JPH0783668A - Piezoelectric vibration gyro - Google Patents
Piezoelectric vibration gyroInfo
- Publication number
- JPH0783668A JPH0783668A JP5249815A JP24981593A JPH0783668A JP H0783668 A JPH0783668 A JP H0783668A JP 5249815 A JP5249815 A JP 5249815A JP 24981593 A JP24981593 A JP 24981593A JP H0783668 A JPH0783668 A JP H0783668A
- Authority
- JP
- Japan
- Prior art keywords
- electrodes
- piezoelectric ceramic
- detection
- ceramic body
- piezoelectric
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Pending
Links
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- Gyroscopes (AREA)
Abstract
Description
【０００１】[0001]
【産業上の利用分野】本発明は、角速度を検出する圧電
振動ジャイロに係るもので、製造が容易で特性の良好な
圧電振動ジャイロに関するものである。BACKGROUND OF THE INVENTION 1. Field of the Invention The present invention relates to a piezoelectric vibrating gyroscope for detecting angular velocity, and more particularly to a piezoelectric vibrating gyroscope which is easy to manufacture and has good characteristics.
【０００２】[0002]
【従来の技術】ナビゲーションや手振れ防止用として用
いられ、回転角（角速度）を検出する圧電振動ジャイロ
が注目され、各種の構造が提案され、実用化されてい
る。これは、回転による圧電セラミックの変位を電圧と
して検出し、角速度に応じた信号を出力するものであ
る。圧電セラミックに電極を形成するものと、エリンバ
等の恒弾性体に圧電セラミック板を貼り付けた構造のも
のとがある。2. Description of the Related Art Piezoelectric vibrating gyros, which are used for navigation and to prevent camera shake, and which detect a rotation angle (angular velocity), have attracted attention, and various structures have been proposed and put into practical use. This detects the displacement of the piezoelectric ceramic due to rotation as a voltage and outputs a signal according to the angular velocity. There are a piezoelectric ceramic in which electrodes are formed and a piezoelectric ceramic in which a piezoelectric ceramic plate is attached to a constant elastic body such as an elinvar.
【０００３】恒弾性材に圧電セラミック板を貼る構造の
ものとしては、三角柱と四角柱のものが提案されている
が、金属表面に圧電セラミック板を貼り付けるものであ
り、接着剤を介して貼り付けられるので検出効率が必ず
しも十分でない。また、圧電セラミック体を振動子自体
として用いるものには、円柱のものが提案されている
が、分極を十分に行うことが難しくなり、表面の電極形
成が困難となる等の問題がある。Triangular prisms and quadrangular prisms have been proposed as a structure in which a piezoelectric ceramic plate is attached to a constant elastic material, but the piezoelectric ceramic plate is attached to a metal surface and is attached via an adhesive. Since it is attached, the detection efficiency is not always sufficient. In addition, a columnar one has been proposed as the one using the piezoelectric ceramic body as the vibrator itself, but there is a problem that it is difficult to sufficiently perform polarization, and it is difficult to form an electrode on the surface.
【０００４】[0004]
【発明が解決しようとする課題】本発明は、上記のよう
な従来の圧電振動ジャイロの欠点を改良し、検出効率が
高く、しかも量産性が高く製造が容易な圧電振動ジャイ
ロを提供するものである。DISCLOSURE OF THE INVENTION The present invention provides a piezoelectric vibrating gyro that improves the above-mentioned drawbacks of the conventional piezoelectric vibrating gyro and has high detection efficiency, high mass productivity, and easy manufacture. is there.
【０００５】[0005]
【課題を解決するための手段】本発明は、四角柱の圧電
セラミック体を用い、その対向する二側面のみに形成す
る電極のみで駆動、検出が可能な圧電振動ジャイロを得
ることによって、上記の課題を解決するものである。According to the present invention, a piezoelectric vibrating gyro that can be driven and detected only by electrodes formed only on two opposite side surfaces thereof by using a piezoelectric ceramic body having a quadrangular prism is provided. It solves the problem.
