelectric elements are insulated and joined to each other, and the respective electrodes are connected in parallel and led out to a terminal provided in the housing. Wave instrument.
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP6246649A JPH08110376A (en) | 1994-10-13 | 1994-10-13 | Ultrasonic wave transducer |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP6246649A JPH08110376A (en) | 1994-10-13 | 1994-10-13 | Ultrasonic wave transducer |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| JPH08110376A true JPH08110376A (en) | 1996-04-30 |
Family
ID=17151562
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP6246649A Pending JPH08110376A (en) | 1994-10-13 | 1994-10-13 | Ultrasonic wave transducer |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPH08110376A (en) |
Cited By (5)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| WO2003098166A1 (en) | 2002-05-15 | 2003-11-27 | Endress + Hauser Flowtec Ag | Ultrasonic transducer for an ultrasonic flow-rate meter |
| JP2005201838A (en) * | 2004-01-19 | 2005-07-28 | Kaijo Corp | High-temperature fluid measuring ultrasonic sensor |
| JP2009074949A (en) * | 2007-09-21 | 2009-04-09 | Ricoh Elemex Corp | Ultrasonic flowmeter and flow rate measurement method |
| WO2021084985A1 (en) * | 2019-10-29 | 2021-05-06 | オムロン株式会社 | Propagation time measurement device |
| DE102022110718A1 (en) | 2022-05-02 | 2023-11-02 | Endress+Hauser Flowtec Ag | Multi-frequency ultrasonic transducer and ultrasonic measuring device with such an ultrasonic transducer |
-
1994
- 1994-10-13 JP JP6246649A patent/JPH08110376A/en active Pending
Cited By (7)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| WO2003098166A1 (en) | 2002-05-15 | 2003-11-27 | Endress + Hauser Flowtec Ag | Ultrasonic transducer for an ultrasonic flow-rate meter |
| JP2005201838A (en) * | 2004-01-19 | 2005-07-28 | Kaijo Corp | High-temperature fluid measuring ultrasonic sensor |
| JP2009074949A (en) * | 2007-09-21 | 2009-04-09 | Ricoh Elemex Corp | Ultrasonic flowmeter and flow rate measurement method |
| WO2021084985A1 (en) * | 2019-10-29 | 2021-05-06 | オムロン株式会社 | Propagation time measurement device |
| JP2021071307A (en) * | 2019-10-29 | 2021-05-06 | オムロン株式会社 | Propagation time measuring device |
| EP4053512A4 (en) * | 2019-10-29 | 2023-11-15 | OMRON Corporation | Propagation time measurement device |
| DE102022110718A1 (en) | 2022-05-02 | 2023-11-02 | Endress+Hauser Flowtec Ag | Multi-frequency ultrasonic transducer and ultrasonic measuring device with such an ultrasonic transducer |
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