【０００６】すなわち、回転による圧電体の変位を電圧
出力として得る圧電振動ジャイロにおいて、回転を検出
する素子は圧電セラミック体であり、四角柱の圧電セラ
ミック体の対向する二つの側面の中央部にそれぞれ縁に
沿って伸びる各二つの駆動電極を具え、その二つの駆動
電極の当該側面の両端面側にそれぞれ対向する側面の電
極と対向して配置された検出電極を具えたことに特徴を
有するものである。That is, in a piezoelectric vibrating gyro that obtains the displacement of the piezoelectric body due to rotation as a voltage output, the element for detecting the rotation is a piezoelectric ceramic body, and the square columnar piezoelectric ceramic body has a central portion of two opposite side surfaces, respectively. Characterized by having two drive electrodes extending along the edge, and having detection electrodes arranged so as to face electrodes on opposite side surfaces of the two drive electrodes at opposite end surfaces of the side surface, respectively. Is.
【０００７】[0007]
【作用】電極の形成される二つの側面間で分極された圧
電セラミック体の駆動電極に駆動電圧を印加すると、分
極の方向に対して直角の方向に屈曲振動が生じる。この
状態で、回転運動（角速度）が加わると、圧電セラミッ
ク体の分極方向にコリオリ力を生じ、これを対向する側
面に配置された検出電極によって検出するものである。When a driving voltage is applied to the driving electrode of the piezoelectric ceramic body which is polarized between the two side surfaces on which the electrodes are formed, bending vibration occurs in the direction perpendicular to the direction of polarization. When a rotary motion (angular velocity) is applied in this state, a Coriolis force is generated in the polarization direction of the piezoelectric ceramic body, and this is detected by the detection electrodes arranged on the opposite side surfaces.
【０００８】[0008]
【実施例】以下、図面を参照して、本発明の実施例につ
いて説明する。Embodiments of the present invention will be described below with reference to the drawings.
【０００９】図１は、本発明の実施例を示す斜視図であ
り、電極を形成した圧電セラミック体を示したものであ
る。圧電セラミック体10は電極を形成した上下の面方向
（図１の破線で示した矢印の方向）に分極が施されてい
る。圧電セラミック体は四角柱に形成され、二つの対向
する側面すなわち図の上下の面に電極が形成されてい
る。FIG. 1 is a perspective view showing an embodiment of the present invention, showing a piezoelectric ceramic body having electrodes formed thereon. The piezoelectric ceramic body 10 is polarized in the upper and lower surface directions (directions of arrows shown by broken lines in FIG. 1) on which electrodes are formed. The piezoelectric ceramic body is formed in a quadrangular prism, and electrodes are formed on two opposing side surfaces, that is, the upper and lower surfaces in the figure.
【００１０】圧電セラミック体10の上面には、中央部の
縁の部分に沿って軸方向に伸びる二つの駆動電極11ａ、
11ｂが配置される。同様に下面にも、中央部の縁の部分
に沿って軸方向に伸びる二つの駆動電極12ａ、12ｂが形
成される。この駆動電極間に駆動電圧を印加して、分極
方向に対して直角な方向（図の実線の矢印方向）に屈曲
振動を生じさせるものである。On the upper surface of the piezoelectric ceramic body 10, two drive electrodes 11a extending in the axial direction along the edge of the central portion,
11b is placed. Similarly, two drive electrodes 12a and 12b extending in the axial direction along the edge of the central portion are also formed on the lower surface. A driving voltage is applied between the driving electrodes to generate bending vibration in a direction (arrow direction indicated by a solid line in the figure) perpendicular to the polarization direction.
【００１１】上下の面には駆動電極の両端面側に各側面
に二個ずつの検出電極を形成する。すなわち、上面で
は、駆動電極11ａと11ｂの外側（端面側）に検出電極13
ａ、13ｂを配置し、下面にも同様に検出電極14ａ、14ｂ
を配置する。検出電極13ａと14ａ、13ｂと14ｂが対向し
て位置するように配置される。なお、駆動電極11、12は
屈曲振動の節となる点の中央側に形成し、検出電極13、
14はその端面側に形成すると検出効率を高くすることが
できる。On the upper and lower surfaces, two detection electrodes are formed on each side surface on both end surfaces of the drive electrode. That is, on the upper surface, the detection electrode 13 is provided on the outer side (end surface side) of the drive electrodes 11a and 11b.
a and 13b are arranged, and detection electrodes 14a and 14b are similarly provided on the lower surface.
To place. The detection electrodes 13a and 14a and 13b and 14b are arranged so as to face each other. The drive electrodes 11 and 12 are formed on the center side of the node serving as the node of the flexural vibration, and the detection electrodes 13 and
If 14 is formed on the end face side, the detection efficiency can be increased.
【００１２】図２は、本発明による圧電振動ジャイロの
駆動回路と検出回路の説明図である。発振回路15の出力
によって所定の周波数（圧電セラミック体の共振周波
数）の駆動電圧を駆動電極に印加する。この際、駆動電
極11ａと駆動電極12ｂが同相になり、駆動電極11ｂと駆
動電極12ａが同相となるように結線してある。これを圧
電セラミック体の屈曲一次の共振周波数で駆動すると、
駆動電極11ａ、12ａ側と駆動電極11ｂ、12ｂ側とでは逆
位相となるため、伸びと縮みが逆相で生じる。これによ
って、分極方向に対して直角な方向に屈曲振動が生じ
る。FIG. 2 is an explanatory diagram of a drive circuit and a detection circuit of the piezoelectric vibration gyro according to the present invention. A drive voltage having a predetermined frequency (resonance frequency of the piezoelectric ceramic body) is applied to the drive electrode by the output of the oscillation circuit 15. At this time, the drive electrode 11a and the drive electrode 12b are connected in phase, and the drive electrode 11b and the drive electrode 12a are connected in phase. When this is driven at the bending primary resonance frequency of the piezoelectric ceramic body,
Since the drive electrodes 11a and 12a and the drive electrodes 11b and 12b have opposite phases, expansion and contraction occur in opposite phases. This causes bending vibration in a direction perpendicular to the polarization direction.
【００１３】上記の状態で、角速度が加わる（回転が生
じる）と、圧電セラミック体の上下面方向にコリオリ力
が生じる。このコリオリ力は検出電極13、14の方向に生
じるので、検出電極13、14にそれに応じた出力電圧が生
じる。これを、検出回路16で検出し、増幅して角速度を
検出する。なお、検出電極の出力を発振回路15にフィー
ドバックをかけておく。When an angular velocity is applied (rotation occurs) in the above state, Coriolis force is generated in the upper and lower surfaces of the piezoelectric ceramic body. Since this Coriolis force is generated in the direction of the detection electrodes 13 and 14, an output voltage corresponding to it is generated in the detection electrodes 13 and 14. This is detected by the detection circuit 16 and amplified to detect the angular velocity. The output of the detection electrode is fed back to the oscillation circuit 15.
【００１４】なお、駆動電極と検出電極の配置や形状は
上記の例に限られるものではなく、屈曲振動を生じさせ
るような駆動電極の配置、コリオリ力を検出できるよう
な検出電極の配置を任意に選択することができる。The arrangements and shapes of the drive electrodes and the detection electrodes are not limited to the above examples, and the arrangement of the drive electrodes which causes bending vibration and the arrangement of the detection electrodes which can detect the Coriolis force are arbitrary. Can be selected.
【００１５】本発明による圧電振動ジャイロにおいて
は、圧電セラミック体の側面の研磨が可能であるので、
高い精度の加工が可能となり、それによって直交する方
向の共振周波数をほぼ完全に一致させることができる。
これによって、従来の圧電セラミック板を貼り付けたも
のと異なり、コリオリ力を検出する面でのノイズを非常
に小さくすることができ、Ｓ／Ｎ比が向上する。In the piezoelectric vibrating gyroscope according to the present invention, since the side surface of the piezoelectric ceramic body can be polished,
High-precision processing becomes possible, and thereby the resonance frequencies in the orthogonal directions can be almost completely matched.
As a result, unlike the conventional one in which a piezoelectric ceramic plate is attached, noise on the surface for detecting the Coriolis force can be made extremely small, and the S / N ratio is improved.
【００１６】[0016]
【発明の効果】本発明によれば、分極方向の二表面にそ
れぞれ二つの駆動電極と一つの検出電極を形成するの
で、側面への電極形成が不要となり、量産性が大幅に向
上する。また、圧電セラミック板のウェハの状態で分
極、電極形成処理工程を行うことができる。According to the present invention, since two drive electrodes and one detection electrode are formed on each of the two surfaces in the polarization direction, there is no need to form electrodes on the side surfaces, and mass productivity is greatly improved. In addition, the polarization and electrode formation processing steps can be performed in the state of the wafer of the piezoelectric ceramic plate.
【００１７】また、共振周波数の合わせ込みも容易とな
り、検出精度の良好な圧電振動ジャイロが得られる。そ
の上、接着を必要としないので、検出効率、信頼性等の
面でも有利となる。Further, the resonance frequencies can be easily adjusted, and a piezoelectric vibrating gyro with good detection accuracy can be obtained. Moreover, since no adhesion is required, it is advantageous in terms of detection efficiency and reliability.
【００１８】更に、屈曲振動の変位量の大きい両端部に
検出電極を設けているので、コリオリ力の検出効率を高
めることができる。Further, since the detection electrodes are provided at both ends where the amount of bending vibration displacement is large, the Coriolis force detection efficiency can be improved.
【図１】 本発明の実施例の斜視図FIG. 1 is a perspective view of an embodiment of the present invention.
【図２】 本発明による圧電振動ジャイロの駆動回路の
一例の説明図FIG. 2 is an explanatory diagram of an example of a drive circuit for a piezoelectric vibration gyro according to the present invention.
11、12：駆動電極 13、14：検出電極 11, 12: Drive electrode 13, 14: Detection electrode
─────────────────────────────────────────────────────
─────────────────────────────────────────────────── ───
【手続補正書】[Procedure amendment]
【提出日】平成６年１０月２８日[Submission date] October 28, 1994
【手続補正１】[Procedure Amendment 1]
【補正対象書類名】明細書[Document name to be amended] Statement
【補正対象項目名】０００５[Name of item to be corrected] 0005
【補正方法】変更[Correction method] Change
【補正内容】[Correction content]
【０００５】[0005]
【課題を解決するための手段】本発明は、四角柱の圧電
セラミック体を用い、その対向する二側面に形成する電
極のみで駆動、検出が可能な圧電振動ジャイロを得るこ
とによって、上記の課題を解決するものである。SUMMARY OF THE INVENTION The present invention provides a piezoelectric vibrating gyro which can be driven and detected only by electrodes formed on two opposite side surfaces of a quadrangular prism-shaped piezoelectric ceramic body. Is the solution.
【手続補正２】[Procedure Amendment 2]
【補正対象書類名】明細書[Document name to be amended] Statement
【補正対象項目名】０００７[Correction target item name] 0007
【補正方法】変更[Correction method] Change
【補正内容】[Correction content]
【０００７】[0007]
【作用】電極の形成される二つの側面間で分極された圧
電セラミック体の駆動電極に駆動電圧を印加すると、分
極の方向に対して直角の方向に屈曲振動が生じる。この
状態で、回転運動（角速度）が加わると、圧電セラミッ
ク体の分極方向にコリオリ力を生じ、これを同じ対向す
る側面に配置された検出電極によって検出するものであ
る。When a driving voltage is applied to the driving electrode of the piezoelectric ceramic body which is polarized between the two side surfaces on which the electrodes are formed, bending vibration occurs in the direction perpendicular to the direction of polarization. When a rotary motion (angular velocity) is applied in this state, a Coriolis force is generated in the polarization direction of the piezoelectric ceramic body, and this is detected by the detection electrodes arranged on the same opposing side surfaces.
【手続補正３】[Procedure 3]
【補正対象書類名】明細書[Document name to be amended] Statement
【補正対象項目名】００１５[Name of item to be corrected] 0015
【補正方法】変更[Correction method] Change
【補正内容】[Correction content]
【００１５】本発明による圧電振動ジャイロにおいて
は、駆動・検出電極を設けていない圧電セラミック体の
側面の研磨が可能であるので、高い精度の加工が可能と
なり、それによって直交する方向の共振周波数をほぼ完
全に一致させることができる。これによって、従来の圧
電セラミック板を貼り付けたものと異なり、コリオリ力
を検出する面のノイズを非常に小さくすることができ、
Ｓ／Ｎ比が向上する。In the piezoelectric vibrating gyroscope according to the present invention, since it is possible to polish the side surface of the piezoelectric ceramic body not provided with the drive / detection electrodes, it is possible to perform processing with high accuracy, and thereby the resonance frequency in the orthogonal direction can be obtained. Can be matched almost perfectly. This makes it possible to reduce the noise on the surface that detects the Coriolis force to a very low level, unlike the conventional piezoelectric ceramic plate.
The S / N ratio is improved.
───────────────────────────────────────────────────── フロントページの続き (72)発明者 小川 高浩 埼玉県比企郡玉川村大字玉川字日野原828 番地 東光株式会社玉川工場内 (72)発明者 高野 勝好 埼玉県比企郡玉川村大字玉川字日野原828 番地 東光株式会社玉川工場内 ─────────────────────────────────────────────────── ─── Continuation of the front page (72) Inventor Takahiro Ogawa 828 Hinohara, Hamahara, Tamagawa-mura, Hiki-gun, Saitama Prefecture Inside the Tamagawa factory, Toko Co., Ltd. Toko Co., Ltd. Tamagawa factory
Claims (2)
て得る圧電振動ジャイロにおいて、回転を検出する素子
は圧電セラミック体であり、四角柱の圧電セラミック体
の対向する二つの側面の中央部にそれぞれ縁に沿って伸
びる各二つの駆動電極を具え、その二つの駆動電極の当
該側面の両端面側にそれぞれ対向する側面の電極と対向
して配置された検出電極を具えたことを特徴とする圧電
振動ジャイロ。1. In a piezoelectric vibrating gyroscope that obtains a displacement of a piezoelectric body due to rotation as a voltage output, an element for detecting rotation is a piezoelectric ceramic body, and each of the square pillar piezoelectric ceramic bodies has a central portion on two opposite side surfaces. Piezoelectric device characterized by comprising two drive electrodes extending along an edge, and provided with detection electrodes arranged to face electrodes on opposite side faces of both side faces of the two drive electrodes, respectively. Vibrating gyro.
成され、検出電極がその節点の端面側に形成された請求
項１記載の圧電振動ジャイロ。2. The piezoelectric vibration gyro according to claim 1, wherein the drive electrode is formed on the center side of the node of the flexural vibration, and the detection electrode is formed on the end face side of the node.
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP5249815A JPH0783668A (en) | 1993-09-10 | 1993-09-10 | Piezoelectric vibration gyro |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP5249815A JPH0783668A (en) | 1993-09-10 | 1993-09-10 | Piezoelectric vibration gyro |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| JPH0783668A true JPH0783668A (en) | 1995-03-28 |
Family
ID=17198614
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP5249815A Pending JPH0783668A (en) | 1993-09-10 | 1993-09-10 | Piezoelectric vibration gyro |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPH0783668A (en) |
Cited By (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN102297689A (en) * | 2011-07-22 | 2011-12-28 | 上海交通大学 | Electrostatically driven piezoelectric detection closed loop controlled micro-solid modal gyro |
-
1993
- 1993-09-10 JP JP5249815A patent/JPH0783668A/en active Pending
Cited By (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN102297689A (en) * | 2011-07-22 | 2011-12-28 | 上海交通大学 | Electrostatically driven piezoelectric detection closed loop controlled micro-solid modal gyro |
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